JP4289304B2 - Piezoelectric actuator, inkjet printer head, and manufacturing method thereof - Google Patents

Description

The present invention relates to a piezoelectric actuator , an ink jet printer head using the same, and a method for manufacturing the same.

U.S. Pat. No. 5,402,159 as prior art describes a cavity plate having a plurality of nozzles and pressure chambers for each nozzle, a drive electrode formed for each pressure chamber, and an adjacent one. A plate-type piezoelectric actuator having a piezoelectric sheet sandwiched between common electrodes common to the pressure chambers. The piezoelectric actuator corresponds to the cavity plate, and each drive electrode in the piezoelectric actuator corresponds to each pressure chamber. In this way, a piezoelectric ink jet printer head that is laminated is proposed.

JP 2003-499998 A

In this prior art piezoelectric ink jet printer head, the FIG. 15, side electrodes that are electrically connected to at least the drive electrodes are formed on the side surfaces orthogonal to the front and back surfaces of the piezoelectric actuator, and the drive electrodes are connected to the side electrodes. It is configured to connect to the outside via

The present invention is technically to provide a piezoelectric actuator with an improved electrical connection of the surface electrode of the wiring pattern and the piezoelectric actuator for the external connection, an ink jet printer head using the same, and methods of making these It is to be an issue.

The piezoelectric actuator according to the first aspect of the present invention is configured by laminating a piezoelectric sheet between electrodes, and has a surface electrode electrically connected to the electrode on the surface, and the surface electrode includes an external device. The wiring pattern for connection to the piezoelectric actuator is electrically connected, and the wiring pattern is provided on a flexible flat cable that is lap-joined to the piezoelectric actuator, and the electrode, the piezoelectric sheet, and the surface electrode are connected to the piezoelectric actuator. A metal plating layer is formed on the surface electrode of the laminated body that is baked and integrated, to which the wiring pattern is electrically connected.

As an inkjet printer head using this piezoelectric actuator, a cavity plate having a plurality of nozzles and a pressure chamber for each nozzle, a drive electrode for each pressure chamber, and a common electrode common to adjacent pressure chambers A piezoelectric actuator provided on the surface with a surface electrode electrically connected to the drive electrode and the common electrode, and for connection to an external device electrically connected to the surface electrode The wiring pattern is provided on a flexible flat cable that is overlapped and bonded to a surface of the piezoelectric actuator opposite to the cavity plate, and the piezoelectric actuator is attached to the cavity plate. to respond to the drive electrodes each pressure chamber in the piezoelectric actuator Ink jet printer head formed by laminating such is preferred.

  In the above-described configuration, the piezoelectric actuator preferably has an insulating sheet further laminated on the piezoelectric sheet, and the surface electrode is formed on the insulating sheet. Further, preferably, the electrode and the surface electrode are electrically connected by a side electrode formed in the stacking direction of the piezoelectric sheet and the insulating sheet.

Preferably, one of the electrodes sandwiching the piezoelectric sheet is a plurality of drive electrodes, the other is a common electrode common to a plurality of drive electrodes, and the surface electrode is the drive electrode. And arranged on the surface of the piezoelectric actuator corresponding to the common electrode and the common electrode, respectively. A metal plating layer is formed on the surface electrode to which the wiring pattern is electrically connected, of the laminate in which the electrode, the piezoelectric sheet and the surface electrode in the actuator are integrated by firing.

  As a method of manufacturing the piezoelectric actuator, after the electrodes, the piezoelectric sheet, and the surface electrode are sintered and integrated, a metal plating layer is formed on the surface electrode to which the wiring pattern is electrically connected by electroplating. .

  Further, preferably, a narrow electrode pattern that electrically connects a plurality of the surface electrodes is formed, and the electroplating is performed by energizing the surface electrode through the narrow electrode pattern, Thereafter, the narrow electrode pattern is removed.

  The piezoelectric actuator itself includes a piezoelectric sheet having a plurality of drive electrodes as one of the electrodes, and a piezoelectric sheet having a common electrode common to a plurality of drive electrodes as the other of the electrodes. The insulating sheet on which the surface electrode is formed is laminated and baked to be integrated.

More specifically, in the same manner as the step of forming a plurality of drive electrodes at the location of each piezoelectric sheet in the surface of the first material sheet in which a plurality of piezoelectric sheets constituting one piezoelectric actuator are arranged and integrated. Forming a common electrode corresponding to a plurality of the drive electrodes at a position of each piezoelectric sheet in a surface of a second material sheet obtained by arranging and integrating a plurality of piezoelectric sheets constituting one piezoelectric actuator ; Forming a surface electrode corresponding to each of the drive electrodes at a location of each of the insulating sheets among the surfaces of the third material sheet integrated with a plurality of insulating sheets constituting one piezoelectric actuator ; Forming a narrow electrode pattern for electrically connecting the surface electrodes to each other; and the first material sheet and the second material sheet A step of alternately laminating at least one sheet and laminating the third material sheet thereon to form a laminated body, and a side surface extending in the laminating direction of the laminated body at each end of the drive electrode and the common electrode The step of electrically connecting to the surface electrode by an electrode, the step of firing the laminate, and the narrow electrode pattern on the surface electrode to which the wiring pattern is electrically connected after the firing step forming by electro-plating a metal plating layer is energized through the after forming the metal plating layer, cutting the laminate to each of said piezoelectric actuators along the boundary lines between the respective piezoelectric actuators And a step of removing the narrow electrode pattern in accordance with the cutting operation.

And as an ink jet printer head, the piezoelectric actuator is laminated on the cavity plate so that each drive electrode in the piezoelectric actuator corresponds to each pressure chamber, and the flexible flat cable is pressed repeatedly. It is manufactured by electrically joining the wiring pattern and the surface electrode .

As described above, the piezoelectric actuator and the ink jet printer head according to the present invention are formed by stacking the electrode, the piezoelectric sheet, and the surface electrode on the surface electrode to which the wiring pattern is electrically connected. Since the plating layer is formed, the electrical bondability of each wiring pattern to each surface electrode can be greatly improved.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

  1 to 7 show a piezoelectric ink jet printer head.

In this figure, reference numeral 10 denotes a cavity plate made of a metal plate, reference numeral 20 denotes a plate-type piezoelectric actuator laminated on the cavity plate 10, and reference numeral 40 denotes a connection with an external device. For this reason, each of the flexible flat cables to be lap bonded to the piezoelectric actuator 20 is shown.

  The cavity plate 10 is configured as shown in FIGS.

  That is, it is a structure in which five thin metal plates of a nozzle plate 11, two manifold plates 12, a spacer plate 13, and a base plate 14 are laminated.

  In the nozzle plate 11, a large number of nozzles 15 for ejecting ink with a small diameter are formed at intervals of a minute pitch P along the longitudinal center line 11 a of the nozzle plate 11. The two manifold plates 12 are formed with ink passages 12a extending along both sides of the row of the nozzles 15. The ink passages 12a are connected to the nozzle plates 11 and the two manifold plates 12, respectively. The structure is sealed by stacking the spacer plates 13.

  The base plate 14 is provided with a plurality of narrow pressure chambers 16 extending in a direction perpendicular to the longitudinal center line 14a. The pressure chambers 16 are alternately provided so that the tips 16a thereof are located on the longitudinal center line 14a and every other chamber extends in opposite directions. The tip 16a of each pressure chamber 16 communicates with the nozzle 15 in the nozzle plate 11 through a small-diameter through hole 17 formed in the spacer plate 13 and both manifold plates 12. The other end 16 b of each pressure chamber 16 communicates with the ink passage 12 a in both the manifold plates 12 through a through hole 18 formed in the spacer plate 13.

  As a result, the ink that has flowed into the ink passage 12a from the supply holes 19a and 19b formed at one end of the spacer plate 13 and the base plate 14 passes through the ink passage 12a into the pressure chambers 16 respectively. After being distributed through the holes 18, the nozzles 15 corresponding to the pressure chambers 16 are reached from the pressure chambers 16 through the through holes 17.

On the other hand, the piezoelectric actuator 20 has a structure in which two piezoelectric sheets 21 and 22 and one insulating sheet 23 are laminated, as shown in FIG. On the upper surface of the piezoelectric sheet 21, a narrow driving electrode 24 is provided for each location of each pressure chamber 16 in the cavity plate 10, and one end 24 a of the driving electrode 24 is formed on both the front and back laminated surfaces 20 a of the piezoelectric actuator 20. It is formed so as to be exposed on the left and right side surfaces 20c orthogonal to 20b.

A common electrode 25 common to a plurality of the plurality of pressure chambers 16 is exposed on the upper surface of the piezoelectric sheet 22 at the next stage, and one end portion 25a of the common electrode 25 is exposed to the left and right side surfaces 20c of the piezoelectric actuator 20. It is formed to do.

On the upper surface of the uppermost insulating sheet 23, a surface electrode 26 for each of the drive electrodes 24 and a surface electrode 27 for the common electrode 25 are arranged along the left and right side surfaces 20 c of the piezoelectric actuator 20. Is provided.

  Note that reference numerals 28 and 29 are electrodes of a discarded pattern.

In the left and right side surfaces 20c perpendicular to the front and back surfaces 20a and 20b of the piezoelectric actuator 20, a first recessed groove 30 is formed at one end portion 24a of each drive electrode 24 and one end of the common electrode 25. Second recessed grooves 31 are provided in the portion 25a so as to extend in the stacking direction, and in each of the first recessed grooves 30, the drive electrodes 24 and the surface electrodes 26 thereof are provided. Side electrodes 32 that electrically connect the common electrode 25 and the surface electrode 27 are formed in the second recessed groove 31, respectively.

In the illustrated embodiment, the piezoelectric actuator 20 is a case where the piezoelectric sheet 21 provided with the drive electrode 24 and the piezoelectric sheet 22 provided with the common electrode 25 are paired, and only one pair is laminated. In the present invention, the present invention is not limited to this, and a plurality of pairs of the piezoelectric sheet 21 provided with the drive electrode 24 and the piezoelectric sheet 22 provided with the common electrode 25 may be laminated.

In the plate-type piezoelectric actuator 20 having such a configuration, each drive electrode 24 in the piezoelectric actuator 20 corresponds to each pressure chamber 16 in the cavity plate 10 with respect to the cavity plate 10. Is laminated. Further, when the flexible flat cable 40 is pressed against the upper surface 20a of the piezoelectric actuator 20, various wiring patterns (not shown) in the flexible flat cable 40 are transferred to the surface electrodes 26, 27 is electrically joined.

In this configuration, by applying a voltage between an arbitrary drive electrode 24 among the drive electrodes 24 in the piezoelectric actuator 20 and the common electrode 25, the drive electrode to which the voltage is applied among the piezoelectric sheets 21 and 22. A distortion in the stacking direction due to piezoelectricity is generated in the portion 24, and the internal volume of the pressure chamber 16 corresponding to each drive electrode 24 is reduced by this distortion. Are ejected in the form of droplets, and predetermined printing is performed.

In the piezoelectric actuator 20 having the above-described configuration, the side electrodes 32 and 33 on the side surface 20c are formed in the recessed grooves 30 and 31 provided on the side surface 20c. The protrusion from 20c can be prevented, or the protrusion from the side face 20c can be reduced. As a result, during the manufacture of the piezoelectric actuator 20 or during the assembly of the piezoelectric actuator 20, the side electrodes 32 and 33 are caused to come into contact with the side electrodes 32 and 33 due to the contact of the handlers or jigs. Damage can be reliably reduced.

The piezoelectric actuator 20 having the above-described configuration is manufactured by the method described below.

  8 to 13 show a first manufacturing method.

In FIG. 8, reference numeral 210 denotes a first material sheet (ceramic green sheet) formed by arranging and integrating a plurality of piezoelectric sheets 21 in the one piezoelectric actuator 20 in a matrix shape. A plurality of drive electrodes 24 and discarded pattern electrodes 28 are formed on the surface of each piezoelectric sheet 21 by screen-printing a conductive paste made of this material and then drying.

Similarly, reference numeral 220 denotes a second material sheet (ceramic green sheet) obtained by arranging and integrating a plurality of piezoelectric sheets 22 in the one piezoelectric actuator 20 in a matrix shape. Among them, the common electrode 25 and the discarded pattern electrode 29 are formed on each piezoelectric sheet 22 by screen-printing a conductive paste as the material and then drying.

Further, reference numeral 230 indicates a third material sheet (ceramic green sheet) formed by arranging and integrating a plurality of insulating sheets 23 in the one piezoelectric actuator 20 in a matrix, and on the surface of the third material sheet 230. Of these, the surface electrodes 26 and 27 are formed on the respective insulating sheets 23 by screen-printing a conductive paste as a material thereof and then drying.

  In addition, a blank portion is integrally provided around each of the material sheets 210, 220, and 230.

  Next, as shown in FIGS. 9 and 10, the first material sheet 210, the second material sheet 220, and the third material sheet 230 are laminated in that order, and then integrated by pressing in the laminating direction, A single laminate A is formed.

  Next, through holes (through holes) are formed on the boundary lines A1 and A2 between the piezoelectric sheets 21 and 22 and the insulating sheet 23 in the laminated body A, and at the positions of the surface electrodes 26 and 27, respectively. 300 and 310 are bored, and one end 24 a of each drive electrode 24 and one end 25 a of the common electrode 25 are exposed in the through holes 300 and 310.

  The through holes 300 and 310 are formed by punching with a punch. In addition, these through holes 300 and 310 may be previously drilled in each of the first, second and third material sheets 210, 220 and 230 before being laminated.

Next, the laminate A is fired at a high temperature, and then cut along the boundary lines A1 and A2 with a dicing cutter (not shown) that rotates at high speed, as shown in FIGS. Then, each piezoelectric actuator 20 is divided.

Due to this cutting, the left and right side surfaces 20c of the piezoelectric actuator 20 are provided with recessed grooves 30, 31 by the through holes 200, 310 so as to extend in the stacking direction.

Next, as shown in FIG. 13, side electrodes 32 and 33 are formed in the respective recessed grooves 3031 on the left and right side surfaces 20c of the piezoelectric actuator 20, thereby completing the piezoelectric actuator 20 having the structure shown in FIG. it can.

  Needless to say, the side electrodes 32 and 33 are formed by vacuum deposition or sputtering of metal in the recessed grooves 30 and 31 or application of a conductive paste.

  Next, FIGS. 14 to 16 show a manufacturing method according to the second embodiment.

In this manufacturing method, as shown in FIG. 14, conductive pastes 32 'and 33' are filled in the through holes 300 and 310 drilled in the laminate A and dried, and then the laminate A Is cut at each of the piezoelectric actuators 20 along the boundary lines A1 and A2, and then the conductive pastes 32 'and 33' in the through holes 300 and 310 are divided into left and right parts. To cut.

Accordingly, as shown in FIGS. 15 and 16, the side electrodes 32 and 33 on the side surface 20c of the piezoelectric actuator 20 can be formed in the recessed grooves 30 and 31 provided on the side surface 20c.

According to this method, as in the first manufacturing method, the cost can be reduced compared to the case where the side electrodes 32 and 33 are formed for each piezoelectric actuator after cutting.

  Furthermore, FIGS. 17 to 19 show a manufacturing method according to the third embodiment.

  In this manufacturing method, as shown in FIG. 17, the surface electrodes 26 and 27 are formed on the surface of the third material sheet 230 by screen printing of a conductive paste. Electrode patterns 340 and 350 having a narrow width W0 that electrically connect each other are formed so as to extend along the boundary lines A1 and A2, and the third material sheet 230 is formed of the first and second materials. The sheets 210 and 220 are laminated and integrated.

  Next, through holes 300 and 310 are drilled, and the through holes 300 and 310 are filled with conductive pastes 32 'and 33' and dried, as shown in FIG. Bake at high temperature.

  Next, the laminate A is immersed in a plating solution, and in this state, the surface electrodes 26 and 27 are energized through the narrow electrode patterns 340 and 350 to perform electroplating. As shown, metal plating layers 26 'and 27' are formed on the surfaces of the surface electrodes 26 and 27, respectively.

  The metal plating layers 26 ′ and 27 ′ are formed, for example, by forming a gold plating layer thereon with a nickel plating layer as a base. By forming the metal plating layers 26 ′ and 27 ′, each of the flexible flat cables 40 is formed. The electrical bonding property of the wiring pattern to the surface electrodes 26 and 27 can be greatly improved.

Next, when the laminate A is cut for each piezoelectric actuator 20 along each boundary line A1, A2 with a dicing cutter (not shown) that rotates at high speed, the cutting of the dicing cutter that performs this cutting is performed. The width W1 is made larger than the width dimension W0 of the electrode patterns 340 and 350 formed for the electroplating.

Thus, since the laminate A can be cut for each piezoelectric actuator 20 and the electrode patterns 340 and 350 can be removed simultaneously, the surface electrodes 26 and 27 and the side electrodes 32 and 33 are electrically connected to each other. Can be independent.

In the manufacturing method according to the third embodiment, instead of forming the side electrodes 32 and 33 by filling the through holes 300 and 310 with the conductive paste, the first embodiment is performed. Similarly to the manufacturing method according to the embodiment, it is needless to say that the piezoelectric actuators 20 may be formed in the recessed grooves 30 and 31 by metal vacuum deposition or the like after being cut.

It is a disassembled perspective view which shows a piezoelectric inkjet printer head. FIG. 2 is an enlarged perspective view showing one end portions of a cavity plate and a piezoelectric actuator in FIG. 1. FIG. 3 is an enlarged sectional view taken along the line III-III in FIG. 2. FIG. 4 is an enlarged cross-sectional view of a state where a cavity plate and a piezoelectric actuator are stacked in FIG. 3. 2 is an exploded perspective view of the cavity plate. FIG. FIG. 4 is a partially enlarged perspective view of the cavity plate. FIG. 3 is an exploded perspective view of the piezoelectric actuator . It is a perspective view which shows each raw material sheet | seat in a 1st manufacturing method. It is a perspective view which shows the laminated body of each said raw material sheet. FIG. 10 is an enlarged sectional view taken along line XX of FIG. 9. It is a perspective view which shows the piezoelectric actuator divided | segmented from the laminated body of the said FIG. FIG. 12 is a sectional view taken along line XII-XII in FIG. 11. It is sectional drawing when a side electrode is formed in the said piezoelectric actuator . It is sectional drawing which shows the laminated body in a 2nd manufacturing method. It is a perspective view which shows the piezoelectric actuator divided | segmented from the laminated body of the said FIG. FIG. 16 is a cross-sectional view taken along the line XVI-XVI in FIG. 15. It is a perspective view which shows the laminated body in a 3rd manufacturing method. FIG. 18 is a cross-sectional view taken along the line XVIII-XVIII in FIG. 17. It is sectional drawing which shows the state in which the metal plating layer was formed in the said 3rd manufacturing method.

DESCRIPTION OF SYMBOLS 10 Cavity plate 15 Nozzle 16 Pressure chamber 20 Piezoelectric actuator 21, 22 Piezoelectric sheet 23 Insulating sheet 24 Drive electrode 25 Common electrode 26, 27 Surface electrode 26 ', 27' Metal plating layer 32, 33 Side electrode 32 ', 33' Conductivity Paste 40 Flexible flat cable 210 First material sheet 220 Second material sheet 230 Third material sheet A Laminate A1, A2 Boundary lines 300, 310 Through holes 340, 350 Narrow electrode pattern

Claims (15)

It is composed by laminating a piezoelectric sheet between electrodes, and has a surface electrode electrically connected to the electrode on the surface, and a wiring pattern for connection to an external device is electrically connected to the surface electrode. A piezoelectric actuator,
The wiring pattern is provided on a flexible flat cable that is lap-joined to the piezoelectric actuator,
A piezoelectric actuator, wherein a metal plating layer is formed on a surface electrode to which the wiring pattern is electrically connected, of a laminate obtained by firing and integrating the electrode, the piezoelectric sheet, and the surface electrode.   The piezoelectric actuator according to claim 1, wherein an insulating sheet is further laminated on the piezoelectric sheet, and the surface electrode is formed on the insulating sheet.   The piezoelectric actuator according to claim 2, wherein the electrode and the surface electrode are electrically connected by a side electrode formed in a stacking direction of the piezoelectric sheet and the insulating sheet. One of the electrodes sandwiching the piezoelectric sheet is a plurality of drive electrodes, and the other is a common electrode common to the plurality of drive electrodes, and the surface electrode is connected to each of the drive electrodes and the common electrode, respectively. Correspondingly, the piezoelectric actuator according to any one of claims 1 to 3 , wherein the piezoelectric actuator is arranged on the surface of the piezoelectric actuator. A plurality of nozzles and a cavity plate having a pressure chamber for each nozzle, a driving electrode for each pressure chamber, and a common electrode common to adjacent pressure chambers are stacked with a piezoelectric sheet interposed therebetween, and the driving electrode and a piezoelectric actuator provided with the electrical connection surface electrode surface to a common electrode, the surface electrode is electrically connected to, composed of a wiring pattern for connection to an external device, the piezoelectric actuator, the An ink jet printer head in which each drive electrode in the piezoelectric actuator is laminated on a cavity plate so as to correspond to each pressure chamber,
The wiring pattern is provided on a flexible flat cable that is overlapped and bonded to the surface of the piezoelectric actuator opposite to the cavity plate,
A metal plating layer is formed on a surface electrode to which the wiring pattern is electrically connected in a laminate obtained by firing and integrating the electrode, the piezoelectric sheet and the surface electrode in the piezoelectric actuator, and the wiring pattern An ink jet printer head , wherein the surface electrode is electrically joined . 6. The inkjet according to claim 5 , wherein the piezoelectric actuator further includes an insulating sheet laminated on a side of the piezoelectric sheet opposite to the cavity plate, and the surface electrode is formed on the insulating sheet. Printer head. The pressure chamber is formed in two rows, according to claim 5 or 6 wherein the surface electrode and the surface electrode corresponding to the common electrode is characterized in that it is formed in two rows corresponding to the driving electrode Inkjet printer head. It is composed by laminating a piezoelectric sheet between electrodes, and has a surface electrode electrically connected to the electrode on the surface, and a wiring pattern for connection to an external device is electrically connected to the surface electrode. In the manufacturing method of the piezoelectric actuator
The wiring pattern is provided on a flexible flat cable that is lap-joined to the piezoelectric actuator,
After the electrodes, the piezoelectric sheet and the surface electrode are fired and integrated, a metal plating layer is formed by electroplating on the surface electrode to which the wiring pattern is electrically connected. Method. A narrow electrode pattern for electrically connecting a plurality of the surface electrodes is formed, and the electroplating is performed by energizing the surface electrode through the narrow electrode pattern, and then the fine electrode pattern is formed. 9. The method of manufacturing a piezoelectric actuator according to claim 8 , wherein the electrode pattern having a width is removed. A piezoelectric sheet having a plurality of drive electrodes as one of the electrodes, a piezoelectric sheet having a common electrode common to a plurality of drive electrodes as the other of the electrodes, and an insulation having the surface electrode formed The method for manufacturing a piezoelectric actuator according to claim 8 or 9 , wherein the sheet is laminated and fired to be integrated. It is composed by laminating a piezoelectric sheet between electrodes, and has a surface electrode electrically connected to the electrode on the surface, and a wiring pattern for connection to an external device is electrically connected to the surface electrode. In the manufacturing method of the piezoelectric actuator
The wiring pattern is provided on a flexible flat cable that is lap-joined to the piezoelectric actuator,
A step of forming a plurality of drive electrodes at the location of each of the piezoelectric sheets in the surface of the first material sheet in which a plurality of piezoelectric sheets constituting one piezoelectric actuator are arranged and integrated;
Forming a common electrode corresponding to a plurality of the drive electrodes at the location of each piezoelectric sheet of the surface of the second material sheet in which the plurality of piezoelectric sheets constituting the same piezoelectric actuator are arranged and integrated;
Forming a surface electrode corresponding to each of the drive electrodes at a location of each of the insulating sheets among the surfaces of the third material sheet integrated with a plurality of insulating sheets constituting one piezoelectric actuator ; and
Forming a narrow electrode pattern for electrically connecting the surface electrodes to each other;
Alternately laminating at least one of the first material sheet and the second material sheet, and laminating the third material sheet to form a laminate;
Electrically connecting one end of each of the drive electrode and the common electrode to the surface electrode by a side electrode extending in the stacking direction of the stacked body;
Firing the laminate;
After the firing step, forming a metal plating layer by electroplating by energizing the surface electrode to which the wiring pattern is electrically connected via the narrow electrode pattern;
After forming the metal plating layer, cutting the laminated body for each piezoelectric actuator along a boundary line between the piezoelectric actuators, and removing the narrow electrode pattern in accordance with the cutting operation; A method for manufacturing a piezoelectric actuator comprising: A plurality of nozzles and a cavity plate having a pressure chamber for each nozzle, a driving electrode for each pressure chamber, and a common electrode common to adjacent pressure chambers are stacked with a piezoelectric sheet interposed therebetween, and the driving electrode And a piezoelectric actuator having a surface electrode electrically connected to the common electrode on the surface and a piezoelectric actuator having a wiring pattern for connection to an external device electrically connected to the surface electrode. A method of manufacturing an inkjet printer head comprising a flexible flat cable , wherein the piezoelectric actuator is laminated on the cavity plate so that each drive electrode in the piezoelectric actuator corresponds to each pressure chamber,
After firing and integrating the drive electrode, common electrode, piezoelectric sheet and surface electrode in the piezoelectric actuator to form a laminated body, a metal plating layer is formed on the surface electrode to which the wiring pattern is electrically connected And thereafter electrically connecting the wiring pattern and the surface electrode . A narrow electrode pattern for electrically connecting a plurality of the surface electrodes is formed, and the electroplating is performed by energizing the surface electrode through the narrow electrode pattern, and then the fine electrode pattern is formed. 13. The method of manufacturing an ink jet printer head according to claim 12 , wherein the electrode pattern having a width is removed. A piezoelectric sheet forming the drive electrodes, and the piezoelectric sheet forming the common electrode, wherein laminating the insulating sheet to form a surface electrode, be integrated by firing to claim 12 or 13, characterized in A method for manufacturing the inkjet printer head according to claim. A plurality of nozzles and a cavity plate having a pressure chamber for each nozzle, a driving electrode for each pressure chamber, and a common electrode common to adjacent pressure chambers are stacked with a piezoelectric sheet interposed therebetween, and the driving electrode And a piezoelectric actuator having a surface electrode electrically connected to the common electrode on the surface and a piezoelectric actuator having a wiring pattern for connection to an external device electrically connected to the surface electrode. An inkjet printer head manufacturing method comprising a flexible flat cable ,
A step of forming a plurality of drive electrodes at the location of each of the piezoelectric sheets in the surface of the first material sheet in which a plurality of piezoelectric sheets constituting one piezoelectric actuator are arranged and integrated;
Forming a common electrode corresponding to a plurality of the drive electrodes at the location of each piezoelectric sheet of the surface of the second material sheet in which the plurality of piezoelectric sheets constituting the same piezoelectric actuator are arranged and integrated;
Forming a surface electrode corresponding to each of the drive electrodes at a location of each of the insulating sheets among the surfaces of the third material sheet integrated with a plurality of insulating sheets constituting one piezoelectric actuator ; and
Forming a narrow electrode pattern for electrically connecting the surface electrodes to each other;
Alternately laminating at least one of the first material sheet and the second material sheet, and laminating the third material sheet to form a laminate;
Electrically connecting one end of each of the drive electrode and the common electrode to the surface electrode by a side electrode extending in the stacking direction of the stacked body;
Firing the laminate;
After the firing step, forming a metal plating layer by electroplating by energizing the surface electrode to which the wiring pattern is electrically connected via the narrow electrode pattern;
After forming the metal plating layer, cutting the laminated body for each piezoelectric actuator along a boundary line between the piezoelectric actuators , and removing the narrow electrode pattern in accordance with the cutting operation; Laminating the piezoelectric actuator on the cavity plate such that each drive electrode of the piezoelectric actuator corresponds to each pressure chamber;
Electrically bonding the wiring pattern and the surface electrode by overlappingly pressing the flexible flat cable to the piezoelectric actuator;
An ink jet printer head manufacturing method comprising:

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