JP4280312B2 - Probe unit - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a probe unit that inspects a substrate to be measured by bringing a contactor into contact with a large number of electrodes arranged at the periphery of a rectangular substrate to be measured.
[0002]
[Prior art]
In a liquid crystal prober, a unit in which contacts (probe needles, etc.) are positioned and fixed so that all the electrodes (TAB pads) of a liquid crystal display panel substrate (hereinafter referred to as a liquid crystal substrate) are in contact with each other is called a probe unit. It is out. In this way, the probe unit is distinguished from the probe card used in the wafer prober.
[0003]
FIG. 8 is a plan view of a conventional probe unit for inspecting a rectangular liquid crystal substrate, and FIG. 9 is a side sectional view thereof (sectional view taken along line AA in FIG. 8). A plurality of probe blocks 12 are accurately positioned and fixed to the rectangular frame-shaped probe base 10 with screws or the like. A large number of probe needles for contacting the electrodes (TAB pads) of the liquid crystal substrate 18 are grouped in TAB units, and each group is attached to one probe block 12. One end of a flexible wiring board 14 is connected to the rear end of the probe block 12, and a connector 16 is connected to the other end of the flexible wiring board 14. This connector 16 is connected to a tester. The probe block 12 may be provided with a position adjusting mechanism for finely adjusting the attachment position of the probe needle with respect to the probe block.
[0004]
FIG. 10 is an example of a wiring diagram formed on the liquid crystal substrate. This figure shows a wiring state of a quarter region sandwiched between vertical and horizontal center lines 30 and 32 of the liquid crystal substrate. The data line 20 extending in the vertical direction has TAB pads 22 for signal input alternately at both ends thereof. These pads 22 are grouped in units of TAB, and are integrated so as to conform to the pitch of the TAB wiring pattern. The region 24 in which the pads 22 are aggregated in this way is hereinafter referred to as a pad region. The gate line 26 extending in the horizontal direction has a pad region 28 at either the left or right end (left end in FIG. 10).
[0005]
The dimension of the pad area 24 of the data line 20 in the pad arrangement direction is Wx, and the interval between adjacent pad areas 24 is X1. The pad region 28 of the gate line 26 has a dimension in the pad arrangement direction Wy, and the interval between the adjacent pad regions 26 is Y1.
[0006]
FIG. 11 is a plan view showing an arrangement example of pad areas of the liquid crystal substrate. In the liquid crystal substrate 18, four data line pad regions 24 are arranged on each side along two opposing X sides 34 (sides extending in the X direction). In addition, three pad regions 28 of the gate line are arranged along one Y side 36 (side extending in the Y direction). The center-to-center distance (that is, pitch) of the pad area 24 on the X side 34 is Px, and the center-to-center distance of the pad area 28 on the Y side 36 is Py. This liquid crystal substrate is called a double tab type liquid crystal substrate because the pad region 24 for the data line is formed on the X sides 34 on both sides. On the other hand, a structure in which the pad region 24 is formed only on one X side 34 is called a one-tab type liquid crystal substrate. That is, the two tab-type liquid crystal substrates have pad areas on two X sides and one Y piece, and the one tab type liquid crystal substrate has pad areas on one X piece and one Y piece.
[0007]
FIG. 12 is a plan view showing the difference in the position of the pad region due to the difference in size of liquid crystal substrates of the same format (for example, SVGA format). Even if the liquid crystal substrates of the same type have different sizes, TABs having the same wiring pitch are used, so that the pad areas have the same dimensions. However, the interval between adjacent pad regions is different. That is, on the X side, the spacing between the adjacent pad regions 24 is X1 in the 10-inch liquid crystal substrate 18a, but this extends to X2 in the 11-inch liquid crystal substrate 18b, and further extends to X3 in the 12-inch liquid crystal substrate 18c. Accordingly, the center-to-center distance (pitch) of the pad region 24 also varies depending on the size of the liquid crystal substrate. Similarly, on the Y side, the interval between adjacent pad regions 28 is Y1 in the 10-inch liquid crystal substrate 18a, but this extends to Y2 in the 11-inch liquid crystal substrate 18b, and further extends to Y3 in the 12-inch liquid crystal substrate 18c. . The TAB to be used differs depending on the board manufacturer.
[0008]
[Problems to be solved by the invention]
As shown in FIG. 12, since the position of the pad region is different if the size of the liquid crystal substrate is different, the conventional probe unit shown in FIG. 8 is made as a separate probe unit for each size of the liquid crystal substrate. That is, even for liquid crystal substrates of the same type (for example, SVGA format), it is necessary to prepare a probe unit for each substrate size, such as for 10-inch substrates, 11-inch substrates, and 12-inch substrates. In order to change the size of the liquid crystal substrate to be inspected, it is necessary to replace the probe unit in the liquid crystal prober. Since this probe unit is very large as compared with the probe card for wafers, the replacement work is a work of two persons and takes time. There is also a risk of damage to the probe unit due to an accident during work.
[0009]
By the way, as a kind of liquid crystal prober, there are an array prober for inspecting electrical characteristics of circuit elements such as transistors formed on a glass substrate and a lighting inspection prober for performing a lighting inspection as a final inspection of the liquid crystal substrate. Each requires a dedicated probe unit. The reason is that even if the contact position of the probe needle is the same, the configuration of the probe unit (such as the presence or absence of TAB / IC) differs depending on the tester. After all, as a probe unit for inspecting a liquid crystal substrate, a dedicated probe unit according to (a) the type of the liquid crystal substrate, (b) the size of the liquid crystal substrate, and (c) the distinction between the array prober and the lighting inspection prober, respectively. Is required. For example, if there are two types and types of liquid crystal substrates and three sizes, a total of six types of probe units are required, and if two types for array prober and lighting inspection are prepared, the total Therefore, 12 types of probe units are required. In practice, another spare probe unit is prepared for each probe unit, so 24 probe units are prepared.
[0010]
Thus, since the conventional probe unit prepares the probe unit for each substrate size and each substrate type, (1) the number of probe units increases and becomes expensive, and (2) many unused probes. There is a problem that the unit needs to be stored safely, and (3) the probe unit needs to be replaced due to size change or product type change.
[0011]
The present invention has been made to solve the above-described problems, and an object of the present invention is to be able to cope with a common probe unit even if the size of the substrate to be measured is different. Another object of the present invention is according to the combination of the substrate type (for example, both tab type or single tab type) and the type of inspection (for example, lighting inspection, TFT array inspection or open / short inspection). In other words, two types or four types of substrates can be inspected with a common probe unit.
[0012]
[Means for Solving the Problems]
The probe unit of the present invention can accommodate a plurality of substrate sizes by arranging a plurality of probe blocks on each of the four sides of the frame-shaped probe base so that the position of the probe blocks on each side can be adjusted in the XY direction. It is like that. In addition, the probe blocks belonging to each side can be switched between a contactable state and a non-contactable state for each side, and only the probe blocks on some sides are used and the probe blocks on the remaining sides are used. I try not to. That is, this invention has the following configurations (a) to (g) in a probe unit that inspects a measured substrate by bringing a contactor into contact with a large number of electrodes arranged on the periphery of the rectangular measured substrate. I have. (A) A frame-like probe base having two X sides extending in the X direction and two Y sides extending in the Y direction perpendicular to the X direction. (B) A first movable base attached to each of two X sides of the probe base so as to be position adjustable in the Y direction. (C) said first be attached to the movable base, a first upper plate to the contacts in one of two states: a state of non-contact with the contactable state to the electrode. (D) A plurality of probe blocks which are attached to the first upper plate so as to be position adjustable in the X direction and have the contact. (E) A second movable base attached to each of the two Y sides of the probe base so as to be positionally adjustable in the X direction. (F) said second and attached to the movable base, a second upper plate to the contacts in one of two states: a state of non-contact with the contactable state to the electrode. (G) A plurality of probe blocks which are attached to the second upper plate so as to be position-adjustable in the Y direction and include the contacts.
[0013]
According to the present invention, the position of the probe block can be adjusted according to the size of the substrate to be measured, so that a common probe unit can be used for at least two types of substrate sizes. Therefore, when changing the size of the substrate to be measured, the probe unit replacement work becomes unnecessary, and the adjustment work of the probe unit accompanying the change of the board size is completed in a short time by one worker. Further, it is not necessary to prepare or store a probe unit for each substrate size. Furthermore, depending on the combination of the type of substrate to be measured and the type of inspection, the probe block belonging to a specific side and the probe block belonging to the other side are configured differently for two types or four types of substrates. A common probe unit can be used.
[0014]
A substrate to be measured to which the present invention can be applied is a rectangular substrate having a large number of electrodes arranged at the periphery, and typically corresponds to a substrate of a flat display panel such as a liquid crystal display panel or a plasma display panel. To do. Furthermore, the present invention can be applied to the peripheral portions of these substrates, even if the substrate sizes are different, those in which the dimensions of the pad regions divided for each TAB are common.
[0015]
The form of the contact attached to the probe block is not particularly limited, but a cantilever probe needle, a bump electrode formed on the wiring pattern, or the like can be used.
[0016]
In the present invention, since the position of the probe block is adjusted to correspond to different substrate sizes, the positioning accuracy of the probe block affects the alignment accuracy between the probe needle and the electrode of the substrate to be measured. Therefore, if a probe needle position adjusting mechanism is provided in each probe block, the alignment accuracy between the probe needle and the electrode of the substrate to be measured can be ensured even if the positioning accuracy of the probe block itself is not so high. As a probe needle position adjusting mechanism that can be provided in the probe block, there is one disclosed in JP-A-3-218472.
[0017]
DETAILED DESCRIPTION OF THE INVENTION
FIG. 1 is a plan view showing an embodiment of the probe unit of the present invention. FIG. 2 is a front view thereof (viewed from direction B in FIG. 1). In FIG. 1, a rectangular frame-shaped probe base 40 has two opposing X sides (sides extending in the X direction) 42 and two opposing Y sides (sides extending in the Y direction) 44. First probe assemblies 46 and 47 are attached to the X side 42, and second probe assemblies 48 and 49 are attached to the Y side 44.
[0018]
Next, the configuration of the probe assembly will be described. 3 is an enlarged plan view showing the second probe assembly 48, FIG. 4 is a side view thereof (viewed from the direction of arrow C in FIG. 3), and FIG. 6 is an exploded perspective view thereof. . In FIG. 6, the second probe assembly 48 is roughly composed of a lower second movable base 50 and an upper second upper plate 52. The second movable base 50 can move on the two guide rails 54 in the X direction. The guide rail 54 is fixed to the probe base 40 (see FIG. 1). The second movable base 50 can be fixed to the two guide rails 54 by tightening the two fixing screws 56. When the fixing screw 56 is loosened, the second movable base 50 can move on the guide rail 54. Two struts 58 stand on the second movable base 50 at an interval, and a rotating shaft 60 is attached between these struts 58. The rotation shaft 60 extends in the Y direction.
[0019]
A through hole 62 is formed in the upper second upper plate 52, and the rotating shaft 60 of the second movable base 50 is inserted into the through hole 62 so that the second upper plate 52 is moved to the second movable base 50. Can be attached to. Thereby, the second upper plate 52 can rotate around the rotation shaft 60. A guide groove 64 is formed on the upper surface of the second upper plate 52. The guide groove 64 extends in the Y direction and has a trapezoidal cross section. On the other hand, a fastening block 68 is attached to the lower surface of the probe block 66 with a fixing screw 70 (see also FIG. 7A). The width of the fastening block 68 (the dimension along the longitudinal direction of the guide groove 64) is the same as the width of the probe block 66, and has the same trapezoidal cross section as the guide groove 64. The fastening block 68 can move in the Y direction inside the guide groove 64. When the fixing screw 70 is tightened, the fastening block 68 rises and is fixed to the guide groove 64, and the probe block 66 is also fixed. When the fixing screw 70 is loosened, the fastening block 68 and the probe block 66 can move together in the Y direction. Three probe blocks 66 are attached to the second upper plate 52.
[0020]
Between the two pins 72 at the rear end portion (the end portion farthest from the rotation shaft 60) of the second upper plate 52 and the two pins 74 at the rear end portion of the second movable base 50, 2 A tension coil spring 76 of the book is hooked. As a result, the rear end portion of the second upper plate 52 is pulled downward. A protruding piece 78 is fixed to the lower surface of the rear end portion of the second upper plate 52. The inclined surface of the lower surface of the protruding piece 78 is placed on the inclined surface of the upper surface of the movable piece 80 on the second movable base 50. The movable piece 80 is fixed to the tip of the piston of the air cylinder 82 and can be advanced and retracted in the X direction by the operation of the air cylinder 82.
[0021]
Next, the movement in the XY directions in the second probe assembly 48 will be described with reference to FIG. The second movable base 50 can be moved in the X direction along the guide rail 54 by loosening the fixing screw 56. Further, by loosening the respective fixing screws 70, the three probe blocks 66 can be moved in the Y direction, whereby the pitch Py of the probe blocks 66 can be changed. Thus, by moving the probe block 66 in the X direction and the Y direction, the liquid crystal substrates 18 having different sizes can be handled. Further, if the probe block 66 itself is provided with a probe needle position adjustment mechanism (for example, an adjustment mechanism in the XYZ directions), the position of the probe needle can be finely adjusted.
[0022]
Next, a function of switching the second probe assembly 48 between a contactable state and a contact impossible state will be described with reference to FIG. FIG. 7A is a cross-sectional view taken along the line DD of FIG. When the piston of the air cylinder 82 is extended, the movable piece 80 moves to the right. Then, the protruding piece 78 of the second upper plate 52 is pushed up by the inclined surface of the upper surface of the movable piece 80, and the upper surface of the second upper plate 52 is kept almost horizontal. In this state, the tip of the probe needle 84 at the lower end of the probe block 66 can contact the electrode of the liquid crystal substrate 18 when the probe unit and the liquid crystal substrate 18 are brought close to each other to a predetermined inspection position.
[0023]
On the other hand, as shown in FIG. 7B, when the piston of the air cylinder 82 is contracted, the movable piece 80 moves to the left. Then, it is pulled by the tension coil spring 76 (see FIG. 6), and the second upper plate 52 rotates around the rotation shaft 60 in the clockwise direction in the drawing. In this state, even if the probe unit and the liquid crystal substrate 18 are brought close to a predetermined inspection position, the tip of the probe needle 84 is several mm above the liquid crystal substrate 18 and therefore does not contact the electrode of the liquid crystal substrate 18. In this manner, the contactable state and the contactless state of the probe block 66 are switched according to the operation of the air cylinder 82.
[0024]
By the way, the two second probe assemblies 48 and 49 in FIG. 1 have the same structure. The first probe assemblies 46 and 47 have almost the same structure as the second probe assemblies 48 and 49, but the number of probe blocks is four, and the width in the Y direction is the second correspondingly. The only difference is that it is larger than the width of the probe assembly in the X direction. The description of the second probe assembly 48 described with reference to FIG. 6 also applies to the first probe assemblies 46 and 47. However, the “second movable base” is simply referred to as the “first movable base”. The “second upper plate” may be read as the “first upper plate”, the “X direction” may be read as the “Y direction”, and the “Y direction” may be read as the “X direction”.
[0025]
FIG. 2 is a front view of the probe unit of FIG. 1, and the side surfaces of the two second probe assemblies 48 and 49 and the back surface of the first probe assembly 47 can be seen. FIG. 4 is a side view of the second probe assembly 48 of FIG. 3, in which the rotating shaft 60 attached to the column 58 of the second movable base 50, the guide groove 64 having a trapezoidal cross section, and the fastening block inside thereof. 68 is clearly shown.
[0026]
FIG. 5 is a rear view of the first probe assembly 47. A state in which the first movable base 50a is placed on the two guide rails 54a, a state in which the first upper plate 52a is pulled in the direction of the first movable base 50a by the two tension coil springs 76a, and a protruding piece 78a Can be seen in contact with the movable piece 80a.
[0027]
Next, a procedure for inspecting various liquid crystal substrates using this probe unit will be described. The state shown in FIG. 1 is a state of the probe unit when measuring the 10-inch liquid crystal substrate 18. The position of the probe needle of each probe block 66 corresponds to the pad region 24 of the 10-inch liquid crystal substrate 18a in FIG. In the case of performing lighting inspection or TFT array inspection of both tab type liquid crystal substrates, two first probe assemblies 46 and 47 and one second probe assembly 49 can be brought into contact with each other as shown in FIG. To. As shown in FIG. 7B, the remaining second probe assembly 48 raises the tip of the probe needle 84 so that it cannot be contacted. Using the probe unit set in this way, a probe needle is brought into contact with the pad areas on the three sides of the both tab type liquid crystal substrates to execute a predetermined inspection. On the other hand, when performing a lighting inspection or a TFT array inspection of a one-tab type liquid crystal substrate, one first probe assembly 46 and one second probe assembly 49 are brought into contact with each other, and the remaining first probe assemblies 47 and the second probe assembly 48 are brought into an inaccessible state. As described above, since the probe needle can be contacted and cannot be contacted for each probe assembly, both the tab-type liquid crystal substrate and the one-tab type liquid crystal substrate can be handled.
[0028]
In order to change the size of the liquid crystal substrate from 10 inches to 11 inches or 12 inches, the probe unit is adjusted as follows. First, in the second probe assemblies 48 and 49, as shown in FIG. 3, the fixing screw 56 is loosened and the second movable base 50 is moved in the X direction along the guide rail 54, so that 11 inches or 12 inches are obtained. It moves to a position corresponding to the liquid crystal substrate and is fixed with a fixing screw 56. Next, the fixing screw 70 is loosened and the three probe blocks 66 are moved in the Y direction to move to the position of the pad area corresponding to the 11-inch or 12-inch liquid crystal substrate, and fixed with the fixing screw 70. As a result, the probe block 66 is positioned to fit the 11 inch or 12 inch liquid crystal substrate. The same operation is performed on the first probe assemblies 46 and 47 of FIG. 1 to adapt the probe block to the 11 inch or 12 inch liquid crystal substrate.
[0029]
In the case of liquid crystal substrates of the same format (for example, SVGA format), even if the sizes are different, the individual pad areas divided for each TAB have the same dimensions, so the position of each probe block depends on the size of the liquid crystal substrate (that is, If it is adjusted (according to the arrangement position of the pad area), the common probe unit can be used as in the present invention.
[0030]
If only one tab type liquid crystal substrate is inspected for lighting or TFT array, two types of liquid crystal substrates can be inspected using the same probe unit. That is, the first probe assembly 46 and the second probe assembly 49 are configured so that the first type of liquid crystal substrate can be inspected, while the first probe assembly 47 and the second probe assembly 48 are the first probe assembly 48 and the second probe assembly 48. It is configured so that two types of liquid crystal substrates can be inspected. When inspecting the first type of liquid crystal substrate, the probe assemblies 47 and 48 are made inaccessible and only the probe assemblies 46 and 49 are used. On the other hand, when inspecting the liquid crystal substrate of the second kind, the probe assemblies 46 and 49 are made inaccessible and only the probe assemblies 47 and 48 are used.
[0031]
By the way, if only the open / short inspection of the data lines on the liquid crystal substrate is performed, the probe needles need only be brought into contact with the pad areas 24 connected to the data lines 20 in FIG. Does not need to contact the probe needle. That is, in order to perform open / short inspection (data line) of the liquid crystal substrates of both tab types, only two opposing probe assemblies are used. Accordingly, the two first probe assemblies are configured for open / short inspection (data line) of the liquid crystal substrates of the first type of both tab types, and the two second probe assemblies are the second type of both tab types. The liquid crystal substrate can be configured for open / short inspection (data line). Thereby, open / short inspection (data line) of two types of liquid crystal substrates of both tab types can be executed using the same probe unit. Further, since the open / short inspection (data line) of the one-tab type liquid crystal substrate requires only one probe assembly, four types of liquid crystal substrates can be inspected with the same probe unit.
[0032]
After all, this probe unit can adjust the position of the probe block of each probe assembly according to the substrate size, and can select a contactable state and a contactless state for each probe assembly. Various liquid crystal substrates can be inspected. This is summarized as follows. (1) Applicable to liquid crystal substrates of different sizes. (2) Both the tab-type liquid crystal substrate and the single-tab type liquid crystal substrate can be supported. (3) When performing a lighting inspection or a TFT array inspection of a one-tab type liquid crystal substrate, two types of liquid crystal substrates can be handled. (4) When performing the open / short inspection (data line) of the liquid crystal substrates of both tab types, two types of liquid crystal substrates can be handled. (5) When performing an open / short inspection (data line) of a single tab type liquid crystal substrate, it is possible to cope with four types of liquid crystal substrates.
[0033]
In the above description of the embodiment, the description has been given using the example of the liquid crystal substrates of three sizes of 10 inches, 11 inches, and 12 inches, but the substrate size is not limited to this. The present invention can also be applied to a substrate to be measured other than a liquid crystal substrate.
[0034]
In the above-described embodiment, the first upper plate and the second upper plate are configured to be rotatable. However, in order to switch between the contactable state and the contact impossible state, the first upper plate and the second upper plate may be vertically movable.
[0035]
【The invention's effect】
Since the present invention allows the positions of a plurality of probe blocks to be adjusted according to the size of the substrate to be measured, and the probe block can be switched between a contactable state and a non-contactable state for each side. A common probe unit can be used for substrates of different sizes and types, eliminating the need to replace the probe unit. Therefore, the adjustment work of the probe unit accompanying the change of the substrate size and the type is completed in a short time by one worker. Further, it is not necessary to prepare or store a probe unit for each substrate size or product type.
[Brief description of the drawings]
FIG. 1 is a plan view showing an embodiment of a probe unit of the present invention.
FIG. 2 is a front view of the probe unit of FIG.
FIG. 3 is a plan view of a second probe assembly.
FIG. 4 is a side view of a second probe assembly.
FIG. 5 is a rear view of the first probe assembly.
FIG. 6 is an exploded perspective view of a second probe assembly.
7 is a cross-sectional view taken along the line DD in FIG.
FIG. 8 is a plan view of a conventional probe unit.
9 is a cross-sectional view taken along line AA in FIG.
FIG. 10 is an example of a wiring diagram formed on a liquid crystal substrate.
FIG. 11 is a plan view showing an arrangement example of pad areas of a liquid crystal substrate.
FIG. 12 is a plan view showing the difference in the position of the pad region due to the difference in the size of the liquid crystal substrate.
[Explanation of symbols]
18 Liquid crystal substrate 40 Probe base 42 X side 44 Y side 46, 47 First probe assembly 48, 49 Second probe assembly 50 Second movable base 50a First movable base 52 Second upper plate 52a First upper plate 54 Guide Rail 56 Fixing screw 58 Post 60 Rotating shaft 64 Guide groove 66 Probe block 68 Fastening block 70 Fixing screw 76 Pulling coil spring 84 Probe needle

Claims (2)

A probe unit having the following configuration in a probe unit for inspecting a substrate to be measured by bringing a contactor into contact with a large number of electrodes arranged in a peripheral portion of the rectangular substrate to be measured.
(A) A frame-like probe base having two X sides extending in the X direction and two Y sides extending in the Y direction perpendicular to the X direction.
(B) A first movable base attached to each of two X sides of the probe base so as to be position adjustable in the Y direction.
(C) said first be attached to the movable base, a first upper plate to the contacts in one of two states: a state of non-contact with the contactable state to the electrode.
(D) A plurality of probe blocks which are attached to the first upper plate so as to be position adjustable in the X direction and have the contact.
(E) A second movable base attached to each of the two Y sides of the probe base so as to be positionally adjustable in the X direction.
(F) said second and attached to the movable base, a second upper plate to the contacts in one of two states: a state of non-contact with the contactable state to the electrode.
(G) A plurality of probe blocks which are attached to the second upper plate so as to be position-adjustable in the Y direction and include the contacts.   The first upper plate is rotatable about a rotation axis extending in the X direction, and the second upper plate is rotatable about a rotation axis extending in the Y direction. The probe unit according to 1.

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