JP4277275B2 - Ceramic multilayer substrate and high frequency electronic components - Google Patents

Description

  The present invention relates to a ceramic multilayer substrate and a surface mount type high frequency electronic component using the same, and more particularly to a structure of a terminal electrode formed on the ceramic multilayer substrate.

High-frequency electronic components such as high-frequency switches, VCOs, amplifiers, etc., in which electronic components such as semiconductor elements such as FETs and diodes, resistance elements, capacitance elements, and inductance elements are mounted on the surface of a substrate made of plastic or ceramics, are known. Yes. Such a substrate is required to protect semiconductor elements and electronic components from mechanical stress, to improve electrical characteristics, and to be thermally protected.
In recent years, heat generation during operation of a semiconductor element has increased, and this heat generation affects the operation of the semiconductor element itself and other electronic components. For this reason, it is one of the important required characteristics of the circuit board to efficiently dissipate the heat. Therefore, ceramics such as Al ₂ O ₃ which is a functional material excellent in heat dissipation, electrical characteristics, reliability, and the like are frequently used as circuit board materials.

On the other hand, in the mobile communication field such as mobile phones, there is a strong demand for downsizing component circuit components, and at present, capacitance elements, inductance elements, and the like are built into ceramic bodies by LTCC (low temperature co-fireable ceramics used) technology. LC filters and the like that have been used are becoming widely used.
The circuit component by such LTCC technology is comprised using the low-temperature-sintering ceramic material which can be sintered at 1000 degrees C or less, and the conductor paste which can be fired simultaneously with this, for example. For example, a ceramic green sheet formed (casted) on a carrier film by a doctor blade or the like is used, and a desired circuit pattern (electrode pattern) constituting a capacitance element or an inductance element is formed on the green sheet cut into a desired shape. Is formed of a conductive paste such as Ag or Cu, and a via hole penetrating the top and bottom of the green sheet is formed by a punching device. Next, via holes formed in each green sheet are filled with a conductive paste mainly composed of a metal such as Ag or Cu, and the necessary number of the green sheets are stacked, stacked, and pressed, and then cut to the required dimensions. In addition, the green sheet and the conductive paste are obtained by simultaneous firing.

Recently, such LTCC technology has been adopted for the substrate, and at least a part of the capacitance element and inductance element are stacked and built in an electrode pattern, and a cavity is formed, and a semiconductor element in a bare chip state is mounted in the cavity. To be done. In addition, with the increasing demand for miniaturization and high performance of mobile communication devices, various circuit functions have been incorporated, and antenna switches, filters, directional couplers, and high frequency amplifiers that constitute high frequency circuit sections of mobile phones. It has also been proposed to integrate the above and the like into the substrate.
Hereinafter, a substrate configured using LTCC technology is referred to as a ceramic laminated substrate.

In a high-frequency electronic component using such a ceramic multilayer substrate, the surface of the ceramic multilayer substrate is solder-connected to a terminal electrode having various functions, for example, a circuit substrate such as a printed circuit board, and supplies a driving voltage to a semiconductor element. A plurality of terminal electrodes such as a terminal electrode for receiving, a terminal electrode for inputting and / or outputting a high-frequency signal, and a ground electrode are formed by a method such as screen printing or electrode transfer.
As described above, with miniaturization and high performance of mobile communication devices, high frequency electronic components are also strongly required to be miniaturized. For this reason, terminal electrodes having various functions must be arranged on the ceramic laminated substrate within limited external dimensions, and as a result, the formation area of the terminal electrodes must be reduced.

  In a mobile phone, since a user sometimes causes an event such as a drop, a terminal electrode of a high-frequency electronic component is also required to have excellent external impact resistance. In addition, after the high frequency electronic component is mounted on the circuit board, an external force that applies bending or twisting to the circuit board is applied, and stress may act on the terminal electrode. In such a case, as the formation area of the terminal electrode becomes smaller, the adhesion strength between the terminal electrode and the ceramic laminated substrate tends to become insufficient naturally, so that the terminal electrode may peel off on the mounting surface with the circuit board. there were.

Moreover, the thermal expansion coefficient of the ceramic material used for the ceramic multilayer substrate is 20 ° C. to 500 ° C. 5.0 to 10 × 10 ⁻⁶ / ° C., and the thermal expansion coefficient of the terminal electrode is 18 to 21 × 10 ⁻⁶ / ° C. There is a great difference between the thermal expansion coefficient (12 to 75 × 10 ⁻⁶ / ° C.) of the circuit board made of ceramic material, epoxy resin, glass-epoxy composite material, etc. and the thermal expansion coefficient of solder (24 × 10 ⁻⁶ / ° C.). To do. For this reason, stress is inherent in the interface between the ceramic laminated substrate and the terminal electrode. When the adhesion strength is inferior, due to heat generation during operation of the semiconductor element mounted on the ceramic multilayer substrate and thermal expansion due to changes in environmental temperature, repeated stress acts on the ceramic multilayer substrate, the circuit substrate and the solder joining them, In some cases, the terminal electrode may be peeled off from the ceramic multilayer substrate. In such a case, not only the function required by the high-frequency electronic component cannot be exhibited, but the mobile phone itself cannot be used.

  As another problem, even when the adhesion strength is ensured, when the circuit board is bent or twisted, the corners of the ceramic multilayer board contact and interfere with the circuit board, and In some cases, cracks, cracks, etc. occurred between the corners and nearby terminal electrodes.

Patent Document 1 proposes a method for improving some of the above problems. When manufacturing a ceramic laminated substrate on which a metallized pad (terminal electrode) to which metal leads are brazed is formed, an insulation made of ceramic slurry on the entire surface of the ceramic green sheet including the outer periphery of the metal paste pattern 60a to be a terminal electrode. The paste is printed and applied, sintered and integrated, and the outer periphery of the terminal electrode is covered with a ceramic layer 15 as shown in the cross-sectional view of FIG. 7, and the brazing strength between the metal lead and the terminal electrode is insufficient, uneven. It has been proposed to eliminate the cracks and prevent the ceramic from cracking due to the difference in thermal expansion from the ceramic.
Shokai 57-78651

As in Patent Document 1, it is possible to improve the adhesion strength between the terminal electrode and the ceramic by covering the periphery of the terminal electrode with a ceramic layer, but the adhesion strength by reducing the area of the terminal electrode is reduced. It was not enough to compensate for the decline. Further, since the connection with the circuit board is made through the metal lead, no consideration is given to the influence of external impact and the interference of the corners of the ceramic multilayer board with the circuit board.
Therefore, in the present invention, in the ceramic multilayer substrate and the high-frequency electronic component using the same, the first object is to improve the adhesion strength between the terminal electrode formed on the surface of the ceramic multilayer substrate and the ceramic multilayer substrate. The second object is to suppress the occurrence of defects such as cracks due to interference between the corners of the ceramic multilayer substrate and the circuit board.

1st invention is a ceramic laminated substrate provided with the several ceramic layer and electrode pattern, The back surface of the said ceramic laminated substrate is equipped with the terminal electrode formed with the predetermined space | interval from the outer periphery to the inner side, The said terminal electrode Is printed on the ceramic layer, and the lower layer is composed of an electrode pattern in which the lower part is embedded in the ceramic layer, an insulating layer covering at least a part of the outer edge, and the upper layer and the insulating layer are overlaid. The outer edge portion of the underlying layer having the upper layer formed of the formed electrode pattern and covered with the insulating layer is deeper than other portions and embedded in an inclined manner with respect to the ceramic layer, A ceramic multilayer substrate having an insulating layer sandwiched between a base layer.

In the present invention, the thickness of the base layer is 5 to 20 μm, the thickness of the upper layer is 15 to 30 μm, the thickness of the upper layer is larger than the thickness of the base layer, and the terminal electrode is placed on the surface of the ceramic laminated substrate. On the other hand, it is preferable to protrude 10 μm or more. Moreover, it is preferable that the outer edge portion of the base layer covered with the insulating layer is buried deeper than other portions and inclined with respect to the ceramic layer. A conductor layer formed by electroless plating is formed on the surface of the upper layer, an outer edge portion of the conductor layer covers a part of the insulating layer, and the conductor layer is a Ni-P layer or an Au layer. preferable. Furthermore, it is preferable that a via hole extending to the surface of the ceramic laminated substrate is connected to the base layer and the via hole is formed in a substantially conical shape, whereby the adhesion strength can be further improved.

  According to a second aspect of the present invention, in the ceramic multilayer substrate of the first invention, an inductance element and / or a capacitance element is formed with another electrode pattern formed inside the ceramic multilayer substrate, and connected to the terminal electrode via a via hole. High-frequency electronic components.

  According to the present invention, in the ceramic laminated substrate having the terminal electrode on the outer surface, the terminal electrode is composed of the base layer and the upper layer, and the insulating layer covering the outer edge portion of the base layer is formed of the base layer and the upper layer. The adhesion strength between the terminal electrode and the ceramic can be improved. Further, by projecting the terminal electrode with respect to the surface of the ceramic multilayer substrate, a distance (bagging height) between the surface of the ceramic multilayer substrate and the circuit substrate can be ensured. Even when the circuit board is bent or twisted after the ceramic multilayer board is mounted on the circuit board, the corners of the ceramic multilayer board are prevented from contacting / interfering with the mounting board, and thus the ceramic generated by the interference. It is possible to reduce the occurrence of cracks and cracks in the laminated substrate.

An example of the high-frequency electronic component according to the present invention is shown as a perspective view in FIG. A plan view of the back surface is shown in FIG.
The high-frequency electronic component 1 is a high-frequency switch, and an electronic component 51 such as a capacitor, resistor, or diode is mounted on a mounting electrode 55 formed on the ceramic multilayer substrate 12, and the electronic component 51 is placed in a metal case (not shown). Covered with resin or sealed with resin.
The ceramic multilayer substrate 12 mainly includes a plurality of ceramic layers integrated by firing and an electrode pattern, and mounting electrodes for mounting electronic components 51 such as chip inductors, chip capacitors, and chip resistors. 55 (shown hatched in FIG. 2), a back surface electrode 310 formed on the main surface on the back surface side and brazed to the circuit board, a capacitor element, an inductance element, and a ground electrode formed on the ceramic layer. Internal conductor patterns, connection lines connecting these, and via holes are provided. Further, in order to ensure the bonding strength with the circuit board, there is a case where a dummy electrode 315 is formed which is not electrically connected to the capacitor element, the inductance element, or the like but is fixedly connected to the circuit board.
As described above, the high-frequency electronic component has various electrodes. In the present invention, the back surface electrode 310 and the dummy electrode 315 that are formed on the main surface of the multilayer substrate 12 and are electrically connected to the circuit substrate are terminals. Define as electrode.

1A and 1B are an enlarged plan view and a cross-sectional view of the terminal electrode portion. The insulating layer 15 covers the main surface (circuit board side) of the ceramic multilayer substrate 12 so as to cover the edge of the base layer 60a formed by the electrode pattern and to expose a part of the base layer 60a. It is formed. Although the shape of the foundation layer 60a is not particularly defined, it is exclusively formed in a substantially circular shape or a substantially rectangular shape in plan view. In order to increase the contact area with the ceramic layer, the base layer is preferably substantially rectangular.
Further, the portion exposed from the insulating layer 15 (shown by a broken line in the drawing) is preferably formed in a substantially rectangular shape because it can obtain a large contact area with the upper layer 60b, and is formed in the upper layer 60b and the laminated substrate. In the case where the electrical connection with a circuit element such as a wiring pattern, an inductance element or a capacitance element, or the connection strength between the upper layer and the base layer is not impaired, and the base layer 60a is connected to the via hole, at least the above It is preferable that the area of the exposed portion not covered with the insulating layer 15 is set to be larger than the area of the via hole connected to the base layer.

An upper layer 60b is formed on the base layer 60a so as to cover a part of the insulating layer 15, and the insulating layer is sandwiched between the upper layer and the base layer. The insulating layer is provided all around the outer edge of the base layer, but it can also be selected and provided at a site where stress is concentrated as shown in FIGS. Further, the insulating layer may be formed so as to cover almost the entire main surface of the ceramic laminated substrate except for a part of the base layer.
The covering width W1 of the insulating layer 15 covering the base layer 60 (the distance from the outer edge of the base layer 60a to the inner edge of the insulating layer 15) is preferably 20 μm or more, and the covering width from the outer edge is at least 20 μm or more. It is preferable that the covering width is 40 μm to 100 μm, since the adhesion strength can be improved. The upper limit of the covering width is defined by the outer area of the underlayer, but the electrical connection between the upper layer 60b and the circuit element formed in the multilayer substrate and the connection strength between the upper layer and the underlayer are impaired. Set to not.
Further, the covering width W2 of the upper layer 60b covering the insulating layer 15 (the distance from the outer edge portion of the upper layer 60b to the inner edge portion of the insulating layer 15) is preferably at least 20 μm, and if it is 40 μm to 100 μm, it is in close contact. It is preferable because the strength can be improved.
In the present invention, it is preferable that the thickness of the base layer is 5 to 20 μm, the thickness of the upper layer is 15 to 30 μm, and the thickness of the upper layer is larger than the thickness of the base layer. The insulating layer has a thickness of 5 μm or more, preferably 10 to 30 μm.

  Further, in the present invention, as shown in FIG. 4B, the outer edge portion of the underlayer is embedded so as to be inclined with respect to the ceramic layer, so that when an external force acts on the terminal electrode 60, the underlayer 60a. Since the external force acting on the outer edge of the base layer 60a can be reduced, the terminal electrode can be prevented from peeling off from the outer edge of the base layer 60a, and the strength at the interface portion between the ceramic layer and the base layer 60a can be improved. Is preferable.

  Further, a conductor layer (not shown) made of a plating layer is formed so as to cover the entire upper layer 60b and a part of the insulating layer 15. The width of the conductor layer covering the edge of the insulating layer 15 is adjusted by the thickness of the conductor layer 65, but is preferably 1 μm or more.

This insulating layer 15 is a paste obtained by mixing a predetermined amount of a dielectric powder mainly comprising a ceramic laminated substrate 12 and containing borosilicate glass together with a resin (ethylcellulose), a plasticizer (dimethylphthalate), and a solvent (BCA, ethanol, butanol). Sintered dielectric paste or sintered borosilicate glass containing at least one of Al ₂ O ₃ , MgO, and TiO ₂ as a filler is sintered. The dielectric powder preferably contains and contains Bi in order to improve the integral sinterability with the ceramic layer constituting the ceramic laminated substrate. When the color tone of the insulating layer 15 is different from that of the ceramic layer, the dielectric paste contains 0.5 to 0.5 colored glass powder containing at least one metal such as Fe, Cu, Co, Ni, and Cr. What is necessary is just to add about 5 weight%.
By including glass in the paste constituting the insulating layer 15, the adhesion strength at the sandwiching portion can be improved by the anchor effect of glass precipitated at the interface between the base layer 60 a and the upper layer 60 b.

Hereinafter, the manufacturing method of a ceramic laminated substrate is demonstrated in detail.
First, a low-temperature fired ceramic material and an appropriate amount of an organic binder or organic solvent are mixed together, and this is cast on a carrier film by a doctor blade method to form a ceramic green sheet. The carrier film is made of, for example, polyester or polyethylene terephthalate, has excellent thermal stability and mechanical strength, and is suitable for holding a soft ceramic green sheet. In the present example, an Al—Si—Ba—O-based dielectric material is used as the low-temperature fired ceramic material. When the capacitor element is formed in the ceramic laminated substrate, the ceramic green sheet has a ceramic layer thickness of 10 to 25 μm, and the other layers have a thickness of 100 to 150 μm. The thickness of the ceramic layer is appropriately set and is not limited to the above thickness, but is preferably selected in the range of 10 to 150 μm.

  Other low-temperature fired ceramic materials include, for example, an Al—Mg—Si—Gd—O based dielectric material having a low dielectric constant (relative dielectric constant 5 to 10), and an Mg—Si—Ba—La—B—O based dielectric material. Materials, Al-Si-Sr-O-based dielectric materials, Al-Si-Ba-O-based dielectric materials, Bi-Ca-Nb-O-based dielectric materials with high dielectric constant (relative permittivity of 50 or more), etc. Materials have been developed. In some cases, these low-temperature fired ceramic materials may be used alone for the ceramic multilayer substrate, or a low-dielectric constant material or a high-dielectric-constant material can be selectively used according to the ceramic layers constituting the inductance element and the capacitor element. Sometimes used.

Next, the cast ceramic green sheet is cut together with the carrier film, and a via hole is formed in a part of the ceramic green sheet. The via hole forms a via hole having a cylindrical shape or a substantially conical shape that is irradiated with a CO ₂ laser from the ceramic green sheet side and has a hole diameter on the irradiated surface side of 0.05 mm to 0.3 mm. The via hole is used for connection to a laminated electrode, a circuit element to be mounted, and a terminal electrode formed on the bottom of the ceramic laminated substrate.

  Next, a conductor paste is embedded in the via hole formed in the ceramic green sheet. Silver, copper, or the like is used as the conductive paste, and is buried in the via hole portion by screen printing using a metal mask or a mesh mask.

  Next, a circuit pattern constituting an inductance element and a capacitance element, and a connection electrode for connecting the inductance element and the capacitance element are formed on the surface of the ceramic green sheet. The conductor paste material for forming the conductor pattern of the signal wiring and the power supply wiring may be the same as or different from the via hole portion. The formation of the conductor pattern and the filling of the conductor paste into the via hole may be performed simultaneously.

  As described above, a ceramic green sheet was prepared with the carrier film attached. Then, this is placed in a laminating mold, and a suction hole is formed in the lower mold of the mold, so that the ceramic green sheet as the lowermost layer is attached to the carrier film with the carrier film attached. Adsorb and fix the film as the lamination jig side.

Then, with the carrier film attached, the ceramic green sheets are laminated so that the ceramic green sheets face each other, thermocompression-bonded, and the carrier film is removed. This was repeated several times as a temporary press-bonded body.
An electrode pattern was printed and formed on the main surface of the temporary pressure-bonded body using a conductive paste, and a base layer 60 a constituting the terminal electrode 60 was formed. At this time, the base layer 60a is formed so as to rise on the surface of the pressure-bonded body (FIG. 4A). Furthermore, the insulating layer 15 was printed and formed on the edge of the underlayer 60 using a dielectric paste obtained by pasting the same low-temperature fired ceramic material powder as that used for the ceramic green sheet (FIG. 4B). This temporary pressure-bonded body 70 was placed in a mold, a pair of metal plates were placed on both main surfaces of the pressure-bonded body, and this was pressure-bonded by CIP (hydrostatic pressure isotropic press). At this time, the heat radiation electrode and the terminal electrode formed on the surface of the crimping body are pushed into the crimping body as shown in FIG.
Further, an electrode pattern was printed and formed using conductor paste so as to cover a part of the insulating layer 15, and an upper layer 60b constituting the terminal electrode 60 was formed to obtain a ceramic green sheet laminate (FIG. 4D). ). The conductive layer may be the same conductive paste, or one of the pastes may contain glass, or a metal material constituting the base layer and the upper layer, for example, the base layer may be Cu and the upper layer may be Ag. It is also possible to make them different.

After dividing and forming a dividing groove with a steel blade in this ceramic green sheet laminate, it was placed on a firing jig such as a setter and fired at 900 ° C. in the atmosphere. In addition, when using Ag as a conductor paste, it is preferable to use the dry air which does not contain water vapor | steam at the time of baking. When water vapor is contained, the densification of Ag does not proceed and the adhesion strength may be significantly reduced. When Cu is used as the conductor paste, it is fired in a predetermined gas atmosphere (reducing atmosphere such as N ₂ or Ar gas). Then, the upper layer 60b was subjected to electroless plating (Ni-P plating, Au plating) to form a conductor layer.
Through the above steps, at least a part of the outer edge of the underlayer and the ceramic layer are covered with the insulating layer, and at least a part of the insulating layer is covered with the upper layer, and the upper layer and the A ceramic multilayer substrate was obtained in which the insulating layer was sandwiched between the base layer, the edge of the base layer 60a of the terminal electrode was embedded, and the terminal electrode 60 substantially protruded from the main surface.

As another embodiment, there is a terminal electrode structure shown in FIG. 1, the terminal electrode includes a base layer 60a and an upper layer 50b, and sandwiches the insulating layer 15. The edge of the base layer 60a is not embedded in the ceramic layer. Have. Such a terminal electrode structure can be produced, for example, by the following procedure.
First, an electrode pattern is printed and formed on the main surface of the pressure-bonded body, which is finally pressure-bonded by a CIP (hydrostatic pressure isotropic press apparatus), to form a base layer 60 a constituting the terminal electrode 60. Then, the insulating layer 15 is printed and formed on the edge of the underlayer 60 using a dielectric paste obtained by pasting the same low-temperature fired ceramic material powder as that used for the ceramic green sheet. Further, an electrode pattern is printed by using a conductive paste so as to cover a part of the insulating layer 15, and an upper layer 60 b constituting the terminal electrode 60 is formed to form a ceramic green sheet laminate. This was fired at 900 ° C. in the atmosphere, and electroless plating was performed on the upper layer 60b to form a conductor layer. The ceramic laminated substrate of another aspect can be obtained through the above processes.

  In addition, a constraining layer made of an inorganic composition (for example, alumina) whose sintering temperature is higher than the sintering temperature of the low-temperature fired ceramic material is disposed on both main surfaces of the laminate formed as shown in FIG. And may be sintered. By constraining the shrinkage in the planar direction by this constraining layer, a ceramic laminated substrate with high dimensional accuracy can be obtained. The constraining layer can be formed of a green sheet or paste, and is integrated with the laminate by pressure bonding or printing.

As a low-temperature fired ceramic material constituting the ceramic laminated substrate, Al ₂ O ₃ : 50, SiO ₂ : 36, SrO: 10, TiO ₂ : 4, Bi ₂ O ₃ : 2.5, Na ₂ O: 2 by weight%. , K ₂ O: 0.5, CuO: 0.3, and a dielectric material converted to Mn ₃ O ₄ 0.5 were used.
In order to produce the material having the above composition, raw material powders of Al ₂ O ₃ , SiO ₂ , TiO ₂ , Bi ₂ O ₃ , CuO, Mn ₃ O ₄ and SrCO ₃ , Na ₂ CO ₃ , K ₂ CO ₃ are weighed. And mixed with a pure water with a ball mill to obtain a mixed slurry. After adding 1 wt% of PVA to the slurry with respect to the weight of the slurry, the slurry was dried with a spray dryer to obtain a granular dry powder having an average particle size of about 0.1 mm. The granulated powder was calcined at a maximum temperature of 800 ° C. in a continuous furnace to obtain a calcined powder having a target composition.
Next, the calcined powder is dispersed in ethanol and pulverized with a ball mill to an average particle size of 1.2 μm. Further, PVB (polyvinyl butyral), which is a binder for sheet molding, is 12 wt% based on the weight of the calcined powder. , And 7.5 wt% of BPBG (butylphthalyl butyl glycolate) as a plasticizer were added, and dissolution and dispersion were performed in the same ball mill to obtain a sheet forming slurry. The slurry was defoamed and part of the solvent was evaporated under reduced pressure to adjust the viscosity to about 10,000 mPa · s. After adjusting the viscosity, the sheet was formed with a doctor blade, and after drying, a ceramic green sheet having a thickness of about 100 μm was obtained. It cut | judged to the predetermined | prescribed magnitude | size for the handling of a post process.

  Since the following manufacturing process is substantially the same as the above-described manufacturing process, the description thereof is omitted. The conductive paste for forming the base layer of the terminal electrode uses a silver paste, and 0.2 wt% platinum is added to the main component silver. This is the size after sintering, and is printed and formed so that the outer shape becomes 0.6 mm × 0.6 mm. Then, a part of the base layer was exposed and covered with an insulating layer. The insulating layer is made by mixing oxides of the dielectric materials Al, Si, Sr, Na, K, and Ti of the ceramic laminated substrate described above, calcined at 800 ° C., and pulverized ceramic powder with a solvent, an organic vehicle, etc. Is used to make a paste. Furthermore, the upper layer was formed with the same conductive paste as the underlayer. Then, main sintering is performed at a temperature higher than the calcining temperature, and thereafter, the base layer exposed from the insulating layer is subjected to Ni-P plating and Au plating by electroless plating, and the terminal electrode structure shown in FIG. 1 is obtained. A laminated ceramic substrate was prepared (Example 1). The thicknesses of the base layer, the upper layer, and the insulating layer after firing are 10 μm, 30 μm, and 20 μm, respectively, the covering widths W1 and W2 are 60 μm, respectively, and the protruding height h of the terminal electrode includes the conductor layer. 40 μm.

As another example, a ceramic laminated substrate having the terminal structure of FIG. 5 was produced (Example 2). The dielectric material and conductive paste material used in this example are the same as those in the example, and the shape of the base layer, the upper layer, and the insulating layer in plan view and the manufacturing process are also the same as described above, so that the description thereof is omitted.
The thicknesses of the base layer, the upper layer, and the insulating layer after firing are 10 μm, 35 μm, and 20 μm, respectively, the covering widths W1 and W2 are 60 μm, respectively, and the protruding height h of the terminal electrode includes the conductor layer. It was 45 μm.

As a comparative example, a ceramic laminated substrate having the terminal structure of FIG. 7 was produced. This terminal electrode is different from that of the example in that it does not have an upper layer and a conductive layer is formed on the surface of the base layer. The dielectric material and the conductive paste material used here are the same as those in the example, and the shape of the base layer and the insulating layer in plan view and the manufacturing process are also the same as those described above, so the description thereof will be omitted.
In addition, the thickness after baking of a base layer and an insulating layer was 10 micrometers and 20 micrometers, respectively, the covering width W1 was 60 micrometers, and the protrusion height h of the terminal electrode was 18 micrometers including the conductor layer.
In Examples 1 and 2 and the comparative example, each terminal electrode is connected to a via hole having a diameter of 0.1 mm at a substantially central portion.

  Using the ceramic laminated substrate thus formed, the following drop test and 20 terminal electrode tensile tests were performed. The test results are shown in Table 1 and FIG.

(Drop test)
A test jig in which a semiconductor element or an electronic component is mounted on the ceramic multilayer substrate, and a high-frequency electronic component with a case attached is solder-connected to a predetermined evaluation substrate with eutectic solder, and the evaluation substrate is configured by aluminum die casting It is screwed and fixed inside, and is allowed to fall freely to a concrete plate from a height of 1.8 mm. This is repeated 100 times, and the state of bonding of the high-frequency component to the evaluation board and the state of bonding of the circuit elements mounted on the ceramic multilayer board are visually evaluated with a magnifying glass, and the terminal electrode and the evaluation board are Conductivity evaluation was performed.

(Terminal electrode tensile test)
Connected to the terminal electrode of the ceramic multilayer substrate with no electronic parts, etc., using eutectic solder, a φ0.5mm × 20mm Kovar pin is placed on a fixing jig, and the fixing jig is connected to a tensile tester (Shimadzu). It was screwed and fixed to an autograph model AG-1 manufactured by Seisakusho, the Kovar pin was fixed to a fixing member on the tension side, and a tensile test was performed at a load cell of 100 N and a tensile speed of 0.5 mm / min.

In Table 1, when the terminal electrode was observed with a magnifying glass after the drop test, peeling was observed on the plurality of terminal electrodes in the comparative example. Further, when the conductivity of the terminal electrode without peeling was confirmed, the resistance value increased in about 50% of the terminal electrodes.
In the tensile test, the terminal strength of the present invention was about 2 to 3 times that of the conventional one as shown in FIG. Further, when the electrode peeling mode was classified for the sample after the tensile test, in the conventional example, it is desired to peel only at the interface between the base layer and the ceramic layer. In Example 1 of the present invention, the ceramic layer portion It was found that the terminal electrode and the ceramic were firmly connected. In Example 2, there were two modes of destruction at the ceramic layer portion and separation at the interface between the underlayer and the ceramic layer. Even in the case of peeling at the interface between the base layer and the ceramic layer, the adhesive strength superior to the conventional one was obtained by improving the adhesive strength at the sandwiching portion.
Further, in the present invention, even when the ceramic laminated substrate is bent or twisted after the ceramic laminated substrate is mounted on the circuit board by protruding the terminal electrode by 10 μm or more, the corners of the ceramic laminated substrate are formed. It is possible to prevent contact / interference with the mounting substrate, and to reduce the occurrence of cracks and the like of the ceramic multilayer substrate caused by the interference.
Furthermore, in the ceramic cell multilayer substrate of the present invention, since the upper layer of the terminal electrode substantially protrudes from the main surface of the substrate, the corner of the substrate is prevented from contacting / interfering with the mounting substrate. It was possible to reduce the occurrence of cracks.

  According to the present invention, by improving the adhesion strength between the terminal electrode and the ceramic, the terminal electrode is prevented from being peeled off due to various stresses acting on the terminal electrode, and the corner of the ceramic multilayer substrate is in contact with and interference with the mounting substrate. Thus, it is possible to provide a terminal electrode structure that reduces cracks and cracks caused by the above. Further, according to the ceramic laminated substrate of the present invention, it is possible to provide a surface mount type high frequency electronic component having excellent impact resistance, and consequently improve the reliability of a mobile communication device such as a mobile phone. .

(A) It is a top view of the terminal electrode of the ceramic laminated substrate which concerns on one Example of this invention, (b) It is the sectional drawing. It is a perspective view of the high frequency electronic component concerning one example of the present invention. It is a back surface top view of the high frequency electronic component concerning one example of the present invention. It is a perspective view which shows the formation process of the terminal electrode of the ceramic multilayer substrate used for the high frequency electronic component which concerns on one Example of this invention. It is a top view of the terminal electrode of the ceramic laminated substrate which concerns on the other Example of this invention. (A) It is a top view of the terminal electrode of the ceramic laminated substrate which concerns on the other Example of this invention, (b) It is a top view of the terminal electrode of the ceramic laminated substrate which concerns on the other Example of this invention. It is sectional drawing of the terminal electrode of the conventional ceramic laminated substrate. It is a peeling strength characteristic figure of a terminal electrode.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 High frequency electronic component 12 Ceramic laminated substrate 15 Insulating layer 18 Via hole 60 Terminal electrode 60a Underlayer 60b Upper layer 70 Ceramic layer

Claims (5)

In a ceramic laminated substrate provided with a plurality of ceramic layers and electrode patterns,
The back surface of the ceramic multilayer substrate is provided with terminal electrodes formed at a predetermined interval from the outer periphery to the inner side,
The terminal electrode is printed on a ceramic layer and has a base layer composed of an electrode pattern in which a lower part is embedded in the ceramic layer, an insulating layer covering at least a part of the outer edge, and the base layer and the insulating layer. It has an upper layer composed of an electrode pattern printed and printed in an overlapping manner, and the outer edge portion of the base layer coated with the insulating layer is deeper than the other part and embedded in an inclined manner with respect to the ceramic layer,
Thus, a ceramic laminated substrate characterized in that an insulating layer is sandwiched between an upper layer and a base layer . The thickness of the underlayer at 5 to 20 [mu] m, a thickness of the upper layer is 15 to 30 [mu] m, greater than the thickness of the thickness of the upper layer is the base layer, the terminal electrodes to the surface of the ceramic multilayer substrate, leaving butt than 10μm The ceramic multilayer substrate according to claim 1, wherein the ceramic multilayer substrate is used. A conductor layer formed by electroless plating is formed on the surface of the upper layer, an outer edge portion of the conductor layer covers a part of the insulating layer, and the conductor layer is a Ni-P layer and an Au layer. The ceramic laminated substrate according to claim 1 or 2 , characterized in that: 4. The ceramic multilayer substrate according to claim 1, wherein a via hole extending to a surface of the ceramic multilayer substrate is connected to the base layer, and the via hole is formed in a substantially conical shape . 5. The high frequency electronic component according to claim 1, wherein an inductance element and / or a capacitance element is formed by an electrode pattern formed inside the ceramic multilayer substrate.

Images