JP4253150B2 - Transport system and transport method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To improve transferring efficiency and productivity when exchanging electronic parts between a plurality of clean rooms. <P>SOLUTION: A transfer system comprises a stocker 21 having a crane that is provided in at least one of a plurality of clean rooms, a container 22 placed at a delivery area of the stocker, a first transfer car 23 for moving within the clean room, and a covered second transfer car for a public path, wherein the stocker 21 and first transfer car 23, and the second transfer car are provided with transfer means 211 and 231, respectively, for allowing an automatic delivery between the stocker and first transfer car, and between the first and second transfer cars. <P>COPYRIGHT: (C)2003,JPO

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a transfer system and a transfer method when exchanging electronic parts such as cassettes and wafers between a plurality of clean rooms, and in particular, between a stocker as a component warehouse and a first transfer vehicle in a clean room, and the first transfer vehicle. Between the multiple clean rooms by automating the exchange of electronic components between the second transport vehicle for the general passage and the multiple second transport vehicles on the single main track in the same time zone and the same direction The present invention relates to a transport system and a transport method that improve productivity by increasing transport efficiency.
[0002]
In recent electronic device production processes, almost all of the stockers and various manufacturing devices are placed in a clean room equipped with advanced anti-dust measures, and in the middle of the process, in order to cope with technological progress, securing characteristics and improving productivity. Automatic transport vehicles with dust-proofing measures have been used for moving and transporting between parts stockers and general passages between manufacturing apparatuses, but there is a strong demand for improved productivity through improved transport efficiency.
[0003]
In the present invention, the case where the electronic component in the process (hereinafter referred to as a conveying component) is a cassette for an electronic device having a substantially cubic outer shape will be described as an example.
[0004]
[Prior art]
FIG. 14 is a diagram illustrating the application location of the transport system as a technical background, FIG. 15 is a diagram illustrating the configuration of a conventional transport system, FIG. 16 is a diagram illustrating the stocker of FIG. 15, and FIG. FIG. 18 is a view for explaining a first transport vehicle in the clean room of FIG. 15, FIG. 19 is a view for explaining a second transport vehicle for a general passage in FIG. FIG. 20 is a diagram for explaining the exchange state of the cassettes between the transport vehicles, and FIG. 21 is a diagram for explaining a conventional transport method.
[0005]
In FIG. 14 where the application place of the transfer system is explained in plan view, a partition W ₁ Through the first clean room CR _-1 And second clean room CR _-2 And the partition wall W between the clean rooms. ₁ Bulkhead W that leads to ₂ Separated by
And each clean room CR above _-1 And CR _-2 Each of the doors has a double open / close door D located on both the general passage side and the opposite side. ₁ , D ₂ Pass box PB with normal air shower partitioned by _-1 , PB _-2 The opening and closing of each door and the timing of air shower are set appropriately so that the passage of dust between the general passage R and the clean room connected thereto can be blocked.
[0006]
In the drawings other than FIG. 14, the opening and closing doors are generally installed, and the illustration and description thereof will be omitted.
A main line T made of magnetic tape is provided on the floor of the general passage R along the passage. _-1 , T _-2 Are provided in parallel as double lines, and branch lines T branching from the main lines and extending to predetermined positions in the clean rooms via the pass boxes with air showers (hereinafter simply referred to as pass boxes). _-3 , T _-Four Is provided.
[0007]
Then, by placing a self-propelled conveyance vehicle AGV (Automatic Guided Vehicle) that can be guided by magnetism from the main line or branch line on the main line or branch line as shown by a dotted line, each self-propelled conveyance vehicle AGV You can move freely.
FIGS. 15A and 15B illustrating the configuration of the transfer system corresponding to the application place, FIG. 15A is a plan view of the place of FIG. 14, and FIG. 15B is a side view of FIG.
[0008]
In the figure, the first clean room CR in FIG. _-1 The second clean room CR _-2 As an example, a case where the self-propelled transport vehicle disposed in the clean room is the first transport vehicle and the self-propelled transport vehicle disposed in the general passage is the second transport vehicle will be described.
In FIG. 15, the transport system 1 is the first clean room CR. _-1 A stocker 11 disposed on the floor, a robot 12 erected on the floor near the delivery area 11c of the cassette A in the stocker, and a first transport vehicle 13 disposed on a branch line in the clean room, The main line T _-1 , T _-2 Move up and clean room CR above _-1 Pass box PB _-1 Second transport vehicle 14 that can enter the second clean room CR _-2 And a branch line T in the clean room _-Four The vehicle includes at least a first transport vehicle 13 ′ disposed on the floor and various facilities of the robot 12 erected on the floor near the desk.
[0009]
Here, for easy understanding, each of the above-described facilities will be described with reference to FIGS.
FIG. 16 for explaining the stocker, (a) is an overall perspective view, (b) is a front view in which (a) is sectioned by arrows a to a ′, (c) is a side view in which a side wall is partially sectioned, (D) is the top view which looked at the ceiling side partially in cross section.
In the figure, a square tunnel-shaped stocker 11 having a cross-sectional area that can be accommodated with sufficient margin for the two cassettes A on the left and right sides is a floor surface 11a in the central region along the longitudinal direction on one opening side. The delivery area 11c protruding from the opening side end face 11b at substantially the same height is formed with an area sufficient to place the cassette A, and a square cross section is formed on the center line in the width direction of the floor face 11a. A crane guide 11d protruding from the floor is provided.
[0010]
In a region exceeding the side length of the cassette A from the position exceeding the predetermined center width “b” on both sides of the guide to the side walls 11e on both sides, a convex step surface 11f with respect to the floor surface is formed as a cassette mounting surface. In addition, on the convex step surface, concave grooves 11g extending from the wall surface 11f 'on the crane guide side to the side wall 11e are formed at a pitch exceeding the side length of the cassette A. In this case, the concave grooves 11g It is provided at equal intervals starting from a position about half the side length of the cassette A from the opening side end face 11b.
[0011]
Further, a shelf plate 11h substantially the same as the convex stepped surface 11f is formed in the intermediate region in the height direction of the both side walls 11e with the same groove 11g as the groove 11g. Also, the cassette A can be placed.
Two rectangular parallelepipeds having a height substantially equal to the formation height of the convex step surface 11f are fixed to the upper surface of the delivery area 11c as a cassette mounting table 11j for the cassette A.
[0012]
Further, a robot-like crane 111 straddling the crane guide 11d is mounted on the stocker 11, and the crane 111 can freely reciprocate along the guide by a signal from a control unit (not shown) and the concave groove. The blade 111a having a size capable of entering 11g can be freely reciprocated in the stocker width direction, vertically moved, rotated, and the like.
[0013]
For example, in the figure (b), the blade 111a in the lowered state is moved to the arrow a. ₁ When the blade 111a is moved to the left in the stocker width direction as described above, the blade 111a enters the concave groove 11g in the convex step surface 11f, so that the cassette placed on the convex step surface can be lifted. The blade 111a in the state of being raised to a position corresponding to the plate 11h is moved to the arrow a ₂ When the blade 111a is moved to the right side in the stocker width direction as described above, the cassette 111 placed on the shelf can be lifted because the blade 111a enters the concave groove 11g of the shelf plate 11h.
[0014]
Therefore, the cassette located on the cassette mounting table 11j and the cassette accommodated in the stocker can be freely put in and out.
17A is a perspective view of the stocker when the cassette is accommodated, FIG. 17B is a plan view showing a state in which the cassette is gripped by the crane, and FIG. 17C is a plan view showing a state in which the cassette is placed in the delivery area. .
[0015]
In FIG. 5A, the cassette A is placed at predetermined positions of the convex step surface 11f and the shelf plate 11h of the stocker 11.
Therefore, as shown in (b), the aforementioned crane 111 is connected to the cassette A at the opening side end. ₁ And move the blade region of the crane down to bring the blade 111a into the lower cassette A. ₁ It corresponds to the lower groove 11g.
[0016]
Next, when the blade is inserted into the concave groove 11g as it is and then raised slightly, the cassette A ₁ For example, the blade area is rotated as it is to the cassette mounting table 11j in the delivery area 11c described above, so that the cassette A ₁ Is placed on the cassette mounting table 11j, as shown in (c).
[0017]
Instead of the above rotation, the raised cassette A ₁ (C) can also be achieved by moving the crane after returning it to the crane axis.
Also, the blade area of the crane 111 is raised so that the blade 111a is moved to the upper cassette A. ₂ After making it correspond to the concave groove 11g on the lower side, the blade is inserted into the concave groove 11g. ₂ Can be mounted on the cassette mounting table 11j.
[0018]
On the other hand, the robot 12 shown in FIG. 15 that operates in response to a signal from a control unit (not shown) is provided with an arm that is extendable and movable in a three-dimensional direction, and a vacuum pump (not shown) at the tip of the arm. And a vacuum suction mechanism connected to the cassette A. ₁ The cassette A is brought into contact with the upper surface of the cassette A ₁ Can move freely.
[0019]
Therefore, the cassette A located in the delivery area 11c of the stocker 11 can be easily transferred to the first transport vehicle 13 described later.
In FIG. 18, the first transport vehicle 13 as the AGV uses the loaded battery as a power source and the main line T ₁ , T ₂ And branch line T _Three , T _Four Is a generally known one having a function of being guided so as to be able to move forward and backward along the respective lines with a signal from a magnetic tape constituting the cassette, and a cassette mounting table 13b similar to the cassette mounting table 11j is provided on the upper surface 13a thereof. Is installed.
[0020]
In FIG. 19, the second transport vehicle 14 serving as the AGV includes the first transport vehicle 13 and a cover 141 that can cover the upper surface 13a of the transport vehicle with a margin.
In this case, the cover 141 fixed to the first transport vehicle on the side surface in the vicinity of the upper surface of the first transport vehicle 13 is exposed to the outside air on almost the entire wall surface 141a before and after the traveling direction as the transport vehicle. An openable / closable door 142 is provided, and the lower end side of the open / close door 142 is set to be positioned lower than the upper surface 13a so as to facilitate transfer of the cassette A.
[0021]
Further, the desk 15 shown in FIG. 15 is a normal one including necessary manufacturing equipment, testing equipment, and the like, and by placing the cassette A at the predetermined position, it is possible to easily realize post-processing processing and inspection. It is what has become.
FIG. 20 is a diagram for explaining in a time series the cassette delivery state between the first transport vehicle and the second transport vehicle, where (a) shows the state before delivery, (b) shows the state immediately before delivery, (C) shows the state at the time of delivery.
[0022]
That is, in the state (a) before the cassette delivery, the branch line T in the vicinity of the stocker 11 _-3 A plurality (two in the figure) of cassettes A are placed on the first transport vehicle 13 located above by the operation of the robot 12 described above, and the main track T _-1 An empty second transport vehicle 14 is located above.
Therefore, the first transport vehicle 13 is moved to the pass box PB. _-1 While moving to the vicinity, branch line T _-3 The second transport vehicle 14 branched into the pass box PB _-1 If it puts in, the whole outer surface including the wheel area | region of this conveyance vehicle 14 will be cleaned by an air shower, and will be in the state shown by (b).
[0023]
Next, in the state shown in (c) with the open / close door 142 on the clean room side of the second transport vehicle 14 opened, each cassette A on the first transport vehicle is transferred to the second transport vehicle by manual means. In addition, it is possible to realize delivery of cassettes between transport vehicles in a clean atmosphere.
Therefore, as shown in FIG. 15, after the cassette A stored in the stocker 11 is sequentially placed on the first transport vehicle 13 by the robot 12, the transport vehicle 13 is moved to the pass box PB. _-1 And move to the vicinity of the main line T _-1 The upper second transport vehicle 14 is moved to the pass box PB _-1 Position it inside.
[0024]
Next, after the cassette A on the first transport vehicle is transferred to the second transport vehicle 14 as described above, the second transport vehicle 14 is moved to the main line T. _-1 Via the second clean room CR _-2 Pass box PB _-2 The cassette A is transferred to the first transport vehicle 13 'in the clean room by the same method as described above, and then the first transport vehicle 13' is moved to the vicinity of the work table 15 and further By using the robot 12, the cassette A can be transferred onto the work desk.
[0025]
On the other hand, in the conventional transport method, the main line is doubled as described above, but in this case, the main line blocks the general passage R and easily disturbs other physical distribution and traffic. May be reciprocated in a shuttle manner.
FIG. 21 exemplifies a transport method in which a single second transport vehicle 14 realizes transport of the cassette A between three clean rooms after making the main track a single track.
[0026]
That is, in the figure, the main line T _-1 Is provided with a battery chamber C for charging the second transport vehicle, and the main line T _-1 From 3 clean rooms CR _-1 , CR _-2 , CR _-3 Each branch line T _-3 , T _-Four , T _-Five Is branched.
And one second transport vehicle 14 is connected to the main track T _-1 Each branch line T _-3 , T _-Four , T _-Five The cassette A is transferred to and from the first transport vehicle 13 disposed in each clean room, thereby realizing the transport of the cassette A between the clean rooms.
[0027]
For example, clean room CR _-1 Cassette A in two clean rooms CR _-2 And CR _-3 When transporting to each of the above, the charged second transport vehicle 14 is temporarily moved to the clean room CR. _-1 Pass box PB _-1 After entering cassette and receiving cassette A, clean room CR _-2 Pass box PB _-2 To 14 'and transfer cassette A, and then clean room CR _-1 Pass box PB _-1 Clean room CR after receiving cassette A _-3 Pass box PB _-3 14 ″, and the cassette A is transferred.
[0028]
[Problems to be solved by the invention]
In the conventional transfer system, a robot is used for exchanging cassettes between the stocker and the first transfer vehicle. Therefore, when transferring a plurality of cassettes, the robot arm is moved up and down or the first transfer vehicle is moved forward and backward. In addition to requiring a special mechanism and control, there is a problem that it takes a long time to transfer, and a special transfer means such as a manual is required for exchanging cassettes between the first transport vehicle and the second transport vehicle. There was a problem to say.
[0029]
Further, in the conventional transport method, since the second transport vehicle 14 reciprocating on the main track is realized by cassette transport between a plurality of clean rooms, the transport of the second transport vehicle increases as the number of transport cassettes increases. As a result, the frequency increases, and as a result, there is a problem that it becomes difficult to share the physical distribution in the general passage R and traffic.
[0030]
[Means for Solving the Problems]
The above-described problem is a transport system that transports transport parts between clean rooms with pass boxes that have a delivery area for transport parts and that faces a passage, along a track provided on the floor. A stocker provided in at least one of the clean rooms, a container having a size to accommodate a plurality of the transport parts and placed in the delivery area of the stocker, and a first moving in each clean room. One transport vehicle and a second transport vehicle moving between the clean rooms, wherein the delivery area of the stocker and each of the first and second transport vehicles are between the stocker and the first transport vehicle. And it is solved by the conveyance system provided with the transfer means which can deliver the said container automatically between a 1st conveyance vehicle and a 2nd conveyance vehicle.
[0031]
Also, a transport method for transporting a transport component with a transport vehicle that moves along a track provided on the floor surface between clean rooms with pass boxes facing the passage having a delivery area for the transport component, Arranging the number of second transport vehicles corresponding to the clean room for processing work at one end of the main line made into a single line connecting the clean rooms;
Moving each second transport vehicle in the same direction at the same time in the same direction and branching each second transport vehicle into a corresponding clean room pass box; and A step of moving a first transport vehicle moving along a branch line provided in the vicinity of the pass box, and a container for storing a plurality of the transport parts between the first transport vehicle and the second transport vehicle. Solved by a transfer method including a step of transferring by transfer, and a step of simultaneously moving the second transfer vehicles after transfer to the opposite direction in the same time zone and returning them to the main line. .
[0032]
If the transfer system is configured so that the exchange of the cassette between the stocker and the first transfer vehicle and the transfer of the cassette between the first transfer vehicle and the second transfer vehicle can be automatically realized, a robot required for the conventional transfer system And manual transfer means can be eliminated.
In addition, when a plurality of second transport vehicles are arranged on a single track main line and are transported in the same direction within a predetermined time, many cassettes can be transported at one time.
[0033]
Therefore, in the present invention, with regard to the transport system, a container with a shelf plate that can store a plurality of cassettes is used as a transport unit in the same manner as in the cassette storage state in the stocker, and the opening side end of the stocker and the first and second ends The conveyor system is configured by providing a container conveyor belt conveyor on the upper surface of each conveyance vehicle.
This means that the conventional crane installed in the stocker can be used as it is for accommodating a plurality of cassettes in the container, and at the same time, the number of robots described above can be reduced, and at the same time, there is no manual transfer means. This means that the mutual transfer of the container between the first transport vehicle and the second transport vehicle and thus the mutual transfer of the cassettes can be automated.
[0034]
As for the transport method, a plurality of second transport vehicles are arranged on a single main line, and the second transport vehicles are configured to move in the same direction at the same time for a certain time. Yes.
This means that it is possible to easily realize the efficiency of transporting containers and cassettes and increasing the transport amount without hindering physical distribution and traffic in the general passage.
[0035]
Accordingly, it is possible to expect an improvement in productivity in the transport process.
[0036]
DETAILED DESCRIPTION OF THE INVENTION
FIG. 1 is a diagram showing the overall configuration of the transport system of the present invention, FIG. 2 is a diagram for explaining a stocker in FIG. 1, FIG. 3 is a diagram for explaining a container in FIG. 1, and FIG. FIG. 5 is a diagram for explaining the container accommodating means, FIG. 5 is a diagram for explaining the first transport vehicle in FIG. 1, FIG. 6 is a diagram for explaining the transfer means between the stocker and the first transport vehicle, and FIG. FIG. 8 is a diagram for explaining the second transport vehicle, FIG. 8 is a diagram for explaining transfer means between the first transport vehicle and the second transport vehicle, FIG. 9 is a diagram for explaining the work desk in FIG. 1, and FIG. It is a figure explaining the conveyance method of invention in time series.
[0037]
11 is a diagram for explaining another transfer means between the first transport vehicle and the second transport vehicle, FIG. 12 is a diagram for explaining another second transport vehicle, and FIG. 13 is a second diagram in FIG. It is a figure explaining the conveyance state of this conveyance vehicle.
In the figures, the case where the present invention is applied to the application place and equipment described in FIG. 14 is taken as an example, and therefore the same target members and parts as those in FIGS. A duplicate description is omitted.
[0038]
FIG. 1 is a side view illustrating a transport system according to the present invention, and FIG.
In FIG. 1, the transport system 2 is the first clean room CR. _-1 , A container 22 disposed in the stocker 21, and a branch line T in the clean room. _-3 A first transport vehicle 23 disposed on the main track T _-1 A second transport vehicle 24 capable of moving above, and the second clean room CR _-2 And a branch line T in the clean room. _-Four It includes at least the various facilities of the first transport vehicle 23 arranged in the.
[0039]
The above clean room CR _-1 , CR _-2 Pass box PB on the general passage R side _-1 , PB _-2 It is as having mentioned above that it is equipped with.
Here, in order to make it easy to understand like the above, the above-mentioned each equipment including its operation will be described with reference to FIGS.
2A and 2B for explaining the stocker according to the present invention shown in FIG. 1, wherein FIG. 2A is an overall perspective view, FIG. 2B is a front view of FIG. 1A viewed from the opening side, and FIG. The side view which carried out the cross sectional view by aa ', (d) is the top view which carried out partial cross sectional view of the ceiling side.
[0040]
In FIG. 2, the stocker 21 deletes the delivery area 11c in the stocker 11, and defines only the convex stepped surface 11f and shelf board 11h formed in the both side walls of the stocker 11 from the opening side end face 11b. After retreating by a distance (for example, two cassette mounting lengths adjacent in the longitudinal direction of the stocker as shown in the figure), only the retreat area is formed on the concave step surface 21a with respect to the floor surface 11a. A belt conveyor 211 that reciprocates in the stocker longitudinal direction is disposed in the stepped surface 21a.
[0041]
In addition, it is the same as that of the said stocker 11 that the said crane 111 which uses the crane guide 11d provided in the said floor surface 11a as a guide is provided.
Accordingly, when the cassette 111 is accommodated in the stocker 21 by the crane 111, the broken line B in FIGS. 7B and 7C is formed on the convex step surface 11f excluding the region where the belt conveyor 211 is disposed and on the shelf plate 11h. Can be placed as shown in FIG.
[0042]
Also, FIG. 3 for explaining the container in FIG. 1, (a) is an overall perspective view, (b) is a side view in which (a) is partially sectioned, (c) is a front view, and (d) is (c). It is the top view which looked at the cross section by arrow a-a '.
In FIG. 3, the container 22 is a frame having a partition plate 22 a corresponding to the shelf plate 11 h of the stocker 21 and has a function as a shelf of the stocker, and at the same time, the plurality of cassettes A are moved by the operation of the crane 111. It is configured to be housed or removable.
[0043]
That is, the front view frame whose plan view size corresponds to the plan view size of the belt conveyor 211 in the stocker 21 and whose side view height does not exceed the height from the convex step surface 11f to the ceiling surface in the stocker 21. A partition plate 22a similar to the shelf plate is provided at a position corresponding to the shelf plate 11h in the stocker 21.
[0044]
A concave groove 22c having the same size as the concave groove 11g in the convex stepped surface 11f is provided on the upper surface of the bottom plate 22b at a position corresponding to the concave groove 11g, and the concave groove on the upper surface of the partition plate 22a. A concave groove 22d having the same size as the concave groove 11g is also provided at a position corresponding to 22c.
Therefore, by accommodating the cassette A in the container 22, it can be in the state shown by the broken line B in FIG. 2C. In this case, the cassette A is accommodated in the container by the concave grooves 22c and 22d. Since it is matched with the concave groove 11 g in the stocker 21, it can be realized by the crane 111 of the stocker 21.
[0045]
FIGS. 4A and 4B for explaining the means for storing the container in the stocker. FIG. 4A shows the container unaccommodated state, FIG. 4B shows the state when the container is accommodated, and FIG. .
That is, in (a) of the figure, the convex stepped surface 11f and the shelf board 11h located in the region excluding the belt conveyor 211 of the stocker 21 described in FIG. The cassette A is placed and accommodated by the crane 111.
[0046]
Therefore, the container 22 described in FIG. 3 is set in the belt conveyor area of the stocker 21. In this case, the belt conveyor 211 is set to the arrow a. ₁ The state shown in (b) can be realized simply by setting the operation time of the belt conveyor because it can be realized by placing the lower surface end of an empty container that does not contain a cassette on the end of the belt conveyor while moving in the direction. Can be.
[0047]
Next, the cassette A in the vicinity of the container is sequentially transferred to the bottom plate 22b and the partition 22a of the container by the operation of the crane 111 described above, so that the cassette A can be accommodated in the container as shown in FIG. .
On the other hand, in FIG. 5, the first transport vehicle 23 uses the battery as a power source in the same manner as the first transport vehicle 13 described in FIG. _-1 , T _-2 And branch line T _-3 , T _-Four Is provided with a container 231 that can be moved back and forth with respect to the traveling direction on the upper surface thereof. It is what.
[0048]
And the height “h” from the floor surface as a transport vehicle to the upper surface of the belt conveyor 231 ₁ "Is the height from the base surface of the stocker 21 to the upper surface of the belt conveyor 211" h ₂ "Is almost corresponding.
Accordingly, as shown in FIG. 6A, which shows a cross-sectional view of the transfer state of the container, that is, the cassette A, between the stocker 21 and the first transport vehicle 23, the upper surface of the belt conveyor in the stocker 21 and the first transport vehicle 23. Since the upper surface of the belt conveyor is substantially the same surface, the belt conveyor 211 of the stocker 21 and the belt conveyor 231 of the first transport vehicle 23 are shown in FIG. ₂ By moving in the direction, the container 22 already accommodated in the cassette A on the stocker side belt conveyor 231 can be directly transferred onto the belt conveyor 231 of the first transport car 23 as shown by a broken line as shown in FIG. As a result, transfer as a container and as a cassette A can be realized.
[0049]
Note that the belt conveyor 211 is, for example, the line T made of magnetic tape. _-1 , T _-3 It can be automatically operated by a magnetic signal from the above and the operation can be stopped.
In FIG. 7, the second transport vehicle 24 includes the first transport vehicle 23 and a cover 241 that can cover the upper surface of the first transport vehicle 23 with a margin including the belt conveyor and the container.
[0050]
The cover 241 in this case, which is fixed to the first conveyance vehicle on the side surface in the vicinity of the belt conveyor of the first conveyance vehicle 23, has outside air on almost the entire wall surface 241 a before and after the traveling direction as the conveyance vehicle. The opening / closing door 242 that can block the opening is provided, but the lower end side of the opening / closing door 142 is set to be positioned lower than the belt conveyor 231 as in the case of the second transport vehicle 14. is there.
[0051]
The clean room CR in FIG. 8A illustrating the container transfer means between the first transport vehicle and the second transport vehicle. _-1 Inside branch line T _-3 Above this is a first transport vehicle 23 on which a cassette-contained container 22 is placed, and the main track T _-1 An empty second transport vehicle 24 is located above.
First, the first transport vehicle 23 is moved to the clean room pass box PB. _-1 And the second transport vehicle 24 is moved to the pass box PB as described above. _-1 To the state shown in (b).
[0052]
At this point, the outer surface of the second transport vehicle 24 including its wheels is cleaned as described above.
Next, as shown in (c), the belt conveyor 231 of each transport vehicle is moved to an arrow a in a state where the first transport vehicle 23 is brought close to the second transport vehicle 24 having the open / close door 242 opened. ₂ When moved in the direction, the container 22 on the first transport vehicle 23 can be transferred to the second transport vehicle 24 as shown in the in-circle diagram.
[0053]
Accordingly, as shown in (d), the first transport vehicle 23 is retracted to a predetermined position and the second transport vehicle 24 with the door 242 closed is connected to the main line T. _-1 By returning to, container transfer between transport vehicles can be realized.
In FIG. 9, the work desk 26 according to the present invention is used to install equipment and test equipment required for various processing operations, etc., but the delivery area is formed on a concave step surface 26a. In addition, for example, a belt conveyor 261 similar to the belt conveyor 211 in the stocker 21 is installed in the concave stepped surface area, and the height from the base surface of the work desk 26 to the upper surface of the belt conveyor 261. “H _Three "Is the height of the first transport vehicle 23" h ₁ "Is set to match". "
[0054]
Accordingly, by operating the belt conveyor 231 of the first transport vehicle 23 and the belt conveyor 261 of the work desk 26 in the same direction, the container 22 is transferred between the work desk 26 and the first transport car 23. This can be realized as described in FIG.
Accordingly, as shown in FIG. 1B, for example, the next container 22 is transferred from the stocker 21 to the empty first transport vehicle as described above.
[0055]
On the other hand, main line T _-1 For example, a second clean room CR for processing work is used for the second transport vehicle 24 above. _-2 Pass box PB _-2 The container 22 is transferred by the transfer means described above to the first transport vehicle 23 in the clean room which is guided to the inside of the pass box and further moved to the vicinity of the pass box. By moving to the vicinity and transferring the container 22 onto the work table by the operation of the belt conveyor 231 of the first transport vehicle and the belt conveyor 261 of the work desk, the required container and thus the work desk of the cassette A are moved. Therefore, it is possible to configure the transfer system 2 that can easily realize the transfer.
[0056]
In such a transfer system, a plurality of cassettes A can be arbitrarily selected without requiring a transfer robot between a stocker, a work desk, and the first transfer vehicle, or a special manual transfer operation between the first transfer vehicle and the second transfer vehicle. Therefore, it is possible to easily and efficiently carry the product between clean rooms, thereby improving productivity.
FIGS. 10A and 10B illustrating the transport method of the present invention in time series, FIG. 10A is a plan view illustrating an application place, and FIG. 10B is a diagram illustrating a sequence diagram during transport.
[0057]
In FIG. 21A, as in the case of FIG. _-1 The battery chamber C for charging the second transport vehicle is provided at one end of the main line T. _-1 Clean room CR as a warehouse _-1 Three clean rooms CR including _-1 , CR _-2 , CR _-3 Each branch line T _-3 , T _-Four , T _-Five And the above two clean rooms CR for processing work. _-2 , CR _-3 Two second transport vehicles 24 to correspond to each of the _-1 , 24 _-2 Main line T _-1 The case where it arrange | positions to is taken as an example.
[0058]
And the clean room CR as a warehouse _-1 Two second transport vehicles 24 _-1 , 24 _-2 Clean room CR for processing containers transferred to _-2 , CR _-3 Each of the clean rooms CR _-2 , CR _-3 Cleanroom CR as a warehouse with containers containing the finished cassettes transferred in each _-1 A case where the sheet is conveyed will be described.
[0059]
In FIG. (B), the vertical axis represents the clean room CR. _-1 Distance L from the horizontal axis on the horizontal axis of the clean room CR _-1 This is shown as an elapsed time T from the corresponding position.
That is, in the figure (a), (b), clean room CR as a warehouse _-1 Two second transport vehicles 24 charged in the charging chamber B in a state where the cassette-accommodated container 22 is loaded. _-1 , 24 _-2 At the same time, the main line T _-1 Together with arrow A ₁ Leading second transport vehicle 24 moving in the direction _-1 First clean room CR _-2 Branch point p to ₁ Branch from the main line at the pass box PB of the clean room _-2 The second transport vehicle 24 that continues to enter _-2 Will continue and clean room CR _-3 Branch point p to ₂ Branch from the main line at the pass box PB of the clean room _-3 Enter.
[0060]
And each pass box PB _-2 , PB _-3 As described above, the container is transferred to the first transport vehicle 23 on each clean room side, and at the same time, the container 22 containing the finished cassette is transferred as necessary.
Therefore, each second transport vehicle 24 described above. _-1 And 24 _-2 In the opposite direction, but each clean room CR _-2 , CR _-3 Clean room CR _-1 Depending on the distance (L) from _-2 Is a transport vehicle 24 _-1 Main line T later than time “t” _-1 So that the main line T _-1 Arrow A together without interfering with each other above ₂ The above clean room CR as a warehouse _-1 Pass box PB _-1 Can enter.
[0061]
In this transport method, for example, when there are five clean rooms for processing work, the main line T _-1 For example, five second transport vehicles 24 are arranged on the top, and the second transport vehicles 24 are connected to the main line T according to the number of clean rooms for processing work. _-1 By arranging it above, there is a merit that each transport vehicle can reciprocate in the same time zone and the same direction, and efficient transport can be realized.
[0062]
Further, each of the above pass boxes PB _-1 ~ PB _-3 In the transfer of containers between the first transfer vehicle and the second transfer vehicle, the above-described belt conveyor 211 is used without any manual work, so the time required for the transfer is almost the same for each pass box. Will be the same, resulting in p ₁ And p ₂ Time difference between "t" ₁ "T" is almost the same as "t" ₂ Point p ₁ ′ And p ₂ Since both operations are completed at ′, there is an advantage that the time setting for the subsequent conveyance can be made very easily.
[0063]
In FIG. 11 which extracted and showed the principal part in connection with this invention as the application example as a conveyance system, (a) is a top view which showed the pass box in a clean room, (b) is the state at the time of a container transfer, (C) shows the state at the time of conveyance, respectively.
In the figure, the transport system 3 in this case is a pass box PB in each clean room of the transport system 2 of FIG. _-1 And PB _-2 As shown in FIG. 5A, the pass box PB whose plan view size is such that the first transport vehicle 23 and the second transport vehicle 24 can enter in a column state. _-6 It is constructed by changing to.
[0064]
And clean room CR _-1 A first transport vehicle 23 loaded with the above-mentioned container 22 accommodated in the cassette, and a main line T _-1 Together with the empty second transport vehicle 24 located above, the pass box PB _-6 When moved to, the noodles of each of the transport vehicles 23 and 24 can be cleaned.
Next, as shown in FIG. 2 (b), the first transport vehicle 23 is brought close to the second transport vehicle having the open / close door 242 open, and the belt conveyors 231 of both vehicles are moved to a. ₂ The container 22 is moved to the second transport vehicle 24 by operating in the direction.
[0065]
Thereafter, as shown in FIG. 3C, the first transport vehicle 23 is moved back to a predetermined position and the second transport vehicle 24 is moved to the main line T. _-1 By returning to, container transfer between transport vehicles can be realized.
Such pass box PB _-6 In the transfer system 3 provided with the container, since the container transfer between the transfer vehicles can be realized in a pass box provided with a cleaning means including an air shower, there is an advantage that dust that is likely to be generated at the time of the container transfer can be removed.
[0066]
Even when the container loaded on the second transport vehicle 24 is transported into another clean room, the pass box PB is placed in the clean room. _-6 The same merit can be obtained by providing.
FIGS. 12A and 12B illustrating an application example of the second transport vehicle, in which FIG. 12A is an overall perspective view, and FIG.
[0067]
In the figure, the second transport vehicle 25 is obtained by replacing only the cover 241 of the second transport vehicle 24 described above with a cover 251 according to the present invention.
That is, the cover 251 in this case is fixed to the first transport vehicle on the side surface in the vicinity of the belt conveyor of the first transport vehicle 23 in the same manner as the cover 241, and substantially covers the wall surface 251 a before and after the traveling direction. Similarly to the cover 241, the opening / closing door 242 is provided so as to block outside air over the entire surface.
[0068]
Further, the cover 251 is provided with a blowing means 252 capable of blowing air inside the cover in the ceiling area, and a plurality of exhaust holes 251c are provided on one side wall surface 251b parallel to the traveling direction. The airflow from the air passes through the opening hole 251e provided on the side of the wall 251d facing the wall 251b and flows into the cover.
[0069]
This means that the airflow from the blowing means 252 passes through the opening hole 251e and then is discharged from the exhaust hole 251c through the cassette housing area of the container 22 placed on the second transport vehicle 25. Arrow a _Three It passes through the flow path.
Accordingly, there is an advantage that dust and the like adhering to the surfaces of the container and the cassette and the vicinity of the belt conveyor can be constantly cleaned, and further cleanup can be realized.
[0070]
In FIG. 13 (a) illustrating the transport state of the second transport vehicle, the clean room CR _-1 Inside branch line T _-3 The first transport vehicle 23 on which the container 22 is placed is also connected to the main track T. _-1 The empty second transport vehicle 25 is positioned above, and the inside of the second transport vehicle 25 is cleaned by the airflow from the air blowing means 252.
Therefore, the first transport vehicle 23 is moved to the clean room pass box PB. _-6 The second transport vehicle 25 that has been moved in and the air blowing means 252 is stopped is moved into the pass box so as to be in the state shown in (b). At this time, the wheels of the second transport vehicle 25 are moved. As described above, the outer surface including the is cleaned.
[0071]
At this time, as described above, the first transport vehicle 23 is brought close to the second transport vehicle 25 having the open / close door 242 opened, and the respective belt conveyors 231 of both vehicles are operated to move the container 22 to the second transport vehicle 25. Transfer to the second transport vehicle 25.
Thereafter, as shown in (c), the first transport vehicle 23 is moved backward, and the second transport vehicle 25 with the open / close door closed is connected to the main line T. _-1 If the air blowing means 252 is moved while returning to the above, dust and the like adhering to the surface of the container and the cassette, the vicinity thereof, the belt conveyor and the like can be removed. Cassette A can be conveyed.
[0072]
Even when the container loaded on the second transport vehicle 25 is transported into another clean room, the second transport vehicle 25 is moved to the pass box PB of the clean room. _-6 By moving inward and cleaning the outer surface including the wheels, there is an advantage that the container and thus the cassette A can be transferred and transported while maintaining the clean state both inside and outside of the second transport vehicle.
[0073]
Further, the same effect can be obtained even if the second transport vehicle 25 is configured as a transport system instead of the second transport vehicle 24 in the transport system 2 described in FIG.
(Supplementary note 1) A transport system that transports transport parts between clean rooms with pass boxes facing the passages, having a delivery area for transport parts, using a transport vehicle that moves along a track provided on the floor. A stocker provided in at least one of the clean rooms, a container having a size for accommodating a plurality of transport parts and placed in the delivery area of the stocker, and a first moving in each clean room. One transport vehicle and a second transport vehicle that moves between the clean rooms, and the delivery area of the stocker and each of the first and second transport vehicles are between the stocker and the first transport vehicle. And a transfer system comprising transfer means capable of automatically delivering the container between the first transfer vehicle and the second transfer vehicle.
[0074]
(Supplementary Note 2) The container has a frame shape having a partition plate corresponding to a shelf plate provided in the stocker, and has a function as a transporting part accommodating portion of the stocker, and an operation of a crane provided in the stocker. The transfer system according to appendix 1, wherein a plurality of the transfer parts are accommodated or removed.
[0075]
(Additional remark 3) The transfer system of the said container is comprised with the belt conveyor which can reciprocate in the delivery direction of this container, The conveyance system characterized by the above-mentioned.
(Additional remark 4) The said pass box is equipped with the magnitude | size which can carry out the parallel parking of said 1st conveyance vehicle and a 2nd conveyance vehicle, The conveyance system of Additional remark 1 characterized by the above-mentioned.
(Supplementary note 5) The transport system according to supplementary note 1, wherein the second transport vehicle includes air blowing means that flows in a direction crossing the inside of the second transport vehicle and exhausts and exhausts air from one wall surface. .
[0076]
(Additional remark 6) It is the conveyance method which conveys conveyance parts with the conveyance vehicle which moves along the track | line provided in the floor surface between clean rooms with a pass box which has a delivery area of conveyance parts and faces a channel | path. And arranging the number of second transport vehicles corresponding to the clean room for processing work at one end of a single main line connecting the clean rooms, and the same second transport vehicles in the same time zone. Moving in the direction simultaneously, branching each of the second transport vehicles into the corresponding clean room pass box, and the first transport moving along the branch line provided in each of the clean rooms A step of moving a vehicle in the vicinity of the pass box, a step of transferring a container containing a plurality of transfer parts by automatic delivery between the first transfer vehicle and the second transfer vehicle, and after the transfer is completed Transfer method which comprises the respective second transport vehicle, a step of returning to the main line by simultaneous movement in opposite directions in the same time zone, the.
[0077]
(Supplementary note 7) A transport method characterized in that automatic delivery of transport parts between the first transport vehicle and the second transport vehicle is performed in the pass box.
[0078]
【The invention's effect】
As described above, according to the present invention, it is possible to automate the exchange of electronic components between the stocker and the first transport vehicle in the clean room, and between the first transport vehicle and the second transport vehicle for the general passage. By moving the second transport vehicle in the same time zone and in the same direction, it is possible to provide a transport system, a transport vehicle, and a transport method that improve productivity by increasing transport efficiency between a plurality of clean rooms.
[0079]
In the present invention, the case where the stocker is sized to accommodate the cassettes addressed to the second stage on each side wall surface, and the container is sized to accommodate four cassettes, is particularly limited to this. It is clear that the same drop can be obtained by applying the present invention to any size stocker or container containing any number of cassettes.
[0080]
In the present invention, a belt conveyor is used as the container transfer means. However, it is apparent that the same effect can be obtained even if the belt conveyor is replaced with, for example, a roller conveyor or a roller conveyor.
[Brief description of the drawings]
FIG. 1 is a diagram showing an overall configuration of a transport system according to the present invention.
FIG. 2 is a diagram for explaining a stocker in FIG. 1;
FIG. 3 is a diagram for explaining a container in FIG. 1;
FIG. 4 is a view for explaining container storage means in the stocker of FIG. 2;
FIG. 5 is a diagram for explaining a first transport vehicle in FIG. 1;
FIG. 6 is a diagram illustrating transfer means between a stocker and a first transport vehicle.
7 is a diagram illustrating a second transport vehicle in FIG. 1. FIG.
FIG. 8 is a diagram illustrating transfer means between a first transport vehicle and a second transport vehicle.
9 is a diagram illustrating the work desk in FIG. 1. FIG.
FIG. 10 is a diagram for explaining the conveyance method of the present invention in time series.
FIG. 11 is a diagram illustrating another transfer means between the first transport vehicle and the second transport vehicle.
FIG. 12 is a diagram illustrating another second transport vehicle.
13 is a diagram for explaining a transport state of the second transport vehicle in FIG. 12. FIG.
FIG. 14 is a diagram illustrating an application place of a transport system as a technical background.
FIG. 15 is a diagram illustrating a configuration of a conventional transport system.
FIG. 16 is a diagram for explaining the stocker of FIG. 15;
FIG. 17 is a view for explaining a cassette removal state with the stocker of FIG. 15;
FIG. 18 is a diagram illustrating a first transport vehicle in the clean room of FIG.
FIG. 19 is a diagram illustrating a second transport vehicle for a general passage in FIG.
FIG. 20 is a diagram for explaining a state in which cassettes are exchanged between transport vehicles.
FIG. 21 is a diagram illustrating a conventional transport method.
It is.
[Explanation of symbols]
C Battery compartment
CR _-1 , CR _-2 , CR _-3 Clean room
PB _-1 , PB _-2 , PB _-Five Pass box with air shower
T _-1 , T _-2 Main track
T _-3 , T _-Four , T _-Five Branch line
R General passage
2 Transport system
11a Bottom
11b Open side end face
11d crane guide
11f Convex step surface
11h shelf board
111 crane
21 Stocker
21a Concave stepped surface
211 belt conveyor
22 containers
22a Partition plate
22b Bottom plate
22c groove
22d groove
23 First carrier
231 belt conveyor
24, 24 _-1, 24 _-2 , Second carrier
241 cover
242 Open / close door
25 Second transport vehicle
251 cover
251a Wall surface
251b Wall surface
251c Exhaust hole
251d opening hole
252 Air blowing means
26 Work desk
26a Concave stepped surface
261 belt conveyor

Claims (4)

A transport system that transports transport parts with a transport vehicle that moves along a track provided on a floor surface between clean rooms with pass boxes facing a passage having a delivery area for transport parts,
And the shelf plate for mounting the transport members, and a crane to retrieve the plurality of transport members from the housing on the shelves or the shelves on at least one the disposed plurality of said of said clean room and stocker accommodate the transport parts,
The frame has a partition plate similar to the shelf plate at a position corresponding to the shelf plate, and has a function as a conveyance component accommodating portion of the stocker, and a plurality of the conveyance components are accommodated by the operation of the crane, or A container configured to be able to be taken out and having a size for accommodating a plurality of the transport parts, and placed in the delivery area of the stocker;
A first transport vehicle that moves in each of the clean rooms, and a second transport vehicle that moves between the clean rooms,
Transfer where the delivery area of the stocker and each of the first and second transport vehicles can automatically deliver the container between the stocker and the first transport vehicle and between the first transport vehicle and the second transport vehicle. A transportation system comprising means.   The transport system according to claim 1, wherein the pass box has a size capable of parallel parking the first transport vehicle and the second transport vehicle. The second transport vehicle includes air blowing means that flows in a direction crossing the inside of the second transport vehicle and flows out and exhausts from a wall surface on one side through a region that accommodates the transport component of the container. The transport system according to claim 1, wherein: A transport method for transporting a transport component with a transport vehicle that moves along a track provided on a floor surface between clean rooms with a pass box facing a passage having a delivery area for the transport component,
Arranging the number of second transport vehicles corresponding to the clean room for processing work at one end of the main line made into a single line connecting the clean rooms;
A step of simultaneously moving each of the second transport vehicles in the same direction in the same time zone and branching each of the second transport vehicles into a corresponding clean room pass box; and
Moving the first transport vehicle moving along the branch line provided in each of the clean rooms to the vicinity of the pass box;
A step which occupies move carrying the container that accommodates a plurality of the conveying parts automatic transfer of said second transport vehicle and the first transporting vehicle,
And a step of simultaneously moving the second transport vehicles after the transfer in the opposite direction in the same time zone and returning them to the main line.

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