JP4234652B2 - Workpiece holding device for film formation - Google Patents

Description

  The present invention relates to a film forming work holding apparatus, and more particularly to a film forming work holding apparatus for uniformly generating a PVD film or the like on an outer peripheral surface of a piston ring or the like.

  When generating a PVD film on the outer peripheral surface of a work such as a piston ring by performing PVD treatment using a film forming work holding device, in order to uniformly generate the PVD film on the entire outer peripheral surface of the work, It is necessary to uniformly perform PVD processing on the entire outer peripheral surface of the workpiece. Therefore, conventionally, the mounting table for mounting the workpiece such as the piston ring of the film forming work holding device is configured to revolve around the sun gear arranged in the center while rotating, The ionized vaporized substance can be uniformly irradiated from an ion source disposed opposite to the film forming work holding device.

  Japanese Examined Patent Publication No. 7-94711 discloses a film forming work holding device having this structure. The film forming work holding device includes a non-rotatable sun gear, a circular holder holding disk forming a work mounting table, a rotating body for supporting the holder holding disk, a gear fixed to the rotating body, a work, And an integrally rotatable pinion.

  The rotating body is arranged coaxially with the sun gear and is rotatable coaxially with the sun gear. The holder holding disk is constituted by a gear, and a plurality of holder holding disks are arranged at equal intervals in the circumferential direction on the rotating body, can rotate with respect to the rotating body, and mesh with the sun gear. Therefore, when the rotating body rotates coaxially with the sun gear, the holder holding disk is configured to make a planetary motion by rotating as if rotating around the sun gear.

  The gear is provided coaxially with the holder holding disk. A plurality of pinions are arranged at equal intervals in the circumferential direction on the holder holding disk, and their shafts are rotatably supported by the holder holding disk by passing through the holder holding disk, and mesh with the gears. Since the gear is fixed to the rotating body as described above, when the rotating body rotates coaxially with the sun gear, the holder holding disk rotates as described above, and accordingly, the pinion is integrated with the holder holding disk. Revolves around the rotation axis of the holding disk. At this time, since the pinion meshes with a gear that cannot rotate with respect to the rotating body, the pinion rotates together with the work.

An ion source for irradiating the evaporated substance ionized toward the outer peripheral surface of the work is provided at a position away from the film forming work holding device. Since the work rotates while revolving around the sun gear, the evaporated substance from the ion source is configured to be uniformly irradiated on the outer peripheral surface of the work.
Japanese Examined Patent Publication No. 7-94711 (2-3 pages, FIG. 2, FIG. 3)

  In the conventional film forming work holding apparatus described above, a plurality of works can be placed on a circular holder holding disk forming a work placing table, and a plurality of works can be PVD processed at a time. However, the position of the rotation axis of the work rotating on the holder holding disk coincides with the position of the rotation axis of the pinion. Since the rotation axis of the pinion penetrates the holder holding disk, it depends on the size of the work. Therefore, the position of the axis of rotation of the workpiece could not be changed arbitrarily.

  In addition, when the workpiece is small, if the distance between the rotation axes of the workpiece can be reduced, more workpieces can be placed on the holder holding disk, and the number of workpieces that can be PVD processed at a time is increased. Can do a lot. However, since the position of the axis of rotation cannot be changed, the distance between the axes of rotation cannot be reduced, and the gap between the workpieces must be increased.

  Further, the rotation of the work is due to the planetary motion of the pinion that revolves around the gear provided coaxially with the holder holding disk, and if the orbit diameter of the revolution that revolves around the sun gear can be increased, More workpieces can be placed on the holder holding disk. However, since the position of the rotation axis of the workpiece cannot be changed on the holder holding disk as described above, the revolution orbit diameter cannot be arbitrarily increased according to the size of the workpiece.

  Therefore, in the above-described conventional film forming work holding device, the number of works that can be PVD processed at a time is constant regardless of the size of the work. The processing capacity could not be maximized.

  Therefore, the present invention can reduce the distance between the axis of rotation of the workpiece according to the size of the workpiece, and can increase the diameter of the trajectory of the revolution of the workpiece, thereby increasing the number of workpieces that can be PVD processed at a time. It is an object of the present invention to provide a film forming work holding device that can be used.

In order to achieve the above-described object, the present invention provides a central gear fixed in a non-rotatable manner, and an inner circular guide that is arranged concentrically with the central gear, is driven to rotate about an axis, and surrounds the central gear. a table comprising a section, a plurality of gear unit disposed between the central gear and the guide portion, respectively detachably provided on the gear unit of the plurality of, being guided by the guide portion, the peripheral of the table A plurality of spacers each having the same width with respect to the direction or having different widths with respect to the circumferential direction of the table, and a mounting table provided on each of the gear units for mounting a work, each of the gear units being A support planet, a primary planetary gear supported by the support member and meshing with the central gear and rotatable about its own axis, a secondary planetary gear meshing with the primary planetary gear, and the support Rotatably supported and a said secondary planetary gear integrally rotatable support shaft relative to the member, connecting the axis of the primary planetary gear and the center of the one of the gear unit of the central gear Virtual The support member is arranged so that the support shaft of the one gear unit is positioned upstream of the rotation direction of the table with respect to the radial straight line, and the primary planetary gear is always meshed with the central gear. It means for maintaining constantly the position of the axis of said secondary planetary gear and means for maintaining a predetermined position from the axis of the primary planetary gears, mounting stage is coaxially detachably and to the support shaft The support shaft is provided so as not to rotate with respect to the support shaft, and rotates around the central gear while rotating around the central gear. The support shaft of the adjacent gear unit is provided detachably on the same axis. When mounted, the adjacent spacers can be brought into contact with each other by rotation of the table, and the distance between adjacent support shafts can be changed according to the width of the mounted spacer. A workpiece holding device for forming a workpiece holding device film is provided.

  Here, a first boss is integrally provided coaxially with the central gear, and a second boss that is in contact with the first boss is coaxially provided with the primary planetary gear, and the central gear and the primary are provided. It is preferable to restrict excessive meshing with the planetary gear.

Further, it is preferable that each of the plurality of spacers is circular. Or, respectively, the plurality of spacers includes a pair of linear side portions two opposing sides extending in the radial direction of the table, the outer peripheral side curved edges to match the curvature of the guide portion connecting the outer end between the straight line sides It is preferable that the inner end of the straight side portion is connected to each other and the inner peripheral side curved side portion shorter than the outer peripheral side curved side portion is formed into a substantially sector shape having four sides.

  According to the film forming work holding device of the first aspect, the revolving track of the mounting table is defined by the contact between the spacer and the guide portion, and is made by the rotation of the table. The rotation of the mounting table is performed by rotation of the table, meshing of the central gear and the primary planetary gear, and meshing of the primary planetary gear and the secondary planetary gear. And when the size of the workpiece | work which should form a PVD film | membrane is small, the distance between adjacent support shafts can be set small by mounting | wearing each support shaft with the 1st spacer which has 1st width | variety. Therefore, the mounting tables can be densely arranged in a limited area on the table, and as a result, the workpieces can be densely arranged. In addition, when the size of the workpiece on which the PVD film is to be formed is large, the distance between the support shafts can be set large by attaching the second spacer having the second width to each support shaft. Therefore, even if the workpiece is a large size, the mounting table can be fixed to the support shaft without interfering with each other without interfering with each other. Also, by mixing the first spacer having the first width and the second spacer having the second width and bringing them into contact with each other, a PVD film can be simultaneously formed on a plurality of workpieces having different sizes.

  In addition, since the spacer is guided by an inner circular guide that surrounds the central gear, the position of the outer peripheral surface of the workpiece can be maintained at a position near the peripheral edge of the spacer, that is, a position near the guide portion of the table. It is possible to reduce the change in the outermost peripheral position of the workpiece, that is, the change in the distance between the ion source and the workpiece, and the sizes of a plurality of workpieces to be PVD processed at a time are different from each other. However, the change in the quality of the film produced on the outer peripheral surface of each workpiece can be reduced.

  According to the film forming work holding device according to claim 2, the first boss and the second boss are in contact with each other to restrict excessive meshing between the central gear and the primary planetary gear. It can be prevented that the planetary gear is excessively engaged with the central gear and stops rotating.

According to the workpiece forming apparatus for forming a film according to the third aspect, each of the plurality of spacers has a circular shape, so that the manufacture is easy.

According to the work forming apparatus for forming a film according to claim 4, each of the plurality of spacers connects the pair of straight side portions extending in the radial direction of the table and the outer ends of the straight side portions. The outer curved side that matches the curvature of the part and the inner ends of the straight side are connected to each other, and the inner curved side is shorter than the outer curved side. Therefore, the linear sides of the adjacent spacers can be brought into contact with each other so that the spacer itself cannot be rotated. Generally, the coating material adheres not only to the workpiece but also to the workpiece holding device, but at least between the spacer and the mounting table for the purpose of preventing the coating material from adhering to the spacer and the workpiece holding device portion below it. When a plurality of covers are provided, the spacers themselves do not rotate, so that each cover can be easily fixed to each spacer.

  A film forming work holding device according to an embodiment of the present invention will be described with reference to FIGS. The film forming work holding device 1 is a device for generating a PVD film on the outer peripheral surface of a piston ring 2 (FIG. 2) as a work, and a predetermined distance is provided to an ion source (not shown) that irradiates ionized evaporated substances. As shown in FIG. 1 or FIG. 2, the central gear 11, which is a sun gear, a table 12, and a gear unit 20 are provided. Examples of the PVD film include films such as ion plating, vacuum deposition, and sputtering.

  The central gear 11 cannot rotate with respect to an apparatus body (not shown) to which an ion source (not shown) is fixed. The diameter of the central gear 11 is much larger than both the primary planetary gear 21 and the secondary planetary gear 22 described later, and the central gear 11 on the lower side of the central gear 11 facing the table 12 described later in FIG. A first boss 11 </ b> A (FIG. 2) that protrudes radially outward from the peripheral edge of the central gear 11 and forms a circular shape as a whole is provided integrally and coaxially with the central gear 11. In FIGS. 1 and 3, for convenience of explanation, the central gear 11, the primary planetary gear 21, and the secondary planetary gear 22 are simply represented by circles.

  The table 12 has a substantially circular plate shape and is arranged in a positional relationship concentric with the central gear 11. As shown in FIG. 2, a through hole 12a is formed at the axial center of the table 12, and a bearing 12A is provided in the through hole 12a. Further, the shaft 11B of the central gear 11 that cannot rotate with respect to the central gear 11 passes through the through hole 12a, and the table 12 is centered on the shaft 11B of the central gear 11 via the bearing 12A. It is supported as rotatable. The central gear 11 is located on the upper surface side of the table 12, that is, on the upper side in FIG. A guide portion 12 </ b> B is provided around the table 12 so as to surround the table 12. Guide part 12B consists of a wall part extended in the direction of an axis of table 12 from a peripheral part of table 12, is provided over the perimeter of table 12, and inner circumference makes a circle. A support member guide groove 12 b is formed on the upper surface of the table 12. The support member guide groove 12b is formed on the upper surface of the table 12 so as to draw a circle coaxially with the central gear 11 and having a diameter larger than that of the central gear 11, and the rotation shaft 21A passing through the support member 25 described later. The protrusion 21C can be engaged.

  A gear 12C (FIG. 2) is provided on the outer periphery of the table 12, and the gear 12C meshes with a gear 32 provided at one end of an output shaft 31 of a motor (not shown). The table 12 is configured to rotate about the axis of the central gear 11 in the clockwise direction in FIG. 1 when driven by a motor (not shown). An ion source (not shown) is arranged toward the table 12 at a position spaced a predetermined distance outward in the radial direction of the table 12.

  As shown in FIG. 1, a plurality of gear units 20 are arranged between the central gear 11 and the guide portion 12B of the table 12, and a primary planetary gear 21, a secondary planetary gear 22, a spacer 23, and the like. The mounting table 24 (FIG. 2). Although five gear units 20 appear in FIG. 1, the left side portion of FIG. 1 (not shown) is also densely provided between the central gear 11 and the guide portion 12B without a gap.

  The primary planetary gear 21 and the secondary planetary gear 22 are respectively provided on the upper surface side shown in FIG. 2 of a support member 25 (FIG. 2) having a substantially elliptical shape when viewed from the axial direction of the table 12. One end and the other end of the member 25 are rotatably supported around rotation shafts 21A and 22A inserted into through holes 25a and 25b penetrating in the axial direction of the table 12, respectively. The primary planetary gear 21 and the secondary planetary gear 22 mesh with each other, and the primary planetary gear 21 can rotate about its own axis. As shown in FIG. 2, the lower surface of the support member 25 facing the table 12 is in contact with the table 12 and is slidable with respect to the table 12.

  The rotating shaft 21 </ b> A of the primary planetary gear 21 is press-fitted into the through hole 25 a of the support member 25 and cannot rotate with respect to the support member 25. A through hole 21a is formed at the axial center of the primary planetary gear 21, a bearing 21B is provided in the through hole 21a, and the rotating shaft 21A passes therethrough. The primary planetary gear 21 is configured to be rotatable with respect to the rotating shaft 21A via the bearing 21B.

  A bearing 25A is provided in the through hole 25b of the support member 25 into which the rotating shaft 22A of the secondary planetary gear 22 is inserted, and the rotating shaft 22A passes therethrough. The rotating shaft 22A of the secondary planetary gear 22 can rotate with respect to the support member 25 via the bearing 25A. A through-hole 22a is formed at the axial center position of the secondary planetary gear 22, and the rotary shaft 22A is press-fitted into the through-hole 22a and passes through the secondary planetary gear 22, and the secondary planetary gear with respect to the rotary shaft 22A. 22 is not rotatable.

  The primary planetary gear 21 is a gear having a smaller diameter than the secondary planetary gear 22, and the rotating shaft 21A that supports the primary planetary gear 21 is a support member 25 on which the primary planetary gear 21 is supported in FIG. It protrudes from the lower surface side with respect to the upper surface side, and the protruding portion forms a protruding portion 21C. The protrusion 21C is guided by engaging with the support member guide groove 12b, so that the position of the rotation shaft 21A of the primary planetary gear 21 is always set to the position of a circle with a predetermined radius from the shaft 11B of the central gear 11. Can be maintained. For this reason, the primary planetary gear 21 can always be kept engaged with the central gear 11. The support member 25 can swing like a pendulum on the upper surface of the table 12 around the rotation shaft 21 </ b> A of the primary planetary gear 21.

  On the lower side of the primary planetary gear 21 facing the table 12 in FIG. 2, a second boss 21D located radially inward from the peripheral edge of the primary planetary gear 21 over the entire circumference of the primary planetary gear 21. Is provided. The second boss 21 </ b> D has a circular shape as a whole, and is provided integrally and coaxially with the primary planetary gear 21. The second boss 21 </ b> D of the primary planetary gear 21 can contact the first boss 11 </ b> A of the central gear 11, and the first boss 11 </ b> A and the second boss are in contact with the primary planetary gear 21. By contacting 21D, excessive meshing can be restricted and excessive backlash can be prevented. For this reason, the primary planetary gear 21 becomes non-rotatable and the primary planetary gear 21 or the central gear 11 can be prevented from being broken.

  The other end 22B with respect to one end of the rotating shaft 22A of the secondary planetary gear 22 passing through the support member 25 has a polygonal cross section cut by a plane perpendicular to the axial direction, and the other end 22B. Is provided with a mounting table 24. The rotating shaft 22A of the secondary planetary gear 22 serves as a support shaft for the mounting table 24, and the mounting table 24 has a coaxial positional relationship with the support shaft. The mounting table 24 includes a bottom portion 24A having a substantially disc shape, and a cylindrical portion 24B extending coaxially from the bottom portion 24A in the axial direction. A concave portion 24a is formed at the axial center position of the bottom portion 24A. The concave portion 24a has a cross section cut perpendicularly to the axial direction of the bottom portion 24A and matches the polygonal shape of the other end portion 22B of the rotating shaft 22A of the secondary planetary gear 22. ing. The other end 22B of the rotation shaft 22A of the secondary planetary gear 22 can be fitted into the recess 24a, and the other end 22B of the rotation shaft 22A can be removed from the recess 24a.

  By rotating the secondary planetary gear 22 with the other end 22B fitted in the recess 24a, the secondary planetary gear 22, the rotating shaft 22A of the secondary planetary gear 22, and the bottom 24A of the mounting table 24 are integrated. It rotates about the axis of the secondary planetary gear 22. When the other end 22B is removed from the recess 24a, a spacer 23 described later is configured to be detachable from the rotating shaft 22A of the secondary planetary gear 22.

  A peripheral portion of the bottom 24A of the mounting table 24 is a thin portion 24C that is thin in the axial direction of the bottom 24A. The shape of the thin portion 24C matches the shape of one end of the cylindrical portion 24B, and the mounting table 24 and the cylindrical portion 24B are coaxially integrated with each other by fitting one end of the cylindrical portion 24B into the thin portion 24C. It is comprised so that it may become. On the outer periphery of the cylindrical portion 24B, as shown in FIG. 2, a plurality of piston rings 2 which are PVD-treated workpieces are stacked coaxially with the cylindrical portion 24B in the axial direction of the cylindrical portion 24B. And is mounted on the top table. When the piston ring 2 is mounted on the outer periphery of the cylindrical portion 24B, the joint of the piston ring 2 is widened, and the cylindrical portion 24B is inserted into the inner peripheral surface side of the piston ring 2 to perform the mounting.

  The spacer 23 is provided at the position of the rotating shaft 22 </ b> A that extends between the secondary planetary gear 22 and the bottom 24 </ b> A of the mounting table 24. The spacers 23 have a disk shape, and are provided for each of the plurality of gear units 20. There are two types of spacers 23, a large diameter spacer 23-1 as shown in FIG. 1 and a small diameter spacer 23-2 as shown in FIGS. 2 and 3. -2 has a first diameter, and the large-diameter spacer 23-1 has a second diameter larger than the first diameter. Each of the spacers 23-1 and 23-2 is prepared for each of the plurality of gear units 20, and only one of the large-diameter spacer 23-1 and the small-diameter spacer 23-2 is geared. The unit 20 is configured so that it can be mounted.

  The large-diameter spacer 23-1 is attached to the gear unit 20 when the diameter of the piston ring 2, which is a workpiece to be subjected to PVD processing, is substantially the same as the diameter of the large-diameter spacer 23-1. The small diameter spacer 23-2 is attached to the gear unit 20 when the diameter of the piston ring 2 is substantially the same as the diameter of the small diameter spacer 23-2. The diameter of the small-diameter spacer 23-2 corresponds to the first diameter, and the diameter of the large-diameter spacer 23-1 corresponds to the second diameter.

  As shown in FIG. 2, a through hole 23a is formed at each axial center of the spacer 23, a bearing 23A is provided in the through hole 23a, and a rotating shaft 22A of the secondary planetary gear 22 is provided. It penetrates. The spacer 23 is rotatably supported on the rotating shaft 22A of the secondary planetary gear 22 via a bearing 23A, and the peripheral edge portion of the spacer 23 can abut on the guide portion 12B of the table 12. When the table 12 is rotated by driving a motor (not shown), the peripheral edge portion of the guide portion 12B comes into contact with the guide portion 12B of the table 12, and the spacer 23 is guided by the guide portion 12B of the table 12. It is configured.

  Since the space between the bearing 23A and the portion of the spacer 23 defining the through hole 23a is loosely fitted with a plus tolerance clearance of about 50 μm, the spacer 23 can be easily removed from the bearing 23A. On the other hand, since the bearing 23A and the rotating shaft 22A of the secondary planetary gear 22 are fitted with a minus tolerance by press-fitting, the bearing 23A cannot be easily detached from the rotating shaft 22A of the secondary planetary gear 22. It is like that.

  When a motor (not shown) is driven and the table 12 rotates in the clockwise direction in FIG. 1, the gear unit 20 causes the rotating shaft 21 </ b> A of the primary planetary gear 21 to move by sliding between the table 12 and the support member 25 of the gear unit 20. It swings clockwise as the center, and the peripheral edge portion of the spacer 23 comes into contact with the inner peripheral surface of the guide portion 12B of the table 12. If the table 12 continues to rotate in this state, the peripheral portion of the spacer 23 does not slide with respect to the inner peripheral surface of the guide portion 12B, and the spacer 23 rotates about the rotation shaft 22A of the secondary planetary gear 22. Without revolving, it revolves around the central gear 11 together with the guide portion 12B. As the spacer 23 revolves, the gear unit 20 provided with the spacer 23 revolves around the central gear 11.

  At this time, the primary planetary gear 21 meshing with the central gear 11 rotates while revolving around the central gear 11. Similarly, the secondary planetary gear 22 meshing with the primary planetary gear 21 is connected to the central gear 11. Rotates while revolving around. Accordingly, the rotating shaft 22A of the secondary planetary gear 22 that forms the support shaft of the mounting table 24 on which the piston ring 2 is mounted also rotates, and the mounting table 24 supports the support shaft while revolving around the central gear 11. At the same time, it rotates around the axis of the support shaft. For this reason, the irradiation of the ionized evaporative substance from the ion source (not shown) can be performed uniformly on the outer peripheral surface of the piston ring 2 as the work placed on the placing table 24.

  As the table 12 continues to rotate, the distance between the gear units 20 decreases, the peripheral portions of the spacers 23 come into contact with each other, and the central gear 11 and the guide portion of the table 12 as shown in FIG. In this state, the gear unit 20 is densely arranged between the gears 12B.

  When the diameter of the piston ring 2 as a work is small, a small-diameter spacer 23-2 is used instead of the large-diameter spacer 23-1, but even in this case, as shown in FIG. 11 and the guide portion 12B of the table 12, the gear unit 20 is densely arranged, so that the placing table 24 is densely arranged. As a result, the piston ring 2 placed on the placing table 24 is Closely arranged.

  Since the distance between the support shafts of the mounting table 24 is defined by the spacer 23 that contacts the guide portion 12B of the table 12, the secondary planetary gear 22 that forms the support shaft of the mounting table 24 on which the piston ring 2 is mounted. The revolving track diameter of the rotating shaft 22A when revolving around the central gear 11 can be determined by the spacer 23 coming into contact with the inner peripheral surface of the guide portion 12B of the table 12. Further, the number of mounting tables 24 for mounting the piston ring 2 as a work on the table 12 can also be determined by the spacer 23.

  For this reason, according to the diameter of the spacer 23 with which the gear unit 20 was mounted | worn, the distance between adjacent support shafts can be changed. As a result, by mounting the spacer 23 corresponding to the diameter of the piston ring 2 on the gear unit 20, it is possible to define the revolution trajectory having the maximum radius corresponding to the diameter of the piston ring 2, and to be placed. The distance between the rotating shafts 22A of the secondary planetary gear 22 that coincides with the axis of the piston ring 2 and the support shaft of the mounting table 24 can be minimized, and the number of piston rings 2 that can be PVD processed at one time is reduced. The maximum number can be set in accordance with the diameter of the piston ring 2. Further, even if the piston ring has a large diameter, the mounting table 24 can be fixed to the support shaft without interfering with each other without interfering with each other during rotation.

  FIG. 4 is an explanatory view showing a modified example of the spacer. In the embodiment described above, the spacers 23-1 and 23-2 have a circular shape, but in a modified example, they have a substantially fan shape. Specifically, the spacer 123-1 has a larger width in the circumferential direction of the table 12, and the spacer 123-2 has a smaller width than the spacer 123-1. Each spacer has a pair of straight side portions 123a and 123b extending in the radial direction of the table 12 on the opposite sides and the outer ends of the straight side portions 123a and 123b are connected to each other to match the curvature of the guide portion 12B. The side part 123c and the inner ends of the straight side parts 123a and 123b are connected to each other, and the inner side curved side part 123d that is shorter than the outer side curved side part 123c is formed to form a substantially sector shape having four sides. Each of these spacers is connected to the rotating shaft 22A. The “width in the circumferential direction of the table 12” is a width that defines the distance in the table circumferential direction between the adjacent rotary shafts 22A in a state where the spacers are in contact with each other in the table circumferential direction.

  According to such a configuration, the outer peripheral curved side portions 123c of the spacers 123-1 and 123-2 are arranged along the guide portion 12B, and the linear side portions (for example, 123a and 123b) of the adjacent spacers contact each other. The spacer itself can be made non-rotatable by contacting. In general, the coating material adheres not only to the workpiece but also to the workpiece holding device. For the purpose of preventing the coating material from adhering to at least the spacers 123-1 and 123-2 and the workpiece holding device below it, the spacer is used. When a plurality of covers (not shown) are provided between 123 and the mounting table 24, since the spacers themselves do not rotate, the respective covers can be easily fixed to the respective spacers.

  The film forming work holding device according to the present invention is not limited to the above-described embodiment, and various modifications and improvements can be made within the scope described in the claims. For example, in the present embodiment, the table 12 is rotated without the central gear 11 rotating, but the central gear may be rotated by making the table impossible to rotate.

  In this case, an urging means for urging at least one support shaft of the plurality of gear units in a direction opposite to the rotation direction of the central gear is provided, and relative to the rotation direction of the central gear. To revolve the gear unit. Furthermore, in order to prevent the gear unit from staying at a fixed position on the table, the rotational speed of the central gear and the revolution speed of the gear unit are set to different values.

  In the first embodiment, the small-diameter spacer 23-2 or the large-diameter spacer 23-1 is attached to all the gear units 20, but the small-diameter spacer 23-2 is attached to a predetermined gear unit 20. The remaining gear units 20 may be mixed so that the large-diameter gear unit 20 is mounted. The spacers are not limited to the two types of the first spacer and the second spacer, but three or more types of spacers having different widths in the circumferential direction of the table are prepared and appropriately selected. When the diameters of the piston rings as the workpieces are various, spacers having a width corresponding to them may be prepared and attached to the gear unit 20 respectively.

  By doing in this way, a PVD film can be simultaneously formed on a plurality of piston rings having different sizes. Further, since the spacer is guided by the inner circular guide portion 12B surrounding the central gear, the change in the outermost peripheral position of the piston ring, that is, the change in the distance between the ion source and the piston ring can be reduced. Even when the sizes of the plurality of piston rings to be PVD processed at a time are different from each other, the change in the quality of the coating produced on the outer peripheral surface of each piston ring can be reduced.

  Moreover, although the film forming work holding device 1 is an apparatus for generating a PVD film on the outer peripheral surface of a piston ring as a work, it may be a diamond-like carbon (DLC) film forming apparatus.

  The present invention is extremely useful in the field of a film forming work holding apparatus, and particularly in the field of a film forming work holding apparatus for generating a PVD film or a diamond-like carbon film.

The partial cross-sectional top view which shows the state with which the large diameter spacer was mounted | worn with the gear unit in the workpiece | work holding apparatus for film formation by embodiment of this invention. The principal part sectional drawing which shows the workpiece | work holding apparatus for the film formation by embodiment of this invention. The partial cross-sectional top view which shows the state with which the small diameter spacer was mounted | worn with the gear unit in the workpiece | work holding apparatus for film formation by embodiment of this invention. Explanatory drawing which shows the example of a change of a spacer.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Film | membrane formation work holding device 2 Piston ring 11 Central gear 11A 1st boss | hub 12 Table 12B Guide part 20 Gear unit 21 Primary planetary gear 21D 2nd boss | hub 22 Secondary planetary gears 23 and 123 Spacer 23-1 Large diameter spacer 23-2 Spacer 123-1 with small diameter Large spacer 123-2 Spacer 24 with small width 24 Mounting table 25 Support member

Claims (4)

A central gear fixed non-rotatably,
A table that is arranged concentrically with the central gear, is driven to rotate about an axis, and includes an inner peripheral circular guide portion surrounding the central gear;
A plurality of gear units disposed between the central gear and the guide portion;
A plurality of spacers that are detachably provided on the plurality of gear units, are guided by the guide portions , have the same width in the circumferential direction of the table, or have different widths in the circumferential direction of the table;
A mounting table provided on each of the gear units for mounting a workpiece;
Each of the gear units includes a support member, a primary planetary gear supported by the support member and meshed with the central gear and rotatable about its own axis, and a secondary meshed with the primary planetary gear. A planetary gear and a support shaft rotatably supported with respect to the support member and rotatable integrally with the secondary planetary gear, the center of the central gear and the primary planetary gear of the gear unit being one The support member is arranged so that the support shaft of the one gear unit is positioned on the upstream side in the rotational direction of the table with respect to a virtual radial straight line connecting the axis.
Always means for maintaining said primary planetary gear while being meshed with the central gear constantly and means for maintaining the position of the axis of said secondary planetary gear in a predetermined position from the axis of the primary planetary gears Prepared,
The mounting table is provided so as to be detachable coaxially with the support shaft and non-rotatable with respect to the support shaft, and revolves around the central gear while rotating around the central axis of the support shaft. And
The plurality of spacers are provided so as to be detachable coaxially with respect to the support shaft, and the adjacent spacers abut each other by rotation of the table in a state where the spacers are mounted on the support shafts of the adjacent gear units. A film forming work holding device, wherein the distance between adjacent support shafts can be changed according to the width of the mounted spacer.   A first boss is provided coaxially with the central gear, and a second boss is provided integrally with the primary planetary gear and is in contact with the first boss, and the central gear and the primary planetary gear are provided. The film holding work holding device according to claim 1, wherein excessive engagement of the film is restricted. The plurality of spacers for forming a coating film workpiece holding device according to claim 1 or 2, wherein the respective circular. Each said plurality of spacers includes a pair of linear side portions two opposing sides extending in the radial direction of the table, and the outer curved side portion that matches the curvature of the guide portion connecting the outer end between the straight line sides The inner ends of the straight side portions are connected to each other, the inner peripheral side curved side portion is shorter than the outer peripheral side curved side portion, and a substantially sector shape having four sides is formed. The work holding apparatus for film formation of Claims 2 thru | or 2.

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