JP4188815B2 - Perfluorocompound decomposition method and apparatus - Google Patents

Description

  The present invention relates to a perfluoro compound (hereinafter referred to as PFC) decomposition processing method and a decomposition processing apparatus used in the field of semiconductors and liquid crystals.

In the field of semiconductors and liquid crystals, PFC gas is used as an etching gas or a CVD cleaning gas. PFC gas is a global warming gas that is several thousand to several tens of thousands of CO ₂ , and the reduction of greenhouse gas emissions has been determined by the World Warming Conference (COP3).

  One method for decomposing PFC gas is to use a catalyst. This method can obtain a high decomposition rate at a low temperature. However, if solid matter or the like is mixed in the PFC gas, the decomposition performance is degraded due to clogging of the catalyst or the like.

  In order to solve this problem, it has been proposed to pass a PFC-containing gas through a water scrubber to remove in advance the solids contained in the gas or Si compounds that may be solidified in the PFC thermal decomposition apparatus. (For example, refer to Patent Document 1). In addition, a method of decomposing PFC gas after burning silane contained in PFC gas and removing generated silica powder has been proposed (for example, see Patent Document 2).

JP 2001-137659 A (Claims, Abstract)

JP 2003-130327 A (Claims and Abstract)

  In recent years, with the expansion of use of PFC gas, many substances have been mixed in PFC exhaust gas. As a result, even if a water scrubber or the like is installed in the front stage of the PFC decomposition treatment apparatus, clogging of the catalyst cannot be prevented, and the decomposition performance deteriorates.

  An object of the present invention is to make it possible to improve the PFC decomposition performance as compared with a method using a water scrubber.

In the method of decomposing a PFC-containing gas by contacting it with a catalyst, the present invention involves contacting the PFC-containing gas with H ₂ O in advance and separating the solid oxide produced by the contact from the PFC-containing gas. is there. Further, this treatment is performed under the condition where the PFC-containing gas is heated, and further, the PFC-containing gas is brought into contact with the catalyst while being kept in a heated state.

The present invention also includes a catalytic reaction tower having a PFC decomposition catalyst, and a PFC decomposition treatment apparatus in which a PFC-containing gas is introduced into the catalytic reaction tower to decompose PFC. A solidification device that solidifies a part of a gaseous compound contained in the gas by contacting with H ₂ O in a heated state of the PFC-containing gas, and a solid substance from the gas while maintaining the gas in a heated state. In addition to providing a solid separation device for separation, the gas that has passed through the solid separation device is introduced into the catalytic reaction tower while being kept in a heated state.

The PFC gas contains various compounds, and it has been found that a gaseous compound that reacts with H ₂ O to become a solid oxide is contained therein. Further, it has been found that gas compounds that react with H ₂ O to form solid oxides include those that generate a substance that solidifies upon cooling when reacted with H ₂ O. Substances that become solid upon cooling cannot be separated and removed by using a water scrubber, but can be separated and removed only by reacting with H ₂ O in a heated atmosphere as in the present invention.

  ADVANTAGE OF THE INVENTION According to this invention, in PFC decomposition | disassembly using a catalyst, it can suppress that PFC decomposition | disassembly performance falls by the clogging etc. of a catalyst.

  Hereinafter, the present invention will be described with reference to the drawings. FIG. 1 shows a processing flow of a PFC decomposition processing method according to the present invention. FIG. 2 shows an embodiment of a PFC decomposition processing apparatus according to the present invention. FIG. 3 shows an example of a combustion furnace in the PFC decomposition processing apparatus.

  The PFC decomposition processing method according to the present invention will be described with reference to the processing flow of FIG. In addition, the arrow in a figure shows the flow direction of gas. The processing flow of this embodiment includes a solidification step 50, a solid matter separation step 51, a catalytic reaction step 52, and an exhaust gas cleaning step 53. Further, the exhaust gas after washing is discharged out of the system by the exhaust equipment 54. For example, PFC-containing exhaust gas 100 discharged from an etching process or a CVD cleaning process in a semiconductor or liquid crystal manufacturing factory is first introduced into the solidification process 50.

In the solidification process 50, oxygen or air is added to the fuel 1 as the oxygen source 2 for combustion, and a flame is formed. At this time, the fuel and the oxygen source may be supplied separately and ejected as a large number of coaxial jets. As the fuel, a fuel usually used in a semiconductor or liquid crystal manufacturing factory, such as LNG, LPG, propane or the like, can be used. In the solidification step 50, the PFC-containing exhaust gas 100 and the water vapor 3 are supplied to the flame formation region. Thereby, a part of gaseous compound contained in PFC containing gas is converted into a solid oxide. In addition to the water vapor 3, oxygen 4 may be further added by O ₂ or air. The added oxygen 4 converts a part of the gaseous compound remaining in the PFC-containing exhaust gas into a solid oxide. The PFC-containing exhaust gas that has undergone the solidification step 50 is then introduced into the solid matter separation step 51, where the solid matter is separated. The solid matter separation step 51 is performed in a heated atmosphere. The reason for this is that when the reaction is performed at room temperature, a solid oxide is newly generated while the PFC-containing exhaust gas is sent to the catalytic reaction step 52, and this oxide is deposited on the pipe or the PFC decomposition catalyst is clogged. This is because it may cause the above. In the catalytic reaction step 52, water vapor 3 or oxygen 4 or both are introduced to decompose PFC. Since the decomposed gas contains a large amount of acidic gas such as HF, the acid component is removed in the exhaust gas cleaning step 53. The exhaust gas 102 is exhausted to an exhaust duct or the like in a semiconductor factory, or exhausted to a final exhaust gas treatment facility such as an alkali cleaning tower.

  A PFC decomposition processing apparatus according to the present invention will be described with reference to FIGS. The arrows in FIGS. 2 and 3 indicate the gas flow direction as in FIG. FIG. 2 shows an example in which a bag filter is used as an exhaust gas cleaning tank. The PFC-containing exhaust gas 100 is introduced into a flame region 61 formed in the combustion furnace 60, that is, a flame formed by the fuel 1 and an oxygen source 2 such as combustion oxygen or air. By supplying the PFC-containing exhaust gas 100 from the wall surface of the combustion furnace, the temperature of the furnace wall can be controlled. If the wall surface temperature is too high, corrosion tends to proceed, and if it is too low, heat loss increases.

  Similarly to the PFC-containing gas, the steam 3 is supplied from the combustion furnace wall surface to the flame region 61. Further, oxygen 4 may be supplied to the flame region. Steam 3 and oxygen 4 may be supplied simultaneously. By supplying water vapor and oxygen, a part of the gaseous compound contained in the PFC-containing exhaust gas is converted into a solid oxide.

  The PFC-containing exhaust gas 100 entrained with solid matter is then sent to the solid matter separation tank 62. For the separation of the solid matter, a general device such as a cyclone or electrostatic precipitator can be used, but a high-temperature cyclone is preferable because combustion gas flows in. In general, since the limit of the particle diameter that can be removed by a cyclone is about 10 μm, it is preferable that the catalyst accommodated in the subsequent catalytic reaction tower has a structure capable of passing particles having a particle diameter of 10 μm or less. The solid matter removed by the cyclone is collected in the solid matter storage tank 101. The solid separation tank 62 is preferably wound around the heat insulating material 5 in order to maintain the gas temperature.

The PFC-containing exhaust gas from which the solid matter has been removed is introduced into the catalytic reaction tower 63 and contacts with the catalyst 6 to decompose the PFC. When the temperature of the PFC-containing exhaust gas is the desired PFC decomposition temperature, it is only necessary to wrap the periphery of the catalytic reaction tower with the heat insulating material 7, but when the temperature is low, it is desirable to heat the catalyst in the preheating section 64. . When PFC is decomposed by a hydrolysis reaction, H ₂ O, H ₂ O and air, or H ₂ O and oxygen are added. Other reaction promoting components may be added. When the PFC is decomposed by oxidative decomposition, an oxidizing agent such as O ₂ or air is added. Similarly, reaction promoting components other than these may be added.

  The PFC decomposition gas that has passed through the catalytic reaction tower 63 is cooled to a predetermined temperature, and then acid components such as HF, SOx, and NOx in the gas are removed through the exhaust gas cleaning tank 65. In order to control the temperature of the gas introduced into the exhaust gas cleaning tank 65 to a predetermined temperature, a water-cooled or gas-cooled general heat exchanger can be used. Further, a cooling gas may be introduced into the cracked gas and controlled to a predetermined temperature.

  In addition to the bag filter type shown in FIG. 2, general wet and dry type cleaning tanks can be used for the exhaust gas cleaning tank 65. In the wet method, a venturi type, a shelf type, a spray type, or the like can be used. The spray method is a method of cleaning using water or an alkaline aqueous solution, and has high efficiency and high HF removal performance. A method of bubbling a decomposition product gas in water or an aqueous alkali solution or a method of cleaning using a packed tower may be used. In the dry method, a fixed bed using an alkaline solid, a moving bed, a fluidized bed, a bag filter type, or the like can be used.

In this embodiment, a chemical charging facility 66 for injecting Ca (OH) ₂ or the like is installed in the gas flow path connecting the catalytic reaction tower 63 and the exhaust gas cleaning tank 65, so that CaF ₂ reacted in the flow path or on the bag filter surface or not. The reaction Ca (OH) ₂ or neutralized salt was removed with a bag filter. The method of spraying the drug into the gas or the method of mixing the gas and the drug can be appropriately set depending on the type of gas to be processed. Various Ca compounds collected by the HF-resistant filter cloth in the bag filter are collected in the product storage tank 102. The collected Ca compound may be extracted periodically or may be removed continuously. The gas after the acid component is removed is exhausted by the exhaust equipment 54.

  The shape of the catalyst 6 filled in the catalyst reaction tower 63 may be granular, extruded rod-shaped or pellet-shaped when most of the solid material is removed in the solid material separation tank 62. However, when a solid matter of 10 μm or less flows into the catalytic reaction tower, clogging occurs in the catalyst layer, so it is desirable to use a honeycomb type catalyst. As the honeycomb carrier to be used, general cordierite, alumina, and metal honeycomb can be used. However, since an acid component is contained in the gas, a metal honeycomb using a corrosion-resistant material such as Inconel or Hastelloy is particularly preferable.

FIG. 3 shows the structure of the combustion furnace 60. This combustion furnace features low NOx combustion while preventing backfire and the like by supplying fuel 1 and air as the oxygen source 2 for combustion separately and injecting them into the furnace as numerous coaxial jets In addition, the high-temperature gas necessary for PFC decomposition can be obtained. By causing the PFC-containing exhaust gas 100, which is a processing gas, to flow from the PFC gas inlet 400 to the inner wall side of the combustion furnace, it also functions as a cooling gas, and the temperature of the inner wall surface is suppressed to 900 ° C. or lower. As the inner wall structure, a structure including a film-type cooling liner 300 is employed. In addition, a large amount of cooling gas can be introduced from the dilution hole 301 provided immediately below the flame formation region so that the temperature in the combustion furnace can be controlled. On the side wall of the combustion furnace, the _{O 2} inlet 401 for introducing oxygen or air, _{H 2} O inlet 402 for introducing of _{H 2} O is provided.

The temperature of the flame formation region is about 1200 ° C. or higher, but the furnace temperature is controlled to about 800 ° C. by the cooling gas from the dilution holes. After that, H ₂ O or further oxygen or air for reaction is introduced from the H ₂ O introduction port 402 and the O ₂ introduction port 401, respectively, as a reaction gas for solid matter oxidation. The order of addition of O ₂ and H ₂ O may be changed depending on the gas to be treated. However, since S ₂ Cl _{2 and the} like react with H ₂ O to produce solid S, oxygen or oxygen is added again after adding water vapor. It is advisable to add air.

  The material of the combustion furnace is preferably one having excellent corrosion resistance. Inconel and Hastelloy-based Ni-based alloys are particularly desirable because they have corrosion resistance to HF and HCl.

The gas and solids flowing into the combustion furnace vary depending on the substrate to be etched or the object to be cleaned, but are mainly elements such as Ti, Ta, Si, Al, Cr, Fe, Ni, W, S, etc. Included. These impurity types are classified into those that flow in as solids and those that flow in as gases. Examples of what flows as a solid include SiO ₂ , TiO ₂ , and CuO. Types that flow in by gas are classified into those that subsequently react with O ₂ to solidify, those that react with H ₂ O to solidify, and those that solidify when cooled. Examples of solidified materials that react with O ₂ include SiH ₄ , Si ₂ H ₆ , AsH ₄ , B ₂ F ₄ , B ₂ H ₆ , GeH ₄ , and PH ₃ . Examples of solidified substances that react with H ₂ O include BCl ₃ , SiF ₄ , SiH ₂ Cl ₂ , SiCl ₄ , S ₂ Cl ₂ , SCl ₂ , and WF ₆ . Examples of solidified materials upon cooling include S and CuSO ₄ . These are solidified in a solidification step. Components that oxidize into gas and pass through the catalytic reaction tower need not be particularly problematic. Some reaction forms are shown below.

SiH ₄ + 2O ₂ → SiO ₂ + 2H ₂ O
SiCl ₄ + 2H ₂ O → SiO ₂ + 4HCl
S ₂ Cl ₂ + H ₂ O → 1.5S + 0.5SO ₂ + 2HCl
S + O ₂ → SO ₂
PFC is degraded by hydrolysis or oxidative degradation. In the hydrolysis, for example, a catalyst composed of Al and at least one selected from Zn, Ni, Ti, Fe, Sn, Co, Zr, Ce, Si, W, Pt, and Pd is used. These components are used in the form of oxides, metals and composite oxides. A catalyst containing Al and one or more selected from Ni, Zn, Ti or W is preferable because it has high decomposition performance. Among them, a catalyst containing Ni and Al, which is contained in the form of NiO and NiAl ₂ O ₄ and further containing Al in an amorphous state, is extremely desirable because of its extremely excellent PFC decomposition performance. A catalyst containing Ni and Al in a range of 1 to 10% by weight, preferably 1 to 5% by weight of WO ₃ as a metal, is also excellent in PFC decomposition performance.

  In the PFC decomposition step, it is preferable to use 2 to 50 times, preferably 3 to 30 times, the amount of theoretical water vapor required for the PFC decomposition reaction. It is necessary to adjust the amount of water vapor so that at least hydrogen molecules equivalent to the F number in the halogen compound to be treated are present. As a result, F in the PFC becomes HF, and the F in the decomposition product is in the form of a hydrogen halide that is easily post-treated.

  The oxygen supplied in the PFC hydrolysis is used for, for example, an oxidation reaction of CO generated during the PFC decomposition.

PFC is a compound containing only fluorine as a halogen. The main components of the compound are fluorine, carbon, hydrogen, oxygen, sulfur and nitrogen. Examples of the compound include the following. A compound consisting of carbon and fluorine. A compound consisting of carbon, hydrogen and fluorine. A compound consisting of carbon, fluorine, hydrogen and oxygen. A compound consisting of carbon, fluorine and oxygen. A compound consisting of sulfur and fluorine. A compound consisting of sulfur, fluorine and oxygen. A compound consisting of nitrogen and fluorine. A compound consisting of nitrogen, fluorine and oxygen. Specific examples of the compound include CF ₄ , CHF ₃ , CH ₂ F ₂ , CH ₃ F, C ₂ F ₆ , C ₂ HF ₅ , C ₂ H ₂ F ₄ , C ₂ H ₃ F ₃ , and C _2. H ₄ F ₂ , C ₂ H ₅ F, C ₃ F ₈ , CH ₃ O, CF ₂ , CF ₃ , C ₄ F ₈ , C ₅ F ₈ , SF ₆ , SO ₂ F ₂ , NF _{3 and the} like. An example of a hydrolysis reaction formula of a halogen compound is shown below.

CF ₄ + 2H ₂ O → CO ₂ + 4HF
C ₂ F ₆ + 3H ₂ O → CO + CO ₂ + 6HF
CHF ₃ + H ₂ O → CO + 3HF
SF ₆ + 3H ₂ O → SO ₃ + 6HF
NF ₃ + 3 / 2H ₂ O → NO + 1 / 2O ₂ + 3HF
In the PFC gas hydrolysis reaction, CO may be generated depending on the type of PFC gas, but the above-mentioned catalyst has CO oxidation performance, so if oxygen is present in the catalyst reaction tower, CO is converted to CO _2. Can do.

  The reaction temperature for PFC decomposition varies slightly depending on the type of catalyst, but is usually 500 to 800 ° C. When the PFC concentration is high, it is preferable to set it as high as 700 to 800 ° C., and when it is as low as 1% or less, it is preferable to set it as low as 600 to 750 ° C. When the temperature is higher than 800 ° C., the deterioration of the catalyst is accelerated, and the corrosion rate of the catalytic reaction tower constituting material is increased. The decomposition rate is low at temperatures below 500 ° C.

In this example, a specific processing example of PFC gas containing a gas compound to be solidified will be described. The PFC-containing gas was introduced at 200 L / min. The gas composition was SF ₆ : S ₂ Cl ₂ : SCl ₂ : SiF ₄ : N ₂ = 0.5: 0.05: 0.1: 0.1: 99.25 (vol%). This gas was allowed to flow into the combustion furnace shown in FIG. The combustion furnace is 30 mmφ × 1000 mmL, and a PFC gas inlet 400, an O ₂ inlet 401, and an H ₂ O inlet 402 are provided at positions 250 mm, 550 mm, and 750 mm from the top.

Methane was used as the fuel, and was supplied from the top of the combustion furnace at 5 L / min. 95 L / min of air was supplied from the side of the upper part of the furnace, and a flame was formed with a cluster burner. The PFC-containing gas was allowed to flow from the PFC gas inlet 400 on the side of the furnace through the film-type cooling liner to the flame formation region at 200 L / min. Air at 15 ° C. was supplied from the O ₂ inlet 401 at 20 L / min. Further, pure water was supplied from the H ₂ O inlet 402 at 20 ml / min. The gas temperature at the combustion furnace outlet was 750 to 850 ° C.

The combustion furnace outlet gas was introduced into a high temperature cyclone made by Inconel. The high temperature cyclone is designed with a 50% separation diameter of 10 μm. SiO ₂ was separated and recovered by a high temperature cyclone. The PFC-containing gas that passed through the high-temperature cyclone was introduced into the catalytic reaction tower.

The catalyst was of a honeycomb type, and was prepared by coating a cordierite honeycomb carrier with a catalyst containing Ni and Al oxides. The honeycomb is 47 cells / cm ³ and the honeycomb volume is 12L. The temperature of the catalyst was monitored at the top of the catalyst, and the heater temperature on the outer periphery of the catalyst reaction tower was controlled so as to be 750 ° C. In addition, in the hydrolysis reaction of PFC, H ₂ O for converting PFC into CO ₂ and HF is necessary, but since a sufficient amount of water vapor has already been added in the combustion furnace, ₂ O was not added.

  The PFC decomposition product gas that passed through the catalytic reaction tower was allowed to flow into a spray-type exhaust gas cleaning tank in which water was sprayed. In the exhaust gas cleaning tank, water was sprayed at 10 L / min, and a plastic filler was put inside.

The gas was allowed to flow through the exhaust gas cleaning tank for 100 hours. During that time, the SF ₆ concentration in the gas that passed through the exhaust gas cleaning tank was 5 ppm or less, and the decomposition rate was 99% or more. In addition, the pressure loss in the system was 400 to 700 mmH ₂ O, and no abnormal increase was observed, and it was confirmed that the system can remove the solidified gas compound to an amount that does not cause a problem in the operation of the apparatus. In addition, although the catalyst surface was analyzed for confirmation, precipitation of solid substance was not recognized.

In this example, an example in which a PFC gas containing S ₂ Cl ₂ that reacts with a solid and H ₂ O to generate an oxide is treated will be described. S ₂ Cl ₂ reacts with H ₂ O to produce SO ₂ and S, which solidifies upon cooling. SiO ₂ was introduced at a rate of ₂ g / min and WO ₃ at a rate of 2 g / min into a gas having a composition of CF ₄ : S ₂ Cl ₂ : N ₂ = 1: 0.5: 98.5 (vol%). This was introduced into the combustion furnace shown in FIG. 3 at a flow rate of 200 L / min. The structure of the test apparatus is the same as that used in Example 3. Steam and air were added as reaction gases to the combustion furnace. WO ₃ and SiO ₂ were separated and recovered by a high temperature cyclone. Since WO ₃ contains about 10% of particles having a particle size of 10 μm or less, about 5% is considered to have flowed into the catalytic reaction tower.

The gas was allowed to flow through the catalytic reaction tower and the exhaust gas cleaning tank for 100 hours. During the test, the CF ₄ concentration in the gas that passed through the exhaust gas cleaning tank was 5 ppm or less, and the decomposition rate was 99% or more. In addition, fine particles of WO ₃ were confirmed in the waste water. The WO ₃ fine particles were removed from the waste water by a filter. There was no abnormal increase in pressure loss in the system, and it was confirmed that this system can remove solids to an amount that does not cause any problems in the operation of the system. In addition, although the catalyst surface was analyzed for confirmation, precipitation of solid substance was not recognized.

In this example, an example in which WF ₆ is added instead of S ₂ Cl ₂ in Example 3 will be described. Steam and air were added as reaction gases to the combustion furnace. The PFC-containing gas was allowed to flow for 50 hours. WO ₃ was separated and recovered by a high-temperature cyclone. During the test, the SF ₆ concentration in the gas that passed through the exhaust gas cleaning tank was 5 ppm or less, and the decomposition rate was 99% or more. Moreover, the pressure loss in the system was 400 to 700 mmH ₂ O, and no abnormal increase was observed, and it was confirmed that the system can remove the solidified gas compound up to an amount that does not cause a problem in the operation of the apparatus. In addition, although the catalyst surface was analyzed for confirmation, precipitation of solid substance was not recognized.

In this example, an example in which TiO ₂ is added instead of WO ₃ in Example 4 will be described. Steam and air were added as reaction gases to the combustion furnace. The PFC-containing gas was circulated for 10 hours. TiO ₂ was separated and recovered by a high temperature cyclone. During the test, the CF ₄ concentration in the gas that passed through the exhaust gas cleaning tank was 5 ppm or less, and the decomposition rate was 99% or more. There was no abnormal increase in pressure loss in the system, and it was confirmed that this system can remove solids to an amount that does not cause any problems in the operation of the system. In addition, although the catalyst surface was analyzed for confirmation, precipitation of solid substance was not recognized.

  According to the present invention, in the treatment of PFC-containing exhaust gas discharged from a semiconductor or liquid crystal manufacturing factory, it has become possible to suppress degradation of PFC decomposition performance due to catalyst clogging or the like. The present invention contributes to PFC exhaust gas regulations.

It is process drawing which shows the processing flow of the PFC decomposition | disassembly processing method by this invention. It is a system block diagram of the PFC decomposition processing apparatus by this invention. It is a schematic block diagram of the combustion furnace used for the PFC decomposition processing apparatus of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 100 ... PFC containing exhaust gas, 50 ... Solidification process, 51 ... Solid substance separation process, 52 ... Catalytic reaction process, 53 ... Exhaust gas washing process, 60 ... Combustion furnace, 62 ... Solid substance separation tank, 63 ... Catalytic reaction tower, 65 ... exhaust gas cleaning tank.

Claims (8)

In the method for catalytically decomposing a perfluoro compound-containing gas, before the perfluoro compound-containing gas is brought into contact with the catalyst, the perfluoro compound-containing gas is brought into contact with H ₂ O, and oxidation of the solid produced by the contact is performed. The perfluoro compound-containing gas is separated from the perfluoro compound-containing gas, and the treatment is performed while the perfluoro compound-containing gas is heated, and then the catalyst is brought into contact with the catalyst while the perfluoro compound-containing gas is kept heated. A method for decomposing a perfluoro compound, comprising: The method for decomposing a perfluoro compound according to claim 1, wherein the perfluoro compound-containing gas is further brought into contact with O _{2 in} addition to the H ₂ O. In claim 1, the perfluoro compound-containing gas the process of separating the oxides of treatment and the solid is contacted with the H _{2 O,} the perfluoro compound-containing gas is 750 ~ 850 ° C. in the combustion furnace outlet temperature A method for decomposing perfluorocompound, which is carried out in a heated and held state. A perfluoro compound decomposition treatment apparatus comprising a catalytic reaction column having a perfluoro compound decomposition catalyst, wherein the perfluoro compound is decomposed by introducing a perfluoro compound-containing gas into the catalytic reaction column. In the preceding stage, a solidification device that solidifies a part of the gaseous compound contained in the gas by contacting with H ₂ O in a state where the perfluoro compound-containing gas is heated, and the gas is maintained in the heated state. An apparatus for decomposing a perfluorocompound, comprising a solids separation device for separating solids from gas, wherein the gas is introduced into the catalytic reaction tower while being kept in a heated state. 5. The perfluoro compound according to claim 4, wherein the solidifying device has a structure in which a perfluoro compound-containing gas inlet and an H ₂ O inlet are provided in a combustion furnace in which a flame is formed. Decomposition processing equipment.   5. The perfluoro compound decomposition treatment apparatus according to claim 4, wherein the solid matter separation device is composed of a cyclone equipped with a heating device.   7. The perfluoro compound decomposition treatment apparatus according to claim 6, wherein the perfluoro compound decomposition catalyst has a structure through which a solid having a particle diameter of 10 μm or less passes. 6. The perfluoro compound decomposition treatment apparatus according to claim 5, wherein the combustion furnace further includes an inlet for O _{2 so that} the perfluoro compound-containing gas is in contact with H ₂ O and O _2. .

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