JP4185211B2 - Manufacturing method of temperature control plate - Google Patents

Description

上記の表から明らかな如く、従来の製造方法では処理前と処理後とで平均平坦度が３倍以上も悪化しているのに対し、本発明の製造方法では処理前と処理後とで平均平坦度は殆ど変わることがない。
【００３３】
このように平均平坦度を小さく抑え得ることにより、言い換えれば温度制御用プレートの表面を高い平坦度とし得ることにより、温度制御用プレートに載置される基板(半導体ウェハ)等の被加熱物を均等に加熱して、上記被加熱物の面内温度分布を均一なものとすることができる。
【００３４】
また、上述した温度制御用プレートの製造方法では、ヒータ３およびカバーシート４、さらにヒータ３等を接着するシート状接着材５，５が、言い換えれば基台に積層される要素が、全てシート状を呈していることにより、上述した各要素を同一態様で取扱うことができ、もって温度制御用プレートの製造時における作業性が良好なものとなる。
【００３５】
また、例えばペースト状の接着材を採用して、これをヒータに塗布した場合、該ヒータがカールし易く、カールしたヒータを基台に接着した際に、皺や気泡が生じる虞れがあるのに対して、上述した温度制御用プレートの製造方法では、シート状接着材５を採用していることにより、例えばヒータのカールに起因して皺が生じる等の不都合がなく、もって精度の良好な温度制御用プレートを製造することが可能となる。
【００３６】
なお、上述した実施例において、接着層を構成するシート状接着材５には、熱硬化性接着材あるいは熱可塑性接着材の何れをも採用することが可能である。
【００３７】
また、シート状接着材５が、接着過程においてガスの発生を伴う場合には、シート状接着材５から上層の要素、すなわち実施例におけるヒータ３、カバーシート４、および各シート状接着材５，５には、ガスを逃がすための微細な開口を全面に形成しておくことが好ましく、かくすることによってボイドによる未接着部の発生を未然に防止することができる。
【００３８】
なお、実施例に示したシート状接着材５に換えて、ペースト状の接着材を採用することも可能であり、この場合においても熱硬化性接着材あるいは熱可塑性接着材の何れをも採用し得ることは言うまでもない。
【００３９】
図６は、本発明によって製造された温度制御用プレートの他の実施例を示しており、この温度制御用プレート１′は、アルミニウムや銅等の高熱伝導性材料により形成された平板状の基台２′を有しており、該基台２′の内部には冷却水通路２ａ′が形成されている。
【００４０】
この基台２′における上方側の表面には、シート状のヒータ３′がシート状接着材５′を介して接着され、上記ヒータ３′の表面にはシート状接着材５′を介してカバーシート４′が接着されており、上記シート状接着材５′を介して互いに接着されたヒータ３′とカバーシート４′とによってシートヒータ６′が構成されている。
【００４１】
また、基台２′における下方側の表面には、シート状のヒータ３′がシート状接着材５′を介して接着され、ヒータ３′の表面にはシート状接着材５′を介してカバーシート４′が接着されており、上記シート状接着材５′を介して互いに接着されたヒータ３′とカバーシート４′とによってシートヒータ６′が構成されている。
【００４２】
なお、上述した温度制御用プレート１′は、基台２′の構造、および基台２′の上下にヒータ３′およびカバーシート４′を設置した構成以外、図１に示した温度制御用プレート１と同一なので、該温度制御用プレート１と同一の作用を成す要素に、図１と同一の符号に′(ダッシュ)を附して説明を省略する。
【００４３】
また、上述した温度制御用プレート１′は、図１に示した温度制御用プレート１と同じく、セット工程(図２中のＳ１)と、脱気工程(図２中のＳ２)と、加熱／加圧工程(図２中のＳ３)とを経て製造される。
【００４４】
セット工程において、図７に示す如く、基台２′の上方側の表面と下方側の表面とに、それぞれシート状接着材５′、ヒータ３′、シート状接着材５′およびカバーシート４′を順次積層した状態で、上記基台２′を包袋１０′の内部に収容する。
【００４５】
なお、図７に示す如く、各カバーシート４′，４′の表面には、薄いガラスクロス１３′とフェルト状の厚いガラスクロス１４′とが積層されている。
【００４６】
上記包袋１０′は、ともに耐熱性および耐通気性を備えた柔軟なシート１１′とシート１２′とから構成され、これらシート１１′，１２′をシール１５′を介して重ね合わせ、シート１２′に設けられたバキュームポート１２ａ′から空気を吸引することで密封される。
【００４７】
また、中空の基台２′には、該基台２′の内部と包袋１０′の外部とを連通する通気管２Ａ′が取付けられている。
この通気管２Ａ′は、図８(ａ)に示すように、各々のシール１５′に設けられたパッキングを兼ねる粘着テープ１５ａ′１５ａ′に挟まれ、これによって包袋１０′における内部と外部との密封が図られている。
【００４８】
因みに、図１に示した基台２が内部に冷却水通路を有し、この基台２に通気管を取り付けた場合には、図８(ｂ)に示す如くベースシート１１上のシール１１ａに設けたパッキングを兼ねる粘着テープ１１ｂ、１１ｂを介して、シール１１ａに通気管２Ａを貫通させることによって、包袋１０における内部と外部との密封が図られている。
【００４９】
また、図７に示した温度制御用プレート１′を製造する際においても、シート１１′あるいはシート１２′における一方のシール１５′に、図８(ｂ)に示した構成と同じく、パッキングを兼ねる粘着テープを介して通気管２Ａ′を貫通させるよう構成しても良い。
なお、上記通気管２Ａ′は、基台２′に対して各ヒータ３′およびカバーシート４′が接着された後、基台２′から取り外されることは勿論である。
【００５０】
上述したセット工程ののち、図９に示す如く包袋１０′をチャンバー２０′の内部に収容設置し、バキュームパイプ１５′を介して、包袋１０′の内部から空気を吸引(矢印Ｖ)して該包袋１０′の内部を真空とする(脱気工程)。
【００５１】
次いで、チャンバー２０′の加熱ヒータＨ′，Ｈ′により、各シート状接着材５′を加熱するとともに、チャンバー２０′の内部に供給(矢印Ｇ)されるガスの圧力により、包袋１０′のシート１１′およびシート１２′を介して、各カバーシート４′をシート状接着材５′を介してヒータ３′に押圧するとともに、該ヒータ３′をシート状接着材５′を介して基台２′の表面に押圧する（加熱／加圧工程）。
【００５２】
このとき、基台２′に取付けられた通気管２Ａ′により、基台２′の内部とチャンバー２０′とが連通しているため、基台２′の内部とチャンバー２０′の内部の圧力とが等しくなり、もってチャンバー２０′の内部圧力により中空の基台２′が変形することを未然に防止できる。
【００５３】
上述した如く、チャンバー２０′において各シート状接着材５を所定の温度に加熱することで、各カバーシート４′がシート状接着材５′を介して各ヒータ３′に接着されるとともに、各ヒータ３′がシート状接着材５′を介して基台２′の表面に接着されることとなる。
【００５４】
また、上述した如く、チャンバー２０′の内部のガス圧により、包袋１０′の柔軟なシート１１′，１２′を介して、各カバーシート４′および各ヒータ３′を押圧しているので、基台２′に変形が生じた場合であっても、基台２′に対して各ヒータ３′が均一に加圧されるとともに、各ヒータ３′に対して各カバーシート４′が均一に加圧されることとなる。
【００５５】
かくして、各ヒータ３′がその全域において、基台２′の表面に十分な強度で確実に接着され、また各カバーシート４′がその全域において、各ヒータ３′に対して十分な強度で確実に接着されることとなる。
【００５６】
すなわち、ヒータ３′とカバーシート４′とがシート状接着材５′により接着されて成るヒートシート６′が、その全域において基台２′の表面に十分な強度で確実に接着されることとなる。
【００５７】
このように、上述した温度制御用プレート１′の製造方法においては、先に説明した温度制御用プレート１の製造方法と同様の作用効果を得ることができ、かつ上述した作用効果以外の作用効果に関しても、温度制御用プレート１の製造方法と同様に奏し得ることは勿論である。
【００５８】
また、上述した温度制御用プレート１′の製造方法においても、先に詳述した温度制御用プレート１の製造方法と同じく、様々な実施態様を採り得ることは言うまでもない。
【図面の簡単な説明】
【図１】 (ａ)および(ｂ)は、本発明に関わる温度制御用プレートの製造方法によって製造された温度制御用プレートを示す斜視図および側面図。
【図２】本発明に関わる温度制御用プレートの製造方法を示すフローチャート。
【図３】本発明に関わる温度制御用プレートの製造方法におけるセット工程での基台等の設置態様を示す斜視図。
【図４】本発明に関わる温度制御用プレートの製造方法におけるセット工程での基台等の設置態様を示す概念的な側面図。
【図５】本発明に関わる温度制御用プレートの製造方法における脱気工程および加熱／加圧工程を示す概念図。
【図６】 (ａ)および(ｂ)は、本発明に関わる製造方法によって製造された温度制御用プレートの他の実施例を示す斜視図および要部破断側面図。
【図７】本発明に関わる温度制御用プレートの製造方法におけるセット工程での基台等の設置態様を示す概念的な側面図。
【図８】 (ａ)および(ｂ)は、本発明に関わる温度制御用プレートの製造方法における通気管の設置態様を示す包袋の要部断面図。
【図９】本発明に関わる温度制御用プレートの製造方法における脱気工程および加熱／加圧工程を示す概念図。
【図１０】 (ａ)および(ｂ)は、従来の温度制御用プレートの製造方法を示す概念図。
【符号の説明】
１…温度制御用プレート、
２…基台、
３…ヒータ、
４…カバーシート、
５…シート状接着材、
６…ヒートシート、
１０…包袋、
１２…シート、
２０…チャンバー、
１′…温度制御用プレート、
２′…基台、
２ａ′…冷却水路、
２Ａ′…通気管、
３′…ヒータ、
４′…カバーシート、
５′…シート状接着材、
６′…ヒートシート、
１０′…包袋、
１２′…シート、
２０′…チャンバー。[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a method for manufacturing a temperature control plate formed by adhering a heat sheet to the surface of a base having a flat plate shape.
[0002]
[Prior art]
For example, in the manufacturing process of a semiconductor wafer, in order to remove the solvent remaining in the photoresist film (photosensitive film) applied to the surface of the substrate, the baking process step for heating the substrate or the heated substrate to the room temperature level is performed. The substrate temperature control apparatus used in the above-described semiconductor wafer manufacturing process includes a heat sheet on the surface of a base made of a highly thermally conductive material such as aluminum. And a temperature control plate.
[0003]
As shown in FIG. 10, the temperature control plate A is configured by adhering a heat sheet C to the surface of the base B, and the heat sheet C is placed on the surface of the base B via the adhesive D, It is manufactured by pressurizing the heat sheet C with a mechanical press P while heating.
[0004]
[Problems to be solved by the invention]
By the way, in the substrate temperature control apparatus described above, the base B of the temperature control plate A suppresses the heat capacity in order to repeat heating in the baking process and cooling in the cooling process at intervals of several tens of seconds for each wafer. It is formed as thin as possible, and its rigidity is not so high. In particular, a hollow base having a cooling water channel inside has a lower rigidity.
[0005]
For this reason, when the temperature control plate A is manufactured, when the heat sheet C is pressed by the mechanical press P, the base B is often deformed.
[0006]
Thus, when the base B is deformed, the pressure acting on the base B through the adhesive D of the heat sheet C pressed by the mechanical press P having high rigidity and smoothness becomes uneven. Adhesion becomes insufficient at the portion where the pressure is low, and there is a possibility that sufficient adhesive strength between the base B and the heat sheet C cannot be obtained.
[0007]
In view of the above situation, an object of the present invention is to provide a method for manufacturing a temperature control plate capable of reliably bonding a heat sheet to a base with sufficient strength.
[0008]
[Means for solving the problems and effects]
The method for manufacturing a temperature control plate according to the invention of claim 1 is a method for manufacturing a temperature control plate formed by adhering a heat sheet to the surface of a base having a flat plate shape, with an adhesive layer on the surface. A setting step of accommodating the base on which the heat sheet is laminated in a sealed bag having a flexible sheet having heat resistance and air resistance as an element and facing the surface of the heat sheet. And a deaeration step of sucking air from the inside of the sachet to evacuate the inside of the sachet, heating to a predetermined temperature in the chamber containing the sachet, and gas pressure in the chamber And a heating / pressurizing step of pressurizing to a predetermined pressure.
According to the above configuration, in the heating / pressurizing step in the chamber, the heat sheet is pressed against the base via the flexible sheet of the wrapping bag due to the gas pressure in the chamber, so that the base is deformed. Even in this case, the flexible sheet in the wrapping bag is deformed following the base, and the heat sheet is uniformly pressed against the base. On the other hand, it is securely bonded with sufficient strength.
[0009]
The method for manufacturing a temperature control plate according to the invention of claim 2 is the temperature control plate manufacturing method according to the invention of claim 1, wherein the base is a hollow base having a cooling water passage inside, In the process, a vent pipe that connects the inside of the base and the outside of the bag is attached.
According to the above configuration, by making the pressure in the base and the chamber equal via the vent pipe, it is possible to prevent the hollow base from being inadvertently deformed when pressurized in the chamber. Is possible.
[0010]
According to a third aspect of the invention, there is provided a temperature control plate manufacturing method according to the first aspect of the invention, wherein the heat sheet is composed of a heater and a cover sheet.
According to the said structure, the heat sheet which consists of a heater and a cover sheet will adhere | attach reliably with sufficient intensity | strength with respect to a base in the whole region.
[0011]
According to a fourth aspect of the present invention, there is provided a temperature control plate manufacturing method according to the third aspect of the present invention, wherein the temperature control plate is manufactured between the base and the heater and between the heater and the cover sheet. The adhesive layer is characterized in that it is an adhesive material that exhibits a sheet shape.
According to the said structure, the workability | operativity at the time of manufacture becomes favorable because all the elements laminated | stacked on a base at the time of manufacture of the plate for temperature control become a sheet-like material.
In addition, for example, when a paste-like adhesive is applied, there is no inconvenience such as wrinkles due to curling of the heat sheet, and it is possible to manufacture a temperature control plate with good accuracy.
[0012]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, the present invention will be described in detail with reference to the drawings illustrating embodiments.
FIG. 1 shows a temperature control plate manufactured according to the present invention, and this temperature control plate 1 has a flat base 2 made of a high thermal conductivity material such as aluminum or copper. Yes.
[0013]
A sheet-like heater 3 is bonded to the surface of the base 2 via a polyimide-based sheet-like adhesive (adhesive layer) 5.
The heater 3 is formed by patterning a heater circuit by etching on a stainless steel film thermocompression bonded to a polyimide film.
[0014]
Further, a cover sheet 4 made of a polyimide film is bonded to the surface of the heater 3 bonded to the base 2 through a polyimide-based sheet-like adhesive (adhesive layer) 5. A sheet heater 6 is constituted by the heater 3 and the cover sheet 4 which are bonded to each other via the material 5.
The heater 3 has a thickness of 65 μm, and the cover sheet 4 and the sheet-like adhesive 5 have a thickness of 25 μm.
[0015]
Here, the sheet heater 6 in the embodiment is composed of the heater 3 and the cover sheet 4 bonded via the sheet-like adhesive material 5 as described above, but the cover provided with adhesiveness to the sheet-like heater. It goes without saying that there are various aspects of the configuration of the sheet sheet, such as those in which the sheet is directly bonded, and those in which the cover sheet is not required by insulating the surface of the heater.
[0016]
As shown in the flowchart of FIG. 2, the temperature control plate 1 having the above-described configuration is formed by laminating a sheet-like adhesive 5, a heater 3, a sheet-like adhesive 5, and a cover sheet 4 on a base 2, which will be described later. (See FIGS. 3 and 4) A setting step S1 to be accommodated, a deaeration step S2 for sucking air from the inside of the wrapping bag 10 to make a vacuum, and heating / pressurization by a chamber 20 (see FIG. 5) to be described later It is manufactured through step S3.
[0017]
Below, the manufacturing method of the plate 1 for temperature control including the setting process S1, deaeration process S2, and heating / pressurization process S3 mentioned above is demonstrated in detail.
[0018]
First, in the setting step S1, as shown in FIGS. 3 and 4, in the state where the sheet-like adhesive 5, the heater 3, the sheet-like adhesive 5 and the cover sheet 4 are sequentially laminated on the surface of the base 2, the base 2 is accommodated inside the wrapping bag 10.
[0019]
In the setting step S1, a heat sheet 6 that has been manufactured by previously bonding the heater 3 and the cover sheet 4 with a sheet-like adhesive 5 in a separate step, or a commercially available sheet sheet 6 is used as a base. It is also possible to laminate on the surface of the table 2 via the sheet-like adhesive 5.
[0020]
On the other hand, the wrapping bag 10 is composed of a base sheet 11 having heat resistance and air resistance and a flexible sheet 12 having heat resistance and air resistance. The sheet 12 is provided with a vacuum port 12a. The sheet 12 is superposed on the base sheet 11, the air is sucked from the vacuum port 12a, and the sheet 12 is pressed against the seal 11a. Sealed.
[0021]
As shown in FIGS. 3 and 4, the surface of the cover sheet 4 laminated on the substrate 2 is thin (about 0.1 for the purpose of preventing adhesion between the sheet 12 and the cover sheet 4 in the bag 10). mm) A glass cloth 13 and a felt-like thick glass cloth 14 are laminated.
[0022]
After the stacked base 2 such as the heater 3 is accommodated in the enveloping bag 10, the enveloping bag 10 is accommodated and installed in the chamber 20 as shown in FIG. 5, and connected to the vacuum port 12a in the deaeration step S2. Air is sucked (arrow V) from the inside of the bag 10 through the vacuum pipe 15 to make the inside of the bag 10 vacuum.
[0023]
In order to maintain the vacuum state inside the wrapping bag 10, it is preferable to continue sucking air from the inside of the wrapping bag 10 in the subsequent heating / pressurizing step S <b> 3.
[0024]
Next, in the heating / pressurization step, the sheet-like adhesives 5 and 5 are heated to a predetermined temperature by the heaters H and H in the chamber 20 and are supplied to the inside of the chamber 20 (arrow G) (nitrogen). The pressure of the gas) causes the cover sheet 4 to be pressed against the heater 3 via the sheet-like adhesive 5 via the flexible sheet 12 in the wrapping bag 10, and the heater 3 is attached via the sheet-like adhesive 5. Press against the surface of the table 2.
[0025]
In the embodiment described above, the temperature inside the chamber 20 is set to about 200 ° C., and the gas pressure inside the chamber 20 is set to about 20 kg / square cm.
[0026]
As described above, by heating the sheet-like adhesives 5 and 5 to a predetermined temperature in the chamber 20, the cover sheet 4 is adhered to the heater 3 via the sheet-like adhesive 5, and the heater 3 is sheet-like. It is bonded to the surface of the base 2 through the adhesive 5.
[0027]
Further, as described above, since the cover sheet 4 and the heater 3 are pressed by the gas pressure inside the chamber 20 via the flexible sheet 12 of the wrapping bag 10, the base 2 is deformed. Even if it exists, while the heater 3 is uniformly pressed with respect to the base 2, the cover sheet 4 will be pressed uniformly with respect to the heater 3. FIG.
[0028]
Thus, the heater 3 is securely bonded to the surface of the base 2 with sufficient strength in the entire region, and the cover sheet 4 is securely bonded to the heater 3 with sufficient strength in the entire region. .
[0029]
That is, the heat sheet 6 formed by bonding the heater 3 and the cover sheet 4 with the sheet-like adhesive 5 is reliably bonded to the surface of the base 2 with sufficient strength in the entire area.
[0030]
Moreover, in the manufacturing method of the temperature control plate mentioned above, the surface of the temperature control plate can be made high flatness compared with the manufacturing method by the conventional hot press.
[0031]
The table below compares the average flatness (mm) of the surface of the temperature control plate before and after the process of bonding the heat sheet to the base between the manufacturing method of the present invention and the conventional manufacturing method. The result is shown.
[0032]

As is apparent from the above table, the average flatness is deteriorated by 3 times or more in the conventional production method before and after the treatment, whereas in the production method of the present invention, the average is obtained before and after the treatment. The flatness hardly changes.
[0033]
In this way, the average flatness can be kept small, in other words, the surface of the temperature control plate can be made to have a high flatness, so that an object to be heated such as a substrate (semiconductor wafer) placed on the temperature control plate can be obtained. By heating evenly, the in-plane temperature distribution of the object to be heated can be made uniform.
[0034]
Moreover, in the manufacturing method of the temperature control plate described above, the sheet-shaped adhesives 5 and 5 for bonding the heater 3 and the cover sheet 4 and further the heater 3 and the like, in other words, the elements laminated on the base are all sheet-shaped. By exhibiting the above, each element described above can be handled in the same manner, and thus the workability at the time of manufacturing the temperature control plate is improved.
[0035]
Also, for example, when a paste-like adhesive is used and applied to a heater, the heater is likely to curl, and there is a risk of wrinkles and bubbles occurring when the curled heater is bonded to the base. On the other hand, in the manufacturing method of the temperature control plate described above, since the sheet-like adhesive 5 is used, there is no inconvenience such as wrinkles due to, for example, curling of the heater, and the accuracy is high. It becomes possible to manufacture a temperature control plate.
[0036]
In the embodiment described above, any of a thermosetting adhesive or a thermoplastic adhesive can be adopted as the sheet-like adhesive 5 constituting the adhesive layer.
[0037]
Further, when the sheet-like adhesive 5 is accompanied by gas generation in the bonding process, the upper-layer elements from the sheet-like adhesive 5, that is, the heater 3, the cover sheet 4, and each sheet-like adhesive 5, in the embodiment. 5, it is preferable to form a fine opening on the entire surface for allowing gas to escape, so that it is possible to prevent the occurrence of an unbonded portion due to a void.
[0038]
In addition, it is also possible to adopt a paste-like adhesive instead of the sheet-like adhesive 5 shown in the embodiment, and in this case either a thermosetting adhesive or a thermoplastic adhesive is adopted. Needless to say you get.
[0039]
FIG. 6 shows another embodiment of the temperature control plate manufactured according to the present invention. The temperature control plate 1 'is a flat base made of a high thermal conductivity material such as aluminum or copper. A base 2 'is provided, and a cooling water passage 2a' is formed in the base 2 '.
[0040]
A sheet-like heater 3 ′ is bonded to the upper surface of the base 2 ′ via a sheet-like adhesive 5 ′, and the surface of the heater 3 ′ is covered via a sheet-like adhesive 5 ′. A sheet heater 6 'is constituted by a heater 3' and a cover sheet 4 'which are bonded to each other via the sheet-like adhesive 5'.
[0041]
A sheet-like heater 3 'is bonded to the lower surface of the base 2' via a sheet-like adhesive 5 ', and the surface of the heater 3' is covered via the sheet-like adhesive 5 '. A sheet heater 6 'is constituted by a heater 3' and a cover sheet 4 'which are bonded to each other via the sheet-like adhesive 5'.
[0042]
The temperature control plate 1 ′ described above is the temperature control plate shown in FIG. 1 except for the structure of the base 2 ′ and the configuration in which the heater 3 ′ and the cover sheet 4 ′ are installed above and below the base 2 ′. 1, the same reference numerals as those in FIG. 1 are attached to elements having the same functions as those of the temperature control plate 1 and description thereof is omitted.
[0043]
Further, the temperature control plate 1 'described above is similar to the temperature control plate 1 shown in FIG. 1 in that a setting process (S1 in FIG. 2), a degassing process (S2 in FIG. 2), It is manufactured through a pressurizing step (S3 in FIG. 2).
[0044]
In the setting step, as shown in FIG. 7, the sheet-like adhesive 5 ', the heater 3', the sheet-like adhesive 5 'and the cover sheet 4' are respectively formed on the upper surface and the lower surface of the base 2 '. The base 2 'is accommodated in the wrapping bag 10' in a state where the layers are sequentially stacked.
[0045]
As shown in FIG. 7, a thin glass cloth 13 'and a felt-like thick glass cloth 14' are laminated on the surface of each cover sheet 4 ', 4'.
[0046]
The wrapping bag 10 'is composed of a flexible sheet 11' and a sheet 12 'both having heat resistance and air resistance, and these sheets 11' and 12 'are overlapped with each other via a seal 15'. It seals by sucking air from the vacuum port 12a 'provided in'.
[0047]
Further, the hollow base 2 'is provided with a vent pipe 2A' that communicates the inside of the base 2 'and the outside of the bag 10'.
As shown in FIG. 8 (a), the vent pipe 2A 'is sandwiched between adhesive tapes 15a'15a' which also serve as packings provided on the respective seals 15 ', and thereby the inside and outside of the bag 10' Is sealed.
[0048]
Incidentally, when the base 2 shown in FIG. 1 has a cooling water passage inside, and a vent pipe is attached to the base 2, the seal 11a on the base sheet 11 is attached to the seal 11a as shown in FIG. The inside and outside of the bag 10 are sealed by passing the air pipe 2A through the seal 11a through the provided adhesive tapes 11b and 11b that also serve as packing.
[0049]
Further, when manufacturing the temperature control plate 1 ′ shown in FIG. 7, the seal 11 ′ of the sheet 11 ′ or the sheet 12 ′ also serves as packing as in the configuration shown in FIG. 8B. You may comprise so that ventilation pipe 2A 'may be penetrated through an adhesive tape.
Of course, the vent pipe 2A 'is removed from the base 2' after the heaters 3 'and the cover sheet 4' are bonded to the base 2 '.
[0050]
After the above-described setting process, as shown in FIG. 9, the packaging bag 10 'is accommodated and installed in the chamber 20', and air is sucked (arrow V) from the inside of the packaging bag 10 'through the vacuum pipe 15'. Thus, the inside of the sachet 10 'is evacuated (deaeration step).
[0051]
Next, each sheet-like adhesive 5 ′ is heated by the heaters H ′ and H ′ of the chamber 20 ′ and the pressure of the gas supplied to the inside of the chamber 20 ′ (arrow G) Each cover sheet 4 'is pressed against the heater 3' via the sheet-like adhesive 5 'via the sheet 11' and the sheet 12 ', and the heater 3' is supported via the sheet-like adhesive 5 '. Press against the surface of 2 '(heating / pressurizing step).
[0052]
At this time, since the inside of the base 2 'and the chamber 20' communicate with each other by the vent pipe 2A 'attached to the base 2', the pressure inside the base 2 'and the inside of the chamber 20' Therefore, it is possible to prevent the hollow base 2 'from being deformed by the internal pressure of the chamber 20'.
[0053]
As described above, by heating each sheet-like adhesive material 5 to a predetermined temperature in the chamber 20 ', each cover sheet 4' is adhered to each heater 3 'via the sheet-like adhesive material 5'. The heater 3 'is bonded to the surface of the base 2' via the sheet-like adhesive 5 '.
[0054]
Further, as described above, each cover sheet 4 'and each heater 3' are pressed by the gas pressure inside the chamber 20 'via the flexible sheets 11' and 12 'of the wrapping bag 10'. Even when the base 2 'is deformed, the heaters 3' are uniformly pressed against the base 2 ', and the cover sheets 4' are uniformly applied to the heaters 3 '. Pressurized.
[0055]
Thus, each heater 3 ′ is securely bonded to the surface of the base 2 ′ with sufficient strength in the entire area, and each cover sheet 4 ′ is surely secured with sufficient strength with respect to each heater 3 ′ in the entire area. It will be adhered to.
[0056]
That is, the heat sheet 6 'formed by bonding the heater 3' and the cover sheet 4 'with the sheet-like adhesive 5' is securely bonded to the surface of the base 2 'with sufficient strength in the entire area. Become.
[0057]
As described above, in the method for manufacturing the temperature control plate 1 ′ described above, the same operational effects as those of the method for manufacturing the temperature control plate 1 described above can be obtained, and the operational effects other than the operational effects described above can be obtained. Of course, the same method as the method of manufacturing the temperature control plate 1 can be performed.
[0058]
Further, it goes without saying that the method for manufacturing the temperature control plate 1 ′ described above can take various embodiments as in the method for manufacturing the temperature control plate 1 described in detail above.
[Brief description of the drawings]
FIGS. 1A and 1B are a perspective view and a side view showing a temperature control plate manufactured by a method for manufacturing a temperature control plate according to the present invention.
FIG. 2 is a flowchart showing a method for manufacturing a temperature control plate according to the present invention.
FIG. 3 is a perspective view showing an installation mode of a base and the like in a setting step in the method for manufacturing a temperature control plate according to the present invention.
FIG. 4 is a conceptual side view showing an installation mode of a base and the like in a setting step in the method for manufacturing a temperature control plate according to the present invention.
FIG. 5 is a conceptual diagram showing a deaeration process and a heating / pressurization process in the method for manufacturing a temperature control plate according to the present invention.
FIGS. 6A and 6B are a perspective view and a cutaway side view of an essential part showing another embodiment of a temperature control plate manufactured by the manufacturing method according to the present invention. FIGS.
FIG. 7 is a conceptual side view showing an installation mode of a base and the like in a setting step in the method for manufacturing a temperature control plate according to the present invention.
FIGS. 8A and 8B are cross-sectional views of a main part of a wrapping bag showing an installation mode of a vent pipe in a method for manufacturing a temperature control plate according to the present invention.
FIG. 9 is a conceptual diagram showing a deaeration process and a heating / pressurization process in the method for manufacturing a temperature control plate according to the present invention.
FIGS. 10A and 10B are conceptual diagrams showing a conventional method for manufacturing a temperature control plate. FIGS.
[Explanation of symbols]
1 ... Temperature control plate,
2 ... the base,
3 ... Heater,
4 ... cover sheet,
5 ... Sheet adhesive,
6 ... heat sheet,
10 ... Bag,
12 ... sheet,
20 ... chamber,
1 '... temperature control plate,
2 '... the base,
2a '... cooling water channel,
2A '... vent pipe,
3 '... heater,
4 '... cover sheet,
5 '... Sheet adhesive,
6 '... heat sheet,
10 '...
12 '... sheet,
20 '... chamber.

Claims (4)

A method for producing a temperature control plate comprising a heat sheet adhered to a surface of a base having a flat plate shape,
A base with a heat sheet laminated on the surface through an adhesive layer is placed in a sealed wrap including a flexible sheet having heat resistance and breath resistance, and the sheet faces the surface of the heat sheet. A setting process for accommodating in the above-described manner;
A deaeration step of sucking air from the inside of the sachet and evacuating the inside of the sachet; heating to a predetermined temperature in a chamber containing the sachet; and a predetermined pressure by a gas pressure in the chamber A heating / pressurizing step to pressurize the pressure;
A method for producing a temperature control plate, comprising: The base is a hollow base having a cooling water channel therein, in the setting step, and wherein the attaching the vent tube communicating with the outside of the base of the interior and the wrapper claims Item 2. A method for producing a temperature control plate according to Item 1 .   2. The method for manufacturing a temperature control plate according to claim 1, wherein the heat sheet includes a heater and a cover sheet.   4. The temperature control plate according to claim 3, wherein the adhesive layers between the base and the heater and between the heater and the cover sheet are all made of a sheet-like adhesive. Method.

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