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JP4171847B2 - Solder ball mounting device - Google Patents

Solder ball mounting device Download PDF

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Publication number
JP4171847B2
JP4171847B2 JP03369598A JP3369598A JP4171847B2 JP 4171847 B2 JP4171847 B2 JP 4171847B2 JP 03369598 A JP03369598 A JP 03369598A JP 3369598 A JP3369598 A JP 3369598A JP 4171847 B2 JP4171847 B2 JP 4171847B2
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JP
Japan
Prior art keywords
pressure
solder ball
suction
suction head
head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP03369598A
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Japanese (ja)
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JPH11216696A (en
Inventor
良久 梶井
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Shibuya Corp
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Shibuya Corp
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Filing date
Publication date
Application filed by Shibuya Corp filed Critical Shibuya Corp
Priority to JP03369598A priority Critical patent/JP4171847B2/en
Priority to SG9805967A priority patent/SG86343A1/en
Priority to US09/223,394 priority patent/US6260259B1/en
Priority to KR10-1999-0002828A priority patent/KR100525850B1/en
Publication of JPH11216696A publication Critical patent/JPH11216696A/en
Application granted granted Critical
Publication of JP4171847B2 publication Critical patent/JP4171847B2/en
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/50—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor for integrated circuit devices, e.g. power bus, number of leads
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23P—METAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
    • B23P19/00—Machines for simply fitting together or separating metal parts or objects, or metal and non-metal parts, whether or not involving some deformation; Tools or devices therefor so far as not provided for in other classes
    • B23P19/001—Article feeders for assembling machines
    • B23P19/007—Picking-up and placing mechanisms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K3/00—Tools, devices, or special appurtenances for soldering, e.g. brazing, or unsoldering, not specially adapted for particular methods
    • B23K3/06—Solder feeding devices; Solder melting pans
    • B23K3/0607—Solder feeding devices
    • B23K3/0623—Solder feeding devices for shaped solder piece feeding, e.g. preforms, bumps, balls, pellets, droplets
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
    • B65G47/912—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers provided with drive systems with rectilinear movements only
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
    • B65G47/917—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers control arrangements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the groups H01L21/18 - H01L21/326 or H10D48/04 - H10D48/07
    • H01L21/4814—Conductive parts
    • H01L21/4846—Leads on or in insulating or insulated substrates, e.g. metallisation
    • H01L21/4853—Connection or disconnection of other leads to or from a metallisation, e.g. pins, wires, bumps
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/04—Mounting of components, e.g. of leadless components
    • H05K13/046—Surface mounting
    • H05K13/0465—Surface mounting by soldering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00—Articles made by soldering, welding or cutting
    • B23K2101/36—Electric or electronic devices
    • B23K2101/42—Printed circuits
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
    • H05K3/32—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
    • H05K3/34—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
    • H05K3/3457—Solder materials or compositions; Methods of application thereof
    • H05K3/3478—Applying solder preforms; Transferring prefabricated solder patterns
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/53—Means to assemble or disassemble
    • Y10T29/53039—Means to assemble or disassemble with control means energized in response to activator stimulated by condition sensor
    • Y10T29/53061—Responsive to work or work-related machine element
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/53—Means to assemble or disassemble
    • Y10T29/5313—Means to assemble electrical device
    • Y10T29/53191—Means to apply vacuum directly to position or hold work part

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Ceramic Engineering (AREA)
  • Electric Connection Of Electric Components To Printed Circuits (AREA)
  • Manipulator (AREA)
  • Wire Bonding (AREA)

Description

【０００１】
【発明の属する技術分野】
本発明は、ワークとなる基板等に半田ボールを搭載する半田ボールマウント装置に関するものであって、主としてＢＧＡ（ボールグリッドアレー）用半田ボールマウント装置における半田ボール吸着（バキューム吸着）時の圧力及びヘッド位置の制御手段の改良を主眼に発明されたものである。
【０００２】
【従来の技術】
半田ボールマウント装置において基板に複数個の半田ボールを搭載する場合、吸着ヘッド下面に複数の半田ボール吸着穴を開けた吸着プレートを形成し、該吸着穴に真空圧を利用して半田ボールを吸着し、基板上に搭載する方法が一般的である。この吸着に際して、半田ボール供給ボックスの半田ボールを浮遊させ、吸着する手段が開発されているが、この半田ボール浮遊方式を採用して、高速に吸着することにより、吸着に要する時間を短くするためには真空度を高くし、大吸引流量で吸引することになる。
【０００３】
吸着スピードを速くするため高い真空度の大吸引流量で半田ボールの吸着を行い、その吸着圧力で吸着した半田ボールを保持すると、図４に示されるように半田ボール３と吸着プレート３０の接触部よりエアー漏れが発生し、そのエアー漏れにより余剰の半田ボール３１を吸着してしまいダブルボールとなる。吸着プレート３０と半田ボール３との接触面が真円ではなく、更に半田ボール３も真球ではないので、そこに隙間が生じる場合があり、この隙間から別の半田ボール３１を吸引する力が発生しダブルボールが発生してしまうのである。更に、吸着圧力の真空度を高くしてしまうと隙間からの吸引力が強くなりダブルボールの発生頻度は更に高くなる。
【０００４】
【発明が解決しようとする課題】
本発明は、独自の半田ボール吸着圧力の調整と吸着ヘッドの位置調整によりダブルボールの発生を予防するとともに、適正なる半田ボール吸着を行うことを目的とする。
【０００５】
【課題を解決するための手段】
上記課題を解決するため次の３つの手段が採用される。第１の発明は、 半田ボールが貯留された半田ボール供給部と複数個の半田ボール吸着穴が下面に形成された吸着ヘッドと吸着ヘッドを昇降する昇降手段とを備え、半田ボール供給部の半田ボールを上記吸着ヘッドの吸着穴に吸着してワークに搭載する半田ボールマウント装置において、吸着ヘッド内の真空圧を半田ボールを吸着する第１の圧力と第１の圧力より真空度が低く、且つ、吸着された半田ボールを保持可能な第２の圧力とに設定可能な圧力調整手段を設け、上記昇降手段により吸着ヘッドが半田ボールを吸着する下降位置に位置するときは第１の圧力に設定し、吸着ヘッド内の真空圧が所定圧力に達したら、吸着ヘッドを昇降手段により上昇させ且つ上昇開始後に吸着ヘッド内の真空圧を第２の圧力に設定することを特徴とする半田ボールマウント装置である。
【０００６】
第２の発明は、第１の発明に吸着ヘッドの再度の下降及び再度の圧力調整を付加したものであって、上記吸着ヘッドを昇降手段により上昇させ且つ上昇開始後に吸着ヘッド内の真空圧を第２の圧力に設定した後、再度吸着ヘッドを下降位置に下降させるとともに吸着ヘッド内の圧力を第１の圧力に設定し、所定時間後に吸着ヘッド内の圧力を第２の圧力に設定することを付加した半田ボールマウント装置である。
【０００７】
第３の発明は、複数個の半田ボール吸着穴が下面に形成された吸着ヘッドを有し、半田ボール供給部の半田ボールを上記吸着ヘッドの吸着穴に吸着する際に、吸着ヘッドを複数回昇降して半田ボールを吸着し、吸着した半田ボールをワークに搭載する半田ボールマウント装置において、吸着ヘッドの下降時には吸着ヘッド内の真空圧を半田ボール吸着可能な第１の圧力に設定する手段と吸着ヘッドが上昇時には吸着ヘッド内の真空圧を第１の圧力より真空度の低い圧力である半田ボールを保持可能な第２の圧力に設定する手段とを有することを特徴とする半田ボールマウント装置である。
【０００８】
【発明の実施の形態】
以下図示の実施例と共に発明の実施の形態につき説明する。図１は、本発明が実施される半田ボールマウント装置の概要を示す斜視図であり、図中１が吸着ヘッドであり、吸着ヘッド１は、図示されていないが下面に複数個の半田ボール吸着穴が形成された吸着プレートを設けたものであり、昇降機構５と水平方向移動機構６とにより、上下方向及び水平方向に移動可能とされている。図中２は、半田ボール３が多数貯留された半田ボール供給ボックスであり、４はフラックス供給装置である。
【０００９】
吸着ヘッド１は半田ボール供給ボックス２の上方より下降し、半田ボール吸着動作を行い、半田ボール３を吸着穴に吸着する。他方フラックス供給装置４ではフラックス転写ピンにフラックスを供給した後、転写ピンによりワークである基板７にフラックスを転写する。その後、吸着ヘッド１は、図１に示すように基板７上に移動し、更に下降して半田ボール３を基板７に搭載するのである。本発明の特徴は、上記半田ボール吸着動作の制御にある。
【００１０】
吸着ヘッド１には半田ボール３の吸着のための吸引装置が連結されている。図２に示される吸引回路図により説明する。図２中８は、バキュームポンプであり、９が電磁弁にて構成される吸着バルブであり、バキュームポンプ８と吸着バルブ９及び吸着ヘッド１は吸引パイプ１３にて連結されている。尚、実施例では吸引装置としてバキュームポンプ８を用いているが、ブロアを用いても良い。
【００１１】
吸引装置は、吸着ＯＮ信号を受けると、吸着バルブ９が開き、バキュームポンプ８により高真空で吸引される。実施例では半田ボール３を吸着するための第１の圧力はバキュームポンプ８に設定してある。この第１の圧力の設定は、リリーフ弁を吸引パイプ１３に設け、該リリーフ弁にて行うことも可能である。
【００１２】
図２中１０は、圧力検出器であり、吸着ヘッド１内の真空圧を検出する。１１は、真空開放バルブであり、真空開放バルブ１１を開放することにより絞り弁１２で設定した真空圧へと吸引圧力を調整する。該真空開放バルブ１１が本願発明における第２の圧力の調整手段となり、吸着ヘッド１内の真空圧を半田ボール３を吸着する第１の圧力より真空度が低く、且つ、吸着された半田ボール３を保持可能な圧力に設定する。
【００１３】
半田ボール吸着動作における吸着ヘッド１の昇降と真空圧の関係を図３の対比グラフにより説明する。図３上段が吸着ヘッド１の昇降を示し、図３下段が圧力の変化を示し、横軸Ｔは時間を示している。
【００１４】
まず、昇降機構５の動作により吸着ヘッド１は、待機位置より半田ボール吸着位置（下降位置）まで下降する。下降とともに、吸引装置は吸着ＯＮ信号を受け、吸着バルブ９を開き、バキュームポンプ８にて高真空で吸引する。吸引を継続し、大部分の吸着穴３２に半田ボール３が吸着され、吸着ヘッド１内の真空度が第１の圧力に達したことを圧力検出器１０が検出後一定時間経過することにより半田ボール３の吸着完了となる。
【００１５】
ここで吸着完了の判断を一定時間経過するまで待つ理由は、ノイズによる誤動作を防止するためである。すなわち第１の圧力に達したことを検出後直ちに半田ボール３の吸着完了とみなすと、実際にはまだ十分に半田ボール３を吸着完了していないのに瞬間的なノイズにより、第１の圧力に達した（吸着完了）と間違って動作してしまう場合があるからである。
【００１６】
ここでは圧力検出器１０が吸着確認センサの役割を果たす。圧力検出器１０は、圧力計を用いるのが通常であるが、流量計を吸引パイプ１３の吸着ヘッド１直前等に取付け、この流量計をもって圧力を検出することも可能である。
【００１７】
吸着確認後、真空開放バルブ１１がＯＮとなり、絞り弁１２の設定に従った低真空へと移行する。このとき同時に昇降機構５が動作し、吸着ヘッド１は上昇し、上昇位置に至る。尚、この上昇位置は、待機のための吸着ヘッド１の上昇位置、更には横移動のための上昇位置よりは低い位置に設定されている。第１の発明での動作はこの段階までである。
【００１８】
第２の発明では、上記のように吸着ヘッド１を昇降機構５により上昇させた後、再度吸着ヘッド１を下降位置に下降させるとともに吸着ヘッド１内の圧力を第１の圧力に設定し、タイマー制御にて所定時間後に吸着ヘッド１内の圧力を第２の圧力に設定するのである。
【００１９】
ここで第２の圧力に設定するのを所定時間後としたのは次のような理由による。一度第２の圧力に設定しても、第２の圧力設定は真空開放バルブ１１の開放により行われるので、真空度は直ぐには下がらず、吸着ヘッド１内の真空度は、第１の圧力より少ししか低下しない。この状態で再度第１の圧力に設定すると直ぐに第１の圧力に達してしまう。これは半田ボール３の吸着の高さとして最も条件の良い位置である下降位置での吸引が直ぐに終了してしまい、次の動作状況である第２の圧力に移行してしまうことを意味する。このような場合、実際には歯抜けがあっても半田ボール３が歯抜けの吸着穴に吸着できない場合が発生する。かような問題点を回避するため所定時間経過後としたのである。
【００２０】
図３の実施例では、吸着ヘッド１は、再度上昇し、半田ボールマウント動作へと移行する。
【００２１】
【発明の効果】
本発明は、半田ボールを吸着後、吸着ヘッド内の真空圧を半田ボール保持に必要程度の低い真空圧（第２の圧力）に移行させるため、半田ボール吸着部からのエアーリークが減少し、ダブルボールの発生が減少する。もしダブルボールが発生した場合であっても吸着ヘッド内の真空圧が半田ボール吸着時の第１の圧力より真空度の低い第２の圧力に設定されるため、ダブルボールとなった余剰の半田ボールの吸着力も失われ、自然落下してダブルボールは解消する。
【００２２】
半田ボールは吸着時のみ高真空（第１の圧力）で吸着され、半田ボール保持、移動に際しては第１の圧力より真空度が低い第２に圧力にて保持しているので吸着穴への半田ボールの食い込みが減少し、半田ボールの基板への搭載ミスを防止することにもなる。
【００２３】
吸着ヘッドが下降位置にあると、半田ボールを浮遊させるためのエアーが吸着ヘッド下面にあたり、そこに生じる隙間風により半田ボールが半田ボール供給ボックスの端に寄せられてしまう危険があるが、請求項１及び請求項３記載の発明では吸着時以外は上方位置にてダブルボール解消動作等を行なうため、半田ボールの偏りが無くなる。
【００２４】
請求項２の発明のように、吸着ヘッド上昇後に再度下降し、半田ボールを吸着することにより半田ボールの吸着漏れ（歯抜け）を防止できるものとなる。この効果は請求項３の発明のように複数回昇降を繰り返す制御を行なうことによってもなしえる。
【図面の簡単な説明】
【図１】半田ボールマウント装置の概要を示す斜視図
【図２】吸着ヘッドの吸引回路図
【図３】吸着ヘッドの昇降と真空圧の対比グラフ
【図４】ダブルボール状態の一例を示す説明図
【符号の説明】
１．．．．．吸着ヘッド
２．．．．．半田ボール供給ボックス
３、３１．．半田ボール
４．．．．．フラックス供給装置
５．．．．．昇降機構
６．．．．．水平方向移動機構
７．．．．．基板
８．．．．．バキュームポンプ
９．．．．．吸着バルブ
１０．．．．圧力検出器
１１．．．．真空開放バルブ
１２．．．．絞り弁
１３．．．．吸引パイプ
３０．．．．吸着プレート
３２．．．．吸着穴[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a solder ball mounting device for mounting solder balls on a substrate or the like as a workpiece, and mainly the pressure and head at the time of solder ball adsorption (vacuum adsorption) in a solder ball mounting device for BGA (ball grid array). The invention was invented mainly to improve the position control means.
[0002]
[Prior art]
When mounting a plurality of solder balls on a substrate in a solder ball mounting device, a suction plate with a plurality of solder ball suction holes is formed on the lower surface of the suction head, and the solder balls are sucked into the suction holes using vacuum pressure. However, a method of mounting on a substrate is common. At the time of this adsorption, a means for floating and adsorbing the solder balls in the solder ball supply box has been developed. In order to shorten the time required for adsorption by adopting this solder ball floating method and adsorbing at high speed. In this case, the degree of vacuum is increased and suction is performed at a large suction flow rate.
[0003]
When the solder ball is attracted at a high suction flow rate with a high degree of vacuum in order to increase the adsorption speed and the solder ball adsorbed at the adsorption pressure is held, the contact portion between the solder ball 3 and the adsorption plate 30 as shown in FIG. Air leaks more, and the excess solder balls 31 are adsorbed by the air leaks to form double balls. Since the contact surface between the suction plate 30 and the solder ball 3 is not a perfect circle, and the solder ball 3 is not a perfect sphere, a gap may be formed there, and the force for sucking another solder ball 31 from the gap may be generated. It occurs and a double ball is generated. Furthermore, if the degree of vacuum of the adsorption pressure is increased, the suction force from the gap is increased and the frequency of occurrence of double balls is further increased.
[0004]
[Problems to be solved by the invention]
An object of the present invention is to prevent the generation of double balls by adjusting the unique solder ball suction pressure and the position of the suction head, and to perform proper solder ball suction.
[0005]
[Means for Solving the Problems]
In order to solve the above problems, the following three means are employed. A first invention includes a solder ball supply unit in which solder balls are stored, a suction head in which a plurality of solder ball suction holes are formed on a lower surface, and an elevating means for raising and lowering the suction head. In the solder ball mounting device for adsorbing the ball to the adsorption hole of the adsorption head and mounting it on the workpiece, the vacuum pressure in the adsorption head is lower than the first pressure and the first pressure for adsorbing the solder ball, and A pressure adjusting means that can be set to a second pressure capable of holding the attracted solder ball is provided, and the first pressure is set when the suction head is located at the lowered position where the solder head is attracted by the elevating means. When the vacuum pressure in the suction head reaches a predetermined pressure, the suction head is raised by the elevating means, and the vacuum pressure in the suction head is set to the second pressure after the lift starts. It is a field ball mount device.
[0006]
The second invention is the one in which the suction head is again lowered and the pressure is adjusted again to the first invention, and the suction head is lifted by the lifting and lowering means, and the vacuum pressure in the suction head is increased after the lift starts. After setting the second pressure, the suction head is lowered again to the lowered position, the pressure in the suction head is set to the first pressure, and the pressure in the suction head is set to the second pressure after a predetermined time. Is a solder ball mounting device to which is added.
[0007]
The third invention has a suction head having a plurality of solder ball suction holes formed on the lower surface, and when the solder balls of the solder ball supply part are sucked into the suction holes of the suction head, the suction head is moved a plurality of times. Means for setting a vacuum pressure in the suction head to a first pressure capable of sucking the solder ball when the suction head is lowered, in a solder ball mounting apparatus that lifts and lowers to attract the solder ball and mounts the sucked solder ball on the workpiece; And a means for setting a vacuum pressure in the suction head to a second pressure capable of holding a solder ball having a lower degree of vacuum than the first pressure when the suction head is raised. It is.
[0008]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described together with the illustrated embodiments. FIG. 1 is a perspective view showing an outline of a solder ball mounting apparatus in which the present invention is implemented. In FIG. 1, reference numeral 1 denotes a suction head. A suction plate in which holes are formed is provided, and can be moved in the vertical and horizontal directions by the elevating mechanism 5 and the horizontal movement mechanism 6. In the figure, 2 is a solder ball supply box in which a large number of solder balls 3 are stored, and 4 is a flux supply device.
[0009]
The suction head 1 descends from above the solder ball supply box 2, performs a solder ball suction operation, and sucks the solder ball 3 into the suction hole. On the other hand, in the flux supply device 4, the flux is supplied to the flux transfer pin, and then the flux is transferred to the substrate 7 as a workpiece by the transfer pin. Thereafter, the suction head 1 moves onto the substrate 7 as shown in FIG. 1 and further descends to mount the solder balls 3 on the substrate 7. The feature of the present invention resides in the control of the solder ball suction operation.
[0010]
A suction device for sucking the solder balls 3 is connected to the suction head 1. This will be described with reference to the suction circuit diagram shown in FIG. In FIG. 2, 8 is a vacuum pump, 9 is an adsorption valve constituted by an electromagnetic valve, and the vacuum pump 8, the adsorption valve 9 and the adsorption head 1 are connected by a suction pipe 13. In the embodiment, the vacuum pump 8 is used as the suction device, but a blower may be used.
[0011]
When the suction device receives the suction ON signal, the suction valve 9 is opened, and suction is performed in a high vacuum by the vacuum pump 8. In the embodiment, the first pressure for adsorbing the solder ball 3 is set to the vacuum pump 8. The first pressure can be set by providing a relief valve on the suction pipe 13 and using the relief valve.
[0012]
In FIG. 2, reference numeral 10 denotes a pressure detector that detects the vacuum pressure in the suction head 1. A vacuum release valve 11 adjusts the suction pressure to the vacuum pressure set by the throttle valve 12 by opening the vacuum release valve 11. The vacuum release valve 11 serves as the second pressure adjusting means in the present invention. The vacuum pressure in the suction head 1 is lower than the first pressure for sucking the solder balls 3 and the sucked solder balls 3 are sucked. Is set to a pressure that can be maintained.
[0013]
The relationship between the raising and lowering of the suction head 1 and the vacuum pressure in the solder ball suction operation will be described with reference to the comparison graph of FIG. The upper part of FIG. 3 shows the raising and lowering of the suction head 1, the lower part of FIG. 3 shows the change in pressure, and the horizontal axis T shows time.
[0014]
First, the suction head 1 is lowered from the standby position to the solder ball suction position (lowering position) by the operation of the lifting mechanism 5. Along with the lowering, the suction device receives the suction ON signal, opens the suction valve 9 and sucks the vacuum pump 8 with high vacuum. The suction is continued, the solder balls 3 are adsorbed in most of the adsorbing holes 32, and a certain time elapses after the pressure detector 10 detects that the degree of vacuum in the adsorbing head 1 has reached the first pressure. The adsorption of the ball 3 is completed.
[0015]
The reason for waiting for the completion of the suction until a predetermined time elapses is to prevent malfunction due to noise. That is, if it is considered that the adsorption of the solder ball 3 is completed immediately after the detection that the first pressure has been reached, the first pressure is caused by instantaneous noise even though the adsorption of the solder ball 3 is not yet completed. This is because there may be a case where the operation is mistakenly performed (adsorption completion).
[0016]
Here, the pressure detector 10 serves as an adsorption confirmation sensor. The pressure detector 10 normally uses a pressure gauge, but it is also possible to detect the pressure by attaching a flow meter immediately before the suction head 1 of the suction pipe 13 or the like.
[0017]
After confirming the suction , the vacuum release valve 11 is turned ON, and the state is changed to a low vacuum according to the setting of the throttle valve 12. At this time, the elevating mechanism 5 operates simultaneously, and the suction head 1 moves up to reach the raised position. This raised position is set to a position lower than the raised position of the suction head 1 for standby and further to the raised position for lateral movement. The operation in the first invention is up to this stage.
[0018]
In the second invention, after the suction head 1 is raised by the elevating mechanism 5 as described above, the suction head 1 is lowered again to the lowered position and the pressure in the suction head 1 is set to the first pressure, and the timer The pressure in the suction head 1 is set to the second pressure after a predetermined time by the control.
[0019]
The reason why the second pressure is set after the predetermined time is as follows. Even if the second pressure is set once, the second pressure is set by opening the vacuum release valve 11, so the vacuum does not drop immediately, and the vacuum in the suction head 1 is less than the first pressure. It only drops a little. If the first pressure is set again in this state, the first pressure is reached immediately. This means that the suction at the lowered position, which is the most favorable position as the height of the adsorption of the solder balls 3, is immediately finished, and the second operation state is shifted to the second pressure. In such a case, there is a case where the solder ball 3 cannot be sucked into the missing hole even if there is actually a missing tooth. In order to avoid such problems, a predetermined time has elapsed.
[0020]
In the embodiment of FIG. 3, the suction head 1 moves up again and shifts to a solder ball mounting operation.
[0021]
【The invention's effect】
In the present invention, after the solder ball is sucked, the vacuum pressure in the suction head is shifted to a low vacuum pressure (second pressure) necessary for holding the solder ball, so that air leak from the solder ball suction portion is reduced. The occurrence of double balls is reduced. Even if a double ball is generated, the vacuum pressure in the suction head is set to a second pressure lower in vacuum than the first pressure at the time of suction of the solder ball. The adsorbing power of the ball is also lost, and the ball naturally falls and the double ball is eliminated.
[0022]
Solder balls are adsorbed at high vacuum (first pressure) only during adsorption, and solder balls are held at the second pressure, which is lower than the first pressure when holding and moving the solder balls. The bite of the ball is reduced, and the mounting error of the solder ball onto the substrate is prevented.
[0023]
If the suction head is in the lowered position, there is a risk that air for floating the solder ball hits the lower surface of the suction head, and the solder ball is brought close to the end of the solder ball supply box by the airflow generated there. In the first and third aspects of the invention, since the double ball elimination operation is performed at an upper position except during the adsorption, the solder balls are not biased.
[0024]
As in the second aspect of the present invention, after the suction head is raised, it descends again, and the solder ball is sucked to prevent the solder ball from being leaked (tooth missing). This effect can also be achieved by performing control that repeats raising and lowering a plurality of times as in the third aspect of the invention.
[Brief description of the drawings]
FIG. 1 is a perspective view showing an outline of a solder ball mounting device. FIG. 2 is a suction circuit diagram of a suction head. FIG. 3 is a graph of a suction head ascending / descending and a vacuum pressure. Figure [Explanation of symbols]
1. . . . . 1. Suction head . . . . Solder ball supply box 3, 31. . 3. Solder balls . . . . 4. Flux supply device . . . . Elevating mechanism6. . . . . 6. Horizontal movement mechanism . . . . Substrate 8. . . . . 8. Vacuum pump . . . . Adsorption valve 10. . . . Pressure detector 11. . . . Vacuum release valve 12. . . . Throttle valve 13. . . . Suction pipe 30. . . . Suction plate 32. . . . Suction hole

Claims (3)

半田ボールが貯留された半田ボール供給部と複数個の半田ボール吸着穴が下面に形成された吸着ヘッドと吸着ヘッドを昇降する昇降手段とを備え、半田ボール供給部の半田ボールを上記吸着ヘッドの吸着穴に吸着してワークに搭載する半田ボールマウント装置において、吸着ヘッド内の真空圧を半田ボールを吸着する第１の圧力と第１の圧力より真空度が低く、且つ、吸着された半田ボールを保持可能な第２の圧力とに設定可能な圧力調整手段を設け、上記昇降手段により吸着ヘッドが半田ボールを吸着する下降位置に位置するときは第１の圧力に設定し、吸着ヘッド内の真空圧が所定圧力に達したら、吸着ヘッドを昇降手段により上昇させ且つ上昇開始後に吸着ヘッド内の真空圧を第２の圧力に設定することを特徴とする半田ボールマウント装置。A solder ball supply unit storing a solder ball; a suction head having a plurality of solder ball suction holes formed on a lower surface; and an elevating means for moving the suction head up and down. In a solder ball mounting device that is sucked into a suction hole and mounted on a workpiece, the vacuum pressure in the suction head is lower than the first pressure and the first pressure for sucking the solder ball, and the attracted solder ball Pressure adjusting means that can be set to a second pressure that can hold the pressure, and when the suction head is located at a lowered position where the soldering head attracts the solder ball by the elevating means, the first pressure is set. When the vacuum pressure reaches a predetermined pressure, the suction head is raised by the elevating means, and the vacuum pressure in the suction head is set to the second pressure after the start of the raising. Apparatus. 上記吸着ヘッドを昇降手段により上昇させ且つ上昇開始後に吸着ヘッド内の真空圧を第２の圧力に設定した後、再度吸着ヘッドを下降位置に下降させるとともに吸着ヘッド内の圧力を第１の圧力に設定し、所定時間後に吸着ヘッド内の圧力を第２の圧力に設定することを特徴とする請求項１記載の半田ボールマウント装置。The suction head is raised by the elevating means, and after the start of raising, the vacuum pressure in the suction head is set to the second pressure, and then the suction head is lowered again to the lowered position and the pressure in the suction head is changed to the first pressure. 2. The solder ball mounting device according to claim 1, wherein the solder ball mounting device is set and the pressure in the suction head is set to a second pressure after a predetermined time. 複数個の半田ボール吸着穴が下面に形成された吸着ヘッドを有し、半田ボール供給部の半田ボールを上記吸着ヘッドの吸着穴に吸着する際に、吸着ヘッドを複数回昇降して半田ボールを吸着し、吸着した半田ボールをワークに搭載する半田ボールマウント装置において、吸着ヘッドの下降時には吸着ヘッド内の真空圧を半田ボール吸着可能な第１の圧力に設定する手段と吸着ヘッドが上昇時には吸着ヘッド内の真空圧を第１の圧力より真空度の低い圧力である半田ボールを保持可能な第２の圧力に設定する手段とを有することを特徴とする半田ボールマウント装置。There is a suction head having a plurality of solder ball suction holes formed on the lower surface, and when the solder ball of the solder ball supply part is sucked into the suction hole of the suction head, the suction head is moved up and down several times. In a solder ball mounting apparatus for adsorbing and mounting an adsorbed solder ball on a workpiece, means for setting the vacuum pressure in the adsorbing head to a first pressure that can adsorb the solder ball when the adsorbing head is lowered and adsorbing when the adsorbing head is raised And a means for setting the vacuum pressure in the head to a second pressure capable of holding a solder ball having a vacuum lower than the first pressure.
JP03369598A 1998-01-30 1998-01-30 Solder ball mounting device Expired - Fee Related JP4171847B2 (en)

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JP03369598A JP4171847B2 (en) 1998-01-30 1998-01-30 Solder ball mounting device
SG9805967A SG86343A1 (en) 1998-01-30 1998-12-29 Solder ball mounting device
US09/223,394 US6260259B1 (en) 1998-01-30 1998-12-30 Solder ball mounting device
KR10-1999-0002828A KR100525850B1 (en) 1998-01-30 1999-01-29 Solder ball mounting device and method for setting a position and degree of vacuum of a sucking head

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JPH11216696A (en) 1999-08-10
KR100525850B1 (en) 2005-11-02
US6260259B1 (en) 2001-07-17
SG86343A1 (en) 2002-02-19
KR19990068196A (en) 1999-08-25

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