JP4141778B2 - Sliding parts and manufacturing method thereof - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a sliding component having improved lubricity of sliding surfaces such as a seal ring of a mechanical seal, a bearing, and a piston ring. In particular, the present invention relates to a high-load sliding component in which the friction coefficient of the sliding surface is reduced to reduce the amount of wear.
[0002]
[Prior art]
Japanese Patent Publication No. 5-69066 exists as a prior art of sliding parts according to the present invention.
The sliding component described in this publication is a sintered product of porous silicon carbide, and is attached as one or both seal rings of a mechanical seal. The mechanical seal is used for a pump or a refrigerator to seal a liquid such as water.
[0003]
In this mechanical seal, a sliding part is used as a seal ring, and a fixing ring is made of silicon carbide or carbon material. The high pressure P1 side and the low pressure P2 side are sealed by the close contact between the seal ring and the fixing ring.
This seal ring is a silicon carbide sintered body in which spherical pores having an average pore diameter of 10 × 10 ⁻⁶ m to 40 × 10 ⁻⁶ m are scattered in the crystal structure to improve sliding characteristics.
[0004]
The pores formed on the sliding surface of the silicon carbide sintered body are those in which polystyrene beads are added before sintering, and the pores are formed by decomposition and sublimation during temporary sintering. As a result, the silicon carbide sintered body is interspersed as the pores are chained in the crystal grains to reduce the bonding force between the silicon carbide particles. Furthermore, since polystyrene beads are compressed during compression molding, it is difficult to form the average pore diameter as set. Since the load capacity decreases, the amount of wear increases under severe sliding conditions.
Further, since the pores in this silicon carbide sintered body are a sintered body made of only silicon carbide, there is no moisture retention, and the inside of the pores tends to become dry as the sliding surface generates heat. For this reason, it cannot be expected that the friction coefficient is reduced for high loads.
In this manufacturing method, polystyrene beads are sublimated and diffused by heat during sintering, and the sublimation gas of the beads adheres in the sintering furnace or in the passage to induce contamination. Various improvements have been made to solve this problem, but no effective technical and cost problems can be found.
[0005]
In addition, if the pores scattered on the sliding surface of the seal ring slide under severe conditions with the fixed ring made of silicon carbide material, it will break from around the pores of the seal ring, and the powder will intervene on the sliding surface. This will promote wear of the sliding surface. In addition, when the fixing ring is made of carbon material, the sliding surface of the carbon material can be scraped off during sliding due to the pores of the seal ring. The flatness of the sliding surface of the ring deteriorates.
[0006]
Next, there exists a sealing ring of a mechanical seal as shown in FIG. 3 relating to the present invention as an improvement in the above-described reduction in strength of the sliding component and leakage of the sealed fluid. This mechanical seal is configured in the same manner as the above-described mechanical seal. The sliding surfaces of the fixed ring held by the housing and the driven ring 100 shown in FIG. 3 fixed to the rotating shaft come into close contact with each other to seal the sealed fluid.
[0007]
A large number of recesses 105 are formed on the sliding surface 101 of the driven ring 100. The recess 105 is formed to be inclined with respect to the rotation direction of the sliding surface 101. For this purpose, the recess 105 is formed in the sintered body and then formed on the sliding surface by fine processing such as sandblasting. The depth of the concave portion 105 is extremely shallow, which is a fraction of the size of the concave portion 105 viewed from the plane. Since the concave portion 105 formed on the sliding surface is formed by machining or the like, it is difficult to form the concave portion on a hard material. In addition, it is difficult to process the concave portion 105 to a fine size that is formed in the sintering process, and it is also possible to increase the depth relative to the average diameter of the concave portion 105 from the current state of machining. Have difficulty. Further, since the recess 105 is processed by applying stress to the sliding surface, there is a problem that the recess 105 is damaged from the edge of the recess 105 during sliding.
[0008]
As an application of the sliding surface 105, the recess 105 is intended to be lubricated by a fluid that has entered between the sliding surface 101 of the driven ring 100 and the sliding surface of the fixed ring. The fluid that has entered from the outer peripheral side of the driven ring 100 is supplemented by the concave portion 105 on the outer peripheral side before reaching the inner peripheral end side, and this supplemented fluid is retained in the concave portion 105 by the viscous action and the rotation direction of the driven ring 100. It is moved in the outer circumferential direction. Thus, since the fluid is pushed outward while the sliding surface 105 is rotating, heat is generated together with the sliding friction.
[0009]
As described above, the recess 105 is configured to have an effect of pushing the sealed fluid outward by the pumping action of the recess 105, so that the lubricating liquid does not exist on the sliding surface. Further, since it is difficult to increase the depth of the recess 105, the bottom surface of the recess 105 has no lubricating liquid holding action, and it is difficult to hold the lubricating liquid on the sliding surface for a long time. For this reason, since the sliding surface generates heat, a squeal phenomenon is likely to occur.
The disappearance of the lubricating liquid on the sliding surface promotes wear as well as heat generation on the sliding surface, and eventually destroys the edge of the recess 105. When the breakage of the edge of the recess 105 starts, the powder intervenes on the sliding surfaces and rapidly wears both sliding surfaces.
[0010]
[Problems to be solved by the invention]
The present invention has been made in view of the above-described problems, and the problem to be solved by the invention is to retain a lubricating liquid on a sliding surface to achieve a lubricating action and to reduce a friction coefficient. That is. Furthermore, the sliding surface of the hard material is mirror-like, and the shape of the pores for retaining the lubricating liquid and the pore area ratio with respect to the sliding surface are easily obtained. Furthermore, the durability of the sliding surface is improved by preventing the sliding surface from being worn and damaged under high load and severe sliding conditions.
[0011]
[Means for Solving the Problems]
The present invention has been made to solve the technical problems as described above, and means for solving the technical problems are configured as follows.
[0012]
The sliding component of the present invention according to claim 1 is a sliding component having a sliding surface for sealing ,
Sintered silicon carbide powder as a base material, and a silicon carbide powder having a shape larger than that of the silicon carbide powder and having a carbon particle size ranging from 20 × 10 ⁻⁶ m to 300 × 10 ⁻⁶ m. 1 to 15 parts by weight of a plurality of carbon particles with respect to 100 parts by weight, and silicon carbide converted by reacting silicon (Si) and carbon (C) for bonding between the carbon particles and the silicon carbide powder. A recess formed on the sliding surface of the carbon particles by having the sliding surface on a sintered body having a sintered structure with the solid and the silicon solid remaining without reacting and heat-treating the sintered body It has a shape-like pore .
[0013]
In the sliding component according to the first aspect of the present invention, a silicon carbide solid converted by reacting carbon in the sintered body with molten Si by heat treatment and a Si solid (silicon metal) remaining without reaction. The thin layer of the structure strongly bonds the boundary phase between each carbon particle of a large particle and each silicon carbide powder, so that the toughness of the sliding surface can be exhibited. As a result, the carbon particles can be enlarged in the range of 20 × 10 ⁻⁶ m to 300 × 10 ⁻⁶ m, so that the lubricating ability by the carbon particles is improved.
The reaction sintered body of the silicon carbide solid and the Si solid is harder than the carbon particles and has a high bonding strength because it is a material having strength. At the same time, the sintered structure layer of the silicon carbide solid and the Si solid has a lower hardness than silicon carbide, but has a high elastic modulus and strength, and is not easily damaged.
Further, the conventional atmospheric pressure sintered silicon carbide body is said to shrink by 14% to 17% as a whole because it must be sintered at a temperature of 2000 ° C. or higher when pores are formed.
On the other hand, the sintered structure of the silicon carbide solid and the Si solid (silicon metal) of the present invention is obtained by reacting the silicon carbide powder and the carbon particles with a thin coating layer formed during granulation. Since it is bonded with the tissue layer, the shrinkage and deformation required as a sealing surface of the sealing ring are small, and the bonding force is also strong.
In addition, the sliding surface can be formed into a mirror surface by a dense structure layer of silicon carbide solid and Si solid that directly bonds silicon carbide powder and carbon particles . For this reason, lubrication by the carbon particles scattered on the sliding surface and lubrication by the lubricating liquid interposed in the concave-shaped pores provided on the large carbon particles can further reduce the sliding resistance of the sliding surface. It becomes possible. Further, even by increasing the planar dimensions of the pores, even if deep depth sintering tissue silicon carbide solids and Si solid, because bonding force between carbon particles is good, from being damaged from the edge of the pore It can be effectively prevented.
[0014]
The sliding component of the present invention according to claim 2 is characterized in that the pores have a plane dimension of 20 × 10 ⁻⁶ m to 300 × 10 ⁻⁶ m and a depth from the sliding surface. The size is 20 × 10 ⁻⁶ m or more, and the bottom surfaces of the pores are formed by the carbon particles .
[0015]
The sliding component of the present invention relating to the Claim 2, since the formed pores by burning the surface of the carbon particles of the sliding surface, it is a large pore planar dimensions, completely burning the carbon particles if so not to remove Te may fine pores according to the combustion on the peripheral surface layer of the pores. Then, the lubricating action with sliding of 20 × 10 -6 sliding surface lubricant contained in the peripheral surface layer is extrusion of the carbon particles be sufficient lubricating liquid is reduced existing in more pores ^m . Or, because the pores of the sliding surface is formed by burning the carbon particles, it is also possible to form a finer air pores than the pores on the inner peripheral surface of the pores, excellent wettability.
The carbon particles are cost inexpensive, furthermore, Ahn also manufacturing cost for forming the pores in the carbon particles Kudekiru. Furthermore, the pores in the polystyrene beads during molding as in the prior art is compressed is smaller rather than be formed on the pore size as designed in accordance with the burning time.
[0016]
Method for producing a sliding component of the present invention relating to claim 3, carbide the sintered powder silicofluoride including Motoko powder 100 parts by weight, the size is 20 × ¹⁰ from ^-6 m 300 × of ^{10 -6} m Concrete and carbon particles from 1 15 parts by weight, to dissolve the resin by dissolving 20 wt% of a high carbonization of the resin from 8, together with depositing the dissolved resin on the outer periphery of the carbon particles and the carbonization silicon powder formed in the grain, and the molded body by molding the granulated powder, the vacuum molded product or the Rutotomoni sintered body is change the resin containing allowed to warm in an inert atmosphere to-carbon Reaction sintering in which the carbon particles and the silicon carbide powder are bonded by the silicon carbide solid formed and then converted by reacting carbon in the sintered body with molten Si by heat treatment and the remaining Si solid Form the sliding surface by processing the reaction sintered body. After heated in a gas atmosphere, and forming the pores of the recess to burn off the inner periphery of the sliding surface of the carbon particles.
[0017]
In the method of manufacturing the sliding component of the present invention according to claim 3, it was removed by burning carbon particles are contained in the sintered body, at from those which form the pores, as in the conventional sintering process There resin particles (the polystyrene beads) different from the one forming the pores by sublimation dissipated by high temperature heat, in the inexpensive production costs, it is possible to improve the function of the pores. Moreover, it is possible to effectively prevent sintering furnace and out of a resin sublimation gas is contaminated the ing pollution. The cost for preventing this contamination can be reduced.
Furthermore, the pores by combustion of the carbon particles to kick the sliding surface, since it is formed only by heating several minutes to several tens of minutes at a low temperature of 800 ° C from 500 ° C in air, it has a low heating costs such as electric power, production Cost can be reduced.
Furthermore, the carbon particles are low in cost, and the combustion gas for forming the pores can use the atmosphere, so that the production cost can be reduced.
Moreover, since very wettability with molten Si and carbon particles / SiC powder good, there is a toughness in the sintered body, because and sliding surfaces is possible that form the mirror surface, the lubricant This reduces the sliding resistance and improves the sealing performance of the sliding surface.
And since the depth of the pores of the carbon particles gradually burns the surface of the carbon particles, the depth of the pores can be managed by the heating temperature and time. For this reason, the pore design is easy. Moreover, since the carbon particles at the bottom of the pore is changed to the fine pore portion by combustion is heated, Ru can be formed in excellent shape adsorption of the lubricating fluid. And the sliding component for heavy loads which reduced the friction coefficient of the sliding surface and reduced the amount of wear can be obtained.
[0018]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, the sliding component according to a preferred embodiment of the present invention will be described in detail.
FIG. 1 shows a first embodiment according to the present invention, and is an enlarged photograph of an optical microscope of a sliding surface in which pores are formed in carbon particles by heating the sliding surface of a sintered body. Further, FIG. 2 is a half sectional view of a testing machine for testing the sliding component shown in FIG.
[0019]
A method for manufacturing the sliding component 1 shown in FIG. 1 will be described.
The first stage of the manufacturing method of the sliding component 1 includes 25 parts by weight of silicon carbide powder having a particle size of 4 × 10 ⁻⁶ and 75 parts by weight of silicon carbide powder having a particle size of 8 × 10 ⁻⁶ m. In contrast, 12 parts by weight of a phenol resin having a carbonization rate of 55% and 5 parts by weight of carbon particles having a particle diameter of 40 × 10 ^{−6 to} 60 × 10 ⁻⁶ m are mixed, and boron carbide is used as a sintering aid. 0.3 parts by weight of powder and 0.8 parts by weight of carbon black are mixed. Furthermore, 3 parts by weight of polyvinyl alcohol is added as a molding binder. Then, water from the slurry of 40% concentration while adding and granulated. The size of the carbon particles may be in the range of 20 × 10 ^{−6 to} 300 × 10 ⁻⁶ m, and the shape is preferably spherical. However, the carbon particles are not limited to a spherical shape, and other shapes can exhibit the same effect as a spherical shape. In addition, the amount of carbon particles added is preferably 3 to 15 parts by weight. Furthermore, the amount of carbon particles added may be in the range of 1 to 15 parts by weight. Furthermore, it is possible to increase the carbon particles 10 to 18 parts by weight. However, if the carbon particles are excessively increased to 18 parts by weight or more, there is a problem in terms of strength as the sliding component 1.
[0020]
Next, this slurry is kneaded for 12 hours in a ball mill, and formed into a granule for molding having an average diameter of 80 × 10 ⁻⁶ m by a spray dryer. The granule for sintering is filled in a molding die and compression molded at a pressure of 120 MPa.
Further, this molded body is heated in a vacuum atmosphere to carbonize resin up to 1000 ° C, and then contacted with molten Si at 1500 ° C to start reaction sintering and continue for 2 hours to sinter. To do. By sintering for about 2 hours, the carbon particles can be dispersed and contained in the silicon carbide structure to obtain a dense reaction sintered silicon carbide body.
[0021]
Next, form a working surface corresponding to a sliding surface 2 of the anti応焼sintered. This processed surface may be polished or lapped.
The sliding surface of the sintered body of silicon carbide 5 is dotted with a large number of carbon particles (in FIG. 1, since the pores 10 are formed in the carbon particles , the reference numerals are omitted but indicate the same positions). , carbon particles child by polished also a part of the processed sliding surface.
[0022]
This polished sintered body is put into a heating furnace, and the temperature of the sintered body is increased at a rate of 360 ° C./H in the air atmosphere. After raising the temperature to reach a temperature of 800 ° C., heating is performed at that temperature for about 30 minutes. Thereafter, the sintered body is gradually cooled in the furnace. This cooled sintered body becomes the sliding component 1. FIG. 1 is a photograph of a sliding surface 2 showing a part of the sliding component 1 with an optical microscope.
In FIG. 1, pores 10 are formed in the carbon particles distributed on the sliding surface 2 of the silicon carbide 5. Further, the Si solid 20 is a structure of (metal) Si that remains without reacting with carbon . The Si 20 is part is during heating to the molten Si 20 is ing silicon carbide solid 5 reacts with the carbon carbonized resin, the remaining Si solid 20 is silicon carbide (SiC) 5 and the carbon particles Therefore, the gap around the silicon carbide 5 and the carbon particles is filled together with the reacted silicon carbide solid 5 as shown in FIG . As a result, a product in which pores 10 having pore diameters (pore lengths) in the range of 40 × 10 −6 m to 60 × 10 −6 m are easily obtained in a later step . The porosity with respect to the area ratio of the sliding surface is 6%. The porosity with respect to the area ratio of the sliding surface is in the range of 3% to 15%. Then, the sliding surface 2 is tough contain a boundary Sakai phase of silicon carbide solid 5 and the Si solid 20 is silicon carbide 5 and carbon particles, ing a mirror-like plane Polishing the sliding surface.
[0023]
As shown FIG. 1, the sintered body 1 of silicon carbide 5, pores 10 provided to a large number of carbon particles are scattered. This porosity 10, heating at a temperature ranging from 500 ° C to 800 ° C in a gas atmosphere containing oxygen from the state of the sintered body, as shown in FIG. 1, the machined surface of the carbon particles (the sliding surface 2 ) Is burned and formed in the concave pores 10. Further, fine pores are formed in the carbon particles on the peripheral surface of the pores 10 by combustion. The size of the pores 10 is preferably in the range of 20 × 10 −6 to 300 × 10 −6 m in the plane dimension at the inner periphery of the carbon particles , and the depth H is preferably 20 × 10 −6 or more.
[0024]
The depth of the pores 10 is determined by managing the combustion time under constant combustion conditions. For example, when the pores 10 are heated for 6 minutes in an air atmosphere at a temperature of 700 ° C., the pores 10 having a depth of 3 × 10 −6 to 5 × 10 −6 m are formed. From this combustion rate, the depth of the pores can be formed in the sliding surface 2. Furthermore, it is also possible to interpose a carbon fine particles in the pores 10. As a result, the lubricating effect by carbon particles or the like can be exhibited. Moreover, since the combustion time for forming the pores 10 can be shortened, the manufacturing cost of the sliding component 1 can be reduced. Or, from the gas atmosphere in the furnace is sufficient air, the cost of the gas becomes cheaper, further, since the burn time Ru short der, generation of combustion gases that pollution small Kudekiru. Then, from expensive furnace life environment is worsen the conventional manner in the furnace is shortened, thereby preventing the combustion process by the atmosphere in the furnace.
[0025]
It is possible to be contained in the interior of the pores 10 of the lubricating liquid by Rukoto to form the air hole 10 by burning the sliding surface 2 of the carbon particles. In addition, the boundary phase of the silicon carbide 5 powder on the sliding surface 2 is strong due to the structure in which the reacted silicon carbide solid and the Si solid 20 are interposed, as shown in FIG. It becomes possible. In addition, lubricity is exhibited by the moisturizing effect in the carbon particles .
[0026]
The sliding component 1 is manufactured as described above. The sliding component 1 can be used, for example, as a sealing ring for a seal ring of a mechanical seal, a bearing portion of a bearing, a piston ring, or a sealing surface.
[0027]
When the lubricating liquid is present on the sliding surface 2, the lubricating liquid is first stored in the pores 10. Then, the lubricating liquid is supplied from the pores 10 when sliding. For this purpose, the sliding surface 3 is Ru is prevented from wear by the lubricating effect.
Even if the sliding surface 2 is in a high load state, the sintered body of the silicon carbide 5 and the carbon particles are bonded at the time of sintering, and the silicon carbide 5 and the silicon solid 5 are reacted by the reacted silicon carbide solid and the Si solid 20. since between the carbon particles are strongly bonded, the peripheral edge of the pores 10 is protected from damage. Then, both the lubricating effect of the pores 10, to reduce friction with mirror-like sliding surface 2, to prevent wear and damage of the sliding surface 2.
[0028]
Next, the test piece of the sliding component 1 shown in FIG. 1 was tested with the sliding tester shown in FIG.
FIG. 2 is a half cross-sectional view of a sliding tester for testing the test piece. A casing 23 of the sliding tester is formed in an empty chamber so that a sealed fluid S, which is a test solution, can be placed therein. A rotating shaft 24 having one end fitted therein is provided in the empty chamber. A flange is provided at one end of the rotary shaft 24, and the test rotary sliding component 25 is elastically pressed through a spring 27 attached to the flange. A packing 26 is provided so that the sealed fluid W does not leak from the mounting surface of the test rotary sliding component 25.
On the other hand, the casing 23 is provided with a test fixed sliding component 21 at a position facing the test rotary sliding component 25. The test sliding member 21 is also provided with a gasket 22 so that the sealed fluid S does not leak from the mounting surface.
The test fixed sliding component 21 and the test rotary sliding component 25 are manufactured by processing the sliding component 1 shown in FIG. 2 of the present invention.
[0029]
Next, a silicon carbide sliding part of a comparative example will be described.
The method for manufacturing a sliding component, particle size ^{0.4 × 10 -6 ~0.8 × 10 -6} m of the silicon carbide powder 100 parts by weight of particle size with respect to the 35 × ¹⁰ -6 ~45 × ^{10 - While} mixing 5 parts by weight of ⁶ m polystyrene beads, 0.3 part by weight of boron carbide powder and 0.8 part by weight of carbon black are mixed as a sintering aid. Furthermore, 3 parts by weight of polyvinyl alcohol is added as a molding binder. And it is comprised in the slurry state of a 40% density | concentration, adding water.
Next, this slurry is kneaded for 12 hours in a ball mill, and formed into a granule for molding having an average diameter of 80 × 10 ⁻⁶ m by a spray dryer. The granule for sintering is filled in a molding die and compression molded at a pressure of 120 MPa.
This molded body is sintered to form a sintered body in the next step, and the polystyrene beads are decomposed and sublimated to form spherical pores during temporary sintering during the sintering process. The sintered body is polished to obtain a test sliding part having pores on the sliding surface. The pores on this sliding surface are dotted with a number of spherical shapes obtained by arbitrarily cutting the spherical particles of FIG. In order to use this silicon carbide sintered sliding part as a comparative example, it was fabricated into a test sliding sliding part and a testing rotary sliding part.
[0030]
The test fixed sliding part 21 and the test rotary sliding part 25 of the present invention were attached to the sliding tester of FIG. This test condition is
1) Fluid to be sealed: water 2) Peripheral speed of sliding surface: 6.3 m / s
3) Sliding time: 70 hours 4) Temperature of sealed fluid: 80 ° C
5) Sliding surface pressure: 0.8 MPa.
[0031]
By this experiment, the amount of wear on the sliding surface of the sliding component was tested. The results are as follows.
A. The test result of the sliding component of this invention.
The test fixed sliding part 21 of the present invention has a wear amount of 0.3 × ^{10 −6} m.
The test rotary sliding component 25 of the present invention has a wear amount of 0.3 × ^{10 −6} m.
B. The test result of the sliding part of a comparative example.
The test fixed sliding component 21 of the comparative example has a wear amount of 0.5 × ^{10 −6} m.
The test rotary sliding component 25 of the comparative example has a wear amount of 0.6 × ^{10 −6} m.
In particular, under high load conditions, the amount of wear of the sliding component 1 of the present invention does not increase, whereas the amount of wear of the sliding component 1 of the comparative example increases and the sealing performance of the sliding surface tends to decrease. It is in.
And the sliding component 1 of this invention has a small friction coefficient in high load, and the flatness of a sliding surface is hold | maintained. As a result, it is possible to obtain an excellent effect in terms of sealing ability when used for a mechanical seal or the like.
[0032]
【The invention's effect】
According to the sliding component according to the present invention, since the upper surface of the carbon particles on the sliding surface is formed in the pores by combustion in an oxygen atmosphere with the configuration described in claims 1 to 2, the pores on the sliding surface are formed. It can be expected that the lubricating liquid present in the inside is interposed in the sliding surface and exerts a lubricating action. Furthermore, since the cost of the manufacturing process of the sintered body is low, the sintered part can be made inexpensive.
[0033]
In addition, a minute carbon powder is interposed on the sliding surface to reduce the friction coefficient of the sliding surface, and since the leakage between molten Si and carbon / SiC is extremely good, there is an unnecessary gap between silicon carbide. Not formed, toughness is exhibited, and the sliding surface is formed in a mirror shape, and the effect of preventing wear of the sliding surface is exhibited. Furthermore, the sealing ability of the sliding surface is improved.
At the same time, the toughening of the sliding surface has the effect of protecting the edges of the pores from being damaged during heavy load sliding.
[0034]
Furthermore, according to the method for manufacturing a sliding component according to the present invention, the pores on the sliding surface are formed by burning carbon in the atmosphere. Therefore, the inside of the sintering furnace can be effectively prevented from being contaminated by the resin sublimation gas. In addition, the manufacturing cost for preventing the contamination can be reduced.
Furthermore, since the pores in the carbon particles on the sliding surface can be formed only by heating for several minutes to several tens of minutes in the atmosphere, the production cost can be reduced.
Furthermore, the carbon particle material is low-cost, carbon for forming pores is strengthened by the addition of Si, and the carbon combustion temperature is also low, so the production cost can be reduced.
And since the pore depth of the carbon particles gradually oxidizes the surface of the carbon particles and burns away, the pore depth can be determined by managing the heating time, so the pore design is easy. It can be expected that the sliding resistance can be reduced as designed by the depth of the pores.
[Brief description of the drawings]
FIG. 1 is a partial micrograph showing a sliding surface of a sliding part according to an embodiment of the present invention.
FIG. 2 is a cross-sectional view of a sliding part testing machine according to the present invention.
FIG. 3 is a front view of a sliding surface of a sliding component of a conventional example.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Sliding component 2 Sliding surface 5 Silicon carbide 10 Pore 20 Si
21 Fixed sliding part for test 22 Gasket 23 Casing 24 Rotating shaft 25 Rotary sliding part for test 26 Packing 27 Spring
S Sealed fluid

Claims (3)

A sliding component having a sliding surface for sealing ,
Silicon carbide powder to be sintered and used as a base material;
A plurality of 1 to 15 parts by weight based on said silicon carbide powder 100 parts by weight with the size of the carbon particles larger shape than the silicon carbide powder consists of a range of 20 × ^{10 -6} m of 300 × ^{10 -6} m Carbon particles,
It has a sintered structure of silicon carbide solid converted by reacting silicon (Si) and carbon (C) which binds between each carbon particle and silicon carbide powder, and the silicon solid remaining without reacting. has the sliding surface on the sintered body, said having a concave-shaped pores formed on the sliding surface sliding element, characterized in Rukoto of the carbon particles by heat-treating the sintered body. The pore has a plan dimension of the sliding surface of 20 × 10 ⁻⁶ m to 300 × 10 ⁻⁶ m and a depth dimension of 20 × 10 ⁻⁶ m or more from the sliding surface. The sliding part according to claim 1, wherein a bottom surface of the sliding part is formed of the carbon particles . The sintered powder comprising 100 parts by weight of powder carbide silicofluoride Motoko, and 1 to 15 parts by weight of carbon particles of 300 × ^{10 -6} m from size of 20 × ^{10 -6} m, 8 from 20 wt% by dissolving a high carbonization of the resin to dissolve the resin, wherein the dissolution resin formed on granulated with adhering to the outer periphery of the carbon particles and the carbonization silicon powder, and the molded body by molding the granulated powder the vacuum or the molded body of the resin to form a Rutotomoni sintered body is change to-carbon containing allowed to warm in an inert atmosphere, then melt the carbon in said sintered body by heat treatment A reaction sintered body in which the carbon particles and the silicon carbide powder are bonded is formed by the silicon carbide solid converted by reacting with Si and the remaining Si solid, and the reaction sintered body is processed and slid after forming the surface, then heated in a gas atmosphere, the carbon particles Method for producing a sliding part, characterized in the inner periphery of the sliding surface to the formation of the pores of the recesses removed by burning.

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