JP4122404B2 - Sample stage and microscope or measuring instrument using the same - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a sample stage, and more particularly to a sample stage used in a microscope.
[0002]
[Prior art]
Some sample stages of a microscope have a structure in which the sample is moved in two directions of X and Y directions in order to adjust the position of the sample. The structure of the sample stage according to the prior art will be described with reference to FIG. FIG. 9 is an exploded perspective view of a sample stage according to the prior art. Reference numeral 2 denotes an upper table arranged on the uppermost stage for placing a sample stage. 3 is a middle table arranged below the upper table, and 4 is a lower table arranged below the middle table. These three tables constitute a sample stage. A pair of X-axis linear motion bearings 5 are provided on the lower surface of the upper table and the upper surface of the middle table. Then, by turning the X direction position adjusting knob 7 provided on the side of the upper table, the position of the X axis linear motion bearing 5 is shifted, and the position in the X direction can be adjusted. A pair of Y-axis linear motion bearings 6 are provided on the lower surface of the middle table and the upper surface of the lower table. The Y-axis linear motion bearing 6 is provided at right angles to the X-axis linear motion bearing 5. The position of the Y-axis linear motion bearing 6 is shifted by turning the Y-direction position adjusting knob 8 provided on the side of the middle table 3, and the position in the Y-direction can be adjusted. By providing these two linear motion bearings, the sample can be moved horizontally in two directions, and the position can be adjusted. By providing a microscope on the center of the sample stage, it is possible to observe the sample in almost the entire area of the sample stage.
[0003]
[Problems to be solved by the invention]
In the conventional sample stage, when the rigidity of the linear motion bearing and the stage components is low, there is a problem that the sample vibrates during observation due to floor vibrations in the installation environment and the observation becomes difficult. Further, if the rigidity is increased in order to make it difficult to receive vibration, there is a problem that the linear motion bearing does not play and the sample stage does not move smoothly. Therefore, it has been difficult to realize a sample stage with little positional fluctuation due to external vibration and a sample stage that can move smoothly with one sample stage.
[0004]
The present invention has been made to solve such problems, and provides a sample stage in which the sample position is stable and the sample can be smoothly moved during sample observation, and a microscope or measuring instrument using the sample stage. The purpose is to do.
[0005]
[Means for Solving the Problems]
The first sample stage according to the present invention is a sample stage (for example, the sample table 9 in the embodiment of the present invention) on which a sample table is placed, and the sample table is moved in the horizontal direction to A sample stage drive mechanism for adjusting the position (for example, a sample comprising the X-axis linear motion bearing 5, the Y-axis linear motion bearing 6, the X-direction position adjustment knob 7 and the Y-direction position adjustment knob 8 in the embodiment of the present invention) Stage support mechanism) and support means (for example, the piezoactuator 1 in the embodiment of the present invention) provided below the sample stage and partially moving in the vertical direction. In a state in which the part is moved upward, a part of the support means is in contact with the sample stage, and in a state in which part is moved downward, a part of the support means is separated from the sample stage. It is intended to. As a result, the sample position is stable during sample observation, and the sample can be moved smoothly.
[0006]
The second sample stage according to the present invention is a sample stage (for example, the sample table 9 in the embodiment of the present invention) on which the sample table is placed, and the sample table is moved in the horizontal direction, A sample stage drive mechanism for adjusting the position (for example, a sample comprising the X-axis linear motion bearing 5, the Y-axis linear motion bearing 6, the X-direction position adjustment knob 7 and the Y-direction position adjustment knob 8 in the embodiment of the present invention) A stage driving mechanism), an elastic body (for example, the leaf spring 10 in the embodiment of the present invention) that has a degree of freedom in the vertical direction and fixes the sample stage and the sample stage, and is provided below the sample stage. And a support means (for example, the piezo actuator 1 according to the embodiment of the present invention) that partially moves in the vertical direction, and the support means is in a state where a part of the support means is moved upward. A part between the sample stage is in contact of the support means, in a state where a part thereof is moved downward, in which a part with the sample stage of the support means are separated. As a result, the sample position is stable during sample observation, and the sample can be moved smoothly.
[0007]
A third sample stage according to the present invention is the second sample stage according to the present invention, wherein the elastic body is a leaf spring. As a result, the sample position is stable during sample observation, and the sample can be moved smoothly.
[0008]
A fourth sample stage according to the present invention is any one of the first to third sample stages according to the present invention, and is a control means (for example, a book) that controls a part of the vertical movement operation by the support means. The piezoelectric actuator controller 16) according to the embodiment of the invention includes a piezo actuator controller 16), and this control means holds a part of the support means in a state of being moved upward, and a part of the support means in the vertical direction. At least a second mode in which the movement is repeated, and in a state where a part of the support means is moved upward in the first mode, a part of the support means is in contact with the sample stage. In the second mode, in a state where a part of the support means is moved upward, a part of the support means is in contact with the sample stage, and in the second mode, the support means In a state where the part is moved downward, in which the part of the support means sample stage is separated. As a result, the sample position is stable during sample observation, and the sample can be moved smoothly.
[0009]
The microscope according to the present invention is a microscope using a fourth sample stage, and includes a focus moving unit that adjusts a focus shift between the first mode and the second mode. This eliminates the need for readjustment of the focal position and improves operability.
[0010]
The fifth sample stage according to the present invention is the fourth sample stage according to the present invention, and is supported so that the sample height is substantially the same between the first mode and the second mode. The height is adjusted by means. This eliminates the need for readjustment of the focal position and improves operability.
[0011]
A sixth sample stage according to the present invention is any one of the first to fifth sample stages according to the present invention, and the support means is an expansion / contraction means that expands and contracts in the vertical direction (for example, a piezo actuator according to an embodiment of the present invention). 1). As a result, the sample position is stable during sample observation, and the sample can be moved smoothly.
[0012]
The seventh sample stage according to the present invention is any one of the fourth to sixth sample stages according to the present invention, and a determination means for determining whether or not the sample stage driving mechanism is in operation (for example, the present invention A capacitance detector 14) according to an embodiment of the invention, and when the control means determines that the sample stage drive mechanism is in operation, the second mode is executed, and the sample stage is When it is determined that the drive mechanism is not in an operating state, the first mode is executed. As a result, the sample position is stable during sample observation, and the sample can be moved smoothly. Furthermore, operability can be improved.
[0013]
An eighth sample stage according to the present invention is the seventh sample stage according to the present invention, wherein the determining means determines by detecting a change in capacitance of the sample stage driving mechanism. To do. As a result, the sample position is stable during sample observation, and the sample can be moved smoothly. Furthermore, operability can be improved.
[0014]
A ninth sample stage according to the present invention is the seventh sample stage according to the present invention, characterized in that the discrimination means discriminates by detecting induction of a commercial power source. As a result, the sample position is stable during sample observation, and the sample can be moved smoothly. Furthermore, operability can be improved.
[0015]
The tenth sample stage according to the present invention is the seventh sample stage according to the present invention, wherein the determining means is determined by detecting a change in current flowing in a part of the sample stage driving mechanism. It is characterized by. As a result, the sample position is stable during sample observation, and the sample can be moved smoothly. Furthermore, operability can be improved.
[0016]
An eleventh sample stage according to the present invention is the seventh sample stage according to the present invention, wherein the determining means is determined by measuring a stress applied to the sample stage driving mechanism. is there. As a result, the sample position is stable during sample observation, and the sample can be moved smoothly. Furthermore, operability can be improved.
[0017]
A twelfth sample stage according to the present invention is the seventh sample stage according to the present invention, wherein the determining means is determined by an optical sensor that detects light shielding around the sample stage driving mechanism. The sample stage according to claim 7. To do. As a result, the sample position is stable during sample observation, and the sample can be moved smoothly. Furthermore, operability can be improved.
[0018]
A thirteenth sample stage according to the present invention is any one of the first to twelfth sample stages according to the present invention, wherein a repetition frequency of a part of the vertical movement in the support means is 15 kHz to 30 kHz. It is a feature. Thereby, the noise by the operation | movement of an up-down direction can be made small.
[0019]
The sample stage according to the present invention is preferably used for either a microscope or a measuring instrument.
[0020]
DETAILED DESCRIPTION OF THE INVENTION
Embodiment 1 of the Invention
The configuration of the sample stage according to the first embodiment is shown in FIGS. FIG. 1 is an exploded perspective view of a sample stage according to the first embodiment. 1 is a piezo actuator, 2 is an upper table, 3 is a middle table, 4 is a lower table, 5 is an X-axis linear motion bearing, 6 is a Y-axis linear motion bearing, 7 is an X-direction position adjustment knob, and 8 is a Y-direction position adjustment. Knob, 9 is a sample stage, 11 is a hole, 12 is a long hole, 13 is an opening, and 16 is a piezo actuator controller.
[0021]
First, the driving mechanism of the sample stage according to the present invention will be described. In the sample stage according to the present invention, the X-axis linear motion bearing 5, the Y-axis linear motion bearing 6, the X-axis direction position adjustment knob 7, and the Y-axis direction position adjustment knob 8 constitute a sample stage drive mechanism. The upper table 2 is provided at the uppermost part of the sample stage, and the sample table 9 is placed thereon. The sample placed on the sample table 9 is observed from above using a microscope. A middle table 3 is disposed under the upper table 2, and a pair of X-axis linear motion bearings 5 are provided on the lower surface of the upper table 2 and the upper surface of the middle table 3. An X-direction position adjusting knob 7 for shifting the X-axis linear motion bearing 5 is provided on the side of the upper table 2. By turning the X-axis direction position adjusting knob 7 by hand, the position of the X-axis linear motion bearing 5 is shifted, and the upper table 2 can be moved relative to the middle table 3 in the X-axis direction. Become.
[0022]
A lower table 4 is further disposed below the middle table 3, and a pair of Y-axis linear motion bearings 6 are provided on the lower surface of the middle table 3 and the upper surface of the lower table 4. The Y-axis linear motion bearing 6 is provided at right angles to the X-axis linear motion bearing 5. A Y-direction position adjusting knob 8 for shifting the Y-axis linear motion bearing 6 is provided beside the middle table 3. By turning the Y-axis direction position adjusting knob 8 by hand, the position of the Y-axis linear motion bearing 6 is shifted, and the middle table 3 can be moved relative to the lower table 4 in the Y-axis direction.
[0023]
By driving the sample stage in this way, the sample stage 9 has two degrees of freedom in the X and Y directions. Accordingly, the position in the plane direction can be adjusted. By providing a microscope above the center of the sample stage, observation can be made over almost the entire area of the sample stage 9.
[0024]
Next, the configuration of the sample stage having the sample stage drive mechanism and the piezo actuator 1 will be described. One piezo actuator 1 as an expansion / contraction means is provided near the center of the lower table. As shown in FIG. 1, the upper table 2, the middle table 3, and the lower table 4 are each provided with a through hole. The piezo actuator 1 is assembled so as to pass through this through hole. Therefore, the back surface of the sample stage 9 arranged on the piezo actuator 1 and the upper table 2 comes into contact.
[0025]
FIG. 2 shows an exploded enlarged perspective view of the sample stage, which will be described in more detail. A hole 11 having a diameter slightly larger than the diameter of the piezo actuator 1 is provided near the center of the lower table 4. Further, the middle table 3 is provided with a long hole portion 12 having a diameter slightly larger than the diameter of the piezoelectric actuator 1. The long hole portion 12 is longer in the direction in which the middle table 3 moves (Y direction in the present embodiment), and its length is slightly shorter than the length of the sample table 3. Further, the upper table 2 is provided with an opening 13 that is slightly smaller than the sample table 9. With the above-described structure of the sample stage, it is possible to push up the sample stage 9 over almost the entire range of the sample stage 9 even if the sample moves in the X and Y directions.
[0026]
Next, the vertical expansion and contraction of the piezo actuator 1 and the vertical movement of the sample table 9 will be described. The piezo actuator 1 is a piezoelectric element, and when applied with a voltage, it expands and contracts in the vertical direction according to the voltage. Therefore, the expansion / contraction width and the repetition frequency of expansion / contraction can be easily set. The operator can apply a voltage to the piezo actuator 1 by using the piezo actuator controller 16. This piezo actuator controller can apply a DC voltage and adjust the voltage. Here, when a DC voltage of 10 to 20 V is applied to the piezo actuator 1, the tip of the piezo actuator 1 expands and contracts by several μm. FIGS. 3A, 3B, and 3C show how the piezo actuator 1 is expanded and contracted.
[0027]
FIG. 3A illustrates a state in which a voltage is applied to the piezo actuator 1. The piezoelectric actuator 1 is applied with a force extending upward due to the voltage, and extends upward. Then, the piezo actuator 1 pushes up the sample table 9, and the sample table 9 and the upper table 2 are held apart. In this state, the sample table 9 is fixed by friction between the contact surface of the actuator 1 and the back surface of the sample table 9. Further, since the back surface of the sample stage 9 and the tip of the piezo actuator 1 are substantially flat, they can be pushed up horizontally.
[0028]
FIG. 3B illustrates a state where no voltage is applied to the piezo actuator 1. Since the piezoelectric actuator 1 is not applied with an extending force, the piezoelectric actuator 1 is in a contracted state as compared with a state where a voltage is applied. Therefore, the piezo actuator 1 is not in contact with the sample table 9. Therefore, the sample stage 9 is in contact with the upper table 2.
[0029]
FIG. 3C illustrates a state where a voltage lower than the voltage of FIG. 3A is applied to the piezo actuator 1. The piezo actuator 1 is applied with a force that extends upward and extends upward. However, since the force is smaller than the force applied in FIG. 3A and the amount of elongation is small, the sample table 9 and the upper table 2 are not separated from each other. Therefore, the sample stage 9 is in contact with both the piezo actuator 1 and the upper table 2. This state is referred to as a first mode. In the first mode, the sample stage 9 is fixed by the frictional force between the contact surface of the actuator 1 and the back surface of the sample stage 9 and the frictional force between the back surface of the sample stage 9 and the upper stage 2.
[0030]
At the time of sample observation with a microscope, a direct current voltage is applied to the piezo actuator 1 using the piezo actuator controller 16, and the first mode shown in FIG. That is, the sample stage 9 comes into contact with the piezo actuator 1 and the upper stage 2, and a frictional force is generated between them. Thereby, the rigidity of the sample stage is low, and even if the sample stage receives vibration due to floor vibration or the like in the installation environment, the sample stage 9 is less likely to receive vibration. Furthermore, by making the material of the piezo actuator 1 highly rigid such as ceramic, the sample table 9 becomes more difficult to vibrate. Therefore, the position variation of the sample can be reduced and observation can be performed stably.
[0031]
When adjusting the position of the sample, the applied voltage is switched to 0 V using the piezo actuator controller 16. By doing so, the sample stage 9 and the piezoelectric actuator 1 in FIG. In this state, friction between the piezo actuator 1 and the sample table 9 does not occur. Therefore, the sample stage can be moved smoothly, and the sample can be easily positioned. Therefore, by switching the voltage to be applied between sample observation and sample position adjustment, a sample stage with little positional fluctuation due to external vibration and a sample stage that can move smoothly can be realized with one sample stage.
[0032]
In this embodiment, the applied voltage at the time of position adjustment is set to 0 V. However, the voltage is not limited to 0 V, and may be a voltage that can create a state in which the sample stage 9 and the piezoelectric actuator 1 shown in FIG. That's fine. For example, by applying a low voltage, elongation that does not contact may be given. Furthermore, an alternating voltage with a small amplitude may be applied. The same effect can be obtained by these.
[0033]
The sample stage 9 at the time of sample position adjustment is in the state shown in FIG. Therefore, there is almost no change in the focus position of the microscope when adjusting the sample position. Therefore, the sample stage 9 hardly changes in the height direction. Therefore, the position can be easily adjusted while observing the sample, and it is suitable for use in a microscope such as an optical microscope or a measuring instrument.
[0034]
In addition, the sample stage is in the state shown in FIG. 3C, and the sample position is adjusted in the state shown in FIG. Therefore, there is almost no change in the focus position of the microscope with respect to the sample when adjusting the sample position and when observing the sample, and it becomes unnecessary to readjust the focus position when the stage is moved and when the stage is stationary, thereby improving operability.
[0035]
Embodiment 2 of the present invention.
FIG. 4 shows an exploded perspective view of the sample stage according to the second embodiment of the present invention. The configurations denoted by the same reference numerals as those shown in FIGS. 1 and 2 are the same as or equivalent to those in FIG.
[0036]
In the second embodiment, similarly to the first embodiment, the position of the sample stage can be adjusted in the X and Y directions by manually turning the X-axis direction position adjusting knob 6 and the Y-axis direction position adjusting knob 8. By providing a microscope on the center of the stage, observation can be made over almost the entire area of the sample stage 9.
[0037]
This embodiment is different from the first embodiment in that the sample stage 9 is fixed to the upper table 2 using the leaf spring 10. As shown in FIG. 4, the leaf springs 10 are attached to the four corners of the sample table and fixed to the upper table 2 in the X and Y directions. Further, since the leaf spring 10 is an elastic body, it has a slight degree of freedom in the vertical direction (that is, the Z direction), and the sample stage 9 also has a degree of freedom in the Z direction. Therefore, by applying a voltage to the piezo actuator 1 as in the first embodiment, the piezo actuator 1 extends and contacts the sample stage 9 as shown in FIG. The sample stage 9 is in a state where a frictional force is generated between the piezo actuator 1 and the upper stage 2. Further, the state is suppressed by the leaf spring 10.
[0038]
In the second embodiment, as in the first embodiment, a DC voltage is applied to the piezo actuator 1 to bring the sample table 9 into contact with the piezo actuator 1 during sample observation. Here, the state shown in FIG. 3C is set, and this is the first mode. Therefore, the sample stage 9 is supported from below by the piezo actuator 1 and fixed by frictional force. Furthermore, it will be in the state suppressed by the leaf | plate spring 10 from the top. As a result, even if the rigidity of the sample stage is low, the sample stage 9 is less likely to receive the vibration of the sample stage due to floor vibration or the like in the installation environment. In addition, by making the material of the piezoactuator 1 high in rigidity such as ceramic, the sample table 9 becomes more difficult to vibrate. Therefore, the position variation of the sample can be reduced in any of the X, Y, and Z directions, and observation can be performed stably.
[0039]
When adjusting the sample position, the same effect can be obtained by applying 0 V or a low voltage in the same manner as in the first embodiment to obtain the state shown in FIG. Therefore, it is suitable for use in a microscope or a measuring instrument.
[0040]
Further, the sample stage 9 is fixed to the upper table 2 using a plate spring 10, and the plate spring 10 has almost no elasticity in the X and Y directions. Therefore, the fluctuation | variation with respect to the X, Y direction and rotation direction of the sample stand 9 can be suppressed.
[0041]
In the present embodiment, since the sample stage 9 is fixed by the leaf spring 10, a higher voltage may be applied during sample observation to obtain the state shown in FIG. In this state, the sample stage 9 comes into contact with the piezo actuator 1 and a frictional force is generated therebetween. The state is suppressed by the leaf spring 10 from above. As a result, even if the rigidity of the sample stage is low, the plate spring 10 absorbs the vibration of the sample stage that is received by floor vibration or the like in the installation environment, and the sample stage 9 is less susceptible to vibration. Further, by making the material of the piezo actuator 1 high in rigidity such as ceramic, the sample table 9 becomes more difficult to vibrate. Therefore, the same effect can be obtained. Further, fine adjustment of the voltage becomes unnecessary.
[0042]
In the above case, the height of the sample stage 9 is different between the sample observation and the sample position adjustment. Therefore, it is desirable to provide a focal point moving means for adjusting the deviation of the focal position due to the difference in sample height during observation and during adjustment. For example, the focal point of the objective lens may be adjusted during movement and adjustment, or the height of the microscope relative to the sample stage 9 may be adjusted. This eliminates the need for readjustment of the focus and improves operability.
[0043]
Further, since the plate spring 10 has elasticity in the vertical direction, even when the sample stage is tilted and pushed up, the tilt can be absorbed by the expansion and contraction of the individual plate springs 10 provided at the four corners. Thereby, the sample stage 9 can be kept horizontal.
[0044]
In order to obtain these effects, the number and location of the leaf springs 10 are not limited to four at the four corners shown in FIG. 4, but may be at least two at any location. Thereby, the inclination when the sample stage 9 is lifted can be absorbed, and the sample stage 9 can be kept horizontal.
[0045]
The sample table 9 and the upper table 2 are not limited to the leaf spring 10 but may be an elastic body such as a spring or rubber. The location to be fixed may not be the upper surface of the sample stage 9. Therefore, as shown in FIG. 5, an elastic rubber 15 having an appropriate elastic coefficient may be provided under the sample table 9. As a result, the rubber 15 absorbs the vibration of the sample stage that is received by floor vibration or the like in the installation environment without increasing the rigidity of the sample stage, and the sample stage 9 is difficult to receive. Therefore, the position variation of the sample can be reduced and observation can be performed stably.
[0046]
Embodiment 3 of the present invention.
In the third embodiment of the present invention, the voltage applied during the sample position adjustment in the first and second embodiments is changed. Therefore, since the structure which attached | subjected the same code | symbol as the symbol shown in FIG.1, FIG.2 or FIG.4 shows the same or equivalent part as FIG.1, FIG.2 or FIG.4, description is abbreviate | omitted. In the present embodiment, the piezo actuator controller 16 can apply not only a DC voltage but also an AC voltage, and can adjust the amplitude and frequency.
[0047]
The third embodiment may be configured without the leaf spring 10 shown in the first embodiment or may be configured with the leaf spring 10 shown in the second embodiment. And since it is the same as the above-mentioned embodiment at the time of sample observation, the description is abbreviate | omitted.
[0048]
When adjusting the position of the sample, the applied voltage is switched from a DC voltage to an AC voltage using the piezo actuator controller 16. The piezo actuator 1 repeats expansion and contraction according to the voltage. Therefore, the states of FIGS. 3B and 3C are repeated. This is the second mode. By doing so, the state in which the sample table 9 and the piezoelectric actuator 1 shown in FIG. In this state, friction between the piezo actuator 1 and the sample table 9 does not occur. Therefore, the sample stage can be moved smoothly and the sample can be easily positioned. Therefore, by switching the voltage to be applied between sample observation and sample position adjustment, a sample stage with little positional fluctuation due to external vibration and a sample stage that can move smoothly can be realized with one sample stage.
[0049]
When the amplitude of the AC voltage is large in this embodiment, the sample stage 9 is pushed up as shown in FIG. 3A, and the states of FIGS. 3A and 3B are repeated. Here, when the frequency of the AC voltage is increased, the vertical movement of the sample stage 9 is delayed from the expansion / contraction operation of the piezo actuator 1. Therefore, when the piezo actuator 1 is contracted, the sample table 9 may not be in contact with the piezo actuator 1 and the upper table 2, that is, as shown in FIG. Therefore, the piezo actuator 1 and the sample stage 9 repeat the state of FIG. 3D and the state of FIG. In this case, the state in which FIG. 3A and FIG. 3D are repeated is the second mode. As a result, the amplitude of the AC voltage can be easily adjusted. Moreover, in order to repeat the state of Fig.3 (a) and the state of FIG.3 (d), the frequency of the alternating voltage was 15-30 kHz here. At this frequency, noise due to vertical expansion and contraction of the piezo actuator 1 can be reduced.
[0050]
In the above-described embodiment, a state in which the sample table 9 and the piezoelectric actuator 1 shown in FIG. Therefore, friction between the piezo actuator 1 and the sample table 9 does not occur. Therefore, if the leaf spring 10 is provided, the sample stage can be moved smoothly, and the sample can be positioned easily. Therefore, by switching the voltage to be applied between sample observation and sample position adjustment, a sample stage with little positional fluctuation due to external vibration and a sample stage that can move smoothly can be realized with one sample stage.
[0051]
In the above case, the height of the sample stage 9 is different between the sample observation and the sample position adjustment. Therefore, it is desirable to provide a focal point moving means for adjusting the deviation of the focal position due to the difference in sample height during observation and during adjustment. For example, the focal point of the objective lens may be adjusted during movement and adjustment, or the height of the microscope relative to the sample stage 9 may be adjusted. This eliminates the need for readjustment of the focus and improves operability.
[0052]
In addition, since there is almost no change in the focus position of the microscope with respect to the sample during sample position adjustment, the sample hardly changes in the height direction. Therefore, the position can be easily adjusted while observing the sample. Therefore, it is suitable for use in a microscope such as an optical microscope.
[0053]
Embodiment 4 of the Invention
The sample stage according to the fourth embodiment is obtained by improving the operability of the sample stages of the first, second, and third embodiments. In the first, second, and third embodiments, the voltage applied to the piezo actuator 1 is switched manually using the piezo actuator controller 16. In the fourth embodiment, this voltage switching is automatically performed by a detector provided on the sample stage. A sample stage according to the fourth embodiment will be described with reference to FIG. FIG. 6 is an exploded perspective view of the sample stage according to the present embodiment. Configurations denoted by the same reference numerals as those shown in FIG. 1, FIG. 2, or FIG. 4 are the same as or equivalent to those in FIG. 1, FIG. 2, or FIG. FIG. 6 shows the sample stage according to the third embodiment provided with the above-described automatic switching means for the applied voltage. However, even if the automatic switching means is provided for the sample stage according to the first and second embodiments, the same applies. An effect is obtained.
[0054]
The fourth embodiment is different in that a capacitance detector 14 is provided as a discrimination means. The capacitance detector 14 is connected to the X direction position adjusting knob 7 and the Y direction position adjusting knob 8. The capacitance detector 14 is connected to a piezo actuator controller 16. The piezo actuator controller 16 is connected to the piezo actuator 1 and applies a voltage.
[0055]
When adjusting the sample position, the operator turns the X direction position adjustment knob 7 or the Y direction position adjustment knob 8 by hand to drive the sample stage. When observing the sample, the operator releases his / her hands from the X direction position adjustment knob 7 and the Y direction position adjustment knob so that the position of the sample stage does not fluctuate, and stops the sample stage. Therefore, the knob and the operator's hand are in contact with each other during position adjustment, and the knob and the operator's hand are not in contact with each other during sample observation.
[0056]
Using the capacitance detector 14, the capacitances of the X direction position adjustment knob 7 and the Y direction position adjustment knob are observed in advance. Since the capacitance changes when the operator's hand is touching either the X or Y knob, it can be determined whether or not the sample stage is being driven. This makes it possible to determine whether the sample is being observed or the position is being adjusted. If the operator's hand touches one of the knobs and determines that the position is being adjusted, the piezo actuator controller 16 may apply an AC voltage to the piezo actuator 1. Therefore, the piezo actuator 1 performs the operation in the second mode. On the other hand, if it is determined that the operator's hand is not touching which knob and the sample is being observed, the piezo actuator controller 16 may apply a DC voltage to the piezo actuator 1. Therefore, the piezo actuator 1 performs the operation in the first mode.
[0057]
Thereby, the operator can switch between the first mode and the second mode without operating the piezo actuator controller 16. Therefore, it is possible to improve the operability of the sample stage which can stabilize the sample position and move the sample smoothly during sample observation. Further, the operability is improved.
[0058]
When it is determined that the position is adjusted, the piezo actuator controller 16 can apply 0 V or a low voltage or an alternating voltage with a small amplitude to the piezo actuator 1 as in the first or second embodiment. As a result, the state of FIG. 3B becomes the second mode. Thereby, the same effect can be obtained.
[0059]
In the present embodiment, when an AC voltage having a large amplitude is applied, FIG. 3A and FIG. 3D are repeated in the second mode. Therefore, the sample height is different between the sample observation and the position adjustment, and the focal position is shifted. By providing the actuator controller 16 with a circuit that detects this focal position shift and adjusts the amplitude, frequency, etc. of the AC voltage to be applied, it is not necessary to readjust the focal position when the stage is moving and when the stage is stationary. Improves.
[0060]
Although the automatic voltage switching is performed using the capacitance detector 14 in FIG. 6, it may be detected whether the operator's hand is in contact with the knob by other electrical methods. For example, induction of a commercial power source may be detected, or a weak current may be passed through the knob, and a change in current when the operator's hand and the knob come into contact may be detected. These can also exhibit the same effect.
[0061]
Furthermore, the detection may be performed by a detection method other than the electrical detection method described above. For example, by measuring the stress applied to the mechanism of the stage drive system with a strain gauge, it may be determined that the operator is turning the knob when the DC component of the stress increases. Further, an optical sensor such as an area sensor is provided between the operator and the position adjustment knob, and when the light from the sensor is blocked, it can be determined that the position is being adjusted. Alternatively, a door may be provided in front of the position adjustment knob, and the determination may be made by opening and closing the door. These methods can also exhibit the same effect.
[0062]
Other embodiments.
In the above-described embodiment, the surface on which the piezo actuator 1 contacts the sample table 9 is shown as a flat surface, but may be a convex spherical surface as shown in FIG. Further, it is preferably a loose convex spherical surface. Thereby, even when the piezo actuator is inclined with respect to the sample table, the inclination can be absorbed and the sample table can be pushed up horizontally. Furthermore, the material of the back surface of the sample table may be tool steel or stainless steel such as SK material having high hardness. Thereby, deformation of the back surface of the sample stage 9 due to expansion and contraction of the piezo actuator 1 can be suppressed. Similarly, the contact portion at the tip of the piezo actuator 1 may be made of tool steel or stainless steel such as SK material having high hardness. Thereby, the deformation of the tip portion of the piezo actuator 1 can be suppressed, and the durability can be improved.
[0063]
In the above-described embodiment, the expansion / contraction means for pushing up the sample stage 9 is a piezo actuator (piezoelectric element). However, the same effect can be exhibited even when an electromagnetic expansion / contraction member such as a voice coil is used. Further, a mechanism for changing the frequency and the amplitude of the voltage applied to the piezo actuator 1 or its AC voltage may be provided so that it can be adjusted according to the weight of the sample. The waveform of the AC voltage may be any of a sine wave, a rectangular wave, or a sawtooth wave, and the same effect can be obtained with other waveforms. Furthermore, the same effect can be obtained even if an AC voltage and a DC voltage are superimposed. Further, even if it is not the expansion / contraction means, it may be a support means that pushes up the sample stage by moving part of it vertically.
[0064]
In the above-described embodiment, only one piezoelectric actuator 1 is provided at the center of the sample stage. However, the sample stage 9 can be supported at three points as shown in FIG. Thereby, the horizontal of the sample stage 9 can be finely adjusted by adjusting the height of each piezo actuator 1 by controlling the voltage applied to the piezo actuator 1. Further, in this case, since the piezo actuator 1 does not exist near the center of the sample stage, a transmission microscope can be used. Further, if a plurality of piezo actuators 1 are provided at arbitrary locations other than the three points shown here, the horizontal can be finely adjusted in the same manner. If the piezo actuator 1 is not provided near the center of the sample stage, it can be used for a transmission microscope.
[0065]
In the above-described embodiment, the position adjustment of the sample is performed by using the position adjustment knobs in the X direction and the Y direction. Furthermore, a detector such as a capacitance detector may be provided on these levers, dials, knobs, etc., and the application of the DC voltage and the AC voltage may be switched. Further, it is not limited to the right-angle X and Y directions, and it is only necessary to adjust the position in the plane direction. For example, linear motion bearings may be provided in two directions that are not perpendicular so that the position can be adjusted. Further, the position may be adjusted in the r and θ directions. In this case, it is useful to use it for a circular sample or a sample stage. Further, it may be a sample stage having a drive mechanism having only one degree of freedom in the X direction or the θ direction.
[0066]
The sample stage according to the present invention is preferably used in a microscope for manually adjusting the position. Furthermore, it can be used for any microscope such as an optical microscope, an electron microscope or a laser microscope having a sample stage driving mechanism. It can also be used in a microscope for measuring the size and height of a sample.
[0067]
The sample stage according to the present invention can also be used in a microscope that automatically moves the position of the sample stage, such as a scanning microscope. In this case, a similar effect can be obtained by incorporating a circuit for determining whether the sample stage position is moving or stationary in the sample stage drive circuit.
[0068]
Furthermore, the sample stage according to the present invention can be used not only for a microscope but also for other observation equipment, measurement equipment, analysis equipment, and inspection equipment having a position adjusting function.
[0069]
【The invention's effect】
According to the present invention, it is possible to provide a sample stage in which the sample position is stable during sample observation and the sample can be moved smoothly, and a microscope using the sample stage.
[Brief description of the drawings]
FIG. 1 is an exploded perspective view of a sample stage according to a first embodiment of the present invention.
FIG. 2 is an exploded enlarged perspective view of the sample stage according to the first embodiment of the present invention.
FIGS. 3A to 3C are enlarged sectional views of a contact portion between a sample stage and a piezo actuator of a sample stage according to the present invention.
FIG. 3A is a diagram illustrating a state in which the piezo actuator is extended and pushed up.
FIG. 3B is a diagram illustrating a state in which the piezo actuator is contracted.
FIG. 3C is a diagram showing a state where the piezo actuator is extended and is in contact with the sample stage.
FIG. 3D is a diagram showing a state in which the piezo actuator expands and contracts at a high frequency and the sample stage floats in the air.
FIG. 4 is an exploded enlarged perspective view of a sample stage according to a second embodiment of the present invention.
FIG. 5 is an enlarged cross-sectional view of another type of sample stage according to the second exemplary embodiment of the present invention.
FIG. 6 is an exploded perspective view of a sample stage according to a fourth embodiment of the present invention.
FIG. 7 is an enlarged view of a tip portion of a piezo actuator used in a sample stage according to another embodiment of the present invention.
FIG. 8 is a layout view of a piezo actuator of a sample stage according to another embodiment of the present invention.
FIG. 9 is an exploded perspective view of a sample stage according to the prior art.
[Explanation of symbols]
1 Piezo actuator
2 Upper table
3 middle table
4 Lower table
5 X axis linear motion bearing
6 Y-axis linear motion bearing
7 X direction position adjustment knob
8 Y-direction position adjustment knob
9 Sample stage
10 leaf spring
11 hole
12 Slotted hole
13 opening
14 Capacitance detector
15 Rubber
16 Piezo actuator controller

Claims (17)

A sample stage on which a sample stage is placed,
A sample stage drive mechanism for moving the sample stage in the horizontal direction and adjusting the position of the sample stage;
Provided below the sample table, and a part of which is vertically supported, and a supporting means,
In a state where a part of the support means is moved upward, a part of the support means is in contact with a part of the support means and the sample stage, and a part of the support means is moved downward. And a sample stage in which the sample stage is separated. A sample stage on which a sample stage is placed,
A sample stage drive mechanism for moving the sample stage in the horizontal direction and adjusting the position of the sample stage;
An elastic body having a degree of freedom in the vertical direction and fixing the sample stage and the sample stage;
Provided below the sample table, and a part of which is vertically supported, and a supporting means,
In a state where a part of the support means is moved upward, a part of the support means is in contact with a part of the support means and the sample stage, and a part of the support means is moved downward. And a sample stage in which the sample stage is separated. The sample stage according to claim 2, wherein the elastic body is a leaf spring. The sample stage according to any one of claims 1 to 3,
Control means for controlling a part of the vertical movement operation by the support means,
The control means executes at least a first mode in which a part of the support means is held in a state of being moved upward, and a second mode in which a part of the support means is repeatedly moved up and down. And
In the first mode, in a state where a part of the support means is moved upward, a part of the support means and the sample stage are in contact with each other,
In the second mode, in a state where a part of the support means is moved upward, a part of the support means and the sample stage are in contact with each other,
In the second mode, the sample stage in which a part of the support unit and the sample stage are separated in a state where a part of the support unit is moved downward. A microscope using the sample stage according to claim 4,
A microscope comprising: a focus moving unit that adjusts a focus shift between the first mode and the second mode. 5. The sample stage according to claim 4, further comprising sample height adjusting means for making the sample height substantially the same between the first mode and the second mode. The sample stage according to any one of claims 1 to 4, wherein the supporting means is an expansion / contraction means that expands and contracts in the vertical direction. The expansion and contraction means is a piezoelectric element;
The sample stage according to claim 7, wherein the piezoelectric element is expanded and contracted by applying a voltage to the piezoelectric element. The sample stage according to claim 4 or 6 to 8,
A determination means for determining whether or not the sample stage drive mechanism is in operation;
When it is determined that the control means is in a state of operating the sample stage driving mechanism, the second mode is executed.
The sample stage is characterized in that the first mode is executed when it is determined that the sample stage drive mechanism is not in an operating state. The sample stage according to claim 9, wherein the determination unit performs determination by detecting a change in capacitance of the sample stage driving mechanism. The sample stage according to claim 9, wherein the discriminating unit discriminates by detecting induction of a commercial power source. The sample stage according to claim 9, wherein the determination unit performs determination by detecting a change in current flowing in a part of the sample stage driving mechanism. The sample stage according to claim 9, wherein the determination unit performs determination by measuring a stress applied to the sample stage driving mechanism. The sample stage according to claim 9, wherein the determining means is determined by an optical sensor that detects shielding of light around the sample stage driving mechanism. The sample stage according to any one of claims 1 to 4 or 6 to 14, wherein a repetition frequency of a part of the vertical movement of the support means is 15 kHz to 30 kHz. A microscope using the sample stage according to any one of claims 1 to 4 or 6 to 15. A measuring instrument using the sample stage according to any one of claims 1 to 4 or 6 to 15.

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