JP4087593B2

JP4087593B2 - Magnetic drive device, stirring device, mixing device, and substrate processing device

Info

Publication number: JP4087593B2
Application number: JP2001353024A
Authority: JP
Inventors: 慎一秋山
Original assignee: 有限会社マグネオ技研
Priority date: 2001-11-19
Filing date: 2001-11-19
Publication date: 2008-05-21
Anticipated expiration: 2021-11-19
Also published as: JP2003144891A

Description

【０００１】
【産業上の利用分野】
本発明は、磁気駆動装置、撹拌装置、混合装置及び基板処理装置にかかるものである。
【０００２】
【従来の技術】
従来、撹拌子と対向して配置したＵ字型磁石を回転させ、両者の異極間の吸引作用のみで撹拌子を回転させるものとして、マグネチックスターラと呼ばれる磁気回転伝達装置が知られている。
【０００３】
その機構を図１２により説明すると、液体１１５を収容する容器１１４内に棒状の撹拌子１１２を配置し、容器１１４外の底壁近傍にＵ字型磁石１１１を対向配置し、駆動モータ１１３でＵ字型磁石１１１を回転させて撹拌子１１２を回転させるものである。
【０００４】
また、磁気カップリングと呼ばれる磁気回転伝達装置もあり、これにはラジアル型とアキシャル型とがある。
【０００５】
【発明が解決しようとする課題】
上述した従来のマグネチックスターラは、撹拌子１１２とＵ字型磁石１１１との磁力により撹拌子１１２が回転するものである。このため、伝達トルクが小さく、撹拌子１１２が容易に脱離するという不具合がある。また、磁束の径が比較的小さい。
【０００６】
ところが、撹拌能力の向上という要請に応えるため、撹拌子１１２および対向するＵ字型磁石１１１の各磁力を強化し、異極間相互の吸引力のみを増大して、撹拌子１１２の回転能力を向上しようとしている。
【０００７】
しかし、このように単に異極間のみの吸引力を増大しようとすると、スラスト方向の負荷が増大してしまう。
【０００８】
駆動モータ１１３のスラスト方向の負荷増大により回転トルクの損失が生じたり、軸受の摩耗が生じたりする。また、撹拌子１１２の回転接触部の摩擦の増大により回転トルクの損失が生じたり、撹拌子１１２の回転接触部の摩耗が増大したり、さらには撹拌子１１２の回転接触部の摩擦音による騒音の増大が生じたりする。特に、撹拌子１１２の回転接触部が摩耗すると、その摩耗粉が容器内の液体に混入するため、好ましくない。
【０００９】
一方、上述した磁気カップリングにあっては、ラジアル型はアキシャル型に比べてスラスト力がかからないという利点があるものの、隔壁が複雑な形状となる欠点を有する。これに対してアキシャル型はラジアル型に比べて構造が簡単で、軸方向の長さを短くでき、隔壁形状を単純化できるという利点を有するものの、軸受部にスラスト力が働き、それが磁力に比例するという欠点を有していた。
【００１０】
なお、特許第２６７８５６９号による磁気回転伝達装置は、スラストを低減させるが、マイナスのスラストを得るには、至っていない。
【００１１】
また、上述した問題点は、マグネチックスターラに限らず、磁気駆動装置一般に共通し、駆動力の増大にともなって、スラストが増大してしまうというものである。
【００１２】
本発明の目的は、上述した従来技術の欠点を解消して、駆動力の増大にともないスラストが低減する特性を持つ磁気駆動装置、撹拌装置、混合装置及び基板処理装置を提供することにある。
【００１３】
【課題を解決するための手段】
上記課題を解決するための第１の発明は、
一方の磁石を駆動磁石とし他方の磁石を従動磁石として、前記駆動磁石と前記従動磁石とを非接触で磁気的に結合させ、前記駆動磁石の移動にともなって前記従動磁石を従動させる磁気駆動装置において、
前記駆動磁石及び前記従動磁石は略同形状で形成され、互いに略平行な対向面と、該対向面間の外周を覆う周側面とで囲まれた立体をしており、前記周側面の一面全面を一方の極の磁極とし、該周側面の一面と反対の面である他面全面を他方の極の磁極とする両面２極型磁石でそれぞれ構成され、
前記駆動磁石と前記従動磁石との対向面同士を略平行にし、かつ前記駆動磁石の略平行な対向面の中央を共通に通る中央延長線と、前記従動磁石の略平行な対向面の中央を共通に通る中央延長線とが一致するように前記駆動磁石と前記従動磁石とを対向して設け、
前記駆動磁石を、該駆動磁石の中央延長線と交差する方向に移動させることにより、その移動を前記駆動磁石の磁極と前記従動磁石の磁極間に生じる磁力で前記従動磁石に伝達するようにしたことを特徴とする磁気駆動装置である。
【００１４】
第２の発明は、
回転軸を中心に回転する駆動回転体と、
前記駆動回転体と対向して設けられ、前記駆動回転体の回転軸の延長線を回転軸として回転する従動回転体と、
前記駆動回転体の前記従動回転体と対向する面上に、前記駆動回転体の回転軸を中心に描かれる仮想円の円周上に等間隔に設けられた少なくとも３つの駆動磁石と、
前記従動回転体の前記駆動回転体と対向する面上に、前記駆動回転体に描かれた仮想円と対応して前記従動回転体の回転軸を中心に描かれる仮想円の円周上に等間隔に設けられた前記駆動磁石と同数の従動磁石と、
を備えた磁気駆動装置において、
前記駆動磁石及び前記従動磁石は略同形状で形成され、互いに平行な対向面と、該対向面間の外周を覆う周側面とで囲まれた立体をしており、前記周側面の一面全面を一方の極の磁極とし、該周側面の一面と反対の面である他面全面を他方の極の磁極とする両面２極型磁石でそれぞれ構成され、
前記駆動磁石と前記従動磁石の対向面同士を略平行にし、かつ前記駆動磁石の対向面の中央を通る中央延長線と、前記従動磁石の対向面の中央を通る中央延長線とが平行になるように前記駆動磁石及び前記従動磁石を前記駆動回転体及び前記従動回転体にそれぞれ取り付け、
前記駆動回転体を前記駆動回転体の回転軸を中心に回転させると、前記駆動磁石と前記従動磁石との磁力により前記従動回転体が前記従動回転体の回転軸を中心に回転することを特徴とする磁気駆動装置である。
【００１５】
第３の発明は、
従動移動体に従動磁石を設け、前記従動磁石を駆動磁石の移動にともなって従動させることにより、前記従動移動体を走行させる磁気駆動装置において、
前記駆動磁石及び前記従動磁石は略同形状で形成され、互いに略平行な対向面と、該対向面間の外周を覆う周側面とで囲まれた立体をしており、前記周側面の一面全面を一方の極の磁極とし、該周側面の一面と反対の面である他面全面を他方の極の磁極とする両面２極型磁石でそれぞれ構成され、
前記従動移動体に設けられる前記従動磁石が、前記駆動磁石に対して対向面同士が略平行で、かつ前記駆動磁石の略平行な対向面の中央を共通に通る中央延長線に対して、前記従動磁石の略平行な対向面の中央を共通に通る中央延長線が平行になるように配置され、
前記駆動磁石を該駆動磁石の中央延長線を交差する方向に移動させたとき、前記駆動磁石と前記従動磁石との磁力により、前記従動移動体が任意軌道上を走行することを特徴とする磁気駆動装置である。
【００１６】
第４の発明は、
第２の発明に記載の磁気駆動装置が、撹拌槽の内部の液体を撹拌する手段として用いられる撹拌装置であって、
前記磁気駆動装置を構成する従動回転体に、前記撹拌槽内に設けた支持軸が挿通されて前記支持軸を中心に前記従動回転体を回転自在に軸支するための挿通孔と、前記従動回転体の回転により前記液体を撹拌するための撹拌翼とをそれぞれ設け、
前記従動回転体を前記支持軸に軸支したとき、前記磁気駆動装置を構成する駆動回転体が、前記撹拌槽の槽壁を介して前記駆動回転体と対向するように前記撹拌槽の外部に配置されて、前記回転駆動体の回転により前記従動回転体が前記支持軸を中心に回転することを特徴とする撹拌装置である。
【００１７】
第５の発明は、
第４の発明に記載の撹拌装置が、混合対象の液体を流入させる所定数の液供給口と混合処理を終えた液体を排出する液排出口とを有する前記撹拌槽内に、該撹拌槽内の液体の混合状態を制御する手段として複数個用いられる混合装置である。
【００１８】
第６の発明は、
基板を処理する真空容器と、前記真空容器内に鉛直回転軸を中心に回転自在に設けられ前記基板を保持する基板保持体と、前記鉛直回転軸の上方から該鉛直回転軸に回転力を付与して前記基板保持体を回転させる回転駆動部と、前記基板保持体の下方から該基板保持体をその重力に抗して浮上させつつ前記鉛直回転軸の振れを防止する軸振れ防止機構とを備えた基板処理装置において、
前記駆動回転部として第２の発明に記載の磁気駆動装置が用いられ、前記磁気駆動装置を構成する従動回転体の回転軸に前記鉛直回転軸を連結することにより、前記従動回転体を前記鉛直回転軸を介して前記基板保持体に接続し、前記磁気駆動装置を構成する駆動回転体を前記真空容器の上壁を介して前記回転従動体と対向するように前記真空容器の外部に配置して、前記駆動回転体の回転により前記従動回転体を介して前記基板保持体を前記鉛直回転軸を中心に回転させるように構成し、
前記軸振れ防止機構が、前記基板保持体に設けられた浮揚磁石と、前記真空容器の外部に前記真空容器の底壁を介して前記浮揚磁石と対向するように設けられる超電導体とを備えて、該超電導体を超電導臨界温度以下に冷却することによって、前記超電導体と前記浮揚磁石とのマイスナー効果により前記基板保持体を前記真空容器内で浮上させつつ前記鉛直回転軸をピン止め効果によりピン止めするようにしたことを特徴とする基板処理装置である。
【００１９】
第７の発明は、
撹拌すべき液体を収容する密閉型の撹拌槽と、前記撹拌槽内に鉛直回転軸を中心に回転自在に設けられ前記液体を撹拌する撹拌翼と、前記鉛直回転軸の上方から該鉛直回転軸に回転力を付与して前記撹拌翼を回転させる回転駆動部と、前記撹拌翼の下方から該撹拌翼をその重力に抗して浮上させつつ前記鉛直回転軸の振れを防止する軸振れ防止機構とを備えた撹拌装置において、
前記回転駆動部として第２の発明に記載の磁気駆動装置が用いられ、前記磁気駆動装置を構成する従動回転体の回転軸に前記鉛直回転軸を連結することにより、前記従動回転体を前記鉛直回転軸を介して前記撹拌翼に接続し、前記磁気駆動装置を構成する駆動回転体を前記撹拌槽の上壁を介して前記回転従動体と対向するように前記撹拌槽の外部に配置して、前記駆動回転体の回転により前記従動回転体を介して前記撹拌翼を前記鉛直回転軸を中心に回転させるように構成し、
前記軸振れ防止機構が、前記撹拌翼に設けられた浮揚磁石と、前記撹拌槽の外部に前記撹拌槽の底壁を介して前記浮揚磁石と対向するように設けられる超電導体とを備えて、該超電導体を超電導臨界温度以下に冷却することによって、前記超電導体と前記浮揚磁石とのマイスナー効果により前記撹拌翼を前記撹拌槽内で浮上させつつ前記鉛直回転軸をピン止め効果によりピン止めするようにしたことを特徴とする撹拌装置である。
【００２０】
第８の発明は、
撹拌すべき液体を収容する撹拌槽と、前記撹拌槽内の下方に回転自在に設けられる撹拌翼と、該撹拌翼を回転させる回転駆動部と、前記撹拌翼をその重力に抗して浮上させつつ前記撹拌翼の回転中心の振れを防止する軸振れ防止機構とを備えた撹拌装置において、
前記回転駆動部として第２の発明に記載の磁気駆動装置が用いられ、前記磁気駆動装置を構成する一方の従動回転体に前記撹拌翼を取り付け、前記磁気駆動装置を構成する他方の駆動回転体を前記撹拌槽の底壁を介して前記回転従動体と対向するように前記撹拌槽の外部に配置して、前記駆動回転体の回転により前記従動回転体を介して前記撹拌翼を前記従動回転体の回転軸を中心に回転させるように構成し、
前記軸振れ防止機構が、前記従動回転体の回転中心に設けられた浮揚磁石と、前記撹拌槽の外部に配置された前記駆動回転体の回転中心に、前記浮揚磁石と対向するように設けられた超電導体とを備えて、該超電導体を超電導臨界温度以下に冷却することによって、前記超電導体と前記浮揚磁石とのマイスナー効果により前記撹拌翼を前記撹拌槽内で浮上させつつ前記回転中心をピン止め効果によりピン止めするようにしたことを特徴とする撹拌装置である。
【００２１】
【本発明の実施の形態】
以下、本発明にかかる磁気駆動装置の実施例を、図面に基づいて説明する。
図１は本実施例の２つの磁石を組合わせて構成した磁気駆動装置の原理的な説明図であって、磁石間の組合わせ配置の仕方から、磁気駆動装置を、以下便宜的に、（ａ）を同極直交型、（ｂ）を異極直交型、（ｃ）を同極平行型、（ｄ）を異極平行型と呼ぶことにする。同図において（イ）は平面図、（ロ）は正面図を示す。
【００２２】
上記（ａ）〜（ｃ）に示した磁気駆動装置は、つぎのような共通した構成をもつ。
磁気駆動装置は、２つの永久磁石から構成される。２つの永久磁石はその磁極を特定方向に向けて上下方向に重ねられる。なお、重ねる方向は左右、斜め等であっても良い。また、上下の永久磁石の向きの組合わせは、上述したように４種類ある（（ａ）〜（ｃ））。その向きについては後述する。
【００２３】
下方の磁石を駆動側の駆動磁石１１とし、上方の磁石を従動側の従動磁石１２とする。駆動磁石１１と従動磁石１２とは適宜間隔を開けて非接触で磁気的に結合させ、駆動磁石１１を紙面と平行な矢印方向Ｃに移動させることによって従動磁石１２を同方向に従動させるようになっている。
【００２４】
駆動磁石１１及び従動磁石１２は略同形状の立体、例えば直方体で形成される。直方体をした駆動磁石１１及び従動磁石１２は長手方向を水平に向けて重ねてある。直方体では、互いに略平行な対向面は、上下面１１ａ，１１ｂ、および１２ａ，１２ｂとなる。また、上下面１１ａ，１１ｂ、および１２ａ，１２ｂ間の外周を覆う周側面は、長手方向に平行な２側面１１ｃ，１１ｄ、および１２ｃ，１２ｄと、短手方向に平行な２側面との計４つの側面となる、長手方向に平行な一面となる１側面１２ｃの全面を一方の極の磁極Ｎとする。１側面１２ｃと反対の面である他面１２ｄの全面を他方の極の磁極Ｓとする。このような両面２極型磁石で駆動磁石１１及び従動磁石１２はそれぞれ構成される。
【００２５】
駆動磁石１１の上面１１ａと従動磁石１２の下面１２ｂ同士を略平行にし、かつ駆動磁石１１の上下面１１ａ、１１ｂの中央を共通に通る中央延長線１３と、従動磁石１２の上下面１２ａ、１２ｂの中央を共通に通る中央延長線１３とが一致するように駆動磁石１１と従動磁石１２とを対向して設ける。
【００２６】
そして、駆動磁石１１を、駆動磁石１１の中央延長線１３と交差する方向、例えば前述した矢印方向Ｃに移動させることにより、駆動磁石１１と従動磁石１２の向きを維持したまま、駆動磁石１１の磁極ＮＳと従動磁石１２の磁極ＮＳ間に生じる磁力で同方向の移動を従動磁石１２に伝達するようにしている。
【００２７】
また、上記（ａ）〜（ｂ）に示した磁気駆動装置は、つぎのような異なる構成をもつ。先に便宜的に呼ぶこととした（ａ）の同極直交型は、駆動磁石１１と従動磁石１２とを直交させ、直交させた駆動磁石１１と従動磁石１２の各磁極ＮＳを、平面視で同じ側に向けて配置したものである。したがって同極直交型の同極とは、駆動磁石１１と従動磁石１２との直交を崩して向きを一致させて重ねたとき、駆動磁石１１と従動磁石１２の対向磁極が同極となっていることを意味する。
【００２８】
また、（ｂ）の異極直交型の意味は、駆動磁石１１と従動磁石１２とを直交させるが、直交させた駆動磁石１１と従動磁石１２の各磁極ＮＳを、平面視で反対側の異なる方向に向けて配置したものである。したがって異極直交型の異極とは、駆動磁石１１と従動磁石１２との直交を崩して向きを一致させて重ねたとき、駆動磁石１１と従動磁石１２の対向磁極が異極となっていることを意味する。図示例の（ｂ）のものは、（ａ）において上方の従動磁石１２に対して下方の駆動磁石１１を、中央延長線１３を中心に１８０度回転させると実現できる。
【００２９】
（ｃ）の同極平行型の意味は、駆動磁石１１と従動磁石１２とを長手方向（短手方向）を一致させ、一致させた駆動磁石１１と従動磁石１２の各磁極ＮＳを、平面視で同じ側に向けて配置したものである。すなわち、駆動磁石１１と従動磁石１２とが同極で平行配置されたものである。平面視（イ）で、駆動磁石１１は、従動磁石１２に隠れて見えなくなっている。
【００３０】
（ｄ）の異極平行型の意味は、駆動磁石１１と従動磁石１２とを長手方向（短手方向）を一致させるが、一致させた駆動磁石１１と従動磁石１２の各磁極ＮＳを、平面視で反対側の異なる方向に向けて配置したものである。すなわち、駆動磁石１１と従動磁石１２とを、異極で平行配置されたものである。平面視（イ）で、駆動磁石１１は、従動磁石１２に隠れて見えなくなっている。
なお、上述した組み合せの磁極ＮＳの方向は図示例に限定されず、組単位で磁極ＮＳを入れ替えても良い。
【００３１】
磁石１１、１２の配置の仕方で４種類の組合わせをもつ磁気駆動装置は、駆動磁石１１を、駆動磁石１１の中央延長線１３と交差する方向、例えば前述した矢印方向Ｃに移動させることにより、駆動磁石１１と従動磁石１２の向きを維持したまま、駆動磁石１１の磁極ＮＳと従動磁石１２の磁極ＮＳ間に生じる磁力で同方向の移動を従動磁石１２に伝達する。ここで駆動磁石１１の中央延長線１３と交差する方向には、中央延長線１３と直交する方向、中央延長線１３と斜めに交わる方向、及びこれらの組合わせ方向などが含まれる。しかし、中央延長線１３を中心とする回転方向や、中央延長線１３と重なる同じ方向、及び中央延長線１３と平行な方向は含まれない。また、（ａ）ないし（ｄ）の状態をそれぞれ保持したまま移動させる以外に、ある場面では、（ａ）の状態で、他の場面では（ｂ）の状態で、次の場面では（ｃ）の状態で、さらには異なる場面では（ｄ）の状態というように、任意に状態を推移させて使用するという組合わせも可能である。
【００３２】
上述した磁気駆動装置の駆動磁石１１を、中央延長線１３と直交する方向に移動させると、従動磁石１２が水平方向にずれて移動する。このとき磁力線も従動磁石がある方向、すなわち水平方向にずれるので、磁力線の水平成分が大きくなり、垂直成分が小さくなる。すなわち駆動方向の引力が大きくなり、垂直方向の引力は小さくなる。したがって従動磁石１２の移動力が大きくなり、従動磁石１２の駆動磁石１１に対するスラストが小さくなる。
【００３３】
さて、上述した４種類の組合わせをもつ磁気駆動装置の特性を説明すれば次の通りである。共通特性としては、駆動磁石１１に対する従動磁石１２のずれ量１５が増加すると、従動磁石１２の移動力が増加するとともに、スラストが増加ではなく低減することである。ここで、ずれ量とは、駆動磁石１１を矢印方向Ｃに移動したとき、従動磁石１２が移動遅れ又は移動進みを生じるが、その従動磁石１２の駆動磁石Ｌ１１対する遅れ量又は進み量である。なお、図において、二点鎖線で示す符号１１ｅは移動後の駆動磁石を示す。
【００３４】
また、個別特性は、後述する図９を参考にして説明すれば、概略次の通りである。
（ａ）の同極直交型では、ずれ量の増加に伴い、移動力もスラストも共に比較的低率で増加し、低減する特性をもつ。移動力はそれほど大きくはならない。またスラストの低減幅も少ない。
（ｂ）の異極直交型にあっては、ずれ量がピーク近くに達すると、スラストがマイナスになる領域がある。
（ｃ）の同極平行型では、ずれ量の増加に伴い、移動力が直線的に増加するが、移動力の増加率に比べてスラストの低減率が比較的小さい特性をもつ。スラストはマイナスにはならない。駆動磁石１１と従動磁石１２間の磁力の及ぶ距離が最も大きい。
（ｄ）の異極平行型では、ずれ量が僅かなうちに、移動力が急激に増加するが、スラストの絶対値は比較的大きいままである。磁力の及ぶ範囲が最も小さい。
【００３５】
上述した特性及び特性の差異が生じる理由は、必ずしも明確ではないが、上述した移動力とスラストの特性から推測して、駆動磁石１１が中央延長線１３と交差する方向に移動したとき、磁力線の中央延長線１３と直角の成分は増大し、中央延長線１３と平行の成分は減少したためだと考えられる。また、両面２極型磁石の対向面左右でそれぞれ４極が共存し、吸引作用と同時に反発作用が発生するからであると考えられる。
【００３６】
なお、磁気駆動装置は、駆動磁石１１を中央延長線１３と交差する方向に移動させることにより、従動磁石１２が移動するものであればよい。したがって、それぞれの磁石は、まったく同じ形状でなくてもよく、また、厳密な立方体でなくてもよい。さらに中央延長線１３が完全に一致してなくてもよい。駆動磁石上面１１ａと従動磁石下面１２ｂとの間に設けた適宜の隙間の大きさは、駆動磁石１１を移動させると磁石間の磁力が及ぶ範囲であって、それにより従動磁石１２が移動すればよい。
【００３７】
次に、上述した磁気駆動装置を回転磁気駆動装置に適用した第１実施例を図２を用いて説明する。この回転磁気駆動装置は、図１で説明した１組の磁石から構成された磁気駆動装置を、上下の回転体上に４組同心上に組み込んで構成したものである。回転体は円盤で構成される。
【００３８】
図２は回転磁気駆動装置の平面図を示し、磁石間の組合わせ配置の仕方から、図１と同様に、（ａ）を同極直交型、（ｂ）を異極直交型、（ｃ）を同極平行型、（ｄ）を異極平行型と呼ぶことにする。上記（ａ）〜（ｂ）に示した回転磁気駆動装置は、つぎのような共通した構成をもつ。
【００３９】
回転磁気駆動装置は、２枚の回転体２２、２３を備える。２枚の回転体は、例えば同一径の円板で構成され、上下方向に重ねられる。重なって図では見えないが、下方の回転体を駆動回転体２２とし、上方の回転体を従動回転体２３とする。駆動回転体２２は、回転軸２１を中心に回転する。この駆動回転体２２と対向して設けられた従動回転体２３は、駆動回転体２２の回転軸２１の延長線上に回転軸２１が存在し、すなわち軸心が一致しており、その回転軸２１を中心に回転する。
【００４０】
駆動回転体２２の従動回転体２３と対向する上面上であって、駆動回転体２２の回転軸２１を中心に描かれる仮想円の円周上に等間隔に４つの駆動磁石１１が取り付けられる。また、従動回転体２３の駆動回転体２２と対向する下面上であって、駆動回転体２２に描かれた仮想円と対応して従動回転体２３の回転軸２１を中心に描かれる仮想円の円周上に等間隔に駆動磁石２２と同数の従動磁石１２とが取り付けられる。これら磁石１１、１２の回転体２２、２３に対する取り付けは、ねじ止めや溶着等による固着とする。回転体２２、２３上に取り付ける磁石１１、１２の数は、図示例では各４つであるが、これに限定されない。駆動回転体２２に対して従動回転体２３を面的に安定支持するために、少なくとも３つあればよい。
【００４１】
上記駆動磁石２２及び従動磁石２３は、図１に説明した両面２極型磁石で構成される。すなわち、略同形状で形成され、互いに平行な上下面１１ａ，１１ｂおよび１２ａ，１２ｂと、上下面間の外周を覆う４側面とで囲まれた直方体をしており、４側面の一側面１２ｃ全面を一方の極の磁極Ｎとし、上記一側面１２ｃと反対の面である他側面１２ｄ全面を他方の極の磁極Ｓとする両面２極型磁石でそれぞれ構成される（図１参照）。
【００４２】
これらの駆動磁石１１と従動磁石１２とは、それらの対向面同士を略平行にし、かつ駆動磁石１１の対向面の中央を通る中央延長線と、従動磁石１２の対向面の中央を通る中央延長線とが平行になるように、駆動回転体２２及び従動回転体２３にそれぞれ取り付けられる。そして駆動回転体２２を、駆動回転体２２の回転軸２１を中心に回転させると、駆動磁石１１と従動磁石１２との磁力により従動回転体２３が従動回転体２３の回転軸２１を中心に回転する。
【００４３】
次に、上記図２（ａ）〜（ｂ）に示した磁気駆動装置は、つぎのような異なる構成をもつ。異なる構成は磁石配置にある。また、同図に示す駆動磁石１１、従動磁石１２間の相対位置は、回転体２２、２３同士が磁力により釣り合っている平衡状態を示す。
【００４４】
図２（ａ）の同極直交型は、その磁石配置が次のようになっている。
駆動回転体２２では、駆動回転体２２の上面が、直交する２つの直径で４つの領域に仮想的に等分される。４つの領域にそれぞれ１個の両面２極型磁石からなる駆動磁石１１を取り付ける。各領域では、両面２極型磁石は、その一方の極の磁極Ｎが径方向内方を向き、他方の極の磁極Ｓが径方向外方を向くようにする。さらに、磁極Ｎが形成された長手方向に平行な面を一方の直径と平行に、短手方向に平行な面を他方の直径と平行に配置する。すなわち、両面２極型磁石は、その中心を通る直径に対して長手方向に平行な面が４５度傾けて取り付けられている。両面２極型磁石は、その中心が仮想円の円周上に存在し、また領域の中心に存在する。対向する領域にそれぞれ取り付けられた両面２極型磁石は点対称に配置される。
【００４５】
従動回転体２３では、基本的には駆動回転体２２と同様な構成になっている。すなわち、従動回転体２３の上面が４つの領域に当分され、各領域に１個の両面２極型磁石が取り付けられ、その中心が仮想円の円周上に存在し、領域の中心に存在し、点対称に配置される点も同一である。異なる点は、従動磁石１２の取り付け方向である。従動磁石１２は、長手方向に平行な面が駆動磁石１１に対して４５度ずれている。すなわち、駆動回転体２２又は従動回転体２３を回転して、それらに取り付けられた従動磁石１２と駆動磁石１１との中心を重ねたときは、駆動磁石１１は従動磁石１２に対して直交配置されるように取り付けられる。
【００４６】
そして、図２（ａ）に示すように、駆動回転体２２の回転方向が時計方向である場合において、駆動回転体２２に設けられた駆動磁石１１に対して、従動回転体２３に設けられた前記駆動磁石１１に対応した従動磁石１２が４５度遅れているときに、４つの駆動磁石１１と４つの従動磁石１２間の磁力相互作用で、駆動回転体２２と従動回転体２３とは平衡状態になる。
【００４７】
図２（ｂ）の異極直交型は、その磁石配置が、図２（ａ）の同極直交型と異なる点は、磁極の向きが異なっている点である。これにより、駆動磁石１１と従動磁石１２とが、これらの中心を重ねて直交しているときに、４つの駆動磁石１１と４つの従動磁石１２間の磁力相互作用で、駆動回転体２２と従動回転体２３とは平衡状態になる。
【００４８】
図２（ｃ）の同極平行型は、図２（ａ）の同極直交型と磁極の向きにおいては同じである。異なる点は、駆動回転体２２及び従動回転体２３に取り付けられた両面２極型磁石が、その中心を通る直径に対して長手方向に平行な面が４５度傾いておらず、前記直径と平行に取り付けられている点である。すなわち、全ての両面２極型磁石は、放射状に取り付けられる。これにより、駆動磁石１１が従動磁石１２間の真ん中に位置するとき、または従動磁石１２が駆動磁石１１間の真ん中に位置するときに、４つの駆動磁石１１と４つの従動磁石１２間の磁力相互作用で、駆動回転体２２と従動回転体２３とは平衡状態になる。
【００４９】
図２（ｄ）の異極平行型は、図２（ｃ）と磁極の向きが異なり、駆動磁石１１と従動磁石１２とで反対になっている点である。これにより、駆動磁石１１が従動磁石１２と重なるときに、４つの駆動磁石１１と４つの従動磁石１２間の磁力相互作用で、駆動回転体２２と従動回転体２３とは平衡状態になる。
【００５０】
上述した図２（ａ）〜図２（ｄ）の平衡状態にある各回転体２２、２３の磁石１１、１２間の交差角度をそれぞれθ_a、θ_b、θ_c、θ_dとしたとき、θ_a＝４５度、θ_b＝０度、θ_c＝４５度、θ_d＝０度である。また、平衡状態を破って駆動回転体２２を回転すると、それに伴って従動回転体２３も回転するが、このときの駆動回転体２２と従動回転体２３間の平衡状態からのずれ量をずれ角θという。
【００５１】
次に、図２（ａ）〜図２（ｄ）に示す回転磁気駆動装置の上記ずれ角に対する各磁気特性（トルク特性及びスラスト特性）を図９を用いて説明する。この磁気特性は図１１に示す磁気測定装置で測定した。回転体に取り付けたテスト磁石は、希土類磁石で磁力は３８０ｍＴである。寸法は、２５ｍｍ×１５ｍｍ×１０ｍｍで、磁極面が２５ｍｍ×１５ｍｍ、対向面が１０ｍｍ×１５ｍｍ、磁石間距離は７ｍｍ、磁石の中心の回転半径は４０ｍｍである。トルクの単位は×１０Ｎｃｍで、スラストの単位はＮ（ｋｇｆ）である。トルク測定には、株式会社山崎精機研究所製回転トルクメーターＳＳ−１Ｒ（トルク測定範囲０〜９８Ｎｃｍ（０〜１０ｋｇｃｍ））、スラストの測定には、株式会社大場計器製作所製丸型バネ式テンションゲージ置針式（測定範囲０〜１９６Ｎ（０〜２０ｋｇｆ））を使用した。
【００５２】
上述した磁気測定装置によるトルク及びスラストの測定方法を説明する。回転ハンドル９５により、駆動回転体２２を回転させ保持する。駆動回転体２２の回転角度が角度目盛板Ａ１００に示される。従動回転体２３が、磁力により、回転する。従動回転体２３の回転角度が角度目盛版Ｂ１０１に示される。角度目盛板Ａ１００と角度目盛板Ｂ１０１の示す値の差が、駆動回転体２２と従動回転体２３とのずれ角である。このずれ角を保持した状態で、まずトルクメーターの値を読む。
【００５３】
従動回転体２３には、移動台９９を駆動回転体２２方向へ、スライドさせようとするスラストが働いている。移動体９９の移動をストッパー１０３により制限することで、駆動回転体２２と従動回転体２３との距離は一定に保たれている。その状態から、移動台引っ張りネジ１０２を回すことにより、従動回転体２３を駆動回転体２２から離す方向へ引っ張る。引っ張る力が、バネ秤９２に示される。引っ張る力が、従動回転体２３に働くスラストを超えた瞬間に、移動台９９はストッパー１０３から一気に離れる。バネ秤９２の指針は、置針になっていて常に最大値を示すので、離れた瞬間の値を示している。そのときのバネ秤９２の示す値であるスラストを読む。
【００５４】
スラストが負のとき、すなわち従動回転体２３が駆動回転体２２から離れる方向にスラストが働いているときは、ストッパー１０３から離れた移動台９９を、移動台引っ張りネジ１０２を逆に回すことにより、ストッパー１０３の位置までもどす。そのときのバネ秤９２の値が、スラストである。
【００５５】
上述した方法により測定した図９に示すトルク及びスラスト特性を説明する。１）同極直交型磁気特性（図９（ａ））
図２（ａ）に対応する特性であり、ずれ角θが増すにつれて、トルクは増大するが、逆にスラストは減少する。ずれ角２０度をすぎると反発磁界に入り測定不能になった。しかし、この測定不能域でマイナストルクになり、反発によるスラストが０近傍になる位置が観測された。
【００５６】
平衡状態でトルクは０、スラストは１６．１７（１．６５ｋｇｆ）である。ずれ角θが１０度の時トルクは１．６と増大し始め、スラストは１４．７（１．５ｋｇｆ）とやや減少傾向に入った。ずれ角θが増すにつれトルクは増大しスラストは減少する。ずれ角２０度付近で、最大トルク２．７、最小スラスト１０．２９（１．０５ｋｇｆ）になる。
【００５７】
回転磁気駆動装置では、トルクは大きい程よく、スラストは小さい程よい。トルクが最大のときに、スラストが最小になるので、好ましい。トルク最大のときのスラストは、吸引作用の分力であると考察する。
【００５８】
２）異極直交型磁気特性
図２（ｂ）に対応する特性であり、平衡状態でトルクは０、スラストは３．２３４（０．３３ｋｇｆ）である。ずれ角θが４度の時トルクは１．８と増大し始め、スラストは２．４５（０．２５ｋｇｆ）と減少傾向に入った。ずれ角θが増すにつれトルクは増大しスラストは減少する。ずれ角８度付近になるとスラストは０になる。さらに、ずれ角θを増やしていくと１２度付近でスラストは負の値−２．２５４（−０．２３ｋｇｆ）を示した。１６度付近で、最大トルク４．６、最小スラスト−４．９（−０．５ｋｇｆ）になる。
【００５９】
トルクが最大のときにスラストがマイナスになるので、好ましい。平衡状態でのスラスト３．２３４（０．３３ｋｇｆ）は、磁力線がねじられたときの分力成分と考えられる。平衡状態から駆動回転体２２を回転させると、異極同士の吸引作用が減少し、同極同士の反発作用が増大する。このことから、ずれ角１６度付近では、磁気浮上して負のスラストが発生したと考えられる。
【００６０】
３）同極平行型磁気特性
図２（ｃ）に対応する特性であり、平衡状態でトルクは０、スラストは１６．１７（１．６５ｋｇｆ）である、ずれ角θが１０度の時トルクは２．５と増大し始め、スラストは１５．６８（１．６０ｋｇｆ）と減少傾向に入った。ずれ角θが増すにつれトルクは増大しスラストは減少する。ずれ角２５度付近で、最大トルク７．６、最小スラスト６．３７（０．６５ｋｇｆ）になる。
【００６１】
トルクが最大のときにスラストが最小になるので、好ましい。ただし、スラストが負の値で、最大のトルクを得るには、異極直行型磁気特性がよい。負のスラストを得る必要がなければ、この特性がよい。最小スラストに対する最大トルクの比率（比率）＝（最大トルク）／（最小スラスト）を大きくしたければ、この特性がいちばんよい。平衡状態でスラスト１６．１７（１．６５ｋｇｆ）が発生している。この成分は、異極間吸引力の分力成分と考えられる。
【００６２】
４）異極平行型磁気特性
図２（ｄ）対応する特性であり、平衡状態でトルク０のときスラストは８８．２（９ｋｇｆ）と大きく、ずれ角θが進むに従いトルクは大きくなるがスラストの減少傾向はわずかである。ずれ角７度付近で、最大トルク９．０、最小スラスト８０．３６（８．２ｋｇｆ）になる。
【００６３】
トルクが最大のときに、スラストが最小になるが、最小スラストの値は、上記４つの磁気特性のうち最も大きい。
【００６４】
上述した４つの型の特性をまとめると、

となる。
【００６５】
なお、上述した回転磁気駆動装置では、駆動回転板及び従動回転板上に４つの磁石を取り付けた場合を説明したが、これに限定されない。少なくとも３つの磁石を備えればよい。面は３点支持によって安定するからである。
【００６６】
また、上述した磁石の形状は直方体の場合について説明したが、実用に合わせて色々な立方形状をとることができる。図１０は、回転体に取り付けた駆動磁石１２１，１２３，１２５，１２７及び従動磁石１２２，１２４，１２６，１２８の実用的ないろいろの形状を示す平面図である。なお、これらを取り付ける回転体２２、２３の中央部には、後述する軸に挿通するための挿通孔１２０を設けてある。
【００６７】
図１０（ａ）は、断面が扇形をした扇柱型の磁石１２１、１２２を４個配置した図である。限られたスペースで強力な磁力を得る場合に有利である。図１０（ｂ）は、略直方体をしており、その径方向内方側の短手方向に平行な内面、及び径方向外方側の短手方向に平行な外面が、前記挿通孔１２０及び回転板２２、２３の外周にそれぞれ沿う曲面で構成された磁石１２３、１２４を４個配置した図である。実施時はこの形が実用向きである。図１０（ｃ）は、立方体の磁石１２５、１２６を４個配置した図である。実施時はこの形が実用向きである。図１０（ｄ）は、円柱型の磁石１２７、１２８を８個配置した図である。実施時はこの形が実用向きである。磁石の形状は、上記に述べた以外に磁気作用及び実施形態に応じて任意の形状を選ぶことができる。
【００６８】
なお、それぞれの回転体の形状は、必ずしも円盤でなくてもよい。例えば、十字型や正三角形などでもよく、回転軸を中心に回転させたとき安定に回転することが可能な形状であればよい。
【００６９】
次に、図３を用いて第２実施例を説明する。これは図１で説明した磁気駆動装置をリニア磁気駆動装置に適用したものである。このリニア磁気駆動装置は、上下の移動体上に１組の磁石を組み込んで構成したものである。図３（ａ）〜（ｂ）に示したリニア磁気駆動装置は、つぎのような共通した構成をもつ。
【００７０】
リニア磁気駆動装置は、任意軌道３４上を走行する駆動移動体３２の移動にともなって、従動移動体３３を従動させることにより、従動移動体３３を任意軌道３４を走行させる。駆動移動体３２は例えば板状のもので構成され、車輪を有し、任意軌道３４上で移動可能である。また、従動移動体３３も例えば板状のもので構成され、車輪を有し、任意軌道３４上で移動可能である。従動移動体３３の任意軌道は、例えば、駆動移動体３２の存在する空間と、従動移動体３３の存在する空間とを仕切る隔壁などで構成される。
【００７１】
前述したように、駆動磁石１１及び従動磁石１２は略同形状で形成され、互いに略平行な対向面と、対向面間の外周を覆う周側面とで囲まれた立体をしており、周側面の一面全面を一方の極の磁極Ｎとし、周側面の一面と反対の面である他面全面を他方の極の磁極Ｓとする両面２極型磁石でそれぞれ構成される。
【００７２】
従動移動体３３に設けられる従動磁石１２が、駆動磁石１１に対して対向面同士が略平行で、かつ駆動磁石１１の略平行な対向面の中央を共通に通る中央延長線に対して、従動磁石１２の略平行な対向面の中央を共通に通る中央延長線が平行になるように配置される。
【００７３】
駆動磁石１１を駆動磁石１１の中央延長線を交差する方向、例えば直交する方向に移動させたとき、駆動磁石１１と従動磁石１２との磁力により、従動移動体３３が隔壁などの軌道３４上を走行する。
【００７４】
また、図３に示したリニア磁気駆動装置は、回転磁気駆動装置と同様に、４種類の組合わせ（（ａ）〜（ｄ））が考えられる。
図３（ａ）に示す同極直交型はあまり実用向きでない。図３（ｂ）に示す異極直交型は摺動軸受けに最適な磁気特性があり、スラストが０または浮上力となって重量物の重さを軽くすることができる。図３（ｃ）に示す同極平行型は異極直交型に比較して推力があり、転がり軸受け型で大型装置に向いている。図３（ｄ）に示す異極平行型はずれ量が小さいので移動体を正確に一定位置に停止する装置に最適である。
【００７５】
なお、リニア磁気駆動装置の移動方向は、必ずしも水平方向でなく、中央延長線１３と交差している方向であればよい。
【００７６】
また、従動移動体３３が、その場で自転してしまうと、すべての磁気特性は磁石の特性上、異極平行型へ移行してしまうので、それが好ましくない場合は、駆動移動体３２と従動移動体３３はレールやガイドのようなものの上を移動させる。つまり、移動方向に対する、駆動磁石１１と従動磁石１２の角度は、常に一定を保たせる必要がある。
【００７７】
また、図３では、それぞれの駆動磁石１１は、すべて従動磁石１２と中央延長線を一致させて位置しているが、（ａ）同極直交型と（ｃ）同極平行型については、磁力の反発により従動移動体が、図３で示した位置より少し右か左にずれた状態で安定する。
【００７８】
図４に、上述した駆動回転体２２と従動回転体２３を備えた、材料４５の撹拌を行う撹拌装置を示す。撹拌槽４４の底部を隔壁として駆動回転体２２と従動回転体２３を対向して取り付ける。駆動回転体２２中央に挿通孔を設け、撹拌槽４４外部に、モーター４１の軸に固定し、モーター４１は支持体４６で隔壁４７に適宜すき間をあけて設置する。従動回転体２３の中央にも挿通孔を設け、撹拌翼４３を備える。従動回転体２３の挿通孔を撹拌槽４４内部底壁に備えられた支持軸４２に回転自在に挿通する。上記、駆動回転体２２を回転手段により回転させ、磁力により従動回転体２３を回転させ撹拌翼により撹拌する構成を撹拌体４８とする。
【００７９】
なお、撹拌体４８は必ずしも底部のみでなく、上部、側面部、または撹拌に適したどの位置でもよいが、上述した異極直交型磁気特性で構成し、撹拌槽４４の底部に備えることが好ましい。従動回転体２３の自重と、マイナスのスラストによる浮力が打ち消しあい、従動回転体２３が支持軸４２の軸受けに接することなく回転するので、軸受けとの磨耗が発生しない。したがって、粉塵の発生を抑えることができるので、材料４５を高純度で撹拌することができる。
【００８０】
図５に、材料を効率よく混合する混合装置を示す。容器５１は、供給口５２と吐出口５３とを備え、上述した撹拌体４８を容器５１内に対向して２組備えている。供給口５２ａから液体Ａ、供給口５２ｂから液体Ｂを供給する。モーター４１によって、駆動回転体２２を回転させ、従動回転体２３と一体になった撹拌翼４３を駆動させる。供給された液体Ａと液体Ｂは、撹拌翼４３により、混合され、吐出口５３より吐出される。
【００８１】
実施によると、モーター４１の回転を同じ方向にして、かつ、容器５１内の対向した位置に設置すると、撹拌翼４３の回転方向は異なるため、効率の良い撹拌ができる。数種類の混合する液体を連続に供給すると容器５１の中で瞬時に混合し、混合された材料は連続に吐出される。
【００８２】
なお、撹拌体４８を対向して設置する際に、容器５１の上下に設置する場合は、下側の撹拌体４８は、異極直交型で構成することで、負のスラストと自重が打ち消し合い、軸受けとの磨耗が発生せず、上側は、それ以外の磁気特性で構成した撹拌体４８を備えることで、正のスラストと自重が打ち消し合い、軸受けとの磨耗が発生しないので好ましい。
【００８３】
また、撹拌に限らずポンプの役目を果たすことも可能である。撹拌体４８の設置位置と撹拌翼４８の形状を適宜選ぶことで、液体を供給口５２から吐出口５３方向に送ることができる。
【００８４】
図６に、撹拌体４８と浮揚磁石６５を備えた基板処理装置の概略を示す。
【００８５】
真空容器６６内の鉛直回転軸６７は、上部に従動回転体２３、下部基板保持体６８と浮揚磁石６５を備える。真空容器６６上方には、駆動回転体２２が備えられ、モーター４１により回転する。真空容器６６底部外壁中央には、超電導体６４が接合されている。超電導体６４は、超低温冷凍体６１の先端である超冷凍部６２に接合されている。霜付き防止と断熱効果のため、超冷凍部６２と超電導体６４は、低温真空容器６３に蔽われている。超電導体６４を超電導臨界温度まで下げると、磁気浮上磁石６５はマイスナー効果により浮上しピン止め効果によりピン止めされ、鉛直回転軸６７の軸振れを防止する。
【００８６】
モーター４１が回転すると隔壁を介して従動回転体２３が回転し、鉛直回転軸６７を中心に基板保持体６８が回転する。鉛直回転軸６７と基板保持体６８は真空容器６６に接触せずに回転する。したがって回転磨耗の塵埃発生は起こらない。また、鉛直回転軸６７は、上部と下部で２点支持されことで、安定して回転することができる。
【００８７】
鉛直回転軸６７に備えられた基板保持体６８上に、ウェーハを置き成膜時に回転させることで、均一に成膜することができる。その他、半導体産業のスパッタリング、フォトレジスト塗布、現像処理等の非接触回転装置に効果がある。
【００８８】
図７に液体の撹拌を行う撹拌装置を示す。図６の説明に付け加えれば、密閉撹拌槽７０は液体の撹拌を行う目的のものである。鉛直回転軸６７に撹拌の目的に応じた撹拌翼７１を設ける。磁気浮上した鉛直回転軸６７に回転を与えると非接触で塵埃発生の起こらない高純度な撹拌をおこなうことができる。また、鉛直回転軸６７は、上部と下部で２点支持されことで、安定して回転することができる。
【００８９】
図８に、その他の撹拌装置を示す。図７の説明に付け加えれば、鉛直回転軸６７を有さず、撹拌体４８が超電導体６４の近傍にある。駆動回転体２２は、低温真空容器６３を軸として回転する。駆動回転体２２は同時に被駆動プーリーとして機能する。駆動プーリー８１がモーター４１により回転すると、回転力は、ベルト８２により駆動回転体２２へ伝えられる。図８では、紙面手前側部分のベルト８２を省略して示している。磁気浮上撹拌翼８５は従動回転体２３を密封内蔵している。従動回転体の回転中心に浮揚磁石６５を備える。超電導効果により浮上し、ピン止めされている磁気浮上撹拌翼８５は、撹拌体４８で回転を与えられると磁気浮上したまま非接触で撹拌ができる。超電導体６４と撹拌体４８それぞれの磁気回路が影響しないように、適度の距離を設けたり磁気遮蔽壁を設ける。
【００９０】
回転駆動部と超電導体を密閉撹拌槽７０の底部に備えたので、上部には、備える必要がなく、構造が簡単である。また鉛直回転軸６７を有していない分、構造が簡単で、メンテナンスも容易である。
【００９１】
【発明の効果】
本発明によれば、駆動力の増大にともないスラストを低減できる。
【図面の簡単な説明】
【図１】本実施例にかかる磁気駆動装置の平面図と正面図である。
【図２】本実施例にかかる回転体の平面図である。
【図３】本実施例にかかる移動体の正面図である。
【図４】本実施例にかかる撹拌体を備えた撹拌装置の側断面図である。
【図５】本実施例にかかる撹拌体を複数備えた混合装置の側断面図である。
【図６】本実施例にかかる基板処理装置の側断面図である。
【図７】本実施例にかかる超伝導体を備えた撹拌装置の側断面図である。
【図８】本実施例にかかるその他の撹拌装置である。
【図９】本実施例にかかる回転体のずれ角と、トルクおよびスラストとの関係を示すグラフである。
【図１０】本実施例にかかる回転体に備える磁気駆動装置の磁石の形状例である。
【図１１】本実施例にかかる回転体のずれ角と、トルクおよびスラストとの関係を測定する測定機の概略図である。
【図１２】従来のマグネチックスターラの側断面図である。
【符号の説明】
１１駆動磁石
１１ａ駆動磁石の上面
１１ｂ駆動磁石の下面
１１ｃ駆動磁石のＮ極面
１１ｄ駆動磁石のＳ極面
１２従動磁石
１２ａ従動磁石の上面
１２ｂ従動磁石の下面
１２ｃ従動磁石のＮ極面
１２ｄ従動磁石のＳ極面
１３中央延長線
Ｃ矢印方向（移動方向）
Ｎ一方の極の磁極
Ｓ他方の極の磁極[0001]
[Industrial application fields]
The present invention relates to a magnetic drive device, a stirring device, a mixing device, and a substrate processing device.
[0002]
[Prior art]
2. Description of the Related Art Conventionally, a magnetic rotation transmission device called a magnetic stirrer is known as a U-shaped magnet that is arranged to face a stirrer and that rotates the stirrer only by the attraction between the two poles. .
[0003]
The mechanism will be described with reference to FIG. 12. A rod-like stirrer 112 is disposed in a container 114 that contains a liquid 115, a U-shaped magnet 111 is disposed in the vicinity of the bottom wall outside the container 114, and a drive motor 113 The stirrer 112 is rotated by rotating the letter magnet 111.
[0004]
There is also a magnetic rotation transmission device called a magnetic coupling, which includes a radial type and an axial type.
[0005]
[Problems to be solved by the invention]
In the conventional magnetic stirrer described above, the stirrer 112 is rotated by the magnetic force between the stirrer 112 and the U-shaped magnet 111. For this reason, there is a problem that the transmission torque is small and the stirrer 112 is easily detached. Also, the diameter of the magnetic flux is relatively small.
[0006]
However, in order to meet the demand for improvement of the stirring capacity, the magnetic force of the stirring bar 112 and the opposing U-shaped magnet 111 is strengthened, and only the attractive force between the different poles is increased, so that the rotating capacity of the stirring bar 112 is increased. Trying to improve.
[0007]
However, if an attempt is made to increase the attractive force only between the different poles, the load in the thrust direction increases.
[0008]
Loss of rotational torque occurs due to an increase in the load in the thrust direction of the drive motor 113, and wear of the bearings occurs. Further, the increase in friction at the rotating contact portion of the stirrer 112 causes a loss of rotational torque, the wear of the rotating contact portion of the stirrer 112 increases, and further noise caused by frictional noise at the rotating contact portion of the stirrer 112. An increase may occur. In particular, if the rotating contact portion of the stirrer 112 is worn, the wear powder is mixed with the liquid in the container, which is not preferable.
[0009]
On the other hand, in the above-described magnetic coupling, the radial type has an advantage that a thrust force is not applied as compared with the axial type, but has a disadvantage that the partition wall has a complicated shape. On the other hand, the axial type has the advantage that the structure is simpler than the radial type, the axial length can be shortened, and the partition shape can be simplified. It had the disadvantage of being proportional.
[0010]
The magnetic rotation transmission device according to Japanese Patent No. 2678569 reduces the thrust, but has not yet achieved a negative thrust.
[0011]
The above-mentioned problem is not limited to the magnetic stirrer, but is common to magnetic drive devices in general, and the thrust increases as the driving force increases.
[0012]
An object of the present invention is to provide a magnetic drive device, a stirrer, a mixing device, and a substrate processing device that eliminate the above-mentioned drawbacks of the prior art and have a characteristic that thrust is reduced as the driving force increases.
[0013]
[Means for Solving the Problems]
The first invention for solving the above-described problems is
A magnetic drive device in which one magnet is a drive magnet and the other magnet is a driven magnet, the drive magnet and the driven magnet are magnetically coupled in a non-contact manner, and the driven magnet is driven as the drive magnet moves. In
The drive magnet and the driven magnet are formed in substantially the same shape and have a solid shape surrounded by opposing surfaces that are substantially parallel to each other and a peripheral side surface that covers the outer periphery between the opposing surfaces, and the entire surface of the peripheral side surface Each of which is a magnetic pole of one pole, and a double-sided two-pole magnet having the entire other surface opposite to one surface of the peripheral side surface as the magnetic pole of the other pole,
A central extension line that makes the opposing surfaces of the drive magnet and the driven magnet substantially parallel to each other and passes through the center of the substantially parallel opposing surfaces of the drive magnet, and a center of the substantially parallel opposing surfaces of the driven magnet The drive magnet and the driven magnet are provided facing each other so that the central extension line that passes in common matches.
By moving the drive magnet in a direction crossing the central extension line of the drive magnet, the movement is transmitted to the driven magnet by the magnetic force generated between the magnetic pole of the drive magnet and the magnetic pole of the driven magnet. This is a magnetic drive device.
[0014]
The second invention is
A drive rotator that rotates about a rotation axis;
A driven rotator provided opposite to the drive rotator and rotating about an extension line of the rotation axis of the drive rotator;
At least three drive magnets provided at equal intervals on the circumference of a virtual circle drawn around the rotation axis of the drive rotator on the surface of the drive rotator facing the driven rotator;
On the surface of the driven rotator facing the drive rotator, on the circumference of a virtual circle drawn around the rotation axis of the driven rotator corresponding to the virtual circle drawn on the drive rotator, etc. The same number of driven magnets as the drive magnets provided at intervals,
In a magnetic drive device comprising:
The drive magnet and the driven magnet are formed in substantially the same shape, and have a solid shape surrounded by opposing surfaces parallel to each other and a peripheral side surface covering the outer periphery between the opposing surfaces. It is composed of a double-sided two-pole magnet having one pole as a magnetic pole and the other surface as a whole opposite the one side of the peripheral side surface.
The opposing surfaces of the driving magnet and the driven magnet are substantially parallel to each other, and a central extension line passing through the center of the opposing surface of the driving magnet is parallel to a central extension line passing through the center of the opposing surface of the driven magnet. Attaching the driving magnet and the driven magnet to the driving rotating body and the driven rotating body, respectively,
When the drive rotator is rotated around the rotation axis of the drive rotator, the driven rotator rotates about the rotation axis of the driven rotator by the magnetic force of the drive magnet and the driven magnet. It is a magnetic drive device.
[0015]
The third invention is
In a magnetic drive device that causes the driven moving body to travel by providing a driven magnet in the driven moving body and driving the driven magnet with the movement of the driving magnet,
The drive magnet and the driven magnet are formed in substantially the same shape and have a solid shape surrounded by opposing surfaces that are substantially parallel to each other and a peripheral side surface that covers the outer periphery between the opposing surfaces, and the entire surface of the peripheral side surface Each of which is a magnetic pole of one pole, and a double-sided two-pole magnet having the entire other surface opposite to one surface of the peripheral side surface as the magnetic pole of the other pole,
The driven magnet provided in the driven moving body is configured such that the opposed surfaces of the driven magnet are substantially parallel to each other and the central extension line passing through the center of the substantially parallel opposed surface of the drive magnet in common. The central extension line that passes through the center of the substantially parallel facing surface of the driven magnet is arranged in parallel,
When the driving magnet is moved in a direction crossing a central extension line of the driving magnet, the driven moving body travels on an arbitrary track by the magnetic force of the driving magnet and the driven magnet. It is a drive device.
[0016]
The fourth invention is:
The magnetic drive device according to the second invention is a stirring device used as a means for stirring the liquid inside the stirring tank,
An insertion hole through which a support shaft provided in the stirring tank is inserted into the driven rotator constituting the magnetic drive device so that the driven rotator is rotatably supported around the support shaft; and the driven A stirring blade for stirring the liquid by rotation of the rotating body, respectively,
When the driven rotator is pivotally supported by the support shaft, the drive rotator constituting the magnetic drive device is placed outside the agitation tank so as to face the drive rotator via the tank wall of the agitation tank. It is arrange | positioned, It is a stirring apparatus characterized by the said driven rotary body rotating centering | focusing on the said support shaft by rotation of the said rotational drive body.
[0017]
The fifth invention is:
In the stirring tank, the stirring device according to the fourth invention has a predetermined number of liquid supply ports for allowing the liquid to be mixed to flow in and a liquid discharge port for discharging the liquid after the mixing process. A plurality of mixing devices are used as means for controlling the mixing state of the liquid.
[0018]
The sixth invention is:
A vacuum vessel for processing a substrate, a substrate holder provided in the vacuum vessel so as to be rotatable around a vertical rotation axis, and a rotating force applied to the vertical rotation axis from above the vertical rotation axis A rotation drive unit that rotates the substrate holder, and a shaft shake prevention mechanism that prevents the vertical rotation shaft from swinging while the substrate holder floats against the gravity from below the substrate holder. In the substrate processing apparatus provided,
The magnetic drive device according to the second aspect of the present invention is used as the drive rotation unit, and the driven rotation body is connected to the vertical rotation shaft by connecting the vertical rotation shaft to the rotation shaft of the driven rotation body constituting the magnetic drive device. A drive rotating body constituting the magnetic drive device is connected to the substrate holder via a rotating shaft, and is arranged outside the vacuum container so as to face the rotary follower via an upper wall of the vacuum container. The substrate rotating body is rotated about the vertical rotation axis via the driven rotating body by the rotation of the driving rotating body,
The shaft shake prevention mechanism includes a levitation magnet provided on the substrate holder, and a superconductor provided outside the vacuum vessel so as to face the levitation magnet via a bottom wall of the vacuum vessel. By cooling the superconductor to a superconducting critical temperature or less, the substrate holder is levitated in the vacuum vessel by the Meissner effect of the superconductor and the levitating magnet, and the vertical rotation shaft is pinned by the pinning effect. The substrate processing apparatus is characterized by being stopped.
[0019]
The seventh invention
A hermetically sealed agitation tank that contains the liquid to be agitated, an agitation blade that is provided in the agitation tank so as to be rotatable around a vertical rotation axis, and the vertical rotation axis from above the vertical rotation axis A rotation drive unit that applies a rotational force to the stirring blade and rotates the stirring blade, and a shaft shake prevention mechanism that prevents the vertical rotation shaft from swinging while the stirring blade floats against the gravity from below the stirring blade In a stirring device comprising:
The magnetic drive device according to the second aspect of the present invention is used as the rotation drive unit, and the driven rotation body is connected to the vertical rotation shaft by connecting the vertical rotation shaft to the rotation shaft of the driven rotation body constituting the magnetic drive device. The rotating rotating shaft is connected to the stirring blade, and the driving rotating body constituting the magnetic driving device is arranged outside the stirring tank so as to face the rotating follower via the upper wall of the stirring tank. And configured to rotate the stirring blade about the vertical rotation axis through the driven rotating body by the rotation of the driving rotating body,
The shaft shake prevention mechanism includes a levitation magnet provided on the stirring blade, and a superconductor provided outside the stirring tank so as to face the levitation magnet via a bottom wall of the stirring tank, By cooling the superconductor to a superconducting critical temperature or lower, the vertical rotating shaft is pinned by the pinning effect while the stirring blade is levitated in the stirring tank by the Meissner effect of the superconductor and the levitating magnet. This is a stirrer characterized by the above.
[0020]
The eighth invention
An agitation tank containing a liquid to be agitated, an agitation blade provided rotatably in the lower part of the agitation tank, a rotation drive unit for rotating the agitation blade, and the agitation blade floated against its gravity While the stirring device provided with a shaft shake prevention mechanism for preventing the shake of the rotation center of the stirring blade,
The magnetic drive device according to the second invention is used as the rotational drive unit, the stirring blade is attached to one driven rotary body constituting the magnetic drive device, and the other drive rotary body constituting the magnetic drive device Is arranged outside the stirring tank so as to face the rotary follower through the bottom wall of the stirring tank, and the driven blade rotates the driven blade through the driven rotary body by the rotation of the driven rotary body. Configured to rotate around the body's axis of rotation,
The shaft shake prevention mechanism is provided so as to face the levitation magnet at a levitation magnet provided at the rotation center of the driven rotator and at a rotation center of the drive rotator disposed outside the agitation tank. A superconductor, and cooling the superconductor to a superconducting critical temperature or less, so that the center of rotation can be achieved while the stirring blade is levitated in the stirring tank by the Meissner effect of the superconductor and the levitation magnet. The stirring device is characterized by being pinned by a pinning effect.
[0021]
[Embodiments of the Invention]
Embodiments of a magnetic drive device according to the present invention will be described below with reference to the drawings.
FIG. 1 is a diagram for explaining the principle of a magnetic drive device constructed by combining two magnets of the present embodiment. The magnetic drive device is hereinafter referred to as ( a) is referred to as a homopolar orthogonal type, (b) is referred to as a heteropolar orthogonal type, (c) is referred to as a homopolar parallel type, and (d) is referred to as a heteropolar parallel type. In the figure, (a) is a plan view and (b) is a front view.
[0022]
The magnetic drive devices shown in the above (a) to (c) have the following common configuration.
The magnetic drive device is composed of two permanent magnets. The two permanent magnets are stacked in the vertical direction with their magnetic poles oriented in a specific direction. Note that the overlapping direction may be left and right, diagonal, or the like. Moreover, there are four types of combinations of the directions of the upper and lower permanent magnets ((a) to (c)) as described above. The direction will be described later.
[0023]
The lower magnet is the drive side drive magnet 11, and the upper magnet is the driven side driven magnet 12. The driving magnet 11 and the driven magnet 12 are magnetically coupled in a non-contact manner with an appropriate interval, and the driving magnet 11 is moved in the arrow direction C parallel to the paper surface so that the driven magnet 12 is driven in the same direction. It has become.
[0024]
The drive magnet 11 and the driven magnet 12 are formed in a substantially identical solid, for example, a rectangular parallelepiped. The rectangular parallelepiped drive magnet 11 and driven magnet 12 are stacked with their longitudinal directions oriented horizontally. In the rectangular parallelepiped, the opposed surfaces substantially parallel to each other are the upper and

lower surfaces

11a, 11b, and 12a, 12b. Moreover, the peripheral side surface which covers the outer periphery between the upper and

lower surfaces

11a, 11b and 12a, 12b is a total of four

side surfaces

11c, 11d and 12c, 12d parallel to the longitudinal direction and two side surfaces parallel to the lateral direction. The entire surface of one side surface 12c, which is one side surface parallel to the longitudinal direction, is one magnetic pole N of one pole. The entire surface of the other surface 12d, which is the surface opposite to the one side surface 12c, is defined as the magnetic pole S of the other pole. The drive magnet 11 and the driven magnet 12 are each composed of such a double-sided bipolar magnet.
[0025]
The central extension line 13 which makes the upper surface 11a of the drive magnet 11 and the lower surfaces 12b of the driven magnet 12 substantially parallel to each other and passes through the centers of the upper and

lower surfaces

11a, 11b of the drive magnet 11 and the upper and

lower surfaces

12a, 12b of the driven magnet 12 The driving magnet 11 and the driven magnet 12 are provided so as to face each other so that a central extension line 13 that passes through the center of each of them coincides.
[0026]
Then, the drive magnet 11 is moved in the direction intersecting the central extension line 13 of the drive magnet 11, for example, the arrow direction C described above, so that the directions of the drive magnet 11 and the driven magnet 12 are maintained. Movement in the same direction is transmitted to the driven magnet 12 by the magnetic force generated between the magnetic pole NS and the magnetic pole NS of the driven magnet 12.
[0027]
Further, the magnetic drive device shown in the above (a) to (b) has the following different configurations. The same-orthogonal type (a), which has been referred to above for convenience, has the drive magnet 11 and the driven magnet 12 orthogonal to each other, and the magnetic poles NS of the drive magnet 11 and the driven magnet 12 that are orthogonal to each other in plan view. They are placed on the same side. Therefore, the same-polarity-type homopolarity means that when the drive magnet 11 and the driven magnet 12 are overlapped so that the directions of the drive magnet 11 and the driven magnet 12 are aligned, the opposing magnetic poles of the drive magnet 11 and the driven magnet 12 are the same polarity. Means that.
[0028]
In addition, the meaning of the heteropolar orthogonal type in (b) is that the drive magnet 11 and the driven magnet 12 are orthogonal to each other, but the magnetic poles NS of the orthogonal drive magnet 11 and the driven magnet 12 are different on the opposite side in plan view. It is arranged in the direction. Therefore, the different polarity of the different pole orthogonal type means that when the driving magnet 11 and the driven magnet 12 are overlapped with their orthogonal directions being aligned, the opposing magnetic poles of the driving magnet 11 and the driven magnet 12 are different polarities. Means that. The illustrated example (b) can be realized by rotating the lower driving magnet 11 with respect to the upper driven magnet 12 in FIG.
[0029]
(C) The same-polar parallel type means that the drive magnet 11 and the driven magnet 12 are aligned in the longitudinal direction (short direction), and the magnetic poles NS of the matched drive magnet 11 and the driven magnet 12 are viewed in a plan view. It is arranged toward the same side. That is, the drive magnet 11 and the driven magnet 12 are arranged in parallel with the same polarity. In plan view (A), the drive magnet 11 is hidden behind the driven magnet 12 and cannot be seen.
[0030]
The meaning of the heteropolar parallel type in (d) is that the drive magnet 11 and the driven magnet 12 are made to coincide with each other in the longitudinal direction (short direction), but the magnetic poles NS of the matched drive magnet 11 and the driven magnet 12 are planar. They are arranged in different directions on the opposite side. That is, the drive magnet 11 and the driven magnet 12 are arranged in parallel with different polarities. In plan view (A), the drive magnet 11 is hidden behind the driven magnet 12 and cannot be seen.
In addition, the direction of the magnetic pole NS of the combination mentioned above is not limited to the example of illustration, You may replace the magnetic pole NS per group.
[0031]
A magnetic drive device having four types of combinations according to the arrangement of the

magnets

11 and 12 moves the drive magnet 11 in a direction intersecting the central extension line 13 of the drive magnet 11, for example, in the arrow direction C described above. The movement in the same direction is transmitted to the driven magnet 12 by the magnetic force generated between the magnetic pole NS of the driving magnet 11 and the magnetic pole NS of the driven magnet 12 while maintaining the directions of the driving magnet 11 and the driven magnet 12. Here, the direction intersecting with the central extension line 13 of the drive magnet 11 includes a direction orthogonal to the central extension line 13, a direction intersecting with the central extension line 13 obliquely, and a combination direction thereof. However, the rotation direction around the central extension line 13, the same direction overlapping the central extension line 13, and the direction parallel to the central extension line 13 are not included. In addition, in addition to moving while maintaining the states (a) to (d), in some situations, the state (a), in other situations (b), and in the next scene (c) It is also possible to use a combination in which the state is arbitrarily changed, such as the state (d) in a different situation.
[0032]
When the drive magnet 11 of the magnetic drive device described above is moved in a direction orthogonal to the central extension line 13, the driven magnet 12 is displaced in the horizontal direction. At this time, the lines of magnetic force are also shifted in the direction in which the driven magnet is located, that is, in the horizontal direction, so that the horizontal component of the lines of magnetic force increases and the vertical component decreases. That is, the attractive force in the driving direction increases and the attractive force in the vertical direction decreases. Accordingly, the moving force of the driven magnet 12 increases, and the thrust of the driven magnet 12 with respect to the drive magnet 11 decreases.
[0033]
Now, the characteristics of the magnetic drive device having the above-described four types of combinations will be described as follows. A common characteristic is that when the amount of displacement 15 of the driven magnet 12 with respect to the drive magnet 11 increases, the moving force of the driven magnet 12 increases and the thrust is reduced rather than increased. Here, the shift amount is a delay amount or an advance amount of the driven magnet 12 with respect to the drive magnet L11, although the driven magnet 12 is delayed or moved when the drive magnet 11 is moved in the arrow direction C. In the figure, reference numeral 11e indicated by a two-dot chain line indicates the drive magnet after movement.
[0034]
The individual characteristics are roughly as follows when described with reference to FIG.
The homopolar orthogonal type (a) has a characteristic that both the moving force and the thrust increase and decrease at a relatively low rate as the shift amount increases. The movement force is not so great. In addition, there is little reduction in thrust.
In the heteropolar orthogonal type of (b), there is a region where the thrust becomes negative when the deviation amount reaches near the peak.
In the homopolar parallel type of (c), the moving force increases linearly as the amount of deviation increases, but the thrust reduction rate is relatively small compared to the increasing rate of the moving force. Thrust is not negative. The distance reached by the magnetic force between the drive magnet 11 and the driven magnet 12 is the largest.
In the heteropolar parallel type of (d), the moving force increases rapidly while the amount of deviation is small, but the absolute value of the thrust remains relatively large. The range covered by magnetic force is the smallest.
[0035]
The reason why the above-described characteristics and characteristic differences occur is not necessarily clear. However, when the driving magnet 11 moves in a direction crossing the central extension line 13 as estimated from the above-described moving force and thrust characteristics, This is probably because the component perpendicular to the central extension line 13 increased and the component parallel to the central extension line 13 decreased. Further, it is considered that four poles coexist on the left and right sides of the opposing surface of the double-sided two-pole magnet, and a repulsive action occurs simultaneously with the attracting action.
[0036]
In addition, the magnetic drive device should just be what the driven magnet 12 moves by moving the drive magnet 11 in the direction which cross | intersects the center extension line 13. FIG. Accordingly, the magnets do not have to have exactly the same shape, and do not have to be exact cubes. Further, the central extension line 13 may not be completely coincident. The size of an appropriate gap provided between the drive magnet upper surface 11a and the driven magnet lower surface 12b is within a range where the magnetic force between the magnets is reached when the drive magnet 11 is moved, and if the driven magnet 12 is moved accordingly. Good.
[0037]
Next, a first embodiment in which the above-described magnetic drive device is applied to a rotary magnetic drive device will be described with reference to FIG. This rotary magnetic drive device is constructed by assembling four sets of concentric magnetic drive devices composed of one set of magnets described in FIG. 1 on upper and lower rotary bodies. The rotating body is composed of a disk.
[0038]
FIG. 2 is a plan view of the rotary magnetic drive device, and from the combination arrangement between the magnets, as in FIG. 1, (a) is a homopolar orthogonal type, (b) is a heteropolar orthogonal type, (c) Is referred to as a homopolar parallel type, and (d) is referred to as a heteropolar parallel type. The rotating magnetic drive apparatus shown in the above (a) to (b) has the following common configuration.
[0039]
The rotating magnetic drive device includes two

rotating bodies

22 and 23. The two rotating bodies are made of, for example, discs having the same diameter and are stacked in the vertical direction. Although not shown in the figure, the lower rotating body is referred to as a driving rotating body 22, and the upper rotating body is referred to as a driven rotating body 23. The drive rotator 22 rotates around the rotation shaft 21. The driven rotator 23 provided to face the drive rotator 22 has a rotation shaft 21 on an extension line of the rotation shaft 21 of the drive rotator 22, that is, the shaft centers thereof coincide with each other. Rotate around.
[0040]
Four drive magnets 11 are attached at equal intervals on the upper surface of the drive rotator 22 facing the driven rotator 23 and on the circumference of a virtual circle drawn around the rotation shaft 21 of the drive rotator 22. Further, a virtual circle drawn around the rotation axis 21 of the driven rotator 23 corresponding to the virtual circle drawn on the drive rotator 22 on the lower surface of the driven rotator 23 facing the drive rotator 22. The same number of driven magnets 12 as drive magnets 22 are attached at equal intervals on the circumference. The attachment of the

magnets

11 and 12 to the

rotating bodies

22 and 23 is fixed by screwing or welding. In the illustrated example, the number of the

magnets

11 and 12 mounted on the

rotating bodies

22 and 23 is four in each example, but is not limited thereto. In order to stably support the driven rotating body 23 in a plane with respect to the driving rotating body 22, at least three are sufficient.
[0041]
The drive magnet 22 and the driven magnet 23 are constituted by the double-sided bipolar magnet described in FIG. That is, it has a rectangular parallelepiped shape formed by substantially the same shape and surrounded by upper and

lower surfaces

11a, 11b and 12a, 12b which are parallel to each other and four side surfaces covering the outer periphery between the upper and lower surfaces. Is a magnetic pole N of one pole, and a double-sided two-pole magnet having the entire other side face 12d opposite to the one side face 12c as a magnetic pole S of the other pole (see FIG. 1).
[0042]
The driving magnet 11 and the driven magnet 12 have their opposing surfaces substantially parallel to each other, and a central extension passing through the center of the opposing surface of the driving magnet 11 and a central extension passing through the center of the opposing surface of the driven magnet 12. It is attached to the drive rotator 22 and the driven rotator 23 so that the lines are parallel to each other. When the drive rotator 22 is rotated about the rotation shaft 21 of the drive rotator 22, the driven rotator 23 rotates about the rotation shaft 21 of the driven rotator 23 by the magnetic force of the drive magnet 11 and the driven magnet 12. To do.
[0043]
Next, the magnetic drive device shown in FIGS. 2A to 2B has the following different configuration. The different configuration is in the magnet arrangement. Moreover, the relative position between the drive magnet 11 and the driven magnet 12 shown in the figure shows an equilibrium state in which the

rotating bodies

22 and 23 are balanced by magnetic force.
[0044]
The magnet arrangement of the homopolar orthogonal type in FIG. 2A is as follows.
In the drive rotator 22, the upper surface of the drive rotator 22 is virtually equally divided into four regions with two orthogonal diameters. The drive magnet 11 consisting of one double-sided bipolar magnet is attached to each of the four regions. In each region, the double-sided bipolar magnet is such that the magnetic pole N of one pole faces radially inward and the magnetic pole S of the other pole faces radially outward. Further, a surface parallel to the longitudinal direction on which the magnetic pole N is formed is arranged in parallel with one diameter, and a surface parallel to the short side direction is arranged in parallel with the other diameter. That is, the double-sided bipolar magnet is attached with a plane parallel to the longitudinal direction inclined by 45 degrees with respect to the diameter passing through the center thereof. The center of the double-sided dipole magnet exists on the circumference of the virtual circle, and also exists in the center of the region. Double-sided dipole magnets attached to opposing regions are arranged point-symmetrically.
[0045]
The driven rotator 23 basically has the same configuration as the drive rotator 22. That is, the upper surface of the driven rotating body 23 is divided into four regions, and one double-sided bipolar magnet is attached to each region, the center of which is on the circumference of the virtual circle, and the center of the region. The points arranged symmetrically are also the same. The difference is the direction in which the driven magnet 12 is attached. The driven magnet 12 has a plane parallel to the longitudinal direction shifted by 45 degrees with respect to the drive magnet 11. That is, when the drive rotator 22 or the driven rotator 23 is rotated and the centers of the driven magnet 12 and the drive magnet 11 attached thereto are overlapped, the drive magnet 11 is arranged orthogonal to the driven magnet 12. It is attached so that.
[0046]
As shown in FIG. 2A, when the rotation direction of the drive rotator 22 is clockwise, the drive rotator 23 is provided on the driven rotator 23 with respect to the drive magnet 11 provided on the drive rotator 22. When the driven magnet 12 corresponding to the driving magnet 11 is delayed by 45 degrees, the driving rotating body 22 and the driven rotating body 23 are in an equilibrium state by the magnetic interaction between the four driving magnets 11 and the four driven magnets 12. become.
[0047]
2B is different from the same-orthogonal type in FIG. 2A in that the orientation of the magnetic poles is different. As a result, when the drive magnet 11 and the driven magnet 12 are perpendicular to each other with their centers overlapped, the drive rotating body 22 and the follower are driven by magnetic interaction between the four drive magnets 11 and the four driven magnets 12. The rotating body 23 is in an equilibrium state.
[0048]
The homopolar parallel type in FIG. 2C is the same as the homopolar orthogonal type in FIG. The difference is that the double-sided dipole magnet attached to the drive rotator 22 and the driven rotator 23 has a plane parallel to the longitudinal direction that is not inclined by 45 degrees with respect to the diameter passing through the center, and is parallel to the diameter. It is a point attached to. That is, all double-sided bipolar magnets are attached radially. Thereby, when the drive magnet 11 is located in the middle between the driven magnets 12 or when the driven magnet 12 is located in the middle between the drive magnets 11, the mutual magnetic force between the four drive magnets 11 and the four driven magnets 12 is determined. As a result, the drive rotor 22 and the driven rotor 23 are in an equilibrium state.
[0049]
The different-polarity parallel type in FIG. 2D is different in the direction of the magnetic poles from that in FIG. 2C and the driving magnet 11 and the driven magnet 12 are opposite. As a result, when the drive magnet 11 overlaps the driven magnet 12, the drive rotator 22 and the driven rotator 23 are in an equilibrium state due to the magnetic interaction between the four drive magnets 11 and the four driven magnets 12.
[0050]
The crossing angle between the

magnets

11 and 12 of the

rotating bodies

22 and 23 in the equilibrium state shown in FIGS. _a , Θ _b , Θ _c , Θ _d Θ _a = 45 degrees, θ _b = 0 degrees, θ _c = 45 degrees, θ _d = 0 degrees. Further, when the driving rotator 22 is rotated while breaking the equilibrium state, the driven rotator 23 is also rotated accordingly. It is called θ.
[0051]
Next, each magnetic characteristic (torque characteristic and thrust characteristic) with respect to the deviation angle of the rotary magnetic drive device shown in FIGS. 2A to 2D will be described with reference to FIG. This magnetic property was measured with a magnetometer shown in FIG. The test magnet attached to the rotating body is a rare earth magnet and has a magnetic force of 380 mT. The dimensions are 25 mm × 15 mm × 10 mm, the magnetic pole surface is 25 mm × 15 mm, the opposing surface is 10 mm × 15 mm, the distance between the magnets is 7 mm, and the turning radius of the center of the magnet is 40 mm. The unit of torque is × 10 Ncm, and the unit of thrust is N (kgf). For torque measurement, rotational torque meter SS-1R manufactured by Yamazaki Seiki Laboratories Co., Ltd. (torque measurement range 0-98 Ncm (0-10 kgcm)), for thrust measurement, round spring tension gauge manufactured by Oba Keiki Seisakusho An in-place type (measurement range 0 to 196N (0 to 20 kgf)) was used.
[0052]
A method for measuring torque and thrust by the above-described magnetic measuring apparatus will be described. The drive rotator 22 is rotated and held by the rotary handle 95. The rotation angle of the drive rotator 22 is shown in the angle scale plate A100. The driven rotator 23 is rotated by the magnetic force. The rotation angle of the driven rotor 23 is shown in the angle scale plate B101. The difference between the values indicated by the angle scale plate A100 and the angle scale plate B101 is the deviation angle between the drive rotator 22 and the driven rotator 23. First, read the value of the torque meter while maintaining this deviation angle.
[0053]
On the driven rotator 23, a thrust acting to slide the moving base 99 in the direction of the drive rotator 22 acts. By restricting the movement of the moving body 99 by the stopper 103, the distance between the drive rotating body 22 and the driven rotating body 23 is kept constant. From this state, the driven rotating body 23 is pulled away from the driving rotating body 22 by turning the moving table pulling screw 102. The pulling force is shown on the spring balance 92. At the moment when the pulling force exceeds the thrust acting on the driven rotating body 23, the moving table 99 moves away from the stopper 103 at a stretch. Since the pointer of the spring balance 92 is a placement needle and always shows the maximum value, it indicates the value at the moment of separation. The thrust which is the value indicated by the spring balance 92 at that time is read.
[0054]
When the thrust is negative, that is, when the thrust is acting in the direction in which the driven rotor 23 is away from the drive rotor 22, the moving base 99, which is separated from the stopper 103, is turned by rotating the moving base tension screw 102 in reverse. Return to the position of the stopper 103. The value of the spring balance 92 at that time is the thrust.
[0055]
The torque and thrust characteristics shown in FIG. 9 measured by the method described above will be described. 1) Homopolar orthogonal magnetic characteristics (Fig. 9 (a))
This is a characteristic corresponding to FIG. 2A. As the deviation angle θ increases, the torque increases, but conversely, the thrust decreases. When the deviation angle exceeded 20 degrees, a repulsive magnetic field was entered and measurement was impossible. However, a negative torque was observed in this non-measurable region, and a position where thrust due to repulsion was near zero was observed.
[0056]
At equilibrium, the torque is 0 and the thrust is 16.17 (1.65 kgf). When the deviation angle θ was 10 degrees, the torque started to increase to 1.6 and the thrust started to decrease slightly to 14.7 (1.5 kgf). As the deviation angle θ increases, the torque increases and the thrust decreases. The maximum torque is 2.7 and the minimum thrust is 10.29 (1.05 kgf) near the deviation angle of 20 degrees.
[0057]
In a rotary magnetic drive device, it is better that the torque is larger and the thrust is smaller. This is preferable because the thrust is minimized when the torque is maximum. It is considered that the thrust at the maximum torque is a component of the suction action.
[0058]
2) Heteropolar orthogonal magnetic characteristics
The characteristic corresponds to FIG. 2B, where the torque is 0 and the thrust is 3.234 (0.33 kgf) in the equilibrium state. When the deviation angle θ was 4 degrees, the torque started to increase to 1.8, and the thrust started to decrease to 2.45 (0.25 kgf). As the deviation angle θ increases, the torque increases and the thrust decreases. When the deviation angle is about 8 degrees, the thrust becomes zero. Further, as the deviation angle θ was increased, the thrust showed a negative value of −2.254 (−0.23 kgf) around 12 degrees. Near 16 degrees, the maximum torque is 4.6 and the minimum thrust is -4.9 (-0.5 kgf).
[0059]
This is preferable because the thrust becomes negative when the torque is maximum. Thrust 3.234 (0.33 kgf) in the equilibrium state is considered to be a component component when the magnetic field lines are twisted. When the drive rotator 22 is rotated from the equilibrium state, the suction action between the different poles decreases, and the repulsion action between the same poles increases. From this, it is considered that a negative thrust was generated due to magnetic levitation in the vicinity of the deviation angle of 16 degrees.
[0060]
3) Homopolar parallel magnetic characteristics
The characteristic corresponds to FIG. 2 (c), the torque is 0 in the equilibrium state, the thrust is 16.17 (1.65 kgf), and when the deviation angle θ is 10 degrees, the torque starts to increase to 2.5, The thrust began to decrease to 15.68 (1.60 kgf). As the deviation angle θ increases, the torque increases and the thrust decreases. In the vicinity of the deviation angle of 25 degrees, the maximum torque becomes 7.6 and the minimum thrust is 6.37 (0.65 kgf).
[0061]
This is preferable because the thrust is minimized when the torque is maximum. However, in order to obtain the maximum torque with a negative value of the thrust, the heteropolar perpendicular magnetic characteristics are good. This property is good if it is not necessary to obtain a negative thrust. If the ratio of the maximum torque to the minimum thrust (ratio) = (maximum torque) / (minimum thrust) is increased, this characteristic is the best. Thrust 16.17 (1.65 kgf) is generated in an equilibrium state. This component is considered to be a component component of the attraction force between different poles.
[0062]
4) Heteropolar parallel magnetic characteristics
The characteristic corresponds to FIG. 2D. When the torque is zero in the equilibrium state, the thrust is as large as 88.2 (9 kgf), and the torque increases as the deviation angle θ increases, but the tendency of the thrust to decrease is slight. In the vicinity of the deviation angle of 7 degrees, the maximum torque is 9.0 and the minimum thrust is 80.36 (8.2 kgf).
[0063]
When the torque is maximum, the thrust is minimized, and the value of the minimum thrust is the largest of the above four magnetic characteristics.
[0064]
To summarize the above four types of characteristics:

It becomes.
[0065]
In the rotary magnetic drive device described above, the case where four magnets are mounted on the drive rotary plate and the driven rotary plate has been described. However, the present invention is not limited to this. What is necessary is just to provide at least three magnets. This is because the surface is stabilized by supporting three points.
[0066]
Moreover, although the shape of the magnet mentioned above demonstrated the case of a rectangular parallelepiped, various cubic shapes can be taken according to practical use. FIG. 10 is a plan view showing various practical shapes of the

drive magnets

121, 123, 125, 127 and the driven

magnets

122, 124, 126, 128 attached to the rotating body. In addition, in the center part of the

rotary bodies

22 and 23 which attach these, the insertion hole 120 for inserting in the axis | shaft mentioned later is provided.
[0067]
FIG. 10A is a diagram in which four sector pole-shaped

magnets

121 and 122 having a fan-shaped cross section are arranged. This is advantageous when a strong magnetic force is obtained in a limited space. FIG. 10B is a substantially rectangular parallelepiped, and the inner surface parallel to the short side direction on the radially inner side and the outer surface parallel to the short direction on the radially outer side are the insertion hole 120 and It is the figure which has arrange | positioned four

magnets

123 and 124 comprised by the curved surface along the outer periphery of the

rotating plates

22 and 23, respectively. In practice, this shape is suitable for practical use. FIG. 10C is a diagram in which four

cubic magnets

125 and 126 are arranged. In practice, this shape is suitable for practical use. FIG. 10D is a diagram in which eight

columnar magnets

127 and 128 are arranged. In practice, this shape is suitable for practical use. As the shape of the magnet, any shape other than those described above can be selected according to the magnetic action and the embodiment.
[0068]
In addition, the shape of each rotary body does not necessarily need to be a disk. For example, a cross shape or an equilateral triangle may be used as long as the shape can rotate stably when rotated around the rotation axis.
[0069]
Next, a second embodiment will be described with reference to FIG. This is the one in which the magnetic drive device described in FIG. 1 is applied to a linear magnetic drive device. This linear magnetic drive device is constructed by incorporating a set of magnets on upper and lower moving bodies. The linear magnetic drive apparatus shown in FIGS. 3A to 3B has the following common configuration.
[0070]
The linear magnetic drive device causes the driven moving body 33 to travel on the arbitrary track 34 by moving the driven moving body 33 along with the movement of the drive moving body 32 traveling on the arbitrary track 34. The drive moving body 32 is composed of, for example, a plate, has wheels, and can move on an arbitrary track 34. The follower moving body 33 is also formed of a plate shape, for example, has wheels, and can move on an arbitrary track 34. The arbitrary trajectory of the driven moving body 33 includes, for example, a partition that partitions a space where the driving moving body 32 exists and a space where the driven moving body 33 exists.
[0071]
As described above, the drive magnet 11 and the driven magnet 12 are formed in substantially the same shape, and have a solid shape surrounded by opposing surfaces that are substantially parallel to each other and a peripheral side surface that covers the outer periphery between the opposing surfaces. Is formed of a double-sided two-pole magnet having the entire surface of one side as a magnetic pole N of one pole and the entire surface of the other surface, which is the surface opposite to the one surface of the peripheral side surface, as the magnetic pole S of the other pole.
[0072]
The driven magnet 12 provided on the driven moving body 33 is driven with respect to a central extension line in which the opposed surfaces are substantially parallel to the drive magnet 11 and pass through the center of the substantially parallel opposed surface of the drive magnet 11 in common. It arrange | positions so that the center extension line which passes along the center of the substantially parallel opposing surface of the magnet 12 may become parallel.
[0073]
When the drive magnet 11 is moved in a direction crossing the central extension line of the drive magnet 11, for example, a direction orthogonal thereto, the driven moving body 33 moves on the track 34 such as a partition wall by the magnetic force of the drive magnet 11 and the driven magnet 12. Run.
[0074]
In addition, the linear magnetic drive device shown in FIG. 3 can be considered in four types of combinations ((a) to (d)), similarly to the rotary magnetic drive device.
The homopolar orthogonal type shown in FIG. 3A is not very practical. The heteropolar orthogonal type shown in FIG. 3B has optimum magnetic characteristics for the sliding bearing, and the weight of the heavy object can be reduced because the thrust is 0 or the levitation force. The homopolar parallel type shown in FIG. 3 (c) has a thrust as compared with the heteropolar orthogonal type, and is a rolling bearing type suitable for a large apparatus. The heteropolar parallel type shown in FIG. 3 (d) is optimal for a device that accurately stops the moving body at a fixed position because the deviation amount is small.
[0075]
The moving direction of the linear magnetic drive device is not necessarily the horizontal direction, but may be a direction intersecting with the central extension line 13.
[0076]
Further, if the driven moving body 33 rotates on the spot, all the magnetic characteristics are shifted to the heteropolar parallel type due to the characteristics of the magnets. The follower moving body 33 moves on a rail or a guide. That is, the angles of the drive magnet 11 and the driven magnet 12 with respect to the moving direction must always be kept constant.
[0077]
In FIG. 3, all of the drive magnets 11 are positioned with the driven magnet 12 and the central extension line aligned with each other. However, in the case of (a) homopolar orthogonal type and (c) homopolar parallel type, the magnetic force Due to this repulsion, the driven moving body is stabilized in a state where it is shifted slightly to the right or left from the position shown in FIG.
[0078]
FIG. 4 shows a stirrer that stirs the material 45 and includes the drive rotator 22 and the driven rotator 23 described above. The drive rotator 22 and the driven rotator 23 are attached to face each other with the bottom of the stirring tank 44 as a partition. An insertion hole is provided in the center of the drive rotator 22, and is fixed to the shaft of the motor 41 outside the stirring tank 44. The motor 41 is installed in the partition wall 47 by a support 46 with an appropriate gap. An insertion hole is also provided in the center of the driven rotor 23 and a stirring blade 43 is provided. The insertion hole of the driven rotor 23 is rotatably inserted into the support shaft 42 provided on the inner bottom wall of the stirring tank 44. The configuration in which the driving rotating body 22 is rotated by rotating means, the driven rotating body 23 is rotated by a magnetic force, and stirring is performed by the stirring blade is referred to as a stirring body 48.
[0079]
The stirring body 48 is not necessarily limited to the bottom, but may be an upper part, a side part, or any position suitable for stirring. However, the stirring body 48 is preferably configured with the above-described different pole orthogonal magnetic characteristics and provided at the bottom of the stirring tank 44. . The weight of the driven rotating body 23 and the buoyancy caused by the negative thrust cancel each other, and the driven rotating body 23 rotates without coming into contact with the bearing of the support shaft 42, so that wear with the bearing does not occur. Therefore, since generation | occurrence | production of dust can be suppressed, the material 45 can be stirred with high purity.
[0080]
FIG. 5 shows a mixing apparatus for efficiently mixing materials. The container 51 includes a supply port 52 and a discharge port 53, and includes two sets of the above-described stirring bodies 48 facing the inside of the container 51. Liquid A is supplied from the supply port 52a and liquid B is supplied from the supply port 52b. The drive rotator 22 is rotated by the motor 41 to drive the stirring blade 43 integrated with the driven rotator 23. The supplied liquid A and liquid B are mixed by the stirring blade 43 and discharged from the discharge port 53.
[0081]
According to the implementation, when the rotation of the motor 41 is set in the same direction and installed in the opposite position in the container 51, the rotation direction of the stirring blade 43 is different, so that efficient stirring can be performed. When several kinds of liquids to be mixed are continuously supplied, they are instantaneously mixed in the container 51, and the mixed materials are continuously discharged.
[0082]
In addition, when installing the stirring body 48 in opposition, when installing it on the upper and lower sides of the container 51, the lower stirring body 48 is constituted by a different-polarity orthogonal type, so that the negative thrust and its own weight cancel each other. It is preferable that the upper side is provided with an agitator 48 having other magnetic characteristics so that the positive thrust and the self-weight cancel each other and wear with the bearing does not occur.
[0083]
Moreover, it is possible not only to agitate but also to serve as a pump. By appropriately selecting the installation position of the stirring body 48 and the shape of the stirring blade 48, the liquid can be sent from the supply port 52 toward the discharge port 53.
[0084]
In FIG. 6, the outline of the substrate processing apparatus provided with the stirring body 48 and the levitating magnet 65 is shown.
[0085]
The vertical rotation shaft 67 in the vacuum container 66 includes an upper driven rotor 23, a lower substrate holder 68, and a levitating magnet 65. A drive rotator 22 is provided above the vacuum container 66 and is rotated by a motor 41. A superconductor 64 is joined to the center of the outer wall of the bottom of the vacuum vessel 66. The superconductor 64 is joined to the super freezing unit 62 that is the tip of the cryogenic refrigerator 61. The super refrigeration unit 62 and the superconductor 64 are covered with a low-temperature vacuum vessel 63 for preventing frost formation and heat insulation. When the superconductor 64 is lowered to the superconducting critical temperature, the magnetic levitation magnet 65 is levitated by the Meissner effect and pinned by the pinning effect, thereby preventing the axial rotation of the vertical rotating shaft 67.
[0086]
When the motor 41 rotates, the driven rotor 23 rotates through the partition wall, and the substrate holder 68 rotates around the vertical rotation shaft 67. The vertical rotation shaft 67 and the substrate holder 68 rotate without contacting the vacuum container 66. Therefore, no dust is generated due to rotational wear. Further, the vertical rotation shaft 67 is supported at two points at the upper part and the lower part, so that it can rotate stably.
[0087]
By depositing a wafer on the substrate holder 68 provided on the vertical rotation shaft 67 and rotating it at the time of film formation, the film can be uniformly formed. In addition, it is effective for non-contact rotating devices such as sputtering, photoresist coating, and development processing in the semiconductor industry.
[0088]
FIG. 7 shows a stirring device for stirring the liquid. In addition to the description of FIG. 6, the sealed stirring tank 70 is for the purpose of stirring the liquid. The vertical rotating shaft 67 is provided with a stirring blade 71 corresponding to the purpose of stirring. When the magnetically levitated vertical rotary shaft 67 is rotated, high-purity stirring that does not cause dust generation without contact can be performed. Further, the vertical rotation shaft 67 is supported at two points at the upper part and the lower part, so that it can rotate stably.
[0089]
FIG. 8 shows another stirring device. In addition to the description of FIG. 7, the stirring body 48 is not near the superconductor 64 without the vertical rotation shaft 67. The drive rotator 22 rotates around the low temperature vacuum vessel 63. The driving rotator 22 simultaneously functions as a driven pulley. When the driving pulley 81 is rotated by the motor 41, the rotational force is transmitted to the driving rotating body 22 by the belt 82. In FIG. 8, the belt 82 on the front side of the drawing is omitted. The magnetic levitation stirring blade 85 has the driven rotor 23 sealed therein. A levitation magnet 65 is provided at the rotation center of the driven rotor. When the magnetic levitation agitating blade 85 that is levitated and pinned by the superconducting effect is rotated by the agitator 48, it can be agitated in a non-contact manner while being magnetically levitated. An appropriate distance or a magnetic shielding wall is provided so that the magnetic circuits of the superconductor 64 and the stirrer 48 are not affected.
[0090]
Since the rotation drive unit and the superconductor are provided at the bottom of the hermetic stirring tank 70, it is not necessary to provide the upper part and the structure is simple. Further, since the vertical rotation shaft 67 is not provided, the structure is simple and maintenance is easy.
[0091]
【The invention's effect】
According to the present invention, thrust can be reduced as the driving force increases.
[Brief description of the drawings]
FIG. 1 is a plan view and a front view of a magnetic drive device according to an embodiment of the present invention.
FIG. 2 is a plan view of a rotating body according to the present embodiment.
FIG. 3 is a front view of the moving body according to the embodiment.
FIG. 4 is a side sectional view of a stirring device provided with a stirring body according to the present embodiment.
FIG. 5 is a side sectional view of a mixing apparatus including a plurality of stirring bodies according to the present embodiment.
FIG. 6 is a side sectional view of the substrate processing apparatus according to the present embodiment.
FIG. 7 is a side cross-sectional view of a stirrer provided with a superconductor according to this example.
FIG. 8 shows another stirring device according to the present embodiment.
FIG. 9 is a graph showing a relationship between a deviation angle of a rotating body, torque, and thrust according to the embodiment.
FIG. 10 is an example of a shape of a magnet of a magnetic drive device provided in the rotating body according to the embodiment.
FIG. 11 is a schematic view of a measuring instrument that measures the relationship between the deviation angle of the rotating body, torque, and thrust according to the present embodiment.
FIG. 12 is a side sectional view of a conventional magnetic stirrer.
[Explanation of symbols]
11 Drive magnet
11a Top surface of drive magnet
11b The bottom surface of the drive magnet
11c N pole face of drive magnet
11d S pole surface of drive magnet
12 Driven magnet
12a Top surface of driven magnet
12b Underside of driven magnet
12c N pole face of driven magnet
12d S pole surface of driven magnet
13 Central extension line
C Arrow direction (moving direction)
N Magnetic pole of one pole
S Magnetic pole of the other pole

Claims

A drive rotator that rotates about a rotation axis;
A driven rotator provided opposite to the drive rotator and rotating about an extension line of the rotation axis of the drive rotator;
At least three drive magnets provided at equal intervals on the circumference of a virtual circle drawn around the rotation axis of the drive rotator on the surface of the drive rotator facing the driven rotator;
On the surface of the driven rotator facing the drive rotator, on the circumference of a virtual circle drawn around the rotation axis of the driven rotator corresponding to the virtual circle drawn on the drive rotator, etc. The same number of driven magnets as the drive magnets provided at intervals,
In a magnetic drive device comprising:
The drive magnet and the driven magnet are formed in substantially the same shape, and have a solid shape surrounded by opposing surfaces parallel to each other and a peripheral side surface covering the outer periphery between the opposing surfaces. It is composed of a double-sided two-pole magnet having one pole as a magnetic pole and the other surface as a whole opposite the one side of the peripheral side surface.
The driving magnet and the driven magnet are arranged so that the facing surfaces of the driving magnet and the driven magnet are substantially parallel to each other and are of different polar orthogonal type, and the center of the substantially parallel facing surfaces of the driving magnet is arranged. common to the central extension line passing through the center of the central extension line substantially parallel to the facing surface of the front SL driven magnets in common through which opposite to coincide arranged,
The drive magnet and the driven magnet arranged in this way are attached to the drive rotator and the driven rotator,
When the drive rotator is rotated around the rotation axis of the drive rotator, the driven rotator is rotated around the rotation axis of the driven rotator by the magnetic force of the drive magnet and the driven magnet. Magnetic drive device.

A drive rotator that rotates about a rotation axis;
A driven rotator provided opposite to the drive rotator and rotating about an extension line of the rotation axis of the drive rotator;
At least three drive magnets provided at equal intervals on the circumference of a virtual circle drawn around the rotation axis of the drive rotator on the surface of the drive rotator facing the driven rotator;
On the surface of the driven rotator facing the drive rotator, on the circumference of a virtual circle drawn around the rotation axis of the driven rotator corresponding to the virtual circle drawn on the drive rotator, etc. The same number of driven magnets as the drive magnets provided at intervals,
In a magnetic drive device comprising:
The drive magnet and the driven magnet are formed in substantially the same shape, and have a solid shape surrounded by opposing surfaces parallel to each other and a peripheral side surface covering the outer periphery between the opposing surfaces. It is composed of a double-sided two-pole magnet having one pole as a magnetic pole and the other surface as a whole opposite the one side of the peripheral side surface.
The driving magnet and the driven magnet are arranged so that the opposing surfaces of the driving magnet and the driven magnet are substantially parallel to each other and have the same polar parallel type, and the center of the substantially parallel opposing surfaces of the driving magnet is arranged. The central extension line that passes in common and the central extension line that passes in common through the center of the substantially parallel facing surface of the driven magnet are arranged to face each other ,
The drive magnet and the driven magnet arranged in this way are attached to the drive rotator and the driven rotator,
When the drive rotator is rotated around the rotation axis of the drive rotator, the driven rotator is rotated around the rotation axis of the driven rotator by the magnetic force of the drive magnet and the driven magnet. Magnetic drive device.

The magnetic drive device according to claim 1 or 2, wherein the magnetic drive device is used as a means for stirring the liquid inside the stirring tank, and the driven rotating body constituting the magnetic driving device is provided in the stirring tank. An insertion hole through which the provided support shaft is inserted to rotatably support the driven rotary body around the support shaft, and an agitating blade for stirring the liquid by rotation of the driven rotary body, respectively And when the driven rotating body is pivotally supported by the support shaft, the driving rotating body constituting the magnetic driving device faces the driving rotating body via the tank wall of the stirring tank. A stirrer arranged outside, wherein the driven rotating body rotates around the support shaft by the rotation of the rotary driving body.

The stirring apparatus according to claim 3, wherein the stirring tank having a predetermined number of liquid supply ports for allowing the liquid to be mixed to flow in and a liquid discharge port for discharging the liquid after the mixing process are provided in the stirring tank. A mixing apparatus used as a plurality of means for controlling the mixed state of the liquid.

A vacuum vessel for processing the substrate;
A substrate holder provided in the vacuum vessel so as to be rotatable around a vertical rotation axis and holding the substrate;
A rotation drive unit that rotates the substrate holder by applying a rotational force to the vertical rotation shaft from above the vertical rotation shaft;
In the substrate processing apparatus provided with the shaft shake prevention mechanism for preventing the shake of the vertical rotation shaft while floating the substrate holder against the gravity from below the substrate holder,
The magnetic drive device according to claim 1 or 2 is used as the drive rotation unit,
By connecting the vertical rotating shaft to a rotating shaft of a driven rotating body constituting the magnetic drive device, the driven rotating body is connected to the substrate holder via the vertical rotating shaft,
A driven rotating body constituting the magnetic drive device is disposed outside the vacuum container so as to face the rotating driven body via an upper wall of the vacuum container, and the driven rotating body is rotated by the rotation of the driving rotating body. Configured to rotate the substrate holder about the vertical rotation axis via
The shaft shake prevention mechanism includes a levitation magnet provided on the substrate holder, and a superconductor provided outside the vacuum vessel so as to face the levitation magnet via a bottom wall of the vacuum vessel. By cooling the superconductor to a superconducting critical temperature or less, the substrate holder is levitated in the vacuum vessel by the Meissner effect of the superconductor and the levitating magnet, and the vertical rotation shaft is pinned by the pinning effect. A substrate processing apparatus characterized by being stopped.

A closed stirring tank containing the liquid to be stirred;
A stirring blade for stirring the liquid provided in the stirring tank so as to be rotatable around a vertical rotation axis;
A rotation drive unit that rotates the stirring blade by applying a rotational force to the vertical rotation shaft from above the vertical rotation shaft;
In the stirring device provided with a shaft shake prevention mechanism for preventing the shake of the vertical rotation shaft while floating the stirring blade against the gravity from below the stirring blade,
The magnetic drive device according to claim 1 or 2 is used as the rotary drive unit, and the driven rotary body is connected to the rotary shaft of the driven rotary body constituting the magnetic drive device, whereby the driven rotary body is Connected to the agitation blade via a vertical rotation shaft, and arranged on the outside of the agitation tank so that the drive rotator constituting the magnetic drive device faces the rotary follower via the upper wall of the agitation tank. And configured to rotate the stirring blade about the vertical rotation axis through the driven rotating body by the rotation of the driving rotating body,
The shaft shake prevention mechanism includes a levitation magnet provided on the stirring blade, and a superconductor provided outside the stirring tank so as to face the levitation magnet via a bottom wall of the stirring tank, By cooling the superconductor to a superconducting critical temperature or lower, the vertical rotating shaft is pinned by the pinning effect while the stirring blade is levitated in the stirring tank by the Meissner effect of the superconductor and the levitating magnet. A stirrer characterized by the above.

A stirring tank for storing a liquid to be stirred, a stirring blade rotatably provided in the stirring tank, a rotation driving unit that rotates the stirring blade, and the stirring blade is lifted against its gravity. While the stirring device provided with a shaft shake prevention mechanism for preventing the shake of the rotation center of the stirring blade
The magnetic drive device according to claim 1 or 2 is used as the rotation drive unit, and the stirring blade is attached to one driven rotating body constituting the magnetic drive device, and the other drive rotation constituting the magnetic drive device. A body is disposed outside the agitation tank so as to face the rotation follower via the bottom wall of the agitation tank, and the agitation blade is driven by the driven rotator via the driven rotator. It is configured to rotate around the rotation axis of the rotating body,
The shaft shake prevention mechanism is provided so as to face the levitation magnet at the rotation center of the driving rotator disposed outside the stirring tank and the levitation magnet provided at the rotation center of the driven rotator. A superconductor, and cooling the superconductor to a superconducting critical temperature or less, so that the center of rotation can be achieved while the stirring blade is levitated in the stirring tank by the Meissner effect of the superconductor and the levitation magnet. A stirrer characterized by being pinned by a pinning effect .