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JP4050900B2 - Mass flow meter adhering matter detection device and cleaning device - Google Patents

Mass flow meter adhering matter detection device and cleaning device Download PDF

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Publication number
JP4050900B2
JP4050900B2 JP2001390344A JP2001390344A JP4050900B2 JP 4050900 B2 JP4050900 B2 JP 4050900B2 JP 2001390344 A JP2001390344 A JP 2001390344A JP 2001390344 A JP2001390344 A JP 2001390344A JP 4050900 B2 JP4050900 B2 JP 4050900B2
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Japan
Prior art keywords
pipe
fresh water
bent pipe
liquid
mass
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JP2001390344A
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Japanese (ja)
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JP2003194610A (en
Inventor
昭一 野口
清 廣瀬
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Nitto Seiko Co Ltd
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Nitto Seiko Co Ltd
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Description

【0001】
【発明の属する技術分野】
本発明は、固形異物が混入した液体の質量を計測する質量流量計であって、その測定部を構成するパイプ内壁面に付着する付着物の付着量を検出する付着物検出装置および洗浄装置に関する。
【0002】
【従来の技術】
従来、固形異物が混入した液体の質量計測には、計測部に一直線上に配置された流入パイプおよび流出パイプ、これらパイプに接続された曲折パイプを備えた質量流量計が利用されている。この質量流量計は、流入パイプから固形異物が混入した液体が曲折パイプを通過して流出パイプから排出される間の曲折パイプのひずみ量から液体の質量を算出するように構成されている。
【0003】
【発明が解決しようとする課題】
この質量流量計では、固形異物が混入した液体を計測している関係で、計測終了時には清水を計測部に送り、パイプ内壁面が清掃されている。しかしながら、この種清掃を繰り返すのみでは、計測部のパイプ内壁面に固形異物が付着物として残り、この付着物が液体密度の計測誤差を招いている。そのため、所定期間をおいて定期的に洗浄液を計測部に送り、パイプ内壁面を清掃しているが、その洗浄度を検出する方法がなく、付着物が取り除かれたのか否かを把握することができず、その解決策が要望されている。
【0004】
本発明は、上記要望に鑑み発明されたもので、計測終了時に計測部を清掃する際に計測部のパイプ内壁面の付着物の付着量を検出する付着物検出装置および洗浄装置を提供しようとするものである。
【0005】
【課題を解決するための手段】
一直線上に配置された流入パイプと流出パイプとの間に曲折パイプを配置し、流入パイプから固形異物が混入した液体が曲折パイプを通過して流出パイプから排出される間の曲折パイプのひずみ量を検出して、このひずみ量から液体の質量を算出する計測モードを備えた質量流量計において、
計測モードとは別に検出モードを選択する入力部を設け、検出モード時に清水が供給される際の曲折パイプの固有振動数から清水の密度を算出し、この密度をあらかじめ記憶された清水の密度と比較して、両者の差から曲折パイプ内壁面への付着物の付着量を検出するように構成されている。
【0006】
また、計測モードとは別に検出モードを選択する入力部を設け、検出モード時に清水が供給される際の曲折パイプの固有振動数から清水の密度を算出し、この密度をあらかじめ記憶された清水の密度と比較して、両者の差が所定値以上となると、洗浄液を流入パイプから供給するように構成してもよい。
【0007】
【発明の実施の形態】
以下、図面に基づき本発明の実施の形態を質量流量計の洗浄装置について説明する。図1および図2において、1は固形異物が混入した液体の質量を計測する質量流量計2の洗浄装置であり、質量流量計2を備えてなる付着物検出装置3と、洗浄液供給部4とからなっている。この付着物検出装置3は、メインポンプ7と質量流量計2に連なる清水パイプ5aを備えた清水供給部5と演算部6とからなり、清水供給部5は清水を貯留する貯水槽(図示せず)と清水ポンプ5bとを有している。
【0008】
前記質量流量計2は、一直線上に配置された流入パイプ2aと、流出パイプ2bと、これらパイプ間に水平方向に配置された曲折パイプ2cとからなる計測部を有しており、流入パイプ2aから固形異物が混入した液体が曲折パイプ2cを通過して流出パイプ2bから排出される時に曲折パイプ2cが振動するように構成されている。また、この質量流量計2は曲折パイプ2cの振動にともない発生するコリオリの力により曲折パイプ2cの流入側と流出側との間で生じるねじれを検出するようにひずみ量検出部2dを有しており、その検出値がA−D変換部(図示せず)を介して演算部6に送られるように構成されている。さらに、前記質量流量計2には曲折パイプ2cの振動を検出するピックアップ部2eが配置されており、曲折パイプ2cの固有振動数がA−D変換部(図示せず)を介して演算部6に送られるように構成されている。
【0009】
前記演算部6は、曲折パイプ2cのひずみ量およびその固有振動数が入力する外部入出力部6aと、各種動作を制御する制御部6bと、清水の密度、固形異物の真比重等各種情報を入力する入力部6cと、各種情報を記憶する記憶部6dと、質量あるいは密度等各種情報を表示する表示部6eとから構成されている。前記入力部6cはモード選択スイッチ(図示せず)、作業開始スイッチ(図示せず)および清水供給スイッチ(図示せず)を有しており、液体の質量を計測する計測モードと、清水供給時に清水の密度を計測する検出モードとを選択する一方で、計測モード時には作業開始スイッチによりメインポンプ7を、また検出モード時には清水供給スイッチにより清水供給部5の清水ポンプ5bを作動できるように構成されている。
【0010】
前記制御部6bは、作業開始スイッチのオンオフによりメインポンプ7の作動を制御して、液体の供給を制御する一方、作業スイッチがオフの時清水供給スイッチのオンオフにより清水ポンプ5bの作動を制御して、清水の流入パイプ2aへの供給を制御するように構成されている。また、制御部6bは計測モード時にはひずみ量検出部2dの検出値を一定時間毎に読み込み、曲折パイプ2cのひずみ量から液体の通過質量を算出する一方、ピックアップ部2eの検出値を一定時間毎に読み込み、曲折パイプ2cの固有振動数から液体を含む曲折パイプ2cの単位容積あたりの質量、この質量から液体の単位容積あたりの質量、さらには液体の密度を算出するように構成されている。さらに、制御部6bは検出モード時には、
1)ピックアップ部2eの検出値のみを一定時間毎に読み込む。
2)この値から曲折パイプ2cの固有振動数、液体を含む曲折パイプ2cの単位容積あたりの質量、液体の単位容積あたりの質量、さらには液体の密度を算出する。
3)算出された清水の密度と記憶部6dに記憶された清水の密度を比較し、両者の差から曲折パイプ2cの内壁面に付着した付着物の付着量を検出して、その差が所定値以上になると洗浄液供給指令信号を出力するとともに、表示部6eに洗浄表示指令信号を出力する。
4)リターン
となるように構成されている。
【0011】
一方、洗浄装置1の一部をなす洗浄液供給部4は、洗浄液パイプ4aと洗浄液ポンプ4bと洗浄液を貯留する貯留槽(図示せず)とを備えており、洗浄液ポンプ4bは前記制御部6bから洗浄液供給指令信号により作動するように構成されている。
【0012】
上記質量流量計の洗浄装置では、モード選択スイッチで計測モードが選択された後作業開始スイッチがオンになると、メインポンプ7が作動して固形異物の混入した液体が質量流量計2の流入パイプ2aから曲折パイプ2c、流出パイプ2bに供給される。この液体が質量流量計2の曲折パイプ2cを通過する際には、曲折パイプ2cが振動し、この振動による曲折パイプ2cのひずみ量がひずみ量検出部2dで検出され、その値がディジタル値に変換されて演算部6の外部入出力部6aに送られる。また、曲折パイプ2cの振動もピックアップ部2eで検出され、その固有振動数がディジタル値に変換されて演算部6の外部入出力部6aに送られる。演算部6では一定時間毎にひずみ量と、固有振動数が読み込まれ、ひずみ量から液体の質量が算出される一方、固有振動数とあらかじめ算出した固形異物の真比重とから、液体を含む曲折パイプ2cの単位容積あたりの質量、この質量から液体の単位容積当たりの質量、さらには液体の密度が算出され、これらが記憶部6dで記憶されるとともに、表示部6eで表示される。
【0013】
また、液体の計測作業が終了し、質量流量計2を清水で洗浄する際には、モード選択スイッチにより検出モードが選択される。この状態で、清水供給スイッチがオンになると、清水ポンプ5bが作動し、清水が質量流量計2の流入パイプ2aから各パイプに供給される。この時、曲折パイプ2cが振動し、その振動の固有振動数がピックアップ部2eで検出され、これがディジタル値に変換されて演算部6の外部入出力部6aに送られる。この固有振動数から計測モード時と同様に液体の密度が算出される。この密度とあらかじめ入力された清水の密度(1.000)とが比較され、両者の差が所定値以上となると、洗浄表示指令が表示部6eに送られ、表示部6eで洗浄表示がされる。この表示により、洗浄液供給部4が接続されてない時には、作業者が質量流量計2を分解洗浄することができる。
【0014】
また、洗浄液供給部4が付設されている場合には、前記洗浄表示指令信号と同時に洗浄液供給指令信号が出力され、洗浄液ポンプ4bが作動して洗浄液が質量流量計2の流入パイプ2aに供給されて各パイプの内壁に付着する付着物が洗浄される。この作業が繰り返されて、質量流量計2の計測部の洗浄を確実に行うことができる。
【0015】
【発明の効果】
以上説明したように、本発明は清水供給時の曲折パイプの振動から清水の密度を算出し、この清水の密度をあらかじめ記憶された清水の密度と比較して、両者の差からパイプ内壁面への付着物の付着量を検出するように構成しているため、パイプ内壁面の付着物を確実に検出でき、パイプ内壁面の洗浄度を数的に把握することができる等の利点がある。また、本発明は質量流量計の付着物検出装置に洗浄液供給部を接続して洗浄装置としているため、付着物が所定値を超えた時には、洗浄液を供給して、パイプの洗浄を繰り返し行うことができ、パイプの内壁面の付着物を確実に取り除くことができる。
【図面の簡単な説明】
【図1】本発明に係る質量流量計の洗浄装置の構成を示すブロック図である。
【図2】本発明に係る質量流量計の計測部をなす各パイプの概略説明図である。
【符号の説明】
1 洗浄装置
2 質量流量計
2a 流入パイプ
2b 流出パイプ
2c 曲折パイプ
2d ひずみ量検出部
2e ピックアップ部
3 付着物検出装置
4 洗浄液供給部
4a 洗浄液パイプ
4b 洗浄液ポンプ
5 清水供給部
5a 清水パイプ
5b 清水ポンプ
6 演算部
6a 外部入出力部
6b 制御部
6c 入力部
6d 記憶部
6e 表示部
7 メインポンプ
[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a mass flow meter that measures the mass of a liquid mixed with solid foreign matters, and relates to an adhering matter detection device and a cleaning device that detect the adhering amount of adhering matter adhering to an inner wall surface of a pipe constituting the measuring unit. .
[0002]
[Prior art]
Conventionally, mass flowmeters including an inflow pipe and an outflow pipe arranged in a straight line in a measurement unit, and a bent pipe connected to these pipes are used for mass measurement of liquid mixed with solid foreign matters. This mass flow meter is configured to calculate the mass of the liquid from the amount of strain of the bent pipe while the liquid mixed with solid foreign matters from the inflow pipe passes through the bent pipe and is discharged from the outflow pipe.
[0003]
[Problems to be solved by the invention]
In this mass flow meter, since the liquid in which solid foreign matters are mixed is measured, fresh water is sent to the measuring unit at the end of measurement, and the inner wall surface of the pipe is cleaned. However, only by repeating this kind of cleaning, solid foreign matters remain as deposits on the inner wall surface of the pipe of the measurement unit, and these deposits cause a measurement error of the liquid density. Therefore, the cleaning liquid is periodically sent to the measuring unit after a predetermined period of time to clean the inner wall surface of the pipe, but there is no method for detecting the degree of cleaning, and it is possible to grasp whether or not the deposit has been removed. There is a need for a solution.
[0004]
The present invention has been invented in view of the above-mentioned demand, and intends to provide a deposit detection device and a cleaning device that detect the amount of deposit on the inner wall surface of the pipe of the measurement unit when the measurement unit is cleaned at the end of measurement. To do.
[0005]
[Means for Solving the Problems]
A bent pipe is arranged between the inflow pipe and the outflow pipe arranged in a straight line, and the amount of strain of the bent pipe while the liquid mixed with solid foreign matters passes through the bent pipe and is discharged from the outflow pipe. In a mass flow meter equipped with a measurement mode that detects mass and calculates the mass of the liquid from this strain amount,
Separately from the measurement mode, an input unit for selecting the detection mode is provided, and the density of fresh water is calculated from the natural frequency of the bent pipe when fresh water is supplied in the detection mode, and this density is stored as the density of fresh water stored in advance. In comparison, the amount of deposit on the inner wall surface of the bent pipe is detected from the difference between the two.
[0006]
In addition, an input unit for selecting the detection mode is provided separately from the measurement mode, and the density of the fresh water is calculated from the natural frequency of the bent pipe when the fresh water is supplied in the detection mode, and this density is stored in advance. The cleaning liquid may be supplied from the inflow pipe when the difference between the two becomes equal to or greater than a predetermined value.
[0007]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described with reference to the drawings for a mass flow meter cleaning device. In FIG. 1 and FIG. 2, reference numeral 1 denotes a cleaning device for a mass flow meter 2 that measures the mass of a liquid mixed with solid foreign substances. The adhering matter detection device 3 including the mass flow meter 2, a cleaning liquid supply unit 4, It is made up of. The adhering matter detection device 3 includes a fresh water supply unit 5 having a fresh water pipe 5a connected to a main pump 7 and a mass flow meter 2 and a calculation unit 6. The fresh water supply unit 5 is a water storage tank (not shown) for storing fresh water. And a fresh water pump 5b.
[0008]
The mass flow meter 2 has a measuring section including an inflow pipe 2a arranged in a straight line, an outflow pipe 2b, and a bent pipe 2c arranged in the horizontal direction between these pipes. The bent pipe 2c vibrates when the liquid mixed with solid foreign matters passes through the bent pipe 2c and is discharged from the outflow pipe 2b. Further, the mass flow meter 2 has a strain amount detector 2d so as to detect a twist generated between the inflow side and the outflow side of the bent pipe 2c due to the Coriolis force generated by the vibration of the bent pipe 2c. The detected value is sent to the calculation unit 6 via an A-D conversion unit (not shown). Further, the mass flow meter 2 is provided with a pickup unit 2e for detecting the vibration of the bent pipe 2c, and the natural frequency of the bent pipe 2c is calculated by an arithmetic unit 6 via an AD converter (not shown). Configured to be sent to.
[0009]
The calculation unit 6 receives various information such as the external input / output unit 6a for inputting the strain amount of the bent pipe 2c and its natural frequency, the control unit 6b for controlling various operations, the density of fresh water, and the true specific gravity of solid foreign matters. An input unit 6c for inputting, a storage unit 6d for storing various types of information, and a display unit 6e for displaying various types of information such as mass or density are included. The input unit 6c has a mode selection switch (not shown), a work start switch (not shown), and a fresh water supply switch (not shown), a measurement mode for measuring the mass of the liquid, and when fresh water is supplied. While selecting the detection mode for measuring the density of fresh water, the main pump 7 can be operated by the work start switch in the measurement mode, and the fresh water pump 5b of the fresh water supply unit 5 can be operated by the fresh water supply switch in the detection mode. ing.
[0010]
The controller 6b controls the operation of the main pump 7 by turning on / off the work start switch to control the supply of liquid, while controlling the operation of the fresh water pump 5b by turning on / off the fresh water supply switch when the work switch is off. Thus, the supply of fresh water to the inflow pipe 2a is controlled. Further, in the measurement mode, the control unit 6b reads the detection value of the strain amount detection unit 2d at regular intervals, calculates the passing mass of the liquid from the strain amount of the bent pipe 2c, and calculates the detection value of the pickup unit 2e at regular intervals. And the mass per unit volume of the bent pipe 2c containing the liquid, the mass per unit volume of the liquid, and the density of the liquid are calculated from the natural frequency of the bent pipe 2c. Furthermore, the control unit 6b is in the detection mode.
1) Only the detection value of the pickup unit 2e is read at regular intervals.
2) From this value, the natural frequency of the bent pipe 2c, the mass per unit volume of the bent pipe 2c containing the liquid, the mass per unit volume of the liquid, and the density of the liquid are calculated.
3) The calculated density of fresh water and the density of fresh water stored in the storage unit 6d are compared, and the amount of adhering matter adhering to the inner wall surface of the bent pipe 2c is detected from the difference therebetween, and the difference is predetermined. When the value exceeds the value, a cleaning liquid supply command signal is output and a cleaning display command signal is output to the display unit 6e.
4) It is configured to be a return.
[0011]
On the other hand, the cleaning liquid supply unit 4 constituting a part of the cleaning apparatus 1 includes a cleaning liquid pipe 4a, a cleaning liquid pump 4b, and a storage tank (not shown) for storing the cleaning liquid. The cleaning liquid pump 4b is connected to the control unit 6b. It is configured to operate in response to a cleaning liquid supply command signal.
[0012]
In the mass flow meter cleaning device, when the operation start switch is turned on after the measurement mode is selected by the mode selection switch, the main pump 7 is activated and the liquid mixed with the solid foreign matter flows into the inflow pipe 2a of the mass flow meter 2. To the bent pipe 2c and the outflow pipe 2b. When the liquid passes through the bent pipe 2c of the mass flow meter 2, the bent pipe 2c vibrates, and the strain amount of the bent pipe 2c due to this vibration is detected by the strain amount detection unit 2d, and the value becomes a digital value. It is converted and sent to the external input / output unit 6 a of the calculation unit 6. The vibration of the bent pipe 2c is also detected by the pickup unit 2e, and its natural frequency is converted into a digital value and sent to the external input / output unit 6a of the arithmetic unit 6. The calculation unit 6 reads the strain amount and the natural frequency at regular intervals, and calculates the mass of the liquid from the strain amount. On the other hand, the bending including the liquid is calculated from the natural frequency and the true specific gravity of the solid foreign matter calculated in advance. The mass per unit volume of the pipe 2c, the mass per unit volume of the liquid, and the density of the liquid are calculated from this mass, and these are stored in the storage unit 6d and displayed on the display unit 6e.
[0013]
When the liquid measurement operation is completed and the mass flow meter 2 is washed with fresh water, the detection mode is selected by the mode selection switch. In this state, when the fresh water supply switch is turned on, the fresh water pump 5b is activated, and fresh water is supplied from the inflow pipe 2a of the mass flow meter 2 to each pipe. At this time, the bent pipe 2c vibrates, and the natural frequency of the vibration is detected by the pickup unit 2e, which is converted into a digital value and sent to the external input / output unit 6a of the arithmetic unit 6. The density of the liquid is calculated from this natural frequency as in the measurement mode. This density is compared with the density of fresh water (1.000) inputted in advance, and when the difference between the two becomes a predetermined value or more, a cleaning display command is sent to the display unit 6e, and a cleaning display is made on the display unit 6e. This display allows the operator to disassemble and clean the mass flow meter 2 when the cleaning liquid supply unit 4 is not connected.
[0014]
When the cleaning liquid supply unit 4 is attached, a cleaning liquid supply command signal is output simultaneously with the cleaning display command signal, the cleaning liquid pump 4b is activated, and the cleaning liquid is supplied to the inflow pipe 2a of the mass flow meter 2. The deposits adhering to the inner wall of each pipe are cleaned. This operation is repeated, so that the measurement unit of the mass flow meter 2 can be reliably cleaned.
[0015]
【The invention's effect】
As described above, the present invention calculates the density of fresh water from the vibration of the bent pipe when fresh water is supplied, and compares the density of this fresh water with the density of fresh water stored in advance. Therefore, there is an advantage that the deposit on the inner wall surface of the pipe can be reliably detected and the degree of cleaning of the inner wall surface of the pipe can be grasped numerically. In addition, since the present invention uses a cleaning liquid supply unit connected to the mass flow meter adhering matter detection device, when the adhering material exceeds a predetermined value, the cleaning liquid is supplied and the pipe is repeatedly washed. It is possible to remove the deposits on the inner wall surface of the pipe with certainty.
[Brief description of the drawings]
FIG. 1 is a block diagram showing a configuration of a mass flow meter cleaning device according to the present invention.
FIG. 2 is a schematic explanatory diagram of each pipe constituting the measurement unit of the mass flow meter according to the present invention.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Cleaning apparatus 2 Mass flowmeter 2a Inflow pipe 2b Outflow pipe 2c Bending pipe 2d Strain amount detection part 2e Pickup part 3 Adhering substance detection apparatus 4 Cleaning liquid supply part 4a Cleaning liquid pipe 4b Cleaning liquid pump 5 Fresh water supply part 5a Fresh water pipe 5b Fresh water pump 6 Operation unit 6a External input / output unit 6b Control unit 6c Input unit 6d Storage unit 6e Display unit 7 Main pump

Claims (2)

一直線上に配置された流入パイプと流出パイプとの間に曲折パイプを配置し、流入パイプから固形異物が混入した液体が曲折パイプを通過して流出パイプから排出される間の曲折パイプのひずみ量を検出して、このひずみ量から液体の質量を算出する計測モードを備えた質量流量計において、
計測モードとは別に検出モードを選択する入力部を設け、検出モード時に清水が供給される際の曲折パイプの固有振動数から清水の密度を算出し、この密度をあらかじめ記憶された清水の密度と比較して、両者の差から曲折パイプ内壁面への付着物の付着量を検出するように構成したことを特徴とする付着物検出装置。
A bent pipe is arranged between the inflow pipe and the outflow pipe arranged in a straight line, and the amount of strain of the bent pipe while the liquid mixed with solid foreign matters passes through the bent pipe and is discharged from the outflow pipe. In a mass flow meter equipped with a measurement mode that detects mass and calculates the mass of the liquid from this strain amount,
Separately from the measurement mode, an input unit for selecting the detection mode is provided, and the density of the fresh water is calculated from the natural frequency of the bent pipe when the fresh water is supplied in the detection mode. In comparison, the adhering matter detection apparatus is configured to detect the adhering amount of the adhering matter to the inner wall surface of the bent pipe from the difference between the two.
一直線上に配置された流入パイプと流出パイプとの間に曲折パイプを配置し、流入パイプから固形異物が混入した液体が曲折パイプを通過して流出パイプから排出される間の曲折パイプのひずみ量を検出して、このひずみ量から液体の質量を算出する計測モードを備えた質量流量計において、
計測モードとは別に検出モードを選択する入力部を設け、検出モード時に清水が供給される際の曲折パイプの固有振動数から清水の密度を算出し、この密度をあらかじめ記憶された清水の密度と比較して、両者の差が所定値以上となると、洗浄液を流入パイプから供給するように構成したことを特徴とする洗浄装置。
A bent pipe is arranged between the inflow pipe and the outflow pipe arranged in a straight line, and the amount of strain of the bent pipe while the liquid mixed with solid foreign matters passes through the bent pipe and is discharged from the outflow pipe. In a mass flow meter equipped with a measurement mode that detects mass and calculates the mass of the liquid from this strain amount,
Separately from the measurement mode, an input unit for selecting the detection mode is provided, and the density of fresh water is calculated from the natural frequency of the bent pipe when fresh water is supplied in the detection mode, and this density is stored as the density of fresh water stored in advance. In comparison, the cleaning apparatus is configured to supply the cleaning liquid from the inflow pipe when the difference between the two becomes a predetermined value or more.
JP2001390344A 2001-12-21 2001-12-21 Mass flow meter adhering matter detection device and cleaning device Expired - Fee Related JP4050900B2 (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7090212B2 (en) 2018-10-08 2022-06-23 マイクロ モーション インコーポレイテッド Vibration meter cleaning and detection of cleaning status
JP7601041B2 (en) 2022-03-24 2024-12-17 横河電機株式会社 Diagnostic device, diagnostic method, and diagnostic program

Families Citing this family (3)

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Publication number Priority date Publication date Assignee Title
US7421350B2 (en) 2004-06-22 2008-09-02 Micro Motinn, Inc. Meter electronics and method for detecting a residual material in a flow meter assembly
DE102009002941A1 (en) 2009-05-08 2010-11-11 Endress + Hauser Flowtec Ag Method for detecting a blockage in a Coriolis flowmeter
DE102022134790A1 (en) * 2022-12-23 2024-07-04 Endress+Hauser Flowtec Ag Procedure for cleaning a flow meter

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7090212B2 (en) 2018-10-08 2022-06-23 マイクロ モーション インコーポレイテッド Vibration meter cleaning and detection of cleaning status
JP7601041B2 (en) 2022-03-24 2024-12-17 横河電機株式会社 Diagnostic device, diagnostic method, and diagnostic program

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