JP4050427B2 - Copying device - Google Patents

Description

【００７８】
【数２】

従って、この実施形態では、各パラメータＲ、Ｓ、Ｐ、μを調整することにより、各バンプ９５をレベリングする際に、揺動体８５が位置ずれするのを防止することができる。
【００７９】
（第６実施形態）
この実施形態では、第３実施形態と異なる部分を中心に説明する。図１６，図１７に示すように、揺動体８５の下面には、円錐状の突部１００ａ，１００ｂ，１００ｃが３つ設けられている。各突部１００ａ〜１００ｃは、揺動体８５と一体的に形成されている。各突部１００ａ〜１００ｃは、先端側に向かう程細くなっている。又、各突部１００ａ〜１００ｃは、図１７に二点鎖線で示す仮想正三角形１０１の各頂点にそれぞれ配置されている。別の言い方をすれば、各突部１００ａ〜１００ｃは、吸着部としての真空引き通路８６を中心とする仮想の円周上に等間隔に配置されている。
【００８０】
前記真空引き通路８６の外端部には、円筒状の弾性体１０２が設けられている。そして、この弾性体１０２の先端部は、揺動体８５の下面と直交する方向に沿って突出されている。揺動体８５の下面に対する弾性体１０２の突出長さは、各突部１００ａ〜１００ｃの突出長さよりも若干長くなっている。具体的に、弾性体１０２の突出長さは０．５ｍｍ、各突部１００ａ〜１００ｃの突出長さは０．４ｍｍとなっている。又、本実施形態の弾性体１０２は、材質がニトリルゴム、硬度が６０゜となっている。これ以外にも、弾性体１０２を、Ｙ型又はＵ型パッキンに変更してもよい。半導体チップ１０３の吸着面の平面度が１〜１０μｍ程度であれば、突部１００ａ〜１００ｃの突出長さを１０μｍ程度にし、弾性体１０２を省略してもよい。
【００８１】
上記のように構成された第６実施形態における倣い装置１１を用いて対象物としての半導体チップ１０３を搬送するには次のように行う。なお、図１８は、上述した倣い動作を分かり易く説明するために、実際の半導体チップ１０３よりも誇張して描いてある。
【００８２】
図１８に示すように、ポート８３から真空引きされるエアの吸着力により、揺動体８５を多孔質材８１に吸着させた状態で、移動体８０を下降させる。移動体８０が半導体チップ１０３に接近したら、エア通路８３ａからのエアの吸引を停止する。これにより、各突部１００ａ〜１００ｃが半導体チップ１０３に当接する。このとき、半導体チップ１０３の上面（特定面）に段差（約１０〜１００μｍ）があっても、全ての突部１００ａ〜１００ｃは半導体チップ１０３に当接される。
【００８３】
その後、第３実施形態で説明したように、多孔質材８１の曲面から揺動体８５に向けて加圧エアが噴出され、揺動体８５の下面（当接面）は半導体チップ１０３の上面に沿って傾く。そして、揺動体８５が半導体チップ１０３に対し平行となるように倣う。
【００８４】
倣い動作が終了した後は、エア通路８３ａへの加圧エアの供給が停止されると同時に、ポート８３からエア通路８３を介してエアが真空引きされる。これにより、揺動体８５が多孔質材８１に吸着される。それとともに、真空引き通路８２，８６からエアが真空引きされ、揺動体８５に半導体チップ１０３が吸着される。このとき、弾性体１０２の先端面は、半導体チップ１０３の上面に密接されている。そのため、弾性体１０２の外部から真空引き通路８２内にエアが入り込むことはない。よって、半導体チップ１０３を確実に吸着することが可能になり、半導体チップ１０３の上面が各突部１００ａ〜１００ｃから離れることはない。この状態で倣い装置１１を上昇させて所定の位置に搬送する。
【００８５】
従って、この実施形態によれば以下のような効果を得ることができる。
（１） 揺動体８５の下面には、半導体チップ１０３の上面に当接する３つの突部１００ａ〜１００ｃが設けられている。そのため、半導体チップ１０３の上面に段差があっても、全ての突部１００ａ〜１００ｃを半導体チップ１０３に当接させることができる。従って、半導体チップ１０３を吸着する時に、揺動体８５に対して、半導体チップ１０３が動いて位置ずれしたりすることはない。この結果、高精度な倣いを行うことができるとともに、半導体チップ１０３が傷つくのを防止することができる。
【００８６】
（２） 突部１００ａ〜１００ｃは先端が丸い円錐状に形成されているため、半導体チップ１０３に対して突部１００ａ〜１００ｃを３箇所で点接触させることができる。そのため、半導体チップ１０３に対する突部１００ａ〜１００ｃの接触面積を極力小さくすることができる。従って、全ての突部１００ａ〜１００ｃを半導体チップ１０３に確実に当接させることができる。
【００８７】
（３） 揺動体８５に形成された真空引き通路８６には、弾性体１０２が設けられている。そのため、揺動体８５に半導体チップ１０３を吸着させる際に、真空引き通路８６の先端が、弾性体１０２を介して半導体チップ１０３の上面に密接する。これにより、真空引き通路８６からエアを吸引する際に、揺動体８５と半導体チップ１０３との間からエアが真空引き通路８６内に入り込まない。よって、吸着力を高めることができ、揺動体８５の下面から半導体チップ１０３が落下するのを確実に防止することができる。又、弱い吸引力でも半導体チップ１０３を吸着することができるので、半導体チップ１０３の吸着効率を向上することができる。更に、弾性体１０２は軟質であるため、同弾性体１０２が半導体チップ１０３に接触しても、半導体チップ１０３に傷が付くのを防止できる。
【００８８】
なお、本発明の各実施形態は以下のように変更してもよい。
・ 第１実施形態の別例として、ボール２２を球状以外にも、例えば、半球状に変更してもよい。又、第１〜第５実施形態の別例として、ボール２２及び揺動体８５を円柱状にすることで球面をなくし、倣い方向を規制するようにしてもよい。
【００８９】
・ 第１実施形態の別例として、ピストン５０を加圧エアの圧力により駆動させる以外に、電動モータの回転力により上下方向に駆動させるようにしてもよい。
【００９０】
・ 第１実施形態の別例として、内部に球状の中空部を有する多孔質材１７を設け、この多孔質材１７内にボール２２を収容してもよい。そして、多孔質材１７の内面からボール２２を表面に向けて加圧エアを噴出し、多孔質材１７とボール２２との間を非接触状態にする。この構成によれば、倣い精度をよりいっそう向上することができる。
【００９１】
・ 第１実施形態の別例として、ピストン３６を上部ストロークエンドに復帰させるための圧縮コイルスプリング４４を回り止め機構Ａから省略してもよい。その代わりに、流体排出ポート４０から加圧エアを供給することにより、ピストン３６を上部ストロークエンドに移動させるようにしてもよい。
【００９２】
・ 第４実施形態の別例として、倣い装置１１の上下向きを反対にし、移動体８０に吸着ホルダ９２を設け、エアの吸引力により吸着ホルダ９２に対象物８７を吸着するように構成してもよい。
【００９３】
・ 第４実施形態の別例として、多孔質材８１を移動体８０の凹部８０ａと同等の大きさに形成し、凹部８０ａに多孔質材８１をはめ込んでもよい。この構成にすれば、真空引きポート９１を介してエアを吸引すると、エアは多孔質材８１を介して吸引される。このため、揺動体８５に対するエアの吸引力は均一なものとなる。従って、多孔質材８１から揺動体８５を離そうそする力と、多孔質材８１に揺動体８５を引き寄せようとする力とが釣り合いやすくなり、多孔質材８１と揺動体８５との非接触な状態を安定させることができる。
【００９４】
・ 第４実施形態の別例として、倣い動作を行う際（図１０（ｂ）の状態）において、吸着ホルダ９２から加圧エアを吹き付けた状態で、倣い動作を行ってもよい。この場合、吸着ホルダ９２の先端開口部には多孔質材を設けたり、又は吸着ホルダ９２の先端開口部を絞り形状にするのが一般的である。このようにすれば、吸着ホルダ９２と対象物８７との間に加圧エアによるエア膜（１０〜２０μｍ）を形成でき、対象物８７に対して吸着ホルダ９２を接触させずに倣い動作を行うことができる。従って、対象物８７の表面に凹凸があっても、対象物８７の表面に沿って吸着ホルダ９２を確実かつなめらかに滑らせることができる。又、対象物８７に吸着ホルダ９２が接触しないので、対象物８７が傷付くのを防止できる。
【００９５】
・ 第６実施形態の別例として、突部１００ａ〜１００ｃの形状を、先端が丸い四角錐状に形成してもよい。又、突部１００ａ〜１００ｃの先端部の形状を先細りではなく、球状にしてもよい。対象物に点接触し、かつその表面に対して滑らかに動く形状であれば、突部１００ａ〜１００ｃを任意の形状に変更してもよい。
【００９６】
・ 第６実施形態の別例として、突部１００ａ〜１００ｃは、仮想正三角形１０１の頂点でなく、例えば二等辺三角形や、それ以外の不定形な三角形の頂点に配置してもよい。
【００９７】
・ 第６実施形態の別例として、半導体チップ１０３の吸着力を十分に確保できる場合は、弾性体１０２を省略してもよい。又、図１９に示すように、弾性体１０２の代わりに弾性を有するＯリング１０４を使用してもよい。このようにすれば、汎用性の高い部材を用いることができるので、製造コストの低減を図ることができる。
【００９８】
次に、特許請求の範囲に記載された技術的思想のほかに、前述した実施形態によって把握される技術的思想をその効果とともに以下に列挙する。
（１） 前記固定手段は、前記第１及び第２の部材同士を押圧する押圧位置と、前記第１及び第２の部材同士の押圧を解除する押圧解除位置との間を移動可能な可動部材から構成され、この可動部材が押圧位置に移動した際に、一方の部材が他方の部材に対して押圧されることを特徴とする倣い装置。この構成によれば、前記第１及び第２の部材のうちいずれか一方の部材を倣わせた後に、可動部材が押圧解除位置から押圧位置に移動する。この移動により、一方の部材が他方の部材に対して押圧されて、両部材は相対的に回動しなくなる。従って、簡単な構成にも拘わらず、第１又は第２の部材を倣わせた状態に保持することができる。
【００９９】
（２） 前記固定手段は、前記多孔質材を介してエアを吸引することにより、前記第１及び第２の部材のうち一方の部材が他方の部材を押圧するものであることを特徴とする倣い装置。この構成によれば、前記第１及び第２の部材のうちいずれか一方の部材を倣わせた後に、多孔質材を介してエアが吸引される。すると、両部材のうち一方の部材が他方の部材を押圧し、両部材は相対的に回動しなくなる。従って、簡単な構成にも拘わらず、両部材を倣わせた状態に保持することができる。
【０１００】
（３） 前記可動部材は真空引きにより前記対象物を吸着するためのエア通路を有していることを特徴とする倣い装置。この構成によれば、可動部材を利用してエア通路が形成されているため、倣い装置の構成を簡単にすることができる。
【０１０１】
（４） 前記第２の部材は、球体と、その球体の径方向に沿って延びる長尺状の吸着ホルダとを備え、前記球体の一部はその下側に配置された第１の部材に係合されていることを特徴とする倣い装置。この構成によれば、第１の部材から球体に向けて加圧エアを噴き上げることにより、球体を浮き上がらせることができる。このため、例えば球体の上部に第１の部材を配置する場合のように、加圧エアの噴出と、エアの吸引とを同時に行う必要がない。この結果、倣い装置の構成を簡単にすることができる。
【０１０２】
（５） 前記吸着ホルダにはその軸線を中心にして前記球体が回動するのを阻止する回り止め手段が設けられていることを特徴とする倣い装置。
【０１０３】
（６） 前記回り止め手段は、前記吸着ホルダの外周面に設けられて透孔（３２）を有するフランジ（３０ａ）、そのフランジの透孔と対向して配置され往復移動可能な可動ピン（４１）とから構成されていることを特徴とする倣い装置。
【０１０４】
（７） 前記第１の部材はエアを通過させる多孔質材を備え、その多孔質材に前記凹状の曲面が形成され、前記多孔質材の周縁部にはエアを吸引する吸引部（吸引用環状溝９０）が設けられている倣い装置。この構成によれば、加圧エアが多孔質材を介して第２の部材に向けて噴出されることにより、前記第１の部材から第２の部材が離れる。それとともに、多孔質材の周縁部においてエアが吸引されることにより、第１の部材に第２の部材が引き寄せられる。このように、第１の部材に対して第２の部材を離そうとする力と引き寄せようとする力とが釣り合うことにより、第１及び第２の部材間には所定の隙間が形成される。従って、倣い精度をよりいっそう高めることができる。
【０１０５】
（８） 前記多孔質材は合成樹脂からなることを特徴とする倣い装置。この構成によれば、多孔質材の軽量化を図ることができるとともに、低コストで簡単に製造することができる。
【０１０６】
（９） 前記多孔質材は軽量金属からなることを特徴とする倣い装置。この構成によれば、多孔質材の軽量化を図ることができるとともに、低コストで簡単に製造することができる。
【０１０７】
（１０） 前記第２の部材には、対象物を吸着する吸着部材（吸着ホルダ２５，９２）を設け、吸着部材にはエア通路を設け、吸着部材にワークを吸着させる前に、前記エア通路を介して加圧エアを吹き付けながら倣い動作を行うようにした倣い装置。この構成によれば、吸着部材と対象物との間に加圧エアによるエア膜を形成でき、対象物に対して吸着部材を接触させずに倣い動作を行うことができる。
【０１０８】
（１１） 前記第２の部材は、その一部に前記当接面を有し、各突部は第２の部材と一体的に成形されていることを特徴とする倣い装置。
この構成にすれば、各突部を第２の部材に組み付けるという製造工数を省略することができる。
【０１０９】
（１２） 各突部は、前記当接面に仮設された仮想正三角形の頂点に配置されていることを特徴とする倣い装置。
（１３） 前記弾性体は円筒状に形成されるとともに、前記当接面に対する弾性体の突出長さは、前記各突部の突出長さと同じであることを特徴とする倣い装置。この構成にすれば、対象物に弾性体を極端に変形させることがないので、対象物が破損するのを確実に防止できる。
【０１１０】
【発明の効果】
以上詳述したように、 請求項１に記載の発明によれば、第１の部材と第２の部材とを非接触にすることにより、両部材の摺動抵抗をほとんど無くすことができるため、高精度な倣いを行うことができる。
【０１１１】
また、加圧エアを均等な圧力でもって噴出することができるため、よりいっそう高精度な倣いを行うことができる。
さらに、倣い動作が完了した後に第１及び第２の部材同士を互いに固定して、両部材の相対回動を阻止することができるため、第１又は第２の部材を倣わせた状態に保持することができる。
【０１１２】
請求項２及び３に記載の発明によれば、倣い動作が完了した後に、当接面に対して対象物が位置ずれするのを防止できる。
請求項４に記載の発明によれば、全ての突部を対象物に対して確実に当接させることができる。
【図面の簡単な説明】
【図１】第１実施形態の倣い装置の断面図。
【図２】その倣い装置の右側面図。
【図３】倣い装置の左側面図。
【図４】倣い装置の底面図。
【図５】倣い装置を簡略して示す動作説明図。
【図６】吸着ホルダが倣った状態を示す説明図。
【図７】第２実施形態の倣い装置の断面図。
【図８】第３実施形態の倣い装置の倣い動作を示す図。
【図９】図８に続いて倣い装置の動作を示す図。
【図１０】第４実施形態の倣い装置の倣い動作を示す図。
【図１１】図１０に続いて倣い装置の動作を示す図。
【図１２】第５実施形態の倣い装置の動作を示す図。
【図１３】ＩＣチップの説明図。
【図１４】プレス治具にてＩＣチップをプレスするときの押圧力を示すグラフ。
【図１５】数式のパラメータを説明するための図。
【図１６】第６実施形態の倣い装置の断面図。
【図１７】揺動体の下面を示す見上げ図。
【図１８】倣い装置の倣い動作を示す図。
【図１９】第６実施形態の別例を示す倣い装置の断面図。
【符号の説明】
１５…ボール受け（第１の部材）、１７…多孔質材（第１の部材）、２２…ボール（第２の部材）、２５…吸着ホルダ（第２の部材）、５０…ピストン（固定手段）、５６…押圧リング（固定手段）、６１…半導体チップ（対象物）、８０…移動体（第１の部材）、８１…多孔質材（第１の部材）、８５…揺動体（第２の部材）、１００ａ〜１００ｃ…突部、８６…真空引き通路（吸着部）、１０２…弾性体。[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a copying apparatus used for a chip mounter for conveying a diced semiconductor chip onto a lead frame of a die bonding apparatus, for example.
[0002]
[Prior art]
Conventionally, as this type of copying apparatus, a copying ball is rotatably supported by a ball receiver having a concave curved surface. The copying ball is provided with an adsorbing member that adsorbs the diced semiconductor chip. Then, when the tip surface of the adsorbing member comes into contact with the surface of the semiconductor chip, the copying ball is rotated according to the parallelism of the semiconductor chip. By this rotation, the tip surface of the adsorption member tilts in accordance with the parallelism of the surface of the semiconductor chip. By this tilting, the tip surface of the adsorption member becomes parallel to the surface of the semiconductor chip.
[0003]
[Problems to be solved by the invention]
However, in the conventional copying apparatus, the ball receiver and the copying ball are always in mechanical contact. For this reason, when the copying operation is performed, there is a problem that the sliding resistance of the copying ball with respect to the ball receiver adversely affects the copying accuracy.
[0004]
The present invention has been made in view of the above problems, and an object thereof is to provide a copying apparatus capable of performing high-precision copying.
[0005]
[Means for Solving the Problems]
  In order to solve the above problems, in the invention according to claim 1, a concave curved surface is formed.A porous material that forms a through hole that opens upward and downwardsA convex curved surface with respect to the first member havingA ball formed downward and configured to be supported by the porous material, and a suction holder that protrudes downward from the ball and is loosely inserted into the through hole.The second member is provided so as to be rotatable relative to the specific surface of the object.Suction holderIn the copying apparatus in which the contact surface is made to be parallel to the specific surface of the object by contactingFrom the porous material toward the surface of the ball, the first member and the second memberPressurized between membersairBy spoutingA first member and the second member;To be non-contact,When the copying operation of the second member is completed,A first member and the second member;The fixing means is provided so as to be relatively non-rotatable, and the fixing means is a piston that is located above the second member and is slidable in the vertical direction. When moved, the ball is pressed against the porous material side by the piston.A first member and the second member;The gist of this is to fix it so that it cannot rotate relative to each other.
[0008]
  Claim2In the invention described in claim1In the copying apparatus described above, the gist is that the abutting surface is provided with three protrusions that abut against a specific surface of the object.
In the invention according to claim 3, the second member having the convex curved surface is provided so as to be rotatable relative to the first member having the concave curved surface, and the two members are provided on the specific surface of the object. In the copying apparatus in which any one of them is caused to abut so that the abutting surface thereof is parallel to the specific surface of the object, a pressurized fluid is interposed between the two members. The gist of the invention is that the two members are brought into non-contact with each other, and that the contact surface is provided with three protrusions that contact the specific surface of the object.
[0009]
  Claim4In the invention described in claim2 or 3In the copying apparatus described in (1), the gist is that each of the protrusions is tapered..
[0010]
The “action” of the present invention will be described below.
According to the first aspect of the present invention, since the pressurized fluid is ejected between the first member and the second member, the static pressure caused by the pressurized fluid acts on the interface between the two members. The members are not in contact with each other. For this reason, sliding resistance hardly acts between both members. Therefore, it is possible to make one of the contact surfaces of both members parallel to the specific surface of the object, and to perform high-precision copying.
[0011]
  AlsoThe pressurized air is jetted onto the surface of the second member through the porous material provided on the first member. At the time of this ejection, pressurized air is ejected from the entire porous material with a substantially uniform pressure. Therefore, it is possible to stabilize the non-contact state with the first and second members.
[0012]
  furtherWhen the copying operation is completed, the first member and the second member are fixed so as not to be relatively rotatable by the fixing means. For this reason, it becomes possible to hold | maintain the state which followed the 1st or 2nd member.
[0013]
  Claim2 and 3According to the above-described invention, when performing copying, even if the specific surface of the object is undulated, all the protrusions abut on the object. For this reason, the object moves when the object is attracted to the contact surface by, for example, the suction force of air in a state where one of the contact surfaces is parallel to the specific surface of the object. There is no.
[0014]
  Claim4According to the invention described in (1), since each protrusion is brought into point contact with the object, the contact area between the protrusion and the specific surface of the object is further reduced. Accordingly, it is possible to reliably bring all the protrusions into contact with the object.
[0016]
DETAILED DESCRIPTION OF THE INVENTION
(First embodiment)
Hereinafter, a first embodiment embodying the present invention will be described in detail with reference to the drawings.
[0017]
As shown in FIGS. 1 to 4, the copying apparatus 11 is provided in a transfer unit of a chip mounter (not shown) that transfers a diced semiconductor chip to a die bonding apparatus (not shown). The copying apparatus 11 includes a container 13 having a space portion 13a therein. The container 13 includes a casing 14 having a reverse concave shape in cross section, and a ball receiver 15 as a first member attached to the lower portion thereof. The space 13a is formed by concave spaces formed in the casing 14 and the ball receiver 15, respectively.
[0018]
As shown in FIG. 1, a concave portion 15b is formed in the ball receiver 15, and a porous material 17 having a concave and hemispherical curved surface is provided in the concave portion 15b. The porous material 17 is attached to the ball receiver 15 using an adhesive. Both upper and lower end surfaces of the porous material 17 are opened, and the diameter of the upper opening is larger than the diameter of the lower opening. In this embodiment, the first member is composed of the ball receiver 15 and the porous material 17.
[0019]
As a material for forming the porous material 17, for example, a metal material such as sintered aluminum, sintered copper, or sintered stainless steel can be used. In addition, synthetic resin materials such as sintered trifluoride resin, sintered tetrafluoride resin, sintered nylon resin, sintered polyacetal resin, sintered carbon, sintered ceramics, and the like can be used.
[0020]
A fluid supply port 19 is formed on the right side surface of the ball receiver 15, and this port 19 is connected to a pressure supply source (not shown). The fluid supply port 19 communicates with the annular groove 20 through a passage 19a. Therefore, when pressurized air as pressurized fluid is supplied from a pressure supply source (not shown) via the fluid supply port 19 and the passage 19a, the pressurized air is applied to the outer peripheral surface of the porous material 17 via the annular groove 20. To reach. The pressurized air is ejected from a curved surface formed on the inner peripheral surface of the porous material 17.
[0021]
An air supply port 16 is formed on the right side surface of the casing 14, and the air supply port 16 is connected to a pressure supply source (not shown). The air supply port 16 communicates with the space 13a through a passage 16a. Then, as described above, the pressurized air ejected from the porous material 17 is discharged to the outside from the relief port of the pressurizing pressure reducing valve (not shown) through the space 13a, the passage 16a, and the air supply port 16.
[0022]
As shown in FIG. 1, a support member 21 is provided at the lower end of the ball receiver 15. An upper communication hole 23 and a lower communication hole 24 extending in the vertical direction are formed in the central part of the ball receiver 15 and the central part of the support member 21, and the axes of both the communication holes 23 and 24 coincide with each other. The space 13 a of the container 13 is communicated to the outside through both communication holes 23 and 24.
[0023]
A ball 22 having a convex curved surface on the outer peripheral surface is accommodated in the space 13 a of the container 13, and the lower half of the ball 22 can be supported by the porous material 17. Then, as described above, the static pressure generated by the pressurized air ejected from the porous material 17 acts on the interface, so that the ball 22 rises and is not in contact with the porous material 17. At this time, a gap of about several μm is formed between the curved surface (surface) of the ball 22 and the curved surface (inner peripheral surface) of the porous material 17.
[0024]
The ball 22 is provided with a long cylindrical suction holder 25 extending along the radial direction (vertical direction), and the inside thereof serves as an air passage 25b for evacuation. The suction holder 25 is loosely inserted into the communication holes 23 and 24, and a lower portion thereof protrudes from the lower end surface of the support member 21 to the outside. A screw portion 25 a is formed on the upper portion of the suction holder 25, and the screw portion 25 a is screwed into a female screw portion formed inside the ball 22. An air passage hole 26 is formed along the radial direction of the ball 22 on the upper extension line of the screwed portion. A check valve 27 is provided in the middle of the air passage hole 26. The check valve 27 prevents the air sucked upward from the outer end portion of the air passage hole 26 from flowing back downward (on the suction holder 25 side). In this embodiment, the ball 22 and the suction holder 25 constitute a second member.
[0025]
As shown in FIGS. 1 to 4, a detent member 30 is fitted into the outer end of the suction holder 25, and the detent member 30 is attached by a plurality of screws 31. A flange portion 30a is formed in the upper portion of the rotation preventing member 30, and a pair of through holes 32 are formed in the flange portion 30a.
[0026]
The support member 21 includes a case portion 33 and a lid portion 34 attached to the lower portion thereof. Two housing parts (only one is shown in FIG. 1) 35 opened on the lower surface are formed in the case part 33, and the lower opening of each housing part 35 is closed by the lid part 34. ing.
[0027]
Each of the accommodating portions 35 accommodates a detent mechanism A as a detent means. Next, the detent mechanism A will be described. A piston 36 is slidably accommodated in the accommodating portion 35 along the vertical direction. An annular mounting groove 37 is formed on the outer peripheral surface of the piston 36, and a piston packing 37 a is attached to the mounting groove 37. The outer peripheral surface of the piston packing 37 a functions as a sliding surface that slides with the inner peripheral surface of the housing portion 35.
[0028]
The internal space of each accommodating portion 35 is partitioned into an upper chamber 38a in which the pressure of pressurized air acts due to the presence of the piston 36 and a lower chamber 38b in which no pressure acts. A fluid supply port 39 is formed at the upper right side of the case 33, and the fluid supply port 39 communicates with the upper chamber 38a through a passage 39a. Then, pressurized air is supplied from the pressure supply source (not shown) into the upper chamber 38a through the fluid supply port 39 and the passage 39a. A fluid discharge port 40 is formed at the lower right side of the case portion 33. The fluid discharge port 40 communicates with the lower chamber 38b through a passage 40a.
[0029]
On the axis of each piston 35, a movable pin 41 extending in the vertical direction is provided. The upper end portion of the movable pin 41 protrudes upward from the upper end surface of the piston 35, and the protruding portion is connected to the piston 35 by a connector 42. The lower end portion of the movable pin 41 is penetrated by the lid portion 34 and protrudes outside the support member 21.
[0030]
When the piston 36 is at the upper stroke end, the small diameter portion 41 a formed at the lower end of the movable pin 41 is loosely inserted into the through hole 32 of the rotation preventing member 30. When the piston 36 is at the lower stroke end, the large diameter portion 41 b of the movable pin 41 is engaged with the through hole 32 of the rotation preventing member 30. This engagement prevents the ball 22 from rotating around the axis of the suction holder 25. A very small gap is formed between the large diameter portion 42 and the through hole 32. Therefore, the anti-rotation mechanism A of this embodiment performs simple anti-rotation.
[0031]
A guide cylinder 43 facing the piston 36 is accommodated in the accommodating portion 35, and the guide cylinder 43 is attached and fixed to the upper surface of the lid portion 34. The movable pin 41 is slidably inserted into the guide cylinder 43 so that the vertical movement of the movable pin 41 is guided.
[0032]
A compression coil spring 44 is externally attached to the movable pin 41. An upper end portion of the compression coil spring 44 is fitted into the piston 36, and a lower end portion is fitted into the guide tube 43. The piston 36 is always urged upward by the compression coil spring 44.
[0033]
As shown in FIG. 1, a piston 50 as a movable member is accommodated in the space 13a of the container 13 so as to be slidable in the vertical direction. An annular mounting groove 53 is formed on the outer peripheral surface of the piston 50, and a piston packing 54 is mounted in the mounting groove 53. The outer peripheral surface of the piston packing 54 functions as a sliding surface that slides with the inner peripheral surface of the container 13.
[0034]
The space 13a of the container 13 is partitioned into an upper chamber 51a in which the pressure of pressurized air acts due to the presence of the piston 50 and a lower chamber 51b in which no pressure acts. A fluid supply port 52 is formed on the right side surface of the casing 14, and the fluid supply port 52 communicates with the upper chamber 51a through a passage 52a. Then, pressurized air is supplied into the upper chamber 51a from a pressure supply source (not shown) through the fluid supply port 52 and the passage 52a. The air supply port 16 communicates with the lower chamber 51b through a passage 16a.
[0035]
A mounting recess 55 is formed on the lower surface of the piston 50, and a pressing ring 56 is mounted therein. The lower part of the pressing ring 56 protrudes downward from the lower surface of the piston 50. The lower end surface of the pressing ring 56 is formed in an arc shape according to the outer shape of the ball 22. Therefore, when the piston 50 moves to the lower stroke end, the lower end surface of the pressing ring 56 presses the ball 22 toward the porous material 17 side. In this pressed state, the rotation of the ball 22 is fixed with respect to the porous material 17. In this embodiment, the piston 50 and the pressing ring 56 constitute fixing means. The pressing ring 56 is made of a rubber material. This is to provide a function as a buffer member in order to reduce an impact when the pressing ring 56 is pressed against the ball 22.
[0036]
A compression coil spring 58 serving as an elastic member whose diameter decreases toward the top is housed in the housing 13. The lower end of the compression coil spring 58 is supported by a step portion 15 a formed on the inner surface of the ball receiver 15, and the upper end is extrapolated to the protruding portion of the pressing ring 56. The piston 50 is always urged upward by the elastic force obtained from the compression coil spring 58.
[0037]
A piston rod 59 is provided on the upper surface of the piston 50 so as to extend along the vertical direction. The outer end of the piston rod 59 is passed through the upper portion of the casing 14. A seal member (not shown) is provided between the piston rod 59 and the casing 14 so that the air in the pressure acting chamber 51 does not leak to the outside.
[0038]
At the center of the piston 50 and the piston rod 59, a vacuum evacuation passage 60 extending along the axial direction thereof is formed. The inner end of the evacuation passage 60 is opened inside the pressing ring 56, and the outer end is connected to a suction pump (not shown). Then, when air is sucked from the evacuation passage 60 in a state where the pressing ring 56 is pressed by the ball 22b, the semiconductor chip 61 that is the object is moved through the air passage hole 26 and the air passage 25b of the suction holder 25. It can be sucked.
[0039]
The semiconductor chip 61 is transported using the copying apparatus 11 configured as described above as follows.
That is, before adsorbing the semiconductor chip 61, as shown in FIG. 5A, the piston 50 is disposed at the upper stroke end. The piston 36 of the rotation stop mechanism A is disposed at the upper stroke end. In this state, when pressurized air is supplied from the fluid supply port 19, the pressurized air is ejected from the entire curved surface of the porous material 17 toward the ball 22. Due to the pressure generated by the injection of the pressurized air, the ball 22 rises from the porous material 17 and the porous material 17 and the ball 22 are not in contact with each other. Therefore, the suction holder 25 swings around the center of the ball 22 as the swing center.
[0040]
As shown in FIG. 5B, the copying apparatus 11 is lowered and the tip surface of the suction holder 25 comes into contact with the upper surface of the semiconductor chip 61. Then, as shown in FIG. 6, when the upper surface (specific surface) of the semiconductor chip 61 is inclined with respect to the reference surface, the suction holder 25 is tilted so as to follow the inclination angle. Thereby, the front end surface (contact surface) of the suction holder 25 is parallel to the semiconductor chip 61, and the copying operation of the suction holder 25 is completed. In FIG. 6, the gap between the semiconductor chip 61 and the porous material 17 and the ball 22 is exaggerated than the actual one in order to easily understand the copying operation of the suction holder 25.
[0041]
Further, during the copying operation, air is supplied into the space portion 13a via the air supply port 16 in order to prevent a reaction force from being generated from the semiconductor chip 61 and the ball 22 to rise significantly. The pressure of the pressurized air supplied from the air supply port 16 is such that the flying ball 22 does not come into contact with the porous material 17 or does not hinder the movement of the piston 50. The pressure at each part during the copying operation is as follows. That is, the pressure of the pressurized air ejected from the porous material 17 is 4 kg / cm <2>. A pressure of 4 kg / cm @ 2 is applied to the piston 50, and a pressure of 0.5 to 1.0 kg / cm @ 2 is applied to the space 13a.
[0042]
After the copying operation is completed, as shown in FIG. 6C, the supply of pressurized air to the fluid supply port 19 is stopped and the ejection of pressurized air from the curved surface of the porous material 17 is stopped. . Then, since the ball 22 is not lifted, it is engaged and supported by the porous material 17. At the same time, pressurized air is supplied from the fluid supply port 52 to the pressure working chamber 51. Then, the piston 50 moves from the upper stroke end to the lower stroke end against the elastic force of the compression coil spring 58. By this movement, the lower surface of the pressing ring 56 is pressed against the ball 22, and the ball 22 is pressed against the curved surface of the porous material 17. Accordingly, since the ball 22 is fixed so as not to rotate, the suction holder 25 is held in a state of following.
[0043]
Further, as shown in FIG. 5C, pressurized air is supplied from the fluid supply port 39 into the pressure acting chamber 38. Then, each piston 36 moves from the upper stroke end to the lower stroke end against the elastic force of the compression coil spring 44. At this time, the air in the casing 14 is discharged to the outside through the passage 40 a and the fluid discharge port 40. As the piston 36 moves, each movable pin 41 is moved downward, and each large-diameter portion 41 b is engaged in the through-hole 32 of the detent member 30. As a result, the rotation of the anti-rotation member 30 is restricted, so that the suction holder 25 does not rotate around its axis.
[0044]
As shown in FIG. 6D, in a state where the pressing ring 56 is in pressure contact with the ball 22, the evacuation passage 60, the air passage hole 26, and the air passage 25b of the suction holder 25 are communicated with each other. In this state, when the air is evacuated through the passages 60, 26, 25 b, the semiconductor chip 61 is adsorbed on the tip surface of the adsorption holder 25. At the time of this suction, the air evacuated by the function of the check valve 27 does not flow backward to the suction holder 25 side. For this reason, the semiconductor chip 61 is reliably adsorbed. Then, the copying apparatus 11 is raised and conveyed to the substrate 62 to which the semiconductor chip 61 is bonded.
[0045]
Therefore, according to this embodiment, the following effects can be obtained.
(1) By blowing pressurized air between the porous material 17 constituting the part of the ball receiver 15 and the ball 22, a static pressure is generated to lift the ball 22 from the porous material 17, The porous material 17 and the balls 22 can be made non-contact with each other. For this reason, sliding resistance hardly acts between the porous material 17 and the ball 22. Therefore, the front end surface of the suction holder 25 attached to the ball 22 can be made parallel to the upper surface of the semiconductor chip 61, and high-precision copying can be performed.
[0046]
(2) The ball receiver 15 includes a porous material 17 that can eject pressurized air toward the surface of the ball 22. For this reason, when the pressurized air is ejected, the pressurized air is ejected from the entire porous material 17 with a substantially uniform pressure. Therefore, since the flying of the ball 22 can be stabilized, copying with higher accuracy can be performed. At the same time, since pressurized air is used, a drip-proof structure may not be used unlike the case of using liquid, so that the configuration of the copying apparatus 11 can be simplified.
[0047]
(3) When the copying operation is completed, the piston 50 moves from the upper stroke end to the lower stroke end, so that the pressing ring 56 presses the ball 22 against the porous material 17. For this reason, the ball 22 can be fixed so as not to rotate relative to the porous material 17, and the suction holder 25 can be held in a copied state.
[0048]
(4) A piston 50 is provided in the housing 13 so as to be movable up and down. The piston 50 is movable between a lower stroke end (pressing position) for pressing the ball 22 against the porous material 17 and an upper stroke end (press releasing position) for releasing the pressing. Therefore, in spite of a simple configuration in which the piston 50 is reciprocated up and down, the rotation of the ball 22 with respect to the porous material 17 is prevented, and the suction holder 25 is reliably held in a copied state. Can do.
[0049]
(5) The support member 21 is provided with a detent mechanism A. Therefore, after the copying operation is completed, the large diameter portion 41b of each movable pin 41 is engaged with the through hole 32 of the rotation preventing member 30, so that the suction holder 25 is more reliably rotated around its axis. Can be prevented.
[0050]
(Second Embodiment)
Next, a second embodiment of the present invention will be described with a focus on differences from the first embodiment.
[0051]
In the second embodiment, as shown in FIG. 7, the piston rod 59, the vacuum passage 60, and the check valve 27 are omitted. Instead, a vacuum evacuation port 70 is provided on the right side surface of the case portion 33 in the support member 21, and the port 70 communicates with the upper communication hole 23 via a passage 70a. A vent hole 71 is formed at a position substantially corresponding to the passage 70 a on the outer surface of the suction holder 25.
[0052]
According to this configuration, when air is evacuated from the evacuation port 70 via the passage 70 a, the vent hole 71, and the air passage 25 b, the semiconductor chip 61 is adsorbed to the tip surface of the adsorption holder 25. Therefore, also in the second embodiment, substantially the same effect as that of the first embodiment described above can be exhibited. In the second embodiment, the suction holder 25 is evacuated from the right side surface of the case portion 33 of the support member 21. Thereby, since the piston rod 59 shown in 1st Embodiment can be abbreviate | omitted, the member made to protrude from the upper surface of the container 13 can be eliminated. Accordingly, the vertical dimension of the copying apparatus 11 can be shortened.
[0053]
(Third embodiment)
Next, a third embodiment of the present invention will be described below.
As shown in FIG. 8A, the copying apparatus 11 of this embodiment includes a moving body 80 having an inverted T-shaped cross section, and a recess 80a is formed on the lower surface thereof. The concave portion 80a is provided with a porous material 81 having a concave and hemispherical curved surface on the lower surface. A curved surface is also formed on the upper surface of the porous material 81, but the “curved surface of the porous material 81” described in the following description refers to a material on the lower surface of the porous material 81. The porous material 81 is attached to the moving body 80 using an adhesive. In this embodiment, the first member includes the moving body 80 and the porous material 81.
[0054]
A evacuation passage 82 extending in the vertical direction is formed at the center of the moving body 80 and the porous material 81. The evacuation passage 82 is connected to a suction pump (not shown). A port 83 is formed on the right side surface of the moving body 80, and this port 83 is connected to a pressure supply source and a suction pump (not shown). The port 83 communicates with an annular groove 84 formed in the inner back surface of the recess 80a of the moving body 80 via an air passage 83a. Therefore, when pressurized air as a pressurized fluid is supplied from a pressure supply source (not shown) via the port 83 and the air passage 83a, the pressurized air is ejected from the curved surface of the porous material 81 via the annular groove 84. The When air is evacuated from a suction pump (not shown) through the port 83 and the air passage 83a, air near the curved surface of the porous material 81 is sucked.
[0055]
An oscillating body 85 as a second member having a hemispherical shape is provided below the moving body 80. A convex curved surface is formed on the upper surface of the rocking body 85, and the curvature radius of the curved surface is the same as the curvature radius of the curved surface of the porous material 81. Therefore, the curved surface of the rocking body 85 can come into contact with the curved surface of the porous material 81.
[0056]
Further, the oscillating body 85 is formed with a vacuum suction passage 86 having an inverted T-shaped cross section. The evacuation passage 86 can communicate with the evacuation passage 82 of the moving body 80. Then, in a state where the vacuum evacuation passages 82 and 86 are in communication with each other, the magnet (object) 87 used for the voice coil motor can be attracted by sucking air by suction air (not shown).
[0057]
In order to convey the magnet used for the voice coil motor using the copying apparatus 11 in this embodiment, the following is performed.
That is, before attracting the magnet 87, the curved surface of the oscillating body 85 is in contact with the curved surface of the porous material 81 through the port 83 and the air passage 83a as shown in FIG. Air is evacuated. Thereby, the oscillator 85 is adsorbed to the porous material 81. When the moving body 80 descends and approaches the magnet 87 in this state, the suction from the air passage 83a is stopped.
[0058]
Thereafter, as shown in FIG. 8B, when pressurized air is supplied from the port 83 through the air passage 83 a, the air is ejected from the curved surface of the porous material 81 toward the oscillating body 85. Then, the rocking body 85 is separated from the porous material 81 and is pressed against the upper surface (specific surface) of the magnet 87. At this time, since the lower surface (contact surface) of the oscillating body 85 is inclined along the upper surface of the magnet 87, the lower surface of the oscillating body 85 and the upper surface of the magnet 87 are parallel to each other. Note that FIG. 8 is exaggerated from the actual one in order to easily explain the above-described copying operation. Incidentally, the parallelism of the upper surface of the magnet 87 is 0 to 0.2 mm.
[0059]
After the copying operation is completed, as shown in FIG. 9A, the supply of pressurized air to the air passage 83a is stopped, and the ejection of pressurized air from the curved surface of the porous material 81 is stopped. Then, air is evacuated from the port 83 through the air passage 83, and the oscillating body 85 is adsorbed to the porous material 81. At the same time, air is evacuated from the evacuation passages 82 and 86, and the magnet 87 is attracted to the lower surface of the oscillator 85. By these adsorption, the curved surface of the rocking body 85 is pressed against the curved surface of the porous material 81. Therefore, the rocking body 85 is fixed in a non-rotatable manner and held in a copied state. In this state, the copying apparatus 11 is raised and conveyed to a predetermined position.
[0060]
Then, as shown in FIG. 9B, when the magnet 87 is conveyed to a predetermined position, the copying apparatus 11 is lowered. By this lowering, the positioning recess 87a formed on the lower surface of the magnet 87 is engaged with the bearing 88 of the voice coil motor. In this engagement, the positioning recess 87 a of the magnet 87 is not inclined with respect to the bearing 88, so that the positioning recess 87 a can be reliably engaged with the bearing 88. Further, since the center of the radius of curvature R of the oscillating body 85 is on the lower surface (contact surface) of the oscillating body 85, the transport distance does not change even if the angle of the contact surface is different.
[0061]
Therefore, according to this embodiment, the following effects can be obtained.
(1) By evacuating air from the port 83, the oscillator 85 is held in a state of copying. For this reason, unlike the first embodiment, it is possible to omit the piston 50 and the compression coil spring 58 that are necessary to hold the oscillator 85 in a state of copying. Further, the suction holder 25 shown in the first embodiment is omitted, and the magnet 87 can be directly attracted to the swinging body 85 corresponding to the ball 22 of the first embodiment by evacuation. Therefore, the mechanical configuration of the entire copying apparatus 11 can be simplified, and the copying apparatus 11 can be downsized accordingly.
[0062]
(2) The air passage 83a is used not only as a passage for sending pressurized air but also as a passage for evacuating air. Therefore, since the air passage can be reduced, the structure of the moving body 80 can be simplified.
[0063]
(Fourth embodiment)
Next, a fourth embodiment of the present invention will be described with a focus on differences from the third embodiment.
[0064]
Now, in this 4th Embodiment, as shown to Fig.10 (a), the porous material 81 is formed smaller than the recessed part 80a of the moving body 80. FIG. Thereby, a suction annular groove 90 as a suction portion is formed between the outer peripheral surface of the recess 80 a of the moving body 80 and the outer peripheral surface of the porous material 81. A evacuation port 91 is formed on the left side surface of the moving body 80, and a suction pump (not shown) is connected to the evacuation port 91. The vacuum port 91 is communicated with the suction annular groove 90 through an air passage 91a. Air is sucked from the suction pump through the vacuum port 91 and the air passage 91a. In this embodiment, a suction pump is not connected to the port 83, and only a pressure supply source is connected. That is, only pressurized air is supplied from the port 83.
[0065]
A long suction holder 92 that protrudes from the lower surface is provided at the center of the rocking body 85. An air passage 92 a extending along the axial direction is formed in the suction holder 92. The air passage 92a communicates with the evacuation passages 82 and 86. Therefore, when air is sucked from the evacuation passages 82 and 86, the magnet 87 can be attracted to the tip of the suction holder 92 by the suction force.
[0066]
In order to convey the magnet used for the voice coil motor using the copying apparatus 11 in this embodiment, the following is performed.
Before adsorbing the magnet 87, as shown in FIG. 10A, pressurized air is supplied from the port 83 through the air passage 83 a and is directed from the curved surface of the porous material 81 toward the center of the oscillator 85. Pressurized air is ejected. Thereby, the oscillator 85 is separated from the porous material 81. At the same time, air is sucked from the vacuuming port 91 through the air passage 91a, and the suction annular groove 90 becomes negative pressure. As a result, a suction force toward the porous material 81 acts on the peripheral portion of the swing body 85, and the swing body 85 is attracted to the moving body 80. Thus, the swinging body 85 is not in contact with the porous material 81 by the balance between the force that the swinging body 85 is separated from the porous material 81 and the force that the swinging body 85 is attracted to the porous material 81 side. Is supported so as to be swingable.
[0067]
Next, as shown in FIG. 10B, when the copying apparatus 11 descends and approaches the magnet 87, the front end surface of the attracting member 92 contacts the magnet 87. Then, when the upper surface of the magnet 87 is inclined, the suction holder 92 is tilted so as to follow the inclination angle. Thus, the tip surface of the suction holder 92 is copied so as to be parallel to the magnet 87. Note that, during this copying operation, the force that the oscillating body 85 moves away from the porous material 81 and the force that the oscillating body 85 is attracted toward the porous material 81 are always balanced.
[0068]
After the copying operation is completed, the supply of pressurized air to the port 83 is stopped and the ejection of pressurized air from the curved surface of the porous material 81 is stopped as shown in FIG. At the same time, air is evacuated from the port 83. At this time, vacuuming of air from the vacuuming port 91 is continued. Therefore, the force for separating the oscillating body 85 from the porous material 81 becomes zero, and only the force for attracting the oscillating body 85 to the porous material 81 side works. Thereby, the rocking body 85 is pressed to the porous material 81 side. Therefore, since the rocking body 85 is fixed so as not to rotate, the suction holder 92 is held in a copied state.
[0069]
Further, as shown in FIG. 11A, the oscillating body 85 is maintained in pressure contact with the suction holder 92, so that the evacuation passages 82 and 86 and the air passage 92a of the suction holder 92 are communicated with each other. Yes. In this state, when air is evacuated through the passages 82, 86, and 92 a, the magnet 87 is attracted to the tip surface of the adsorption holder 92. Then, as shown in FIG. 11B, when the copying apparatus 11 is raised and the magnet 87 is conveyed to a predetermined position, the copying apparatus 11 is lowered. And the positioning recessed part 87a formed in the lower surface of the magnet 87 is engaged with the bearing 88 of a voice coil motor. Further, since the center of the radius of curvature R of the oscillator 85 is on the lower surface (contact surface) of the suction holder 92, the transport distance does not change even if the angle of the contact surface is different.
[0070]
Therefore, in this embodiment, the movable body 80 is provided with a porous material 81 from which pressurized air is ejected toward the rocking body 85. Further, a suction annular groove 90 for sucking air is formed in the peripheral portion of the porous material 81. Therefore, the opposite force is exerted on the oscillating body 85 by simultaneously ejecting the pressurized air from the porous material 81 toward the oscillating body 85 and suctioning the pressurized air from the suction annular groove 90. be able to. Then, a balance between the force for separating the oscillating body 85 from the porous material 81 and the force for attracting the oscillating body 85 to the porous material 81 balances the porous material 81 and the oscillating body 85. Can be held in a stable state. As a result, it is possible to improve the copying accuracy. Although not shown, the porous material 81 and the rocking body 85 can be maintained in a non-contact state regardless of the orientation of the porous material 81 and the rocking body 85. Wear powder generated when the porous material 81 and the rocking body 85 are pressed is discharged to the outside through the suction annular groove 90 and the port 83 by the suction force of air. Therefore, since it has a function of discharging the wear powder to the outside of the copying apparatus 11, a clean work environment can be maintained.
[0071]
(Fifth embodiment)
The copying apparatus 11 shown in the third embodiment can be applied upside down so that a plurality of bumps formed on the IC chip are parallel. However, in the fifth embodiment, the evacuation passages 82 and 86 shown in the third embodiment are omitted. Here, the parallelism of the bumps means that the upper surface of each bump 95 is parallel to the lower surface of the IC chip 94 as shown in FIG. That is, as shown in FIG. 12B, in order to make the upper surfaces of the bumps 95 parallel, the IC chip 94 is placed on the rocking body 85, and the IC chip 94 is pressed using the press jig 97 in this state. To do. Thereby, the upper surface of each bump 95 is leveled. The upper surface of each bump 95 is parallel to the lower surface of the IC chip 94. Incidentally, the parallelism of the bump 95 is 1 μm. Note that the inclination angle of the tip surface of the press jig 97, the inclination angle of the upper surface of the IC chip 94, and the bump 95 shown in FIGS. It is exaggerated over things.
[0072]
In order to make the upper surfaces of the bumps 95 parallel by using the copying apparatus 11 in this embodiment, the following is performed.
First, before the IC chip 94 is pressed using the pressing jig 97, as shown in FIG. 12A, when pressurized air is supplied from the port 83, the oscillator 85 starts from the curved surface of the porous material 81. Air is spouted toward In this state, the front end surface of the press jig 97 is brought into contact with the upper surface of the rocking body 85. At this time, since the upper surface (contact surface) of the rocking body 85 is inclined along the tip surface of the pressing jig 97, the lower surface of the rocking body 85 and the upper surface of the rocking body 85 are parallel to each other. Then, the supply of pressurized air is stopped, and the press jig 97 is further moved downward. Thereby, the rocking body 85 is pressed against the porous material 81. At the same time, air is evacuated from the port 83 and the oscillating body 85 is adsorbed to the porous material 81.
[0073]
The state where the oscillating body 85 is made to follow is maintained as described above, and the press jig 97 is once separated from the upper surface of the oscillating body 85. In this state, the IC chip 94 is placed on the upper surface of the oscillating body 85, and the press jig 97 is again brought close to the oscillating body 85 as shown in FIG. Then, the IC chip 94 is pressed by the pressing jig 97, and each bump 95 is leveled. That is, the upper surface of each bump 95 is aligned along the front end surface of the press jig 97. Therefore, in this embodiment, the IC chip 94 is sandwiched between the front end surface of the press jig 97 parallel to each other and the upper surface of the rocking body 85. For this reason, as indicated by A in FIG. 12B, the lower surface of the IC chip 94 and the upper surface of each bump 95 can be made parallel.
[0074]
Further, it is necessary to change the pressing force of the pressing jig 97 in proportion to the length L (mm) of one side of the IC chip 94 having a square shape. This is because the parallelism of the bumps 95 cannot be set to a desired value unless the pressing force of the pressing jig 97 against the IC chip 94 is set to an appropriate value. The relationship between the length L of one side of the IC chip 94 and the load applied to the IC chip 94 is shown in a graph G1 in FIG. In this graph G1, for example, when the length L of one side of the IC chip 94 is 5 mm, the appropriate value of the load applied to the IC chip 94 is 15 kgf.
[0075]
Further, when the bumps 95 are pressed, the oscillator 85 is also pressed by the pressing jig 97. However, since the rocking body 85 is hemispherical, the rocking body 85 is displaced when a load of a predetermined value or more is applied to the rocking body 85. The relationship between the load position a of the oscillating body 85 and the load applied to the oscillating body 85 is shown as a graph G2 in FIG. In the graph G2, for example, when the load position a of the oscillating body 85 is 10 mm, the oscillating body 85 is displaced when a pressure of about 5 kgf or more is applied to the oscillating body 85.
[0076]
Therefore, in order to prevent the oscillator 85 from being displaced when leveling each bump 95, both the graphs G1 and G2 shown in FIG. 14 do not overlap and the graph G2 is positioned on the right side of the graph G1. It is desirable to set as follows. In this embodiment, the position of the graph G2 can be changed with respect to the graph G1 by the following five parameters. That is, as shown in FIG. 15, the five parameters are the radius of curvature R of the oscillating body 85, the pressure receiving area S of the oscillating body 85 with respect to the porous material 81, the pressure P of the air evacuated from the port 83, and the porous The friction coefficient μ between the material 81 and the rocking body 85, and the load position a of the rocking body 85. A conditional expression for setting the position of the graph G2 to an appropriate position by these parameters R, S, P, μ, and a, that is, a conditional expression that does not cause the oscillator 85 to shift when leveling each bump 95 is as follows. It becomes like following Formula (1) or (2).
[0077]
[Expression 1]

[0078]
[Expression 2]

Therefore, in this embodiment, by adjusting the parameters R, S, P, and μ, it is possible to prevent the oscillator 85 from being displaced when the bumps 95 are leveled.
[0079]
(Sixth embodiment)
In this embodiment, a description will be given centering on differences from the third embodiment. As shown in FIGS. 16 and 17, three conical protrusions 100 a, 100 b, and 100 c are provided on the lower surface of the rocking body 85. Each of the protrusions 100a to 100c is formed integrally with the rocking body 85. Each protrusion 100a-100c is so thin that it goes to the front end side. Moreover, each protrusion 100a-100c is each arrange | positioned at each vertex of the virtual equilateral triangle 101 shown with a dashed-two dotted line in FIG. In other words, the protrusions 100a to 100c are arranged at equal intervals on an imaginary circumference centered on a vacuum suction passage 86 as an adsorption portion.
[0080]
A cylindrical elastic body 102 is provided at the outer end portion of the evacuation passage 86. The tip of the elastic body 102 protrudes along a direction perpendicular to the lower surface of the rocking body 85. The protruding length of the elastic body 102 with respect to the lower surface of the rocking body 85 is slightly longer than the protruding length of each of the protrusions 100a to 100c. Specifically, the protruding length of the elastic body 102 is 0.5 mm, and the protruding length of each of the protrusions 100a to 100c is 0.4 mm. The elastic body 102 of this embodiment is made of nitrile rubber and has a hardness of 60 °. In addition to this, the elastic body 102 may be changed to a Y-type or U-type packing. If the flatness of the suction surface of the semiconductor chip 103 is about 1 to 10 μm, the protruding length of the protrusions 100 a to 100 c may be about 10 μm and the elastic body 102 may be omitted.
[0081]
In order to transport the semiconductor chip 103 as an object using the copying apparatus 11 according to the sixth embodiment configured as described above, the following is performed. Note that FIG. 18 is drawn exaggerated over the actual semiconductor chip 103 in order to easily explain the above-described copying operation.
[0082]
As shown in FIG. 18, the moving body 80 is lowered while the rocking body 85 is adsorbed to the porous material 81 by the adsorbing force of the air evacuated from the port 83. When the moving body 80 approaches the semiconductor chip 103, the suction of air from the air passage 83a is stopped. Thereby, each protrusion 100a-100c contact | abuts to the semiconductor chip 103. FIG. At this time, even if there is a step (about 10 to 100 μm) on the upper surface (specific surface) of the semiconductor chip 103, all the protrusions 100 a to 100 c are in contact with the semiconductor chip 103.
[0083]
Thereafter, as described in the third embodiment, pressurized air is ejected from the curved surface of the porous material 81 toward the rocking body 85, and the lower surface (contact surface) of the rocking body 85 extends along the upper surface of the semiconductor chip 103. Lean. Then, the oscillator 85 is copied so as to be parallel to the semiconductor chip 103.
[0084]
After the copying operation is completed, the supply of pressurized air to the air passage 83 a is stopped and at the same time, air is evacuated from the port 83 through the air passage 83. Thereby, the oscillating body 85 is adsorbed to the porous material 81. At the same time, air is evacuated from the evacuation passages 82 and 86, and the semiconductor chip 103 is adsorbed to the oscillator 85. At this time, the front end surface of the elastic body 102 is in close contact with the upper surface of the semiconductor chip 103. For this reason, air does not enter the vacuum suction passage 82 from the outside of the elastic body 102. Therefore, the semiconductor chip 103 can be reliably adsorbed, and the upper surface of the semiconductor chip 103 does not leave the protrusions 100a to 100c. In this state, the copying apparatus 11 is raised and conveyed to a predetermined position.
[0085]
Therefore, according to this embodiment, the following effects can be obtained.
(1) Three protrusions 100 a to 100 c that contact the upper surface of the semiconductor chip 103 are provided on the lower surface of the oscillator 85. Therefore, even if there is a step on the upper surface of the semiconductor chip 103, all the protrusions 100a to 100c can be brought into contact with the semiconductor chip 103. Therefore, when the semiconductor chip 103 is attracted, the semiconductor chip 103 is not moved and displaced with respect to the oscillator 85. As a result, high-precision copying can be performed and the semiconductor chip 103 can be prevented from being damaged.
[0086]
(2) Since the protrusions 100 a to 100 c are formed in a conical shape with rounded tips, the protrusions 100 a to 100 c can be brought into point contact with the semiconductor chip 103 at three points. Therefore, the contact area of the protrusions 100a to 100c with respect to the semiconductor chip 103 can be minimized. Therefore, all the protrusions 100a to 100c can be reliably brought into contact with the semiconductor chip 103.
[0087]
(3) The evacuation passage 86 formed in the rocking body 85 is provided with an elastic body 102. Therefore, when the semiconductor chip 103 is attracted to the oscillating body 85, the tip of the evacuation passage 86 is in close contact with the upper surface of the semiconductor chip 103 through the elastic body 102. As a result, when air is sucked from the evacuation passage 86, air does not enter the evacuation passage 86 from between the oscillator 85 and the semiconductor chip 103. Therefore, the suction force can be increased, and the semiconductor chip 103 can be reliably prevented from falling from the lower surface of the oscillator 85. Further, since the semiconductor chip 103 can be adsorbed even with a weak suction force, the adsorption efficiency of the semiconductor chip 103 can be improved. Furthermore, since the elastic body 102 is soft, even if the elastic body 102 contacts the semiconductor chip 103, the semiconductor chip 103 can be prevented from being damaged.
[0088]
In addition, you may change each embodiment of this invention as follows.
As another example of the first embodiment, the ball 22 may be changed to, for example, a hemisphere other than a sphere. As another example of the first to fifth embodiments, the ball 22 and the oscillating body 85 may be formed in a cylindrical shape so that the spherical surface is eliminated and the copying direction is restricted.
[0089]
-As another example of 1st Embodiment, you may make it drive the up-down direction with the rotational force of an electric motor besides driving the piston 50 by the pressure of pressurized air.
[0090]
As another example of the first embodiment, a porous material 17 having a spherical hollow portion may be provided inside, and the ball 22 may be accommodated in the porous material 17. Then, pressurized air is jetted from the inner surface of the porous material 17 toward the surface to bring the porous material 17 and the ball 22 into a non-contact state. According to this configuration, the copying accuracy can be further improved.
[0091]
As another example of the first embodiment, the compression coil spring 44 for returning the piston 36 to the upper stroke end may be omitted from the rotation stop mechanism A. Instead, the piston 36 may be moved to the upper stroke end by supplying pressurized air from the fluid discharge port 40.
[0092]
As another example of the fourth embodiment, the copying apparatus 11 is turned upside down, the moving body 80 is provided with a suction holder 92, and the object 87 is sucked to the suction holder 92 by the suction force of air. Also good.
[0093]
-As another example of 4th Embodiment, the porous material 81 may be formed in the magnitude | size equivalent to the recessed part 80a of the moving body 80, and the porous material 81 may be engage | inserted in the recessed part 80a. With this configuration, when air is sucked through the vacuum port 91, the air is sucked through the porous material 81. For this reason, the air suction force with respect to the oscillating body 85 is uniform. Therefore, the force for separating the oscillating body 85 from the porous material 81 and the force for attracting the oscillating body 85 to the porous material 81 are easily balanced, and the porous material 81 and the oscillating body 85 are not in contact with each other. Can be stabilized.
[0094]
As another example of the fourth embodiment, the copying operation may be performed in a state where pressurized air is blown from the suction holder 92 when the copying operation is performed (the state shown in FIG. 10B). In this case, it is common to provide a porous material at the tip opening of the suction holder 92 or to make the tip opening of the suction holder 92 into a diaphragm shape. In this way, an air film (10 to 20 μm) by pressurized air can be formed between the suction holder 92 and the object 87, and the copying operation is performed without bringing the suction holder 92 into contact with the object 87. be able to. Therefore, even if the surface of the object 87 is uneven, the suction holder 92 can be reliably and smoothly slid along the surface of the object 87. Further, since the suction holder 92 does not contact the object 87, the object 87 can be prevented from being damaged.
[0095]
-As another example of 6th Embodiment, you may form the shape of protrusion 100a-100c in the shape of a quadrangular pyramid with a round front-end | tip. Moreover, the shape of the tip part of the protrusions 100a to 100c may be spherical instead of tapered. The protrusions 100a to 100c may be changed to any shape as long as the shape makes point contact with the object and moves smoothly with respect to the surface.
[0096]
As another example of the sixth embodiment, the protrusions 100a to 100c may be arranged not at the vertices of the virtual equilateral triangle 101 but at, for example, the vertices of an isosceles triangle or other irregular triangles.
[0097]
As another example of the sixth embodiment, the elastic body 102 may be omitted when the suction force of the semiconductor chip 103 can be sufficiently secured. As shown in FIG. 19, an elastic O-ring 104 may be used instead of the elastic body 102. In this way, since a highly versatile member can be used, the manufacturing cost can be reduced.
[0098]
  Next, in addition to the technical ideas described in the claims, the technical ideas grasped by the above-described embodiments are listed below together with their effects.
  (1)in frontThe fixing means includes a movable member that can move between a pressing position that presses the first and second members and a pressing release position that releases the pressing between the first and second members. The copying apparatus is characterized in that when the movable member moves to the pressing position, one member is pressed against the other member. According to this configuration, after moving one of the first and second members, the movable member moves from the pressing release position to the pressing position. By this movement, one member is pressed against the other member, and the two members do not rotate relative to each other. Therefore, despite the simple configuration, the first or second member can be held in a copied state.
[0099]
  (2)in frontThe copying apparatus according to claim 1, wherein one of the first and second members presses the other member by sucking air through the porous material. According to this configuration, air is sucked through the porous material after following one of the first and second members. Then, one member presses the other member among both members, and both members do not rotate relatively. Therefore, despite the simple configuration, both members can be held in a copied state.
[0100]
  (3)in frontThe copying apparatus according to claim 1, wherein the movable member has an air passage for adsorbing the object by evacuation. According to this configuration, since the air passage is formed using the movable member, the configuration of the copying apparatus can be simplified.
[0101]
  (4)in frontThe second member includes a sphere and a long suction holder extending along the radial direction of the sphere, and a part of the sphere is engaged with the first member disposed below the sphere. A copying apparatus characterized by comprising: According to this configuration, the sphere can be lifted by blowing the pressurized air from the first member toward the sphere. For this reason, unlike the case where the first member is arranged on the top of the sphere, for example, it is not necessary to perform the ejection of pressurized air and the suction of air at the same time. As a result, the configuration of the copying apparatus can be simplified.
[0102]
  (5)in frontThe copying apparatus according to claim 1, wherein the suction holder is provided with a detent means for preventing the sphere from rotating about its axis.
[0103]
  (6)in frontThe anti-rotation means includes a flange (30a) provided on the outer peripheral surface of the suction holder and having a through hole (32), and a movable pin (41) arranged to face the through hole of the flange and reciprocally movable. A copying apparatus characterized by being configured.
[0104]
  (7)in frontThe first member is provided with a porous material that allows air to pass therethrough, and the concave curved surface is formed in the porous material, and a suction part (suction annular groove 90 for suctioning air) is provided at the peripheral part of the porous material. ) Is provided. According to this configuration, the pressurized member is ejected toward the second member via the porous material, whereby the second member is separated from the first member. At the same time, air is sucked at the peripheral edge of the porous material, whereby the second member is drawn to the first member. Thus, a predetermined gap is formed between the first and second members by balancing the force for separating the second member with the force for attracting the first member. . Therefore, the copying accuracy can be further increased.
[0105]
  (8)in frontA copying apparatus, wherein the porous material is made of a synthetic resin. According to this configuration, the weight of the porous material can be reduced, and it can be easily manufactured at low cost.
[0106]
  (9)in frontA copying apparatus, wherein the porous material is made of a lightweight metal. According to this configuration, the weight of the porous material can be reduced, and it can be easily manufactured at low cost.
[0107]
  (10)in frontThe second member is provided with a suction member (suction holders 25 and 92) for sucking an object, and the suction member is provided with an air passage, and before the workpiece is sucked by the suction member, the air passage is provided through the air passage. A copying apparatus that performs a copying operation while blowing pressurized air. According to this configuration, an air film by pressurized air can be formed between the suction member and the object, and a copying operation can be performed without bringing the suction member into contact with the object.
[0108]
  (11)in frontThe copying apparatus, wherein the second member has the contact surface in a part thereof, and each protrusion is formed integrally with the second member.
With this configuration, the manufacturing man-hours of assembling each protrusion to the second member can be omitted.
[0109]
  (12)each2. A copying apparatus according to claim 1, wherein the protrusion is disposed at a vertex of a virtual equilateral triangle temporarily provided on the contact surface.
  (13)in frontThe copying apparatus according to claim 1, wherein the elastic body is formed in a cylindrical shape, and a protruding length of the elastic body with respect to the contact surface is the same as a protruding length of each of the protrusions. According to this configuration, since the elastic body is not extremely deformed in the object, the object can be reliably prevented from being damaged.
[0110]
【The invention's effect】
As described in detail above, according to the first aspect of the invention, since the first member and the second member are brought into non-contact, the sliding resistance of both members can be almost eliminated. High-precision copying can be performed.
[0111]
  AlsoFurther, since the pressurized air can be ejected with a uniform pressure, copying with higher accuracy can be performed.
  furtherSince the first and second members can be fixed to each other and the relative rotation of both members can be prevented after the copying operation is completed, the first or second member is held in a copied state. be able to.
[0112]
  Claim2 and 3According to the invention described above, it is possible to prevent the object from being displaced with respect to the contact surface after the copying operation is completed.
  Claim4According to the invention described in (3), all the protrusions can be reliably brought into contact with the object.
[Brief description of the drawings]
FIG. 1 is a cross-sectional view of a copying apparatus according to a first embodiment.
FIG. 2 is a right side view of the copying apparatus.
FIG. 3 is a left side view of the copying apparatus.
FIG. 4 is a bottom view of the copying apparatus.
FIG. 5 is an operation explanatory diagram showing the copying apparatus in a simplified manner.
FIG. 6 is an explanatory view showing a state in which the suction holder is copied.
FIG. 7 is a cross-sectional view of a copying apparatus according to a second embodiment.
FIG. 8 is a diagram showing a copying operation of the copying apparatus according to the third embodiment.
FIG. 9 is a diagram illustrating the operation of the copying apparatus following FIG.
FIG. 10 is a diagram illustrating a copying operation of the copying apparatus according to the fourth embodiment.
FIG. 11 is a diagram illustrating the operation of the copying apparatus following FIG. 10;
FIG. 12 is a view showing the operation of the copying apparatus according to the fifth embodiment.
FIG. 13 is an explanatory diagram of an IC chip.
FIG. 14 is a graph showing the pressing force when pressing an IC chip with a pressing jig.
FIG. 15 is a diagram for explaining parameters of a mathematical expression.
FIG. 16 is a cross-sectional view of a copying apparatus according to a sixth embodiment.
FIG. 17 is a top view showing the lower surface of the oscillator.
FIG. 18 is a diagram showing a copying operation of the copying apparatus.
FIG. 19 is a cross-sectional view of a copying apparatus showing another example of the sixth embodiment.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 15 ... Ball receiver (1st member), 17 ... Porous material (1st member), 22 ... Ball (2nd member), 25 ... Adsorption holder (2nd member), 50 ... Piston (fixing means) ), 56 ... Pressing ring (fixing means), 61 ... Semiconductor chip (object), 80 ... Moving body (first member), 81 ... Porous material (first member), 85 ... Oscillating body (second) ), 100a to 100c ... projection, 86 ... vacuum passage (adsorption part), 102 ... elastic body.

Claims (4)

Constructed so that a convex curved surface is formed downward and can be supported by the porous material with respect to the first member having a porous material that forms a concave curved surface upward and a through hole that opens up and down. a ball being provided with a second member composed of a suction holder which is loosely inserted into the through hole while being protruded downward so as to be relatively rotated from the ball, the suction holder to a particular surface of the object In the copying apparatus that causes the contact surface to be parallel to the specific surface of the object by contacting,
By ejecting pressurized air between the first member and the second member from the porous material toward the surface of the ball , the first member and the second member are not in contact with each other. Make contact ,
Fixing means is provided for fixing the first member and the second member so that they cannot rotate relative to each other when the copying operation of the second member is completed. A piston that is located above the member and slidable in the vertical direction;
When the piston moves to the lower stroke end, the ball is pressed to the porous material side by the piston to fix the first member and the second member so that they cannot rotate relative to each other. A characteristic copying apparatus. The copying apparatus according to claim 1, wherein the contact surface is provided with three protrusions that contact a specific surface of the object. A second member having a convex curved surface is provided so as to be rotatable relative to the first member having a concave curved surface, and any one of the two members is brought into contact with a specific surface of the object. Thus, in the copying apparatus that makes the contact surface follow the specific surface of the object in parallel,
By ejecting pressurized fluid between the two members, the two members are brought into non-contact with each other;
3. The copying apparatus according to claim 1, wherein the contact surface is provided with three protrusions that contact a specific surface of the object. 4. The copying apparatus according to claim 2, wherein each of the protrusions is formed in a tapered shape .

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