JP4049856B2 - Electrodeless discharge lamp lighting device, electrodeless discharge lamp device, illumination device, and photochemical treatment device - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an electrodeless discharge lamp lighting device, an electrodeless discharge lamp device, an illumination device, and a photochemical treatment device for lighting an electrodeless discharge lamp.
[0002]
[Prior art]
2. Description of the Related Art In recent years, electrodeless discharge lamps have been developed as discharge lamps used for applications that require a long life, such as tunnel lighting, bridge lighting, and photochemical treatment equipment for sewage sterilization.
[0003]
The electrodeless discharge lamp lighting device generates a magnetic field alternating at, for example, about 13.56 MHz in an excitation coil using a high-frequency power source, and uses an electric field generated by this magnetic field to generate a discharge rare gas and mercury in a glass bulb. An electrodeless discharge lamp having a spherical shape or an elliptical shape in which a metal vapor is enclosed is lit.
[0004]
As a device using such a conventional electrodeless discharge lamp lighting device, there has been proposed an illumination device in which a matching circuit and an excitation coil described in JP-A-6-203809 are separated by a feeder line.
[0005]
In this way, when the electrodeless discharge lamp lighting device is used in a photochemical processing apparatus for sewage sterilization treatment, an electrodeless discharge lamp and an excitation coil are inserted into the processing medium. In this case as well, it is considered that the matching circuit and the excitation coil are separately provided and the matching circuit is disposed on the water.
[0006]
However, in the conventional photochemical processing apparatus, the matching circuit and the excitation coil are connected by a single power supply line (for example, 8D2V cable), and it is difficult to obtain a high output in order to prevent the cable from melting. It was.
[0007]
Further, in a conventional photochemical processing apparatus, a processing medium is injected into a metal casing, and an electrodeless discharge lamp and an excitation coil are arranged in the processing medium. This processing medium is made of a dielectric (for example, water or alcohol). is there. For this reason, a processing medium has big influence regarding the high frequency electric power transmission operation | movement to an excitation coil. Corresponding to this, an electrodeless discharge lamp and an excitation coil may be arranged in the medium to be treated to adjust and confirm the high-frequency operation. However, the solute and solvent concentration of the treatment medium and the treatment amount When the change occurs, the adjustment point of the high frequency operation is shifted, and high frequency electric shock and noise are generated.
[0008]
[Problems to be solved by the invention]
In the above conventional electrodeless discharge lamp lighting device, the matching circuit and the excitation coil are connected by a single power supply line, and it is difficult to obtain a high output in order to prevent melting of the cable. In a photochemical processing apparatus, a processing medium is injected into a metal casing, and an electrodeless discharge lamp and an excitation coil are arranged in the processing medium. This processing medium is a dielectric, and a high-frequency power transmission operation to the excitation coil. regard, since the processing medium may grant a large effect, the concentration and amount of processing of the solute and solvent of the treatment medium is changed, adjustment point of the high-frequency operation is shifted, had caused the occurrence of high-frequency electric shock and noise.
[0009]
Accordingly, an object of the present invention is to provide an electrodeless discharge lamp lighting device, an illumination device, and a photochemical treatment device that can prevent melting of a wire pair connecting a matching circuit and an excitation coil even when a high output is obtained. It is another object of the present invention to provide an electrodeless discharge lamp apparatus that can prevent the processing medium from having a great influence on the high-frequency power transmission operation to the excitation coil.
[0010]
[Means for Solving the Problems]
The electrodeless discharge lamp lighting device according to the present invention includes a plurality of wiring pairs arranged in parallel with each other, an excitation coil wound around the electrodeless discharge lamp, and a high-frequency voltage supplied from a high-frequency power source. And a matching circuit for supplying the excitation coil via a pair.
[0011]
DETAILED DESCRIPTION OF THE INVENTION
FIG. 1 is a circuit diagram showing a first embodiment of an electrodeless discharge lamp lighting device according to the present invention.
[0012]
In FIG. 1, the electrodeless discharge lamp lighting device includes coaxial cables 21, 22 and 23 that are a plurality of wiring pairs provided in parallel to each other, an excitation coil 24 wound around the electrodeless discharge lamp 25, and a high-frequency power source 10. The matching circuit 13 is configured to match the supplied high-frequency voltage and supply the excitation coil 24 via the plurality of wiring pairs.
[0013]
Reference numeral 10 denotes a high-frequency power source, and the output of the high-frequency power source 10 is supplied to the matching circuit 13 via the coaxial cable 20 by the pair of transmission lines 11 and 12.
[0014]
The matching circuit 13 performs matching with the high-frequency voltage supplied from the high-frequency power supply 10 via the transmission lines 11 and 12, and the transmission lines 14, 15, 16, 17, 18, 19 using the three coaxial cables 21, 22, 23 To the excitation coil 24.
[0015]
According to such an embodiment of the present invention, the coaxial cables 21, 22, 23 serving as a plurality of wiring pairs provided in parallel with each other are provided as the wiring pairs connecting the matching circuit 13 and the excitation coil 24. Even when high output is obtained, melting of the wiring pair connecting the matching circuit and the excitation coil can be prevented.
[0016]
The effects of the embodiment of the present invention will be described with specific experimental results.
[0017]
First, for comparison, a case where the matching circuit 13 and the excitation coil 24 are connected by a single coaxial cable (8D2V) will be described. A coaxial cable (8D2V) having a length of 1 m is used. In this case, the coaxial cable (8D2V) has a filler of polyethylene, a characteristic impedance of 50Ω, and an output terminal impedance (impedance when the discharge lamp is viewed from the cable output terminal during lighting) is 500Ω. The input power from the cable input end is set to 500W. When the electrodeless discharge lamp lighting device is energized in such a state, the power loss becomes 100 W, reaches 75 ° C. in 5 minutes, the polyethylene of the coaxial cable is melted, and a short circuit failure occurs.
[0018]
Next, the case where the matching circuit 13 and the excitation coil 24 are connected by three coaxial cables (RG142G / U) as shown in FIG. 1 will be described. Three coaxial cables (RG142G / U) having a length of 1 m are used. In this case, (RG142G / U) has Teflon as the packing, one characteristic impedance is 50Ω, and when three are combined, the characteristic impedance is 50 / 3Ω, and the output terminal impedance is 500Ω. The input power from the cable input end is set to 500W. When the electrodeless discharge lamp lighting device was energized in such a state, the power loss was 25 W, the stress on one side of the coaxial cable was about 8 W, and the temperature rise of the cable was 20 deg in 1 hour. Here, since sufficient photochemical treatment can be performed within one hour, sufficient reliability can be ensured.
[0019]
In addition, since RG142G / U is about 1/3 of 8D2V in thickness, it is thinner than one 8D2V even when three are bundled, and the wiring space can be reduced, the workability is improved, and the structure is advantageous. Can be.
[0020]
FIG. 2 is a circuit diagram showing a modification of the embodiment of the invention of FIG.
[0021]
In FIG. 2, an electrodeless discharge lamp lighting device 31 is configured by configuring the high-frequency power source 10 and the matching circuit 13 of FIG. 1 as one circuit.
[0022]
The high frequency power supply 10 is constituted by MOSFETs 27 and 28 serving as first and second switching means. The matching circuit 13 includes capacitors C1, C2, C3, and C4, a resistor R1, and relay switches SW1 and SW2.
[0023]
The output terminal on the positive electrode side of the DC power supply 26 is connected to the output terminal on the negative electrode side of the DC power supply 26 through a series connection of the drain and source paths of the MOSFETs 27 and 28 of the high frequency power supply 10. The MOSFETs 27 and 28 are alternately turned on and off at a high frequency (for example, 13.56 MHz) by the switching voltages a1 and b1 from the terminals 29 and 30. Thereby, a voltage obtained by superimposing a DC voltage on a high-frequency voltage is obtained between the connection point of the MOSFETs 27 and 28 and the reference potential point.
[0024]
The connection point of MOSFET27,28 is connected to the MOSFET 2 8 source via the series connection of the capacitors C1, C2, C3, C4 of the matching circuit 13. The connection point of the capacitors C2 and C3 is connected to one end of one transmission line 14, 16, 18 of the coaxial cables 21, 22, 23. A relay switch SW1 is connected in parallel to the capacitor C2. The capacitor C4, the switch SW2 of the relay is connected in parallel, the resistance R 1 is connected in parallel. The relay switches SW1 and SW2 are turned on during start-up and turned off after start-up, thereby switching the resonance circuit constant during start-up and after start-up of the electrodeless discharge lamp 25 to protect the high-frequency power supply 10. It has become. Connection point between the source of the capacitor C4 and the MOSFET 2 8 is connected to one end of the other transmission lines 15, 17, 19 of the coaxial cable 21, 22, 23.
[0025]
The other ends of the transmission lines 14, 16, 17 of the coaxial cables 21, 22, 23 are connected to the other ends of the other transmission lines 15, 17, 19 of the coaxial cables 21, 22, 23 via the excitation coil 24. Is done.
[0026]
Also in such a modification, the same effect as FIG. 1 is acquired.
[0027]
FIG. 3 is a circuit diagram showing a second embodiment of the electrodeless discharge lamp lighting device according to the present invention.
[0028]
Reference numerals 41, 42, and 43 denote AC power supplies of three-phase AC 200 V, and the AC voltages from the AC power supplies 41, 42, and 43 are supplied to high-frequency power supplies 44, 45, and 46, respectively. The high frequency power supplies 44, 45, and 46 create a high frequency voltage from the supplied AC voltage, and guide it to the connector box 50 via coaxial cables 47, 48, and 49, respectively. The connector box 50 guides the high frequency voltage from the coaxial cables 47, 48, 49 to the matching circuits 54, 55, 56 via the coaxial cables 51, 52, 53, respectively. The matching circuit 54 matches the high-frequency voltage from the coaxial cable 51 and supplies it to the excitation coil of the lamp unit 63 via two parallel coaxial cables 57 and 58. The matching circuit 55 matches the high-frequency voltage from the coaxial cable 52 and supplies it to the excitation coil of the lamp unit 64 via the two parallel coaxial cables 59 and 60. The matching circuit 56 matches the high-frequency voltage from the coaxial cable 53 and supplies it to the excitation coil of the lamp unit 65 via the two parallel coaxial cables 61 and 62.
[0029]
4 and 5 show the photochemical processing equipment using an electrodeless discharge lamp lighting device of FIG. 3, FIG. 4 is a sectional view seen from the side, FIG. 5 is a sectional view as seen from the front.
[0030]
In FIG. 4, a photochemical treatment device 71 includes a treatment tank 73 into which a photochemical treatment liquid 72 is injected, an electrodeless discharge lamp lighting device shown in FIG. 3, and an excitation coil 74 of the electrodeless discharge lamp lighting device. An electrodeless discharge lamp 75 that is lit using an electric field generated by a magnetic field, and a waterproof member that is at least partially transparent to ultraviolet rays. The electrodeless discharge lamp 75 and the electrodeless discharge lamp lighting device The discharge lamp container 76 is inserted into the treatment tank in a state in which the other end side of the transmission line and a circuit connected to the other end side are accommodated.
[0031]
In FIG. 5, the lamp units 63, 64, and 65 shown in FIG. 3 include an excitation coil 74, an electrodeless discharge lamp 75, and a discharge lamp container 76.
[0032]
The lamp units 63, 64 and 65 are attached by a holder 77. The holder 77 is suspended from above by a reel 78 and can be pulled up from the liquid 72.
[0033]
The high frequency power supplies 44, 45, 46, coaxial cables 47, 48, 49, connector box 50, coaxial cables 51, 52, 53, and matching circuits 54, 55, 56 are arranged outside the processing tank 73, and are connected to the lamp unit 63, 64 and 65 are arranged inside the processing tank 73, and the coaxial cables 57, 58, 59, 60, 61 and 62 are connected to the matching circuits 54, 55, 56 and the lamp unit 63 through the wall surface of the processing tank 73. 64 and 65 are connected.
[0034]
According to such an embodiment of the invention, the same effect as that of the embodiment of the invention of FIG. 1 can be obtained.
[0035]
FIG. 6 is a block diagram showing a third embodiment of the electrodeless discharge lamp apparatus according to the present invention, and shows one applied to a photochemical treatment apparatus.
[0036]
In FIG. 6, the photochemical processing apparatus 80 includes a lamp unit 83 in which an electrodeless discharge lamp 85 and an excitation coil 84 wound around the electrodeless discharge lamp 85 are accommodated by an outer tube 86, and a wiring pair 90 including transmission lines 91 and 92. And a matching circuit 82 for matching a high-frequency voltage supplied from a high-frequency power supply 81 and supplying the excitation coil 84 via the wire pair 90, and a metal housing at least a part of the lamp unit 83 and the wire pair 90. A housing 87, and electrical connection means (wiring 93) for electrically connecting one side line (transmission line 92) of the wire pair 90 and the metal housing 87 from the inside of the metal housing 87; The wiring length D1 of the wiring pair 90 is a length that can ignore the influence of the wavelength of the high-frequency voltage.
[0037]
The metal casing 87 is a processing tank into which a liquid 88 for photochemical processing is injected.
[0038]
Next, the wiring length D1 of the wiring pair 90 will be described in detail.
[0039]
First, assuming that the frequency of the high-frequency voltage is 13.56 MHz, the wavelength of the high-frequency voltage when it is assumed to be in a vacuum is 22.1 m. Here, when the wiring pair 90 is a coaxial cable made of polyethylene, the wavelength is 14 .8m. In this case, if the wiring length D1 of the wiring pair 90 is 1/10 or less of the wavelength, the influence of the wavelength of the sufficiently high frequency voltage can be ignored. In addition, if the wiring length D1 of the wiring pair 90 is other than a position that is an integral multiple of ¼ of the wavelength and is not in the vicinity of an integral multiple of ¼ of the wavelength, the resonance phenomenon does not occur.
[0040]
According to such an embodiment of the invention, by providing an electrical connection means (wiring 93) for electrically connecting one side line (transmission line 92) of the wire pair 90 and the metal housing 87, can determine the potential difference between the side lines of the metal casing 87 and the wire pairs 90, preventing respect RF power transfer operation of the excitation coil, it is possible to prevent the process medium Ru significantly affect the occurrence of high-frequency electric shock and noise it can.
[0041]
In addition, since the wiring length D1 of the wiring pair 90 is such that the influence of the wavelength of the high-frequency voltage can be ignored, efficiency reduction due to resonance of the wiring pair 90 can be prevented.
[0042]
FIG. 7 is a circuit diagram showing a first modification of the embodiment of the invention of FIG.
[0043]
Reference numeral 101 denotes a high-frequency power source, and this high-frequency power source 101 supplies a high-frequency current to the primary winding L1 of the transformer 102. As a result, a high-frequency voltage is generated in the secondary winding L2 of the transformer 102. The intermediate point of the secondary winding L2 is connected to the metal casing 120 of the processing tank that becomes the reference potential point. One end of the secondary winding L2 is connected to the other end of the secondary winding L2 via the capacitor C11, and is connected to the other end of the secondary winding L2 via the coil L3, the capacitor C12, and the coil L4. Is done. The transformer 102, coils L3 and L4, and capacitors C11 and C12 constitute a matching circuit.
[0044]
A connection point between the coil L3 and the capacitor C12 is connected to a connection point between the coil L4 and the capacitor C12 through a series connection of one transmission line 103 of the coaxial cable 110, the excitation coil 107, and one transmission line 105 of the coaxial cable 111. . The excitation coil 107 is wound around the electrodeless discharge lamp 108. Both ends of the other wirings 104 and 106 of the coaxial cables 110 and 111 are connected to the metal casing 120.
[0045]
By such connection to the metal casing 120, the influence of the distributed capacitances C01, C02, C03, C04 shown by the broken line can be prevented, and the high frequency generated between the metal casing 120 and both ends of the coaxial cables 110, 111 can be prevented. Generation of a potential difference can be prevented.
[0046]
FIG. 8 is a circuit diagram showing a second modification of the embodiment of the invention of FIG.
[0047]
Reference numeral 121 denotes a high-frequency power source, and one output terminal of the high-frequency power source 121 is connected to the other output terminal of the high-frequency power source 121 through a series connection of capacitors C13 and C14. Connection point of the other output terminal of the capacitor C14 and the high-frequency power source 121 is connected to the metal housing 1 40 of the treatment tank as a reference potential point.
[0048]
Connection point of the capacitors C13, C14, one of the transmission lines 12 5 of the coaxial cable 130, the other output of the excitation coil 127, a capacitor C14 and a high-frequency power source 121 via a series connection of the other transmission line 12 6 of the coaxial cable 130 Connected to terminal connection point. Capacitors C13 and C14 constitute a matching circuit. The excitation coil 127 is wound around the electrodeless discharge lamp 128. The output side end of the wiring 126 of the coaxial cable 130 is connected to the metal casing 140.
[0049]
Such connection to the metal casing 140 can prevent the influence of the distributed capacitances C05, C06, C07, and C08 indicated by the broken line, and the same effect as that of the modification of FIG. 7 can be obtained.
FIG. 9 is a block diagram showing a fourth embodiment of the electrodeless discharge lamp apparatus according to the present invention, which is applied to a lighting apparatus.
[0050]
In FIG. 9, a photochemical processing apparatus code 150 is supplied from an electrodeless discharge lamp 155, an excitation coil 154 wound around the electrodeless discharge lamp 155, a wiring pair 160 formed by transmission lines 161 and 162, and a high-frequency power supply 151. A matching circuit 152 for matching the high-frequency voltage to be supplied to the excitation coil 154 through the wiring pair 160, and at least a part of the electrodeless discharge lamp 155, the excitation coil 154, and the wiring pair (transmission lines 161, 162). A metal casing 156 for storing the wiring, and electrical connection means (wiring 157) for electrically connecting the one-side wire 162 of the wiring pair and the metal casing 156 from the inside of the metal casing 156. Features.
[0051]
According to such an embodiment of the invention, by providing the electrical connection means (wiring 157) for electrically connecting the one side line (transmission line 162) of the wiring pair 160 and the metal housing 156, can determine the potential difference between the side lines of the metal housing 156 with wire pair 160, preventing respect RF power transfer operation of the excitation coil, it is possible to prevent the process medium Ru significantly affect the occurrence of high-frequency electric shock and noise it can.
[0052]
FIG. 10 is a block diagram showing a fifth embodiment of the electrodeless discharge lamp apparatus according to the present invention, and the same components as those of the embodiment of the invention of FIG. is doing.
[0053]
In FIG. 10, the photochemical processing apparatus 170 includes an outer tube 176 made of an insulating member 177 such as glass and a member 178 formed of a conductor such as a metal, and one side line (transmission line 92) of the wire pair 90. ) Is connected to the member 178 by the wiring 179, and the member 178 is electrically connected to the metal casing 87 by the wiring 180.
[0054]
In such an embodiment of the invention, the same effect as that of the embodiment of the invention of FIG. 6 can be obtained.
[0055]
FIG. 11 is a block diagram showing a sixth embodiment of the electrodeless discharge lamp apparatus according to the present invention. The same components as those of the embodiment of the invention of FIG. is doing.
[0056]
In FIG. 11, the photochemical processing apparatus 190 includes an outer tube 196 made of an insulating member 197 such as glass and a member 198 formed of a conductor such as metal, and one side line (transmission line 92) of the wire pair 90. ) that the are connected to the member 198 by a wiring 199. The member 198 is electrically connected to the metal casing 87 by the extending portion 200.
[0057]
In such an embodiment of the invention, the same effect as that of the embodiment of the invention of FIG. 6 can be obtained.
[0058]
The embodiment of the invention shown in FIG. 1 can be applied to an apparatus other than the photochemical processing apparatus, for example, an illumination apparatus. In this case, the illuminating device includes at least a part of the electrodeless discharge lamp lighting device illustrated in FIG. 1 and the electrodeless discharge lamp that is lit using the electric field generated by the magnetic field of the excitation coil of the electrodeless discharge lamp lighting device. is formed of a member transmitting light, said electrodeless discharge lamp, may be composed 及 beauty outer tube for accommodating the excitation coil wound in this electrodeless discharge lamp. Further, in the embodiment of the invention shown in FIG. 1 and FIG. 6, two or three wiring pairs connected in parallel are provided, but four or more wiring pairs connected in parallel may be provided.
[0059]
【The invention's effect】
According to the present invention, even when a high output is obtained, melting of the wiring pair connecting the matching circuit and the excitation coil can be prevented, and sufficient reliability can be ensured. Further, since the processing medium can be prevented from having a great influence on the high-frequency power transmission operation to the excitation coil, high-frequency electric shock and noise can be prevented.
[Brief description of the drawings]
FIG. 1 is a circuit diagram showing a first embodiment of an electrodeless discharge lamp lighting device according to the present invention.
FIG. 2 is a circuit diagram showing a modification of the embodiment of the invention of FIG. 1;
FIG. 3 is a circuit diagram showing a second embodiment of the electrodeless discharge lamp lighting device according to the present invention.
4 is a cross-sectional view as viewed from the side showing the photochemical processing equipment using an electrodeless discharge lamp lighting device of FIG.
5 is a sectional view seen from the front showing a photochemical processing equipment using an electrodeless discharge lamp lighting device of FIG.
FIG. 6 is a block diagram showing a third embodiment of the electrodeless discharge lamp device according to the present invention.
7 is a circuit diagram showing a first modification of the embodiment of the invention of FIG. 6; FIG.
FIG. 8 is a circuit diagram showing a second modification of the embodiment of the invention of FIG. 6;
FIG. 9 is a block diagram showing a fourth embodiment of an electrodeless discharge lamp device according to the present invention.
FIG. 10 is a block diagram showing a fifth embodiment of the electrodeless discharge lamp apparatus according to the present invention.
FIG. 11 is a block diagram showing a sixth embodiment of the electrodeless discharge lamp apparatus according to the present invention.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 10 High frequency power supply 13 Matching circuit 21, 22, 23 Coaxial cable 24 Excitation coil 25 Electrodeless discharge lamp

Claims (3)

A plurality of wiring pairs provided in parallel with each other;
An excitation coil wound around an electrodeless discharge lamp;
A matching circuit for matching a high-frequency voltage supplied from a high-frequency power source and supplying the excitation coil via the plurality of wiring pairs;
An electrodeless discharge lamp lighting device comprising: An electrodeless discharge lamp lighting device according to claim 1,
An electrodeless discharge lamp that lights using an electric field generated by a magnetic field of an excitation coil of the electrodeless discharge lamp lighting device;
An outer tube that is formed of a member that transmits light, and that houses the electrodeless discharge lamp, the excitation coil wound around the electrodeless discharge lamp, and
An illumination device comprising: A treatment tank into which a liquid for photochemical treatment is injected;
An electrodeless discharge lamp lighting device according to claim 1,
An electrodeless discharge lamp that lights using an electric field generated by a magnetic field of an excitation coil of the electrodeless discharge lamp lighting device;
It is waterproof, and at least a part of the electrodeless discharge lamp is formed of a member that transmits ultraviolet rays. The electrodeless discharge lamp, and the excitation coil wound around the electrodeless discharge lamp are housed in the treatment tank. An outer tube,
A photochemical processing apparatus.

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