JP4034667B2 - Planar type electromagnetic actuator - Google Patents

Description

が発生し、可動部１を揺動する。
【００２０】
この場合、駆動コイル２Ａ，２Ｂにおいて発生する発熱量は、駆動コイル２Ａ，２Ｂにおける消費電力で表すことができる。ここで、各分岐線路７Ａ_１〜７Ａ_ｎ，７Ｂ_１〜７Ｂ_ｎの各抵抗値をそれぞれｒとすると、駆動コイル２Ａ，２Ｂの各並列抵抗値Ｒａ，Ｒｂは、その対称性により、
Ｒａ＝Ｒｂ＝ｒ／ｎ （３）
と表される。
【００２１】
また、上述のように各分岐線路７Ａ_１〜７Ａ_ｎ，７Ｂ_１〜７Ｂ_ｎには、駆動電流Ｉが流れているので、駆動コイル２Ａ，２Ｂを流れる総駆動電流Ｉａ，Ｉｂは、
Ｉａ＝Ｉｂ＝ｎＩ （４）
となる。したがって、駆動コイル２Ａ，２Ｂにおける消費電力Ｐａ，Ｐｂは、それぞれ

となり、トータル消費電力Ｐは、

となる。
【００２２】
一方、一般に矩形状の可動部１の周縁部に沿って巻回数ｎのスパイラル状の駆動コイルを敷設した従来のプレーナー型電磁アクチュエータにおいて発生する総ローレンツ力Ｆｇは、駆動電流をＩ、駆動コイルに作用する磁場をＢ、トーションバーの軸方向に平行な可動部１の対辺部の駆動コイル部分の長さをＬとすると、
Ｆｇ＝２ｎＬ（Ｉ×Ｂ）
と表すことができ、これは、（２）式と同じとなる。この場合、駆動コイルに発生する発熱量、即ち、駆動コイルの消費電力Ｐｇは、駆動コイルの全抵抗値をＲとすると、
Ｐｇ＝ＲＩ^２ （８）
と表すことができる。このとき、トーションバーの軸方向に平行な可動部の対辺部近傍における駆動コイルの当該部分の抵抗値は、大略Ｒ／（２ｎ）と表すことができ、これは、線幅や厚み等について同一条件で形成した上記各分岐線路７Ａ_１〜７Ａ_ｎ，７Ｂ_１〜７Ｂ_ｎの抵抗値ｒと略等しい。したがって、
ｒ＝Ｒ／（２ｎ） （９）
となり、（９）式を（８）式に代入して、
Ｐｇ＝２ｎｒＩ^２
を得る。そして、これは、（７）式の本第１実施形態におけるトータル消費電力Ｐに等しい。
【００２３】
以上により、本第１実施形態においては、巻回数ｎの駆動コイルを有する従来のプレーナー型電磁アクチュエータに比べｎ倍の駆動電流を駆動コイル２Ａ，２Ｂに対して供給することにより、駆動コイル２Ａ，２Ｂの発熱量を従来のプレーナー型電磁アクチュエータと同等に抑えながら同等のローレンツ力を得ることができる。
【００２４】
なお、駆動コイル２Ａ，２Ｂの一端部を互いに接続して１本の駆動コイルとして構成した場合も上述と同様である。
【００２５】
このように、本第１実施形態によれば、駆動コイル２Ａ，２Ｂを跨いで引出線路を設ける必要がないので、１層配線とすることができ、駆動コイル２Ａ，２Ｂの形成工程数が減ってコストダウンを図ることができる。また、駆動コイル２Ａ，２Ｂの形成工程における断線不良が低減し、製造歩留まりが向上する。
【００２６】
また、駆動コイル２Ａ，２Ｂが複数の分岐線路７Ａ_１〜７Ａ_ｎ，７Ｂ_１〜７Ｂ_ｎを並列接続した構成としているので分岐線路の一部が断線しても駆動コイル２Ａ，２Ｂの機能を維持（フェールソフト）することができる。したがって、この場合、駆動コイル２Ａ，２Ｂの抵抗値の増大を検出することにより断線を検知して、プレーナー型電磁アクチュエータの稼動率の低い適当な時期に交換するようにすれば、駆動コイルの断線事故に伴うシステム障害（損失）を最小限に抑えることができる。
【００２７】
さらに、トーションバー５上の引出線路６Ａ，６Ａ及び６Ｂ，６Ｂを流れる電流の向きが逆向きであるため、トーションバー５上で引出線路６Ａ，６Ａ及び６Ｂ，６Ｂに発生するローレンツ力の向きが逆となり、互いにキャンセルしてプレーナー型電磁アクチュエータの正常動作を妨げるような不必要な動作がトーションバー６に発生するのを防止することができる。
【００２８】
そして、駆動コイル２Ａ，２Ｂに互いに同方向の駆動電流を供給すると、可動部１を上下方向に動作させることができる。したがって、駆動コイル２Ａ，２Ｂに互いに逆向きの交流の駆動電流を供給すると共に、同方向の直流電流を重畳して供給すれば可動部１の揺動時における上下方向のずれ（オフセット）を補正することができる。
【００２９】
なお、本第１実施形態において、駆動電流Ｉａ，Ｉｂは、（４）式に示すように、巻回数ｎの駆動コイルを有する従来のプレーナー型電磁アクチュエータのｎ倍となるが、駆動電圧は、（４）式と（９）式とにより（Ｒ×Ｉ）／ｎと表されて、従来のプレーナー型電磁アクチュエータの１／ｎ倍となる。したがって、本第１実施形態は、電源電圧に上限がある場合に有効である。
【００３０】
次に、本発明に係るプレーナー型電磁アクチュエータの第２実施形態について図２を参照して説明する。ここでは、第１実施形態と同一の要素については、同一符号で示し、異なる部分について説明する。
【００３１】
図２に示す第２実施形態は、駆動コイル２Ａ，２Ｂの各分岐線路７Ａ_１〜７Ａ_ｎ，７Ｂ_１〜７Ｂ_ｎについて、トーションバー５の軸方向に平行な可動部１の対辺部近傍ほど分岐線路７Ａ_１〜７Ａ_ｎ，７Ｂ_１〜７Ｂ_ｎの間隔を密に形成する構成とした。
【００３２】
本第２実施形態によれば、第１実施形態の効果に加えて、各分岐線路７Ａ_１〜７Ａ_ｎ，７Ｂ_１〜７Ｂ_ｎに発生するローレンツ力が、トーションバー５の軸方向に平行な可動部１の対辺部近傍に集中することになり、大きな駆動トルクを得ることができる。
【００３３】
また、可動部１の対辺部近傍の分岐線路の線路幅を広くして抵抗値を他の分岐線路に比較して低くなるように形成してもよい。この場合、トーションバー５の軸方向に平行な可動部１の対辺部近傍の分岐線路を流れる駆動電流を多くすることができ、大きな駆動トルクを得ることができる。
【００３４】
次に、本発明に係るプレーナー型電磁アクチュエータの第３実施形態について図３を参照して説明する。ここでは、第１実施形態と同一の要素については、同一符号で示し、異なる部分について説明する。
図３に示す第３実施形態は、前述の分岐線路７Ａ_１〜７Ａ_ｎ，７Ｂ_１〜７Ｂ_ｎに代えて該分岐線路７Ａ_１〜７Ａ_ｎ，７Ｂ_１〜７Ｂ_ｎの幅よりも広い１本の帯状線路１０Ａ，１０Ｂを設けて構成した。
【００３５】
本第３実施形態によれば、第１実施形態の効果に加えて、トーションバー５の軸方向に平行な可動部１の対辺部近傍に幅の広い帯状線路１０Ａ，１０Ｂを配置したので、駆動コイル２Ａ，２Ｂの形成工程で線路の一部に塵埃等による欠陥部が発生しても、駆動コイル２Ａ，２Ｂに断線不良が発生することがなく、製造歩留まりを向上することができる。
【００３６】
なお、第１〜第３実施形態のいずれにおいても、引出線路６Ａ，６Ａ及び６Ｂ，６Ｂは、図４に示すように線路幅を分岐線路７Ａ_１〜７Ａ_ｎ，７Ｂ_１〜７Ｂ_ｎの幅よりも広く形成してもよいし、図５に示すように梯子形状に形成してもよい。この場合、図４のように線路幅を広くしたときには、引出線路における電力損失を抑えることができると共に、駆動時または駆動コイル形成時における断線不良の発生を抑制することができる。また、図５のように、引出線路６Ａ，６Ａ及び６Ｂ，６Ｂを梯子形状としたときには、例えば、図５中×印で示す箇所に製造時または駆動時に断線が発生した場合にも、駆動電流は同図中矢印Ａ，Ｂ，Ｃの方向に流れ、駆動コイル２Ａ，２Ｂとしての機能を維持することができる。
【００３７】
次に、本発明に係るプレーナー型電磁アクチュエータの第４実施形態について図６を参照して説明する。ここでは、第１実施形態と同一の要素については、同一符号で示し、異なる部分について説明する。
【００３８】
図６に示す第４実施形態は、可動部１が、固定部４に外側トーションバー１１で揺動可能に軸支された枠状の外側可動部１２と、該外側可動部１２に上記外側トーションバー１１の軸線と直交する内側トーションバー１３で揺動可能に軸支された内側可動部１４とからなり、該内側可動部１４に駆動コイル２Ａ，２Ｂを敷設し、外側可動部１２に別の駆動コイルとしての外側駆動コイル１５Ａ，１５Ｂを敷設して二次元動作のプレーナー型電磁アクチュエータを構成した。
【００３９】
上記外側駆動コイル１５Ａ，１５Ｂは、外側可動部１２から外側トーションバー１１を介して固定部４側に引出された１対の引出線路１６Ａ，１６Ａ及び１６Ｂ，１６Ｂと、外側トーションバー１１の軸方向に平行する外側可動部１２の対辺部と平行に敷設され上記引出線路１６Ａ，１６Ａ及び１６Ｂ，１６Ｂに対して互いに並列接続するｎ本の分岐線路１７Ａ_１〜１７Ａ_ｎ，１７Ｂ_１〜１７Ｂ_ｎと、により構成しており、引出線路１６Ａ，１６Ａ及び１６Ｂ，１６Ｂの端部は、それぞれ固定部４上に形成した一対の電極端子部１８Ａ，１８Ｂ及び１９Ａ，１９Ｂに接続している。そして、外側駆動コイル１５Ａ，１５Ｂを外側トーションバー１１の軸線に対して線対称に形成し、互いに反対方向の電流を供給するようにしている。また、駆動コイル２Ａ，２Ｂの引出線路６Ａ，６Ａ及び６Ｂ，６Ｂは内側可動部１４から内側トーションバー１３及び外側可動部１２並びに外側トーションバー１１を介して固定部４側に引出され固定部４上に形成した一対の電極端子部８Ａ，８Ｂ及び９Ａ，９Ｂに接続している。
【００４０】
さらに、内側トーションバー１３の軸方向に平方な内側可動部１４の対辺側方で、例えば固定部４の外側部位には静磁界発生手段３Ａ，３Ｂが、また、外側トーションバー１１の軸方向に平方な外側可動部１２の対辺側方で、例えば固定部４の外側部位には静磁界発生手段２０Ａ，２０Ｂがそれぞれ反対磁極を対向して設けられている。
【００４１】
このように構成した上記第４実施形態は、駆動コイル２Ａ，２Ｂの各分岐線路７Ａ_１〜７Ａ_ｎ，７Ｂ_１〜７Ｂ_ｎを流れる電流に静磁界発生手段３Ａ，３Ｂにより静磁界を作用させてローレンツ力を発生させ、内側可動部１４を揺動し、外側駆動コイル１５Ａ，１５Ｂの各分岐線路１７Ａ_１〜１７Ａ_ｎ，１７Ｂ_１〜１７Ｂ_ｎを流れる電流に静磁界発生手段２０Ａ，２０Ｂにより静磁界を作用させてローレンツ力を発生させ、外側可動部１２を揺動する。
【００４２】
本第４実施形態によれば、第１実施形態と同様の効果に加え、駆動コイル２Ａ，２Ｂと外側駆動コイル１５Ａ，１５Ｂをそれぞれ個別に設けているので、内側可動部１４または外側可動部１２のいずれか一方を所定の揺動角の位置に停止させるような個別制御が可能である。
【００４３】
なお、本第４実施形態においても、図２に示すように、外側トーションバー１１の軸方向に平行な外側可動部１２の対辺近部傍ほど分岐線路１７Ａ_１〜１７Ａ_ｎ，１７Ｂ_１〜１７Ｂ_ｎの間隔を密に、また、内側トーションバー１３の軸方向に平行な内側可動部１４の対辺部近傍ほど分岐線路７Ａ_１〜７Ａ_ｎ，７Ｂ_１〜７Ｂ_ｎの間隔を密に形成してもよい。また、図３に示すように、各トーションバーの軸方向に平行な各可動部の対辺部近傍の各駆動コイルの部分を帯状線路に形成してもよい。さらに、各引出線路を図４のように帯状に、または図５のように梯子形状に形成してもよい。
【００４４】
また、第１〜第４実施形態において、駆動コイル２Ａと２Ｂまたは外側駆動コイル１５Ａと１５Ｂについては、常に一対設ける必要はなく、それぞれ片方だけ設けてもよい。
【００４５】
【発明の効果】
以上説明したように本発明のプレーナー型電磁アクチュエータによれば、駆動コイルをトーションバー上に形成された１本の引出線路と、該引出線路に接続し可動部の周縁部に沿って敷設した並列する複数の分岐線路と、により構成したことにより駆動コイルを１層配線とすることができ、駆動コイルの形成工程における断線不良を低減し、製造歩留まりを向上することができる。
【００４６】
また、トーションバーの軸方向に平行な可動部の対辺部近傍の駆動コイル部分を複数の分岐線路に形成したことにより、分岐線路の一部が断線してもフェールソフト機能を発揮してシステム停止の損失を最小限に抑えることができる。
【００４７】
さらに、トーションバーの軸方向に平行な可動部の対辺部近傍ほど分岐線路の間隔を密に形成したことにより、各分岐線路に発生するローレンツ力をトーションバーの軸方向に平行な可動部の対辺部近傍に集中させることができ、大きな駆動トルクを得ることができる。
【００４８】
さらにまた、トーションバーの軸方向に平行な可動部の対辺部近傍に幅の広い帯状線路を配置したので、駆動コイルの形成工程で線路の一部に塵埃等による欠陥部が発生しても、駆動コイルに断線不良が発生することがなく、製造歩留まりを向上することができる。
【００４９】
そして、本発明の二次元動作のプレーナー型電磁アクチュエータにおいては、内側可動部及び外側可動部のそれぞれに個別の駆動コイルを敷設しているので、内側可動部または外側可動部のいずれか一方を所定の揺動角の位置に停止させるような個別制御が可能である。
【図面の簡単な説明】
【図１】 本発明によるプレーナー型電磁アクチュエータの第１実施形態の概略構成図である。
【図２】 本発明によるプレーナー型電磁アクチュエータの第２実施形態の要部拡大平面図である。
【図３】 本発明によるプレーナー型電磁アクチュエータの第３実施形態の要部拡大平面図である。
【図４】 駆動コイルにおける引出線路の他の構成例を示す平面図である。
【図５】 駆動コイルにおける引出線路の更に他の構成例を示す平面図である。
【図６】 本発明によるプレーナー型電磁アクチュエータの第４実施形態の概略構成図である。
【符号の説明】
１…可動部
２Ａ，２Ｂ…駆動コイル
４…固定部
５…トーションバー
６Ａ，６Ｂ，１６Ａ，１６Ｂ…引出線路
７Ａ_１〜７Ｂ_ｎ，１７Ａ_１〜１７Ｂ_ｎ…分岐線路
１０Ａ，１０Ｂ…帯状線路
１１…外側トーションバー
１２…外側可動部
１３…内側トーションバー
１４…内側可動部
１５…外側駆動コイル[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a planar electromagnetic actuator that electromagnetically drives a movable part, and in particular, the drive coil lead line laid on the movable part does not intersect the drive coil and functions even if part of the drive coil is disconnected. The present invention relates to a planar electromagnetic actuator in which the failure is maintained (fail soft).
[0002]
[Prior art]
In a conventional planar type electromagnetic actuator, a drive coil is laid on a movable part that is pivotally supported by a torsion bar on a fixed part, and the drive coil part on the opposite side of the movable part parallel to the axial direction of the torsion bar. There is one in which a static magnetic field is applied and a movable part is oscillated by an interaction between a driving current flowing through a driving coil by energization and a static magnetic field (see, for example, Patent Documents 1 and 2).
[0003]
[Patent Document 1]
Japanese Patent No. 2722314 [Patent Document 2]
WO96 / 39643 Publication [0004]
[Problems to be solved by the invention]
However, in such a conventional planar type electromagnetic actuator, for example, in the case of Patent Document 1, since the drive coil is wound in a spiral shape, the winding coil side end of the drive coil is pulled out to the outside. In this case, it is necessary to form the lead wiring straddling the upper or lower portion of the drive coil. For this reason, the drive coil formation process requires at least three steps of the drive coil winding formation process, the insulating film formation process, and the lead wiring formation process, resulting in an increase in man-hours and cost increase. In the case of forming over the upper part, there is a problem that the leader line is easily disconnected due to the step coverage of the stepped part, and the manufacturing yield is deteriorated.
[0005]
In addition, in the case of the planar electromagnetic actuator of the two-dimensional operation described in Patent Document 2, a 1-turn drive coil is formed on each of the inner and outer movable parts and is connected in series with each other, so that the drive coil becomes a one-layer wiring. There is a feature that the drive coil can be easily formed. However, in this case, it is difficult to perform individual control that stops, for example, one of the inner and outer movable parts at a predetermined swing angle. Further, if the wiring structure of Patent Document 2 is applied to a planar electromagnetic actuator that operates one-dimensionally, it is not necessary to form the lead wiring across the upper or lower portion of the driving coil, but it is difficult to obtain a large driving force.
[0006]
Further, in both cases of Patent Documents 1 and 2, since the drive coil is constituted by one continuous wiring path, when a part of the drive coil is disconnected at the time of manufacture or drive, the drive current is there is a problem that but not fulfill the function of the blocked drive coil.
[0007]
Therefore, the present invention has been made paying attention to the above problems, and the drive coil lead line laid on the movable part does not intersect the drive coil, and functions even if a part of the drive coil is disconnected. An object of the present invention is to provide a planar electromagnetic actuator that is maintained.
[0008]
[Means for Solving the Problems]
To this end, according to the first aspect of the present invention, a drive coil for supplying a drive current is laid on a movable portion pivotally supported by a fixed portion with a pair of torsion bars so as to be parallel to the axial direction of the torsion bar. A planar electromagnetic actuator that swings the movable part by applying a static magnetic field to the drive coil part on the opposite side of the movable part, wherein the drive coil is connected to a pair of lead lines and the movable part. A plurality of branch lines that are laid in parallel to the opposite side part on at least one of the opposite side parts and closer to each other in the vicinity of the opposite side part and connected in parallel to the lead-out line, and through the torsion bar The lead line is drawn to the fixed part side.
[0009]
With such a configuration, at least one of the opposite side portions of the movable portion parallel to the axial direction of the torsion bar through the pair of lead lines drawn to the fixed portion side via the torsion bar is parallel to the opposite side portion and the opposite side portion. A drive current is supplied to each of the plurality of branch lines laid closer to each other in the vicinity , and a static magnetic field is applied to the current to swing the movable portion around the torsion bar. As a result, the driving coil has a single layer wiring, and the manufacturing yield of the driving coil is improved. Further, the function of the drive coil is maintained even if a part of the branch line is disconnected.
[0011]
According to a second aspect of the present invention, the pair of lead lines are preferably drawn out to the fixed portion side through the pair of torsion bars. Alternatively, as in claim 3 , the drive coils may be formed substantially symmetrical with respect to the axis of the torsion bar, and drive currents in opposite directions may be supplied. Further, as described in claim 4 , one end portions of the drive coils formed substantially symmetrical with respect to the axis of the torsion bar may be connected to each other.
[0012]
Furthermore, in the case of claim 5 , the pair of lead lines are formed wider than the branch line. Alternatively, each of the lead lines may be formed in a ladder shape as in claim 6 .
[0013]
In the case of the configuration of claim 7, the movable portion is a frame-shaped outer movable portion pivotally supported by the fixed portion with an outer torsion bar, and an axis of the outer torsion bar on the outer movable portion. The inner movable portion is pivotally supported by an orthogonal inner torsion bar so that the drive coil is laid on the inner movable portion and the outer movable portion.
[0014]
Further, as in claim 8 , instead of the plurality of branch lines, a single band-like line having a width wider than that of the branch lines may be provided.
[0015]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.
FIG. 1 shows a schematic configuration diagram of a first embodiment of a planar electromagnetic actuator according to the present invention.
In FIG. 1, the planar electromagnetic actuator according to the first embodiment swings a movable part by the interaction between a current flowing through a drive coil and a static magnetic field. The movable part 1, drive coils 2A and 2B, And static magnetic field generating means 3A, 3B.
[0016]
The movable part 1 is pivotally supported by the fixed part 4 so as to be swingable by a torsion bar 5, and is formed integrally with the fixed part 4 and the torsion bar 5 by anisotropic etching of the semiconductor substrate in the thickness direction. .
[0017]
Further, drive coils 2A and 2B are provided on at least one surface of the movable portion 1. The drive coils 2A, 2B obtain a Lorentz force by the interaction between a current flowing therethrough and a static magnetic field generated by static magnetic field generating means 3A, 3B, which will be described later, and swing the movable part 1. A pair of lead lines 6A, 6A and 6B, 6B drawn to the fixed part 4 side via the torsion bar 5 and the lead lines laid in parallel with the opposite side part of the movable part 1 parallel to the axial direction of the torsion bar 5 6A, 6A and 6B, the branch lengths that connected in parallel with respect to 6B of n number of L lines _7A 1 _{~7A n,} constitute the 7B 1 ~7B _n, by. The ends of the lead lines 6A, 6A and 6B, 6B are connected to a pair of electrode terminal portions 8A, 8B and 9A, 9B formed on the fixed portion 4, respectively. Further, the drive coils 2A and 2B are formed substantially symmetrical with respect to the axis of the torsion bar 5, and supply drive currents in opposite directions to each other by two drive devices (not shown) provided individually. . Note that one end of the drive coils 2A and 2B may be connected to each other. In this case, only one drive device is required.
[0018]
Also, static magnetic field generating means 3A and 3B are provided on the opposite side of the movable portion 1 which is square in the axial direction of the torsion bar 5, for example, on the upper surface portion of the fixed portion 4. The static magnetic field generating means 3A, 3B imparts a static magnetic field drive coils 2A opposite sides in the vicinity of the movable portion 1, the branch lines _7A 1 _~7A n of _2B, the 7B 1 ~7B _n, the branch lines 7A ₁ -7A _n , 7B ₁ -7B _n oscillates the movable part 1 by the Lorentz force generated by the interaction with the driving current, and the opposite magnetic poles are arranged opposite to each other with the movable part 1 in between. For example, a permanent magnet. The static magnetic field generating means 3A, 3B, the upper surface of the branch lines _7A 1 _{~7A n,} 7B 1 if it is possible to impart a static magnetic field component perpendicular to the ～7B _n the fixed part 4 in the plane of the movable part 1 It is not limited to the part, and may be arranged at any part outside the movable part 1.
[0019]
Next, the operation of the first embodiment will be described.
In the first embodiment, the length of the drive coils 2A and 2B is L, and the drive current I in the direction of the arrow in FIG. 1 is passed through each of the _n branch lines 7A _{1 to} 7A _n and 7B _{1 to} 7B _n . When the magnetic field B is applied to each driving current I by the static magnetic field generating means 3A, 3B, the branch lines 7A _{1 to} 7A _n and 7B _{1 to} 7B _n are respectively connected to the branch currents 7A _{1 to} 7A _n due to the interaction between the driving current I and the magnetic field B. Lorentz force f as f = L (I × B) (1)
Occurs. Therefore, the total Lorentz force F is applied to the opposite side portion of the movable portion 1 parallel to the axial direction of the torsion bar 5.

Occurs and the movable part 1 is swung.
[0020]
In this case, the amount of heat generated in the drive coils 2A and 2B can be represented by power consumption in the drive coils 2A and 2B. Here, _{assuming that} the resistance values of the branch lines 7A _{1 to} 7A _n and 7B _{1 to} 7B _n are r, the parallel resistance values Ra and Rb of the drive coils 2A and 2B are given by the symmetry,
Ra = Rb = r / n (3)
It is expressed.
[0021]
Each branch lines _7A 1 _~7A n as described _above, the 7B 1 ~7B _n, since the driving current I is flowing, the drive coils 2A, flowing 2B total drive current Ia, Ib is
Ia = Ib = nI (4)
It becomes. Therefore, the power consumption Pa and Pb in the drive coils 2A and 2B are respectively

The total power consumption P is

It becomes.
[0022]
On the other hand, the total Lorentz force Fg generated in a conventional planar type electromagnetic actuator in which a spiral drive coil having a number of turns n is laid along the peripheral edge of a generally rectangular movable portion 1 is the drive current I and the drive coil. If the acting magnetic field is B, and the length of the drive coil part on the opposite side of the movable part 1 parallel to the axial direction of the torsion bar is L,
Fg = 2nL (I × B)
This is the same as equation (2). In this case, the amount of heat generated in the drive coil, that is, the power consumption Pg of the drive coil is R, where R is the total resistance value of the drive coil.
Pg = RI ² (8)
It can be expressed as. At this time, the resistance value of the portion of the drive coil in the vicinity of the opposite side portion of the movable portion parallel to the axial direction of the torsion bar can be expressed as approximately R / (2n), which is the same in line width, thickness, and the like each branch lines _7A 1 _~7A n was formed under the conditions _{substantially} equal to the resistance value r of 7B 1 ~7B _n. Therefore,
r = R / (2n) (9)
Substituting equation (9) into equation (8),
Pg = 2nrI ²
Get. This is equal to the total power consumption P in the first embodiment of the equation (7).
[0023]
As described above, in the first embodiment, the driving coils 2A, 2B are supplied with a driving current n times that of the conventional planar type electromagnetic actuator having a driving coil having the number of turns n. It is possible to obtain the same Lorentz force while suppressing the heat generation amount of 2B to be equal to that of the conventional planar type electromagnetic actuator.
[0024]
The same applies to the case where one end of each of the drive coils 2A and 2B is connected to each other and configured as one drive coil.
[0025]
As described above, according to the first embodiment, since it is not necessary to provide a lead-out line across the drive coils 2A and 2B, it is possible to form a single-layer wiring and reduce the number of steps for forming the drive coils 2A and 2B. Cost reduction. Further, disconnection defects in the process of forming the drive coils 2A and 2B are reduced, and the manufacturing yield is improved.
[0026]
In addition, since the drive coils 2A and 2B have a structure in which a plurality of branch lines 7A _{1 to} 7A _n and 7B _{1 to} 7B _n are connected in parallel, the functions of the drive coils 2A and 2B are maintained even if a part of the branch line is disconnected. (Fail soft). Therefore, in this case, if the disconnection is detected by detecting an increase in the resistance value of the drive coils 2A and 2B and replaced at an appropriate time when the operation rate of the planar electromagnetic actuator is low, the disconnection of the drive coil System failure (loss) associated with an accident can be minimized.
[0027]
Further, the lead line 6A on the torsion bar 5, 6A and 6B, since the direction of the current flowing through the 6B are opposite, the lead line 6A on the torsion bar 5, 6A and 6B, the direction of the Lorentz force generated in the 6B On the contrary, it is possible to prevent the torsion bar 6 from generating unnecessary operations that cancel each other and prevent the normal operation of the planar electromagnetic actuator.
[0028]
When the drive currents in the same direction are supplied to the drive coils 2A and 2B, the movable part 1 can be operated in the vertical direction. Therefore, by supplying alternating drive currents in opposite directions to the drive coils 2A and 2B and supplying the same direct current in a superimposed manner, the vertical displacement (offset) when the movable part 1 swings is corrected. can do.
[0029]
In the first embodiment, the drive currents Ia and Ib are n times that of a conventional planar electromagnetic actuator having a drive coil with the number of turns n as shown in the equation (4). It is expressed as (R × I) / n by the equations (4) and (9), which is 1 / n times that of the conventional planar type electromagnetic actuator. Therefore, the first embodiment is effective when the power supply voltage has an upper limit.
[0030]
Next, a planar electromagnetic actuator according to a second embodiment of the present invention will be described with reference to FIG. Here, the same elements as those in the first embodiment are denoted by the same reference numerals, and different parts will be described.
[0031]
The second embodiment shown in FIG. 2, the drive coils 2A, each branch lines _7A 1 _~7A n of _2B, the 7B 1 ~7B _n, the more near opposite side portions of the parallel movable portion 1 in the axial direction of the torsion bar 5 branches line _7A 1 _{~7A n,} and the distance the densely formed structure of 7B 1 ~7B _n.
[0032]
According to the second embodiment, in addition to the effects of the first embodiment, the Lorentz force generated in each of the branch lines 7A _{1 to} 7A _n and 7B _{1 to} 7B _n is movable parallel to the axial direction of the torsion bar 5. It will concentrate in the vicinity of the opposite side part of the part 1, and a big drive torque can be obtained.
[0033]
Further, the line width of the branch line in the vicinity of the opposite side of the movable part 1 may be widened so that the resistance value becomes lower than that of other branch lines. In this case, it is possible to increase the drive current flowing through the branch line in the vicinity of the opposite side portion of the movable portion 1 parallel to the axial direction of the torsion bar 5 and obtain a large drive torque.
[0034]
Next, a third embodiment of the planar electromagnetic actuator according to the present invention will be described with reference to FIG. Here, the same elements as those in the first embodiment are denoted by the same reference numerals, and different parts will be described.
Third embodiment shown in FIG. 3, the branch lines _7A 1 _~7A n described _above, 7B 1 _{~7B n} the branch lines _7A 1 _~7A n _instead, 7B 1 _{~7B n} width one wider than the The belt-like lines 10A and 10B are provided.
[0035]
According to the third embodiment, in addition to the effects of the first embodiment, since the wide strip-like lines 10A and 10B are arranged in the vicinity of the opposite side of the movable part 1 parallel to the axial direction of the torsion bar 5, the drive Even if a defect due to dust or the like occurs in part of the line in the formation process of the coils 2A and 2B, disconnection failure does not occur in the drive coils 2A and 2B, and the manufacturing yield can be improved.
[0036]
In any of the first to third embodiments, the extraction line 6A, 6A and 6B, 6B are branching the line width as shown in FIG. 4 line _7A 1 _{~7A n,} than the width of 7B 1 ~7B _n May be formed widely, or may be formed in a ladder shape as shown in FIG. In this case, when the line width is increased as shown in FIG. 4, it is possible to suppress power loss in the lead-out line and to suppress occurrence of disconnection failure during driving or formation of the driving coil. In addition, when the lead-out lines 6A, 6A and 6B, 6B are formed in a ladder shape as shown in FIG. 5, for example, even when a disconnection occurs at the time indicated by the cross in FIG. Flows in the directions of arrows A, B, and C in the figure, and the function as the drive coils 2A and 2B can be maintained.
[0037]
Next, a fourth embodiment of the planar electromagnetic actuator according to the present invention will be described with reference to FIG. Here, the same elements as those in the first embodiment are denoted by the same reference numerals, and different parts will be described.
[0038]
In the fourth embodiment shown in FIG. 6, the movable part 1 has a frame-like outer movable part 12 pivotally supported on the fixed part 4 by an outer torsion bar 11, and the outer movable part 12 has the outer torsion. The inner movable portion 14 is pivotally supported by an inner torsion bar 13 orthogonal to the axis of the bar 11. The drive coils 2A and 2B are laid on the inner movable portion 14, and another movable portion 12 is provided on the outer movable portion 12. Two-dimensional motion planar electromagnetic actuators were constructed by laying outer drive coils 15A and 15B as drive coils.
[0039]
The outer drive coils 15 </ b> A and 15 </ b> B are a pair of lead lines 16 </ b> A, 16 </ b> A and 16 </ b> B, 16 </ b> B drawn from the outer movable part 12 through the outer torsion bar 11 to the fixed part 4 side and the axial direction of the outer torsion bar 11. and n branch lines _{17A 1 ~17A n, 17B 1 ~17B} n connected in parallel to each other opposite side portions parallel to laid the lead line 16A of the outer movable portion 12, 16A and 16B, with respect 16B parallel to, The ends of the lead lines 16A, 16A and 16B, 16B are connected to a pair of electrode terminal portions 18A, 18B and 19A, 19B formed on the fixed portion 4, respectively. The outer drive coils 15A and 15B are formed symmetrically with respect to the axis of the outer torsion bar 11, and currents in opposite directions are supplied. The lead lines 6A, 6A and 6B, 6B of the drive coils 2A, 2B are drawn from the inner movable portion 14 to the fixed portion 4 side through the inner torsion bar 13, the outer movable portion 12, and the outer torsion bar 11. It is connected to the pair of electrode terminal portions 8A, 8B and 9A, 9B formed above.
[0040]
Furthermore, static magnetic field generating means 3A and 3B are provided on the opposite side of the inner movable portion 14 that is square in the axial direction of the inner torsion bar 13, for example, on the outer portion of the fixed portion 4, and in the axial direction of the outer torsion bar 11. Static magnetic field generating means 20A and 20B are provided on opposite sides of the square outer movable portion 12, for example, on the outer portion of the fixed portion 4, with opposite magnetic poles facing each other.
[0041]
Thus constituted the fourth embodiment, the drive coils 2A, each branch lines _7A 1 _~7A n of _2B, 7B 1 ~7B _n the current flowing to the static magnetic field generating means 3A, by applying a static magnetic field by 3B to generate a Lorentz force, it swings the inner movable portion 14, the outer driving coil 15A, the branch lines _17A 1 _{~17A n} of 15B, _17B 1 ~17B _n static magnetic field generating means 20A to the current flowing through the static magnetic field by 20B Is applied to generate Lorentz force, and the outer movable portion 12 is swung.
[0042]
According to the fourth embodiment, in addition to the same effects as those of the first embodiment, the drive coils 2A and 2B and the outer drive coils 15A and 15B are individually provided, so that the inner movable portion 14 or the outer movable portion 12 is provided. Individual control is possible in which one of these is stopped at a position of a predetermined swing angle.
[0043]
Also in the fourth embodiment, as shown in FIG. 2, branch lines 17 </ b _{> A 1 to} 17 </ b> A _n and 17 </ b _{> B 1 to} 17 </ b _> B _{n are} located near the opposite side of the outer movable portion 12 parallel to the axial direction of the outer torsion bar 11. The intervals between the branch lines 7A _{1 to} 7A _n and 7B _{1 to} 7B _n may be formed closer to each other near the opposite side of the inner movable portion 14 parallel to the axial direction of the inner torsion bar 13. . Moreover, as shown in FIG. 3, you may form the part of each drive coil in the vicinity of the opposite side part of each movable part parallel to the axial direction of each torsion bar in a strip | belt-shaped track | line. Further, each lead-out line may be formed in a strip shape as shown in FIG. 4 or in a ladder shape as shown in FIG.
[0044]
In the first to fourth embodiments, the drive coils 2A and 2B or the outer drive coils 15A and 15B do not always need to be provided in pairs, and only one of them may be provided.
[0045]
【The invention's effect】
As described above, according to the planar type electromagnetic actuator of the present invention, the drive coil is connected to one lead line formed on the torsion bar, and the parallel connected to the lead line and laid along the periphery of the movable part. The drive coil can be formed as a single-layer wiring by being configured with a plurality of branch lines to be formed, and disconnection defects in the drive coil formation process can be reduced and the manufacturing yield can be improved.
[0046]
In addition, the drive coil part near the opposite side of the movable part parallel to the axial direction of the torsion bar is formed on multiple branch lines, so that even if part of the branch line is disconnected, the fail soft function is exhibited and the system is stopped. Loss can be minimized.
[0047]
Furthermore, the distance between the branch lines is formed closer to the opposite side of the movable part parallel to the axial direction of the torsion bar, so that the Lorentz force generated in each branch line is reduced to the opposite side of the movable part parallel to the axial direction of the torsion bar. It can be concentrated in the vicinity of the part, and a large driving torque can be obtained.
[0048]
Furthermore, since a wide strip-shaped line is arranged near the opposite side of the movable part parallel to the axial direction of the torsion bar, even if a defective part due to dust or the like occurs in a part of the line in the drive coil formation process, No disconnection failure occurs in the drive coil, and the manufacturing yield can be improved.
[0049]
In the two-dimensional planar electromagnetic actuator of the present invention, since the individual drive coils are laid on each of the inner movable portion and the outer movable portion, either the inner movable portion or the outer movable portion is predetermined. It is possible to perform individual control to stop at the position of the swing angle.
[Brief description of the drawings]
FIG. 1 is a schematic configuration diagram of a first embodiment of a planar electromagnetic actuator according to the present invention.
FIG. 2 is an enlarged plan view of a main part of a second embodiment of a planar electromagnetic actuator according to the present invention.
FIG. 3 is an enlarged plan view of a main part of a third embodiment of a planar electromagnetic actuator according to the present invention.
FIG. 4 is a plan view showing another configuration example of the lead line in the drive coil.
FIG. 5 is a plan view showing still another configuration example of the lead line in the drive coil.
FIG. 6 is a schematic configuration diagram of a fourth embodiment of a planar electromagnetic actuator according to the present invention.
[Explanation of symbols]
1 ... movable part 2A, 2B ... driving coil 4 ... fixing portion 5 ... torsion bars 6A, 6B, 16A, 16B ... lead line _{7A 1 ~7B n, 17A 1 ~17B} n ... branch lines 10A, 10B ... stripline 11 ... Outer torsion bar 12 ... outer movable part 13 ... inner torsion bar 14 ... inner movable part 15 ... outer drive coil

Claims (8)

A drive coil for supplying a drive current is laid on a movable part pivotally supported by a fixed part with a pair of torsion bars, and the drive coil part on the opposite side of the movable part parallel to the axial direction of the torsion bar A planar electromagnetic actuator that swings the movable part by applying a static magnetic field to
The drive coil is laid in parallel to the opposite side portion on at least one of the pair of lead lines and the opposite side portion of the movable portion , and is closely connected to the lead line in parallel with each other in the vicinity of the opposite side portion. A planar electromagnetic actuator comprising: a plurality of branch lines; and the lead-out line is drawn out to the fixed portion side through the torsion bar. 2. The planar electromagnetic actuator according to claim 1 , wherein the pair of lead lines are respectively drawn out to the fixed portion side through the pair of torsion bars. 3. The planar electromagnetic actuator according to claim 1 , wherein the drive coils are formed substantially symmetrically with respect to the axis of the torsion bar so as to supply drive currents in directions opposite to each other. 4. The planar electromagnetic actuator according to claim 3 , wherein one ends of drive coils formed substantially symmetrically with respect to the axis of the torsion bar are connected to each other. The planar actuator according to any one of claims 1 to 4 , wherein the pair of lead lines are formed wider than the branch line. 6. The planar electromagnetic actuator according to claim 1 , wherein each of the lead lines is formed in a ladder shape. The movable part is swingable on a fixed part by a frame-like outer movable part pivotally supported by an outer torsion bar, and on the outer movable part by an inner torsion bar orthogonal to the axis of the outer torsion bar. The planar type according to any one of claims 1 to 6 , characterized in that the driving coil is laid on each of the inner movable portion and the outer movable portion. Electromagnetic actuator. The planar electromagnetic actuator according to any one of claims 1 to 7 , wherein one strip-like line wider than the branch line is provided instead of the plurality of branch lines.

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