JP4006991B2 - Double floor structure - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a double floor structure including a double floor formed across a certain space.
[0002]
[Prior art]
As a general double-floor structure, a chip is mounted on a printed circuit board with a double floor where the wiring space for signal cables and power supply cables for OA equipment, etc. is provided between two floors, and an air conditioning room under the lower floor. The double floor structure of the clean room where etc. are performed is known. In these double floor structures, a plurality of round steel bars having a diameter of about 9 mm, which form bundles at appropriate intervals, are erected on the lower floor surface or floor base material. A floor material holder is fixed at a height of 300 mm to 600 mm from the lower floor, and the floor material is placed across the floor material holder. At this time, the flooring has a square shape, and its four corners are supported by the flooring holder.
[0003]
[Problems to be solved by the invention]
By the way, the mounting of the chip on the printed circuit board is repeatedly performed at a high speed by the mounting apparatus in which the bed on which the substrate is mounted is moved and positioned by a predetermined distance and the chip is mounted on the stopped substrate. At this time, high positioning accuracy is required to place the chip on the substrate printed at a pitch of several μm.
[0004]
In some of the mounting apparatuses, the positioning of the substrate, that is, the movement and stop of the bed is repeated with a short cycle of 0.1 sec / cycle, and the bed on which the substrate is placed moves at a high speed in the above cycle. Therefore, the device itself becomes a vibration source. At this time, in the conventional double floor structure, since the bundle is thin and the floor is supported at a high position of the bundle, the rigidity in the vertical direction and the horizontal direction is low. For this reason, the vibration is greatly amplified and a long time is required until the vibration is attenuated, and there is a problem that the positioning accuracy of the substrate is lowered and the performance of the apparatus cannot be maintained.
[0005]
On the other hand, a large surface plate having a weight of about 3.5 t to 5 t has high rigidity and high vibration damping performance. This large surface plate has an area of 1200 mm × 3000 mm, and is made of a stainless steel plate having a thickness of 60 mm, a plate material in which a stainless steel plate is wound around precast concrete having a thickness of 200 mm, and bolted to a heavy steel material such as H-shaped steel. is there. Since the surface plate is required to have a high horizontal surface accuracy, the cost increases because it takes a lot of time to secure the horizontal surface accuracy as well as the accuracy of the single plate.
[0006]
Furthermore, when installing a large surface plate with a large weight, large-scale equipment is required. However, when the installation place is a clean room, such equipment cannot be introduced. For this reason, there has been a problem that workability is poor because work must be performed using special tridents and rollers.
[0007]
In view of the above-described conventional problems, an object of the present invention is to provide a double floor structure with high vibration damping performance, low cost, and good workability.
[0008]
[Means for Solving the Problems]
In order to achieve such an object, the double floor structure according to the present invention is a double floor structure formed by sandwiching a space between two upper and lower floor materials, and is made of aluminum or a damping material laid as an upper floor. The formed high-rigidity floor material is a floor panel part that forms the floor surface, a peripheral wall part that hangs from the periphery of the floor panel part and forms legs that are connected in the circumferential direction, and a reinforcement that spans the peripheral wall part A seat plate for mounting the peripheral wall portion, the lower end of the peripheral wall portion being supported by a stud bolt standing on the floor base material of the lower floor at the lower portion of the space. A gap is formed by a taper provided on the lower end side of the peripheral wall portion, and an upper end portion of the stud bolt inserted through the seat plate protrudes into the gap, and the seat plate is Nut for fixing to the stud bolt , Characterized in that it is disposed in the gap.
[0009]
Further, a support material for supporting the seat plate is provided between the seat plate and the lower floor so as to suppress bending deformation of the seat plate .
[0010]
According to the present invention, the high-rigidity flooring is provided with high rigidity and strength without using a solid material having a predetermined thickness because the peripheral wall portion provided over the entire circumference and the reinforcing rib are integrally provided. be able to. That is, by increasing the strength of the flooring with the peripheral wall portion and the reinforcing rib, the flooring can be made into a molded product made of aluminum or vibration-damping material, and by using a weight-reduced flooring, Carrying in / out and construction work can be performed easily.
[0011]
In addition, since the lower end of the peripheral wall is fixed to the stud bolt at the lower part of the space between the upper and lower floor materials, the high-rigidity floor material is supported at a low position close to the floor base material on which the stud bolt is erected. Is done. Therefore, since the moment acting on the lower end of the stud bolt is small even when horizontal vibration is applied, the stud bolt is difficult to be deformed, and it is possible to achieve high rigidity together with the flooring material, and to quickly attenuate the vibration of the upper floor. be able to.
[0012]
In addition, the flooring is made of aluminum or vibration-damping material and has a simple structure with a peripheral wall and reinforcing ribs, so it can be cast using sand molds, and is a versatile stud bolt as a bundle. This double floor structure can be realized at low cost.
[0013]
Further, the support material provided between the seat plate and the lower floor can firmly and firmly support the seat plate on which the high-rigidity floor material is placed, and can suppress bending deformation of the seat plate. Free vibration can be suppressed, and the vibration suppression effect or vibration damping performance of the double floor structure can be further improved.
[0014]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, a double floor structure of a clean room provided in, for example, a semiconductor factory as an embodiment of the present invention will be described with reference to the accompanying drawings.
[0015]
1 is a cross-sectional view showing an embodiment of the double floor structure of the present invention, FIG. 2 is a plan view of a seat plate, FIG. 3 is a plan view of a level adjusting plate, and FIG. 4 is a plan view of a high-rigidity flooring. 5 is a side sectional view of the high-rigidity flooring.
[0016]
The clean room to which the double floor structure of the present embodiment is applied includes an air conditioning equipment room below the double floor. In the upper part of the air-conditioning equipment room, joists 52 as a floor base material are bridged at a pitch of about 600 mm between the beams constituting the clean room frame, and the lower floor material 50 is stretched thereon. On this lower floor, a stud bolt 20 (diameter 16 mm, length 90 mm) erected on a base steel plate 22 of □ 150 mm and thickness 9 mm is disposed on the joist 52, and the base steel plate 22 is the floor material. 50 is adhered. Here, the base steel plate 22 may be directly bonded onto the joist 52.
[0017]
The double floor structure of the present embodiment is formed by fixing a high-rigidity floor material 30 to the stud bolt 20 via a level adjustment plate 24 and a seat plate 26. At this time, among the plurality of stud bolts 20 erected at a pitch of 600 mm, the seat plate 26 of the four stud bolts 20 provided at the four corners of the high-rigidity floor material 30 having a square shape with a side of 600 mm. Four corners are placed. Then, the corners of the four high-rigidity floor materials 30 are placed on each seat plate 26, whereby the high-rigidity floor materials 30 are aligned vertically and horizontally to form the upper floor surface 12.
[0018]
More specifically, the level adjusting plate 24 is a disk-shaped steel plate having a diameter of 50 mm and a thickness of 24 mm, and a tap hole 24 a screwed into the stud bolt 20 is provided at the center thereof.
[0019]
The seat plate 26 is a square aluminum plate having a thickness of 22 mm and a side of 100 mm. A stud bolt 20 is penetrated through the center, and a loose hole 26 a having a diameter larger than the diameter of the stud bolt 20 is provided. Between the loose hole 26a and the four corners of the seat plate 26, fixing holes 26b for fixing the high-rigidity flooring 30 are provided at substantially intermediate positions. A tap is formed in the fixing hole 26b, penetrates the high-rigidity flooring 30, and a long bolt 32 described later is screwed.
Each stud bolt 20 is screwed with a level adjusting plate 24, and a seat plate 26 is placed on the stud bolt 20 through the loose hole 26a. At this time, when the level adjusting plate 24 is rotated, the seat plate 26 and the level adjusting plate 24 are moved up and down by the stud bolt 20 and the tap hole 24a of the level adjusting plate 24.
[0020]
The high-rigidity flooring 30 is made of aluminum, has a square shape and a floor panel portion 30a having a thickness of about 40 mm, and a peripheral wall portion 30b that is suspended from the periphery of the floor panel portion 30a and is connected in the circumferential direction to form legs. The reinforcing ribs 30c are formed integrally with the peripheral wall portion 30b and have a lattice shape.
[0021]
The peripheral wall portion 30b has a height of about 180 mm, a thickness on the upper end side of about 50 mm, and has a tapered shape that narrows downward. The reinforcing ribs 30c have a height of about 200 mm and a thickness of about 40 mm on the inner side of the peripheral wall portion 30b, and are provided at equal pitches (approximately 170 mm intervals), two in each length and width. Further, through holes 30d through which the fixing long bolts 32 are inserted are provided at the four corners of the high-rigidity flooring 30, and seats 30e in which the heads of the long bolts 32 are stored are provided on the floor 12 side. It has been.
[0022]
That is, the high-rigidity flooring 30 is provided with a peripheral wall portion 30b provided over the entire circumference and a reinforcing rib 30c so as to have a high rigidity and strength even if the light-weight material such as aluminum is hollowed out. Can be provided. Therefore, carrying-in and construction work can be easily performed without using large equipment or special equipment as in the conventional large surface plate.
[0023]
Furthermore, since this high-rigidity flooring 30 has a simple structure made of aluminum and is further reduced in size to a square shape with a side of 600 mm, it can be manufactured by casting using a sand mold, and is highly versatile as a bundle. Since the stud bolt 20 is used, this floor structure can be realized at a very low cost.
[0024]
Four different corners of the high-rigidity flooring 30 are placed on each seat plate 26, and the corners of the four high-rigidity flooring 30 are abutted at the center of the seating plate 26 to form the floor surface 12. Is done. At this time, gaps 36 are formed on the lower end side of the peripheral wall portion 30b of the high-rigidity flooring 30 by the taper of the peripheral wall portion 30b, and the stud bolt 20 penetrating the seat plate 26 projects into the gap 36. The stud bolt 20 is inserted with a washer 34 sufficiently larger than the loose hole 26a, and a nut 28 is screwed onto the washer 34. That is, the nut 28 and the level adjusting plate 24 become a double nut, and the seat plate 26 can be firmly fixed to the stud bolt 20.
[0025]
This double floor level adjustment is performed by placing a seat plate 26 and a high-rigidity floor material 30 on a level adjustment plate 24 that is screwed into the stud bolt 20 and temporarily fixed to a predetermined height. When a difference occurs in the level of the floor surface 12 between the high-rigidity floor materials 30 to be moved, the level adjusting plate 24 is rotated forward or backward to move up and down so that the floor surface 12 becomes flat.
[0026]
After the floor 12 is adjusted to be flat, the nut 28 of the stud bolt 20 is tightened, and the seat plate 26 is sandwiched between the level adjusting plate 24 and the nut 28 and fixed. Thereafter, the four corners of the highly rigid flooring 30 are fixed to each seat plate 26 with long bolts 32. Here, although the length of the stud bolt 20 is 90 mm, since the level adjusting plate 24, the seat plate 26 and the nut 28 are penetrated, the length of the stud bolt 20 protruding below the level adjusting plate 24 is 15 mm. It will be about. That is, the positions of the level adjustment plate 24 and the seat plate 26 that support the high-rigidity flooring 30 are set to a position extremely lower than the height of the space formed between the upper and lower floors.
[0027]
By the way, the length of the stud bolt 20 protruding below the level adjustment plate 24 and above the nut 28 is such a length that the level adjustment plate 24 can move up and down during level adjustment. It is only necessary to provide a length that can absorb errors due to the standing work of the stud bolt 20 and the construction of the screwed level adjusting plate 24. Therefore, in order to improve the vibration damping performance of the floor, it is desirable to set the fixed position of the level adjusting plate 24 and the seat plate 26 to a lower position.
[0028]
According to the present embodiment, the high-rigidity flooring 30 has the lower end of the peripheral wall portion 30b placed on the seat plate 26, and the seat plate 26 is fixed to the stud bolt 20 at the lower portion of the space 38 between the upper and lower flooring materials. Therefore, even if horizontal vibration is applied to the floor, the moment acting on the lower end of the stud bolt 20 is small, so that the stud bolt 20 is not easily deformed, and the rigidity of the entire floor together with the high-rigidity flooring 30 is increased. Therefore, the vibration of the device placed on the floor can be attenuated at an early stage.
[0029]
6 and 7 show a modification in which a structure for rigidly supporting the seat plate 26 is added. Even in the above embodiment, a sufficient vibration suppressing effect or vibration damping performance can be ensured, but in this modification, a further vibration suppressing effect can be ensured. As is understood from FIG. 2, the seat plate 26 of the above-described embodiment is superimposed on the level adjusting plate 24 so as to protrude outward. This is because the seat plate 26 is formed with the minimum necessary plane dimensions that allow the peripheral wall portions 30b of the four high-rigidity flooring materials 30 to be stably placed and the long bolts 32 to be fastened. This is because the bending rigidity of the level adjustment plate 24 is secured as high as possible, and the level adjusting plate 24 is also formed in a disk shape having a small outer diameter so as to secure a highly isotropic bending rigidity around the stat bolt 20. As a result of adopting such a configuration, the seat plate 26 protrudes around the level adjusting plate 24 and protrudes outward from the level adjusting plate 24. The projecting portion has a cantilever shape and is easily bent and deformed with a decrease in bending rigidity. It is also conceivable to induce free vibration to reduce the vibration suppression effect or vibration damping performance.
[0030]
In the illustrated modification, a support structure for supporting the protruding portion 26d from the base steel plate 22 is provided in order to increase the rigidity of the protruding portion 26d and suppress its free vibration. Specifically, the support structure includes a screw hole 40 formed through each projecting portion 26d of the seat plate 26 for placing the peripheral wall portion 30b of the high-rigidity flooring 30 in the vertical direction; One end is screwed into the screw hole 40, and the other end is screwed to the screw rod 42 as a support member capable of adjusting the protruding amount from the seat plate 26 so as to abut the base steel plate 22. The nut 44 is configured to include a nut 44 that is pressed against the seat plate 26 by being fastened to the screw rod 42 that is in contact with the base steel plate 22 at the other end, and firmly press-fixes the screw rod 42 to the base steel plate 22.
[0031]
In this support structure, after the level adjustment by the level adjustment plate 24, the nut 44 is screwed into the screw rod 42 which is screwed into the screw hole 40 from above the seat plate 26 and protrudes from below the seat plate 26, and then the base steel plate. The screw rod 42 is extended from the screw hole 40 until it abuts against the base plate 22, and the nut 44 is tightened in a state where the screw rod 42 is in contact with the base steel plate 22, so that it is installed between the base steel plate 22 and the seat plate 26. . In the modified example as described above, the protruding portion 26d of the seat plate 26 protruding outside the level adjusting plate 24 can be supported firmly and rigidly, and the protruding portion 26d can be made highly rigid, so that the seat plate The bending deformation of 26 can be suppressed and the free vibration can be suppressed, and the vibration suppressing effect or vibration damping performance of the double floor structure can be further improved.
[0032]
In the above-described embodiment, the high-rigidity flooring 30 is exemplified by an aluminum one. However, the high-rigidity flooring 30 is a well-known lightweight damping material such as damping steel or damping alloy. May be molded as a material. Even with these damping materials, the high-rigidity flooring 30 can be produced in the same manner as in the case of aluminum, and a better vibration suppressing effect or vibration damping performance can be ensured.
[0033]
【The invention's effect】
As described above, the high-rigidity flooring is made of aluminum or a vibration damping material, and the floor panel part is provided with the peripheral wall and reinforcing ribs to increase the strength, so a lightweight and high-rigidity flooring is realized, Carrying in and installing high-rigidity flooring can be done easily.
[0034]
In addition, the high-rigidity flooring is the lower part of the space between the two upper and lower flooring, and the lower end of the peripheral wall is fixed to the stud bolt, so the moment that acts on the lower end of the stud bolt even when horizontal vibrations are applied Is small. Therefore, since the rigidity of the whole floor can be enhanced together with the floor material, vibration can be attenuated at an early stage.
[0035]
In addition, the flooring is made of aluminum or a vibration-damping material and has a simple structure, so it can be cast at low cost using a sand mold. A heavy floor structure can be realized.
[0036]
Further, the support material provided between the seat plate and the lower floor can firmly and firmly support the seat plate on which the high-rigidity floor material is placed, and can suppress bending deformation of the seat plate. Free vibration can be suppressed, and the vibration suppression effect or vibration damping performance of the double floor structure can be further improved.
[Brief description of the drawings]
FIG. 1 is a cross-sectional view showing an embodiment of a double floor structure of the present invention.
FIG. 2 is a plan view showing a seat plate.
FIG. 3 is a plan view showing a level adjustment plate.
FIG. 4 is a plan view showing a highly rigid flooring. FIG. 5 is a side sectional view showing the highly rigid flooring.
FIG. 6 is a partially broken side view of the periphery of a seat plate showing a modification of the embodiment of the double floor structure of the present invention.
FIG. 7 is a plan view of the periphery of the seat plate of the modification shown in FIG.
[Explanation of symbols]
20 Stud bolt 26 Seat plate 30 High-rigidity flooring 30a Flooring panel 30b Peripheral wall 30c Reinforcement rib 38 Space between upper and lower flooring 42 Screw rod 52 joist (floor base material)

Claims (3)

A double floor structure formed by sandwiching a space between two upper and lower floor materials,
The aluminum high-rigidity floor material laid as the upper floor has a floor panel part that forms the floor surface, a peripheral wall part that hangs from the periphery of the floor panel part and forms legs connected in the circumferential direction, and on the peripheral wall part It is configured integrally with a reinforcing rib that is bridged, and the lower end of the peripheral wall portion is supported by a stud bolt that is erected on the floor base material of the lower floor at the lower part of the space ,
A seat plate for mounting the peripheral wall portion is provided,
A gap is formed by a taper provided on the lower end side of the peripheral wall portion,
An upper end portion of the stud bolt inserted through the seat plate protrudes into the gap,
A double floor structure , wherein a nut for fixing the seat plate to the stud bolt is disposed in the gap . A double floor structure formed by sandwiching a space between two upper and lower floor materials,
A high-rigidity floor material formed of a damping material that is laid as an upper floor is a floor panel portion that forms a floor surface, and a peripheral wall portion that is suspended from the periphery of the floor panel portion and forms legs that are connected in the circumferential direction. The reinforcing ribs are integrally formed with the peripheral wall portion, and the lower end of the peripheral wall portion is supported by a stud bolt erected on the floor base material of the lower floor at the lower portion of the space .
A seat plate for mounting the peripheral wall portion is provided,
A gap is formed by a taper provided on the lower end side of the peripheral wall portion,
An upper end portion of the stud bolt inserted through the seat plate protrudes into the gap,
A double floor structure , wherein a nut for fixing the seat plate to the stud bolt is disposed in the gap .   The double floor structure according to claim 1 or 2, wherein a support member for supporting the seat plate is provided between the seat plate and the lower floor so as to suppress bending deformation of the seat plate. .

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