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JP3960636B2 - Light emitting element - Google Patents

Light emitting element Download PDF

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Publication number
JP3960636B2
JP3960636B2 JP25390195A JP25390195A JP3960636B2 JP 3960636 B2 JP3960636 B2 JP 3960636B2 JP 25390195 A JP25390195 A JP 25390195A JP 25390195 A JP25390195 A JP 25390195A JP 3960636 B2 JP3960636 B2 JP 3960636B2
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Japan
Prior art keywords
electrode
light emitting
type
emitting element
layer
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JP25390195A
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Japanese (ja)
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JPH0997922A (en
Inventor
邦生 竹内
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Sanyo Electric Co Ltd
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Sanyo Electric Co Ltd
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Priority to JP25390195A priority Critical patent/JP3960636B2/en
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Description

【0001】
【発明の属する技術分野】
本発明は、発光ダイオード等の発光素子に関する。
【0002】
【従来の技術】
最近、GaN、GaAlN、InGaN、InAlGaN等の窒化ガリウム系半導体からなる発光素子が、強度の強い青色等の短波長発光が可能であることから、活発に研究開発されている。
【0003】
しかしながら、一般に斯る窒化ガリウム系半導体からなる発光素子では、サファイア等の絶縁性基板が使用されている。
【0004】
この絶縁性基板を用いた発光素子では、この基板の裏面に一方の電極を設けた構造にすることが困難であり、半導体層側(同一面側)にp型側、n型側電極とも備えた構造が採用される。
【0005】
斯る半導体層側に両電極を備える発光素子としては、例えば特開平6−338632号(H01L 33/00)公報に記載されている。
【0006】
図4は従来の発光ダイオードの概略上面図(半導体層側)、図5は図4中一点鎖線A−Aに沿った概略断面図である。
【0007】
図4及び図5中、101はサファイア基板、102はn型GaN層、103はp型GaN層、104はn型GaN層102上に形成されたn型側電極、105はp型GaN層103上に形成された透光性のp型側電極、106はp型側電極105の隅部に形成されたボンディング用パットである。
【0008】
この発光ダイオードではp型側電極105側から光取り出しが行われる。
【0009】
【発明が解決しようとする課題】
しかしながら、上記発光ダイオードは、n型側電極104がn型GaN層102の隅部にのみ存在するため、n型GaN層102全体に電流が均一に流れない。
【0010】
この結果、従来の発光ダイオードでは、発光領域が狭く、また電流集中に起因した素子の劣化が起こる等の恐れがあった。
【0011】
本発明は上述の問題点を鑑み成されたものであり、発光領域の大きい半導体層側にp型側、n型側電極を備える発光素子を提供することを目的とする。
【0012】
【課題を解決するための手段】
本発明の発光素子は、基板と、該基板上に複数の半導体層が成長されてなると共に、該半導体層側に第1導電型側用の第1の電極と第2導電型側用の第2の電極とを備え、上記第1の電極は上記複数の半導体層のうちの第1導電型の最上層上の略全域に位置し、上記第2の電極は上記最上層の周囲に位置する複数の半導体層のうちの第2導電型の半導体層上に位置する発光素子において、上記第2の電極は、上記第1の電極の電極領域の周囲にL字状に形成されるとともに、該L字状の略中心にボンディングパット部を有することを特徴とする。
【0015】
また、上記第1の電極は透光性の金属電極からなることを特徴とする。
【0016】
特に、上記第1の電極は線状の金属電極からなることを特徴とする。
【0017】
また、上記第1の電極は透光性を有する厚みに設定されていることを特徴とする。
【0018】
加えて、上記第1の電極はその隅部でワイヤーボンディングされると共に、上記第2の電極は上記隅部とは略対角線上の該第2の電極の上記ボンディングパッド部でワイヤーボンディングされることを特徴とする。
【0019】
更に、上記第2の電極は上記第1の電極のボンディング部から等距離となる形状配置にしたことを特徴とする。
【0020】
特に、上記第2の電極は上記第1の電極の電極領域の周囲の略半分を周設することを特徴とする。
【0021】
【発明の実施の形態】
本発明の実施の一形態に係る発光ダイオードを図面を用いて説明する。図1、図2はそれぞれこの発光ダイオードの概略上面図(半導体層側)、図1中の一点鎖線A−Aに沿った略断面図である。
【0022】
図1及び図2において、サファイア等の絶縁性基板1上には、層厚3μmのn型GaN層2、層厚1μmのp型GaN層3がこの順序に積層されると共に、p型層3の周囲がエッチング除去されてn型層2が露出している。
【0023】
上記p型GaN層(最上層)3上の略全域には、膜厚100ÅのNiからなる透光性の略正方形状p型側電極(第1の電極)4が形成されており、その端部に膜厚1μmのAuからなるボンディング用パット5が形成されている。
【0024】
上記n型層2の上記露出面上には、ボンディング用パット5に対向するように略矩形状p型側電極4の電極領域の周囲に、L字状部(該領域の周囲の1つの対向する各辺側領域部)6aに形成されると共にその略中心にボンディングパット部6bを有する層厚1μmのAlからなるn型側電極(第2の電極)6が周設されている。
【0025】
そして、図示しないが、ボンディング用パット5、ボンディングパット部6bには図示しないAu等からなるボンディング線がそれぞれボンディングされて、リードフレーム等に電気的に接続される。
【0026】
上記p型側電極4は、発光が透過するように厚みが設定されることにより、発光に対して透光性を有し、p型側電極4側が光取り出し側になる。
【0027】
上記p型側電極4はp型GaN層3上の略全域に形成されることにより、p型側で電流が略均一に流れるように構成されると共に、n型側電極6もp型側電極4の領域の周囲を囲むようにL字状をなすことにより、n型側も電流がより均一に流れるように構成されている。この結果、電流は発光領域(pn接合面)を含む素子中を大面積で且つ略均一に流れるので、発光面積が大きく、電流集中も略起こらない。
【0028】
しかも、本実施形態では、ボンディング用パット5とボンディングパット部6bが素子の対角線上の隅部に位置するので、素子中を流れる電流はより均一になる。
【0029】
本発明の他の実施の形態に係る発光ダイオードを概略上面図(半導体層側)である図3を用いて説明する。尚、p型側電極以外は上記実施の形態と同じであるので、その説明は割愛する。
【0030】
図3中、p型GaN層3上には、線状電極部が略中心から放射状に延在してなる電極部13とその一端部に一体に接続するボンディング用パット5からなる膜厚0.1μmのNi膜と膜厚0.7μmのAu膜がこの順序で積層されてなるAu/Ni構造のp型側電極(第1の電極)14が形成されている。
【0031】
n型層2の上記露出面上には、上記実施の形態と同様にボンディング用パット5を望むように略正方形状p型側電極14の電極領域(図中、点線内)15の周囲に、L字状部(該領域の周囲の1つの対向する各辺側領域部)6aに形成されると共にその略中心にボンディングパット部6bを有する層厚1μmのAlからなるn型側電極6が周設されている。
【0032】
上記p型側電極14は、発光が透過するように線状の形状とすることにより、発光に対して透光性を有し、p型側電極14側が光取り出し側になる。
【0033】
上記p型側電極14はその電極領域15がp型GaN層3上の略全域であることにより、p型側で電流が略均一に流れるように構成されると共に、n型側電極6もp型側電極14の電極領域15の周囲を囲むようにL字状をなすことにより、n型側も電流がより均一に流れるように構成されている。この結果、電流は発光領域(pn接合面)を含む素子中を大面積で且つ略均一に流れるので、発光面積が大きく、電流集中も略起こらない。
【0034】
しかも、本実施形態でも、ボンディング用パット5とボンディングパット部6bが素子の対角線上の隅部に位置するので、素子中を流れる電流はより均一になる。
【0035】
加えて、本実施形態も上記実施形態と同じく、n型側電極6はp型側電極14のボンディング用パット5から略等しい距離となるような形状配置を選択されているので、更に電流は均一化する。
【0036】
尚、n型電極がp型側電極領域の略半分より少なく周設するようにしても効果があるが、上記実施形態のように略半分以上に周設する方が、電流の流れの均一化が図れることが可能であるので好まし
【0037】
また、上述では、基板上にn型層、p型層の順序で構成したが、基板上にp型層、n型層の順序で構成するようにしてもよく、この場合、p型側、n型側の構成は上述とは逆になる。
【0038】
勿論、上述では単一のpn接合からなる発光ダイオードについて述べたが、ダブルヘテロ構造、更には量子井戸構造の活性層を備えるダブルヘテロ構造でもよい。
【0039】
また、本発明は発光ダイオードに限らず、面発光型レーザ等にも適宜適用できる。
【0040】
【発明の効果】
本発明の発光素子は、基板と、該基板上に複数の半導体層が成長されてなると共に、該半導体層側に第1導電型側用の第1の電極と第2導電型側用の第2の電極とを備え、上記第1の電極は上記複数の半導体層のうちの第1導電型の最上層上の略全域に位置し、上記第2の電極は上記最上層の周囲に位置する複数の半導体層のうちの第2導電型の半導体層上に位置する発光素子において、上記第2の電極は、上記第1の電極の電極領域の周囲に、L字状に形成されるとともに、該L字状の略中心にボンディングパット部を有するので、素子中を流れる電流が大面積で且つより均一になるとともに、ワイヤーボンディングが同一面側にでき、ボンディングが簡単になる。
【0041】
この結果、発光面積が大きく、且つ素子寿命が長くなる。
【0042】
また、上記第2の電極が上記複数の半導体層の第2導電型の最上層上に位置し、上記第1の電極が上記最上層の周囲に位置する複数の半導体層のうちの第1導電型の半導体層上に位置する場合、発光面積を大きくすることが容易であると共に、ワイヤーボンディングが同一面側にでき、ボンディングが簡単になる。
【0044】
加えて、上記第1の電極がその隅部でワイヤーボンディングされると共に、上記第2の電極が上記隅部とは略対角線上の該第2の電極の上記ボンディングパッド部でワイヤーボンディングされる場合、電流入出力口間の距離が大きくなるので、更により素子中を流れる電流が大面積で且つ均一になる。
【0045】
更に、上記第2の電極が上記第1の電極のボンディング部から等距離となる形状配置にした場合、電流の流れの均一化が顕著に行える。
【0046】
特に、上記第2の電極が上記第1の電極の電極領域の周囲の略半分を周設するようにしても良好な効果が得られる。
【図面の簡単な説明】
【図1】本発明の一実施形態に係る発光ダイオードの概略上面図である。
【図2】上記一実施形態に係る発光ダイオードの概略断面図である。
【図3】本発明の他の一実施形態に係る発光ダイオードの概略上面図である。
【図4】従来の発光ダイオードの概略上面図である。
【図5】上記従来の発光ダイオードの概略断面図である。
【符号の説明】
1 基板
2 n型層
3 p型層
6 n型側電極
4、14 p型側電極
15 p型側電極領域
[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a light emitting element such as a light emitting diode.
[0002]
[Prior art]
Recently, light-emitting elements made of gallium nitride semiconductors such as GaN, GaAlN, InGaN, and InAlGaN have been actively researched and developed because they can emit blue light with a strong intensity such as blue.
[0003]
However, in general, an insulating substrate such as sapphire is used in such a light emitting element made of a gallium nitride semiconductor.
[0004]
In the light emitting element using this insulating substrate, it is difficult to make a structure in which one electrode is provided on the back surface of this substrate, and both the p-type side and the n-type side electrode are provided on the semiconductor layer side (same surface side). Structure is adopted.
[0005]
Such a light emitting element having both electrodes on the semiconductor layer side is described in, for example, Japanese Patent Application Laid-Open No. 6-338632 (H01L 33/00).
[0006]
FIG. 4 is a schematic top view (semiconductor layer side) of a conventional light emitting diode, and FIG. 5 is a schematic cross-sectional view along the alternate long and short dash line AA in FIG.
[0007]
4 and 5, 101 is a sapphire substrate, 102 is an n-type GaN layer, 103 is a p-type GaN layer, 104 is an n-type side electrode formed on the n-type GaN layer 102, and 105 is a p-type GaN layer 103. A translucent p-type side electrode 106 formed above is a bonding pad formed at the corner of the p-type side electrode 105.
[0008]
In this light emitting diode, light is extracted from the p-type side electrode 105 side.
[0009]
[Problems to be solved by the invention]
However, since the n-type side electrode 104 exists only at the corner of the n-type GaN layer 102 in the light emitting diode, current does not flow uniformly throughout the n-type GaN layer 102.
[0010]
As a result, in the conventional light emitting diode, there is a possibility that the light emitting region is narrow and the element is deteriorated due to current concentration.
[0011]
The present invention has been made in view of the above-described problems, and an object thereof is to provide a light-emitting element including a p-type side electrode and an n-type side electrode on the semiconductor layer side having a large light emitting region.
[0012]
[Means for Solving the Problems]
The light emitting device of the present invention includes a substrate and a plurality of semiconductor layers grown on the substrate, and the first electrode for the first conductivity type side and the second electrode for the second conductivity type side on the semiconductor layer side. The first electrode is located substantially over the entire top layer of the first conductivity type among the plurality of semiconductor layers, and the second electrode is located around the top layer. In the light emitting element located on the second conductivity type semiconductor layer of the plurality of semiconductor layers, the second electrode is formed in an L shape around the electrode region of the first electrode, A bonding pad portion is provided at the approximate center of the L-shape .
[0015]
The first electrode is made of a translucent metal electrode.
[0016]
In particular, the first electrode is a linear metal electrode.
[0017]
Further, the first electrode is set to have a light-transmitting thickness.
[0018]
In addition, the first electrode is wire-bonded at the corner, and the second electrode is wire-bonded at the bonding pad portion of the second electrode substantially diagonal to the corner. It is characterized by.
[0019]
Further, the second electrode is characterized in that it is arranged in a shape that is equidistant from the bonding portion of the first electrode.
[0020]
In particular, the second electrode has a substantially half circumference around the electrode region of the first electrode.
[0021]
DETAILED DESCRIPTION OF THE INVENTION
A light-emitting diode according to an embodiment of the present invention will be described with reference to the drawings. 1 and 2 are a schematic top view (semiconductor layer side) of the light-emitting diode, and a schematic cross-sectional view taken along one-dot chain line AA in FIG.
[0022]
1 and 2, an n-type GaN layer 2 having a layer thickness of 3 μm and a p-type GaN layer 3 having a layer thickness of 1 μm are stacked in this order on an insulating substrate 1 such as sapphire. The n-type layer 2 is exposed by etching away.
[0023]
A light-transmitting substantially square p-type side electrode (first electrode) 4 made of Ni having a thickness of 100 mm is formed on substantially the entire area of the p-type GaN layer (uppermost layer) 3, and its end A bonding pad 5 made of Au having a film thickness of 1 μm is formed in the part.
[0024]
On the exposed surface of the n-type layer 2, there is an L-shaped portion (one opposing periphery of the region) around the electrode region of the substantially rectangular p-type side electrode 4 so as to oppose the bonding pad 5. An n-type side electrode (second electrode) 6 made of Al having a layer thickness of 1 μm and having a bonding pad portion 6b at the approximate center thereof is provided around each side-side region portion 6a.
[0025]
Although not shown, bonding wires made of Au or the like (not shown) are bonded to the bonding pad 5 and the bonding pad portion 6b, respectively, and are electrically connected to a lead frame or the like.
[0026]
The p-type side electrode 4 has a light-transmitting property with respect to the light emission by setting the thickness so that the light emission is transmitted, and the p-type side electrode 4 side becomes the light extraction side.
[0027]
The p-type side electrode 4 is formed in substantially the entire region on the p-type GaN layer 3 so that current flows substantially uniformly on the p-type side, and the n-type side electrode 6 is also configured as a p-type side electrode. By forming an L shape so as to surround the periphery of the region 4, the n-type side is also configured to allow current to flow more uniformly. As a result, the current flows in a large area and substantially uniformly in the element including the light emitting region (pn junction surface), so that the light emitting area is large and current concentration does not occur substantially.
[0028]
In addition, in this embodiment, since the bonding pad 5 and the bonding pad portion 6b are located at the corners on the diagonal line of the element, the current flowing in the element becomes more uniform.
[0029]
A light-emitting diode according to another embodiment of the present invention will be described with reference to FIG. 3 which is a schematic top view (semiconductor layer side). In addition, since it is the same as that of the said embodiment except a p-type side electrode, the description is omitted.
[0030]
In FIG. 3, on the p-type GaN layer 3, a film thickness of 0.1 mm is formed of an electrode portion 13 in which a linear electrode portion extends radially from a substantially center and a bonding pad 5 integrally connected to one end thereof. A p-type side electrode (first electrode) 14 having an Au / Ni structure is formed by laminating a 1 μm Ni film and a 0.7 μm thick Au film in this order.
[0031]
On the exposed surface of the n-type layer 2, around the electrode region (inside the dotted line in the drawing) 15 of the substantially square p-type side electrode 14 so that the bonding pad 5 is desired as in the above embodiment, An n-type side electrode 6 made of Al having a layer thickness of 1 μm and having a bonding pad portion 6b at the substantially center thereof is formed in an L-shaped portion (one opposing side region portion around the region) 6a. It is installed.
[0032]
The p-type side electrode 14 has a linear shape so as to transmit light, and thus has light-transmitting properties with respect to light emission, and the p-type side electrode 14 side becomes a light extraction side.
[0033]
The p-type side electrode 14 is configured so that a current flows substantially uniformly on the p-type side because the electrode region 15 is substantially the entire region on the p-type GaN layer 3, and the n-type side electrode 6 is also p-type. By forming an L shape so as to surround the periphery of the electrode region 15 of the mold side electrode 14, the n type side is also configured to flow more uniformly. As a result, the current flows in a large area and substantially uniformly in the element including the light emitting region (pn junction surface), so that the light emitting area is large and current concentration does not occur substantially.
[0034]
Moreover, also in this embodiment, since the bonding pad 5 and the bonding pad portion 6b are located at the corners on the diagonal of the element, the current flowing in the element becomes more uniform.
[0035]
In addition, in this embodiment as well as the above embodiment, the n-type side electrode 6 is selected so as to have a substantially equal distance from the bonding pad 5 of the p-type side electrode 14, so that the current is more uniform. Turn into.
[0036]
Although it is effective that the n-type electrode is arranged to be less than about half of the p-type side electrode region, the current flow is more uniform if the n-type electrode is provided to be approximately half or more as in the above embodiment. can be it can be achieved in that the at have preferred.
[0037]
In the above description, the n-type layer and the p-type layer are arranged on the substrate. However, the p-type layer and the n-type layer may be arranged on the substrate. In this case, the p-type side, The configuration on the n-type side is opposite to that described above.
[0038]
Of course, the light emitting diode having a single pn junction has been described above, but a double hetero structure or a double hetero structure having an active layer of a quantum well structure may be used.
[0039]
Further, the present invention is not limited to the light emitting diode, but can be appropriately applied to a surface emitting laser or the like.
[0040]
【The invention's effect】
The light emitting device of the present invention includes a substrate and a plurality of semiconductor layers grown on the substrate, and the first electrode for the first conductivity type side and the second electrode for the second conductivity type side on the semiconductor layer side. The first electrode is located substantially over the entire top layer of the first conductivity type among the plurality of semiconductor layers, and the second electrode is located around the top layer. In the light emitting element located on the second conductivity type semiconductor layer of the plurality of semiconductor layers, the second electrode is formed in an L shape around the electrode region of the first electrode, and Since the bonding pad portion is provided at the approximate center of the L-shape, the current flowing in the element has a large area and becomes more uniform, and wire bonding can be made on the same surface side, thereby simplifying bonding.
[0041]
As a result, the light emitting area is large and the device life is extended.
[0042]
The second electrode is positioned on the uppermost layer of the second conductivity type of the plurality of semiconductor layers, and the first conductivity of the plurality of semiconductor layers positioned around the uppermost layer. When located on the semiconductor layer of the mold, it is easy to increase the light emitting area, and wire bonding can be performed on the same surface side, so that bonding is simplified.
[0044]
In addition, when the first electrode is wire-bonded at the corner, and the second electrode is wire-bonded at the bonding pad portion of the second electrode substantially diagonal to the corner Since the distance between the current input / output ports is increased, the current flowing in the element is further increased in area and uniform.
[0045]
Furthermore, when the second electrode is arranged so as to be equidistant from the bonding portion of the first electrode, the current flow can be remarkably made uniform.
[0046]
In particular, a good effect can be obtained even if the second electrode is provided so as to surround approximately half the circumference of the electrode region of the first electrode.
[Brief description of the drawings]
FIG. 1 is a schematic top view of a light emitting diode according to an embodiment of the present invention.
FIG. 2 is a schematic cross-sectional view of a light emitting diode according to the embodiment.
FIG. 3 is a schematic top view of a light emitting diode according to another embodiment of the present invention.
FIG. 4 is a schematic top view of a conventional light emitting diode.
FIG. 5 is a schematic cross-sectional view of the conventional light emitting diode.
[Explanation of symbols]
1 Substrate 2 n-type layer 3 p-type layer 6 n-type side electrode 4, 14 p-type side electrode 15 p-type side electrode region

Claims (7)

基板と、該基板上に複数の半導体層が成長されてなると共に、該半導体層側である同一面側に第1導電型側用の第1の電極と第2導電型側用の第2の電極とを備え、上記第1の電極は上記複数の半導体層のうちの第1導電型の最上層上の略全域に位置し、上記第2の電極は上記最上層の周囲に位置する複数の半導体層のうちの第2導電型の半導体層上に位置する発光素子において、上記第2の電極は、上記第1の電極の電極領域の周囲にL字状に形成されるとともに、該L字状の略中心にボンディングパット部を有することを特徴とする発光素子。A substrate and a plurality of semiconductor layers are grown on the substrate, and the first electrode for the first conductivity type side and the second electrode for the second conductivity type side are formed on the same surface side which is the semiconductor layer side. An electrode, wherein the first electrode is located in a substantially entire region on the uppermost layer of the first conductivity type among the plurality of semiconductor layers, and the second electrode is located in a plurality of locations around the uppermost layer. In the light emitting element located on the semiconductor layer of the second conductivity type among the semiconductor layers, the second electrode is formed in an L shape around the electrode region of the first electrode, and the L shape A light-emitting element having a bonding pad portion at substantially the center of the shape . 上記第1の電極は透光性の金属電極からなることを特徴とする請求項1記載の発光素子。  2. The light emitting device according to claim 1, wherein the first electrode is made of a translucent metal electrode. 上記第1の電極は線状の金属電極からなることを特徴とする請求項2記載の発光素子。  3. The light emitting device according to claim 2, wherein the first electrode is a linear metal electrode. 上記第1の電極は透光性を有する厚みに設定されていることを特徴とする請求項2記載の発光素子。  3. The light emitting element according to claim 2, wherein the first electrode is set to a thickness having translucency. 上記第1の電極はその隅部でワイヤーボンディングされると共に、上記第2の電極は上記隅部とは略対角線上の該第の電極の上記ボンディングパッド部でワイヤーボンディングされることを特徴とする請求項1、2、3、又は4記載の発光素子。The first electrode is wire-bonded at the corner, and the second electrode is wire-bonded at the bonding pad portion of the second electrode substantially diagonal to the corner. The light emitting element according to claim 1, 2, 3, or 4. 上記第2の電極は上記第1の電極のボンディング部から等距離となる形状配置にしたことを特徴とする請求項1、2、3、4、又は5記載の発光素子。6. The light-emitting element according to claim 1, wherein the second electrode is arranged in a shape that is substantially equidistant from the bonding portion of the first electrode. 上記第2の電極は上記第1の電極の電極領域の周囲の略半分を周設することを特徴とする請求項1、2、3、4、5、又は6記載の発光素子。7. The light emitting device according to claim 1, wherein the second electrode has a substantially half circumference around the electrode region of the first electrode.
JP25390195A 1995-09-29 1995-09-29 Light emitting element Expired - Lifetime JP3960636B2 (en)

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Publication number Priority date Publication date Assignee Title
JP3706458B2 (en) * 1997-03-28 2005-10-12 ローム株式会社 Semiconductor light emitting device
JP3556080B2 (en) * 1997-11-14 2004-08-18 日亜化学工業株式会社 Nitride semiconductor device
US6633120B2 (en) 1998-11-19 2003-10-14 Unisplay S.A. LED lamps
US8587020B2 (en) 1997-11-19 2013-11-19 Epistar Corporation LED lamps
GB2331625B (en) * 1997-11-19 2003-02-26 Hassan Paddy Abdel Salam led Lamp
US6307218B1 (en) * 1998-11-20 2001-10-23 Lumileds Lighting, U.S., Llc Electrode structures for light emitting devices
US6614056B1 (en) * 1999-12-01 2003-09-02 Cree Lighting Company Scalable led with improved current spreading structures
US6514782B1 (en) * 1999-12-22 2003-02-04 Lumileds Lighting, U.S., Llc Method of making a III-nitride light-emitting device with increased light generating capability
JP4810746B2 (en) * 2000-03-31 2011-11-09 豊田合成株式会社 Group III nitride compound semiconductor device
US6777805B2 (en) 2000-03-31 2004-08-17 Toyoda Gosei Co., Ltd. Group-III nitride compound semiconductor device
KR100419613B1 (en) * 2000-09-04 2004-02-25 삼성전기주식회사 Blue light emitting diode with electrode structure for distributing a current density
JP5055678B2 (en) * 2001-09-28 2012-10-24 日亜化学工業株式会社 Nitride semiconductor light emitting device
CN1241253C (en) 2002-06-24 2006-02-08 丰田合成株式会社 Semiconductor element and mfg method
KR100631898B1 (en) 2005-01-19 2006-10-11 삼성전기주식회사 Gallium nitride based light emitting device having ESD protection capability and method for manufacturing same
KR100665120B1 (en) * 2005-02-28 2007-01-09 삼성전기주식회사 Vertical structure nitride semiconductor light emitting device
JP2007035990A (en) * 2005-07-28 2007-02-08 Kyocera Corp Gallium nitride compound semiconductor light emitting device and method for manufacturing the same
JP5047482B2 (en) * 2005-09-20 2012-10-10 昭和電工株式会社 Nitride-based semiconductor light-emitting device and manufacturing method thereof
US7939845B2 (en) 2005-09-20 2011-05-10 Showa Denko K.K. Nitride semiconductor light-emitting device and production method thereof
JP4920223B2 (en) * 2005-09-20 2012-04-18 昭和電工株式会社 Nitride-based semiconductor light-emitting device and manufacturing method thereof
KR100814464B1 (en) * 2006-11-24 2008-03-17 삼성전기주식회사 Nitride semiconductor light emitting device
JP2012028749A (en) 2010-07-22 2012-02-09 Seoul Opto Devices Co Ltd Light-emitting diode

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