JP3948340B2 - Ultra-precise deburring device by radical reaction - Google Patents

Description

【００４４】
図７、８及び表１の結果より、フェルールの光ファイバー挿通穴及びガイドピン穴の微細孔のバリが３０秒という短時間の加工でほぼ完全に除去できていることが分かる。本発明では、上述したようにカートリッジ単位で２００〜４００個レベルのフェルールのバリを除去加工でき、前後の処理時間を含めてカートリッジ当り１０〜２０分程度かかると想定しても、一日で数万個のフェルールを充分処理できることになる。
【００４５】
本発明は、精密樹脂成形品の成型加工後の微細部分の精密なバリ除去方法に広く適用できるばかりでなく、被処理材の表面を洗浄し、表面の付着物を除去するもの、例えば液晶ガラス基板のＩＴＯ膜の洗浄や、被処理材の表面層を処理して各種濡れ性を向上させるなど表面改質にも利用できる。
【００４６】
【発明の効果】
以上のように、本発明のラジカル反応による超精密バリ除去装置によれば、均一に照射されるプラズマにより微小なバリをラジカル反応により安定して除去加工でき、製品の不良率を限りなく０％に近づけ歩留まりを向上できる。また、従来の超音波洗浄やジェット水流洗浄による方法と違って水を使用しないことから乾燥工程が不要であり、作業時間を大幅に短縮できるとともに、トータルの設置面積も従来の超音波洗浄による方法と比べ4分の１以下とすることが可能であり、製品の高性能化、低価格化に十分対応できる。
【００４７】
本発明は特に、精密樹脂成形品の設計形状より数μｍ〜数十μｍ以内に突出した微小なバリを除去することに適しており、従来の除去方法では対応できなかった当該微小なバリを確実に安定して除去できるのである。
【００４８】
また、前記加工電極に対し、微小間隔をおいて複数のバリ突出部を配置させ、各バリ突出部近傍において生成した中性ラジカルにより、これら複数のバリ突出部におけるバリを同時に除去すれば、生産性を向上できるのであり、具体的には、加工電極として、ワイヤー電極、ブレード状電極又は円柱状電極を用い、同一直線上に配置させた複数のバリ突出部に対し、微小間隔をおいて前記加工電極を略平行に配し、各バリ突出部近傍において生成した中性ラジカルにより、これら複数のバリ突出部のバリを同時に除去でき、前記バリ突出部からなる列を複数設けて、前記加工電極を各列に相対移動させることにより、各列のバリ突出部のバリを順次に除去でき、前記加工電極を複数設け、各加工電極に対応する複数列のバリ突出部を同時に処理すれば、更に生産性を向上できる。
【００４９】
このように本発明は、精密樹脂成形品である光ファイバーの接続部材に成形された光ファイバ挿通穴或いはガイドピン穴の開口部に突出する微小バリを効率よく安定して除去でき、高性能且つ低価格な光コネクターを提供できる。
【００５０】
また、精密樹脂成形品のバリ突出部が、成形された微細な穴の開口部に突出する微小なバリからなり、ラジカル反応による加工後の前記開口部を撮影する撮影手段と、画像処理によって当該穴に対する残存バリの面積率を算出する演算手段とを設ければ、算出された面積率よりバリ除去の良否をすぐさま判定できる。
【図面の簡単な説明】
【図１】本発明の代表的実施形態に係る超精密バリ除去装置を示す簡略平面図。
【図２】同じく超精密バリ除去装置の簡略正面図。
【図３】フェルールを収納したパレットを示す平面図。
【図４】フェルールのバリ突出部にワイヤー電極を配した様子を示す簡略斜視図。
【図５】移送されたパレット上のフェルールの列にワイヤー電極を配した様子を示す説明図。
【図６】光ファイバー挿通穴又はガイドピン穴の開口部に形成されたバリを示す説明図。
【図７】フェルールの光ファイバー挿通穴を撮影した本発明による超精密バリ除去加工前後の画像であり、（ａ）は加工前、（ｂ）は加工後である。
【図８】フェルールのガイドピン穴を撮影した本発明による超精密バリ除去加工前後の画像であり、（ａ）は加工前、（ｂ）は加工後である。
【図９】ブレード状ガイド板の溝にワイヤー電極を案内させた加工電極の変形例を示す説明図。
【図１０】加工電極の変形例としてブレード状電極を設けた例を示す説明図。
【図１１】加工電極の他の変形例として円柱状電極を設けた例を示す説明図。
【図１２】複数のワイヤー電極を設けた変形例を示す説明図。
【符号の説明】
Ａ 超精密バリ除去装置
Ｇ 加工ギャップ
Ｐ パレット
ｆ フェルール
１ 加工電極
２ 精密樹脂成形品
３ 送り駆動機構
４ バリ突出部
５ ワイヤー電極
６ ブレード状電極
７ 円柱状電極
８ 検査装置
９ 高周波電源
１０ 支持部
１１ ブレード状ガイド板
１１ａ 溝
１２ 電極サポート体
１２ａ 凹溝
１２ｂ ノズル
１３ チャンバー
１４ ガス吸引口
２０ 光ファイバ挿通穴
２１ ガイドピン穴
３０ カートリッジ
３１ 水平移送機構
３２ 昇降機構
４０ バリ
８０ 撮影手段[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an ultra-precise deburring device using radical reaction, and more specifically, ultra-precise that can efficiently and reliably remove minute burrs generated in precision resin molded products such as ferrules of optical connectors. The present invention relates to a deburring device .
[0002]
[Prior art]
In the broadband era, there is an increasing demand for higher performance and lower prices for IT devices, but the core of this technology is optical communication technology. The ferrule, which is a part of an optical connector that is indispensable for optical communication, has a small hole (φ0.126 mm) for inserting an optical fiber of φ0.125 mm (common in the world). A very small amount of burrs is generated around the opening of the hole. The eccentricity of the optical fiber due to this micro burr is considered to be one of the biggest causes of optical loss when connecting an optical connector, but there is no effective method for removing this micro burr, which increases the cost of the optical connector. This is the current situation.
[0003]
[Problems to be solved by the invention]
In recent years, as a method for removing the burrs, for example, removal of burrs from the ferrule by ultrasonic cleaning has been attempted.
However, the deburring method using ultrasonic waves in water makes processing conditions such as set temperature and time difficult, and depending on the type of burrs, removal may be insufficient, resulting in poor yields. Loss), there is a certain limit in meeting the demand for lower prices. Further, a drying process is indispensable. Impurities remain in fine holes and cause defects, and an installation space for drying means is required separately.
Recently, plasma irradiators have been provided for the purpose of surface modification, but it has also been confirmed that the plasma is not uniform and is not suitable for removing precise and delicate microburrs.
[0004]
The present invention has been made in view of the present situation, and is capable of efficiently and surely removing minute burrs generated in precision resin molded products such as ferrules, and removing burrs that can sufficiently cope with high performance and low price of products. It is intended to provide technology.
[0005]
[Means for Solving the Problems]
As a result of diligent investigations to solve the above-mentioned problems, the present inventor has already devised a strain-free precision machining method (Patent No. 2521127) based on a radical reaction using a wire electrode, a blade-like electrode, or the like that has already been devised. ) That is, by applying the basic principle of the plasma CVM method, it is possible to efficiently and stably remove minute burrs generated in precision resin molded products by a chemical processing method that is completely different from the conventional burr removal method. The headline and the present invention were completed.
[0006]
That is, the present invention is an apparatus for removing minute burrs protruding from a precision resin molded product, and the precision resin molded product can be disposed inside to seal or circulate atmospheric gas as a radical supply source. A pallet in which a plurality of precision resin molded products having burr protrusions are arranged vertically and horizontally is provided in the chamber, and as a processing electrode arranged at a minute interval with respect to the burr protrusions of the precision resin molded products, the horizontal direction As a feed drive mechanism for providing a wire electrode, a blade electrode or a columnar electrode extending to the power source for supplying a DC voltage or AC power to the machining electrode and relatively moving the machining electrode and the precision resin molded product, A horizontal transfer mechanism for horizontally moving the pallet in the vertical direction and sequentially feeding the burr protrusions in each row to the machining electrode, and each arranged in a horizontal row during machining To re protrusion, and a lift mechanism for lowering the working electrode in substantially parallel spaced a small gap is provided, by plasma generated by applying a DC voltage or an AC voltage to the machining electrode, said burr A neutral radical is generated in the vicinity of the protruding portion, and a volatile substance generated by a radical reaction between the neutral radical and an atom or molecule constituting the burr of the burr protruding portion is vaporized and removed, and the processing proceeds. Thus, there is provided an ultra-precise deburring device by radical reaction, characterized by removing the burr.
[0007]
Here, it is also preferable to generate plasma in the open air without providing a chamber that can seal or circulate the atmospheric gas that is a supply source of the radical.
[0008]
In this case, it is preferable to provide a supply means for supplying a reactive gas serving as a radical supply source.
[0009]
It is also preferable to provide a plurality of the processing electrodes and simultaneously process a plurality of rows of burr protrusions corresponding to the processing electrodes.
[0010]
Further, the burrs projecting portion of the precision resin molded product consists of minute burrs projecting into the apertures of the molded minute holes, and imaging means for photographing the apertures after processing by radical reaction, and image processing It is preferable to provide an arithmetic means for calculating the area ratio of the remaining burrs with respect to the holes and determine the quality of the burrs removal from the calculated area ratio.
[0017]
DETAILED DESCRIPTION OF THE INVENTION
Next, embodiments of the present invention will be described in detail with reference to the accompanying drawings.
[0018]
FIG. 1 is a simplified plan view of an ultra-precise deburring device according to the present invention, in which A is an ultra-precise deburring device, 1 is a processed electrode, 2 is a precision resin molded product, and 3 is a feed drive mechanism. Show.
[0019]
The ultra-precise deburring device A is a device for removing minute burrs protruding from a precision resin molded product. As shown in FIGS. 1 and 2, the atmosphere gas as a radical supply source is sealed or circulated. A processing electrode 1 having a predetermined shape is provided in a chamber 13 that can be made to move, and a high-frequency power source 9 for supplying high-frequency power to the processing electrode 1 and the processing electrode 1 and the precision resin molded product 2 are relatively transferred. A feed drive mechanism 3 is provided, and the precision resin molded product 2 to be processed is disposed inside the chamber 13.
[0020]
The present invention generates radicals (free radicals) having unreactive electrons in the vicinity of burrs protruding parts of precision resin molded products, and radical reactions between these neutral radicals and atoms or molecules constituting burrs. By using (free radical reaction), the generated volatile substances are vaporized and removed, thereby removing burrs. As a method for generating radicals, plasma dry etching has conventionally been performed using plasma that can be easily generated by discharge at a vacuum level of about 1 Torr or less (10 ⁻³ to 1 Torr). In the intended deburring process, the processing speed is important, and conventional low density plasma with a low density of neutral radicals cannot be used.
[0021]
The pressure of the atmospheric gas is practically about 0.1 to 10 atm. From the viewpoint of processing efficiency, it is preferably 1 atm or more. As shown in FIGS. 4 and 5, the processing electrode 1 is contained in the atmospheric gas. And the precision resin molded product 2 are arranged at a predetermined minute interval, and a high frequency voltage is applied to the processing electrode 1 to generate plasma in the processing gap G. In this plasma, neutrality based on the reaction gas is generated. It generates radicals.
[0022]
Then, removal of constituent atoms or molecules by radical reaction proceeds mainly at the burr portion of the burr protrusion 4 of the precision resin molded product, and burr removal processing can be performed efficiently. In the present embodiment, the precision resin molded product 2 to be processed is a ferrule that is a connecting member of an optical fiber, and as shown in FIG. 6, a φ0.126 mm optical fiber insertion hole 20 formed in the ferrule, or φ0 An example in which a minute burr 40 formed in the opening of the 7 mm guide pin hole 21 is removed will be described. The present invention selectively processes a minute burr 40 protruding within a few μm to several tens of μm, more preferably within about 50 μm from the design shape of the precision resin molded product molded in this way, and reliably and efficiently. The burr is removed.
[0023]
The atmospheric gas is a mixture of a reactive gas that is a source of neutral radicals and an inert gas that facilitates the generation and maintenance of high-pressure plasma and collides with the reactive gas to be activated. The combination and mixing ratio of the active gases are optimally determined in consideration of economic efficiency according to the material and processing conditions of the precision resin molded product to be processed.
[0024]
The ferrule is molded from polyphenylene sulfide (PPS) which is a mixture of [—C ₆ H ₄ (benzene ring) -S] n and silicon dioxide SiO ₂ , and is formed at the opening of the optical fiber insertion hole or guide pin hole of the molded product. In order to remove the formed burrs, O ₂ or fluorine-based CF ₄ , SF ₆ , NF ₃ or the like is used as a reaction gas, and one or two kinds of inert gases such as He, Ne, Ar, etc. In this example, He is used as an inert gas with respect to the reaction gas (CF ₄ , O ₂ ).
In this case, the volatile substance generated by the radical reaction is SiF ₄ , SO ₂ , CO ₂ , CO or the like having sublimation properties and high vapor pressure characteristics. In order to evaporate this volatile substance and proceed with processing, it is necessary to heat appropriately other than those that evaporate at room temperature or lower, and to increase the vapor pressure to promote vaporization. The temperature is such that the physical properties of the glass are not impaired.
[0025]
As the electrode material, a highly corrosion-resistant material such as stainless steel, nickel, or aluminum having excellent corrosion resistance according to the reaction gas should be used. It is also preferable to coat a material excellent in corrosion resistance against the reaction gas. For example, the corrosion problem can be solved by coating and dipping a material having corrosion resistance such as Al ₂ O ₃ or MgF _{2 on} the surface.
[0026]
Although not shown, it is possible to send the reaction gas locally in consideration of operability, efficiency, etc. In addition, a gas containing a volatile substance generated by a radical reaction is arranged near the processing electrode. It is also possible to exhaust the air from the suction port, pass it through a filter to remove volatile substances, and then re-enter the chamber as an atmospheric gas.
It is also a preferred embodiment that plasma is generated in the open atmosphere without providing a chamber that can seal or circulate the atmospheric gas that is a supply source of the radical. In this case, it is also preferable to separately provide a supply means for supplying a reactive gas serving as a radical supply source.
[0027]
Although various types of processing electrodes can be adopted, from the viewpoint of productivity, if possible, a plurality of burr protrusions may be arranged at a minute interval, and the plurality of these burr protrusions may be used by neutral radicals generated in the vicinity of each burr protrusion. It is efficient to remove the burrs from the burr protrusions at the same time, and more preferably, wire electrodes, blade electrodes, or columnar electrodes are used as processing electrodes, and a plurality of burr protrusions arranged on the same straight line are used. On the other hand, the processing electrodes are arranged substantially in parallel at a small interval, and the burrs at these burr protrusions are removed simultaneously by the neutral radicals generated in the vicinity of each burr protrusion.
[0028]
The wire electrode 5 used in this example is made of, for example, nickel, stainless steel, aluminum, and the like, as shown in FIG. 5, with respect to each burr protrusion 4 of the precision resin molded product 2 arranged in a straight line. The plasma is generated in the processing gap G between the burr protrusion 4 and the wire electrode 5 to activate the atmospheric gas, and the generated radicals and the burr protrusion 4 The protruding burrs are removed by radical reaction with constituent atoms or molecules.
The diameter and material of the wire electrode 5 is appropriately selected to generate a stable plasma according to the precision resin molded product to be processed, but when using a thin wire of several μm to several tens of μm, The wire electrode is wound around a supply reel and a take-up reel, and is stretched by a plurality of guide rollers. The reel is rotated and wound around one of the reels, and is constantly supplied. Preventing cutting is a preferred example.
[0029]
As for what supplies reactive gas to the process part of the wire electrode 5 positively, what provided the gas ejection hole which ejects gas along the electrode in the support parts 10 and 10 of both ends, and the inside of the wire electrode 5 A gas supply passage is provided in the lengthwise direction, and a plurality of ejection holes communicating with the gas supply passage are provided on a side surface substantially facing the burr protruding portion 4 of the precision resin molded product that is a workpiece, at least one end 9 is used to supply an atmospheric gas containing a reaction gas, or as shown in FIG. 9, an insulating blade-shaped guide plate 11 having a groove 11a provided on the tip surface is provided, and the wire electrode 5 is guided to the groove 11a. In addition, it is possible to suitably employ a structure in which the inside of the groove 11a serves as a reaction gas supply path.
[0030]
Further, as shown in FIG. 10, for example, the blade-like electrode 6 as another example of the processing electrode has corrosion resistance to the reaction gas, is made of a long conductive material in the form of a strip or ribbon, and has a cross-sectional shape. The width in the vertical direction is set to be sufficiently wider than the thickness in the horizontal direction, and the thickness is set to 20 to 100 μm.
As in the case of the wire electrode 5 described above, the burrs projecting portions 4 of the precision resin molded product 2 arranged in a straight line are installed in parallel via a processing gap G, and plasma is generated in the processing gap G. Then, the atmosphere gas is activated, and the protruding burr is removed by a radical reaction between the generated radical and the constituent atom or molecule of the burr protruding portion.
[0031]
For example, the reactive gas is positively supplied to the processed portion of the blade-shaped electrode 6 by, for example, a structure in which an insulator is bonded to both side surfaces with a central metal plate sandwiched therebetween, and the both sides of the metal plate are disposed on both sides. It is possible to employ a structure in which an insulator is protruded to form a groove at the tip, and a reaction gas is supplied from both ends through the groove.
[0032]
Further, the cylindrical electrode 7 as another example of the processing electrode has a generatrix parallel to the rotation axis on the outer peripheral surface. For example, as shown in FIG. 11, the precision resin molded product 2 arranged in a straight line is used. The burr protrusion 4 is pivotally supported in parallel via the machining gap G, and by rotating the electrode at high speed, a gas flow is formed across the machining gap G by entraining gas on the surface of the cylindrical electrode 7. At the same time, by applying a high frequency voltage to the cylindrical electrode 7, plasma is generated in the processing gap to activate the atmospheric gas, and the radical is generated by a radical reaction between the generated radical and the constituent atom or molecule of the burr protrusion. What removes the burr that has been removed can be used.
[0033]
The high-frequency power source 9 and the feed drive mechanism 3 in the present embodiment are controlled by a control device (not shown) configured from a personal computer, and between the wire electrode 5 and the precision resin molded product 2 during processing. The processing gap G is set to 10 μm to several mm, and in order to maintain the processing gap G, preferably, the gap measuring device detects the displacement between the wire electrode 5 and the burr protrusion 4 on the upper surface of the precision resin molded product, and its signal Based on the above, an elevator mechanism 32 described later is controlled.
[0034]
The precision resin molded product 2 is held in a state where a plurality of precision resin molded products 2,... Are arranged vertically and horizontally by a pallet P incorporated in the feed driving mechanism. Is supplied between the wire electrode 5 and the mounting table of the pallet, or high-frequency power is supplied to the wire electrode 5 and the mounting table is grounded, so that the input power can be concentrated in the processing gap G. The pallet mounting table used for this purpose serves as an auxiliary electrode. When the precision resin molded product 2 is a conductor, high-frequency power can be directly supplied to the wire electrode 5 and the precision resin molded product 2.
In the present embodiment, the high frequency power supply 9 is used and a high frequency voltage of about 150 MHz is applied to the wire electrode 5, but the present invention is not limited to this, for example, a DC voltage, an AC voltage with a frequency of 50-60 Hz, 60 Hz to 150 MHz. It is possible to use a power supply that is adjusted within a range of. Note that this power supply may cause a pulsed output to stabilize the plasma.
[0035]
As shown in FIG. 3, the pallet P can store 100 ferrules f that are precision resin molded products 2, and a cartridge 30 that can integrally set the four pallets on the same plane is processed by the feed drive mechanism 3. Loading / unloading horizontally to the part.
The burr protrusion 4 of the ferrule f to be processed has a total of 4 to 14 holes, a φ0.126 mm optical fiber insertion hole 20 and a φ0.7 mm guide pin hole 21 in which minute burrs are formed in each opening. On the pallet P, the ferrules f are held so that the burr protrusions 4 are on the upper surface, and ten ferrules f are arranged in the lateral direction where the six burr protrusions 4 are arranged. The burr protrusions 4 of the ferrules are arranged on the same straight line. In the cartridge 30 described above, a total of 20 burr protrusions 4 of the ferrules are arranged in a horizontal line. 20 rows are formed in the vertical direction.
[0036]
The feed drive mechanism 3 includes a horizontal transfer mechanism 31 that horizontally moves the cartridge 30 in the vertical direction, and an elevating mechanism 32 that raises and lowers the wire electrode 5 that extends in the lateral direction over the entire length of the cartridge 30. The cartridges 30 are horizontally moved one by one in the vertical direction by the horizontal transfer mechanism 31, and the burr protrusions 4 of each row are sequentially sent to the processing position, and are also sent to the processing unit by the lifting mechanism 32. The wire electrode 5 is lowered substantially in parallel with the burr protrusion 4 in the row, and the burr protrusion 4 in the row is processed at the same time. After the processing, the wire electrode 5 is raised. This is repeated, and the burrs of the burr protrusions 4 in each row are sequentially removed.
[0037]
The machining gap and the machining time are important factors in the machining conditions, and the operation of the wire electrode lifting mechanism 32 and the cartridge horizontal transfer mechanism 31 is preferably controlled based on these set conditions.
Depending on the position of the burr protrusion in the precision resin molded product, a mechanism that combines the lifting stage, XY stage, and rotary stage as appropriate can be used, and the precision resin molded product can be moved relative to the machining electrode in three dimensions. Those made are also preferred.
[0038]
If a plurality of processing electrodes such as wire electrodes are provided and a plurality of rows of burr protrusions corresponding to each processing electrode are processed at the same time, the processing efficiency can be remarkably improved. For example, although two pallets P are juxtaposed along the longitudinal direction in the cartridge 30 described above, if the wire electrode 5 is provided for each pallet P, all ferrules on the cartridge 30 can be moved in 10 times. Processing is possible, and the processing time can be halved. Similarly, if three or more machining electrodes are provided, the processing time can be reduced in inverse proportion.
[0039]
In addition, as for providing a plurality of machining electrodes, for example, as shown in FIG. 12, an electrode support body 12 made of an insulator having a plurality of concave grooves 12a,. A nozzle 12b which arranges the wire electrode 5 or blade-shaped electrode therein and generates a high-speed gas flow comprising a mixture of a reactive gas and an inert gas along the longitudinal direction of the groove 12a. What is provided can be used.
[0040]
The ultra-precise deburring device A of this embodiment is further provided with an inspection device 8 for inspecting the processing state of the opening after processing. The inspection apparatus 8 moves the cartridge sent from the processing unit horizontally on a horizontal mounting table and images the aperture of each ferrule f, and evaluates the burr removal processing capability. An arithmetic means (not shown) for calculating the area ratio of the remaining burrs with respect to the hole by processing is provided, and the quality of burrs removal is determined from the calculated area ratio. When the burr removal is confirmed, the pitch between the centers of gravity of each hole is measured, and a grade of defective to good is classified according to the amount of deviation from the reference value.
[0041]
FIG. 7 and FIG. 8 respectively show (a) before processing to remove burrs formed at the openings of the optical fiber insertion hole (φ0.126 mm) and guide pin hole (φ0.7 mm) of the ferrule (standard type), respectively. This is an image after processing (b). A wire electrode with a diameter of 50 μm is used as the processing electrode, a mixed gas of CF ₄ + O ₂ + He, an atmosphere gas with a CF ₄ and O ₂ concentration of 1% each, and a processing gap is 1 mm The input power was set to 100 W (150 MHz), and burr removal processing was performed for 30 seconds.
[0042]
Table 1 below shows the burr area for each hole by image processing for the four optical fiber insertion holes (Examples 1 to 4) and the two guide pin holes (Examples 5 and 6) before and after processing. The rate is calculated. The burr area ratio is an area ratio of burrs to the entire area of the hole, and is calculated by (burr area) / (hole area when there is no burr) × 100 (%).
[0043]
[Table 1]

[0044]
From the results of FIGS. 7 and 8 and Table 1, it can be seen that the burrs of the optical fiber insertion hole of the ferrule and the fine hole of the guide pin hole can be almost completely removed in a short time of 30 seconds. In the present invention, as described above, the burrs of the 200 to 400 level ferrule can be removed per cartridge, and even if it is assumed that it takes about 10 to 20 minutes per cartridge including the processing time before and after, it is several times a day. It will be enough to process 10,000 ferrules.
[0045]
INDUSTRIAL APPLICABILITY The present invention can be widely applied to a precise deburring method for fine parts after molding of a precision resin molded product, as well as cleaning the surface of a material to be processed and removing deposits on the surface, for example, liquid crystal glass It can also be used for surface modification such as cleaning of the ITO film on the substrate and treatment of the surface layer of the material to be treated to improve various wettability.
[0046]
【The invention's effect】
As described above, according to the ultra-precise deburring device by radical reaction of the present invention, fine burrs can be stably removed by radical reaction by uniformly irradiated plasma, and the defective rate of products is as much as 0%. To improve the yield. In addition, unlike conventional ultrasonic cleaning and jet water flow methods, water is not used, so there is no need for a drying process, greatly reducing work time and the total installation area using the conventional ultrasonic cleaning method. It can be reduced to a quarter or less compared to the previous model, and can sufficiently cope with higher performance and lower prices of products.
[0047]
The present invention is particularly suitable for removing minute burrs protruding within a few μm to several tens of μm from the design shape of a precision resin molded product. It can be removed stably.
[0048]
In addition, if a plurality of burr protrusions are arranged at a minute interval with respect to the processed electrode, and the burrs in the plurality of burr protrusions are simultaneously removed by neutral radicals generated in the vicinity of each burr protrusion, Specifically, using a wire electrode, a blade-like electrode, or a cylindrical electrode as a processing electrode, with respect to a plurality of burr protrusions arranged on the same straight line, with a minute interval, The processing electrodes are arranged substantially in parallel, and the burrs of the plurality of burr protrusions can be removed simultaneously by neutral radicals generated in the vicinity of each burr protrusion, and a plurality of rows of the burr protrusions are provided, and the processing electrode The burrs of the burr protrusions in each row can be removed sequentially by moving the arbor relative to each row, a plurality of the processing electrodes are provided, and the burr protrusions corresponding to each processing electrode are processed simultaneously. If, can further improve productivity.
[0049]
As described above, the present invention can efficiently and stably remove the micro burr protruding from the opening portion of the optical fiber insertion hole or the guide pin hole formed in the connecting member of the optical fiber which is a precision resin molded product. We can provide an inexpensive optical connector.
[0050]
Further, the burr protruding portion of the precision resin molded product is formed of a minute burr protruding into the opening of the formed fine hole, and the imaging means for photographing the opening after processing by radical reaction, and the image processing If an arithmetic means for calculating the area ratio of the remaining burrs with respect to the holes is provided, it is possible to immediately determine whether or not the burrs are removed from the calculated area ratio.
[Brief description of the drawings]
FIG. 1 is a simplified plan view showing an ultra-precise deburring device according to a representative embodiment of the present invention.
FIG. 2 is a simplified front view of the same ultra-precise deburring device.
FIG. 3 is a plan view showing a pallet containing a ferrule.
FIG. 4 is a simplified perspective view showing a state in which a wire electrode is arranged on a burr protrusion of a ferrule.
FIG. 5 is an explanatory view showing a state in which wire electrodes are arranged in a row of ferrules on a transferred pallet.
FIG. 6 is an explanatory view showing a burr formed in an opening portion of an optical fiber insertion hole or a guide pin hole.
FIGS. 7A and 7B are images before and after the ultra-precise deburring process according to the present invention, in which the optical fiber insertion hole of the ferrule is photographed, where FIG. 7A is before processing and FIG. 7B is after processing.
FIGS. 8A and 8B are images before and after the ultra-precise deburring process according to the present invention, in which a guide pin hole of a ferrule is photographed, and FIG. 8A is before processing and FIG. 8B is after processing.
FIG. 9 is an explanatory view showing a modification of the machining electrode in which the wire electrode is guided in the groove of the blade-shaped guide plate.
FIG. 10 is an explanatory view showing an example in which a blade-like electrode is provided as a modified example of the machining electrode.
FIG. 11 is an explanatory view showing an example in which a columnar electrode is provided as another modified example of the machining electrode.
FIG. 12 is an explanatory view showing a modification in which a plurality of wire electrodes are provided.
[Explanation of symbols]
A Ultra-precision burr removal device G Processing gap P Pallet f Ferrule 1 Processing electrode 2 Precision resin molded product 3 Feed drive mechanism 4 Burr protrusion 5 Wire electrode 6 Blade electrode 7 Columnar electrode 8 Inspection device 9 High frequency power supply 10 Support 11 Blade-shaped guide plate 11a Groove 12 Electrode support body 12a Concave groove 12b Nozzle 13 Chamber 14 Gas suction port 20 Optical fiber insertion hole 21 Guide pin hole 30 Cartridge 31 Horizontal transfer mechanism 32 Lifting mechanism 40 Burr 80 Imaging means

Claims (5)

An apparatus for removing fine burrs projecting precision resin molded product, the arranged precision resin molded article inside, a chamber which can be sealed or circulated atmospheric gas is a source of radicals, Bali A wire electrode extending in the horizontal direction is provided as a processing electrode arranged at a minute interval with respect to the burr protrusion of the precision resin molded product , provided with a pallet in which a plurality of precision resin molded products having protrusions are arranged vertically and horizontally , As a feed drive mechanism for providing a blade-like electrode or a cylindrical electrode and supplying a DC voltage or AC power to the machining electrode and a feed driving mechanism for relatively transferring the machining electrode and the precision resin molded product , the pallet is arranged in the vertical direction. The horizontal transfer mechanism for sequentially moving the burr protrusions of each row to the processing electrode, and the burr protrusions arranged in a horizontal row during processing, Serial machining electrode is provided an elevating mechanism for lowering into a substantially parallel position at a small distance, by plasma generated by applying a DC voltage or an AC voltage to the machining electrode, neutral in the burr protruding portion near Generates radicals, vaporizes and removes volatile substances generated by radical reaction between the neutral radicals and the atoms or molecules constituting the burrs of the burr protrusions, and removes the burrs by advancing the processing. An ultra-precise deburring device using a radical reaction. It said without providing a chamber to ambient gas capable of sealing or circulating a source of radicals, super precision burr removal apparatus according to claim 1 comprising by generating plasma under atmospheric release. 3. The ultra-precise deburring device according to claim 2, further comprising supply means for supplying a reactive gas serving as a radical supply source. The ultra-precise deburring device according to any one of claims 1 to 3, wherein a plurality of the processing electrodes are provided and a plurality of rows of burr protrusions corresponding to the processing electrodes are simultaneously processed. The burrs projecting portion of the precision resin molded product consists of minute burrs projecting into the apertures of the molded minute holes, and the photographing means for photographing the apertures after processing by radical reaction, and the holes by image processing. An ultra-precise burr removal by radical reaction according to any one of claims 1 to 4 , wherein an arithmetic means for calculating the area ratio of the remaining burr with respect to the surface is provided, and the quality of the burr removal is determined from the calculated area ratio. apparatus.

Images