JP3922517B2 - Method for manufacturing functional liquid application substrate, method for manufacturing electro-optical device, and apparatus for manufacturing functional liquid application substrate - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a method for manufacturing a functional liquid imparting substrate such as a color filter or an EL (electroluminescence) element substrate used in an electro-optical device. Here, the functional liquid includes, for example, an ink for a color filter and an EL phosphor solution for an EL element substrate. The present invention also relates to a method for manufacturing an electro-optical device and an electronic apparatus including the functional liquid application substrate, and an apparatus for manufacturing the functional liquid application substrate.
[0002]
[Prior art]
As a method of manufacturing a functional liquid application substrate for an electro-optical device, it is known to introduce a functional liquid into each pixel formed by partitioning on a substrate on a substrate by an ink jet method. Conventionally, the functional liquid is introduced directly into each dry pixel and dried and cured.
[0003]
[Problems to be solved by the invention]
However, when the functional liquid is directly ejected into a dry pixel by ink jet, there is a problem that the ejected functional liquid does not spread evenly inside the pixel and the shape of the ejected droplet remains in the pixel. It was.
[0004]
Although it is conceivable to adjust the surface tension of the substrate and the bank by the material and surface processing of the substrate and the bank, it is not sufficient for improving the distribution of the functional liquid in the pixel.
[0005]
Accordingly, an object of the present invention is to provide a method of manufacturing a functional liquid-applied substrate that improves the uniformity of the distribution of the functional liquid introduced into the pixel within the pixel.
[0006]
It is another object of the present invention to provide a method for manufacturing a functional liquid-applied substrate that can reliably introduce a functional liquid into a pixel. Furthermore, it aims at providing the manufacturing method of the functional liquid provision board | substrate which can make the film thickness of a functional liquid uniform between the pixels arrange | positioned on a board | substrate.
[0007]
[Means for Solving the Problems]
The method for producing a functional liquid-imparting substrate according to the present invention includes a step of introducing a functional liquid induction liquid into each pixel formed by a partition; and a functional liquid is introduced into each pixel into which the functional liquid induction liquid is introduced. And a step of introducing;
[0008]
In the above production method, the functional liquid induction liquid is preferably a solvent of the functional liquid. The functional liquid induction liquid is preferably a functional liquid having a lower concentration than the functional liquid.
[0009]
In the above production method, the functional liquid induction liquid may be an alcohol-based or glycol ether-based solvent.
[0010]
Moreover, in the said manufacturing method, it is preferable that the said functional liquid induction | guidance | derivation liquid is lower viscosity than the said functional liquid. Further, it is preferable that the functional liquid induction liquid is introduced into each pixel so as to spread over the entire bottom surface in each pixel.
[0011]
In the manufacturing method, it is preferable that the functional liquid inducing liquid and the functional liquid are introduced into each pixel by an ink jet method.
[0012]
In the manufacturing method, the functional liquid is preferably ink or an EL phosphor solution.
[0013]
The electro-optical device manufacturing method of the present invention is characterized by using the functional liquid-applied substrate manufactured by the above-described manufacturing method.
[0014]
According to another aspect of the invention, there is provided an electronic apparatus manufacturing method using the electro-optical device manufactured by the above manufacturing method.
[0015]
The apparatus for producing a functional liquid-imparting substrate of the present invention includes an ink jet recording head for introducing a functional liquid induction liquid into each pixel formed on the substrate; and each of the above-described functional liquid induction liquids introduced therein An ink jet recording head for introducing a functional liquid into the pixel;
[0016]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described with reference to the drawings.
[0017]
(1. Configuration of functional liquid application substrate)
FIG. 1 is a partially enlarged view of a color filter that is a functional liquid-applied substrate manufactured by a manufacturing method according to an embodiment of the present invention. 1A is a plan view, and FIG. 1B is a cross-sectional view taken along the line BB ′ of FIG. The hatching of each part of the sectional view is partially omitted.
[0018]
As shown in FIG. 1A, the color filter 200 includes pixels 13 arranged in a matrix, and the boundary between the pixels is divided by a partition 14. Each of the pixels 13 has one of red (R), green (G), and blue (B) ink introduced therein. In this example, the arrangement of red, green, and blue is a so-called mosaic arrangement, but other arrangements such as a stripe arrangement and a delta arrangement may be used.
[0019]
As shown in FIG. 1B, the color filter 200 includes a light-transmitting substrate 12 and a light-shielding partition 14. A portion where the partition 14 is not formed (removed) constitutes the pixel 13. Each color ink introduced into the pixel 13 constitutes a colored layer 20. An overcoat layer 21 and an electrode layer 22 are formed on the upper surfaces of the partition 14 and the colored layer 20.
[0020]
(2. Method for producing functional liquid-applied substrate)
FIG. 2 is a cross-sectional view of the manufacturing process of the color filter. The hatching of each part of the sectional view is partially omitted. Based on this figure, an example of the manufacturing method of a color filter is demonstrated concretely.
[0021]
(2-1. Bank formation and surface treatment process)
After the surface of the transparent substrate 12 made of non-alkali glass having a thickness of 0.7 mm, a length of 38 cm, and a width of 30 cm is washed with a cleaning solution in which 1% by weight of hydrogen peroxide is added to hot concentrated sulfuric acid, and rinsed with pure water. Air clean to obtain a clean surface. A chromium film with an average thickness of 0.2 μm is formed on the surface by sputtering to obtain a metal layer 16 ′ (FIG. 2: S1).
[0022]
The substrate is dried on a hot plate at 80 ° C. for 5 minutes, and then a photoresist layer (not shown) is formed on the surface of the metal layer 16 ′ by spin coating. A mask film on which a required matrix pattern shape is drawn is brought into close contact with the surface of the substrate, and exposure is performed with ultraviolet rays. Next, this is immersed in an alkaline developer containing potassium hydroxide at a ratio of 8% by weight, the unexposed portion of the photoresist is removed, and the resist layer is patterned. Subsequently, the exposed metal layer is removed by etching with an etchant containing hydrochloric acid as a main component. In this way, a light shielding layer (black matrix) 16 having a predetermined matrix pattern can be obtained (FIG. 2: S2). The thickness of the light shielding layer 16 is approximately 0.2 μm. The width of the light shielding layer 16 is approximately 22 μm.
[0023]
On this substrate, a negative transparent acrylic photosensitive resin composition 17 ′ is further applied by spin coating (FIG. 2: S3). This is pre-baked at 100 ° C. for 20 minutes, and then exposed to ultraviolet rays using a mask film on which a predetermined matrix pattern shape is drawn. The unexposed resin is developed with an alkaline developer, rinsed with pure water, and spin-dried. After baking as final drying is performed at 200 ° C. for 30 minutes to sufficiently cure the resin portion, the bank layer 17 is formed, and the partition 14 including the light shielding layer 16 and the bank layer 17 is formed (FIG. 2: S4). ). The film thickness of the bank layer 17 is 2.7 μm on average. The bank layer 17 has a width of about 14 μm.
[0024]
In order to improve the ink wettability of the colored layer forming region (particularly the exposed surface of the glass substrate 12) partitioned by the obtained light shielding layer 16 and bank layer 17, dry etching, for example, atmospheric pressure plasma treatment is performed. Specifically, a high voltage is applied to a mixed gas obtained by adding 20% of oxygen to helium, a plasma atmosphere is formed at an etching spot at atmospheric pressure, and the substrate is etched by passing under the etching spot.
[0025]
(2-2. Introduction Step of Functional Liquid Inducing Solution)
Next, the functional liquid induction liquid 18 is introduced into the pixel 13 formed by being partitioned by the partition 14 by an ink jet method (FIG. 2: S5). This process is a characteristic process of this embodiment. It is desirable that the functional liquid inducing liquid has the same color as the functional liquid to be introduced later or is colorless and transparent. The functional liquid inducing liquid is preferably introduced so as to spread over the entire bottom surface in the pixel. By introducing the functional liquid inducing liquid in this way, when the functional liquid is applied, the functional liquid inducing liquid acts as a priming water, and the functional liquid does not leave a droplet shape in the pixel, It can be distributed uniformly. The introduction amount of the functional liquid induction liquid is, for example, 20 picoliters per pixel.
[0026]
Further, the functional liquid inducing liquid is preferably a solvent of a functional liquid introduced later or a functional liquid having a lower concentration than the functional liquid introduced later. As a result, high affinity between the functional liquid and the functional liquid inducing liquid can be ensured, and the functional liquid can be uniformly dispersed in the pixels.
[0027]
Moreover, it is preferable that a functional liquid induction | guidance | derivation liquid is a thing whose viscosity is lower than the functional liquid introduce | transduced later. A functional liquid inducing liquid having a low viscosity is excellent in straightness when ejected by an ink jet method, so that a droplet can be landed accurately in a pixel. The viscosity of the functional liquid inducing liquid is preferably 5 cp (centipoise) or less. More preferably, it is 3 cp or less. Moreover, it is preferable that a functional liquid induction | guidance | derivation liquid is a thing with less solid content than the functional liquid introduce | transduced later. Since the functional liquid inducing liquid with a small solid content is excellent in the ejection stability by the ink jet method, it is possible to cause the droplets to land accurately in the pixels.
[0028]
The functional liquid inducing liquid is not limited to the above, and the effect of the present invention can be achieved even if it is an alcohol-based or glycol-ether-based solvent. Examples of the alcohol solvent include 1-butanol, 1,3-propanediol, 2-methoxyethanol and the like. Examples of the glycol / ether solvent include ethylene glycol mono-n-butyl ether, dipropylene glycol monomethyl ether, butyl carbitol acetate (BCTAC), and the like.
[0029]
(2-3. Functional liquid introduction step)
Ink that is a functional liquid is introduced into each pixel into which the functional liquid inducing liquid has been introduced by an inkjet method (FIG. 2: S6). The introduced ink is mixed with the previously introduced functional liquid induction liquid to form the ink layer 19.
[0030]
As the ink jet recording head, a precision head using the piezoelectric effect is used, and about 7.0 picoliters of fine ink droplets are selectively ejected for every colored layer forming region. The drive frequency is 14.4 kHz, that is, the ejection interval of each ink droplet is set to 69.5 μsec. The distance between the head and the target is set to 0.3 mm. In order to prevent the flying speed from the head to the target colored layer formation area, the flight curve, and the generation of split stray droplets called satellites, not only the physical properties of the ink but also the voltage that drives the piezo element of the head and its waveform is important. Accordingly, a waveform having a condition set in advance is programmed, and ink is applied to a predetermined color arrangement pattern by simultaneously applying ink droplets of three colors of red, green, and blue.
[0031]
Here, since the functional liquid guide liquid 18 acts as a priming water for the ink that is the functional liquid, the function that has already been applied accurately even if the ejection stability and straightness of the ink are worse than the functional liquid guide liquid. Ink is attracted to the ionic liquid induction liquid 18 and can be reliably applied and spread in the pixel.
[0032]
In addition, when a plurality of types of ink (red, green, and blue) are introduced into different pixels on the same substrate, it is not always necessary to apply the three types of ink at the same time as described above. After the first ink is introduced into the second ink, the second ink may be introduced into a predetermined pixel other than the pixel into which the first ink is introduced. In this case, before introducing the first ink, the functional liquid inducing liquid is introduced only into each pixel into which the first ink is introduced. After introducing the first ink, the functional liquid inducing liquid is introduced into a predetermined pixel other than the pixel into which the first ink is introduced, and the second ink is introduced. Accordingly, when each ink is ejected, the functional liquid inducing liquid that functions as a priming water is stored only in the pixel from which the ink is ejected, so that the ink is easily guided to a desired pixel. be able to.
[0033]
As an ink, for example, after dispersing an inorganic pigment in a polyurethane resin oligomer, cyclohexanone and butyl acetate are added as low boiling point solvents, butyl carbitol acetate is added as a high boiling point solvent, and a nonionic surfactant is 0.01% by weight. Is added as a dispersant, and a viscosity of 6 to 8 centipoise is used.
[0034]
(2-4. Drying step)
Next, the applied ink is dried. First, the ink layer 19 was set by leaving it in a natural atmosphere for 3 hours, then heated on a hot plate at 80 ° C. for 40 minutes, and finally heated in an oven at 200 ° C. for 30 minutes. A colored layer 20 is obtained by performing a curing process (FIG. 2: S7).
[0035]
In this embodiment, since the solvent or the like that is the functional liquid induction liquid is applied before the functional liquid is introduced, the drying conditions such as the substrate temperature can be made uniform among the pixels. Thereby, the film thickness of the functional liquid after drying and hardening can be made uniform between pixels.
[0036]
An overcoat layer 21 having a smooth surface is formed on the substrate by spin-coating a transparent acrylic resin paint. Further, an electrode layer 22 made of ITO (Indium Tin Oxide) is formed in a required pattern on the upper surface to form a color filter 200 (FIG. 2: S8).
[0037]
(3. Manufacturing equipment)
FIG. 3 is a schematic perspective view of a color filter manufacturing apparatus that is a functional liquid-applied substrate manufacturing apparatus according to an embodiment of the present invention. As shown in the figure, the color filter manufacturing apparatus 100 includes an inkjet head group 1, a Y-direction drive shaft 4, an X-direction guide shaft 5, a control circuit 6, a mounting table 7, a cleaning mechanism unit 8, and a base 9. Yes.
[0038]
The ink jet head group 1 includes an ink jet recording head that ejects ink, which is a functional liquid supplied from an ink tank (not shown), from each nozzle (discharge port) to each pixel. Although not shown, the ink jet recording head includes a plurality of cavities filled with ink, a diaphragm film that is provided on one wall surface of each of the cavities and has a piezoelectric element that changes in volume when a voltage is applied, and the other And a nozzle plate having a nozzle provided on the wall surface.
[0039]
The ink jet head group 1 further includes an ink jet recording head for introducing a functional liquid inducing liquid into each pixel, and a tank (not shown) for storing the functional liquid inducing liquid. Then, after the ink jet recording head for introducing the functional liquid inducing liquid introduces the functional liquid inducing liquid into each pixel, the ink jet recording head for introducing the ink introduces ink into each pixel. .
[0040]
For this reason, by manufacturing the functional liquid application substrate with the manufacturing apparatus of this embodiment, the functional liquid can be uniformly distributed in the pixels, and the functional liquid can be reliably attracted in the pixels. Furthermore, the film thickness of the functional liquid after drying and curing can be made uniform between pixels.
[0041]
The mounting table 7 is for mounting the color filter substrate 101 to be manufactured by the manufacturing apparatus, and includes a mechanism for fixing the substrate to a reference position.
[0042]
A Y-direction drive motor 2 is connected to the Y-direction drive shaft 4. The Y-direction drive motor 2 is a stepping motor or the like, and rotates the Y-direction drive shaft 4 when a drive signal in the Y-axis direction is supplied from the control circuit 6. When the Y-direction drive shaft 4 is rotated, the inkjet head group 1 moves in the Y-axis direction.
[0043]
The X direction guide shaft 5 is fixed so as not to move with respect to the base 9. The mounting table 7 includes a mounting table drive motor 3. The mounting table drive motor 3 is a stepping motor or the like, and moves the mounting table 7 in the X-axis direction when a drive signal in the X-axis direction is supplied from the control circuit 6.
[0044]
That is, the inkjet head group 1 can be freely moved to any location on the color filter substrate 101 by performing driving in the X-axis direction and driving in the Y-axis direction. The relative speed of the inkjet head group 1 with respect to the color filter substrate 101 is also determined by the control of the driving mechanism in each axial direction.
[0045]
The control circuit 6 supplies a voltage for ink droplet ejection control to each head of the inkjet head group 1. Further, a drive pulse signal for controlling the movement of the inkjet head group 1 in the Y-axis direction is supplied to the Y-direction drive motor 2, and a drive pulse signal for controlling the movement of the placement table 7 in the X-axis direction is supplied to the placement table drive motor 3. .
[0046]
The cleaning mechanism unit 8 includes a mechanism for cleaning the inkjet head group 1. The cleaning mechanism unit 8 includes an X-direction drive motor (not shown). The cleaning mechanism 8 moves along the X direction guide shaft 5 by driving the X direction drive motor. The movement of the cleaning mechanism 8 is also controlled by the control circuit 6.
[0047]
(4. Electro-optical device)
FIG. 4 is a cross-sectional view of a color liquid crystal display device which is an electro-optical device manufactured by the manufacturing method according to one embodiment of the present invention. The hatching of each part of the sectional view is partially omitted. Since the color liquid crystal display device 300 uses the color filter 200 manufactured by the above-described method, the functional liquid is uniformly distributed in the pixel, the functional liquid is surely attracted in the pixel, and further dried. In addition, the film thickness of the functional liquid after curing is uniform among the pixels, and an image with good image quality can be displayed.
[0048]
The color liquid crystal display device 300 is configured by combining a color filter 200 and a counter substrate 38 and enclosing a liquid crystal composition 37 therebetween. On the inner surface of one substrate 38 of the liquid crystal display device 300, TFT (thin film transistor) elements (not shown) and pixel electrodes 32 are formed in a matrix. Further, as the other substrate, a color filter 200 is installed so that the red, green, and blue colored layers 20 are arranged at positions facing the pixel electrodes 32.
[0049]
Alignment films 26 and 36 are formed on the opposing surfaces of the substrate 38 and the color filter 200. These alignment films 26 and 36 are rubbed so that liquid crystal molecules can be aligned in a certain direction. Further, polarizing plates 29 and 39 are bonded to the outer surfaces of the substrate 38 and the color filter 200, respectively. In addition, a combination of a fluorescent lamp (not shown) and a scattering plate is generally used as the backlight, and the liquid crystal composition 37 is displayed by functioning as an optical shutter that changes the transmittance of the backlight light. I do.
[0050]
The electro-optical device is not limited to the above-described color liquid crystal display device in the present invention. For example, a small television using a thin cathode ray tube or a liquid crystal shutter, an EL display device, a plasma display, a CRT display, an FED (Field Emission). An electro-optical device using various electro-optical means such as a display panel can be employed.
[0051]
(5. Electronic equipment)
FIG. 5 is a perspective view of a notebook personal computer which is an electronic device manufactured by the manufacturing method according to the embodiment of the present invention. Since the personal computer 500 uses the above-described color liquid crystal display device 300 as a display unit, the functional liquid is uniformly distributed in the pixels, the functional liquid is surely attracted in the pixels, and is further dried and cured. The film thickness of the later functional liquid becomes uniform between pixels, and an image with good image quality can be displayed.
[0052]
As shown in the figure, the liquid crystal display device 300 is housed in a housing 510, and the display area of the liquid crystal display device 300 is exposed from an opening 511 formed in the housing 510. The personal computer 500 also includes a keyboard 530 as an input unit.
[0053]
In addition to the liquid crystal display device 300, the personal computer 500 includes various circuits such as a display information output source, a display information processing circuit, a clock generation circuit, and a power supply circuit that supplies power to these circuits, although not shown. The display signal generation unit is configured. For example, a display image is formed on the liquid crystal display device 300 by supplying a display signal generated by a display signal generation unit based on information input from the input unit 530 or the like.
[0054]
The electronic apparatus in which the electro-optical device according to this embodiment is incorporated is not limited to a personal computer, but is a mobile phone, an electronic notebook, a pager, a POS terminal, an IC card, a mini-disc player, a liquid crystal projector, and an engineering workstation ( EWS), a word processor, a television, a viewfinder type or a monitor direct-view type video tape recorder, an electronic desk calculator, a car navigation device, a device equipped with a touch panel, a watch, a game machine, and the like.
[0055]
(6. Other embodiments)
The functional liquid application substrate manufactured by the manufacturing method of the present invention is not limited to the color filter, and may be an EL element substrate. In this case, an EL phosphor solution is used as the functional liquid, and an EL phosphor solvent or a low concentration EL phosphor solution is used as the functional liquid inducing liquid. The introduction of the functional liquid induction liquid and the functional liquid is preferably performed by an ink jet method.
[0056]
In the EL element substrate thus manufactured, the functional liquid is uniformly distributed in the pixels, the functional liquid is surely attracted into the pixels, and the thickness of the functional liquid after drying is changed between the pixels. It can be uniform. By using this EL element substrate as an electro-optical means, an EL display device which is another embodiment of the electro-optical device of the present invention can be manufactured, and this EL display device displays an image with good image quality. Can do.
[0057]
【The invention's effect】
ADVANTAGE OF THE INVENTION According to this invention, the manufacturing method of the functional liquid provision board | substrate which improved the uniformity of distribution in the pixel of the functional liquid introduce | transduced in a pixel can be provided. Moreover, the manufacturing method of the functional liquid provision board | substrate which can introduce | transduce functional liquid into a pixel reliably can be provided. Furthermore, the manufacturing method of the functional liquid provision board | substrate which can equalize the film thickness of the functional liquid between the pixels arrange | positioned on a board | substrate can be provided.
[Brief description of the drawings]
FIG. 1 is a partially enlarged view of a color filter that is a functional liquid application substrate manufactured by a manufacturing method according to an embodiment of the present invention.
FIG. 2 is a cross-sectional view of the manufacturing process of the color filter.
FIG. 3 is a schematic perspective view of a color filter manufacturing apparatus which is a functional liquid application substrate manufacturing apparatus according to an embodiment of the present invention.
FIG. 4 is a cross-sectional view of a color liquid crystal display device which is an electro-optical device manufactured by the manufacturing method of one embodiment of the present invention.
FIG. 5 is a perspective view of a notebook personal computer which is an electronic device manufactured by the manufacturing method according to the embodiment of the present invention.
[Explanation of symbols]
200 ... Color filter (functional liquid application substrate), 12 ... Substrate, 13 ... Pixel, 14 ... Partition, 18 ... Functional liquid induction liquid, 19 ... Functional liquid, 300 ... Liquid crystal display device (electro-optical device), 500 ... Personal computer (electronic equipment) 1 ... Inkjet head group

Claims (11)

Introducing a functional liquid inducing liquid into each pixel formed by the partition;
Introducing the functional liquid into each of the pixels into which the functional liquid inducing liquid has been introduced, and mixing the functional liquid with the functional liquid inducing liquid;
A method for producing a functional liquid-applied substrate, comprising: In claim 1,
The method for producing a functional liquid-imparting substrate, wherein the functional liquid inducing liquid is a solvent for the functional liquid. In claim 1,
The method for producing a functional liquid-applied substrate, wherein the functional liquid inducing liquid is lower in concentration than the functional liquid. In claim 1,
The method for producing a functional liquid-applied substrate, wherein the functional liquid inducing liquid is an alcohol-based or glycol ether-based solvent. In any one of Claims 1 thru | or 4,
The method for producing a functional liquid-applied substrate, wherein the functional liquid inducing liquid is lower in viscosity than the functional liquid. In any one of Claims 1 to 5,
The method for producing a functional liquid application substrate, wherein the functional liquid inducing liquid is introduced into each pixel so as to be applied to the entire bottom surface of each pixel. In any one of Claims 1 thru | or 6,
The method for producing a functional liquid-imparting substrate, wherein the functional liquid inducing liquid and the functional liquid are introduced into the pixels by an inkjet method. In any one of Claims 1 thru | or 7,
The method for producing a functional liquid-applied substrate, wherein the functional liquid is ink. In any one of Claims 1 thru | or 7,
The method for producing a functional liquid-applied substrate, wherein the functional liquid is an EL phosphor solution.   A method for manufacturing an electro-optical device, comprising using the functional liquid-applied substrate manufactured by the manufacturing method according to claim 1.   An electronic device manufacturing method using the electro-optical device manufactured by the manufacturing method according to claim 10.

Images