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JP3915723B2 - Wire bonding method - Google Patents

Wire bonding method Download PDF

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Publication number
JP3915723B2
JP3915723B2 JP2003082645A JP2003082645A JP3915723B2 JP 3915723 B2 JP3915723 B2 JP 3915723B2 JP 2003082645 A JP2003082645 A JP 2003082645A JP 2003082645 A JP2003082645 A JP 2003082645A JP 3915723 B2 JP3915723 B2 JP 3915723B2
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JP
Japan
Prior art keywords
bonding
wire
loop portion
loop
shape
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2003082645A
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Japanese (ja)
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JP2004296468A (en
Inventor
宏 武井
明彦 荻野
克己 石川
信也 牧野
康櫻 山崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denso Corp
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Denso Corp
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Publication date
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Priority to JP2003082645A priority Critical patent/JP3915723B2/en
Publication of JP2004296468A publication Critical patent/JP2004296468A/en
Application granted granted Critical
Publication of JP3915723B2 publication Critical patent/JP3915723B2/en
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Expired - Fee Related legal-status Critical Current

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    • H01L2924/10162—Shape being a cuboid with a square active surface
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151—Die mounting substrate
    • H01L2924/1515—Shape
    • H01L2924/15153—Shape the die mounting substrate comprising a recess for hosting the device
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151—Die mounting substrate
    • H01L2924/15165—Monolayer substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/20—Parameters
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    • H01L2924/20755—Diameter ranges larger or equal to 50 microns less than 60 microns

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  • Wire Bonding (AREA)

Description

【０００１】
【発明の属する技術分野】
本発明は、２つの電極間を、ボンディングワイヤにより弧状のループを描くように接続するワイヤボンディング方法に関する。
【０００２】
【従来の技術】
例えば半導体圧力センサにおいては、図１４に概略的に示すように、半導体チップ（圧力センサチップ）１を、パッケージ（基板）２内に接着剤３により接着し、半導体チップ１上の電極（パッド）１ａと、パッケージ２に設けられた電極（リード）２ａとを、例えばアルミニウム製のボンディングワイヤ４により接続するようになっている。
【０００３】
この場合、一般に、超音波を用いたワイヤボンディング方法が用いられ、図示はしないが、この方法では、先端にワイヤ４を保持したボンディングツール（ウェッジ）を半導体チップ１の電極１ａ上に移動させ、一定の周波数の超音波振動及び圧力を付与することによってワイヤ４の先端をその電極１ａに接合し（ファーストボンディング）、次いで、ワイヤ４のループを形成させながらウェッジを移動させ、パッケージ２の電極２ａに同様にワイヤ４を超音波接合する（セカンドボンディング）ことにより行われるようになっている。
【０００４】
ところで、このようなワイヤボンディングにおいては、セカンドボンディング時において、ウェッジの超音波振動によりワイヤ４が共振する現象が発生することがあり、このような共振が起こると、ワイヤ４のファーストボンド部のネック部にダメージを与えてしまい、接合信頼性が低下する不具合が生ずる。このとき、図１５に示すように、横軸にワイヤ長を、縦軸にボンディング周波数をとった場合、ワイヤの共振領域Ａ１〜Ａ３（図に斜線を付して示す）は、ワイヤ長が大きくなるにつれて、順に高次のものが周期的に出現するようになる。例えばボンディング周波数が１２０ｋＨｚの場合、ワイヤ長がａ１であると、共振領域Ａ３に入り、共振が発生することになる。
【０００５】
そこで、そのような不具合を防止するためには、ワイヤ４の長さを変えることが効果的となり、従来では、図１６に示すように、電極２ａのセカンドボンディングの位置座標をずらすことにより、ワイヤ５の長さを変えることが考えられている（例えば特許文献１参照）。また、ワイヤの長さを変える（長くする）ためには、図１７に示すように、ワイヤ６のループ高さを高くすることも考えられる。あるいは、超音波振動子に対する発信出力信号を制御することにより、振動周波数を変更することも考えられていた（例えば特許文献２参照）。
【０００６】
【特許文献１】
特開平６−６１３１２号公報
【０００７】
【特許文献２】
特開平８−３１８８４号公報
【０００８】
【発明が解決しようとする課題】
しかしながら、上記したうち、セカンドボンディングの位置座標を変更したり、ループ高さを変更したりすることにより、ワイヤの長さを変えるものでは、通常、そのようなボンディング座標位置やループ高さは、設計的に寸法が最適化されているため、設計的制約から困難を伴う場合が多くなる。あるいは、変更が可能であるとしても、共振領域から少しずらすことができる程度であり、製品ばらつき等により、共振が発生する可動性を完全に回避することは難しい。また、振動周波数を変更するものでは、装置構成が複雑となり大幅なコストアップを招く問題点がある。
【０００９】
本発明は上記事情に鑑みてなされたもので、その目的は、超音波を用いたワイヤボンディングを行なうにあたり、ボンディングワイヤの共振に起因する不具合の発生を効果的に防止することができ、しかもそのための構成を簡単で安価に済ませることができるワイヤボンディング方法を提供するにある。
【００１０】
【課題を解決するための手段】
上記目的を達成するために、本発明の請求項１のワイヤボンディング方法は、ボンディングワイヤのループ部分に、２つ以上の屈曲点である節点を有する屈曲形状を形成するための方法であって、ファーストボンディング後のボンディングツールをセカンドボンディング位置に移動させた状態で、折曲げ治具により、ボンディングワイヤの長さが、ボンディング周波数に対してワイヤ長の変化に応じて周期的に出現する共振領域のｎ次と（ｎ＋１）次との中間に位置する長さとなるように、該ボンディングワイヤのループ部分が屈曲させられるところに特徴を有する。これによれば、ループ部分が空中で屈曲形状とされることによりボンディングワイヤの長さをかせぐことができる。
【００１１】
従って、ボンディング座標位置やループ高さに設計的制限があっても、それらを変更することなく、ボンディングワイヤを共振領域から外れた長さに長くすることが可能となり、これと共に、節点により、ワイヤのファーストボンド部のネック部への振動エネルギーの伝達が抑えられる作用も期待できる。この結果、ボンディングワイヤの共振の発生を効果的に防止することができる。しかも、ボンディングワイヤのループ部分を屈曲形状とするだけの簡単で安価な構成で済ませることができる。
【００１２】
この場合、ボンディングワイヤの長さを、ボンディング周波数に対してワイヤ長の変化に応じて周期的に出現する共振領域のｎ次と（ｎ＋１）次との中間に位置する長さとする ことにより、ワイヤ長を共振領域から大きく外れた長さとすることができるので、多少の製品ばらつき等があっても、共振の発生を確実に防止することができるようになり、より効果的となる。折曲げ治具によりループ部分を屈曲させるようにしたので、ボンディングワイヤのループ部分の屈曲形状を、所望の形状に確実に形成することができ、そのための構成を比較的簡単で安価に済ませることができる。
本発明においては、セカンドボンディングが完了した後、折曲げ治具によりループ部分を屈曲させるようにしても良い（請求項２の発明）。これによっても、折曲げ治具を用いることによって、ボンディングワイヤのループ部分の屈曲形状を、所望の形状に確実に形成することができる。
上記折曲げ治具を、任意角度に回転可能な回転体と、この回転体にその回転軸を挟む位置に設けられた２本の棒状部材とを備えたものとし、それら棒状部材間にボンディングワイヤのループ部分を挟んだ状態で回転体を回転させることにより、ループ部分を屈曲させるようにすることができる（請求項３の発明）。これによれば、比較的簡単な構成の折曲げ治具によって、ボンディングワイヤのループ部分の屈曲形状を、確実に形成することができる。
【００１３】
また、より具体的には、上記屈曲形状として、ボンディングワイヤのループ部分を、平面方向に見てほぼＳ字状に構成したり（請求項４の発明）、あるいは、弧状のループの中間部分を下方に凹ませた凹形状に構成したり（請求項５の発明）することができる。いずれも、比較的簡単な構成で済ませることができ、加工も容易となる。
【００１４】
【００１５】
【００１６】
【００１７】
【００１８】
【００１９】
【００２０】
【発明の実施の形態】
以下、本発明を具体化したいくつかの実施例等について、図１ないし図１３を参照しながら説明する。尚、以下に述べる各例は、いずれも、例えば車両用の半導体圧力センサにおける半導体チップ（圧力センサチップ）と、パッケージの電極との間の接続に本発明を適用したものである。
【００２１】
（１）基本構成
図１ないし図５を参照して、本願発明の基本構成について述べる。ここでは、ボンディングワイヤのループ部分の屈曲形状の基本構造の具体例について説明する。まず、図１に示すように、半導体圧力センサは、パッケージ（ケース）１１内の凹部に、半導体圧力センサチップ１２（以下、単に半導体チップ１２という）を、接着剤１３により装着し、それらを例えば直径が５０μｍのアルミニウム製のボンディングワイヤ１４により電気的に接続して構成される。
【００２２】
このとき、半導体チップ１２の上面には、接続用の４個の電極（パッド）１２ａが、その一辺部（図で右辺部）に並んで形成されている。これに対し、前記パッケージ１１の凹部の外側（図で右側）部分の上面部には、前記半導体チップ１２の各電極１２ａと電気的に接続される４個の電極（リード端子）１１ａが、それら各電極１２ａと対応した位置に設けられている。
【００２３】
さて、前記パッケージ１１に半導体チップ１２が接着された後、半導体チップ１２の各電極１２ａと、パッケージ１１の各電極１１ａとの間が、夫々ボンディングワイヤ１４により弧状のループを描くように接続される。詳しくは後述するように、その接続には、超音波を利用した、ワイヤボンディング方法が用いられる。
【００２４】
このとき、図１（ａ）に示すように、ボンディングワイヤ１４のループ部分が、縦方向に屈曲された２つ以上の節点（屈曲点）を有する屈曲形状、より具体的には、弧状のループの中間部分を下方に凹ませた凹形状（ほぼＭ字形状）に構成されている。また、その凹部の曲げ深さ寸法ｈは、該ループの高さ寸法Ｈの１／３から１／２の範囲、この場合約１／２とされている。そして、後述するように、上記屈曲形状としたことにより、ボンディングワイヤ１４の長さ（ワイヤ長）ａ２が、ボンディング周波数に対してワイヤ長の変化に応じて周期的に出現する共振領域のｎ次と（ｎ＋１）次との中間に位置する長さとされている（図２参照）。
【００２５】
ここで、図示はしないが、そのワイヤボンディングに用いられるワイヤボンディング装置（ウェッジボンダ）は、周知のように、半導体チップ１２を搭載したパッケージ１１が位置決め固定状態でセットされるボンディングステーション、カメラ等を備え前記各電極１２ａ及び１１ａの位置を認識する画像認識部、ワイヤ１４を超音波接合するボンディングツール、このボンディングツール（ウェッジ）をＸ、Ｙ、Ｚ方向に自在に移動させるための移動機構、全体を制御する制御装置などを備えて構成されている。
【００２６】
前記ボンディングツールは、ワイヤ１４を保持し加圧するためのウェッジやそのウェッジに振動を付与するための超音波振動子等を有して構成されている。この例ではボンディング周波数が、例えば１２０ｋＨｚとされている。また、前記制御装置には、ボンディングワイヤ１４のループ部分の上記した所定の屈曲形状を得るように、ウェッジを移動させるルーピングのプログラムが予め設定（入力）されている。尚、前記電極１１ａに対するボンディング座標位置や、ボンディングワイヤ１４のループ高さＨは、設計的に寸法が最適化されている。
【００２７】
次に、ワイヤボンディング方法（手順）について述べる。上述のように、ワイヤボンディング装置においては、まず、ボンディングステーションに、半導体チップ１２を装着したパッケージ１１が搬入され、位置決め固定される。この後、画像認識部により半導体チップ１２の各電極１２ａ、及びパッケージ１１の各電極１１ａの位置認識が行われる。そして、それらの間をボンディングワイヤ１４により接合する作業が行なわれる。
【００２８】
このワイヤボンディングの作業では、第１に、先端にワイヤ１４を保持したウェッジを、まず半導体チップ１２の電極１２ａ上に移動させ、超音波振動及び圧力を付与することによってワイヤ１４の先端をその電極１２ａに接合するファーストボンディングが行なわれる。引続き、ウェッジを、ワイヤ１４のループを形成させながら電極１１ａ上（セカンドボンディング位置）に移動させることが行なわれる。
【００２９】
このとき、ルーピングのプログラム制御によってファーストボンディング後のセカンドボンディング位置までのウェッジの移動軌跡が、図で右方に移動しながらの上下動を２回繰返すように、予め設定されたループ部分の屈曲形状、つまり図１（ａ）に示すような中間部が凹形状となる形状が得られるように制御されるのである。
【００３０】
次いで、パッケージ１１の電極１１ａに対して、ウェッジにより超音波振動及び圧力を付与することによってワイヤ１４をその電極１１ａに接合するセカンドボンディングが行なわれる。この後、ワイヤ１４が切断され、ワイヤ１４の先端を保持したウェッジが次のボンディング位置（次の電極１２ａ上）に移動される。以上の動作が４対の電極１２ａ、１１ａに対し順に実行されることにより、図１（ｂ）に示すように、４本のボンディングワイヤ１４による半導体チップ１２とパッケージ１１との間の電気的接続が完了するのである。
【００３１】
しかして、上記したワイヤボンディングにおいては、セカンドボンディング時において、ウェッジの超音波振動によりワイヤ１４が共振する現象が発生することがあり、このような共振が起こると、ワイヤ１４のファーストボンド部のネック部にダメージを与えてしまい、接合信頼性が低下する等の不具合が生ずる。このとき、従来技術の項（図１５）でも述べたように、横軸にワイヤ長を、縦軸にボンディング周波数をとった場合、ワイヤの共振領域Ａ１〜Ａ３（図２に斜線を付して示す）は、ワイヤ長が大きくなるにつれて、順に高次のものが周期的に出現するようになる。
【００３２】
ここで、図５は、本発明者等が行った、ボンディングワイヤ１４のループ高さを様々に変更した場合の、ループ高さ（言換えればワイヤ長）と引張り強度との関係を調べた試験結果を示している。この図５から明らかなように、ボンディングワイヤ１４をある長さとしたとき（楕円で囲んだ２箇所）に、引張り強度が明らかに低下する（またばらつきが大きくなる）現象が見られ、これは、ワイヤ長が共振領域に入って上記したワイヤ１４の共振が発生したことに起因するものであると考えられる。
【００３３】
ところが、本例では、ボンディングワイヤ１４のループ部分を空中で縦方向の屈曲形状（中間部に凹形状を有する形状）としたことにより、ボンディング座標位置やループ高さＨを変更することなく、ワイヤ長をかせぐことができ、ボンディングワイヤ１４を共振領域から外れた長さとすることができた。この場合、ワイヤ１４を屈曲形状とすることにより、図２に示すように、ワイヤの共振領域をＡ１〜Ａ３から、夫々Ｂ１〜Ｂ３（異なる斜線を付して示す）に相対的にずらすことができ、例えばボンディング周波数が１２０ｋＨｚで、ワイヤ長を、共振領域Ｂ１〜Ｂ３から外れた長さａ２とすることができたのである。
【００３４】
これと共に、屈曲形状とされたボンディングワイヤ１４の節点により、ワイヤ１４のファーストボンド部のネック部への振動エネルギーの伝達が抑えられる作用も期待できる。このとき、ボンディングワイヤ１４の共振は、縦方向に強い振動として発生すると考えられるが、本例では、ボンディングワイヤ１４を縦方向（上下方向）に屈曲させていることにより、縦方向の振動の伝達を効果的に抑えることができる。
【００３５】
ちなみに、図３は、本例におけるボンディングワイヤ１４のループ部分の形状と、従来例（図１４）に示した通常のボンディングワイヤ４の形状とで、引張り強度を比較した試験結果を示している。この結果から、本例のボンディングワイヤ１４の形状によって、従来に比べて引張り強度に優れたものとなったことが理解できる。
【００３６】
また、図４は、従来例（図１４）に示した通常の形状のボンディングワイヤ４（ａ）、本例の縦方向に屈曲形状としたボンディングワイヤ１４（ｂ）、後述する第１の実施例のように横方向に屈曲形状としたボンディングワイヤ（ｃ）における、ボンディング周波数（横軸）と、共振の強さ（縦軸）との関係を調べた結果を示している。この結果からも、本例及び第１の実施例では、共振領域を確実に避けることができたことが理解できる。
【００３７】
このように、超音波を用いたワイヤボンディングを行なうにあたり、ボンディングワイヤ１４のループ部分を屈曲形状としたことにより、セカンドボンディング時におけるボンディングワイヤ１４の共振の発生を効果的に防止することができ、この結果、ボンディングワイヤ１４の共振に起因して、ワイヤ１４のファーストボンド部のネック部にダメージを与える等の不具合を効果的に防止することができるという優れた効果を奏する。
【００３８】
しかも、ボンディングワイヤ１４のループ部分を屈曲形状とするだけなので、ボンディング座標位置やループ高さＨに設計的制限があっても、それらを変更することなく実現でき、また、ルーピングのプログラム制御によってボンディングワイヤ１４のループ部分の屈曲形状を得ることができるので、作業工程の増加等を招くことなく、簡単な構成で安価に済ませることができるものである。
【００３９】
また、特に、ボンディングワイヤ１４の長さを、ボンディング周波数に対してワイヤ長の変化に応じて周期的に出現する共振領域Ｂ１とＢ２との中間に位置する長さとしたので、多少の製品ばらつき等があっても、共振の発生を確実に防止することができるようになる。更には、ボンディングワイヤ１４のループ部分の屈曲形状として、弧状のループの中間部分を下方に凹ませた凹形状とすると共に、その凹部の曲げ深さ寸法ｈを、該ループの高さ寸法Ｈの１／３以上としたので、簡単な構成で、ワイヤ長を共振領域から大きくずらせることができ、共振発生の防止効果に極めて優れたものとすることができたのである。
【００４０】
（２）第１〜第３の実施例
次に、本発明の第１〜第３の実施例について、図６〜図１１を参照しながら以下順に説明する。尚、これら第１〜第３の実施例においても、上記基本構成の例と同様に、半導体チップ１２を、パッケージ（ケース）１１に装着し、それらをアルミニウム製のボンディングワイヤにより接続する場合を具体例としている。従って、上記基本構成と同一部分には同一符号を付して詳しい説明を省略し、以下、異なる点についてのみ述べる。
【００４１】
図６〜図９は、本発明の第１の実施例を示している。この実施例が上記基本構成と異なる点は、半導体チップ１２の各電極１２ａと、パッケージ１１の各電極１１ａとの間を夫々接続するボンディングワイヤ２１のループ部分の形状にあり、ここでは、図６に示すように、平面方向に見てほぼＳ字状をなす屈曲形状（横曲げ）に構成されている。従って、電極１１ａ上のセカンドボンディングの座標位置やループ高さＨを変更することなく、ボンディングワイヤ２１の長さが長くなっている。
【００４２】
そして、本実施例では、ボンディングワイヤ２１のループ部分を屈曲形状とするために、ファーストボンディング後のボンディングツール（ウェッジ２２）をセカンドボンディング位置に移動させた状態で、折曲げ治具２３を用いてボンディングワイヤ２１のループ部分を屈曲させるようにしている。
【００４３】
この場合、図７及び図８に示すように、ワイヤボンディング装置は、ワイヤ２１を超音波接合するためのボンディングツール（ウェッジ２２）を有すると共に、折曲げ治具２３を有している。この折曲げ治具２３は、上下に延びる回転軸を中心に任意角度に回転可能な回転体２３ａと、この回転体２３ａの下面に、その回転軸を挟む位置に下方に延びて設けられた２本の棒状部材たるピン２３ｂとを備えて構成されている。
【００４４】
ワイヤボンディングを行なうにあたっては、まず、ウェッジ２２によりワイヤ２１を導体チップ１２の電極１２ａに接合するファーストボンドが行なわれ、引続き、ウェッジ２２を、ワイヤ２１のループを形成させながら電極１１ａ上（セカンドボンディング位置）に移動させることが行なわれ、ウェッジ２２はその状態で停止される。
【００４５】
次いで、折曲げ治具２３によりループ部分を屈曲させる作業が行なわれるのであるが、この作業では、まず図７に示すように、折曲げ治具２３の２本のピン２３ｂ間に、ワイヤ２１のループ部分を図で前後から挟んだ状態とし、引続き、図８に示すように、回転体２３ａを任意の角度（この場合９０°強）回転させることにより、ループ部分がほぼＳ字状に屈曲されるのである。この後、ウェッジ２２によりワイヤ２１をパッケージ１１の電極１１ａに接合するセカンドボンディングが行なわれる。
【００４６】
これにて、ボンディングワイヤ２１のループ部分を空中で横方向の屈曲形状（上から見てほぼＳ字状）としたことにより、ボンディング座標位置やループ高さＨを変更することなく、ワイヤ長をかせぐことができ、ボンディングワイヤ２１を共振領域から外れた長さとすることができ、これと共に、屈曲形状とされたボンディングワイヤ２１の節点により、ワイヤ２１のファーストボンド部のネック部への振動エネルギーの伝達が抑えられる効果も期待できる。
【００４７】
ちなみに、図９は、本実施例におけるボンディングワイヤ２１のループ部分の形状と、従来例（図１４）に示した通常のボンディングワイヤ４の形状とで、引張り強度を比較した試験結果を示している。この結果から、本実施例の形状を備えるボンディングワイヤ２１は、従来のものに比べて引張り強度に優れたものとなったことが理解できる。また、図４（ｃ）は、上記形状のボンディングワイヤ２１における、ボンディング周波数（横軸）と、共振の強さ（縦軸）との関係を調べた結果を示しており、この結果からも、共振領域を確実に避けることができたことが理解できる。
【００４８】
このように本実施例によれば、超音波を用いたワイヤボンディングを行なうにあたり、ボンディングワイヤ２１のループ部分を屈曲形状としたことにより、上記基本構成の例と同様に、ボンディング座標位置やループ高さＨを変更することなく、セカンドボンディング時におけるボンディングワイヤ２１の共振の発生を効果的に防止することができ、この結果、ボンディングワイヤ２１の共振に起因する不具合の発生を防止することができる。
【００４９】
そして、本実施例では、比較的簡単な構成の折曲げ治具２３を用いることによって、ボンディングワイヤ２１のループ部分の屈曲形状を、所望の形状に確実に形成することができ、ボンディングワイヤ２１のループ部分を屈曲形状とするための構成を比較的簡単で安価に済ませることができるものである。
【００５０】
図１０は、本発明の第２の実施例を示している。この実施例では、半導体チップ１２の各電極１２ａと、パッケージ１１の各電極１１ａとの間を夫々接続するボンディングワイヤ３１のループ部分の形状を、上記第２の実施例よりも屈曲度合の大きいほぼＳ字状（いわゆる稲妻型）に構成している。
【００５１】
図１１は、本発明の第３の実施例を示している。この実施例では、パッケージ１１の各電極１１ｂの位置を、図で前後方向にややずらせた状態とすると共に、半導体チップ１２の各電極１２ａ前記各電極１１ｂとの間を夫々接続するボンディングワイヤ３２のループ部分の形状を、やはり、平面方向に見てほぼＳ字状をなす屈曲形状としている。これら、第３、第４の実施例においても、上記第２の実施例と同様の作用、効果を得ることができる。
【００５２】
尚、上記第１の実施例では、ウェッジ２２（ワイヤ２１）を、電極１１ａ（セカンドボンディング位置）の上方で停止させた状態で、折曲げ治具２３による屈曲作業を行なうようにしたが、ウェッジ２２によりワイヤ２１を電極１１ａ上に押当てた状態で屈曲作業を行うようにしても良い。更には、セカンドボンディングが完了した後、折曲げ治具２３によりループ部分を屈曲させるように構成することも可能である。
【００５３】
（３）参考例、その他の実施例
図１２及び図１３は、本発明の参考例を示している。この例では、半導体チップ１２の各電極１２ａと、パッケージ１１の各電極１１ａとの間を、ボンディングワイヤ４１により弧状のループを描くように接続するのであるが、ウェッジ２２により電極１１ａ上にセカンドボンディングを行う際に、ボンディングワイヤ４１のループ部分の途中部を、クランプ治具４２によりクランプするようにしている。
【００５４】
このとき、図１２に示すように、前記クランプ治具４２は、一対の爪４２ａを有し、それらの間に、ボンディングワイヤ４１をクランプしたり、クランプを解除したりすることが可能に構成されている。この場合、図１２（ａ）に示すように、ウェッジ２２によるルーピング作業時には、クランプ治具４２の爪４２ａは開いており、図１２（ｂ）及び図１３に示すように、セカンドボンディング時には、クランプ治具４２の爪４２ａが閉じてボンディングワイヤ４１のループ部分の途中部がクランプされるようになっている。セカンドボンディングが完了すると、図１２（ｃ）に示すように、クランプ治具４２の爪４２ａが開放される。
【００５５】
これにて、セカンドボンディング時のボンディングワイヤ４１の共振が発生しにくくなり、また、共振が発生しても、ワイヤ４１のファーストボンド部のネック部に振動エネルギーが伝達されることが阻害される。この結果、本例によれば、ボンディングワイヤ４１の共振に起因する不具合の発生を効果的に防止することができ、しかも、ボンディングワイヤ４１のループ部分の途中部をクランプ治具４２によりクランプするだけの簡単な構成で安価に済ませることができるものである。
【００５６】
尚、上記実施例等では、本発明を半導体圧力センサに適用するようにしたが、半導体チップを基板に実装する場合など、電極間をボンディングワイヤで接続するもの全般に適用することができる。ボンディングワイヤのループ部分の屈曲形状としても、様々な変形例が考えられ、例えば４個以上の多数個の節点を有するような蛇行状に構成することも可能である。回転軸を横方向とした折曲げ治具を用いて縦曲げを行うことも可能である。
【００５７】
その他、本発明は上記し図面に示した各実施例に限定されるものではなく、例えば、ボンディングワイヤの材質としてはアルミニウムに限らず、金などであっても良く、また、半導体チップ及びパッケージの電極の個数や位置、折曲げ治具の構造や形状等についても種々の変形が可能であり、更にはボンディング周波数等の具体的な数値についても一例を示したに過ぎない等、要旨を逸脱しない範囲内で適宜変更して実施し得るものである。
【図面の簡単な説明】
【図１】 本発明の基本構成の具体例を示すもので、ボンディングワイヤ部分の構成を概略的に示す縦断正面図（ａ）及び平面図（ｂ）
【図２】 ボンディングワイヤの長さと共振領域との関係を示す図
【図３】 ボンディングワイヤの引張り強度の試験結果を従来のものと比較して示す図
【図４】 従来例（ａ）、本例（ｂ）、第１の実施例（ｃ）のボンディングワイヤにおける、ボンディング周波数と共振の強さとの関係を調べた結果を示す図
【図５】 ボンディングワイヤのループ高さ（ワイヤ長）と引張り強度との関係を調べた試験結果を示す図
【図６】 本発明の第１の実施例を示すもので、図１相当図
【図７】 折曲げ治具によりボンディングワイヤのループ部分を挟んだ様子を示す正面図
【図８】 折曲げ治具を回転させてループ部分を屈曲させる様子を示す正面図
【図９】 図３相当図
【図１０】 本発明の第２の実施例を示す図１相当図
【図１１】 本発明の第３の実施例を示す図１相当図
【図１２】 本発明の参考例を示すもので、ルーピング時（ａ）、セカンドボンディング時（ｂ）、ボンディング完了時（ｃ）のクランプ治具とボンディングワイヤとの関係を示す側面図
【図１３】 セカンドボンディング時の様子を示す縦断正面図
【図１４】 従来例を示すもので、図１相当図
【図１５】 図２相当図
【図１６】 別の従来例を示す図１相当図
【図１７】 更に別の従来例を示す図１相当図
【符号の説明】
図面中、１１はパッケージ、１１ａ，１１ｂは電極、１２は半導体チップ、１２ａは電極、１４，２１，３１，３２，４１はボンディングワイヤ、２２はウェッジ（ボンディングツール）、２３は折曲げ治具、２３ａは回転体、２３ｂはピン（棒状部材）、４２はクランプ治具を示す。[0001]
BACKGROUND OF THE INVENTION
  The present invention connects two electrodes so as to draw an arc-shaped loop with a bonding wire.RuwaThe present invention relates to an ear bonding method.
[0002]
[Prior art]
  For example, in a semiconductor pressure sensor, as schematically shown in FIG. 14, a semiconductor chip (pressure sensor chip) 1 is bonded to a package (substrate) 2 with an adhesive 3, and an electrode (pad) on the semiconductor chip 1. 1a and an electrode (lead) 2a provided on the package 2 are connected by a bonding wire 4 made of, for example, aluminum.
[0003]
  In this case, generally, a wire bonding method using ultrasonic waves is used. Although not shown, in this method, a bonding tool (wedge) holding the wire 4 at the tip is moved onto the electrode 1a of the semiconductor chip 1, The tip of the wire 4 is bonded to the electrode 1a by applying ultrasonic vibration and pressure at a constant frequency (first bonding), and then the wedge is moved while forming a loop of the wire 4, and the electrode 2a of the package 2 is moved. Similarly, the wire 4 is ultrasonically bonded (second bonding).
[0004]
  By the way, in such wire bonding, a phenomenon in which the wire 4 resonates due to ultrasonic vibration of the wedge may occur during the second bonding. When such resonance occurs, the neck of the first bond portion of the wire 4 may be generated. This causes damage to the portion, resulting in a problem that the bonding reliability is lowered. In this case, as shown in FIG. 15, when the wire length is taken on the horizontal axis and the bonding frequency is taken on the vertical axis, the wire resonance regions A1 to A3 (shown by hatching in the drawing) have a large wire length. As it becomes, higher-order items appear periodically. For example, when the bonding frequency is 120 kHz, if the wire length is a1, the resonance region A3 is entered and resonance occurs.
[0005]
  Therefore, in order to prevent such a problem, it is effective to change the length of the wire 4. Conventionally, as shown in FIG. 16, by shifting the position coordinates of the second bonding of the electrode 2 a, It is considered to change the length of 5 (for example, see Patent Document 1). Further, in order to change (lengthen) the length of the wire, it is conceivable to increase the loop height of the wire 6 as shown in FIG. Alternatively, it has been considered to change the vibration frequency by controlling a transmission output signal to the ultrasonic transducer (see, for example, Patent Document 2).
[0006]
[Patent Document 1]
        JP-A-6-61312
[0007]
[Patent Document 2]
        JP-A-8-31884
[0008]
[Problems to be solved by the invention]
  However, among the above, by changing the position coordinates of the second bonding or changing the length of the wire by changing the loop height, usually such bonding coordinate position and loop height are: Since the dimensions are optimized in terms of design, there are many cases where difficulties are caused by design constraints. Alternatively, even if it can be changed, it can be shifted slightly from the resonance region, and it is difficult to completely avoid the mobility that causes resonance due to product variations and the like. Further, in the case of changing the vibration frequency, there is a problem that the device configuration becomes complicated and the cost is greatly increased.
[0009]
  The present invention has been made in view of the above circumstances, and the purpose thereof is to effectively prevent the occurrence of defects caused by the resonance of the bonding wire when performing wire bonding using ultrasonic waves. Can be configured easily and inexpensivelyRuwaTo provide an ear bonding method.
[0010]
[Means for Solving the Problems]
  To achieve the above object, the wire bonding according to claim 1 of the present invention.MethodThe loop part of the bonding wireInTwo or moreInflection pointBent shape with nodesIn the state where the bonding tool after the first bonding is moved to the second bonding position, the length of the bonding wire is changed with respect to the bonding frequency by the bending jig. Accordingly, the loop portion of the bonding wire is bent so as to have a length located between the nth order and the (n + 1) th order of the resonance region that appears periodically.However, it has characteristics. According to this, since the loop portion is bent in the air, the length of the bonding wire can be increased.
[0011]
  Therefore, even if there are design restrictions on the bonding coordinate position and the loop height, it is possible to lengthen the bonding wire to a length that is out of the resonance region without changing them. The effect of suppressing the transmission of vibration energy to the neck part of the first bond part can also be expected. As a result, the occurrence of resonance of the bonding wire can be effectively prevented. In addition, a simple and inexpensive configuration in which the loop portion of the bonding wire is formed into a bent shape can be achieved.
[0012]
  In this case, the length of the bonding wire is a length located between the n-th order and the (n + 1) -th order of the resonance region that appears periodically according to the change in the wire length with respect to the bonding frequency.Ru BySince the wire length can be greatly deviated from the resonance region, the occurrence of resonance can be surely prevented even if there is some product variation, which is more effective.Since the loop portion is bent by the bending jig, the bent shape of the loop portion of the bonding wire can be surely formed into a desired shape, and the configuration therefor can be made relatively simple and inexpensive. it can.
  In the present invention, after the second bonding is completed, the loop portion may be bent by a bending jig (invention of claim 2). Also by this, the bending shape of the loop portion of the bonding wire can be surely formed into a desired shape by using the bending jig.
  The bending jig includes a rotating body that can rotate at an arbitrary angle, and two rod-shaped members provided at positions where the rotating shaft is sandwiched between the rotating bodies, and a bonding wire between the rod-shaped members. The loop portion can be bent by rotating the rotating body with the loop portion sandwiched therebetween (invention of claim 3). According to this, the bending shape of the loop portion of the bonding wire can be surely formed by the bending jig having a relatively simple configuration.
[0013]
  More specifically, as the bent shape, the loop portion of the bonding wire may be configured in an approximately S shape when viewed in a plane direction (claims).4Or an arcuate loop with an intermediate portion recessed downward (claims)5Invention). Both can be done with a relatively simple configuration, and processing is also easy..
[0014]
[0015]
[0016]
[0017]
[0018]
[0019]
[0020]
DETAILED DESCRIPTION OF THE INVENTION
  In the following, several embodiments embodying the present invention will be described.etcWill be described with reference to FIGS. The followingExamplesIn either case, for example, the present invention is applied to a connection between a semiconductor chip (pressure sensor chip) in a semiconductor pressure sensor for a vehicle and an electrode of a package.
[0021]
  (1)Basic configuration
  With reference to FIG. 1 to FIG.Basic configurationIs described.Here, a specific example of the basic structure of the bent shape of the loop portion of the bonding wire will be described.First, as shown in FIG. 1, a semiconductor pressure sensor has a semiconductor pressure sensor chip 12 (hereinafter simply referred to as a semiconductor chip 12) mounted in a recess in a package (case) 11 with an adhesive 13, It is configured to be electrically connected by an aluminum bonding wire 14 having a diameter of 50 μm.
[0022]
  At this time, on the upper surface of the semiconductor chip 12, four electrodes (pads) 12a for connection are formed side by side along the one side (right side in the drawing). On the other hand, four electrodes (lead terminals) 11a electrically connected to the respective electrodes 12a of the semiconductor chip 12 are provided on the upper surface portion of the outer side (right side in the figure) of the recess of the package 11. It is provided at a position corresponding to each electrode 12a.
[0023]
  Now, after the semiconductor chip 12 is bonded to the package 11, the electrodes 12 a of the semiconductor chip 12 and the electrodes 11 a of the package 11 are connected by the bonding wires 14 so as to draw arc-shaped loops. . As will be described in detail later, ultrasonic waves were used for the connection., WaAn ear bonding method is used.
[0024]
  At this timeThe figure1 (a), two or more nodes where the loop portion of the bonding wire 14 is bent in the vertical direction(Flexion point)More specifically, it is configured in a concave shape (substantially M-shaped) in which an intermediate portion of an arc-shaped loop is recessed downward. The bending depth dimension h of the concave portion is in the range of 1/3 to 1/2 of the height dimension H of the loop, in this case, about 1/2. As will be described later, by adopting the above-described bent shape, the length (wire length) a2 of the bonding wire 14 is the nth order of the resonance region that appears periodically according to the change of the wire length with respect to the bonding frequency. And a length located between the (n + 1) th order (see FIG. 2).
[0025]
  Here, although not shown, a wire bonding apparatus (wedge bonder) used for the wire bonding includes, as is well known, a bonding station, a camera, and the like in which the package 11 on which the semiconductor chip 12 is mounted is set in a fixed position. An image recognition unit for recognizing the position of each of the electrodes 12a and 11a, a bonding tool for ultrasonically bonding the wire 14, and a moving mechanism for freely moving the bonding tool (wedge) in the X, Y, and Z directions; And a control device for controlling the motor.
[0026]
  The bonding tool includes a wedge for holding and pressing the wire 14 and an ultrasonic vibrator for applying vibration to the wedge.This exampleIn this case, the bonding frequency is set to 120 kHz, for example. The control device is preset (inputted) with a looping program for moving the wedge so as to obtain the above-described predetermined bent shape of the loop portion of the bonding wire 14. Note that the dimensions of the bonding coordinate position with respect to the electrode 11a and the loop height H of the bonding wire 14 are optimized in terms of design.
[0027]
  next, WaThe ear bonding method (procedure) will be described. As described above, in the wire bonding apparatus, first, the package 11 on which the semiconductor chip 12 is mounted is carried into the bonding station and positioned and fixed. Thereafter, position recognition of each electrode 12a of the semiconductor chip 12 and each electrode 11a of the package 11 is performed by the image recognition unit. And the operation | work which joins them with the bonding wire 14 is performed.
[0028]
  In this wire bonding operation, first, the wedge holding the wire 14 at the tip is first moved onto the electrode 12a of the semiconductor chip 12, and the tip of the wire 14 is moved to the electrode by applying ultrasonic vibration and pressure. First bonding for bonding to 12a is performed. Subsequently, the wedge is moved onto the electrode 11 a (second bonding position) while forming a loop of the wire 14.
[0029]
  At this time, LeThe bending shape of the loop part set in advance so that the movement trajectory of the wedge to the second bonding position after the first bonding is repeatedly moved up and down while moving to the right in the figure by the program control of the looping, that is, the figure Control is performed so as to obtain a shape in which the intermediate portion has a concave shape as shown in FIG.
[0030]
  Next, second bonding is performed to bond the wire 14 to the electrode 11a by applying ultrasonic vibration and pressure to the electrode 11a of the package 11 with a wedge. Thereafter, the wire 14 is cut, and the wedge holding the tip of the wire 14 is moved to the next bonding position (on the next electrode 12a). The above operation is sequentially performed on the four pairs of electrodes 12a and 11a, so that the electrical connection between the semiconductor chip 12 and the package 11 by the four bonding wires 14 is performed as shown in FIG. Is completed.
[0031]
  In the above-described wire bonding, the phenomenon that the wire 14 resonates due to the ultrasonic vibration of the wedge may occur during the second bonding. When such a resonance occurs, the neck of the first bond portion of the wire 14 is generated. This causes damage to the portion, resulting in problems such as a decrease in bonding reliability. At this time, as described in the section of the prior art (FIG. 15), when the wire length is taken on the horizontal axis and the bonding frequency is taken on the vertical axis, the resonance regions A1 to A3 of the wire (hatched in FIG. 2). (Shown), higher-order ones appear periodically in order as the wire length increases.
[0032]
  Here, FIG. 5 is a test conducted by the present inventors to examine the relationship between the loop height (in other words, the wire length) and the tensile strength when the loop height of the bonding wire 14 is variously changed. Results are shown. As is apparent from FIG. 5, when the bonding wire 14 has a certain length (two places surrounded by an ellipse), a phenomenon in which the tensile strength is clearly reduced (and the variation becomes large) is observed. It is considered that this is because the wire length enters the resonance region and the above-described resonance of the wire 14 occurs.
[0033]
  However,This exampleThen, by making the loop portion of the bonding wire 14 into a vertical bending shape (a shape having a concave shape in the middle) in the air, the wire length can be increased without changing the bonding coordinate position and the loop height H. Thus, the length of the bonding wire 14 can be made out of the resonance region. In this case, by making the wire 14 bend, as shown in FIG. 2, the resonance region of the wire can be relatively shifted from A1 to A3 to B1 to B3 (shown with different oblique lines), respectively. For example, the bonding frequency is 120 kHz, and the wire length can be set to the length a2 deviated from the resonance regions B1 to B3.
[0034]
  At the same time, it can be expected that the transmission of vibration energy to the neck portion of the first bond portion of the wire 14 is suppressed by the nodes of the bonding wire 14 having a bent shape. At this time, the resonance of the bonding wire 14 is considered to occur as strong vibration in the vertical direction.This exampleThen, since the bonding wire 14 is bent in the vertical direction (vertical direction), transmission of vibration in the vertical direction can be effectively suppressed.
[0035]
  By the way, Figure 3This exampleThe test result which compared the tensile strength with the shape of the loop part of the bonding wire 14 and the shape of the normal bonding wire 4 shown in the prior art (FIG. 14) is shown. from this result,This exampleIt can be understood that the bonding wire 14 has an excellent tensile strength as compared with the conventional wire.
[0036]
  FIG. 4 shows bonding wires 4 (a) having a normal shape shown in the conventional example (FIG. 14),This exampleBonding wire 14 (b) which is bent in the vertical direction, as will be described later.FirstThe result of investigating the relationship between the bonding frequency (horizontal axis) and the strength of resonance (vertical axis) in the bonding wire (c) bent in the lateral direction as in the example of FIG. From this result,This example and the firstIn the example, it can be understood that the resonance region can be surely avoided.
[0037]
  like thisIn addition,When wire bonding using ultrasonic waves is performed, the loop portion of the bonding wire 14 is formed into a bent shape, so that the occurrence of resonance of the bonding wire 14 during the second bonding can be effectively prevented. Due to the resonance of the wire 14, it is possible to effectively prevent problems such as damage to the neck portion of the first bond portion of the wire 14 and the like.
[0038]
  In addition, since the loop portion of the bonding wire 14 is merely bent, even if there are design restrictions on the bonding coordinate position and the loop height H, it can be realized without changing them, and bonding can be performed by looping program control. Since the bent shape of the loop portion of the wire 14 can be obtained, it is possible to reduce the cost with a simple configuration without increasing the number of work steps.
[0039]
  Also specialIn addition,Since the length of the bonding wire 14 is set to the middle between the resonance regions B1 and B2 that appear periodically according to the change of the wire length with respect to the bonding frequency, even if there is some product variation, etc. Thus, the occurrence of resonance can be reliably prevented. Furthermore, the bending shape of the loop portion of the bonding wire 14 is a concave shape in which the middle portion of the arc-shaped loop is recessed downward, and the bending depth dimension h of the concave portion is set to the height dimension H of the loop. Since it is 1/3 or more, the wire length can be greatly shifted from the resonance region with a simple configuration, and the effect of preventing the occurrence of resonance can be made extremely excellent.
[0040]
  (2)First~ThirdExamples of
  Next, the present inventionFirst~ThirdExamples will be described in the following order with reference to FIGS. In addition, theseFirst~ThirdIn the embodiment of theExample of basic configurationSimilarly, the semiconductor chip 12 is mounted on a package (case) 11 and connected by an aluminum bonding wire as a specific example. Therefore, the aboveBasic configurationThe same parts are denoted by the same reference numerals, detailed description thereof is omitted, and only different points are described below.
[0041]
  6 to 9 show the present invention.FirstImplementation ofExampleShow. This example isBasic configurationIs different from the electrodes 12a of the semiconductor chip 12 and the electrodes 11a of the package 11 in the shape of the loop portions of the bonding wires 21, which are shown in FIG. As shown in FIG. 2, the shape is bent in a substantially S shape (lateral bending). Therefore, the length of the bonding wire 21 is increased without changing the coordinate position of the second bonding on the electrode 11a and the loop height H.
[0042]
  In this embodiment, in order to make the loop portion of the bonding wire 21 into a bent shape, the bending tool 23 is used with the bonding tool (wedge 22) after the first bonding being moved to the second bonding position. The loop portion of the bonding wire 21 is bent.
[0043]
  In this case, as shown in FIGS. 7 and 8, the wire bonding apparatus includes a bonding tool (wedge 22) for ultrasonic bonding of the wire 21 and a bending jig 23. The bending jig 23 is provided with a rotating body 23a that can be rotated at an arbitrary angle around a rotating shaft that extends vertically, and is provided on the lower surface of the rotating body 23a so as to extend downward at a position sandwiching the rotating shaft. And a pin 23b which is a rod-shaped member.
[0044]
  In performing wire bonding, first, a first bond is performed by bonding the wire 21 to the electrode 12a of the conductor chip 12 by the wedge 22, and then the wedge 22 is formed on the electrode 11a (second bonding while forming a loop of the wire 21). The wedge 22 is stopped in that state.
[0045]
  Next, an operation of bending the loop portion by the bending jig 23 is performed. In this operation, first, as shown in FIG. 7, the wire 21 is inserted between the two pins 23 b of the bending jig 23. The loop portion is sandwiched from the front and the back in the drawing, and subsequently, as shown in FIG. 8, the rotating portion 23a is rotated by an arbitrary angle (in this case, slightly over 90 °), so that the loop portion is bent into an approximately S shape. It is. Thereafter, second bonding is performed in which the wire 21 is bonded to the electrode 11 a of the package 11 by the wedge 22.
[0046]
  Thus, by making the loop portion of the bonding wire 21 bend in the air in the lateral direction (substantially S-shaped when viewed from above), the wire length can be reduced without changing the bonding coordinate position or the loop height H. The bonding wire 21 can have a length that is out of the resonance region, and along with this, the bending energy of the vibration energy to the neck portion of the first bond portion of the wire 21 is caused by the node of the bonding wire 21 that is bent. The effect that transmission is suppressed can also be expected.
[0047]
  9 shows the test results comparing the tensile strength between the shape of the loop portion of the bonding wire 21 in this embodiment and the shape of the normal bonding wire 4 shown in the conventional example (FIG. 14). . From this result, it can be understood that the bonding wire 21 having the shape of the present embodiment has superior tensile strength compared to the conventional one. FIG. 4C shows the result of examining the relationship between the bonding frequency (horizontal axis) and the strength of resonance (vertical axis) in the bonding wire 21 having the above shape. It can be understood that the resonance region was surely avoided.
[0048]
  As described above, according to the present embodiment, when wire bonding using ultrasonic waves is performed, the loop portion of the bonding wire 21 is formed into a bent shape.Example of basic configurationSimilarly to the above, it is possible to effectively prevent the bonding wire 21 from resonating during the second bonding without changing the bonding coordinate position and the loop height H. As a result, the bonding wire 21 resonates. The occurrence of defects can be prevented.
[0049]
  In this embodiment, the bending shape of the loop portion of the bonding wire 21 can be reliably formed into a desired shape by using the bending jig 23 having a relatively simple configuration. The configuration for forming the loop portion in a bent shape can be made relatively simple and inexpensive.
[0050]
  FIG. 10 illustrates the present invention.SecondExample of the present invention is shown. In this embodiment, the shape of the loop portion of the bonding wire 31 that connects each electrode 12a of the semiconductor chip 12 and each electrode 11a of the package 11 is substantially larger in bending degree than the second embodiment. S-shaped (lightning bolt type).
[0051]
  FIG. 11 shows the present invention.ThirdExample of the present invention is shown. In this embodiment, the positions of the electrodes 11b of the package 11 are slightly shifted in the front-rear direction in the figure, and the bonding wires 32 that connect the electrodes 12a of the semiconductor chip 12 to the electrodes 11b, respectively. The shape of the loop portion is also a bent shape that is substantially S-shaped when viewed in the plane direction. In the third and fourth embodiments, the same operation and effect as in the second embodiment can be obtained.
[0052]
  The aboveFirstIn the embodiment, the wedge 22 (wire 21) is stopped above the electrode 11a (second bonding position), and the bending work is performed by the bending jig 23. The bending work may be performed in a state of being pressed onto the electrode 11a. Further, it is possible to bend the loop portion with the bending jig 23 after the second bonding is completed.The
[0053]
  (3)Reference example, Other examples
  12 and 13 show the present invention.Reference examplesShow. thisExampleThen, each electrode 12a of the semiconductor chip 12 and each electrode 11a of the package 11 are connected so as to draw an arc-like loop by the bonding wire 41, but second bonding is performed on the electrode 11a by the wedge 22. At this time, the middle part of the loop portion of the bonding wire 41 is clamped by the clamp jig 42.
[0054]
  At this time, as shown in FIG. 12, the clamp jig 42 has a pair of claws 42a, and is configured to be able to clamp the bonding wire 41 between them or to release the clamp. ing. In this case, as shown in FIG. 12 (a), the claw 42a of the clamp jig 42 is open during the looping operation by the wedge 22, and as shown in FIG. 12 (b) and FIG. The claw 42a of the jig 42 is closed, and the middle part of the loop portion of the bonding wire 41 is clamped. When the second bonding is completed, the claws 42a of the clamp jig 42 are opened as shown in FIG.
[0055]
  This makes it difficult for the bonding wire 41 to resonate during the second bonding, and even if the resonance occurs, transmission of vibration energy to the neck portion of the first bond portion of the wire 41 is hindered. As a result,This exampleAccording to the above, it is possible to effectively prevent the occurrence of problems due to the resonance of the bonding wire 41 and to simply clamp the middle portion of the loop portion of the bonding wire 41 with the clamp jig 42. It can be cheap.
[0056]
  The above exampleetcThen, the present invention is applied to a semiconductor pressure sensor. However, the present invention can be applied to all cases in which electrodes are connected by a bonding wire, such as when a semiconductor chip is mounted on a substrate. Various modifications can be considered for the bent shape of the loop portion of the bonding wire. For example, the bonding wire may have a meandering shape having four or more nodes. It is also possible to perform vertical bending using a bending jig with the rotation axis in the horizontal direction.is there.
[0057]
  In addition, the present invention is not limited to the embodiments described above and shown in the drawings. For example, the material of the bonding wire is not limited to aluminum, but may be gold. Number and position of electrodes, bending treatmentIngredientVarious modifications can be made to the structure, shape, etc., and specific numerical values such as bonding frequency are only shown as examples, and can be implemented with appropriate modifications within the scope not departing from the gist. It is.
[Brief description of the drawings]
FIG. 1 of the present inventionSpecific examples of basic configurationThe longitudinal section front view (a) and plan view (b) schematically showing the configuration of the bonding wire portion
FIG. 2 is a diagram showing the relationship between the length of a bonding wire and the resonance region
FIG. 3 is a diagram showing the test result of the tensile strength of the bonding wire in comparison with the conventional one.
FIG. 4 shows a conventional example (a),This example(B),FirstThe figure which shows the result of having investigated the relationship between the bonding frequency and the strength of resonance in the bonding wire of Example (c)
FIG. 5 is a diagram showing a test result in which the relationship between the bonding wire loop height (wire length) and tensile strength is examined.
FIG. 6 of the present inventionFirstFIG. 1 is a diagram equivalent to FIG.
FIG. 7 is a front view showing a state in which a loop portion of a bonding wire is sandwiched by a bending jig.
FIG. 8 is a front view showing a state in which a bending jig is rotated to bend a loop portion.
FIG. 9 is a view corresponding to FIG.
FIG. 10 shows the present invention.Second1 equivalent diagram showing the embodiment of
FIG. 11 shows the present invention.Third1 equivalent diagram showing the embodiment of
FIG. 12 shows the present invention.Reference exampleThe side view which shows the relationship between the clamp jig and bonding wire at the time of looping (a), second bonding (b), and bonding completion (c)
FIG. 13 is a longitudinal front view showing a state during second bonding.
FIG. 14 shows a conventional example, equivalent to FIG.
FIG. 15 is a diagram corresponding to FIG.
FIG. 16 is a view corresponding to FIG. 1 showing another conventional example.
FIG. 17 is a view corresponding to FIG. 1 showing still another conventional example.
[Explanation of symbols]
  In the drawing, 11 is a package, 11a and 11b are electrodes, 12 is a semiconductor chip, 12a is an electrode, 14, 21, 31, 32 and 41 are bonding wires, 22 is a wedge (bonding tool), 23 is a bending jig, Reference numeral 23a denotes a rotating body, 23b denotes a pin (rod-like member), and 42 denotes a clamp jig.

Claims (5)

２つの電極間を、ボンディングワイヤにより弧状のループを描くように接続するワイヤボンディング構造における、前記ボンディングワイヤのループ部分に２つ以上の屈曲点である節点を有する屈曲形状を形成するためのワイヤボンディング方法であって、
ファーストボンディング後のボンディングツールをセカンドボンディング位置に移動させた状態で、折曲げ治具により、ボンディングワイヤの長さが、ボンディング周波数に対してワイヤ長の変化に応じて周期的に出現する共振領域のｎ次と（ｎ＋１）次との中間に位置する長さとなるように、該ボンディングワイヤのループ部分が屈曲させられることを特徴とするワイヤボンディング方法。 Wire bonding for forming a bent shape having two or more bending points in a loop portion of the bonding wire in a wire bonding structure in which two electrodes are connected to form an arc-shaped loop with a bonding wire. A method,
In the state where the bonding tool after the first bonding is moved to the second bonding position, the bending jig causes the length of the bonding wire to appear periodically according to the change of the wire length with respect to the bonding frequency. A wire bonding method, wherein a loop portion of the bonding wire is bent so as to have a length located between the n-th order and the (n + 1) -th order. 前記セカンドボンディングが完了した後、前記折曲げ治具により前記ループ部分を屈曲させることを特徴とする請求項１に記載のワイヤボンディング方法。 The wire bonding method according to claim 1, wherein the loop portion is bent by the bending jig after the second bonding is completed . 前記折曲げ治具は、任意角度に回転可能な回転体と、この回転体にその回転軸を挟む位置に設けられた２本の棒状部材とを備えており、前記棒状部材間に前記ボンディングワイヤのループ部分を挟んだ状態で前記回転体を回転させることにより、前記ループ部分を屈曲させることを特徴とする請求項１又は２記載のワイヤボンディング方法。The bending jig includes a rotating body that can rotate at an arbitrary angle, and two rod-shaped members provided at positions where the rotating shaft is sandwiched between the rotating bodies, and the bonding wire is interposed between the rod-shaped members. The wire bonding method according to claim 1, wherein the loop portion is bent by rotating the rotating body with the loop portion interposed therebetween. 前記ボンディングワイヤのループ部分は、平面方向に見てほぼＳ字状に構成されることを特徴とする請求項１ないし３のいずれかに記載のワイヤボンディング方法。4. The wire bonding method according to claim 1, wherein the loop portion of the bonding wire is formed in an approximately S shape when viewed in a plane direction. 前記ボンディングワイヤのループ部分は、弧状のループの中間部分を下方に凹ませた凹形状に構成されることを特徴とする請求項１ないし３のいずれかに記載のワイヤボンディング方法。4. The wire bonding method according to claim 1, wherein the loop portion of the bonding wire is formed in a concave shape in which an intermediate portion of the arc-shaped loop is recessed downward.
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