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JP3866128B2 - Wiring board - Google Patents

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Publication number
JP3866128B2
JP3866128B2 JP2002079067A JP2002079067A JP3866128B2 JP 3866128 B2 JP3866128 B2 JP 3866128B2 JP 2002079067 A JP2002079067 A JP 2002079067A JP 2002079067 A JP2002079067 A JP 2002079067A JP 3866128 B2 JP3866128 B2 JP 3866128B2
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metal layer
frame
insulating base
wiring
region
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JP2003282767A (en
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高志 山崎
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Kyocera Corp
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Kyocera Corp
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Description

【0001】
【発明の属する技術分野】
本発明は、半導体素子や圧電振動子等の電子部品を搭載するための配線基板に関するものである。
【0002】
【従来の技術】
従来、半導体素子や圧電振動子等の電子部品を搭載するための配線基板は、一般に、略四角板状のセラミックス材料から成り、上面に電子部品を搭載収容する凹部を有する絶縁基体と、該絶縁基体の凹部内に一端が、側面に他端が導出されている複数個の配線導体と、前記絶縁基体の上面で、前記凹部を取り囲むように形成されている枠状の金属層と、前記絶縁基体の下面外周部に形成されている複数個の接続パッドと、前記絶縁基体の側面に形成され、前記配線導体と各接続パッドとを電気的に接続する複数個のキャスタレーション導体とにより構成されており、絶縁基体の凹部底面に電子部品を搭載するとともに、電子部品の信号用、接地用等の各電極を各配線導体のうち絶縁基体の凹部内に導出されている一端上にボンディングワイヤ等の導電性接続部材を介して電気的に接続し、しかる後、絶縁基体上面の枠状の金属層に電子部品を覆うようにして鉄−ニッケル−コバルト合金や鉄−ニッケル合金等から成る金属製の蓋体をロウ材等を介して接合し電子部品を封止することによって電子装置となる。
【0003】
かかる電子装置は、絶縁基体下面の外周部に形成した接続パッドを外部電気回路基板の回路配線に錫−鉛半田等の半田を介して接続することによって外部電気回路基板に実装され、同時に電子部品の各電極は配線導体の一端側から他端を経てキャスタレーション導体と接続されるとともに、キャスタレーション導体と接続パッドとを介して外部電気回路に電気的に接続されることとなる。
【0004】
なお、前記キャスタレーション導体のうち、少なくとも電子部品の接地用の電極が接続されるもの(通常、全接続パッド中約20〜50%)は、一部が絶縁基体上面に形成されている枠状の金属層まで導出されており、枠状の金属層を接地できるようになっている。
【0005】
また前記各キャスタレーション導体は絶縁基体の側面に垂直方向に形成されており、枠状の金属層と接続されるキャスタレーション導体は絶縁基体の側面で下面部から上面部にかけて形成されている。
【0006】
【発明が解決しようとする課題】
しかしながら、近時、各種電子装置は環境、人体に対する悪影響を防止するため従来使用されている錫−鉛半田に代わり、錫−銀−ビスマス系、錫−銀−銅−ビスマス系等の鉛を含有しない、いわゆる鉛フリー半田を用いて外部電気回路基板に接続されるようになってきており、かかる鉛フリー半田は、従来の錫−鉛半田に比べて溶融時に流れやすいため電子装置を外部電気回路基板に実装するとき、半田がキャスタレーション導体を伝って絶縁基体上面の枠状の金属層枠状の金属層に取着されている金属製蓋体にまで這い上がり、その結果、絶縁基体の接続パッドと、外部電気回路の回路配線との間に介在する半田の量が極めて少量となり、電子装置を外部回路基板に強固に実装することができないという欠点を有していた。また、配線基板の著しい小型化に伴い、枠状の金属層も、幅が狭く、かつ絶縁基体の外縁近くにまで形成されるようになっているため、枠状の金属層とキャスタレーション導体の第2領域との接続する部分で、第2領域が枠状の金属層を内側に抉るようになると、この接続部位で枠状の金属層の幅が狭くなり、枠状の金属層に金属製の蓋体をロウ材等を介して接合させた場合、枠状の金属層と金属製の蓋体との間に介在するロウ材の量が不足し、電子部品の気密封止の信頼性が低下するという問題もあった。
【0007】
本発明は、上記欠点に鑑み案出されたものであり、その目的は、接続パッドを外部電気回路基板の回路配線に鉛フリー半田を介して強固に接合し、それにより外部電気回路基板に強固にかつ高信頼性で実装することが可能で、かつ電子部品の気密封止の信頼性に優れた配線基板を提供することにある。
【0008】
【課題を解決するための手段】
本発明は、上面に電子部品を収容するための凹部を有する絶縁基体と、前記絶縁基体の上面に形成され、前記凹部を取り囲む枠状の金属層と、前記絶縁基体の凹部内に一端が、側面に他端が導出されている複数個の配線導体と、前記絶縁基体の下面外周部に形成されている複数個の接続パッドと、前記絶縁基体の側面に形成され、前記配線導体および枠状の金属層と接続パッドとを接続する複数個のキャスタレーション導体とから成る配線基板であって、前記枠状の金属層と接続パッドとを接続するキャスタレーション導体は接続パッドから導出する第1領域と、枠状の金属層から導出する第2領域とから成り、前記第1領域と第2領域は絶縁基体側面の幅方向に位置がずれているとともに前記絶縁基体内部に形成された内部配線層を介して接続されており、かつ前記絶縁基体は凹部内壁面で隣接する配線導体の一端間の領域に膨出部を有しており、該膨出部の上面に枠状の金属層が延出していることを特徴とするものである。
【0009】
本発明の配線基板によれば、絶縁基体上面に形成されている枠状の金属層と絶縁基体下面に形成されている接続パッドとを電気的に接続するキャスタレーション導体を、接続パッドから導出する第1領域と、金属層から導出する第2領域とにより構成するとともに、前記第1領域と第2領域を絶縁基体側面の幅方向に位置をずらせたことから接続パッドと外部電気回路の回路配線とを鉛フリー半田を用いて接合したとしても、鉛フリー半田がキャスタレーション導体を伝って枠状の金属層や金属製蓋体にまで這い上がることはなく、その結果、接続パッドと外部電気回路基板の回路配線との間に十分な量の半田を介在させることができ、配線基板(電子装置)を外部電気回路基板に極めて強固に接合することができる。
【0010】
また本発明の配線基板によれば、絶縁基体は凹部内壁面で隣接する配線導体の一端間の領域に膨出部を有しており、該膨出部の上面に枠状の金属層が延出していることから、配線基板の小型化にともない、枠状の金属層の幅が狭くなるとともに絶縁基体の外縁付近にまで形成されるようになるとともに、キャスタレーション導体の第2領域と接続する部分で、第2領域が枠状の金属層を内側に抉るようになったとしても、枠状の金属層の幅を確保することができ、枠状の金属層に金属製の蓋体をロウ材等を介して接合させた場合、枠状の金属層と金属製の蓋体との間に十分な量のロウ材を介在させることができ電子部品の気密封止の信頼性を確保することができる。
【0011】
また本発明の配線基板によれば、前記絶縁基体の膨出部は隣接する配線導体の一端間の領域に形成されていることから、膨出部を設けるために余分なスペースを凹部内に確保する必要はなく、配線基板の小型化を容易なものとすることができる。
【0012】
【発明の実施の形態】
次に、本発明を添付図面に基づき詳細に説明する。図1(a)乃至(c)は、本発明の配線基板を半導体素子を収容する半導体素子収納用パッケージに適用した場合の一実施例を示し、1は絶縁基体、2は配線導体、3は枠状の金属層(以下、「枠状金属層」という。)、4は接続パッド、5はキャスタレーション導体である。この絶縁基体1、配線導体2、枠状金属層3、接続パッド4及びキャスタレーション導体5により半導体素子6を搭載するための配線基板7が形成される。
【0013】
前記絶縁基体1は、酸化アルミニウム質焼結体、窒化アルミニウム質焼結体、ムライト質焼結体、ガラスセラミック焼結体等の電気絶縁材料から成り、その上面に半導体素子6を搭載収容する凹部1aを有し、該凹部1a底面に半導体素子6がガラス、樹脂、ロウ材等の接着材を介して接着固定される。
【0014】
前記絶縁基体1は、例えば、酸化アルミニウム質焼結体から成る場合には、酸化アルミニウム、酸化珪素、酸化カルシウム、酸化マグネシウム等の原料粉末に適当な有機バインダー、溶剤を添加混合して泥漿状のセラミックスラリーとなし、次に前記セラミックスラリーを従来周知のドクターブレード法やカレンダーロール法等のシート成形技術によりしシート状となして所定形状のセラミックグリーンシート(セラミック生シート)を得る、最後に前記セラミックグリーンシートを複数枚積層するとともに還元雰囲気中、約1600℃の温度で焼成することによって製作される。
【0015】
また前記絶縁基体1は、その上面の半導体素子6が搭載される凹部1a内に一端が、側面に他端が導出されるようにして複数個の配線導体2が形成されており、該配線導体2は半導体素子6の信号用、接地用の各電極を接続パッド4に接続するための導電路として作用し、凹部1a内に露出する一端上には半導体素子6の信号用、接地用等の電極がボンディングワイヤ8を介して電気的に接続される。
【0016】
前記配線導体2はタングステン、モリブデン、マンガン、銅、銀、金、パラジウム等の金属粉末から成り、タングステン等の金属粉末に適当な有機バインダーや溶剤を添加混合して得た金属ペーストを絶縁基体1となるセラミックグリーンシートに予め従来周知のスクリーン印刷法により所定パターンに印刷塗布しておくことによって絶縁基体1の凹部1a内に一端が、側面に他端が導出されるようにして被着形成される。
【0017】
前記絶縁基体1はまたその上面で、半導体素子6が搭載される凹部1aを取り囲むようにして枠状金属層3が被着されており、該枠状金属層3は後述する金属製蓋体9を絶縁基体1に取着させる際の下地金属層として作用し、タングステン、モリブデン、マンガン、銅、銀、金、パラジウム等の金属粉末により形成されている。
【0018】
前記枠状金属層3には金属製蓋体9がロウ材を介してロウ付け取着され、これによって絶縁基体1の凹部内に搭載収容されている半導体素子6は大気から気密に封止されることとなる。
【0019】
なお、前記枠状金属層3は前述の配線導体2と同様の方法によって絶縁基体1の上面で、凹部1aを取り囲むように形成される。
【0020】
更に前記絶縁基体1の下面外周部には複数個の接続パッド4が形成されており、該接続パッド4は外部電気回路基板の回路配線に鉛フリー半田を介して接続され、半導体素子6の信号用、接地用の各電極を外部電気回路に電気的に接続する作用をなす。
【0021】
前記接続パッド4は、タングステン、モリブデン、マンガン、銅、銀、金、パラジウム等の金属粉末より成り、前述の配線導体2と同様の方法によって絶縁基体1の下面外周部に所定形状に形成される。
【0022】
また更に前記絶縁基体1はその側面に複数個のキャスタレーション導体5(絶縁基体1の側面に断面半円状の溝部を設け、該溝部内に形成されている導体)が被着されており、該キャスタレーション導体5は配線導体2と接続パッド4とを電気的に接続する作用をなす。
【0023】
前記キャスタレーション導体5はタングステン、モリブデン、マンガン、銅、銀、金、パラジウム等の金属粉末より成り、絶縁基体1となるセラミックグリーンシートの側面に打ち抜き加工法により半円形の凹部を形成するとともに該凹部内にタングステン等の金属粉末に適当な有機バインダーや溶剤を添加混合して得た金属ペーストを予め従来周知のスクリーン印刷法により所定パターンに印刷塗布しておくことによって絶縁基体1の側面に所定形状に形成される。
【0024】
前記キャスタレーション導体5はまた半導体素子6の接地用の電極と導通する配線導体2に接続されるものについては一部が絶縁基体1上面の枠状金属層3にまで導出されており、枠状金属層3を接地するようになっている。
【0025】
なお、前記配線導体2、枠状金属層3、接続パッド4及びキャスタレーション導体5は、その露出する表面に、ニッケル、金等の耐蝕性やボンディングワイヤ8のボンディング性、半田の濡れ性等が良好な金属から成るめっき層を被着させておくと配線導体2や枠状金属層3等の酸化腐食を有効に防止することができるとともに枠状金属層3への金属製蓋体9の取着、接続パッド4の外部電気回路基板への接続が確実、強固となる。従って、前記配線導体2、枠状金属層3、接続パッド4及びキャスタレーション導体5は、その露出する表面に、ニッケル、金等の耐蝕性やボンディング性、半田の濡れ性等が良好な金属をめっき法により被着させておくことが好ましく、特に、例えば、厚さ1〜10μmのニッケルめっき層、0.05〜3μmの厚さの金めっき層を順次被着させておくことが好ましい。
【0026】
この場合、金めっき層の厚みは、被着する部位や金めっき層の結晶配向等に応じて異なる厚みとしてもよく、例えば、金めっき層のX線回折における結晶配向を極力(111)面に揃えるようにするとともに、ボンディングワイヤ8が接続される領域も含め、全域で約0.3〜1μmとするようにしてもよく、半田付け用の領域のみ約0.3μm以下の薄いものとし、錫−金の脆い金属間化合物の生成を抑えて半田付けの信頼性を高めるようにしてもよい。
【0027】
かくして本発明の配線基板7によれば、絶縁基体1上面の凹部1aに半導体素子6を搭載収容するとともに半導体素子6の信号用、接地用の各電極を配線導体2の凹部1a内に導出する一端上にボンディングワイヤ8を介して接続し、しかる後、絶縁基体1上面の枠状金属層3に鉄−ニッケル−コバルト合金や鉄−ニッケル合金等からなる金属製蓋体9をロウ材等を介して接合させ、金属製蓋体9で半導体素子6を気密に封止することによって製品としての電子装置(半導体装置)が完成する。
【0028】
なお、この半導体装置は絶縁基体1下面外周部の接続パッド4を外部電気回路基板の回路配線に鉛フリー半田を介して接合することによって外部電気回路基板上に実装され、同時に半導体素子6の信号用、接地用の各電極が外部電気回路基板の回路配線に電気的に接続される。
【0029】
本発明の配線基板7においてはキャスタレーション導体5のうち枠状金属層3と接続パッド4とを接続しているキャスタレーション導体5aを図2に示すように接続パッド4から導出する第1領域5bと、枠状金属層3から導出する第2領域5cとに分け、第1領域5bと第2領域5cとを絶縁基体1側面の幅方向に位置をずらせておくとともに絶縁基体1内部で内部配線層10を介して電気的に接続しておくことが重要である。
【0030】
前記枠状金属層3と接続パッド4とを接続しているキャスタレーション導体5aを接続パッド4から導出する第1領域5bと、枠状金属層3から導出する第2領域5cとに分け、各々を絶縁基体1側面の幅方向に位置をずらせておくと接続パッド4と外部電気回路の回路配線とを鉛フリー半田を用いて接合したとしても、鉛フリー半田がキャスタレーション導体を伝って枠状金属層3や金属製蓋体9にまで這い上がることはなく、その結果、接続パッド4と外部電気回路基板の回路配線との間に十分な量の半田を介在させることができ、配線基板(電子装置)を外部電気回路基板に極めて強固に接合することができる。
【0031】
前記枠状金属層3と接続パッド4とを接続しているキャスタレーション導体5aの第1領域5bと第2領域5cとの分割位置は、使用する半田の種類や、絶縁基体1の厚さ、配線導体2の設計上の都合等に応じて適宜決めるようにすればよく、例えば、キャスタレーション導体5aが直径0.3mm〜0.7mmの半円状で、半田として錫−銀系半田を用いる場合であれば、第1領域5bの長さを0.3mm〜1mmの範囲とすればよい。
【0032】
また本発明の配線基板7においては、図2および図3に示すように、絶縁基体1の凹部1a内壁面で隣接する配線導体2の一端間の領域に膨出部11を設けるとともに、該膨出部11の上面に枠状金属層3を延出させておくことが重要である。
【0033】
このように膨出部11を設けるとともにその上面に枠状金属層3を延出させておくと、配線基板7の小型化にともない、枠状金属層3の幅が狭くなるとともに絶縁基体1の外縁付近にまで形成されるようになるとともに、キャスタレーション導体5aの第2領域5cと接続する部分で、第2領域5cが枠状金属層3を内側に抉るようになったとしても、枠状金属層3の幅を確保することができ、枠状金属層3に金属製の蓋体9をロウ材等を介して接合させた場合、枠状金属層3と金属製の蓋体9との間に十分な量のロウ材を介在させることができ半導体素子6の気密封止の信頼性を確保することができる。
【0034】
前記膨出部11は、絶縁基体1の凹部1a内壁面で配線導体2の一端が導出されている部位と重なるようにして形成すると、配線導体2の一端にボンディングワイヤ8を接続させるため、この膨出部11の分だけ配線導体2を凹部1a内に延ばして形成する必要が生じ、配線基板7の小型化が妨げられてしまう。したがって、前記膨出部11は、その設ける位置を、絶縁基体1の凹部1a内壁面で隣接する配線導体2の一端間の領域とする必要がある。
【0035】
また、膨出部11は、キャスタレーション導体5aの第2領域5cが枠状金属層3と接続する部位(枠状金属層3の幅が狭くなる部位)に形成する必要があり、このためには、隣接する配線導体2の一端間の領域に対向する絶縁基体1の側面部位にキャスタレーション導体5aの第2領域5cを位置させる必要がある。
【0036】
このような膨出部11は、枠状金属層3が上面に被着形成されるセラミックグリーンシートを、一部に膨出部11となるような部分が形成されるようにして打ち抜き加工することにより形成することができる。
【0037】
なお、前記膨出部11は、キャスタレーション導体5aの第2領域5cにより抉られた枠状金属層3の形状とほぼ同一形状となるようにして形成しておくと、枠状金属層3の幅を全周でほぼ均一とすることができ、気密封止の信頼性をより一層確実に確保することができる。したがって、前記突出部3aは、キャスタレーション導体5aの第2領域5cにより削り取られた枠状金属層3の形状とほぼ同一形状となるようにして形成しておくことが好ましい。
【0038】
この場合、膨出部11の膨出する最大寸法が0.5mmを超えるようになると、凹部1a内に対する膨出距離が大きくなり、配線基板7の小型化が難しくなるおそれがある。従って、前記膨出部11は、膨出する最大寸法を0.5mm以下とすることが好ましい。
【0039】
また、前記キャスタレーション導体5aの接続パッド4から導出する第1領域5bは、図4に示すように、その内側に突出する突起部12を形成しておけば接続パッド4を外部電気回路基板の回路配線に半田を介して接合するとき、前記突出部12が半田の中に食い込むようにして接合されて接合強度がより一層強固となる。従って、前記キャスタレーション導体5aの接続パッド4から導出する第1領域5bは、図4に示すように、その内側に突出する突起部12を形成しておくことが好ましい。
【0040】
なお、本発明は上述の実施例に限定されるものではなく、本発明の要旨を逸脱しない範囲であれば種々の変更は可能であり、例えば、上述の実施例では本発明の配線基板を半導体素子を収容する半導体素子収納用パッケージに適用したが、混成集積回路基板等の他の用途に適用してもよい。
【0041】
また、上述の実施例の添付図面では、膨出部を配線導体の近くに設けた例を示したが、配線導体やキャスタレーション導体の配置に応じて、膨出部を隣接する配線導体の中央部に設けてもよく、またひとつの隣接間内に2個以上の膨出部を設けてもよい。
【0042】
【発明の効果】
本発明の配線基板によれば、絶縁基体上面に形成されている枠状金属層と絶縁基体下面に形成されている接続パッドとを電気的に接続するキャスタレーション導体を、接続パッドから導出する第1領域と、金属層から導出する第2領域とにより構成するとともに、前記第1領域と第2領域を絶縁基体側面の幅方向に位置をずらせたことから接続パッドと外部電気回路の回路配線とを鉛フリー半田を用いて接合したとしても、鉛フリー半田がキャスタレーション導体を伝って枠状金属層や金属製蓋体にまで這い上がることはなく、その結果、接続パッドと外部電気回路基板の回路配線との間に十分な量の半田を介在させることができ、配線基板(電子装置)を外部電気回路基板に極めて強固に接合することができる。
【0043】
また本発明の配線基板によれば、絶縁基体は凹部内壁面で隣接する配線導体の一端間の領域に膨出部を有しており、該膨出部の上面に枠状金属層が延出していることから、配線基板の小型化にともない、枠状金属層の幅が狭くなるとともに絶縁基体の外縁付近にまで形成されるようになるとともに、キャスタレーション導体の第2領域と接続する部分で、第2領域が枠状金属層を内側に抉るようになったとしても、枠状金属層の幅を確保することができ、枠状金属層に金属製の蓋体をロウ材等を介して接合させた場合、枠状金属層と金属製の蓋体との間に十分な量のロウ材を介在させることができ電子部品の気密封止の信頼性を確保することができる。
【0044】
また本発明の配線基板によれば、前記絶縁基体の膨出部は隣接する配線導体の一端間の領域に形成されていることから、膨出部を設けるために余分なスペースを凹部内に確保する必要はなく、配線基板の小型化を容易なものとすることができる。
【図面の簡単な説明】
【図1】(a)(b)(c)は本発明の配線基板の一実施例を示す側面図、平面図、底面図である。
【図2】本発明の配線基板の要部拡大斜視図である。
【図3】本発明の配線基板の要部拡大平面図である。
【図4】本発明の配線基板の他の実施例の要部拡大図である。
【符号の説明】
1・・・・・絶縁基体
1a・・・・凹部
2・・・・・配線導体
3・・・・・枠状の金属層
4・・・・・接続パッド
5・・・・・キャスタレーション導体
5a・・・・接続パッドと枠状金属層とを接続しているキャスタレーション導体5b・・・・第1領域
5c・・・・第2領域
6・・・・・半導体素子
7・・・・・配線基板
8・・・・・ボンディングワイヤ
9・・・・・蓋体
10・・・・内部配線層
11・・・・膨出部
12・・・・突起部
[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a wiring board for mounting electronic components such as semiconductor elements and piezoelectric vibrators.
[0002]
[Prior art]
2. Description of the Related Art Conventionally, a wiring board for mounting electronic components such as semiconductor elements and piezoelectric vibrators is generally made of a substantially square plate-like ceramic material, and has an insulating base having a recess for mounting and housing the electronic components on the upper surface, and the insulating substrate. A plurality of wiring conductors, one end of which is led out in the recess of the base body and the other end of the side face thereof, a frame-like metal layer formed on the upper surface of the insulating base so as to surround the recess, and the insulation A plurality of connection pads formed on the outer peripheral portion of the lower surface of the base, and a plurality of castellation conductors formed on the side surface of the insulating base and electrically connecting the wiring conductor and each connection pad. In addition to mounting an electronic component on the bottom surface of the recess of the insulating base, each electrode for signal and grounding of the electronic component is bonded to one end of each wiring conductor that is led into the recess of the insulating base. Connected through a conductive connecting member electrically, thereafter, the iron so as to cover the electronic component to the frame-like metal layer of the insulating substrate top surface - nickel - cobalt alloy or an iron - metal made of nickel alloy An electronic device is obtained by sealing the electronic component by bonding the lid body of the metal plate through a brazing material or the like.
[0003]
Such an electronic device is mounted on an external electric circuit board by connecting connection pads formed on the outer peripheral portion of the lower surface of the insulating base to circuit wiring of the external electric circuit board via solder such as tin-lead solder, and at the same time, an electronic component These electrodes are connected to the castellation conductor from one end side of the wiring conductor to the other end, and are also electrically connected to an external electric circuit via the castellation conductor and the connection pad.
[0004]
Among the castellation conductors, at least a grounding electrode of an electronic component is connected (usually about 20 to 50% of all connection pads), a part of which is formed on the upper surface of the insulating base. The metal layer is led out so that the frame-shaped metal layer can be grounded.
[0005]
Each castellation conductor is formed in a direction perpendicular to the side surface of the insulating base, and the castellation conductor connected to the frame-like metal layer is formed from the bottom surface to the top surface on the side surface of the insulating base.
[0006]
[Problems to be solved by the invention]
However, recently, various electronic devices contain lead such as tin-silver-bismuth, tin-silver-copper-bismuth, etc. in place of tin-lead solder which is conventionally used to prevent adverse effects on the environment and human body. The so-called lead-free solder is used to connect to an external electric circuit board, and such a lead-free solder is easier to flow at the time of melting than a conventional tin-lead solder. When mounting on the substrate, the solder crawls up to the frame-like metal layer on the upper surface of the insulating base or the metal lid attached to the frame-like metal layer through the castellation conductor, and as a result, the insulating base The amount of solder interposed between the connection pad and the circuit wiring of the external electric circuit is extremely small, and the electronic device cannot be firmly mounted on the external circuit board. In addition, with the remarkable miniaturization of the wiring board, the frame-shaped metal layer is also formed with a narrow width and close to the outer edge of the insulating base. When the second region turns the frame-shaped metal layer inward at the portion connected to the second region, the width of the frame-shaped metal layer becomes narrow at this connection site, and the frame-shaped metal layer is made of metal. When the lid body is joined via a brazing material or the like, the amount of brazing material interposed between the frame-shaped metal layer and the metallic lid body is insufficient, and the reliability of hermetic sealing of electronic components is reduced. There was also the problem of a drop.
[0007]
The present invention has been devised in view of the above-described drawbacks, and its purpose is to firmly connect the connection pads to the circuit wiring of the external electric circuit board via lead-free solder, and thereby to the external electric circuit board. Another object of the present invention is to provide a wiring board that can be mounted with high reliability and is excellent in airtight sealing of electronic components.
[0008]
[Means for Solving the Problems]
The present invention provides an insulating base having a recess for accommodating an electronic component on the top surface, a frame-shaped metal layer formed on the top surface of the insulating base and surrounding the recess, and one end in the recess of the insulating base, A plurality of wiring conductors whose other ends are led out to the side surface, a plurality of connection pads formed on the outer peripheral portion of the lower surface of the insulating base, and the wiring conductor and the frame shape formed on the side of the insulating base A wiring board comprising a plurality of castellation conductors for connecting the metal layer and the connection pad, wherein the castellation conductor for connecting the frame-shaped metal layer and the connection pad is a first region derived from the connection pad. And a second region derived from the frame-shaped metal layer, and the first region and the second region are displaced in the width direction of the side surface of the insulating base and are formed in the insulating base. Through It is continued, and the insulating substrate has a bulging portion in the area between one end of the wiring conductor adjacent recess wall extends frame-like metal layer on the upper surface of the bulging portion It is characterized by this.
[0009]
According to the wiring board of the present invention, the castellation conductor that electrically connects the frame-shaped metal layer formed on the upper surface of the insulating base and the connection pad formed on the lower surface of the insulating base is led out from the connection pad. Since the first region and the second region derived from the metal layer are formed, and the first region and the second region are shifted in the width direction of the side surface of the insulating base, the connection pad and the circuit wiring of the external electric circuit Even if the lead-free solder is joined using lead-free solder, the lead-free solder does not crawl up to the frame-like metal layer or the metal lid through the castellation conductor. A sufficient amount of solder can be interposed between the circuit wiring of the substrate and the wiring substrate (electronic device) can be bonded to the external electric circuit substrate very firmly.
[0010]
According to the wiring board of the present invention, the insulating base has a bulging portion in the region between the ends of the adjacent wiring conductors on the inner wall surface of the recess, and the frame-shaped metal layer extends on the upper surface of the bulging portion. As the wiring board is downsized, the width of the frame-like metal layer becomes narrower and is formed to the vicinity of the outer edge of the insulating base and is connected to the second region of the castellation conductor. in part, even if the second region is now gouging the frame-like metal layer on the inside, it is possible to ensure the width of the frame-like metal layer, brazing a metal lid to a frame-like metal layer When bonded via a material, etc., a sufficient amount of brazing material can be interposed between the frame-shaped metal layer and the metal lid to ensure the reliability of hermetic sealing of electronic components Can do.
[0011]
Further, according to the wiring board of the present invention, since the bulging portion of the insulating base is formed in a region between one ends of the adjacent wiring conductors, an extra space is secured in the recess to provide the bulging portion. There is no need to do this, and the wiring board can be easily downsized.
[0012]
DETAILED DESCRIPTION OF THE INVENTION
Next, the present invention will be described in detail with reference to the accompanying drawings. FIGS. 1A to 1C show an embodiment in which the wiring board of the present invention is applied to a semiconductor element housing package for housing semiconductor elements, where 1 is an insulating substrate, 2 is a wiring conductor, Frame-shaped metal layer (hereinafter referred to as “frame-shaped metal layer”) 4 is a connection pad, and 5 is a castellation conductor. The insulating substrate 1, the wiring conductor 2, the frame-shaped metal layer 3, the connection pad 4, and the castellation conductor 5 form a wiring substrate 7 for mounting the semiconductor element 6.
[0013]
The insulating substrate 1 is made of an electrically insulating material such as an aluminum oxide sintered body, an aluminum nitride sintered body, a mullite sintered body, a glass ceramic sintered body, and the like, and a recess for mounting and housing the semiconductor element 6 on the upper surface thereof. 1a, and the semiconductor element 6 is bonded and fixed to the bottom surface of the recess 1a through an adhesive such as glass, resin, or brazing material.
[0014]
When the insulating substrate 1 is made of, for example, an aluminum oxide sintered body, a suitable organic binder and solvent are added to and mixed with raw material powders such as aluminum oxide, silicon oxide, calcium oxide, and magnesium oxide to form a mud-like shape. Next, the ceramic slurry is formed into a sheet shape by a sheet forming technique such as a conventionally known doctor blade method or calendar roll method to obtain a ceramic green sheet (ceramic raw sheet) having a predetermined shape. A plurality of ceramic green sheets are laminated and fired at a temperature of about 1600 ° C. in a reducing atmosphere.
[0015]
The insulating base 1 has a plurality of wiring conductors 2 formed such that one end thereof is led out into the recess 1a in which the semiconductor element 6 on the upper surface is mounted, and the other end thereof is led out to the side surface. 2 acts as a conductive path for connecting each electrode for signal and ground of the semiconductor element 6 to the connection pad 4, and for one end exposed in the recess 1 a, the signal for the semiconductor element 6, for grounding, etc. The electrodes are electrically connected via bonding wires 8.
[0016]
The wiring conductor 2 is made of a metal powder such as tungsten, molybdenum, manganese, copper, silver, gold, palladium, etc., and a metal paste obtained by adding and mixing an appropriate organic binder or solvent to the metal powder such as tungsten is used as the insulating substrate 1. The ceramic green sheet is preliminarily printed in a predetermined pattern by a well-known screen printing method so that one end is formed in the recess 1a of the insulating substrate 1 and the other end is led out to the side surface. The
[0017]
The insulating substrate 1 also in its upper surface, a frame-like metal layer 3 so as to surround the recess 1a of the semiconductor element 6 is mounted are deposited, metallic lid 9 the frame-like metal layer 3 to be described later Acts as a base metal layer for attaching to the insulating substrate 1, and is made of metal powder such as tungsten, molybdenum, manganese, copper, silver, gold, palladium.
[0018]
A metal lid 9 is brazed and attached to the frame-like metal layer 3 via a brazing material, whereby the semiconductor element 6 mounted and accommodated in the recess of the insulating base 1 is hermetically sealed from the atmosphere. The Rukoto.
[0019]
The frame-shaped metal layer 3 is formed on the upper surface of the insulating base 1 so as to surround the recess 1a by the same method as that for the wiring conductor 2 described above.
[0020]
Further, a plurality of connection pads 4 are formed on the outer peripheral portion of the lower surface of the insulating base 1, and the connection pads 4 are connected to the circuit wiring of the external electric circuit board via lead-free solder. Each electrode for grounding and grounding is electrically connected to an external electric circuit.
[0021]
The connection pad 4 is made of a metal powder such as tungsten, molybdenum, manganese, copper, silver, gold, or palladium, and is formed in a predetermined shape on the outer periphery of the lower surface of the insulating substrate 1 by the same method as that for the wiring conductor 2 described above. .
[0022]
Further, the insulating base 1 is coated with a plurality of castoration conductors 5 (a conductor formed in the side of the insulating base 1 having a semicircular cross-sectional groove formed on the side), The castellation conductor 5 serves to electrically connect the wiring conductor 2 and the connection pad 4.
[0023]
The castellation conductor 5 is made of a metal powder such as tungsten, molybdenum, manganese, copper, silver, gold, palladium, etc., and a semicircular recess is formed on the side surface of the ceramic green sheet serving as the insulating substrate 1 by a punching method. A metal paste obtained by adding and mixing a suitable organic binder or solvent to a metal powder such as tungsten in the recess is preliminarily printed in a predetermined pattern by a well-known screen printing method, and then predetermined on the side surface of the insulating substrate 1. It is formed into a shape.
[0024]
A part of the castellation conductor 5 connected to the wiring conductor 2 that is electrically connected to the grounding electrode of the semiconductor element 6 is led out to the frame-like metal layer 3 on the upper surface of the insulating base 1. The metal layer 3 is grounded.
[0025]
The wiring conductor 2, the frame-like metal layer 3 , the connection pad 4 and the castoration conductor 5 have corrosion resistance such as nickel and gold, bonding property of the bonding wire 8, solder wettability, etc. on the exposed surface. If a plating layer made of a good metal is applied, the oxidative corrosion of the wiring conductor 2 and the frame-shaped metal layer 3 can be effectively prevented, and the metal lid 9 is attached to the frame-shaped metal layer 3. The connection of the contact and connection pads 4 to the external electric circuit board is ensured and strong. Therefore, the wiring conductor 2, the frame-shaped metal layer 3, the connection pad 4, and the castoration conductor 5 are made of a metal having good corrosion resistance such as nickel and gold, bonding properties, solder wettability, etc. on the exposed surface. It is preferable to deposit by a plating method. In particular, it is preferable to sequentially deposit, for example, a nickel plating layer having a thickness of 1 to 10 μm and a gold plating layer having a thickness of 0.05 to 3 μm.
[0026]
In this case, the thickness of the gold plating layer may be different depending on the part to be deposited, the crystal orientation of the gold plating layer, etc. For example, the crystal orientation in the X-ray diffraction of the gold plating layer is as much as possible to the (111) plane. In addition, the entire region including the region to which the bonding wire 8 is connected may be about 0.3 to 1 μm, and only the region for soldering should be as thin as about 0.3 μm or less. -Generation | occurrence | production of the gold | metal brittle intermetallic compound may be suppressed, and you may make it improve the reliability of soldering.
[0027]
Thus, according to the wiring board 7 of the present invention, the semiconductor element 6 is mounted and accommodated in the recess 1a on the upper surface of the insulating base 1, and the signal and ground electrodes of the semiconductor element 6 are led out into the recess 1a of the wiring conductor 2. After being connected to one end via a bonding wire 8, a metal lid 9 made of iron-nickel-cobalt alloy, iron-nickel alloy or the like is attached to the frame-like metal layer 3 on the upper surface of the insulating substrate 1 with a brazing material or the like. The electronic device (semiconductor device) as a product is completed by sealing the semiconductor element 6 with the metal lid 9 in an airtight manner.
[0028]
This semiconductor device is mounted on the external electric circuit board by bonding the connection pads 4 on the outer periphery of the lower surface of the insulating base 1 to the circuit wiring of the external electric circuit board via lead-free solder, and at the same time, the signal of the semiconductor element 6 The grounding and grounding electrodes are electrically connected to the circuit wiring of the external electric circuit board.
[0029]
In the wiring board 7 of the present invention, the caster conductor 5a connecting the frame-like metal layer 3 and the connection pad 4 out of the caster conductor 5 is led out from the connection pad 4 as shown in FIG. And the second region 5c led out from the frame-like metal layer 3 , and the first region 5b and the second region 5c are shifted in the width direction of the side surface of the insulating substrate 1 and the internal wiring is formed inside the insulating substrate 1. It is important to be electrically connected through the layer 10.
[0030]
The castellation conductor 5a connecting the frame-shaped metal layer 3 and the connection pad 4 is divided into a first region 5b derived from the connection pad 4 and a second region 5c derived from the frame-shaped metal layer 3, If the position is shifted in the width direction of the side surface of the insulating base 1, even if the connection pad 4 and the circuit wiring of the external electric circuit are joined using lead-free solder, the lead-free solder is transmitted through the castellation conductor to form a frame shape. As a result, a sufficient amount of solder can be interposed between the connection pad 4 and the circuit wiring of the external electric circuit board. Electronic device) can be bonded to the external electric circuit board very firmly.
[0031]
The dividing position of the first region 5b and the second region 5c of the castellation conductor 5a connecting the frame-shaped metal layer 3 and the connection pad 4 is the type of solder used, the thickness of the insulating substrate 1, What is necessary is just to determine suitably according to the design convenience etc. of the wiring conductor 2, for example, the castellation conductor 5a is semicircle shape with a diameter of 0.3 mm-0.7 mm, and uses a tin-silver type solder as a solder. In some cases, the length of the first region 5b may be in the range of 0.3 mm to 1 mm.
[0032]
Further, in the wiring board 7 of the present invention, as shown in FIGS. 2 and 3, the bulging portion 11 is provided in the region between the ends of the adjacent wiring conductors 2 on the inner wall surface of the recess 1a of the insulating base 1, and It is important to extend the frame-like metal layer 3 on the upper surface of the protruding portion 11.
[0033]
If the bulging portion 11 is provided and the frame-shaped metal layer 3 is extended on the upper surface in this way, the width of the frame-shaped metal layer 3 becomes narrower and the insulating substrate 1 of the insulating substrate 1 is reduced as the wiring board 7 is downsized. Even if the second region 5c comes to wrap the frame-shaped metal layer 3 inwardly at the portion connected to the second region 5c of the castellation conductor 5a, the frame-like metal layer 3 is formed in the vicinity of the outer edge. The width of the metal layer 3 can be secured, and when the metal lid body 9 is joined to the frame-shaped metal layer 3 via a brazing material or the like, the frame-shaped metal layer 3 and the metal lid body 9 A sufficient amount of brazing material can be interposed between them, and the reliability of hermetic sealing of the semiconductor element 6 can be ensured.
[0034]
When the bulging portion 11 is formed so as to overlap with a portion where one end of the wiring conductor 2 is led out on the inner wall surface of the recess 1 a of the insulating base 1, the bonding wire 8 is connected to one end of the wiring conductor 2. It is necessary to form the wiring conductor 2 by extending it into the recess 1a as much as the bulging portion 11, and the wiring board 7 is prevented from being miniaturized. Therefore, the bulging portion 11 needs to be provided in a region between one end of the adjacent wiring conductor 2 on the inner wall surface of the recess 1 a of the insulating base 1.
[0035]
Further, the bulging portion 11 needs to be formed in a portion where the second region 5c of the castellation conductor 5a is connected to the frame-shaped metal layer 3 (a portion where the width of the frame-shaped metal layer 3 is narrow). Needs to position the second region 5c of the castellation conductor 5a on the side surface portion of the insulating base 1 facing the region between the ends of the adjacent wiring conductors 2.
[0036]
Such a bulging portion 11 is formed by punching a ceramic green sheet on which the frame-shaped metal layer 3 is deposited on the upper surface so that a portion that becomes the bulging portion 11 is formed in part. Can be formed.
[0037]
Incidentally, the bulging portion 11, the previously formed so as to substantially the same shape as the second region 5c by scooped frame-like metal layer 3 in the form of castellations conductors 5a, the frame-like metal layer 3 The width can be made substantially uniform over the entire circumference, and the reliability of hermetic sealing can be more reliably ensured. Therefore, it is preferable that the protruding portion 3a is formed so as to have substantially the same shape as the shape of the frame-shaped metal layer 3 scraped by the second region 5c of the castellation conductor 5a.
[0038]
In this case, when the maximum bulging dimension of the bulging portion 11 exceeds 0.5 mm, the bulging distance with respect to the inside of the concave portion 1a becomes large, and there is a possibility that it is difficult to reduce the size of the wiring board 7. Therefore, it is preferable that the bulging portion 11 has a maximum bulging dimension of 0.5 mm or less.
[0039]
Further, as shown in FIG. 4, the first region 5b led out from the connection pad 4 of the castellation conductor 5a has a projection 12 projecting inward so that the connection pad 4 can be connected to the external electric circuit board. When joining to circuit wiring via solder, the protrusion 12 is joined so as to bite into the solder, thereby further strengthening the joining strength. Therefore, the first region 5b led out from the connection pad 4 of the castellation conductor 5a is preferably formed with a protruding portion 12 protruding inward as shown in FIG.
[0040]
The present invention is not limited to the above-described embodiments, and various modifications can be made without departing from the scope of the present invention. For example, in the above-described embodiments, the wiring board of the present invention is a semiconductor. Although the present invention is applied to a package for housing a semiconductor element that houses elements, it may be applied to other uses such as a hybrid integrated circuit board.
[0041]
In addition, in the accompanying drawings of the above-described embodiments, an example in which the bulging portion is provided near the wiring conductor is shown. However, depending on the arrangement of the wiring conductor and the castellation conductor, the bulging portion is located at the center of the adjacent wiring conductor. You may provide in a part, and you may provide two or more bulging parts in between one adjacent.
[0042]
【The invention's effect】
According to the wiring board of the present invention, the castellation conductor that electrically connects the frame-shaped metal layer formed on the upper surface of the insulating base and the connection pad formed on the lower surface of the insulating base is led out from the connection pad. 1 region and a second region derived from the metal layer, and the first region and the second region are shifted in the width direction of the side surface of the insulating base. Even if they are joined using lead-free solder, lead-free solder does not crawl up to the frame-like metal layer or metal lid through the castellation conductor. A sufficient amount of solder can be interposed between the circuit wiring and the wiring board (electronic device) can be bonded to the external electric circuit board very firmly.
[0043]
According to the wiring board of the present invention, the insulating base has a bulging portion in the region between the ends of the adjacent wiring conductors on the inner wall surface of the recess, and the frame-like metal layer extends on the upper surface of the bulging portion. Therefore, as the wiring board is reduced in size, the width of the frame-like metal layer becomes narrower and is formed even near the outer edge of the insulating base, and at the portion connected to the second region of the castellation conductor Even if the second region turns the frame-shaped metal layer inside, the width of the frame-shaped metal layer can be secured, and a metal lid is attached to the frame-shaped metal layer via a brazing material or the like. When bonded, a sufficient amount of brazing material can be interposed between the frame-shaped metal layer and the metal lid, and the reliability of hermetic sealing of the electronic component can be ensured.
[0044]
Further, according to the wiring board of the present invention, since the bulging portion of the insulating base is formed in a region between one ends of the adjacent wiring conductors, an extra space is secured in the recess to provide the bulging portion. There is no need to do this, and the wiring board can be easily downsized.
[Brief description of the drawings]
1A, 1B and 1C are a side view, a plan view and a bottom view showing an embodiment of a wiring board according to the present invention.
FIG. 2 is an enlarged perspective view of a main part of a wiring board according to the present invention.
FIG. 3 is an enlarged plan view of a main part of a wiring board according to the present invention.
FIG. 4 is an enlarged view of a main part of another embodiment of the wiring board of the present invention.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 ... Insulation base | substrate 1a ... Recess 2 ... Wiring conductor 3 ... Frame-shaped metal layer 4 ... Connection pad 5 ... Castoration conductor 5a... Castoration conductor 5b connecting the connection pad and the frame-like metal layer... First region 5c... Second region 6.・ Wiring board 8... Bonding wire 9... Lid 10... Internal wiring layer 11.

Claims (1)

上面に電子部品を収容するための凹部を有する絶縁基体と、前記絶縁基体の上面に形成され、前記凹部を取り囲む枠状の金属層と、前記絶縁基体の凹部内に一端が、側面に他端が導出されている複数個の配線導体と、前記絶縁基体の下面外周部に形成されている複数個の接続パッドと、前記絶縁基体の側面に形成され、前記配線導体および枠状の金属層と接続パッドとを接続する複数個のキャスタレーション導体とから成る配線基板であって、前記枠状の金属層と接続パッドとを接続するキャスタレーション導体は接続パッドから導出する第1領域と、枠状の金属層から導出する第2領域とから成り、前記第1領域と第2領域は絶縁基体側面の幅方向に位置がずれているとともに前記絶縁基体内部に形成された内部配線層を介して接続されており、かつ前記絶縁基体は凹部内壁面で隣接する配線導体の一端間の領域に膨出部を有しており、該膨出部の上面に枠状の金属層が延出していることを特徴とする配線基板。An insulating base having a recess for accommodating an electronic component on the upper surface, a frame-shaped metal layer formed on the upper surface of the insulating base and surrounding the recess, one end in the recess of the insulating base, and the other end on the side A plurality of wiring conductors, a plurality of connection pads formed on the outer periphery of the lower surface of the insulating base, the wiring conductor and a frame-shaped metal layer formed on a side surface of the insulating base; A wiring board comprising a plurality of castellation conductors for connecting a connection pad, wherein the castellation conductor for connecting the frame-shaped metal layer and the connection pad is a first region derived from the connection pad; The first region and the second region are displaced in the width direction of the side surface of the insulating base and connected via an internal wiring layer formed inside the insulating base. Been Ri, and the insulating substrate has a bulging portion in the area between one end of the wiring conductor adjacent recess wall, characterized in that the frame-like metal layer on the upper surface of the bulging portion is extended Wiring board.
JP2002079067A 2002-03-20 2002-03-20 Wiring board Expired - Fee Related JP3866128B2 (en)

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