JP3860293B2 - LCD panel inspection equipment - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an apparatus for driving a liquid crystal panel to inspect its quality.
[0002]
[Prior art]
An apparatus for manually inspecting a liquid crystal display panel, that is, a liquid crystal panel is generally a liquid crystal panel using a delivery position for delivering the liquid crystal panel to the inspection apparatus and a measurement stage, ie, an inspection stage, for the purpose of preventing damage to the inspection probe. The liquid crystal panel is transported from the delivery position to the inspection position and vice versa.
[0003]
As this type of inspection apparatus, a liquid crystal panel is transported to a delivery position and an inspection position by a transport device (Japanese Patent Laid-Open No. 5-334227), and an inspection stage that receives a liquid crystal panel during lighting inspection has a function of a transport means. Japanese Patent Laid-Open No. 9-138256) adds and moves the inspection stage itself to a delivery position and an inspection position.
[0004]
However, the former requires that the transport device be moved between the delivery position and the inspection position for transporting the liquid crystal panel, and that the transport device must be largely retracted to a position where it does not interfere with the lighting inspection during inspection. Therefore, the moving time of the inspection stage for transportation and evacuation is wasted. Further, in the former case, when an arm that receives the liquid crystal panel on the receiving surface is used as a conveying means, the contact area with the arm increases, so that the liquid crystal panel is scratched when the liquid crystal panel is transferred between the inspection stage and the arm. There is a fear.
[0005]
On the other hand, since the latter places the liquid crystal panel directly on the inspection stage, there is little risk of damaging the liquid crystal panel during delivery of the liquid crystal panel, but the inspection stage itself is used for transporting the liquid crystal panel to the delivery position and the inspection position. Therefore, it still has the problem that the moving time of the inspection stage itself for transporting the liquid crystal panel is wasted. Further, since the transport means attracts the liquid crystal panel to its lower surface, the liquid crystal panel is transported in an unstable state.
[0006]
[Problems to be solved]
An object of the present invention is to minimize damage to the liquid crystal panel by the conveying means as much as possible, and to reduce time waste due to movement of the conveying means.
[0007]
[Solution, action and effect]
The inspection apparatus according to the present invention includes a delivery stage disposed at a delivery position of the liquid crystal panel, an inspection stage disposed at an examination position away from the delivery stage, and at least two transport devices that transport the liquid crystal panel to both stages. Including. Each transport device includes at least a pair of holders having a movable table that can reciprocate between both stages, a first driving unit that reciprocates the movable table, and a recess that receives an edge of the liquid crystal panel. And a second drive means for displacing the holder in a direction away from each other in a plane parallel to the liquid crystal panel.
[0008]
The liquid crystal panel is moved in the direction in which the holder of the transfer device is moved, the opposite edge is received in the recess and is held by the transfer device, and the liquid crystal panel is transferred in the direction of moving away from the holder of the transfer device. Freed from the device. Each transport device transports the liquid crystal panel in a state where the opposite edge portions of the liquid crystal panel are received in the recesses of the holder. For this reason, the contact area between the holder and the liquid crystal panel can be reduced. As a result, the liquid crystal panel can be prevented from being damaged when the liquid crystal panel is transferred between the holder and the inspection stage. It can be transported in a stable state or the like without being adsorbed.
[0009]
The delivery of the liquid crystal panel to the inspection device is performed manually or by a delivery machine at the delivery stage, and the inspection of the liquid crystal panel is performed manually using the naked eye or mechanically using a television camera, and the inspection stage. The transfer of the liquid crystal panel to is carried out by a transport device.
[0010]
During the inspection, it is only necessary to move the holder in a direction away from the holder so that the holder is slightly retracted, and it is not necessary to largely retract the entire transport device that has transported the liquid crystal panel to the inspection position. For this reason, time waste due to the retraction of the conveying means is remarkably reduced.
[0011]
For the inspection and delivery of the liquid crystal panel, for example, the delivery of the liquid crystal panel from one transport device to the inspection stage, the inspection of the liquid crystal panel, and the delivery of the liquid crystal panel from the inspection stage to the one transport device are performed. In the meantime, transfer of the inspected liquid crystal panel from the other transfer device to the transfer stage, removal of the liquid crystal panel from the transfer stage, placement of a new liquid crystal panel on the transfer stage, and new liquid crystal from the transfer stage to the other transfer device This can be done by handing over the panels.
[0012]
The liquid crystal panel is transported by both transport devices by, for example, performing the transport of the liquid crystal panel to the delivery stage by one transport device and the transport of the uninspected liquid crystal panel to the inspection stage by the other transport device in parallel. Can be executed. For this reason, time waste due to movement of the conveying means is remarkably reduced.
[0013]
According to the present invention, at least two transport devices having a pair of holders facing the recesses for receiving the edge of the liquid crystal panel as transport means are used, and the holders are separated from each other in a plane parallel to the liquid crystal panel. Because it is displaced in the direction, the contact area between the transporting means and the liquid crystal panel is reduced, the time waste due to the retreating and moving of the transporting means is reduced, and the liquid crystal panel is stable without vacuum suction. Can be transported.
[0014]
In the present invention, the moving table is a slider that is moved between the two stages by the first driving means and has an opening that can receive the panel receiver and the work table, and the first slider A pair of second sliders arranged so as to be movable in a direction away from each other and extending in parallel with the opening therebetween, and adjusting means for adjusting the position of the second slider with respect to the first slider; Is disposed on the second slider. Therefore, according to the present invention, it can be used for inspection of liquid crystal panels having different sizes by changing the interval between the second sliders.
[0015]
The delivery stage includes a panel receiver that receives the liquid crystal panel, and the inspection stage includes a work table that receives the liquid crystal panel. Each of the panel receiver and the work table is formed at each portion corresponding to a pair of opposing edges of the liquid crystal panel. It is possible to have notches that receive a part of the holder when they are displaced in the Z direction, which is substantially perpendicular to the liquid crystal panel, and when the holder is moved in a corresponding direction. In this way, since the holder is received in the notch when the liquid crystal panel is delivered to each stage, the liquid crystal panel is safely delivered between each stage and the holder.
[0016]
The transfer device is spaced in the Z direction, and the delivery stage and the inspection stage can have displacement means for displacing the panel receiver and the work table in the Z direction, respectively. In this way, the liquid crystal panel can be easily transferred between the holder and each stage by moving the holder in a direction away from each other and displacing the panel receiver and the work table in the Z direction. be able to.
[0017]
Each second slider is connected to the first slider by a pair of links, and each link is coupled to one of the first and second sliders by a first shaft, and is formed on the link and is formed in the length of the link. A second shaft movably received in a longitudinally extending slot can be coupled to the other of the first and second sliders. In this way, the movement of the second slider in the direction away from each other becomes parallel.
[0018]
The second driving means is disposed between the receiving member that receives the holder so as to be displaceable in the Z direction, a driving mechanism that moves the receiving member so as to move the holder in a direction away from each other, and the driving mechanism and the holder. And an elastic body that biases the holder in a direction away from the drive mechanism. In this way, when the liquid crystal panel is delivered to each stage, even if the panel holder or work table is displaced beyond the normal position of the holder, the holder is displaced against the biasing force of the elastic body. This prevents the liquid crystal panel from being damaged.
[0019]
Displacement means of the delivery stage is two cylinder mechanisms that can be expanded and contracted in the Z direction, and one cylinder mechanism is connected in series so that the liquid crystal panel is displaced in a substantially vertical direction by expansion and contraction of the other cylinder mechanism. Two cylinder mechanisms are provided, and the panel receiver can be assembled to one cylinder.
[0020]
The panel receiver of the delivery stage includes a receiving surface that is inclined so that one of the two opposing edges of the liquid crystal panel faces downward and the other edge faces upward, and the other of the liquid crystal panel And a plurality of positioning portions projecting from the receiving surface to receive the edge and other opposing edges. In this way, the liquid crystal panel can be roughly aligned by bringing the liquid crystal panel into contact with the positioning portion.
[0021]
DETAILED DESCRIPTION OF THE INVENTION
Referring to FIGS. 1 to 6, the inspection apparatus 10 is used for manual lighting inspection of a rectangular liquid crystal display body, that is, a liquid crystal panel 12. In the illustrated example, the liquid crystal panel 12 includes an electrode group including a plurality of electrode portions on each of edge portions corresponding to three sides of a rectangular side.
[0022]
Hereinafter, in order to facilitate understanding, in both the inspection apparatus 10 and the liquid crystal panel 12, the direction of the long edge of the liquid crystal display panel, that is, the liquid crystal panel 12 (left-right direction) is referred to as the X direction, The direction of the edge is referred to as the Y direction (front-rear direction), and the direction perpendicular to the liquid crystal panel 12 is referred to as the Z direction. In addition, axes extending in the X, Y, and Z directions are referred to as X, Y, and Z axes, respectively.
[0023]
The inspection device 10 includes a frame, that is, a housing 20. An upper portion of the front surface of the housing 20 is an inclined surface portion 22. The inclined surface portion 22 has an opening 24 used for delivery of the liquid crystal panel 12 and an opening 26 used for inspection of the liquid crystal panel 12. The openings 24 and 26 have a rectangular shape that is larger than the liquid crystal panel 12 and rounded at the corners, and are spaced apart in the X direction.
[0024]
In the housing 20, a portion corresponding to the opening 24 is a delivery position for delivering the liquid crystal panel 12 to the inspection apparatus 10, and a portion corresponding to the opening 26 is an inspection position for performing a lighting inspection of the liquid crystal panel 12. Has been. A switch panel 28 is provided on the inclined surface portion 22. The switch panel 28 has a plurality of switches for turning on / off each device of the inspection apparatus 10.
[0025]
A support base 30 that supports various devices is disposed in the housing 20. The support table 30 is formed by a base plate 32, a rectangular base table 34, and a plurality of support columns 36 connecting the both. The base 34 is formed of a plate material having a length and width that are slightly shorter than the base plate 32, and extends in the X direction in the housing 20 in parallel with the base plate 32.
[0026]
In the illustrated example, the base plate 32 is a member that forms the inclined surface portion 22 of the housing 20, and thus the openings 24 and 26 are formed in the base plate 32. However, the base plate 32 may be formed of a member different from the member that forms the inclined surface portion 22, and the base plate 32 may be assembled to the member that forms the inclined surface portion 22.
[0027]
A probe unit 40 is disposed on the base plate 32. The probe unit 40 includes a probe base 42 having a rectangular plate shape and a plurality of L-shaped probe blocks 44 assembled to the probe base 42 by one or more screw members.
[0028]
The probe base 42 has an opening 46 similar to the opening 26 and is coaxially attached to the outside of the base plate 32 by a plurality of screw members. The probe block 44 is divided into three block groups each including a plurality of probe blocks 44, and is disposed on a side portion corresponding to an edge portion where the electrode group of the liquid crystal panel 12 is formed.
[0029]
Each probe block 44 is attached to the outside of the probe base 42 at the other end so that one end reaches the inside of the opening 46 through the opening 46. Each probe block 44 supports a plurality of probes 48 at one end thereof. Each probe 48 extends in a state having an angle with respect to the liquid crystal panel 12.
[0030]
A pair of television cameras 50 for alignment are also assembled to the probe base 42. The television camera 50 is disposed on the probe base 42 so as to photograph the alignment mark formed on the liquid crystal panel 12. The output signal of the TV camera 50 is used for precise alignment of the liquid crystal panel 12 with respect to the probe unit 40.
[0031]
The base 34 supports a delivery stage 52 for delivering the liquid crystal panel 12, an inspection stage 54 for lighting inspection, and first and second transport devices 56 that transport the liquid crystal panel 12 in an inclined state. To do. The delivery stage 52 is disposed at a delivery position corresponding to the opening 24, and the inspection stage 54 is disposed at an inspection position corresponding to the opening 26.
[0032]
The delivery stage 52 is a flat panel receiver 58 that receives the liquid crystal panel in an inclined state, two cylinder mechanisms 60 and 62 that displace the panel receiver 58 in the Z direction, and the liquid crystal panel 12 with respect to the panel receiver 58. And a plurality of positioning portions 64 to be determined.
[0033]
The panel receiver 58 has a diagonally upward surface as a panel receiving surface on which the panel is placed, and has one or more notches 66 on each edge in the Y direction. In the illustrated example, one elongated notch 66 extending along the edge is formed on one end edge in the Y direction, and two notches 66 are square on the other end edge in the Y direction. It is formed by excising the corner part of this. The panel receiver 58 is attached to the rod portion of the cylinder mechanism 62 so that the panel receiving surface is inclined.
[0034]
The cylinder mechanisms 60 and 62 are fluid pressure cylinder mechanisms such as air cylinders, and are connected in series so that the expansion and contraction directions are the same. One cylinder mechanism 60 is attached to the base 34 by an assembly tool 68 in the cylinder portion so that the expansion and contraction direction thereof is the Z direction. The other cylinder mechanism 62 is connected to the rod portion of the cylinder mechanism 60 by the assembly tool 70 in the cylinder portion so that the expansion / contraction direction is the Z direction.
[0035]
The positioning portion 64 is formed on the receiving surface of the panel receiver 58. In the illustrated example, two positioning portions 64 are formed at one end edge portion in the Y direction, and one positioning portion 64 is formed at the other end edge portion in the Y direction. Each positioning portion 64 is formed in a crank shape on the inside, and thus has a step portion for receiving the liquid crystal panel 12 on the inside.
[0036]
The two positioning portions 64 at one end edge in the Y direction are spaced in the X direction with the corresponding notch 66 at the one end edge in between, and two adjacent edge portions of the liquid crystal panel 12 are in contact with each other. It is bent in an L shape so that it touches. The positioning portion 64 at the other end edge in the Y direction is formed between the notches 66 at the other end edge and is formed at the center of the other end edge.
[0037]
The inspection stage 54 includes an X stage that moves the liquid crystal panel 12 in the left-right direction (X direction), a Y stage that moves the liquid crystal panel 12 in an oblique vertical direction (Y direction), and a direction perpendicular to the panel. A Z stage that moves in the (Z direction), a θ stage that rotates the liquid crystal panel 12 about a Z axis perpendicular to the panel, and a work table 72 that receives the liquid crystal panel 12 are provided.
[0038]
The Y stage, Z stage, θ stage, and work table 72 are movably supported on the X stage, Y stage, Z stage, and θ stage, respectively, and are moved in the same manner as the corresponding stage moves. The
[0039]
The inspection stage 54 is received by the base 34 so that the work table 72 is on the opening 24 side and the X stage is on the base 34 side, and the liquid crystal panel 12 is inclined to the work table 72. The X stage 30 is assembled to the base 34 so as to be movable.
[0040]
The work table 72 is in the form of a rectangular parallelepiped shallow box that opens toward the base plate 32 so as to receive and support the liquid crystal panel 12. The obliquely upward surfaces of the four edge portions forming the internal space of the work table 72 are rectangular inclined panel receiving surfaces that receive the liquid crystal panel 12 in an inclined state.
[0041]
The work table 72 has grooves 74 that open to the panel receiving surface at three edge portions, and has a pair of cutout portions 76 at each edge portion in the Y direction. Further, the liquid crystal panel 12 is connected to the work table 72. A pair of end edge receivers 78 for preventing sliding off from one end are provided at one end edge in the Y direction. A backlight unit 80 is accommodated in the work table 72 so as to illuminate the liquid crystal panel 12 from the back (see FIGS. 4 and 6 and FIGS. 14 to 17).
[0042]
The groove 74 is formed in a portion corresponding to the edge portion where the electrode group of the liquid crystal panel 12 is formed, and the work table 72 is not shown so as to act as a vacuum chuck that vacuum-sucks the back surface of the liquid crystal panel 12. It is in communication with a vacuum source. The pair of cutout portions 76 are spaced apart in the Y direction and open to the front and back sides of the work table 72 and to the sides. The notch 76 of the work table 72 is formed at a position corresponding to the notch 66 of the panel receiver 58.
[0043]
The edge receiver 78 is attached to the lower edge of the panel receiving surface by a plurality of screw members, and is spaced in the X direction. For this reason, the liquid crystal panel 12 placed on the work table 72 has its lower end edge abutted against the end edge receiver 78 even if the panel receiving surface of the work table 72 is inclined, and thereby falls from the work table 72. Is prevented.
[0044]
The work table 72 also has a pair of stoppers 82 for positioning the liquid crystal panel 12 with respect to the work table 72 at one end edge in the X direction and the upper edge. The paired stoppers 82 are attached to the corresponding edge portions of the panel receiving surface by screw members, and are spaced in the direction of the corresponding edge portions.
[0045]
The work table 72 further includes a pusher mechanism 84 that presses the liquid crystal panel 12 against the stopper 82 at each of the other end edge in the X direction and the lower end edge in the Y direction. In the example shown in the figure, two pusher mechanisms 84 are arranged in the center of the lower end edge portion at an interval in the X direction, and one pusher mechanism 84 is arranged in the center of the other end edge portion in the X direction. Has been.
[0046]
Each pusher mechanism 84 is rotated angularly around an axis extending in a direction perpendicular to the liquid crystal panel 12 (Z direction) by the rotation mechanism 86 supported by the inspection stage 54 and reversible, and the liquid crystal panel. And an oscillating body 88 for pushing 12.
[0047]
Each rotation mechanism 86 is supported by the work table 72 such that its output rotation shaft extends in the Z direction. As each rotation mechanism 86, a rotary cylinder mechanism, a rotary solenoid mechanism, an electric motor, or the like can be used.
[0048]
Each oscillating body 88 is attached to an arm 88a attached to the output rotation shaft of the rotation mechanism 86 at one end, and slightly protruded from the panel receiving surface of the work table 72 in the Z direction to the other end of the arm. And a pin 88b.
[0049]
In each pusher mechanism 84, when the rotation mechanism 86 rotates in one direction by a predetermined angle, the oscillating body 88 rotates in one direction by a predetermined angle to push the liquid crystal panel 12 against the corresponding stopper 82, and the rotation mechanism 86 has a predetermined rotation. By reversing the angle, the oscillating body 88 is reversely rotated by a predetermined angle, and the pressing of the liquid crystal panel 12 to the corresponding stopper 82 is released.
[0050]
The base 34 supports a pair of elongate support plates 90 for both transport devices 56. Both support plates 90 are spaced from each other in the Y direction with both stages 52 and 54 interposed therebetween, and the width direction is the Z direction, and the base plate 34 extends from the delivery position to the inspection position in parallel in the X direction. It is assembled.
[0051]
A pair of elongate rail bases 92 are attached to the upper portion of each support plate 90 at an interval in the Z direction. All the rail bases 92 extend parallel to the X direction. A rail 94 extending in the X direction is attached to each rail base 92. The pair of rails 94 far from the base 34 is used to receive the first transport device 56 far from the base 34, and the pair of rails 94 close to the base 34 feeds the second transport device 56 close to the base 34. Used to receive.
[0052]
As shown in FIGS. 8 to 16, each conveying device 56 includes a U-shaped first slider 96 having an opening capable of receiving the panel receiver 58 and the work table 72, and the first slider 96 in the Y direction. A pair of elongated second sliders 98 supported at intervals to each other, a first drive mechanism 100 for reciprocating the first slider 96, and the second sliders 98 arranged at intervals in the X direction. And a plurality of second drive mechanisms 104 that displace the holder 102 in the Y direction within a plane parallel to the liquid crystal panel 12.
[0053]
The first slider 96 is supported on the rail 94 by a plurality of guides 106 so as to be movable in the X direction, and is reciprocated between the stages 52 and 54 by the first drive mechanism 100. The second slider 98 extends in parallel in the X direction with the delivery stage 52 and the inspection stage 54 in between. Both sliders 96 and 98 together with the guide 106 act as a moving table. However, the second slider 98 may be omitted and the holder 102 may be disposed on the first slider 96.
[0054]
Each of the first drive mechanisms 100 includes a pair of pulleys 110 disposed at both ends of one rail base 92 so as to be rotatable around the Z-axis, an endless belt 112 wound around both pulleys 110, A driving source 114 that rotates the pulley 110 is provided, and the endless belt 112 is connected to the first slider 96.
[0055]
Each drive mechanism 100 moves the first slider 96 from the delivery position to the inspection position when the drive source 114 is rotated forward, and reverses the drive source 114 to move the first slider 96 to the inspection position. Move to the delivery position. A timing belt can be used as the endless belt 112. In this case, a timing pulley is used as the pulley 110.
[0056]
As shown in FIG. 6, each holder 102 has a recess for receiving the edge of the liquid crystal panel, and the second slider is set so that the recess is directed inward by the corresponding second drive mechanism 104. 98. Each holder 102 is maintained at a position corresponding to the notches 66 and 76 of the panel receiver 58 and the work table 72. The holder 102 arranged on one second slider 98 and the holder 102 arranged on the other second slider 98 are opposed to each other.
[0057]
In the illustrated example, each second drive mechanism 104 includes a fluid pressure cylinder mechanism such as an air cylinder as a drive source, and is attached to the second slider 98 in the cylinder portion. It is attached to the rod portion 104b by an assembly tool.
[0058]
As shown in FIG. 6, the assembling tool includes an assembling block 116 attached to the rod portion 104b of the second drive mechanism 104, and extends from the block 116 in the Z direction so that the holder 102 can be displaced in the Z direction. The shaft 118 includes an elastic body 120 that is disposed between the block 116 and the holder 102 and biases the holder 102 in a direction away from the rod portion 104b.
[0059]
The shaft 118 has a flange portion that prevents the holder 102 from falling off at the end opposite to the block 116. In the illustrated example, the elastic body 120 is a compression coil spring disposed on the shaft 118, but may be another elastic body such as rubber. Each holder 102 is provided with a buffer material 122 for preventing the liquid crystal panel 12 from being damaged on the U-shaped inner surface.
[0060]
Next, operations of the delivery stage 52 and the transfer device 56 will be described with reference to FIGS.
[0061]
During standby, for example, as shown in FIG. 8, each transport device 56 has been moved to the delivery position, and the holder 102 has been retracted to a position that does not hinder delivery of the liquid crystal panel 12 to the panel receiver 58. The delivery stage 52 extends both the cylinder mechanisms 60 so that the panel receptacle 58 coincides with the position (height position) in the Z direction of the holder 102 of the first conveying device 56 far from the base 34 (on the higher side). It is displaced to.
[0062]
The liquid crystal panel 12 to be inspected is manually placed on the panel receiver 58 of the delivery stage 52 in a state where the delivery stage 52 and the transfer device 56 are in the above state. At this time, the liquid crystal panel 12 is positioned with respect to the panel receiver 58 by being fitted into the space formed by the positioning portion 64.
[0063]
Next, the first transport device 56 is activated, and the holder 102 is moved inward (in a direction toward each other) by the second drive mechanism 104. As a result, the liquid crystal panel 12 receives the edge in the Y direction in the recess of the holder 102 of the first transport device 56, as shown in FIG. At this time, a part of each holder 102 can be received in the notch 66 of the panel receiver 58, so that the end edge of the liquid crystal panel 12 is safely and reliably received.
[0064]
Next, as shown in FIG. 10, the cylinder mechanism 62 is contracted, and the panel receiver 58 is lowered along the Z axis to the position of the holder 102 of the second transport device 56 close to the base 34 (on the lower side). The As a result, the liquid crystal panel 12 is transferred to the first transport device 56 and maintained in a state inclined to the transport device 56.
[0065]
Next, the first transport device 56 is moved toward the inspection position by the corresponding drive mechanism 100. Thereby, as shown in FIG. 11, the 2nd conveying apparatus 56 remains in a delivery position. The liquid crystal panel 12 is transported in a state in which the lower edge thereof is in contact with the inner surface of the recess of the lower holder 102. As a result, the liquid crystal panel 12 is maintained in a state of coarse alignment.
[0066]
As will be described later, an uninspected liquid crystal panel transported to the inspection position by the first transport device 56 is lifted along the Z-axis along the work table 72 of the inspection stage 54, and then the first transport device 56. By moving the holder 102 back to a position that does not interfere with the lighting inspection of the liquid crystal panel, the holder 102 is transferred from the first transfer device 56 to the inspection stage 54 and is inspected for lighting. The liquid crystal panel that has been inspected is received by the holder 12 of the first transport device 56.
[0067]
While the uninspected liquid crystal panel is transported to the inspection position by the first transport device 56 and the liquid crystal panel undergoes lighting inspection, a new uninspected liquid crystal panel 12 is transferred to the delivery stage 52 as shown in FIG. The holder 102 of the second transporting device 56 is advanced as shown in FIG. 12, and then the cylinder mechanism 60 is contracted as shown in FIG. As a result, the new liquid crystal panel 12 is received by the second transport device 56 as shown in FIG.
[0068]
Next, the inspected liquid crystal panel is returned to the delivery position by the first transport device 56, and a new liquid crystal panel is transported to the inspection position by the second transport device 56.
[0069]
When the inspected liquid crystal panel is transported to the delivery position, the panel receiver 58 is first lifted along the Z axis to the height position of the holder 102 of the first transport device 56 by both cylinder mechanisms 60 and 62, and then The holder 102 of one transporting device 56 is retracted to a position that does not hinder the delivery of the liquid crystal panel to the panel receiver 58. As a result, the inspected liquid crystal panel is transferred to the panel receiver 58.
[0070]
Next, the inspected liquid crystal panel on the panel receiver 58 is removed from the panel receiver 58, and a new untested liquid crystal panel is placed on the panel receiver 58. The delivery of the liquid crystal panel at this time is also performed manually.
[0071]
The liquid crystal panel transported to the inspection position by the second transport device 56 is transferred to the inspection stage 54 in the same manner as described above, subjected to a lighting inspection, and then returned to the second transport device 56.
[0072]
Thereafter, the transport of the inspected liquid crystal panel by one transport device and the transport of the uninspected liquid crystal panel by the other transport device are repeated synchronously, and the lighting inspection of the liquid crystal panel is performed during that time.
[0073]
As described above, by carrying the liquid crystal panel to the delivery stage by one transport device in parallel with the transport of the non-inspected liquid crystal panel to the inspection stage by the other transport device, the time required for moving the transport device Is significantly reduced. The arrangement of the untested liquid crystal panel on the panel receiver 58 and the removal of the tested liquid crystal panel from the panel receiver 58 may be performed mechanically.
[0074]
Next, delivery of the liquid crystal panel between the inspection stage 54 and the transfer device 56 will be described with reference to FIGS.
[0075]
In a state where the transport device 56 has been moved to the inspection position, the uninspected liquid crystal panel 12 is maintained above the height position of the work table 72 in the Z direction by the transport device 56 as shown in FIG.
[0076]
In the above state, first, as shown in FIG. 15, the work table 72 is moved along the Z axis by the Z stage of the inspection stage 54 until the panel receiving surface of the work table 72 reaches the height position of the holder 102 in the Z direction. Then, the liquid crystal panel 12 is vacuum-sucked.
[0077]
Next, as shown in FIG. 16, the holder 102 of the transport device 56 is retracted to a position that does not interfere with the lighting inspection. Thereby, the liquid crystal panel 12 is completely delivered to the work table 72.
[0078]
Next, the alignment mark formed on the liquid crystal panel 12 is photographed by the alignment television camera 50, and the work table 72 is placed on each of the inspection stages 54 so that the alignment mark becomes a predetermined coordinate position based on the output signal. Displaced by the stage. Thereby, precise alignment of the liquid crystal panel 12 with respect to the probe unit 40 is performed.
[0079]
Next, as shown in FIG. 17, the work table 72 is further raised along the Z axis by the Z stage of the inspection stage 54, whereby the electrode part of the liquid crystal panel 12 is pressed against the probe 48 of the probe unit 40.
[0080]
Next, the liquid crystal panel is energized while the backlight unit 80 is lit. Thereby, since the liquid crystal panel 12 is lighted in a predetermined pattern, the quality of the liquid crystal panel 12 is determined by confirming whether the lighted state is correct. Whether the lighting state is correct or not is confirmed by an operator's visual observation.
[0081]
When the lighting inspection is completed, the work table 72 is lowered along the Z axis until the panel receiving surface of the work table 72 reaches the height position of the holder 102 in the Z direction, the holder 102 is advanced, and the liquid crystal panel is moved to the work table. The vacuum suction is released, and then the work table is further lowered along the Z-axis. Thereby, the liquid crystal panel 12 is received by the holder 102.
[0082]
As described above, when the work table 72 and the holder 102 are moved relative to each other, a part of each holder 102 is received in the notch 76 formed in the work table 72. The relative movement of the liquid crystal panel is not hindered, and the liquid crystal panel is reliably transferred between the two.
[0083]
Next, the details of the alignment of the liquid crystal panel 12 on the work table 72 by the pusher mechanism 84 and the delivery of the liquid crystal panel 12 from the holder 102 to the work table 72 will be described with reference to FIGS.
[0084]
First, as shown in FIG. 18A, in a state where the liquid crystal panel 12 is maintained above the height position of the work table 72 in the Z direction by the holder 102, the work table 72 is in contact with the liquid crystal panel 12. Be raised.
[0085]
Next, as shown in FIG. 18A, each pusher mechanism 84 operates to displace the liquid crystal panel 12 toward the stopper 82. That is, the liquid crystal panel 12 is moved from the position indicated by the solid line in FIG. 7 to the position indicated by the two-dot chain line in the same figure, and two adjacent edges of the liquid crystal panel 12 are brought into contact with the stopper 82.
[0086]
As a result, the liquid crystal panel is transferred when the liquid crystal panel is transferred from the panel receiver 58 of the transfer stage 54 to the holder 102, when the liquid crystal panel is transferred by the transfer device 56, and when the liquid crystal panel is transferred from the holder 102 to the work table 72. The liquid crystal panel 12 is aligned so that the alignment mark is within the field of view of the alignment television camera 50 even if the position of the liquid crystal panel 12 is slightly displaced.
[0087]
Next, the work table 72 is further raised along the Z-axis as shown in FIG. Thereby, the liquid crystal panel 12 is received by the work table 72.
[0088]
Next, as shown in FIG. 18D, the work table 72 is raised to a position where the holder 102 is raised against the force of the elastic body 120, and in this state, the liquid crystal panel 12 is vacuum-sucked to the work table 72. . As a result, the liquid crystal panel 12 is vacuum-sucked to the work table 72 while being pressed against the work table 72, and is thus securely held by the work table 72.
[0089]
Next, as shown in FIG. 18 (E), the work table 72 is slightly lowered along the Z-axis, and then the holder 102 is retracted to a position that does not hinder the lighting inspection as shown in FIG. 18 (F).
[0090]
When the inspected liquid crystal panel is transferred from the work table 72 to the holder 102, operations reverse to the above are performed in the order of FIGS. 18 (F), (C), (B), and (A). In this case, when the pusher mechanism 84 returns to the original state, the liquid crystal panel is displaced with respect to the work table 72 and the holder 102 due to the inclination of the upper surface of the work table 72, and the liquid crystal panel Is brought into contact with the inner surface of the recess of the lower holder 102.
[0091]
The holder 102 is moved forward or backward while being in contact with the liquid crystal panel 12. However, at this time, the cushioning material 122 disposed in the recess of each holder 102 prevents the scratches from being formed on the liquid crystal panel 12.
[0092]
Both the second sliders 98 are supported by the first slider 96 so as to be movable in the direction away from each other (Y direction), the holder 102 is attached to the second slider 98, and both the second sliders 98 are driven. The liquid crystal panel may be grasped and released by the holder by moving in synchronization in the direction away from each other by the mechanism, and the maximum distance between both the second holders 98 may be inspected. You may make it adjust according to a magnitude | size.
[0093]
The pusher mechanism 84 continues to operate until the lighting test of the liquid crystal panel is completed at the earliest, so that the liquid crystal panel 12 is pressed by the stopper 82. Therefore, even if the ratio of the area of the suction surface by the groove 74 to the size of the liquid crystal panel is small, the liquid crystal panel is stably maintained, and even a large liquid crystal panel can be inspected accurately. Further, when the liquid crystal panel is pressed against the probe unit, displacement of the liquid crystal panel due to a pressing force, an unbalanced force, etc. acting on the liquid crystal panel is prevented.
[0094]
In the transport device 130 shown in FIGS. 19 to 21, the second slider 98 is disposed so as to be movable away from the first slider 96. A rail 132 extending in the Y direction is provided on the upper surface of the first slider 96, and a plurality of guides 134 that are slidably received in the longitudinal direction of the rail 132 are provided on the second slider 98. .
[0095]
The second slider 98 is supported by the first slider 96 in a cantilever manner by the rail 132 and the guide 134. For this reason, each second slider 98 is further connected to the first slider 96 by the link 136 at each of two positions spaced in the X direction.
[0096]
Each link 136 has a long hole 138 extending in the longitudinal direction of the link. Each link 136 is coupled to the second slider 98 by a first shaft 140 and is coupled to the first slider 96 by a second shaft 142 movably received in the longitudinal hole 138 in the longitudinal direction. Has been.
[0097]
When both the second sliders 98 are farthest apart, as shown in FIG. 19, each link 136 extends in the X direction, and the second shaft 142 is closest to the first shaft 140. .
[0098]
However, when the second slider 98 is gradually approached, the link 136 gradually changes its position relative to the slot 138 so that the second shaft 142 gradually moves away from the first shaft 140, as shown in FIG. Have an angle with respect to the X direction.
[0099]
For this reason, the conveying apparatus 130 can adjust the space | interval of the 2nd slider 98 according to the magnitude | size of the liquid crystal panel 12 which should be test | inspected. The position of the second slider 98 relative to the first slider 96 can be releasably maintained by a plurality of screw members 144. Each screw member 144 is screwed with the second slider 98 and has a tip abutted against the rail 132.
[0100]
Each link 136 is coupled to the second slider 98 by the first shaft 140 and coupled to the first slider 96 by the first shaft 140 instead of being coupled to the first slider 96 by the second shaft 142. And may be coupled to the second slider 98 by the second shaft 142.
[0101]
The present invention is not limited to the above embodiments. For example, the present invention is not only a visual inspection apparatus for inspecting a liquid crystal panel by an operator's visual inspection, but also an automatic inspection apparatus for inspecting by a computer based on the output signal using an appropriate imaging means such as a television camera. Can be applied. A plunger mechanism using a solenoid may be used instead of the cylinder mechanism as the drive mechanism.
[0102]
The present invention can be applied not only to an apparatus for inspecting a liquid crystal panel in an inclined state, but also to an apparatus for inspecting a liquid crystal panel in a horizontal or vertical state. It can be applied to other polygonal liquid crystal panels such as a square, octagon, etc. Furthermore, it can be applied to an apparatus for inspecting a liquid crystal panel using an electrode provided on one side of the polygon. Can do.
[Brief description of the drawings]
FIG. 1 is a front view showing an embodiment of an inspection apparatus according to the present invention.
2 is a right side view showing an embodiment of a part of a transport mechanism in the inspection apparatus of FIG. 1, and is a view showing a section of a probe unit in section. FIG.
3 is an arrow view of the transport device in the inspection apparatus of FIG. 1 viewed from the direction of line 3-3 in FIG.
FIG. 4 is a plan view showing an embodiment of a work table.
FIG. 5 is a front view of the work table shown in FIG. 4;
FIG. 6 is a view showing an example of the vicinity of a holder.
FIG. 7 is a diagram for explaining alignment of a liquid crystal panel on a work table.
FIG. 8 is a side view of the transport device showing an initial step of the transport device.
FIG. 9 is a side view showing steps subsequent to FIG. 8 of the transport device.
FIG. 10 is a diagram illustrating steps subsequent to FIG. 9 of the transport device.
FIG. 11 is a diagram illustrating steps subsequent to FIG. 10 of the transport device.
FIG. 12 is a diagram illustrating steps subsequent to FIG. 11 of the transport device.
FIG. 13 is a diagram illustrating steps subsequent to FIG.
FIG. 14 is a diagram for explaining delivery of a liquid crystal panel between a transport device and an inspection stage, and is a diagram illustrating an initial delivery step.
FIG. 15 is a diagram showing a delivery step following FIG. 14;
FIG. 16 is a diagram showing a delivery step following FIG. 15;
FIG. 17 is a diagram illustrating a delivery step subsequent to FIG. 16;
FIG. 18 is a diagram for explaining the relationship between the transport apparatus and the inspection stage when the liquid crystal panel is transferred from the transport apparatus to the inspection stage.
FIG. 19 is a diagram illustrating another embodiment of the transport device.
20 is a right side view of the transfer device shown in FIG. 19. FIG.
21 is a plan view showing a state in which a second slider is brought close to the transfer device shown in FIG.
[Explanation of symbols]
10 Inspection equipment
12 LCD panel
30 Support stand
40 Probe unit
52 Delivery stage
54 Inspection stage
56 Conveyor
58 Panel holder
60, 62 Cylinder mechanism (panel receiving drive means)
64 Positioning part
66,76 Notch
72 Worktable
78 Edge receiver
80 Backlight unit
82 Stopper
84 Pusher mechanism
86 Rotating mechanism
88 Oscillator
94 rail
96, 98 slider
100 Drive mechanism for slider (first drive means)
102 Holder
104 Drive mechanism for holder (second drive means)
110 pulley
112 endless belt
114 Drive source
122 cushioning material
132 rails
134 Guide
136 links
138 slotted hole
140, 142 axes

Claims (5)

A delivery stage disposed at a delivery position of the liquid crystal panel, an inspection stage disposed at an examination position away from the delivery stage, and at least two transport devices that transport the liquid crystal panel to both stages,
Each of the transfer devices includes at least a pair of holders having a movable table that can reciprocate between both stages, a first driving unit that reciprocates the movable table, and a recess that receives an edge of the liquid crystal panel. A holder disposed at a distance from the moving table with the recesses facing each other, and a second driving means for displacing the holder in a direction away from each other in a plane parallel to the liquid crystal panel,
The moving table is a slider that is moved between the two stages by the first driving means and has an opening that can receive the panel receiver and the work table; and the first slider And a pair of second sliders that are arranged so as to be movable in a direction away from each other and extend in parallel with the opening therebetween, and an adjusting means for adjusting the position of the second slider with respect to the first slider Prepared,
The liquid crystal panel inspection apparatus, wherein the holder is disposed on the second slider.   The delivery stage includes a panel receiver that receives a liquid crystal panel, the inspection stage includes a work table that receives the liquid crystal panel, and each of the panel receiver and the work table corresponds to a pair of opposite edges of the liquid crystal panel. A notch formed in a portion, wherein the notch is configured to receive a part of the holder when they are displaced in a direction substantially perpendicular to the liquid crystal panel and when the holder is moved in a direction to be aligned. Item 2. The inspection apparatus according to Item 1.   The transport device is spaced apart in a direction substantially perpendicular to the liquid crystal panel, and the transfer stage and the inspection stage have displacement means for displacing the panel support and the work table in a direction substantially perpendicular to the liquid crystal panel, respectively. Item 3. The inspection apparatus according to Item 2.   Each second slider is connected to the first slider by a pair of links, and each link is coupled to one of the first and second sliders by a first shaft and formed on the link. The inspection apparatus according to claim 1, wherein the inspection apparatus is coupled to the other of the first and second sliders by a second shaft that is movably received in a long hole that extends in the longitudinal direction of the link.   The second driving means includes a receiving member that receives the holder in a direction substantially perpendicular to the liquid crystal panel, a driving mechanism that moves the receiving member to move the holder in a direction away from each other, and The inspection apparatus according to claim 2, further comprising: an elastic body that is disposed between the drive mechanism and the holder and biases the holder in a direction away from the drive mechanism.

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