JP3847909B2 - Deaeration device and deaeration method - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a deaeration device and a deaeration method, and its purpose is to flexibly cope with various processing liquid amounts, types of processing liquids, properties of processing liquids, and processing liquid supply methods with a single deaeration device. It is to provide a possible deaeration device.
[0002]
[Prior art]
Generally, a degassing device used to remove a heat exchange element in a heat exchanger or a dissolved gas in a solution is a plastic degassing element in which a fluororesin joining member and a fluororesin tube are joined. It is manufactured by integrating them in a vacuum chamber made of metal, metal, or glass using a fixing jig.
As an example of such a deaeration device, for example, the one shown in FIG. 4 exists. This deaeration device is constructed by connecting and fixing a deaeration element (A) made of a gas-permeable tube made of a fluororesin inside a vacuum chamber (C) by a joining member (B). The liquid to be supplied is supplied from a fluororesin tube connected to a deaeration device through a joint (D).
As a method of operating such a deaeration device, the processing liquid is added to the fluororesin tube while the vacuum chamber (C) is decompressed by a decompression device such as a vacuum pump connected to the suction port (E). A method of pumping liquid is common.
[0003]
[Problems to be solved by the invention]
However, in the degassing apparatus as described above, when the supply amount of the processing liquid is large, a plurality of degassing apparatuses must be connected in parallel or in series in order to improve the degassing efficiency.
On the other hand, as a degassing device capable of obtaining high degassing efficiency even when the amount of treatment liquid supplied is large, a joining member (B) having a plurality of fitting portions as shown in FIG. 5 is provided in the vacuum chamber (C). A deaeration device in which a plurality of deaeration elements (A) are fixed and attached to the respective fitting portions is also used.
According to this degassing apparatus, although a large amount of processing liquid can be efficiently degassed with one apparatus, there are problems as described below.
First, since only one type of liquid can be degassed at a time, an attempt was made to simultaneously degas two or more types of liquids having different liquid properties (for example, viscosity, density, aqueous type and solvent type). In some cases, it was necessary to connect and use two or more deaerators.
In addition, when degassing high viscosity liquids, it is necessary to increase the tube diameter, shorten the tube length, or increase the number of tubes, but these changes can be made flexibly and easily. I couldn't.
Furthermore, for example, the discharge destination supplier at one location of the processing solution can not be a deaerator one in the case of a plurality of positions corresponding, to be used to connect two or more deaerator did not become.
The problem to be solved by the present invention is that it is possible to deal with various amounts of processing liquid with a single deaeration device, and it is possible to simultaneously deaerate a plurality of types of processing liquids, and the difference in properties of the processing liquids. It is another object of the present invention to provide a general-purpose degassing apparatus that can be flexibly adapted to various methods and that can be adapted to various supply methods and extraction methods of processing liquids.
[0004]
[Means for Solving the Problems]
In the present invention, as means for solving the above-mentioned problems, in the invention of claim 1, one or two or more gases in which a joining member having joints connected to both ends is provided in one vacuum chamber. It is a deaeration device in which two or more deaeration elements made of a permeable tube are arranged , the liquid inlets of two or more deaeration elements are connected in parallel, and the liquid outlets are not connected to each other. The deaeration device is characterized by being independent.
[0005]
In the invention of claim 2, two or more deaeration elements comprising one or two or more gas permeable tubes are provided in which a joining member having joints connected to both ends is provided in one vacuum chamber. A deaeration device is provided, wherein the liquid outlets of three or more deaeration elements are provided independently without being connected to each other, and the liquid inlet is provided in parallel with a single one. The deaeration device is characterized by being made.
[0006]
According to a third aspect of the present invention, the degassing apparatus according to the first or second aspect is characterized in that the processing liquid supplied to each degassing element is the same.
[0007]
According to a fourth aspect of the present invention, a degassing method is characterized in that the degassing apparatus according to the first or second aspect is used and the same processing liquid is supplied to each degassing element to perform the degassing process.
[0008]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of a deaeration device and a deaeration method according to the present invention will be described with reference to the drawings.
FIG. 1 is a cross-sectional view showing a reference example for explaining a basic configuration common to the deaeration apparatus according to the present invention.
The deaeration device (1) of the reference example shown in FIG. 1 includes one vacuum chamber (2) and two or more deaeration elements (3) disposed in the vacuum chamber (2). .
In the degassing apparatus (1) according to the present invention, the material of the vacuum chamber (2) is not particularly limited, and any material such as metal, plastic, glass, etc. can be used as appropriate. From the viewpoint of chemical resistance, when using a metal material, stainless steel is used. When using a plastic material, a fluororesin such as polytetrafluoroethylene (PTFE) or tetrafluoroethylene-perfluoroalkyl vinyl ether copolymer (PFA), It is preferable to use polypropylene resin (PP), polyethylene resin (PE), or the like.
In addition, the shape and size of the vacuum chamber (2) also includes a suction port (21) that can be connected to a decompression means such as a vacuum pump and a liquid inlet and a liquid outlet for allowing the processing liquid to pass through the deaeration element (3). There is no particular limitation as long as it has a mouth and can accommodate a required number of deaeration elements (3).
[0009]
The deaeration element (3) is a gas in which one gas-permeable tube or two or more gas-permeable tubes are joined and integrated by fusion through a fluororesin powder having heat-fusibility at the end. It consists of a permeable tube bundle.
Specific examples of the material of the gas permeable tube include polytetrafluoroethylene (PTFE), tetrafluoroethylene-perfluoroalkyl vinyl ether copolymer (PFA), tetrafluoroethylene-hexafluoropropylene copolymer (FEP), Examples thereof include, but are not limited to, ethylene-tetrafluoroethylene copolymer (ETFE) and polychlorotrifluoroethylene (PCTFE).
Further, the fluororesin powder having heat-fusibility is not particularly limited. Specifically, tetrafluoroethylene-hexafluoropropylene copolymer (FEP), polytetrafluoroethylene (PTFE), tetra Preferable examples include powders such as fluoroethylene-perfluoroalkyl vinyl ether copolymer (PFA) and ethylene-tetrafluoroethylene copolymer (ETFE).
[0010]
The deaeration element (3) is fixed in the vacuum chamber (2) via the joining member (5).
The deaeration element (3) and the joining member (5) are fitted to the fitting part (51) via the fitting piece (6) such as a ferrule with the joining pieces (10) at both ends of the deaeration element (3). Then, the cap nut (7) is connected and fixed by screwing into the male screw portion (52), and the joining member (5) and the vacuum chamber (2) screw the nut (8) into the male screw portion (55). This is fixed by sandwiching the upper wall of the vacuum chamber (2) through the O-ring with the flange (53) and the nut (8).
A joint (9) for connecting a tube (not shown) for feeding the processing liquid into the deaerator (1) is screwed to the joining member (5), and between the joint (9) and the joining member (5). As shown in the figure, an O-ring is interposed. At this time, in order to prevent the joining member (5) from bulging, a tubular bulging prevention tool (4) is fitted to the outer periphery of the joining member (5).
[0011]
In the deaeration device according to the present invention, the degassing element (3) and the joining member (5) and the connection and fixing method between the joining member (5) and the vacuum chamber (2) are not limited to the illustrated examples. Any method can be appropriately employed as long as the connection portion is excellent in airtightness and the deaeration element (3) can be securely fixed in the vacuum chamber (2).
[0012]
Examples of various methods of using the deaeration device (1) having the above basic configuration are shown in FIGS . 2 and 3 as schematic diagrams showing embodiments of the present invention .
2 and 3 , the degassing element (3) is shown in a U shape, and the vacuum chamber (2) is shown in a square shape. An arrow (triangle mark) indicates the flow direction of the processing liquid.
FIG. 2 is an example in which the liquid inlets of two degassing elements are connected in parallel and the liquid outlets are not connected to each other, and are independent of each other. In this case, the treatment liquid can be taken out in two places.
[0013]
FIG. 3 shows a case where the liquid outlets of the three deaeration elements are provided independently without being connected, and the liquid inlet is provided in parallel with a single one. The processing liquid put in from the liquid inlet can be taken out in two places, and another type of processing liquid can be simultaneously deaerated.
[0014]
As described above, according to the deaeration device according to the present invention, since two or more deaeration elements are arranged in one vacuum chamber, one unit can be obtained by changing the connection form of each deaeration element. This degassing apparatus can flexibly cope with various processing liquid amounts, types of processing liquids, properties of processing liquids, and processing liquid supply methods.
In the above example, the number of deaeration elements is two or three. However, in the present invention, the number of deaeration elements is not limited and may be any number as long as it is two or more. Further, the connection method between the deaeration elements is not limited at all, and various types of joints such as a tube for piping, L type, and T type may be appropriately used according to the connection method.
[0015]
【Example】
Hereinafter, the effect of the deaeration device and the deaeration method concerning the present invention is clarified more by showing the example of the deaeration device and the deaeration method concerning the present invention. In addition, this invention is not limited at all by this Example.
Example 1
Bundled 130 fluororesin gas permeable tubes with an inner diameter of 0.9 mm, outer diameter of 1.2 mm, and length of 3.5 m, and both ends were heat-bonded at 380 ° C. via PFA powder and joined together 2 were prepared, and each was used as a first deaeration element and a second deaeration element, and these deaeration elements were attached to a vacuum chamber to obtain a deaeration device as shown in FIG.
When the treatment liquid (pure water) was supplied to the deaeration device by the method shown in a below using the obtained deaeration device , the deaeration treatment could be performed satisfactorily.
a. The inlet side of the deaeration element was connected in parallel using piping tubes and joints L type and T type, while the processing liquid was supplied alone without connecting the outlet side. (Connection form in FIG. 2)
[0016]
(Example 2)
In Example 1 described above, the number of degassing elements was increased to three to constitute a degassing device, and when the treatment liquid (pure water) was supplied to the degassing device by the method shown in b below, the degassing treatment was performed satisfactorily. Was able to do.
b. Two pipes on the inlet side of the deaeration element were connected in parallel using piping tubes and joints L type and T type, and the remaining one was used alone, while the outlet side was not connected and the processing liquid was supplied alone. . (Connection form in FIG. 3)
[0017]
【The invention's effect】
As described above , according to the present invention , it is possible to deal with various amounts of processing liquid with a single deaeration device, and it is possible to deaerate a plurality of types of processing liquids at the same time. In addition, it is possible to flexibly cope with the difference in properties of the processing liquid, and further, it has an excellent effect that it can be applied to various supply methods and extraction methods of the processing liquid.
[Brief description of the drawings]
FIG. 1 is a cross-sectional view showing a reference example for explaining a basic configuration common to deaerators according to the present invention.
FIG. 2 is a schematic view showing an example of how to use the deaeration device according to the present invention.
FIG. 3 is a schematic view showing an example of how to use the deaeration device according to the present invention.
FIG. 4 is a cross-sectional view of an embodiment of a conventional deaeration device.
FIG. 5 is a cross-sectional view of an embodiment of a conventional deaeration device.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Deaeration apparatus 2 Vacuum chamber 3 Deaeration element 5 Joining member 9 Joint

Claims (4)

A deaeration device in which two or more deaeration elements comprising one or two or more gas permeable tubes are provided in one vacuum chamber, each of which is provided with a joining member having joints connected to both ends. The degassing apparatus is characterized in that the liquid inlets of two or more degassing elements are connected in parallel, and the liquid outlets are not connected to each other independently . A deaeration device in which two or more deaeration elements comprising one or two or more gas permeable tubes are provided in one vacuum chamber, each of which is provided with a joining member having joints connected to both ends. The liquid outlets of three or more deaeration elements are provided independently without being connected to each other, and the liquid inlet is provided in parallel with a single one. Deaeration device to do. The degassing apparatus according to claim 1 or 2, wherein the processing liquid supplied to each degassing element is the same. A deaeration method using the deaeration device according to claim 1 or 2, wherein the same treatment liquid is supplied to each deaeration element to perform the deaeration process.

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