JP3835584B2 - Electronic component equipment - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an electronic component device obtained by bonding and fixing a semiconductor chip to a mounting substrate with an adhesive by, for example, a flip chip mounting method and electrically connecting both electrodes.
[0002]
[Prior art]
In the field of semiconductor mounting, flip chip mounting, in which an IC chip is directly mounted on a printed circuit board or a flexible wiring board, has attracted attention as a new mounting form corresponding to cost reduction and high precision. As the flip chip mounting method, there are known a method in which solder bumps are provided on the terminals of the chip and solder connection is made, and a method in which electrical connection is made through a conductive adhesive. In these methods, there is a problem that when the stress based on the difference in thermal expansion coefficient between the chip to be connected and the substrate is exposed to various environments, it is generated at the connection interface and connection reliability is lowered. For this reason, a method of injecting an epoxy resin-based underfill material into the gap between the chip and the substrate is generally studied for the purpose of alleviating the stress at the connection interface. However, the underfill injection process complicates the process and is disadvantageous in terms of productivity and cost. Recently, in order to solve such problems, an adhesive or an anisotropic conductive adhesive having an anisotropic conductive property and a sealing function is interposed between the chip and the substrate in advance, and the chip and the substrate are flipped by heating and pressing. A chip mounting method has attracted attention from the viewpoint of process simplicity.
[0003]
[Problems to be solved by the invention]
However, when the chip is directly mounted on the substrate via an adhesive, the terminal electrode of the substrate sinks into the substrate when connected by heating and pressurizing, and the bottom of the outermost terminal electrode of the substrate and the inner layer circuit of the substrate As a result, there is a problem that insulation failure occurs in a bias test under high temperature and high humidity.
The present invention provides an electronic component device such as a semiconductor device having excellent connection reliability between an electronic component such as a semiconductor chip and a mounting substrate.
[0004]
[Means for Solving the Problems]
The electronic component device according to the present invention includes an electronic component having a first connection terminal and a mounting substrate having a second connection terminal, the first connection terminal and the second connection terminal being opposed to each other, The elastic modulus at 40 ° C. after adhesion containing at least an epoxy resin, an acrylic rubber, a latent curing agent and conductive particles is 50 to 2,000 MPa between the first connection terminal and the second connection terminal arranged to face each other. An electronic component device in which an anisotropic conductive adhesive is interposed and heated and pressed to electrically connect the first connection terminal and the second connection terminal that face each other. Storage elastic modulus between a plurality of wiring layers including an outer wiring layer, and a conductor hole that electrically connects the wiring layers, and between the outermost wiring layer and the wiring layer closest to the outermost wiring layer Is 10 to 2,000 MPa at 25 ° C. and 1 at 170 ° C. Adhesive 100 parts by volume of the inorganic filler over the adhesive used in the is insulating layer 400MPa multilayer wiring board in which the insulating layer filled 1-50 parts by volume (the sum of the resin component and the inorganic filler component) is formed It is characterized by being. An anisotropic conductive adhesive that contains at least an epoxy resin, an acrylic rubber, and a latent curing agent is used. The acrylic rubber contains a glycidyl ether group in its molecule. Is preferred. The adhesive may contain 0.1 to 20% by volume of conductive particles. A semiconductor chip is used as the electronic component. Mounting substrate that has a smaller thermal expansion coefficient than the electronic component can be used.
[0005]
DETAILED DESCRIPTION OF THE INVENTION
In the present invention, chip parts such as active elements such as semiconductor chips, transistors, diodes, and thyristors, and passive elements such as capacitors, resistors, and coils are used as the electronic parts.
By heating and pressing the electronic component on the mounting substrate, the connection terminals arranged opposite to each other are electrically connected by direct contact or through conductive particles of an anisotropic conductive adhesive.
On the electrode pad of the semiconductor chip or mounting substrate, the tip of a bump or gold wire formed by plating is melted with a torch or the like to form a gold ball, and after this ball is pressed onto the electrode pad, the wire is cut Protruding electrodes such as wire bumps obtained in this way can be provided and used as connection terminals.
[0006]
A plurality of wiring layers including an outermost wiring layer as a mounting board, and a conductor hole for electrically connecting the wiring layers, and between the outermost wiring layer and a wiring layer closest to the outermost wiring layer In addition, a multilayer wiring board in which an insulating layer in which an inorganic filler is filled in an adhesive having a storage elastic modulus of 10 to 2,000 MPa at 25 ° C. and 1 to 400 MPa at 170 ° C. is used.
The insulating layer in contact with the outermost wiring layer is 10 to 2,000 MPa at 25 ° C., and an inorganic filler is filled in an adhesive that is 1 to 400 MPa at 170 ° C.
Here, the elastic modulus refers to a storage elastic modulus measured by a dynamic viscoelasticity measuring device, and the measurement is performed by applying a tensile load to the cured adhesive, a frequency of 10 Hz, and a heating rate of 5 to 10 ° C. / It was performed in a temperature dependent mode measuring from -50 ° C to 300 ° C in minutes. Examples of the adhesive used for the insulating layer in contact with the outermost wiring layer include: (1) 18 to 40% by weight of acrylonitrile, (2) 2 to 6% by weight of glycidyl (meth) acrylate as a functional group monomer, and (3) ) An adhesive comprising an epoxy group-containing acrylic rubber having a Tg (glass transition point) of −10 ° C. or more and a weight average molecular weight of 100,000 or more, which is a copolymer comprising ethyl (meth) acrylate or butyl (meth) acrylate. Agents.
[0007]
The adhesive used for the insulating layer in contact with the outermost wiring layer contains 1 to 50 parts by volume of an inorganic filler with respect to 100 parts by volume of the adhesive (the sum of the resin component and the inorganic filler component). From the viewpoint of the effect of blending, if the blending amount is increased by 1 volume part or more, problems such as an increase in storage elastic modulus of the adhesive, a decrease in adhesiveness, and a decrease in electrical characteristics due to residual voids are caused. .
As inorganic fillers, aluminum hydroxide, magnesium hydroxide, calcium carbonate, magnesium carbonate, calcium silicate, magnesium silicate, calcium oxide, magnesium oxide, alumina powder, aluminum nitride powder, boron nitride powder, crystalline silica, amorphous And silica.
Moreover, an electrically insulating ceramic whisker can also be used as the inorganic filler, and it is preferable to blend 5 to 50 parts by volume with respect to 100 parts by volume of the adhesive (the sum of the resin component and the whisker component).
The electrically insulating ceramic whisker preferably has an average diameter of 0.3 to 3 μm and an average length of 5 times or more the average diameter. If the average diameter is less than 0.3 μm, crushing is likely to occur in the step of dispersing in the adhesive, and if it exceeds 3 μm, unevenness is likely to occur on the surface in the step of forming the adhesive film, which is not preferable.
Moreover, in order to ensure the insulation reliability between wiring, it is preferable that it is 100 micrometers or less.
Examples of the electrically insulating ceramic whisker include aluminum borate, wollastonite, potassium titanate, basic magnesium sulfate, silicon nitride, α-alumina and the like.
[0008]
As the multilayer wiring board of the mounting substrate, an interstitial via hole (hereinafter referred to as IVH) that connects only conductors between adjacent wiring layers or a belly via hole (hereinafter referred to as BVH) is preferable. . As a multilayer wiring board having IVH or BVH, there is a build-up multilayer wiring board.
This build-up multilayer wiring board can be manufactured by the following method. The through hole of the inner layer circuit board on which the plated through hole and inner layer circuit were formed was filled with a thermosetting resin so that the hole was completely blocked by a silk screen printing method, etc., cured by heating, and then protruded from the hole The resin foil is removed by polishing or the like, the conductor foil having the adhesive cured in the B-stage state is heated and pressurized, and the portion of the conductor foil where the interlayer connection hole is provided is removed by etching. The adhesive is removed, the inner wall of the interlayer connection hole is metalized by plating or the like, and an unnecessary portion of the conductor layer on the surface is etched to form a circuit. An adhesive film and a conductive foil may be used instead of the conductive foil having an adhesive. By this method, the insulating layer and the wiring layer can be formed one by one. If this circuit is formed as an inner circuit board, an insulating layer and a wiring layer can be formed one by one by the same method as described above. By repeating this, the required inner circuit board can be obtained. it can. And the multilayer wiring board which has a required circuit can be obtained using the conductor foil which has the said insulating layer for the outermost layer.
In the present invention, the portion of the insulating layer in which the interlayer connection hole is provided can be removed by laser light irradiation.
[0009]
As the adhesive used in the present invention, a mixture of an epoxy resin and an imidazole-based, hydrazide-based, boron trifluoride-amine complex, sulfonium salt, amine imide, polyamine salt, dicyandiamide or the like is used, and a circuit member In order to relieve stress based on the difference in thermal expansion coefficient, an adhesive resin composition having an elastic modulus at 40 ° C. of 50 to 2000 MPa after bonding is preferable. For example, as an adhesive resin composition capable of obtaining good fluidity and high connection reliability at the time of connection, epoxy resin and imidazole, hydrazide, boron trifluoride-amine complex, sulfonium salt, amine imide, polyamine salt, dicyandiamide The adhesive which mix | blended acrylic rubber so that the elasticity modulus in 40 degreeC after adhesion | attachment might be set to 50-2000 MPa to the mixture of latent curing agents, such as. The elastic modulus of the cured adhesive film can be measured by using, for example, Rheospectra DVE-4 manufactured by Rheology Co., Ltd. (pull mode, temperature rising at 10 Hz, 5 ° C./min).
[0010]
Examples of the acrylic rubber used in the adhesive of the present invention include a polymer or copolymer having at least one of acrylic acid, acrylic acid ester, methacrylic acid ester or acrylonitrile as a monomer component, and particularly contains a glycidyl ether group. A copolymer acrylic rubber containing glycidyl acrylate or glycidyl methacrylate is preferably used.
The molecular weight of these acrylic rubbers is preferably 200,000 or more from the viewpoint of increasing the cohesive strength of the adhesive. If the blending amount of acrylic rubber in the adhesive is 15 wt% or less, the elastic modulus at 40 ° C. after bonding exceeds 2000 MPa, and if it exceeds 40 wt%, the elastic modulus can be reduced, but melting at the time of connection Since the viscosity increases and the exclusion of the molten adhesive between the connection electrode boundaries or at the interface between the connection electrode and the conductive particles is reduced, it becomes impossible to ensure electrical continuity between the connection electrodes or between the connection electrodes and the conductive particles. For this reason, as an acrylic compounding quantity, 15-40 wt% is preferable. These acrylic rubbers blended in the adhesive are attributed to the rubber component.
Since the peak temperature of dielectric loss tangent is in the vicinity of 40 to 60 ° C., the elastic modulus of the adhesive can be reduced. In addition, a thermoplastic resin such as a phenoxy resin can be blended in the adhesive in order to make film forming easier. In particular, the phenoxy resin is preferable because it has a similar structure to the epoxy resin and has characteristics such as excellent compatibility with the epoxy resin and excellent adhesion. For film formation, an adhesive composition composed of at least an epoxy resin, an acrylic rubber, a phenoxy resin, and a latent curing agent and a conductive particle are liquefied by dissolving or dispersing in an organic solvent, and applied onto a peelable substrate, and then a curing agent. This is done by removing the solvent below the activation temperature. The solvent used at this time is preferably an aromatic hydrocarbon-based and oxygen-containing mixed solvent because the solubility of the material is improved.
[0012]
In the adhesive of the present invention, an inorganic filler can be blended for the purpose of reducing the thermal expansion coefficient. The inorganic filler is not particularly limited, and examples thereof include powders such as fused silica, crystalline silica, calcium silicate, alumina, and calcium carbonate. The blending amount of the inorganic filler is 10 to 90% by weight with respect to the adhesive resin composition, and the larger the blending amount, the more effective it is to reduce the thermal expansion coefficient. Since the conduction | electrical_connection defect based on the exclusion property reduction of the adhesive agent in a part generate | occur | produces, 20 to 60 weight% is preferable. Further, the average particle diameter is preferably set to be not more than micron for the purpose of preventing poor conduction at the connecting portion. In addition, it is desirable to use a spherical filler for the purpose of preventing a decrease in resin fluidity at the time of connection and damage to the passivation film of the chip.
[0013]
In the adhesive of the present invention, conductive particles can be dispersed for the purpose of positively imparting anisotropic conductivity in order to absorb the height variation of the bumps of the chip and the circuit electrodes. In the present invention, the conductive particles are, for example, metal particles such as Au, Ni, Ag, Cu, W and solder or metal particles formed by plating or vapor deposition of a thin film such as gold or palladium on the surface of these metal particles, such as polystyrene. Conductive particles in which a polymer spherical core material is provided with a conductive layer such as Ni, Cu, Au, or solder can be used. The particle size needs to be smaller than the minimum distance between the electrodes on the substrate, and when there is a variation in the height of the electrodes, it is preferably larger than the variation in height, and preferably larger than the average particle size of the inorganic filler. 1 μm to 10 μm is preferable. The amount of conductive particles dispersed in the adhesive is 0.1 to 30% by volume, preferably 0.1 to 20% by volume.
[0014]
【Example】
A chip (10 mm × 10 mm, thickness: 0.5 mm) with wire bumps (diameter: 50 μmΦ, space 30 μm, height: 30 μm, number of bumps 288) produced from gold wire was used as a semiconductor chip.
The surface copper foil of MCL-E-679 (trade name, manufactured by Hitachi Chemical Co., Ltd.), which is a glass cloth / epoxy resin double-sided copper-clad laminate, is subjected to inner layer circuit processing and inner layer adhesion treatment by the existing subtract method. Next, an insulating layer (film thickness) filled with 30% by volume of an inorganic filler in an epoxy adhesive (having a storage elastic modulus of 500 MPa at 25 ° C. and 100 MPa at 170 ° C.) having a drilled hole on the inner layer circuit surface. : 50 microns) at 170 ° C., 40 kgf / cm ² , press lamination adhesion was performed for 60 minutes, through-hole drilling, electroless copper plating, outer layer circuit processing by subtracting method and electroless nickel / gold plating were performed to obtain a multilayer substrate.
An anisotropic conductive film (thickness: 50 microns) made of an epoxy-based adhesive film in which nickel particles (diameter: 5 μm) are dispersed at 2 vol% is affixed to a mounting substrate at 80 ° C. and 10 kgf / cm ^2. The mounting substrate (thickness: 0.8 mm) was aligned. Next, the main connection was performed by heating and pressing from above the chip under the conditions of 180 ° C., 30 g / bump, and 20 seconds. After this connection, the electrodes on the outermost wiring layer of the multilayer substrate electrically connected to the bumps of the semiconductor chip are embedded in a 5-micron insulating layer compared to before connection, and are short-circuited with the substrate inner layer circuit. There was no generation even under a bias (100 V) under a high temperature and high humidity test (85 ° C./85% RH, 1000 h). In addition, the connection resistance after this connection is 6 mΩ maximum per bump, 2 mΩ on average, and the insulation resistance is 10 ⁸ Ω or more. These values are the thermal shock test at −55 to 125 ° C., 1000 cycle treatment, PCT test (121 ° C., 2 atm) No change even after 10 seconds of immersion in a solder bath at 260 ° C. for 200 hours, showing good connection reliability.
[0015]
【The invention's effect】
According to the present invention, an electronic component device such as a semiconductor device having excellent connection reliability between an electronic component such as a semiconductor chip and a mounting substrate can be obtained.
According to the present invention, since the outermost insulating layer of the mounting substrate is made of the low elastic modulus adhesive and the inorganic filler, the low elastic modulus adhesive after the mounting is used at the interface based on the difference in thermal expansion coefficient between the chip and the substrate. In addition to relieving the stress of the circuit board, the inorganic filler dispersed in the adhesive can suppress the substrate electrode from being largely embedded in the substrate after the connection, thereby greatly improving the connection reliability of the circuit board.

Claims (1)

An electronic component having a first connection terminal;
A mounting substrate having a second connection terminal, the first connection terminal and the second connection terminal are arranged to face each other,
The elastic modulus at 40 ° C. after adhesion containing at least epoxy resin, acrylic rubber, latent curing agent and conductive particles is 50 to 2,000 MPa between the first connection terminal and the second connection terminal arranged opposite to each other. It is an electronic component device in which an anisotropic conductive adhesive is interposed and heated and pressed to electrically connect the first connection terminal and the second connection terminal arranged opposite to each other,
The mounting substrate includes a plurality of wiring layers including an outermost wiring layer, and a conductor hole that electrically connects the wiring layers, and the outermost wiring layer and a wiring layer closest to the outermost wiring layer; a 10~2,000MPa storage modulus at 25 ° C. during the inorganic filler over the adhesive 100 parts by volume (of the resin component and the inorganic filler component in the adhesive used for the insulating layer is 1~400MPa at 170 ° C. The electronic component device is a multilayer wiring board on which an insulating layer filled with 1 to 50 parts by volume is formed.