JP3814465B2 - Inkjet recording system - Google Patents

Description

ここで、磁束Ｂは、コイルの磁心の透磁率をμａ、磁界をＨとすると、
【００６３】
【数３】

となる。ここで、ｚは、外部共振回路のコイルと球状シリコンに作り込んだコイルとの距離を示している。
【００６４】
▲２▼式の相互インダクタンス：Ｍは、
【００６５】
【数４】

となる。ここで、μ_oは、真空の透磁率である。
【００６６】
そして、球状シリコンに作り込んだ発振回路のインピーダンス：Ｚは、
【００６７】
【数５】
Ｚ（ω）＝Ｒ＋ｊ｛ωＬ−（１／ωＣ）｝ ▲５▼
と表され、外部共振回路のインピーダンス：Ｚａは、
【００６８】
【数６】
Ｚａ（ω）＝Ｒａ＋ｊωＬａ−｛ω²Ｍ²／Ｚ（ω）｝ ▲６▼
となる．ここで、Ｊは、磁化を表している。そして、この外部共振回路が共振（電流値：Ｉａが最大になるとき）した時のインピーダンス：Ｚｏは、
【００６９】
【数７】
Ｚｏ（ωo）＝Ｒａ＋ｊＬａωo−（ω_o ²Ｍ²／R） ▲７▼
となり、この共振回路の位相の遅れ：φは、
【００７０】
【数８】
tanφ＝｛ｊＬａωo−（ω_o ²Ｍ²／R）｝／Ｒ ▲８▼
となる。
【００７１】
そして、この外部共振回路の共振周波数：ｆoは、
【００７２】
【数９】
ｆo＝１／２π（ＬＣ）^1/2 ▲９▼
で求められる。
【００７３】
上記のような関係から、球状シリコンに作り込んだ発振回路１０２のインピーダンスが、インクタンク内のインクの変化に応じて可変すると、外部共振回路１０１の周波数を変化させて、外部共振回路１０１のインピーダンスの振幅および位相差に、上記のインクの変化が表れてくる。さらには、この位相差や振幅には、インク残量（即ち、ｚの変化）も含まれている。
【００７４】
例えば、外部共振回路１０１の共振周波数を可変することで、球状シリコンに作り込んだ発振回路１０２からの出力（インピーダンス）が、周囲の環境変化に応じて、変化するので、この周波数依存性を検出することで、インクの有無やインク残量を検出することが出来る。
【００７５】
したがって、球状シリコンに作り込む発振回路は、電力を発生させるエネルギー発生手段としてのみならず、その発振回路と外部共振回路との関係で、タンク内のインクの変化を検知する手段の一部としても使用することが可能である。
【００７６】
次に、本発明の立体形半導体素子の製造方法について説明する。図７は、本発明の立体形半導体素子の製造方法の一例を説明するための工程図であり、各工程を球状シリコンの中心を通る断面で示している。また、ここでは、球状シリコンの重心を中心より下部になるように作成し、且つ、球面体内部の上部を空洞にして、更に、その空洞部を気密状態に保持する製造方法を例に挙げる。
【００７７】
図７（ａ）に示す球状シリコンに対し、その全表面上に図７（ｂ）に示すように熱酸化のＳｉＯ₂膜２０２を形成した後、図７（ｃ）に示すようにＳｉＯ₂膜の一部に開口２０３を形成するため、フォトリソグラフィプロセスを用いて、パターニングをする。
【００７８】
そして、図７（ｄ）に示すように、開口２０３を通じてのＫＯＨ溶液を用いた異方性エッチングにより、上部のシリコン部分のみ除去し、空洞部２０４を形成する。その後、図７（ｅ）に示すように、ＬＰＣＶＤ法を用いて、立体形素子の内外表面にＳｉＮ膜２０５を形成する。
【００７９】
更に、図７（ｆ）に示すように、メタルＣＶＤ法を用いて、立体形素子の全表面上にＣｕ膜２０６を形成する。そして、図７（ｇ）に示すように、周知のフォトリソグラフィプロセスを用いてＣｕ膜２０６をパターニングし、発振回路の一部である巻き数Ｎの導電体コイルＬを形成する。その後、導電体コイルＬを形成した立体形半導体素子を真空装置から大気中に出し、上部の開口２０３を樹脂や栓などの封止部材２０７で塞ぎ、球面体内部の空洞部２０４を密閉状態にする。このように製造すれば、シリコンからなる立体形半導体素子自体に浮力を持たせることが出来る。
【００８０】
また、このような浮遊型の立体形半導体素子に形成しておくコイルＬ以外の駆動回路素子はＮ−ＭＯＳ回路を用いている。図８に、Ｎ−ＭＯＳ回路を縦断するように切断した模式的断面図を示す。
【００８１】
図８によれば、Ｐ導電体のＳｉ基板４０１に、一般的なＭｏｓプロセスを用いたイオンプランテーション等の不純物導入および拡散により、Ｎ型ウェル領域４０２にＰ−Ｍｏｓ４５０が構成され、Ｐ型ウェル領域４０３にＮ−Ｍｏｓ４５１が構成されている。Ｐ−Ｍｏｓ４５０およびＮ−Ｍｏｓ４５１は、それぞれ厚さ数百オングストロームのゲート絶縁膜４０８を介して、４０００オングストローム以上５０００オングストローム以下の厚さにＣＶＤ法で堆積したｐｏｌｙ−Ｓｉによるゲート配線４１５、およびＮ型あるいはＰ型の不純物導入をしたソース領域４０５、ドレイン領域４０６等で構成され、それらＰ−Ｍｏｓ４５０とＮ−Ｍｏｓ４５１によりＣ−Ｍｏｓロジックが構成されている。
【００８２】
素子駆動用のＮ−Ｍｏｓトランジスタ３０１は、やはり不純物導入および拡散等の工程により、Ｐ型ウェル基板４０２上のドレイン領域４１１、ソース領域４１２およびゲート配線４１３等で構成されている。
【００８３】
ここで、素子駆動ドライバとしてＮ−Ｍｏｓトランジスタ３０１を使うと、１つのトランジスタを構成するドレインゲート間の距離Ｌは、最小値で約１０μｍとなる。その１０μｍの内訳の１つは、ソースとドレインのコンタクト４１７の幅であり、それらの幅分は２×２μｍであるが、実際は、その半分が隣のトランジスタとの兼用となるため、その１／２の２μｍである。内訳の他は、コンタクト４１７とゲート４１３の距離分の２×２μｍの４μｍと、ゲート４１３の幅分の４μｍであり、合計１０μｍとなる。
【００８４】
各素子間には、５０００オングストローム以上１００００オングストローム以下の厚さのフィールド酸化により酸化膜分離領域４５３が形成され、素子分離されている。このフィールド酸化膜は、一層目の蓄熱層４１４として作用する。
【００８５】
各素子が形成された後、層間絶縁膜４１６が約７０００オングストロームの厚さにＣＶＤ法によるＰＳＧ、ＢＰＳＧ膜等で堆積され、熱処理により平坦化処理等をされてから、コンタクトホールを介して、第１の配線層となるＡｌ電極４１７により配線が行なわれている。その後、プラズマＣＶＤ法によるＳｉＯ₂膜等の層間絶縁膜４１８を１００００オングストローム以上１５０００オングストローム以下の厚さに堆積し、更にスルーホールを形成した。
【００８６】
そして、本発明の受信兼エネルギー変換手段としての発振回路や情報入手手段としてのセンサ部などとの接続は上記スルーホールを介して行なう。
【００８７】
また、本例の浮遊型の立体形半導体素子を配したインクタンクがどのような状態においても、上述のような製法で球状シリコンに作り込まれた発振回路と、図６に示した外部共振回路との間で、安定した磁束（磁界）が働いている必要がある。しかし、インクなど液体中に浮遊した場合、外部振動により液面が振動をすることがある。そのような場合でも、液体中で安定した状態を保持するために、本例では、浮遊型の立体形半導体素子の重心を決定している。
【００８８】
図９で示しているように、液体中に本例の立体形半導体素子２１０を浮遊させた場合、図９（ａ）のように、釣り合いの状態にあるためには、
（１）浮力Ｆ＝物体の重量Ｗ
（２）浮力の作用線と重量の作用線（重心Ｇを通る線）が一致
という関係が成り立っていることが必要である。
【００８９】
そして、図９（ｂ）のように、外力により液体が振動して、立体形半導体素子２１０が、釣り合いの状態から少し傾いた時、浮力の中心が移動し、浮力と重量とで偶力となる。
【００９０】
ここで、釣り合いの状態にあるときの重量の作用線（図９（ｂ）中の一点鎖線）と、傾いたときの浮力の作用線（図９（ｂ）中の実線）との交点をメタセンタと呼び、メタセンタと重心との距離ｈをメタセンタの高さと呼ばれている。
【００９１】
本例のように、立体形半導体素子２１０のメタセンタが重心より高い位置にあるので、偶力（復元力）は元の釣り合いの位置に戻そうとする向きに作用する。この復元力：Ｔは、
【００９２】
【数１０】

で表される。ここで、立体形半導体素子２１０が排除した液体の体積をＶと、立体形半導体素子２１０の比重量をρｇとしている。
【００９３】
そこで、この復元力を正にするためには、ｈ＞０となることが必要十分条件である。
【００９４】
そして、図９（ｂ）から、
【００９５】
【数１１】

となる。ここで、ＩはＯ軸回りの慣性モーメントである。よって、
【００９６】
【数１２】

となることが、立体形半導体素子２１０が、インク中で安定して浮遊し、外部共振回路からの誘電起電力の供給や、素子外部の通信手段との双方向通信を行うための必要条件となる。
【００９７】
この時の外部通信手段との双方向通信方法としては、マイクロ波帯周波数を用いる無線ＬＡＮシステムや、準ミリ波・ミリ波帯周波数を利用する無線アクセスシステムを適用することが出来る。
【００９８】
ここで、無線ＬＡＮシステムによる送受信の概要を説明する。下記では、立体形半導体素子から記録装置へのデータ送信について述べる。尚、逆に記録装置側から立体形半導体素子へのデータ送信を行う場合は、それぞれ側にデータＩＤを配しており、それによって、識別される。
【００９９】
送信側の立体形半導体素子には、ライン監視部、データ・ハンドリング部、アクノリッジ・チェック部、エラー処理部を有し、受信側の記録装置には、データ・ハンドリング部、アクノリッジ部、エラー処理部、そして、表示部などが付設されている。
【０１００】
送信側の立体形半導体素子でのフローチャートを図１０に示す。データの送信を行う場合、決められた送信プロコトルにより、初期設定を行った後、受信側のアドレスを設定し、データの送信を行う。送信中に信号の衝突が発生したり、あるいは、指定した受信側の装置からアクノリッジが返って来なかったときは再送を行う。動作中は、ラインの状態やアクノリッジの有無について、受信側の記録装置などに設けた表示部上に表示し、ユーザに的確な判断をうながす。
【０１０１】
受信側の記録装置でのフローチャートを図１１に示す。この受信側では、常にライン監視を行い、自分のアドレスを確認したら、ラインからデータを取り込み、メイン・メモリ上のバッファに蓄積していく。受信中に、１６バイト毎のブロック・マークが確認出来なかったり、あるいは受信終了後の誤り検出処理でチェックサムが一致しなかった場合は、受信エラーとして、受信を中断し、再度ラインを監視し、ヘッダの到着を待つ。エラー無く受信出来た場合には、表示部上に受信内容を表示する。
【０１０２】
以上のような実施例の立体形半導体素子は、着脱可能に装着されたインクタンクに収容されたインクをインクジェット記録ヘッドに供給し、その記録ヘッドから噴射するインク滴で記録用紙に印字するインクジェットプリンタに関してのインク情報およびタンク情報を検知し、該インクジェットプリンタに該情報を伝送して、最適な方法でプリンタを制御したり、タンク内の状態を最適維持する制御をするインクジェットプリンタに好ましく適用される。
【０１０３】
本発明の立体形半導体素子を適用できるインクタンクの構成例を図１２〜図１５に示す。図１２に示すインクタンク５０１は、インクを収納した可撓性のインク袋５０２を筐体５０３内に配置し、筐体５０３に固定したゴム栓５０４で袋口５０２ａを閉じておき、インク導出用の中空針５０５をゴム栓５０４に突き刺して袋内に連通させることで、不図示のインクジェットヘッドへインク供給を行なうものである。このようなインクタンク５０１のインク袋５０２内に本発明の立体形半導体素子５０６を配置することができる。
【０１０４】
また、図１３に示すインクタンク５１１は、インク５１３を収容した筐体５１２のインク供給口５１４に、インクを記録紙Ｓに向けて吐出し記録を行なうインクジェットヘッド５１５を取付けたものである。このようなタンク５１１内のインク５１３中に本発明の立体形半導体素子５１６を配置することができる。
【０１０５】
また、図１４に示すインクタンク５２１は、インク５２２を収容する完全密閉状態の第１室と、負圧発生部材５２３を収納する大気連通状態の第２室と、タンク最下部で第１室と第２室を連通させる連通路５２４とを備えたものである。第２室側のインク供給口５２５よりインクが消費されると、第２室側より大気が第１室へ入ることに替わって第１室のインク５２２が第２室に導出される。このような構成のタンク５２１の第１室に本発明の立体形半導体素子５２６を配し、インクに関する情報をやり取りしてもよい。
【０１０６】
また、図１５に示すインクタンク５３１は、インクを保持した多孔質部材５３２を収納し、収納インクを記録のために使用するインクジェットヘッド５３３を取付けたものである。このような構成のタンク５３１においても、インクタンク側に本発明の立体形半導体素子５３４を配し、インクに関する情報をやり取りしてもよい。
【０１０７】
次に、本発明の立体形半導体素子を備えたインクタンクを搭載するインクジェット記録装置の構成例を図１６に概略図で示す。図１６に示されるインクジェット記録装置６００に搭載されたヘッドカートリッジ６０１は、印字記録のためにインクを吐出する液体吐出ヘッドと、その液体吐出ヘッドに供給される液体を保持する図１２〜図１５に示したような構造からなる複数色のインクタンクとを有するものである。また、各色のインクタンク内にそれぞれ配された立体形半導体素子と電磁波で通信を行なう通信回路（図１の符号１５０）が記録装置６００内に設置されている。通信回路の有する共振回路（起電力となるエネルギーの供給部）１０１はキャリッジ７に設けられていて、各色の立体形半導体素子に電磁波の信号を送信可能となっている。そして、キャリッジ７にヘッドカートリッジ１００が装着された状態で、タンク内の素子の発振回路３２の導電体コイルＬとキャリッジ側の外部共振回路３１のコイルＬａとが隣接するように設計されている。
【０１０８】
ヘッドカートリッジ６０１は、図１６に示すように、駆動モータ６０２の正逆回転に連動して駆動力伝達ギヤ６０３および６０４を介して回転するリードスクリュー６０５の螺旋溝６０６に対して係合するキャリッジ６０７上に搭載されている。駆動モータ６０２の動力によってヘッドカートリッジ６０１がキャリッジ６０７ともとにガイド６０８に沿って矢印ａおよびｂの方向に往復移動される。インクジェット記録装置６００には、ヘッドカートリッジ６０１から吐出されたインクなどの液体を受ける被記録媒体としてのプリント用紙Ｐを搬送する被記録媒体搬送手段（不図示）が備えられている。その被記録媒体搬送手段によってプラテン６０９上を搬送されるプリント用紙Ｐの紙押さえ板６１０は、キャリッジ６０７の移動方向にわたってプリント用紙Ｐをプラテン６０９に対して押圧する。
【０１０９】
リードスクリュー６０５の一端の近傍には、フォトカプラ６１１および６１２が配設されている。フォトカプラ６１１および６１２は、キャリッジ６０７のレバー６０７ａの、フォトカプラ６１１および６１２の領域での存在を確認して駆動モータ６０２の回転方向の切り換えなどを行うためのホームポジション検知手段である。プラテン６０９の一端の近傍には、ヘッドカートリッジ６０１の吐出口のある前面を覆うキャップ部材６１４を支持する支持部材６１３が備えられている。また、ヘッドカートリッジ６０１から空吐出などされてキャップ部材６１４の内部に溜まったインクを吸引するインク吸引手段６１５が備えられている。このインク吸引手段６１５によりキャップ部材６１４の開口部を介してヘッドカートリッジ６０１の吸引回復が行われる。
【０１１０】
インクジェット記録装置６００には本体支持体６１９が備えられている。この本体支持体６１９には移動部材６１８が、前後方向、すなわちキャリッジ６０７の移動方向に対して直角な方向に移動可能に支持されている。移動部材６１８には、クリーニングブレード６１７が取り付けられている。クリーニングブレード６１７はこの形態に限らず、他の形態の公知のクリーニングブレードであってもよい。さらに、インク吸引手段６１５による吸引回復操作にあたって吸引を開始するためのレバー６２０が備えられており、レバー６２０は、キャリッジ６０７と係合するカム６２１の移動に伴って移動し、駆動モータ６０２からの駆動力がクラッチ切り換えなどの公知の伝達手段で移動制御される。ヘッドカートリッジ６０１に設けられた発熱体に信号を付与したり、前述した各機構の駆動制御を司ったりするインクジェット記録制御部は記録装置本体側に設けられており、図１５では示されていない。
【０１１１】
上述した構成を有するインクジェット記録装置６００では、前記の被記録媒体搬送手段によりプラテン６０９上を搬送されるプリント用紙Ｐに対して、ヘッドカートリッジ６０１がプリント用紙Ｐの全幅にわたって往復移動する。この移動時に不図示の駆動信号供給手段からヘッドカートリッジ６０１に駆動信号が供給されると、この信号に応じて液体吐出ヘッド部から被記録媒体に対してインク（記録液体）が吐出され、記録が行われる。
【０１１２】
【発明の効果】
本発明の立体形半導体素子によれば、外部からの電磁波の信号が所定の応答条件を満たした場合のみ、周囲環境情報を入手して外部に伝達する通信機能を備えているため、各素子ごとの周囲環境情報が独立して得られる。また、３次元的に情報入手・伝達が可能なので、平板形の半導体素子を用いる場合と比べて、情報伝達の方向の制限も少ない。このため、周囲環境情報の入手、外部への伝達を効率良く行うことができる。
【０１１３】
また、このような立体形半導体素子をインクタンク内に少なくとも一つ配することで、インクタンク内に収容したインクに関する情報や、タンク内の圧力などをリアルタイムで外部の例えばインクジェット記録装置に伝達させることが可能である。これは、例えばインク消費に伴って時々刻々と変化するタンク内の負圧量を制御してインクジェット吐出を安定化する上で有利である。
【０１１４】
特に上記の立体形半導体素子を複数のインクタンク内にそれぞれ配置した場合、受信した電磁波の信号が所定の応答条件を満たしたときのみ、受信信号に応じた情報を入手して、蓄積情報との比較判断結果をその入手情報とともに外部へ伝達できるので、応答条件をタンク毎に変えれば、インクタンクごとの情報が独立して得られる。そのため、ユーザーは間違えることなく、たとえばインクが無くなったインクタンクを交換することができる。
【０１１５】
さらに、立体形半導体素子を動作させるための電力を非接触で供給する構成であるので、素子の起動のための電源をインクタンクに持たせたり、電力供給用の配線を素子に接続する必要がなく、外部との直接的な配線を施すことが困難な箇所に使用することができる。また、非接触で接近した位置で機能するため、一つの位置で複数色を扱うことも可能である。また印字中も伝達可能である。
【０１１６】
例えば、発振回路の導電体コイルを立体形半導体素子の外表面に巻き付けるように形成することにより、外部の共振回路との間で電磁誘導によって導電体コイルに電力を発生させて、素子に非接触で電力を供給することができる。
【０１１７】
この場合、素子の外表面にはコイルが巻き付けられているので、そのコイルのインダクタンスの大きさはインクタンク内の例えばインクの残量、インク濃度、インクｐＨに応じて変化する。したがって、発振回路はそのインダクタンスの変化に応じて発振周波数を変更するので、その変更される発振周波数の変化に基づいてインクタンク内のインクの残量などを検出することも可能である。
【０１１８】
そして、立体形半導体素子は、液中に浮遊するための空洞部を有するとともに、素子の重心が、当該素子の中心より下部に位置するように形成されているので、例えば、インクジェット記録装置に搭載された記録ヘッドおよびインクタンクが、シリアルに動作し、インクタンク内のインクが上下左右に揺動しても、安定してインクタンク内のインク中に浮遊しながら、インクに関する情報や、タンク内の圧力などを精度良く検出することができる。その上、素子に形成した上記の発振回路のコイルを、外部の共振回路のコイルに対して安定した位置で保持し、常に安定した双方向通信をも可能にする。
【図面の簡単な説明】
【図１】本発明の第１の実施の形態によるインクジェット記録装置を示す概略構成図である。
【図２】本発明の立体形半導体素子の受信兼エネルギー変換手段を構成するために表面に巻き付けられた導体コイルを示す図である。
【図３】本発明の立体形半導体素子の内部構成および外部とのやり取りを表したブロック構成図である。
【図４】本発明の第２の実施の形態によるインクジェット記録装置において装置本体側とタンク内の立体形半導体素子との間で電磁誘導によりディジタルＩＤをやり取りする概念の説明図である。
【図５】図４に示したディジタルＩＤのやり取りを用いて特定の色のタンク内情報を入手する動作フローを示す図である。
【図６】本発明の立体形半導体素子の構成要素であるエネルギー発生手段の電力発生原理を説明するための図である。
【図７】本発明の立体形半導体素子の製造方法の一例を説明するための工程図である。
【図８】本発明の立体形半導体素子に使用するＮ−ＭＯＳ回路を縦断するように切断した模式的断面図である。
【図９】図７で示す方法で製造した立体形半導体素子が液体中で安定した状態を保持するための条件を説明するための図である。
【図１０】本発明の実施例による立体形半導体素子と記録装置とで双方向通信を行なう場合の、送信側の立体形半導体素子でのフローチャートを示す図である。
【図１１】本発明の実施例による立体形半導体素子と記録装置とで双方向通信を行なう場合の、受信側の記録装置でのフローチャートを示す図である。
【図１２】本発明の立体形半導体素子を適用できるインクタンクの構成例を示す図である。
【図１３】本発明の立体形半導体素子を適用できるインクタンクの構成例を示す図である。
【図１４】本発明の立体形半導体素子を適用できるインクタンクの構成例を示す図である。
【図１５】本発明の立体形半導体素子を適用できるインクタンクの構成例を示す図である。
【図１６】本発明の立体形半導体素子を備えたインクタンクを搭載するインクジェット記録装置の構成例を示す概略図である。
【図１７】特開平６−１４３６０７号に記載のインク残量検知装置を示す図である。
【図１８】特登録２９４７２４５号に記載のインク残量検知装置を示す図である。
【符号の説明】
１１、２１０ 立体形半導体素子
１２ 電磁波
１３ 電力
１４ 受信兼エネルギー変換手段
１５ 情報入手手段
１６ 判断手段
１７ 情報蓄積手段
１８ 情報伝達手段
１０１ 外部共振回路
１０２ 発振回路
１５０ 通信回路
１５１ 誘導コイル
１５２ 周波数変調器
２０１ 球状シリコン
２０２ ＳｉＯ₂膜
２０３ 開口
２０４ 空洞部
２０５ ＳｉＮ膜
２０６ Ｃｕ膜
２０７ 封止部材[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a semiconductor device having a function of detecting surrounding environmental information, transmitting the information to the outside, and displaying the information.
[0002]
The present invention also provides a device for detecting information (for example, remaining ink amount) in each color ink tank and displaying and transmitting the information to the outside, an ink tank equipped with the device, and a facsimile / mountable ink tank equipped with the ink tank. The present invention relates to an ink jet recording apparatus such as a printer / copier.
[0003]
[Prior art]
2. Description of the Related Art Conventionally, in an ink jet recording apparatus in which an image is printed on a paper in a dot pattern by moving a carriage mounted with a recording head in a printing direction while ejecting ink from a plurality of ejection nozzles provided in the recording head. An ink tank containing recording ink is provided, and the ink in the ink tank is supplied to the recording head via the ink supply path. In view of this, various proposals have been made that an ink remaining amount detection device that detects the remaining amount of ink in the ink tank is put to practical use.
[0004]
For example, according to Japanese Patent Laid-Open No. 6-143607, two (one pair) electrodes 702 are disposed on the inner surface of the bottom side of an ink tank 701 filled with non-conductive ink as shown in FIG. In the ink in the ink tank 701, a levitation body 703 in which an electrode 704 located at a position facing the electrode 702 is levitated. The two electrodes 702 are respectively connected to a detection unit (not shown) that detects the conduction state of both electrodes. When the conduction state of both electrodes is detected, the ink remaining in the ink tank 701 indicating that there is no ink. It is disclosed that a quantity error is generated and the operation of the inkjet recording head 705 is stopped.
[0005]
According to Japanese Patent Registration No. 2947245, as shown in FIG. 18, the lower part is formed in a funnel shape toward the bottom surface, and two conductors 801 and 802 are provided on the bottom surface, and the specific gravity is smaller than that of the ink 803. An ink cartridge 805 for an ink jet printer having a configuration in which a metal ball 804 is installed is disclosed. In such a configuration, when the ink 803 is consumed and decreased, the liquid level of the ink 803 is lowered. Along with this, the position of the metal sphere 804 floating on the surface of the ink 803 is lowered. When the liquid level of the ink 803 is lowered to the position of the bottom surface of the ink cartridge housing, the metal ball 804 comes into contact with the two conductors 801 and 802. Then, since the conductors 801 and 802 become conductive, a current flows between them. If the flow is detected, the ink end state can be detected. If the ink end state is detected, information indicating the ink end state is notified to the user.
[0006]
[Problems to be solved by the invention]
A configuration for detecting the remaining amount of ink in the ink tank as represented by the above-described conventional publication is known. However, in such a configuration, it is necessary to dispose a detection electrode in the ink tank. In addition, since the ink remaining amount is detected based on the conductive state between the electrodes, there are restrictions on the ink to be used, such as metal ions not being used for the ink component.
[0007]
In the above configuration, only the remaining amount of ink can be detected, and other information in the tank cannot be known from the outside. For example, pressure information in the ink tank, changes in ink physical properties, etc. are important parameters for operating the inkjet head at a stable discharge amount, and the tank pressure that changes from time to time as the ink in the tank is consumed. There is a demand for a tank that can notify an external ink jet recording apparatus in real time and transmit changes in ink physical properties to the outside.
[0008]
Furthermore, there is a demand for an ink tank that not only unilaterally informs the detected information in the ink tank to the outside but also allows bidirectional exchange of information such as returning internal information in response to an external inquiry. .
[0009]
In developing the ink tank as described above, the present inventors paid attention to Ball Semiconductor Co., Ltd., which forms a semiconductor integrated circuit on a spherical surface of a silicon ball having a diameter of 1 mm. Since this ball semiconductor has a spherical shape, if it is housed in an ink tank, it is expected that the detection of ambient environment information and the exchange of bidirectional information with the outside can be performed much more efficiently than the flat type. . However, as a result of investigating those having such functions, it is necessary to develop an element itself having the above-mentioned functions only by the technology of connecting the ball semiconductors with electric wiring as in US Pat. No. 5,877,943. It was. In addition, there is a problem that must be cleared for this element to be effectively applicable to an ink tank. One of the problems is the supply of electric power for starting the elements accommodated in the tank. If the ink tank has a power source for starting the element, the tank will become large, or even if a power source is provided outside the tank, a means for connecting the power source and the element will be required, increasing the tank manufacturing cost, and the tank cartridge However, the device must be activated without contact from the outside.
[0010]
As a further problem, it is possible to float in the ink liquid level of the ink tank or in the ink that has sunk a certain distance from the liquid level. For example, it is desirable that the element is located on the ink surface to monitor the fluctuation of the negative pressure amount due to the ink consumption in the ink tank over time. However, since the element is made of silicon having a specific gravity higher than that of water, it floats on the ink. It is difficult to do.
[0011]
In particular, when applied to a color printer, a tank capable of acquiring and transmitting in-tank information in response to an external inquiry is required for each color tank.
[0012]
An object of the present invention is to detect a detailed information in each color ink tank in real time and to exchange information bidirectionally with an external ink jet recording apparatus, and an ink including the semiconductor element It is to provide a tank and an ink jet recording apparatus.
[0013]
[Means for Solving the Problems]
  In order to achieve the above object, the present invention includes a plurality of ink jet heads for performing color recording with an ink jet printer, and includes a plurality of ink tanks for storing ink ejected corresponding to each ink jet head. In an inkjet recording system that performs
  Each saidInk tankWithinThree-dimensional semiconductor elementArranged on the surface of the ink liquid or suspended in the liquidAnd inkjet printersWireless communication is performed by electromagnetic waves with the three-dimensional semiconductor element arranged in each ink tank outside the ink tank.Communication means are provided,
  Each of the three-dimensional semiconductor elements is the communication means.RadenMagnetic waveReceiving the signal in a contactless manner,Electromagnetic waveBy electromagnetic inductionConvert to electricityReceiver with coilEnergy conversion means;Information on at least the remaining amount of ink in the ink tank in which the solid-state semiconductor element is arranged that is activated by the electric power is obtained.Equipped with information acquisition means, information storage means, judgment means and information transmission meansAnd
  For each of the three-dimensional semiconductor elements, the resonance frequency is different by changing the number of turns or the length of the coil,
  By the communication means,A signal with a frequency equal to the resonance frequency of a given three-dimensional semiconductor deviceIs electromagnetic wavesSent byWhen,ConcernedSolid semiconductor elementChild reception cumEnergy conversion meansBy electromagnetic inductionTo powerconversiondo it, The information acquisition means, the information storage means, the judgment means and the information transmission means by the powerStart
  Corresponding to the predetermined resonance frequencySolid semiconductor elementOnlyThree-dimensional semiconductor element by means of information acquisitionAt least information on the remaining ink in the ink tankobtainAndThat informationSaidBy means of judgmentSaidWhen it is necessary to transmit information by comparing with the information stored in the information meansSaidTransmit to the outside of the ink tank by information transmission meansRukoIt is characterized by.
  The present invention also provides an ink jet recording system that includes a plurality of ink jet heads for performing color recording with an ink jet printer, and has a plurality of ink tanks for storing ink ejected corresponding to each ink jet head for recording. In
In each ink tank, the solid semiconductor element is arranged in a state of floating on the surface of the ink liquid or in the liquid, and the ink jet printer has a solid form arranged in the ink tank in addition to the ink tank. Communication means for performing wireless communication with semiconductor elements by electromagnetic waves is provided,
Each of the three-dimensional semiconductor elements receives a signal of electromagnetic waves from the communication means in a non-contact manner, and receives and energy conversion means having a coil for converting the electromagnetic waves into electric power by electromagnetic induction, and is activated by the electric power, An information acquisition means, information storage means, determination means, and information transmission means for obtaining at least information on the remaining amount of ink in the ink tank in which the three-dimensional semiconductor element is arranged, and different identification for each of the three-dimensional semiconductor elements Have an ID,
When a signal including an identification ID of a predetermined three-dimensional semiconductor element is transmitted as an electromagnetic wave by the communication means, the reception and energy conversion means of each of the three-dimensional semiconductor elements converts the electromagnetic wave into electric power by electromagnetic induction, The information acquisition means, the information storage means, the judgment means and the information transmission means are activated by the power,
Only the solid semiconductor element having the identification ID that matches the identification ID transmitted from the communication means accepts information following the identification ID from the communication means, and according to the received information, the information obtaining means When information of at least the remaining amount of ink in the ink tank in which the solid semiconductor element is arranged is obtained, and the obtained information is compared with the information of the accumulated information means by the judging means to transmit information. The information is transmitted to the outside of the ink tank by the information transmitting means.
[0015]
  The response condition is characterized by different digital ID identification.
[0018]
Moreover, what has the cavity part for floating at the liquid surface or the predetermined position in a liquid is preferable. In this case, it is preferable that the three-dimensional semiconductor element floating in the liquid has a center of gravity located below the center of the element and does not rotate in the floating liquid and stably swings. More preferably, the metacenter of the element is always above the center of gravity of the solid semiconductor element.
[0026]
The “metacenter” in the present specification indicates the intersection of the action line of weight when balanced and the action line of buoyancy when tilted.
[0027]
Further, the “three-dimensional shape” of the “three-dimensional semiconductor element” in this specification includes all three-dimensional shapes such as a triangular prism, a sphere, a hemisphere, a quadrangular prism, a spheroid, and a uniaxial rotator.
[0028]
When used in an ink jet recording apparatus, means for supplying an electromagnetic wave signal to the element may be provided at a recovery position, a return position, a carriage, a head, or the like. In addition to this, if an apparatus having means for supplying an electromagnetic wave signal is used, the state inside the ink tank can be known without an ink jet recording apparatus. For example, if used in a factory or a store, it can be used for inspection or the like. (quality assurance).
[0029]
    (Function)
In the three-dimensional semiconductor element as described above, when an electromagnetic wave signal satisfying a predetermined response condition is provided from the outside of the element without contact, the energy conversion means converts the electromagnetic wave into electric power, and the converted electric power The information acquisition means, determination means, information storage means, and information transmission means are activated. When the electromagnetic wave signal received by the energy conversion means satisfies a predetermined response condition, environmental information around the element is obtained by the information obtaining means, and the obtained information and the information stored in the information accumulation means corresponding thereto are obtained. Are judged by the judging means to judge the necessity of information transmission. When it is determined that information transmission is necessary, the determination unit transmits the acquired information to the outside by the information transmission unit.
[0030]
  In this way, only when the signal of the electromagnetic wave from the outside satisfies a predetermined response condition, a communication function for obtaining ambient environment information and transmitting it to the outside is built in the three-dimensional semiconductor element. Ambient environment information can be obtained independently. In addition, since information can be obtained and transmitted three-dimensionally, there are fewer restrictions on the direction of information transmission compared to the case of using a flat semiconductor element. For this reason, acquisition of ambient environment information and transmission to the outside can be performed efficiently.
[0031]
  the aboveBy disposing at least one of the three-dimensional semiconductor elements in the ink tank, it is possible to transmit information on the ink stored in the ink tank, the pressure in the tank, and the like to an external inkjet recording apparatus in real time. Is possible. This is advantageous, for example, in stabilizing the inkjet discharge by controlling the amount of negative pressure in the tank that changes every moment as the ink is consumed.
[0032]
  In particular, the above three-dimensional semiconductor elements are respectively arranged in a plurality of ink tanks.ForOnly when the received electromagnetic wave signal satisfies a predetermined response condition, information corresponding to the received signal can be obtained and the result of comparison with the stored information can be transmitted to the outside together with the obtained information. If it changes every time, the information for every ink tank can be obtained independently. Therefore, the user can replace, for example, an ink tank that has run out of ink without making a mistake.
[0033]
Furthermore, since the power for operating the three-dimensional semiconductor element is supplied in a non-contact manner, it is necessary to provide the ink tank with a power source for starting the element or to connect a power supply wiring to the element. And can be used in places where it is difficult to perform direct wiring with the outside.
[0034]
For example, by forming the conductor coil of the oscillation circuit around the outer surface of the three-dimensional semiconductor element, electric power is generated in the conductor coil by electromagnetic induction with the external resonance circuit, and the element is not contacted. Can supply power.
[0035]
In this case, since a coil is wound around the outer surface of the element, the magnitude of the inductance of the coil varies depending on, for example, the remaining amount of ink, ink concentration, and ink pH in the ink tank. Therefore, since the oscillation circuit changes the oscillation frequency in accordance with the change in inductance, it is possible to detect the remaining amount of ink in the ink tank based on the change in the changed oscillation frequency.
[0036]
The three-dimensional semiconductor element has a cavity for floating in the liquid and is formed so that the center of gravity of the element is located below the center of the element. Even if the recording head and the ink tank are operated serially and the ink in the ink tank swings up and down, left and right, the ink is stably floating in the ink in the ink tank. Can be detected with high accuracy. In addition, the coil of the oscillation circuit formed on the element is held at a stable position with respect to the coil of the external resonance circuit, and stable bi-directional communication is always possible.
[0037]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described with reference to the drawings. In particular, an embodiment in which a three-dimensional semiconductor element is arranged in each color ink tank will be described in detail. It should be noted that this element is not housed only in the ink tank, but the same effect can be obtained even if it is used in another object.
[0038]
(First embodiment)
FIG. 1 is a schematic configuration diagram showing an ink jet recording apparatus according to a first embodiment of the present invention. The ink jet recording apparatus 600 of the form shown in this figure includes a liquid discharge head (not shown) that discharges ink droplets for printing and an ink tank 500 of each color that holds the liquid supplied to the liquid discharge head. A carriage 607 to be mounted is provided. As the ink tanks 500 for the respective colors, four types of color tanks of black B, cyan C, magenta M, and yellow Y are mounted.
[0039]
Each color ink tank is provided with a three-dimensional semiconductor element 11 having a communication function with different response conditions, and can communicate with a communication circuit 150 of an ink jet recording apparatus 600 provided outside the ink tank 500.
[0040]
The communication circuit 150 can communicate with the communication means of the three-dimensional semiconductor element 11 provided in the ink tank 500 by the resonance circuit 102 including the frequency modulator 152 and the induction coil 151. The three-dimensional semiconductor element 11 is configured to be able to communicate by resonance by electromagnetic induction of the resonance circuit 102. In order to provide such a communication function, an induction coil L is wound around the surface of the three-dimensional semiconductor element 11 as shown in FIG. In addition, in order to change the response condition of the element for each color, in this example, in particular, in the three-dimensional semiconductor element 11 for each color, the number of turns and the length of the coil L on the three-dimensional semiconductor element is changed for each color. Resonance frequencies are different from each other. The communication circuit 150 can modulate the electromagnetic induction frequency by the frequency modulator 152, thereby enabling independent communication for each color by tuning to the resonance frequency of the three-dimensional semiconductor element corresponding to the color to be communicated. . For example, when a signal tuned to a resonance frequency corresponding to cyan is sent by the communication circuit 150, only the elements in the cyan tank respond to the signal.
[0041]
In addition, since the three-dimensional semiconductor element 11 includes the induction coil L, the electromagnetic induction by the resonance circuit 102 of the communication circuit 150 as described above can be converted into electric power when an oscillation circuit is assembled using this coil. . For this reason, the power supply for starting the circuit built in the element can be performed without contact.
[0042]
In the ink jet recording apparatus as described above, for example, when information is exchanged with a cyan tank, a signal having a frequency equal to the resonance frequency corresponding to the cyan color is transmitted from the communication circuit 150 to the tank by the electromagnetic wave 12. Electric power is generated by electromagnetic induction in the coil of the element in the cyan tank, and the circuit in the element can be activated. Therefore, if the circuit in the element is provided with a means for obtaining environmental information around the element and a means for transmitting the environmental information to the outside, the information in the cyan tank can be detected and notified to the outside.
[0043]
FIG. 3 is a block diagram showing the internal configuration of the three-dimensional semiconductor element 11 arranged for each color and the exchange with the outside.
[0044]
  The three-dimensional semiconductor element 11 receives a signal of the electromagnetic wave 12 sent from the communication circuit 150 in the recording apparatus 600 and converts the electromagnetic wave 12 into electric power 13 and receives and energy conversion means (an oscillation circuit having a coil). 14, an information acquisition unit 15, a determination unit 16, an information storage unit 17, and an information transmission unit 18 that are activated by the power obtained by the communication and energy conversion unit 14.Reception and energy conversionThe means 14, the information obtaining means 15 and the information transmitting means 18 are preferably formed on or near the surface of the three-dimensional semiconductor element 11.
[0045]
The judging means 16 accepts the signal of the electromagnetic wave 12 when the receiving / energy converting means (oscillation circuit having a coil) 14 resonates with the received electromagnetic wave 12, and does not accept it when it does not resonate. When the signal of the electromagnetic wave 12 is received, the information obtaining unit 15 obtains the information in the ink tank (for example, the remaining amount of ink, ink color material concentration, ph, temperature, etc.) that is the ambient environment information of the element 11. The obtained tank internal information is compared with the information stored in the information storage means 17, and it is determined whether the obtained tank internal information needs to be transmitted to the outside. The information accumulating unit 17 accumulates various conditions to be compared with the obtained tank internal information and the tank internal information obtained from the information obtaining unit 15. Here, the judgment by the judgment means 16 based on conditions set in advance in the information storage means 17 requires that the tank be replaced because, for example, the remaining ink amount is 2 milliliters or less, or the ink ph has changed significantly. To make a judgment.
[0046]
The information transmission unit 18 converts the electric power into energy for transmitting the in-tank information to the outside according to the command of the determination unit 16, and displays and transmits the ink internal information to the outside. Magnetic energy, light, shape, color, radio wave, sound, etc. can be used as the energy for transmission. For example, when it is determined that the remaining ink amount is 2 milliliters or less, a sound is generated and the tank Communicate to the outside that replacement is necessary. Further, the transmission destination is not limited to the communication circuit 150 of the ink jet recording apparatus, but may be transmitted to human vision or hearing, particularly in the case of light, shape, color, and sound. Further, the transmission method may be changed according to the information, such as a sound when it is determined that the ink remaining amount is 2 milliliters or less and a light when the ink ph changes greatly.
[0047]
According to this embodiment, since the three-dimensional semiconductor element having a communication function that responds at different frequencies is arranged in each color ink tank, information can be exchanged individually with the tank of the desired color.
[0048]
In addition, the solid-state semiconductor element for each color converts the electromagnetic wave from the communication circuit provided on the recording apparatus main body side into electric power for starting the determination means, the information acquisition means, the information transmission means, etc. in the element. Thus, the element can be used at any location in the object, such as in ink, where it is difficult to perform direct electrical wiring externally. If an element is arranged in the ink, the state of the ink can be accurately grasped in real time. Furthermore, since it is not necessary to arrange a means (power source in this example) for accumulating an electromotive force for operating the element, the element can be miniaturized and the element can be used even in a narrow place.
[0049]
(Second Embodiment)
Next, another embodiment will be described. The basic configuration of the three-dimensional semiconductor element is the same as that shown in FIG. 3, but the response conditions in communication are different. Therefore, in the description, the same reference numerals are used for the same components as those in the first embodiment. In the case of this embodiment, the frequency to be tuned for communication is the same for all the elements in the ink tank of each color unlike the first embodiment (determined by the number of turns and the length of the coil L on the element). The resonance frequency is the same for each color element), but each element arranged in each color tank has a different digital ID identification function, and the tank of the color to be communicated is identified by the digital ID to allow communication. Judge whether to disable or not.
[0050]
FIG. 4 is an explanatory diagram of a concept of exchanging a digital ID by electromagnetic induction between the communication circuit 150 on the recording apparatus main body side and the three-dimensional semiconductor element 11. Referring to this figure, when the digital ID is D3h (h is a subscript indicating that D3 is displayed in hexadecimal notation) ((a) in the figure), the communication circuit 150 converts the digital ID into a binary number “11010011”. ”((B) in the figure), and an electromagnetic induction waveform corresponding to this is converted ((c) in the figure). A digital value 1 is a sine wave of one cycle, and 0 is an output 0. When this is transmitted by electromagnetic induction by the communication circuit 150 ((d) in the figure), the three-dimensional semiconductor element 11 in the ink tank is tuned and a similar waveform is obtained by the coil L on the element 11 ((e) in the figure (e)). )). The element 11 is converted into a digital binary number sequence by a comparator circuit or the like (FIG. (F)), and D3h which is a digital ID can be obtained (FIG. (G)).
[0051]
FIG. 4 shows an operation flow for obtaining in-tank information of a specific color by using such exchange of digital IDs. Referring to this figure, when the ID of the response condition of the ink tank to be communicated is selected (in this case, the digital ID is D3h), the communication circuit 150 converts this into a binary number array such as a shift register (not shown). Is converted into an electromagnetic induction waveform corresponding to this array and transmitted. The conversion is performed, for example, by multiplying a sine wave having the same period as the binary number array by an AND gate. The three-dimensional semiconductor element 11 is a coil and obtains the same waveform as the transmitted electromagnetic induction waveform. This is converted into a binary number by a converter provided in the judging means 16 in the three-dimensional semiconductor element 11 to obtain a hexadecimal number.
[0052]
Then, the judging means 16 compares the obtained hexadecimal ID with the hexadecimal identification ID stored in the information storage means 17 in advance. If the comparison matches, the information following the ID is accepted, and if the comparison does not match, it is not accepted.
[0053]
When the information is received as described above, as shown in FIG. 3, the determination unit 16 causes the information acquisition unit 15 to receive information in the ink tank that is the ambient environment information of the element 11 (for example, ink density, Remaining amount, physical properties, etc.) are obtained, and the obtained tank internal information is compared with the information stored in the information storage means 17 to determine whether the obtained tank internal information needs to be transmitted to the outside. The information transmission unit 18 converts the electric power into energy for transmitting the in-tank information to the outside according to the command of the determination unit 16, and displays and transmits the ink internal information to the outside.
[0054]
According to this embodiment, since the three-dimensional semiconductor element having a communication function that responds with a communication protocol using different ID identifications is arranged in each color ink tank, the desired color is the same as in the first embodiment. Information can be exchanged individually with the tank, and power can be supplied in a non-contact manner to activate the circuit in the element, so that it can be used even in inks where wiring is difficult.
[0055]
Furthermore, in the present embodiment, by identifying the ink tanks of the respective colors based on the digital ID, it becomes possible to handle a much larger number of tanks than the configuration of the first embodiment.
[0056]
【Example】
Next, a preferred specific example in which the three-dimensional semiconductor element of the present invention is arranged in an ink tank will be described in more detail.
[0057]
First, information acquisition means applicable to the three-dimensional semiconductor element of the present invention will be described as an example. As described in the above embodiment, when a three-dimensional semiconductor element is arranged in an ink tank, information acquisition means built into spherical silicon can be (1) SiO.₂A sensor that detects the pH of the ink by creating a film or SiN film as an ion-sensitive film, (2) a pressure sensor that has a diaphragm structure and detects pressure changes in the tank, and (3) converts light into thermal energy Then, a photodiode with a pyroelectric effect is built in to detect the current position, and a sensor for detecting the remaining amount of ink, and (4) the presence or absence of ink depending on the amount of moisture in the tank using the conductive effect of the material. Examples include a sensor to detect.
[0058]
Next, specific examples of receiving and energy converting means applicable to the three-dimensional semiconductor device of the present invention will be given. FIG. 6 is a diagram for explaining the principle of power generation of the reception and energy conversion means that is a component of the three-dimensional semiconductor element of the present invention.
[0059]
In FIG. 6, when the conductor coil L of the oscillation circuit 102 is placed adjacent to the coil La of the external resonance circuit 101 and a current Ia is passed through the coil La through the external resonance circuit 101, the coil I of the oscillation circuit 102 is caused by the current Ia. Is generated. Here, when the current Ia is changed, the magnetic flux B penetrating the coil L is changed, so that an induced electromotive force V is generated in the coil L. Therefore, the oscillation circuit 102 as the reception and energy conversion means is formed in the spherical silicon, the external resonance circuit 101 is provided in the communication circuit 150 of the ink jet recording apparatus outside the element, the conductor coil L and the element of the oscillation circuit 102 on the element side, and the like. By disposing the external resonance circuit 101 so as to be adjacent to the coil La, electric power for operating the element can be generated by an induced electromotive force due to electromagnetic induction from the outside.
[0060]
Further, the magnetic flux B penetrating through the coil L having the winding number N of the oscillation circuit 102 formed in spherical silicon as a receiving and energy conversion means is proportional to the product of the winding number Na of the coil La of the external resonance circuit 101 and the current Ia. , Where the proportionality constant is k
[0061]
[Expression 1]
B = k * Na * Ia (1)
The electromotive force V generated in the coil L is
[0062]
[Expression 2]

Here, the magnetic flux B is defined as follows: the magnetic permeability of the coil core is μa and the magnetic field is H.
[0063]
[Equation 3]

It becomes. Here, z indicates the distance between the coil of the external resonance circuit and the coil built in the spherical silicon.
[0064]
Mutual inductance of equation (2): M is
[0065]
[Expression 4]

It becomes. Where μ_oIs the permeability of the vacuum.
[0066]
And the impedance of the oscillation circuit built in spherical silicon: Z is
[0067]
[Equation 5]
Z (ω) = R + j {ωL− (1 / ωC)} (5)
The impedance of the external resonant circuit: Za is
[0068]
[Formula 6]
Za (ω) = Ra + jωLa− {ω²M²/ Z (ω)} (6)
It becomes. Here, J represents magnetization. And the impedance: Zo when this external resonance circuit resonates (when the current value: Ia becomes maximum) is:
[0069]
[Expression 7]
Zo (ωo) = Ra + jLaωo− (ω_o ²M²/ R) ▲ 7 ▼
The phase delay of this resonant circuit: φ is
[0070]
[Equation 8]
tanφ = {jLaωo− (ω_o ²M²/ R)} / R (8)
It becomes.
[0071]
The resonance frequency fo of this external resonance circuit is
[0072]
[Equation 9]
fo = 1 / 2π (LC)^1/2                          ▲ 9 ▼
Is required.
[0073]
From the above relationship, when the impedance of the oscillation circuit 102 built in the spherical silicon is varied according to the change of the ink in the ink tank, the frequency of the external resonance circuit 101 is changed to change the impedance of the external resonance circuit 101. The change in the ink appears in the amplitude and phase difference. Further, the remaining amount of ink (that is, change in z) is included in the phase difference and amplitude.
[0074]
For example, by changing the resonance frequency of the external resonance circuit 101, the output (impedance) from the oscillation circuit 102 built in the spherical silicon changes according to changes in the surrounding environment, so this frequency dependency is detected. By doing so, it is possible to detect the presence or absence of ink and the remaining ink amount.
[0075]
Therefore, the oscillation circuit built in the spherical silicon is not only used as an energy generating means for generating electric power, but also as a part of means for detecting a change in ink in the tank due to the relationship between the oscillation circuit and the external resonance circuit. It is possible to use.
[0076]
Next, the manufacturing method of the three-dimensional semiconductor element of this invention is demonstrated. FIG. 7 is a process diagram for explaining an example of the manufacturing method of the three-dimensional semiconductor element of the present invention, and shows each process by a cross section passing through the center of the spherical silicon. Here, an example is given of a manufacturing method in which the center of gravity of the spherical silicon is formed so as to be lower than the center, the upper part inside the spherical body is made hollow, and the hollow part is kept airtight.
[0077]
The spherical silicon shown in FIG. 7 (a) is thermally oxidized on the entire surface as shown in FIG. 7 (b).₂After forming the film 202, as shown in FIG.₂In order to form the opening 203 in a part of the film, patterning is performed using a photolithography process.
[0078]
Then, as shown in FIG. 7D, only the upper silicon portion is removed by anisotropic etching using a KOH solution through the opening 203 to form a cavity portion 204. Thereafter, as shown in FIG. 7E, the SiN film 205 is formed on the inner and outer surfaces of the three-dimensional element by LPCVD.
[0079]
Further, as shown in FIG. 7F, a Cu film 206 is formed on the entire surface of the three-dimensional element by using a metal CVD method. Then, as shown in FIG. 7G, the Cu film 206 is patterned by using a well-known photolithography process to form a conductor coil L having a winding number N that is a part of the oscillation circuit. Thereafter, the three-dimensional semiconductor element in which the conductor coil L is formed is taken out from the vacuum apparatus to the atmosphere, the upper opening 203 is closed with a sealing member 207 such as a resin or a plug, and the cavity 204 inside the spherical body is sealed. To do. If manufactured in this way, the three-dimensional semiconductor element itself made of silicon can have buoyancy.
[0080]
Further, an N-MOS circuit is used as a drive circuit element other than the coil L formed in such a floating three-dimensional semiconductor element. FIG. 8 shows a schematic cross-sectional view of the N-MOS circuit cut in a longitudinal direction.
[0081]
According to FIG. 8, P-Mos 450 is formed in the N-type well region 402 by introducing and diffusing impurities such as ion plantation using a general Mos process in the Si substrate 401 of P conductor. N-Mos 451 is configured in 403. P-Mos 450 and N-Mos 451 are each formed of poly-Si gate wiring 415 deposited by CVD to a thickness of 4000 angstroms or less and 5000 angstroms or less through gate insulating film 408 having a thickness of several hundreds of angstroms, and N-type Alternatively, it is composed of a source region 405 and a drain region 406 to which a P-type impurity is introduced, and the P-Mos 450 and N-Mos 451 constitute a C-Mos logic.
[0082]
The element driving N-Mos transistor 301 is constituted of a drain region 411, a source region 412, a gate wiring 413, and the like on the P-type well substrate 402 by processes such as impurity introduction and diffusion.
[0083]
Here, when the N-Mos transistor 301 is used as an element driving driver, the distance L between the drain gates constituting one transistor is about 10 μm as a minimum value. One of the breakdowns of the 10 μm is the width of the source and drain contacts 417, which is 2 × 2 μm, but in fact, half of them are shared with the adjacent transistor, 2 μm. Other than the breakdown, 4 μm of 2 × 2 μm corresponding to the distance between the contact 417 and the gate 413 and 4 μm corresponding to the width of the gate 413, which is 10 μm in total.
[0084]
Between the elements, an oxide film isolation region 453 is formed by field oxidation having a thickness of 5000 angstroms or more and 10000 angstroms or less to separate the elements. This field oxide film acts as the first heat storage layer 414.
[0085]
After each element is formed, an interlayer insulating film 416 is deposited with a thickness of about 7000 angstrom by a PSG film, a BPSG film, etc. by a CVD method, and planarized by a heat treatment, and then the first through a contact hole. Wiring is performed by an Al electrode 417 serving as one wiring layer. After that, SiO by plasma CVD method₂An interlayer insulating film 418 such as a film was deposited to a thickness of 10000 Å to 15000 Å, and a through hole was further formed.
[0086]
And the connection with the oscillation circuit as a receiving and energy conversion means of this invention, the sensor part as an information acquisition means, etc. is performed through the said through hole.
[0087]
Further, in any state of the ink tank provided with the floating solid semiconductor element of this example, the oscillation circuit built in the spherical silicon by the above-described manufacturing method and the external resonance circuit shown in FIG. A stable magnetic flux (magnetic field) must be working between However, when floating in a liquid such as ink, the liquid level may vibrate due to external vibration. Even in such a case, in this example, the center of gravity of the floating three-dimensional semiconductor element is determined in order to maintain a stable state in the liquid.
[0088]
As shown in FIG. 9, when the three-dimensional semiconductor element 210 of this example is suspended in a liquid, as shown in FIG.
(1) Buoyancy F = weight W of the object
(2) The buoyancy action line and the weight action line (the line passing through the center of gravity G) match.
It is necessary that this relationship holds.
[0089]
Then, as shown in FIG. 9B, when the liquid vibrates due to the external force and the three-dimensional semiconductor element 210 is slightly tilted from the balanced state, the center of the buoyancy moves, and the couple of buoyancy and weight Become.
[0090]
Here, the intersection of the action line of weight when in a balanced state (one-dot chain line in FIG. 9B) and the action line of buoyancy when tilted (solid line in FIG. 9B) is defined as the metacenter. The distance h between the metacenter and the center of gravity is called the height of the metacenter.
[0091]
Since the metacenter of the three-dimensional semiconductor element 210 is higher than the center of gravity as in this example, the couple (restoring force) acts in a direction to return to the original balanced position. This resilience: T
[0092]
[Expression 10]

It is represented by Here, the volume of the liquid excluded by the three-dimensional semiconductor element 210 is V, and the specific weight of the three-dimensional semiconductor element 210 is ρg.
[0093]
Therefore, in order to make this restoring force positive, it is a necessary and sufficient condition that h> 0.
[0094]
From FIG. 9B,
[0095]
## EQU11 ##

It becomes. Here, I is the moment of inertia around the O axis. Therefore,
[0096]
[Expression 12]

The three-dimensional semiconductor element 210 is stably floated in the ink, and the necessary conditions for supplying dielectric electromotive force from the external resonance circuit and bidirectional communication with the communication means outside the element are Become.
[0097]
As a bidirectional communication method with external communication means at this time, a wireless LAN system using a microwave band frequency or a wireless access system using a quasi-millimeter wave / millimeter wave frequency can be applied.
[0098]
Here, an outline of transmission and reception by the wireless LAN system will be described. In the following, data transmission from the three-dimensional semiconductor element to the recording apparatus will be described. On the contrary, when data is transmitted from the recording apparatus side to the three-dimensional semiconductor element, a data ID is arranged on each side, and the data ID is identified.
[0099]
The three-dimensional semiconductor element on the transmission side has a line monitoring unit, a data handling unit, an acknowledge check unit, and an error processing unit, and the recording device on the reception side has a data handling unit, an acknowledge unit, and an error processing unit. And a display part etc. are attached.
[0100]
A flowchart of the three-dimensional semiconductor element on the transmission side is shown in FIG. In the case of data transmission, initial setting is performed using a predetermined transmission protocol, and then the address on the receiving side is set and data transmission is performed. If a signal collision occurs during transmission, or if no acknowledgment is returned from the designated receiving device, retransmission is performed. During operation, the line status and the presence / absence of an acknowledge are displayed on a display unit provided in a recording apparatus on the receiving side, and the user is appropriately judged.
[0101]
FIG. 11 shows a flowchart in the receiving side recording apparatus. On this receiving side, line monitoring is always carried out, and when its own address is confirmed, data is fetched from the line and stored in a buffer on the main memory. During reception, if the block mark for every 16 bytes cannot be confirmed, or if the checksum does not match in the error detection process after reception, the reception is interrupted and the line is monitored again. Wait for the header to arrive. If it can be received without error, the received content is displayed on the display unit.
[0102]
The three-dimensional semiconductor element of the embodiment as described above is an ink jet printer that supplies ink contained in an ink tank that is detachably mounted to an ink jet recording head, and prints on recording paper with ink droplets ejected from the recording head. The present invention is preferably applied to an ink jet printer that detects ink information and tank information about the ink and transmits the information to the ink jet printer to control the printer in an optimal manner or to control the state in the tank optimally. .
[0103]
12 to 15 show configuration examples of ink tanks to which the three-dimensional semiconductor element of the present invention can be applied. In the ink tank 501 shown in FIG. 12, a flexible ink bag 502 containing ink is disposed in a housing 503, and the bag mouth 502a is closed by a rubber stopper 504 fixed to the housing 503, and the ink is drawn out. The hollow needle 505 is pierced into the rubber stopper 504 and communicated with the inside of the bag, thereby supplying ink to an inkjet head (not shown). The three-dimensional semiconductor element 506 of the present invention can be disposed in the ink bag 502 of such an ink tank 501.
[0104]
In addition, an ink tank 511 shown in FIG. 13 has an ink jet head 515 attached to an ink supply port 514 of a casing 512 that accommodates ink 513 to eject ink toward the recording paper S and perform recording. The three-dimensional semiconductor element 516 of the present invention can be disposed in the ink 513 in such a tank 511.
[0105]
In addition, the ink tank 521 shown in FIG. 14 includes a first chamber in a completely sealed state that stores the ink 522, a second chamber in an atmospheric communication state that stores the negative pressure generating member 523, and a first chamber at the bottom of the tank. And a communication passage 524 for communicating the second chamber. When ink is consumed from the ink supply port 525 on the second chamber side, the air in the first chamber is led to the second chamber instead of the atmosphere entering the first chamber from the second chamber side. The three-dimensional semiconductor element 526 of the present invention may be arranged in the first chamber of the tank 521 having such a configuration to exchange information about ink.
[0106]
Further, an ink tank 531 shown in FIG. 15 is a container in which a porous member 532 holding ink is stored and an ink jet head 533 that uses the stored ink for recording is attached. Also in the tank 531 having such a configuration, the three-dimensional semiconductor element 534 of the present invention may be arranged on the ink tank side to exchange information about ink.
[0107]
Next, a configuration example of an ink jet recording apparatus equipped with an ink tank provided with the three-dimensional semiconductor element of the present invention is schematically shown in FIG. A head cartridge 601 mounted on the inkjet recording apparatus 600 shown in FIG. 16 holds a liquid discharge head that discharges ink for print recording, and holds liquid supplied to the liquid discharge head in FIGS. A plurality of color ink tanks having the structure as shown. In addition, a communication circuit (reference numeral 150 in FIG. 1) that performs electromagnetic wave communication with the three-dimensional semiconductor elements respectively arranged in the ink tanks of the respective colors is installed in the recording apparatus 600. A resonance circuit (energy supply unit serving as an electromotive force) 101 included in the communication circuit is provided in the carriage 7 and can transmit an electromagnetic wave signal to the three-dimensional semiconductor element of each color. In the state where the head cartridge 100 is mounted on the carriage 7, the conductor coil L of the oscillation circuit 32 of the element in the tank and the coil La of the external resonance circuit 31 on the carriage side are designed to be adjacent to each other.
[0108]
As shown in FIG. 16, the head cartridge 601 is engaged with a helical groove 606 of a lead screw 605 that rotates via driving force transmission gears 603 and 604 in conjunction with forward and reverse rotation of the driving motor 602. Mounted on top. The head cartridge 601 is reciprocated along the guide 608 with the carriage 607 in the directions of arrows a and b by the power of the drive motor 602. The ink jet recording apparatus 600 includes a recording medium transport unit (not shown) that transports a print sheet P as a recording medium that receives liquid such as ink discharged from the head cartridge 601. The paper pressing plate 610 for the printing paper P conveyed on the platen 609 by the recording medium conveying means presses the printing paper P against the platen 609 over the moving direction of the carriage 607.
[0109]
Photocouplers 611 and 612 are disposed near one end of the lead screw 605. The photocouplers 611 and 612 are home position detecting means for confirming the presence of the lever 607a of the carriage 607 in the area of the photocouplers 611 and 612 and switching the rotation direction of the drive motor 602. In the vicinity of one end of the platen 609, a support member 613 that supports a cap member 614 that covers the front surface of the head cartridge 601 where the ejection port is located is provided. In addition, an ink suction unit 615 that sucks ink that has been discharged from the head cartridge 601 and accumulated in the cap member 614 is provided. The ink suction means 615 recovers the suction of the head cartridge 601 through the opening of the cap member 614.
[0110]
The ink jet recording apparatus 600 includes a main body support 619. A moving member 618 is supported on the main body support 619 so as to be movable in the front-rear direction, that is, in a direction perpendicular to the moving direction of the carriage 607. A cleaning blade 617 is attached to the moving member 618. The cleaning blade 617 is not limited to this form, and may be a known cleaning blade of another form. Further, a lever 620 for starting suction is provided in the suction recovery operation by the ink suction means 615, and the lever 620 moves in accordance with the movement of the cam 621 that engages with the carriage 607, and from the drive motor 602. The driving force is controlled to move by known transmission means such as clutch switching. An ink jet recording control unit that provides a signal to a heating element provided in the head cartridge 601 and controls driving of each mechanism described above is provided on the recording apparatus main body side and is not shown in FIG. .
[0111]
In the ink jet recording apparatus 600 having the above-described configuration, the head cartridge 601 reciprocates over the entire width of the print paper P with respect to the print paper P transported on the platen 609 by the recording medium transport means. When a drive signal is supplied from the drive signal supply means (not shown) to the head cartridge 601 during this movement, ink (recording liquid) is discharged from the liquid discharge head portion to the recording medium in accordance with this signal, and recording is performed. Done.
[0112]
【The invention's effect】
According to the three-dimensional semiconductor element of the present invention, each element has a communication function for obtaining ambient environment information and transmitting it to the outside only when an external electromagnetic wave signal satisfies a predetermined response condition. The surrounding environment information can be obtained independently. In addition, since information can be obtained and transmitted three-dimensionally, there are fewer restrictions on the direction of information transmission compared to the case of using a flat semiconductor element. For this reason, acquisition of ambient environment information and transmission to the outside can be performed efficiently.
[0113]
In addition, by disposing at least one such three-dimensional semiconductor element in the ink tank, information on the ink stored in the ink tank, the pressure in the tank, and the like are transmitted to an external inkjet recording apparatus in real time. It is possible. This is advantageous, for example, in stabilizing the inkjet discharge by controlling the amount of negative pressure in the tank that changes every moment as the ink is consumed.
[0114]
In particular, when each of the above three-dimensional semiconductor elements is arranged in a plurality of ink tanks, only when the received electromagnetic wave signal satisfies a predetermined response condition, information corresponding to the received signal is obtained and stored information is stored. Since the comparison judgment result can be transmitted to the outside together with the obtained information, if the response condition is changed for each tank, the information for each ink tank can be obtained independently. Therefore, the user can replace, for example, an ink tank that has run out of ink without making a mistake.
[0115]
Furthermore, since the power for operating the three-dimensional semiconductor element is supplied in a non-contact manner, it is necessary to provide the ink tank with a power source for starting the element or to connect a power supply wiring to the element. And can be used in places where it is difficult to perform direct wiring with the outside. Moreover, since it functions at a close position without contact, it is possible to handle a plurality of colors at one position. It can also be transmitted during printing.
[0116]
For example, by forming the conductor coil of the oscillation circuit around the outer surface of the three-dimensional semiconductor element, electric power is generated in the conductor coil by electromagnetic induction with the external resonance circuit, and the element is not contacted. Can supply power.
[0117]
In this case, since a coil is wound around the outer surface of the element, the magnitude of the inductance of the coil varies depending on, for example, the remaining amount of ink, ink concentration, and ink pH in the ink tank. Therefore, since the oscillation circuit changes the oscillation frequency in accordance with the change in inductance, it is possible to detect the remaining amount of ink in the ink tank based on the change in the changed oscillation frequency.
[0118]
The three-dimensional semiconductor element has a cavity for floating in the liquid and is formed so that the center of gravity of the element is located below the center of the element. Even if the recording head and the ink tank are operated serially and the ink in the ink tank swings up and down, left and right, the ink is stably floating in the ink in the ink tank. Can be detected with high accuracy. In addition, the coil of the oscillation circuit formed on the element is held at a stable position with respect to the coil of the external resonance circuit, and stable bi-directional communication is always possible.
[Brief description of the drawings]
FIG. 1 is a schematic configuration diagram showing an ink jet recording apparatus according to a first embodiment of the present invention.
FIG. 2 is a view showing a conductor coil wound around a surface in order to constitute a receiving and energy converting means of a three-dimensional semiconductor element of the present invention.
FIG. 3 is a block diagram showing the internal configuration of the three-dimensional semiconductor device of the present invention and the exchange with the outside.
FIG. 4 is an explanatory view of a concept of exchanging a digital ID by electromagnetic induction between the apparatus main body side and a three-dimensional semiconductor element in a tank in an ink jet recording apparatus according to a second embodiment of the present invention.
5 is a diagram showing an operation flow for obtaining in-tank information of a specific color using the exchange of the digital ID shown in FIG. 4. FIG.
FIG. 6 is a diagram for explaining the principle of power generation of energy generating means that is a constituent element of the three-dimensional semiconductor element of the present invention.
FIG. 7 is a process diagram for explaining an example of a method for manufacturing a three-dimensional semiconductor element of the present invention.
FIG. 8 is a schematic cross-sectional view of the N-MOS circuit used in the three-dimensional semiconductor element of the present invention cut in a longitudinal direction.
FIG. 9 is a view for explaining conditions for maintaining a stable state in a liquid for a three-dimensional semiconductor device manufactured by the method shown in FIG. 7;
FIG. 10 is a diagram illustrating a flowchart of a three-dimensional semiconductor element on the transmission side when two-dimensional communication is performed between the three-dimensional semiconductor element and a recording apparatus according to an embodiment of the present invention.
FIG. 11 is a diagram showing a flowchart in the recording apparatus on the receiving side when bidirectional communication is performed between the solid semiconductor element and the recording apparatus according to the embodiment of the present invention.
FIG. 12 is a diagram showing a configuration example of an ink tank to which the three-dimensional semiconductor element of the present invention can be applied.
FIG. 13 is a diagram showing a configuration example of an ink tank to which the three-dimensional semiconductor element of the present invention can be applied.
FIG. 14 is a diagram showing a configuration example of an ink tank to which the three-dimensional semiconductor element of the present invention can be applied.
FIG. 15 is a diagram showing a configuration example of an ink tank to which the three-dimensional semiconductor element of the present invention can be applied.
FIG. 16 is a schematic view showing a configuration example of an ink jet recording apparatus equipped with an ink tank provided with the three-dimensional semiconductor element of the present invention.
FIG. 17 is a diagram showing an ink remaining amount detecting device described in Japanese Patent Laid-Open No. 6-143607.
FIG. 18 is a diagram showing an ink remaining amount detecting device described in Japanese Patent No. 2947245;
[Explanation of symbols]
11, 210 Three-dimensional semiconductor element
12 Electromagnetic waves
13 Electric power
14 Receiving and energy conversion means
15 Information acquisition means
16 Judgment means
17 Information storage means
18 Information transmission means
101 External resonant circuit
102 Oscillator circuit
150 Communication circuit
151 induction coil
152 frequency modulator
201 spherical silicon
202 SiO₂film
203 opening
204 Cavity
205 SiN film
206 Cu film
207 Sealing member

Claims (3)

In an ink jet recording system comprising a plurality of ink jet heads for performing color recording with an ink jet printer and mounting a plurality of ink tanks for storing ink ejected corresponding to each ink jet head.
Together are distributing in the state in which three-dimensional type semiconductor device is suspended in the ink liquid surface or submerged in each of the ink tank, the ink jet printer outside the ink tank, arranged in each of the ink tank Communication means for wireless communication with a three-dimensional semiconductor element by electromagnetic waves is provided,
Each of the three dimensional semiconductor device receives a signal of the communication means or al electromagnetic wave without contact, and receiving and energy conversion means having a coil that converts the electromagnetic wave into power by electromagnetic induction is activated by said power , e Bei information acquiring means and information storage means and determination means and the information transmission means for obtaining information of at least the amount of ink remaining in the ink tank, wherein the solid type semiconductor device is disposed, and,
For each of the three-dimensional semiconductor elements, the resonance frequency is different by changing the number of turns or the length of the coil,
By the communication means, the frequency signal equal to the resonance frequency of the predetermined solid type semiconductor device is sent at the electromagnetic wave, received and energy conversion means of the three dimensional semiconductor element is to convert the electromagnetic wave into power by electromagnetic induction The information acquisition means, the information storage means, the judgment means and the information transmission means are activated by the power,
Only three dimensional semiconductor device corresponding to the predetermined resonant frequency, the information acquiring means by to obtain information of at least the remaining amount of ink in the ink tank to which the solid type semiconductor device is disposed, said the information received an ink jet recording system comprising a Turkey be transmitted to the ink tank outside by the information transmitting means when the storage information means information comparison determining and signaling is required for the determination means. In an ink jet recording system comprising a plurality of ink jet heads for performing color recording with an ink jet printer and mounting a plurality of ink tanks for storing ink ejected corresponding to each ink jet head.
In each ink tank, the solid semiconductor element is arranged in a state of floating on the surface of the ink liquid or in the liquid, and the ink jet printer has a solid form arranged in the ink tank in addition to the ink tank. Communication means for performing wireless communication with semiconductor elements by electromagnetic waves is provided,
Each of the three-dimensional semiconductor elements receives a signal of electromagnetic waves from the communication means in a non-contact manner, and receives and energy conversion means having a coil for converting the electromagnetic waves into electric power by electromagnetic induction, and is activated by the electric power, An information acquisition means, information storage means, determination means, and information transmission means for obtaining at least information on the remaining amount of ink in the ink tank in which the three-dimensional semiconductor element is arranged, and different identification for each of the three-dimensional semiconductor elements Have an ID,
When a signal including an identification ID of a predetermined three-dimensional semiconductor element is transmitted as an electromagnetic wave by the communication means, the reception and energy conversion means of each of the three-dimensional semiconductor elements converts the electromagnetic wave into electric power by electromagnetic induction, The information acquisition means, the information storage means, the judgment means and the information transmission means are activated by the power,
Only the solid semiconductor element having the identification ID that matches the identification ID transmitted from the communication means accepts information following the identification ID from the communication means, and according to the received information, the information obtaining means When information of at least the remaining amount of ink in the ink tank in which the solid semiconductor element is arranged is obtained, and the obtained information is compared with the information of the accumulated information means by the judging means to transmit information. An ink jet recording system wherein the information is transmitted to the outside of the ink tank by the information transmitting means. The three-dimensional semiconductor element has a cavity for floating at a predetermined position in the ink liquid surface of the ink tank or in the liquid, and the center of gravity of the three-dimensional semiconductor element floating in the liquid is 3. The ink jet recording system according to claim 1 , wherein the ink jet recording system is located below the center and the metacenter is always above the center of gravity of the solid semiconductor element.

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