JP3747580B2 - Substrate transport tray - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a substrate carrying tray used for forming a thin film on a substrate, and more particularly to a substrate carrying tray suitable for a thin film forming step in a manufacturing process of a solar cell, a liquid crystal panel, a plasma display, or the like.
[0002]
[Prior art]
In recent years, cost competition has been intensifying for all product groups such as solar cells, liquid crystal panels, and plasma displays. One of the common processes among these manufacturing processes is related to the formation of a thin film on a substrate. The cost reduction technology in this process is reflected in the cost of the product. For example, in the manufacturing process of a solar cell, in order to form a thin film on a substrate, there is a step of transporting a substrate transport tray with a substrate attached thereto into a film forming apparatus such as a CVD apparatus or a sputtering apparatus using a transport apparatus. The substrate transport tray needs to have a structure in which substrates of various sizes can be securely attached, a structure that can withstand deformation and alteration in a film forming environment such as CVD or sputtering, and the like.
[0003]
An example of a conventional substrate transfer tray will be described below with reference to FIGS. FIG. 9 is a view showing a state in which a substrate 91 is attached to a conventional substrate transfer tray 90, and FIG. 10 is a sectional view taken along the line DD. The substrate transport tray 90 includes an outer frame 92 made of stainless steel or aluminum having an inner shape slightly larger than the outer shape of the substrate 91, and a stepped portion 93 that supports the surface of the substrate 91 is fixed to the outer frame 92. The thickness is provided. When the substrate transport tray is used, the substrate 91 is installed on the stepped portion 93, and a pressing plate 94 is installed on the substrate to support the back surface of the substrate 91. The surface on the opposite side of the substrate to the holding plate is open and is used as the film formation surface of the substrate. Further, in order to hold the presser plate 94 to the outer frame 92, for example, fixing members 95, 95,... Are fixed with screws at four positions of the outer frame so as to hold the four corners of the presser plate. In addition, the size of a general substrate is about 1 m × 1 m at the maximum, and about 0.1 m × 0.1 m at the minimum.
[0004]
FIG. 11 is a cross-sectional explanatory view of the film forming apparatus 100 showing a state in which the substrate transfer trays 101 and 102 are transferred in the film forming apparatus. The conveyance path 103 in the film forming apparatus is decompressed to almost vacuum. The substrate transport trays 101 and 102 are transported by guiding the guide rollers 104 and 105 above the trays 101 and 102 with the guides 106 and 107, and racks 108 and 109 provided below the trays 101 and 102 to the motors 110 and 111, respectively. Engage with the connected pinions 112 and 113. Further, the two substrate transport trays 101 and 102 are transported simultaneously in parallel with each other and at the same position. When the substrate transport tray is transported in the vertical state as described above, there is an advantage that two substrates can be formed simultaneously.
[0005]
[Problems to be solved by the invention]
However, in the conventional substrate transport tray as described above, if there is a change in the size or thickness of the substrate, the substrate transport tray must be redesigned and newly manufactured and processed in accordance with the change. There is a problem that this change cost and the number of man-hours for replacing a large number of parts are enormous.
[0006]
In view of such problems, it is an object of the present invention to provide a substrate carrying tray that can greatly reduce the man-hours required to change the size of a substrate and can easily and inexpensively replace components.
[0007]
[Means for Solving the Problems]
In order to achieve the above object, a substrate carrying tray according to the present invention has one or a plurality of openings having an inner shape that substantially matches the outer shape of the largest substrate, and the outer edge of the largest substrate is thick. The outer frame provided with a step for supporting in the direction on the inner edge of the opening, and one or a plurality of engaging means having a non-fastening structure, are detachably attached to the opening, and have a maximum dimension or less. An auxiliary frame member having a step portion for supporting the outer edge of the film formation target substrate in the thickness direction, and the maximum dimension between the step portion provided on the auxiliary frame member and the step portion provided on the outer frame. One or a plurality of substrate receiving surfaces that support the outer edges of the following film forming substrates in the thickness direction are configured.
[0008]
Further, as the engaging means, a pair of concave portions provided at corresponding positions on the opposite inner sides of the outer frame, and convex portions that engage with the concave portions provided at both ends of the auxiliary frame member, It can be flexibly handled by changing the board size. Further, when a plurality of the pair of recesses are provided and configured with a plurality of projections provided at both ends of the plurality of auxiliary frame members engaged with the recesses, it is possible to respond more finely by changing the size of the substrate. it can.
[0009]
As a more specific engaging means, the engaging means may have a pull-down structure described later.
[0010]
In addition, as a specific engagement means, a structure in which at least one auxiliary frame member is engaged and supported by another auxiliary frame member can be employed.
[0011]
Then, when the depth of the substrate receiving portion located between the upper surface of the auxiliary frame member and the substrate receiving surface is set so as not to exceed 1 mm at most than the thickness of the film formation target substrate not exceeding the maximum dimension, It can cope with the warp.
[0012]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, various exemplary embodiments according to the present invention will be described with reference to the drawings. FIG. 1 is a view of a substrate transport tray 1 according to the present invention as viewed from the side opposite to the film forming side, and FIG. 2 is a perspective view of an auxiliary frame member 2.
The substrate carrying tray 1 has a rectangular outer frame 3 made of stainless steel or aluminum having an opening 12 having an inner shape slightly larger than the outer shape of the maximum size glass substrate, and can be attached to the outer frame 3. It consists of an auxiliary frame member 2. A step portion 4 for supporting the glass substrate of the maximum size is provided with a constant thickness over the entire inner periphery of the opening 12 of the outer frame 3. A pair of recesses 5 and 6 are provided on two opposing sides of the inner shape of the outer frame 3. On the other hand, the auxiliary frame member 2 is formed with an upper step portion 7 and a lower step portion 8 extending in the longitudinal direction, and a pair of protrusions 10 and 11 are provided at both ends of the upper step portion 7 in the longitudinal direction. The auxiliary frame member 2 is attached to the substrate transport tray by engaging the upper protrusion 10 with the upper recess 5 and then engaging the lower protrusion 11 with the lower recess 6 to form the step of the outer frame 3. The upper stage portion 7 of the auxiliary frame member 2 is installed on the upper surface of the portion 4. It is assumed that the upper surface of the lower step portion 8 of the auxiliary frame member 2 and the upper surface of the step portion 4 of the outer frame 3 are in the same plane. The step t between the upper portion 7 and the lower portion 8 of the auxiliary frame member 2 is substantially the same as the thickness of the base plate to be installed in a substrate conveying tray. Thus, as will be described later, when installing the board and the pressing plate to the substrate conveying tray, these plates can be placed in parallel with the substrate transfer tray is convenient when the film formation.
[0013]
However, as a condition for attaching the auxiliary frame member 2, when the upper protrusion 10 is inserted into the upper recess 5 to some extent, the lower protrusion 11 can be inserted into the lower recess 6, and the lower side When the protrusion 11 is completely inserted into the lower recess 6, it is necessary that the upper protrusion 10 remains in the upper recess 5. This is the same as the attachment structure of the sliding door. That is, the mechanism is the same as the mechanism (hereinafter referred to as a withdrawal structure) in which the upper convex portion of the sliding door is fitted and lifted into the duck and then the lower concave portion of the sliding door is fitted into the sill and the entire sliding door is dropped and attached. . Here, the upper convex portion of the sliding door is on the upper protruding portion 10 of the auxiliary frame member, the lower concave portion of the sliding door is on the lower protruding portion 11, the duck is on the upper concave portion 5 of the outer frame, and the sill is on the lower side of the outer frame. It corresponds to the side recess 6.
[0014]
The upper surface of the lower portion of the auxiliary frame member of such a substrate conveying tray, on the upper surface of the stepped portion of the outer frame, set up a small glass board than the maximum size, the upper portion of the substrate upper surface auxiliary frame member 2 A presser plate is installed on the upper surface of 7. In the film forming apparatus, the substrate transport tray 1 is transported by being attached to the transport apparatus in a vertical state in which the lower concave portion 6 of the outer frame 3 is directed in the direction of gravity. The fitting structure of the present embodiment is an effective structure for preventing the dropout, particularly when the substrate carrying tray is carried in a vertical state.
[0015]
By the way, although the thing made from stainless steel or aluminum is used for the press plate of a present Example, this invention is not restricted to this. The presser plate according to the present invention may be any material as long as it can withstand deformation and alteration in the film forming process by CVD, sputtering, etc., and is suitable for attaching a ground to promote discharge. As a means for holding the holding plate on the substrate carrying tray, for example, as shown in the conventional example of FIG. 9 , there is a means for fixing fixing members at four positions on the outer frame with screws. However, the present invention is not limited to this means, and any means may be used as long as the holding plate holds the substrate with a sufficient pressure so that the substrate does not move during the film forming process.
[0016]
Thus, by adopting the above-described structure, the auxiliary frame member can be attached without using a fastening part. Also, even if there is a change in the size or thickness of the board, it is only necessary to prepare and replace the auxiliary frame member according to this change, so it is necessary to replace many parts involved in the change and redesign the board transport tray Hassle-free. Furthermore, since this change can be easily performed, a film-forming substrate meeting the needs of the market can be prepared quickly and at low cost. For example, it is not necessary to replace the substrate pressing plate in accordance with the size change of the substrate.
[0017]
1 and 2 , one opening 12 is provided in the outer frame 3, and a step 4 is provided on the entire inner periphery of the opening 12. However, the present invention is not limited to this, and a substrate carrying tray having a structure in which a plurality of openings are provided in the outer frame and the above-described auxiliary frame member is attached to the inner periphery of each opening may be used. Accordingly, there is an advantage that a plurality of substrates can be transported at a time by a single outer frame.
[0018]
Next, with reference to FIGS. 3 and 4, demonstrates another example of the substrate transfer tray according to the present invention below. Figure 3 is a view of the substrate transfer tray 20 from the back side, FIG. 4 is a C-C sectional view of FIG.
The substrate transport tray 20 includes an outer frame 21 and an auxiliary frame member 22 attached to the outer frame 21. The basic structure of the outer frame 21, FIG. 1, the same as the structure shown in FIG. The difference between the two is that the outer frame 3 according to FIG. 1 has a pair of recesses 5 and 6, whereas the outer frame of this embodiment has four locations provided on the auxiliary frame member 22. Corresponding to the projections 23, 24, 25, and 26, recesses 27, 28, 29, and 30 are formed at four locations. On the other hand, the auxiliary frame member 22 is formed with a lower step portion 31 supporting the surface of the substrate with a constant thickness, and an upper step portion 32 having a constant thickness is formed so as to surround the outer periphery of the lower step portion 31. Has been. Protrusions 23 to 26 are provided at both ends of the upper step 32 in the longitudinal direction. Then, after engaging the upper protrusions 23 and 24 with the upper recesses 27 and 28, the lower protrusions 25 and 26 are engaged with the lower recesses 29 and 30, so that the upper surface of the step 33 of the outer frame is formed. The auxiliary frame member 22 is attached to the outer frame 21 by placing the upper stage portion 32 of the auxiliary frame member 22 in an overlapping manner. The structure in which these protrusions engage with the recesses is the same as the pull-down structure in the substrate transport tray of FIG.
[0019]
A substrate 34 smaller than the maximum size is installed on the upper surface of the lower step portion 31 of the auxiliary frame member 22, and a pressing plate 35 is installed on the upper surface of the substrate and the upper step portion 32 of the auxiliary frame member. As a means for holding the presser plate 35 on the outer frame 21, for example, as shown in the conventional example of FIG. 9 , there is a means for fixing fixing members at four locations on the outer frame with screws. However, the present invention is not limited to this means, and any means may be used as long as the holding plate holds the substrate with a sufficient pressure so that the substrate does not move during the film forming process.
[0020]
3 and 4 , one opening 36 is provided in the outer frame 21, and a step 33 is provided on the entire inner periphery of the opening 36. However, the present invention is not limited to this, and a substrate carrying tray having a structure in which a plurality of openings are provided in the outer frame and the above-described auxiliary frame member is attached to the inner periphery of each opening may be used. Accordingly, there is an advantage that a plurality of substrates can be transported at a time by a single outer frame.
[0021]
By the way, some substrates are bent by heat generated during film formation. If the curved substrate is forcibly pressed, there is a risk of cracking depending on the thickness of the substrate. In order to cope with this, as shown in FIG. 5 , the internal stress of the substrate can be released by bending by setting the depth of the portion receiving the substrate 43 to be deeper than the thickness of the substrate. If this depth is set so as not to exceed 1 mm at most than the thickness of the substrate, this curvature can be accommodated when a general glass substrate is used.
[0022]
Next, referring to FIGS. 6 and 7, illustrating a further embodiment of the substrate transfer tray according to the present invention. FIG. 6 is a view of the substrate transport tray 50 as viewed from the side opposite to the film forming side. This figure shows a state where another auxiliary frame member 54 is engaged between the two auxiliary frame members 52 and 53 fitted in the outer frame 51. FIG. 7 is a perspective view of the substrate transport tray 50 with the auxiliary frame member removed. Structure of the outer frame 51 is the same as the structure of the outer frame 21 shown in FIG. Two auxiliary frame members 52 and 53 are attached by a pull-down structure over two opposing sides of the inner shape of the outer frame 51. Each of the auxiliary frame members 52 and 53 is formed with engaging portions 55 and 56 engraved in an L shape, and the projections 57 and 58 of the third auxiliary frame member 54 are formed on these engaging portions. By engaging, the third auxiliary frame member 54 is fitted into the auxiliary frame members 52 and 53. Similarly to the auxiliary frame members 52 and 53, the third auxiliary frame member 54 has a two-stage structure including an upper step portion 59 and a lower step portion 60, and the lower surface of the upper step portion 59 is a step of the outer frame. Supported by the upper surface of the part 61. The substrate is installed in a substrate receiving portion constituted by a step portion 61 of the outer frame, lower step portions 62 and 63 of the auxiliary frame members 52 and 53, and a lower step portion 60 of the third auxiliary frame member 54. Further, the presser plate is installed on the upper surface of the upper stage portions 59, 64, 65 of the auxiliary frame members 52, 53, 54. In the present embodiment, the outer frame 51 has one opening 66, but the present invention is not limited to this and may have a plurality of openings.
[0023]
For example, when the size of only one side of the substrate is changed, such a substrate transfer tray does not need to replace all the auxiliary frame members attached to the outer frame, and can quickly and flexibly change the size of the substrate. Yes.
[0024]
Next, referring to FIG. 8, the various shapes of the engaging portion formed on the outer frame (recess) 79 to 82 will be described below. Figure 8 (a) ~ (d) are those engaging portions, a view from Insert direction front. In the embodiment according to the present invention described above, the shape (a) is adopted. In the present invention, not only the shape of (a), but also the shape of (b) in which a concave groove is engraved, the shape of (c) in which a substantially rectangular groove is engraved and welded, etc., and the film formation surface It is possible to adopt the shape of (d) with more grooves. Among these shapes, an optimum shape is appropriately selected in consideration of the degree of influence on film formation, the size and thickness of the substrate transport tray, the size and thickness of the auxiliary frame member, and the like. Corresponding to these engaging portions, the shape of the protrusion (projection) of the auxiliary frame member can be selected from various shapes such as a square shape as well as a cylindrical shape.
[0025]
【The invention's effect】
As described above, the substrate transport tray according to the present invention is detachably attached to the outer frame by the outer frame having the stepped portion for supporting the substrate of the maximum size and the engaging means having the non-fastening structure, and is less than the maximum size. Since the substrate receiving portion is composed of an auxiliary frame member having a stepped portion that supports the substrate, the auxiliary frame member can be attached without using a fastening part, and the auxiliary frame member can be easily replaced. Therefore, even when there is a change in the size of the board, there is no need to replace a large number of components involved in the change and the redesign of the board transport tray, and the cost associated with the change can be kept low. Furthermore, the workability of the workers involved in the production of the film forming substrate can be greatly improved.
[0026]
Further, when the engaging means is composed of a pair of concave portions provided in the outer frame and convex portions provided at both ends of the auxiliary frame member, and this engaging means is based on a pull-down structure, the substrate transport When transporting the tray in a vertically placed state, it is effective for preventing the substrate from falling off.
[0027]
Further, when the substrate transport tray has a structure in which at least one auxiliary frame member is engaged and supported by another auxiliary frame member, it is possible to further attach the auxiliary frame member to the already attached auxiliary frame member. As a result, it is possible to reduce the number of parts exchange accompanying the minute size change of the board.
[0028]
Further, if the depth of the substrate receiving portion located between the upper surface of the auxiliary frame member and the substrate receiving surface is set so as not to exceed 1 mm at the maximum than the thickness of the film formation target substrate not exceeding the maximum dimension, the curvature of the substrate Since the internal stress can be released by allowing the substrate to crack, the cracks of the substrate can be prevented and the yield of the product can be improved.
[Brief description of the drawings]
FIG. 1 is a view showing an embodiment of a substrate carrying tray according to the present invention.
FIG. 2 is a perspective view of an auxiliary frame member according to the present invention.
FIG. 3 is a view showing an embodiment of a substrate carrying tray according to the present invention.
4 is a cross-sectional explanatory view taken along the line CC in FIG. 3 ;
FIG. 5 is a view showing a substrate carrying tray according to the present invention in which a curved substrate is installed.
FIG. 6 is a view showing an embodiment of a substrate carrying tray according to the present invention.
FIG. 7 is a perspective view of a substrate carrying tray according to the present invention.
FIG. 8 is a diagram showing various shapes of engaging portions formed on the outer frame.
FIG. 9 is a view showing a conventional substrate carrying tray.
10 is a D-D sectional view of FIG.
FIG. 11 is a cross-sectional explanatory view showing a typical film forming apparatus.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Substrate conveyance tray 2 Auxiliary frame member 3 Outer frame 4 Step part 5 Upper part recessed part 6 Lower part recessed part 7 Upper part part 8 Lower part part
10 Upper projection 11 Lower projection 12 Opening 20 Substrate carrying tray 21 Outer frame 22 Auxiliary frame members 23, 24 Upper projection 25, 26 Lower projection 27, 28 Upper recess 29, 30 Lower recess 31 Lower step 32 Upper stage portion 33 Step portion 34 Substrate 35 Presser plate 36 Opening portion 40 Plate transport tray 41 Outer frame 42 Auxiliary frame member 43 Substrate 44 Presser plate 50 Substrate transport tray 51 Outer frame 52, 53, 54 Auxiliary frame members 55, 56 L-shaped Engaging portion 57, 58 Protruding portion 59 Upper step portion 60 Lower step portion 61 Step portion 62, 63 Lower step portion 64, 65 Upper step portion 66 Opening portion 67, 68, 69, 70 Outer frame 71, 72, 73, 74 Upper step portion 75, 76, 77, 78 Lower step 79, 80, 81, 82 Recess 90 Substrate transport tray 91 Substrate 92 Outer frame 93 Step 94 Press plate 95 Fixing member 100 Film forming apparatus 101, 102 Substrate carrying Feed tray 103 Transport path 104, 105 Guide roller 106, 107 Guide 108, 109 Rack 110, 111 Motor 112, 113 Pinion

Claims (6)

One or a plurality of openings having an inner shape substantially matching the outer shape of the substrate with the largest dimension are provided, and a step portion for supporting the outer edge of the substrate with the largest dimension in the thickness direction is provided at the inner edge of the opening. An outer frame,
Auxiliary frame member having a step portion that is detachably attached to the outer frame using one or a plurality of engaging means having a non-fastening structure, and that supports the outer edge of the film formation target substrate having a maximum dimension or less in the thickness direction. And consist of
A substrate in which a step portion provided on the auxiliary frame member and a step portion provided on the outer frame constitute a single or a plurality of substrate receiving surfaces that support the outer edge of the film formation target substrate having a size less than the maximum dimension in the thickness direction. Carry tray.   The engaging means includes a pair of concave portions provided at corresponding positions on opposite inner sides of the outer frame, and convex portions that engage with the concave portions provided at both ends of the auxiliary frame member. Substrate transport tray.   2. The substrate transport according to claim 1, wherein the engaging means includes a plurality of the pair of concave portions according to claim 2 and a plurality of convex portions provided at both ends of the plurality of auxiliary frame members engaged with the concave portions. tray.   The substrate carrying tray according to claim 2 or 3, wherein the engaging means has a pull-down structure.   The substrate carrying tray according to any one of claims 1 to 4, wherein at least one auxiliary frame member is engaged and supported by another auxiliary frame member.   6. The depth of the substrate receiving portion located between the upper surface of the auxiliary frame member and the substrate receiving surface is set so as not to exceed 1 mm at most than the thickness of the film formation target substrate not exceeding the maximum dimension. The substrate carrying tray according to any one of the above.

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