JP3657756B2 - Filter device - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a filter device that can be suitably used for, for example, a high-purity gas used in a gas supply system of a semiconductor manufacturing apparatus.
[0002]
[Prior art]
For example, in semiconductor manufacturing equipment, gas supply paths for supplying process gases, inert gases, and other gases are not only cost-effective, easy to maintain, and have high performance, but also require higher performance such as durability and handleability. Depending on the purpose of use, various varieties such as the material, configuration, shape, and form of the filter medium are employed.
[0003]
For example, FIG. 6 shows a gas filter device A used by being interposed between a pair of pipes B and C, and screw parts D and E for joint connection to the pipes B and C are formed on both sides.
[0004]
The filter device A is filtered by a filter member F provided in the middle thereof, for example, a fluid to be treated which is sent from an inlet D1 surrounded by a housing G and connected to the pipe B. The clean fluid is sent out to the pipe C through the outlet E1.
[0005]
Also, for example, there is an integrated gas supply system in which each member for the gas supply system path such as a valve, a regulator, and a filter member is modularized and integrated in a unit to reduce the space of the apparatus and improve the maintainability. As shown in FIG. 7, an inflow port D1 and an outflow port E1 are provided on one surface of the base H, and a tubular or cap-shaped filter member F accommodated in a housing cap K raised on the other surface is used. Filter devices are sometimes used that filter and thereby cause the fluid to be treated to flow in a U-shape.
[0006]
[Problems to be solved by the invention]
However, in the filter device A shown in FIG. 6, the inlet D1 and outlet E1 on both sides, ie, opposite to each other, are connected to the pipes B and C, respectively, so that they can be removed for maintenance. When performing the operation, complicated and careful operation and high technology were required in connection with the fact that the filter device was an ultra-precision part.
[0007]
Moreover, the filter device A as shown in FIG. 6 has a large diameter because it needs to have a predetermined filtration area. Therefore, the interval between the pipes itself cannot be reduced, and it is difficult to reduce the size of the system.
[0008]
On the other hand, in the latter filter device A as shown in FIG. 7, since the rising height of the housing cap K is large, it is easily damaged by mistake, and the fluid to be treated also bypasses the housing in a U-shape. Therefore, there is a problem that the gas remaining in the gas supply system is barged, that is, inferior in the gas replacement property for so-called gas replacement, and the gas stays easily.
[0009]
In the filter device A shown in FIG. 7, a heater L is disposed on the base H. The heater L preliminarily heats the filter device A to, for example, 200 ° C., so that even if the fluid to be treated is a liquefied gas such as TEOS gas, the heater L is reliably prevented from being liquefied and filtered in a gas state. It is also intended. However, in the case where the filter member F is housed in the housing cap K having a large rising height from the base H as in the filter device A of FIG. 7, the base H can be heated by the heater L, but the filter member It is difficult to transfer heat up to F. Therefore, when the fluid to be treated is not sufficiently heated, there is a possibility that the fluid to be treated once liquefies, which makes smooth processing difficult.
[0010]
An object of the present invention is to provide a filter device that is excellent in protection of a filter member, filter characteristics, maintainability, and heat conductivity.
[0011]
[Means for Solving the Problems]
The invention according to claim 1 is a filter device for filtering the fluid to be treated which flows from the inlet provided in the base by the filtering part and flows out from the outlet, wherein the inlet and the outlet are on one surface of the base. The filtration unit includes a filtration chamber in which a terminal end of an inflow passage leading to the inflow port and a start end of the outflow passage leading to the outflow port are open and recessed in the other surface of the base, and a terminal end and a start end And a top plate for sealing the filtration chamber .
[0012]
The filter device of the present invention does not have a housing cap projecting high from the base as in the device of FIG. 7, and when using a highly accurate and highly efficient filter member, the device can be easily downsized, and the filter member can be mounted on the other side. Since it is accommodated in the filtration chamber recessed in the cover and covered with the top plate, accidents such as breakage of the filter member can be eliminated.
[0013]
In addition, since the inlet and outlet of the fluid to be processed are provided on one surface side of the base body, it can be easily attached to and detached from the mounting base using a sealing material or the like, and the maintainability is improved.
[0014]
Furthermore, since the filter member is built in the base body, the temperature rise of the entire filter device can be streamlined by arranging the heater in contact with the base body, and the trouble that the fluid to be treated is filtered in a liquefied state is reduced.
[0015]
Further, in the invention of claim 1, the top plate has the same diameter as the filtration chamber and is inserted into the filtration chamber, and the filter member includes a wall step portion protruding from the wall surface of the filtration chamber and the top plate. It is mechanically sealed by being pinched with the peripheral edge, and the top plate is fixed by welding to the base after the insertion. As a result, leakage at the outer peripheral portion can be reliably prevented, and the filter area can be reduced by intrusion of the melt, such as when the filter medium is directly melted or attached, and the filter medium can be deformed or damaged due to thermal effects. Can suppress troubles such as welding fume remaining on the filter medium.
[0016]
According to a second aspect of the present invention, the filter member is composed of a filter medium provided with a flange portion on the outer peripheral portion, and two ring bodies that press both surfaces of the flange portion from above and below to mechanically seal. Thus, the filter medium can be indirectly mounted in the filtration chamber via the ring body, and at this time, the flange portion of the porous filter medium is sandwiched between the ring bodies, so that damage to the outer peripheral portion can be prevented, and the ring body Can be attached by welding directly to the filtration chamber, and the attachment becomes easy.
[0017]
At this time, since the degree of leakage between the filter medium and the ring body can be confirmed in the state of the filter member alone, it can be selected before the defective filter member is incorporated in the substrate, thereby contributing to cost reduction.
[0018]
In the present specification, the term “mechanical seal” means that sealing is performed without being leaked by compaction by mechanical pressing or clamping pressure without using adhesion using an adhesive, welding with melting, or the like. A method of pressing and clamping by screw engagement, press fitting, and the like.
[0019]
Further, as a mechanical seal, the applicant proposed by Japanese Patent Application Laid-Open No. 6-63329 and Japanese Utility Model Application No. 5-6135, etc., and sandwiching the filter medium between two members that are fitted in a spigot, and an outer surface matching portion of the member It is also possible to include a method in which only the filter medium is welded and the filter medium is firmly sealed by heat shrinkage at that time.
[0020]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings.
1 to 4, the filter device 1 includes a filtering unit 5 that is sealed by a top plate 3 and has a filter member 4 on a rectangular parallelepiped block-shaped base 2 made of, for example, stainless steel.
[0021]
The base body 2 is provided with an inlet 12 into which a fluid to be processed such as gas flows and an outlet 13 through which the fluid to be processed processed by the filtration unit 5 flows out on both sides of the rectangular surface 2A. In addition, an upper open and bottomed filtration chamber 15 for forming the filtration unit 5 is recessed in the other surface 2B.
[0022]
The filtration chamber 15 is formed with a small step-like wall step 16 protruding from the wall surface over the entire wall surface. The inflow port 12 and the outflow port 13 are opened at a counterbore portion 17 on one surface 2A, and the end 12A is opened at the inflow port 12 at a position above the wall surface of the filtration chamber 15 and the wall step portion 16. The inflow path 21 is continuously provided, and the outflow path 22 is formed below the wall step portion 16, for example, the bottom surface 22 </ b> A opens at the bottom surface and communicates with the outflow port 13.
[0023]
Further, the end 21A and the start end 22A can form a slanted flow path in the filtration chamber 15, thereby preventing retention of the fluid to be treated and improving the filtration efficiency. In addition, each flow path is formed smoothly for stay prevention.
[0024]
In this example, the filter member 4 is made of a filter medium 4A using a material having corrosion resistance to the fluid to be treated, such as stainless steel and titanium, and also having heat resistance and mechanical strength. Then, the filter medium 4A has a disc shape so as to have a flange portion 10 for reducing the thickness and sealing the outer peripheral portion. In addition, if it can be accommodated in the filtration chamber 15, it can be formed in a hat shape, a cup shape, a funnel shape, etc. However, as long as the filtration characteristics can be satisfied, the disk shape that can simplify the structure is preferable. .
[0025]
As a filter medium 4A for the filter member 4 for this purpose, the applicant proposed in WO93 / 06912 previously filed with PCT, for example, the porous support 4a shown in FIG. A laminated filter medium in which the fine layer 4b is formed by suction and integrated by sintering can be used for high-purity gas used for semiconductor manufacturing, precision of other fluids to be processed, and for ultrafiltration.
[0026]
The proposed filter medium 4A has a small amount of residual impurities and a thin surface fine layer, so that it has high accuracy and low pressure loss. Therefore, even when the area is reduced to make a disk shape, it has high efficiency and high accuracy. Filtration is possible. According to the proposed method, a complicated shape other than a disk shape can be formed.
[0027]
In this example should be noted that the filtration accuracy 0.003μm by such filtration structure, the line pressure of 2 kg / cm ^2, the dimension (thickness 0 pressure loss △ P has a characteristic of 0.3 kg / cm ² at a flow rate of 10 l / min .6 mm, outer diameter 24 mm), that is, a disk-shaped filter medium 4A is used.
[0028]
In the case where the filter member 4 is made of only the filter media. 4A, and the peripheral portion of the front Kitenban 3, the flange of the filter medium 4A outer periphery by mechanically seal clamping pressure compaction between the Kabedan 16 The fluid to be processed in the portion 10 is prevented from leaking .
[0029]
In this example, the top plate 3 is composed of, for example, a disc body 3A having the same diameter as the filtration chamber 15 and a cylindrical insertion portion 3B that hangs down at the peripheral edge of the disc body 3A. Further, the top plate 3 is preferably hermetically attached so that the insertion portion 3B is press-fitted into the filtration chamber 15 and no gap is formed between the top wall 3 and the wall surface of the filtration chamber 15, thereby preventing the occurrence of a fluid retention portion. The Further, the lower surface of the taper taper portion formed at the lower end of the insertion portion 3B mechanically seals while compressing and compressing the flange portion 10 of the filter medium 4A of the filter member 4 with the wall step portion 16.
[0030]
The filter member 4 positions the fine layer 4b on the downstream side of filtration, that is, on the outlet 13 side. Incidentally, the top plate 3 and attach it by welding after insertion to form the weld w1. The top plate 3 can also be separately formed and inserted portion 3B and the disk body 3A, this time, the disc member 3A is fixed by solvent deposition.
[0031]
The top plate 3 has a top surface that is aligned with the other surface 2B of the base 2 so that the filter member 4 can be preferably sealed, and the insertion portion 3B has a transparent end where the end 21A of the inflow passage 21 is aligned. A hole 25 is provided.
[0032]
FIG. 5 shows an embodiment in which the filter member 4 includes a filter medium 4A and ring bodies 4B and 4C. At this time, as shown in FIG. 5, one ring body 4B has a small depth having a receiving portion 27b that can be seated by inserting only a part of the lower portion of the outer periphery of the filter medium 4A into the upper surface 27a of the annular base 27. A cutout portion 27c is formed, and an insertion portion 27d for fitting the spigot is provided on the outside thereof, and an overhanging portion 27e for attachment is provided on the outer periphery.
[0033]
The other ring body 4C has a cut-out having a receiving portion 29b in contact with, for example, the upper surface of the peripheral portion of the filter medium 4A, and a fitting portion 29c that forms an inlay with the fitting portion 27d on the lower surface 29a of the annular base portion 29. A notch 29d is provided.
[0034]
In the state in which the filter medium 4A is arranged between the receiving portions 27b and 29b and the ring bodies 4B and 4C are fitted together by the fitting of the fitting portions 27d and the fitting portions 29c, and in contact with each other, A gap g is maintained between the upper surface 27a of the body 4B and the receiving portion 29b of the ring body 4C.
[0035]
In addition, the ring bodies 4B and 4C form a welded portion W2 that is welded to each other at the outer peripheral joint portion, so that the filter medium 4B is mechanically sealed between the ring bodies 4B and 4C by shrinkage after heating due to local melting. The
[0036]
By using such a set body as the filter member 4, the protruding portion 27e can be easily and efficiently attached to the wall step portion 16 of the filtration chamber by welding or the like. Further, leakage from the outer peripheral portion of the filter medium 4A can be tested in advance as a filter member 4 alone before assembly of the device, and the risk of occurrence of defects after assembly is reduced. The filter member 4 can also be attached with the above-described sealing material interposed.
[0037]
As shown in FIG. 2, the base 2 is provided with bolt holes 31 for mounting 31, bottomed small holes 32 for positioning, and the like around the filtration chamber 15 at four corners.
[0038]
Such a filter device 1 flows from the inlet 12 through the inflow path 21 and the through hole 25 into the filter chamber 15 of the filter unit 5 from the upstream side of the filter member 4, and is filtered by the filter member 4. A flow path that flows out to the outflow port 13 through the outflow path 22 is formed.
[0039]
Further, as shown by the one-dot chain line in FIG. 1, such a filter device 1 is configured such that the bolt is connected to a flat surface of a mounting base 34 provided with guide holes communicating with the inlet 12 and the outlet 13 via a sealing material (not shown). It can be fixed by bolting with a bolt passing through the hole 31. Further, piping can be directly connected to the inlet 12 and the outlet 13. Furthermore, the filter device 1 of the present invention can be widely used for applications other than gas supply for semiconductor manufacturing.
[0040]
【The invention's effect】
As described above, the filter device according to the first aspect can be made compact by housing the filtration portion inside the base body, and can prevent danger such as breakage of the filter member.
[0041]
Also, since the attachment only by mechanically sealed off Iruta member can be suppressed prone performance degradation caused by such welding, and as in the invention of claim 2, the filter member of the filter medium and the ring member By setting it as a set, it is possible to prevent the filter medium from being accidentally damaged during assembly. In addition, it is possible to perform a leak test in advance on the filter member, thereby suppressing the occurrence of defects, reducing the damage caused by the defects, and improving the manufacturing efficiency.
[Brief description of the drawings]
FIG. 1 is a cross-sectional view showing an embodiment of a filter device of the present invention.
FIG. 2 is a bottom view thereof.
FIG. 3 is an exploded perspective view thereof.
FIG. 4 is an enlarged cross-sectional view of a main part thereof.
FIG. 5 is a cross-sectional view showing another example of a filter member.
FIG. 6 is a cross-sectional view illustrating a conventional filter device.
FIG. 7 is a cross-sectional view illustrating another conventional filter device.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Filter apparatus 2 Base | substrate 2A One side 2B Other side 3 Top plate 4 Filter member 4A Filter medium 4B, 4C Ring body 5 Filtration part 10 Head part 12 Inlet 13 Outlet 15 Filtration chamber 16 Wall step part 21 Inflow path 21A Termination 22 Outflow path 22A Start

Claims (5)

A filter device for filtering a fluid to be treated which flows in from an inflow port provided in a substrate by a filtering unit and outflowing from the outflow port,
The inflow port and the outflow port are provided on one surface of the base body, and the filtering unit has an opening at the end of the inflow passage leading to the inflow port and the start end of the outflow passage leading to the outflow port. a filtration chamber which is recessed in a filter member interposed in the flow path between the end and the starting end in the filtration chamber, Ri Do and a top plate for sealing the filter chamber,
The top plate has the same diameter as the filtration chamber and is inserted into the filtration chamber.
The filter member is mechanically sealed by being sandwiched between the wall step protruding from the wall surface of the filtration chamber and the peripheral edge of the top plate,
In addition , the filter device is characterized in that the top plate is fixed by being welded to the base after insertion . A filter device for filtering a fluid to be treated which flows in from an inflow port provided in a substrate by a filtering unit and outflowing from the outflow port,
The inflow port and the outflow port are provided on one surface of the base body, and the filtering unit has an opening at the end of the inflow passage leading to the inflow port and the start end of the outflow passage leading to the outflow port. A filtration chamber recessed in the filter chamber, a filter member interposed in the flow path between the terminal end and the start end in the filtration chamber, and a top plate for sealing the filtration chamber,
And this top plate has the same diameter as the filtration chamber and can be inserted into the filtration chamber,
The filter member comprises a set body having a filter medium and two ring bodies that are pressed from the outer peripheral portion of the filter medium in a vertical direction and are welded and sealed at the outer periphery, and the set body is attached to the filtration chamber.
In addition , the filter device is characterized in that the top plate is fixed by being welded to the base after insertion . The filter device according to claim 1, wherein an upper surface of the top plate is aligned with the other surface of the base body. The said filter member 4 is a laminated filter material which provided the fine layer which consists of a fine particle in the surface of the filtration downstream side of a porous support body, and was integrated by sintering. Filter device. The filter device according to claim 1, wherein the base includes a bolt hole through which a bolt for bolting the base passes .

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