JP3574098B2 - Copying device - Google Patents

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a copying apparatus.
[0002]
[Prior art]
2. Description of the Related Art Conventionally, for example, in an apparatus for bonding a semiconductor chip on a substrate, a copying apparatus has been used in order to make the joint surfaces of the two parallel with high precision. The copying apparatus is also used in other fields such as mounting of optical components.
[0003]
In such a copying apparatus, an oscillator having a convex spherical portion is rotatably supported on a base having a concave spherical portion. Then, when the specific surface of the semiconductor chip as the object is brought into contact with the work contact surface (copying surface) of the oscillator at the center of curvature of the convex and concave spherical portions, the oscillators are orthogonal to each other on the same plane. It rotates around the X axis and the Y axis. By this rotation, the workpiece abuts on the oscillating body so as to be parallel to the specific surface of the semiconductor chip.
[0004]
[Problems to be solved by the invention]
However, in the conventional copying apparatus, for example, in the bonding apparatus as described above, the heater unit is attached to the oscillator, and the oscillator and the pipe attached to the heater unit pull the oscillator in the initial state ( (Before the copying operation), it may be in a state inclined from the horizontal plane. This inclination depends on the side on which the wiring and the pipe extend, and to which side the oscillator is inclined changes depending on the installation environment of the copying apparatus.
[0005]
Further, when the weight balance of the oscillator itself is eccentric, the oscillator is inclined from a horizontal plane by its own weight. For example, such a phenomenon occurs in a case where a slit is formed in an oscillating body as disclosed in Japanese Patent Application Laid-Open No. 11-281864.
[0006]
Such an inclination of the oscillating body interferes with copying in an environment where precise operations such as bonding of a semiconductor chip and attachment of an optical component are required. That is, since the copying apparatus used here performs fine adjustment of the inclination, if the oscillating body is inclined, for example, 0.3 degrees or more from the horizontal plane in the initial state, it is possible to perform the copying operation well. It may not be possible, or the object such as a semiconductor chip may be damaged.
[0007]
The present invention has been made in view of the above circumstances, and a main object of the present invention is to provide a copying apparatus suitable for precise copying operation regardless of imbalance or the like of an oscillator based on an installation environment of the copying apparatus. Is what you do.
[0008]
Means for Solving the Problems and Effects of the Invention
Means effective for achieving the above object are shown below. The operation and the like will be described as needed.
[0009]
Means 1. A concave spherical portion is provided on one of the base and the oscillator, and a convex spherical portion is provided on the other, and the concave spherical portion and the convex spherical portion are opposed to each other, so that the oscillator is formed on the base along the spherical surface. Are configured to swing, and the swinging body or a part of the work installed on the swinging body is set as a contact surface to be brought into contact with a specific surface of a counterpart work, and the contact surface and the specific surface are brought into contact with each other. In a copying apparatus in which an oscillating body is oscillated such that an abutting surface is parallel to a specific surface by an operation of contacting,
An apparatus according to claim 1, further comprising an adjusting means for adjusting said oscillating body so that said contact surface and said specific surface are substantially parallel in advance.
[0010]
According to the means (1), when the angle between the contact surface and the specific surface is large, the contact surface and the specific surface can be made substantially parallel by adjusting the rocking body in advance by the adjusting means. Therefore, even if the contact surface is greatly inclined with respect to the specific surface due to some factor, a precise copying operation can be smoothly performed after the above adjustment.
[0011]
Means 2. A concave spherical portion is provided on one of the base and the oscillator, and a convex spherical portion is provided on the other, and the concave spherical portion and the convex spherical portion are opposed to each other, so that the oscillator is formed on the base along the spherical surface. Are configured to swing, and the swinging body or a part of the work installed on the swinging body is set as a contact surface to be brought into contact with a specific surface of a counterpart work, and the contact surface and the specific surface are brought into contact with each other. In a copying apparatus in which an oscillating body is oscillated such that an abutting surface is parallel to a specific surface by an operation of contacting,
The rocking body and the base are formed with a slit that opens from a central portion toward a predetermined outer peripheral portion,
An adjusting means is provided at least at a position opposite to the side where the slit is opened to adjust an end of the rocking body so as to adjust the contact surface and the specific surface to be substantially parallel in advance. And copying equipment.
[0012]
According to the means 2, a slit is formed in the rocking body and the base so as to open from the central portion to a predetermined outer peripheral portion. Therefore, when a work having a long object (for example, an optical component with a lead wire) is mounted on the oscillator and a contact surface is set on the work, the long object is passed through the slit. It is possible to prevent an excessive bending force or the like from being applied to the long object.
[0013]
However, in this case, due to the formation of the slit, the balance of the oscillating body's own weight is lost, and the oscillating body may be tilted toward the opposite side of the slit due to the own weight. At this time, the inclination can be corrected by the adjusting means, and after the adjustment, a precise copying operation can be smoothly performed.
[0014]
Means 3. A concave spherical portion is provided on one of the base and the oscillator, and a convex spherical portion is provided on the other, and the concave spherical portion and the convex spherical portion are opposed to each other, so that the oscillator is formed on the base along the spherical surface. Are configured to swing, and the swinging body or a part of the work installed on the swinging body is set as a contact surface to be brought into contact with a specific surface of a counterpart work, and the contact surface and the specific surface are brought into contact with each other. In a copying apparatus in which an oscillating body is oscillated such that an abutting surface is parallel to a specific surface by an operation of contacting,
A plurality of adjusting means for pushing up the end of the oscillating body are evenly arranged on the outer peripheral portion of the oscillating body, and the adjustment is performed by each adjusting means so that the contact surface and the specific surface are adjusted to be substantially parallel in advance. A copying apparatus characterized in that:
[0015]
According to the means 3, the adjusting means can perform adjustment such as pushing up the end of the rocking body, and since a plurality of such adjusting means are uniformly arranged on the outer peripheral portion of the rocking body, the contact surface can be adjusted. In the case where the angle formed between the contact surface and the specific surface is large, the contact surface and the specific surface can be made substantially parallel by pushing up and adjusting the end of the oscillating body by each adjusting means in advance. Therefore, even if the contact surface is greatly inclined with respect to the specific surface due to some factor, a precise copying operation can be smoothly performed after the above adjustment.
[0016]
Means 4. The adjusting means adjusts the elastic force of the elastic member interposed between the base and the oscillating body, and applies a repulsive force of the elastic member according to the adjustment to the push-up side of the oscillating body. The copying apparatus according to any one of means 1 to 3, further comprising an adjustment member for causing the copying apparatus to perform the adjustment.
[0017]
According to the means 4, the inclination of the oscillator is adjusted by adjusting the elastic force of the elastic member by the adjusting member. At this time, since the oscillating body is merely supported on the base by the elastic member, it can be set so that the copying operation is not adversely affected.
[0018]
Means 5. 5. The copying apparatus according to claim 4, wherein the adjustment member adjusts the elastic member in a direction in which the elastic member is compressed.
[0019]
Means 6. A concave spherical portion is provided on one of the base and the oscillator, and a convex spherical portion is provided on the other, and the concave spherical portion and the convex spherical portion are opposed to each other, so that the oscillator is formed on the base along the spherical surface. Are configured to swing, and the swinging body or a part of the work installed on the swinging body is set as a contact surface to be brought into contact with a specific surface of a counterpart work, and the contact surface and the specific surface are brought into contact with each other. In a copying apparatus in which an oscillating body is oscillated such that an abutting surface is parallel to a specific surface by an operation of contacting,
Two adjusting means for lifting and pushing down the end of the rocking body are unevenly arranged on the outer circumference of the rocking body, and the two contacting means are adjusted so that the contact surface and the specific surface become substantially parallel in advance. A copying apparatus characterized in that the copying is performed.
[0020]
According to the means (6), the adjusting means can perform adjustment such as pushing up or down the end of the rocking body, and two such adjusting means are unevenly arranged on the outer peripheral portion of the rocking body. Therefore, when the angle between the contact surface and the specific surface is large, the contact surface and the specific surface can be made substantially parallel by pushing up and adjusting the end portion of the oscillator in advance by each adjusting means. . Therefore, even if the contact surface is greatly inclined with respect to the specific surface due to some factor, a precise copying operation can be smoothly performed after the above adjustment. It is to be noted that the non-uniformity is that if the two adjusting means are arranged evenly, that is, at opposite positions, the inclination in the axial direction connecting these two adjusting means can be corrected, but the inclination intersecting with it can be corrected. Because you can't. When the Z-axis is a perpendicular line from the spherical center of the concave spherical part and the convex spherical part to the oscillator through the center of the oscillator, the X-axis and the Y-axis are orthogonal to the XY plane. It is optimal to place each on the top.
[0021]
Means 7. The adjusting means includes a first elastic member and a second elastic member interposed between the base and the oscillator, and a first elastic member corresponding to the adjustment by adjusting the elastic force of the first elastic member. An adjusting member that adjusts the resilient force of the second elastic member to act on the push-down side of the oscillator while adjusting the elastic force of the second elastic member. The copying apparatus according to claim 6, further comprising:
[0022]
According to the means (7), the inclination of the oscillating body is adjusted by adjusting the elastic force of each of the first and second elastic members by the adjusting member. At this time, since the oscillating body is only supported on the base by the first and second elastic members, it is possible to set so that the copying operation is not adversely affected.
[0023]
Means 8. 8. The copying apparatus according to claim 1, wherein the adjusting unit includes a stopper for preventing the swinging body from falling off the base.
[0024]
According to the means 8, since the rocking body is prevented from falling off by the stopper provided in the adjusting means, there is no need to provide another mechanism for preventing the rocking body, and the configuration is simplified.
[0025]
Means 9. 9. The copying apparatus according to claim 1, wherein the adjusting unit further includes a lock mechanism that locks the swinging body so that the swinging body cannot swing with respect to the base.
[0026]
According to the means 9, since the adjusting means is provided with a mechanism for locking the oscillating body, handling is very convenient if the oscillating body is locked when the copying apparatus is transported or the work is attached to the oscillating body.
[0027]
Here, it is preferable that the stopper of the means 8 doubles as the lock mechanism. As the method, the stopper is configured to be moved by the adjusting means (for example, the stopper is integrally provided with the adjusting member), and the base or the rocking body side is moved so that the stopper prevents the rocking of the rocking body at the adjustment limit position. It is conceivable to set so as to be engaged with.
[0028]
Means 10. A mechanism for generating a static pressure by supplying a pressurized gas between the concave spherical portion and the convex spherical portion, and generating a negative pressure by sucking a gas between the concave spherical portion and the convex spherical portion The copying apparatus according to any one of means 1 to 9, further comprising a mechanism.
[0029]
According to the means 10, when the specific surface is brought into contact with the contact surface, a smooth copying operation is realized by applying a static pressure. After the copying operation is completed, a negative pressure is applied by applying a negative pressure. The work can be performed while maintaining the parallel state between the contact surface and the specific surface.
[0030]
Means 11. The adjusting device includes a first block fixed to the base side, a second block fixed to the rocking body side, and an elastic member disposed between the two blocks to hold the two blocks in a non-contact state. The copying apparatus according to any one of means 1 to 10, further comprising an elastic member) and an adjusting screw (the adjusting member) for adjusting an elastic force of the elastic member.
[0031]
According to the means 11, since the adjusting device includes the first block, the second block, and the elastic member and the adjusting screw provided in connection with the first block and the second block, the adjusting device is easily attached to the existing copying apparatus. The design can be easily changed even if it cannot be mounted.
[0032]
BEST MODE FOR CARRYING OUT THE INVENTION
[First Embodiment]
Hereinafter, the first embodiment will be described with reference to FIGS. 1 is a perspective view of the copying apparatus, FIG. 2 is a plan view of the copying apparatus, FIG. 3 is a right side view of the copying apparatus, FIG. 4 is a structural sectional view of the copying apparatus, and FIG. FIG. 6 is a cross-sectional view taken along line AA of FIG. In the following, the vertical direction (vertical direction) of the copying apparatus is defined as a Z-axis direction, and directions orthogonal to the Z-axis on a plane (horizontal plane) orthogonal to the Z-axis direction are defined as an X-axis direction and a Y-axis direction. Description will be given as an axial direction. The same applies to other embodiments.
[0033]
As shown in FIGS. 1 to 6, the copying apparatus 1 includes a base 2 as a first member. The base 2 is made of metal in the present embodiment. The base 2 is fixed at a predetermined position during use. An annular porous body 3 is fixed to the upper surface of the base 2. The upper surface of the porous body 3 is formed to be a concave spherical portion 4.
[0034]
In this embodiment, graphite is used for the porous body 3. The porous body 3 may be made of a metal material such as sintered aluminum, sintered copper, or sintered stainless steel, or may be made of sintered trifluoride resin, sintered tetrafluoride resin, sintered nylon resin, sintered nylon resin, or the like. It can also be made of synthetic resin material such as sintered polyacetal resin, sintered carbon, sintered ceramics, or the like.
[0035]
A pair of left and right side plates 5 are fixed to the base 2 with four bolts 6 respectively. On one side plate 5, a pressure port 7 and a vacuum port 8 are formed. On the side of the base 2 corresponding to the pressurizing port 7 and the evacuation port 8, an air passage 9 (only an air passage facing the pressurizing port 7 is shown in FIG. 4) communicating with the respective ports 7, 8 is formed. I have. Further, a seal packing 10 is provided at a joint portion between the base 2 and the side plate 5 in order to prevent air leakage from gaps between the ports 7 and 8 and the air passage 9.
[0036]
Each air passage 9 is formed on the upper surface of the base 2 and communicates with an annular groove 11 located on the rear surface of the porous body 3. Accordingly, when pressurized air as a pressurized fluid from a pressure source (not shown) is supplied to the porous body 3 through the pressurizing port 7, the air passage 9, and the annular groove 11, the porous body 3 Pressurized air is uniformly jetted from the entire concave spherical portion 4 as the surface. On the other hand, when air is suctioned by a suction pump (not shown) through the vacuum evacuation port 8, the air passage, and the annular groove 11, the suction force reaches the entire concave spherical portion 4 which is the surface of the porous body 3.
[0037]
An oscillating body 15 as a second member is arranged on the concave spherical portion 4 of the porous body 3. The rocking body 15 is made of metal in the present embodiment. The lower surface side of the oscillating body 15 is formed to be a convex spherical portion 16. The radius of curvature of the convex spherical portion 16 is the same as the radius of curvature of the concave spherical portion 4. Therefore, the convex spherical portion 16 of the oscillating body 15 is in a state of overlapping with the concave spherical portion 4 of the porous body 3. In the present embodiment, the copying apparatus main body is composed of the base 2 as the first member and the rocking body 15 as the second member.
[0038]
Here, a copying operation of the copying apparatus will be described. On the upper surface side of the oscillating body 15, the first work is fixed at a position that is the center of curvature of the concave spherical portion 4 and the convex spherical portion 16. On the other hand, the second work is abutted against the first work from above. At this time, pressurized air is supplied from the pressurized port 7, and pressurized air is jetted from the entire surface of the porous body 3. By the pressurized air, a static pressure is generated between the concave spherical portion 4 of the porous body 3 and the convex spherical portion 16 of the oscillating body 15. In this state, when the second work is pressed against the first work, the rocking body 15 is appropriately rotated (swinged) about the X axis and the Y axis in order to correct the displacement of the opposing surfaces of the two works. Then, the copying operation is performed such that the opposing surfaces between the workpieces are parallel to each other and come into surface contact. The copying operation of the oscillating body 15 is performed with a very small force because the static pressure is generated between the concave spherical portion 4 and the convex spherical portion 16 as described above, and the work is damaged. The likelihood has been reduced.
[0039]
When the copying operation is completed, the supply of the pressurized air from the pressurizing port 7 is stopped, and a vacuum is drawn between the concave spherical portion 4 and the convex spherical portion 16 through the vacuum port 8 to thereby reduce the negative pressure. Pressure. Thereby, the concave spherical portion 4 and the convex spherical portion 16 are pressed against each other, and the oscillator 15 is fixed on the base 2. In this state, a predetermined work by the first work and the second work, for example, a work of welding the first work and the second work can be performed. After the work is completed, the first work is removed and the same work is performed again.
[0040]
Other components of the copying apparatus 1 will be described. A pair of shaft rods 17 are fixed to both left and right sides of the rocking body 15. Each of the shaft bars 17 protrudes to the side of the rocking body 15. Each of the side plates 5 is formed with a through hole 18 having a slightly larger diameter than the shaft rod 17. Then, the right and left shaft rods 17 of the rocking body 15 are respectively passed through the through holes 18 of the side plate 5, and the side plate 5 is fixed to the base 2 by the bolts 6. It is in a state of being supported between the plates 5.
[0041]
In particular, since the diameter of the through hole 18 is larger than that of the shaft rod 17, the swinging body 15 is supported by the side plate 5 with a little play, and the above-described copying operation of the swinging body 15 is prevented. Absent. That is, the function performed by the shaft rod 17 and the through hole 18 prevents the rocking body 15 from dropping off the base 2 and prevents the rocking body 15 from rotating significantly from a predetermined initial position. It just keeps the position.
[0042]
By the way, in the present embodiment, the base 2 and the rocking body 15 are located near the center of the plane so that the first work provided on the rocking body 15 side can correspond to, for example, a case where a lead wire is integrally provided. Slits 21 and 22 that open toward the front side are formed. Therefore, when the first work provided with the lead wire is set on the rocking body 15, the lead wire is moved onto the rocking body 15 from the front opening side of the slits 21 and 22 so that the lead wire is slit. What is necessary is just to guide into 21 and 22. Accordingly, disconnection or the like due to bending of the lead wire can be prevented, and attachment / detachment work of the first work becomes easy.
[0043]
Here, due to the slit 22 formed in the oscillator 15, the center of gravity of the oscillator 15 is located behind the center position. As a result, the rocking body 15 is inclined backward in the natural state. The copying apparatus 1 hinders a precise copying operation if the inclination of the oscillating body 15 is more than 0.3 degrees with respect to the horizontal. However, the apparatus in which the slit 21 is formed in the oscillating body 15 as described above. However, there is a possibility that the limit value may be exceeded.
[0044]
Therefore, in the present embodiment, an adjusting device 25 is provided to correct the inclination of the oscillating body 15 based on its own weight. The adjusting device 25 will be described below.
[0045]
The adjusting device 25 includes a first block 26 fixed to the rear surface of the base 2 and a second block 27 fixed to the rear surface of the rocking body 15. The second block 27 is disposed above the first block 26 with a slight gap.
[0046]
The first block 26 is formed with a housing recess 28 extending vertically and opening upward. The housing recess 28 houses a coil spring 29 as an elastic member. A support pin 30 is provided at a lower portion of the first block 26, and the support pin 30 protrudes upward in the accommodation recess 28. The lower inner peripheral side of the coil spring 29 is supported by the support pins 30, and the lower end side of the coil spring 29 is positioned.
[0047]
A screw hole 31 extending in the vertical direction and penetrating in the vertical direction is formed in the second block 27, and an adjusting screw 32 as an adjusting member is screwed into the screw hole 31. A spring retainer 33 is formed on the lower end of the adjusting screw 32 and is in contact with the upper end of the coil spring 29. A support pin 34 that supports the upper inner peripheral side of the coil spring 29 is formed at the lower end of the spring retainer 33.
[0048]
The coil spring 29 is held in a compressed state between the bottom surface of the housing recess 28 and the spring retainer 33. Here, since the base 2 is fixed at a predetermined position, the first block 26 is on the fixed side, and since the oscillator 15 is not fixed, the second block 27 is on the movable side. Therefore, the second block 27 is pressed upward against the first block 26 by the repulsive force of the coil spring 29. As a result, the rocking body 15 is lifted upward at the rear and pivots so that the front moves downward.
[0049]
Since a minus slot 35 is formed in the head at the upper end of the adjusting screw 32 so that a minus driver can be used, the vertical position of the adjusting screw 32 can be adjusted by the minus driver. When the adjustment screw 32 is moved downward by this adjustment, the coil spring 29 is compressed, and the repulsive force thereby increases, and the second block 27 is adjusted to the ascending side. On the other hand, if the adjusting screw 32 is moved upward, the second block 27 is adjusted to the lower side. By this adjustment, the initial position of the rocking body 15 in the natural state can be kept substantially horizontal. In addition, when this adjustment was actually performed, it was possible to adjust even the amount of division to about 0.1 degree.
[0050]
By such adjustment, even if there is a factor such as the slit 22 that tilts the rocking body 15, the tilting of the rocking body 15 can be corrected in advance, so that the copying operation can be performed smoothly. Further, since the adjustment can be performed at any time by the adjusting screw 32, readjustment can be easily performed even if the oscillator 15 is tilted again by exchanging a jig mounted on the oscillator 15 or the like.
[0051]
In addition, since the adjusting device 25 in the present embodiment presses the first block 26 by a repulsive force based on the compression of the coil spring 29, it is not possible to perform the positive adjustment of pulling the first block 26 downward. . That is, it is a so-called single-acting adjusting device 25. However, when it is clear that the rocking body 15 is inclined backward due to the presence of the slit 22 as in the present embodiment, it is sufficient to provide only one such single-acting adjusting device 25.
[0052]
A fixing screw 36 is screwed into the second block 27 in a horizontal direction from a side surface thereof. By adjusting the screwing position of the fixing screw 36, it is possible to switch between a state in which the fixing screw 36 is pressed against the peripheral surface of the adjusting screw 32 and a state in which the adjusting screw 32 is separated from the peripheral surface. Therefore, during the adjustment by the adjusting screw 32, the fixing screw 36 is separated to make the adjustment by the adjusting screw 32 smooth, and after the adjustment by the adjusting screw 32 is completed, the fixing screw 36 is brought into a state of being pressed against the adjusting screw 32. 32 can be prevented from shifting.
[0053]
Next, an application example of the first embodiment will be described with reference to FIG. As shown in the drawing, a jig 41 for fixing the first work is fixed on the rocking body 15 of the copying apparatus described above. The fixing jig 41 removably fixes the optical component W as the first work. The mounting position of the optical component W in FIG. 7 is the center of curvature of the concave spherical portion 4 and the convex spherical portion 16. Then, a lead wire Wa extending from the optical component W passes through the slits 21 and 22. In this application example, the upper surface of the optical component W is a contact surface, and the lower surface of a substrate (not shown) serving as a second work, which is contacted from above, is a specific surface. The rocking body 15 performs the copying operation so that the contact surfaces are parallel.
[0054]
In the copying apparatus 1 using such a fixing jig 39, the rocking body 15 is greatly inclined backward including the imbalance of the weight of the fixing jig 39. However, since the adjusting device 25 is provided at the rear of the copying apparatus 1, the inclination of the rocking body 15 can be easily adjusted.
[0055]
[Second embodiment]
Hereinafter, the second embodiment will be described with reference to FIG. 8, focusing on differences from the first embodiment. FIG. 8 is a plan view of the copying apparatus.
[0056]
In the present embodiment, an adjusting device 25 is provided instead of the pair of side plates 5 in the first embodiment. Therefore, in the present embodiment, the adjusting devices 25 are provided at a total of three locations on the left, right, and rear except for the front surface, which is the opening side of the slits 21 and 22.
[0057]
In the first embodiment, the pressurizing port 7 and the evacuation port 8 are provided on one of the side plates 5, but these ports 7, 8 are provided by the adjusting device 25 provided at three places. Is formed.
[0058]
Therefore, in the present embodiment, even if the oscillating body 15 has a left-right inclination, it can be corrected by the adjusting devices 25 arranged on the left and right.
[0059]
[Third Embodiment]
Hereinafter, the third embodiment will be described with reference to FIG. 9 focusing on differences from the first embodiment or the second embodiment. FIG. 9 is a plan view of the copying apparatus.
[0060]
The copying apparatus 1 according to the present embodiment is a general-purpose type in which the slits 21 and 22 provided in the first and second embodiments in the base 3 and the rocking body 15 are omitted. In the copying apparatus 1, adjustment devices 25 are provided at a total of four positions, that is, front, rear, left, and right.
[0061]
In the first embodiment, the pressurizing port 7 and the evacuation port 8 are provided on one of the side plates 5. However, these ports 7 and 8 are provided by the adjusting device 25 provided at four locations. Is formed.
[0062]
Therefore, in the present embodiment, even if the oscillating body 15 has a left-right inclination, it can be corrected by the adjusting device 25 arranged on the left and right. Since the correction can be performed by the arranged adjusting device 25, the oscillator 15 can be adjusted horizontally regardless of the type of the jig mounted on the oscillator 15.
[0063]
[Other forms of single-acting adjustment device]
Hereinafter, another embodiment of the single-acting adjusting device 25 described above will be described with reference to FIG. 10A to 10D are sectional views of the adjusting devices 25a to 25d.
[0064]
The adjusting device 25a shown in FIG. 10A is a modified example in which the adjusting screw 32 is provided on the first block 26 side in the adjusting device 25 described in the first embodiment. In this case, the adjusting screw 32 is screwed from below the first block 26. The accommodation recess 28 is formed on both sides of the first block 26 and the second block 27 so as to open on the opposing surfaces. Further, the support pins 30 provided on the first block 26 in the first embodiment are omitted, and the tip (upper end) side of the adjustment screw 32 extends to the second block 27 side. The adjusting device 25a has the same function as the adjusting device 25 described above.
[0065]
FIG. 10B is an example of the adjusting device 25b in which the stopper 41 is provided at the tip of the adjusting screw 32 in the adjusting device 25a of FIG. In this case, even if the oscillating body 15 tries to drop off from the base 2, the stopper piece 41 abuts (engages) with the second block 27 and the dropping is prevented. Therefore, as shown in FIGS. 8 and 9, even in the copying apparatus 1 not provided with the falling-off prevention mechanism by the side plate 5 and the shaft rod 17, if the adjusting device 25 b is entirely or partially employed, the stopper can be used. The function of the piece 41 prevents the rocking body 15 from falling off.
[0066]
The adjusting device 25c of FIG. 10C is different from the adjusting device 25 described in the first embodiment in that the support pin 30 is omitted, and the tip (lower end) side of the adjusting screw 32 is instead positioned below the first block 26. It shows an example in which a stopper piece 41 is provided at a position of a tip end of the stopper member so as to protrude. Also in such a case, it has the same drop-out prevention function as the adjusting device 25b of FIG.
[0067]
Further, according to this adjusting device 25c, if the adjusting screw 32 is moved upward so that the stopper piece 41 of each adjusting device 25c is pressed (engaged) with the first block 26, the rocking body 15 is completed. It is fixed to and does not wobble. Therefore, if the copying apparatus 1 is transported in the state set as described above, the copying apparatus 1 is protected, and even when a predetermined jig is mounted on the rocking body 15, there is an advantage that the mounting operation is facilitated. .
[0068]
FIG. 10D shows an example of an adjusting device 25d in which a rubber ring 42 is disposed instead of the coil spring 29 as a unit (elastic member) for urging the rocking body 15 upward. In the first place, since the copying operation by the copying apparatus 1 has a very small operation range, even if the oscillator 15 is supported by the rubber ring 42, it can be used without any problem. Note that, instead of the rubber ring 42, another elastic member such as a gel, a leaf spring, or a disc spring may be provided.
[0069]
[Fourth Embodiment]
Hereinafter, the fourth embodiment will be described with reference to FIGS. 11 and 12, focusing on differences from the first embodiment. FIG. 11 is a plan view of the copying apparatus, and FIG. 12 is a sectional view taken along line BB of FIG.
[0070]
In the present embodiment, there is provided an adjusting device 25a in which the first block 26 is integrally formed on the base 2 and the second block 27 is integrally formed on the rocking body 15. In other words, the first block 26 and the second block 27 are omitted, and their functions are assigned to the base 2 and the rocking body 15. Further, the adjusting devices 25 a are provided at four corners of the copying apparatus 1. The adjusting device 25a basically utilizes the configuration of the adjusting device described with reference to FIG.
[0071]
Therefore, in the present embodiment, the tilting of the rocking body 15 in the front, rear, left, and right directions can be freely corrected by the adjusting devices 25a provided at the four corners. In addition, since a dedicated block (the first block 26 and the second block 27) for the adjusting device 25a is not required, there is an advantage that the number of components can be reduced and the size of the device can be reduced.
[0072]
[Various forms of double-acting adjustment device]
Hereinafter, various forms of the double-acting adjusting device 45 will be described with reference to FIG. 13A to 13D are cross-sectional views of the adjusting devices 45a to 45d.
[0073]
First, the adjusting device 45a shown in FIG. The adjusting device 45a includes a first block 46 fixed to the side surface of the base 2 and a second block 47 fixed to the side surface of the rocking body 15. A second block 47 is arranged above the first block 46 with a slight gap.
[0074]
The first block 46 is formed with a housing recess 48 extending vertically and opening upward. A small-diameter hole 49 penetrating below the first block 46 is formed on the bottom surface side of the accommodation recess 48.
[0075]
The second block 47 is formed with a screw hole 50 extending in the vertical direction and penetrating in the vertical direction, and the adjusting screw 51 is screwed into the screw hole 50. The tip (lower end) side of the adjusting screw 51 is a non-screw region, and the non-screw region is disposed so as to penetrate the accommodation recess 48 and the hole 49. A stopper piece 52 having a diameter larger than that of the hole 49 is formed at the tip of the non-screw area. The stopper screw 52 prevents the adjustment screw 51 from falling off the first block 46.
[0076]
A spring seat 53 is formed at an intermediate portion of the non-screw region of the adjusting screw 51. A pair of coil springs 54 as an elastic member are housed in the housing recess 48, and one of the coil springs 54 is held in a compressed state between the upper surface of the spring seat 53 and the upper part of the first block 46. The other coil spring 54 is held in a compressed state between the lower surface of the spring seat 53 and the lower portion of the first block 46.
[0077]
Here, since the base 2 is fixed at a predetermined position, the first block 46 is on the fixed side, and since the oscillator 15 is not fixed, the second block 47 is on the movable side. Therefore, while the second block 47 is pressed downward against the first block 46 by the pressing force of the upper coil spring 54, the second block 47 is pressed against the first block 46 by the pressing force of the lower coil spring 54. Pressed upward. Thus, the position of the rocking body 15 in the natural state is determined by the balance between the opposing pressing forces of the two coil springs 54.
[0078]
Since a minus slot (not shown) is formed in the head at the upper end of the adjusting screw 51 so that a minus driver can be used, the vertical position of the adjusting screw 51 can be adjusted by the minus driver. When the adjustment screw 51 is moved downward by this adjustment, the lower coil spring 54 is further compressed, the repulsion force thereby increases, and the second block 47 is adjusted to the ascending side. On the other hand, when the adjusting screw 51 is moved upward, the upper coil spring 54 is further compressed, the repulsive force thereby increases, and the second block 47 is adjusted to the lower side. By such an adjustment, the initial position of the oscillator 15 in the natural state can be kept substantially horizontal. In addition, when this adjustment was actually performed, it was possible to adjust even the amount of division to about 0.1 degree.
[0079]
According to the adjusting device 45a, the positive tilt and the negative tilt of the oscillator 15 can be corrected by one adjusting device 45a. Of course, according to the present adjusting device 45a, it is needless to say that the stopper piece 52 also has the function of preventing the stopper piece 52 from falling off.
[0080]
Further, a fixing screw 55 is screwed into the second block 47 in a horizontal direction from a side surface thereof. By adjusting the screwing position of the fixing screw 55, it is possible to switch between a state in which the fixing screw 55 is pressed against the peripheral surface of the adjusting screw 51 and a state in which the fixing screw 55 is separated from the peripheral surface of the adjusting screw 51. Therefore, during the adjustment by the adjusting screw 51, the fixing screw 55 is separated to make the adjustment by the adjusting screw 51 smooth, and after the adjustment by the adjusting screw 51 is completed, the fixing screw 55 is brought into a pressure-contact state by the adjusting screw 51. 51 can be prevented from being displaced.
[0081]
Next, the adjusting device 45b shown in FIG. 13B will be described. The adjusting device 45b serves as a means (elastic member) for urging the rocking body 15 up and down, instead of the coil spring 54, a pair of rubber rings 61. Is arranged. In the first place, since the copying operation by the copying apparatus 1 has a very small operation range, even if the rocking body 15 is supported by the rubber ring 61, it can be used without any problem. Note that, instead of the rubber ring 61, another elastic member such as a gel, a leaf spring, or a disc spring may be provided.
[0082]
FIG. 13C shows an adjusting device 45c in which the adjusting screw 51 is provided on the first block 46 side in the adjusting device 45b of FIG. 13B and a disc spring 62 is used instead of the rubber ring 61. FIG. 13D shows an adjustment using one leaf spring 63 instead of using a pair of coil springs 54, a pair of rubber rings 61, and a pair of disc springs 62 in each of the above adjusting devices 45 a to 45 c. It is an example of the device 45d. The leaf spring 63 is cantilevered by a contact 64 fixed to the first block 46, and is held in a state where its tip is inserted into an intermediate portion of the non-thread forming region of the adjusting screw 51. Therefore, only by providing one leaf spring 63, the pressing force can be applied to the rocking body 15 both above and below, and the configuration becomes simple.
[0083]
[Fifth Embodiment]
Hereinafter, the fifth embodiment will be described with reference to FIG. 14 focusing on differences from the first embodiment. FIG. 14 is a plan view of the copying apparatus.
[0084]
This embodiment is an example in which the adjusting device 45a shown in FIG. 13A is provided on one of the left and right surfaces of the copying apparatus 1 and one of the front and rear surfaces. The adjusting device 45 is a double-acting type unlike the single-acting type adjusting device 25 described above. That is, while the adjusting device 25 can only adjust the swinging body 15 in the direction of pushing up, the adjusting device 45a has a function of adjusting the swinging body 15 in both directions of pushing up and pushing down. . Since the specific configuration of the adjusting device 45a has been described in the previous section, detailed description will be omitted. Further, instead of the adjusting device 45a, other adjusting devices 45b to 45d may be used.
[0085]
According to the present embodiment, even though only two adjustment devices 45a are provided on the left and right of the copying apparatus 1 before and after the copying device 1 in total, each of the adjustment devices 45a pushes up and down the rocking body 15. Therefore, the inclination of the oscillator 15 with respect to the base 2 can be corrected.
[0086]
When the copying apparatus 1 is transported or the jig is attached to the rocking body 15, the adjusting screw 51 is moved upward so that the stopper piece 52 is pressed (engaged) with the first block 46. It is good. By doing so, the rocking body 15 is locked on the base 2, and the rocking movement of the rocking body 15 is suppressed to prevent breakage at the time of transportation and to facilitate the jig mounting work. can do.
[0087]
[Sixth Embodiment]
Hereinafter, the sixth embodiment will be described with reference to FIGS. FIG. 15 is a plan view of the copying apparatus, and FIG. 16 is a front view of the copying apparatus.
[0088]
In each of the embodiments described above, the adjusting device extends in the up-down direction, and the arrangement of the biasing member such as the coil spring is also arranged so that the expansion and contraction direction is in the up-down direction. However, when the coil spring is compressed, The return force acts on the coil spring also in the direction intersecting the direction of expansion and contraction of the coil spring, that is, in the shearing direction. By utilizing this principle, in the present embodiment, the coil spring is provided in the horizontal direction.
[0089]
Also in the copying apparatus 1 of the present embodiment, the point at which the swinging body 15 swings with respect to the base 2 is not changed at all. As compared with the first embodiment, the difference is that the slit is not formed, and the shapes of the base 2 and the oscillating body 15 are different, and the most different is the adjustment device.
[0090]
Therefore, the adjusting device 71 according to the present embodiment will be described. A total of four adjusting devices 71 are provided on the front, rear, left and right of the copying apparatus 1. Focusing on the first adjusting device 71, the plate 72 is fixed to the oscillator 15 by bolts 73. The plate 72 is suspended so as to be arranged on the outer peripheral side of the base 2.
[0091]
A pair of left and right screw holes 74 are formed in the plate 72, and an adjusting screw 75 as an adjusting member is screwed into each of the screw holes 74. An accommodation recess 76 is formed in the base 2 so as to face each screw hole 74, and a coil spring 77 as an elastic member is accommodated in the accommodation recess 76. One end of the coil spring 77 is in contact with the bottom of the accommodation recess 76 and the other end is in contact with the tip of the adjusting screw 75, and is held in a compressed state.
[0092]
Now, in the copying apparatus 1 including the adjusting device 71 configured as described above, the inclination of the oscillating body 15 can be adjusted by the screwing amount of the adjusting screw 75. That is, if the adjusting screw 75 is screwed in, the coil spring 77 is further compressed, and a force is generated such that the screw hole 74 and the accommodation concave portion 76 are arranged on one axis, and the rocking body 15 can be adjusted without tilting.
[0093]
In addition, although the coil springs 77 are accommodated in a total of eight places in each adjusting device 71, for example, the coil springs 77 are accommodated only in the left side or the right side of the respective adjusting devices 71 so that the adjusting function is provided in a total of four places. Is also good. In each adjusting device 71, a screw 74, an adjusting screw 75, a housing recess 76, and a coil spring 77 may be arranged substantially at the center to provide an adjusting function at a total of four locations.
[Brief description of the drawings]
FIG. 1 is a perspective view of a copying apparatus according to a first embodiment.
FIG. 2 is a plan view of the copying apparatus.
FIG. 3 is a right side view of the copying apparatus.
FIG. 4 is a structural sectional view of the copying apparatus.
FIG. 5 is a rear view of the copying apparatus.
FIG. 6 is a sectional view taken along line AA of FIG. 2;
FIG. 7 is a perspective view showing an application example of the copying apparatus according to the first embodiment.
FIG. 8 is a plan view of a copying apparatus according to a second embodiment.
FIG. 9 is a plan view of a copying apparatus according to a third embodiment.
FIG. 10 is a sectional view showing various examples of a single-acting adjustment device.
FIG. 11 is a plan view of a copying apparatus according to a fourth embodiment.
FIG. 12 is a sectional view taken along line BB of FIG. 11;
FIG. 13 is a sectional view showing various examples of a double-acting adjustment device.
FIG. 14 is a plan view of a copying apparatus according to a fifth embodiment.
FIG. 15 is a plan view of a copying apparatus according to a sixth embodiment.
FIG. 16 is a front view of the copying apparatus.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 ... Copying apparatus, 2 ... Base, 3 ... Porous body, 4 ... Concave spherical part, 7 ... Pressurizing port, 8 ... Vacuum port, 9 ... Air passage, 11 ... Annular groove, 15 ... Oscillator, 16 ... convex spherical portion, 21 ... slit, 22 ... slit, 25 ... adjusting device, 26 ... first block, 27 ... second block, 28 ... housing concave portion, 29 ... coil spring as elastic member, 32 ... as adjusting member Adjusting screws, 25a, 25b, 25c, 25d ... adjusting device, 41 ... stopper piece as stopper, 42 ... rubber ring as elastic member, 45a, 45b, 45c, 45d ... adjusting device, 46 ... first block, 47 ... 2nd block, 48 ... accommodation recess, 51 ... adjustment screw as an adjustment member, 52 ... stopper piece as a stopper, 54 ... coil spring as an elastic member, 61 ... rubber ring as an elastic member, 2 ... disc spring as an elastic member, 63 ... plate spring as an elastic member, 71 ... regulator, 72 ... plate, 75 ... adjustment screw as an adjustment member, 76 ... housing recess, 77 ... coil spring as an elastic member.

Claims (8)

A concave spherical portion is provided on one of the base and the oscillator, and a convex spherical portion is provided on the other, and the concave spherical portion and the convex spherical portion are opposed to each other, so that the oscillator is formed on the base along the spherical surface. Are configured to swing, and the swinging body or a part of the work installed on the swinging body is set as a contact surface to be brought into contact with a specific surface of a counterpart work, and the contact surface and the specific surface are brought into contact with each other. In a copying apparatus in which an oscillating body is oscillated such that an abutting surface is parallel to a specific surface by an operation of contacting,
Adjusting means for adjusting the rocking body so that the contact surface and the specific surface are substantially parallel in advance is provided , and the adjusting means includes a stopper for preventing the rocking body from falling off the base. A copying apparatus characterized in that: A concave spherical portion is provided on one of the base and the oscillator, and a convex spherical portion is provided on the other, and the concave spherical portion and the convex spherical portion are opposed to each other, so that the oscillator is formed on the base along the spherical surface. Are configured to swing, and the swinging body or a part of the work installed on the swinging body is set as a contact surface to be brought into contact with a specific surface of a counterpart work, and the contact surface and the specific surface are brought into contact with each other. In a copying apparatus in which an oscillating body is oscillated such that an abutting surface is parallel to a specific surface by an operation of contacting,
The rocking body and the base are formed with a slit that opens from a central portion toward a predetermined outer peripheral portion,
An adjusting means is provided at least at a position opposite to the side where the slit is opened to adjust an end of the rocking body so as to adjust the contact surface and the specific surface to be substantially parallel in advance. And copying equipment. A concave spherical portion is provided on one of the base and the oscillator, and a convex spherical portion is provided on the other, and the concave spherical portion and the convex spherical portion are opposed to each other, so that the oscillator is formed on the base along the spherical surface. Are configured to swing, and the swinging body or a part of the work installed on the swinging body is set as a contact surface to be brought into contact with a specific surface of a counterpart work, and the contact surface and the specific surface are brought into contact with each other. In a copying apparatus in which an oscillating body is oscillated such that an abutting surface is parallel to a specific surface by an operation of contacting,
A plurality of adjusting means for pushing up the end of the oscillating body are evenly arranged on the outer peripheral portion of the oscillating body, so that the contact surface and the specific surface are adjusted so as to be substantially parallel in advance by adjustment by each adjusting means , The copying apparatus according to claim 1, wherein the adjusting unit includes a stopper for preventing the swinging body from falling off the base . The adjusting means adjusts the elastic force of the elastic member interposed between the base and the oscillating body and applies a repulsive force of the elastic member in accordance with the adjustment to the push-up side of the oscillating body. The copying apparatus according to any one of claims 1 to 3, further comprising an adjustment member configured to perform the adjustment. The copying apparatus according to claim 4, wherein the adjustment member adjusts the elastic member in a direction in which the elastic member is compressed. A concave spherical portion is provided on one of the base and the oscillator, and a convex spherical portion is provided on the other, and the concave spherical portion and the convex spherical portion are opposed to each other, so that the oscillator is formed on the base along the spherical surface. Are configured to swing, and the swinging body or a part of the work installed on the swinging body is set as a contact surface to be brought into contact with a specific surface of a counterpart work, and the contact surface and the specific surface are brought into contact with each other. In a copying apparatus in which an oscillating body is oscillated such that an abutting surface is parallel to a specific surface by an operation of contacting,
Two double-acting adjusting means for lifting or pushing down the end of the rocking body are unequally arranged on the outer circumference of the rocking body. A copying apparatus characterized in that adjustment is made so that It said adjusting means adjusts an elastic force of Oite, a first elastic member and a second elastic member which is telescopically disposed respectively on the same axis line, the first elastic member between the base and the oscillator Thereby, the repulsive force of the first elastic member according to the adjustment is applied to the push-up side of the oscillator, and the resilient force of the second elastic force according to the adjustment is adjusted by adjusting the elastic force of the second elastic member. 7. The copying apparatus according to claim 6, further comprising: an adjusting member that causes the swinging body to act on a lower side. The copying apparatus according to any one of claims 2 to 4 , wherein the adjusting means includes a stopper for preventing the swinging body from falling off the base.

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