JP3524630B2 - Multilayer dielectric filter and method of manufacturing the same - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a laminated dielectric filter used as a circuit element of a UHF band or microwave band mobile communication device or the like and a method for manufacturing the same, and more particularly to a laminated dielectric filter formed on the upper surface of a filter chip. The present invention relates to patterns of a ground conductor film and a terminal conductor film.

[0002]

2. Description of the Related Art A laminated dielectric filter is formed by laminating a large number of large-area dielectric sheets (on a surface of a predetermined dielectric sheet, a metal film pattern having a predetermined shape is formed by screen printing or the like). By forming a dielectric substrate, a large number of dielectric filters having the same structure are simultaneously integrated and formed. At a certain stage, a large dielectric substrate is cut and separated into individual filter chips (this cutting and dicing process is performed by dicing). That). A typical form of the chip type laminated dielectric filter manufactured in this manner is shown in FIG. A strip-shaped resonant electrode patterned between material sheets is embedded inside the laminated dielectric chip 1, and a ground conductor film is entirely formed on the lower surface of the chip 1. The ground conductor film 2 is formed in the pattern described in detail below, and the ground conductor film 5 for connecting the ground conductor film 2 on the upper surface and the ground conductor film on the lower surface is patterned on the side surface of the chip. Also, two terminal conductor films 3 and 4 are patterned on the upper surface of the chip.
4 are connected to the conductor films that wrap around the side surfaces.

[0003]

The conductor film pattern on the upper surface of the chip of the dielectric filter shown in FIG. 1 is shown in detail in FIG. The top surface of the chip is a rectangle having a horizontal length of 2d and a vertical length of 2k. With the center of this rectangle as the origin, the x-axis / y
Two-dimensional coordinates whose axes are parallel to the horizontal and vertical directions of the chip (x,
y) is assumed. Then, the patterns of the ground conductor film 2 and the terminal conductor films 3 and 4 are expressed as follows.

One terminal conductor film 3 has b ≦ x ≦ d and h
A pattern is formed in the region of ≦ y ≦ i, and the other terminal conductor film 4 is formed in a pattern of 180 ° rotational symmetry with respect to the origin of coordinates.

The half 2a of the ground conductor film 2 has -d≤.
The pattern is formed in the region of x≤a and 0≤y≤k, while the other half 2b of the ground conductor film 2 is patterned in a rotational symmetry of 180 degrees about the coordinate origin. That is, the ground conductor films 2a and 2b are connected at the central portion of the chip upper surface.

Here, when a large number of the same filters are integrated and formed on a large-area laminated dielectric substrate, if the individual filter forming areas are in contact with each other and there is no gap between the respective areas, it is possible to manufacture them. , It will be possible to efficiently produce a larger number of filters by making maximum use of the dielectric substrate of the material (this is called a non-gap integration method).

When the filter having the chip upper surface pattern shown in FIGS. 1 and 2 is manufactured by the gapless integration method, the conductor film integrated pattern formed on the upper surface of the large-area laminated dielectric substrate is as shown in FIG. That is, the conductor film patterns of the individual filters shown in FIG. 2 are continuous patterns without gaps in the vertical and horizontal directions. In FIG. 3, P and Q indicate vertical and horizontal cutting lines in the dicing process. Note that this cutting is performed with reference to a marker formed outside the drawing (a predetermined position on the peripheral edge of the large-area laminated dielectric substrate).

When a filter is manufactured by the non-gap integration method with the integrated pattern as shown in FIG. 3, if the cutting line is slightly deviated in the dicing process, the conductor film in the adjacent area is cut, and as shown in FIG. 4, for example. In addition, the terminal conductor film 4 and the ground conductor film 2a are short-circuited (a portion), and the unwanted conductor film (b) is connected to the ground conductor film 2b, which causes a short circuit during mounting. In the dicing process, it is impossible to always accurately separate the two areas with one cutting line, and some error cannot be avoided. Therefore, if a filter is manufactured by the non-gap integration method using the integration pattern as shown in FIG. 3, the yield is poor and it cannot be put to practical use.

On the other hand, in order to solve such a problem, it is conceivable to form an integrated pattern by forming an appropriate gap between each filter area (this will be referred to as a gap-integrated system). However, in such cases. It becomes necessary to cut both sides of the gap formed between the filter areas, which increases the cutting process. Furthermore, with this gap integration method, the number of filters that can be manufactured on substrates of the same area is reduced,
There is also the problem that production efficiency is poor.

The present invention has been made in view of the above background, and its object is to solve the above-mentioned problems and to use the conventional patterns (for example, the patterns shown in FIGS. 1 and 2) in most cases. It is an object of the present invention to provide a laminated dielectric filter having a similar chip top surface pattern, which can be manufactured by a non-gap method, and has the same characteristics as conventional ones, and a manufacturing method thereof.

[0011]

In order to achieve the above object, a laminated dielectric filter according to the present invention has a laminated dielectric chip (1) having a resonator pattern (11) therein.
2) A large ground conductor film (12) and 2
Assuming a laminated dielectric filter in which two small terminal conductor films (13, 14) are patterned, the one terminal conductor film (13) is connected to one side (A) of the rectangle and the other terminal. The conductor film (14) is connected to the opposite side (B) opposite to the one side, and the both terminal conductor films are arranged on the opposite side with the center of the rectangle interposed therebetween. On the other hand, the ground conductor film is arranged in a non-contact state with the terminal conductor film. Then, first notches (16) are formed at both ends of the connection edge with each side of the rectangle to which the terminal conductor film is connected, and the center side end of the connection edge with the remaining two sides of the rectangle is formed. A second notch (17) is formed in the section.

[0012]

[0013]

Further, in the method for manufacturing a dielectric filter according to the present invention, a dielectric sheet having a size sufficiently larger than the shape of the laminated dielectric filter to be manufactured is used, and a dielectric sheet having no conductor pattern formed on the surface and a dielectric sheet formed on the surface are used. A dielectric sheet is formed by laminating a dielectric sheet having a predetermined conductor film pattern such as a resonator pattern and a dielectric sheet having a conductor film pattern including the ground conductor film and the terminal conductor film in a predetermined order. Form a body substrate.

Next, in a method of manufacturing a dielectric filter in which a predetermined portion of the dielectric substrate is cut to separate individual chips, and then a predetermined conductive film is formed on the side surface of the chip, the dielectric film located on the upper surface is cut. When the conductor film pattern formed of the ground conductor film and the terminal conductor film on the surface of the body sheet has a rectangular center as an origin and an orthogonal coordinate system parallel to each side of the rectangle is virtually placed. Let (x, y) be the coordinate points of a, b, c, d and h, i, j,
When k is a positive number in the relationship of a <b <c <d and h <i <j <k, one of the terminal conductor films is in the region of b ≦ x ≦ d and h ≦ y ≦ i. The other terminal conductor film is patterned in a rotationally symmetrical manner with respect to the origin of coordinates by 180 degrees with respect to the origin of coordinates, and half of the ground conductor film is -c≤x≤a and 0≤. region of y ≦ j,
-C≤x≤-a and j≤y≤k region, -d≤x≤-c
In addition, the pattern is formed in the region of h ≦ y ≦ i, and the pattern in which the other half of the ground conductor film is formed in a rotational symmetry with respect to the origin of coordinates by 180 degrees is used as a reference pattern. The reference pattern is continuously and repeatedly arranged in the vertical and horizontal directions, and the cutting process is performed in units of the reference pattern.

[0016]

Since the first and second notches are formed, the terminal conductor film and the ground conductor film are not connected even if the cut portions are displaced, and the non-contact state is maintained. .

Specifically, when the filter having the chip upper surface pattern shown in FIG. 6 is manufactured by the gapless integration method, the conductor film integrated pattern formed on the upper surface of the large-area laminated dielectric substrate is as shown in FIG. . That is, the conductor film patterns of the individual filters shown in FIG. 6 are continuous patterns without gaps in the vertical and horizontal directions. 7 and 8, P and Q indicate vertical and horizontal cutting lines in the dicing process. Ground conductor film (1
Since the conductor film unformed region (21) corresponding to the notches (16) and (17) is provided in 2), even if the cutting line is slightly deviated from P and Q in the dicing process, There is no problem that the ground conductor film is short-circuited or that an unnecessary mustache-shaped conductor film is connected to the ground conductor film.

[0018]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of the laminated dielectric filter and the method for manufacturing the same according to the present invention will be described in detail below with reference to the accompanying drawings. 5 and 6 show an embodiment of the present invention.
As shown in the figure, the basic structure is the same as the conventional one, and a rectangular parallelepiped laminated dielectric chip 10 formed by laminating a plurality of dielectric sheets (green sheets) has a pattern between the sheets. The formed band-shaped resonator pattern (inner conductor) 11 is embedded. An earth conductor film is formed on the entire lower surface of the chip 10, and an earth conductor film 12 is formed on a part of the upper surface of the chip 10 in a pattern described in detail below.
A ground conductor film 15 for connecting the ground conductor film 12 on the upper surface and the ground conductor film on the lower surface is patterned on the side surface of the chip. In addition, two small terminal conductor films 13 and 14 are patterned on the upper surface of the chip.
Reference numerals 3 and 14 are connected to the conductor films that wrap around the side surfaces.

Further, in this example, both ends of the resonator pattern 11 are formed so as to reach the side surfaces of the laminated dielectric chip 10. That is, the length of the resonator pattern 11 and
The lengths of the laminated dielectric chips 10 in the arrangement direction are made equal. Along with this, one end of the resonator pattern 11 becomes an open end (not in contact with the ground), so that the ground conductor film 1 formed on the side surface of the laminated dielectric chip 10 correspondingly.
Of 5, the ground conductor film was not formed in the portion corresponding to the open end.

When the resonator pattern 11 is not exposed, that is, when the length of the resonator pattern 11 is shorter than that of the laminated dielectric chip 10, the ground conductor film is formed on the above-mentioned unformed portion. Of course you can do it.

Also, in this embodiment, both terminal conductor films 13, 1
4 are both formed in a rectangular shape, and one of the terminal conductor films 13 is formed.
Is connected to one side A of the upper surface (rectangle) of the laminated dielectric chip 10, and the other terminal conductor film 14 is connected to the opposite side B opposite to the side A. And ideally,
Both have the same shape, and the connecting portion with the side of the upper surface is configured to be only the sides A and B described above. Further, both terminal conductor films 13 and 14 are arranged on opposite sides of the center of the rectangle. That is, when divided into four sections by two line segments that pass through the center of the upper surface and are parallel to the four sides, they are arranged in two sections that are located on diagonal lines that are not adjacent to each other.

On the other hand, the ground conductor film 12 formed on the upper surface of the above-mentioned laminated dielectric chip 10 is composed of both terminal conductor films 13,
14 is placed in a non-contact state with 14 and covers almost the entire surface of the remaining two sections of the above-mentioned four sections (12a and 12a).
Along with b), it is composed of a predetermined pattern shape that connects them in the central portion.

Here, in the present invention, a predetermined notch is formed at each end of the peripheral edge of the ground conductor film 12 which is connected to each side of the upper surface of the laminated dielectric chip 10. Specifically, the first notches 16 are formed at both ends of the connection edge with the sides A and B of the rectangle to which the terminal conductor films 13 and 14 are connected, and the two remaining sides of the rectangle are formed. The second cutout portion 17 was formed at the end portion on the center side of the connection edge. Then, as is clear from the figure, the first notch 1 formed on the same side.
The distance between 6 and 16 matches the width of the terminal conductor films 13 and 14.

More specifically, the size and shape of each conductor film will be described in more detail. A coordinate point when an orthogonal coordinate system parallel to each side of the rectangle is virtually set with the center of the rectangle as the origin. x, y), a, b, c, d and h,
In the laminated dielectric filter of the present invention, when i, j, and k are positive numbers in the relationship of a <b <c <d and h <i <j <k, the ground conductor film 12 and the terminal are used. Conductor film 1
The pattern shapes of the patterns 3 and 14 satisfy the following conditions. The upper surface of the chip has a rectangular shape of -d≤x≤d and -k≤y≤k. One of the terminal conductor films 13 is patterned in the region of b ≦ x ≦ d and h ≦ y ≦ i, and the other terminal conductor film 4 is rotationally symmetrical with respect to the origin of coordinates by 180 degrees. Are patterned. The half 12a of the ground conductor film 12 has -c≤x≤a.
And a region of 0≤y≤j, -c≤x≤-a and j≤y≤k
Area, and the area of -d≤x≤-c and h≤y≤i, on the other hand, the remaining portion of the ground conductor film 12 is rotationally symmetrical with respect to the origin of coordinates by 180 degrees. Half 12b is patterned.

The above-mentioned conditions are ideal (basic) patterns (moving distance is 0) when each pattern is formed and cut in an ideal state, and the cutting position depends on manufacturing tolerances. When there is a deviation, the basic pattern may be moved parallel to at least one side in the X-axis direction or the Y-axis direction by a predetermined distance. In that case, the condition of each pattern, that is, the portion exceeding the range of the upper surface is naturally excluded. In other words,
In the case of an ideal pattern, the pattern shape of each conductor film is point-symmetrical when it is rotated 180 degrees around the origin, but if it is deviated, the size and shape of each pattern will be slightly different and The lengths and widths of the respective cutouts to be formed will also be different.

Further, in the case of manufacturing such a laminated dielectric filter, a pattern of a plurality of dielectric filters is formed on a large laminated dielectric substrate and the patterns are cut. When moved, a pattern that does not originally exist (a pattern for another dielectric filter) may be formed on the upper surface. However, as described later, unnecessary patterns are formed by the conductive films 12, 13, No contact with any of the 14

The ground conductor film 12 formed on the upper surface
Since the notches 16 and 17 are formed in the predetermined portion of the above-mentioned portion, the installation area thereof is slightly reduced, but the reduction amount is very small, and therefore the characteristics of the filter are the same as those of the conventional one. .

Further, the ground conductor film 15 formed on the side surface.
Since the completely same structure as the conventional one can be used, the mask pattern for manufacturing the laminated dielectric filter of the present embodiment only needs to be remade for the upper surface, and the other ones have the same conventional ones. You can use it as it is,
The specific manufacturing process can be the same as the conventional one. Of course, the side surface pattern may be changed appropriately.

Then, an example of the dimensions of the above-mentioned respective parts can be set as follows.

2d = 7.00 mm 2k = 5.00 mm a = 0.35 mm b = 0.75 mm c = 0.25 mm h = 0.40 mm i = 2.10 mm j = 3.35 mm Next, the present invention will be described. An example of a method of manufacturing a dielectric filter will be described. The basic manufacturing process is similar to the conventional one, and a large-area dielectric sheet (green sheet) is used, and a predetermined number of these are laminated to manufacture a laminated dielectric substrate. At this time, a predetermined conductor film forming a resonator pattern or the like is formed on the surface of a predetermined intermediate dielectric sheet. A conductor film pattern having a predetermined shape is formed on the upper surface of the uppermost dielectric sheet. In the present invention, the shape of this conductor film pattern is improved.

That is, in this embodiment, the filter of the present invention having the pattern on the chip upper surface shown in FIGS. 5 and 6 is manufactured by the gapless integration method. Specifically, the conductor film pattern shown in FIG. The pattern is used as a conductive film pattern in which the reference pattern is continuous in the vertical and horizontal directions with no gaps. An example of such a conductor film pattern is shown in FIG. The vertical and horizontal cutting in the dicing process is performed with reference to a marker position (indicated by an arrow) formed at a predetermined position on the peripheral edge of the large-area laminated dielectric substrate. When cut with this marker, it is cut out in units of reference patterns.

Then, as shown in an enlarged manner in FIG. 8, the side edges 20a of the pattern portion 20 serving as the ground conductor film alternately project to the other side, and connect the side edges 20a located on the same straight line. The distance m1 between the lines is the margin. A portion corresponding to the above-mentioned cutout portion is a non-formed region 21 of the conductor film.
Therefore, there is a constant gap between the adjacent pattern portions 20. Further, a pattern portion 22 serving as a terminal conductor film is also continuously formed at the tip of the pattern portion 20, but the pattern portion 22 is formed due to the unformed region 21.
Width w is smaller than the width w ′ of the pattern portion 20.

Therefore, ideally, in the above-mentioned dicing process, as shown by P and Q in the figure, the line P at the center of the margin m1 determined by the side edge 20a (see FIG. 7B) and the pattern. Close to the connection between parts 20 and 22,
It becomes the center Q of the unformed area 21 (see (C) in the same figure), and when cutting is performed at that portion, a rectangular area surrounded by a broken line in FIG. 9 is cut out, and a pattern portion shown by hatching is formed on each conductor. It becomes a film, which corresponds to the state of FIG. 7 described above. Then, the unformed regions 21 become the notches 16 and 17, respectively.

By the way, since the unformed region 21 is formed in the present embodiment, margins m1 and m2 of predetermined widths are respectively provided at the cutting positions P and Q as shown in FIGS. 8 (B) and 8 (C).
Is formed. The margins m1 and m2 are as follows: m1 = 2 (k−j) m2 = 2 (d−c).

Therefore, even if the cutting position deviates from the ideal state, the pattern portions 20 and 22 do not become conductive because the unformed region 21 is provided. As an example thereof, when the cutting position P in the lateral direction is displaced to the upper side, as shown in FIG. 10 (A), one terminal conductor film 13 is formed.
A useless conductor film 24 is formed in the vicinity of the conductor film 24. When the upper surface of the conductor film 24 is focused, the other conductor films 12, 13,
None of them are connected to each other, and the side surface of the chip 10 faces an area where the ground conductor film 15 is not formed, as shown in FIG. 5, thus forming an independent island pattern. Therefore, the conductor film 24 has no influence on the filter characteristics. Although not shown, in the case of the structure in which the internal resonator pattern is shortened and the ground conductor film is formed on the entire side surface, the conductor film pattern is connected to the ground conductor film on the side surface. However, there is no problem because the non-contact state with the terminal conductor films 13 and 14 is maintained.

On the other hand, when the cutting position Q in the vertical direction is shifted to the left side in the drawing, as shown in FIG. 10B, the width of the first cutout portion 16 is different, but it is still different from that of the ground conductor film 12. Since the terminal conductor films 13 and 14 are not connected to each other, the product does not become a defective product.

Further, the illustrated state is the above-mentioned margin m.
An example of a pattern in which the cutting position is deviated within the range of 1 and m2 is shown, but even if deviated further, the shape of the terminal conductor film is slightly changed (small protrusions project at the two apexes of the rectangle). However, since the terminal conductor film and the ground conductor film are kept in non-contact with each other within the range of the upper surface, desired filter characteristics can be maintained by appropriately setting the shape of the ground conductor film 15 on the side surface. .

[0038]

According to the present invention, a laminated dielectric filter of a chip upper surface conductor film having almost the same pattern (FIG. 6) as the conventional pattern (FIG. 2) can be manufactured by the gapless integration method. Therefore, as compared with the conventional interstitial integration method, it is possible to make the most of the dielectric substrate of the material and efficiently manufacture a larger number of filters. Also, the cutting process can be performed relatively roughly.

[Brief description of drawings]

FIG. 1 is a perspective view of a conventional laminated dielectric filter.

FIG. 2 is a detailed plan view of a chip upper surface pattern of the conventional filter.

FIG. 3 is a plan view of an integrated pattern in the case where the conventional filter is manufactured by the gapless integrated method.

FIG. 4 is a plan view of a chip top surface pattern showing a problem when a conventional filter is manufactured by a gapless integration method.

FIG. 5 is a perspective view showing an example of a laminated dielectric filter according to the present invention.

FIG. 6 is a plan view of a chip top surface pattern of a laminated dielectric filter according to an embodiment of the present invention.

FIG. 7 is a plan view of an integrated pattern when the filter of the above-described embodiment is manufactured by a non-gap integrated method.

FIG. 8 is an enlarged view showing a main part of FIG.

FIG. 9 is a diagram illustrating a part of a set pattern that is cut and cut out.

FIG. 10 is a diagram illustrating an operation when the cutting position is displaced.

[Explanation of symbols]

10 Multilayer dielectric chip 11 Resonator pattern 12, 12a, 12b Earth conductor film 13, 14 terminal conductor film 16 First notch 17 Second notch

Continuation of front page (56) Reference JP-A-7-58508 (JP, A) JP-A-7-162213 (JP, A) JP-A-7-335995 (JP, A) JP-A-5-110314 (JP , A) JP-A-5-101996 (JP, A) JP-A-6-77086 (JP, A) US Pat. No. 4821007 (US, A) (58) Fields investigated (Int.Cl. ⁷ , DB name) H01P 1/203 H01P 1/205 H01P 5/08 H01P 11/00

Claims (2)

(57) [Claims] 1. A large ground conductor film (12) and two small terminal conductor films (13, 1) on a rectangular upper surface of a laminated dielectric chip (10) having a resonator pattern (11) inside.
4) is a patterned laminated dielectric filter, wherein the one terminal conductor film (13) is connected to one side (A) of the rectangle, and the other terminal conductor film (14) is the one side. Is connected to the opposite side (B) on the opposite side, the both terminal conductor films are arranged on the opposite side with the center of the rectangle interposed therebetween, and the ground conductor film is arranged in a non-contact state with the terminal conductor film. First cutouts (16) are formed at both ends of a connection edge with each side of the rectangle to which the terminal conductor film is connected, and a central side end of the connection edge with the remaining two sides of the rectangle is formed. A laminated dielectric filter, characterized in that a second notch (17) is formed in the. 2. A dielectric sheet, which is sufficiently larger than the shape of the laminated dielectric filter to be manufactured, and on which a conductor pattern is not formed, and a predetermined conductor film pattern such as a resonator pattern is formed on the surface. The dielectric sheet thus formed and a predetermined number of dielectric sheets having a conductor film pattern formed of a ground conductor film and a terminal conductor film are laminated in a predetermined order to form a dielectric substrate. In a method of manufacturing a dielectric filter, wherein a predetermined conductive film is formed on a side surface of the chip after cutting the portion into individual chips, the ground conductor formed on a surface of a dielectric sheet located on an upper surface. With respect to the shape of the conductor film pattern formed of the film and the terminal conductor film, the coordinate point when an orthogonal coordinate system parallel to each side of the rectangle is virtually set with (x, y) as the origin. ) And a, b, c, d and h, i, j, k are a <b <c
<D and h <i <j <k are positive numbers, one of the terminal conductor films is patterned in the region of b ≦ x ≦ d and h ≦ y ≦ i. The other terminal conductor film is formed in a pattern of 180 degrees rotational symmetry with respect to the origin of coordinates, and half of the ground conductor film has a region of −c ≦ x ≦ a and 0 ≦ y ≦ j, The pattern is formed in the area of c ≦ x ≦ −a and j ≦ y ≦ k, and the area of −d ≦ x ≦ −c and h ≦ y ≦ i, and 180 degrees around the coordinate origin. The pattern in which the other half of the ground conductor film is rotationally symmetrically formed is used as a reference pattern, and the reference pattern is continuously and repeatedly arranged in the vertical and horizontal directions, and the cutting process is performed for each reference pattern unit. Manufacturing method of dielectric filter.