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JP3463026B2 - Dynamic pressure type air bearing - Google Patents

Dynamic pressure type air bearing

Info

Publication number
JP3463026B2
JP3463026B2 JP2000254038A JP2000254038A JP3463026B2 JP 3463026 B2 JP3463026 B2 JP 3463026B2 JP 2000254038 A JP2000254038 A JP 2000254038A JP 2000254038 A JP2000254038 A JP 2000254038A JP 3463026 B2 JP3463026 B2 JP 3463026B2
Authority
JP
Japan
Prior art keywords
foil
top foil
bump
dynamic pressure
pressure type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2000254038A
Other languages
Japanese (ja)
Other versions
JP2002061645A (en
Inventor
泉 ▲高▼木
寿夫 和田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kawasaki Motors Ltd
Original Assignee
Kawasaki Jukogyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kawasaki Jukogyo KK filed Critical Kawasaki Jukogyo KK
Priority to JP2000254038A priority Critical patent/JP3463026B2/en
Publication of JP2002061645A publication Critical patent/JP2002061645A/en
Application granted granted Critical
Publication of JP3463026B2 publication Critical patent/JP3463026B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C17/00Sliding-contact bearings for exclusively rotary movement
    • F16C17/02Sliding-contact bearings for exclusively rotary movement for radial load only
    • F16C17/024Sliding-contact bearings for exclusively rotary movement for radial load only with flexible leaves to create hydrodynamic wedge, e.g. radial foil bearings
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C43/00Assembling bearings
    • F16C43/02Assembling sliding-contact bearings

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Support Of The Bearing (AREA)

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本願発明は、空気膜により回
転軸を保持する動圧型空気軸受に関し、特に波形形状の
バンプフォイルと、空気膜を介して回転軸を支持するト
ップフォイルとを備えたフォイル式の動圧型空気軸受に
関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a dynamic pressure type air bearing for holding a rotating shaft by means of an air film, and more particularly, a foil provided with a corrugated bump foil and a top foil for supporting the rotating shaft via the air film. Type dynamic pressure type air bearing.

【0002】[0002]

【従来の技術】空気軸受としては、周知のように静圧型
と動圧型があり、コンプレッサ等の外部与圧を利用する
静圧型に比べ、自由に周囲の空気を使用し、軸の回転に
より圧力を生じさせる動圧型は、コスト、軽量化及びメ
ンテナンスの面で有利であり、特に、フォイル式の動圧
型空気軸受は、航空機用のエアサイクルマシーンやガス
タービンエンジン等、高速回転で使用される機械等に多
く使用されるようになっている。
2. Description of the Related Art Air bearings are classified into static pressure type and dynamic pressure type, as is well known. Compared with static pressure type which uses external pressure such as a compressor, ambient air is freely used and pressure is generated by rotating the shaft. The dynamic pressure type that causes the occurrence is advantageous in terms of cost, weight reduction and maintenance. In particular, the foil type dynamic pressure type air bearing is a machine used at high speed rotation such as an air cycle machine for an aircraft or a gas turbine engine. It has been widely used for such purposes.

【0003】図13及び図14は従来のフォイル式動圧
型空気軸受を示しており、円筒形ハウジング101の内
筒面110に沿って波形形状のバンプフォイル102が
配置され、バンプフォイル102の内周面に沿ってトッ
プフォイル103が配置され、トップフォイル103の
内周面に空気膜119を介して回転軸105が回転自在
に保持されている。なお、図13は作用説明図であっ
て、回転軸105をトップフォイル103の内径よりも
極端に小さく表現し、また、回転軸105を大きく偏芯
した位置に記載してあるが、実際は、回転軸105の直
径よりもトップフォイル103の内径が僅かに小さくな
るように設定されており、停止状態においては、回転軸
105の略全周がトップフォイル103の内周面に接触
した状態となっている。
13 and 14 show a conventional foil type dynamic pressure type air bearing, in which a corrugated bump foil 102 is arranged along an inner cylindrical surface 110 of a cylindrical housing 101, and the inner circumference of the bump foil 102 is shown. The top foil 103 is arranged along the surface, and the rotary shaft 105 is rotatably held on the inner peripheral surface of the top foil 103 via an air film 119. Note that FIG. 13 is a diagram for explaining the operation, in which the rotary shaft 105 is expressed to be extremely smaller than the inner diameter of the top foil 103, and the rotary shaft 105 is shown in a largely eccentric position. The inner diameter of the top foil 103 is set to be slightly smaller than the diameter of the shaft 105, and in the stopped state, substantially the entire circumference of the rotating shaft 105 is in contact with the inner peripheral surface of the top foil 103. There is.

【0004】図13の拡大部分図である図14におい
て、トップフォイル103とバンプフォイル102の円
周方向の各一端103a,102aは、固着部材120
及びスポット溶接等を利用して、ハウジング内筒面11
0に固着されており、他端103b,102bのみが周
方向に移動可能な自由端となっている。
In FIG. 14, which is an enlarged partial view of FIG. 13, respective one ends 103a, 102a of the top foil 103 and the bump foil 102 in the circumferential direction are fixed members 120.
And the inner surface 11 of the housing using spot welding or the like.
It is fixed to 0, and only the other ends 103b and 102b are free ends that are movable in the circumferential direction.

【0005】回転軸105は、回転速度が低い時にはト
ップフォイル103の内周面に接触して回転し、所定回
転速度(たとえば4000rpm)以上になると、トッ
プフォイル103と回転軸105の外周面の間に空気膜
119が形成され始め、空気膜119の圧力により、ト
ップフォイル103が外方へ加圧されると共にバンプフ
ォイル102が外方へ圧縮され、それによりトップフォ
イル103と回転軸105との間に環状の隙間、たとえ
ば5μ程度の隙間(空気膜119)が確保され、該空気
膜119により、回転軸105が保持される。
The rotating shaft 105 contacts the inner peripheral surface of the top foil 103 to rotate when the rotating speed is low, and when the rotating speed exceeds a predetermined rotating speed (eg, 4000 rpm), it is between the top foil 103 and the outer peripheral surface of the rotating shaft 105. An air film 119 starts to be formed on the top foil 103, and the pressure of the air film 119 pressurizes the top foil 103 outwardly and compresses the bump foil 102 outwardly, whereby the space between the top foil 103 and the rotating shaft 105 is increased. An annular gap, for example, a gap of about 5 μ (air film 119) is secured in the space, and the air shaft 119 is held by the air film 119.

【0006】バンプフォイル102の径方向のばね定数
は空気膜119によるばね定数よりも低く設定してあ
り、回転軸105が径方向に変位した場合に、空気膜1
19よりもバンプフォイル102が先に圧縮するように
なっている。このようなバンプフォイル102のばね機
能により、上記のように回転軸105に径方向の変位が
生じた場合でも、回転軸105がトップフォイル103
に直接接触するのを防いでいる。
The spring constant of the bump foil 102 in the radial direction is set lower than the spring constant of the air film 119, and when the rotary shaft 105 is displaced in the radial direction, the air film 1
The bump foil 102 is designed to be compressed earlier than 19. Due to such a spring function of the bump foil 102, even when the rotary shaft 105 is displaced in the radial direction as described above, the rotary shaft 105 does not move to the top foil 103.
To prevent direct contact with.

【0007】また、バンプフォイル102は、上記のよ
うな圧縮変形時において、円周方向に伸びることによ
り、トップフォイル103との接触面Q1及びハウジン
グ内筒面110との接触面Q2でそれぞれ摩擦抵抗を発
生させ、該摩擦抵抗と、上記空気膜自体による減衰効果
により、回転による振動を制振する機能も有している。
なお、先行技術文献としては、特開平10−33184
6号公報がある。
When the bump foil 102 is compressed and deformed as described above, the bump foil 102 extends in the circumferential direction, so that the contact surface Q1 with the top foil 103 and the contact surface Q2 with the inner cylindrical surface 110 of the housing respectively have a friction resistance. And also has the function of damping the vibration due to rotation by the frictional resistance and the damping effect of the air film itself.
As a prior art document, Japanese Patent Laid-Open No. 10-33184
There is No. 6 publication.

【0008】[0008]

【発明が解決しようとする課題】図13及び図14のよ
うな構成の動圧型空気軸受では、次のような課題があ
る。 (1)各フォイルをハウジングに固着する際の変形。 図14のようにバンプフォイル102及びトップフォイ
ル103の一端102a,103aを、溶接あるいはハ
ウジングの内周面に形成した溝への圧入により固着する
構造であると、溶接等による固着工程において、固着部
近傍に歪が生じ、トップフォイル内周面の円筒度が損な
われることがある。円筒度が低下すると、回転軸105
の外周面とトップフォイル103の間の空気膜119の
厚さが一様にならず、凸凹ができ、局所的に空気膜11
9に薄い部分が生じる。そうすると、僅かな軸振動に対
しても膜切れが生じることがあり、回転軸105とトッ
プフォイル103が局所的に直接接触して摩擦抵抗が発
生し、トップフォイル103の摩耗を早めることにな
る。
The dynamic pressure type air bearing having the structure as shown in FIGS. 13 and 14 has the following problems. (1) Deformation when fixing each foil to the housing. As shown in FIG. 14, when the ends 102a and 103a of the bump foil 102 and the top foil 103 are fixed to each other by welding or press fitting into a groove formed on the inner peripheral surface of the housing, a fixing portion is formed in a fixing process such as welding. Distortion may occur in the vicinity, and the cylindricity of the inner surface of the top foil may be impaired. When the cylindricity decreases, the rotating shaft 105
The thickness of the air film 119 between the outer peripheral surface of the film and the top foil 103 is not uniform, and irregularities are formed, and the air film 11 is locally formed.
A thin portion occurs at 9. Then, even if a slight shaft vibration occurs, the film may be broken, the rotating shaft 105 and the top foil 103 are locally brought into direct contact with each other, and frictional resistance is generated, which accelerates wear of the top foil 103.

【0009】(2)バンプフォイルの圧縮変形時におけ
る摺動抵抗の増加。 回転軸105が軸振動その他の原因で、たとえば図13
の点P1付近でラジアル荷重Kによりトップフォイル側
に押し付けられるとすると、前述のようにバンプフォイ
ル102が圧縮し、それに伴って円周方向に伸びようと
する。
(2) Increase in sliding resistance when the bump foil is compressed and deformed. When the rotating shaft 105 causes shaft vibration and other causes, for example, FIG.
If the radial load K presses the top foil side in the vicinity of the point P1, the bump foil 102 is compressed as described above and tends to extend in the circumferential direction.

【0010】この時、押付点P1より自由端102b側
の領域G1では容易に伸びることができるが、押付点P
1より固着端102a側の領域G2では、バンプフォイ
ル102は周方向に伸びることができないので、径方向
の内方へ膨れ、トップフォイル103を内方へ突き出し
て回転軸105に過度に接触させてしまう。これにより
摺動抵抗が増加し、軸受機能が低下する。
At this time, the area G1 on the free end 102b side of the pressing point P1 can easily extend, but the pressing point P1
In the region G2 closer to the fixed end 102a than 1, the bump foil 102 cannot extend in the circumferential direction, so that the bump foil 102 swells inward in the radial direction and the top foil 103 protrudes inward to excessively contact the rotating shaft 105. I will end up. As a result, the sliding resistance increases and the bearing function deteriorates.

【0011】(3)部品の再利用不可。 図13のように両フォイル102,103を溶接により
ハウジング101に固着する構造では、一度組み立てら
れると、出荷検査時に、固着部の変形又は累積公差によ
る値が基準値を越えて不合格となった時には、全部品が
再使用不可となり、部品コスト面で課題が残る。
(3) Parts cannot be reused. In the structure in which both foils 102 and 103 are fixed to the housing 101 by welding as shown in FIG. 13, once assembled, the value due to deformation or accumulated tolerance of the fixing portion exceeded the reference value and was rejected during shipping inspection. At times, all parts are not reusable, leaving a problem in terms of parts cost.

【0012】(4)歩留まりの低さ。 上記課題(3)に記載したように、従来のフォイル固着
型では、組立後は全部品が再使用不可となるので、軸受
隙間を管理するためには、各部品毎に厳しい寸法精度が
要求され、しかも、各部品が寸法的に合格品であって
も、組立時に累積寸法誤差により軸受自体が不合格にな
ることがあり、製品の歩留まりがよくない。
(4) Low yield. As described in the above problem (3), in the conventional foil fixing type, all components cannot be reused after assembly, so that strict dimensional accuracy is required for each component in order to manage the bearing clearance. Moreover, even if each component is a dimensional acceptable product, the bearing itself may be rejected due to a cumulative dimensional error during assembly, and the product yield is not good.

【0013】(5)軸組付作業の煩雑性。 図13のように1枚のトップフォイル103で回転軸1
05を包み込む構造では、回転軸105の周囲で空気膜
119が途切れる個所が固着部120の近傍一箇所だけ
となり、半径方向の負荷に対して軸受特性が安定してい
る。しかしながらこの構造では、回転軸105をトップ
フォイル内に挿入する組立作業において、トップフォイ
ル103の自由端103b部分が回転軸105と連れも
って軸方向に移動し、トップフォイル103がねじれて
回転軸105に巻き付くため、挿入作業が非常に困難に
なる。このようなトップフォイル103の巻付き現象を
なくすためには、回転軸105をトップフォイル103
が膨らむ方向(F方向と反対方向)に回転させながら挿
入しなければならず、特別の組立装置と煩雑な組立の手
間を要することになる。
(5) Complexity of the shaft assembly work. As shown in FIG. 13, one top foil 103 is used for the rotary shaft 1
In the structure that wraps 05, the air film 119 is interrupted around the rotating shaft 105 at only one position in the vicinity of the fixed portion 120, and the bearing characteristics are stable against a radial load. However, in this structure, in the assembly work of inserting the rotary shaft 105 into the top foil, the free end 103b portion of the top foil 103 moves axially together with the rotary shaft 105, and the top foil 103 is twisted to the rotary shaft 105. Because it wraps around, insertion work becomes very difficult. In order to eliminate such a winding phenomenon of the top foil 103, the rotary shaft 105 is attached to the top foil 103.
Must be inserted while rotating in the direction in which the swells (the direction opposite to the F direction), which requires a special assembling device and complicated assembling work.

【0014】[0014]

【課題を解決するための手段】上記課題を解決するため
に本願請求項1記載の発明は、円筒形ハウジングの内筒
面に隣接状態で挿入される波板状のバンプフォイルと、
該バンプフォイルの内周面に隣接状態で配置され空気膜
を介して回転軸を保持するトップフォイルとを有する動
圧型空気軸受において、バンプフォイルの円周方向両端
部に外向き突起を形成し、該両突起を、ハウジングの内
筒面に形成された凹部に、円周方向の遊びを有して係合
している。これにより、バンプフォイルの組付作業性が
向上すると共に、組立後も分解してバンプフォイル等の
部品の再利用が可能となり、部品コストの節約及び歩留
まり向上が達成できる。また、バンプフォイルの圧縮変
形時に、円周方向の両端が自由端として凹部内で円周方
向に移動し得るので、軸振動時等におけるバンプフォイ
ルの径方向内方への膨らみを防止し、軸受の特性を維持
することができる。
In order to solve the above-mentioned problems, the invention according to claim 1 of the present application is a corrugated plate-like bump foil which is inserted into the inner cylindrical surface of a cylindrical housing in an adjacent state.
In a dynamic pressure type air bearing having a top foil which is arranged adjacent to the inner peripheral surface of the bump foil and holds a rotating shaft via an air film, outward protrusions are formed at both circumferential end portions of the bump foil. The both projections are engaged with a recess formed in the inner cylindrical surface of the housing with a circumferential play. As a result, the workability of assembling the bump foil is improved, and the parts such as the bump foil can be reused by disassembling them even after the assembly, so that the parts cost can be saved and the yield can be improved. Further, when the bump foil is compressed and deformed, both ends in the circumferential direction can be moved in the circumferential direction in the recess as free ends, so that the bump foil can be prevented from bulging radially inward when the shaft vibrates. The characteristics of can be maintained.

【0015】請求項2記載の発明は、請求項1記載の動
圧型空気軸受において、トップフォイルの軸方向両端に
突起を形成し、該突起をハウジングに形成された係合溝
に係合することにより、トップフォイルを円周方向及び
軸方向に係止している。これにより、組付作業性が向上
すると共に、組立後も分解してトップフォイル等の部品
の再利用が可能となり、部品コストの節約及び歩留まり
向上が達成できる。しかも、軸組付時、回転軸を回転さ
せて挿入しなくとも、トップフォイルがねじれて回転軸
に巻き付くことはなくなり、軸の組付作業性も向上す
る。
According to a second aspect of the present invention, in the dynamic pressure type air bearing according to the first aspect, protrusions are formed at both axial ends of the top foil, and the protrusions are engaged with engagement grooves formed in the housing. Thus, the top foil is locked in the circumferential direction and the axial direction. As a result, the workability of assembling is improved, and the parts such as the top foil can be reused by disassembling them even after the assembling, so that the parts cost can be saved and the yield can be improved. Moreover, when the shaft is assembled, the top foil will not be twisted and wrapped around the rotary shaft without rotating and inserting the rotary shaft, and the workability of assembling the shaft will be improved.

【0016】請求項3記載の発明は、請求項2記載の動
圧型空気軸受において、トップフォイルの位置決め用の
上記突起は、軸方向両端にL字形に張出し成形した張出
部の先端部を、軸芯と平行な折曲線により折曲げ成形し
たものである。このように突起を形成することにより、
トップフォイルを円筒形に曲げ成形する場合に、円筒度
が狂うことがなく、また、突起成形時にトップフォイル
自体に変形が生じたり、あるいは突起形成個所のみの剛
性が高くなるようなこともない。
According to a third aspect of the present invention, in the dynamic pressure type air bearing according to the second aspect, the projections for positioning the top foil have the tip end portions of the overhanging portions formed in the L-shape at both axial ends. It is formed by bending along a folding curve parallel to the axis. By forming the protrusions in this way,
When the top foil is bent and formed into a cylindrical shape, the cylindricity does not change, and the top foil itself is not deformed at the time of forming the protrusion, or the rigidity of only the protrusion forming portion is not increased.

【0017】[0017]

【0018】[0018]

【発明の実施の形態】図1は本願発明を適用したフォイ
ル式動圧型空気軸受の分解斜視図であり、該空気軸受
は、円筒形のハウジング1と、該ハウジング1の内筒面
10に嵌め込まれる波形形状のバンプフォイル2と、該
バンプフォイル2の内周面に嵌め込まれると共に空気膜
を介して回転軸5を保持するトップフォイル3とから構
成されている。
1 is an exploded perspective view of a foil type dynamic pressure type air bearing to which the present invention is applied. The air bearing is fitted into a cylindrical housing 1 and an inner cylindrical surface 10 of the housing 1. The bump foil 2 has a corrugated shape, and the top foil 3 is fitted into the inner peripheral surface of the bump foil 2 and holds the rotating shaft 5 through an air film.

【0019】円筒形ハウジング1の内筒面10には、軸
方向の全長に亘って延びるキー溝状の凹部11が形成さ
れ、軸方向両端面には、放射状に延びる複数の係合溝1
2が形成されている。両フォイル2,3は1枚物のシー
トを円筒状に成形加工したものであり、それぞれ周方向
の一箇所に開口(隙間)W1,W5を有している。バン
プフォイル2の開口W1を挟む周方向両端部には、前記
ハウジング1の凹部11に係合可能な外向き突起2a、
2bが折曲成形されており、トップフォイル3の軸方向
両端縁にはハウジング1の係合溝12に係合可能な複数
の突起15が折曲成形されている。
The inner cylindrical surface 10 of the cylindrical housing 1 is formed with key groove-shaped recesses 11 extending over the entire length in the axial direction, and a plurality of engagement grooves 1 extending radially are formed on both end surfaces in the axial direction.
2 is formed. Both foils 2 and 3 are formed by processing a single sheet into a cylindrical shape, and have openings (gaps) W1 and W5 at one location in the circumferential direction. At both ends of the bump foil 2 in the circumferential direction sandwiching the opening W1, the outward projections 2a engageable with the recesses 11 of the housing 1,
2b is formed by bending, and a plurality of projections 15 that can be engaged with the engaging grooves 12 of the housing 1 are formed by bending on both axial edges of the top foil 3.

【0020】図3はハウジング1の正面図であり、軸方
向両端面に形成された放射状の係合溝12は、たとえば
5本形成されており、前記1つの凹部11と共に、円周
方向に六等分した点上にそれぞれ配置されている。
FIG. 3 is a front view of the housing 1. For example, five radial engaging grooves 12 formed on both end surfaces in the axial direction are formed, and together with the one concave portion 11, six grooves are formed in the circumferential direction. They are placed on equal points.

【0021】図4は図3のIV-IV断面図であり、内筒面
10の軸方向両端部には、径方向の内方へ張り出すバン
プフォイル抜止め用の環状段面18がそれぞれ形成され
ている。図6は上記段面18部分を拡大して示す図2の
VI-VI断面拡大図であり、段面18の径方向の高さH1
は、バンプフォイル2の波高さH2より小さく設定され
ており、これにより回転軸5が径方向に変位しても、一
定範囲(H2−H1)内では、段面18の径方向内方端
18aに回転軸5が当接しないようになっている。たと
えば、バンプフォイル2の波高さH2=0.5mmに対し
て段面18の高さH1は0.3mmに設定されており、回
転軸5が径方向に0.2mm未満の範囲で変位可能となっ
ている。
FIG. 4 is a sectional view taken along the line IV-IV in FIG. 3, in which the annular step surfaces 18 for preventing the bump foils from protruding radially inward are formed at both axial ends of the inner cylindrical surface 10. Has been done. FIG. 6 is an enlarged view of the step surface 18 portion of FIG.
FIG. 6 is an enlarged view of a VI-VI cross section, showing a radial height H1 of the step surface 18.
Is set to be smaller than the wave height H2 of the bump foil 2, so that even if the rotary shaft 5 is displaced in the radial direction, within the certain range (H2-H1), the radial inner end 18a of the step surface 18 is increased. The rotary shaft 5 does not come into contact with the. For example, the height H1 of the step surface 18 is set to 0.3 mm with respect to the wave height H2 of the bump foil 2 = 0.5 mm, and the rotary shaft 5 can be displaced in the radial direction within a range of less than 0.2 mm. Has become.

【0022】図7はバンプフォイル2の正面図であり、
厚み50μ〜100μmm程度の薄膜状金属でできてお
り、一方の突起2bから一定の区間を除いて、略全面に
亘り波形に形成されている。バンプフォイル2の材料と
しては、ニッケル合金(たとえばニッケル75%)に時
効硬化処理を施した高級ばね材を使用し、硬度はHRC
35〜40程度となっており、高温度高荷重の下でのへ
たり防止を図っている。
FIG. 7 is a front view of the bump foil 2.
It is made of a thin-film metal having a thickness of about 50 μm to 100 μm, and is formed in a corrugated shape over substantially the entire surface except for a certain section from one protrusion 2b. As the material of the bump foil 2, a high-grade spring material obtained by subjecting a nickel alloy (for example, 75% nickel) to age hardening is used, and has a hardness of HRC.
It is about 35 to 40, and is intended to prevent fatigue under high temperature and high load.

【0023】バンプフォイル2の未組付状態(自由状
態)での外径D2は、たとえば50〜60mm程度に設定
され、図4に示すハウジング内筒面10の内径D1(=
40mm)より大きく設定されている。
The outer diameter D2 of the bump foil 2 in an unassembled state (free state) is set to, for example, about 50 to 60 mm, and the inner diameter D1 (= of the inner cylindrical surface 10 of the housing shown in FIG. 4).
It is set larger than 40 mm).

【0024】図2は軸受の組立完了状態の正面部分図で
あり、バンプフォイル2の径方向のばね定数は、バンプ
フォイル2の厚みと波間のピッチにより決定されるが、
トップフォイル3と回転軸5の外周面の間に形成される
空気膜(空気ばね)19のばね定数よりも低く設定され
ており、これにより、回転軸5のラジアル荷重に対し
て、空気膜19の厚みを保ちながら、バンプフォイル2
が径方向に圧縮するようになっている。
FIG. 2 is a partial front view of the bearing assembly completed state. The radial spring constant of the bump foil 2 is determined by the thickness of the bump foil 2 and the pitch between the waves.
It is set to be lower than the spring constant of an air film (air spring) 19 formed between the top foil 3 and the outer peripheral surface of the rotary shaft 5, so that the air film 19 can be set against the radial load of the rotary shaft 5. Bump foil 2 while maintaining the thickness of
Is designed to be compressed in the radial direction.

【0025】ハウジング1の凹部11に係合するバンプ
フォイル2の両端突起2a,2bの間隔W1は、装着時
において、凹部11の周方向の幅W2よりも小さくなっ
ており、周方向に所定の隙間(遊び)d1+d2を有し
て係合している。
The interval W1 between the projections 2a and 2b on both ends of the bump foil 2 which engages with the recess 11 of the housing 1 is smaller than the width W2 of the recess 11 in the circumferential direction at the time of mounting, and is a predetermined value in the circumferential direction. They are engaged with each other with a clearance (play) d1 + d2.

【0026】図8はトップフォイル3の正面図であり、
軸方向の両端に形成された突起15は、開口W5と共に
周方向に六等分した各点に配置されている。トップフォ
イル3の材料としては、ニッケル合金(たとえばニッケ
ル75%)を用いているが、焼鈍しを行なうことによ
り、硬度はHRC10〜20程度とし、回転軸5との密
着性及び当たりを良くしている。一方、トップフォイル
3の厚みはバンプフォイル2よりも厚く、たとえば10
0〜200μmm程度としており、これにより径方向の変
形を防止し、円筒度の維持を図っている。トップフォイ
ル3の内周面には、フッ素又は二硫化モリブデン等の低
摩擦材によりコーティングが施されており、これにより
低速回転時に回転軸5と直接接触する際の摩擦抵抗の低
下及び摩耗の低減を図っている。一方、トップフォイル
3の外周面には銀めっき又は銅めっきが施されており、
これにより、図10の両フォイル2,3の接触面Q1に
おいて滑らかな減衰効果が得られるようにしてある。
FIG. 8 is a front view of the top foil 3,
The protrusions 15 formed at both ends in the axial direction are arranged at each point divided into six equal parts in the circumferential direction together with the opening W5. Although a nickel alloy (for example, 75% nickel) is used as the material of the top foil 3, the hardness is set to about HRC10 to 20 by performing annealing to improve the adhesion and contact with the rotating shaft 5. There is. On the other hand, the thickness of the top foil 3 is thicker than that of the bump foil 2, for example, 10
It is set to about 0 to 200 μmm, which prevents deformation in the radial direction and maintains cylindricity. The inner peripheral surface of the top foil 3 is coated with a low-friction material such as fluorine or molybdenum disulfide, which reduces frictional resistance and wear when it comes into direct contact with the rotating shaft 5 at low speed rotation. I am trying to On the other hand, the outer peripheral surface of the top foil 3 is plated with silver or copper,
As a result, a smooth damping effect can be obtained at the contact surfaces Q1 of both foils 2 and 3 in FIG.

【0027】図9は前記突起15を折曲成形する前のト
ップフォイル3の展開図であり、軸方向の両端縁に、突
起形成用のL字形張出片21がトップフォイル3と同一
平面内にそれぞれ一体成形されており、各L字形張出片
21は先端部15aが軸回転方向F側に突出するように
形成されており、張出片21の先端部15aを軸芯と平
行な折曲線Bで径方向外方に折り曲げることにより、図
10のように突起15を円周面と概ね直角な姿勢に形成
している。この突起15は前述のようにハウジング1の
放射状係合溝12に係合し、トップフォイル3の軸方向
の抜止め及び円周方向の回転規制の役目を果たしてい
る。また、回転軸5の回転により、突起15は放射状係
合溝12の回転方向F側の端面12aに当接しており、
トップフォイル3の径方向の拡張収縮に伴って、端面1
2aに対して径方向に擦れることにより、摩擦減衰機能
も発揮するようになっている。
FIG. 9 is a development view of the top foil 3 before the projection 15 is formed by bending, and L-shaped projecting pieces 21 for forming projections are in the same plane as the top foil 3 on both end edges in the axial direction. Each of the L-shaped overhanging pieces 21 is formed in such a manner that the tip end portion 15a thereof projects in the axial rotation direction F side, and the tip end portion 15a of the overhanging piece 21 is folded in parallel with the shaft core. By bending the curve B outward in the radial direction, the projection 15 is formed in a posture substantially perpendicular to the circumferential surface as shown in FIG. As described above, the protrusion 15 engages with the radial engagement groove 12 of the housing 1, and serves to prevent the top foil 3 from being pulled out in the axial direction and to regulate the rotation in the circumferential direction. Further, due to the rotation of the rotary shaft 5, the projection 15 is in contact with the end face 12a of the radial engagement groove 12 on the rotational direction F side,
As the top foil 3 expands and contracts in the radial direction, the end surface 1
By rubbing in the radial direction with respect to 2a, a friction damping function is also exerted.

【0028】[0028]

【組付方法】図1において、バンプフォイル2を縮径さ
せ、突起2a,2bをハウジング1の凹部11に合わせ
た状態でハウジング1内に挿入する。挿入後は、復元力
により径方向外方へ開き、ハウジング内筒面10に一定
の圧力で接触する。トップフォイル3も、縮径させた状
態でバンプフォイル2内に挿入する。挿入後は、その復
元力により径方向の外方に開き、バンプフォイル内周面
に一定の圧力で接触し、また、各突起15は係合溝12
に係合する。
[Assembly Method] In FIG. 1, the bump foil 2 is reduced in diameter, and the projections 2a and 2b are inserted into the housing 1 in a state of being aligned with the recess 11 of the housing 1. After the insertion, it opens outward in the radial direction due to the restoring force, and comes into contact with the inner cylindrical surface 10 of the housing at a constant pressure. The top foil 3 is also inserted into the bump foil 2 in a reduced diameter state. After the insertion, the restoring force opens outward in the radial direction and contacts the inner peripheral surface of the bump foil with a constant pressure.
Engage with.

【0029】上記のようにハウジング1内に両フォイル
2,3を組み付けた後、回転軸5を挿入する。この回転
軸挿入作業において、装着状態でのトップフォイル3の
内径は回転軸5の外径より若干小さくなっているので、
トップフォイル3を拡張気味に挿入することになるが、
トップフォイル3は係合溝12と突起15との係合によ
り、円周方向及び軸方向に位置決めされていることによ
り、トップフォイル3が回転軸5に螺旋状に巻き付いた
り、あるいは軸方向にハウジング1から突出することは
ない。すなわち、回転軸5を回転させなくとも、トップ
フォイル3内に容易に嵌合することができる。
After assembling both foils 2 and 3 in the housing 1 as described above, the rotary shaft 5 is inserted. In this rotary shaft insertion work, the inner diameter of the top foil 3 in the mounted state is slightly smaller than the outer diameter of the rotary shaft 5,
The top foil 3 will be inserted with a slight expansion,
The top foil 3 is positioned in the circumferential direction and the axial direction by the engagement between the engaging groove 12 and the protrusion 15, so that the top foil 3 is spirally wound around the rotating shaft 5 or is axially moved in the housing. It does not protrude from 1. That is, it is possible to easily fit the inside of the top foil 3 without rotating the rotary shaft 5.

【0030】このように、溶接部等固着部を作ることな
く軸受を組み立てるので、仮にハウジング1及び両フォ
イル2,3の寸法精度の累積公差が大きくなり、軸受全
体として、出荷検査時に不合格となっても、簡単に分解
することができ、分解後の具合の悪い部品だけを取り替
えることにより、累積誤差が規格内の製品に組み立て直
すことができる。
As described above, since the bearing is assembled without forming a fixed portion such as a welded portion, the cumulative tolerance of the dimensional accuracy of the housing 1 and both foils 2 and 3 becomes large, and the bearing as a whole is rejected at the time of shipping inspection. Even then, it can be easily disassembled, and by replacing only the parts that are not in good condition after disassembly, it is possible to reassemble the product with the accumulated error within the standard.

【0031】また、トップフォイル3の突起15は、図
9のようにトップフォイル3の両端にL字形張出片21
を形成して、その先端部15aを軸芯と平行な折曲線B
により折曲成形しているので、トップフォイル3を円筒
形に曲げ成形する場合に、円筒度が狂うことがなく、ま
た、突起成形時にトップフォイル自体に変形が生じた
り、あるいは突起形成個所のみの剛性が高くなるような
こともない。ちなみに、トップフォイル3の両端に直接
突起を折曲成形するとすれば、突起の付根の剛性が高く
なり、円筒度に影響すると共に、折曲成形時にトップフ
ォイル自体に変形が生じる可能性もある。
Further, the protrusions 15 of the top foil 3 have L-shaped projecting pieces 21 at both ends of the top foil 3 as shown in FIG.
And the tip 15a of the curved line B is parallel to the axis.
Since the top foil 3 is bent and formed, the cylindricity does not change when the top foil 3 is bent and formed, and the top foil itself is deformed when forming the protrusion, or only the protrusion forming portion is formed. There is no increase in rigidity. By the way, if the protrusions are directly bent and formed on both ends of the top foil 3, the rigidity of the roots of the protrusions is increased, the cylindricity is affected, and the top foil itself may be deformed during the bending and forming.

【0032】[0032]

【作用】図2において、軸装着状態においては、回転軸
5の外周は開口W5を除いて略全周がトップフォイル3
の内周面に接触している。
In FIG. 2, when the shaft is attached, the outer circumference of the rotary shaft 5 is substantially the entire circumference except for the opening W5.
Is in contact with the inner peripheral surface of.

【0033】回転軸5がF方向に回転し始めると、トッ
プフォイル3は摩擦により回転軸5と共にF方向に連れ
回ろうとするが、突起15が係合溝12の端面12aに
当接することにより、回転方向に係止される。一方、バ
ンプフォイル2は、熱膨張及び摩擦等により、回転方向
Fと反対方向に摺動して、たとえば隙間d1だけ摺動し
た後、突起2aが凹部11の端面11aに当接し、円周
方向に係止される。
When the rotary shaft 5 starts to rotate in the F direction, the top foil 3 tries to rotate with the rotary shaft 5 in the F direction due to friction, but the projection 15 abuts on the end face 12a of the engaging groove 12, It is locked in the direction of rotation. On the other hand, the bump foil 2 slides in the direction opposite to the rotation direction F due to thermal expansion and friction, for example, by the gap d1, and then the projection 2a comes into contact with the end surface 11a of the recess 11 and the circumferential direction. Locked in.

【0034】トップフォイル3の突起15は、図10の
ようにL字形張出片21の回転方向Fの先端部を折曲成
形してあるので、係合溝12の回転方向F側の端面12
aに強く押し付けられても、張出片側へ押圧されること
になり、高い剛性を維持でき、突起15が変形する可能
性は低い。
As shown in FIG. 10, the protrusion 15 of the top foil 3 is formed by bending the tip of the L-shaped overhanging piece 21 in the rotational direction F, so that the end face 12 of the engaging groove 12 on the rotational direction F side 12 is formed.
Even if it is strongly pressed against a, it is pressed toward the protruding piece side, high rigidity can be maintained, and the projection 15 is unlikely to be deformed.

【0035】4000rpm程度までの低速回転域で
は、空気膜19は形成されておらず、回転軸5は、トッ
プフォイル3の内周面に直接接触した状態で回転する。
すなわち、回転軸5は、低摩擦材でコーティングされた
トップフォイル内周面により支持され、通常の軸受メタ
ル等と同様な軸受状態となっている。
In the low speed rotation range up to about 4000 rpm, the air film 19 is not formed, and the rotating shaft 5 rotates while being in direct contact with the inner peripheral surface of the top foil 3.
That is, the rotary shaft 5 is supported by the inner peripheral surface of the top foil coated with a low-friction material, and is in a bearing state similar to a normal bearing metal or the like.

【0036】高速回転域になると、トップフォイル3と
回転軸5との間に空気が巻き込まれて空気膜19が形成
され始め、空気膜19の圧力によりトップフォイル3が
径方向の外方に押され、それによりバンプフォイル2が
径方向に圧縮され、トップフォイル3と回転軸5の間に
一定の隙間(たとえば5μmm程度の隙間)が生じ、トッ
プフォイル3と非接触状態で回転する。すなわち、回転
軸5の全周が空気膜19により保持された状態で回転す
る。
In the high speed rotation range, air is caught between the top foil 3 and the rotary shaft 5 to start forming an air film 19, and the pressure of the air film 19 pushes the top foil 3 outward in the radial direction. As a result, the bump foil 2 is compressed in the radial direction, a constant gap (for example, a gap of about 5 μm) is generated between the top foil 3 and the rotating shaft 5, and the bump foil 2 rotates in a non-contact state with the top foil 3. That is, the entire circumference of the rotary shaft 5 rotates while being held by the air film 19.

【0037】動圧型空気軸受では、低速回転時において
は連れ回りによる剛体モードの共振が発生し、高速回転
時には曲げ共振が発生し、各共振点を通過する際に、大
きなラジアル荷重がかかる。たとえば図10の点P1に
ラジアル荷重Kがかかったとすると、点P1において空
気膜19を介してトップフォイル3がK方向に押し付け
られ、バンプフォイル2がK方向に圧縮する。これによ
り、空気膜19が切れるのを防ぐと共に、上記共振作用
による回転振動等を減衰する。
In the dynamic pressure type air bearing, rigid body mode resonance occurs due to entrainment at low speed rotation, bending resonance occurs at high speed rotation, and a large radial load is applied when passing through each resonance point. For example, if a radial load K is applied to the point P1 in FIG. 10, the top foil 3 is pressed in the K direction via the air film 19 at the point P1, and the bump foil 2 is compressed in the K direction. As a result, the air film 19 is prevented from being broken and the rotational vibration or the like due to the resonance action is damped.

【0038】回転軸振動に対する減衰作用を詳しく説明
する。バンプフォイル2が径方向の外方に圧縮される
と、バンプフォイル2は押付点P1を基点として、円周
方向の両側に伸び、この円周方向の伸びにより、バンプ
フォイル2とトップフォイル3との接触面Q1及びバン
プフォイル2とハウジング内筒面10との接触面Q2に
おいてそれぞれ摩擦抵抗が発生し、該摺動摩擦抵抗と、
空気膜自体の減衰作用と、さらにはトップフォイル3の
突起15と溝12とが径方向に擦れることによる摩擦抵
抗により、回転軸振動を減衰する。
The damping action on the rotation shaft vibration will be described in detail. When the bump foil 2 is compressed outward in the radial direction, the bump foil 2 extends to both sides in the circumferential direction from the pressing point P1 as a base point, and the extension in the circumferential direction causes the bump foil 2 and the top foil 3 to be separated from each other. A frictional resistance is generated on each of the contact surface Q1 and the contact surface Q2 between the bump foil 2 and the inner cylindrical surface 10 of the housing.
The vibration of the rotating shaft is damped by the damping action of the air film itself and the frictional resistance caused by the projection 15 of the top foil 3 and the groove 12 being rubbed in the radial direction.

【0039】上記バンプフォイル2が円周方向伸びる場
合に、バンプフォイル2の両突起2a,2bのうち、い
ずれが凹部端面11a又は11bに当接している状態で
あっても、両突起2a,2b間に一定隙間W1を確保し
てあるので、押付点P1を境として、バンプフォイル2
は回転方向F及び反対方向のいずれにも自由に伸びるこ
とができ、従来例のように固着側が内方へ膨らむような
ことはない。
When the bump foil 2 extends in the circumferential direction, no matter which of the two projections 2a, 2b of the bump foil 2 is in contact with the concave end surface 11a or 11b, both projections 2a, 2b. Since a constant gap W1 is secured between the bump foil 2 and the bump point 2 at the pressing point P1.
Can freely extend in both the rotational direction F and the opposite direction, and the fixed side does not swell inwardly as in the conventional example.

【0040】[0040]

【その他の発明の実施の形態】(1)図11はバンプフ
ォイル2の変形例を示しており、軸方向に2つのバンプ
フォイル31,31に分割した例である。ハウジングに
対して回転軸の平行度が精度良く保たれる場合は、前記
図1のように1枚形状のバンプフォイル2を使用するこ
とにより、部品点数の節約及び組付容易性を図ることが
できるが、図12のようにハウジング1に対する回転軸
5の平行度が悪くなるような事態が予想される場合に
は、分割形のバンプフォイル31,31を用い、回転軸
傾斜時でも各バンプフォイル31,31の可撓性を維持
できるようにすることができる。バンプフォイル31,
31同士の軸方向の位置決めは、外向きの突起部31
a,31b及びその近傍の非波形部分31c、31c同
士の当接により行なう。
[Other Embodiments of the Invention] (1) FIG. 11 shows a modified example of the bump foil 2, which is an example in which it is divided into two bump foils 31, 31 in the axial direction. When the parallelism of the rotary shaft with respect to the housing is maintained with high accuracy, the single-piece bump foil 2 as shown in FIG. 1 can be used to save the number of parts and facilitate the assembling. However, if it is expected that the parallelism of the rotary shaft 5 with respect to the housing 1 will be deteriorated as shown in FIG. 12, split bump foils 31, 31 are used, and each bump foil is inclined even when the rotary shaft is tilted. The flexibility of 31, 31 can be maintained. Bump foil 31,
31 is positioned in the axial direction by the outward projection 31.
a, 31b and non-corrugated portions 31c, 31c in the vicinity thereof are brought into contact with each other.

【0041】図12のように回転軸5がハウジング1に
対して傾斜した場合、分割型のバンプフォイル31,3
1を備えていると、各バンプフォイル31,31に全体
のばね定数は分散されているため、トップフォイル3の
軸方向両端部P6,P7において回転軸5に高い面圧が
作用することは無く、空気膜19による軸受機能を維持
することができる。
When the rotary shaft 5 is inclined with respect to the housing 1 as shown in FIG. 12, the split type bump foils 31, 3 are provided.
1, the whole spring constant is distributed to each bump foil 31, 31, so that high surface pressure does not act on the rotary shaft 5 at both axial end portions P6, P7 of the top foil 3. The bearing function of the air film 19 can be maintained.

【0042】[0042]

【発明の効果】本願発明は、円筒形ハウジング1と、該
円筒形ハウジング1の内筒面10に隣接状態で挿入され
る波形径状のバンプフォイル2と、該バンプフォイル2
の内周面に隣接状態で配置され空気膜19を介して回転
軸5を保持するトップフォイル3とを有する動圧型空気
軸受において、次のような効果を有している。
INDUSTRIAL APPLICABILITY The present invention has a cylindrical housing 1, a bump foil 2 having a corrugated diameter which is inserted adjacent to an inner cylindrical surface 10 of the cylindrical housing 1, and the bump foil 2.
In the dynamic pressure type air bearing having the top foil 3 which is arranged adjacent to the inner peripheral surface of the above and holds the rotating shaft 5 through the air film 19, the following effects can be obtained.

【0043】[0043]

【0044】[0044]

【0045】[0045]

【0046】(1)ハウジング1の内筒面10に凹部1
1を形成し、バンプフォイル2の円周方向両端部に外向
き突起2a,2bを形成し、両突起2a,2bを、円周
方向の遊びを有して上記凹部11に係合させていると、
組付作業性が向上すると共に、組立後でも分解してバン
プフォイル等の部品の再利用が可能となり、部品コスト
の節約及び歩留まり向上が達成できる。しかも、バンプ
フォイル2の圧縮変形時に、円周方向の両端2a,2b
が自由端として凹部11内で円周方向に移動し得るの
で、バンプフォイル2の径方向内方への膨らみを防止
し、軸受の特性を維持することができる。
(1) A recess 1 is formed in the inner cylindrical surface 10 of the housing 1.
1 is formed and outward projections 2a and 2b are formed on both ends of the bump foil 2 in the circumferential direction, and both projections 2a and 2b are engaged with the recess 11 with a circumferential play. When,
Assembling workability is improved, and parts such as bump foils can be reused by disassembling even after assembling, so that part cost savings and yield improvement can be achieved. Moreover, when the bump foil 2 is compressed and deformed, both ends 2a and 2b in the circumferential direction are formed.
Can move circumferentially in the recess 11 as a free end, so that the bulging of the bump foil 2 inward in the radial direction can be prevented and the characteristics of the bearing can be maintained.

【0047】(2)ハウジング1の内筒面10に凹部1
1を形成し、バンプフォイル2の円周方向両端部に外向
き突起2a,2bを形成し、両突起2a,2bを、円周
方向の遊びを有して上記凹部11に係合させていると、
回転軸5が軸振動その他の原因で径方向に変位して、バ
ンプフォイル2が一箇所の押付点P1で圧縮された場合
でも、押付点P1を境に円周方向の両側に自由に伸びる
ことができ、効率良く軸振動を減衰させることができ
る。
(2) The concave portion 1 is formed in the inner cylindrical surface 10 of the housing 1.
1 is formed and outward projections 2a and 2b are formed on both ends of the bump foil 2 in the circumferential direction, and both projections 2a and 2b are engaged with the recess 11 with a circumferential play. When,
Even when the rotary shaft 5 is displaced in the radial direction due to axial vibration or other causes and the bump foil 2 is compressed at one pressing point P1, it can freely extend on both sides in the circumferential direction with the pressing point P1 as a boundary. The shaft vibration can be efficiently damped.

【0048】(3)請求項2記載の発明のように、トッ
プフォイル3の軸方向両端に突起15を形成し、該突起
15をハウジング1に形成された係合溝12に係合する
ことにより、トップフォイル3を円周方向及び軸方向に
係止していると、図13及び図14のようなフォイル固
着型に比べ、溶接等による軸方向の位置固定作業が必要
なくなると共に、回転軸組付時、特別な挿入具を用いて
回転させながら回転軸を挿入する必要がなくなり、組付
作業性が向上する。
(3) According to the second aspect of the invention, the projections 15 are formed on both axial ends of the top foil 3, and the projections 15 are engaged with the engaging grooves 12 formed in the housing 1. When the top foil 3 is locked in the circumferential direction and the axial direction, it is not necessary to fix the axial position by welding or the like as compared with the foil fixing type as shown in FIGS. 13 and 14, and the rotary shaft assembly is used. At the time of attachment, it is not necessary to insert the rotary shaft while rotating it by using a special insertion tool, and the assembling workability is improved.

【0049】(4)請求項3記載の発明のように、トッ
プフォイル3の軸方向両端にL字形に張出し成形した張
出片(張出部)21の先端部を、軸芯と平行な折曲線B
により折曲げ成形して位置決め用の突起15を形成して
いると、トップフォイル3を円筒形に曲げ成形する場合
に、円筒度が狂うことがなく、また、突起成形時にトッ
プフォイル自体に変形が生じたり、あるいは突起形成個
所のみの剛性が高くなるようなこともない。
(4) As in the invention described in claim 3, the tip end portions of the overhanging pieces (overhanging portions) 21 formed by overhanging the top foil 3 in the axial direction in the L-shape are folded in parallel with the axis. Curve B
When the projections 15 for positioning are formed by bending by means of, the cylindricity does not change when the top foil 3 is bent and formed into a cylindrical shape, and the top foil itself is not deformed during projection formation. It does not occur or the rigidity of only the projection forming portion is not increased.

【図面の簡単な説明】[Brief description of drawings]

【図1】 本願発明を適用したフォイル式動圧型空気軸
受の分解斜視図である。
FIG. 1 is an exploded perspective view of a foil type dynamic pressure type air bearing to which the present invention is applied.

【図2】 図1のフォイル式動圧型空気軸受の部分正面
図である。
FIG. 2 is a partial front view of the foil dynamic pressure type air bearing of FIG.

【図3】 円筒形ハウジングの正面図である。FIG. 3 is a front view of a cylindrical housing.

【図4】 図3のIV-IV断面図である。4 is a cross-sectional view taken along the line IV-IV of FIG.

【図5】 図2のV矢視部分図である。5 is a partial view as seen from an arrow V in FIG.

【図6】 図2のVI-VI断面部分図である。FIG. 6 is a partial view taken along line VI-VI of FIG.

【図7】 バンプフォイルの正面図である。FIG. 7 is a front view of a bump foil.

【図8】 トップフォイルの正面図である。FIG. 8 is a front view of the top foil.

【図9】 トップフォイルの折曲加工前の展開図であ
る。
FIG. 9 is a development view of the top foil before bending.

【図10】 図2の矢印X部分の拡大図である。10 is an enlarged view of a portion indicated by an arrow X in FIG.

【図11】 バンプフォイルの変形例を示す斜視図であ
る。
FIG. 11 is a perspective view showing a modified example of the bump foil.

【図12】 図11の分割型バンプフォイルの作用説明
断面略図である。
FIG. 12 is a schematic cross-sectional view for explaining the action of the split type bump foil of FIG.

【図13】 従来例の断面図である。FIG. 13 is a sectional view of a conventional example.

【図14】 図13の部分拡大図である。FIG. 14 is a partially enlarged view of FIG.

【符号の説明】[Explanation of symbols]

1 円筒形ハウジング 2 バンプフォイル 2a,2b バンプフォイルの外向き突起 3 トップフォイル 5 回転軸 10 内筒面 11 凹部 12 放射状係合溝 15 トップフォイルの突起 18 段面 1 Cylindrical housing 2 bump foil 2a, 2b Bump foil outward projection 3 top foil 5 rotation axes 10 Inner cylinder surface 11 recess 12 radial engagement groove 15 Top foil protrusion 18 steps

───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.7,DB名) F16C 27/02 ─────────────────────────────────────────────────── ─── Continuation of front page (58) Fields surveyed (Int.Cl. 7 , DB name) F16C 27/02

Claims (3)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 円筒形ハウジングの内筒面に隣接状態で
挿入される波板状のバンプフォイルと、該バンプフォイ
ルの内周面に隣接状態で配置され空気膜を介して回転軸
を保持するトップフォイルとを有する動圧型空気軸受に
おいて、 バンプフォイルの円周方向両端部に径方向の外方に突出
する突起を形成し、 該両突起を、ハウジングの内筒面に形成された凹部に、
円周方向の遊びを有して係合していることを特徴とする
動圧型空気軸受。
1. A corrugated plate-shaped bump foil inserted into an inner cylindrical surface of a cylindrical housing in an adjacent state, and a rotary shaft held by an air film disposed adjacent to an inner peripheral surface of the bump foil. In a dynamic pressure type air bearing having a top foil, a bump outwardly protruding in the radial direction is formed at both ends in the circumferential direction of the bump foil, and the both protrusions are formed in a recess formed in the inner cylindrical surface of the housing.
A dynamic pressure type air bearing characterized in that it is engaged with a play in the circumferential direction.
【請求項2】 請求項1記載の動圧型空気軸受におい
て、 トップフォイルの軸方向両端に突起を形成し、 該突起をハウジングに形成された係合溝に係合すること
により、トップフォイルを円周方向及び軸方向に係止し
ていることを特徴とする動圧型空気軸受。
2. The dynamic pressure type air bearing according to claim 1 , wherein projections are formed at both axial ends of the top foil, and the projections are engaged with engagement grooves formed in the housing, whereby the top foil is circular. A dynamic pressure type air bearing characterized by being locked in the circumferential direction and the axial direction.
【請求項3】 請求項2記載の動圧型空気軸受におい
て、トップフォイルの位置決め用の上記突起は、軸方向
両端にL字形に張出し成形した張出部の先端部を、軸芯
と平行な折曲線により折曲げ成形したものであることを
特徴とする動圧型空気軸受。
3. The dynamic pressure type air bearing according to claim 2, wherein the projections for positioning the top foil are bent in parallel with the shaft core at the tips of the overhanging parts formed in the L shape at both axial ends. A dynamic pressure type air bearing characterized by being bent and formed by a curved line.
JP2000254038A 2000-08-24 2000-08-24 Dynamic pressure type air bearing Expired - Fee Related JP3463026B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000254038A JP3463026B2 (en) 2000-08-24 2000-08-24 Dynamic pressure type air bearing

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000254038A JP3463026B2 (en) 2000-08-24 2000-08-24 Dynamic pressure type air bearing

Publications (2)

Publication Number Publication Date
JP2002061645A JP2002061645A (en) 2002-02-28
JP3463026B2 true JP3463026B2 (en) 2003-11-05

Family

ID=18743054

Family Applications (1)

Application Number Title Priority Date Filing Date
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Country Status (1)

Country Link
JP (1) JP3463026B2 (en)

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