JP3452499B2 - Plasma address display device and method of manufacturing the same - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a plasma addressed display device and a method of manufacturing the same.

[0002]

2. Description of the Related Art Conventionally, in a matrix type electro-optical device (for example, a liquid crystal display device) using a liquid crystal cell, a switching element such as a thin film transistor is provided for each pixel as a means for achieving high resolution and high contrast. There is generally known a method of providing the above and driving it line-sequentially. However, in this method, it is necessary to provide a large number of semiconductor elements such as thin film transistors on the substrate, and therefore there is a problem that the manufacturing yield is deteriorated particularly when the area is increased.

In order to solve this problem, Buzaku et al. Propose a plasma addressed display device using a plasma switch in place of a switching element composed of a thin film transistor in Japanese Patent Application Laid-Open No. 1-217396.

FIG. 10 shows an example of this plasma addressed display device.

In this plasma addressed display device, a liquid crystal cell 121 having a liquid crystal layer 101 as an electro-optical material layer and a plasma cell 122 having a plasma chamber 102 for plasma discharge are laminated to form a liquid crystal layer 101 and a plasma chamber 102. And are arranged adjacent to each other via an intermediate substrate 103 made of glass or the like.

In the plasma cell 122, a plurality of a pair of plasma electrodes 105a and 105b made of strip-shaped conductive paste are arranged on a plasma substrate 104 made of glass or the like at substantially equal intervals. Terminals (not shown) for applying a voltage to the plasma electrodes 105a and 105b are alternately provided at one end of each of the pair of plasma electrodes 105a and 105b. Further, barrier ribs 106 made of glass paste are provided in parallel with each other so as to separate the pair of plasma electrodes 105a and 105b. The barrier rib 106 divides a space between the plasma substrate 104 and the intermediate substrate 103, and a plasma chamber (discharge region) 102 is provided for each of the plasma electrodes 105a and 105b. An ionizable gas is enclosed in the plasma chamber 102, and the plasma electrodes 105a and 105b function as an anode and a cathode in the plasma chamber 102, respectively. Then, the upper ends of the barrier ribs 106 and the plasma substrate 104.
The lower part of the intermediate substrate 103 is supported and fixed by a frit seal 107 provided at the peripheral edge of the.

In the liquid crystal cell 121, an alignment layer 108a for adjusting the alignment of liquid crystals is formed on the intermediate substrate 103, and a plurality of data electrodes 112 and alignment layers 108b are formed with a gap from the intermediate substrate 103. Counter substrate 1 formed
11 are arranged. Intermediate substrate 103 and counter substrate 11
1, and a liquid crystal layer 10 made of nematic liquid crystal or the like.
1 is provided with its periphery supported by a liquid crystal seal 109. The data electrode 112 intersects (here, is orthogonal to) the plasma electrodes 105a and 105b, and the intersection region of the plasma chamber 102 and the data electrode 112 corresponds to each pixel.

In the plasma addressed display device, the plasma chamber 102 in which plasma discharge is performed is sequentially switched and scanned by the terminals provided at one end of each of the plasma electrodes 105a and 105b, and in synchronization with this, the liquid crystal layer 101 is synchronized. A signal voltage is applied to the side data electrode 112. This holds the signal voltage in each pixel,
The liquid crystal layer 101 is driven. Therefore, each plasma chamber 10
2 corresponds to one scanning line, and the discharge region is divided for each scanning unit.

FIG. 11 shows a plan view of three pixels in one plasma chamber. In addition, the above-mentioned FIG. 10 is E- of FIG.
It is a sectional view of an E'line portion, showing five plasma chambers.

As shown in FIG. 11, the plasma electrode 105a is formed between the barrier ribs 106 formed on the plasma substrate.
105b is formed. The data electrodes 112 are formed on the counter substrate so as to be orthogonal to the barrier ribs 106. Further, although not shown in FIG.
A light shielding film 115 is formed between the adjacent data electrodes 112 and at a position facing the barrier rib 106. The light shielding film 115 is formed to block unnecessary light from between the adjacent data electrodes 112 and improve the contrast of the plasma addressed display device.

[0011]

As the above-mentioned intermediate substrate, glass having a thickness of 70 μm or less is usually used, and it is arranged above the barrier ribs. However, particularly in a plasma addressed display device having a large screen, the pitch of the barrier ribs may become large and may be 200 μm or more.
If the pitch of the barrier ribs is increased as described above, the intermediate substrate is bent, and the bending becomes large at a position between the adjacent barrier ribs.

Further, when the intermediate substrate is bent, the cell spacing (cell thickness) of the liquid crystal cell changes within the pixel. In the liquid crystal cell, the signal voltage applied to the data electrode on the counter substrate is divided by the capacitance ratio of the capacitance of the intermediate substrate and the capacitance of the liquid crystal layer, and the voltage is applied to the liquid crystal layer. Therefore, if the cell thickness changes within the pixel, the original data voltage cannot be applied to the liquid crystal layer, and the display quality of the plasma addressed display device also deteriorates.

The present invention has been made to solve the above problems of the prior art, and provides a plasma addressed display device capable of preventing the deflection of the intermediate substrate and obtaining good display quality, and a manufacturing method thereof. The purpose is to do.

[0014]

A plasma address according to the present invention.
The display devices are parallel to each other at regular intervals on the first substrate.
A pair of plasma electrodes is provided between the plurality of barrier ribs provided.
A pole is provided in a direction parallel to the barrier rib and the first base
A second substrate is placed between the plate and the barrier rib.
And a first substrate and a second substrate separated by the barrier rib.
A space between the plate and the space where a dischargeable gas is enclosed.
It has a chamber and has a plurality of chambers in the direction crossing the plasma electrode.
The third substrate provided with the data electrode and the second substrate are
A plasma address disposed with an electro-optical material layer sandwiched therebetween.
Display device, wherein adjacent barriers on the first substrate
At a position between the ribs and between the data electrodes,
A convex member is provided in contact with the barrier rib.
A member supporting the second substrate, whereby
The above object is achieved. The convex member is the plasma electrode.
It is preferably provided at a position different from the highest position. Book
The plasma addressed display device of the invention is mounted on a first substrate.
Burrs on several parallel plasma electrodes
The ribs are laminated to form the barrier between the rib and the first substrate.
The second substrate is arranged with the rib sandwiched therebetween, and is separated by the barrier rib.
Release into the space between the cut first substrate and the second substrate.
It has a plasma chamber in which an electrically chargeable gas is enclosed.
Multiple data electrodes are provided in the direction that intersects the plasma electrode.
The third substrate and the second substrate sandwiched therebetween sandwich the electro-optical material layer.
Plasma address display device
Between adjacent barrier ribs on the first substrate,
Contact the barrier rib at a position facing each other between the data electrodes.
And a convex member is provided, and the convex member is the second member.
It supports the substrate, which achieves the above objectives.
Be done. The convex member is provided on the plasma electrode
You may stay. A dummy electrode is installed between adjacent plasma electrodes.
And the convex member is provided on the dummy electrode.
May be. The dummy electrode is made of the same material as the plasma electrode
It may consist of fees. The convex member and the barrier rib
It may consist of the same material. The barrier rib is 200μ
It may be formed at a pitch of m or more. The plastic of the present invention
A method of manufacturing a Zuma address display device is provided on a first substrate.
Between a plurality of barrier ribs that are parallel to each other at regular intervals
Each pair of plasma electrodes is parallel to the barrier rib.
And the barrier rib is sandwiched between the first substrate and the first substrate.
The second substrate is arranged and separated by the barrier rib.
Dischargeable gas in the space between the first substrate and the second substrate
Has a plasma chamber in which
A third substrate provided with a plurality of data electrodes in the intersecting direction
The plate and the second substrate are arranged with the electro-optical material layer interposed therebetween.
Is a method of manufacturing a plasma addressed display device.
And forming the plasma electrode on the first substrate
And forming the barrier rib on the first substrate,
There is a pair between the adjacent barrier ribs and between the data electrodes.
A convex member for supporting the second substrate at a facing position
And at least the step of forming
Target is achieved. The plasma addressed display device of the present invention
The manufacturing method is substantially parallel to each other provided on the first substrate.
Barrier ribs are laminated on multiple plasma electrodes,
A second substrate with the barrier rib sandwiched between the first substrate and the second substrate.
And the first substrate separated by the barrier ribs.
A dischargeable gas is enclosed in a space between the second substrate and the second substrate.
Which has a plasma chamber consisting of
And a second substrate provided with a plurality of data electrodes
Substrate and the electro-optical material layer sandwiched between
A method for manufacturing a Zuma address display device, comprising:
Adjacent to each other while forming the plasma electrodes on the substrate
Between the barrier ribs and between the data lines,
At a position on the Mie electrode so as to contact the barrier rib,
And a step of forming a convex member supporting the second substrate.
Including, if any, thereby achieving the above objective. Since
The operation of the present invention will be described below. In the present invention
Is an adjacent barrier on the first substrate (plasma substrate).
The second substrate is provided with a convex member (dummy rib) between the grooves.
Since it supports (intermediate substrate), the deflection of the second substrate
It is reduced and the cell spacing of the liquid crystal cell changes within the pixel.
There is no. Applied to the data electrode on the third substrate (counter substrate)
The generated signal voltage is divided between the capacitance of the intermediate substrate and the capacitance of the liquid crystal layer.
The voltage is applied to the liquid crystal layer by dividing by the capacity ratio, but the cell
Since the thickness does not change within the pixel, the original data voltage is
It can be applied to the liquid crystal layer. In addition, the intermediate substrate
Stable placement on top of the rear ribs, so later steps, eg
For example, the alignment layer rubbing process and liquid crystal cell bonding
It is difficult for the intermediate substrate to crack or chip during the process. Starting
In the clear, a dummy rib to prevent bending is
Since it is provided at a position different from that on the
The distance between the substrate and the intermediate substrate is the barrier rib and the dummy rib.
Is defined by Therefore, the intermediate substrate
It is stably placed on the upper part of the knob. In the present invention,
When a barrier rib is laminated on top of the Zuma electrode
Also, a convex member (dummy rib) is formed between the adjacent barrier ribs.
Since it is provided and supports the intermediate substrate,
Is reduced, and the cell spacing of the liquid crystal cell changes within the pixel.
There is no such thing. Signal applied to the data electrode on the counter substrate
The voltage is divided by the capacity ratio of the capacity of the intermediate substrate and the capacity of the liquid crystal layer.
Voltage is applied to the liquid crystal layer, but the cell thickness is
Since it has not changed, the original data voltage is applied to the liquid crystal layer.
Can be added. In the present invention, it prevents bending
There is a dummy rib on the plasma electrode for
The barrier rib on the plasma electrode and the
The spacing between the plasma substrate and the intermediate substrate is
Exactly defined. Therefore, the intermediate substrate is placed on the barrier rib.
Stable placement. In the present invention, it prevents bending
There is a dummy rib on the dummy electrode for
The barrier ribs on the plasma electrode and the dummy on the dummy electrode.
-By the rib, the space between the plasma substrate and the intermediate substrate is accurate
Stipulated in. Therefore, the intermediate substrate is located above the barrier rib.
It is fixed and arranged. In the present invention, the dummy electrode is
Since it is made of the same material as the plasma electrode, the process is increased.
The dummy electrode can be formed without any need. The present invention
In that case, a dummy rib is provided at a position facing between the data lines.
It is provided. This part does not contribute to the display and is normally shielded.
Since a light film is formed, the aperture ratio is reduced by the dummy rib.
Does not occur. In the present invention, the dummy rib is a barrier
Since it is made of the same material as the
Dummy ribs can be formed. In the present invention
The dummy rib is formed in contact with the barrier rib.
In the polishing process, as in the case of forming island-shaped dummy ribs
The dummy rib will not fall over in such cases. In addition,
The barrier ribs are reinforced by the me ribs. In the present invention
The barrier ribs are formed with a pitch of 200 μm or more.
Even if it is not, the deflection of the intermediate substrate is reduced by the dummy rib.
Especially for large screens of 40 inches or more
Good display quality even in plasma addressed display devices
can do. In the present invention, the barrier rib and the da
Since dummy ribs are formed in the same process, dummy ribs are formed.
There is no need for a new process for
The dummy rib can be formed only by changing the turn. to this
The height of the barrier ribs and the height of the dummy ribs
Make sure that the distance between the plasma substrate and the intermediate substrate is exactly constant.
You can Therefore, the intermediate substrate is stable above the barrier ribs.
Are placed. In the present invention, the plasma electrode and the dust
The Mie electrode and the dummy rib are formed in the same process.
And dummy are formed in the same process, so dummy electrodes and dummy
No additional process is required to form ribs
Dummy electrode only by changing the pattern of the electrode and barrier rib
And dummy ribs can be formed. This makes the Plas
The height of the barrier rib on the electrode and the dummy on the plasma electrode
Align the height of the ribs with the space between the plasma substrate and the intermediate substrate
Can be exactly constant. Therefore, the intermediate substrate
It is stably placed above the barrier ribs.

[0015]

[0016]

[0017]

[0018]

[0019]

[0020]

[0021]

[0022]

[0023]

[0024]

[0025]

[0026]

[0027]

[0028]

[0029]

[0030]

[0031]

[0032]

[0033]

[0034]

[0035]

[0036]

[0037]

[0038]

[0039]

[0040]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the drawings.

(Embodiment 1) FIG. 1 is a plan view of a plasma addressed display device of this embodiment, showing three pixels in one plasma chamber. FIG. 2D shows A of FIG.
FIG. 6 is a cross-sectional view taken along line -A ′, showing five plasma chambers.

In this plasma addressed display device, a liquid crystal cell 21 and a plasma cell 22 are laminated, and a liquid crystal layer 20 of the liquid crystal cell 21 and a plasma chamber 12 of the plasma cell 22 are formed.
And are arranged adjacent to each other via an intermediate substrate 13 made of glass or the like.

In the plasma cell 22, the barrier ribs 16 are formed at regular intervals on the plasma substrate 14 made of glass or the like, and the pair of plasma electrodes 1 is provided between the adjacent barrier ribs 16.
5a and 15b are formed. The barrier rib 16 divides the space between the plasma substrate 14 and the intermediate substrate 13, and the plasma chamber 12 is provided for each of the plasma electrodes 15a and 15b. An ionizable gas is enclosed in the plasma chamber 12. The lower part of the intermediate substrate 13 is supported and fixed by the frit seal 17. Further, the dummy rib 2 is provided between the adjacent barrier ribs 16.
5 is formed to prevent the intermediate substrate 13 from bending.
Since the dummy ribs 25 are formed at positions facing each other between the adjacent data electrodes 10, the dummy ribs 25 do not reduce the aperture ratio.

In the liquid crystal cell 21, the alignment layer 18a is formed on the intermediate substrate 13, and the plurality of data electrodes 10, the alignment layer 18b and the color filter (not shown) are spaced apart from the intermediate substrate 13. The counter substrate 11 on which is formed is arranged. An alignment process such as a rubbing process is performed on each of the alignment layers 18a and 18b. A liquid crystal layer 20 is provided between the intermediate substrate 13 and the counter substrate 11, and the periphery thereof is supported by a seal material 19. The data electrode 10 on the counter substrate 11 intersects the barrier rib 16 (here, orthogonal).
A light-shielding film 27 is formed between the adjacent data electrodes 10 and in a position facing the barrier rib 16 in the direction in which the light shielding film 27 is formed. The light-shielding film 27 may be formed on either the counter substrate or the intermediate substrate, but it is usually formed on the counter substrate side.

This plasma address display device can be manufactured, for example, as follows.

First, as shown in FIG. 2 (a), Ni is formed on the plasma substrate 14 made of glass by screen printing.
Plasma electrodes 15a and 15b made of a metal such as the above are formed.

Next, as shown in FIG. 2B, barrier ribs 16 are formed by screen printing using a paste containing lead, ceramics, a solvent and the like. In this embodiment, the barrier rib pitch is 300 μm, and the barrier rib pitch is 200 μm.
Form at the height of. At this time, the dummy rib 25 is formed at the position shown in FIG. 1 using the same material as the barrier rib 16. By forming the dummy ribs 25 with the same material as the barrier ribs 16 in this manner, the dummy ribs 25 can be formed only by changing the print pattern without adding a new process. Further, in this embodiment, since the barrier rib 16 is formed at a position different from that on the plasma electrodes 15a and 15b, the dummy rib 25 is formed at a position different from that on the plasma electrodes 15a and 15b. This allows the barrier ribs 16 and the dummy ribs 25 to keep the distance between the plasma substrate 14 and the intermediate substrate 13 constant. On the other hand, the dummy rib 25 is provided on the plasma electrodes 15a and 15b,
If the dummy rib 25 and the dummy rib 25 partially overlap each other, the substrate interval becomes large at the overlapped portion, which is not preferable.

Subsequently, as shown in FIG. 2C, a frit seal 17 is applied on the peripheral portion of the plasma substrate 14, the barrier ribs and the dummy ribs by a dispenser, and the frit seal 17 is used to form the intermediate substrate 13 made of glass.
Is bonded to the plasma substrate 14. Then, an ionizable gas is filled in each plasma chamber 12.

Here, in the plasma addressed display device, the voltage applied to the data electrode 10 is divided by the capacitance of the liquid crystal layer 20 and the capacitance of the intermediate substrate 13, and thus the liquid crystal layer 20.
In order to reduce the data voltage, it is preferable that the capacitance of the intermediate substrate 13 be large and that the liquid crystal layer 20 be small. Therefore, it is desirable that the thickness of the intermediate substrate is thin, preferably 70 μm or less, and more preferably 50 μm or less. On the other hand, if it is made too thin, it is difficult to handle, so that the thickness of the intermediate substrate is preferably 20 μm or more. In the present embodiment, even if the intermediate substrate 13 having such a small thickness is used, since the dummy ribs 25 are arranged between the barrier ribs 16, the amount of bending of the intermediate substrate 13 can be drastically reduced.

After that, as shown in FIG. 2D, an alignment layer 18a is formed on the intermediate substrate 13, and a counter electrode 11 on which a data electrode 10, an alignment layer 18b and a color filter (not shown) are formed is sealed. The material 19 is stuck together.
Then, a liquid crystal material is injected into the gap between the two substrates to fill the liquid crystal layer 20.
The plasma addressed display device is completed by providing.

According to this embodiment, the amount of deflection of the intermediate substrate 13 can be drastically reduced by the dummy ribs 25.
A plasma addressed display device with good display quality can be realized.

(Embodiment 2) FIG. 3 is a plan view of a plasma addressed display device of this embodiment, showing three pixels in one plasma chamber. FIG. 4 shows BB ′ of FIG.
It is sectional drawing of a line part, and shows five plasma chambers.

In this plasma addressed display device, the dummy rib 25 is formed by the same process as the formation of the barrier rib 16.
It is formed in contact with the barrier rib 16. The other configuration is the same as that of the first embodiment.

The dummy ribs 25 are formed in an island shape as in the first embodiment.
In the case where the dummy rib 25 is formed, it rarely collapses, for example, in the step of polishing the dummy rib. However, when the dummy rib 25 is formed in contact with the barrier rib 16 as in the second embodiment, such a phenomenon does not occur. Absent. Further, the barrier ribs 16 can be reinforced by the dummy ribs 25.

(Embodiment 3) FIG. 5 is a plan view of the plasma addressed display device of this embodiment, showing three pixels in one plasma chamber. FIG. 6 shows CC ′ of FIG.
It is sectional drawing of a line part, and shows five plasma chambers.

In this plasma addressed display device, the barrier ribs 16 are laminated on the plasma electrodes 15a and 15b, and the number of plasma electrodes is halved compared to the first embodiment. A dummy rib 25 is provided between the adjacent barrier ribs 16.
Is formed to prevent the intermediate substrate 13 from bending. Since the dummy ribs 25 are formed at positions facing each other between the adjacent data electrodes 10, the dummy ribs 25 do not reduce the aperture ratio. The height of the dummy rib 25 is the barrier rib 16 formed on the plasma electrodes 15a and 15b.
To align with the dummy ribs 25 under the dummy ribs 25.
6 is formed.

This plasma address display device can be manufactured, for example, as follows.

First, as shown in FIG. 6A, Ni is formed on the plasma substrate 14 made of glass by screen printing.
Plasma electrodes 15a and 15b made of a metal such as the above are formed. At this time, the dummy electrode 26 is formed at the position shown in FIG. 5 using the same material as the plasma electrodes 15a and 15b. By thus forming the dummy electrode 26 with the same material as the plasma electrodes 15a and 15b, the dummy electrode 265 can be formed by only changing the print pattern without adding a new process.

Next, as shown in FIG. 2B, the barrier ribs 16 are formed by screen printing. In the present embodiment, the barrier rib 16 is formed so that the height of the plasma rib and the height of the plasma electrode is 200 μm. At this time, the dummy rib 25 is formed on the dummy electrode 26 using the same material as the barrier rib 16. By forming the dummy ribs 25 with the same material as the barrier ribs 16 in this manner, the dummy ribs 25 can be formed only by changing the print pattern without adding a new process. Furthermore, in the present embodiment, the barrier ribs 16 are the plasma electrodes 15a,
Since it is formed on the dummy electrode 15b, the dummy rib 25 is formed on the dummy electrode 26. Thereby, the plasma substrate 1
4 and the intermediate substrate 13, the distance between the barrier rib 16 and the plasma electrodes 15a and 15b and the dummy rib 25 and the dummy electrode 26 is constant. On the other hand, if the dummy ribs 25 and the dummy electrodes 26 do not overlap, the substrate spacing becomes small at that portion, which is not preferable. Although the dummy electrodes 26 and the dummy ribs 25 have the same pattern in this embodiment, when a pattern shift occurs, the gap between the substrates in the shifted portion becomes small. Therefore, the pattern of the dummy rib 25 is set to the dummy electrode 26 in consideration of the pattern shift.
It is preferable that the pattern is one size larger than the pattern.

Subsequently, as shown in FIG. 6C, a frit seal 17 is applied on the peripheral edge of the plasma substrate 14, the barrier ribs, and the dummy ribs by a dispenser, and the frit seal 17 is used to form the intermediate substrate 13 made of glass.
Is bonded to the plasma substrate 14. In the plasma addressed display device, since the voltage applied to the data electrode 10 is divided by the capacitance of the liquid crystal layer 20 and the capacitance of the intermediate substrate 13 to apply the voltage to the liquid crystal layer 20, it is possible to reduce the data voltage. Therefore, the intermediate substrate 13 preferably has a large capacitance, and the liquid crystal layer 20 preferably has a small capacitance. Therefore,
It is desirable that the thickness of the intermediate substrate is thin, preferably 70μ.
m or less, more preferably 50 μm or less. on the other hand,
Since it is difficult to handle if it is made too thin, the thickness of the intermediate substrate is preferably 20 μm or more. In the present embodiment, even if the intermediate substrate 13 having such a small thickness is used, since the dummy ribs 25 are arranged between the barrier ribs 16, the amount of bending of the intermediate substrate 13 can be drastically reduced.

Thereafter, as shown in FIG. 6 (d), an alignment layer 18a is formed on the intermediate substrate 13, and the data electrode 10, the alignment layer 18b, and a counter substrate 11 on which a color filter (not shown) is formed are sealed. The material 19 is stuck together.
Then, a liquid crystal material is injected into the gap between the two substrates to fill the liquid crystal layer 20.
The plasma addressed display device is completed by providing.

According to this embodiment, the amount of bending of the intermediate substrate 13 can be drastically reduced by the dummy ribs 25.
A plasma addressed display device with good display quality can be realized.

(Embodiment 4) FIG. 7 is a plan view of a plasma addressed display device of this embodiment, showing three pixels in one plasma chamber. FIG. 8 shows DD ′ of FIG. 7.
It is sectional drawing of a line part, and shows five plasma chambers.

In this plasma addressed display device, the dummy rib 25 is formed by the same process as the formation of the barrier rib 16.
It is formed in contact with the barrier rib 16 on the plasma electrodes 15a and 15b, and no dummy electrode is formed. The other configuration is the same as that of the first embodiment.

As in the third embodiment, island-shaped dummy ribs 25 are formed.
In the case where the dummy rib 25 is formed, it rarely collapses, for example, in the step of polishing the dummy rib. However, when the dummy rib 25 is formed in contact with the barrier rib 16 as in the second embodiment, such a phenomenon does not occur. Absent. Further, the barrier ribs 16 can be reinforced by the dummy ribs 25.

In the present embodiment, the dummy rib 25 is formed on the plasma electrodes 15a and 15b, but as shown in FIG. 9, the dummy electrode 26 is formed to extend from the plasma electrodes 15a and 15b to the inside of the plasma chamber 12, and Dummy electrode 2
Dummy ribs 25 may be formed on the upper part 6. The dummy electrode 26 is formed in this way, and the dummy rib 26 is formed in the plasma chamber 1.
The effect of preventing the bending of the intermediate substrate 13 is greater when the inner side of 2 is formed. In FIG. 9, the pattern of the light shielding film shown in FIG. 7 is omitted.

[0067]

As described in detail above, according to the present invention,
Since the amount of bending of the intermediate substrate can be reduced, it is possible to prevent the cell interval of the liquid crystal cell from changing within the pixel, and it is possible to realize a plasma addressed display device in which the display quality is not deteriorated. Furthermore, since the intermediate substrate is stably arranged above the barrier ribs, the intermediate substrate is less likely to be cracked or chipped in a later step, and the manufacturing yield can be improved.

According to the present invention, the plasma substrate and the intermediate substrate
The distance between and is accurately defined by the barrier rib and the dummy rib
To be done. Therefore, the intermediate substrate can be placed on top of the barrier ribs even further.
It is arranged in a fixed manner, which can further improve the yield.
Wear. According to the present invention, a barrier barrier is provided on top of the plasma electrode.
Even if the cables are stacked, the bending amount of the intermediate board can be reduced.
Since it can be reduced, the number of plasma electrodes is halved.
Plasma plasma display that does not degrade display quality.
A dress display device can be realized. In addition, the middle
Since the substrate is stably placed on the barrier ribs,
It is difficult for the intermediate substrate to be cracked or chipped during the process, and the manufacturing yield is improved.
Can be improved. According to the present invention, plasma plasma
Due to the barrier ribs on the top and the dummy ribs on the plasma electrode,
The distance between the plasma substrate and the intermediate substrate is accurately specified.
It Therefore, the intermediate substrate is more stable above the barrier ribs.
Can be arranged in order to further improve the yield.
It According to the present invention, the barrier rib and the dust on the plasma electrode are
Plasma substrate and intermediate substrate by dummy rib on Mie electrode
The distance to the plate is precisely defined. Therefore, the intermediate substrate
More stable placement on top of the rear ribs for even better yield
Can be improved. According to the invention, the dummy
Process because the electrode is made of the same material as the plasma electrode
The dummy electrode can be formed without increasing
Good productivity. According to the present invention, it does not contribute to the display.
A dummy rib is provided at a position facing each other between the data lines.
Since a light-shielding film is usually formed on this part,
A bright display is obtained without reducing the aperture ratio due to mill ribs.
To be According to the present invention, the dummy rib is the same as the barrier rib.
Since it is made of the same material, it can be used without increasing the number of processes.
-Ribs can be formed and productivity is good. Book
According to the invention, the dummy rib is formed in contact with the barrier rib.
As it is, it looks like the case where island-shaped dummy ribs are formed.
In addition, the dummy rib is not defective during the manufacturing process.
Yes. In addition, the barrier ribs are reinforced with dummy ribs.
It can prevent defects. According to the invention, a barrier rib
, Even if they are formed with a pitch of 200 μm or more
The bending of the intermediate substrate can be reduced by the protrusion.
Therefore, the plasma address of a large screen especially 40 inches or more
It is possible to improve the display quality of
Is very effective. According to the present invention, a barrier rib and
Since the dummy rib and the dummy rib are formed in the same process,
No new process is required to form the barrier rib
The dummy rib can be formed only by changing the pattern. Yo
And a plasma display with excellent display quality through a simple manufacturing process.
A dress display device can be realized. According to the invention
For example, the plasma electrode and the dummy electrode are formed in the same process,
Since the barrier rib and the dummy rib are formed in the same process,
New process for forming dummy electrodes and dummy ribs
No need for plasma electrode and barrier rib pattern
Dummy electrodes and ribs can be formed only by changing
It Therefore, a simple manufacturing process makes it possible to obtain excellent display quality.
It is possible to realize a plasma address display device.

[0069]

[0070]

[0071]

[0072]

[0073]

[0074]

[0075]

[0076]

[0077]

[0078]

[Brief description of drawings]

FIG. 1 is a plan view showing a plasma addressed display device of a first embodiment.

FIG. 2 is a cross-sectional view for explaining the manufacturing process of the plasma addressed display device of the first embodiment.

FIG. 3 is a plan view showing a plasma addressed display device of a second embodiment.

FIG. 4 is a cross-sectional view showing a plasma addressed display device of a second embodiment.

FIG. 5 is a plan view showing a plasma addressed display device of a third embodiment.

FIG. 6 is a cross-sectional view for explaining a manufacturing process of the plasma addressed display device of the third embodiment.

FIG. 7 is a plan view showing a plasma addressed display device of a fourth embodiment.

FIG. 8 is a cross-sectional view showing a plasma addressed display device of a fourth embodiment.

FIG. 9 is a plan view showing another plasma addressed display device of the fourth embodiment.

FIG. 10 is a cross-sectional view showing a conventional plasma addressed display device.

FIG. 11 is a plan view showing a conventional plasma addressed display device.

[Explanation of symbols]

10 data electrodes 11 Counter substrate 12 Plasma chamber 13 Intermediate board 14 Plasma substrate 15a, 15b Plasma electrode 16 barrier ribs 17 Frit seal 18a, 18b Alignment layer 19 Seal material 20 Liquid crystal layer 21 Liquid crystal cell 22 Plasma cell 25 dummy ribs 26 dummy electrodes 27 Light-shielding film

─────────────────────────────────────────────────── ─── Continuation of the front page (56) References JP-A-9-5719 (JP, A) JP-A-8-304781 (JP, A) JP-A-8-313882 (JP, A) JP-A-9- 105919 (JP, A) JP 6-208109 (JP, A) JP 6-251719 (JP, A) JP 10-96901 (JP, A) JP 10-188825 (JP, A) (58) Fields surveyed (Int.Cl. ⁷ , DB name) G02F 1/1333

Claims (10)

(57) [Claims] 1. A pair of plasma electrodes are provided in a direction parallel to the barrier ribs between a plurality of barrier ribs provided in parallel with each other on a first substrate at regular intervals, and between the barrier ribs and the first substrate. A second substrate is arranged with the barrier rib sandwiched therebetween, and a space between the first substrate and the second substrate separated by the barrier rib has a plasma chamber in which a dischargeable gas is sealed. A plasma address display device comprising: a third substrate having a plurality of data electrodes arranged in a direction intersecting with the plasma electrode; and a second substrate sandwiching an electro-optical material layer between the third substrate and the first substrate . Between adjacent barrier ribs on the substrate of
In contact with the barrier rib at a position facing each other between the data electrodes
A convex member is provided, and the convex member is the second substrate.
Supporting plasma address display device. 2. The plasma address display device according to claim 1, wherein the convex member is provided at a position different from that on the plasma electrode. 3. A barrier rib is laminated on a plurality of substantially parallel plasma electrodes provided on a first substrate, and a second substrate is arranged with the barrier rib sandwiched between the barrier rib and the first substrate. And a plasma chamber in which a dischargeable gas is sealed in a space between the first substrate and the second substrate that is separated by the barrier rib, and a plurality of plasma chambers are provided in a direction intersecting the plasma electrodes. A plasma addressed display device in which a third substrate provided with a data electrode and the second substrate are arranged with an electro-optical material layer sandwiched therebetween, which is between adjacent barrier ribs on the first substrate. And
In contact with the barrier rib at a position facing each other between the data electrodes
A convex member is provided, and the convex member is the second substrate.
Supporting plasma address display device. 4. The plasma addressed display device according to claim 3, wherein the convex member is provided on the plasma electrode. 5. The plasma address display device according to claim 3, wherein a dummy electrode is provided between adjacent plasma electrodes, and the convex member is provided on the dummy electrode. 6. The plasma addressed display device according to claim 5, wherein the dummy electrode is made of the same material as the plasma electrode. Wherein said convex member is a plasma addressed display device according to any one of claims 1 to 6 made of the same material as the barrier rib. 8. A plasma addressed display device according to any one of claims 1 to 7 wherein the barrier rib is formed by the above pitch 200 [mu] m. 9. A pair of plasma electrodes are provided in a direction parallel to the barrier ribs between a plurality of barrier ribs provided in parallel with each other on the first substrate at regular intervals, and between the barrier ribs and the first substrate. A second substrate is arranged with the barrier rib sandwiched therebetween, and a plasma chamber is provided in which a dischargeable gas is sealed in a space between the first substrate and the second substrate which is partitioned by the barrier rib. A method for manufacturing a plasma addressed display device in which a third substrate provided with a plurality of data electrodes in a direction intersecting with the plasma electrodes and the second substrate are arranged with an electro-optical material layer interposed therebetween. Te, forming the plasma electrode on the first substrate, thereby forming the barrier ribs on the first substrate, next
Be between the barrier ribs that fit together and face each other between the data lines
The second substrate so as to come into contact with the barrier rib at a certain position.
And a step of forming a convex member that supports the plasma addressed display device. 10. A barrier rib is laminated on a plurality of substantially parallel plasma electrodes provided on a first substrate, and a second substrate is arranged with the barrier rib sandwiched between the barrier rib and the first substrate. And a plasma chamber in which a dischargeable gas is sealed in a space between the first substrate and the second substrate that is separated by the barrier rib, and a plurality of plasma chambers are provided in a direction intersecting the plasma electrodes. A method of manufacturing a plasma addressed display device, wherein a third substrate provided with a data electrode and a second substrate are arranged with an electro-optical material layer interposed therebetween, wherein the plasma is provided on the first substrate. and forming an electrode, and forming a dummy electrode between adjacent plasma electrodes, thereby forming the barrier ribs on the first substrate, adjacent
Be between the barrier ribs that fit together and face each other between the data lines
To contact the barrier rib at a position on the dummy electrode.
And a step of forming a convex member that supports the second substrate, the manufacturing method of the plasma addressed display device.