[go: up one dir, main page]

JP3441349B2 - Piezoelectric resonator with built-in capacitance - Google Patents

Piezoelectric resonator with built-in capacitance

Info

Publication number
JP3441349B2
JP3441349B2 JP32897597A JP32897597A JP3441349B2 JP 3441349 B2 JP3441349 B2 JP 3441349B2 JP 32897597 A JP32897597 A JP 32897597A JP 32897597 A JP32897597 A JP 32897597A JP 3441349 B2 JP3441349 B2 JP 3441349B2
Authority
JP
Japan
Prior art keywords
electrode
conductive
piezoelectric
capacitor
piezoelectric resonance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP32897597A
Other languages
Japanese (ja)
Other versions
JPH11163658A (en
Inventor
清春 柴田
辰雄 西井田
慶明 岩河
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyocera Corp
Original Assignee
Kyocera Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyocera Corp filed Critical Kyocera Corp
Priority to JP32897597A priority Critical patent/JP3441349B2/en
Publication of JPH11163658A publication Critical patent/JPH11163658A/en
Application granted granted Critical
Publication of JP3441349B2 publication Critical patent/JP3441349B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Description

【発明の詳細な説明】 【0001】 【発明の属する技術分野】本発明は、表面実装可能な容
量内蔵型圧電共振子に関するものである。 【0002】 【従来の技術】従来より、通信機器、電子機器にはマイ
クロコンピュータなどが多用されており、このようなマ
イクロコンピュータにはクロック発振回路などが接続さ
れていた。 【0003】この発振回路は図5に示す等価回路図のよ
うに、圧電共振素子Rの両端と接地電位との間に入出力
容量成分C1 、C2 が接続され、さらに、圧電共振素子
の両端間に帰還抵抗成分r、インバーターIが接続され
ていた。この発振回路を簡単に達成できるように、図中
の点線で示すように上述の2つの容量成分C1 、C2
1つのコンデンサ素子で構成し、一点鎖線で示すように
このコンデンサ素子と圧電共振素子Rとを1つの電子部
品としたものが容量内蔵型圧電共振子である。 【0004】容量内蔵型圧電共振子は、少なくとも圧電
基板の両主面に振動電極を形成した圧電共振素子と2つ
の容量成分を具備したコンデンサ素子とから主に構成さ
れていた。 【0005】従来の圧電共振素子とコンデンサ素子とを
保護する外装構造として、以下の3つの構造が知られて
いる。 【0006】第1の構造は、2つのリード端子の先端に
両主面に形成された振動電極が形成された圧電共振素
子、一方主面に分割電極を、他方主面に該分割電極に対
向するアース電極を形成したコンデンサ素子を夫々接続
し、さらに、アース電極に接続する第3のリード端子を
接続し、圧電共振素子の周囲に振動空間を形成するよう
に外装樹脂によって被覆する構造である。 【0007】第2の構造は、上下2分割型ケース内に圧
電共振素子とコンデンサ素子とを収容する構造である。
具体的には、特開平2−44706号に開示されている
ように、コンデンサ素子を一方の筺体状ケースに収容
し、圧電共振素子を他方の筺体状ケースに収容し、両ケ
ースを導電性ペーストを介して互いに接合していた。ま
た、実開昭62−70453号に開示されているよう
に、一方のケースの形状を平板状の誘電体基板とし、こ
の誘電体基板に2つのコンデンサ成分を形成しておき、
この誘電体基板に圧電共振素子を接合し、次に、圧電共
振素子を被覆するように他方の筺体状ケースを一方の平
板状誘電体基板に接着していた。 【0008】第3の構造は、両端が開口し、外表面に2
つの容量成分を形成する容量電極を具備する筒状誘電体
ケースに、圧電共振素子を配置し、両端を導電性キャッ
プ体で封止を行っていた。 【0009】第1の構造では、プリント配線基板に表面
実装させることが難しかった。 【0010】また、第2の構造では、ケースを構成する
部品の点数が増加してしまい、また、圧電共振素子の周
囲に振動空間を形成するために、圧電共振素子を被覆す
る側の筺体状ケースの形状を比較的大きくする必要があ
り、小型化の容量内蔵型圧電共振子を達成することが困
難であった。また、特開平2−44706号では、外部
回路に導出させるリード端子が、接合後のケースの両端
に導電性キャップ体を冠着させたり、ケースの外周に巻
着したりする必要があり、リード端子の処理が非常に難
しいかった。 【0011】また、実開昭62−70453号では、2
つのコンデンサ成分を有する誘電体基板に圧電共振素子
が接続した複合素子の外部電極を、誘電体基板と筺体状
ケースとの接合面から外部に導出しなくてはならない。
この接合部分は、接合面積が比較的少ない筺体状ケース
の開口周囲面であり、さらに、外部電極を導出させなく
てはならないことから接合信頼性が低下してしまう。 【0012】第3の構造では、筒状ケース内に、圧電共
振素子を挿入配置するにあたり、圧電共振素子の両主面
側の空間は容易に確保できるものの、特開平2−447
06号と同様筒状ケースの両端に導電性キャップ体を冠
着させる必要があり、リード端子の処理が非常に難しか
った。 【0013】そこで、本願出願人は、先に、2つの容量
成分を有する短冊状誘電体基板からなるコンデンサ素子
と、短冊状圧電共振素子とを導電性接着材を介して重ね
合わせた積層体を、少なくとも側面の1面が開口した筺
体状ケースに配置した構造の容量内蔵型圧電共振子を提
案した。 【0014】具体的には、図6の縦断面図に示すよう
に、1つの側面が開口した筺体状ケース1と、短冊状の
圧電共振素子2とコンデンサ素子3とが接合した積層体
4と、筺体状ケース1の開口11を封止する封止部材5
とから構成されている。 【0015】尚、筺体状ケース1の底面12に、リード
端子16〜18が一体固着され、3つのリード端子接続
用貫通孔13〜15が形成されている。 【0016】また、短冊状の圧電共振素子2は圧電基板
21の両主面に振動電極22、23が形成されている。
また、コンデンサ素子3は、誘電体基板31の両主面に
合計5つの電極が形成されている。例えば上面側主面の
両端部には、容量電極32、33が形成されている。ま
た、下面側主面の両端部には、接続電極34、36が形
成されており、また、その間には、上記容量電極32、
33の一部と対向するする中央容量電極35が形成され
ている。 【0017】そして筺体状ケース1の内部に、積層体4
のコンデンサ素子3を底面側にして積層体4を収納配置
する。これより、筺体状ケース1の底面の接続用貫通孔
13〜15が、夫々コンデンサ素子3の下面側主面に形
成された接続電極34、中央容量電極35、接続電極3
6に対応して位置し、接続貫通孔13〜15内に導電性
充填部材62、63、64を充填して、リード端子16
〜18と接続電極34、中央容量電極35、接続電極3
6とが接続する。 【0018】ここで、積層体4の構造は、コンデンサ素
子4の上面側主面の両端部には、2つの容量電極32、
33が形成されている。また、コンデンサ素子の下面側
主面の両端部に2つの接続電極34、36と、1つの中
央容量電極35が形成されている。 【0019】圧電共振素子2の上面側主面には、中央部
付近から一方の端部に延出された上面側の振動電極22
と、他方の端部に独立した上面側補助電極24が形成さ
れている。また、圧電共振素子2の下面側主面には、中
央部付近から他方の端部に延出された下面側の振動電極
23と、一方の端部に独立した下面側補助電極25が形
成されている。 【0020】そして、両素子の接合面の端部に介在され
た導電性接合部材41、42によって両素子は重畳し
て、積層体4を構成する。さらに、積層体4の端面に
は、夫々薄膜技法や厚膜技法で形成された導電性被着部
材43、44が被着形成されている。 【0021】この導電性被着部材43、44によって、
コンデンサ素子3の上面側の容量電極32、33と下面
側に形成した接続電極34、36とが電気的に接続され
るとともに、特に、導電性被着部材44によって、圧電
共振素子2の一方端部に延出した上面側の振動電極22
とコンデンサ素子3の一方の容量電極33(接続電極3
6)とが電気的に接続される。尚、圧電共振素子2の下
面側の振動電極23は、上述の導電性接合部材41によ
って、直接コンデンサ素子3の上面側の他方の容量電極
32に接続することになる。 【0022】また、導電性接合部材41、42によっ
て、圧電共振素子2とコンデンサ素子3との間に、導電
製接合部材41、42の厚みに相当する間隙が形成され
ることになる。この間隙が圧電共振素子2の下面側の振
動空間となる。 【0023】 【発明が解決しようとする課題】上述の構造の圧電共振
素子2とコンデンサ素子3とから成る積層体4を、単に
筺体状ケース内1に収納しては、圧電共振素子2の上面
側の振動電極22と筺体状ケース1の内部上面との間に
圧電共振素子2の上面側の振動空間が安定して形成する
ことが困難である。 【0024】また、圧電共振素子2の上面側の振動電極
22とコンデンサ素子3の一方の容量電極33との電気
的接続が安定して行うことができないという問題点があ
った。これは、導電性被着部材44によって電気的な接
続が達成されるものの、実際には、導電性被着部材44
による接続が、実質的に圧電共振素子2の上面側の一方
の端部に導出された振動電極22の厚み部分によって行
われるためである。 【0025】本発明は上述の問題点に鑑みて案出された
ものであり、その目的は、圧電共振素子の上面側の振動
電極とコンデンサ素子の容量電極との接続が確実に行
え、且つ、圧電共振素子の上面側の振動空間を確実に形
成できる容量内蔵型圧電共振子を提供することにある。 【0026】 【課題を解決するための手段】本発明によれば、下面に
リード端子が被着されており、底面に前記リード端子と
導通する導電性接続部材が充填されている貫通孔を有
し、且つ少なくとも側面の一面が開口している筺体状ケ
ースに、短冊状の誘電体基板の上下面に電極を設けた2
つの容量成分を具備するコンデンサ素子上に、短冊状の
圧電基板の上下面に互いに対向しあい且つ異なる短辺側
端部に導出される振動電極を設けた圧電共振素子を、導
電性接合部材を介して接合させるとともに、短辺側端面
に導電性被着部材を被着させ、前記導電性接合部材と導
電性被着部材とでコンデンサ素子の各電極と圧電共振素
子の各電極とを接続して成る積層体を収納配置し、筺体
状ケースの開口を封止するとともに、前記導電性接続部
材を介してコンデンサ素子の下面の電極と前記リード端
子とを接続して成る容量内蔵型圧電共振子において、前
記圧電共振素子の上面側の両端部に、前記導電性被着着
部材と導通する厚膜導体膜を被着させたことを特徴とす
る容量内蔵型圧電共振子である。 【0027】 【作用】本発明によれば、圧電共振素子の上面の振動電
極が導出される一方端部に、厚膜導体膜が重畳被着さ
れ、この結果、圧電基板の上面側振動電極の端部導出部
分の厚みを増大させることができる。 【0028】この振動電極の端面において、導体の厚み
が実質的に厚くなるので、積層体の端面に形成した導電
性着部材による圧電共振素子の上面側振動電極とコンデ
ンサ素子の容量電極との接続が確実に行えることにな
る。 【0029】また、積層体を筺体状ケースの内部に収納
した時、少なくとも圧電共振素子と筺体状ケースの内部
上面との間に、厚膜導体膜の厚みに相当する振動間隙が
形成されることになる。従って、圧電共振素子の下面側
の振動空間は、導電性接合部材により、また、圧電共振
素子の上面側の振動空間は、この厚膜導体膜によって形
成される。これより、圧電共振素子の安定した動作が確
保できることになる。 【0030】尚、厚膜導体膜は、圧電共振素子の上面側
の一方端部のみならず、圧電共振素子の他方端部及びコ
ンデンサ素子の下面側の両端部にも形成すれば、積層体
の端面に被着する導電性被着部材による圧電共振素子と
コンデンサ素子との接続のみならず、コンデンサ素子の
上面側容量電極と接続電極との電気的な接続も確実に行
える。 【0031】 【発明の実施の形態】以下、本発明の容量内蔵型圧電共
振子を図面に基づいて詳説する。 【0032】図1は本発明の容量内蔵型圧電共振子の外
観斜視図であり、図2はその縦断面図であり、図3は積
層体の斜視図である。 【0033】容量内蔵型圧電共振子は筺体状ケース1、
圧電共振素子2とコンデンサ素子3とが積層して成る積
層体4、封止部材5とから主に構成されている。 【0034】筺体状ケース1は、液晶ポリマーなどの樹
脂からなり、例えば短辺側面の1面が開口11してい
る。また、ケースの底面12には、接続用貫通孔13、
14、15が形成されている。また、ケースの長辺側の
側面には、3つのリード端子16、17、18が固着さ
れており、各リード端子16、17、18の一部が底面
の接続用貫通孔13、14、15の内壁に固着されてい
る。 【0035】圧電共振素子2は、短冊状の圧電基板21
と、上面側主面に形成した振動電極22と、下面側主面
に形成した振動電極23とから構成されている。圧電基
板21は、チタン酸鉛(PT)、チタン酸ジルコン酸鉛
(PZT)などの圧電セラミック材料、水晶、タンタル
酸リチウム、ニオブ酸リチウム、四棚酸リチウムなどの
単結晶材料から成る。また、振動電極22、23は圧電
基板21の両主面の中央部付近で互いに対向するように
形成されている。振動電極22は圧電基板21の上面の
中央部付近から一方端部にまで延出されている。圧電基
板21の上面の他方端部には補助電極24が形成されて
いる。また、振動電極23は圧電基板21の下面の中央
部付近から他方端部にまで延出されている。圧電基板2
1の下面の一方端部には補助電極25が形成されてい
る。 【0036】振動電極22、23、補助電極24、25
は例えばAg系材料を主成分とする薄膜導体膜によって
形成されている。 【0037】また、圧電共振素子2の上面側主面におい
て、両端部の幅方向に渡り厚膜導体膜51、52が形成
されている。厚膜導体膜51は、振動電極22の端部付
近に被着され、厚膜導体膜52は、補助電極24 の上面
に被着されている。 【0038】厚膜導体膜51、52は、銀を主成分とす
る導電性樹脂ペーストを印刷し、乾燥を行って形成す
る。 【0039】コンデンサ素子3は、チタン酸鉛(P
T)、チタン酸ジルコン酸鉛(PZT)チタン酸バリウ
ム(BT)などの誘電体セラミック材料から成り、且つ
上述の圧電基板21の平面形状と同一の短冊状の誘電体
基板31と、該誘電体基板31の上面側主面に形成した
容量電極32、33と、該誘電体基板31の下面側主面
に形成した接続用電極34、36、中央容量電極35と
から構成されている。 【0040】容量電極32、33は、誘電体基板31を
介して中央容量電極35の一部し、夫々異なる端部に導
出されている。例えば容量電極32は、誘電体基板31
の中央部付近から他方側の端部(図では左側の端部)に
導出され、容量電極33は中央部付近から一方側の端部
(図では右側の端部)に導出されている。これにより、
容量電極32と中央容量電極35との間と、容量電極3
3と中央容量電極35との間とに夫々容量成分が形成さ
れることになる。 【0041】また、誘電体基板31の下面主面の接続電
極34、中央容量電極35、接続電極36は夫々筺体状
ケース1の底面12に形成された接続用貫通孔13、1
4、15に対応する位置に形成されている。 【0042】また、コンデンサ素子3の下面の誘電体基
板31の端部部分、即ち、接続電極34、36上には、
厚膜導体膜53、54が被着形成されている。 【0043】このような圧電共振素子2とコンデンサ素
子3は、導電性接合部材41、42を介して接合されて
おり、全体として積層体4を構成している。導電性接合
部材41は圧電共振素子2の下面側主面の振動電極23
の端部と、コンデンサ素子3のの容量電極32との間に
配置されている。また、導電性接合部材42は圧電共振
素子2の下面側主面の補助電極25と、コンデンサ素子
3の容量電極33との間に配置されている。 【0044】さらに積層体4の一対の端面、即ち、圧電
共振素子2の一対の短辺側の端面及びコンデンサ素子3
の一対の短辺側の端面には、導電性被着部材43、44
が被着されている。この導電性被着部材43、44は、
厚膜技法、即ち、導電性樹脂ペーストの塗布硬化、薄膜
技法、即ち、銀や銅などの金属材料を蒸着やスパッタな
どによって被着されている。 【0045】この積層体4の一方の端面に形成した導電
性被着部材44によって、圧電共振素子2の上面側振動
電極22、コンデンサ素子3の容量電極33(導電性接
合部材42)、接続電極36とを電気的に接続する。ま
た、積層体4の他方の端面に形成した導電性被着部材4
3によって、圧電共振素子1の下面側振動電極23、コ
ンデンサ素子3の容量電極32(導電性接合部材4
1)、接続電極34とを電気的に接続する。 【0046】このように圧電共振素子2とコンデンサ素
子3とが一体的に接合された積層体4は、筺体状ケース
1の開口11を介して、筺体状ケース11の内部に収納
・配置される。これより、筺体状ケース1の底面12に
形成した接続用貫通孔13、14、15からは、夫々コ
ンデンサ素子の下面側主面に形成した接続電極34、中
央容量電極35、接続電極36が夫々露出することにな
る。 【0047】そして、この接続用貫通孔13、14、1
5内に、導電性接続部材61、62、62を配置するこ
とにより、コンデンサ素子3の底面に形成した接続電極
34はリード端子16に、中央容量電極35はリード端
子17に、接続電極36はリード端子18に夫々接続す
ることになり、且つ積層体4が筺体状ケース1の内部に
固定する。 【0048】その後、筺体状ケース1の開口11に、絶
縁樹脂などの封止部材5を塗布・供給して硬化する。こ
れにより、筺体状ケース11の内部は気密的に封止さ
れ、また、積層体が筺体状ケース1に固定される。 【0049】上述の構造において、少なくとも、圧電共
振素子2の上面側主面の振動電極22の端部に厚膜導体
膜51を、圧電基板21の幅方向全面にわたって形成し
ている。これより、振動電極22の厚みが実質的に厚く
なるため、積層体4の一方側端面に被着した導電性被着
部材44と電気的な接続を行うにあたり、この圧電基板
31の端部の稜線部分での段切れなどが発生せず、確実
な電気的接続が達成できる。 【0050】また、好ましくは、圧電共振素子2の上面
側の両端部に厚膜導体膜51、52を形成する。これに
より、筺体状ケース1の内部上面と圧電共振素子2の上
面の振動電極22との間には、少なくとも厚膜導体膜5
1、52の厚み相当の振動空間が形成されることにな
る。 【0051】さらに、筺体状ケース1に積層体4を配置
し、ケース1の底面を上面にして、接続用貫通孔13、
14、15内に導体を充填する。即ち、積層体4の上面
は、厚膜導体膜51、52を介して、ケース1の上面に
当接した状態で、筺体状ケース1内に積層体4が固定さ
れることになる。従って、筺体状ケース1の開口11か
ら積層体4を観察すると、筺体状ケース1の上面と厚膜
導体膜51とが当接しあうため、この開口11に封止部
材5を供給しても、圧電共振素子2の上面側の振動空間
には、封止部材5が流れ込まず、圧電共振素子2の安定
した動作が維持できる。 【0052】さらに、コンデンサ素子3の下面側両端部
にも、厚膜導体膜53、54を形成することが望まし
い。これにより、接続電極34、36の端部における厚
みが実質的増し、導電性被着部材43、44によって、
誘電体基板31の上面側主面の容量電極32、33(導
電性接合部材41、42)と接続電極34、36との電
気的な接続が確実になるためである。 【0053】このような厚膜導体膜51〜54の厚み
は、例えば10〜50μmであり、端部から中央部にか
けて約0.3〜0.5mmの長さを有し、圧電基板21
の上面の全幅、誘電体基板31の下面の全幅に渡って形
成されている。 【0054】次に、具体的な積層体の製造方法を図4の
積層体4の側面図を用いて説明する。 【0055】まず、短冊状圧電基板21が複数抽出する
ことができる大型圧電基板20を用意し、各領域の上面
側主面に、振動電極22、補助電極24を形成し、各領
域の下面側主面に、振動電極23、補助電極25を夫々
形成する。 【0056】次に、短冊状誘電体基板31が複数抽出す
ることができる大型誘電体基板30を用意し、各領域の
上面側主面に、容量電極32、33を形成し、各領域の
下面側主面に接続電極34、36、中央容量電極35を
形成しておく。 【0057】この状態では、振動電極22は、素子領域
の境界部分を越えて隣接する領域の補助電極24と一体
的に形成されることになる。同様に、振動電極23は、
隣接する領域の補助電極25と一体的に形成され、容量
電極32と隣接する素子領域の容量電極33と一体的に
形成され、容量電極33と隣接する素子領域の容量電極
32と一体的に形成され、接続電極34と隣接する素子
領域の容量電極36と一体的に形成され、容量電極36
と隣接する素子領域の容量電極34と一体的に形成され
ている。 【0058】次に、このような大型圧電基板20と大型
誘電体基板30とを接合する。この接合には、例えば銀
粉末とエポキシ樹脂とから成る導電性樹脂接着材を用い
る。 【0059】即ち、コンデンサ素子3の上面主面の容量
電極32、33上の端部に、導電性接合部材41、42
となる接着層を導電性樹脂接着材を用いて、約10〜5
0μmの厚みになるようにスクリーン印刷を行い、その
後、大型誘電体基板30上に大型圧電基板20を位置決
め載置を行い、接着層を180℃・30分で硬化させ
る。 【0060】このように、2つの大型基板20、30と
が接合された積層体に厚膜導体膜51〜54となる導体
膜を、導電性樹脂部材を用いて印刷・硬化して形成す
る。例えば、積層体の上面側主面(大型圧電基板20の
上面)には、振動電極22の端部付近に素子領域を区画
する切断線に跨がる厚膜導体膜51(隣接する素子領域
では厚膜導体膜52)を印刷し、同時に、他方の端部付
近に素子領域を区画する切断線に跨がる厚膜導体52
(隣接する素子領域では厚膜導体膜51)を印刷する。
同様にして、積層体の下面側主面(大型誘電体基板30
の下面)には、接続電極34の端部付近に素子領域を区
画する切断線に跨がる厚膜導体53(隣接する素子領域
では厚膜導体膜54)を印刷し、同時に、他方の端部付
近に素子領域を区画する切断線に跨がる厚膜導体54
(隣接する素子領域では厚膜導体膜53)を印刷する。
その後、この塗布した膜を、加熱処理して硬化する(こ
の状態が図4である)。 【0061】次に、この積層体を、図4に示す点線部分
で切断を行う。次に、切断した積層体の端面に、厚膜技
法または薄膜技法を用いて、導電性被着部材43、44
を被着形成する。 【0062】最後に、各素子領域の長辺側に沿って切断
して、圧電共振素子2とコンデンサ素子3とが接合した
積層体4が形成される。 【0063】上述の実施例では、筺体状ケース1は、1
つの側面が開口11している構造であるが、例えば、対
向しあう一対の側面が夫々開口した概略筒状のケース1
を用いても構わない。 【0064】 【発明の効果】本発明によれば、積層体を構成する圧電
共振素子の上面側主面に形成した振動電極の導出端部に
厚膜導体膜を重畳被着している。このため、積層体の端
面に導電性被着部材を被着させる際、端面部分の厚みが
増加した圧電共振素子の上面側主面の振動電極とコンデ
ンサ素子の容量電極、接続電極との安定した接続が達成
される。 【0065】また、この厚膜導体膜によって、ケースの
内部上面と圧電共振素子との間の振動空間を確保するこ
とができるため、安定して動作が可能となる。また、こ
の厚膜導体膜が、筺体状ケース内に積層体を配置した
時、ケース内部上面と当接するため、開口を封止する封
止部材が、圧電基板の上面側に周り込むことがないた
め、非常に安定した気密封止性を維持できる。
Description: BACKGROUND OF THE INVENTION [0001] 1. Field of the Invention [0002] The present invention relates to a surface-mounted piezoelectric resonator with a built-in capacitor. 2. Description of the Related Art Conventionally, microcomputers and the like have been frequently used for communication equipment and electronic equipment, and a clock oscillation circuit and the like have been connected to such microcomputers. In this oscillation circuit, as shown in an equivalent circuit diagram of FIG. 5, input and output capacitance components C 1 and C 2 are connected between both ends of a piezoelectric resonance element R and a ground potential. The feedback resistance component r and the inverter I were connected between both ends. In order to easily achieve this oscillation circuit, the above-mentioned two capacitance components C 1 and C 2 are constituted by one capacitor element as shown by a dotted line in the figure, and this capacitor element and piezoelectric element are shown by a dashed line in FIG. The resonance element R and one electronic component are a built-in capacitance type piezoelectric resonator. [0004] The built-in capacitance type piezoelectric resonator has mainly been constituted by a piezoelectric resonance element having vibration electrodes formed on at least both main surfaces of a piezoelectric substrate and a capacitor element having two capacitance components. The following three structures are known as conventional exterior structures for protecting the piezoelectric resonance element and the capacitor element. A first structure is a piezoelectric resonance element in which vibration electrodes formed on both main surfaces are formed at the tips of two lead terminals, a split electrode is formed on one main surface, and the split electrode is opposed to the split electrode on the other main surface. A capacitor element having a ground electrode formed thereon is connected to each other, a third lead terminal connected to the ground electrode is further connected, and the outer peripheral resin is covered with an outer resin so as to form a vibration space. . The second structure is a structure in which a piezoelectric resonance element and a capacitor element are accommodated in an upper and lower two-part case.
Specifically, as disclosed in Japanese Patent Application Laid-Open No. 2-44706, a capacitor element is housed in one housing-like case, a piezoelectric resonance element is housed in the other housing-like case, and both cases are made of conductive paste. Were joined to each other. Further, as disclosed in Japanese Utility Model Application Laid-Open No. 62-70453, one case is formed as a flat dielectric substrate, and two capacitor components are formed on the dielectric substrate.
A piezoelectric resonance element was bonded to this dielectric substrate, and then the other housing-like case was bonded to one flat dielectric substrate so as to cover the piezoelectric resonance element. The third structure is such that both ends are open and two
A piezoelectric resonance element is arranged in a cylindrical dielectric case having a capacitance electrode forming two capacitance components, and both ends are sealed with a conductive cap body. In the first structure, it is difficult to surface mount on a printed wiring board. Further, in the second structure, the number of parts constituting the case increases, and a housing-like cover on the side for covering the piezoelectric resonance element to form a vibration space around the piezoelectric resonance element. It was necessary to make the shape of the case relatively large, and it was difficult to achieve a miniaturized piezoelectric resonator with a built-in capacitor. Further, in Japanese Patent Application Laid-Open No. 2-44706, it is necessary that a lead terminal led out to an external circuit has a conductive cap attached to both ends of the joined case or wound around the outer periphery of the case. It was very difficult to handle the terminals. In Japanese Utility Model Application Laid-Open No. 62-70453, 2
The external electrodes of the composite element in which the piezoelectric resonance element is connected to the dielectric substrate having two capacitor components must be led out from the joint surface between the dielectric substrate and the housing case.
This joining portion is a peripheral surface of the opening of the housing-like case having a relatively small joining area, and furthermore, the external electrodes must be led out, so that the joining reliability is reduced. In the third structure, when inserting the piezoelectric resonance element into the cylindrical case, the space on both main surfaces of the piezoelectric resonance element can be easily secured.
As in No. 06, it was necessary to cover the conductive caps at both ends of the cylindrical case, and it was very difficult to treat the lead terminals. Therefore, the applicant of the present application has previously described a laminate in which a capacitor element formed of a strip-shaped dielectric substrate having two capacitance components and a strip-shaped piezoelectric resonance element are overlapped via a conductive adhesive. A built-in capacitor type piezoelectric resonator having a structure arranged in a housing-like case having at least one side open is proposed. More specifically, as shown in the vertical cross-sectional view of FIG. 6, a housing-like case 1 having one open side and a laminated body 4 in which a strip-shaped piezoelectric resonance element 2 and a capacitor element 3 are joined. Sealing member 5 for sealing the opening 11 of the housing case 1
It is composed of In addition, lead terminals 16 to 18 are integrally fixed to the bottom surface 12 of the housing-like case 1 and three through holes 13 to 15 for connecting lead terminals are formed. The strip-shaped piezoelectric resonance element 2 has vibration electrodes 22 and 23 formed on both main surfaces of a piezoelectric substrate 21.
The capacitor element 3 has a total of five electrodes formed on both main surfaces of the dielectric substrate 31. For example, capacitance electrodes 32 and 33 are formed at both ends of the upper main surface. Further, connection electrodes 34 and 36 are formed at both ends of the lower surface side main surface, and between the capacitance electrodes 32 and
A central capacitance electrode 35 facing a part of 33 is formed. The laminated body 4 is provided inside the housing case 1.
The stacked body 4 is housed and arranged with the capacitor element 3 of FIG. Thus, the connection through holes 13 to 15 on the bottom surface of the housing-like case 1 are formed by the connection electrode 34, the central capacitance electrode 35, and the connection electrode 3 formed on the lower main surface of the capacitor element 3, respectively.
6, the conductive filling members 62, 63, 64 are filled in the connection through holes 13 to 15, and the lead terminals 16 are filled.
18 and connection electrode 34, central capacitance electrode 35, connection electrode 3
6 is connected. Here, the structure of the laminated body 4 is such that two capacitor electrodes 32 are provided at both ends of the upper main surface of the capacitor element 4.
33 are formed. Further, two connection electrodes 34 and 36 and one central capacitance electrode 35 are formed at both ends of the lower main surface of the capacitor element. On the main surface on the upper surface side of the piezoelectric resonance element 2, a vibrating electrode 22 on the upper surface side extending from the vicinity of the center to one end is provided.
In addition, an independent upper surface side auxiliary electrode 24 is formed at the other end. In addition, on the lower surface side main surface of the piezoelectric resonance element 2, a lower surface side vibrating electrode 23 extending from the vicinity of the center to the other end, and an independent lower surface side auxiliary electrode 25 formed at one end. ing. Then, the two elements are overlapped by the conductive bonding members 41 and 42 interposed at the ends of the bonding surfaces of the two elements to form a laminate 4. Further, conductive attachment members 43 and 44 formed by a thin-film technique or a thick-film technique are formed on the end faces of the laminate 4 respectively. The conductive members 43, 44
The capacitive electrodes 32, 33 on the upper surface of the capacitor element 3 and the connection electrodes 34, 36 formed on the lower surface are electrically connected, and in particular, one end of the piezoelectric resonance element 2 is connected to the conductive attaching member 44. Vibrating electrode 22 on the upper surface side
And one of the capacitor electrodes 33 of the capacitor element 3 (the connection electrode 3
6) are electrically connected. Note that the vibration electrode 23 on the lower surface side of the piezoelectric resonance element 2 is directly connected to the other capacitance electrode 32 on the upper surface side of the capacitor element 3 by the above-described conductive bonding member 41. Further, a gap corresponding to the thickness of the conductive bonding members 41 and 42 is formed between the piezoelectric resonance element 2 and the capacitor element 3 by the conductive bonding members 41 and 42. This gap becomes a vibration space on the lower surface side of the piezoelectric resonance element 2. The laminated body 4 composed of the piezoelectric resonance element 2 and the capacitor element 3 having the above-described structure is simply housed in the housing-like case 1, and the upper surface of the piezoelectric resonance element 2 is It is difficult to stably form a vibration space on the upper surface side of the piezoelectric resonance element 2 between the vibration electrode 22 on the side and the inner upper surface of the housing case 1. Further, there is a problem that the electrical connection between the vibration electrode 22 on the upper surface side of the piezoelectric resonance element 2 and one of the capacitance electrodes 33 of the capacitor element 3 cannot be performed stably. This is because although the electrical connection is achieved by the conductive attaching member 44, in practice, the conductive attaching member 44
This is because the connection is substantially performed by the thickness portion of the vibrating electrode 22 led out to one end on the upper surface side of the piezoelectric resonance element 2. The present invention has been devised in view of the above-described problems, and has as its object the purpose of reliably connecting the vibration electrode on the upper surface side of the piezoelectric resonance element to the capacitance electrode of the capacitor element. An object of the present invention is to provide a piezoelectric resonator with a built-in capacitor that can reliably form a vibration space on the upper surface side of a piezoelectric resonance element. According to the present invention, a lead terminal is attached to a lower surface, and a bottom surface is provided with a through hole filled with a conductive connecting member which is electrically connected to the lead terminal. And electrodes provided on the upper and lower surfaces of a strip-shaped dielectric substrate in a housing-like case having at least one open side surface.
On a capacitor element having two capacitance components, a piezoelectric resonance element in which vibration electrodes which are opposed to each other on the upper and lower surfaces of a strip-shaped piezoelectric substrate and are provided at different short side ends is provided via a conductive bonding member. Along with joining, a conductive adherend member is adhered to the short side end surface, and each electrode of the capacitor element and each electrode of the piezoelectric resonance element are connected by the conductive joint member and the conductive adherend member. In the piezoelectric resonator with a built-in capacitance, the stacked body is housed and arranged, the opening of the housing-shaped case is sealed, and the electrode on the lower surface of the capacitor element and the lead terminal are connected via the conductive connection member. A built-in capacitive piezoelectric resonator characterized in that a thick conductive film that is electrically connected to the conductive attaching member is applied to both ends on the upper surface side of the piezoelectric resonance element. According to the present invention, a thick conductive film is superposed and attached to one end of the upper surface of the piezoelectric resonance element from which the vibration electrode is led out. The thickness of the end lead-out portion can be increased. Since the thickness of the conductor is substantially increased at the end face of the vibrating electrode, the connection between the upper vibrating electrode of the piezoelectric resonance element and the capacitive electrode of the capacitor element by the conductive attachment member formed on the end face of the laminate. Can be reliably performed. Further, when the laminated body is housed in the housing-like case, a vibration gap corresponding to the thickness of the thick conductor film is formed at least between the piezoelectric resonance element and the inner upper surface of the housing-like case. become. Therefore, the vibration space on the lower surface side of the piezoelectric resonance element is formed by the conductive bonding member, and the vibration space on the upper surface side of the piezoelectric resonance element is formed by the thick conductive film. Thus, a stable operation of the piezoelectric resonance element can be secured. The thick conductor film is formed not only at one end on the upper surface side of the piezoelectric resonance element but also at the other end of the piezoelectric resonance element and both ends on the lower surface side of the capacitor element. Not only the connection between the piezoelectric resonance element and the capacitor element by the conductive attachment member attached to the end face, but also the electrical connection between the upper electrode of the capacitor element and the connection electrode can be reliably performed. The preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. FIG. 1 is an external perspective view of a built-in capacitor type piezoelectric resonator of the present invention, FIG. 2 is a longitudinal sectional view thereof, and FIG. 3 is a perspective view of a laminated body. The built-in capacity type piezoelectric resonator has a housing-like case 1,
It mainly includes a laminate 4 in which a piezoelectric resonance element 2 and a capacitor element 3 are laminated, and a sealing member 5. The housing-like case 1 is made of a resin such as a liquid crystal polymer, and has, for example, an opening 11 on one short side surface. In the bottom surface 12 of the case, a connection through-hole 13,
14 and 15 are formed. Further, three lead terminals 16, 17, 18 are fixed to the side surface on the long side of the case, and some of the lead terminals 16, 17, 18 are partially connected to through holes 13, 14, 15 on the bottom surface. It is fixed to the inner wall of. The piezoelectric resonance element 2 includes a rectangular piezoelectric substrate 21.
And a vibration electrode 22 formed on the upper main surface and a vibration electrode 23 formed on the lower main surface. The piezoelectric substrate 21 is made of a piezoelectric ceramic material such as lead titanate (PT) or lead zirconate titanate (PZT), or a single crystal material such as quartz, lithium tantalate, lithium niobate, or lithium tetratrate. The vibrating electrodes 22 and 23 are formed so as to face each other near the center of both main surfaces of the piezoelectric substrate 21. The vibration electrode 22 extends from near the center of the upper surface of the piezoelectric substrate 21 to one end. An auxiliary electrode 24 is formed on the other end of the upper surface of the piezoelectric substrate 21. The vibrating electrode 23 extends from near the center of the lower surface of the piezoelectric substrate 21 to the other end. Piezoelectric substrate 2
Auxiliary electrode 25 is formed on one end of the lower surface of 1. The vibrating electrodes 22 and 23 and the auxiliary electrodes 24 and 25
Is formed of, for example, a thin-film conductor film mainly composed of an Ag-based material. On the upper principal surface of the piezoelectric resonance element 2, thick conductor films 51 and 52 are formed in the width direction at both ends. The thick conductive film 51 is attached near the end of the vibrating electrode 22, and the thick conductive film 52 is attached on the upper surface of the auxiliary electrode 24. The thick conductor films 51 and 52 are formed by printing a conductive resin paste containing silver as a main component and drying the paste. The capacitor element 3 is made of lead titanate (P
T), a strip-shaped dielectric substrate 31 made of a dielectric ceramic material such as lead zirconate titanate (PZT) or barium titanate (BT) and having the same planar shape as the piezoelectric substrate 21 described above; It comprises capacitance electrodes 32 and 33 formed on the upper main surface of the substrate 31, connection electrodes 34 and 36 formed on the lower main surface of the dielectric substrate 31, and a central capacitance electrode 35. The capacitance electrodes 32 and 33 are part of the central capacitance electrode 35 via the dielectric substrate 31 and are respectively led to different ends. For example, the capacitance electrode 32 is
Are drawn out from the vicinity of the center to the other end (the left end in the figure), and the capacitor electrode 33 is drawn out from the vicinity of the center to the one end (the right end in the figure). This allows
Between the capacitance electrode 32 and the central capacitance electrode 35;
Capacitance components are formed between 3 and the central capacitance electrode 35, respectively. The connection electrode 34, the central capacitance electrode 35, and the connection electrode 36 on the bottom main surface of the dielectric substrate 31 are connected to the connection through holes 13, 1, 1
They are formed at positions corresponding to 4 and 15. Further, an end portion of the dielectric substrate 31 on the lower surface of the capacitor element 3, that is, on the connection electrodes 34 and 36,
Thick conductor films 53 and 54 are formed. The piezoelectric resonance element 2 and the capacitor element 3 are joined via conductive joining members 41 and 42, and constitute a multilayer body 4 as a whole. The conductive bonding member 41 is provided on the vibration electrode 23 on the lower main surface of the piezoelectric resonance element 2.
And the capacitance electrode 32 of the capacitor element 3. The conductive bonding member 42 is disposed between the auxiliary electrode 25 on the lower main surface of the piezoelectric resonance element 2 and the capacitance electrode 33 of the capacitor element 3. Further, a pair of end faces of the laminated body 4, that is, a pair of short side end faces of the piezoelectric resonance element 2 and the capacitor element 3
Are provided on the pair of short side end surfaces.
Is attached. These conductive adhered members 43 and 44
A thick film technique, that is, coating and curing of a conductive resin paste, and a thin film technique, that is, a metal material such as silver or copper are applied by vapor deposition or sputtering. The upper surface side vibrating electrode 22 of the piezoelectric resonance element 2, the capacitance electrode 33 (the conductive bonding member 42) of the capacitor element 3, and the connection electrode are formed by the conductive member 44 formed on one end face of the laminate 4. 36 is electrically connected. Further, the conductive adhered member 4 formed on the other end face of the laminate 4
3, the lower vibrating electrode 23 of the piezoelectric resonance element 1 and the capacitance electrode 32 of the capacitor element 3 (the conductive bonding member 4
1) The connection electrode 34 is electrically connected. The laminated body 4 in which the piezoelectric resonance element 2 and the capacitor element 3 are integrally joined as described above is housed and arranged inside the housing case 11 through the opening 11 of the housing case 1. . Thus, from the connection through holes 13, 14, 15 formed in the bottom surface 12 of the housing-like case 1, the connection electrode 34, the central capacitance electrode 35, and the connection electrode 36 formed on the lower main surface of the capacitor element are respectively provided. It will be exposed. The connection through holes 13, 14, 1
By arranging the conductive connecting members 61, 62, 62 in 5, the connecting electrode 34 formed on the bottom surface of the capacitor element 3 is connected to the lead terminal 16, the center capacitor electrode 35 is connected to the lead terminal 17, and the connecting electrode 36 is connected to Each of the laminates 4 is connected to the lead terminal 18, and the laminate 4 is fixed inside the casing 1. Thereafter, the sealing member 5 such as an insulating resin is applied and supplied to the opening 11 of the housing-like case 1 and cured. Thereby, the inside of the housing case 11 is hermetically sealed, and the laminate is fixed to the housing case 1. In the above-described structure, the thick-film conductor film 51 is formed at least at the end of the vibration electrode 22 on the main surface on the upper surface side of the piezoelectric resonance element 2 over the entire width of the piezoelectric substrate 21. Accordingly, the thickness of the vibrating electrode 22 is substantially increased, so that when the conductive electrode 44 is electrically connected to the conductive attaching member 44 attached to the one end surface of the multilayer body 4, the end of the piezoelectric substrate 31 There is no step breakage at the ridge portion, and a reliable electrical connection can be achieved. Preferably, thick conductor films 51 and 52 are formed at both ends on the upper surface side of the piezoelectric resonance element 2. Thereby, at least the thick conductive film 5 is provided between the inner upper surface of the housing-like case 1 and the vibration electrode 22 on the upper surface of the piezoelectric resonance element 2.
Vibration spaces corresponding to the thicknesses 1 and 52 are formed. Further, the laminate 4 is disposed in the housing-like case 1, and the connection through-holes 13,
The conductors are filled in 14 and 15. That is, the laminate 4 is fixed in the housing case 1 with the upper surface of the laminate 4 being in contact with the upper surface of the case 1 via the thick conductive films 51 and 52. Therefore, when the laminated body 4 is observed from the opening 11 of the housing-like case 1, the upper surface of the housing-like case 1 and the thick film conductor film 51 come into contact with each other. The sealing member 5 does not flow into the vibration space on the upper surface side of the piezoelectric resonance element 2, and the stable operation of the piezoelectric resonance element 2 can be maintained. Further, it is desirable to form thick conductor films 53 and 54 also at both ends on the lower surface side of the capacitor element 3. As a result, the thickness at the ends of the connection electrodes 34 and 36 is substantially increased, and the conductive attachment members 43 and 44
This is because electrical connection between the capacitance electrodes 32 and 33 (conductive bonding members 41 and 42) on the upper main surface of the dielectric substrate 31 and the connection electrodes 34 and 36 is ensured. The thickness of such thick conductor films 51 to 54 is, for example, 10 to 50 μm, and has a length of about 0.3 to 0.5 mm from the end to the center.
And the entire width of the lower surface of the dielectric substrate 31. Next, a specific method for manufacturing a laminate will be described with reference to the side view of the laminate 4 shown in FIG. First, a large-sized piezoelectric substrate 20 from which a plurality of strip-shaped piezoelectric substrates 21 can be extracted is prepared, and a vibrating electrode 22 and an auxiliary electrode 24 are formed on the main surface on the upper surface side of each region. The vibration electrode 23 and the auxiliary electrode 25 are respectively formed on the main surface. Next, a large-sized dielectric substrate 30 from which a plurality of strip-shaped dielectric substrates 31 can be extracted is prepared. Capacitance electrodes 32 and 33 are formed on the upper main surface of each region, and the lower surface of each region is formed. The connection electrodes 34 and 36 and the central capacitance electrode 35 are formed on the side main surface. In this state, the vibrating electrode 22 is formed integrally with the auxiliary electrode 24 in a region adjacent to and beyond the boundary of the element region. Similarly, the vibration electrode 23
It is formed integrally with the auxiliary electrode 25 in the adjacent region, is formed integrally with the capacitor electrode 33 in the element region adjacent to the capacitor electrode 32, and is formed integrally with the capacitor electrode 32 in the element region adjacent to the capacitor electrode 33. And formed integrally with the capacitor electrode 36 in the element region adjacent to the connection electrode 34.
Are formed integrally with the capacitor electrode 34 in the element region adjacent to the element region. Next, the large piezoelectric substrate 20 and the large dielectric substrate 30 are joined. For this bonding, for example, a conductive resin adhesive made of silver powder and epoxy resin is used. That is, the conductive bonding members 41 and 42 are attached to the ends of the upper surface main surface of the capacitor element 3 on the capacitance electrodes 32 and 33, respectively.
About 10 to 5 using a conductive resin adhesive.
Screen printing is performed to a thickness of 0 μm, and then the large piezoelectric substrate 20 is positioned and mounted on the large dielectric substrate 30, and the adhesive layer is cured at 180 ° C. for 30 minutes. As described above, the conductor films to be the thick conductor films 51 to 54 are formed by printing and curing using the conductive resin member on the laminate in which the two large substrates 20 and 30 are joined. For example, on the upper surface side main surface (the upper surface of the large piezoelectric substrate 20) of the laminated body, the thick film conductor film 51 straddling a cutting line dividing the element region near the end of the vibrating electrode 22 (in the adjacent element region, Thick film conductor film 52), and at the same time, the thick film conductor 52 straddling a cutting line defining an element region near the other end.
(Thick conductor film 51 in the adjacent element region) is printed.
Similarly, the lower surface side main surface of the laminate (large dielectric substrate 30)
A thick film conductor 53 (thick film conductor film 54 in an adjacent element region) is printed on the lower surface of the connection electrode 34 in the vicinity of an end of the connection electrode 34 so as to straddle a cutting line dividing the element region, and at the same time, the other end Thick film conductor 54 straddling a cutting line defining an element region near the portion
(Thick conductor film 53 in the adjacent element region) is printed.
Thereafter, the applied film is cured by heating (this state is shown in FIG. 4). Next, this laminate is cut at the dotted line portion shown in FIG. Next, the conductive adhered members 43 and 44 are applied to the end faces of the cut laminate by using a thick film technique or a thin film technique.
Is formed. Lastly, each element region is cut along the long side to form a laminate 4 in which the piezoelectric resonance element 2 and the capacitor element 3 are joined. In the above embodiment, the housing case 1
Although one side has an opening 11, for example, a roughly cylindrical case 1 in which a pair of opposing side surfaces are each opened.
May be used. According to the present invention, a thick conductor film is superimposed on the leading end of the vibrating electrode formed on the upper main surface of the piezoelectric resonance element constituting the laminate. For this reason, when the conductive adherend is adhered to the end face of the laminate, the thickness of the end face portion is increased and the vibration electrode on the upper surface side main surface of the piezoelectric resonance element and the capacitance electrode of the capacitor element, and the stable connection of the connection electrode. Connection is achieved. Further, since the vibration space between the inner upper surface of the case and the piezoelectric resonance element can be ensured by the thick conductor film, the operation can be stably performed. Further, when the laminated body is placed in the housing-shaped case, the thick-film conductor film comes into contact with the upper surface of the inside of the case, so that the sealing member for sealing the opening does not go around the upper surface of the piezoelectric substrate. Therefore, very stable hermetic sealing can be maintained.

【図面の簡単な説明】 【図1】本発明の容量内蔵型圧電共振子の外観斜視図で
ある。 【図2】本発明の容量内蔵型圧電共振子の縦断面図であ
る。 【図3】本発明の積層体の斜視図である。 【図4】本発明の積層体を製造方法を説明するための一
工程における側面図である。 【図5】容量内蔵型圧電共振子の等価回路図を示す。 【図6】従来の容量内蔵型圧電共振子の断面図である。 【符号の説明】 1・・・・筺体状ケース 11・・・開口 12・・・底面 13、14,15・・・・接続用貫通孔 2・・・・・・・・圧電共振素子 21・・・・・・圧電基板 22、23・・・振動電極 3・・・・・・・・コンデンサ素子 31・・・・誘電体基板 32、33・・・容量電極 34、36・・・接続電極 35・・・・・・中央容量電極 4・・・・・・積層体 41、42・・・導電性接合部材 43、44・・・導電性被着部材 51〜54・・厚膜導体膜
BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is an external perspective view of a built-in capacitor type piezoelectric resonator of the present invention. FIG. 2 is a longitudinal sectional view of a built-in capacitance type piezoelectric resonator of the present invention. FIG. 3 is a perspective view of a laminate of the present invention. FIG. 4 is a side view in one step for describing a method for manufacturing a laminate of the present invention. FIG. 5 shows an equivalent circuit diagram of a built-in capacitance type piezoelectric resonator. FIG. 6 is a cross-sectional view of a conventional built-in capacitance type piezoelectric resonator. [Description of Signs] 1 ··· Housing case 11 ··· Opening 12 ··· Bottom 13, 14, 15 ··· Connection through-hole 2 ······ Piezoelectric resonance element 21 ··· ······ Piezoelectric substrates 22 and 23 ·················································· Dielectric substrate 32, 33 ········ Capacitance electrodes 34, 36 ······· Connection electrodes 35 Central capacitance electrode 4 Laminated bodies 41, 42 Conductive bonding members 43, 44 Conductive adhered members 51 to 54 Thick conductor film

───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 平4−373303(JP,A) 特開 平8−107328(JP,A) 特開 平5−83074(JP,A) 特開 昭60−123120(JP,A) 特開 昭60−256201(JP,A) 特開 平2−44706(JP,A) 特開 平10−303686(JP,A) 特開 平10−335969(JP,A) 実開 平4−103722(JP,U) 実開 平4−94720(JP,U) 実開 昭62−70453(JP,U) (58)調査した分野(Int.Cl.7,DB名) H03H 9/00 - 9/24 ──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-4-373303 (JP, A) JP-A-8-107328 (JP, A) JP-A-5-83074 (JP, A) JP-A-60-1985 JP-A-60-256201 (JP, A) JP-A-2-44706 (JP, A) JP-A-10-303686 (JP, A) JP-A-10-335969 (JP, A) Japanese Utility Model Application No. 4-103722 (JP, U) Japanese Utility Model Application No. 4-94720 (JP, U) Japanese Utility Model Application No. Sho 62-70453 (JP, U) (58) Fields investigated (Int. Cl. 7 , DB name) H03H 9/00-9/24

Claims (1)

(57)【特許請求の範囲】 【請求項1】 下面にリード端子が被着されており、底
面に前記リード端子と導通する導電性接続部材が充填さ
れている貫通孔を有し、且つ少なくとも側面の一面が開
口している筺体状ケースに、短冊状の誘電体基板の上下
面に電極を設けた2つの容量成分を具備するコンデンサ
素子上に、短冊状の圧電基板の上下面に互いに対向しあ
い且つ異なる短辺側端部に導出される振動電極を設けた
圧電共振素子を、導電性接合部材を介して接合させると
ともに、短辺側端面に導電性被着部材を被着させ、前記
導電性接合部材と導電性被着部材とでコンデンサ素子の
各電極と圧電共振素子の各電極とを接続して成る積層体
を収納配置し、筺体状ケースの開口を封止するととも
に、前記導電性接続部材を介してコンデンサ素子の下面
の電極と前記リード端子とを接続して成る容量内蔵型圧
電共振子において、 前記圧電共振素子の上面側の両端部に、前記導電性被着
着部材と導通する厚膜導体膜を被着させたことを特徴と
する容量内蔵型圧電共振子。
(57) [Claim 1] A lead terminal is attached to a lower surface, and a bottom surface has a through hole filled with a conductive connection member which is electrically connected to the lead terminal, and at least Opposite to the upper and lower sides of the strip-shaped piezoelectric substrate, on the capacitor element having two capacitance components provided with electrodes on the upper and lower sides of the strip-shaped dielectric substrate, in a housing-like case with one side open A piezoelectric resonance element provided with a vibrating electrode led out to a different short side end portion is joined via a conductive joining member, and a conductive attachment member is attached to the short side end surface. The laminated body formed by connecting each electrode of the capacitor element and each electrode of the piezoelectric resonance element with the conductive bonding member and the conductive attaching member is housed and arranged, and the opening of the housing case is sealed, Under the capacitor element via the connecting member In the electrode and the lead terminal formed by connecting a capacitor built-in piezoelectric resonator, both ends of the upper surface of the piezoelectric resonator element, the conductive deposition
A built-in capacitor type piezoelectric resonator characterized in that a thick conductive film that is conductive with a mounting member is applied .
JP32897597A 1997-11-28 1997-11-28 Piezoelectric resonator with built-in capacitance Expired - Fee Related JP3441349B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP32897597A JP3441349B2 (en) 1997-11-28 1997-11-28 Piezoelectric resonator with built-in capacitance

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP32897597A JP3441349B2 (en) 1997-11-28 1997-11-28 Piezoelectric resonator with built-in capacitance

Publications (2)

Publication Number Publication Date
JPH11163658A JPH11163658A (en) 1999-06-18
JP3441349B2 true JP3441349B2 (en) 2003-09-02

Family

ID=18216214

Family Applications (1)

Application Number Title Priority Date Filing Date
JP32897597A Expired - Fee Related JP3441349B2 (en) 1997-11-28 1997-11-28 Piezoelectric resonator with built-in capacitance

Country Status (1)

Country Link
JP (1) JP3441349B2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3334669B2 (en) * 1999-03-29 2002-10-15 株式会社村田製作所 Piezoelectric resonance components
JP3475876B2 (en) * 1999-10-15 2003-12-10 株式会社村田製作所 Piezoelectric resonance components with built-in capacitance

Also Published As

Publication number Publication date
JPH11163658A (en) 1999-06-18

Similar Documents

Publication Publication Date Title
US20050040735A1 (en) Surface mount crystal oscillator
JPH11150153A (en) Electronic component
JP2000286526A (en) Surface mounting structure and surface-mounted electronic component used in the same
JP3441349B2 (en) Piezoelectric resonator with built-in capacitance
JP3441350B2 (en) Piezoelectric resonator with built-in capacitance
JP3318507B2 (en) Piezoelectric resonator with built-in capacitance
JPH08237066A (en) Piezoelectric resonator and its manufacture
JPH10135771A (en) Piezoelectric component
JPS59119911A (en) piezoelectric vibrator
JP3450993B2 (en) Piezoelectric resonator with built-in capacitance
JP2003224221A (en) Electronic component
JP2000049556A (en) Capacitance included piezo-resonator
JP2002299994A (en) Electronic component
JP3472474B2 (en) Thin piezoelectric resonator and its mounting structure
JP2003110399A (en) Electronic component
JP3441335B2 (en) Manufacturing method of piezoelectric resonator with built-in capacitance
JP2002299993A (en) Electronic component
JP2001237560A (en) Electronic parts device
JP2563964Y2 (en) Surface mount type resonator
JP2000022475A (en) Piezoelectric component and manufacture of piezoelectric component
JPH1127076A (en) Piezoelectric resonator containing capacitor
JP2003163564A (en) Electronic component
JP3441920B2 (en) Piezoelectric resonator with built-in capacitance
JP2605183Y2 (en) Ladder type filter
JP2001044783A (en) Surface mount piezoelectric resonator

Legal Events

Date Code Title Description
FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20090620

Year of fee payment: 6

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20090620

Year of fee payment: 6

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20100620

Year of fee payment: 7

LAPS Cancellation because of no payment of annual fees