JP3419995B2 - Electroless tin-silver alloy plating bath - Google Patents
Electroless tin-silver alloy plating bathInfo
- Publication number
- JP3419995B2 JP3419995B2 JP13973296A JP13973296A JP3419995B2 JP 3419995 B2 JP3419995 B2 JP 3419995B2 JP 13973296 A JP13973296 A JP 13973296A JP 13973296 A JP13973296 A JP 13973296A JP 3419995 B2 JP3419995 B2 JP 3419995B2
- Authority
- JP
- Japan
- Prior art keywords
- acid
- tin
- silver
- alkyl group
- group
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000007747 plating Methods 0.000 title claims description 46
- 229910001316 Ag alloy Inorganic materials 0.000 title claims description 26
- QCEUXSAXTBNJGO-UHFFFAOYSA-N [Ag].[Sn] Chemical compound [Ag].[Sn] QCEUXSAXTBNJGO-UHFFFAOYSA-N 0.000 title claims description 25
- 125000000217 alkyl group Chemical group 0.000 claims description 64
- 239000002253 acid Substances 0.000 claims description 33
- -1 cyclic ester compound Chemical class 0.000 claims description 31
- 125000001931 aliphatic group Chemical group 0.000 claims description 26
- UMGDCJDMYOKAJW-UHFFFAOYSA-N aminothiocarboxamide Natural products NC(N)=S UMGDCJDMYOKAJW-UHFFFAOYSA-N 0.000 claims description 24
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 23
- 239000004332 silver Substances 0.000 claims description 22
- 239000004094 surface-active agent Substances 0.000 claims description 22
- 229910052709 silver Inorganic materials 0.000 claims description 21
- 125000004432 carbon atom Chemical group C* 0.000 claims description 18
- 239000008139 complexing agent Substances 0.000 claims description 15
- XSQUKJJJFZCRTK-UHFFFAOYSA-N Urea Natural products NC(N)=O XSQUKJJJFZCRTK-UHFFFAOYSA-N 0.000 claims description 13
- 150000003839 salts Chemical class 0.000 claims description 13
- 239000000243 solution Substances 0.000 claims description 13
- KCXVZYZYPLLWCC-UHFFFAOYSA-N EDTA Chemical compound OC(=O)CN(CC(O)=O)CCN(CC(O)=O)CC(O)=O KCXVZYZYPLLWCC-UHFFFAOYSA-N 0.000 claims description 10
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 claims description 10
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 claims description 10
- 238000007772 electroless plating Methods 0.000 claims description 9
- OFOBLEOULBTSOW-UHFFFAOYSA-N Malonic acid Chemical compound OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 claims description 8
- 150000001875 compounds Chemical class 0.000 claims description 7
- 229910052757 nitrogen Inorganic materials 0.000 claims description 6
- KZNICNPSHKQLFF-UHFFFAOYSA-N succinimide Chemical compound O=C1CCC(=O)N1 KZNICNPSHKQLFF-UHFFFAOYSA-N 0.000 claims description 6
- NJRXVEJTAYWCQJ-UHFFFAOYSA-N thiomalic acid Chemical compound OC(=O)CC(S)C(O)=O NJRXVEJTAYWCQJ-UHFFFAOYSA-N 0.000 claims description 6
- 229910000147 aluminium phosphate Inorganic materials 0.000 claims description 5
- NBZBKCUXIYYUSX-UHFFFAOYSA-N iminodiacetic acid Chemical compound OC(=O)CNCC(O)=O NBZBKCUXIYYUSX-UHFFFAOYSA-N 0.000 claims description 5
- 229940100890 silver compound Drugs 0.000 claims description 5
- 150000003379 silver compounds Chemical class 0.000 claims description 5
- QPCDCPDFJACHGM-UHFFFAOYSA-N N,N-bis{2-[bis(carboxymethyl)amino]ethyl}glycine Chemical compound OC(=O)CN(CC(O)=O)CCN(CC(=O)O)CCN(CC(O)=O)CC(O)=O QPCDCPDFJACHGM-UHFFFAOYSA-N 0.000 claims description 4
- 229910002651 NO3 Inorganic materials 0.000 claims description 4
- 150000002497 iodine compounds Chemical class 0.000 claims description 4
- 239000007788 liquid Substances 0.000 claims description 4
- 238000000034 method Methods 0.000 claims description 4
- 229960003330 pentetic acid Drugs 0.000 claims description 4
- 150000003606 tin compounds Chemical class 0.000 claims description 4
- 239000003963 antioxidant agent Substances 0.000 claims description 3
- 239000007864 aqueous solution Substances 0.000 claims description 3
- 239000003638 chemical reducing agent Substances 0.000 claims description 3
- 150000002772 monosaccharides Chemical class 0.000 claims description 3
- MGFYIUFZLHCRTH-UHFFFAOYSA-N nitrilotriacetic acid Chemical compound OC(=O)CN(CC(O)=O)CC(O)=O MGFYIUFZLHCRTH-UHFFFAOYSA-N 0.000 claims description 3
- 238000001556 precipitation Methods 0.000 claims description 3
- 229960002317 succinimide Drugs 0.000 claims description 3
- DHCDFWKWKRSZHF-UHFFFAOYSA-N sulfurothioic S-acid Chemical compound OS(O)(=O)=S DHCDFWKWKRSZHF-UHFFFAOYSA-N 0.000 claims description 3
- WKBOTKDWSSQWDR-UHFFFAOYSA-N Bromine atom Chemical class [Br] WKBOTKDWSSQWDR-UHFFFAOYSA-N 0.000 claims description 2
- 238000009499 grossing Methods 0.000 claims description 2
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 claims description 2
- BTWRPQHFJAFXJR-UHFFFAOYSA-N n-[2-(ethylaminooxy)ethoxy]ethanamine Chemical compound CCNOCCONCC BTWRPQHFJAFXJR-UHFFFAOYSA-N 0.000 claims description 2
- 239000006179 pH buffering agent Substances 0.000 claims description 2
- 239000000654 additive Substances 0.000 claims 1
- 150000002762 monocarboxylic acid derivatives Chemical class 0.000 claims 1
- 229910052739 hydrogen Inorganic materials 0.000 description 38
- 239000001257 hydrogen Substances 0.000 description 38
- 239000000126 substance Substances 0.000 description 26
- NLKNQRATVPKPDG-UHFFFAOYSA-M potassium iodide Chemical compound [K+].[I-] NLKNQRATVPKPDG-UHFFFAOYSA-M 0.000 description 21
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 20
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 15
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 15
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 14
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 13
- 125000003118 aryl group Chemical group 0.000 description 12
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 12
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 description 12
- 229910052736 halogen Inorganic materials 0.000 description 12
- 150000002367 halogens Chemical group 0.000 description 12
- 150000002431 hydrogen Chemical class 0.000 description 12
- 229910000679 solder Inorganic materials 0.000 description 12
- LSNNMFCWUKXFEE-UHFFFAOYSA-M Bisulfite Chemical compound OS([O-])=O LSNNMFCWUKXFEE-UHFFFAOYSA-M 0.000 description 10
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 9
- 125000000542 sulfonic acid group Chemical group 0.000 description 9
- GOOHAUXETOMSMM-UHFFFAOYSA-N Propylene oxide Chemical compound CC1CO1 GOOHAUXETOMSMM-UHFFFAOYSA-N 0.000 description 8
- 125000002947 alkylene group Chemical group 0.000 description 8
- KWIUHFFTVRNATP-UHFFFAOYSA-N glycine betaine Chemical compound C[N+](C)(C)CC([O-])=O KWIUHFFTVRNATP-UHFFFAOYSA-N 0.000 description 8
- 229910021626 Tin(II) chloride Inorganic materials 0.000 description 7
- 239000000460 chlorine Substances 0.000 description 7
- SQGYOTSLMSWVJD-UHFFFAOYSA-N silver nitrate Substances [Ag+].[O-]N(=O)=O SQGYOTSLMSWVJD-UHFFFAOYSA-N 0.000 description 7
- 238000006467 substitution reaction Methods 0.000 description 7
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical group [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 6
- IAYPIBMASNFSPL-UHFFFAOYSA-N Ethylene oxide Chemical compound C1CO1 IAYPIBMASNFSPL-UHFFFAOYSA-N 0.000 description 6
- DHMQDGOQFOQNFH-UHFFFAOYSA-N Glycine Chemical compound NCC(O)=O DHMQDGOQFOQNFH-UHFFFAOYSA-N 0.000 description 6
- AEMRFAOFKBGASW-UHFFFAOYSA-N Glycolic acid Chemical compound OCC(O)=O AEMRFAOFKBGASW-UHFFFAOYSA-N 0.000 description 6
- SIKJAQJRHWYJAI-UHFFFAOYSA-N Indole Chemical compound C1=CC=C2NC=CC2=C1 SIKJAQJRHWYJAI-UHFFFAOYSA-N 0.000 description 6
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 description 6
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 6
- 229910052801 chlorine Inorganic materials 0.000 description 6
- RAXXELZNTBOGNW-UHFFFAOYSA-N imidazole Natural products C1=CNC=N1 RAXXELZNTBOGNW-UHFFFAOYSA-N 0.000 description 6
- LQBJWKCYZGMFEV-UHFFFAOYSA-N lead tin Chemical compound [Sn].[Pb] LQBJWKCYZGMFEV-UHFFFAOYSA-N 0.000 description 6
- 239000000203 mixture Substances 0.000 description 6
- 125000003277 amino group Chemical group 0.000 description 5
- 239000003795 chemical substances by application Substances 0.000 description 5
- 239000013078 crystal Substances 0.000 description 5
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 5
- 125000001624 naphthyl group Chemical group 0.000 description 5
- DXYYSGDWQCSKKO-UHFFFAOYSA-N 2-methylbenzothiazole Chemical compound C1=CC=C2SC(C)=NC2=C1 DXYYSGDWQCSKKO-UHFFFAOYSA-N 0.000 description 4
- YGHRJJRRZDOVPD-UHFFFAOYSA-N 3-methylbutanal Chemical compound CC(C)CC=O YGHRJJRRZDOVPD-UHFFFAOYSA-N 0.000 description 4
- NAMCDLUESQLMOZ-UHFFFAOYSA-N 6-ethyl-1,3,5-triazine-2,4-diamine Chemical compound CCC1=NC(N)=NC(N)=N1 NAMCDLUESQLMOZ-UHFFFAOYSA-N 0.000 description 4
- KWOLFJPFCHCOCG-UHFFFAOYSA-N Acetophenone Chemical compound CC(=O)C1=CC=CC=C1 KWOLFJPFCHCOCG-UHFFFAOYSA-N 0.000 description 4
- NLXLAEXVIDQMFP-UHFFFAOYSA-N Ammonia chloride Chemical compound [NH4+].[Cl-] NLXLAEXVIDQMFP-UHFFFAOYSA-N 0.000 description 4
- CIWBSHSKHKDKBQ-JLAZNSOCSA-N Ascorbic acid Chemical compound OC[C@H](O)[C@H]1OC(=O)C(O)=C1O CIWBSHSKHKDKBQ-JLAZNSOCSA-N 0.000 description 4
- QIGBRXMKCJKVMJ-UHFFFAOYSA-N Hydroquinone Chemical compound OC1=CC=C(O)C=C1 QIGBRXMKCJKVMJ-UHFFFAOYSA-N 0.000 description 4
- SMWDFEZZVXVKRB-UHFFFAOYSA-N Quinoline Chemical compound N1=CC=CC2=CC=CC=C21 SMWDFEZZVXVKRB-UHFFFAOYSA-N 0.000 description 4
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 4
- 150000007513 acids Chemical class 0.000 description 4
- 229910052783 alkali metal Inorganic materials 0.000 description 4
- 150000001340 alkali metals Chemical class 0.000 description 4
- 125000003342 alkenyl group Chemical group 0.000 description 4
- HUMNYLRZRPPJDN-UHFFFAOYSA-N benzaldehyde Chemical compound O=CC1=CC=CC=C1 HUMNYLRZRPPJDN-UHFFFAOYSA-N 0.000 description 4
- 229960003237 betaine Drugs 0.000 description 4
- 230000007423 decrease Effects 0.000 description 4
- USIUVYZYUHIAEV-UHFFFAOYSA-N diphenyl ether Chemical compound C=1C=CC=CC=1OC1=CC=CC=C1 USIUVYZYUHIAEV-UHFFFAOYSA-N 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 239000011737 fluorine Chemical group 0.000 description 4
- 229910052731 fluorine Chemical group 0.000 description 4
- 125000001153 fluoro group Chemical group F* 0.000 description 4
- 125000001117 oleyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])/C([H])=C([H])\C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 4
- 125000000913 palmityl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 4
- ZQBAKBUEJOMQEX-UHFFFAOYSA-N phenyl salicylate Chemical compound OC1=CC=CC=C1C(=O)OC1=CC=CC=C1 ZQBAKBUEJOMQEX-UHFFFAOYSA-N 0.000 description 4
- 238000007670 refining Methods 0.000 description 4
- 229910001961 silver nitrate Inorganic materials 0.000 description 4
- NDVLTYZPCACLMA-UHFFFAOYSA-N silver oxide Chemical compound [O-2].[Ag+].[Ag+] NDVLTYZPCACLMA-UHFFFAOYSA-N 0.000 description 4
- FQENQNTWSFEDLI-UHFFFAOYSA-J sodium diphosphate Chemical compound [Na+].[Na+].[Na+].[Na+].[O-]P([O-])(=O)OP([O-])([O-])=O FQENQNTWSFEDLI-UHFFFAOYSA-J 0.000 description 4
- 229940048086 sodium pyrophosphate Drugs 0.000 description 4
- 125000004079 stearyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 4
- 235000019818 tetrasodium diphosphate Nutrition 0.000 description 4
- 239000001577 tetrasodium phosphonato phosphate Substances 0.000 description 4
- AEQDJSLRWYMAQI-UHFFFAOYSA-N 2,3,9,10-tetramethoxy-6,8,13,13a-tetrahydro-5H-isoquinolino[2,1-b]isoquinoline Chemical compound C1CN2CC(C(=C(OC)C=C3)OC)=C3CC2C2=C1C=C(OC)C(OC)=C2 AEQDJSLRWYMAQI-UHFFFAOYSA-N 0.000 description 3
- JKFYKCYQEWQPTM-UHFFFAOYSA-N 2-azaniumyl-2-(4-fluorophenyl)acetate Chemical compound OC(=O)C(N)C1=CC=C(F)C=C1 JKFYKCYQEWQPTM-UHFFFAOYSA-N 0.000 description 3
- RYKLZUPYJFFNRR-UHFFFAOYSA-N 3-hydroxypiperidin-2-one Chemical compound OC1CCCNC1=O RYKLZUPYJFFNRR-UHFFFAOYSA-N 0.000 description 3
- HVBSAKJJOYLTQU-UHFFFAOYSA-N 4-aminobenzenesulfonic acid Chemical class NC1=CC=C(S(O)(=O)=O)C=C1 HVBSAKJJOYLTQU-UHFFFAOYSA-N 0.000 description 3
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical class CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 3
- HGINCPLSRVDWNT-UHFFFAOYSA-N Acrolein Chemical compound C=CC=O HGINCPLSRVDWNT-UHFFFAOYSA-N 0.000 description 3
- ZTQSAGDEMFDKMZ-UHFFFAOYSA-N Butyraldehyde Chemical compound CCCC=O ZTQSAGDEMFDKMZ-UHFFFAOYSA-N 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- RGHNJXZEOKUKBD-SQOUGZDYSA-N D-gluconic acid Chemical compound OC[C@@H](O)[C@@H](O)[C@H](O)[C@@H](O)C(O)=O RGHNJXZEOKUKBD-SQOUGZDYSA-N 0.000 description 3
- DBVJJBKOTRCVKF-UHFFFAOYSA-N Etidronic acid Chemical compound OP(=O)(O)C(O)(C)P(O)(O)=O DBVJJBKOTRCVKF-UHFFFAOYSA-N 0.000 description 3
- 239000004471 Glycine Substances 0.000 description 3
- RVGRUAULSDPKGF-UHFFFAOYSA-N Poloxamer Chemical compound C1CO1.CC1CO1 RVGRUAULSDPKGF-UHFFFAOYSA-N 0.000 description 3
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 3
- 229910021612 Silver iodide Inorganic materials 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- KDYFGRWQOYBRFD-UHFFFAOYSA-N Succinic acid Natural products OC(=O)CCC(O)=O KDYFGRWQOYBRFD-UHFFFAOYSA-N 0.000 description 3
- QAOWNCQODCNURD-UHFFFAOYSA-L Sulfate Chemical compound [O-]S([O-])(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-L 0.000 description 3
- ULUAUXLGCMPNKK-UHFFFAOYSA-N Sulfobutanedioic acid Chemical compound OC(=O)CC(C(O)=O)S(O)(=O)=O ULUAUXLGCMPNKK-UHFFFAOYSA-N 0.000 description 3
- FEWJPZIEWOKRBE-UHFFFAOYSA-N Tartaric acid Natural products [H+].[H+].[O-]C(=O)C(O)C(O)C([O-])=O FEWJPZIEWOKRBE-UHFFFAOYSA-N 0.000 description 3
- 125000003172 aldehyde group Chemical group 0.000 description 3
- 125000002877 alkyl aryl group Chemical group 0.000 description 3
- 150000001408 amides Chemical class 0.000 description 3
- 150000001412 amines Chemical class 0.000 description 3
- 125000002511 behenyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 3
- IOJUPLGTWVMSFF-UHFFFAOYSA-N benzothiazole Chemical class C1=CC=C2SC=NC2=C1 IOJUPLGTWVMSFF-UHFFFAOYSA-N 0.000 description 3
- QRUDEWIWKLJBPS-UHFFFAOYSA-N benzotriazole Chemical compound C1=CC=C2N[N][N]C2=C1 QRUDEWIWKLJBPS-UHFFFAOYSA-N 0.000 description 3
- 239000012964 benzotriazole Substances 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 235000014113 dietary fatty acids Nutrition 0.000 description 3
- XPPKVPWEQAFLFU-UHFFFAOYSA-N diphosphoric acid Chemical compound OP(O)(=O)OP(O)(O)=O XPPKVPWEQAFLFU-UHFFFAOYSA-N 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000009713 electroplating Methods 0.000 description 3
- 150000002170 ethers Chemical class 0.000 description 3
- 239000000194 fatty acid Substances 0.000 description 3
- 229930195729 fatty acid Natural products 0.000 description 3
- PZOUSPYUWWUPPK-UHFFFAOYSA-N indole Natural products CC1=CC=CC2=C1C=CN2 PZOUSPYUWWUPPK-UHFFFAOYSA-N 0.000 description 3
- RKJUIXBNRJVNHR-UHFFFAOYSA-N indolenine Natural products C1=CC=C2CC=NC2=C1 RKJUIXBNRJVNHR-UHFFFAOYSA-N 0.000 description 3
- AICMYQIGFPHNCY-UHFFFAOYSA-J methanesulfonate;tin(4+) Chemical compound [Sn+4].CS([O-])(=O)=O.CS([O-])(=O)=O.CS([O-])(=O)=O.CS([O-])(=O)=O AICMYQIGFPHNCY-UHFFFAOYSA-J 0.000 description 3
- 125000000449 nitro group Chemical group [O-][N+](*)=O 0.000 description 3
- 229910052700 potassium Inorganic materials 0.000 description 3
- 239000011591 potassium Substances 0.000 description 3
- 229940005657 pyrophosphoric acid Drugs 0.000 description 3
- 229940045105 silver iodide Drugs 0.000 description 3
- 239000000176 sodium gluconate Substances 0.000 description 3
- 235000012207 sodium gluconate Nutrition 0.000 description 3
- 229940005574 sodium gluconate Drugs 0.000 description 3
- FVAUCKIRQBBSSJ-UHFFFAOYSA-M sodium iodide Chemical compound [Na+].[I-] FVAUCKIRQBBSSJ-UHFFFAOYSA-M 0.000 description 3
- 159000000000 sodium salts Chemical class 0.000 description 3
- GGCZERPQGJTIQP-UHFFFAOYSA-N sodium;9,10-dioxoanthracene-2-sulfonic acid Chemical compound [Na+].C1=CC=C2C(=O)C3=CC(S(=O)(=O)O)=CC=C3C(=O)C2=C1 GGCZERPQGJTIQP-UHFFFAOYSA-N 0.000 description 3
- 238000005476 soldering Methods 0.000 description 3
- 239000011975 tartaric acid Substances 0.000 description 3
- 235000002906 tartaric acid Nutrition 0.000 description 3
- FAKFSJNVVCGEEI-UHFFFAOYSA-J tin(4+);disulfate Chemical compound [Sn+4].[O-]S([O-])(=O)=O.[O-]S([O-])(=O)=O FAKFSJNVVCGEEI-UHFFFAOYSA-J 0.000 description 3
- HGBOYTHUEUWSSQ-UHFFFAOYSA-N valeric aldehyde Natural products CCCCC=O HGBOYTHUEUWSSQ-UHFFFAOYSA-N 0.000 description 3
- JNYAEWCLZODPBN-JGWLITMVSA-N (2r,3r,4s)-2-[(1r)-1,2-dihydroxyethyl]oxolane-3,4-diol Chemical compound OC[C@@H](O)[C@H]1OC[C@H](O)[C@H]1O JNYAEWCLZODPBN-JGWLITMVSA-N 0.000 description 2
- 125000006273 (C1-C3) alkyl group Chemical group 0.000 description 2
- 125000006700 (C1-C6) alkylthio group Chemical group 0.000 description 2
- OWQPOVKKUWUEKE-UHFFFAOYSA-N 1,2,3-benzotriazine Chemical compound N1=NN=CC2=CC=CC=C21 OWQPOVKKUWUEKE-UHFFFAOYSA-N 0.000 description 2
- JYEUMXHLPRZUAT-UHFFFAOYSA-N 1,2,3-triazine Chemical compound C1=CN=NN=C1 JYEUMXHLPRZUAT-UHFFFAOYSA-N 0.000 description 2
- YXIWHUQXZSMYRE-UHFFFAOYSA-N 1,3-benzothiazole-2-thiol Chemical compound C1=CC=C2SC(S)=NC2=C1 YXIWHUQXZSMYRE-UHFFFAOYSA-N 0.000 description 2
- PAWQVTBBRAZDMG-UHFFFAOYSA-N 2-(3-bromo-2-fluorophenyl)acetic acid Chemical compound OC(=O)CC1=CC=CC(Br)=C1F PAWQVTBBRAZDMG-UHFFFAOYSA-N 0.000 description 2
- GEZAUFNYMZVOFV-UHFFFAOYSA-J 2-[(2-oxo-1,3,2$l^{5},4$l^{2}-dioxaphosphastannetan-2-yl)oxy]-1,3,2$l^{5},4$l^{2}-dioxaphosphastannetane 2-oxide Chemical compound [Sn+2].[Sn+2].[O-]P([O-])(=O)OP([O-])([O-])=O GEZAUFNYMZVOFV-UHFFFAOYSA-J 0.000 description 2
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- 125000003368 amide group Chemical group 0.000 description 1
- LFVGISIMTYGQHF-UHFFFAOYSA-N ammonium dihydrogen phosphate Chemical compound [NH4+].OP(O)([O-])=O LFVGISIMTYGQHF-UHFFFAOYSA-N 0.000 description 1
- 229910000387 ammonium dihydrogen phosphate Inorganic materials 0.000 description 1
- 239000002280 amphoteric surfactant Substances 0.000 description 1
- 150000001448 anilines Chemical class 0.000 description 1
- 239000003945 anionic surfactant Substances 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- 230000003078 antioxidant effect Effects 0.000 description 1
- 229940111121 antirheumatic drug quinolines Drugs 0.000 description 1
- 235000010323 ascorbic acid Nutrition 0.000 description 1
- 239000011668 ascorbic acid Substances 0.000 description 1
- 239000002585 base Substances 0.000 description 1
- SRSXLGNVWSONIS-UHFFFAOYSA-N benzenesulfonic acid Chemical compound OS(=O)(=O)C1=CC=CC=C1 SRSXLGNVWSONIS-UHFFFAOYSA-N 0.000 description 1
- 229940092714 benzenesulfonic acid Drugs 0.000 description 1
- RBGLVWCAGPITBS-UHFFFAOYSA-L bis(trifluoromethylsulfonyloxy)tin Chemical compound [Sn+2].[O-]S(=O)(=O)C(F)(F)F.[O-]S(=O)(=O)C(F)(F)F RBGLVWCAGPITBS-UHFFFAOYSA-L 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 1
- 150000004663 bisphosphonates Chemical class 0.000 description 1
- 229910000085 borane Inorganic materials 0.000 description 1
- KGBXLFKZBHKPEV-UHFFFAOYSA-N boric acid Chemical class OB(O)O KGBXLFKZBHKPEV-UHFFFAOYSA-N 0.000 description 1
- 239000004327 boric acid Chemical class 0.000 description 1
- GDTBXPJZTBHREO-UHFFFAOYSA-N bromine Substances BrBr GDTBXPJZTBHREO-UHFFFAOYSA-N 0.000 description 1
- 229910052794 bromium Inorganic materials 0.000 description 1
- 239000000872 buffer Substances 0.000 description 1
- QDHFHIQKOVNCNC-UHFFFAOYSA-N butane-1-sulfonic acid Chemical compound CCCCS(O)(=O)=O QDHFHIQKOVNCNC-UHFFFAOYSA-N 0.000 description 1
- BRXCDHOLJPJLLT-UHFFFAOYSA-N butane-2-sulfonic acid Chemical compound CCC(C)S(O)(=O)=O BRXCDHOLJPJLLT-UHFFFAOYSA-N 0.000 description 1
- KDYFGRWQOYBRFD-NUQCWPJISA-N butanedioic acid Chemical compound O[14C](=O)CC[14C](O)=O KDYFGRWQOYBRFD-NUQCWPJISA-N 0.000 description 1
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 239000003093 cationic surfactant Substances 0.000 description 1
- CZKMPDNXOGQMFW-UHFFFAOYSA-N chloro(triethyl)germane Chemical compound CC[Ge](Cl)(CC)CC CZKMPDNXOGQMFW-UHFFFAOYSA-N 0.000 description 1
- 229930016911 cinnamic acid Natural products 0.000 description 1
- 235000013985 cinnamic acid Nutrition 0.000 description 1
- KJPRLNWUNMBNBZ-UHFFFAOYSA-N cinnamic aldehyde Natural products O=CC=CC1=CC=CC=C1 KJPRLNWUNMBNBZ-UHFFFAOYSA-N 0.000 description 1
- 229940117916 cinnamic aldehyde Drugs 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000013065 commercial product Substances 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- MLUCVPSAIODCQM-NSCUHMNNSA-N crotonaldehyde Chemical compound C\C=C\C=O MLUCVPSAIODCQM-NSCUHMNNSA-N 0.000 description 1
- MLUCVPSAIODCQM-UHFFFAOYSA-N crotonaldehyde Natural products CC=CC=O MLUCVPSAIODCQM-UHFFFAOYSA-N 0.000 description 1
- 229940109262 curcumin Drugs 0.000 description 1
- 239000004148 curcumin Substances 0.000 description 1
- 235000012754 curcumin Nutrition 0.000 description 1
- 125000000753 cycloalkyl group Chemical group 0.000 description 1
- VFLDPWHFBUODDF-UHFFFAOYSA-N diferuloylmethane Natural products C1=C(O)C(OC)=CC(C=CC(=O)CC(=O)C=CC=2C=C(OC)C(O)=CC=2)=C1 VFLDPWHFBUODDF-UHFFFAOYSA-N 0.000 description 1
- 125000005594 diketone group Chemical group 0.000 description 1
- 125000000118 dimethyl group Chemical group [H]C([H])([H])* 0.000 description 1
- 235000011180 diphosphates Nutrition 0.000 description 1
- IRXRGVFLQOSHOH-UHFFFAOYSA-L dipotassium;oxalate Chemical compound [K+].[K+].[O-]C(=O)C([O-])=O IRXRGVFLQOSHOH-UHFFFAOYSA-L 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- CCIVGXIOQKPBKL-UHFFFAOYSA-M ethanesulfonate Chemical compound CCS([O-])(=O)=O CCIVGXIOQKPBKL-UHFFFAOYSA-M 0.000 description 1
- 229940015043 glyoxal Drugs 0.000 description 1
- 150000002391 heterocyclic compounds Chemical class 0.000 description 1
- IKDUDTNKRLTJSI-UHFFFAOYSA-N hydrazine monohydrate Substances O.NN IKDUDTNKRLTJSI-UHFFFAOYSA-N 0.000 description 1
- 150000002466 imines Chemical class 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 150000002576 ketones Chemical class 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- SHOJXDKTYKFBRD-UHFFFAOYSA-N mesityl oxide Natural products CC(C)=CC(C)=O SHOJXDKTYKFBRD-UHFFFAOYSA-N 0.000 description 1
- 239000002923 metal particle Substances 0.000 description 1
- OPUAWDUYWRUIIL-UHFFFAOYSA-N methanedisulfonic acid Chemical compound OS(=O)(=O)CS(O)(=O)=O OPUAWDUYWRUIIL-UHFFFAOYSA-N 0.000 description 1
- 229940098779 methanesulfonic acid Drugs 0.000 description 1
- NARPMWPOFWHFDX-UHFFFAOYSA-N methanetrisulfonic acid Chemical compound OS(=O)(=O)C(S(O)(=O)=O)S(O)(=O)=O NARPMWPOFWHFDX-UHFFFAOYSA-N 0.000 description 1
- WSFSSNUMVMOOMR-NJFSPNSNSA-N methanone Chemical compound O=[14CH2] WSFSSNUMVMOOMR-NJFSPNSNSA-N 0.000 description 1
- 229940095102 methyl benzoate Drugs 0.000 description 1
- WBYWAXJHAXSJNI-UHFFFAOYSA-N methyl p-hydroxycinnamate Natural products OC(=O)C=CC1=CC=CC=C1 WBYWAXJHAXSJNI-UHFFFAOYSA-N 0.000 description 1
- NQMRYBIKMRVZLB-UHFFFAOYSA-N methylamine hydrochloride Chemical compound [Cl-].[NH3+]C NQMRYBIKMRVZLB-UHFFFAOYSA-N 0.000 description 1
- LVHBHZANLOWSRM-UHFFFAOYSA-N methylenebutanedioic acid Natural products OC(=O)CC(=C)C(O)=O LVHBHZANLOWSRM-UHFFFAOYSA-N 0.000 description 1
- 235000019837 monoammonium phosphate Nutrition 0.000 description 1
- OMNKZBIFPJNNIO-UHFFFAOYSA-N n-(2-methyl-4-oxopentan-2-yl)prop-2-enamide Chemical compound CC(=O)CC(C)(C)NC(=O)C=C OMNKZBIFPJNNIO-UHFFFAOYSA-N 0.000 description 1
- VOAJIZWMDUSXFK-UHFFFAOYSA-N n-(chloromethyl)aniline Chemical compound ClCNC1=CC=CC=C1 VOAJIZWMDUSXFK-UHFFFAOYSA-N 0.000 description 1
- KUDPGZONDFORKU-UHFFFAOYSA-N n-chloroaniline Chemical compound ClNC1=CC=CC=C1 KUDPGZONDFORKU-UHFFFAOYSA-N 0.000 description 1
- DVEKCXOJTLDBFE-UHFFFAOYSA-N n-dodecyl-n,n-dimethylglycinate Chemical compound CCCCCCCCCCCC[N+](C)(C)CC([O-])=O DVEKCXOJTLDBFE-UHFFFAOYSA-N 0.000 description 1
- 229920005615 natural polymer Polymers 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 150000002825 nitriles Chemical class 0.000 description 1
- 150000002828 nitro derivatives Chemical class 0.000 description 1
- 239000002736 nonionic surfactant Substances 0.000 description 1
- 229940054441 o-phthalaldehyde Drugs 0.000 description 1
- JJVNINGBHGBWJH-UHFFFAOYSA-N ortho-vanillin Chemical compound COC1=CC=CC(C=O)=C1O JJVNINGBHGBWJH-UHFFFAOYSA-N 0.000 description 1
- 239000006174 pH buffer Substances 0.000 description 1
- RJQRCOMHVBLQIH-UHFFFAOYSA-M pentane-1-sulfonate Chemical compound CCCCCS([O-])(=O)=O RJQRCOMHVBLQIH-UHFFFAOYSA-M 0.000 description 1
- PNJWIWWMYCMZRO-UHFFFAOYSA-N pent‐4‐en‐2‐one Natural products CC(=O)CC=C PNJWIWWMYCMZRO-UHFFFAOYSA-N 0.000 description 1
- 235000019319 peptone Nutrition 0.000 description 1
- 150000002989 phenols Chemical class 0.000 description 1
- 229940044654 phenolsulfonic acid Drugs 0.000 description 1
- 125000000843 phenylene group Chemical group C1(=C(C=CC=C1)*)* 0.000 description 1
- HKOOXMFOFWEVGF-UHFFFAOYSA-N phenylhydrazine Chemical compound NNC1=CC=CC=C1 HKOOXMFOFWEVGF-UHFFFAOYSA-N 0.000 description 1
- ACVYVLVWPXVTIT-UHFFFAOYSA-N phosphinic acid Chemical compound O[PH2]=O ACVYVLVWPXVTIT-UHFFFAOYSA-N 0.000 description 1
- 150000003014 phosphoric acid esters Chemical class 0.000 description 1
- ZWLUXSQADUDCSB-UHFFFAOYSA-N phthalaldehyde Chemical compound O=CC1=CC=CC=C1C=O ZWLUXSQADUDCSB-UHFFFAOYSA-N 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229920001983 poloxamer Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 150000007519 polyprotic acids Polymers 0.000 description 1
- 239000004323 potassium nitrate Substances 0.000 description 1
- 235000010333 potassium nitrate Nutrition 0.000 description 1
- WSHYKIAQCMIPTB-UHFFFAOYSA-M potassium;2-oxo-3-(3-oxo-1-phenylbutyl)chromen-4-olate Chemical compound [K+].[O-]C=1C2=CC=CC=C2OC(=O)C=1C(CC(=O)C)C1=CC=CC=C1 WSHYKIAQCMIPTB-UHFFFAOYSA-M 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- MGNVWUDMMXZUDI-UHFFFAOYSA-N propane-1,3-disulfonic acid Chemical compound OS(=O)(=O)CCCS(O)(=O)=O MGNVWUDMMXZUDI-UHFFFAOYSA-N 0.000 description 1
- KCXFHTAICRTXLI-UHFFFAOYSA-N propane-1-sulfonic acid Chemical compound CCCS(O)(=O)=O KCXFHTAICRTXLI-UHFFFAOYSA-N 0.000 description 1
- 125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- JUJWROOIHBZHMG-UHFFFAOYSA-O pyridinium Chemical compound C1=CC=[NH+]C=C1 JUJWROOIHBZHMG-UHFFFAOYSA-O 0.000 description 1
- BWESROVQGZSBRX-UHFFFAOYSA-N pyrido[3,2-d]pyrimidine Chemical compound C1=NC=NC2=CC=CN=C21 BWESROVQGZSBRX-UHFFFAOYSA-N 0.000 description 1
- 229940079877 pyrogallol Drugs 0.000 description 1
- 229940048084 pyrophosphate Drugs 0.000 description 1
- 150000003248 quinolines Chemical class 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- ADZWSOLPGZMUMY-UHFFFAOYSA-M silver bromide Chemical compound [Ag]Br ADZWSOLPGZMUMY-UHFFFAOYSA-M 0.000 description 1
- 229940071575 silver citrate Drugs 0.000 description 1
- FJOLTQXXWSRAIX-UHFFFAOYSA-K silver phosphate Chemical compound [Ag+].[Ag+].[Ag+].[O-]P([O-])([O-])=O FJOLTQXXWSRAIX-UHFFFAOYSA-K 0.000 description 1
- 229910000161 silver phosphate Inorganic materials 0.000 description 1
- 229940019931 silver phosphate Drugs 0.000 description 1
- YPNVIBVEFVRZPJ-UHFFFAOYSA-L silver sulfate Chemical compound [Ag+].[Ag+].[O-]S([O-])(=O)=O YPNVIBVEFVRZPJ-UHFFFAOYSA-L 0.000 description 1
- 229910000367 silver sulfate Inorganic materials 0.000 description 1
- KZJPVUDYAMEDRM-UHFFFAOYSA-M silver;2,2,2-trifluoroacetate Chemical compound [Ag+].[O-]C(=O)C(F)(F)F KZJPVUDYAMEDRM-UHFFFAOYSA-M 0.000 description 1
- LMEWRZSPCQHBOB-UHFFFAOYSA-M silver;2-hydroxypropanoate Chemical compound [Ag+].CC(O)C([O-])=O LMEWRZSPCQHBOB-UHFFFAOYSA-M 0.000 description 1
- JUDUFOKGIZUSFP-UHFFFAOYSA-M silver;4-methylbenzenesulfonate Chemical compound [Ag+].CC1=CC=C(S([O-])(=O)=O)C=C1 JUDUFOKGIZUSFP-UHFFFAOYSA-M 0.000 description 1
- CLDWGXZGFUNWKB-UHFFFAOYSA-M silver;benzoate Chemical compound [Ag+].[O-]C(=O)C1=CC=CC=C1 CLDWGXZGFUNWKB-UHFFFAOYSA-M 0.000 description 1
- TZMGLOFLKLBEFW-UHFFFAOYSA-M silver;sulfamate Chemical compound [Ag+].NS([O-])(=O)=O TZMGLOFLKLBEFW-UHFFFAOYSA-M 0.000 description 1
- 239000001509 sodium citrate Substances 0.000 description 1
- NLJMYIDDQXHKNR-UHFFFAOYSA-K sodium citrate Chemical compound O.O.[Na+].[Na+].[Na+].[O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O NLJMYIDDQXHKNR-UHFFFAOYSA-K 0.000 description 1
- 235000009518 sodium iodide Nutrition 0.000 description 1
- 239000004317 sodium nitrate Substances 0.000 description 1
- 235000010344 sodium nitrate Nutrition 0.000 description 1
- AKHNMLFCWUSKQB-UHFFFAOYSA-L sodium thiosulfate Chemical compound [Na+].[Na+].[O-]S([O-])(=O)=S AKHNMLFCWUSKQB-UHFFFAOYSA-L 0.000 description 1
- 235000019345 sodium thiosulphate Nutrition 0.000 description 1
- 235000019832 sodium triphosphate Nutrition 0.000 description 1
- BATOPAZDIZEVQF-UHFFFAOYSA-N sorbic aldehyde Natural products CC=CC=CC=O BATOPAZDIZEVQF-UHFFFAOYSA-N 0.000 description 1
- 239000001384 succinic acid Substances 0.000 description 1
- 229950000244 sulfanilic acid Drugs 0.000 description 1
- AGGIJOLULBJGTQ-UHFFFAOYSA-N sulfoacetic acid Chemical compound OC(=O)CS(O)(=O)=O AGGIJOLULBJGTQ-UHFFFAOYSA-N 0.000 description 1
- DIORMHZUUKOISG-UHFFFAOYSA-N sulfoformic acid Chemical compound OC(=O)S(O)(=O)=O DIORMHZUUKOISG-UHFFFAOYSA-N 0.000 description 1
- 150000003460 sulfonic acids Chemical class 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- RYCLIXPGLDDLTM-UHFFFAOYSA-J tetrapotassium;phosphonato phosphate Chemical compound [K+].[K+].[K+].[K+].[O-]P([O-])(=O)OP([O-])([O-])=O RYCLIXPGLDDLTM-UHFFFAOYSA-J 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 150000004992 toluidines Chemical class 0.000 description 1
- BWHOZHOGCMHOBV-BQYQJAHWSA-N trans-benzylideneacetone Chemical compound CC(=O)\C=C\C1=CC=CC=C1 BWHOZHOGCMHOBV-BQYQJAHWSA-N 0.000 description 1
- DQFBYFPFKXHELB-VAWYXSNFSA-N trans-chalcone Chemical compound C=1C=CC=CC=1C(=O)\C=C\C1=CC=CC=C1 DQFBYFPFKXHELB-VAWYXSNFSA-N 0.000 description 1
- ITMCEJHCFYSIIV-UHFFFAOYSA-N triflic acid Chemical compound OS(=O)(=O)C(F)(F)F ITMCEJHCFYSIIV-UHFFFAOYSA-N 0.000 description 1
- UNXRWKVEANCORM-UHFFFAOYSA-I triphosphate(5-) Chemical compound [O-]P([O-])(=O)OP([O-])(=O)OP([O-])([O-])=O UNXRWKVEANCORM-UHFFFAOYSA-I 0.000 description 1
- PQGFRBOHUKOXQZ-FSCNPAMSSA-J tris[[(2R,3S,4R,5R)-2,3,4,5,6-pentahydroxyhexanoyl]oxy]stannyl (2R,3S,4R,5R)-2,3,4,5,6-pentahydroxyhexanoate Chemical compound [Sn+4].OC[C@@H](O)[C@@H](O)[C@H](O)[C@@H](O)C([O-])=O.OC[C@@H](O)[C@@H](O)[C@H](O)[C@@H](O)C([O-])=O.OC[C@@H](O)[C@@H](O)[C@H](O)[C@@H](O)C([O-])=O.OC[C@@H](O)[C@@H](O)[C@H](O)[C@@H](O)C([O-])=O PQGFRBOHUKOXQZ-FSCNPAMSSA-J 0.000 description 1
- QUTYHQJYVDNJJA-UHFFFAOYSA-K trisilver;2-hydroxypropane-1,2,3-tricarboxylate Chemical compound [Ag+].[Ag+].[Ag+].[O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O QUTYHQJYVDNJJA-UHFFFAOYSA-K 0.000 description 1
- 150000003672 ureas Chemical class 0.000 description 1
- WJUFSDZVCOTFON-UHFFFAOYSA-N veratraldehyde Chemical compound COC1=CC=C(C=O)C=C1OC WJUFSDZVCOTFON-UHFFFAOYSA-N 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
Landscapes
- Chemically Coating (AREA)
Description
【0001】[0001]
【発明の属する技術分野】この発明は、無電解錫−銀合
金めっき浴に関し、特に非シアン系の錯化剤によって安
定化させた浴から平滑で密着性の良好な析出物を得るた
めの非シアン系無電解錫−銀合金めっき浴に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electroless tin-silver alloy plating bath, and more particularly to a non-cyan complex plating agent for obtaining a deposit having a smooth and good adhesion from a bath stabilized with a non-cyan complexing agent. Cyan-based electroless tin-silver alloy plating bath.
【0002】[0002]
【従来の技術】錫−鉛を基本組成とするはんだによる接
合は、電子工業において不可欠の技術として広く行われ
ている。はんだ付けを迅速かつ確実に行うために、はん
だ付けしようとする部品に予めはんだ付け性の良好な皮
膜を施しておくことが行われるが、このはんだ付け性皮
膜として錫−鉛合金めっき皮膜が一般に利用されてい
る。しかしながら、近年、鉛の健康・環境への影響が懸
念され、有害な鉛を含む錫−鉛はんだを規制しようとす
る考えが急速に広まりつつある。錫−鉛はんだに代替で
きる鉛を含まないはんだはいまのところ確立されておら
ず、日米欧を中心として研究開発が行われているところ
である。錫−鉛はんだの代替としては、錫と銀、ビスマ
ス、銅、インジウム、アンチモン、亜鉛などの二元或い
は多元合金が候補として挙げられており、錫−銀合金も
錫−鉛はんだの有力な代替候補の一つである。代替はん
だに対応して、はんだ付け用のめっき皮膜もまた鉛を含
まないものに変更していく必要がある。錫−鉛合金めっ
き皮膜は、工業的に対象となる部品に応じて、電気めっ
きばかりでなく、無電解めっきによっても得られてい
る。錫−銀合金めっきに関しては、現在のところ無電解
めっきによって得る方法は報告が見当たらない。2. Description of the Related Art Joining with a solder containing tin-lead as a basic composition is widely performed as an indispensable technique in the electronic industry. In order to perform soldering quickly and reliably, it is necessary to apply a film with good solderability to the parts to be soldered in advance.As this solderability film, a tin-lead alloy plating film is generally used. It's being used. However, in recent years, there is concern about the effects of lead on health and the environment, and the idea of controlling tin-lead solder containing harmful lead is rapidly spreading. No lead-free solder that can replace tin-lead solder has been established so far, and research and development is being conducted mainly in Japan, the US, and Europe. Binary or multi-component alloys of tin and silver, bismuth, copper, indium, antimony, zinc, etc. are listed as possible alternatives to tin-lead solders, and tin-silver alloys are also promising alternatives to tin-lead solders. It is one of the candidates. In response to alternative solder, it is necessary to change the plating film for soldering to one that does not contain lead. The tin-lead alloy plating film is obtained not only by electroplating but also by electroless plating depending on the industrially targeted parts. As for tin-silver alloy plating, no report has been found so far on the method of obtaining by electroless plating.
【0003】[0003]
【発明が解決しようとする課題】電気めっきにおいて
は、1971年に松下はシアン−ピロリン酸混合浴(松
下:金属表面技術22,60(1971))から、ま
た、1983年に久保田らは非シアン浴としてピロリン
酸浴(久保田ら:金属表面技術34,37(198
3))から、錫−銀合金皮膜を得ている。これらは、銀
めっきの代替若しくは銀めっきの性能向上を主たる目的
に開発研究されたものであった。有害な鉛を含む錫−鉛
はんだを規制しようとする考えに対応して、代替はんだ
について検討が行われる中で、はんだ付け用のめっき皮
膜についても検討が始められ、錫−銀合金電気めっき浴
についても再度研究され始め、最近、伊勢らによってス
ズ酸カリ−硝酸銀浴(伊勢ら:表面技術協会 第93回
講演大会予講集205(1996))、また、新井らに
よってピロリン酸−ヨウ化物浴(新井ら:表面技術協会
第93回講演大会予講集195(1996))が報告
されている。銀は塩素イオンや硫酸イオンと不溶性の塩
を生成する。また、硫酸塩やスルホン酸塩など水溶性の
塩の形で溶解させても、塩素イオンや硫酸イオンのよう
なイオンが存在すると不溶性塩を生成するし、単純イオ
ンの形では不安定であるので、感光して黒色の金属銀を
生成しやすい。また、錫よりも電位が貴なため、錫との
共析においては、銀が優先析出し、銀含有率の高い合金
となってしまう。このような種々の問題のため、錫−銀
合金めっきを無電解めっきによって得る方法については
これまでに報告が見当たらない。In electroplating, in 1971, Matsushita used a cyan-pyrophosphoric acid mixed bath (Matsushita: Metal Surface Technology 22,60 (1971)), and in 1983, Kubota et al. Pyrophosphate bath as a bath (Kubota et al .: Metal Surface Technology 34, 37 (198
A tin-silver alloy coating is obtained from 3)). These were developed and researched mainly for the purpose of replacing silver plating or improving the performance of silver plating. Corresponding to the idea of controlling tin-lead solder containing harmful lead, as alternative solders are being investigated, the plating film for soldering is also being investigated, and tin-silver alloy electroplating bath Has begun to be researched again, and recently, potassium stannate-silver nitrate bath by Ise et al. (Ise et al .: Surface Technology Association 93rd Lecture Meeting Preliminary Collection 205 (1996)), and Arai et al. Pyrophosphate-iodide bath. (Arai et al .: The Surface Technology Association 93rd Lecture Meeting Preliminary Collection 195 (1996)) is reported. Silver forms insoluble salts with chloride and sulfate ions. In addition, even if dissolved in the form of a water-soluble salt such as sulfate or sulfonate, it will form an insoluble salt in the presence of ions such as chloride and sulfate, and is unstable in the form of simple ions. , It is easy to generate black metallic silver upon exposure to light. Further, since the potential is higher than that of tin, silver is preferentially precipitated in co-deposition with tin, resulting in an alloy having a high silver content. Due to such various problems, no report has been found so far on a method of obtaining tin-silver alloy plating by electroless plating.
【0004】[0004]
【課題を解決するための手段】本発明の発明者は、2価
の錫イオンと1価の銀イオンよりなる液に、銀イオンを
浴中に安定に溶解させるとともに銀の優先析出を抑制す
るための安定度定数の大きい非シアン錯化剤を加えるこ
とによって、皮膜中の銀含有率の低い無電解錫−銀合金
めっきを可能とし、環境・衛生・公害上問題のある錫−
鉛はんだを代替する上で不可欠の非鉛のはんだ付け性め
っき皮膜を得るための非シアンの無電解錫−銀合金めっ
き浴を提供し、代替はんだ問題を解決するに至った。Means for Solving the Problems The inventor of the present invention stably dissolves silver ions in a bath in a liquid consisting of divalent tin ions and monovalent silver ions, and suppresses preferential silver precipitation. The addition of a non-cyan complexing agent with a large stability constant enables the electroless tin-silver alloy plating with a low silver content in the film, which is a problem in terms of environment, hygiene and pollution.
By providing a non-cyan electroless tin-silver alloy plating bath for obtaining a non-lead solderable plating film which is indispensable for replacing lead solder, the present inventors have solved the alternative solder problem.
【0005】発明の概要
即ち、本発明は、
(I)2価の錫の非シアン化合物及び1価の銀の非シア
ン化合物、及び
(II)1価の銀化合物を液中に安定に保つに必要な量の
(a)チオ尿素及びアルキル基の炭素数が1〜3のモノ
−又はジ−アルキルチオ尿素、(b)チオ硫酸、(c)
ヨウ素化合物、(d)臭素化合物、(e)コハク酸イミ
ド、及び(f)メルカプトコハク酸から選ばれた化合物
又はその塩の1種又は2種以上を必須成分とする非シア
ン系錫−銀合金無電解めっき液を提供するものである。 SUMMARY OF THE INVENTION That is, the present invention, (I) a non-cyanide divalent tin and monovalent non-cyanide compounds of silver, and (II) to maintain the monovalent silver compounds stably in the liquid A necessary amount of (a) thiourea and a mono- or di-alkyl thiourea having an alkyl group having 1 to 3 carbon atoms, (b) thiosulfate, (c)
Non-cyanide tin-silver alloy containing one or more compounds selected from iodine compounds, (d) bromine compounds, (e) succinimide, and (f) mercaptosuccinic acid or salts thereof as essential components. An electroless plating solution is provided.
【0006】[0006]
【発明の実施の形態】本発明の非シアン系無電解錫−銀
合金めっき液において、2価の錫化合物としては、公知
のものがいずれも使用でき、例えば、酸化錫、硫酸錫、
塩化錫、ホウフッ化錫、ケイフッ化錫、スルファミン酸
錫、シュウ酸錫、酒石酸錫、グルコン酸錫、スルホコハ
ク酸錫、ピロリン酸錫、1−ヒドロキシエタン−1,1
−ビスホスホン酸錫、トリポリリン酸錫、又は下記の一
般式(i)及び(ii)で表される脂肪族スルホン酸の錫
塩、或いは下記の一般式(iii) で表される芳香族スルホ
ン酸の錫塩などを単独又は適宜混合して使用できる。BEST MODE FOR CARRYING OUT THE INVENTION In the non-cyan type electroless tin-silver alloy plating solution of the present invention, any known divalent tin compound can be used, and examples thereof include tin oxide, tin sulfate and tin sulfate.
Tin chloride, tin borofluoride, tin fluorosilicate, tin sulfamate, tin oxalate, tin tartrate, tin gluconate, tin sulfosuccinate, tin pyrophosphate, 1-hydroxyethane-1,1
-Tin bisphosphonate, tin tripolyphosphate, or a tin salt of an aliphatic sulfonic acid represented by the following general formulas (i) and (ii), or an aromatic sulfonic acid represented by the following general formula (iii) A tin salt or the like can be used alone or in an appropriate mixture.
【0007】(i)一般式
(X1)n −R−SO3 H
[ここで、RはC1 〜C5 のアルキル基を表し、X1 は
水素、水酸基、アルキル基、アリール基、アルキルアリ
ール基、カルボキシル基又はスルホン酸基を表わし、そ
してアルキル基の任意の位置にあってよく、nは0〜3
の整数である。]及び(ii)一般式(I) General formula (X 1 ) n —R—SO 3 H [wherein R represents a C 1 to C 5 alkyl group, X 1 is hydrogen, a hydroxyl group, an alkyl group, an aryl group or an alkyl group. Represents an aryl group, a carboxyl group or a sulfonic acid group, and may be at any position of the alkyl group, n is 0 to 3
Is an integer. ] And (ii) general formula
【化1】
[ここで、R1 はC1 〜C3 のアルキル基を表わし、R
2 はC1 〜C3 のアルキレン基を表わし、水酸基はアル
キレン基の任意の位置にあってよく、Xは塩素及びフッ
素のハロゲンを表わし、アルキル基及びアルキレン基の
水素と置換された塩素又はフッ素の置換数は1からアル
キル基又はアルキレン基に配位したすべての水素が飽和
置換されたものまでを表わし、置換されたハロゲン種は
1種類又は2種類であり、塩素又はフッ素の置換基は任
意の位置にあってよい。Yは水素又はスルホン酸基を表
わし、Yで表されるスルホン酸基の置換数は0から2の
範囲にある。]で表わされる脂肪族スルホン酸の錫塩、
(iii) 一般式[Chemical 1] [Here, R 1 represents a C 1 -C 3 alkyl group, and R 1
2 represents a C 1 -C 3 alkylene group, the hydroxyl group may be located at any position of the alkylene group, X represents halogen of chlorine and fluorine, and chlorine or fluorine substituted with hydrogen of the alkyl group and alkylene group. The number of substitutions of 1 to 1 is saturated substitution of all hydrogens coordinated to an alkyl group or an alkylene group, the number of substituted halogen species is one or two, and the chlorine or fluorine substituent is optional. May be in the position. Y represents hydrogen or a sulfonic acid group, and the substitution number of the sulfonic acid group represented by Y is in the range of 0 to 2. ] The tin salt of an aliphatic sulfonic acid represented by
(iii) general formula
【化2】
[ここで、X2 は水酸基、アルキル基、アリール基、ア
ルキルアリール基、アルデヒド基、カルボキシル基、ニ
トロ基、メルカプト基、スルホン酸基又はアミノ基を表
わし、或いは2個のX2 はベンゼン環と一緒になってナ
フタリン環を形成でき、mは0〜3の整数である。]で
表わされる芳香族スルホン酸の錫塩。[Chemical 2] [Wherein X 2 represents a hydroxyl group, an alkyl group, an aryl group, an alkylaryl group, an aldehyde group, a carboxyl group, a nitro group, a mercapto group, a sulfonic acid group or an amino group, or two X 2 are a benzene ring. Together, they can form a naphthalene ring, and m is an integer of 0-3. ] The tin salt of aromatic sulfonic acid represented by these.
【0008】これらの一般式(i)〜(iii) の有機スル
ホン酸の錫塩の例は、メタンスルホン酸、メタンジスル
ホン酸、メタントリスルホン酸、トリフルオロメタンス
ルホン酸、エタンスルホン酸、プロパンスルホン酸、2
−プロパンスルホン酸、ブタンスルホン酸、2−ブタン
スルホン酸、ペンタンスルホン酸、2−ヒドロキシエタ
ン−1−スルホン酸、2−ヒドロキシプロパン−1−ス
ルホン酸、2−ヒドロキシブタン−1−スルホン酸、2
−ヒドロキシペンタンスルホン酸、1−カルボキシエタ
ンスルホン酸、1,3−プロパンジスルホン酸、アリー
ルスルホン酸、2−スルホ酢酸、2−又は3−スルホプ
ロピオン酸、スルホこはく酸、スルホマレイン酸、スル
ホフマル酸、ベンゼンスルホン酸、トルエンスルホン
酸、キシレンスルホン酸、ニトロベンゼンスルホン酸、
スルホ安息香酸、スルホサルチル酸、ベンズアルデヒド
スルホン酸、フェノールスルホン酸、フェノール−2,
4−ジスルホン酸などの錫塩である。特に、メタンスル
ホン酸錫、メタンジスルホン酸錫、スルホコハク酸錫、
トリフルオロメタンスルホン酸錫、p−トルエンスルホ
ン酸錫、スルホ安息香酸錫が好ましい。Examples of these tin salts of organic sulfonic acids of the general formulas (i) to (iii) are methanesulfonic acid, methanedisulfonic acid, methanetrisulfonic acid, trifluoromethanesulfonic acid, ethanesulfonic acid, propanesulfonic acid. Two
-Propanesulfonic acid, butanesulfonic acid, 2-butanesulfonic acid, pentanesulfonic acid, 2-hydroxyethane-1-sulfonic acid, 2-hydroxypropane-1-sulfonic acid, 2-hydroxybutane-1-sulfonic acid, 2
-Hydroxypentanesulfonic acid, 1-carboxyethanesulfonic acid, 1,3-propanedisulfonic acid, arylsulfonic acid, 2-sulfoacetic acid, 2- or 3-sulfopropionic acid, sulfosuccinic acid, sulfomaleic acid, sulfofumaric acid, Benzenesulfonic acid, toluenesulfonic acid, xylenesulfonic acid, nitrobenzenesulfonic acid,
Sulfobenzoic acid, sulfosalicylic acid, benzaldehyde sulfonic acid, phenol sulfonic acid, phenol-2,
It is a tin salt such as 4-disulfonic acid. In particular, tin methanesulfonate, tin methanedisulfonate, tin sulfosuccinate,
Tin trifluoromethanesulfonate, tin p-toluenesulfonate and tin sulfobenzoate are preferred.
【0009】錫化合物の使用量は、上下限ともに特に限
定されるものではないが、濃度の低下とともに析出速度
も低下するので概ね1g/L程度は必要であり、極端な
高濃度は浴の安定性を低下させるので、概ね50g/L
を越えることは好ましくない。従って、錫分として1〜
50g/L程度が適当であり、好ましくは5〜30g/
L程度とする。The amount of the tin compound used is not particularly limited in both the upper and lower limits, but since the precipitation rate decreases as the concentration decreases, approximately 1 g / L is required, and an extremely high concentration will stabilize the bath. 50g / L because it reduces the
It is not preferable to exceed. Therefore, the tin content is 1 to
About 50 g / L is suitable, and preferably 5 to 30 g / L.
It is about L.
【0010】1価の銀化合物としては、公知のものがい
ずれも使用でき、例えば、酸化銀、硝酸銀、硫酸銀、塩
化銀、臭化銀、ヨウ化銀、安息香酸銀、スルファミン酸
銀、クエン酸銀、乳酸銀、メルカプトコハク酸銀、リン
酸銀、トリフルオロ酢酸銀、ピロリン酸銀、1−ヒドロ
キシエタン−1,1−ビスホスホン酸銀、又は下記の一
般式(i)及び(ii)で表される脂肪族スルホン酸の銀
塩、或いは下記の一般式(iii) で表される芳香族スルホ
ン酸の銀塩などを単独又は適宜混合して使用できる。銀
化合物の使用量は、上下限ともに特に限定されるもので
はないが、極端に低濃度の場合には浴の管理が困難とな
るので、概ね0.05g/L程度は必要であり、極端な
高濃度は析出物の銀含有率が高くなるので、概ね10g
/Lを越えることは好ましくない。従って、銀分として
0.05〜10g/L程度が適当であり、好ましくは
0.1〜5g/L程度とする。ただし、銀含有量の多い
錫−銀合金めっき皮膜を得ようとする場合には、これに
限定されるものではなく、概ね50g/L程度の銀濃度
とすることができる。As the monovalent silver compound, any of known compounds can be used, and examples thereof include silver oxide, silver nitrate, silver sulfate, silver chloride, silver bromide, silver iodide, silver benzoate, silver sulfamate and citric acid. Acid silver, silver lactate, silver mercaptosuccinate, silver phosphate, silver trifluoroacetate, silver pyrophosphate, silver 1-hydroxyethane-1,1-bisphosphonate, or the following general formulas (i) and (ii) The silver salt of an aliphatic sulfonic acid represented by the above, or the silver salt of an aromatic sulfonic acid represented by the following general formula (iii) and the like can be used alone or in an appropriate mixture. The upper and lower limits of the amount of silver compound used are not particularly limited, but when the concentration is extremely low, it is difficult to control the bath, so about 0.05 g / L is necessary, and A high concentration will increase the silver content of the precipitate, so approximately 10 g
It is not preferable to exceed / L. Therefore, the silver content is suitably about 0.05 to 10 g / L, preferably about 0.1 to 5 g / L. However, when a tin-silver alloy plating film having a high silver content is to be obtained, the silver concentration is not limited to this, and the silver concentration can be about 50 g / L.
【0011】(i)一般式
(X1)n −R−SO3 H
[ここで、RはC1 〜C5 のアルキル基を表わし、X1
は水素、水酸基、アルキル基、アリール基、アルキルア
リール基、カルボキシル基又はスルホン酸基を表わし、
そしてアルキル基の任意の位置にあってよく、nは0〜
3の整数である。]及び(ii)一般式(I) General formula (X 1 ) n —R—SO 3 H [wherein R represents a C 1 to C 5 alkyl group, X 1
Represents hydrogen, a hydroxyl group, an alkyl group, an aryl group, an alkylaryl group, a carboxyl group or a sulfonic acid group,
It may be at any position of the alkyl group, and n is 0 to
It is an integer of 3. ] And (ii) general formula
【化3】
[ここで、R1 はC1 〜C3 のアルキル基を表わし、R
2 はC1 〜C3 のアルキレン基を表わし、水酸基はアル
キレン基の任意の位置にあってよく、Xは塩素及びフッ
素のハロゲンを表わし、アルキル基及びアルキレン基の
水素と置換された塩素又はフッ素の置換数は1からアル
キル基又はアルキレン基に配位したすべての水素が飽和
置換されたものまでを表わし、置換されたハロゲン種は
1種類又は2種類であり、塩素又はフッ素の置換基は任
意の位置にあってよい。Yは水素又はスルホン酸基を表
わし、Yで表されるスルホン酸基の置換数は0から2の
範囲にある。]で表わされる脂肪族スルホン酸の銀塩、
(iii) 一般式[Chemical 3] [Here, R 1 represents a C 1 -C 3 alkyl group, and R 1
2 represents a C 1 -C 3 alkylene group, the hydroxyl group may be located at any position of the alkylene group, X represents halogen of chlorine and fluorine, and chlorine or fluorine substituted with hydrogen of the alkyl group and alkylene group. The number of substitutions of 1 to 1 is saturated substitution of all hydrogens coordinated to an alkyl group or an alkylene group, the number of substituted halogen species is one or two, and the chlorine or fluorine substituent is optional. May be in the position. Y represents hydrogen or a sulfonic acid group, and the substitution number of the sulfonic acid group represented by Y is in the range of 0 to 2. ] A silver salt of an aliphatic sulfonic acid represented by
(iii) general formula
【化4】
[ここで、X2 は水酸基、アルキル基、アリール基、ア
ルキルアリール基、アルデヒド基、カルボキシル基、ニ
トロ基、メルカプト基、スルホン酸基又はアミノ基を表
わし、或いは2個のX2 はベンゼン環と一緒になってナ
フタリン環を形成でき、mは0〜3の整数である。]で
表わされる芳香族スルホン酸の錫塩。これらの有機スル
ホン酸銀塩のスルホン酸の例は、錫塩について説明した
ものと同一であってよい。特に、メタンスルホン酸銀、
メタンジスルホン酸銀、スルホコハク酸銀、トリフルオ
ロメタンスルホン酸銀、p−トルエンスルホン酸銀、ス
ルホ安息香酸銀が好ましい。[Chemical 4] [Wherein X 2 represents a hydroxyl group, an alkyl group, an aryl group, an alkylaryl group, an aldehyde group, a carboxyl group, a nitro group, a mercapto group, a sulfonic acid group or an amino group, or two X 2 are a benzene ring. Together, they can form a naphthalene ring, and m is an integer of 0-3. ] The tin salt of aromatic sulfonic acid represented by these. Examples of the sulfonic acid of these organic sulfonic acid silver salts may be the same as those described for the tin salt. In particular, silver methanesulfonate,
Silver methanedisulfonate, silver sulfosuccinate, silver trifluoromethanesulfonate, silver p-toluenesulfonate and silver sulfobenzoate are preferred.
【0012】1価の銀化合物を液中に安定に保つために
添加される、チオ尿素又はその誘導体又はチオ硫酸(及
びその塩類)或いはヨウ素化合物及び臭素化合物には公
知の化合物が使用でき、チオ尿素誘導体には、ジメチル
チオ尿素など、ヨウ素化合物には、ヨウ化カリウムやヨ
ウ化ナトリウムなどがあるが、ヨウ化銀を用いることも
できる。それらの使用量はめっき浴中の銀濃度によって
加減されるべきものであり、上下限ともに限定されるべ
きものではないが、銀に対する錯化剤比率の低下ととも
に浴が不安定となるため、概ね銀に対して5倍モル程度
は必要であり、錯化剤濃度が極端に高い場合には、浴の
粘度が高くなるなどの現象が現れるために、概ね銀に対
して400倍モル程度に抑えるべきである。従って、銀
の錯化剤の使用量は、モル比率で、銀イオンに対して5
〜400倍量を添加し、好ましくは10〜300倍量を
添加する。なお、技術上は、チオシアン酸或いはその塩
類を上記錯化剤の代替としてめっきを行うことはできる
が、公害防止・環境保全上好ましくない。Known compounds can be used as thiourea or its derivative or thiosulfuric acid (and its salts) or iodine compound and bromine compound, which are added to keep the monovalent silver compound stable in the liquid. The urea derivative includes dimethylthiourea, and the iodine compound includes potassium iodide and sodium iodide, but silver iodide can also be used. The amount to be used should be adjusted depending on the silver concentration in the plating bath, and the upper and lower limits should not be limited, but since the bath becomes unstable as the ratio of complexing agent to silver decreases, it is generally It is necessary to have about 5 times the molar amount of silver, and when the concentration of the complexing agent is extremely high, phenomena such as an increase in the viscosity of the bath appear. Should be. Therefore, the amount of the silver complexing agent used is 5 per mol of silver ion.
~ 400 times the amount is added, preferably 10-300 times the amount. Although it is technically possible to perform plating by using thiocyanic acid or a salt thereof as a substitute for the complexing agent, it is not preferable in terms of pollution prevention and environmental protection.
【0013】さらに本発明のめっき浴には、2価の錫化
合物を水溶液中に安定に保つために下記の(a)〜
(j)より選ばれた錯化剤の1種若しくは2種以上を添
加することができる。
(a)アルキル基の炭素数が0〜3の脂肪族ジカルボン
酸、(b)アルキル基の炭素数が1〜2の脂肪族ヒドロ
キシモノカルボン酸、(c)アルキル基の炭素数が1〜
3の脂肪族ヒドロキシポリカルボン酸、(d)単糖類及
びその一部が酸化されたポリヒドロキシカルボン酸並び
にそれらの環状エステル化合物、(e)アルキル基の炭
素数が1〜4の脂肪族モノ−若しくはジ−アミノ、モノ
−若しくはジ−カルボン酸、(f)アルキル基の炭素数
が2〜3の脂肪族モノメルカプトモノカルボン酸及び脂
肪族モノメルカプトジカルボン酸及び脂肪族モノメルカ
プトモノアミノモノカルボン酸、(g)アルキル基の炭
素数が2〜3の脂肪族モノスルホモノカルボン酸及び脂
肪族モノスルホジカルボン酸、(h)下記のアミンカル
ボン酸:エチレンジアミンテトラ酢酸(EDTA)、イ
ミノジ酢酸(IDA)、ニトリロトリ酢酸(NTA)、
ジエチレントリアミンペンタ酢酸(DTPA)、トリエ
チレンテトラミンヘキサ酢酸(TTHA)、エチレンジ
オキシビス(エチルアミン)−N,N,N’,N’−テ
トラ酢酸、グリコールエチレンジアミンテトラ酢酸(G
EDTA)及びN−ヒドロキシエチルエチレンジアミン
テトラ酢酸(HEEDTA)から選ばれるもの、(i)
縮合リン酸、及び(j)アルカンの炭素数が1〜3のヒ
ドロキシアルカンビスホスホン酸。Further, in the plating bath of the present invention, in order to keep the divalent tin compound stable in the aqueous solution, the following (a) to
One or more of the complexing agents selected from (j) can be added. (A) an aliphatic dicarboxylic acid having 0 to 3 carbon atoms in the alkyl group, (b) an aliphatic hydroxymonocarboxylic acid having 1 to 2 carbon atoms in the alkyl group, and (c) 1 to 3 carbon atoms in the alkyl group
3 aliphatic hydroxypolycarboxylic acids, (d) monosaccharides and partially oxidized polyhydroxycarboxylic acids and their cyclic ester compounds, (e) aliphatic mono-alkyl groups having 1 to 4 carbon atoms Alternatively, di-amino, mono- or di-carboxylic acid, (f) an aliphatic monomercaptomonocarboxylic acid having an alkyl group having 2 to 3 carbon atoms, an aliphatic monomercaptodicarboxylic acid, and an aliphatic monomercaptomonoaminomonocarboxylic acid , (G) an aliphatic monosulfomonocarboxylic acid and an aliphatic monosulfodicarboxylic acid having 2 to 3 carbon atoms in the alkyl group, (h) the following aminecarboxylic acid: ethylenediaminetetraacetic acid (EDTA), iminodiacetic acid (IDA) , Nitrilotriacetic acid (NTA),
Diethylenetriamine pentaacetic acid (DTPA), triethylenetetramine hexaacetic acid (TTHA), ethylenedioxybis (ethylamine) -N, N, N ', N'-tetraacetic acid, glycol ethylenediaminetetraacetic acid (G
EDTA) and N-hydroxyethylethylenediaminetetraacetic acid (HEEDTA), (i)
Condensed phosphoric acid and (j) hydroxyalkane bisphosphonic acid having 1 to 3 carbon atoms of alkane.
【0014】錯化剤(a)〜(j)のそれぞれの中で好
適なものを例示すれば、(a)脂肪族ジカルボン酸とし
ては、蓚酸、マロン酸、コハク酸が、(b)脂肪族ヒド
ロキシモノカルボン酸としては、グリコール酸が、
(c)脂肪族ヒドロキシポリカルボン酸としては、酒石
酸、クエン酸が、(d)単糖類及びその一部が酸化され
たポリヒドロキシカルボン酸並びにそれらの環状エステ
ル化合物としては、アスコルビン酸、グルコン酸、グル
コヘプトン酸、δ−グルコノラクトンなどが、(e)脂
肪族アミノカルボン酸としては、グリシンが、(f)脂
肪族メルカプトカルボン酸としては、メルカプトコハク
酸が、(g)脂肪族スルホカルボン酸の例としては、ス
ルホコハク酸が、(h)アミンカルボン酸としては、エ
チレンジアミンテトラ酢酸、イミノジ酢酸、ニトリロト
リ酢酸が、(i)縮合リン酸としては、ピロリン酸、ト
リポリリン酸が、(j)ヒドロキシアルカンビスホスホ
ン酸としては、1−ヒドロキシエタン−1,1−ビスホ
スホン酸が挙げられる。それらの使用量は、錯化剤の種
類に応じて適宜選択されるが、使用量はめっき浴中の錫
濃度及びpHによって加減されるべきものであり、上下
限ともに特に限定さるべきものではないが、錫に対する
錯化剤比率の低下とともに浴が不安定となるため、概ね
錫に等しいモル数は必要であり、錯化剤濃度が極端に高
い場合には、浴の粘度が高くなるなどの現象が現れるた
めに、概ね錫に対して50倍モル程度に抑えるべきであ
る。従って、錫の錯化剤の使用量は、モル比率で、錫イ
オンに対して1〜50倍量を添加し、好ましくは2〜3
0倍量を添加する。Of the complexing agents (a) to (j), preferred examples are (a) aliphatic dicarboxylic acid: oxalic acid, malonic acid and succinic acid, and (b) aliphatic dicarboxylic acid. As the hydroxymonocarboxylic acid, glycolic acid,
(C) Aliphatic hydroxypolycarboxylic acids include tartaric acid and citric acid, (d) monosaccharides and partially oxidized polyhydroxycarboxylic acids, and cyclic ester compounds thereof include ascorbic acid and gluconic acid. Glucoheptonic acid, δ-gluconolactone, etc., (e) glycine as the aliphatic aminocarboxylic acid, (f) mercaptosuccinic acid as the aliphatic mercaptocarboxylic acid, (g) aliphatic sulfocarboxylic acid For example, sulfosuccinic acid, (h) aminecarboxylic acid, ethylenediaminetetraacetic acid, iminodiacetic acid, nitrilotriacetic acid, (i) condensed phosphoric acid, pyrophosphoric acid, tripolyphosphoric acid, (j) hydroxyalkanebisphosphone Examples of the acid include 1-hydroxyethane-1,1-bisphosphonic acid. That. The amount used is appropriately selected according to the type of the complexing agent, but the amount used should be adjusted depending on the tin concentration and pH in the plating bath, and neither upper nor lower limit is particularly limited. However, since the bath becomes unstable with a decrease in the ratio of the complexing agent to tin, a molar number approximately equal to that of tin is necessary. When the concentration of the complexing agent is extremely high, the viscosity of the bath becomes high. Since a phenomenon appears, it should be suppressed to about 50 times the mole of tin. Therefore, the amount of the tin complexing agent used is 1 to 50 times the molar amount of tin ions, preferably 2 to 3 times.
Add 0 volumes.
【0015】また、使用されるpHは、それぞれの錯化
剤の種類に応じて適宜選択されるが、代表的な錯化剤の
好ましいpHの領域を例示すれば、下記のとおりであ
る。
蓚酸 :pH5〜5.5
マロン酸 :pH1〜2.5
コハク酸 :pH<1〜2
グリコール酸 :pH<1〜1
クエン酸 :pH1〜6
酒石酸 :pH1〜9
グルコン酸 :pH1〜14<
δ−グルコノラクトン :pH1〜13
グリシン :pH1.5〜2.5
エチレンジアミンテトラ酢酸 :pH<1〜7
ピロリン酸 :pH<1〜9
トリポリリン酸 :pH<1〜8
1-ヒドロキシエタン-1,1−ジホスホン酸 :pH1〜10The pH to be used is appropriately selected according to the type of each complexing agent, and the preferred pH range of a typical complexing agent is as follows. Oxalic acid: pH 5 to 5.5 Malonic acid: pH 1 to 2.5 Succinic acid: pH <1 to 2 Glycolic acid: pH <1 to 1 Citric acid: pH 1 to 6 Tartaric acid: pH 1 to 9 Gluconic acid: pH 1 to 14 <δ -Gluconolactone: pH 1-13 Glycine: pH 1.5-2.5 Ethylenediaminetetraacetic acid: pH <1-7 Pyrophosphoric acid: pH <1-9 Tripolyphosphoric acid: pH <1-8 1-Hydroxyethane-1,1 -Diphosphonic acid: pH 1-10
【0016】本発明のめっき浴では、析出するめっき金
属粒子を微細化し、平滑なめっき皮膜を得るために、界
面活性剤を添加することができる。界面活性剤は公知の
界面活性剤を1種若しくは2種以上添加して使用でき
る。添加される界面活性剤は、非イオン界面活性剤、陽
イオン界面活性剤、両性界面活性剤、陰イオン界面活性
剤があり、具体的には、ポリオキシエチレンノニルフェ
ニルエーテル、ポリオキシエチレンラウリルフェニルエ
ーテル等のポリオキシアルキレンアルキルエーテル系界
面活性剤、ポリオキシエチレンステアリルアミドエーテ
ル等のポリオキシアルキレンアルキルアミドエーテル系
界面活性剤、ポリオキシエチレンオレイルアミンエーテ
ル等のポリオキシアルキレンアルキルアミンエーテル系
界面活性剤、ポリオキシエチレンプロピレンブロックポ
リマー界面活性剤、アルキルアミン、アルキルトリメチ
ルアミン、アルキルジメチルアミン、アルキルピリジニ
ウム、アルキルオキサゾリン、アルキルイミダゾリン、
アルキルアミノトリアゾール、アミノジオキサンなどの
塩類などが挙げられる。In the plating bath of the present invention, a surfactant can be added in order to obtain finer plated metal particles and a smooth plated film. As the surfactant, one or more known surfactants can be added and used. The surfactants added include nonionic surfactants, cationic surfactants, amphoteric surfactants, and anionic surfactants, and specifically, polyoxyethylene nonylphenyl ether, polyoxyethylene laurylphenyl. Polyoxyalkylene alkyl ether-based surfactants such as ethers, polyoxyalkylene alkyl amide ether-based surfactants such as polyoxyethylene stearyl amide ethers, polyoxyalkylene alkyl amine ether-based surfactants such as polyoxyethylene oleyl amine ethers, Polyoxyethylene propylene block polymer surfactant, alkylamine, alkyltrimethylamine, alkyldimethylamine, alkylpyridinium, alkyloxazoline, alkylimidazoline,
Examples thereof include salts such as alkylaminotriazole and aminodioxane.
【0017】それらの中で好適なものをさらに具体的に
挙げれば、(A)一般式:More specifically, preferred ones among them are: (A) general formula:
【化5】
[ここで、Rはアルキル基(C1 〜C25)を表わし、M
は水素又はアルカリ金属を表わす。]で表わされるナフ
タレンスルホン酸系界面活性剤、例えば、アルキル(プ
ロピル、ブチル・・・)ナフタレンスルホン酸のナトリ
ウム塩等、(B)一般式:
HO−(A)m −(B)n −H
[ここで、A及びBは−CH2 −CH2 −O−又は−C
H2 −C(CH3 )H−O−を表わし、それらの存在位
置は限定されず、m及びnは0〜40の整数を表わす。
ただし、m及びnの和は1から40の範囲内にある。]
で表わされるポリオキシアルキレン系界面活性剤、例え
ば、エチレングリコール、ジ−(トリ−、テトラ−、オ
クタ・・・)エチレングリコールのようなポリエチレン
グリコール、プロピレングリコール、ジ−(トリ−、テ
トラ−、オクタ・・・)プロピレングリコールのような
ポリプロピレングリコール、エチレンオキサイドとプロ
ピレンオキサイドとの縮合物等、(C)一般式:
R−D−(A)m −(B)n −H
[ここで、A及びBは−CH2 −CH2 −O−又は−C
H2 −C(CH3 )H−O−を表わし、それらの存在位
置は限定されず、m及びnは、0〜40の整数を表わ
す。ただし、m及びnの和は1から40の範囲内にあ
る。Rは炭素数1〜22のアルキル基又は炭素数1〜2
5の脂肪酸でエステル化したソルビタンを表わす。D
は、−O−又は−COO−を表わす。]で表わされるポ
リオキシアルキレンアルキルエーテル(又はエステル)
系界面活性剤、例えば、上記の(B)のポリエチレング
リコール、ポリプロピレングリコール等のアルキル(例
えば、オレイル、セチル、ステアリル、ラウリル・・
・)エーテル若しくは脂肪酸エステル、ソルビタンエス
テル等、(D)一般式:
R−O−(A)m −(B)n −H
[ここで、A及びBは−CH2 −CH2 −O−又は−C
H2 −C(CH3 )H−O−を表わし、それらの存在位
置は限定されず、m及びnは、0〜40の整数を表わ
す。ただし、m及びnの和は1から40の範囲内にあ
る。Rはフェニル基又はアルキル基(C1 〜C25)で置
換したフェニル基を表わす。]で表わされるポリオキシ
アルキレンフェニル(又はアルキルフェニル)エーテル
系界面活性剤、例えば、上記の(B)のポリエチレング
リコール、ポリプロピレングリコール等のフェニルエー
テル又はアルキル置換フェニルエーテル等、(E)一般
式:[Chemical 5] [Here, R represents an alkyl group (C 1 -C 25 ),
Represents hydrogen or an alkali metal. ] A naphthalene sulfonic acid-based surfactant represented by, for example, sodium salt of alkyl (propyl, butyl ...) Naphthalene sulfonic acid, etc. (B) General formula: HO- (A) m- (B) n -H [Where A and B are —CH 2 —CH 2 —O— or —C
H 2 -C (CH 3) H -O- and represented, their existing position is not limited, m and n is an integer of 0 to 40.
However, the sum of m and n is in the range of 1 to 40. ]
A polyoxyalkylene-based surfactant represented by, for example, ethylene glycol, polyethylene glycol such as di- (tri-, tetra-, octa ...) Ethylene glycol, propylene glycol, di- (tri-, tetra-, Octa ...) Polypropylene glycol such as propylene glycol, condensate of ethylene oxide and propylene oxide, and the like, (C) General formula: RD- (A) m- (B) n -H [where A and B is -CH 2 -CH 2 -O- or -C
H 2 —C (CH 3 ) H—O— is represented, and the position where they are present is not limited, and m and n represent an integer of 0-40. However, the sum of m and n is in the range of 1 to 40. R is an alkyl group having 1 to 22 carbon atoms or 1 to 2 carbon atoms
Represents sorbitan esterified with the fatty acid of 5. D
Represents -O- or -COO-. ] Polyoxyalkylene alkyl ether (or ester) represented by
-Based surfactants such as alkyl (eg oleyl, cetyl, stearyl, lauryl ...
·) Ethers or fatty acid esters, sorbitan esters and the like, (D) the general formula: R-O- (A) m - (B) n -H [ wherein, A and B are -CH 2 -CH 2 -O- or -C
H 2 —C (CH 3 ) H—O— is represented, and the position where they are present is not limited, and m and n represent an integer of 0-40. However, the sum of m and n is in the range of 1 to 40. R represents a phenyl group or a phenyl group substituted with an alkyl group (C 1 -C 25 ). ] A polyoxyalkylene phenyl (or alkyl phenyl) ether-based surfactant represented by, for example, a phenyl ether such as polyethylene glycol or polypropylene glycol of the above (B) or an alkyl-substituted phenyl ether, etc., (E) a general formula:
【化6】
[ここで、A及びBは−CH2 −CH2 −O−又は−C
H2 −C(CH3 )H−O−を表わし、それらの存在位
置は限定されず、m及びnは0〜40の整数を表わす。
ただし、m及びnの和は1から40の範囲内にある。R
は水素又はアルキル基(C1 〜C25)を表わす。]で表
わされるポリオキシアルキレンナフチル(又はアルキル
ナフチル)エーテル系界面活性剤、例えば、ナフトール
又はアルキルナフトールのエチレンオキサイド及び(又
は)プロピレンオキサイド付加物等、(F)一般式:[Chemical 6] [Where A and B are —CH 2 —CH 2 —O— or —C
H 2 -C (CH 3) H -O- and represented, their existing position is not limited, m and n is an integer of 0 to 40.
However, the sum of m and n is in the range of 1 to 40. R
Represents hydrogen or an alkyl group (C 1 -C 25 ). ] A polyoxyalkylene naphthyl (or alkyl naphthyl) ether-based surfactant represented by, for example, ethylene oxide and / or propylene oxide adduct of naphthol or alkyl naphthol, etc. (F) General formula:
【化7】
[ここで、A及びBは−CH2 −CH2 −O−又は−C
H2 −C(CH3 )H−O−を表わし、それらの存在位
置は限定されず、m及びnは0〜40の整数を表わす。
ただし、m及びnの和は1から40の範囲内にある。R
a 、Rb 、Rc は、それぞれ独立に水素、フェニル基、
アルキル基(C1 〜C4 )又は−CH(CH3 )−φを
表わす。ただし、少なくとも1つはフェニル基若しくは
−CH(CH3 )−φであるものとする。]で表わされ
るポリオキシアルキレンスチレン化フェニルエーテル系
界面活性剤、例えば、スチレン化フェノール又はα−メ
チルスチレン化フェノールのエチレンオキサイド及び
(又は)プロピレンオキサイド付加物等、(G)一般
式:[Chemical 7] [Where A and B are —CH 2 —CH 2 —O— or —C
H 2 -C (CH 3) H -O- and represented, their existing position is not limited, m and n is an integer of 0 to 40.
However, the sum of m and n is in the range of 1 to 40. R
a , R b and R c are each independently hydrogen, a phenyl group,
Alkyl group (C 1 ~C 4) or -CH (CH 3) represent -.phi. Provided that at least one is assumed to be a phenyl group or -CH (CH 3) -φ. ] A polyoxyalkylene styrenated phenyl ether-based surfactant represented by, for example, ethylene oxide and / or propylene oxide adduct of styrenated phenol or α-methylstyrenated phenol, etc. (G) General formula:
【化8】
[ここで、A及びBは−CH2 −CH2 −O−又は−C
H2 −C(CH3 )H−O−を表わし、それらの存在位
置は限定されない。Rc1、Rc2は、それぞれ独立に水
素、フェニル基又はアルキル基(C1 〜C4 )を表わ
し、Rd 、Re は、それぞれ独立に水素又は−CH3 を
表わし、m1 、m2 、n1 、n2 はそれぞれ独立に0〜
40の整数を表わす。ただし、m1 及びn1 、さらにm
2 及びn2 の和は1から40の範囲内にある。]で表わ
されるポリオキシアルキレンスチレン化フェニルエーテ
ルのフェニル基にさらにポリオキシアルキレン鎖を付加
した系界面活性剤、例えば、ビスフェノールAのビス
(エチレンオキサイド及び(又は)プロピレンオキサイ
ド付加物)等、(H)一般式:[Chemical 8] [Where A and B are —CH 2 —CH 2 —O— or —C
H 2 —C (CH 3 ) H—O— is represented, and their positions are not limited. R c1 and R c2 each independently represent hydrogen, a phenyl group or an alkyl group (C 1 to C 4 ), R d and R e each independently represent hydrogen or —CH 3 , and m 1 and m 2 , N 1 and n 2 are each independently 0 to
Represents an integer of 40. However, m 1 and n 1 , and further m
The sum of 2 and n 2 is in the range 1-40. ] The polyoxyalkylene styrenated phenyl ether represented by the formula [1] to a phenyl group to which a polyoxyalkylene chain is further added, for example, bisphenol A bis (ethylene oxide and / or propylene oxide adduct), etc. (H ) General formula:
【化9】
[ここで、Ra 及びRb は水素若しくはアルキル基(C
1 〜C25)を表わし、同一又は異なってもよい。A及び
Bは−CH2 −CH2 −O−又は−CH2 −C(CH
3 )H−O−を表わし、それらの存在位置は限定されな
い。m1 、m2 、n1 、n2 はそれぞれ独立に0〜40
の整数を表わす。ただし、m1 及びn1 、さらにm2 及
びn2 の和は1から40の範囲内にある。Mは水素又は
アルカリ金属を示す。]で表わされるリン酸エステル系
界面活性剤、例えば、アルキルリン酸のナトリウム塩
等、ポリオキシエチレン化及び(又は)ポリオキシプロ
ピレン化リン酸のナトリウム塩等、(I)一般式:[Chemical 9] [Where R a and R b are hydrogen or an alkyl group (C
1 to C 25 ) and may be the same or different. A and B are -CH 2 -CH 2 -O- or -CH 2 -C (CH
3 ) Represents H-O-, and the position where they are present is not limited. m 1 , m 2 , n 1 and n 2 are each independently 0 to 40
Represents the integer. However, the sum of m 1 and n 1 , and further the sum of m 2 and n 2 is within the range of 1 to 40. M represents hydrogen or an alkali metal. ] A phosphoric acid ester-based surfactant represented by, for example, sodium salt of alkylphosphoric acid, sodium salt of polyoxyethylenated and / or polyoxypropyleneized phosphoric acid, etc. (I) General formula:
【化10】
[ここで、Rはアルキル基(C1 〜C30)、アルケニル
(C1 〜C30)又はアシル基(C1 〜C30)を表わし、
A及びBは−CH2 −CH2 −O−又は−CH2−C
(CH3 )H−O−を表わし、それらの存在位置は限定
されない。m1 、m2 、n1 、n2 はそれぞれ独立に0
〜6の整数を表わす。ただし、m1 及びn1、さらにm2
及びn2 の和は1から6の範囲内にある。CH2 −C
H(CH3 )−Oの付加モル数がCH2 −CH−Oの付
加モル数より多いことはない。]で表わされるポリオキ
シアルキレンアルキル(又はアルケニル)アミン(又は
アミド)系界面活性剤、例えば、アルキル(又はアルケ
ニル)アミン(又はアミド)のエチレンオキサイド及び
(又は)プロピレンオキサイド付加物等、(J)一般
式:[Chemical 10] [Wherein R represents an alkyl group (C 1 to C 30 ), alkenyl (C 1 to C 30 ), or an acyl group (C 1 to C 30 ),
A and B are -CH 2 -CH 2 -O- or -CH 2 -C
(CH 3) H-O- and represented, their existing position is not limited. m 1 , m 2 , n 1 and n 2 are independently 0
Represents an integer of ~ 6. However, m 1 and n 1 , and further m 2
And n 2 is in the range 1 to 6. CH 2 -C
H (CH 3) number of moles of added -O will not larger than molar number of addition of CH 2 -CH-O. ] A polyoxyalkylene alkyl (or alkenyl) amine (or amide) -based surfactant represented by, for example, an ethylene oxide and / or propylene oxide adduct of an alkyl (or alkenyl) amine (or amide), etc. (J) General formula:
【化11】
[ここで、A及びBは−CH2 −CH2 −O−又は−C
H2 −C(CH3 )H−O−を表わし、それらの存在位
置は限定されない。m1 、m2 、m3 、m4 、n1 、n
2 、n3 、n4 は整数で、m1 +m2 +m3 +m4 =5
〜70、n1 +n2 +n3 +n4 =5〜70である。m
1 、m2 、n1 、n2 はそれぞれ独立に0〜6の整数を
表わす。ただし、m1 及びn1 、さらにm2 及びn2 の
和は1から6の範囲内にある。xは2又は3の整数を表
わす。Rはアルキル基(C1 〜C30)又はアルケニル基
(C1 〜C30)を表わす。]で表わされるアルキレンジ
アミンのアルキレンオキシド付加物系界面活性剤、例え
ば、エチレンジアミンのエチレンオキサイド及び(又
は)プロピレンオキサイドN付加物等、(K)一般式:[Chemical 11] [Where A and B are —CH 2 —CH 2 —O— or —C
H 2 —C (CH 3 ) H—O— is represented, and their positions are not limited. m 1 , m 2 , m 3 , m 4 , n 1 , n
2 , n 3 and n 4 are integers and m 1 + m 2 + m 3 + m 4 = 5
˜70, n 1 + n 2 + n 3 + n 4 = 5-70. m
1 , m 2 , n 1 and n 2 each independently represent an integer of 0 to 6. However, the sum of m 1 and n 1 , and further the sum of m 2 and n 2 is within the range of 1 to 6. x represents an integer of 2 or 3. R represents an alkyl group (C 1 ~C 30) or alkenyl group (C 1 ~C 30). ] An alkylene oxide adduct-based surfactant of alkylene diamine represented by the following, for example, ethylene oxide and / or propylene oxide N adduct of ethylene diamine, (K) general formula:
【化12】
[ここで、Ra はアルキル基(C1 〜C20)を表わし、
Rb は(CH2 )m OH又は(CH2 )OCH2 COO
- を表わしRc は、アルキル基(C1 〜C4 )、(CH
2 )n COO- 、(CH2 )n SO3 -又はCH(OH)
CH2 SO3 -を表わし、m及びnは1〜4の整数を表わ
す。Mはアルカリ金属を表わし、Xはハロゲン、水酸基
又はアルカンスルホン酸基(C1 〜C5 )を表わす。R
c がアルキル基の場合にはMは存在せず、Rc がアルキ
ル基以外の場合にはMは存在してもしなくてもよく、M
が存在しないときにはXも存在しない。]で表わされる
アルキルイミダゾリニウムベタイン系界面活性剤、例え
ば、2−ラウリル(オレイル、セチル、ステアリル、べ
へニル・・・)−N−メチル−N−ヒドロキシエチルイ
ミダゾリニウムベタイン等、(L)一般式:[Chemical 12] [Here, R a represents an alkyl group (C 1 to C 20 ),
R b is (CH 2 ) m OH or (CH 2 ) OCH 2 COO
- a represents R c is an alkyl group (C 1 ~C 4), ( CH
2 ) n COO − , (CH 2 ) n SO 3 — or CH (OH)
CH 2 SO 3 — , m and n each represent an integer of 1 to 4. M represents an alkali metal, and X represents a halogen, a hydroxyl group or an alkanesulfonic acid group (C 1 to C 5 ). R
When c is an alkyl group, M is absent. When R c is other than an alkyl group, M may or may not be present.
X does not exist when does not exist. ] Alkylimidazolinium betaine-based surfactants represented by, for example, 2-lauryl (oleyl, cetyl, stearyl, behenyl ...)-N-methyl-N-hydroxyethylimidazolinium betaine, (L ) General formula:
【化13】
[ここで、Ra は水素又はメチル基を表わし、又は結合
がなくてもよい。Rb は水素又はメチル基若しくはエチ
ル基を表わし、該アルキル基の水素の一つがエーテル結
合を介してアシルオキシ基と結合していてもよい。Rc
はアルキル基(C5 〜C20)を表わす。カルボキシル基
は水素又はアルカリ金属とイオン結合していてもよい。
mは1〜4の整数を、nは0〜4の整数を表わす。]で
表わされるアルキル(又はアミド)ベタイン系界面活性
剤、例えば、ジメチルラウリル(オレイル、セチル、ス
テアリル、べへニル・・・)ベタイン等、(M)一般
式:[Chemical 13] [Here, R a represents hydrogen or a methyl group, or may have no bond. R b represents hydrogen or a methyl group or an ethyl group, and one hydrogen atom of the alkyl group may be bonded to an acyloxy group via an ether bond. R c
Represents an alkyl group (C 5 -C 20 ). The carboxyl group may be ionically bonded to hydrogen or an alkali metal.
m represents an integer of 1 to 4, and n represents an integer of 0 to 4. ] An alkyl (or amido) betaine-based surfactant represented by, for example, dimethyllauryl (oleyl, cetyl, stearyl, behenyl ...) Betaine, etc., (M) General formula:
【化14】
[ここで、Xはハロゲン、水酸基又はアルカンスルホン
酸基(C1 〜C5 )を表わし、Ra はアルキル基(C1
〜C20)を表わし、Rb 及びRc はアルキル基(C1 〜
C4 )又はアルコキシル基(C1 〜C10)を表わし、R
d はアルキル基(C1 〜C10)、ベンジル基又は脂肪酸
(CH2 )n COOHを表わし、ここで、nは1〜18
の整数を表わす。Re はアルキル基(C8 〜C20)を表
わし、Rfは水素又はアルキル基(C1 〜C4 )を表わ
す。]で表わされるアンモニウム又はピリジニウム4級
塩系界面活性剤、例えば、ラウリル(オレイル、セチ
ル、ステアリル、べへニル・・・)トリ(ジ)メチルア
ンモニウムクロライド等などが使用できる。[Chemical 14] [Wherein, X represents a halogen, a hydroxyl group or an alkane sulfonic acid group (C 1 -C 5), R a represents an alkyl group (C 1
To C 20 ), R b and R c are alkyl groups (C 1 to
C 4 ) or an alkoxyl group (C 1 to C 10 ) and R
d represents an alkyl group (C 1 ~C 10), a benzyl group or a fatty acid (CH 2) n COOH, where, n represents 1 to 18
Represents the integer. R e represents an alkyl group (C 8 ~C 20), R f represents hydrogen or an alkyl group (C 1 ~C 4). ] Ammonium or pyridinium quaternary salt-based surfactants represented by, for example, lauryl (oleyl, cetyl, stearyl, behenyl ...) Tri (di) methylammonium chloride and the like can be used.
【0018】さらにそれらの中で市販品として容易に入
手できるものを具体的に挙げれば、前記式(A)で表さ
れるものとして、ペレックスNB−L、デモールN(花
王(株)社製)等が、前記式(B)で表されるものとし
て、エパン720、エパン740、エパン750、エパ
ン450(第一工業製薬(株)社製)、プルロニックL
64、プルロニックL101、プルロニックP103、
プルロニックPP150(旭電化工業(株)社製)、ニ
ッコールBO−20(日光ケミカルズ(株)社製)、エ
マルゲンL−40(花王(株)社製)、50HB−20
00/5000(三洋化成(株)社製)等が、前記式
(C)で表されるものとして、ブラウノンEL−130
3、ブラウノンEL−1509、ブラウノンCH−31
0(青木油脂工業(株)社製)、ニューコール1110
(日本乳化剤(株)社製)、ニッコールBL、ニッコー
ルMYL−10(日光ケミカルズ(株)社製)、ノイゲ
ンET−170(第一工業製薬(株)社製)等が、前記
式(D)で表されるものとして、ノイゲンEA−15
0、ノイゲンEA−130T(第一工業製薬(株)社
製)、ブラウノンNK−808、N−512、DP−9
(青木油脂工業(株)社製)、ニューコール704、ニ
ューコール707、ニューコール710、ニューコール
714、ニューコール723(日本乳化剤(株)社
製)、ブラウノンLPE−1007(青木油脂工業
(株)社製)、アデカトールNP−15、アデカトール
NP−720(旭電化工業(株)社製)等が、前記式
(E)で表されるものとして、ブラウノンBN−18
(青木油脂工業(株)社製)、アデカトールPC−10
(旭電化工業(株)社製)、ノイゲンEN−10(第一
工業製薬(株)社製)等が、前記式(F)で表されるも
のとして、ニューコール2607(日本乳化剤(株)社
製)、ブラウノンDSP−9(青木油脂工業(株)社
製)等が、前記式(G)で表されるものとして、リボノ
ックスNC−100(ライオン(株)社製)等が、前記
式(H)で表されるものとして、アデカコールPS−4
40E、アデカコールCS−141E、アデカコールT
S−230E(旭電化工業(株)社製)等が、前記式
(I)で表されるものとして、ナイミーンL207、ナ
イミーンT2−210、ナイミーンS−215(日本油
脂工業(株)社製)、ニューコール420(日本乳化剤
(株)社製)、ブラウノンO−205(青木油脂工業
(株)社製)等が、前記式(J)で表されるものとし
て、テトロニックTR−701、テトロニックTR−7
02(旭電化工業(株)社製)等が、前記(K)で表さ
れるものとして、ソフタゾリン、ソフタゾリンCL、ソ
フタゾリンCH、ソフタゾリンCHS、ソフタゾリンN
S、ソフタゾリンSF(川研ファインケミカル(株)社
製)、ニッサンアノンGLM−R(日本油脂(株)社
製)、レボン101−H(三洋化成工業(株)社製)、
ニッコールAM−103EX(日光ケミカルズ(株)社
製)等が、前記式(L)で表されるものとして、ニッサ
ンアノンBF、ニッサンアノンBL、ニッサンアノンL
G、ニッサンアノンBDF−R(日本油脂(株)社
製)、アムフォタージュKJ−2(LONZA社製)、
アセタミン24(花王(株)社製)等が、前記式(M)
で表されるものとして、ニッコールCA2150、ニッ
コールCA101(日光ケミカルズ(株)社製)、テク
スノールR−5(日本乳化剤(株)社製)等が挙げられ
る。界面活性剤の種類及び添加量は特に制限されるもの
ではないが、濃度が極端に低い場合には、平滑化効果が
認められなくなるため、概ね0.01g/Lは必要であ
り、概ね50g/Lよりも濃度の高い場合には、浴の濁
りなどの現象が生じる。従って、使用量は、通常0.0
1〜50g/L、特に0.5〜20g/Lとする。Further, among them, those which can be easily obtained as a commercial product are specifically mentioned. As those represented by the above formula (A), Perex NB-L and Demol N (manufactured by Kao Corporation). And the like are represented by the above formula (B), such as Epan 720, Epan 740, Epan 750, Epan 450 (manufactured by Dai-ichi Kogyo Seiyaku Co., Ltd.), Pluronic L
64, Pluronic L101, Pluronic P103,
Pluronic PP150 (manufactured by Asahi Denka Co., Ltd.), Nikkor BO-20 (manufactured by Nikko Chemicals Co., Ltd.), Emulgen L-40 (manufactured by Kao Corporation), 50HB-20
00/5000 (manufactured by Sanyo Kasei Co., Ltd.) and the like are those represented by the above formula (C), which are BLAUNON EL-130
3, Braunon EL-1509, Braunon CH-31
0 (manufactured by Aoki Yushi Kogyo Co., Ltd.), Newcol 1110
(Manufactured by Nippon Emulsifier Co., Ltd.), Nikkor BL, Nikkor MYL-10 (manufactured by Nikko Chemicals Co., Ltd.), Neugen ET-170 (manufactured by Dai-ichi Kogyo Seiyaku Co., Ltd.) and the like are represented by the formula (D). Neugen EA-15 as represented by
0, Neugen EA-130T (manufactured by Dai-ichi Kogyo Seiyaku Co., Ltd.), Blaunon NK-808, N-512, DP-9.
(Aoki Yushi Kogyo Co., Ltd.), Newcall 704, Newcall 707, Newcall 710, Newcall 714, Newcall 723 (Nippon Emulsifier Co., Ltd.), Braunon LPE-1007 (Aoki Yushi Industry Co., Ltd.) ), Adecatol NP-15, Adecatol NP-720 (manufactured by Asahi Denka Kogyo Co., Ltd.) and the like, as those represented by the above formula (E), Braunon BN-18.
(Aoki Yushi Kogyo Co., Ltd.), ADEKA TOL PC-10
(Asahi Denka Kogyo Co., Ltd.), Neugen EN-10 (Daiichi Kogyo Seiyaku Co., Ltd.) and the like are those represented by the formula (F), Newcol 2607 (Nippon Emulsifier Co., Ltd.). Manufactured by Aoki Yushi Kogyo Co., Ltd., and the like, as those represented by the formula (G), Ribonox NC-100 (manufactured by Lion Co., Ltd.) and the like. As represented by (H), ADEKA COL PS-4
40E, ADEKA COL CS-141E, ADEKA COL T
S-230E (manufactured by Asahi Denka Kogyo Co., Ltd.) and the like are those represented by the above formula (I), such as Nymeen L207, Nymeen T2-210, and Nymeen S-215 (Nippon Yushi Kogyo Co., Ltd.). , Newcol 420 (manufactured by Nippon Emulsifier Co., Ltd.), BLAUNON O-205 (manufactured by Aoki Yushi Kogyo Co., Ltd.), etc. are represented by the formula (J) as Tetronic TR-701, TE Tronic TR-7
No. 02 (manufactured by Asahi Denka Kogyo Co., Ltd.) and the like, as those represented by the above (K), softazoline, softazoline CL, softazoline CH, softazoline CHS, softazoline N
S, softazoline SF (manufactured by Kawaken Fine Chemicals Co., Ltd.), Nissan Anon GLM-R (manufactured by NOF Corporation), Levon 101-H (manufactured by Sanyo Chemical Industry Co., Ltd.),
Nikkor AM-103EX (manufactured by Nikko Chemicals Co., Ltd.) and the like are represented by the above formula (L) as Nissan Anon BF, Nissan Anon BL, Nissan Anon L.
G, Nissan Anon BDF-R (manufactured by NOF Corporation), Amfotage KJ-2 (manufactured by LONZA),
Acetamine 24 (manufactured by Kao Co., Ltd.) or the like is the above formula (M).
Examples thereof include Nikkor CA2150, Nikkor CA101 (manufactured by Nikko Chemicals Co., Ltd.), Texnol R-5 (manufactured by Nippon Emulsifier Co., Ltd.) and the like. The kind and amount of the surfactant added are not particularly limited, but if the concentration is extremely low, the smoothing effect will not be recognized, so about 0.01 g / L is necessary, and about 50 g / L. When the concentration is higher than L, a phenomenon such as cloudiness of the bath occurs. Therefore, the usage amount is usually 0.0
It is set to 1 to 50 g / L, particularly 0.5 to 20 g / L.
【0019】さらに、本発明のめっき浴では、めっき液
中における錫を安定化させると同時にめっき速度を高め
るために、酸化防止剤及び/又は還元剤を添加すること
ができる。酸化防止剤及び/又は還元剤は公知のものが
使用でき、レゾルシノール、ピロカテコール、ハイドロ
キノン、フロログリシノール、ピロガロール、抱水ヒド
ラジン、ホルマリン、次亜リン酸およびその塩、グリオ
キシ酸及びその塩、ジメチルアミンボラン、3価チタン
などがある。それらの使用量は、0.05〜50g/L
程度が適当であり、好ましくは0.1〜10g/Lであ
る。Furthermore, in the plating bath of the present invention, an antioxidant and / or a reducing agent can be added in order to stabilize tin in the plating solution and at the same time increase the plating rate. Known antioxidants and / or reducing agents can be used, resorcinol, pyrocatechol, hydroquinone, phlorogricinol, pyrogallol, hydrazine hydrate, formalin, hypophosphorous acid and its salts, glyoxy acid and its salts, dimethyl. There are amine borane, trivalent titanium and the like. The amount used is 0.05 to 50 g / L
The degree is appropriate, and preferably 0.1 to 10 g / L.
【0020】本発明のめっき浴の使用できるpH範囲
は、強酸性〜pH13、好ましくは、強酸性〜pH11
であるので、中性領域で使用する場合には、浴のpH変
動を低くするために、pH緩衝剤を添加することができ
る。緩衝剤には、公知のものが使用でき、例えば、塩化
アンモニウム、或いはリン酸、酢酸、硼酸、酒石酸など
のそれぞれナトリウム、カリウム及びアンモニウム塩、
さらには多塩基酸の場合には、水素イオンを含む酸性塩
などを単独又は適宜混合して使用できる。pH緩衝剤の
使用量は、1〜50g/L程度が適当であり、好ましく
は1〜20g/L程度添加される。The pH range in which the plating bath of the present invention can be used is strongly acidic to pH 13, preferably strongly acidic to pH 11.
Therefore, when used in the neutral range, a pH buffering agent can be added to reduce the pH fluctuation of the bath. Known buffers can be used, for example, ammonium chloride or sodium, potassium and ammonium salts of phosphoric acid, acetic acid, boric acid, tartaric acid, etc.,
Further, in the case of a polybasic acid, an acid salt containing hydrogen ions or the like can be used alone or in an appropriate mixture. The amount of the pH buffer used is appropriately about 1 to 50 g / L, preferably about 1 to 20 g / L.
【0021】さらに、目的に応じて析出物の結晶を微細
化し、半光沢性ないしは光沢性のあるめっき皮膜を得る
ために、結晶微細化剤を使用することができる。結晶微
細化剤の例としては、下記の(1)〜(18)を挙げる
ことができる。これらは単独又は適宜混合添加して使用
できる。使用量は、下記(1)の天然高分子物質を用い
る場合は0.5〜50g/Lが適当であり、好ましくは
1〜20g/Lである。下記(2)〜(18)の群の結
晶微細化剤に対しては、0.005〜30g/Lが適当
であり、好ましくは0.02〜20g/L添加される。Further, a crystal refining agent can be used in order to refine the crystals of the precipitate according to the purpose and obtain a plating film having semi-gloss or gloss. Examples of the crystal refining agent include the following (1) to (18). These can be used alone or in admixture as appropriate. When the natural polymer substance of (1) below is used, the amount used is 0.5 to 50 g / L, and preferably 1 to 20 g / L. 0.005 to 30 g / L is suitable for the crystal refining agent of the following groups (2) to (18), and preferably 0.02 to 20 g / L is added.
【0022】(1)ゼラチン、ペプトン。 (2)一般式:(1) Gelatin and peptone. (2) General formula:
【化15】
[ここで、Rb は水素、アルキル基(C1 〜C4 )又は
フェニル基を表わし、Ra は水素又はアルキル基(C1
〜C4 )を表わし、Rc は水素又は水酸基を表わし、A
は単結合、アルキル基(C1 〜C4 )、ベンジル基又は
フェニレン基を表わす。]で表されるスルファニル酸誘
導体及びその塩。
(3)一般式:[Chemical 15] [Here, R b represents hydrogen, an alkyl group (C 1 to C 4 ), or a phenyl group, and R a represents hydrogen or an alkyl group (C 1
To C 4 ), R c represents hydrogen or a hydroxyl group, and A
Represents a single bond, an alkyl group (C 1 -C 4 ), a benzyl group or a phenylene group. ] The sulfanilic acid derivative and its salt represented by these. (3) General formula:
【化16】
[ここで、Xは水素又はアルキル基(C1 〜C4 )を表
わし、Rは、水素又は−CH3 を表わし、nは、2〜1
5の整数を表わす。]で表されるキノリン類。
(4)一般式:[Chemical 16] [Here, X represents hydrogen or an alkyl group (C 1 to C 4 ), R represents hydrogen or —CH 3 , and n is 2 to 1
Represents an integer of 5. ] Quinolines represented by (4) General formula:
【化17】
[ここで、Xは水素、ハロゲン、アルキル基(C1 〜C
4 )、アセチル基、アミノ基、水酸基又はカルボキシル
基を表わし、Rb は水素、ヒドロキシル基を表わし、n
は0〜12の整数を表わす。]で表されるベンゾトリア
ゾール及びその誘導体。
(5)一般式:[Chemical 17] [Where X is hydrogen, halogen, an alkyl group (C 1 -C
4 ), acetyl group, amino group, hydroxyl group or carboxyl group, R b represents hydrogen or hydroxyl group, n
Represents an integer of 0 to 12. ] The benzotriazole and its derivative represented by these. (5) General formula:
【化18】
[ここで、R1 、R2 、R3 、R4 、R5 は、それぞれ
同一又は異なってもよく、−H:−SH:−OH:−O
R(Rは所望により−COOHで置換されていてもよい
C1 〜C6 のアルキル基)、ハロゲン、−COOH,−
COCOOH,アリール、−SR(Rは所望により−C
OOHにて置換されていてもよいC1 〜C6 アルキ
ル)、[Chemical 18] [Here, R < 1 >, R < 2 >, R < 3 >, R < 4 >, R < 5 > may be the same or different, and -H: -SH: -OH: -O.
R (R is a C 1 -C 6 alkyl group optionally substituted with —COOH), halogen, —COOH, —
COCOOH, aryl, -SR (R is -C if desired.
C 1 -C 6 alkyl optionally substituted with OOH),
【化19】
−NH2 ,−NRR’(R及びR’はC1 〜C6 アルキ
ル又は一緒になって環を形成してもよい)、−NHCO
R(RはC1 〜C6 アルキル)、−NHCOアリール、
−NHNH2 、−NO2 、−CONHアリール、−CS
NHアリール、−CN、−CHO:−SO3 H:−SO
2 NH2 又は−SO2 NRR’(R及びR’はC1 〜C
6 アルキル又は一緒になって環を形成してもよい)を意
味する。]で表されるベンゾチアゾール類。
(6)一般式:[Chemical 19] -NH 2, -NRR '(R and R' may be C 1 -C 6 alkyl or together form a ring), - NHCO
R (R is C 1 -C 6 alkyl), —NHCO aryl,
-NHNH 2, -NO 2, -CONH aryl, -CS
NH aryl, -CN, -CHO: -SO 3 H : -SO
2 NH 2 or —SO 2 NRR ′ (R and R ′ are C 1 to C
6 alkyl or may together form a ring). ] Benzothiazoles represented by. (6) General formula:
【化20】
[ここで、Ra1、Ra2は、それぞれ独立に水素、ヒドロ
キシル基を表わし、Rb1、Rb2は、それぞれ独立にアル
キル基(C1 〜C5 )を表わす。]で表されるイミン
類。
(7)一般式:[Chemical 20] [Here, R a1 and R a2 each independently represent hydrogen and a hydroxyl group, and R b1 and R b2 each independently represent an alkyl group (C 1 to C 5 ). ] Imines represented by. (7) General formula:
【化21】
[ここで、Ra は水素、ハロゲン、アルキル基(C1 〜
C4 )を表わし、Rb は水素、ヒドロキシル基を表わ
し、nは、0〜12の整数を表わす。]で表されるトリ
アジン類。
(8)一般式:[Chemical 21] [Where R a is hydrogen, halogen, an alkyl group (C 1-
C 4 ), R b represents hydrogen or a hydroxyl group, and n represents an integer of 0-12. ] Triazines represented by. (8) General formula:
【化22】
[ここで、Ra 、Rb は、同一又は異なっていてもよく
水素、アルキル基(C1〜C18)、アルコキシ基(C1
〜C18)又はC3 〜C7 のシクロアルキル基を表わし、
Aは、低級アルキレン基を表わす。]で表されるトリア
ジン類。
(9)一般式:[Chemical formula 22] [Here, R a and R b may be the same or different and each is hydrogen, an alkyl group (C 1 to C 18 ), an alkoxy group (C 1
To C 18 ) or a C 3 to C 7 cycloalkyl group,
A represents a lower alkylene group. ] Triazines represented by. (9) General formula:
【化23】
[ここで、Rは、アルキル基(C1 〜C4 )又はフェニ
ル基を表わす。]で表される芳香族オキシカルボン酸の
エステル類。
(10)一般式:
Ra −CRb =CH−CO−X−Rc
[ここで、Ra 及びRc はフェニル、ナフチル、ピリジ
ル、キノリル、チエニル、フリル及びピロニル、アミノ
基、水酸基、若しくは水素から選ばれた基であり、該基
はC1 〜C6 アルキル、C1 〜C6 アルキルオキシ、C
1 〜C6 アシル、C1 〜C6 アルキルチオ、OH、ハロ
ゲン、カルボキシル基、−NO2 及び−NRd Re (R
d 及びRe は、同一又は異なって各々水素又はC1 〜C
4 アルキル)から選ばれた同一又は異なる置換基を1〜
4個有してもよく、或いはRa とRc は結合して環状と
なってもよく、或いは、Rc はRa −CRb =CH−C
O−に等しくてもよい。Xは、単結合若しくは−CH2
−である。Rb は水素又はC1 〜C4 アルキルであ
る。]で表されるC=Oと共役の位置に二重結合を有す
る化合物。
(11)一般式:
R−CHO
[ここで、RはC1 〜C6 アルキル、フェニル、ナフチ
ル、アセナフチル、ピリジル、キノリル、チエニル、フ
リル、インドール及びピロニル、アルデヒド基若しくは
水素から選ばれた基であり、該基はC1 〜C6 アルキ
ル、C1 〜C6 アルキルオキシ、C1 〜C6 アシル、C
1 〜C6 アルキルチオ、OH、ハロゲン、NO2 及び−
NRd Re (Rd 及びRe は、同一又は異なって各々水
素又はC1 〜C4 アルキル)から選ばれた同一又は異な
る置換基を1〜4個有してもよい。]で表されるアルデ
ヒド類。
(12)一般式:
Ra −CO−(CH2 )n −CO−Rb
[ここで、Ra 及びRb は同一又は異なってそれぞれ水
素、C1 〜C6 アルキル及び−C2 H4 −CO−CO−
C2 H5 であり、nは0〜2の整数である。]で表され
るジケトン類。
(13)一般式:
Ra −NH−Rb
[ここで、Ra はフェニル基であり、該基はC1 〜C3
アルキル、ハロゲン、アミノ基で置換されていてもよ
い。Rb は水素、C1 〜C3 アルキル、−NH−CS−
N=N−φ、−CH2 −φ−NH2 である。]で表され
るアニリン誘導体。
(14)一般式:[Chemical formula 23] [Wherein, R represents an alkyl group (C 1 ~C 4) or phenyl group. ] The ester of aromatic oxycarboxylic acid represented by these. (10) the general formula: R a -CR b = CH- CO-X-R c [ wherein, R a and R c are phenyl, naphthyl, pyridyl, quinolyl, thienyl, furyl and pyronyl, amino group, hydroxyl group, or A group selected from hydrogen, which is C 1 -C 6 alkyl, C 1 -C 6 alkyloxy, C
1 -C 6 acyl, C 1 -C 6 alkylthio, OH, halogen, carboxyl group, -NO 2 and -NR d R e (R
d and R e are the same or different and each is hydrogen or C 1 -C.
4 alkyl) having 1 or more same or different substituents selected from
There may be four, or R a and R c may combine to form a ring, or R c may be R a —CR b ═CH—C.
It may be equal to O-. X is a single bond or -CH 2
− R b is hydrogen or C 1 -C 4 alkyl. ] The compound which has a double bond in the conjugate position with C = O represented by these. (11) General formula: R-CHO [wherein R is a group selected from C 1 -C 6 alkyl, phenyl, naphthyl, acenaphthyl, pyridyl, quinolyl, thienyl, furyl, indole and pyronyl, an aldehyde group or hydrogen. And the group is C 1 -C 6 alkyl, C 1 -C 6 alkyloxy, C 1 -C 6 acyl, C
1 -C 6 alkylthio, OH, halogen, NO 2 and -
NR d Re (R d and R e may be the same or different and each is hydrogen or C 1 -C 4 alkyl) and may have 1 to 4 substituents which are the same or different. ] Aldehydes represented by (12) the general formula: R a -CO- (CH 2) n -CO-R b [ where, R a and R b are the same or different from each other hydrogen, C 1 -C 6 alkyl and -C 2 H 4 -CO-CO-
A C 2 H 5, n is an integer of 0-2. ] The diketones represented by. (13) General formula: in R a -NH-R b [where, R a is a phenyl group, said group C 1 -C 3
It may be substituted with an alkyl, halogen or amino group. R b is hydrogen, C 1 -C 3 alkyl, -NH-CS-
N = N-φ and -CH 2 -φ-NH 2 . ] An aniline derivative represented by. (14) General formula:
【化24】
[ここで、Ra 及びRb は同一又は異なってそれぞれ水
素、低級アルキル基、水酸基、ニトロ基、カルボキシル
基、スルホン酸基を表わす。]で表されるニトロ化合物
又はそのナトリウム、カリウム又はアンモニウム塩。
(15)一般式:
HOOC−CHR−SH
[ここで、Rは、水素、C1 〜C2 アルキルであり、該
アルキル基はカルボキシル基で置換されていてもよ
い。]で表されるメルカプトカルボン酸類。
(16)下記から選ばれる複素環式化合物類:1,10
−フェナントロリン、2−ビニルピリジン、2−シンナ
ミルチオフェン、1,2,3−(又は1,2,4−又は
1,3,5−)トリアジン、2,4−ジアミノ−6−
(2’−ウンデシルイミダゾリル(1’)メチル−S−
トリアジン、1,2,3−ベンゾトリアジン、インドー
ル、イミダゾール、2−メルカプトベンゾイミダゾー
ル、2−メルカプトベンゾオキサゾール、キノリン。
(17)アセトフェノン及びハロゲン化アセトフェノ
ン。
(18)アミン−アルデヒド縮合物。[Chemical formula 24] [Here, R a and R b are the same or different and each represents hydrogen, a lower alkyl group, a hydroxyl group, a nitro group, a carboxyl group or a sulfonic acid group. ] The nitro compound represented by these, or its sodium, potassium, or ammonium salt. (15) General formula: HOOC-CHR-SH [wherein R is hydrogen or C 1 -C 2 alkyl, and the alkyl group may be substituted with a carboxyl group. ] The mercaptocarboxylic acid represented by these. (16) Heterocyclic compounds selected from the following: 1,10
-Phenanthroline, 2-vinylpyridine, 2-cinnamylthiophene, 1,2,3- (or 1,2,4- or 1,3,5-) triazine, 2,4-diamino-6-
(2'-undecylimidazolyl (1 ') methyl-S-
Triazine, 1,2,3-benzotriazine, indole, imidazole, 2-mercaptobenzimidazole, 2-mercaptobenzoxazole, quinoline. (17) Acetophenone and halogenated acetophenone. (18) Amine-aldehyde condensate.
【0023】これらの結晶微細化剤のうち、特に好適な
例を挙げると、8−ヒドロキシキノリンに5モルの酸化
プロピレンを付加した生成物、N,N’−ジイソブチリ
デン−o−フェニレンジアミン、ベンゾチアゾール、2
−アミノ−4−クロロベンゾチアゾール、2−アミノ−
6−メトキシベンゾチアゾール、2−ヒドロキシベンゾ
チアゾール、2−クロロベンゾチアゾール、2−メチル
−5−クロロベンゾチアゾール、2,5−ジメチルベン
ゾチアゾール、5−ヒドロキシ−2−メチルベンゾチア
ゾール、6−クロロ−2−メチル−4−メトキシベンゾ
チアゾール、2−(n−ブチル)メルカプト−6−アミ
ノベンゾチアゾール、2−ベンゾチアゾールチオ酢酸、
2−ベンゾチアゾールオキシ酢酸、2−メチルベンゾチ
アゾール、2−メルカプトベンゾチアゾール、6−エト
キシ−2−メルカプトベンゾチアゾール、N−ブチリデ
ンスルファニル酸、N−シンナモイリデンスルファニル
酸、N−(3−ヒドロキシブチリデン)−p−スルファ
ニル酸、アルドール、ベンズアルデヒド、m−クロロベ
ンズアルデヒド、p−ニトロベンズアルデヒド、p−ヒ
ドロキシベンズアルデヒド、(o−,m−,p−)メト
キシベンズアルデヒド、o−バニリン、ベラトルムアル
デヒド、(2,4−,2,6−)ジクロロベンズアルデ
ヒド、(o−,p−)クロロベンズアルデヒド、1−ナ
フトアルデヒド、2−ナフトアルデヒド、2(4)−ヒ
ドロキシ−1−ナフトアルデヒド、2(4)−クロル−
1−ナフトアルデヒド、5−メトキシナフトアルデヒ
ド、ピコリンアルデヒド、3−アセナフトアルデヒド、
2(3)−チオフェンカルボキシアルデヒド、2(3)
−フルアルデヒド、3−インドールカルボキシアルデヒ
ド、サリチルアルデヒド、o−フタルアルデヒド、ホル
ムアルデヒド、アセトアルデヒド、パラアルデヒド、ブ
チルアルデヒド、イソブチルアルデヒド、プロピオンア
ルデヒド、n−バレルアルデヒド、アクロレイン、クロ
トンアルデヒド、グリオキサール、スクシンアルデヒ
ド、カプロンアルデヒド、イソバレルアルデヒド、アリ
ルアルデヒド、グルタルアルデヒド、1−ベンジリデン
−7−ヘプテナール、2,4−ヘキサジエナール、シン
ナムアルデヒド、ベンジルクロトンアルデヒド、アミン
−アルデヒド縮合物、メシチルオキシド、イソホロン、
ジアセチル、ヘキサンジオン−3,4−アセチルアセト
ン、3−クロロベンジリデンアセトン、sub,ピリジ
リデンアセトン、sub,フルフリジンアセトン、su
b,テニリデンアセトン、4−(1−ナフチル)−3−
ブテン−2−オン、4−(2−フリル)−3−ブテン−
2−オン、4−(2−チオフェニル)−3−ブテン−2
−オン、クルクミン、ベンジリデンアセチルアセトン、
ベンザルアセトン、アセトフェノン、(2,4−、3,
4−)ジクロロアセトフェノン、ベンジリデンアセトフ
ェノン、ベンジリデンメチルエチルケトン、ベンジリデ
ンセトンアルコール、p−トルイデンアセトン、p−ヒ
ドロキシベンジリデンアセトン、ベンジリデンメチルイ
ソブチルケトン、4−(1−ナフチル)−3−ブテン−
2−オン、2−シンナミルチオフェン、2−(ω−ベン
ゾイル)ビニルフラン、ビニルフェニルケトン、ビフェ
ニルプロペニルケトン、フェニルイソブテニルケトン、
フェニル−2−メチルプロペニルケトン、p−フルオロ
又はクロロフェニルプロペニルケトン、p−ヒドロキシ
フェニルプロペニルケトン、m−ニトロフェニルプロペ
ニルケトン、p−メチルフェニルプロペニルケトン、
2,4,6−トリメチルフェニルプロペニルケトン、p
−メトキシフェニルプロペニルケトン、p−メトキシフ
ェニルブテニルケトン、p−メチルチオフェニルプロペ
ニルケトン、p−イソブチルフェニルプロペニルケト
ン、α−ナフチル−1−メチルプロペニルケトン、4−
メトキシナフチルプロペニルケトン、2−チエニルプロ
ぺニルケトン、2−フリルプロペニルケトン、1−メチ
ルピロールプロペニルケトン、アクリル酸、メタクリル
酸、エタクリル酸、アクリル酸メチル、アクリル酸エチ
ル、メタクリル酸メチル、メタクリル酸ブチル、クロト
ン酸、イタコン酸、プロピレン−1,3−ジカルボン
酸、桂皮酸、アクリルアミド、ジアセトンアクリルアミ
ド、t−ブチルアクリルアミド、N−メトキシジメチル
アクリルアミド、(o−,m−,p−)トルイジン、
(o−,p−)アミノアニリン、アニリン、(o−,p
−)クロルアニリン、(2,5−、3,4−)クロルメ
チルアニリン、N−モノメチルアニリン、4,4’−ジ
アミノジフェニルメタン、N−フェニル−(α−,β
−)ナフチルアミン、ジチゾン、ベンゾトリアゾール、
4−ヒドロキシベンゾトリアゾール、4−カルボキシベ
ンゾトリアゾール、4−メチルベンゾトリアゾール、
1,2,3−トリアジン、1,2,4−トリアジン、
1,3,5−トリアジン、1,2,3−ベンズトリアジ
ン、2,4−ジアミノ−6−[2’−メチルイミダゾリ
ル(1’)エチル]−1,3,5−トリアジン、2,4
−ジアミノ−6−[2’−エチルイミダゾリル(1’)
エチル]−1,3,5−トリアジン、2,4−ジアミノ
−6−[2’−ウンデシルイミダゾリル(1’)エチ
ル]−1,3,5−トリアジン、β−N−ドデシルアミ
ノプロピオグアナミン、β−N−ヘキシルアミノプロピ
オグアナミン、ピペリジンプロピオグアナミン、シクロ
ヘキシルアミノプロピオグアナミン、モルホリンプロピ
オグアナミン、β−N−(2−エチルヘキシロキシプロ
ピルアミノ)プロピオグアナミン、β−N−(ラウリル
オキシプロピルアミノ)プロピオグアナミン、o−(m
−,p−)安息香酸メチル、サリチル酸フェニル、p−
ニトロフェノール、ニトロベンゼンスルホン酸、2,4
−ジニトロベンゼンスルホン酸、m−ニトロ安息香酸、
チオグリコール酸、メルカプトこはく酸、イミダゾー
ル、2−ビニルピリジン、インドール、キノリンなどを
挙げることができる。Of these crystal refining agents, particularly preferred examples include a product obtained by adding 5 mol of propylene oxide to 8-hydroxyquinoline, N, N'-diisobutylidene-o-phenylenediamine, Benzothiazole, 2
-Amino-4-chlorobenzothiazole, 2-amino-
6-methoxybenzothiazole, 2-hydroxybenzothiazole, 2-chlorobenzothiazole, 2-methyl-5-chlorobenzothiazole, 2,5-dimethylbenzothiazole, 5-hydroxy-2-methylbenzothiazole, 6-chloro- 2-methyl-4-methoxybenzothiazole, 2- (n-butyl) mercapto-6-aminobenzothiazole, 2-benzothiazolethioacetic acid,
2-benzothiazoleoxyacetic acid, 2-methylbenzothiazole, 2-mercaptobenzothiazole, 6-ethoxy-2-mercaptobenzothiazole, N-butylidene sulfanilic acid, N-cinnamoylidene sulfanilic acid, N- (3-hydroxy Butylidene) -p-sulfanilic acid, aldol, benzaldehyde, m-chlorobenzaldehyde, p-nitrobenzaldehyde, p-hydroxybenzaldehyde, (o-, m-, p-) methoxybenzaldehyde, o-vanillin, veratrumaldehyde, ( 2,4-, 2,6-Dichlorobenzaldehyde, (o-, p-) chlorobenzaldehyde, 1-naphthaldehyde, 2-naphthaldehyde, 2 (4) -hydroxy-1-naphthaldehyde, 2 (4)- Chlor-
1-naphthaldehyde, 5-methoxynaphthaldehyde, picolinaldehyde, 3-acenaphthaldehyde,
2 (3) -thiophenecarboxaldehyde, 2 (3)
-Furaldehyde, 3-indolecarboxaldehyde, salicylaldehyde, o-phthalaldehyde, formaldehyde, acetaldehyde, paraaldehyde, butyraldehyde, isobutyraldehyde, propionaldehyde, n-valeraldehyde, acrolein, crotonaldehyde, glyoxal, succinaldehyde, Capronaldehyde, isovaleraldehyde, allylaldehyde, glutaraldehyde, 1-benzylidene-7-heptenal, 2,4-hexadienal, cinnamaldehyde, benzylcrotonaldehyde, amine-aldehyde condensate, mesityl oxide, isophorone,
Diacetyl, hexanedione-3,4-acetylacetone, 3-chlorobenzylideneacetone, sub, pyridylideneacetone, sub, furfuridineacetone, su
b, tenylideneacetone, 4- (1-naphthyl) -3-
Buten-2-one, 4- (2-furyl) -3-butene-
2-one, 4- (2-thiophenyl) -3-butene-2
-On, curcumin, benzylidene acetylacetone,
Benzalacetone, acetophenone, (2,4-, 3,
4-) Dichloroacetophenone, benzylideneacetophenone, benzylidenemethylethylketone, benzylidenecetone alcohol, p-toluideneacetone, p-hydroxybenzylideneacetone, benzylidenemethylisobutylketone, 4- (1-naphthyl) -3-butene-
2-one, 2-cinnamylthiophene, 2- (ω-benzoyl) vinylfuran, vinylphenylketone, biphenylpropenylketone, phenylisobutenylketone,
Phenyl-2-methylpropenyl ketone, p-fluoro or chlorophenylpropenyl ketone, p-hydroxyphenylpropenyl ketone, m-nitrophenylpropenyl ketone, p-methylphenylpropenyl ketone,
2,4,6-trimethylphenylpropenyl ketone, p
-Methoxyphenylpropenyl ketone, p-methoxyphenylbutenyl ketone, p-methylthiophenylpropenyl ketone, p-isobutylphenylpropenyl ketone, α-naphthyl-1-methylpropenyl ketone, 4-
Methoxynaphthylpropenyl ketone, 2-thienylpropenyl ketone, 2-furylpropenyl ketone, 1-methylpyrrolepropenyl ketone, acrylic acid, methacrylic acid, ethacrylic acid, methyl acrylate, ethyl acrylate, methyl methacrylate, butyl methacrylate, croton Acid, itaconic acid, propylene-1,3-dicarboxylic acid, cinnamic acid, acrylamide, diacetone acrylamide, t-butyl acrylamide, N-methoxydimethyl acrylamide, (o-, m-, p-) toluidine,
(O-, p-) aminoaniline, aniline, (o-, p
-) Chloraniline, (2,5-, 3,4-) chloromethylaniline, N-monomethylaniline, 4,4'-diaminodiphenylmethane, N-phenyl- (α-, β
-) Naphthylamine, dithizone, benzotriazole,
4-hydroxybenzotriazole, 4-carboxybenzotriazole, 4-methylbenzotriazole,
1,2,3-triazine, 1,2,4-triazine,
1,3,5-triazine, 1,2,3-benztriazine, 2,4-diamino-6- [2'-methylimidazolyl (1 ') ethyl] -1,3,5-triazine, 2,4
-Diamino-6- [2'-ethylimidazolyl (1 ')
Ethyl] -1,3,5-triazine, 2,4-diamino-6- [2'-undecylimidazolyl (1 ') ethyl] -1,3,5-triazine, β-N-dodecylaminopropioguanamine , Β-N-hexylaminopropioguanamine, piperidine propioguanamine, cyclohexylaminopropioguanamine, morpholine propioguanamine, β-N- (2-ethylhexyloxypropylamino) propioguanamine, β-N- (lauryl) Oxypropylamino) propioguanamine, o- (m
-, P-) methyl benzoate, phenyl salicylate, p-
Nitrophenol, Nitrobenzenesulfonic acid, 2,4
-Dinitrobenzenesulfonic acid, m-nitrobenzoic acid,
Examples thereof include thioglycolic acid, mercaptosuccinic acid, imidazole, 2-vinylpyridine, indole and quinoline.
【0024】さらに、本発明のめっき浴には、めっき速
度の促進剤として硝酸イオンを添加することができる。
硝酸イオンの供給源としては、公知のものが使用でき、
硝酸、硝酸ナトリウム、硝酸カリウム、硝酸アンモニウ
ム、硝酸銀などが使用できる。硝酸イオンの添加は置換
錫めっきの速度を向上させるが、0.01mol/L以
下ではその効果は著しく低下するので、添加速度の下限
は0.01mol/Lとする。また、その濃度が著しく
高い場合には、素地の銅を激しく溶解し過ぎるので、概
ね0.5mol/L程度を上限とするのが望ましい。Furthermore, nitrate ions can be added to the plating bath of the present invention as a promoter of the plating rate.
As the source of nitrate ions, known sources can be used,
Nitric acid, sodium nitrate, potassium nitrate, ammonium nitrate, silver nitrate, etc. can be used. Addition of nitrate ions improves the rate of substitution tin plating, but the effect is significantly reduced at 0.01 mol / L or less, so the lower limit of the addition rate is 0.01 mol / L. Further, when the concentration is extremely high, the copper of the base material is excessively dissolved, so it is preferable to set the upper limit to about 0.5 mol / L.
【0025】[0025]
【実施例】次に実施例によって、この発明をさらに詳細
に説明するが、本発明はこれら数例によって限定される
ものではなく、前述した目的に沿ってめっき浴の組成及
びめっき条件は適宜、任意に変更することができる。下
記組成を有する錫−銀合金無電解めっき浴を調製した。
pHの調整には、水酸化ナトリウム水溶液と硫酸を用い
た。得られためっき浴を所定の温度まで加温し、バフ研
磨→ベンジン脱脂→電解脱脂→水洗→5%硫酸浸漬→水
洗の工程で前処理した銅板を20分間浸漬した。以下の
実施例においても温度条件等個々に明記している条件を
除き、同様の処理を施した。EXAMPLES Next, the present invention will be described in more detail with reference to examples. However, the present invention is not limited to these examples, and the composition of the plating bath and the plating conditions are appropriately set in accordance with the above-mentioned object. It can be changed arbitrarily. A tin-silver alloy electroless plating bath having the following composition was prepared.
A sodium hydroxide aqueous solution and sulfuric acid were used to adjust the pH. The obtained plating bath was heated to a predetermined temperature, and the copper plate pretreated in the steps of buff polishing → benzine degreasing → electrolytic degreasing → water washing → 5% sulfuric acid immersion → water washing was immersed for 20 minutes. Also in the following examples, the same treatment was performed except for the conditions such as temperature conditions which are clearly specified.
【0026】比較例
メタンスルホン酸錫 0.1 mol/L
メタンスルホン酸銀 0.004 mol/L
pH 1
浴温 60℃
めっき液は加温と同時に濁りを生じ、めっき液として使
用することはできなかった。Comparative Example Tin methanesulfonate 0.1 mol / L Silver methanesulfonate 0.004 mol / L pH 1 Bath temperature 60 ° C. The plating solution becomes cloudy when heated and cannot be used as a plating solution. There wasn't.
【0027】実施例1 メタンジスルホン酸錫 0.1 mol/L メタンスルホン酸銀 0.004 mol/L チオ尿素 1 mol/L ピロリン酸ナトリウム 0.5 mol/L 蓚酸カリウム 0.1 mol/L pH 5 浴温 60℃Example 1 Tin methanedisulfonate 0.1 mol / L Silver methanesulfonate 0.004 mol / L Thiourea 1 mol / L Sodium pyrophosphate 0.5 mol / L Potassium oxalate 0.1 mol / L pH 5 Bath temperature 60 ℃
【0028】実施例2 硫酸錫 0.1 mol/L ピロリン酸銀 0.004 mol/L ヨウ化カリ 0.5 mol/L チオ尿素 1 mol/L ピロリン酸ナトリウム 0.5 mol/L EDTA 0.1 mol/L デモールN(花王(株)社製) 0.5 g/L ソフタゾリンCH(川研ファインケミカル(株)社製)1 g/L ゼラチン 5 g/L 塩化アンモニウム 5 g/L pH 7 浴温 90℃Example 2 Tin sulfate 0.1 mol / L Silver pyrophosphate 0.004 mol / L Potassium iodide 0.5 mol / L Thiourea 1 mol / L Sodium pyrophosphate 0.5 mol / L EDTA 0.1 mol / L Demol N (manufactured by Kao Corporation) 0.5 g / L Softazoline CH (Kawaken Fine Chemicals Co., Ltd.) 1 g / L Gelatin 5 g / L Ammonium chloride 5 g / L pH 7 Bath temperature 90 ℃
【0029】実施例3 2−ヒドロキシプロパノールスルホン酸錫 0.1 mol/L クエン酸銀 0.004 mol/L ヨウ化カリ 0.5 mol/L チオ尿素 1 mol/L グルコン酸ナトリウム 1 mol/L クエン酸ナトリウム 0.2 mol/L スルホコハク酸 0.2 mol/L ニッコールCA101(日光ケミカルズ(株)社製) 1 g/L ソフタゾリンCH(川研ファインケミカル(株)社製)0.5 g/L 1,3,5−ベンゾトリアジン 2 g/L pH 4 浴温 90℃Example 3 2-Hydroxypropanol tin sulfonate 0.1 mol / L Silver citrate 0.004 mol / L Potassium iodide 0.5 mol / L Thiourea 1 mol / L Sodium gluconate 1 mol / L Sodium citrate 0.2 mol / L Sulfosuccinic acid 0.2 mol / L Nikkor CA101 (manufactured by Nikko Chemicals Co., Ltd.) 1 g / L Softazoline CH (Kawaken Fine Chemicals Co., Ltd.) 0.5 g / L 1,3,5-benzotriazine 2 g / L pH 4 Bath temperature 90 ℃
【0030】実施例4 塩化錫 0.1 mol/L 塩化銀 0.004 mol/L チオ硫酸ナトリウム 0.5 mol/L チオ尿素 1 mol/L ピロリン酸カリウム 0.5 mol/L グリコール酸 0.2 mol/L リポノックスNC−100(ライオン(株)社製) 0.1 g/L ソフタゾリンCH(川研ファインケミカル(株)社製)2 g/L 2−メチルベンゾチアゾール 0.1 g/L メタクリル酸 5 g/L N,N’−イソブチリデン−o−フェニレンジアミン 0.15 g/L 硝酸 20 g/L pH 1 浴温 70℃Example 4 Tin chloride 0.1 mol / L Silver chloride 0.004 mol / L Sodium thiosulfate 0.5 mol / L Thiourea 1 mol / L Potassium pyrophosphate 0.5 mol / L Glycolic acid 0.2 mol / L Liponox NC-100 (manufactured by Lion Corporation) 0.1 g / L Softazoline CH (Kawaken Fine Chemicals Co., Ltd.) 2 g / L 2-methylbenzothiazole 0.1 g / L Methacrylic acid 5 g / L N, N'-isobutylidene-o-phenylenediamine 0.15 g / L Nitric acid 20 g / L pH 1 Bath temperature 70 ℃
【0031】実施例5 ピロリン酸錫 0.25 mol/L 酸化銀 0.1 mol/L ヨウ化カリ 0.5 mol/L チオ尿素 1 mol/L ピロリン酸ナトリウム 0.6 mol/L ニューコール2607(日本乳化剤(株)社製) 0.2 g/L アデカコールPS−440E(旭電化工業(株)社製) 0.3 g/L メルカプトコハク酸 30 g/L 2,4-ジアミノ-6-[2'−メチルイミダゾリル(1')エチル] -1,3,5−トリアジン 0.05 g/L 8−ヒドロキシキノリンに 5モルプロピレンオキサイド付加生成物 1 g/L ベンゾトリアゾール 0.05 g/L pH 4 浴温 80℃Example 5 Tin pyrophosphate 0.25 mol / L Silver oxide 0.1 mol / L Potassium iodide 0.5 mol / L Thiourea 1 mol / L Sodium pyrophosphate 0.6 mol / L Newcol 2607 (Nippon Emulsifier Co., Ltd.) 0.2 g / L ADEKA COL PS-440E (manufactured by Asahi Denka Co., Ltd.) 0.3 g / L Mercaptosuccinic acid 30 g / L 2,4-Diamino-6- [2'-methylimidazolyl (1 ') ethyl] -1,3,5-triazine 0.05 g / L To 8-hydroxyquinoline 5 mol propylene oxide addition product 1 g / L Benzotriazole 0.05 g / L pH 4 Bath temperature 80 ℃
【0032】実施例6 メタンスルホン酸錫 0.004 mol/L メルカプトコハク酸銀 0.0005 mol/L メルカプトコハク酸 0.001 mol/L ヨウ化カリ 0.5 mol/L チオ尿素 1 mol/L グルコン酸ナトリウム 0.2 mol/L 1−ヒドロキシエタン−1,1−ビスホスホン酸 0.01 mol/L アデカトールPS−10(旭電化工業(株)社製) 0.01 g/L ナイミーンL207(日本油脂(株)社製) 0.1 g/L アセタミン24(花王(株)社製) 20 g/L β−N−ドデシルアミノプロピオグアナミン 0.1 g/L ニトロ安息香酸 1 g/L ジアセチル 0.1 g/L ヒドロキノン 1 g/L pH 6 浴温 70℃Example 6 Tin methanesulfonate 0.004 mol / L Mercaptosuccinate silver 0.0005 mol / L Mercaptosuccinic acid 0.001 mol / L Potassium iodide 0.5 mol / L Thiourea 1 mol / L Sodium gluconate 0.2 mol / L 1-hydroxyethane-1,1-bisphosphonic acid 0.01 mol / L ADEKA TOL PS-10 (manufactured by Asahi Denka Co., Ltd.) 0.01 g / L Nymeen L207 (Nippon Yushi Co., Ltd.) 0.1 g / L Acetamine 24 (manufactured by Kao Corporation) 20 g / L β-N-dodecylaminopropioguanamine 0.1 g / L Nitrobenzoic acid 1 g / L Diacetyl 0.1 g / L Hydroquinone 1 g / L pH 6 Bath temperature 70 ℃
【0033】実施例7
試料にはニッケルめっきを約3μm施したテストパネル
を使用した。
ホウフッ化錫 0.1 mol/L
硝酸銀 0.004 mol/L
臭化カリ 0.004 mol/L
ヨウ化カリ 0.5 mol/L
チオ尿素 1 mol/L
グルコン酸ナトリウム 1 mol/L
アスコルビン酸 0.2 mol/L
ノイゲンEA−150(第一工業製薬(株)社製) 0.05 g/L
テトロニックTR−701(旭電化工業(株)社製) 0.3 g/L
ニッコールCA101(日光ケミカルズ(株)社製) 0.5 g/L
サリチル酸フェニル 0.5 g/L
3,4−クロロメチルアニリン 0.5 g/L
N-(3−ヒドロキシブチリデン)-p-スルファニル酸 5 g/L
イソバレルアルデヒド 0.005 g/L
グリオキシル酸 5 g/L
硝酸アンモニウム 20 g/L
pH 13
浴温 40℃Example 7 A test panel having nickel plating of about 3 μm was used as a sample. Tin borofluoride 0.1 mol / L Silver nitrate 0.004 mol / L Potassium bromide 0.004 mol / L Potassium iodide 0.5 mol / L Thiourea 1 mol / L Sodium gluconate 1 mol / L Ascorbic acid 0 .2 mol / L Neugen EA-150 (manufactured by Dai-ichi Kogyo Seiyaku Co., Ltd.) 0.05 g / L Tetronic TR-701 (manufactured by Asahi Denka Co., Ltd.) 0.3 g / L Nikkor CA101 ( Nikko Chemicals Co., Ltd.) 0.5 g / L Phenyl salicylate 0.5 g / L 3,4-chloromethylaniline 0.5 g / L N- (3-hydroxybutylidene) -p-sulfanilic acid 5 g / L Isovaleraldehyde 0.005 g / L Glyoxylic acid 5 g / L Ammonium nitrate 20 g / L pH 13 Bath temperature 40 ° C
【0034】実施例8 スルファミン酸錫 0.1 mol/L ヨウ化銀 0.004 mol/L コハク酸イミド 0.004 mol/L ヨウ化カリ 0.5 mol/L チオ尿素 1 mol/L ピロリン酸ナトリウム 0.5 mol/L グリシン 0.1 g/L ブラウノンEL−1509(青木油脂工業(株)社製) 0.05 g/L エパン740(第一工業製薬(株)社製) 0.05 g/L 2,4−ジクロロアセトフェノン 0.5 g/L o−トルイジンとアセトアルデヒド縮合物 5 g/L ヒドラジン 1 g/L リン酸2水素アンモニウム 5 g/L pH 3 浴温 80℃Example 8 Tin sulfamate 0.1 mol / L Silver iodide 0.004 mol / L Succinimide 0.004 mol / L Potassium iodide 0.5 mol / L Thiourea 1 mol / L Sodium pyrophosphate 0.5 mol / L Glycine 0.1 g / L Brownon EL-1509 (Aoki Yushi Kogyo Co., Ltd.) 0.05 g / L Epan 740 (Daiichi Kogyo Seiyaku Co., Ltd.) 0.05 g / L 2,4-dichloroacetophenone 0.5 g / L o-Toluidine and acetaldehyde condensate 5 g / L Hydrazine 1 g / L Ammonium dihydrogen phosphate 5 g / L pH 3 Bath temperature 80 ℃
【0035】各めっき浴から得られた無電解めっき試験
の結果を表1にまとめた。The results of the electroless plating test obtained from each plating bath are summarized in Table 1.
【表1】 [Table 1]
【0036】[0036]
【発明の効果】この発明に係る無電解錫−銀合金めっき
浴は、平滑で緻密な錫−銀合金めっき皮膜が非シアンの
浴から得られるものであり、錫−鉛はんだに代替する錫
−銀はんだに対応可能な表面処理を提供するものであ
る。INDUSTRIAL APPLICABILITY The electroless tin-silver alloy plating bath according to the present invention has a smooth and dense tin-silver alloy plating film obtained from a non-cyan bath. The present invention provides a surface treatment compatible with silver solder.
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 平8−239774(JP,A) 特開 平5−221763(JP,A) 特開 平5−287543(JP,A) 特開 平5−112874(JP,A) 特開 平4−289178(JP,A) 特開 平7−97467(JP,A) 特開 昭50−20362(JP,A) 特開 平9−296274(JP,A) (58)調査した分野(Int.Cl.7,DB名) C23C 18/48 ─────────────────────────────────────────────────── ─── Continuation of the front page (56) Reference JP-A-8-239774 (JP, A) JP-A-5-221763 (JP, A) JP-A-5-287543 (JP, A) JP-A-5- 112874 (JP, A) JP 4-289178 (JP, A) JP 7-97467 (JP, A) JP 50-20362 (JP, A) JP 9-296274 (JP, A) (58) Fields investigated (Int.Cl. 7 , DB name) C23C 18/48
Claims (8)
る非シアン系錫−銀合金無電解めっき液: (I)2価の錫の非シアン化合物及び1価の銀の非シア
ン化合物、及び (II)1価の銀化合物を液中に安定に保つに必要な量の
(a)チオ尿素及びアルキル基の炭素数が1〜3のモノ
−又はジ−アルキルチオ尿素、(b)チオ硫酸、(c)
ヨウ素化合物、(d)臭素化合物、(e)コハク酸イミ
ド、及び(f)メルカプトコハク酸から選ばれた化合物
又はその塩の1種又は2種以上。1. A non-cyan type tin-silver alloy electroless plating solution containing the following (I) and (II) as essential components: (I) a non-cyan compound of divalent tin and a non-cyan of monovalent silver. A compound, and (II) a mono- or di-alkyl thiourea in which the amount of (a) thiourea and the alkyl group having 1 to 3 carbon atoms are sufficient to keep the monovalent silver compound stable in the liquid, (b) Thiosulfate, (c)
One or more compounds selected from iodine compounds, (d) bromine compounds, (e) succinimide, and (f) mercaptosuccinic acid, or salts thereof.
定に保つために下記の(a)〜(j)より選ばれた錯化
剤の1種若しくは2種以上を添加してなる請求項1記載
の非シアン系錫−銀合金無電解めっき液: (a)アルキル基の炭素数が0〜3の脂肪族ジカルボン
酸、 (b)アルキル基の炭素数が1〜2の脂肪族ヒドロキシ
モノカルボン酸、 (c)アルキル基の炭素数が1〜3の脂肪族ヒドロキシ
ポリカルボン酸、 (d)単糖類及びその一部が酸化されたポリヒドロキシ
カルボン酸並びにそれらの環状エステル化合物、 (e)アルキル基の炭素数が1〜4の脂肪族モノ−若し
くはジ−アミノ、モノ−若しくはジ−カルボン酸、 (f)アルキル基の炭素数が2〜3の脂肪族モノメルカ
プトモノカルボン酸及び脂肪族モノメルカプトジカルボ
ン酸及び脂肪族モノメルカプトモノアミノモノカルボン
酸、 (g)アルキル基の炭素数が2〜3の脂肪族モノスルホ
モノカルボン酸及び脂肪族モノスルホジカルボン酸、 (h)下記のアミンカルボン酸:エチレンジアミンテト
ラ酢酸(EDTA)、イミノジ酢酸(IDA)、ニトリ
ロトリ酢酸(NTA)、ジエチレントリアミンペンタ酢
酸(DTPA)、トリエチレンテトラミンヘキサ酢酸
(TTHA)、エチレンジオキシビス(エチルアミン)
−N,N,N’,N’−テトラ酢酸、グリコールエチレ
ンジアミンテトラ酢酸(GEDTA)及びN−ヒドロキ
シエチルエチレンジアミンテトラ酢酸(HEEDTA)
から選ばれるもの、 (i)縮合リン酸、及び (j)アルカンの炭素数が1〜3のヒドロキシアルカン
ビスホスホン酸。2. Further, one or more complexing agents selected from the following (a) to (j) are added in order to keep the divalent tin compound stable in the aqueous solution. Item 1. Non-cyanide tin-silver alloy electroless plating solution according to Item 1: (a) Aliphatic dicarboxylic acid having an alkyl group having 0 to 3 carbon atoms, (b) Aliphatic hydroxy having an alkyl group having 1 to 2 carbon atoms A monocarboxylic acid, (c) an aliphatic hydroxypolycarboxylic acid having an alkyl group having 1 to 3 carbon atoms, (d) a monosaccharide and a polyhydroxycarboxylic acid in which a part thereof is oxidized, and a cyclic ester compound thereof, (e) ) Aliphatic mono- or di-amino, mono- or di-carboxylic acid having 1 to 4 carbon atoms in the alkyl group, (f) Aliphatic monomercaptomonocarboxylic acid and fat having 2 to 3 carbon atoms in the alkyl group Group Monomercapto dicarb An acid and an aliphatic monomercaptomonoaminomonocarboxylic acid, (g) an aliphatic monosulfomonocarboxylic acid and an aliphatic monosulfodicarboxylic acid having an alkyl group having 2 to 3 carbon atoms, (h) the following aminecarboxylic acid: Ethylenediaminetetraacetic acid (EDTA), iminodiacetic acid (IDA), nitrilotriacetic acid (NTA), diethylenetriaminepentaacetic acid (DTPA), triethylenetetraminehexaacetic acid (TTHA), ethylenedioxybis (ethylamine)
-N, N, N ', N'-tetraacetic acid, glycol ethylenediaminetetraacetic acid (GEDTA) and N-hydroxyethylethylenediaminetetraacetic acid (HEEDTA)
Selected from the following: (i) condensed phosphoric acid, and (j) hydroxyalkane bisphosphonic acid having 1 to 3 carbon atoms.
を添加してなる請求項1又は2記載の無電解錫−銀合金
めっき液。3. The electroless tin-silver alloy plating solution according to claim 1, further comprising one or more surfactants added.
1種又は2種以上を添加してなる請求項1〜3のいずれ
かに記載の無電解錫−銀合金めっき液。4. The electroless tin-silver alloy plating solution according to claim 1, further comprising one or more reducing agents and / or antioxidants.
を添加してなる請求項1〜4のいずれかに記載の無電解
錫−銀合金めっき液。5. The electroless tin-silver alloy plating solution according to claim 1, further comprising one or more pH buffering agents.
上を添加してなる請求項1〜5のいずれかに記載の無電
解錫−銀合金めっき液。6. The electroless tin-silver alloy plating solution according to claim 1, further comprising one or more smoothing additives.
添加してなる請求項1〜6のいずれかに記載の無電解錫
−銀合金めっき液。7. The electroless tin-silver alloy plating solution according to claim 1, further comprising nitrate ions added as a precipitation accelerator.
めっき液に被めっき物を浸漬して、該被めっき物上に錫
−銀合金めっき皮膜を形成することを特徴とする無電解
錫−銀合金めっき方法。8. An object to be plated is dipped in the electroless plating solution according to any one of claims 1 to 7 to form a tin-silver alloy plating film on the object to be plated. Electrolytic tin-silver alloy plating method.
Priority Applications (1)
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JP13973296A JP3419995B2 (en) | 1996-05-10 | 1996-05-10 | Electroless tin-silver alloy plating bath |
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JP13973296A JP3419995B2 (en) | 1996-05-10 | 1996-05-10 | Electroless tin-silver alloy plating bath |
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JP3419995B2 true JP3419995B2 (en) | 2003-06-23 |
Family
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JP13973296A Expired - Fee Related JP3419995B2 (en) | 1996-05-10 | 1996-05-10 | Electroless tin-silver alloy plating bath |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1947215A2 (en) | 2007-01-22 | 2008-07-23 | C. Uyemura & Co, Ltd | Method for forming a displacement tin alloy plated film, displacement tin alloy plating bath and method for maintaining a plating performance |
KR101341159B1 (en) * | 2011-09-16 | 2013-12-13 | 서울시립대학교 산학협력단 | Method for plating light emitting diode lead frame having high reflectivity |
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---|---|---|---|---|
DE19954613A1 (en) | 1999-11-12 | 2001-05-17 | Enthone Omi Deutschland Gmbh | Process for electroless tinning of copper or copper alloys |
JP4640558B2 (en) * | 2000-09-14 | 2011-03-02 | 石原薬品株式会社 | Electroless tin-silver alloy plating bath |
DE10050862C2 (en) | 2000-10-06 | 2002-08-01 | Atotech Deutschland Gmbh | Bath and method for electroless deposition of silver on metal surfaces |
JP4665244B2 (en) * | 2005-05-12 | 2011-04-06 | 石原薬品株式会社 | Replacement silver plating bath |
WO2008081637A1 (en) * | 2006-12-27 | 2008-07-10 | Japan Pure Chemical Co., Ltd. | Reduction-type electroless tin plating solution and tin plating films made by using the same |
JP5396583B2 (en) * | 2008-02-07 | 2014-01-22 | 石原ケミカル株式会社 | Electric tin or tin alloy plating bath, electronic parts on which the plating film is formed |
WO2010074067A1 (en) * | 2008-12-24 | 2010-07-01 | 日鉱金属株式会社 | Electroless tin or tin-alloy plating solution and electronic part with tin or tin-alloy coating film formed from the plating solution |
EP2476779B1 (en) | 2011-01-13 | 2013-03-20 | Atotech Deutschland GmbH | Immersion tin or tin alloy plating bath with improved removal of cupurous ions |
JP2013104111A (en) * | 2011-11-15 | 2013-05-30 | Shinshu Univ | Composite material including polyacetal as main material and method for producing the same |
CN117004948B (en) * | 2023-07-28 | 2025-01-24 | 江智威 | High-efficiency tin stripping agent and preparation method thereof |
-
1996
- 1996-05-10 JP JP13973296A patent/JP3419995B2/en not_active Expired - Fee Related
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1947215A2 (en) | 2007-01-22 | 2008-07-23 | C. Uyemura & Co, Ltd | Method for forming a displacement tin alloy plated film, displacement tin alloy plating bath and method for maintaining a plating performance |
KR101341159B1 (en) * | 2011-09-16 | 2013-12-13 | 서울시립대학교 산학협력단 | Method for plating light emitting diode lead frame having high reflectivity |
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JPH09302476A (en) | 1997-11-25 |
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