[go: up one dir, main page]

JP3407968B2 - Resonant optical deflector - Google Patents

Resonant optical deflector

Info

Publication number
JP3407968B2
JP3407968B2 JP07595294A JP7595294A JP3407968B2 JP 3407968 B2 JP3407968 B2 JP 3407968B2 JP 07595294 A JP07595294 A JP 07595294A JP 7595294 A JP7595294 A JP 7595294A JP 3407968 B2 JP3407968 B2 JP 3407968B2
Authority
JP
Japan
Prior art keywords
mirror
optical deflector
rotary shaft
shaft
type optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP07595294A
Other languages
Japanese (ja)
Other versions
JPH07281118A (en
Inventor
倫久 高田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujifilm Holdings Corp
Original Assignee
Fuji Photo Film Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Photo Film Co Ltd filed Critical Fuji Photo Film Co Ltd
Priority to JP07595294A priority Critical patent/JP3407968B2/en
Publication of JPH07281118A publication Critical patent/JPH07281118A/en
Application granted granted Critical
Publication of JP3407968B2 publication Critical patent/JP3407968B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
  • Mechanical Optical Scanning Systems (AREA)

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、スキャナーにおいて光
を走査させるために反射ミラーを回転振動させる共振型
光偏向器に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a resonance type optical deflector for rotating and oscillating a reflecting mirror for scanning light in a scanner.

【0002】[0002]

【従来の技術】近年、ミラーを高速度で回転振動させる
ことにより画像等の二次元情報を処理する光スキャナー
が広範に利用されている。
2. Description of the Related Art In recent years, optical scanners for processing two-dimensional information such as images by rotating and oscillating a mirror at high speed have been widely used.

【0003】前記光スキャナーでは、ミラーを高速で回
転振動させるために、弾性部材をミラー等に装着し、そ
の弾性部材の共振現象を利用してミラーの慣性を低下さ
せる装置(以下、レゾナントスキャナーという)が提案
されている。このレゾナントスキャナーでは、前記弾性
部材によってミラーが反対方向に回転振動を切り換える
時に、反転速度が向上するとともに、前記共振現象によ
って慣性が低減される。したがって、前記レゾナントス
キャナーでは高速でミラーが回転振動可能になり、前記
画像情報を高速に処理できる。
In the optical scanner, an elastic member is attached to the mirror or the like in order to rotationally oscillate the mirror at a high speed, and the resonance phenomenon of the elastic member is used to reduce the inertia of the mirror (hereinafter referred to as a resonant scanner). ) Is proposed. In this resonant scanner, when the elastic member switches the rotational vibration in the opposite direction, the reversing speed is improved and the inertia phenomenon is reduced by the resonance phenomenon. Therefore, in the resonant scanner, the mirror can rotate and vibrate at high speed, and the image information can be processed at high speed.

【0004】[0004]

【発明が解決しようとする課題】ところで、前記レゾナ
ントスキャナーでは、ミラーが回転軸に装着され、前記
回転軸の一端にモータが装着されている。このため、前
記モータ内では、磁力の作用により回転軸が回転中心か
ら離間することがあり、この結果、ミラーは回転軸と一
緒に変位するに至る。すなわち、ミラーによって反射さ
れる走査光は、画像情報に対して振れることになる(以
下、ウォブルという)。したがって、画像処理による、
期待される高い精度、高い再現性が得られない不都合が
ある。
In the resonant scanner, the mirror is mounted on the rotary shaft, and the motor is mounted on one end of the rotary shaft. Therefore, in the motor, the rotating shaft may be separated from the rotation center due to the action of the magnetic force, and as a result, the mirror is displaced together with the rotating shaft. That is, the scanning light reflected by the mirror is shaken with respect to the image information (hereinafter referred to as wobble). Therefore, by image processing,
There is an inconvenience that the expected high accuracy and high reproducibility cannot be obtained.

【0005】例えば、図7に示すように、Y(イエロ
ー)、M(マゼンタ)、C(シアン)、K(ブラック)
の画像情報が走査光Lの主走査方向に記録されている記
録担体から画像情報を読み出し、前記Y、M、C、Kの
画像情報を重ね合わせて画像を再現する装置の場合、前
記ウォブルによる走査光Lの副走査方向のずれ(幅d)
によって重ね合わせる画像情報が不正確になり、再現さ
れた画像に色ずれが生ずるおそれがあった。
For example, as shown in FIG. 7, Y (yellow), M (magenta), C (cyan), K (black).
In the case of a device that reads out image information from a record carrier on which image information is recorded in the main scanning direction of the scanning light L and reproduces an image by superimposing the image information of Y, M, C, and K, by the wobble. Shift of scanning light L in the sub-scanning direction (width d)
As a result, the image information to be superimposed becomes inaccurate, and the reproduced image may have a color shift.

【0006】そこで、この種の欠点を克服するために、
回転振動軸の一端に固着され、磁石を組み込むソレノイ
ドに対して、バランサとして機能するウエイトをその他
端側に設ける構造のものが案出されている。すなわち、
ソレノイドとウエイトとの間に角柱からなる回転振動軸
が取着され、該回転振動軸にミラーが固着される構造で
ある。
[0006] Therefore, in order to overcome this kind of drawback,
A structure has been devised in which a weight that functions as a balancer is provided on the other end side of a solenoid that incorporates a magnet and is fixed to one end of the rotary vibration shaft. That is,
A rotary vibration shaft formed of a prism is attached between the solenoid and the weight, and a mirror is fixed to the rotary vibration shaft.

【0007】しかしながら、この構成では、ミラーを作
動させる際、たとえ、ウエイトがあったにせよ、ソレノ
イドの磁石が変位して回転駆動軸が傾斜し、ウォブルが
発生する懸念が存在していた。
However, in this structure, when the mirror is operated, even if there is a weight, the magnet of the solenoid is displaced and the rotary drive shaft is tilted, which may cause wobble.

【0008】本発明は、この種の問題を解決するために
なされたものであって、レゾナントスキャナーにおい
て、精度良く画像情報を処理できる共振型光偏向器を提
供することを目的とする。
The present invention has been made to solve this kind of problem, and an object of the present invention is to provide a resonance type optical deflector capable of processing image information with high precision in a resonant scanner.

【0009】[0009]

【課題を解決するための手段】前記の目的を達成するた
めに、本発明は、回転軸に装着されたミラーを回転振動
させることにより画像等の二次元情報を処理するスキャ
ナーにおいて、前記ミラーを回転振動させる共振型光偏
向器であって、走査光を主走査方向に偏向させる反射型
ミラーと、前記反射型ミラーが装着された回転軸と、前
記回転軸の両端にそれぞれ装着されるとともに、前記回
転軸の軸線上に重心が位置し、当該回転軸を駆動する一
組の回転駆動手段と、一端が前記回転軸に取着され、他
端が支持体に取着された共振用弾性部材と、を備え、前
記回転駆動手段により前記反射型ミラーを回転振動させ
る際、弾性部材の共振現象を利用して当該反射型ミラー
を回転振動させることを特徴とする。
In order to achieve the above object, the present invention provides a scanner for processing two-dimensional information such as an image by rotationally oscillating a mirror mounted on a rotary shaft. A resonance type optical deflector for rotationally vibrating, a reflection type mirror for deflecting scanning light in a main scanning direction, a rotation shaft on which the reflection type mirror is mounted, and both ends of the rotation shaft, A center of gravity is located on the axis of the rotating shaft, a set of rotation driving means for driving the rotating shaft, and a resonance elastic member having one end attached to the rotating shaft and the other end attached to a support. And, when the rotary driving means rotationally vibrates the reflective mirror, the resonant mirror of the elastic member is used to rotationally vibrate the reflective mirror.

【0010】[0010]

【作用】本発明に係る共振型光偏向器では、前記回転軸
の軸線上に重心が位置する一組の回転駆動手段が回転軸
の両端にそれぞれ装着されるため、回転駆動手段の駆動
により回転軸の傾斜、所謂、面倒れが生じかけても、反
射型ミラーの傾斜が抑制される。したがって、走査光の
ウォブルが抑制され、画像情報を精度良く処理できる。
In the resonance type optical deflector according to the present invention, since a pair of rotation driving means whose center of gravity is located on the axis of the rotation shaft is attached to each end of the rotation shaft, the rotation drive means drives the rotation. Even if the axis is tilted, that is, the surface is tilted, the tilt of the reflective mirror is suppressed. Therefore, the wobble of the scanning light is suppressed, and the image information can be processed with high accuracy.

【0011】特に、それぞれの回転駆動手段をソレノイ
ドとしている場合には、前記回転軸の両端のソレノイド
を同期して駆動することにより、回転軸が軸方向に対し
て平行に変位するため、当該回転軸の傾斜を阻止でき
る。したがって、走査光にウォブルが発生することな
く、精度良く画像情報が処理できる。
Particularly, when each of the rotation driving means is a solenoid, the rotation shafts are displaced in parallel to the axial direction by driving the solenoids at both ends of the rotation shaft in synchronism with each other. The tilt of the shaft can be prevented. Therefore, the image information can be processed with high precision without generating wobble in the scanning light.

【0012】[0012]

【実施例】本発明に係る共振型光偏向器について、好適
な実施例を挙げ、添付の図面を参照しながら以下詳細に
説明する。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The resonance type optical deflector according to the present invention will be described in detail below with reference to the accompanying drawings with reference to preferred embodiments.

【0013】本発明の実施例に係る共振型光偏向器10
は、図1に示すように、円筒管形状の筐体12を含む。
筐体12は円周上に沿ってほぼ180°切り欠いた開口
部14を有しており、後述するミラーがこの開口部14
に臨むよう前記筐体12内に内装される。
A resonant optical deflector 10 according to an embodiment of the present invention.
Includes a housing 12 having a cylindrical tube shape, as shown in FIG.
The housing 12 has an opening 14 that is cut out by approximately 180 ° along the circumference, and a mirror to be described later has this opening 14
The interior of the housing 12 is exposed to the outside.

【0014】筐体12内には断面円弧状の支持体16が
固設されるとともに、前記筐体12内の下部には回転駆
動手段として後述する振動軸の駆動源である第1のソレ
ノイド18が設けられる。第1ソレノイド18は、図2
に示すように、コイル20a、20bの内側に磁石24
を備え、前記磁石24には、図3に示すように、角柱か
らなる振動軸26が取着される。そして、前記振動軸2
6の中間部にはリブ27を介して反射面が扁平なミラー
28が前記筐体12の開口部14に臨んで取り付けられ
る。振動軸26の上端には、前記第1ソレノイド18と
実質的に同一の第2のソレノイド18aが設けられてい
る。第2ソレノイド18aは、第1ソレノイド18と同
様に磁石24aを含む。この場合、ミラー28と振動軸
26およびリブ27とから構成される可動部32の重心
位置が振動中心と一致するように設定される。前記ソレ
ノイド18、18aでは、それぞれのコイルの位置20
a、20bを整合させるとともに磁石24、24aの位
相を揃えておく。
A support 16 having an arcuate cross section is fixedly provided in the housing 12, and a first solenoid 18 which is a drive source of a vibrating shaft, which will be described later, serves as a rotation drive means in a lower portion of the housing 12. Is provided. The first solenoid 18 is shown in FIG.
As shown in FIG.
As shown in FIG. 3, a vibration shaft 26 made of a prism is attached to the magnet 24. And the vibration shaft 2
A mirror 28 having a flat reflecting surface is attached to an intermediate portion of 6 through a rib 27 so as to face the opening 14 of the housing 12. A second solenoid 18 a, which is substantially the same as the first solenoid 18, is provided on the upper end of the vibration shaft 26. The second solenoid 18a includes a magnet 24a like the first solenoid 18. In this case, the position of the center of gravity of the movable portion 32 including the mirror 28, the vibration shaft 26, and the rib 27 is set so as to coincide with the vibration center. In the solenoids 18 and 18a, the position 20 of each coil is
The magnets 24 and 24a are aligned in phase while the magnets a and 20b are aligned.

【0015】前記振動軸26の上下両端部近傍にはJ字
形状に湾曲した板ばね34a、34bおよび36a、3
6bの一端部が取着され、また、前記板ばね34a、3
4bおよび36a、36bの他端部は前記支持体16に
取着される。この場合、前記J字形状の板ばね34a、
34bおよび36a、36bはその中央部においてそれ
ぞれほぼ直角に交差して配置される。板ばね34a、3
4bおよび36a、36bの交差位置は可動部32のほ
ぼ重心の位置に一致するように配置される。
Leaf springs 34a, 34b and 36a, 3a and 3a, which are curved in a J shape, are provided near the upper and lower ends of the vibrating shaft 26.
One end of 6b is attached, and the leaf springs 34a, 3
The other ends of 4b and 36a, 36b are attached to the support 16. In this case, the J-shaped leaf spring 34a,
34b and 36a, 36b are arranged so as to intersect each other at a substantially right angle in the central portion thereof. Leaf springs 34a, 3
The crossing positions of 4b and 36a, 36b are arranged so as to substantially coincide with the position of the center of gravity of the movable portion 32.

【0016】本実施例に係る共振型光偏向器10は基本
的には以上のように構成されるものであり、次にその作
用並びに効果について説明する。この場合、前記共振型
光偏向器10が適用される画像走査装置の例を挙げて説
明する。
The resonance type optical deflector 10 according to the present embodiment is basically constructed as described above. Next, its operation and effect will be explained. In this case, an example of an image scanning device to which the resonant optical deflector 10 is applied will be described.

【0017】先ず、原稿あるいは記録担体等の被走査体
に対して走査光を走査させるにあたり、図2に示すよう
に、一組のソレノイド18、18aのコイル20a、2
0bに対して同期させて外部より交流電流を供給する。
これによって、ソレノイド18、18aの磁石24、2
4aおよび振動軸26が揺動され、振動軸26に取着さ
れたミラー28が矢印方向に振動する(図4参照)。そ
こで、ミラー28に入射した走査光Lは前記ミラー28
によって反射偏向され、図示しない走査レンズを介して
原稿等の被走査体上を走査し、画像の読取あるいは記録
が行われる。
First, when scanning a scanning object such as a document or a record carrier with scanning light, as shown in FIG. 2, a pair of solenoids 18 and coils 20a and 2a of a solenoid 18a are provided.
An alternating current is supplied from the outside in synchronization with 0b.
Thereby, the magnets 24, 2 of the solenoids 18, 18a
4a and the vibrating shaft 26 are swung, and the mirror 28 attached to the vibrating shaft 26 vibrates in the arrow direction (see FIG. 4). Therefore, the scanning light L incident on the mirror 28 is reflected by the mirror 28.
The image is read or recorded by being reflected and deflected by the scanning means and scanning the scanned object such as a document through a scanning lens (not shown).

【0018】この際、ソレノイド18、18aのコイル
20a、20bに対して同期して交流電流が供給される
とともに、磁石24、24aの位相が揃えられているこ
とにより、コイル20a、20bおよび磁石24、24
aに磁力が作用する。例えば、コイル20aには、磁石
の軸方向と平行な部分の電流の向きによって図5に示す
ような力F1、F2が作用し、この結果、前記力F1、
F2の合力の反力である力F3が磁石24、24aに作
用することになる。また、交流電流が切り替わることに
より、磁石24、24aには反対側に力F3′が作用す
る。
At this time, the alternating current is supplied to the coils 20a and 20b of the solenoids 18 and 18a in synchronization with each other, and the phases of the magnets 24 and 24a are aligned, so that the coils 20a and 20b and the magnet 24 are aligned. , 24
Magnetic force acts on a. For example, the forces F1 and F2 as shown in FIG. 5 act on the coil 20a depending on the direction of the current in the portion parallel to the axial direction of the magnet, and as a result, the forces F1 and F2 are applied.
A force F3, which is a reaction force of the resultant force of F2, acts on the magnets 24, 24a. Further, by switching the alternating current, a force F3 'acts on the magnets 24, 24a on the opposite side.

【0019】したがって、前記共振型光偏向器10の模
式図(図6参照)に示すように、磁石24、24aには
力F3、F3′が交互に作用して、磁石24、24aを
A、B方向に変位させる。しかしながら、この場合、磁
石24、24aは実質的に同一なソレノイド18、18
aの存在下にA、B方向に平行に変位することがあって
も、傾斜することはなく、ミラーが傾く、すなわち、面
倒れを生ずることを阻止することができる。結局、ミラ
ー28の面倒れが抑制されるために、走査光Lのウォブ
ルが抑制され、画像情報を精度良く処理できる。
Therefore, as shown in the schematic view of the resonance type optical deflector 10 (see FIG. 6), the forces F3 and F3 'act alternately on the magnets 24 and 24a to cause the magnets 24 and 24a to move to A, Displace in the B direction. However, in this case, the magnets 24, 24a are substantially identical solenoids 18,18.
Even if it is displaced parallel to the A and B directions in the presence of a, it does not tilt, and it is possible to prevent the mirror from tilting, that is, from causing surface tilt. Eventually, since the surface tilt of the mirror 28 is suppressed, the wobble of the scanning light L is suppressed, and the image information can be processed accurately.

【0020】[0020]

【発明の効果】本発明に係る共振型光偏向器によれば、
以下の効果が得られる。
According to the resonance type optical deflector of the present invention,
The following effects can be obtained.

【0021】回転振動手段が回転軸の両端にそれぞれ装
着された共振型光偏向器において、前記回転振動手段に
よって惹起される回転軸の傾きが抑制できる。したがっ
て、反射型ミラーの面倒れが抑制され、走査光による画
像情報の処理精度が向上する。
In the resonance type optical deflector in which the rotary vibrating means is attached to both ends of the rotary shaft, the tilt of the rotary shaft caused by the rotary vibrating means can be suppressed. Therefore, the surface tilt of the reflective mirror is suppressed, and the processing accuracy of the image information by the scanning light is improved.

【0022】また、前記回転振動手段がソレノイドであ
り、それぞれのソレノイドを同期させて駆動することに
より、回転軸の平行移動のみで当該回転軸が傾斜するこ
とを阻止できる。したがって、反射型ミラーが面倒れす
ることなく、走査光による画像情報を一層精度良く処理
できる。
Further, the rotary vibration means is a solenoid, and by driving the solenoids in synchronization with each other, it is possible to prevent the rotary shaft from tilting only by the parallel movement of the rotary shaft. Therefore, it is possible to process the image information by the scanning light with higher accuracy without causing the reflective mirror to tilt.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の実施例に係る共振型光偏向器の要部構
成斜視図である。
FIG. 1 is a perspective view of a main part of a resonance type optical deflector according to an embodiment of the present invention.

【図2】本発明の実施例に係る共振型光偏向器のソレノ
イドの構成斜視図である。
FIG. 2 is a perspective view showing the configuration of a solenoid of the resonance type optical deflector according to the embodiment of the present invention.

【図3】本発明の実施例の共振型光偏向器の要部斜視説
明図である。
FIG. 3 is a perspective view of a main part of a resonant optical deflector according to an embodiment of the present invention.

【図4】本発明の実施例に係るミラーの振動状態説明図
である。
FIG. 4 is a vibration state explanatory diagram of a mirror according to an embodiment of the present invention.

【図5】本発明の実施例に係る共振型光偏向器のソレノ
イドに作用する力の説明図である。
FIG. 5 is an explanatory diagram of a force acting on a solenoid of the resonant optical deflector according to the embodiment of the present invention.

【図6】本発明の実施例に係る共振型光偏向器の模式図
である。
FIG. 6 is a schematic diagram of a resonant optical deflector according to an example of the present invention.

【図7】従来例に係る走査光のウォブル状態説明図であ
る。
FIG. 7 is an explanatory diagram of a wobble state of scanning light according to a conventional example.

【符号の説明】[Explanation of symbols]

10…共振型光偏向器 18、18a…
ソレノイド 20a、20b…コイル 24、24a…
磁石 26…振動軸 28…ミラー
10 ... Resonant optical deflector 18, 18a ...
Solenoids 20a, 20b ... Coil 24, 24a ...
Magnet 26 ... Vibration axis 28 ... Mirror

Claims (2)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】回転軸に装着されたミラーを回転振動させ
ることにより画像等の二次元情報を処理するスキャナー
において、前記ミラーを回転振動させる共振型光偏向器
であって、 走査光を主走査方向に偏向させる反射型ミラーと、 前記反射型ミラーが装着された回転軸と、 前記回転軸の両端にそれぞれ装着されるとともに、前記
回転軸の軸線上に重心が位置し、当該回転軸を駆動する
一組の回転駆動手段と、 一端が前記回転軸に取着され、他端が支持体に取着され
た共振用弾性部材と、 を備え、前記回転駆動手段により前記反射型ミラーを回
転振動させる際、弾性部材の共振現象を利用して当該反
射型ミラーを回転振動させることを特徴とする共振型光
偏向器。
1. A scanner for processing two-dimensional information such as an image by rotationally vibrating a mirror mounted on a rotary shaft, which is a resonance type optical deflector for rotationally vibrating the mirror, wherein main scanning of scanning light is performed. A reflective mirror that deflects in a direction, a rotary shaft on which the reflective mirror is mounted, and a rotary shaft that is mounted on both ends of the rotary shaft and that has a center of gravity on the axis of the rotary shaft and drives the rotary shaft. A pair of rotation driving means, and a resonance elastic member having one end attached to the rotation shaft and the other end attached to a support, and the rotation driving means rotates and vibrates the reflective mirror. A resonance type optical deflector characterized by rotating and vibrating the reflection type mirror by utilizing a resonance phenomenon of an elastic member.
【請求項2】請求項1記載の共振型光偏向器において、 前記回転駆動手段は、それぞれ同期して駆動されるソレ
ノイドであることを特徴とする共振型光偏向器。
2. The resonance type optical deflector according to claim 1, wherein the rotation driving means are solenoids driven in synchronization with each other.
JP07595294A 1994-04-14 1994-04-14 Resonant optical deflector Expired - Fee Related JP3407968B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP07595294A JP3407968B2 (en) 1994-04-14 1994-04-14 Resonant optical deflector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP07595294A JP3407968B2 (en) 1994-04-14 1994-04-14 Resonant optical deflector

Publications (2)

Publication Number Publication Date
JPH07281118A JPH07281118A (en) 1995-10-27
JP3407968B2 true JP3407968B2 (en) 2003-05-19

Family

ID=13591075

Family Applications (1)

Application Number Title Priority Date Filing Date
JP07595294A Expired - Fee Related JP3407968B2 (en) 1994-04-14 1994-04-14 Resonant optical deflector

Country Status (1)

Country Link
JP (1) JP3407968B2 (en)

Also Published As

Publication number Publication date
JPH07281118A (en) 1995-10-27

Similar Documents

Publication Publication Date Title
JP7421140B2 (en) Rotary reciprocating actuator
JP3552601B2 (en) Optical deflector and display device using the same
US5610752A (en) Optical reader with vibrating mirror
US5559319A (en) Oscillation bar code reader
US7433107B2 (en) Raster scanning display system
EP0557443A1 (en) Gyrating programmable scanner
US5663550A (en) Multiple-directional laser scanners
US20040027449A1 (en) Laser printing apparatus using a pivoting scanning mirror
US5764398A (en) Optical reader with vibrating mirror
JP3407968B2 (en) Resonant optical deflector
JP3467603B2 (en) Vibrating mirror scanning device
US20050078345A1 (en) Scanning device with improved magnetic drive
JP2008058434A (en) Rocking apparatus, light deflector using rocking apparatus, and image forming apparatus using light deflector
JP2003005100A (en) Optical modulator and projection device using the same
JPH0216860A (en) Color separation device
JP2534111B2 (en) Vibration support mechanism
JPH1153462A (en) Laser barcode scanner
US8238010B2 (en) MEMS device for producing a lemniscate pattern to counter zigzag effect
JPS6269224A (en) Optical scanning device
JP4346729B2 (en) Optical scanning device
JPS5833360A (en) Optical scanner
JP2010032827A (en) Vibration mirror and image recorder
JP2000275560A (en) Optical deflector in image forming device
JP2005326466A (en) Optical scanner and image forming apparatus
JPH05108860A (en) Bar code scanner

Legal Events

Date Code Title Description
R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R313111

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20080314

Year of fee payment: 5

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20080314

Year of fee payment: 5

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20090314

Year of fee payment: 6

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20090314

Year of fee payment: 6

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20100314

Year of fee payment: 7

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20100314

Year of fee payment: 7

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110314

Year of fee payment: 8

LAPS Cancellation because of no payment of annual fees