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JP3350139B2 - Method for producing spherical silica particles - Google Patents

Method for producing spherical silica particles

Info

Publication number
JP3350139B2
JP3350139B2 JP09513593A JP9513593A JP3350139B2 JP 3350139 B2 JP3350139 B2 JP 3350139B2 JP 09513593 A JP09513593 A JP 09513593A JP 9513593 A JP9513593 A JP 9513593A JP 3350139 B2 JP3350139 B2 JP 3350139B2
Authority
JP
Japan
Prior art keywords
silica particles
raw material
spherical silica
plasma
particle size
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP09513593A
Other languages
Japanese (ja)
Other versions
JPH06287012A (en
Inventor
幸伸 原
正彦 桂
好明 井上
一博 川嵜
誠二 横田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Neturen Co Ltd
Mitsubishi Chemical Corp
Original Assignee
Neturen Co Ltd
Mitsubishi Chemical Corp
Mitsubishi Rayon Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Neturen Co Ltd, Mitsubishi Chemical Corp, Mitsubishi Rayon Co Ltd filed Critical Neturen Co Ltd
Priority to JP09513593A priority Critical patent/JP3350139B2/en
Publication of JPH06287012A publication Critical patent/JPH06287012A/en
Application granted granted Critical
Publication of JP3350139B2 publication Critical patent/JP3350139B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00Silicon; Compounds thereof
    • C01B33/113Silicon oxides; Hydrates thereof
    • C01B33/12Silica; Hydrates thereof, e.g. lepidoic silicic acid
    • C01B33/18Preparation of finely divided silica neither in sol nor in gel form; After-treatment thereof
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01PINDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00Particle morphology
    • C01P2004/30Particle morphology extending in three dimensions
    • C01P2004/32Spheres
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01PINDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00Particle morphology
    • C01P2004/60Particles characterised by their size
    • C01P2004/61Micrometer sized, i.e. from 1-100 micrometer

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Glass Melting And Manufacturing (AREA)
  • Silicon Compounds (AREA)

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は、珪酸質原料から球状シ
リカ粒子を製造する方法、特に粒径0.03mm〜2.0
mmの範囲の球状シリカ粒子の製造方法に関する。
The present invention relates to a method for producing spherical silica particles from a siliceous raw material, and more particularly to a method for producing spherical silica particles having a particle size of 0.03 mm to 2.0 mm.
It relates to a method for producing spherical silica particles in the range of mm.

【0002】[0002]

【従来の技術】撹拌混合ミルの粉砕メディア、或いは石
英ガラス製ボールレンズ、焼結フィルターの原料として
球状シリカ粒子が用いられているが、これらの用途に用
いられる球状シリカ粒子はその粒径が0.03mm〜2.
0mmの範囲のものが好ましい。しかしながら、従来得ら
れる球状シリカ粒子は以下に詳述するように一般に粒径
が0.03mm以下であり、0.03mm以上、特に前記用
途に好適である粒径0.03mm〜2.0mmの球状シリカ
粒子を得ることは著しく困難である。
2. Description of the Related Art Spherical silica particles have been used as a raw material for grinding media of a stirring and mixing mill, ball lenses made of quartz glass, and sintered filters. 0.03 mm to 2.
Those having a range of 0 mm are preferred. However, conventionally obtained spherical silica particles generally have a particle size of 0.03 mm or less, and a spherical particle of 0.03 mm to 2.0 mm, which is particularly suitable for the above-mentioned applications, as described in detail below. Obtaining silica particles is extremely difficult.

【0003】従来、球状シリカ粒子は、次のような火炎
溶融法、燃焼法、ゾルーゲル法、石英ガラスの切り出し
研磨法等によって製造されている。火炎溶融法は、原料
に結晶質あるいは非晶質シリカを用い、酸素と水素また
はLPG火炎中で溶融させ、生成した球状シリカ粒子を
炉底または排ガスから回収する方法である。この方法で
製造できる球状シリカ粒子の粒径は、通常0.03mm以
下であり、火炎最高温度が約3000℃と低いため、
0.03mm以上の球状シリカ粒子を製造することは困難
である。燃焼法は、原料に四塩化珪素または珪素粉を用
い、酸素と水素またはLPG火炎中で燃焼させる方法で
ある。この方法で製造できる球状シリカ粒子の粒径は、
原料が燃焼してヒュームとなるため0.01μmから
1.0μmであると言われており、1.0μm以上の球
状シリカ粒子を製造することは困難である。ゾルーゲル
法は、原料の珪酸アルコキシドをアルコールと純水の混
合液中に少量づつ導入し、加水分解する方法である。こ
の時、溶液をアルカリ性に保ったり、界面活性剤で分散
させておくことにより、重縮合したシリカをゲル化また
は二次会合することなく球状シリカ粒子にすることがで
きる。この方法で製造できる球状シリカ粒子の粒径は、
重縮合が大きくなると形成が不可能になり壊れるため通
常0.03mm以下であり、粒径0.03mm以上の球状シ
リカ粒子を製造することは困難とされている。
Conventionally, spherical silica particles have been produced by the following flame fusion method, combustion method, sol-gel method, quartz glass cutting and polishing method, and the like. The flame fusion method is a method in which crystalline or amorphous silica is used as a raw material and is melted in oxygen and hydrogen or in an LPG flame, and the generated spherical silica particles are collected from a furnace bottom or an exhaust gas. The particle size of the spherical silica particles that can be produced by this method is usually 0.03 mm or less, and the maximum flame temperature is as low as about 3000 ° C.
It is difficult to produce spherical silica particles of 0.03 mm or more. The combustion method is a method in which silicon tetrachloride or silicon powder is used as a raw material and burned in oxygen and hydrogen or an LPG flame. The particle size of the spherical silica particles that can be produced by this method is
It is said that the size of the raw material is from 0.01 μm to 1.0 μm because the raw material burns to fume, and it is difficult to produce spherical silica particles of 1.0 μm or more. The sol-gel method is a method in which a raw material silicate alkoxide is introduced little by little into a mixture of alcohol and pure water, and is hydrolyzed. At this time, by keeping the solution alkaline or dispersing it with a surfactant, the polycondensed silica can be formed into spherical silica particles without gelling or secondary association. The particle size of the spherical silica particles that can be produced by this method is
If the polycondensation is too large, formation becomes impossible and it is broken, so that it is usually 0.03 mm or less, and it is considered difficult to produce spherical silica particles having a particle size of 0.03 mm or more.

【0004】一方、石英ガラスの切り出し研磨法は、水
晶を加熱、急冷して砕き、この粉を火炎溶融または電気
溶融してガラス化した後、さらに切断、研磨して球形に
加工する方法であり、原理的には任意の粒径の球状シリ
カ粒子を、製造することが可能である。しかし、この方
法は、水晶原料をガラス化した後、ガラスから一つ一つ
切断し、切断したものを研磨することにより球状シリカ
粒子を作るため、生産性が著しく悪く、そのために生産
コストが極めて高いと言う問題点がある。
On the other hand, the cutting and polishing method of quartz glass is a method in which quartz is heated and quenched to crush it, and the powder is flame-melted or electro-melted to be vitrified, and then cut and polished to form a spherical shape. In principle, it is possible to produce spherical silica particles of any size. However, in this method, since the quartz raw material is vitrified and then cut from the glass one by one, and the cut one is polished to produce spherical silica particles, the productivity is extremely poor, and therefore the production cost is extremely low. There is a problem that it is expensive.

【0005】[0005]

【発明が解決しようとする課題】以上のように、従来の
球状シリカ粒子製造技術では、粒径0.03mmから2.
0mmの球状シリカ粒子を製造するのは著しく困難であ
り、また、製造出来ても生産性が著しく悪くコストが極
めて高かくなるという問題点を有している。そこで本発
明は、従来の球状シリカ製造技術の上記問題点を克服し
て、従来得ることが困難であった粒径0.03mm〜2.
0mmの球状シリカ粒子を、容易に効率良く、しかも低コ
ストで経済的に製造することができる球状シリカ粒子の
新規な製造方法を提供することを目的とする。
As described above, in the conventional spherical silica particle production technology, the particle size is reduced from 0.03 mm to 2.
It is extremely difficult to produce spherical silica particles of 0 mm, and even if it can be produced, there is a problem that the productivity is extremely poor and the cost becomes extremely high. Therefore, the present invention overcomes the above-mentioned problems of the conventional spherical silica production technology and has a particle size of 0.03 mm to 2.
An object of the present invention is to provide a novel method for producing spherical silica particles that can easily and efficiently produce 0 mm spherical silica particles at low cost.

【0006】[0006]

【課題を解決する手段】本発明者は、球状シリカ粒子の
製造方法について鋭意研究を重ねた結果、珪酸質原料を
従来と全く異なる方法である高周波熱プラズマで溶融す
ることにより、粒径0.03mm〜2.0mmの範囲の球状
シリカ粒子を製造しうることを知見し、本発明に到達し
たものである。即ち、本発明は、珪酸質原料を高周波熱
プラズマ中を通過させて溶融させることにより、粒径
0.03mm〜2.0mmの範囲の球状シリカ粒子を生成さ
せることを特徴とする球状シリカ粒子の製造方法によっ
て前記課題を解決したものである。本発明で用いる珪酸
質原料は、結晶質、非晶質の何れでも良い。結晶質珪酸
質原料としては、天然水晶粉、合成水晶粉、珪石粉、珪
砂粉などを用いることができる。また、非晶質珪酸質原
料としては、アルカリ金属珪酸塩水溶液、四塩化珪素な
いしは珪酸アルコキシドを原料として得られた非晶質シ
リカを用いることができる。さらに結晶質の水晶粉、珪
石粉、珪砂粉等を溶融してガラス化し、これを粉砕した
ものを用いることもできる。
Means for Solving the Problems As a result of intensive studies on a method for producing spherical silica particles, the present inventor has found that a siliceous raw material is melted by a high-frequency thermal plasma, which is a completely different method from conventional methods, to obtain a particle diameter of 0.1%. The inventors have found that spherical silica particles in the range of 03 mm to 2.0 mm can be produced, and have reached the present invention. That is, the present invention provides a method for producing spherical silica particles having a particle diameter of 0.03 mm to 2.0 mm by passing a siliceous raw material through a high-frequency thermal plasma to melt the particles. This problem has been solved by a manufacturing method. The siliceous raw material used in the present invention may be either crystalline or amorphous. As the crystalline siliceous raw material, natural quartz powder, synthetic quartz powder, quartzite powder, quartz sand powder and the like can be used. As the amorphous siliceous raw material, an aqueous solution of an alkali metal silicate or amorphous silica obtained from silicon tetrachloride or silicate alkoxide can be used. Further, crystalline quartz powder, silica powder, silica sand powder, or the like may be melted and vitrified, and then pulverized.

【0007】前記珪酸質原料の粒度調整は、必要に応じ
て粉砕・分級処理を施して行われる。珪酸質原料を粉砕
する際には、通常の粉砕装置例えば、ポットミル、チュ
ーブミル、ユニカルボールミルまたはコンパートメント
ミル等の転動ボールミルや振動ボールミル、または塔式
粉砕機、撹拌槽型ミルなどの撹拌混合ミルまたはロール
ミル等を用いることができ、好ましくは、転動ボールミ
ル、振動ボールミル、振動ボールミルが用いられる。珪
酸質原料を粉砕・分級操作で汚染させないために、珪酸
質原料と接触する粉砕装置要部または必要に応じて用い
るボール、ロッド等の粉砕媒体の材質は、石英ガラス、
溶融石英、水晶、瑪瑙または珪石等の珪酸質材料中か
ら、それぞれ適宜選択すればよい。本発明による球状シ
リカ粒子の製造方法は、本質的に不純物の混入のない方
法であり、高純度の珪酸質原料を用いれば、得られる球
状シリカ粒子も高純度となる。
The particle size of the siliceous raw material is adjusted by pulverizing and classifying as necessary. When pulverizing the siliceous raw material, a conventional pulverizer such as a rolling mill or a vibrating ball mill such as a pot mill, a tube mill, a uniball ball mill or a compartment mill, or a stirring and mixing mill such as a tower mill or a stirring tank mill is used. Alternatively, a roll mill or the like can be used, and preferably, a rolling ball mill, a vibration ball mill, or a vibration ball mill is used. In order to prevent the siliceous raw material from being contaminated by the pulverizing / classifying operation, the material of the crushing medium such as a ball, a rod, or the like, which is used in contact with the siliceous raw material or as necessary, is quartz glass,
What is necessary is just to select each suitably from siliceous materials, such as fused quartz, quartz, agate, or silica stone. The method for producing spherical silica particles according to the present invention is a method essentially free of impurities. If a high-purity siliceous raw material is used, the resulting spherical silica particles will also have high purity.

【0008】一方、本発明で用いられる高周波熱プラズ
マとしては、プラズマ形成ガスを高周波誘導加熱するこ
とによって得られる高温度の電離ガス、即ち高周波誘導
熱プラズマが採用できる。高周波誘導熱プラズマは、誘
導加熱コイルを1個用いることにより形成される単一プ
ラズマフレームからなる場合、又は誘導加熱コイルを2
個別個に巻回させ、高周波電源2台を使用して二段階に
高周波誘導熱プラズマを発生させることによって形成さ
れる二段プラズマフレームからなる場合の何れでも可能
である。
On the other hand, as the high-frequency thermal plasma used in the present invention, a high-temperature ionized gas obtained by high-frequency induction heating of a plasma forming gas, that is, high-frequency induction thermal plasma can be adopted. The high-frequency induction thermal plasma consists of a single plasma frame formed by using one induction heating coil, or two induction heating coils.
Any of two-stage plasma frames formed by individually winding and generating high-frequency induction thermal plasma in two stages using two high-frequency power sources is possible.

【0009】[0009]

【作用】高周波熱プラズマは、ほぼ10,000K〜3,
000Kの高温の熱プレズマフレームを生成している。
珪酸質原料は、分級されて所定範囲の粒度に揃えられた
ものを使用し、前記プラズマフレーム中にパウダインジ
ェクタから供給することによって、一定の角度(背圧に
より調整可能)で広がりながら前記熱プラズマフレーム
中を落下する。珪酸質原料は、熱プラズマフレーム中を
通過する間に稜部が溶融しながら落下して行き、プラズ
マフレームの温度域範囲を離脱後は冷却されながら落下
することによって、形状は球状となる。球状シリカ粒子
の粒径は、分級された珪酸質原料の粒度に対応し、プラ
ズマフレームの通過時間(即ち、背圧、プラズマフレー
ムの長さ)を調整することで調節が可能であり、従来得
ることが困難であった粒径が10μm以上、とりわけ粒
径0.03mm〜2.0mmの大きい球状シリカ粒子を容易
に得ることができる。さらに二段プラズマの場合は、最
低通過時間が得られなかった原料粉を二段目の太いプラ
ズマによって再加熱され溶融時間が得られ、従来不可能
であった粒径の大きな球状シリカ粒子となる。
[Function] High frequency thermal plasma is approximately 10,000K ~ 3,
000K high temperature thermal plasma frame is generated.
The siliceous raw material is classified and adjusted to a predetermined range of particle size, and is supplied from the powder injector into the plasma frame to spread the thermal plasma while expanding at a certain angle (adjustable by back pressure). Fall in the frame. The siliceous raw material falls while melting at the ridge while passing through the thermal plasma frame, and falls while being cooled after leaving the temperature range of the plasma frame, so that the shape becomes spherical. The particle size of the spherical silica particles corresponds to the particle size of the classified siliceous raw material, and can be adjusted by adjusting the passage time of the plasma flame (that is, the back pressure, the length of the plasma flame). Large spherical silica particles having a particle size of 10 μm or more, especially 0.03 mm to 2.0 mm, which were difficult to obtain, can be easily obtained. Furthermore, in the case of the two-stage plasma, the raw material powder for which the minimum passage time was not obtained is reheated by the second-stage thick plasma, and the melting time is obtained, resulting in a spherical silica particle having a large particle size that was impossible in the past. .

【0010】[0010]

【実施例】以下、実施例および応用例によって本発明を
具体的に説明する。なお、本発明は、以下の実施例及び
応用例に限定されるものではない。まず、本発明に係る
球状シリカ粒子の製造方法を実施するための球状シリカ
粒子製造装置の具体例及び該装置による球状シリカの製
造方法を図を基に説明する。この球状シリカ製造装置
は、図1に示すように、原料供給用フィーダ1、プラズ
マトーチ2、保温塔3、冷却用チャンバ4及び球状シリ
カ粒子回収器5で構成されている。原料供給用フィーダ
1は、原料が貯留された振動ボールを振動させて原料を
送出させると共に、搬送ガスにより供給用配管6を介し
てパウダインジェクタ7に原料を供給し、該パウダイン
ジェクタからプラズマトーチによって発生している高周
波熱プラズマフレーム10中へ供給される。その際、搬
送ガスのガス圧を調節することによって珪酸質原料の供
給速度及びパウダインジェクタ7から熱プラズマフレー
ム中への拡がり角度を調整することができる。
The present invention will be specifically described below with reference to examples and application examples. Note that the present invention is not limited to the following examples and application examples. First, a specific example of an apparatus for producing spherical silica particles for carrying out the method for producing spherical silica particles according to the present invention and a method for producing spherical silica by the apparatus will be described with reference to the drawings. As shown in FIG. 1, the spherical silica production apparatus includes a feeder 1 for supplying a raw material, a plasma torch 2, a heat retaining tower 3, a cooling chamber 4, and a spherical silica particle collector 5. The raw material supply feeder 1 vibrates a vibrating ball in which the raw material is stored, sends out the raw material, supplies the raw material to the powder injector 7 via the supply pipe 6 with the carrier gas, and uses the plasma torch from the powder injector. It is supplied into the generated high-frequency thermal plasma frame 10. At that time, by adjusting the gas pressure of the carrier gas, it is possible to adjust the supply speed of the siliceous raw material and the spread angle from the powder injector 7 into the thermal plasma frame.

【0011】プラズマトーチ2は、図2に詳細に示され
ているように、保温塔3に一方端面が開口する管体8
の、他端面側から管内に所定のガスG1を注入し、保温
塔3に近接した管体8の外周に巻回した誘導コイル9に
図示していない高周波電源から電力を供給して高周波エ
ネルギーを発生させ、当該高周波エネルギーによって、
管内のプラズマ生成ガスを高温度の電離ガス、即ち熱プ
ラズマとする。この時、管体の内管壁に沿ってシースガ
スG2を供給し、プラズマトーチをプラズマの高温から
保護・冷却している。保温塔3は、発生させた熱プラズ
マの温度勾配と原料の落下距離を確保する機能を果たす
ために設けられたものであり、該保温塔3を落下して、
溶融した球状シリカ粒子は冷却用チャンバ4内で常温近
傍まで冷却され、回収器5に回収される。
As shown in detail in FIG. 2, the plasma torch 2 has a tubular body 8 having an open end on the heat retaining tower 3.
A predetermined gas G1 is injected into the tube from the other end side, and power is supplied from a high-frequency power supply (not shown) to an induction coil 9 wound around the outer periphery of the tube 8 close to the heat-retaining tower 3 to generate high-frequency energy. Generated by the high-frequency energy,
The plasma generating gas in the tube is a high temperature ionized gas, that is, a thermal plasma. At this time, the sheath gas G2 is supplied along the inner tube wall of the tube to protect and cool the plasma torch from the high temperature of the plasma. The heat retaining tower 3 is provided to fulfill a function of securing a temperature gradient of the generated thermal plasma and a falling distance of the raw material.
The fused spherical silica particles are cooled to near room temperature in the cooling chamber 4 and collected by the collecting device 5.

【0012】図3はプラズマトーチを変更した製造装置
の他の実施例であり、本実施例では管体20を上部に対
して下部を径大に形成し、径小部の外周に第1誘導コイ
ル21をその下方の径大部に第2誘導コイル22を別個
に巻回し、それぞれを別々の高周波電源に接続し別個に
制御できるようにしてある。それにより、図に概念的に
示すように細いプラズマフレームと太いプラズマフレー
ムが連続した二段プラズマを得ることができる。なお、
通常は保温塔は使用しなくても良い。従って、この装置
によれば、パウダインジェクタ7から供給される珪酸質
原料の破砕粉は、第1誘導コイルよる細いプラズマフレ
ーム25を通過し、さらに第2誘導コイル22による太
いプラズマフレーム26に突入し、再加熱される。それ
により、図にイメージ的に示すように、第1次プラズマ
フレームだけでは球状形成に必要な最低通過時間が得ら
れなかった原料粉でも、太いプラズマフレームで再加熱
されて次第に稜部が溶融して、球状に形成させることが
できる。
FIG. 3 shows another embodiment of the manufacturing apparatus in which the plasma torch is changed. In this embodiment, the tube 20 is formed so that the lower portion is formed larger in diameter than the upper portion, and the first guide is provided on the outer periphery of the small diameter portion. The second induction coil 22 is separately wound around the large diameter portion of the coil 21 below, and each is connected to a different high-frequency power supply so that it can be controlled separately. As a result, as shown conceptually in the figure, a two-stage plasma in which a thin plasma frame and a thick plasma frame are continuous can be obtained. In addition,
Normally, a thermal tower need not be used. Therefore, according to this device, the crushed powder of the siliceous raw material supplied from the powder injector 7 passes through the thin plasma frame 25 formed by the first induction coil, and further enters the thick plasma frame 26 formed by the second induction coil 22. Reheated. As a result, as shown in the figure, even if the raw material powder could not obtain the minimum passage time required for spherical formation only with the primary plasma flame, the ridge was gradually melted by reheating with the thick plasma flame. To form a spherical shape.

【0013】実施例1 1)珪酸質原料の調整 JIS 3号水ガラスを加熱濃縮して、20℃における
粘度を300cpsとした。この水ガラス約8リットルを
ポンプで加圧し、ろ過器(目開き0.07mm)を経てノ
ズル(孔径0.5mm、孔数50個)を通して、50℃に
保持された8wt%硫酸水溶液300リットルを入れた凝
固浴中へ毎秒1mの速度で押し出した。繊維状で得られ
たシリカ粒子を、10倍量の新たに調整した8wt%硫酸
水溶液中に浸漬して温度約95℃で約1時間撹拌して、
不純物の抽出を行い、ついでシリカ粒子の10倍量の純
水を用いて2回洗浄した。上記の抽出・洗浄操作を5回
繰り返した後、遠心分離器で脱水して得られた湿シリカ
粒子を熱風乾燥機により温度150℃で8時間乾燥し、
非晶質乾燥シリカ粒子を3.7kgを得た。この非晶質乾
燥シリカ粒子を1250℃で2時間、大気圧雰囲気で焼
成し、非晶質焼成シリカ粒子を3.3kgを得た。この非
晶質焼成シリカ粒子を石英製ボールミルを用いて粉砕
し、分級して粒径範囲が0.03mm〜1.0mmの非晶質
焼成分級シリカ粒子を得、これを珪酸質原料とした。
Example 1 1) Preparation of Siliceous Raw Material JIS No. 3 water glass was heated and concentrated to have a viscosity at 20 ° C. of 300 cps. Approximately 8 liters of this water glass is pressurized with a pump, and 300 liters of an 8 wt% sulfuric acid aqueous solution maintained at 50 ° C. is passed through a filter (aperture: 0.07 mm) and a nozzle (a hole diameter: 0.5 mm, number of holes: 50) through a nozzle. It was extruded into the coagulating bath at a speed of 1 m per second. The silica particles obtained in a fibrous state are immersed in a 10-fold amount of a freshly prepared 8 wt% aqueous sulfuric acid solution and stirred at a temperature of about 95 ° C. for about 1 hour,
The impurities were extracted and then washed twice using 10 times the amount of pure water of the silica particles. After repeating the above extraction and washing operations 5 times, the wet silica particles obtained by dehydration with a centrifugal separator were dried at a temperature of 150 ° C. for 8 hours by a hot air drier,
3.7 kg of amorphous dry silica particles were obtained. The dried amorphous silica particles were fired at 1250 ° C. for 2 hours in an atmospheric pressure atmosphere to obtain 3.3 kg of amorphous fired silica particles. The amorphous calcined silica particles were pulverized using a quartz ball mill and classified to obtain amorphous calcined component-grade silica particles having a particle size range of 0.03 mm to 1.0 mm, which was used as a siliceous raw material.

【0014】2)高周波熱プラズマ処理 前記非晶質焼成分級シリカ粒子を図1に示す製造装置で
次の条件の高周波誘導熱プラズマにより溶融処理をし
た。 プラズマガス条件; コアガス : Ar 15リットル/分 O2 5リッ
トル/分 シースガス: Ar 30リットル/分, O2 10リッ
トル/分 発振条件 ; 陽極電圧 :10.4kv 陽極電流 : 3.0A 周波数 : 4.0MHz 原料供給量 ;1.0kg/hr その結果、粒径0.03mm〜1.0mmの球状シリカ粒子
が得られた。
2) High-Frequency Thermal Plasma Treatment The amorphous baked component-grade silica particles were melted by high-frequency induction thermal plasma under the following conditions in the manufacturing apparatus shown in FIG. Plasma gas conditions; Core gas: Ar 15 L / min O 2 5 L / min Sheath gas: Ar 30 L / min, O 2 10 L / min Oscillation conditions; Anode voltage: 10.4 kv Anode current: 3.0 A Frequency: 4 0 MHz Raw material supply amount: 1.0 kg / hr As a result, spherical silica particles having a particle size of 0.03 mm to 1.0 mm were obtained.

【0015】実施例2 1)珪酸質原料の調整 石英ガラス(東芝セラミックス製)をジョークラッシャ
ーで粗粉砕し、石英ガラスの粗粉砕粉を得た。この粗粉
砕粉を塩酸洗浄し、コンタミを除いた石英ガラス粗粉砕
粉を石英ボールミルを用いて粉砕し、分級して粒径範囲
が0.03mm〜1.0mmの非晶質分級シリカ粒子を得、
これを珪酸質原料とした。 2)高周波熱プラズマ処理 前記非晶質分級シリカ粒子を、図1に示す製造装置で次
の条件の高周波誘導熱プラズマにより溶融処理をした。 プラズマガス条件; コアガス :Ar 15リットル/分,O2 5リッ
トル/分 シースガス :Ar 30リットル/分,O2 10リッ
トル/分 発振条件 ; 陽極電圧 10.3kv 陽極電流 3.1A 周波数 4.0MHz 原料供給量 ; 1.0kg/hr その結果、粒径0.03mm〜1.0mmの球状シリカ粒子
が得られた。
Example 2 1) Preparation of Siliceous Raw Material Quartz glass (manufactured by Toshiba Ceramics Co., Ltd.) was coarsely ground with a jaw crusher to obtain a coarsely ground powder of silica glass. This coarsely pulverized powder is washed with hydrochloric acid, and the coarsely pulverized silica glass powder from which contaminants have been removed is pulverized using a quartz ball mill and classified to obtain amorphous classified silica particles having a particle size range of 0.03 mm to 1.0 mm. ,
This was used as a siliceous raw material. 2) High-frequency thermal plasma treatment The above-mentioned amorphous classified silica particles were subjected to melting treatment by high-frequency induction thermal plasma under the following conditions in the manufacturing apparatus shown in FIG. Plasma gas conditions; Core gas: Ar 15 L / min, O 2 5 L / min Sheath gas: Ar 30 L / min, O 2 10 L / min Oscillation conditions: Anode voltage 10.3 kv Anode current 3.1 A Frequency 4.0 MHz Raw material Supply amount: 1.0 kg / hr As a result, spherical silica particles having a particle size of 0.03 mm to 1.0 mm were obtained.

【0016】実施例3 1)珪酸質原料の調整 天然水晶(ユニミン社製)を石英製ボールミルを用いて
粉砕し、分級して粒径範囲が0.03mm〜1.0mmの結
晶質分級シリカ粒子を得、これを珪酸質原料とした。 2)高周波熱プラズマ処理 前記結晶質分級シリカ粒子を、図1に示す製造装置で次
の条件の高周波誘導熱プラズマにより溶融処理をした。 プラズマガス条件; コアガス : Ar 15リットル/分, O2 5リ
ットル/分 シースガス: Ar 30リットル/分, O2 10リ
ットル/分 発振条件 ; 陽極電圧 10.3kv 陽極電流 3.1A 周波数 4.0MHz 原料供給量 ; 1.0kg/hr その結果、粒径0.03mm〜1.0mmの球状シリカ粒子
が得られた。
Example 3 1) Preparation of Siliceous Raw Material Natural quartz (manufactured by Unimin Co., Ltd.) is pulverized using a quartz ball mill and classified to classify crystalline classified silica particles having a particle size range of 0.03 mm to 1.0 mm. This was used as a siliceous raw material. 2) High-Frequency Thermal Plasma Treatment The crystalline classified silica particles were melted by the production apparatus shown in FIG. 1 using high-frequency induction thermal plasma under the following conditions. Plasma gas conditions; Core gas: Ar 15 L / min, O 2 5 L / min Sheath gas: Ar 30 L / min, O 2 10 L / min Oscillation conditions: Anode voltage 10.3 kv Anode current 3.1 A Frequency 4.0 MHz Raw material Supply amount: 1.0 kg / hr As a result, spherical silica particles having a particle size of 0.03 mm to 1.0 mm were obtained.

【0017】実施例4 1)珪酸質原料の調整 実施例5において、結晶質分級シリカ粒子の粒径範囲を
1.0mm〜2.0mmとした以外は実施例5と同様に処理
した。 2)高周波熱プラズマ処理(二段プラズマ) 前記結晶質分級シリカ粒子を、図3に示す製造装置で次
の条件の高周波誘導熱二段プラズマにより溶融処理をし
た。 プラズマガス条件; コアガス :Ar 20リットル/分, O2 7リッ
トル/分 シースガス:Ar 40リットル/分, O2 14リッ
トル/分 発振条件 ; (第1段) 陽極電圧: 10.3kv 陽極電流: 3.1A 周波数 : 4.0MHz (第2段) 陽極電圧: 10.0kv 陽極電流: 1.3A 周波数 : 13.56MHz 原料供給量 ; 2.0kg/hr その結果、粒径1.0mm〜2.0mmの球状シリカ粒子が
得られた。
Example 4 1) Preparation of Siliceous Raw Material The treatment was performed in the same manner as in Example 5 except that the particle size range of the crystalline classified silica particles was changed from 1.0 mm to 2.0 mm. 2) High-frequency thermal plasma treatment (two-stage plasma) The crystalline classified silica particles were melted by a high-frequency induction thermal two-stage plasma under the following conditions using the manufacturing apparatus shown in FIG. Plasma gas conditions; Core gas: Ar 20 L / min, O 2 7 L / min Sheath gas: Ar 40 L / min, O 2 14 L / min Oscillation conditions; (1st stage) Anode voltage: 10.3 kv Anode current: 3 A frequency: 4.0 MHz (second stage) Anode voltage: 10.0 kv Anode current: 1.3 A Frequency: 13.56 MHz Raw material supply amount: 2.0 kg / hr As a result, the particle size is 1.0 mm to 2.0 mm. Was obtained.

【0018】応用例 実施例1で得た球状シリカ粒子657.2gを粉砕メデ
ィアとして撹拌混合ミルに仕込んだ。平均粒径12.8
μmのシリカ1430gと純水3340gのシリカスラ
リー(スラリー濃度30%)を撹拌混合ミルにポンプで
導入し18分間循環した。この時の撹拌混合ミルの撹拌
ディスクは、直径64mm、厚さ3mm、4枚で、ディスク
の周速度は10m/Sであった。シリカスラリーを回収
しシリカの平均粒径を測定したところ、0.9μmであ
り、サブミクロン粉砕が効率よく行えていた。また、粉
砕メディアとして使用した球状シリカ粒子の重量を測定
したところ、645.9gであり、摩耗量は11.3g
であった。粉砕されたシリカに対する粉砕メディアの摩
耗量は11.3/1430=0.79%で、良好な値を
示した。
Application Example 657.2 g of the spherical silica particles obtained in Example 1 were charged into a stirring and mixing mill as grinding media. Average particle size 12.8
A silica slurry (slurry concentration: 30%) of 1430 g of silica having a particle size of 1,340 g and pure water (3,340 g) was introduced into a stirring and mixing mill by a pump and circulated for 18 minutes. At this time, the stirring disk of the stirring and mixing mill had a diameter of 64 mm, a thickness of 3 mm, and four disks, and a peripheral speed of the disk was 10 m / S. When the silica slurry was recovered and the average particle size of the silica was measured, it was 0.9 μm, and submicron pulverization was performed efficiently. The weight of the spherical silica particles used as the grinding media was measured to be 645.9 g, and the wear amount was 11.3 g.
Met. The abrasion loss of the crushed media with respect to the crushed silica was 11.3 / 1430 = 0.79%, which was a good value.

【0019】[0019]

【発明の効果】本発明によれば、従来方法では粒径が
0.03mm(30μm)以上の球状シリカ粒子の製造は
物理的に困難であったものを、高周波熱プラズマの高温
を利用し、シリカ粒子に与える熱エネルギーを調整する
ことで、粒径の大きな球状シリカ粒子となり、撹拌混合
ミル用の粉砕メディア、石英ガラス製ボールレンズ、結
晶フィルター用原料として経済的に製造でき、好適であ
る。また、二段プラズムを使用することにより、最低通
過時間が得られなかった原料粉を二段目の太いプラズマ
によって再加熱され溶融時間が得られ、従来困難であっ
た粒径の大きな球状シリカ粒子を容易に得ることができ
る。
According to the present invention, it has been physically difficult to produce spherical silica particles having a particle size of 0.03 mm (30 μm) or more by the conventional method. By adjusting the heat energy given to the silica particles, spherical silica particles having a large particle diameter can be economically produced as a pulverizing medium for a stirring and mixing mill, a ball lens made of quartz glass, and a raw material for a crystal filter, which is suitable. In addition, by using the two-step plasma, the raw material powder, for which the minimum passage time was not obtained, was reheated by the second-stage thick plasma, and the melting time was obtained. Can be easily obtained.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の球状シリカ粒子の製造方法を実施する
球状シリカ粒子製造装置の概要図である。
FIG. 1 is a schematic diagram of an apparatus for producing spherical silica particles for carrying out the method for producing spherical silica particles of the present invention.

【図2】そのプラズマトーチ部の拡大図である。FIG. 2 is an enlarged view of the plasma torch part.

【図3】他の球状シリカ粒子製造装置のプラズマトーチ
の他の実施例である二段プラズマトーチによる球状化の
模式図である。
FIG. 3 is a schematic diagram of spheroidization by a two-stage plasma torch which is another embodiment of the plasma torch of another spherical silica particle producing apparatus.

【符号の説明】[Explanation of symbols]

1 原料供給用フィーダ 2 プラズマ
トーチ 3 保温塔 4 冷却用チ
ャンバー 5 回収フラスコ 7 パウダイ
ンジェクタ 8、20 管体 9 高周波誘
導コイル 21 第1誘導コイル 22 第2誘
導コイル
DESCRIPTION OF SYMBOLS 1 Feeder for supply of raw material 2 Plasma torch 3 Insulation tower 4 Cooling chamber 5 Recovery flask 7 Powder injector 8, 20 Tubular body 9 High frequency induction coil 21 First induction coil 22 Second induction coil

フロントページの続き (72)発明者 井上 好明 東京都品川区東五反田2丁目16番21号 高周波熱錬株式会社内 (72)発明者 川嵜 一博 東京都品川区東五反田2丁目16番21号 高周波熱錬株式会社内 (72)発明者 横田 誠二 東京都品川区東五反田2丁目16番21号 高周波熱錬株式会社内 (56)参考文献 特開 平1−96008(JP,A) 特開 昭60−180911(JP,A) 特開 平2−203932(JP,A) 特開 昭64−65043(JP,A) 特開 昭61−197416(JP,A) 特開 昭63−221842(JP,A) 特開 昭57−191238(JP,A) 特開 昭60−175537(JP,A) (58)調査した分野(Int.Cl.7,DB名) C01B 33/18 C03C 8/00 C03B 20/00 Continuation of the front page (72) Inventor Yoshiaki Inoue 2- 16-21 Higashi-Gotanda, Shinagawa-ku, Tokyo Inside of High-frequency Refining Co., Ltd. (72) Inventor Kazuhiro Kawasaki 2- 16-21 Higashi-Gotanda, Shinagawa-ku, Tokyo (72) Inventor Seiji Yokota 2-16-21, Higashi-Gotanda, Shinagawa-ku, Tokyo Inside (56) References JP-A-1-96008 (JP, A) JP-A Sho JP-A-2-203932 (JP, A) JP-A-64-65043 (JP, A) JP-A-61-197416 (JP, A) JP-A-63-221842 (JP, A) A) JP-A-57-191238 (JP, A) JP-A-60-175537 (JP, A) (58) Fields investigated (Int. Cl. 7 , DB name) C01B 33/18 C03C 8/00 C03B 20 / 00

Claims (5)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 珪酸質原料を高周波熱プラズマ中を通過
させて溶融させることにより、粒径0.03mmから2.
0mmの範囲の球状シリカ粒子を生成させることを特徴と
する球状シリカ粒子の製造方法。
1. A method in which a siliceous raw material is passed through a high-frequency thermal plasma and melted to obtain a particle size of 0.03 mm to 2.
A method for producing spherical silica particles, wherein spherical silica particles having a diameter of 0 mm are produced.
【請求項2】 珪酸質原料が結晶質珪酸原料である請求
項1記載の球状シリカ粒子の製造方法。
2. The method for producing spherical silica particles according to claim 1, wherein the siliceous raw material is a crystalline silicic acid raw material.
【請求項3】 珪酸質原料が非晶質珪酸原料である請求
項1記載の球状シリカ粒子の製造方法。
3. The method for producing spherical silica particles according to claim 1, wherein the siliceous raw material is an amorphous silicic acid raw material.
【請求項4】 珪酸質原料を溶融する高周波熱プラズマ
が高周波誘導熱プラズマである請求項1、2又は3記載
の球状シリカ粒子の製造方法。
4. The method for producing spherical silica particles according to claim 1, wherein the high-frequency thermal plasma for melting the siliceous raw material is a high-frequency induction thermal plasma.
【請求項5】 高周波誘導熱プラズマが二段プラズマで
ある請求項4の球状シリカ粒子の製造方法。
5. The method for producing spherical silica particles according to claim 4, wherein the high-frequency induction thermal plasma is a two-stage plasma.
JP09513593A 1993-03-31 1993-03-31 Method for producing spherical silica particles Expired - Fee Related JP3350139B2 (en)

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FR2765497B1 (en) * 1997-07-01 1999-09-03 Premis Technologies REACTION SUPPORT AND REACTOR FOR THE TREATMENT OF SOLID AND FLUID COMPOUNDS UNDER THE ACTION OF AN ONDULATORY PHENOMENON
KR100446923B1 (en) * 2001-06-22 2004-09-01 인하대학교 산학협력단 A method for converting a rough shaped silica powder into spherical silica powder
DE602006007780D1 (en) 2005-10-21 2009-08-27 Sulzer Metco Us Inc Process for the production of highly pure flowable metal oxide powder by plasma melting
DE102006018711B4 (en) * 2006-04-20 2008-09-25 Heraeus Quarzglas Gmbh & Co. Kg Material, in particular for an optical component for use in microlithography and method for producing a molded article from the material
JP5115209B2 (en) * 2008-01-21 2013-01-09 東ソー株式会社 Method for producing ceramic beads having a smooth surface
JP5365487B2 (en) 2008-12-11 2013-12-11 東ソー株式会社 Ceramic beads having a smooth surface and method for producing the same
JP2011157259A (en) * 2010-01-07 2011-08-18 Mitsubishi Materials Corp Synthetic amorphous silica powder and method for producing the same
JP2011157260A (en) * 2010-01-07 2011-08-18 Mitsubishi Materials Corp Synthetic amorphous silica powder and method for producing same
WO2011083683A1 (en) * 2010-01-07 2011-07-14 三菱マテリアル株式会社 Synthetic amorphous silica powder
JP2011157261A (en) * 2010-01-07 2011-08-18 Mitsubishi Materials Corp Synthetic amorphous silica powder and method for producing same
JP5825145B2 (en) * 2011-03-23 2015-12-02 三菱マテリアル株式会社 Synthetic amorphous silica powder and method for producing the same

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