JP3346440B2 - Manufacturing method of transmission type fiber grating filter - Google Patents
Manufacturing method of transmission type fiber grating filterInfo
- Publication number
- JP3346440B2 JP3346440B2 JP23781294A JP23781294A JP3346440B2 JP 3346440 B2 JP3346440 B2 JP 3346440B2 JP 23781294 A JP23781294 A JP 23781294A JP 23781294 A JP23781294 A JP 23781294A JP 3346440 B2 JP3346440 B2 JP 3346440B2
- Authority
- JP
- Japan
- Prior art keywords
- grating
- phase shift
- wavelength
- shift mask
- filter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/02—Optical fibres with cladding with or without a coating
- G02B6/02057—Optical fibres with cladding with or without a coating comprising gratings
- G02B6/02076—Refractive index modulation gratings, e.g. Bragg gratings
- G02B6/02123—Refractive index modulation gratings, e.g. Bragg gratings characterised by the method of manufacture of the grating
- G02B6/02133—Refractive index modulation gratings, e.g. Bragg gratings characterised by the method of manufacture of the grating using beam interference
- G02B6/02138—Refractive index modulation gratings, e.g. Bragg gratings characterised by the method of manufacture of the grating using beam interference based on illuminating a phase mask
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/02—Optical fibres with cladding with or without a coating
- G02B6/02057—Optical fibres with cladding with or without a coating comprising gratings
- G02B6/02076—Refractive index modulation gratings, e.g. Bragg gratings
- G02B6/02123—Refractive index modulation gratings, e.g. Bragg gratings characterised by the method of manufacture of the grating
- G02B6/02152—Refractive index modulation gratings, e.g. Bragg gratings characterised by the method of manufacture of the grating involving moving the fibre or a manufacturing element, stretching of the fibre
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Light Guides In General And Applications Therefor (AREA)
- Optical Fibers, Optical Fiber Cores, And Optical Fiber Bundles (AREA)
Description
【0001】[0001]
【産業上の利用分野】本発明は、バンドパスフィルタを
光ファイバ上のグレーティングのみにより実現する透過
型ファイバグレーティングフィルタの製造方法に関する
ものである。The present invention relates are those which relate to the production how the transmission fiber grating filter that realizes only by the grating on the optical fiber bandpass filter.
【0002】[0002]
【従来の技術】従来より、光ファイバのコアに紫外線を
照射してグレーティングを形成することにより、狭帯域
で波長選択性に優れたファイバグレーティングフィルタ
が得られることが知られている。しかしながら、通常の
ファイバグレーティングフィルタは反射型フィルタであ
り、これを透過型フィルタ、即ちバンドパスフィルタと
して用いるにはファイバカップラもしくは光サーキュレ
ータ等と併用しなければならないため、誘電体多層膜フ
ィルタと比較して構造が複雑となり、小型化が困難でコ
ストも高くなるという問題があった。2. Description of the Related Art It has been known that a fiber grating filter having a narrow band and excellent wavelength selectivity can be obtained by irradiating the core of an optical fiber with ultraviolet rays to form a grating. However, a normal fiber grating filter is a reflection type filter, and since it must be used together with a fiber coupler or an optical circulator to use it as a transmission type filter, that is, a bandpass filter, it is compared with a dielectric multilayer filter. Therefore, there is a problem that the structure is complicated, miniaturization is difficult, and the cost is high.
【0003】一方、光ファイバ上のグレーティングのみ
を用いたバンドパスフィルタ(以下、これを透過型ファ
イバグレーティングフィルタと称す。)を実現する試み
として、2光束干渉露光系によりチャープグレーティン
グを形成する際、露光部分の一部を遮蔽することにより
チャープグレーティング中に欠落部分を形成し、それに
対応する波長の光の透過を得るようになした報告がある
(例えば、Electronics Letters, Vol.30, No.11, 199
4, M.C.Farries et al., "Very broad reflection band
width(44nm)chirped fiber gratings and narrow bandp
ass filters produced by the use of an amplitude ma
sk", pp.891-892参照)。On the other hand, as an attempt to realize a band-pass filter using only a grating on an optical fiber (hereinafter referred to as a transmission fiber grating filter), when a chirp grating is formed by a two-beam interference exposure system, There is a report that a part of an exposed part is shielded to form a missing part in a chirped grating to obtain transmission of light of a wavelength corresponding to the part (for example, Electronics Letters, Vol. 30, No. 11). , 199
4, MCFarries et al., "Very broad reflection band
width (44nm) chirped fiber gratings and narrow bandp
ass filters produced by the use of an amplitude ma
sk ", pp. 891-892).
【0004】[0004]
【発明が解決しようとする課題】しかしながら、前述し
た方法では広い波長域のチャープグレーティングを形成
しようとする場合に紫外線ビームの拡大が必要となり、
このため、フォーカシングレンズの収差の影響を大きく
受けてしまい、良好な特性が得られないという問題があ
った。However, in the above-described method, when an attempt is made to form a chirped grating in a wide wavelength range, it is necessary to expand the ultraviolet beam.
For this reason, there is a problem that the effect of the aberration of the focusing lens is greatly affected, and good characteristics cannot be obtained.
【0005】本発明の目的は、特性の良好な透過型ファ
イバグレーティングフィルタを製造し得る方法を提供す
ることにある。An object of the present invention is to provide a way capable of producing a good transmission fiber grating filter characteristics.
【0006】[0006]
【課題を解決するための手段】図1は本発明の透過型フ
ァイバグレーティングフィルタの製造方法を実施する装
置の概要を示すもので、図中、1は紫外線レーザ光源、
2はミラー、3は遮蔽板、4は位相シフトマスク、5は
光ファイバ、6は固定台である。FIG. 1 shows an outline of an apparatus for carrying out a method of manufacturing a transmission type fiber grating filter according to the present invention. In FIG.
2 is a mirror, 3 is a shielding plate, 4 is a phase shift mask, 5 is an optical fiber, and 6 is a fixed base.
【0007】一般に、光ファイバ5のコアに形成される
グレーティング、即ちファイバグレーティングの反射波
長λB は λB =2nΛ ……(1) で表される。ここで、nはコアの屈折率であり、Λはグ
レーティングのピッチである。Generally, the grating formed on the core of the optical fiber 5, that is, the reflection wavelength λ B of the fiber grating is represented by λ B = 2nΛ (1). Here, n is the refractive index of the core, and Λ is the pitch of the grating.
【0008】ところで、位相シフトマスク4のマスクパ
ターンのピッチをΛPMとすると、 2Λ=ΛPM ……(2) の関係がある。従って、位相シフトマスク4を介してフ
ァイバグレーティングを形成する場合は λB =nΛPM ……(3) となる。従って、ピッチΛPMが線形に変化するマスクパ
ターンを有する位相シフトマスク4を用いるとチャープ
グレーティングが形成される。[0008] By the way, if the pitch of the mask pattern of the phase shift mask 4 and Λ PM, a relationship of 2Λ = Λ PM ...... (2) . Therefore, when forming the fiber grating through the phase shift mask 4 becomes λ B = nΛ PM ...... (3 ). Therefore, when the phase shift mask 4 having a mask pattern in which the pitch Λ PM changes linearly is used, a chirped grating is formed.
【0009】そこで、予め十分薄い遮蔽板3を位相シフ
トマスク4の上に置くか又は位相シフトマスク4と光フ
ァイバ5との間に挟むとグレーティングが形成されない
部分が生じ、それに対応する波長の光が透過するように
なる。Therefore, if a sufficiently thin shielding plate 3 is previously placed on the phase shift mask 4 or is sandwiched between the phase shift mask 4 and the optical fiber 5, a portion where no grating is formed occurs, and light of a wavelength corresponding to the grating is formed. Is transmitted.
【0010】また、レーザビーム径を適当に絞って走査
的に照射する際、ある部分で故意に照射を中断すれば、
グレーティングが形成されない部分が生じ、それに対応
する波長の光が透過するようになる。[0010] In addition, when the laser beam diameter is appropriately narrowed and scanning irradiation is performed, if the irradiation is intentionally interrupted at a certain portion,
A portion where no grating is formed occurs, and light having a wavelength corresponding to the portion is transmitted.
【0011】また、ピッチΛPMが線形に変化するマスク
パターンを有する位相シフトマスク4において予め所定
のピッチを欠落させておけば、チャープグレーティング
を形成した時にその欠落したピッチに対応する波長の光
が反射されないで通過することになる(但し、この場合
は位相シフトマスクを取り替えない限り、透過する波長
を変更することはできない。)。If a predetermined pitch is deleted in advance in the phase shift mask 4 having a mask pattern in which the pitch Λ PM changes linearly, when a chirp grating is formed, light having a wavelength corresponding to the missing pitch is generated. The light passes through without being reflected (however, in this case, the wavelength to be transmitted cannot be changed unless the phase shift mask is replaced).
【0012】また、光ファイバ5のコアに光誘起屈折率
変化によって形成されたグレーティングは通常の環境で
は消失しないが、紫外線をそのまま照射すると、周期的
な屈折率の変化構造のうち、光誘起屈折率変化が起きて
いないところも屈折率が上昇し、屈折率の周期的な変化
が小さくなり、やがて全て均一な屈折率となり、グレー
ティングが消失することになる。従って、チャープグレ
ーティングを形成した後、所定の部位に紫外線をそのま
ま照射するとその部分のグレーティングが消失し、それ
に対応する波長の光が反射されないで通過するようにな
る。The grating formed in the core of the optical fiber 5 by the light-induced refractive index change does not disappear in a normal environment. The refractive index also increases where no index change occurs, the periodic change in the refractive index decreases, and eventually all the refractive indexes become uniform, and the grating disappears. Therefore, when a predetermined portion is irradiated with ultraviolet light as it is after the formation of the chirped grating, the grating in that portion disappears, and light of the corresponding wavelength passes without being reflected.
【0013】[0013]
【作用】本発明によれば、ピッチが線形に変化するマス
クパターンを有する位相シフトマスクにより光ファイバ
にチャープグレーティングを形成する際、透過させよう
とする波長に対応した部分を欠落させることができるの
で、良好な特性の透過型ファイバグレーティングフィル
タを製造することができる。According to the present invention, when a chirped grating is formed in an optical fiber using a phase shift mask having a mask pattern whose pitch changes linearly, a portion corresponding to the wavelength to be transmitted can be omitted. Thus, a transmission type fiber grating filter having good characteristics can be manufactured.
【0014】[0014]
【実施例】図2は図1の装置によりチャープグレーティ
ングを形成するようすを示すもので、ピッチが線形に変
化しているマスクパターン4aを備えた位相シフトマス
ク4を光ファイバ5に密着させて固定し、紫外線レーザ
光7を照射してチャープグレーティングを形成する場合
を考える。FIG. 2 shows a state in which a chirped grating is formed by the apparatus shown in FIG. 1. A phase shift mask 4 having a mask pattern 4a having a linearly changing pitch is fixed to an optical fiber 5 in close contact therewith. Then, a case where a chirp grating is formed by irradiating the ultraviolet laser light 7 is considered.
【0015】反射波長域を広くするためにはチャープグ
レーティングを十分長くする必要があるので、紫外線レ
ーザ光7を一度に照射するより、位相シフトマスク4と
光ファイバ5とを密着させたまま、緩やかに等速度で光
ファイバ5の長さ方向に移動させ、もしくは紫外線レー
ザ光7を反射させるミラー2を移動させて、走査的に照
射することが望ましい。In order to widen the reflection wavelength range, it is necessary to make the chirp grating sufficiently long. It is desirable to move the optical fiber 5 at a constant speed in the longitudinal direction or to move the mirror 2 that reflects the ultraviolet laser light 7 to perform scanning irradiation.
【0016】紫外線レーザ光7の照射を位相シフトマス
ク4のマスクパターン4aの一端から他端まで行うこと
により、マスクパターン4aと等しい長さのチャープグ
レーティングが形成される。図3はこの時の反射スペク
トルを示すもので、図中、λS は最短波長、λL は最長
波長である。By irradiating the ultraviolet laser light 7 from one end to the other end of the mask pattern 4a of the phase shift mask 4, a chirped grating having the same length as the mask pattern 4a is formed. FIG. 3 shows the reflection spectrum at this time, where λ S is the shortest wavelength and λ L is the longest wavelength.
【0017】ここで、マスクパターン4aのうち短波長
側に対応する端部を原点として光ファイバ5の中心軸方
向にX軸を設定し、マスクパターン4aの長さ(グレー
ティングの長さ)をLとすると、グレーティング上の任
意の部位P(x)の反射波長は λB (P)=(λL −λS )x/L+λS ……(4) で表される。従って、透過させようとする波長が決定す
ると、(4) 式より逆に部位P(x)が決定される。Here, the X-axis is set in the center axis direction of the optical fiber 5 with the end corresponding to the shorter wavelength side of the mask pattern 4a as the origin, and the length of the mask pattern 4a (the length of the grating) is set to L. Then, the reflection wavelength of an arbitrary portion P (x) on the grating is represented by λ B (P) = (λ L −λ S ) x / L + λ S (4) Therefore, when the wavelength to be transmitted is determined, the portion P (x) is determined in reverse to the equation (4).
【0018】そこで、図4に示すように、光ファイバ上
の部位Pに遮蔽板3を配置して紫外線レーザ光7を照射
すると、その部分のグレーティングが欠落したチャープ
グレーティング8が形成され、該欠落部分に対応する波
長の光が通過するようになる。なお、この透過波長はλ
S からλL の間で任意に設定できる。Therefore, as shown in FIG. 4, when the shielding plate 3 is disposed on the portion P on the optical fiber and the ultraviolet laser beam 7 is irradiated, a chirped grating 8 in which the grating is missing is formed. The light of the wavelength corresponding to the portion passes. Note that this transmission wavelength is λ
It can be set arbitrarily between S and λ L.
【0019】また、欠落した部分の長さをΔxとする
と、透過帯域ΔλB は ΔλB =(λL −λS )Δx/L ……(5) で与えられる。従って、遮蔽板3の幅を調整することに
よりΔxを制御でき、透過帯域ΔλB を調節できる。こ
の時の反射スペクトルは図5に示すようになり、波長λ
B 付近では光が透過するため反射がなくなっている。Assuming that the length of the missing portion is Δx, the transmission band Δλ B is given by Δλ B = (λ L −λ S ) Δx / L (5) Therefore, to control the Δx by adjusting the width of the shielding plate 3 can be adjusted a transmission band [Delta] [lambda] B. The reflection spectrum at this time is as shown in FIG.
There is no reflection in the vicinity of B because light is transmitted.
【0020】本発明ではこのようにして透過型ファイバ
グレーティングフィルタが製造されるが、位相シフトマ
スクを用いてチャープグレーティングを形成する場合、
2光束干渉露光系による場合と異なり、原理的にグレー
ティングの長さLを長くできるので透過帯域ΔλB を十
分小さくでき、また、透過波長の正確な制御も可能であ
る。In the present invention, a transmission type fiber grating filter is manufactured in this way. When a chirp grating is formed using a phase shift mask,
Unlike the case of the two-beam interference exposure system, the length L of the grating can be increased in principle, so that the transmission band Δλ B can be made sufficiently small, and the transmission wavelength can be accurately controlled.
【0021】例えば、ピッチが1.03μmから1.1
0μmまで線形に変化する長さ20mmのマスクパター
ンを有する位相シフトマスクを用いれば、波長1.5μ
mから1.6μmまでの反射帯域を有する長さ20mm
のチャープグレーティングが分散シフトファイバ上に形
成される。そして、この際、図4に示すように、Δx=
1mmの遮蔽板を位相シフトマスク上のx=10mmの
部位に配置して紫外線レーザ光を照射すれば、波長1.
55μm、幅5nmの光透過帯域を有するフィルタが実
現される。その反射スペクトルを図6に示す。For example, when the pitch is from 1.03 μm to 1.1
If a phase shift mask having a mask pattern having a length of 20 mm that changes linearly to 0 μm is used, the wavelength becomes 1.5 μm.
20 mm long with reflection band from m to 1.6 μm
Are formed on the dispersion-shifted fiber. At this time, as shown in FIG.
If a 1 mm shielding plate is arranged at a position of x = 10 mm on the phase shift mask and irradiated with ultraviolet laser light, the wavelength becomes 1.
A filter having a light transmission band of 55 μm and a width of 5 nm is realized. FIG. 6 shows the reflection spectrum.
【0022】また、Δx=1mmの遮蔽板をx=4、
8、12、16mmの部位に配置して紫外線レーザ光を
照射すれば、波長1.52、1.54、1.56、1.
58μm、幅5nmの光透過帯域を有するフィルタが実
現される。その反射スペクトルを図7に示す。Further, when a shielding plate of Δx = 1 mm is x = 4,
By irradiating ultraviolet laser light at a position of 8, 12, or 16 mm, wavelengths of 1.52, 1.54, 1.56,.
A filter having a light transmission band of 58 μm and a width of 5 nm is realized. FIG. 7 shows the reflection spectrum.
【0023】[0023]
【発明の効果】以上説明したように本発明によれば、光
ファイバに位相シフトマスクを用いてチャープグレーテ
ィングを形成する際、所定の波長、即ち透過させようと
する波長に対応した部分が欠落したチャープグレーティ
ングを形成することができるので、特性の良好な透過型
ファイバグレーティングフィルタを製造できる。現在、
光伝送路の大容量化の方法の一つとして波長多重伝送が
有望視されており、また、非線形光学効果である4光波
混合による波長変換技術も最近、注目されているが、こ
のような技術には狭帯域のバンドパスフィルタが不可欠
である。従って、本発明により、従来の誘電体多層膜を
用いたフィルタよりコストを低く抑えることができ、し
かも大量生産が可能になると考えられる。As described above, according to the present invention, when a chirped grating is formed on an optical fiber using a phase shift mask, a portion corresponding to a predetermined wavelength, that is, a wavelength to be transmitted, is missing. Since a chirped grating can be formed, a transmission type fiber grating filter having good characteristics can be manufactured. Current,
Wavelength multiplexing transmission is promising as one of the methods for increasing the capacity of optical transmission lines, and wavelength conversion technology using four-wave mixing, which is a nonlinear optical effect, has recently been receiving attention. Requires a narrow-band bandpass filter. Therefore, according to the present invention, it is considered that the cost can be suppressed lower than that of a filter using a conventional dielectric multilayer film, and mass production becomes possible.
【図1】本発明の透過型ファイバグレーティングフィル
タの製造方法を実施する装置の概要を示す図FIG. 1 is a diagram showing an outline of an apparatus for implementing a method of manufacturing a transmission type fiber grating filter of the present invention.
【図2】位相シフトマスクを用いて光ファイバにチャー
プグレーティングを形成するようすを示す図FIG. 2 is a diagram showing how a chirp grating is formed on an optical fiber using a phase shift mask.
【図3】チャープグレーティングの反射スペクトルの一
例を示す図FIG. 3 is a diagram illustrating an example of a reflection spectrum of a chirp grating.
【図4】本発明によりチャープグレーティングを形成す
るようすを示す図FIG. 4 is a diagram showing how a chirped grating is formed according to the present invention.
【図5】光透過部分を有するチャープグレーティングの
反射スペクトルを示す図FIG. 5 is a diagram showing a reflection spectrum of a chirp grating having a light transmitting portion.
【図6】本発明による透過型ファイバグレーティングフ
ィルタの反射スペクトルの一例を示す図FIG. 6 is a diagram showing an example of a reflection spectrum of a transmission type fiber grating filter according to the present invention.
【図7】本発明による透過型ファイバグレーティングフ
ィルタの反射スペクトルの他の例を示す図FIG. 7 is a diagram showing another example of the reflection spectrum of the transmission type fiber grating filter according to the present invention.
1…紫外線レーザ光源、2…ミラー、3…遮蔽板、4…
位相シフトマスク、4a…マスクパターン、5…光ファ
イバ、6…固定台、7…紫外線レーザ光、8…チャープ
グレーティング。DESCRIPTION OF SYMBOLS 1 ... Ultraviolet laser light source, 2 ... Mirror, 3 ... Shielding plate, 4 ...
Phase shift mask, 4a: mask pattern, 5: optical fiber, 6: fixed base, 7: ultraviolet laser beam, 8: chirp grating.
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 昭52−48334(JP,A) 英国特許出願公開2272075(GB,A) FARRIES,M.C.et a l.,Very broad refl ection bandwidth(44 nm)chirped fibere gratings and narro w bandpass filters produced,ELECTRON ICS LETTERS,英国,IE E,1994年5月26日,Vol.30 N o.11,p.891−892 MARTIN,J.et al.,N ovel writing techn ique of long and h ighly reflective i n−fibre gratings,E LECTRONICS LETTER S,英国,IEE,1994年5月12日,V ol.30 No.10,p.811−812 (58)調査した分野(Int.Cl.7,DB名) G02B 6/00 - 6/02 G02B 6/10 G02B 6/16 - 6/22 G02B 6/44 JICSTファイル、JQUICKファ イル(JOIS) IEEE/IEE ELECTRONI C LIBRARY──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-52-48334 (JP, A) UK Patent Application Publication 2272075 (GB, A) FARRIES, M.A. C. et al. , Very broad reflection bandwidth (44 nm), chipped fiber gratings and near bandpass filters produced, ELECTRON ICS LETERS, UK, IE, May 26, 1994, IEol. 30 No. 11, p. 891-892 MARTIN, J.M. et al. , Novel writing technique of long and high reflexive in-fibre gratings, ELECTRONICS LETTER S, United Kingdom, IEEE, May 12, 1994, Vol. 30 No. 10, p. 811-812 (58) Field surveyed (Int. Cl. 7 , DB name) G02B 6/00-6/02 G02B 6/10 G02B 6/16-6/22 G02B 6/44 JICST file, JQUICK file ( JOIS) IEEE / IEEE ELECTRONI C LIBRARY
Claims (1)
を有する位相シフトマスクを光ファイバに密着させて固
定し、 該位相シフトマスクを固定した光ファイバにその長さ方
向に沿って紫外線レーザ光を等速度で照射し、 位相シフトマスクを取外した光ファイバの前記マスクパ
ターンの所定の波長に対応するピッチの部位のみに紫外
線レーザ光を再度照射することを特徴とする透過型ファ
イバグレーティングの製造方法。 1. A mask pattern whose pitch changes linearly.
A phase shift mask with
And the length of the phase shift mask
UV laser light is radiated at a constant speed along the direction, and the phase shift mask is removed from the mask pad of the optical fiber.
UV only at the pitch corresponding to the predetermined wavelength of the turn
Transmission type irradiating the X-ray laser light again
Manufacturing method of ibug rating.
Priority Applications (1)
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JP23781294A JP3346440B2 (en) | 1994-09-30 | 1994-09-30 | Manufacturing method of transmission type fiber grating filter |
Applications Claiming Priority (1)
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JP23781294A JP3346440B2 (en) | 1994-09-30 | 1994-09-30 | Manufacturing method of transmission type fiber grating filter |
Publications (2)
Publication Number | Publication Date |
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JPH08101322A JPH08101322A (en) | 1996-04-16 |
JP3346440B2 true JP3346440B2 (en) | 2002-11-18 |
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JP23781294A Expired - Lifetime JP3346440B2 (en) | 1994-09-30 | 1994-09-30 | Manufacturing method of transmission type fiber grating filter |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP3705918A1 (en) * | 2019-03-08 | 2020-09-09 | Infineon Technologies AG | Bandpass transmission filter and narrowband radiation source |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5718738A (en) * | 1996-11-04 | 1998-02-17 | Lucent Technologies Inc. | Method for making continuously chirped fiber bragg gratings |
US8525075B2 (en) * | 2004-05-06 | 2013-09-03 | Semiconductor Energy Laboratory Co., Ltd. | Laser irradiation apparatus |
JP5082073B2 (en) * | 2006-08-28 | 2012-11-28 | 国立大学法人 宮崎大学 | Method for adjusting fiber Bragg grating, method for manufacturing optical component having fiber Bragg grating, and apparatus for manufacturing the same |
JP4869208B2 (en) * | 2007-11-08 | 2012-02-08 | 三菱電機株式会社 | Reciprocating optical modulator |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2272075A (en) | 1992-10-29 | 1994-05-04 | Ca Minister Communications | Method of making bragg gratings and grating masks therefor |
-
1994
- 1994-09-30 JP JP23781294A patent/JP3346440B2/en not_active Expired - Lifetime
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2272075A (en) | 1992-10-29 | 1994-05-04 | Ca Minister Communications | Method of making bragg gratings and grating masks therefor |
Non-Patent Citations (2)
Title |
---|
FARRIES,M.C.et al.,Very broad reflection bandwidth(44nm)chirped fibere gratings and narrow bandpass filters produced,ELECTRONICS LETTERS,英国,IEE,1994年5月26日,Vol.30 No.11,p.891−892 |
MARTIN,J.et al.,Novel writing technique of long and highly reflective in−fibre gratings,ELECTRONICS LETTERS,英国,IEE,1994年5月12日,Vol.30 No.10,p.811−812 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP3705918A1 (en) * | 2019-03-08 | 2020-09-09 | Infineon Technologies AG | Bandpass transmission filter and narrowband radiation source |
US11320586B2 (en) | 2019-03-08 | 2022-05-03 | Infineon Technologies Ag | Bandpass transmission filter and narrowband radiation source |
Also Published As
Publication number | Publication date |
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JPH08101322A (en) | 1996-04-16 |
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