JP3333335B2 - Liquid crystal display - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a liquid crystal display device, and more particularly to a liquid crystal display device having a first substrate having a first electrode and a second electrode, and a non-linear circuit provided between the first electrode and the second electrode. A non-linear structure having a metal-insulating-metal structure having an anodized film of a first electrode, a silicon oxide film, a silicon nitride film, a silicon carbide film, a tantalum oxide film, or an aluminum oxide film as a resistance layer. The present invention relates to a configuration of a liquid crystal display device having a resistance element (hereinafter, referred to as an MIM element).

[0002]

2. Description of the Related Art In recent years, the display capacity of a liquid crystal display device using a liquid crystal panel has been steadily increasing.

[0005] In a system using multiplex driving for a liquid crystal display device having a simple matrix configuration, a decrease in contrast or a reduction in response speed occurs as time division is increased. It is difficult to obtain a high contrast.

Therefore, in order to eliminate such a defect, an active matrix type liquid crystal display panel in which a switching element is provided in each pixel is employed.

The active matrix type liquid crystal display panel is roughly classified into a three-terminal system using a thin film transistor and a two-terminal system using a non-linear resistance element. Among these, the two-terminal system is superior in that the structure and the manufacturing method are simple.

As this two-terminal system, a diode type, a varistor type, an MIM type and the like have been developed.

[0007] Among them, the MIM type has a feature that the structure is particularly simple and the manufacturing process is short.

Further, the liquid crystal display panel is required to have high density and high definition, and it is necessary to reduce the area occupied by the switching elements.

As means for miniaturization, there are a photolithography technique and an etching technique which are semiconductor manufacturing techniques. However, it is a very difficult technique to perform fine processing on a large area and to realize low cost.

Here, an element structure which can be miniaturized in a large area and is effective for cost reduction will be described with reference to the drawings.

FIG. 19 is a plan view showing a conventional liquid crystal display device using a nonlinear resistance element. FIG. 20 shows FIG.
FIG. 9 is an enlarged plan view showing a dashed circle portion 95 of FIG. 9. FIG. 21 is a sectional view showing a section taken along line FF of FIG. Hereinafter, the structure of a conventional liquid crystal display device will be described with reference to FIGS. 19, 20 and 21 alternately.

A lower electrode 82 and an M-th row of signal electrodes 93 are provided as first electrodes on a first substrate 81 which is a partial area on a large substrate 92. In addition, an anodizing electrode 94 for connecting the signal electrodes 93 to each other is provided on the large-sized substrate 92.

Using the anodic oxidation electrode 94 as an anodic oxidation electrode, a non-linear resistance layer 83 is provided on the lower electrode 82 by using an anodic oxidation method.

Further, an upper electrode 84 is provided as a second electrode so as to overlap the nonlinear resistance layer 83,
A nonlinear resistance element 80 is provided. Note that a part of the upper electrode 84 is connected to a display electrode 85 formed of a second electrode.

The second substrate 86 is provided with a black matrix 87 in order to prevent light from leaking from gaps between the display electrodes 85 provided on the first substrate 81.

Further, a display electrode 85 is provided on the second substrate 86.
The counter electrode 89 is provided via an insulating film 88 so as to be in contact with the black matrix 87 and not to be short-circuited.

A lower electrode 82 provided on a first substrate 81
Is provided with a region extending from the signal electrode 93 in order to provide the nonlinear resistance element 80. The extended region overlaps with the upper electrode 84 to form the nonlinear resistance element 80.

Further, as shown in the plan view of FIG.
The lower electrode 82 and the display electrode 85 have a gap of a predetermined size.

The display electrode 85 is disposed so as to overlap the counter electrode 89 with the liquid crystal 91 interposed therebetween.
A display region including the M-th row of signal electrodes 93 and the N-th row (not shown) of counter electrodes 89 forms a display pixel portion of a liquid crystal display panel.

The black matrix 87 includes a display electrode 85.
Is formed so as to protrude to the formation region of, and has a role of preventing light from leaking from a peripheral region of the display electrode 85.

The liquid crystal display device displays a predetermined image by changing the transmittance of the liquid crystal 91 in a region between the display electrode 85 and the counter electrode 89 where the black matrix 87 is not formed.

Further, the first substrate 81 and the second substrate 86 are provided with alignment films 90, 90, respectively, as processing layers for regularly aligning the molecules of the liquid crystal 91.

Further, the first substrate 81 and the second substrate 86 are opposed to each other with a predetermined gap by a spacer 92, and the first substrate 81 and the second substrate 86 are provided between the first substrate 81 and the second substrate 86.
The liquid crystal 91 is sealed.

[0024]

By the way, in the case of the MIM element which is the nonlinear resistance element 80 in which the anodic oxide film of the first electrode is the nonlinear resistance layer 83, an anode for anodic oxidation of the first electrode is used. An oxidation electrode 94 is required. Therefore, the first electrode is connected to the anodic oxidation electrode 94 for anodic oxidation.

Further, when a plurality of substrates for a liquid crystal display device are formed from the substrate on which the nonlinear resistance element 80 is formed,
The anodic oxidation electrodes 94 are in a state of being connected to each other in a part of the large substrate 92.

Therefore, after the anodizing treatment, it is necessary to cut and separate the anodizing electrodes 94 individually to form independent signal electrodes 93.

As a means for cutting and separating the anodic oxidation electrode 94, a so-called scribe-break method is used in which the substrate on which the nonlinear resistance element 80 is formed is scratched with a hard knife and cut using strain. 94 is the signal electrode 9
The technique of cutting off from 3 is used.

Depending on when the step of cutting the anodic oxidation electrode 94 is performed, there arises a problem that the characteristic of the nonlinear resistance element 80 is deteriorated or the nonlinear resistance element 80 is broken.

That is, if the anodic oxidation electrodes 94 are separated and independent, a process for forming a substrate having the non-linear resistance element 80 as a liquid crystal display device. Also, it is not possible to disperse static electricity generated locally during a process of transporting a substrate between apparatuses or an inspection process.

Further, the anodizing electrode 94 is cut and separated.
Static electricity is also generated during the scribe-break process.

For this reason, an excessive voltage is applied to the nonlinear resistance element 80, and the characteristic deterioration and destruction of the nonlinear resistance element 80 occur.

Then, during the inspection process of the liquid crystal display device,
By connecting the anodic oxidation electrodes 94 to each other, it is possible to prevent characteristic deterioration and destruction of the nonlinear resistance element 80.

Furthermore, in the inspection process of the liquid crystal display device, the voltage can be applied to each display electrode 85 only by applying the voltage to the anodic oxidation electrodes 94 connected to each other, so that the inspection is facilitated. Can be done.

Further, when an external circuit is mounted on a substrate on which the non-linear resistance element 80 is formed, for example, a semiconductor integrated circuit (IC) capable of high-density mounting is mounted on the substrate using a conductive adhesive.・ On glass (COG)
In the case of the mounting method, it is required that contaminants do not mix between the mounting electrode and the conductive adhesive before mounting.

Further, as another mounting means, an electrode (FP) for connecting a substrate to an external circuit through an anisotropic conductive film (ACF) in which conductive particles are dispersed in a thermosetting resin.
C), or a chip-on-board mounting method of connecting a printed circuit board on which a substrate and a semiconductor integrated circuit (IC) are mounted via an anisotropic conductive film.

Further, there is a mounting means using both the chip-on-glass (COG) mounting method and the anisotropic conductive film (ACF) mounting method.

In any of the mounting means described above, the connection between the conductive adhesive or the anisotropic conductive film and the mounting electrode is important.

An object of the present invention is to solve the above-mentioned problems and to prevent the non-linear resistance element from being deteriorated or destroyed due to static electricity generated during a manufacturing process of the non-linear resistance element or a subsequent assembling step for a liquid crystal display device. It is an object of the present invention to provide a liquid crystal display device that prevents the non-linear resistance element, reduces the defects of the non-linear resistance element, and stabilizes the characteristics of the non-linear resistance element.

It is a further object of the present invention to use an etching process on the surface of the mounting electrode before mounting, for example, an insulating film for protecting the non-linear resistance element, or an etching process for etching the anodic oxidation electrode. A structure to stabilize the connection between the external circuit and the mounting electrode by using the device and to improve the stabilization of the voltage applied to the nonlinear resistance element, and to obtain a high-quality and inexpensive liquid crystal display device. Is to provide.

[0040]

In order to achieve the above object, the liquid crystal display of the present invention employs the following configuration.

In the liquid crystal display device of the present invention, a first electrode and a second electrode are formed on a first substrate, and the first electrode and the second electrode are
The first electrode is placed in an area overlapping with the second electrode.
Forming a non-linear resistance element by extreme oxidation,
The first electrode is connected to a lower electrode of the nonlinear resistance element and an external signal.
A signal electrode for applying a signal, said second electrode
Is an upper electrode of the nonlinear resistance element, and
A first substrate and a second substrate connected to a pole;
Are bonded at predetermined intervals, and the first substrate and the
A liquid crystal display device in which liquid crystal is sealed between
And an anodic oxidation electrode for commonly connecting the first electrodes.
A connection electrode covering a part of the signal electrode;
Simultaneous anodic oxidation of multiple lower electrodes via pole oxidation electrodes
And using the connection electrode as a mask to form the anodic acid
The electrode for forming is cut .

According to the liquid crystal display device of the present invention, the connection electrode
Is indium tin oxide .

According to the liquid crystal display device of the present invention, the connection electrode
Are formed in the same step as the display electrode .

The liquid crystal display device of the present invention is characterized in that the first substrate
The first electrode and the anodizing electrode are formed on the
After performing extreme oxidation, the connection electrode is formed and its anode is formed.
The oxidizing electrode is cut .

The liquid crystal display device according to the present invention is characterized in that the first electrode
The lower electrode, the signal electrode, and the anode
The oxidizing electrode is an integral metal .

The liquid crystal display device according to the present invention is characterized in that the second electrode
The upper electrode, the display electrode, and the connection
The electrode is indium tin oxide formed at the same time .

[0047]

[0048]

According to the present invention, when forming a non-linear resistance element using the anodic oxide film of the first electrode as a non-linear resistance layer, separation and independence are performed by an etching method after the anodizing electrode is anodized. For this reason, it is possible to process into a fine and complicated shape as compared with the cutting and separating by the conventional scribe method.

Further, when forming a nonlinear resistance element using the anodic oxide film of the first electrode as a nonlinear resistance layer, the anodizing electrode is anodized and then separated by an etching method. For this reason, at the point of time when the alignment treatment step in which large static electricity is generated during the step is completed, the anodizing electrode can be separated and independent.

Further, using the second electrode constituting the nonlinear resistance element as a mask, the anodic oxidation electrode is separated by an etching method. This eliminates the need for an etching mask.

Further, by performing etching using the second electrode as a mask, the electrodes for anodic oxidation can be separated and independent from each other even after the external circuit is mounted on the mounting portion.

In addition, when forming an insulating film for protecting the non-linear resistance element, the anodic oxidation electrode is separated when forming the opening of the insulating film provided in the mounting region.
This allows the anodizing electrode to be separated without changing the process.

Further, the anodizing electrode is separated to form an independent signal electrode, and at the same time, an auxiliary electrode is formed around the display area. This can prevent static electricity from being concentrated on a specific signal electrode.

[0054]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The structure of a liquid crystal display device according to an embodiment of the present invention will be described below with reference to the drawings. First, the configuration of the liquid crystal display device according to the first embodiment of the present invention will be described with reference to FIGS.
A description will be given based on the above.

FIG. 1 is a plan view showing the entire configuration of the liquid crystal display device according to the first embodiment of the present invention. FIG. 2 is an enlarged plan view showing the area of the dashed circle 18 in FIG. The positional relationship between FIG. 1 and FIG. 2 corresponds to each other, and a broken circle 18 on the left side of FIG. 1 is shown on the left side of FIG.
1 is shown on the right side of FIG. FIG. 3 is a sectional view showing a section taken along line AA of FIG. Note that the positional relationship between FIG. 2 and FIG. 3 corresponds. FIG.
FIG. 3 is a sectional view showing a section taken along line JJ of FIG. 2.
Hereinafter, the first embodiment of the present invention will be described with reference to FIGS. 1, 2, 3, and 4 alternately.

On the first substrate 1, a lower electrode 2, a signal electrode 4, and an anodizing electrode 5 are provided as first electrodes made of a tantalum (Ta) film. Further, a non-linear resistance layer 3 made of a tantalum oxide (Ta ₂ O ₅ ) film is provided on the lower electrode 2 as an anodic oxide film of the lower electrode 2.

Anodizing electrode 5 comprising the first electrode
As shown in FIGS. 1 and 2, a matrix-like display area 17 composed of M rows of signal electrodes 4 and N columns of opposing electrodes 13 is provided.
Outside the device, a plurality of signal electrodes 4 are connected to each other.

Further, as shown in the plan view of FIG. 2, an upper electrode 6 on the nonlinear resistance layer 3, a display electrode 7 connected to the upper electrode 6, a signal electrode 4 and a The connection electrode 8 covering a part of the region with the electrode 5 is provided by an indium tin oxide (ITO) film.

The connection electrode 8 covers a part of the signal electrode 4 and the anodic oxidation electrode 5, and in the display area 17 of the signal electrode 4, as shown in FIG. 2, the upper surface of the anodizing electrode 5 is separated between adjacent signal electrodes 4 as shown in FIG.

The structure used in the actual liquid crystal display device is such that the anodic oxidation electrode 5 has the same separation side 10 as the connection electrode 8 as shown by the broken lines in the plan view of FIG. To form independent signal electrodes 4.

The lower electrode 2, the non-linear resistance layer 3 and the upper electrode 6 constitute a non-linear resistance element 9 having an MIM structure.

Further, the second substrate 11 has the first substrate 1
A black matrix 12 made of a chromium (Cr) film is provided to prevent light from leaking from a gap between the display electrodes 7 provided above.

As shown in the plan view of FIG. 2, the black matrix 12 is not provided on the second substrate 11 in the region facing the display electrode 7.

Further, a counter electrode 13 made of an indium tin oxide film is provided on the second substrate 11 so as to face the display electrode 7. The counter electrode 13 is provided via an insulating film 14 so as to prevent the counter electrode 13 from coming into contact with the black matrix 12 and causing a short circuit.

Further, as shown in the plan view of FIG. 2, the first electrode and the display electrode 7 have a gap of a predetermined size in order to prevent a short circuit between them.

The display electrode 7 is arranged so as to overlap with the counter electrode 13 via the liquid crystal 16, thereby forming a display pixel portion of the liquid crystal display panel. In this display pixel portion, as shown in FIG. 1, the black matrix 12 has an opening. The region where the black matrix 12 is formed serves as a light shielding portion.

The liquid crystal display device performs a predetermined image display based on the change in the transmittance of the liquid crystal 16 in the display pixel portion.

Further, the first substrate 1 and the second substrate 11 are provided with alignment films 15, 15, respectively, as processing layers for regularly aligning the molecules of the liquid crystal 16.

Further, the first substrate 1 and the second substrate 11 are opposed to each other with a predetermined gap by a spacer (not shown). Then, the first sealant 42 is used.
The first substrate 1 and the second substrate 11 are bonded together, and a liquid crystal 16 is sealed between the first substrate 1 and the second substrate 11.

According to the configuration of the first embodiment of the present invention described above, the anodizing electrode 5 comprising the first electrode
Are separated in a self-aligned manner by the etching process by the connection electrode 8 composed of the above electrodes.

That is, the signal electrodes 4 are connected to each other by the anodizing electrode 5 during the anodizing process.

For example, after the inspection of the liquid crystal display panel, an etching process is performed using the connection electrode 8 composed of the second electrode as a mask, and the anodic oxidation electrode 5 is connected to the connection electrode 8.
Can be separated at the separation side 10, which is substantially the same as the side.

Further, since the connection electrode 8 of the second electrode is used as a mask, the anodizing electrode 5 is etched during the manufacturing process of the liquid crystal display panel, during the inspection of the liquid crystal display panel, or after the inspection. , Independent signal electrode 4
Can be processed.

The etching of the anodic oxidation electrode 5 includes:
A reactive ion etching method is used. This etching condition is such that sulfur hexafluoride (SF ₆ ) is used as a reactive gas.
At a flow rate of 200 to 400 sccm and oxygen (O ₂ ) at a flow rate of 1
0-60 sccm, carbon tetrafluoride (CF ₄ ) flow rate 30
And a power density of 0.2 to 0.7 kW / cm ^{2 in} a pressure atmosphere of 4 to 12 × 10 ⁻² Torr.

By etching the anodic oxidation electrode 5 under these etching conditions, the etching rate of the tantalum film as the first electrode and the tantalum oxide film as the nonlinear resistance layer 3 is compared with that of the second electrode. The etching rate of a certain ITO has a difference of 1/100 or more.

Furthermore, since oxygen is mixed in the etching gas, the surface of the ITO film is exposed to the etching process, so that the etching of the surface of the ITO film can be performed with a small thickness, and connection with an external circuit is performed. Connection resistance with an anisotropic conductive film (ACF) or a conductive adhesive can be reduced and stabilized.

Therefore, the connection electrode (FP) of the circuit is mounted on the connection electrode 8 by an anisotropic conductive film (ACF) mounting method.
C), an external signal can be applied to the nonlinear resistance element 9 by using the signal electrode 4 from outside.

Accordingly, static electricity is generated due to the step of printing the alignment film 15 on the first substrate having the nonlinear resistance element 9 or the step of rubbing the surface of the alignment film 15 with a cloth and performing the alignment treatment of the alignment film 15. Non-linear resistance element 9 in process
Characteristic degradation can be prevented.

As a result, it is possible to obtain a non-linear resistance element having uniform and stable characteristics, and it is possible to obtain a liquid crystal display device having good display quality.

Next, the structure of the liquid crystal display device according to the second embodiment of the present invention will be described. The structure of the liquid crystal display device according to the second embodiment of the present invention will be described with reference to FIGS.

FIG. 5 is a block diagram showing a first embodiment of the present invention.
FIG. 9 is a plan view showing a region corresponding to a broken-line circle 18 as a second embodiment of the present invention in an enlarged manner, as shown in a portion corresponding to a plan view showing the entire configuration of the liquid crystal display device of FIG. FIG.
FIG. 6 is a sectional view showing a section taken along line BB of FIG. 5.
Hereinafter, a second embodiment of the present invention will be described with reference to FIGS. 5 and 6 alternately.

In the second embodiment of the present invention, a semiconductor integrated circuit is mounted on the signal electrode 4 by a chip-on-glass (CO
G) The case of mounting according to the mounting method will be described.

In order to adopt the chip-on-glass (COG) mounting method, signal electrodes 23, 24, and 25 composed of the signal electrode 4, the connection electrode 22, and the connection electrode 8 are used.
Are provided close to each other.

On the first substrate 1, a lower electrode 2, a signal electrode 4, and an anodizing electrode 5 are provided as first electrodes made of a tantalum (Ta) film. Further, on the lower electrode 2, a tantalum oxide (Ta ₂ O ₅ ) film made of an anodic oxide film of the lower electrode 2 formed by anodic oxidation is provided as the non-linear resistance layer 3 using the anodic oxidation electrode 5 as an anode.

Further, as the second electrode, the nonlinear resistance layer 3
An upper electrode 21 made of a chromium (Cr) film, a signal electrode 4, and a connection electrode 22
Are provided.

The connection electrode 22 provided on the signal electrode 4
The signal electrode 4 is provided with a larger width than the signal electrode 4.
From the first substrate 1.

Further, as the third electrode, the display electrode 7 connected to the upper electrode 21, the signal electrode 4 and the anodizing electrode 5
The connection electrode 8 and indium tin oxide (IT
O) A film is provided.

The lower electrode 2, the non-linear resistance layer 3 and the upper electrode 21 constitute the non-linear resistance element 9 having the MIM structure.

Further, the upper electrode 21 is electrically connected at a connection portion 20 which is a part of the display electrode 7. This connection 2
0 is provided in order to stabilize the electrical connection between the upper electrode 21 made of a chromium film and the display electrode 7 made of an ITO film and to reduce the resistance.

Further, as shown in the plan view of FIG.
The connection electrode 22 composed of the first electrode and the connection electrode 8 composed of the third electrode cover a part of the signal electrode 4 composed of the first electrode and part of the anodizing electrode 5.

In the display area, the connection electrode 22
And the connection electrode 8 cover the inside of the second substrate 11 and the sealant (not shown), have a larger width than the signal electrode 4 and the connection electrode 22, and protrude from the first substrate 1. On the anodizing electrode 5, the adjacent signal electrode 2
3, 24, 25 are separated.

The structure used in an actual display device is such that the anodizing electrode 5 is separated from the connection electrode 8 by a substantially same separation side 10 as shown by the broken line in the plan view of FIG. The electrode 23, the signal electrode 24, and the signal electrode 25 are configured.

Therefore, the signal electrode 23, the signal electrode 24, and the signal electrode 25 connected to the external circuit can be separated from the anodizing electrode 5 and can be independent.

Therefore, by mounting the semiconductor integrated circuit on the connection electrode 8 using the COG mounting method, the signal electrode 4
, A voltage for performing a desired display can be applied to the display electrode 7 via the nonlinear resistance element 9.

Further, the first substrate 1 is provided on the second substrate 11.
A black matrix 12 made of a chromium (Cr) film is provided to prevent light from leaking from a gap between the display electrodes 7 provided above.

As shown in the plan view of FIG. 5, the black matrix 12 is not provided on the second substrate 11 in the region facing the display electrode 7.

Further, a counter electrode 13 made of an indium tin oxide film is provided on the second substrate 11 so as to face the display electrode 7. The counter electrode 13 is in contact with the black matrix 12 so as to prevent a short circuit.
4 are provided.

Further, as shown in the plan view of FIG. 5, the first electrode 2 and the display electrode 7 have a gap of a predetermined size in order to prevent a short circuit between them.

The display electrode 7 is arranged so as to overlap with the counter electrode 13 via the liquid crystal 16, thereby forming a display pixel portion of the liquid crystal display panel.

In this display pixel portion, as shown in FIG. 6, the black matrix 12 has openings.
The region where the black matrix 12 is formed serves as a light shielding portion.

The liquid crystal display device performs a predetermined image display based on the change in the transmittance of the liquid crystal 16 in the display pixel portion.

Further, the first substrate 1 and the second substrate 11 are provided with alignment films 15, 15, respectively, as processing layers for regularly arranging the molecules of the liquid crystal 16.

Further, the first substrate 1 and the second substrate 11 are opposed to each other with a predetermined gap by a spacer (not shown), and the distance between the first substrate 1 and the second substrate 11 is Liquid crystal 16 is enclosed.

According to the configuration of the second embodiment of the present invention described above, the anodizing electrode 5 composed of the first electrode
The connection electrodes 8 are formed in such a manner that they are separated in a self-aligned manner using an etching process.

The etching process utilizes a reactive ion etching method. The etching conditions may be the same as those in the first embodiment.

By using the configuration of the second embodiment of the present invention described above, even when the COG mounting method used for high-density mounting is used, the anodic oxidation process can be performed.
The signal electrodes 4 are mutually connected by the anodizing electrode 5.

Then, after the inspection of the liquid crystal display panel, the anodizing electrode 5 is separated by performing an etching process using the connecting electrode 22 composed of the second electrode or the connecting electrode 8 composed of the third electrode as a mask. be able to.

Therefore, during the production of the liquid crystal display panel, during the inspection of the liquid crystal display panel, or after the inspection, even when arranging the connection electrodes of the high-density signal electrodes necessary for high-density mounting, The processing electrode 5 can be processed into an independent signal electrode 4 by etching.

Therefore, the generation of static electricity due to the step of printing the alignment film 15 on the first substrate 1 having the non-linear resistance element 9 or the step of rubbing the surface of the alignment film 15 with a cloth and performing the alignment treatment of the alignment film 15 It is possible to prevent characteristic deterioration and destruction of the nonlinear resistance element 9 in a process accompanied by (1).

As a result, it is possible to obtain a non-linear resistance element 9 having uniform and stable characteristics, and it is possible to obtain a liquid crystal display device having good display quality.

Further, the connection electrode 22 made of the second electrode is placed on the anodic oxidation electrode 5 made of the first electrode.
And a connection electrode 8 composed of a third electrode are formed in order.

As a result, the adhesion between the first electrode and the third electrode is improved, and by inserting the second electrode for lowering the contact resistance, the first electrode and the third electrode are inserted.
Can be further improved as compared with the case where the electrodes are directly provided.

Next, the structure of a liquid crystal display device according to a third embodiment of the present invention will be described. FIGS. 7, 8, 9, and 10 show the configuration of a liquid crystal display device according to a third embodiment of the present invention.
This will be described with reference to FIG.

FIG. 7 is a plan view showing a state in which a plurality of substrates for a liquid crystal display device according to the third embodiment of the present invention are arranged on a large-sized substrate. FIG. 8 is a plan view showing a boundary region between two substrates for a liquid crystal display device according to the third embodiment of the present invention, and shows a dashed circle 33 in FIG. FIG. 9 shows C in FIG.
It is sectional drawing which shows the cross section in the -C line. FIG. 10 is a cross-sectional view showing a cross section taken along line DD of FIG. Less than,
A third embodiment of the present invention will be described with reference to FIGS. 7, 8, 9 and 10 alternately.

As shown in the plan view of FIG. 7, a plurality of (six in total) liquid crystal display substrates 3
1, 32,... The liquid crystal display device substrate 31 and the liquid crystal display device substrate 32 are configured to be separated from each other by a separation line 34 and a separation line 35.

Further, as shown in FIGS. 8, 9 and 10, the lower electrode 2 is formed on the liquid crystal display device substrate 31 or the liquid crystal display device substrate 32 as a first electrode made of a tantalum (Ta) film. , A signal electrode 4 and an anodizing electrode 41 are provided.

As shown in FIG. 8, the anodic oxidation electrode 41
Is provided on the liquid crystal display device substrate 32, and connects the signal electrodes 4 of the adjacent liquid crystal display device substrates 31 to each other. Then, at the time of the anodic oxidation treatment, the structure is such that a voltage is applied from the signal electrode 4 to each lower electrode 2.

Further, the anodic oxidation electrode 41 is connected to a plurality of input wirings 38, 39, and 40 on the liquid crystal display device substrate 32.

The input wirings 38, 39 and 40 are wirings for applying an external signal to a semiconductor integrated circuit provided on the liquid crystal display device substrate 32 by the COG mounting method. Then, the external signal is applied to the input wirings 38, 39, and 40 by mounting the input signal by the ACF mounting method.

Further, the signal electrode 2 is used as a signal electrode for applying a voltage from the semiconductor integrated circuit to the nonlinear resistance element 9 of the liquid crystal display device substrate 32.
3, 24, and 25 are provided.

Further, on the lower electrode 2, the lower electrode 2
Is provided with a non-linear resistance layer 3 made of a tantalum oxide (Ta ₂ O ₅ ) film.

Here, for example, the liquid crystal display substrate 31
The upper non-linear resistance layer 3 performs an anodizing treatment by applying a voltage via the signal electrode 4 using an anodizing electrode 41 provided on the liquid crystal display device substrate 32.

As shown in FIGS. 8, 9 and 10, an ITO film as a second electrode is formed on an upper electrode 6 on the nonlinear resistance layer 3, a display electrode 7 connected to the upper electrode 6, and a liquid crystal display. Input wiring 3 composed of first electrode on device substrate 32
8, 39, 40 and the second substrate 1 in the display area.
1 and the signal electrodes 23, 24,
25.

Further, as shown in FIG. 8, the second electrode is not provided in the broken line portion of the anodic oxidation electrode 41.

With this configuration, the input wiring 3
8, 39, 40, and the signal electrodes 23, 2 outside the display area.
The portions above 4 and 25 have a structure that is covered by the connection electrode 8 composed of the second electrode.

Using this configuration, the input wirings 38, 39, and 40 are etched from the anodic oxidation electrode 41 to form the second connection electrode 8 and the second electrode for use in an actual liquid crystal display device. Using the substrate 11 and the sealant 42 as a mask, the anodizing electrode 41 can be removed by etching at the separation side 10 to form independent input wirings 38, 39, and 40.

The etching is performed by using the reactive ion etching method described in the first embodiment.
Under the conditions described in the first embodiment, the second substrate 11 and the sealant 42 do not deteriorate when the anodic oxidation electrode 41 is subjected to the etching treatment, and no adverse effects due to the etching occur.

The lower electrode 2, the non-linear resistance layer 5, and the upper electrode 6 constitute a non-linear resistance element 9 having an MIM structure.

Further, the first substrate 1 is provided on the second substrate 11.
A black matrix 12 made of a chromium (Cr) film is provided to prevent light from leaking from a gap between the display electrodes 7 provided above.

Further, a counter electrode 13 made of an indium tin oxide film is provided on the second substrate 11 so as to face the display electrode 7. The counter electrode 13 is in contact with the black matrix 12 so as not to be short-circuited.
Provided via.

Further, the first electrode 2 and the display electrode 7 have a gap of a predetermined size in order to prevent a short circuit between them.

The display electrode 7 is arranged so as to overlap with the counter electrode 13 via the liquid crystal 16, thereby forming a display pixel portion of the liquid crystal display panel.

In the display pixel section, the black matrix 12 has an opening. The region where the black matrix 12 is formed serves as a light shielding portion.

The liquid crystal display device performs a predetermined image display based on the change in the transmittance of the liquid crystal 16 in the display pixel portion.

Further, the first substrate 1 and the second substrate 11 are provided with alignment films 15, 15, respectively, as processing layers for regularly arranging the molecules of the liquid crystal 16.

Further, the first substrate 1 and the second substrate 1 are separated by a spacer (not shown) and a sealant.
1 are opposed to each other with a predetermined gap, and a liquid crystal 16 is sealed between the first substrate 1 and the second substrate 11.

According to the configuration of the third embodiment of the present invention described above, the anodizing electrode 41 provided on the adjacent liquid crystal display substrate 32 and connected to the input wirings 38, 39, 40 is provided.
Has a configuration in which it is separated by an etching process in a self-aligned manner by a connection electrode 8 composed of a second electrode.

By using the structure of the third embodiment of the present invention, even when a plurality of substrates 31 and 32 for a liquid crystal display device are arranged on a large-sized substrate, the input wiring 38 is not required during the anodizing process. , 39, 40 are connected to each other by an anodizing electrode 41.

Then, after the inspection of the liquid crystal display panel, the connection electrode 8 composed of the second electrode, the second substrate 11, and the sealant 42 are used as a mask for the etching process, so that the anodic oxidation electrode 41 is formed. Can be separated.

Therefore, even when the liquid crystal display panel is prepared, during the inspection of the liquid crystal display panel, or after the inspection, when the high-density signal electrodes 4 required for the high-density mounting are arranged, the independent input wiring 38 is required. , 39, and 40.

Therefore, the generation of static electricity due to the step of printing the alignment film 15 on the first substrate 1 having the nonlinear resistance element 9 or the step of rubbing the surface of the alignment film 15 with a cloth and performing the alignment treatment of the alignment film 15 is prevented. The deterioration of the characteristics of the nonlinear resistance element 9 in the accompanying process can be prevented.

Therefore, it is possible to obtain a non-linear resistance element 9 having uniform and stable characteristics, and it is possible to obtain a liquid crystal display device having good display quality.

Further, even when a plurality of substrates for a liquid crystal display device are provided on a large-sized substrate, the substrates are separated by using an anodizing electrode 41 composed of an adjacent first electrode and a connecting electrode composed of a second electrode.

This eliminates the need for a place for separating the anodizing electrode 41, so that a large substrate can be used effectively.

Next, the structure of a liquid crystal display device according to a fourth embodiment of the present invention will be described. A configuration of a liquid crystal display device according to a fourth embodiment of the present invention will be described with reference to FIGS.

FIG. 11 is a plan view showing a liquid crystal display device according to a fourth embodiment of the present invention. FIG. 12 is a cross-sectional view showing a cross section taken along line EE in FIG. Hereinafter, FIG.
Fourth Embodiment A fourth embodiment of the present invention will be described with reference to FIGS.

On the first substrate 1, as a first electrode, a lower electrode 2 made of a tantalum (Ta) film and a signal electrode 4
And a first anodizing electrode 55, a second anodizing electrode 56, and a peripheral electrode 57 connected to the first anodizing electrode 55.

As shown in FIG. 11, the peripheral electrode 57 is provided in the display area on the outer peripheral portion of the display area in the direction parallel to the signal electrode 4 in the display area. The electrode 57 is provided in close proximity. This prevents the static electricity from locally entering.

The first anodizing electrode 55 is formed between the periphery of the display area and the semiconductor integrated circuit by the COG mounting method.
1, 52, 53, and 54, which correspond to electrode portions used as an actual liquid crystal display device.

The second anodizing electrode 56 is an electrode for connecting the signal signals 51, 52, 53 and 54, and further, the first anodizing electrode 55 and the signal electrode 51,
52, 53, and 54.

Further, on the surface of the lower electrode 2, as an anodic oxide film formed by anodizing the lower electrode 2,
Non-linear resistance layer 3 made of tantalum oxide (Ta ₂ O ₅ ) film
Is provided.

Further, as the second electrode, the upper electrode 6 on the nonlinear resistance layer 5 made of an indium oxide (ITO) film
The connection electrode 8 is provided on the entire surface of the display electrode 7 and the first anodizing electrode 55 connected to the upper electrode 6, and on the signal electrodes 51, 52, 53 and 54 connected to the signal electrode 4.

The signal electrodes 51, 52, 5
No second electrode is provided on the second anodizing electrode 56 that connects the third and third electrodes 54.

The lower electrode 2, the non-linear resistance layer 5, and the upper electrode 6 constitute a non-linear resistance element 9 having an MIM structure.

Further, the liquid crystal 1 is connected to the nonlinear resistance element 9.
The alignment film 15 for regularly arranging 6 or the ionic component of the liquid crystal 16 may affect the characteristics of the nonlinear resistance element, which may cause a change or deterioration.

In order to prevent this characteristic change and deterioration, tantalum oxide (T
an insulating film 48 made of a ₂ O _5).

Further, the insulating film 48 has an opening 49 on each of the signal electrodes 51, 52, 53, 54, and further has an opening 4 on the second anodizing electrode 56.
And 7.

When performing the anodic oxidation treatment, each signal electrode 5
1, 52, 53 and 54 are interconnected by a second anodizing electrode 56 and a first anodizing electrode 55.

The signal electrodes 51, 52, 53, 54
When the opening 49 is formed in the upper insulating film 48 by the etching method, the opening 47 is provided also on the second anodizing electrode 56, and the etching process is performed at the same time.

As described above, as shown in FIG.
The opening 47 and the opening 49 of the second electrode 8 and the second anodizing electrode 56 indicated by a broken line in the portion where the second electrode is not covered are removed by etching, and the independent signals are separated at the separation side 10. The electrodes 51, 52, 53, and 54 will be used.

Further, the second substrate 11 has the first substrate 1
A black matrix 12 made of a chromium (Cr) film is provided to prevent light from leaking from a gap between the display electrodes 7 provided above.

Further, the second anodizing electrode 55 is disposed in the vicinity of the connection electrodes 51, 52, 53, and 54, and the peripheral electrode 5 in the vicinity of the display electrode 7 in the vicinity of the sealant.
7 is connected.

The black matrix 12 is not provided on the second substrate 11 in the region facing the display electrode 7.

Further, a counter electrode 13 made of an indium tin oxide film is provided on the second substrate 11 so as to face the display electrode 7. The counter electrode 13 is provided via an insulating film 14 so as to prevent the counter electrode 13 from coming into contact with the black matrix 12 and causing a short circuit.

Further, the first electrode 2 and the display electrode 7 have a gap of a predetermined size in order to prevent a short circuit between them.

The display electrode 7 is arranged so as to overlap the counter electrode 13 with the liquid crystal 16 interposed therebetween, thereby forming a display pixel portion of the liquid crystal display panel. In this display pixel portion, as shown in FIG. 12, the black matrix 12 has an opening. The region where the black matrix 12 is formed serves as a light shielding portion.

The liquid crystal display device performs a predetermined image display based on the change in the transmittance of the liquid crystal 16 in the display pixel portion.

Further, the first substrate 1 and the second substrate 11 are provided with alignment films 15, 15, respectively, as processing layers for regularly arranging the molecules of the liquid crystal 16.

Furthermore, by means of the spacer 16,
The first substrate 1 and the second substrate 11 are opposed to each other with a predetermined gap, and the first substrate 1, the second substrate 11,
A liquid crystal 16 is sealed in a region surrounded by 2.

In the structure of the liquid crystal display device according to the fourth embodiment of the present invention described above, when the insulating film 48 for preventing the characteristic change of the nonlinear resistance element 9 or the characteristic deterioration is provided, the insulating film The second anodizing electrode 56 composed of the first electrode is formed by using the 48 opening 47 and the second electrode.
Are selectively removed during the etching process of the insulating film 48 to form independent signal electrodes 51, 52, 53 and 54.

Further, the first anodizing electrode 55 is placed close to each of the signal electrodes 51, 52, 53, 54 and the surrounding electrode 57.
And a peripheral electrode 57 having a larger area and close to the display electrode 7 is provided on the outer peripheral portion of the display area. This makes it possible to prevent local generation of static electricity.

Therefore, static electricity is generated due to the step of printing the alignment film 15 on the first substrate 1 having the nonlinear resistance element 9 or the step of rubbing the surface of the alignment film 15 with a cloth and performing the alignment treatment of the alignment film 15. Non-linear resistance element 9 in process
Can be prevented from deteriorating.

Therefore, it is possible to obtain a non-linear resistance element having uniform and stable characteristics, and it is possible to obtain a liquid crystal display device having good display quality.

In the fourth embodiment of the present invention, the openings 47 and 49 of the insulating film 48 are formed by using a photosensitive resist and a photolithographic method, and the second electrode 5 for anodic oxidation is formed.
6 was performed in the same manner as the etching of the insulating film 48.

However, after bonding the first substrate 1 and the second substrate 11 together and sealing the liquid crystal 16, the second substrate 11
It is also possible to process the insulating film 48 and the second anodizing electrode 56 on the first substrate 1 projecting from the second substrate 11 by using an etching process.

In the fourth embodiment of the present invention, the second substrate 1
A signal electrode 51 on the first substrate 1 projecting from
Second electrodes are provided on 52, 53, and 54 and on the first anodizing electrode 55 adjacent to each signal electrode.

Therefore, the insulating film 48 and the second anodic oxidation electrode 56 are formed under the etching conditions shown in the first embodiment.
Only the etching process can be selectively performed.

In this case as well, since the insulating film 48 and the second anodizing electrode 56 are etched, the etching time is long.
Since the O film has an extremely low etching rate, no problem occurs.

Since the insulating film 48 can be etched immediately before the COG mounting method, there is no contamination on the surface of the ITO film, so that the connection resistance can be stabilized and the resistance can be reduced. Further, the deterioration of the second substrate 11 and the sealant 42 does not occur.

Thus, the openings 47 and 49 of the insulating film 48 can be formed after the liquid crystal display panel in which static electricity is easily generated, after the inspection of the liquid crystal display panel, or immediately before the COG mounting method is performed. It becomes possible.

Accordingly, static electricity is generated due to the step of printing the alignment film 15 on the first substrate 1 having the nonlinear resistance element 9 or the step of rubbing the surface of the alignment film 15 with a cloth and performing the alignment treatment of the alignment film 15. Non-linear resistance element 9 in process
Characteristic degradation can be prevented.

As a result, it is possible to obtain the non-linear resistance element 9 having uniform and stable characteristics, and it is possible to obtain a liquid crystal display device having good display quality.

Next, the structure of the liquid crystal display device according to the fifth embodiment of the present invention will be described. The configuration of the liquid crystal display device according to the fifth embodiment of the present invention will be described with reference to FIGS. 13, 14, and 15. FIG.

FIG. 13 is a plan view showing the overall configuration of the liquid crystal display device according to the fifth embodiment of the present invention. FIG.
FIG. 14 is a plan view showing, in an enlarged manner, a portion 61 surrounded by a broken line in FIG. 13. The positional relationship between FIG. 13 and FIG. 14 corresponds to each other. A broken circle 61 on the left side of FIG. 13 is shown on the left of FIG. 14, and a broken circle 61 in the center of FIG. In FIG. 13, the dashed circle 61 on the right side of FIG.
Is shown on the right side. FIG. 15 is a sectional view showing a section taken along line GG of FIG. The positional relationship between FIG. 14 and FIG. 15 also corresponds. FIG. 13 and FIG.
A fifth embodiment of the present invention will be described with reference to FIGS.

On the first substrate 1, a lower electrode 2, a signal electrode 4, and an anodizing electrode 5 are provided as first electrodes made of a tantalum (Ta) film. Further, a non-linear resistance layer 3 made of a tantalum oxide (Ta ₂ O ₅ ) film is provided on the lower electrode 2 as an anodic oxide film of the lower electrode 2.

Anodizing electrode 5 comprising the first electrode
As shown in FIGS. 13 and 14, a matrix-shaped display area 6 composed of M rows of signal electrodes 4 and N columns of opposing electrodes 13 is provided.
Outside the device 2, a plurality of signal electrodes 4 are connected to each other.

Further, as the second electrode, the nonlinear resistance layer 3
The upper electrode 6, the display electrode 7 connected to the upper electrode 6, and the connection electrode 8 composed of the second electrode provided on the signal electrode 4 are, as shown in FIG. 2 is provided up to the inside of the substrate 11 and the sealant 42, but is not provided on the anodic oxidation electrode 5. This second electrode is composed of an indium tin oxide (ITO) film.

The lower electrode 2, the non-linear resistance layer 3 and the upper electrode 6 constitute a non-linear resistance element 9 having an MIM structure.

The anodic oxidation electrode 5 composed of the first electrode is
It is provided on the side opposite to the region where a signal from an external circuit is applied to the signal electrode 4.

For this reason, the second substrate 11 and the sealant 42
After the liquid crystal 16 is sealed using the masks as a mask, the liquid crystal 16 is separated by an etching method, so that a plurality of independent signal electrodes 4 can be formed. By the etching treatment method, the signal electrodes 4 are separated from each other by a separation side 10 which is substantially the same as the side of the second substrate 11 or the side of the sealant 42, thereby forming independent signal electrodes 4.

Further, the second substrate 11 has the first substrate 1
A black matrix 12 made of a chromium (Cr) film is provided to prevent light from leaking from a gap between the display electrodes 7 provided above.

As shown in the plan view of FIG. 14, the black matrix 12 is not provided on the second substrate 11 in the region facing the display electrode 7.

Further, a counter electrode 13 made of an indium tin oxide film is provided on the second substrate 11 so as to face the display electrode 7. The counter electrode 13 is provided via an insulating film 14 so as to prevent the counter electrode 13 from coming into contact with the black matrix 12 and causing a short circuit.

Further, as shown in the plan view of FIG.
The electrode and the display electrode 7 have a gap of a predetermined size in order to prevent a short circuit between them.

The display electrode 7 is disposed so as to overlap the counter electrode 13 with the liquid crystal 16 interposed therebetween.
To form a display pixel portion of a liquid crystal display panel.

In this display pixel portion, as shown in FIG. 15, the black matrix 12 has openings. Then, the formation region of the black matrix 12 becomes a light shielding region.

The liquid crystal display device performs a predetermined image display by the change in the transmittance of the liquid crystal 16 in the display pixel portion.

Further, the first substrate 1 and the second substrate 11 are provided with alignment films 15, 15, respectively, as processing layers for regularly arranging the molecules of the liquid crystal 16.

Further, the first substrate 1 and the second substrate 11 are opposed to each other with a predetermined gap by a spacer (not shown), and a space between the first substrate 1 and the second substrate 11 is provided. Liquid crystal 16 is enclosed.

According to the configuration of the fifth embodiment of the present invention described above, the anodic oxidation electrode 5 composed of the first electrode is outside the display area 62, and each signal electrode 4 is the second anodic oxidation electrode 5 Of the substrate 11 or the sealant 42 in a self-aligning manner.

That is, at the time of anodic oxidation, the signal electrodes 4 are mutually connected by the anodic oxidation electrodes 5.

Then, for example, after the inspection of the liquid crystal display panel, the second substrate 11 or the sealant 42 is used as a mask by an etching method without using a dedicated mask.
The anodizing electrode 5 can be separated by the separation side 10.

Further, since the second substrate 11 is used as a mask, the second substrate 11 is used during the manufacturing process of the liquid crystal display panel, during the inspection of the liquid crystal display panel, or after the inspection, and further after the external circuit is mounted. The electrode 5 can be cut using an etching method and processed into signal electrodes 4 that are independent of each other.

Therefore, an external signal can be applied to the nonlinear resistance element 9 using the connection electrode 8 and the signal electrode 4.

Therefore, static electricity is generated due to the step of printing the alignment film 15 on the first substrate 1 having the nonlinear resistance element 9 or the step of rubbing the surface of the alignment film 15 with a cloth and performing the alignment treatment of the alignment film 15. Non-linear resistance element 9 in process
Characteristic degradation can be prevented.

Therefore, it is possible to obtain a liquid crystal display device having good display quality with uniform and stable characteristics.

Next, the structure of a liquid crystal display device according to a sixth embodiment of the present invention will be described. The structure of a liquid crystal display device according to a sixth embodiment of the present invention will be described with reference to FIGS. 16, 17, and 18. FIG.

FIG. 16 is a plan view showing the entire structure of the liquid crystal display device according to the sixth embodiment of the present invention. FIG.
FIG. 17 is a plan view showing, in an enlarged manner, a portion indicated by a broken-line circle 61 in FIG. 16. Note that the positional relationship between FIG. 16 and FIG. 17 corresponds to each other, and a broken circle 61 on the left side of FIG. 16 is shown on the left of FIG. 17, and a broken circle 61 in the center of FIG. In FIG. 16, the dashed circle 61 on the right side of FIG.
Is shown on the right side. FIG. 18 is a sectional view showing a section taken along line HH in FIG. Note that the positional relationship between FIG. 17 and FIG. 18 also corresponds. FIG. 16 and FIG.
A sixth embodiment of the present invention will be described with reference to FIGS.

As shown in FIG. 16 and FIG.
Numeral 7 is provided in the display region 62 in the direction of a side parallel to the signal electrode 4 in the display region 62 at the outer peripheral portion of the display region 62, and static electricity is provided by providing the electrode close to the display electrode 7. Prevents local ingress.

As shown in FIG. 16 and FIG.
Is the outer periphery of the display area in the display area 62,
It is provided in the direction of the side orthogonal to the signal electrode 4 in the display area 62, and is connected to the signal electrode 4 and the anodizing electrode 5.

The first anodizing electrode 55 is connected to the display area 6
2 and around the semiconductor integrated circuit and the signal electrodes 51, 52, 53, 54 by the COG mounting method, and are left even when used as an actual liquid crystal display device.

On the first substrate 1, as a first electrode,
A lower electrode 2 made of a tantalum (Ta) film and a signal electrode 4
And a first anodizing electrode 55, a peripheral electrode 57, an auxiliary electrode 64, and an anodizing electrode 5.

Auxiliary electrode 64 and first anodizing electrode 55
And the peripheral electrode 57 are connected to each other, and have a configuration surrounding the periphery of the display region 62 including the signal electrodes 4 in M rows and the counter electrodes 13 in N columns.

Further, the auxiliary electrode 64 is used as the anodic oxidation electrode 5.
Are connected to each other through an electrode, and by anodizing treatment,
On the lower electrode 2, a non-linear resistance layer 3 made of a tantalum oxide (Ta ₂ O ₅ ) film is provided as an anodic oxide film of the lower electrode 2.

Further, as the second electrode, the upper electrode 6 on the nonlinear resistance layer 3 made of an indium oxide (ITO) film
And a display electrode 7 connected to the upper electrode 6, a first anodizing electrode 55, a peripheral electrode 57, and a connection electrode 8 covering the auxiliary electrode 64. Note that the second electrode is not provided on the anodizing electrode 5.

The lower electrode 2, the non-linear resistance layer 5, and the upper electrode 6 constitute a non-linear resistance element 9 having an MIM structure.

Further, the plurality of signal electrodes 4 are configured to be temporarily connected to the auxiliary electrode 64 by the anodizing electrode 5. However, when an external signal is applied to the display electrode 7, The connection electrode 8 composed of the second electrode is used as a mask.

Further, the auxiliary electrode 64 is connected to the peripheral electrode 57.
In the mounting portion for mounting the semiconductor integrated circuit by the COG mounting method, the mounting portion is connected to the first anodizing electrode 55 so as to surround the entire periphery of the display region 62.

Further, the second substrate 11 is provided with the first substrate 1
A black matrix 12 made of a chromium (Cr) film is provided to prevent light from leaking from a gap between the display electrodes 7 provided above.

Note that the black matrix 12 is not provided on the second substrate 11 in the region facing the display electrode 7.

Further, a counter electrode 13 made of an indium tin oxide film is provided on the second substrate 11 so as to face the display electrode 7. The counter electrode 13 is provided via an insulating film 14 so as to prevent the counter electrode 13 from coming into contact with the black matrix 12 and causing a short circuit.

Further, the first electrode 2 and the display electrode 7 have a gap of a predetermined size in order to prevent a short circuit between them.

The display electrode 7 is arranged so as to overlap the counter electrode 13 with the liquid crystal 16 interposed therebetween, thereby forming a display pixel portion of the liquid crystal display panel. In this display pixel portion, the black matrix 12 has an opening. The region where the black matrix 12 is formed serves as a light shielding portion.

The liquid crystal display device performs a predetermined image display based on the change in the transmittance of the liquid crystal 16 in the display pixel portion.

Further, the first substrate 1 and the second substrate 11 are provided with alignment films 15, 15, respectively, as processing layers for regularly arranging the molecules of the liquid crystal 16.

Further, the first substrate 1 and the second substrate 11 are opposed to each other with a predetermined gap by a spacer (not shown), and the first substrate 1 and the second substrate 11 are sealed with a sealant (not shown). The liquid crystal 16 is sealed in the area surrounded by the squares.

In the configuration of the liquid crystal display device according to the sixth embodiment of the present invention described above, the anodic oxidation electrode 5 comprising the first electrode is connected during the anodic oxidation treatment.

In the structure actually used for display, the signal electrode 4 and the auxiliary electrode 64 can be separated from each other without using the anodizing electrode 5 as a mask using the second electrode as a mask. It becomes possible.

In the configuration actually used for display, the auxiliary electrode 64, the first anodizing electrode 55, and the peripheral electrode 57 are used to surround the display area 62.

The display area 62 is divided into the auxiliary electrode 64 and the peripheral electrode 5.
7 and the first anodizing electrode 55, and the auxiliary electrode 6
4 and the surrounding electrode 57 are arranged near the display electrode 7.

By providing the first anodizing electrode 55 near the signal electrode 4 in the mounting portion, when static electricity is generated from the connection electrode 8, the counter electrode 13, or the signal electrode 4, the static electricity is discharged. Can be dispersed.

As described above, by forming electrodes around the display area 62, a process for producing a liquid crystal display panel in which static electricity is easily generated, and printing the alignment film 15 on the first substrate 1 having a non-linear resistance element. Of the non-linear resistance element 9 in a process involving generation of static electricity due to a process of performing the alignment process or a process of rubbing the surface of the alignment film 15 with a cloth using the alignment film 15 and performing the alignment process.

For this reason, it is possible to obtain a liquid crystal display device having good and stable display characteristics with uniform and stable characteristics.

In the sixth embodiment of the present invention described above, the structure in which the auxiliary electrode 64 is connected to the peripheral electrode 57 and the first anodizing electrode 55 has been described.

However, even in the case of a structure in which only the auxiliary electrode 64 is provided, a structure in which only the auxiliary electrode 64 and the peripheral electrode 57 are provided, or a structure in which these electrodes are individually provided, the distance from the side on which each electrode is provided is reduced. Since the static electricity can be sufficiently dispersed, the effect of the sixth embodiment can be obtained.

In the first to sixth embodiments of the present invention described above, a tantalum film is used as the first electrode 2. However, in addition to the tantalum film, a tantalum film containing nitrogen or a tantalum film containing nitrogen may be used. A tantalum film containing phosphorus or a tantalum film containing niobium can also be applied as the first electrode 2.

Furthermore, the first electrode 2 may be formed of a multi-layer film of a low-resistance material such as aluminum, copper, or nickel and tantalum or a film containing an impurity in tantalum. The effect is obtained.

In the first to sixth embodiments of the present invention described above, a description has been made using a tantalum film as the first electrode 2 and a tantalum oxide film as the nonlinear resistance layer 5.

However, as the nonlinear resistance layer 5, a silicon oxide film, a silicon nitride film, or a silicon oxide containing impurities is provided on the tantalum oxide film, and a multilayer film of the tantalum oxide film and the above-described film is formed. The effect of the present invention described above can be obtained even by using such a nonlinear resistance layer.

Further, a film to be formed on the tantalum oxide film of the non-linear resistance layer composed of a multilayer film may be formed by using a plasma chemical vapor deposition method. As a result, a voltage is applied to the tantalum oxide film, and the withstand voltage is improved, so that the deterioration of the nonlinear resistance element can be prevented.

Furthermore, by using a nonlinear resistance layer composed of a multilayer film, the current-voltage characteristics of the nonlinear resistance element can be controlled. For this reason, it is possible to suppress an overcurrent from flowing to the nonlinear resistance element, and to improve the characteristics of the liquid crystal display device.

Further, in the first to sixth embodiments of the present invention, the example of the liquid crystal display device having one non-linear resistance element 9 in each display pixel portion has been described. The effect of the present invention can be obtained even if an element is provided in each display pixel portion.

Furthermore, by using a nonlinear resistance layer composed of a multilayer film, the current-voltage characteristics of the nonlinear resistance element can be controlled. For this reason, it is possible to suppress an overcurrent from flowing to the nonlinear resistance element, and to improve the characteristics of the liquid crystal display device.

[0244]

As is clear from the above description, by using the liquid crystal display device of the present invention, the anodizing electrode can be used at the time of anodizing or at the end of the process in which static electricity is easily generated. By using the connection electrode composed of the two electrodes as a mask, it is possible to separate the electrodes on the substantially same side as the second electrode by the etching method.

Therefore, the first device having a non-linear resistance element can be used.
It is possible to prevent deterioration of the characteristics of the non-linear resistance element in a process involving generation of static electricity due to a process of printing an alignment film on the substrate or a process of rubbing the alignment film surface with a cloth and performing an alignment treatment of the alignment film. For this reason, it is possible to obtain a liquid crystal display device having uniform and stable characteristics and good display quality.

Furthermore, by using the present liquid crystal display device, even when the COG method used for high-density mounting is used, signal electrodes are connected to each other by anodic oxidation electrodes at the time of anodic oxidation. The electrode for anodic oxidation can be separated using the electrode as a mask.

Further, even when a plurality of substrates for a liquid crystal display device are provided on a large-sized substrate, they are separated by using an anodizing electrode composed of an adjacent first electrode and a connecting electrode composed of a second electrode. . This eliminates the need for a place for separating the anodizing electrode, so that a large substrate can be used effectively.

Further, in the case where an insulating film is used to prevent the characteristic change of the nonlinear resistance element, the anodizing electrode is formed independently of the signal electrode by the etching method when forming the opening of the insulating film. Since it can be processed to a small size, the number of steps does not increase.

Further, since the periphery of the display area is surrounded by the anodic oxidation electrode, the peripheral electrode, and the auxiliary electrode, even if static electricity is generated, local concentration does not occur. A uniform and stable nonlinear resistance element can be formed.

[Brief description of the drawings]

FIG. 1 is a plan view showing a liquid crystal display device according to a first embodiment of the present invention.

FIG. 2 is a plan view showing the liquid crystal display device according to the first embodiment of the present invention.

FIG. 3 is a sectional view showing the liquid crystal display device according to the first embodiment of the present invention.

FIG. 4 is a sectional view showing the liquid crystal display device according to the first embodiment of the present invention.

FIG. 5 is a plan view showing a liquid crystal display device according to a second embodiment of the present invention.

FIG. 6 is a sectional view showing a liquid crystal display device according to a second embodiment of the present invention.

FIG. 7 is a plan view showing a liquid crystal display device according to a third embodiment of the present invention.

FIG. 8 is a plan view showing a liquid crystal display device according to a third embodiment of the present invention.

FIG. 9 is a sectional view showing a liquid crystal display device according to a third embodiment of the present invention.

FIG. 10 is a sectional view showing a liquid crystal display device according to a third embodiment of the present invention.

FIG. 11 is a plan view showing a liquid crystal display device according to a fourth embodiment of the present invention.

FIG. 12 is a sectional view showing a liquid crystal display device according to a fourth embodiment of the present invention.

FIG. 13 is a plan view showing a liquid crystal display device according to a fifth embodiment of the present invention.

FIG. 14 is a plan view showing a liquid crystal display device according to a fifth embodiment of the present invention.

FIG. 15 is a sectional view showing a liquid crystal display device according to a fifth embodiment of the present invention.

FIG. 16 is a plan view showing a liquid crystal display device according to a sixth embodiment of the present invention.

FIG. 17 is a plan view showing a liquid crystal display device according to a sixth embodiment of the present invention.

FIG. 18 is a sectional view showing a liquid crystal display device according to a sixth embodiment of the present invention.

FIG. 19 is a plan view showing a liquid crystal display device in a conventional example.

FIG. 20 is a plan view showing a conventional liquid crystal display device.

FIG. 21 is a cross-sectional view showing a liquid crystal display device in a conventional example.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 1st board | substrate 2 lower electrode 3 non-linear resistance layer 4 signal electrode 5 anodizing electrode 6 upper electrode 7 display electrode 8 connection electrode 9 non-linear resistance element 10 separation side 57 peripheral electrode 64 auxiliary electrode

Continuation of front page (56) References JP-A-5-27269 (JP, A) JP-A-5-19300 (JP, A) JP-A-5-100242 (JP, A) (58) Fields investigated (Int) .Cl. ⁷ , DB name) G02F 1/1365 G02F 1/1345

Claims (6)

(57) [Claims] 1. A first electrode and a second electrode on a first substrate.
Forming an overlap between the first electrode and the second electrode.
By anodizing the first electrode in the area where it fits
Forming a non-linear resistance element, wherein the first electrode is connected to the non-linear
Signal for applying external signal and lower electrode of resistive element
An electrode, wherein the second electrode is connected to the non-linear resistance element.
An upper electrode, and connected to a display electrode,
A first substrate and the second substrate are bonded at a predetermined interval.
And seal liquid crystal between the first substrate and the second substrate.
A liquid crystal display device for input, and for anodic oxidation electrode commonly connecting the respective first electrode, prior to
A connection electrode covering a part of the signal electrode;
Anodic oxidation of multiple lower electrodes at the same time
In both cases, the connection electrode is used as a mask to form the anodizing electrode.
A liquid crystal display device having poles cut off . 2. The connection electrode is made of indium tin oxide.
The liquid crystal display device according to claim 1, wherein: 3. The method according to claim 1, wherein the connection electrode is formed in the same step as the display electrode.
The liquid crystal display device according to claim 2, wherein the liquid crystal display device is formed by: 4. The method according to claim 1 , wherein said first electrode is provided on said first substrate.
After forming the anodizing electrode and performing anodizing,
The connection electrode was formed and the anodizing electrode was cut.
The liquid crystal display device according to any one of claims 1 to 3, wherein: 5. The lower electrode constituting the first electrode
And the signal electrode and the anodizing electrode are an integrated metal.
The method according to any one of claims 1 to 4, wherein
The liquid crystal display device as described in the above . 6. The upper electrode constituting the second electrode
And the display electrode and the connection electrode are formed at the same time.
2. The method according to claim 1, wherein the material is indium tin oxide.
6. The liquid crystal display device according to any one of the above items 5 .