JP3317433B2 - Installation structure of fan filter unit - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a fan filter unit installation structure, and more particularly to a fan filter unit installation structure for mounting a fan filter unit on a ceiling of a clean room.

[0002]

2. Description of the Related Art A plurality of fan filter units are laid on a ceiling of a clean room such as a semiconductor manufacturing plant, and clean air is supplied from the fan filter units into the clean room. The installation structure of the fan filter unit is constructed by assembling a support frame of a predetermined length having a convex cross section in a lattice shape while hanging the support frame on a ceiling beam of a building with suspension bolts. Then, the fan filter unit is inserted into the lattice-shaped installation space in a state where the fan filter unit is inclined so that the peripheral edge does not hit the support frame, and after the fan filter unit is returned to a horizontal state, the fan filter unit is lowered. Then, the lower peripheral portion of the fan filter unit is placed on the horizontal flat portion of the support frame to be installed on the ceiling.

[0003]

However, in the conventional installation structure of the fan filter unit, since the support frame is formed integrally, the fan filter unit must be inserted into the installation space in an oblique state. Failure occurs. That is, in the conventional installation structure, the ceiling space from the installation part of the fan filter unit to the ceiling surface of the clean room building must be increased by an amount corresponding to the oblique fan filter unit. There is a disadvantage that the building has a large structure.

Further, in the case of an existing clean room building having a low ceiling, there is a disadvantage that the work space of the clean room is narrowed by the amount of the above-mentioned ceiling space. The present invention has been made in view of such circumstances, and an object of the present invention is to provide a fan filter unit installation structure that can install a fan filter unit in a minimum ceiling space.

[0005]

In order to achieve the above object, the present invention provides a fan filter unit installation structure for installing a plurality of fan filter units on a ceiling of a clean room. Ceiling frame formed in a lattice shape to surround the side wall
There are vertically in the ceiling portion of the clean room, the loading frame where the lower peripheral edge portion is placed in the fan filter unit to the lower surface of the ceiling frame removably mounted on the ceiling off
A pair of opposing grooves are formed inside the lower mounting part of the frame
And a long washer is inserted into the pair of grooves.
And a plurality of buttons provided at intervals on the washer.
The bolts project downward, and a plurality of bolts projecting downward
By inserting it into the through hole of the mounting frame and fastening it,
The bottom of the well frame and the top of the
It is characterized by being tied .

According to the present invention, first, a grid-like ceiling frame is suspended from the ceiling of the clean room, and the fan filter unit is lifted from below the ceiling frame in the same horizontal state as the installed state, thereby forming a grid on the ceiling frame. Into the space. Then, after the mounting frame is attached to the lower surface of the ceiling frame, the fan filter unit is lowered, and the lower peripheral portion of the fan filter unit is mounted on the mounting frame. Thereby, in the present invention, if there is a ceiling space slightly higher than the height of the fan filter unit,
A fan filter unit can be installed.

[0007]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of the installation structure of a fan filter unit according to the present invention will be described below in detail with reference to the accompanying drawings. FIG. 1 is an explanatory view showing the interior of a clean room to which a fan filter unit installation structure according to the present invention is applied. Clean room 10 shown in FIG.
Has a number of fan filter units 12 and 12 on the ceiling.
Are densely laid, and clean air is supplied into the clean room 10 from the fan filter units 12, 12,. The fan filter unit 12 has a unit main body formed in a rectangular parallelepiped shape, and a fan is provided in an opening on the upper surface thereof. When the fan is driven, the outside air and the circulating air supplied into the ceiling room are sucked into the unit body, and after being air-conditioned by an air conditioner built in the unit body, the HEPA filter attached to the lower surface of the unit body is removed. It is supplied to the clean room 10 via the control unit.

The fan filter unit 12 is mounted on the ceiling by a support frame having the installation structure of the present invention shown in FIG. The support frame includes a ceiling frame 14 and a mounting frame 16. The ceiling frame 14 is constructed by connecting a number of vertical frames 18 and a horizontal frame 20 shorter than the vertical frames 18 in a lattice shape, and the ceiling of the clean room building shown in FIG. It is suspended from the beam 24. The connection structure between the vertical frame 18 and the horizontal frame 20 will be described later.

As shown in FIGS. 3 and 4, the vertical frame 18 and the horizontal frame 20 are metal frames having a substantially I-shaped cross section having a constricted portion 26 formed at the center in the longitudinal direction on both side surfaces. Mounting portions 28 and 30 having concave cross sections
Are formed. At the upper end of the mounting portion 28, hook portions 32, 32 bent inward are formed. Inside the hooks 32, 32, a flat washer 34 having a size that does not come off from the hooks 32, 32 is inserted, and outside the hooks 32, 32, hooks 32, 3 are inserted.
A washer 38 formed with claws 36, 36,. The washers 34, 38 are arranged so as to sandwich the hooks 32, 32 from above and below, and the suspension bolts 22 are inserted into the respective through holes 34A, 38A via nuts 40. Then, a nut 42 shown in FIG. 3 is fastened to the suspension bolt 22 from below the washer 34. Thereby, the vertical frame 18 and the horizontal frame 20 are suspended from the ceiling. On the other hand, a pair of grooves 44 is formed inside the mounting portion 30 so as to face each other. The groove 4
A long washer 48 in which bolts 46, 46... Are mounted in advance is inserted into the grooves 4 and 44.
4 and 44, the bolts 46, 46... Are arranged to protrude downward from the mounting portion 30 as shown in FIGS. These bolts 46 connect the mounting frame 16 to the ceiling frame 14. The connection structure between the ceiling frame 14 and the mounting frame 16 will be described later.

The mounting frame 16 is constructed by connecting a number of vertical frames 50 and a horizontal frame 52 shorter than the vertical frames 50 to the lower surface of the ceiling frame 14 as shown in FIG. . The vertical frame 50
The horizontal frame 52 is a metal frame having an inverted concave cross section as shown in FIGS.
4 is formed sufficiently wider than the width. As shown in FIG. 4, a ridge 54 is formed at the longitudinal center of the upper surfaces of the vertical frame 50 and the horizontal frame 52, and through holes 54A, 54A,. . The through holes 54A, 54A... Are holes through which the bolts 46 are inserted when the mounting frame 16 is connected to the ceiling frame 14. That is, the through holes 54A, 54A ...
3 are fastened from the inside of the vertical frame 50 and the horizontal frame 52 to the bolts 46, 46. The horizontal flat portions 5 are provided on both sides of the ridge portions 54 of the vertical frame 50 and the horizontal frame 52.
8, 58 are formed. The horizontal flat portions 58, 58 are mounting surfaces on which the lower peripheral portion 12A of the fan filter unit 12, indicated by a two-dot chain line in FIG. 3, is mounted.

An under cover 62 for supporting a fluorescent lamp 60 for indoor lighting is mounted on the lower open portions of the vertical frame 50 and the horizontal frame 52 flush with the lower open portions. A leaf spring member 64 includes a screw 66 inside the under cover 62.
The leaf spring members 68 are formed at the upper end of the leaf spring member 64. The leaf spring pieces 68, 68 engage with stopper pieces 70, 70 protruding inside the vertical frame 50 and the horizontal frame 52 when the under cover 62 is mounted, and attach the under cover 62 to the vertical frame 50 and the horizontal frame 52. Is to be supported. That is, when the under cover 62 is pressed against the lower open portions of the vertical frame 50 and the horizontal frame 52, the leaf spring pieces 68, 68 are pushed by the stopper pieces 70, 70 and are elastically deformed inward. When pushed in, the leaf spring pieces 68, 68 ride over the stopper pieces 70, 70 and engage with the stopper pieces 70, 70 as shown in FIG. Thus, the under cover 62 is mounted on the vertical frame 50 and the horizontal frame 52. Also, if the undercover 62 after being attached is pulled downward, the leaf spring pieces 68, 68 are pushed by the stopper pieces 70, 70 and elastically deform inward to get over the stopper pieces 70, 70. 50 and the horizontal frame 52.

Next, the vertical frame 18 of the ceiling frame 14
The connection structure between the frame and the horizontal frame 20 will be described. FIG.
FIG. 4 is an assembled perspective view of the vertical frame 18 and the horizontal frame 20 showing a connection portion other than the outer peripheral portion of the ceiling frame 14. First, the ends of the two horizontal frames 20, 20 are pressed against both side surfaces of the vertical frame 18 suspended by the suspension bolts 22, 22, respectively.
0 and 20 are kept orthogonal. At this time, the four bolt holes 7 formed in the constricted portion 26 of the vertical frame 18 are formed.
Two horizontal frames 20 are pressed between the through holes 72B and the through holes 72C of 2A, 72B, 72C, and 72D. Next, four washers 74, 76, 7 formed in an L-shape.
The vertical frame 18 and the horizontal frame 20 are connected using 8, 80.

That is, the bolt through hole 74 of the washer 74
A, and the bolt 82 is inserted through the bolt through hole 72A, and the bolt 82 is inserted into the screw hole 76A of the washer 76.
To conclude. Next, the bolt through hole 76 of the washer 76
B, and the bolt 84 is inserted through the bolt through hole 72B, and the bolt 84 is inserted into the screw hole 74B of the washer 74.
To conclude. Next, the bolt through hole 78 of the washer 78
A, and the bolt 86 is inserted through the bolt through hole 72D, and the bolt 86 is inserted into the screw hole 80A of the washer 80.
To conclude. Next, the bolt through hole 80 of the washer 80
B, and the bolt 88 is inserted through the bolt through hole 72C, and the bolt 88 is inserted into the screw hole 78B of the washer 78.
To conclude. Thus, the four washers 74 to 80 are temporarily fixed to the vertical frame 18.

Then, the bolt through hole 74 of the washer 74 is provided.
C, and a bolt 90 is inserted through a bolt through hole 20A formed in the horizontal frame 20 on the left side in the figure, and the bolt 90 is fastened to the screw hole 78C of the washer 78. next,
A bolt 92 is inserted through the bolt through hole 78D of the washer 78 and the bolt through hole 20B of the horizontal frame 20, and the bolt 92 is fastened to the screw hole 74D of the washer 74. Thereby, the horizontal frame 20 on the left side in the figure is connected to the vertical frame 18. Next, the bolt 94 is inserted through the bolt through hole 76C of the washer 76 and the bolt through hole 20C formed in the right side frame 20 in the figure,
The bolt 94 is fastened to the screw hole 80C of the washer 80. Next, a bolt 96 is inserted through the bolt through hole 80D of the washer 80 and the bolt through hole 20D of the horizontal frame 20, and the bolt 96 is fastened to the screw hole 76D of the washer 76. Thereby, the horizontal frame 20 on the right side in the figure is connected to the vertical frame 18.

As shown in FIG. 5, the vertical frames 18, 18 are connected to each other by pressing the ends of the vertical frames 18, 18, and the pressed connecting portions are connected to each other by two flat plates washers 98, 100. Pinch it. Then, the bolt 102 is inserted through the bolt through hole 98A of the washer 98 and the bolt through hole 18A formed in the vertical frame 18 to be connected, and the bolt 102 is inserted into the screw hole 1 of the washer 100.
Fasten to 00A. Next, a bolt through hole 98B of the washer 98 and a bolt through hole 18B of the vertical frame 18 are formed.
, And the bolt 104 is fastened to the screw hole 100 </ b> B of the washer 100. Next, the bolt 106 is inserted through the bolt through hole 100C of the washer 100 and the bolt through hole 18C formed in the vertical frame 18 to be connected, and the bolt 106 is fastened to the screw hole 98C of the washer 98. . Next, washers 10
The bolt 108 is inserted through the zero bolt through hole 100D and the vertical frame 18 through the bolt through hole 18D, and the bolt 108 is fastened to the screw hole 98D of the washer 98.
Thereby, the vertical frames 18 are connected to each other.

As described above, the vertical frame 18 and the horizontal frame 2
0 and are sequentially connected to construct a lattice-shaped ceiling frame 14 shown in FIGS. Vertical frame 18 and horizontal frame 20
Each of the rectangular spaces 110 is formed to have a size surrounding the side wall of the fan filter unit 12 in a horizontal state, as shown in FIG. And the ceiling frame 14
When the vertical frame 50 and the horizontal frame 52 of the mounting frame 16 are connected by bolts 46, 46.
As shown in FIG. 7, the outer edges of the rectangular space 110 are horizontal flat portions 58, 5 of a vertical frame 50 and a horizontal frame 52.
8 to form a frame. The lower peripheral portion 12A of the fan filter unit 12 is placed on the frame-shaped horizontal flat portions 58, 58. Thus, the fan filter units 12, 12,...
… Installed inside. As shown in FIG. 8, the bolts 82 and the like used for fastening the vertical frame 18 and the horizontal frame 20 do not protrude from the surface 29 connecting the attachment portions 28 and 30 of the vertical frame 18 and the horizontal frame 20 at the time of fastening. Is formed.

FIG. 9 is an assembled perspective view of the vertical frame 18 and the horizontal frame showing the connecting portion of the outer peripheral portion of the ceiling frame 14. First, the end of the horizontal frame 20 is pressed against the inner surface of the vertical frame 18 suspended by the hanging bolts 22, 22... To hold the vertical frame 18 and the horizontal frame 20 in a T-shaped state. Next, the plate-like washer 112 and the two L-shaped washers 114 and 116 are connected to each other.

That is, the bolt through hole 11 of the washer 112
The bolt 118 is inserted through the 2A and the bolt through hole 72A of the vertical frame 18, and the bolt 118 is fastened to the screw hole 114A of the washer 114. Next, washer 1
12 bolt through holes 112B and bolt through holes 72B
, And the bolt 120 is fastened to the screw hole 114 </ b> B of the washer 114. Next, the bolt 122 is inserted through the bolt through hole 112CA of the washer 112 and the bolt through hole 72C (see FIG. 5),
The bolt 122 is fastened to the screw hole 116C of the washer 116. Next, the bolt through hole 112 of the washer 112
D, and a bolt 124 is inserted through a bolt through hole 72D (see FIG. 5), and the bolt 124 is
Screw hole 116D. And washer 116
The bolt 126 is inserted through the bolt through hole 116A of the horizontal frame 20 and the bolt through hole 20D of the horizontal frame 20, and the bolt 126 is fastened to the screw hole 114D of the washer 114. Next, a bolt 128 is inserted through the bolt through hole 116B of the washer 116 and the bolt through hole 20C of the horizontal frame 20, and the bolt 128 is fastened to the screw hole 114C of the washer 114. Thereby, the horizontal frame 2 is attached to the vertical frame 18 located on the outer peripheral portion of the ceiling frame 14.
0 is concatenated.

FIG. 10 shows a cable 130 such as a fluorescent lamp 60.
FIG. 4 is an explanatory view showing the wiring structure of FIG. The cable 130 is provided from the outside of the clean room 10 to the ceiling of the clean room 10 and, as shown in FIG.
4 and the fluorescent lamp 60 (see FIG. 6) via the mounting frame 16. For example, a rectangular cutout 26A is formed in the constricted portion 26 of the vertical frame 18 of the ceiling frame 14, and the cutout 26A communicates with the bottom surface of the mounting portion 28 corresponding to the cutout 26A and the upper surface of the mounting portion 30. Through holes 28A and 30A are formed. Cable 130
The cutout 26A and the through-hole 30
A, and for example, the mounting frame 16
The fluorescent lamp 60 is disposed through a through hole 54B formed in the vertical frame 50 of FIG.

The vertical frame 18 includes the vertical frame 1
Eight reinforcing plates 132, 134 are provided. These plates 132 and 134 are connected to the constricted portion 26 of the vertical frame 18 so as to sandwich the cut portion 26A from both sides.
Are fastened by the bolts 136, 136... Swelling portions 132A and 134A are formed at substantially central portions of the plates 132 and 134 which are located at the cutout portions 26A.
The cable 130 is connected to the plate 1 by 32A and 134A.
32, 134. The bulging portions 132A and 134A are connected to the bolts 82 shown in FIG.
Similarly to the above, it is formed in a size that does not protrude from the surface 29 connecting the mounting portions 28 and 30 of the vertical frame 18.

Next, a method of installing the fan filter unit 12 will be described. First, the vertical frame 18 and the horizontal frame 20 are sequentially connected to the ceiling of the clean room 10 to construct the ceiling frame 14. Next, as shown in FIG. 11, the fan filter unit 12 is mounted on the mounting table 142 of the pantograph type elevating device 140 in the same horizontal state as the installed state. Next, the pantograph type lifting device 140
Is driven to lift the fan filter unit 12 and insert the fan filter unit 12 into the lattice space 110 (see FIG. 6) of the ceiling frame 14. At this time, the fan filter unit 12 is positioned so that the lower portion of the fan filter unit 12 is located slightly above the lower surface of the ceiling frame 14.

The vertical frame 50 and the horizontal frame 52 of the mounting frame 16 are sequentially connected to the lower surface of the ceiling frame 14 by bolts 46, 46,.
10 are formed with frame-shaped horizontal flat portions 58 (see FIG. 7). The worker connects the vertical frame 50 and the horizontal frame 52 using the ladder 144 as shown in FIG. Then, the fan filter unit 12 is lowered by the pantograph type lifting device 140, and the lower peripheral portion 12A of the fan filter unit 12 is placed on the frame-shaped horizontal flat portions 58, 58. Thereby, the installation work of the first fan filter unit 12 is completed.
When the second fan filter unit 12 is installed, the pantograph type elevating device 140 is moved to the installation position, and the second fan filter unit 12 is mounted on the mounting table 142. May be sequentially performed.

Therefore, in this embodiment, the fan filter unit 12 is placed in the same horizontal state as the installed state, and
4 and the ceiling frame 1
Since the mounting frame 16 is connected to the lower surface of the fan filter unit 12 and the fan filter unit 12 is installed, if the ceiling space 150 is slightly higher than the height H1 of the fan filter unit 12 (see FIG. 3), the fan filter unit 1
2 can be installed.

Thus, in the present embodiment, the ceiling space 15
Since the height H2 of 0 can be minimized, the clean room 10 does not have a large structure, and the space inside the clean room can be widened even in an existing clean room.

[0025]

As described above, according to the installation structure of the fan filter unit according to the present invention, the ceiling frame formed in a lattice shape so as to surround the side wall of the fan filter unit, and Since the lower peripheral portion is composed of a mounting frame on which the fan filter unit is mounted and can be installed in a ceiling space slightly higher than the height of the fan filter unit, the fan filter unit can be installed in a minimum ceiling space.

[Brief description of the drawings]

FIG. 1 is an explanatory diagram showing an embodiment of a clean room to which a fan filter unit installation structure according to the present invention is applied.

FIG. 2 is an exploded perspective view of the installation structure of the fan filter unit.

FIG. 3 is a sectional view of an installation structure of the fan filter unit.

FIG. 4 is an assembled perspective view of the installation structure of the fan filter unit.

FIG. 5 is an assembled perspective view of a ceiling frame.

FIG. 6 is an assembled perspective view of a fan filter unit.

FIG. 7 is a top view showing a rectangular space of the installation structure of the fan filter unit.

FIG. 8 is a sectional view of a connection portion of the ceiling frame.

FIG. 9 is an assembled perspective view of a ceiling frame.

FIG. 10 is an explanatory diagram showing a cable wiring structure.

FIG. 11 is an explanatory view showing the installation procedure of the fan filter unit.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 ... Clean room 12 ... Fan filter unit 14 ... Ceiling frame 16 ... Mounting frame 18 ... Vertical frame of ceiling frame 20 ... Horizontal frame of ceiling frame 22 ... Hanging bolt 50 ... Vertical frame of mounting frame 52 ... Horizontal of mounting frame flame

──────────────────────────────────────────────────続 き Continued on front page (58) Field surveyed (Int.Cl. ⁷ , DB name) F24F ^7/ 04-7/06

Claims (3)

(57) [Claims] In a fan filter unit installation structure for installing a plurality of fan filter units on a ceiling of a clean room, a ceiling frame formed in a lattice shape so as to surround a side wall of each fan filter unit. There are vertically in the ceiling portion of the clean room, the ceiling lower peripheral edge of the fan filter unit to the lower surface of the frame mounting frame is placed wear <br/> detachably provided, the lower mounting portion of said ceiling frame Inside a pair
Grooves are formed, and the pair of grooves has an elongated
A washer is inserted and the washer is
A plurality of bolts protruding downward, and
Bolts into the mounting frame through holes
With this, the lower surface of the ceiling frame and the upper surface of the mounting frame
An installation structure for a fan filter unit, which is connected in contact with the fan filter unit. 2. The lower mounting portion of the mounting frame according to claim 2,
The cover that supports the fluorescent lamp in the open part
Characterized by being detachably attached by
Item 2. An installation structure of the fan filter unit according to Item 1. 3. The method according to claim 3, wherein the ceiling frame and the mounting frame
Is formed with through holes and cutouts where cables can be routed
3. The fan fan according to claim 1, wherein
Filter unit installation structure.