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JP3268585B2 - Calibration device for plate width and meandering measurement device using two-dimensional distance meter - Google Patents

Calibration device for plate width and meandering measurement device using two-dimensional distance meter

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Publication number
JP3268585B2
JP3268585B2 JP05446393A JP5446393A JP3268585B2 JP 3268585 B2 JP3268585 B2 JP 3268585B2 JP 05446393 A JP05446393 A JP 05446393A JP 5446393 A JP5446393 A JP 5446393A JP 3268585 B2 JP3268585 B2 JP 3268585B2
Authority
JP
Japan
Prior art keywords
dimensional
plate
calibration
distance meter
dimensional distance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP05446393A
Other languages
Japanese (ja)
Other versions
JPH06265326A (en
Inventor
淳則 上原
康徳 黒田
雅彦 伊藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JFE Steel Corp
Original Assignee
JFE Steel Corp
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Filing date
Publication date
Application filed by JFE Steel Corp filed Critical JFE Steel Corp
Priority to JP05446393A priority Critical patent/JP3268585B2/en
Publication of JPH06265326A publication Critical patent/JPH06265326A/en
Application granted granted Critical
Publication of JP3268585B2 publication Critical patent/JP3268585B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は、2次元距離計を板幅方
向に複数台並べて構成する板幅・蛇行測定装置の測定精
度を高めるための校正装置に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a calibration device for improving the measurement accuracy of a plate width and meandering measuring device comprising a plurality of two-dimensional distance meters arranged in the plate width direction.

【0002】[0002]

【従来の技術】投光器にレーザ等を用いた2次元距離計
は、光学的に決まる視野の範囲内で、1台で約500点
もの距離分布が得られるため、それを利用して板幅や蛇
行を測定する装置が提案されている(例えば特開平4−
060405号)。板材が流れるようなラインにおいて
は、この2次元距離計を板幅方向に複数台並べて信号処
理することにより、製品板材全ての幅や蛇行を測定する
ことができる。
2. Description of the Related Art A two-dimensional distance meter using a laser or the like as a light projector can obtain a distance distribution of about 500 points per unit within an optically determined visual field. A device for measuring meandering has been proposed (for example, see Japanese Unexamined Patent Publication No.
060405). In a line in which a plate material flows, by arranging a plurality of two-dimensional distance meters in the plate width direction and performing signal processing, it is possible to measure the width and meandering of all the product plate materials.

【0003】このとき、メーカで製作された個々の2次
元距離計は、距離測定精度のみが保証された形でライン
に取付けられる。ところが、架台に2次元距離計を取付
けるときには、板幅方向に±0度の傾きの状態で据付け
ることは非常に困難であり、個々の2次元距離計にいく
らかの傾きを許容しながら据付を行うことになる。個々
の2次元距離計がいくらかの傾きを持つと、測定値には
次の誤差が含まれてくる。
At this time, individual two-dimensional rangefinders manufactured by a manufacturer are mounted on a line in a manner that only the accuracy of distance measurement is guaranteed. However, when mounting a two-dimensional distance meter on a gantry, it is very difficult to install the two-dimensional distance meter with a tilt of ± 0 degrees in the board width direction. Will do. If each individual two-dimensional rangefinder has some slope, the measured values will include the following errors:

【0004】第1には、2次元距離計のカメラの視野の
中で高さ方向に変化する2次元CCDカメラの板幅方向
の1ビット当りの分解能がメーカ調整段階と異なること
による誤差、第2には、2次元距離計の距離測定値と設
備上のパスライン距離が異なることによる誤差、第3に
は、2次元距離計の測定中心と設備上の測定中心が異な
ることによって発生する板幅・蛇行演算誤差である。
First, an error caused by a difference in resolution per bit in a board width direction of a two-dimensional CCD camera that changes in a height direction in a field of view of a camera of a two-dimensional rangefinder differs from a maker adjustment stage. 2 is an error caused by the difference between the distance measurement value of the two-dimensional distance meter and the path line distance on the equipment. Third, a plate caused by the difference between the measurement center of the two-dimensional distance meter and the measurement center on the equipment. It is a width / meander calculation error.

【0005】更には、2次元距離計特有の誤差で、扇状
に拡がった投光ビームの光路に沿った距離測定値と、実
際に測定したい鉛直下方方向の距離との誤差がある。
Further, there is an error peculiar to the two-dimensional distance meter, which is an error between a distance measurement value along the optical path of the projected beam spread in a fan shape and a distance in a vertical downward direction to be actually measured.

【0006】これらの誤差の影響は、2次元距離計と被
測定物である板材との距離が大きくなる程、大きな値と
なり、板幅・蛇行を測定する上で無視できない値とな
る。
The influence of these errors becomes larger as the distance between the two-dimensional distance meter and the plate material to be measured becomes larger, and becomes a value that cannot be ignored in measuring the plate width and meandering.

【0007】これらの誤差を取り除く方法としては、例
えば既知幅のゲージを用いて高さ方向の分解能を測定し
直す方法、基準パスラインからの2次元距離計の据付位
置と距離測定値との差を個々の2次元距離計について測
定し直す方法、パスラインに水平に置かれた基準板等を
用いて2次元距離計の距離測定値をチェックして、個々
の2次元距離計毎に、カメラの中心軸の傾きを測定する
方法等がある。
As a method of removing these errors, for example, a method of re-measuring the resolution in the height direction using a gauge of a known width, a difference between an installation position of a two-dimensional distance meter from a reference path line and a distance measurement value. Method of re-measuring each of the two-dimensional distance meters, checking the distance measurement value of the two-dimensional distance meter using a reference plate or the like placed horizontally on the pass line, and setting a camera for each of the two-dimensional distance meters. For measuring the inclination of the central axis of the object.

【0008】[0008]

【発明が解決しようとする課題】しかしながら、これら
の方法は、2次元距離計が設置されているライン内に入
って作業を行う必要があるため、個別の装置で測定作業
を行っていれば、板幅・蛇行計として立ち上げるまでに
時間がかかることや、2次元距離計を故障等により補修
した後の復旧作業において、測定精度を調整するために
長時間の作業が必要になる等の問題点があった。
However, in these methods, since it is necessary to enter the line in which the two-dimensional distance meter is installed and perform the operation, if the measurement operation is performed by an individual device, It takes a long time to start up as a board width and meandering meter, and it takes a long time to adjust the measurement accuracy in the recovery work after repairing the two-dimensional distance meter due to failure etc. There was a point.

【0009】本発明は、前記従来の問題点を解消するべ
く成されたもので、2次元距離計が板幅方向に何台設置
されていても、据付時に発生する前記4つの誤差を速や
かに測定し、演算装置で補正するための、2次元距離計
を用いた板幅・蛇行測定装置の校正装置を提供すること
を目的とするものである。
The present invention has been made in order to solve the above-mentioned conventional problems, and the four errors generated at the time of installation can be quickly eliminated regardless of how many two-dimensional distance meters are installed in the board width direction. An object of the present invention is to provide a calibrating device of a plate width / meandering measuring device using a two-dimensional distance meter for measuring and correcting with a calculating device.

【0010】[0010]

【課題を解決するための手段】本発明は、板材が通板さ
れるようなラインで、2次元距離計を板幅方向に複数台
並べて配置した板幅・蛇行測定装置の校正装置におい
て、少なくともラインセンタの片側に設置されている全
ての2次元距離計の視野をカバーする、平坦な面で構成
される校正板と、個々の2次元距離計の視野の中に入る
幅で、少なくとも2種の高さを持つ校正板と、該少なく
とも2種の高さを持つ校正板を板幅方向にスライドでき
る機構を備えることによって、個々の2次元距離計が据
付れたときの板幅方向の傾きによって発生する板幅・蛇
行量の測定誤差、及び、2次元距離計の距離測定値と設
備上の取付誤差によって発生する、パスライン測定誤
差、及び、2次元距離計の扇状に拡がった投光ビームの
光路に沿った距離測定値と、2次元距離計で測定したい
方向の距離との誤差、及び、2次元距離計のカメラの視
野の中で高さ方向に変化する板幅方向の2次元画像走査
型カメラ1ビット当りの分解能によって生じる誤差を、
全て補正して板幅・蛇行量測定が正しく行えるようにす
ることによって、前記目的を達成したものである。
SUMMARY OF THE INVENTION The present invention relates to a calibration apparatus for a sheet width and meandering measuring apparatus in which a plurality of two-dimensional distance meters are arranged in a line in the sheet width direction on a line through which the sheet material passes. A calibration plate consisting of a flat surface that covers the field of view of all two-dimensional rangefinders installed on one side of the line center, and at least two types of widths that fall within the field of view of each two-dimensional rangefinder. Height, and a mechanism that can slide the calibration plates having at least two kinds of heights in the plate width direction, so that the inclination in the plate width direction when each two-dimensional distance meter is installed is provided. Measurement error of the board width and meandering amount caused by the measurement, path line measurement error caused by the distance measurement value of the two-dimensional distance meter and installation error on the equipment, and the fan-shaped spread of the two-dimensional distance meter Distance measurement along the beam path And the error between the distance in the direction desired to be measured by the two-dimensional rangefinder and the resolution per bit of the two-dimensional image scanning type camera in the board width direction that changes in the height direction in the field of view of the camera of the two-dimensional rangefinder. Error caused by
The above object has been achieved by correcting all the data so that the width and meandering amount can be measured correctly.

【0011】[0011]

【作用】本発明によれば、2次元距離計を板幅方向に複
数台並べて構成する板幅・蛇行測定装置の校正をする際
に、全ての2次元距離計の視野をカバーする平坦な面で
構成される校正板と、個々の2次元距離計の視野の中に
入り、且つ板幅方向に校正板の位置を変えられる機構を
持つ装置を組合せた校正装置を用いて、2次元距離計の
カメラの視野の中で高さ方向に変化する2次元画像走査
型カメラの板幅方向の分解能の誤差、及び扇状に拡がっ
た投光ビームの光路に沿った距離測定値と実際に測定し
たい高さ方向の距離との誤差、及び2次元距離計の測定
中心と設備上の測定中心が異なることによって生じる誤
差、更には2次元距離計の距離測定値と設備上のパスラ
イン距離が異なることによって生じる誤差を、全て補正
できるようにしたため、精度良く板幅・蛇行を測定でき
るようになる。
According to the present invention, a flat surface covering the field of view of all two-dimensional rangefinders when calibrating a plate width and meandering measuring device constituted by arranging a plurality of two-dimensional rangefinders in the width direction of the plate. Two-dimensional distance meter using a calibration device that combines a calibration plate composed of: and a device that has a mechanism that can enter the field of view of each two-dimensional distance meter and change the position of the calibration plate in the plate width direction. Of the resolution in the width direction of the two-dimensional image scanning camera, which changes in the height direction in the field of view of the camera, and the distance measurement value along the optical path of the projected beam spread in a fan shape and the height to be actually measured Error caused by the difference between the measurement center of the two-dimensional distance meter and the measurement center on the equipment, and the difference between the distance measurement value of the two-dimensional distance meter and the path line distance on the equipment. All errors that occur can now be corrected Because, it becomes possible to measure accurately the plate width and meandering.

【0012】[0012]

【実施例】以下、図面を参照して、本発明の実施例を詳
細に説明する。
Embodiments of the present invention will be described below in detail with reference to the drawings.

【0013】図1は、本発明を適用した校正装置の概略
を示す平面図であり、図2はその側面図である。図1に
おいて、10は校正治具を支えるフレーム、12は設備
と本校正装置とを取付けるための、水平調整機構付の治
具、14、16、18は校正板である。
FIG. 1 is a plan view schematically showing a calibration apparatus to which the present invention is applied, and FIG. 2 is a side view thereof. In FIG. 1, reference numeral 10 denotes a frame for supporting a calibration jig, 12 denotes a jig having a horizontal adjustment mechanism for mounting the equipment and the present calibration apparatus, and 14, 16, and 18 denote calibration plates.

【0014】校正板14は、幅方向に取付けられている
全ての2次元距離計(片側)の視野をカバーし、平坦な
測定面を持ち、校正板16、18は高低少なくとも2種
類で、測定面の幅が個々の2次元距離計の視野の中に入
るようになっている。20は校正板16、18をフレー
ム10に取付け、且つ板幅方向にスライドできる機構を
持つ突起部である。
The calibration plate 14 covers the field of view of all two-dimensional rangefinders (one side) attached in the width direction, has a flat measurement surface, and has at least two types of calibration plates 16 and 18 for measuring. The width of the surface is such that it falls within the field of view of the individual two-dimensional rangefinder. Reference numeral 20 denotes a projection having a mechanism for attaching the calibration plates 16 and 18 to the frame 10 and sliding in the width direction of the plate.

【0015】本校正装置の水平レベルは、水準器22と
水平調整機構付の取付治具12により調整される。又、
24は扇状に拡げられた投光ビームである。
The horizontal level of the calibration device is adjusted by a level 22 and a mounting jig 12 having a horizontal adjustment mechanism. or,
Numeral 24 denotes a projection beam spread in a fan shape.

【0016】本校正装置を用いて、以下のように誤差の
測定と補正を行う。
Using the present calibration apparatus, error measurement and correction are performed as follows.

【0017】まず、2次元距離計のカメラの視野の中で
高さ方向に変化する2次元CCDカメラの板幅方向の分
解能の測定については、板幅・蛇行測定装置に対して校
正装置を図3、図4のようにセットする。ここで図3は
正面図であり、図4は側面図である。
First, for the measurement of the resolution in the plate width direction of a two-dimensional CCD camera that changes in the height direction within the field of view of the camera of the two-dimensional rangefinder, a calibration device is used for the plate width and meandering measurement device. 3. Set as shown in FIG. Here, FIG. 3 is a front view, and FIG. 4 is a side view.

【0018】図3に示すように、校正板16を突起部2
0により板幅方向にスライドさせて、個々の2次元距離
計26−1、26−2の視野の中に入るように設定する
と、2枚の校正板の幅実測値Wa 、Wb 、基準高さ位置
からの校正板までの距離測定値(平均値) la 、 lb
2次元CCDカメラの画像で校正板に対応して検出され
るビット数Na 、Nb が測定できる。
As shown in FIG. 3, the calibration plate 16 is
0 The slide in the sheet width direction, when set to fall within the field of view of the individual two-dimensional distance meter 26-1 and 26-2, the width measured value W a of the two calibration plates, W b, the reference distance measurements up calibration plate from the height position (average value) l a, l b,
The number of bits N a and N b detected corresponding to the calibration plate can be measured from the image of the two-dimensional CCD camera.

【0019】次に、高さの異なる校正板18に変えて、
ほぼ同じ位置にスライドさせ、同様にして、校正板の幅
実測値Wa ′、Wb ′、校正板までの距離測定値(平均
値)la ′、 lb ′、校正板に対応して検出されるビッ
ト数Na ′、Nb ′が測定できる。
Next, changing to the calibration plates 18 having different heights,
Slide at substantially the same position, in the same manner, the width measured value W a calibration plate ', W b', the distance measurements up calibration plate (average value) l a ', l b' , corresponding to the calibration plate The number of detected bits Na 'and Nb ' can be measured.

【0020】これらを演算装置に入力して、次式により
以下のパラメータを求める。
These are input to an arithmetic unit, and the following parameters are obtained by the following equation.

【0021】 la 地点での幅分解能 δa =Wa /Na …(1) lb 地点での幅分解能 δb =Wb /Nb …(2) la ′地点での幅分解能 δa ′=Wa ′/Na ′ …(3) lb ′地点での幅分解能 δb ′=Wb ′/Nb ′ …(4) 各2次元距離計の幅分解能の高さ方向の変化率 Ka =(δa −δa ′)/( la − la ′) …(5) Kb =(δb −δb ′)/( lb − lb ′) …(6) 各2次元距離計の幅分解能の定数項 Ba =δa −Ka ・ la ′ …(7) Bb =δb −Kb ・ lb ′ …(8)[0021] l width resolution at a point δ a = W a / N a ... (1) l width resolution at point b δ b = W b / N b ... (2) width resolution at l a 'point [delta] a ′ = W a ′ / N a ′ (3) Width resolution at l b ′ point δ b ′ = W b ′ / N b ′ (4) Height resolution of width resolution of each two-dimensional rangefinder change rate K a = (δ a -δ a ') / (l a - l a') ... (5) K b = (δ b -δ b ') / (l b - l b') ... (6) each constant term of the width resolution of the two-dimensional distance meter B a = δ a -K a · l a '... (7) B b = δ b -K b · l b' ... (8)

【0022】これにより、基準位置からの任意の高さ位
置l における幅分解能は、それぞれKa ・l +Ba 、K
b ・l +Bb で表わされる。このとき、板エッジ位置に
対応するCCDカメラのビット番号をS、CCDカメラ
中心軸に対応するビット番号をSc とすると、CCDカ
メラ中心軸からのエッジ位置ΔXは次式で求めることが
できる。
As a result, the width resolution at an arbitrary height position l from the reference position is K a + l + B a , K
represented by b · l + B b. At this time, the bit number of the CCD camera corresponding to the plate edge position S, the bit number corresponding to the CCD camera center axis and S c, edge position ΔX from the CCD camera center axis can be determined by the following equation.

【0023】 ΔX=(Ka ・l +Ba )・(S−Sc ) …(9)ΔX = (K a · l + B a ) · (S−S c ) (9)

【0024】次に、扇状に拡がった投光ビームの光路に
沿った距離測定値と実際に測定したい鉛直下方方向の距
離との誤差の測定については、板幅・蛇行測定装置に対
して校正装置を図5、図6のようにセットする。ここで
図5は正面図であり、図6は側面図である。図5に示す
ように、校正板14−1は、その架台と共に板幅方向に
対して水平になるようにセットされている。
Next, with respect to the measurement of the error between the distance measurement value along the optical path of the projected beam spread in a fan shape and the distance in the vertical direction to be actually measured, the calibrating device is compared with the plate width / meandering measuring device. Is set as shown in FIGS. Here, FIG. 5 is a front view, and FIG. 6 is a side view. As shown in FIG. 5, the calibration plate 14-1 is set so as to be horizontal to the plate width direction together with the gantry.

【0025】図5に示すように、例えばラインセンタよ
りEaの距離に配置された2次元距離計26−1におい
て、図7に示すようにCCDカメラの設計上の中心軸距
離測定値をLc、視野の両端における距離測定値をL1
n、L1とLnの短い方(図7の例ではL 1 で決定され
る視野幅をWa、2次元距離計26−1の機械的な据付
高さをHaとすると、校正板14−1を測定することに
よりL1とLnの短い方(L 1 を判定し、予め求められ
ている投光光源の拡がり角度αaより視野幅Waが次式に
より求められる。
As shown in FIG. 5, for example, in a two-dimensional distance meter 26-1 arranged at a distance of Ea from the line center, as shown in FIG. c , the distance measurements at both ends of the field of view are L 1 ,
L n, when L 1 and shorter of L n the field width (in the example of FIG. 7 L 1) is determined by W a, 2-dimensional distance meter 26-1 mechanical installation height of the H a, by measuring the calibration plate 14-1 determines L 1 and shorter of L n (L 1), divergence angle alpha a more field width W a of the light projecting light source that is obtained in advance is calculated by the following formula .

【0026】 Wa =2{min (L1 ,Ln )}sin αa …(10)W a = 2 {min (L 1 , L n )} sin α a (10)

【0027】次に、2次元CCDカメラの設計上の中心
軸における距離測定値Lcを用いて図7のΔLを、次式 ΔL=Lc−{min(L1,Ln)}cosαa …(11) によって求めると、2次元距離計26−1の傾きβは、
次式 cosβ=(W a /2)/√{(W a /2) 2 +ΔL 2 で表されるため、2次元距離計26−1の 鉛直下方方向
に下した距離y c は次式で表現できる。
Next, the [Delta] L in FIG. 7 by using the distance measurement value Lc in the central axis design of two-dimensional CCD camera, the following formula ΔL = L c - {min ( L 1, L n)} cosα a ... (11), the slope β of the two-dimensional rangefinder 26-1 is
Since the following equation cosβ = (W a / 2) / {(W a / 2) 2 + ΔL 2 } , the distance y c of the two-dimensional rangefinder 26-1 in the vertically downward direction is given by the following equation. Can be expressed.

【0028】 y c =[(W a /2)/√{(W a /2) 2 +ΔL 2 }]・L c …(12) Y c = [(W a / 2) / {(W a / 2) 2 + ΔL 2 }] · L c (12)

【0029】校正処理の中において、cosβ=(W a
2)/√{(W a /2)2+ΔL2}を求めておくことに
より、距離測定値 i に対して、図7に示したような幾
何学的な位置関係から、次式で傾き補正後の距離y i
することができる。
[0029] Te smell in the calibration process, cosβ = (W a /
By keeping seeking 2) / √ {(W a / 2) 2 + ΔL 2}, for the distance measurement L i, as shown in FIG. 7 several
From what biological positional relationship, a total of the distance y i after the inclination correction by:
Can be calculated .

【0030】 y i [(Wa/2)/√{(Wa/2)2+ΔL2}]・L i −ΔH i (i=1〜n) …(13)但し、図7に示した如く、距離計の中心が右側に傾いて
いて、min(L 1 ,L n )=L 1 の場合
Y i = [(W a / 2) / {(W a / 2) 2 + ΔL 2 }] · L i −ΔH i (i = 1 to n) (13) where shown in FIG. As shown, the center of the rangefinder tilts to the right
Stomach, min (L 1, L n ) = In the case of L 1

【数1】 図7とは逆に、距離計の中心が左側に傾いていて、min
(L 1 ,L n )=L n の場合
(Equation 1) In contrast to FIG. 7, the center of the rangefinder is tilted to the left,
(L 1, L n) In the case of = L n

【数2】 (Equation 2)

【0031】次に、2次元距離計の測定中心と設備上の
測定中心が異なることによって発生する板幅・蛇行測定
誤差の測定については、板幅・蛇行測定装置に対して校
正装置を図8、図9のようにセットする。ここで図8は
正面図、図9は側面図である。このとき、図8に示すよ
うに、それぞれの2次元距離計26−1、26−2の機
械的な取付位置Ea 、Eb と、校正板16の右側又は左
側のエッジ位置を一致させるような状態にしておく。
Next, regarding the measurement of the plate width and meandering measurement error caused by the difference between the measurement center of the two-dimensional distance meter and the measurement center on the equipment, a calibration device is used for the plate width and meander measurement device in FIG. , As shown in FIG. Here, FIG. 8 is a front view, and FIG. 9 is a side view. At this time, as shown in FIG. 8, each of the two-dimensional distance meter 26-1 and 26-2 of the mechanical mounting position E a, and E b, so as to match the right or left edge position of the calibration plate 16 State.

【0032】又、例えばラインセンタからEa の距離に
設置された2次元距離計26−1について、図10に示
すように、予め設計されているカメラ中心のビット番号
をS c 、校正板16の2次元距離計中心軸に相当するエ
ッジ位置のCCDカメラビット番号をSa 、2次元距離
計で測定されたエッジ位置に対応する距離を la 、距離
測定の基準位置をH0 とすると、校正板のエッジ位置と
CCDカメラ中心との間隔ΔWasは次式によって得られ
る。
Also, for example, from the line center to EaIn the distance
The two-dimensional distance meter 26-1 installed is shown in FIG.
The camera-designated bit number
S cCorresponding to the center axis of the two-dimensional distance meter of the calibration plate 16
The CCD camera bit number at the cartridge position to Sa, Two-dimensional distance
L is the distance corresponding to the edge position measured by thea,distance
Set the measurement reference position to H0Then, the edge position of the calibration plate
Distance from CCD camera center ΔWasIs given by
You.

【0033】 ΔWas=(Ka ・ la +Ba )・(Sa −Sc ) …(14) 従って、この2次元距離計の板幅方向の傾きθa は、次
式によって求めることができ、 θa =tan -1{ΔWas/(H0 + la )} …(15) 基準位置からの任意の距離l に対して次式 ΔWa ={ΔWas/(H0 + la )}・l +(ΔWas− la ・tan θa ) …(16) により、2次元CCDカメラ中心軸と2次元距離計の設
備上の測定中心とのずれ量を測定し、補正することがで
きる。式(16)において、 la 、Sa を測定し、
0 、Sc を予め入力しておけば、演算装置で自動的に
ΔWa を求めることができる。
ΔW as = (K a · L a + B a ) · (S a −S c ) (14) Accordingly, the inclination θ a of the two-dimensional distance meter in the plate width direction can be obtained by the following equation. can, θ a = tan -1 {ΔW as / (H 0 + l a)} ... (15) the following equation [Delta] W for any distance l from the reference position a = {ΔW as / (H 0 + l a )} · l + (ΔW as - l by a · tan θ a) ... ( 16), that the amount of deviation between the measured center of the two-dimensional CCD camera center axis and a two-dimensional distance meter equipment measured, corrected Can be. In equation (16), l a and S a are measured,
If H 0 and S c are input in advance, the arithmetic unit can automatically determine ΔW a .

【0034】なお、外側の2次元距離計についても全く
同様にして、次の補正式 ΔWb ={ΔWbs/(H0 + lb )}・l +(ΔWbs− lb ・tan θb ) …(17) が得られる。
[0034] Incidentally, in exactly the same for the outside of the two-dimensional distance meter, the following correction formula ΔW b = {ΔW bs / ( H 0 + l b)} · l + (ΔW bs - l b · tan θ b ) (17) is obtained.

【0035】次に、2次元距離計の距離測定値と設備上
のパスライン距離が異なることによって生じる誤差の補
正については、板幅・蛇行測定装置に対して、校正装置
を図11、図12のようにセットする。ここで図11は
正面図で、図12は側面図であり、それぞれ校正板14
−1までの距離を測定した後、次の校正板14−2を重
ねて距離を測定していることを示した図である。
Next, in order to correct the error caused by the difference between the distance measurement value of the two-dimensional distance meter and the path line distance on the equipment, a calibration device is used for the plate width and meandering measurement device, as shown in FIGS. Set as follows. 11 is a front view and FIG. 12 is a side view.
FIG. 9 is a diagram showing that the distance is measured by superimposing the next calibration plate 14-2 after measuring the distance to −1.

【0036】例えば、校正板14−1から校正板14−
n に対して、2次元距離計の中心軸に対応する距離測定
値Lc-1 、Lc-2 、・・・Lc-n 、及び校正板表面まで
の設備上の距離(校正値)H-1、H-2、・・・、H-n
ら、(H-1,Lc-1 )、(H -2,Lc-2 )、・・・、
(H-n,Lc-n )の組合せで、多項式近似を行う処理を
各2次元距離計に導入すれば、同一パスライン上におけ
る各2次元距離計の距離測定値を合わせ込むことが可能
になる。
For example, the calibration plates 14-1 to 14-
Distance measurement corresponding to the central axis of the 2D rangefinder for n
Value Lc-1, Lc-2, ... LcnTo the calibration plate surface
(Calibration value) H on the equipment-1, H-2, ..., H-nOr
(H-1, Lc-1), (H -2, Lc-2), ...,
(H-n, Lcn), The process of performing polynomial approximation
If introduced into each two-dimensional rangefinder, it can be placed on the same path line
It is possible to match the distance measurement values of each two-dimensional rangefinder
become.

【0037】以上今まで述べた式を用いることにより、
板幅を正確に計算することができる。即ち、板エッジ位
置の高さをl、その板エッジ位置に対応するビット番号
をS、前記多項式近似を行う処理で求められる多項式を
f(L)とすると、次式 ΔXa=(Ka・l+Ba)・(S−Sc)+ΔWa+Ea …(18) l=f(L)−H0 …(19) L=[(Wa/2)/√{(Wa/2)2+ΔL2}]・Li−ΔHi …(20) により、片側のエッジ位置を正確に求めることができ
る。
By using the equations described above,
The board width can be calculated accurately. That is, the height of the plate edge position is 1, the bit number corresponding to the plate edge position is S, and the polynomial obtained by the process of performing the polynomial approximation is
Assuming f (L), the following equation: ΔXa = (Ka · l + Ba) · (S−Sc) + ΔWa + Ea (18) l = f (L) −H0 (19) L = [(Wa / 2) / √ { (Wa / 2) 2 + ΔL2}] · Li− ΔHi (20), the edge position on one side can be accurately obtained.

【0038】同様にして、ラインセンタに対し反対側の
エッジ位置ΔXb も求まり、ΔXa+ΔXb で板幅が求
まり、(ΔXa −ΔXb )/2で蛇行量を計算すること
ができる。
Similarly, the edge position ΔX b on the opposite side to the line center is determined, the plate width is determined by ΔX a + ΔX b , and the meandering amount can be calculated by (ΔX a −ΔX b ) / 2.

【0039】又、図13は、本校正装置を用いて、2次
元距離計から成る板幅計を校正した後、板幅測定を行
い、下流側に設置されている板幅計と測定結果を比較し
た結果を示す。図13に示されているように、本発明を
適用することにより、高精度で板幅測定できることが確
認できた。
FIG. 13 shows that the present calibrator is used to calibrate a width meter composed of a two-dimensional distance meter, then the width is measured, and the measurement result is compared with the width meter installed on the downstream side. The result of the comparison is shown. As shown in FIG. 13, it was confirmed that by applying the present invention, it was possible to measure the board width with high accuracy.

【0040】[0040]

【発明の効果】以上説明した通り、本発明によれば、2
次元距離計を板幅方向に複数台配置した板幅・蛇行測定
装置のライン内据付によって発生する4つの誤差を1個
の校正装置で測定でき、且つ必要な情報を板幅・蛇行演
算装置に入力するだけで自動的に誤差を補正できるの
で、定期的な精度検査、2次元距離計補修後の精度調整
等の保守作業・立上作業が短時間でできるようになっ
た。
As described above, according to the present invention, 2
A single calibration device can be used to measure four errors generated due to the in-line installation of a plate width and meandering measuring device in which a plurality of three-dimensional distance meters are arranged in the plate width direction, and the necessary information is provided to the plate width and meandering calculation device. Since errors can be automatically corrected simply by inputting, maintenance work and start-up work such as periodic accuracy inspection and accuracy adjustment after repairing the two-dimensional distance meter can be performed in a short time.

【0041】又、この校正装置は、演算装置の中で必要
なパラメータを計算するようにしていること、及び校正
装置の構造が簡単であるので、設備の保守作業時の精度
管理も容易にできるという効果を有する。
Further, since the calibration device calculates the necessary parameters in the arithmetic unit and has a simple structure of the calibration device, accuracy control during maintenance work of the equipment can be easily performed. It has the effect of.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明を適用した校正装置の概略を示す正面図FIG. 1 is a front view schematically showing a calibration apparatus to which the present invention is applied.

【図2】同、側面図FIG. 2 is a side view of the same.

【図3】2次元距離計の高さ方向に変化する板幅方向の
分解能を校正するときの校正装置のセット方法を示す正
面図
FIG. 3 is a front view showing a setting method of a calibration device when calibrating a resolution in a plate width direction that changes in a height direction of the two-dimensional rangefinder.

【図4】同、側面図FIG. 4 is a side view of the same.

【図5】扇状に拡がった投光ビームの光路に沿った距離
測定値を鉛直下方の距離に校正するときの校正装置のセ
ット方法を示す正面図
FIG. 5 is a front view showing a method of setting a calibration device when calibrating a distance measurement value along an optical path of a projection beam spread in a fan shape to a vertically downward distance.

【図6】同、側面図FIG. 6 is a side view of the same.

【図7】ラインセンタからEa の位置における2次元距
離計の校正方法の詳細を示す正面図
Figure 7 is a front view showing the details of the calibration method of the two-dimensional distance meter from the line center at the position of E a

【図8】2次元距離計の測定中心と設備上の測定中心と
の誤差を校正するための校正装置のセット方法を示す正
面図
FIG. 8 is a front view showing a method of setting a calibration device for calibrating an error between a measurement center of a two-dimensional distance meter and a measurement center on equipment.

【図9】同、側面図FIG. 9 is a side view of the same.

【図10】ラインセンタからEa の位置における2次元
距離計の校正方法の詳細を示す正面図
Figure 10 is a front view showing the details of the calibration method of the two-dimensional distance meter from the line center at the position of E a

【図11】2次元距離計の距離測定値と設備上のパスラ
イン距離との誤差を校正するための校正装置のセット方
法を示す正面図
FIG. 11 is a front view showing a method of setting a calibration device for calibrating an error between a distance measurement value of a two-dimensional distance meter and a path line distance on equipment.

【図12】同、側面図FIG. 12 is a side view of the same.

【図13】本校正装置を用いて校正した2次元距離計を
使った板幅計の測定結果を示す線図
FIG. 13 is a diagram showing a measurement result of a width meter using a two-dimensional distance meter calibrated using the present calibration device.

【符号の説明】[Explanation of symbols]

10…校正治具を支えるフレーム 12…校正装置取付治具 14(14−1〜4)…平坦な測定面を持つ校正板 16、18…1つの2次元距離計の視野に入る幅の校正
板 20…スライド機構を持つ突起部 22…水準器 24…扇状の投光ビーム 26(26−1、2)…2次元距離計
Reference Signs List 10: Frame for supporting calibration jig 12: Calibration device mounting jig 14 (14-1 to 4): Calibration plate with flat measuring surface 16, 18, Calibration plate with width that fits into the field of view of one two-dimensional rangefinder Reference numeral 20: a protrusion having a slide mechanism 22: a level 24: a fan-shaped light emitting beam 26 (26-1, 2): a two-dimensional distance meter

───────────────────────────────────────────────────── フロントページの続き (72)発明者 伊藤 雅彦 兵庫県神戸市中央区明石町32番地 三波 工業株式会社内 (56)参考文献 特開 平4−270909(JP,A) 特開 平6−117823(JP,A) 特表 昭61−501339(JP,A) (58)調査した分野(Int.Cl.7,DB名) G01B 11/24 G01B 11/02 G01B 21/06 ────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Masahiko Ito 32, Akashi-cho, Chuo-ku, Kobe City, Hyogo Prefecture Inside of Mamba Industry Co., Ltd. (56) References JP-A-4-270909 (JP, A) JP-A-6- 117823 (JP, A) Special table 61-501339 (JP, A) (58) Fields investigated (Int. Cl. 7 , DB name) G01B 11/24 G01B 11/02 G01B 21/06

Claims (1)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】板材が通板されるようなラインで、2次元
距離計を板幅方向に複数台並べて配置した板幅・蛇行測
定装置の校正装置において、 少なくともラインセンタの片側に設置されている全ての
2次元距離計の視野をカバーする、平坦な面で構成され
る校正板と、 個々の2次元距離計の視野の中に入る幅で、少なくとも
2種の高さを持つ校正板と、 該少なくとも2種の高さを持つ校正板を板幅方向にスラ
イドできる機構を備えることによって、 個々の2次元距離計が据付れたときの板幅方向の傾きに
よって発生する板幅・蛇行量の測定誤差、 及び、2次元距離計の距離測定値と設備上の取付誤差に
よって発生する、パスライン測定誤差、 及び、2次元距離計の扇状に拡がった投光ビームの光路
に沿った距離測定値と、2次元距離計で測定したい高さ
方向の距離との誤差、 及び、2次元距離計のカメラの視野の中で高さ方向に変
化する板幅方向の2次元画像走査型カメラ1ビット当り
の分解能によって生じる誤差を、全て補正して板幅・蛇
行量測定が正しく行えるようにすることを特徴とする、
2次元距離計を用いた板幅・蛇行測定装置の校正装置。
1. A calibrating device for a sheet width and meandering measuring device in which a plurality of two-dimensional distance meters are arranged in a line in a plate width direction on a line through which a plate material is passed, wherein the calibrating device is installed at least on one side of a line center. A calibration plate consisting of a flat surface that covers the field of view of all existing 2D rangefinders, and a calibration plate with at least two heights that are within the field of view of each 2D rangefinder. By providing a mechanism capable of sliding the calibration plate having at least two kinds of heights in the plate width direction, the plate width and meandering amount generated by the inclination in the plate width direction when each two-dimensional distance meter is installed. Measurement error, and path line measurement error caused by the distance measurement value of the two-dimensional distance meter and the installation error on the equipment, and the distance measurement along the optical path of the projected beam spread in a fan shape of the two-dimensional distance meter Value and two-dimensional distance meter The error with the desired distance in the height direction and the error caused by the resolution per bit of the two-dimensional image scanning camera in the board width direction that changes in the height direction in the field of view of the camera of the two-dimensional rangefinder are all It is characterized by making correction so that the width and meandering amount can be measured correctly.
Calibration device for plate width and meandering measurement device using two-dimensional distance meter.
JP05446393A 1993-03-16 1993-03-16 Calibration device for plate width and meandering measurement device using two-dimensional distance meter Expired - Fee Related JP3268585B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP05446393A JP3268585B2 (en) 1993-03-16 1993-03-16 Calibration device for plate width and meandering measurement device using two-dimensional distance meter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP05446393A JP3268585B2 (en) 1993-03-16 1993-03-16 Calibration device for plate width and meandering measurement device using two-dimensional distance meter

Publications (2)

Publication Number Publication Date
JPH06265326A JPH06265326A (en) 1994-09-20
JP3268585B2 true JP3268585B2 (en) 2002-03-25

Family

ID=12971371

Family Applications (1)

Application Number Title Priority Date Filing Date
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Country Link
JP (1) JP3268585B2 (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4434762B2 (en) * 2003-01-31 2010-03-17 東京応化工業株式会社 Resist composition
CN102213581B (en) * 2010-04-08 2016-06-08 财团法人工业技术研究院 object measuring method and system

Also Published As

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JPH06265326A (en) 1994-09-20

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