JP3266484B2 - Dielectric porcelain composition - Google Patents
Dielectric porcelain compositionInfo
- Publication number
- JP3266484B2 JP3266484B2 JP31254095A JP31254095A JP3266484B2 JP 3266484 B2 JP3266484 B2 JP 3266484B2 JP 31254095 A JP31254095 A JP 31254095A JP 31254095 A JP31254095 A JP 31254095A JP 3266484 B2 JP3266484 B2 JP 3266484B2
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- Prior art keywords
- weight
- resonance frequency
- dielectric
- value
- temperature coefficient
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000000203 mixture Substances 0.000 title claims description 28
- 229910052573 porcelain Inorganic materials 0.000 title claims description 18
- 229910052751 metal Inorganic materials 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 3
- 239000013078 crystal Substances 0.000 description 20
- 239000011701 zinc Substances 0.000 description 17
- 239000000919 ceramic Substances 0.000 description 11
- 238000005452 bending Methods 0.000 description 10
- 229910052725 zinc Inorganic materials 0.000 description 9
- 229910052715 tantalum Inorganic materials 0.000 description 7
- 239000000463 material Substances 0.000 description 6
- 229910010413 TiO 2 Inorganic materials 0.000 description 4
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 4
- 239000000843 powder Substances 0.000 description 4
- 238000005259 measurement Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000006104 solid solution Substances 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 238000010304 firing Methods 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 description 1
- 229910002651 NO3 Inorganic materials 0.000 description 1
- NHNBFGGVMKEFGY-UHFFFAOYSA-N Nitrate Chemical compound [O-][N+]([O-])=O NHNBFGGVMKEFGY-UHFFFAOYSA-N 0.000 description 1
- -1 SrCO 3 Inorganic materials 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000001354 calcination Methods 0.000 description 1
- 239000003985 ceramic capacitor Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000007606 doctor blade method Methods 0.000 description 1
- 238000004453 electron probe microanalysis Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 description 1
- 239000011812 mixed powder Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 230000001376 precipitating effect Effects 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Inorganic Insulating Materials (AREA)
- Control Of Motors That Do Not Use Commutators (AREA)
- Compositions Of Oxide Ceramics (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
- Ceramic Capacitors (AREA)
Description
【0001】[0001]
【発明の属する技術分野】本発明は、マイクロ波,ミリ
波等の高周波領域において、高いQ値を有する誘電体磁
器組成物に関するものであり、例えば、マイクロ波やミ
リ波などの高周波領域において使用される種々の共振器
用材料やMIC用誘電体基板材料、誘電体導波路用材料
や積層型セラミックコンデンサ等に用いることができる
誘電体磁器組成物に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a dielectric ceramic composition having a high Q value in a high frequency range such as a microwave and a millimeter wave, and is used in a high frequency range such as a microwave and a millimeter wave. The present invention relates to a dielectric ceramic composition that can be used for various resonator materials, MIC dielectric substrate materials, dielectric waveguide materials, and multilayer ceramic capacitors.
【0002】[0002]
【従来技術】従来、誘電体磁器は、マイクロ波やミリ波
等の高周波領域において、誘電体共振器、MIC用誘電
体基板や導波路等に広く利用されている。2. Description of the Related Art Hitherto, dielectric ceramics have been widely used in dielectric resonators, MIC dielectric substrates, waveguides, and the like in high-frequency regions such as microwaves and millimeter waves.
【0003】従来より、この種の誘電体磁器としては、
例えば、特開昭57−69607号公報に開示されるよ
うなものが知られている。この公報に開示される誘電体
磁器は、BaO−xTiO2 において3.9≦x≦4.
1の組成物100重量部に対して、1〜26重量部のZ
nOを添加してなるものである。[0003] Conventionally, as this kind of dielectric porcelain,
For example, one disclosed in JP-A-57-69607 is known. The dielectric porcelain disclosed in this publication is 3.9 ≦ x ≦ 4.0 in BaO-xTiO 2 .
1 to 26 parts by weight of Z based on 100 parts by weight of the composition
It is obtained by adding nO.
【0004】このような誘電体磁器では、比誘電率が3
0〜40で、測定周波数f=3.5〔GHz〕における
Q値が4500程度(Qf=15750〔GHz〕)で
あり、さらに共振周波数の温度係数τfを−25〜+2
5〔ppm/℃〕の範囲で制御することができる。In such a dielectric porcelain, the relative dielectric constant is 3
0 to 40, the Q value at the measurement frequency f = 3.5 [GHz] is about 4500 (Qf = 15750 [GHz]), and the temperature coefficient τf of the resonance frequency is −25 to +2.
It can be controlled in the range of 5 [ppm / ° C.].
【0005】しかしながら、この上記特開昭57−69
607号公報に開示される誘電体磁器ではQf値が15
750〔GHz〕程度であり、未だ低く、また、共振周
波数の温度係数τfの曲がり、即ち、温度ドリフトの直
線性が低いという問題があった。However, the method disclosed in Japanese Patent Application Laid-Open No. 57-69
No. 607 discloses a dielectric porcelain having a Qf value of 15
750 [GHz], which is still low, and there is a problem that the temperature coefficient τf of the resonance frequency is bent, that is, the linearity of the temperature drift is low.
【0006】このような問題を解決したものとして、特
開昭61−10806号公報に開示されるものが知られ
ている。この公報に開示される誘電体磁器組成物は、一
般式BaTi4 O9 で表される組成物100重量部に対
して、約1〜25重量部のZnOと、約1.5〜6重量
部のTa2 O5 とを添加、混合してなるもので、特性と
しては、温度ドリフト特性を表すΔfrを零付近に制御
することができるとともに、測定周波数13GHzにお
いてΔfrが零付近の誘電損失tanδを3.65〜
3.86×10-4(Qf値33700〜36000)と
することができる。As a solution to such a problem, one disclosed in Japanese Patent Application Laid-Open No. S61-10806 is known. The dielectric ceramic composition disclosed in this publication, with respect to the general formula BaTi 4 100 parts by weight of the composition represented by O 9, and ZnO of about 1 to 25 parts by weight, from about 1.5 to 6 parts by weight Of Ta 2 O 5 is added and mixed. As a characteristic, Δfr representing a temperature drift characteristic can be controlled to be close to zero, and a dielectric loss tan δ where Δfr is near zero at a measurement frequency of 13 GHz. 3.65-
3.86 × 10 −4 (Qf value: 33700-36000).
【0007】[0007]
【発明が解決しようとする課題】しかしながら、上記特
開昭61−10806号公報に開示される誘電体磁器で
は、温度ドリフト特性が零付近でのQf値は33700
〜36000であり、ますます使用周波数が高周波とな
り、しかも温度変化に対しても高精度の制御が必要にな
っている近年においては、温度ドリフト特性が零付近で
のQf値が未だ低いという問題があった。However, in the dielectric porcelain disclosed in the above-mentioned Japanese Patent Application Laid-Open No. 61-10806, the Qf value is 33700 when the temperature drift characteristic is near zero.
In recent years, the operating frequency has become increasingly high and the temperature change has to be controlled with high accuracy. In recent years, the problem that the Qf value near the temperature drift characteristic of zero is still low. there were.
【0008】[0008]
【課題を解決するための手段】本発明者等は、上記問題
点を解決すべく、鋭意検討した結果、Ba−Ti系誘電
体磁器組成物において、Baの一部をSrで置換すると
ともに、ZnおよびTaを所定量添加含有することによ
り、比誘電率が30〜40で、Qfが40000〔GH
z〕以上であり、共振周波数の温度係数τfを−15〜
+15〔ppm/℃〕の範囲で、かつ、共振周波数の温
度係数τfの曲がり(温度ドリフト)を−2〜+2〔p
pm/℃〕の範囲(−40〜85℃)で制御することが
でき、しかも温度ドリフト特性を表すΔτfが零付近の
Qf値を40 000以上の高Qf値とすることができる
ことを見い出し、本発明に至ったのである。Means for Solving the Problems The present inventors have conducted intensive studies to solve the above problems, and as a result, in the Ba-Ti based dielectric porcelain composition, a part of Ba has been replaced with Sr. By adding and containing Zn and Ta in predetermined amounts, the relative dielectric constant is 30 to 40 and Qf is 40000 [GH
z] or more, and the temperature coefficient τf of the resonance frequency is
+15 [ppm / ° C.] and the bending (temperature drift) of the temperature coefficient τf of the resonance frequency is −2 to +2 [p
pm / .degree. C.] (-40 to 85.degree. C.), and it has been found that a Qf value near .DELTA..tau. representing the temperature drift characteristic can be made a high Qf value of 40000 or more. This led to the invention.
【0009】即ち、本発明の誘電体磁器組成物は、金属
元素として少なくともBa,Ti,Srを含有し、これ
らのモル比による組成式を、(Ba1-a Sra )O−4
TiO2 と表した時、前記aが0.01≦a≦0.08
を満足する主成分100重量部に対して、ZnをZnO
換算で4〜18重量部、TaをTa2 O5 換算で3〜5
重量部添加含有するものである。[0009] That is, the dielectric ceramic composition of the present invention, at least Ba as the metal element, Ti, contains Sr, the composition formula of these molar ratios, (Ba 1-a Sr a ) O-4
When expressed as TiO 2 , a is 0.01 ≦ a ≦ 0.08
With respect to 100 parts by weight of the main component satisfying
4 to 18 parts by weight in terms of Ta, 3 to 5 in terms of Ta 2 O 5
It is contained by weight.
【0010】[0010]
【作用】本発明の誘電体磁器組成物では、組成式(Ba
1-a Sra )O−4TiO2 で表されるBa−Ti系誘
電体磁器組成物において、Baの一部を所定量のSrで
置換するとともに、ZnおよびTaを所定量添加含有す
ることにより、比誘電率が30〜40で、Qfが400
00〔GHz〕以上であり、−40〜85℃の温度範囲
で共振周波数の温度係数τfを−15〜+15〔ppm
/℃〕の範囲で、かつ、共振周波数の温度係数τfの曲
がり(温度ドリフト)を−2〜+2〔ppm/℃〕の範
囲に制御することが可能となり、しかも温度ドリフト特
性を表すΔτfが零付近のQf値を40000以上とす
ることが可能となる。According to the dielectric ceramic composition of the present invention, the composition formula (Ba)
In 1-a Sr a) O- 4TiO Ba-Ti based dielectric ceramic composition represented by 2, while replacing part of Ba with a predetermined amount of Sr, by a predetermined amount is added containing Zn and Ta Has a relative dielectric constant of 30 to 40 and a Qf of 400
00 [GHz] or more, and the temperature coefficient τf of the resonance frequency in the temperature range of −40 to 85 ° C. is −15 to +15 [ppm
/ ° C] and the bend (temperature drift) of the temperature coefficient τf of the resonance frequency can be controlled within the range of -2 to +2 [ppm / ° C], and Δτf representing the temperature drift characteristic is zero. The Qf value in the vicinity can be set to 40,000 or more.
【0011】即ち、本発明においては、主成分にTaを
添加することによってもある程度Qf値を向上すること
ができるが、さらに、Baの一部をSrで置換すること
により、Qf値を40000以上と大幅に向上すること
ができる。また、SrとBaのイオン半径が異なるた
め、Baの一部をSrで置換することにより格子歪みが
発生し、その結果、磁器の強度を向上することができ
る。That is, in the present invention, although the Qf value can be improved to some extent by adding Ta to the main component, the Qf value can be increased to 40,000 or more by replacing a part of Ba with Sr. And can be greatly improved. Further, since the ionic radius of Sr is different from that of Ba, lattice distortion occurs by replacing a part of Ba with Sr, and as a result, the strength of the porcelain can be improved.
【0012】さらに、主成分にTaを添加することによ
り、共振周波数の温度係数τfの曲がり(温度ドリフ
ト)を−2〜+2〔ppm/℃〕の範囲で制御すること
ができ、温度ドリフトの直線性を向上することができ
る。Further, by adding Ta to the main component, the bending (temperature drift) of the temperature coefficient τf of the resonance frequency can be controlled in the range of -2 to +2 [ppm / ° C.] Performance can be improved.
【0013】また、主成分にZnを添加することによっ
てもある程度Qf値を向上することができ、しかも共振
周波数の温度係数τfをプラスからマイナス側に移行さ
せることができる。The addition of Zn to the main component can also improve the Qf value to some extent, and can shift the temperature coefficient τf of the resonance frequency from plus to minus.
【0014】[0014]
【発明の実施の形態】本発明の誘電体磁器組成物は、B
a−Ti系誘電体磁器組成物において、Baの一部をS
rで置換するとともに、ZnおよびTaを所定量添加含
有するものである。モル比による組成式を、(Ba1-a
Sra )O−4TiO2 と表した時、aが0.01≦a
≦0.08の範囲内としたのは、Baの一部をSrで置
換することにより、Qf値を大幅に向上することができ
るとともに磁器強度を向上することができるからであ
り、BaのSrによる置換量aが0.01より小さい場
合には、Qf値向上の効果が小さく、また、磁器の機械
的強度向上の効果が小さいからである。一方、aが0.
08よりも大きくなるとSrの固溶限界量を超え、Sr
を含む結晶相が析出し、Qf値が低下するからである。
BaのSrによる置換量aは、高いQf値と機械強度の
向上という観点から0.03〜0.05であることが望
ましい。BEST MODE FOR CARRYING OUT THE INVENTION The dielectric porcelain composition of the present invention comprises B
In the a-Ti dielectric ceramic composition, a part of Ba is replaced with S.
In addition to replacing with r, Zn and Ta are added and contained in predetermined amounts. The composition formula based on the molar ratio is represented by (Ba 1-a
When represented as Sr a ) O-4TiO 2 , a is 0.01 ≦ a
The reason for setting the value within the range of ≦ 0.08 is that by replacing a part of Ba with Sr, the Qf value can be greatly improved and the porcelain strength can be improved. Is smaller than 0.01, the effect of improving the Qf value is small, and the effect of improving the mechanical strength of the porcelain is small. On the other hand, when a is 0.
If it exceeds 0.8, the solid solution limit of Sr is exceeded, and Sr
This is because a crystal phase containing is precipitated and the Qf value decreases.
The replacement amount a of Ba with Sr is desirably 0.03 to 0.05 from the viewpoint of high Qf value and improvement of mechanical strength.
【0015】さらに、主成分100重量部に対して亜鉛
をZnO換算で4重量部以上18重量部以下添加含有さ
せたのは、亜鉛が4重量部よりも小さい場合には共振周
波数の温度係数τfが+15〔ppm/℃〕よりも大き
くなるからであり、18重量部よりも多い場合には共振
周波数の温度係数τfが−15〔ppm/℃〕よりも小
さくなり、実用的でないからである。亜鉛の含有量は、
共振周波数の温度係数τfをより0に近くするという観
点から主成分100重量部に対して8.7〜13.9重
量部添加含有することが望ましい。Further, zinc is added and contained in an amount of 4 to 18 parts by weight in terms of ZnO with respect to 100 parts by weight of the main component, because the zinc has a temperature coefficient of resonance frequency τf of less than 4 parts by weight. Is more than +15 [ppm / ° C.], and if it is more than 18 parts by weight, the temperature coefficient τf of the resonance frequency becomes smaller than −15 [ppm / ° C.], which is not practical. The zinc content is
From the viewpoint of making the temperature coefficient τf of the resonance frequency closer to 0, it is desirable to add 8.7 to 13.9 parts by weight to 100 parts by weight of the main component.
【0016】また、主成分100重量部に対してTaを
Ta2 O5 換算で3重量部以上5重量部以下添加含有さ
せたのは、TaがTa2 O5 換算で3重量部よりも少な
い場合や5重量部よりも多い場合には、共振周波数の温
度係数τfの曲がりが2〔ppm/℃〕よりも大きくな
り、実用的でないからである。温度係数τfの曲がりを
0付近にするという観点から、TaはTa2 O5 換算で
主成分100重量部に対して3.5〜4.5重量部添加
含有することが望ましい。The reason that Ta is added and contained in an amount of 3 to 5 parts by weight in terms of Ta 2 O 5 with respect to 100 parts by weight of the main component is that Ta is less than 3 parts by weight in terms of Ta 2 O 5. If the amount is more than 5 parts by weight, the bending of the temperature coefficient τf of the resonance frequency becomes larger than 2 [ppm / ° C.], which is not practical. From the viewpoint of making the bend of the temperature coefficient τf close to 0, it is desirable to add 3.5 to 4.5 parts by weight of Ta to 100 parts by weight of the main component in terms of Ta 2 O 5 .
【0017】さらに、本発明では(Ba1-a Sra )と
TiO2 の比を1:4としたが、(Ba1-a Sra )と
TiO2 との比が1:3.9〜1:4.1程度であれば
優れた特性を有するため、本発明に含まれる。Furthermore, in the present invention the (Ba 1-a Sr a) the ratio of TiO 2 1: was a 4, the ratio of TiO 2 and (Ba 1-a Sr a) 1: 3.9~ A ratio of about 1: 4.1 has excellent characteristics and is included in the present invention.
【0018】本発明の誘電体磁器組成物は、上記組成式
において、0.03≦a≦0.05であり、主成分10
0重量部に対して、亜鉛をZnO換算で8.7〜13.
9重量部、TaをTa2 O5 換算で3.5〜4.5重量
部添加含有させることが望ましい。この場合には、Qf
値が42000〔GHz〕以上、共振周波数の温度係数
τfが−4〜+6〔ppm/℃〕の範囲、共振周波数の
温度係数τfの曲がり(温度ドリフト)を−1.1〜+
0.5〔ppm/℃〕の範囲内に制御することができ、
共振周波数の温度係数τfの曲がり、即ち温度ドリフト
特性を表すΔτfが零付近のQf値を44000以上と
することができる。In the dielectric ceramic composition of the present invention, in the above composition formula, 0.03 ≦ a ≦ 0.05, and the main component 10
With respect to 0 parts by weight, zinc is converted to 8.7 to 13.
9 parts by weight, Ta and Ta 2 O 5 converted at 3.5 to 4.5 parts by weight additive be incorporated is desired. In this case, Qf
The value is 42000 [GHz] or more, the temperature coefficient τf of the resonance frequency is in the range of −4 to +6 [ppm / ° C.], and the bending (temperature drift) of the temperature coefficient τf of the resonance frequency is -1.1 to +
0.5 [ppm / ° C.]
The bending of the temperature coefficient τf of the resonance frequency, that is, the Qf value at which Δτf representing the temperature drift characteristic is close to zero can be 44000 or more.
【0019】また、本発明の誘電体磁器組成物には、B
aTi4 O9 結晶相が主結晶相として存在し、磁器中に
Ba3 Ti12Zn7 O34結晶相,Ba2 Ti9 O20結晶
相およびBa2 Ti9 O20結晶相が均一に分散するもの
である。その他の結晶が少々析出していても良い。そし
て、BaTi4 O9 結晶相、Ba3 Ti12Zn7 O34結
晶相およびBa2 Ti9 O20結晶相を、X線マイクロア
ナライザ(EPMA)で分析した結果、Srが固溶して
いることを確認した。このSrは、BaTi4O9 ,B
a3 Ti12Zn7 O34およびBa2 Ti9 O20の結晶相
のBaの一部と置換されている。本発明ではBa3 Ti
12Zn7 O34結晶相を析出させることにより、Qf値を
向上するとともに、温度係数τfをプラス側からマイナ
ス側に制御することができる。また、Ba2 Ti9 O20
結晶相を析出させることにより、共振周波数の温度係数
τfの曲がり、即ち温度ドリフト特性を表すΔτfを零
とすることが可能となる。The dielectric porcelain composition of the present invention contains B
The aTi 4 O 9 crystal phase exists as the main crystal phase, and the Ba 3 Ti 12 Zn 7 O 34 crystal phase, the Ba 2 Ti 9 O 20 crystal phase, and the Ba 2 Ti 9 O 20 crystal phase are uniformly dispersed in the porcelain. Things. Other crystals may be slightly precipitated. When the BaTi 4 O 9 crystal phase, the Ba 3 Ti 12 Zn 7 O 34 crystal phase, and the Ba 2 Ti 9 O 20 crystal phase were analyzed by an X-ray microanalyzer (EPMA), it was found that Sr was in solid solution. It was confirmed. This Sr is composed of BaTi 4 O 9 , B
a 3 Ti 12 Zn 7 O 34 and a part of Ba in the crystal phase of Ba 2 Ti 9 O 20 . In the present invention, Ba 3 Ti
By precipitating the 12 Zn 7 O 34 crystal phase, the Qf value can be improved and the temperature coefficient τf can be controlled from the plus side to the minus side. In addition, Ba 2 Ti 9 O 20
The precipitation of the crystal phase makes it possible to make the temperature coefficient τf of the resonance frequency bend, that is, Δτf representing the temperature drift characteristic, to zero.
【0020】本発明の誘電体磁器組成物は、原料粉末と
して、BaCO3 ,TiO2 ,SrCO3 ,ZnO,T
a2 O5 粉末を準備し、これらを上記した組成比となる
ように秤量し、ZrO2 ボールにより粉砕混合し、この
混合粉末を仮焼した後、再度ZrO2 ボールにより粉砕
混合し、この仮焼粉末をプレス成形やドクタ−ブレ−ド
法等の公知の方法により所定形状に成形し、大気中また
は酸素雰囲気中において1200〜1300℃で2〜1
0時間焼成することにより得られる。原料粉末は、焼成
により酸化物を生成する水酸化物、炭酸塩、硝酸塩等の
金属塩を用いても良い。本発明の誘電体磁器中には、不
可避不純物として、Al,Si,Ca,Mg,Fe,H
f,Sn等が含まれることもある。The dielectric porcelain composition of the present invention comprises BaCO 3 , TiO 2 , SrCO 3 , ZnO, T
a 2 O 5 powders were prepared, weighed so as to have the above-mentioned composition ratio, pulverized and mixed with ZrO 2 balls, calcined the mixed powders, and pulverized and mixed again with ZrO 2 balls, The calcined powder is formed into a predetermined shape by a known method such as press molding or a doctor blade method, and is heated at 1200 to 1300 ° C. for 2 to 1 in the air or oxygen atmosphere.
It is obtained by firing for 0 hours. As the raw material powder, a metal salt such as a hydroxide, a carbonate, or a nitrate that generates an oxide by firing may be used. In the dielectric porcelain of the present invention, Al, Si, Ca, Mg, Fe, H
f, Sn, etc. may be included.
【0021】本発明の誘電体磁器組成物では、BaTi
4 O9 結晶相中にBa3 Ti12Zn7 O34結晶相および
Ba2 Ti9 O20結晶相を均一に分散させ、BaTi4
O9結晶相,Ba3 Ti12Zn7 O34結晶相およびBa
2 Ti9 O20結晶相にSrを固溶させるためには、特に
1050〜1150℃の温度で6時間以上仮焼すること
が必要である。その理由は、1050℃よりも低温で6
時間未満の仮焼では、Ba3 Ti12Zn7 O34結晶相が
形成され難いからである。In the dielectric porcelain composition of the present invention, BaTi
The Ba 3 Ti 12 Zn 7 O 34 crystal phase and the Ba 2 Ti 9 O 20 crystal phase are uniformly dispersed in the 4 O 9 crystal phase to obtain BaTi 4
O 9 crystal phase, Ba 3 Ti 12 Zn 7 O 34 crystal phase and Ba
In order to form a solid solution of Sr in the 2 Ti 9 O 20 crystal phase, it is necessary to calcine at a temperature of 1050 to 1150 ° C. for 6 hours or more. The reason is that at temperatures lower than 1050 ° C, 6
This is because if the calcination is performed for less than an hour, a Ba 3 Ti 12 Zn 7 O 34 crystal phase is not easily formed.
【0022】[0022]
【実施例】原料として純度99%以上のBaCO3 ,T
iO2 ,SrCO3 ,ZnO,Ta2 O5 の粉末を用い
て、上記した組成式のa,Zn量およびTa量が表1に
示す割合となるように秤量し、純水を媒体とし、ZrO
2 ボールを用いたボ−ルミルにて20時間湿式混合し
た。次にこの混合物を乾燥(脱水)し、1100℃で6
時間仮焼した。この仮焼物を粉砕し、誘電特性評価用の
試料として直径10mm高さ8mmの円柱状に1ton
/cm2 の圧力でプレス成形し、これを酸化雰囲気中に
おいて1250℃で2時間焼成し、直径8mm、高さ6
mmの円柱状の試料を得た。EXAMPLE As a raw material, BaCO 3 , T having a purity of 99% or more was used.
Using powders of iO 2 , SrCO 3 , ZnO and Ta 2 O 5 , the a, Zn and Ta contents of the above composition formula were weighed so as to have the ratios shown in Table 1, and pure water was used as a medium, and ZrO was used.
The mixture was wet-mixed for 20 hours in a ball mill using two balls. The mixture is then dried (dehydrated) and dried at 1100 ° C. for 6 hours.
It was calcined for hours. This calcined product was pulverized and used as a sample for dielectric property evaluation in a cylindrical shape having a diameter of 10 mm and a height of 8 mm.
/ Cm 2 at a pressure of 2 cm / cm 2 , and baked at 1250 ° C. for 2 hours in an oxidizing atmosphere to give a diameter of 8 mm and a height of
mm cylindrical sample was obtained.
【0023】誘電特性の評価は、前記試料を用いて誘電
体円柱共振器法にて周波数6GHzにおける比誘電率と
Q値を測定した。Q値と測定周波数fとの積で表される
値を表1に記載した。また、−40〜85℃の温度範囲
における共振周波数を測定し、25℃での共振周波数を
基準にして共振周波数の温度係数τfを算出した。これ
らの結果を表1に記載した。尚、表1中におけるτf1
は−40℃における共振周波数の温度係数であり、τf
2 は85℃における共振周波数の温度係数である。さら
に、共振周波数の温度係数の曲がりΔτf(温度ドラフ
ト)をΔτf=τf1 −τf2 の式から求め、結果を表
1に記載した。For the evaluation of the dielectric properties, the relative permittivity and the Q value at a frequency of 6 GHz were measured by the dielectric cylinder resonator method using the sample. Table 1 shows the value represented by the product of the Q value and the measurement frequency f. The resonance frequency in the temperature range of -40 to 85 ° C was measured, and the temperature coefficient τf of the resonance frequency was calculated based on the resonance frequency at 25 ° C. Table 1 shows the results. Note that τf 1 in Table 1
Is the temperature coefficient of the resonance frequency at −40 ° C., and τf
2 is the temperature coefficient of the resonance frequency at 85 ° C. Further, the bending Δτf (temperature draft) of the temperature coefficient of the resonance frequency was obtained from the equation Δτf = τf 1 −τf 2 , and the results are shown in Table 1.
【0024】[0024]
【表1】 [Table 1]
【0025】この表1から、本発明の誘電体磁器組成物
では、比誘電率が33以上、Qf値が40000〔GH
z〕以上、共振周波数の温度係数τfが±15〔ppm
/℃〕の範囲内で、かつ、共振周波数の温度係数τfの
曲がりΔτfが−2〜+2〔ppm/℃〕の優れた特性
を有することが判る。また、共振周波数の温度係数の曲
がりΔτfが零付近のQf値を43000以上という高
Qf値にできることが判る。From Table 1, it can be seen that the dielectric ceramic composition of the present invention has a relative dielectric constant of 33 or more and a Qf value of 40000 [GH
z], the temperature coefficient τf of the resonance frequency is ± 15 [ppm
/ ° C], and the bending Δτf of the temperature coefficient τf of the resonance frequency has excellent characteristics of -2 to +2 [ppm / ° C]. It can also be seen that the Qf value where the bending Δτf of the temperature coefficient of the resonance frequency is near zero can be made a high Qf value of 43,000 or more.
【0026】[0026]
【発明の効果】以上詳述した通り、本発明によれば、B
a−Ti系誘電体磁器組成物において、Baの一部をS
rで置換するとともに、ZnおよびTaを所定量添加含
有することにより、比誘電率が30〜40で、Qfが4
0000〔GHz〕以上であり、共振周波数の温度係数
τfを−15〜+15〔ppm/℃〕の範囲内で、か
つ、共振周波数の温度係数τfの曲がりを−2〜+2
〔ppm/℃〕の範囲内とすることができ、しかも共振
周波数の温度係数の曲がりΔτfが零付近のQf値を4
0000以上とするでき、さらに磁器強度を向上するこ
とができ、これによりマイクロ波やミリ波などの周波数
領域において使用される種々の共振器用材料やMIC用
誘電体基板材料、誘電体導波路用材料等に最適とするこ
とができる。As described in detail above, according to the present invention, B
In the a-Ti dielectric ceramic composition, a part of Ba is replaced with S.
By substituting with r and adding a predetermined amount of Zn and Ta, the relative dielectric constant is 30 to 40 and Qf is 4
0000 [GHz] or more, the temperature coefficient τf of the resonance frequency is within the range of −15 to +15 [ppm / ° C.], and the bending of the temperature coefficient τf of the resonance frequency is −2 to +2.
[Ppm / ° C.], and the Qf value at which the bending Δτf of the temperature coefficient of the resonance frequency is close to zero is 4
0000 or more, and the porcelain strength can be further improved, so that various resonator materials, MIC dielectric substrate materials, and dielectric waveguide materials used in the frequency range of microwaves, millimeter waves, etc. And so on.
フロントページの続き (56)参考文献 特開 平5−178660(JP,A) 特開 平5−70222(JP,A) 特開 平5−17213(JP,A) 特開 平4−338168(JP,A) 特開 平9−87015(JP,A) 特開 昭57−69607(JP,A) 特開 平5−325641(JP,A) (58)調査した分野(Int.Cl.7,DB名) C04B 35/46 CA(STN) REGISTRY(STN)Continuation of front page (56) References JP-A-5-178660 (JP, A) JP-A-5-70222 (JP, A) JP-A-5-17213 (JP, A) JP-A-4-338168 (JP) JP-A-9-87015 (JP, A) JP-A-57-69607 (JP, A) JP-A-5-325641 (JP, A) (58) Fields investigated (Int. Cl. 7 , DB Name) C04B 35/46 CA (STN) REGISTRY (STN)
Claims (1)
rを含有し、これらのモル比による組成式を、 (Ba1-a Sra )O−4TiO2 と表した時、前記aが、 0.01≦a≦0.08 を満足する主成分100重量部に対して、ZnをZnO
換算で4〜18重量部、TaをTa2 O5 換算で3〜5
重量部添加含有することを特徴とする誘電体磁器組成
物。(1) at least Ba, Ti, S as a metal element;
contains r, a main component 100 a composition formula of these molar ratios, when expressed as (Ba 1-a Sr a) O-4TiO 2, wherein a is, to satisfy the 0.01 ≦ a ≦ 0.08 Parts by weight of Zn
4 to 18 parts by weight in terms of Ta, 3 to 5 in terms of Ta 2 O 5
A dielectric porcelain composition characterized by being added by weight.
Priority Applications (1)
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JP31254095A JP3266484B2 (en) | 1995-11-30 | 1995-11-30 | Dielectric porcelain composition |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP31254095A JP3266484B2 (en) | 1995-11-30 | 1995-11-30 | Dielectric porcelain composition |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH09157007A JPH09157007A (en) | 1997-06-17 |
JP3266484B2 true JP3266484B2 (en) | 2002-03-18 |
Family
ID=18030462
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JP31254095A Expired - Fee Related JP3266484B2 (en) | 1995-11-30 | 1995-11-30 | Dielectric porcelain composition |
Country Status (1)
Country | Link |
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JP (1) | JP3266484B2 (en) |
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1995
- 1995-11-30 JP JP31254095A patent/JP3266484B2/en not_active Expired - Fee Related
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JPH09157007A (en) | 1997-06-17 |
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