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JP3266047B2 - Surface coated cemented carbide cutting tool with excellent interlayer adhesion with hard coating layer - Google Patents

Surface coated cemented carbide cutting tool with excellent interlayer adhesion with hard coating layer

Info

Publication number
JP3266047B2
JP3266047B2 JP12070497A JP12070497A JP3266047B2 JP 3266047 B2 JP3266047 B2 JP 3266047B2 JP 12070497 A JP12070497 A JP 12070497A JP 12070497 A JP12070497 A JP 12070497A JP 3266047 B2 JP3266047 B2 JP 3266047B2
Authority
JP
Japan
Prior art keywords
layer
titanium
vapor deposition
hard coating
cutting tool
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP12070497A
Other languages
Japanese (ja)
Other versions
JPH10310877A (en
Inventor
浩一 由利
淳 長嶺
惠滋 中村
高歳 大鹿
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Materials Corp
Original Assignee
Mitsubishi Materials Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Materials Corp filed Critical Mitsubishi Materials Corp
Priority to JP12070497A priority Critical patent/JP3266047B2/en
Priority to DE69802035T priority patent/DE69802035T2/en
Priority to EP98108570A priority patent/EP0878563B1/en
Priority to US09/075,923 priority patent/US6071601A/en
Publication of JPH10310877A publication Critical patent/JPH10310877A/en
Application granted granted Critical
Publication of JP3266047B2 publication Critical patent/JP3266047B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Other Surface Treatments For Metallic Materials (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Physical Vapour Deposition (AREA)

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】この発明は、硬質被覆層を構
成するTi化合物層とα型結晶の酸化アルミニウム(以
下、α−Al23 で示す)層がすぐれた層間密着性を
有し、したがって例えば鋼や鋳鉄などの高速切削に用い
た場合にも硬質被覆層に剥離の発生なく、長期に亘って
すぐれた切削性能を発揮する表面被覆超硬合金製切削工
具(以下、被覆超硬工具という)に関するものである。
The present invention relates to a Ti compound layer and an α-type crystal aluminum oxide (hereinafter referred to as α-Al 2 O 3 ) layer constituting a hard coating layer having excellent interlayer adhesion. Therefore, a cutting tool made of a surface-coated cemented carbide (hereinafter referred to as a coated carbide tool) that exhibits excellent cutting performance over a long period of time without peeling of the hard coating layer even when used for high-speed cutting of steel or cast iron, for example. It is about).

【0002】[0002]

【従来の技術】従来、一般に、例えば特開平6−315
03号公報、特開平6−316758号公報、および特
開平7−216549号公報などに記載されるように、
炭化タングステン基超硬合金基体(以下、超硬基体とい
う)の表面に、炭化チタン(以下、TiCで示す)層、
窒化チタン(以下、同じくTiNで示す)層、炭窒化チ
タン(以下、TiCNで示す)層、炭酸化チタン(以
下、TiCOで示す)層、窒酸化チタン(以下、TiN
Oで示す)層、および炭窒酸化チタン(以下、TiCN
Oで示す)層のうちの1種または2種以上からなるTi
化合物層と、α−Al23 層とで構成された硬質被覆
層を3〜20μmの平均層厚で化学蒸着および/または
物理蒸着してなる被覆超硬工具が知られており、またこ
の被覆超硬工具が鋼や鋳鉄などの連続切削や断続切削に
用いられていることも知られている。
2. Description of the Related Art Conventionally, generally, for example, Japanese Patent Application Laid-Open No. 6-315
03, JP-A-6-316758, and JP-A-7-216549, etc.
A titanium carbide (hereinafter, referred to as TiC) layer on a surface of a tungsten carbide-based cemented carbide substrate (hereinafter, referred to as a cemented carbide substrate);
Titanium nitride (hereinafter also referred to as TiN) layer, titanium carbonitride (hereinafter referred to as TiCN) layer, titanium carbonate (hereinafter referred to as TiCO) layer, titanium oxynitride (hereinafter referred to as TiN)
O) layer and titanium carbonitride (hereinafter referred to as TiCN).
O) or one or more of these layers
There is known a coated carbide tool in which a hard coating layer composed of a compound layer and an α-Al 2 O 3 layer is formed by chemical vapor deposition and / or physical vapor deposition with an average layer thickness of 3 to 20 μm. It is also known that coated carbide tools are used for continuous or interrupted cutting of steel, cast iron, and the like.

【0003】[0003]

【発明が解決しようとする課題】一方、近年の切削装置
の高性能化および高出力化はめざましく、かつ省力化に
対する要求も強く、これに伴い、切削加工は高速化の傾
向にあるが、上記の従来被覆超硬工具においては、これ
を構成する硬質被覆層のうち、特にα−Al2 3 層は
耐酸化性と熱的安定性にすぐれ、さらに高硬度を有する
が、他の構成層であるTi化合物層との層間密着性が不
十分なために、例えば鋼や鋳鉄などの連続切削や断続切
削を高速で行った場合には硬質被覆層に剥離が発生し易
く、これが原因で比較的短時間で使用寿命に至るのが現
状である。
On the other hand, recent cutting devices
High-performance and high-power
There is also a strong demand for high-speed cutting.
In the conventional coated carbide tools described above,
Among the hard coating layers constituting α-AlTwo O Three Layers
Excellent oxidation resistance and thermal stability, with high hardness
However, the interlayer adhesion with a Ti compound layer as another constituent layer is not sufficient.
For continuous cutting or intermittent cutting of steel or cast iron, for example,
When abrasion is performed at high speed, the hard coating layer tends to peel.
This leads to a short service life in a relatively short time.
It is.

【0004】[0004]

【課題を解決するための手段】そこで、本発明者等は、
上述のような観点から、被覆超硬工具の硬質被覆層を構
成するα−Al23 層に着目し、これと他の構成層で
あるTi化合物層との層間密着性の向上を図るべく研究
を行った結果、 (1)酸化チタンには、主にTi23 、TiO2 、お
よびTiOの化学式で示される3種類があり、これらの
Ti23 、TiO2 、およびTiOのそれぞれを主成
分とする酸化チタン層は、いずれも化学蒸着法または物
理蒸着法を用いて、(a)Ti23 を主成分とする酸
化チタン層(以下、Ti23 層と云う) 反応ガス組成(容量%で、以下同じ)−TiCl4
0.4〜10%、Co2:0.4〜10%、N2 :5〜
60%、H2 :残り、 雰囲気温度:800〜1100℃、 雰囲気圧力:30〜500Torr、 (b)TiO2 を主成分とする酸化チタン層(以下、T
iO2 層と云う) 反応ガス組成−TiCl4 :0.4〜10%、O2
0.4〜10%、不活性ガス:残り、 雰囲気温度:800〜1100℃、 雰囲気圧力:30〜500Torr、 (c)TiOを主成分とする酸化チタン層(以下、Ti
O層と云う) 反応ガス組成−TiCl4 :0.4〜10%、CO2
0.1〜1%、H2 :残り、 雰囲気温度:800〜1100℃、 雰囲気圧力:30〜500Torr、 の条件で形成することができること。 (2)上記のTi23 層、TiO2 層、およびTiO
層は、Cukα線を線源として用いたX線回折で、
(a)Ti23 層は、図1に示される通り34.9±
1度の回折角(2θ)に最高回折ピーク高さが現れるX
線回折パターン、(b)TiO2 層は、図2に示される
通り28.7±1度の回折角(2θ)に最高回折ピーク
高さが現れるX線回折パターン、(c)TiO層は、図
3に示される通り43.7±1度の回折角(2θ)に最
高回折ピーク高さが現れるX線回折パターン、をそれぞ
れ示すこと。 (3)これら酸化チタン層のうちの図1のX線回折パタ
ーンを示すTi23層を、同じく化学蒸着法および/
または物理蒸着法を用いて形成された上記の従来硬質被
覆層を構成するTi化合物層とα−Al23 層の間に
介在させると、前記Ti化合物層とα−Al23
は、前記Ti23 層がこれら両層と著しく強固に密着
する性質を具備することから、高い層間密着性をもつよ
うになり、したがって、例えば鋼や鋳鉄の高速切削でも
硬質被覆層に剥離の発生なく、長期に亘ってすぐれた切
削性能を発揮するのに対して、上記の図2のX線回折パ
ターンを示すTiO2 層および図3のX線回折パターン
を示すTiO層は、前記Ti化合物層およびα−Al2
3 層に対する密着性が低く、所望の層間密着性が得ら
れないこと。以上(1)〜(3)に示される研究結果を
得たのである。
Means for Solving the Problems Accordingly, the present inventors have
From the above viewpoint, attention is paid to the α-Al 2 O 3 layer constituting the hard coating layer of the coated cemented carbide tool, and in order to improve the interlayer adhesion between the α-Al 2 O 3 layer and the Ti compound layer which is another constituent layer. as a result of research, the (1) titanium oxide, there are mainly Ti 2 O 3, TiO 2, and 3 types represented by TiO chemical formulas, these Ti 2 O 3, TiO 2, and each of the TiO The titanium oxide layer containing Ti as a main component can be formed by using either a chemical vapor deposition method or a physical vapor deposition method to form (a) a titanium oxide layer containing Ti 2 O 3 as a main component (hereinafter referred to as a Ti 2 O 3 layer). gas composition (in% by volume, hereinafter the same) -TiCl 4:
0.4~10%, Co 2: 0.4~10% , N 2: 5~
60%, H 2 : remaining, ambient temperature: 800 to 1100 ° C., atmospheric pressure: 30 to 500 Torr, (b) a titanium oxide layer containing TiO 2 as a main component (hereinafter referred to as T
iO called layer 2) reaction gas composition -TiCl 4: 0.4~10%, O 2 :
0.4 to 10%, inert gas: remaining, ambient temperature: 800 to 1100 ° C., atmospheric pressure: 30 to 500 Torr, (c) a titanium oxide layer containing TiO as a main component (hereinafter referred to as Ti
Called O layer) reaction gas composition -TiCl 4: 0.4~10%, CO 2 :
0.1 to 1%, H 2: remainder, ambient temperature: 800 to 1100 ° C., atmospheric pressure: 30~500Torr, can be formed in the condition. (2) The above-mentioned Ti 2 O 3 layer, TiO 2 layer, and TiO
The layer was X-ray diffraction using Cuka radiation as a source,
(A) The Ti 2 O 3 layer has a thickness of 34.9 ± as shown in FIG.
X at which the highest diffraction peak height appears at one diffraction angle (2θ)
X-ray diffraction pattern, (b) TiO 2 layer has an X-ray diffraction pattern in which the highest diffraction peak height appears at a diffraction angle (2θ) of 28.7 ± 1 degree as shown in FIG. 2, and (c) TiO layer has As shown in FIG. 3, an X-ray diffraction pattern in which the highest diffraction peak height appears at a diffraction angle (2θ) of 43.7 ± 1 degree is shown. (3) Of these titanium oxide layers, the Ti 2 O 3 layer showing the X-ray diffraction pattern of FIG.
Or when interposed between the Ti compound layer and the α-Al 2 O 3 layer constituting the conventional hard coating layer formed by using the physical vapor deposition method, the Ti compound layer and the α-Al 2 O 3 layer Since the Ti 2 O 3 layer has the property of being extremely strongly adhered to both of these layers, it has a high interlayer adhesion. Therefore, even when high-speed cutting of steel or cast iron, for example, peeling of the hard coating layer occurs. While excellent cutting performance is exhibited over a long period without occurrence, the TiO 2 layer showing the X-ray diffraction pattern of FIG. 2 and the TiO layer showing the X-ray diffraction pattern of FIG. Layer and α-Al 2
Adhesion to the O 3 layer is low, and desired interlayer adhesion cannot be obtained. The research results shown in (1) to (3) above were obtained.

【0005】この発明は、上記の研究結果に基づいてな
されたものであって、超硬基体の表面に、TiC層、T
iN層、TiCN層、TiCO層、TiNO層、および
TiCNO層のうちの1種または2種以上からなるTi
化合物層と、α−Al23層とで構成された硬質被覆
層を3〜20μmの平均層厚で化学蒸着および/または
物理蒸着してなる被覆超硬工具において、前記Ti化合
物層と前記α−Al23 層の間に介在させて、Cuk
α線を線源として用いたX線回折で、34.5±1度の
回折角(2θ)に最高回折ピーク高さが現れるX線回折
パターンを示すTi23 層を、0.1〜5μmの平均
層厚で化学蒸着形成または物理蒸着形成してなる、硬質
被覆層がすぐれた層間密着性を有する被覆超硬工具に特
徴を有するものである。
The present invention has been made on the basis of the above research results, and a TiC layer and a T
Ti comprising one or more of an iN layer, a TiCN layer, a TiCO layer, a TiNO layer, and a TiCNO layer
In a coated cemented carbide tool obtained by chemical vapor deposition and / or physical vapor deposition of a hard coating layer composed of a compound layer and an α-Al 2 O 3 layer with an average layer thickness of 3 to 20 μm, the Ti compound layer and the Cuk is interposed between the α-Al 2 O 3 layers.
In X-ray diffraction using α-rays as a radiation source, a Ti 2 O 3 layer showing an X-ray diffraction pattern in which the highest diffraction peak height appears at a diffraction angle (2θ) of 34.5 ± 1 degree is 0.1 to 0.1%. A hard coating layer formed by chemical vapor deposition or physical vapor deposition with an average layer thickness of 5 μm is characterized by a coated carbide tool having excellent interlayer adhesion.

【0006】なお、この発明の被覆超硬工具において、
硬質被覆層を構成するTi23 層の平均層厚を0.1
〜5μmとしたのは、その厚さ0.1μm未満ではα−
Al 2 3 層とTi化合物層との間に所望の優れた層間
密着性を確保することができず、一方その厚さが5μm
を越えると、切刃に欠けやチッピング(微小欠け)が発
生し易くなるという理由によるものである。また、硬質
被覆層の平均層厚を3〜20μmとしたのは、その層厚
が3μmでは所望のすぐれた耐摩耗性を確保することが
できず、一方その層厚が20μmを越えると、切刃に欠
けやチッピングが発生し易くなるという理由からであ
る。
[0006] In the coated carbide tool of the present invention,
Ti constituting the hard coating layerTwo OThree Average layer thickness of 0.1
The reason that the thickness is set to?
Al TwoOThreeThe desired excellent interlayer between the layer and the Ti compound layer
Adhesion cannot be ensured, while its thickness is 5 μm
Over the cutting edge, chipping or chipping (small chipping)
This is because it is easier to grow. Also hard
The reason why the average layer thickness of the coating layer is 3 to 20 μm is that the layer thickness is
At 3 μm, the desired excellent wear resistance can be secured.
On the other hand, if the layer thickness exceeds 20 μm,
Because chipping and chipping are likely to occur.
You.

【0007】[0007]

【発明の実施の形態】つぎに、この発明の被覆超硬工具
を実施例により具体的に説明する。原料粉末として、平
均粒径:2.8μmを有する中粒WC粉末、同4.9μ
mの粗粒WC粉末、同1.5μmの(Ti,W)C(重
量比で、以下同じ、TiC/WC=30/70)粉末、
同1.2μmの(Ti,W)CN(TiC/TiN/W
C=24/20/56)粉末、同1.2μmの(Ta,
Nb)C(TaC/NbC=90/10)粉末、および
同1.1μmのCo粉末を用意し、これら原料粉末を表
1に示される配合組成に配合し、ボールミルで72時間
湿式混合し、乾燥した後、ISO・CNMG12040
8(超硬基体A〜D用)および同SEEN42AFTN
1(超硬基体E用)に定める形状の圧粉体にプレス成形
し、この圧粉体を同じく表1に示される条件で真空焼結
することにより超硬基体A〜Eをそれぞれ製造した。さ
らに、上記超硬基体Bに対して、100TorrのCH
4 ガス雰囲気中、温度:1400℃に1時間保持後、徐
冷の滲炭処理を施し、処理後、超硬基体表面に付着する
カーボンとCoを酸およびバレル研磨で除去することに
より、表面から11μmの位置で最大Co含有量:1
5.9重量%、深さ:42μmのCo富化帯域を基体表
面部に形成した。また、上記超硬基体AおよびDには、
焼結したままで、表面部に表面から17μmの位置で最
大Co含有量:9.1重量%、深さ:23μmのCo富
化帯域が形成されており、残りの超硬基体CおよびEに
は、前記Co富化帯域の形成がなく、全体的に均質な組
織をもつものであった。なお、表1には、上記超硬基体
A〜Eの内部硬さ(ロックウエル硬さAスケール)をそ
れぞれ示した。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, the coated carbide tool of the present invention will be specifically described with reference to examples. Medium-sized WC powder having an average particle diameter of 2.8 μm, 4.9 μm as the raw material powder
m of coarse WC powder, 1.5 μm of (Ti, W) C (the same in weight ratio, hereinafter, TiC / WC = 30/70) powder,
1.2 μm (Ti, W) CN (TiC / TiN / W
C = 24/20/56) powder, 1.2 μm (Ta,
Nb) C (TaC / NbC = 90/10) powder and Co powder of 1.1 μm were prepared, and these raw material powders were blended in the composition shown in Table 1, wet-mixed in a ball mill for 72 hours, and dried. After that, ISO ・ CNMG12040
8 (for carbide substrates A to D) and SEEN42AFTN
Press molded into a green compact having the shape defined in No. 1 (for the super hard substrate E), and the green compact was vacuum-sintered under the conditions shown in Table 1 to produce super hard substrates A to E, respectively. Further, the above-mentioned super hard substrate B was subjected to 100 Torr CH.
After holding at a temperature of 1400 ° C. for 1 hour in a 4 gas atmosphere, a slow cooling carburization treatment is performed, and after the treatment, carbon and Co adhering to the surface of the carbide substrate are removed from the surface by acid and barrel polishing. Maximum Co content at 11 μm: 1
A Co-enriched zone of 5.9% by weight and a depth of 42 μm was formed on the surface of the substrate. In addition, the above-mentioned carbide substrates A and D include:
As-sintered, a Co-enriched zone having a maximum Co content of 9.1% by weight and a depth of 23 μm was formed on the surface at a position 17 μm from the surface, and the remaining carbide substrates C and E were formed. Has no formation of the Co-enriched zone and has an overall homogeneous structure. Table 1 shows the internal hardness (Rockwell hardness A scale) of each of the carbide substrates A to E.

【0008】ついで、これらの超硬基体A〜Eの表面
に、ホーニングを施した状態で、通常の化学蒸着装置を
用い、表2(表中のl−TiCNは特開平6−8010
号公報に記載される縦長成長結晶組織をもつものであ
り、また同p−TiCNは通常の粒状結晶組織をもつも
のである)に示される条件にて、表3、4に示される組
成および平均層厚のTi化合物層とα−Al23 層で
構成された硬質被覆層を形成することにより本発明被覆
超硬工具1〜10、およびTi23 層の形成がない従
来被覆超硬工具1〜10をそれぞれ製造した。
Then, the surfaces of these super-hard substrates A to E are honed, and a conventional chemical vapor deposition apparatus is used. Table 1 (1-TiCN in the table corresponds to JP-A-6-8010
Under the conditions shown in Table 3 and under the conditions shown in Table 3, and under the conditions shown in Tables 3 and 4, the p-TiCN has a normal granular crystal structure. By forming a hard coating layer composed of a Ti compound layer having a layer thickness and an α-Al 2 O 3 layer, the coated carbide tools 1 to 10 of the present invention and a conventional coated carbide having no formation of a Ti 2 O 3 layer Tools 1 to 10 were manufactured respectively.

【0009】つぎに、上記本発明被覆超硬工具1〜9お
よび従来被覆超硬工具1〜9について、 被削材:JIS・SCM440(硬さ:HB 220)の
丸棒、 切削速度:350m/min.、 切込み:3mm、 送り:0.4mm/rev.、 切削時間:10分、 の条件での合金鋼の乾式高速連続切削試験、並びに、 被削材:JIS・SNCM439(硬さ:HB 230)
の角材、 切削速度:180m/min.、 切込み:3mm、 0送り:0.25mm/rev.、 切削時間:5分、 の条件での合金鋼の乾式高速断続切削試験を行い、いず
れの切削試験でも切刃の逃げ面摩耗幅を測定した。これ
らの測定結果を表5に示した。また、上記本発明被覆超
硬工具10および従来被覆超硬工具10について、 被削材:JIS・S25C(硬さ:HB 150)、 切削速度:200m/min.、 切込み:2mm、 送り:0.15mm/刃、 切削時間:10分、 の条件での軟鋼の乾式高速フライス切削試験を行い、切
刃の逃げ面摩耗幅を測定した。この測定結果も表5に示
した。
Next, for the above-mentioned coated carbide tools 1 to 9 of the present invention and conventional coated carbide tools 1 to 9, a work material: a round bar of JIS SCM440 (hardness: HB 220), a cutting speed: 350 m / min. Infeed: 3 mm Feed: 0.4 mm / rev. , Cutting time: 10 minutes, Dry high-speed continuous cutting test of alloy steel under the following conditions: Work material: JIS SNCM439 (Hardness: HB 230)
Square material, Cutting speed: 180 m / min. Infeed: 3 mm, 0 feed: 0.25 mm / rev. The cutting speed was 5 minutes. A dry high-speed intermittent cutting test was performed on the alloy steel under the following conditions, and the flank wear width of the cutting edge was measured in each cutting test. Table 5 shows the results of these measurements. Further, regarding the coated carbide tool 10 of the present invention and the conventional coated carbide tool 10, a work material: JIS S25C (hardness: HB150), a cutting speed: 200 m / min. A dry high-speed milling test of mild steel was performed under the following conditions: cutting depth: 2 mm, feed: 0.15 mm / tooth, cutting time: 10 minutes, and the flank wear width of the cutting edge was measured. The measurement results are also shown in Table 5.

【0010】[0010]

【表1】 [Table 1]

【0011】[0011]

【表2】 [Table 2]

【0012】[0012]

【表3】 [Table 3]

【0013】[0013]

【表4】 [Table 4]

【0014】[0014]

【表5】 [Table 5]

【0015】[0015]

【発明の効果】表3〜5に示される結果から、硬質被覆
層中のTi化合物層とα−Al2 3層の間にTi23
層を介在させた本発明被覆超硬工具1〜10は、これ
の介在がない従来被覆超硬工具1〜10に比して、Ti
化合物層とα−Al2 3 層との層間密着性にすぐれて
いるので、苛酷な切削条件となる鋼の高速連続切削や高
速断続切削にも硬質被覆層に剥離の発生なく、すぐれた
切削性能を長期に亘って発揮するのに対して、従来被覆
超硬工具1〜10においては、Ti化合物層とα−Al
2 3 層との層間密着性が不十分なために比較的短時間
で硬質被覆層にいずれも剥離が発生し、これが原因で使
用寿命に至ることが明らかである。上述のように、この
発明の被覆超硬工具は、これの硬質被覆層を構成するT
i化合物層とα−Al2 3 層とがすぐれた層間密着性
を有するので、例えば鋼や鋳鉄などの通常の条件での連
続切削や断続切削は勿論のこと、特にこれらの切削を高
速で行っても、長期に亘ってすぐれた切削性能を発揮
し、したがって切削加工の高速化に十分に対応でき、か
つ省力化にも寄与するものである。
From the results shown in Tables 3 to 5, it can be seen that Ti 2 O 3 is present between the Ti compound layer and the α-Al 2 O 3 layer in the hard coating layer.
The coated carbide tools 1 to 10 of the present invention having a layer interposed therebetween have a Ti
Excellent interlaminar adhesion between the compound layer and the α-Al 2 O 3 layer. Excellent cutting without hard coating layer peeling even in high-speed continuous cutting or high-speed interrupted cutting of steel, which is severe cutting conditions. On the other hand, the conventional coated carbide tools 1 to 10 have a Ti compound layer and α-Al
It is clear that, due to insufficient interlayer adhesion with the 2 O 3 layer, any of the hard coating layers peeled off in a relatively short time, which led to a long service life. As described above, the coated carbide tool according to the present invention has a T
Since the i-compound layer and the α-Al 2 O 3 layer have excellent interlayer adhesion, continuous cutting or interrupted cutting under ordinary conditions such as steel or cast iron, of course, these cutting can be performed at high speed. Even if it is performed, excellent cutting performance is exhibited over a long period of time, so that it can sufficiently cope with high-speed cutting and contributes to labor saving.

【図面の簡単な説明】[Brief description of the drawings]

【図1】Ti23 層のX線回折パターンを示す図であ
る。
FIG. 1 is a view showing an X-ray diffraction pattern of a Ti 2 O 3 layer.

【図2】TiO2 層X線回折パターンを示す図である。FIG. 2 is a diagram showing a TiO 2 layer X-ray diffraction pattern.

【図3】TiO層のX線回折パターンを示す図である。FIG. 3 is a diagram showing an X-ray diffraction pattern of a TiO layer.

───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.7 識別記号 FI C23C 16/30 C23C 16/30 30/00 30/00 C (72)発明者 中村 惠滋 埼玉県大宮市北袋町1−297 三菱マテ リアル株式会社 総合研究所内 (72)発明者 大鹿 高歳 埼玉県大宮市北袋町1−297 三菱マテ リアル株式会社 総合研究所内 (56)参考文献 特開 平10−130842(JP,A) (58)調査した分野(Int.Cl.7,DB名) C23C 28/04 B23B 27/14 B23P 15/28 C23C 14/06 C23C 14/08 C23C 16/30 C23C 30/00 ──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. 7 Identification code FI C23C 16/30 C23C 16/30 30/00 30/00 C (72) Inventor Keiji Nakamura 1-297 Kitabukurocho, Omiya City, Saitama Prefecture (72) Inventor Takashi Oshika 1-297 Kitabukurocho, Omiya City, Saitama Prefecture Mitsubishi Materials Real Research Institute (56) References JP-A-10-130842 (JP, A) ( 58) Field surveyed (Int.Cl. 7 , DB name) C23C 28/04 B23B 27/14 B23P 15/28 C23C 14/06 C23C 14/08 C23C 16/30 C23C 30/00

Claims (1)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 炭化タングステン基超硬合金基体の表面
に、炭化チタン層、窒化チタン層、炭窒化チタン層、炭
酸化チタン層、窒酸化チタン層、および炭窒酸化チタン
層のうちの1種または2種以上からなるTi化合物層
と、α型結晶の酸化アルミニウム層とで構成された硬質
被覆層を3〜20μmの平均層厚で化学蒸着および/ま
たは物理蒸着してなる表面被覆超硬合金製切削工具にお
いて、 前記Ti化合物層と前記α型結晶の酸化アルミニウム層
の間に介在させて、Cukα線を線源として用いたX線
回折で、34.5±1度の回折角(2θ)に最高回折ピ
ーク高さが現れるX線回折パターンを示す酸化チタン層
を、0.1〜5μmの平均層厚で化学蒸着形成または物
理蒸着形成してなる、硬質被覆層がすぐれた層間密着性
を有する表面被覆超硬合金製切削工具。
1. One of a titanium carbide layer, a titanium nitride layer, a titanium carbonitride layer, a titanium carbonate layer, a titanium oxynitride layer, and a titanium carbonitride oxide layer on a surface of a tungsten carbide-based cemented carbide substrate. Or a surface-coated cemented carbide obtained by chemical vapor deposition and / or physical vapor deposition of a hard coating layer composed of a Ti compound layer composed of two or more kinds and an aluminum oxide layer of α-type crystal with an average layer thickness of 3 to 20 μm In a cutting tool manufactured, a diffraction angle (2θ) of 34.5 ± 1 degrees was obtained by X-ray diffraction using a Cukα ray as a radiation source, interposed between the Ti compound layer and the aluminum oxide layer of the α-type crystal. A titanium oxide layer showing an X-ray diffraction pattern in which the highest diffraction peak height appears is formed by chemical vapor deposition or physical vapor deposition with an average layer thickness of 0.1 to 5 μm. Having surface coating super Hard alloy cutting tool.
JP12070497A 1997-05-12 1997-05-12 Surface coated cemented carbide cutting tool with excellent interlayer adhesion with hard coating layer Expired - Lifetime JP3266047B2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP12070497A JP3266047B2 (en) 1997-05-12 1997-05-12 Surface coated cemented carbide cutting tool with excellent interlayer adhesion with hard coating layer
DE69802035T DE69802035T2 (en) 1997-05-12 1998-05-12 Coated cutting tool
EP98108570A EP0878563B1 (en) 1997-05-12 1998-05-12 Coated cutting tool member
US09/075,923 US6071601A (en) 1997-05-12 1998-05-12 Coated cutting tool member

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12070497A JP3266047B2 (en) 1997-05-12 1997-05-12 Surface coated cemented carbide cutting tool with excellent interlayer adhesion with hard coating layer

Publications (2)

Publication Number Publication Date
JPH10310877A JPH10310877A (en) 1998-11-24
JP3266047B2 true JP3266047B2 (en) 2002-03-18

Family

ID=14792928

Family Applications (1)

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Country Status (1)

Country Link
JP (1) JP3266047B2 (en)

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* Cited by examiner, † Cited by third party
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CN103668105A (en) * 2013-12-31 2014-03-26 厦门金鹭特种合金有限公司 Method for preparing coating on cutting blade

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Publication number Priority date Publication date Assignee Title
JP2004188501A (en) * 2002-07-01 2004-07-08 Mitsubishi Materials Corp Cutting tool of surface-coated cermet with hard coating layer having excellent thermal shock resistance and surface lubrication property
JP2004188576A (en) * 2002-07-01 2004-07-08 Mitsubishi Materials Corp Cutting tool of surface-coated cermet with hard coating layer having excellent thermal shock resistance and surface lubrication performance
WO2007122859A1 (en) * 2006-03-28 2007-11-01 Kyocera Corporation Cutting tool, method for producing same and cutting method
IL182344A (en) 2007-04-01 2011-07-31 Iscar Ltd Cutting insert having ceramic coating

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103668105A (en) * 2013-12-31 2014-03-26 厦门金鹭特种合金有限公司 Method for preparing coating on cutting blade
CN103668105B (en) * 2013-12-31 2016-03-09 厦门金鹭特种合金有限公司 A kind of method preparing coating on cutting inserts

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