JP3254519B2 - Cleaning treatment method and cleaning treatment system - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cleaning processing method and a cleaning processing system for cleaning an object to be processed, for example, by immersing the object to be processed such as a semiconductor wafer or an LCD glass substrate in a cleaning solution. More specifically, the present invention relates to the periodic replacement of the cleaning solution stored in the processing container.

[0002]

2. Description of the Related Art Generally, in a cleaning process of a semiconductor manufacturing apparatus, an object to be processed such as a semiconductor wafer or a glass substrate for LCD (hereinafter, referred to as a wafer) is loaded into a loading section of the processing apparatus and transported to the processing section. A method of carrying out a cleaning process or a rinsing process by immersing in a chemical solution or a rinsing solution (cleaning solution) stored in a processing container, and then transporting the processed wafer or the like taken out to an unloading unit and unloading the same is known. I have.

In this case, in order to maintain the quality of the cleaning process, the cleaning solution stored in the processing container is periodically replaced according to a predetermined cleaning time, the number of times of cleaning, etc. It is common not to use.

In this type of conventional cleaning treatment method, when a predetermined cleaning time and the number of cleanings are reached and it is determined that the cleaning treatment liquid should be replaced, the cleaning treatment is immediately performed according to a preset program. The solution was exchanged, and the temperature conditions and the like were maintained in such a state that the next washing process could be performed immediately.

[0005]

However, when it is time to change the cleaning solution and the wafer to be processed next is not loaded in the processing apparatus, the replaced new cleaning solution is used. Since the time lag before use is large and the apparatus is left for a long time, particles may be mixed into the cleaning solution during this time. In addition, since the temperature condition of the cleaning treatment liquid is usually set to be higher than room temperature in many cases, the unused cleaning treatment liquid may evaporate. Therefore, there is a problem that the cleaning treatment liquid is deteriorated even though the cleaning treatment liquid is not used, and there is a problem that the amount of the cleaning treatment liquid used is increased by an amount reduced by evaporation and the cleaning efficiency is reduced.

The present invention has been made in view of the above circumstances, and it is possible to reduce deterioration and evaporation of an unused cleaning processing liquid by minimizing a time lag from the replacement of the cleaning processing liquid to the immediately subsequent cleaning processing. It is another object of the present invention to reduce the amount of the cleaning solution used and to prevent a reduction in cleaning efficiency.

[0007]

In order to achieve the above object, a cleaning processing method according to the present invention comprises the steps of: loading a workpiece into a carry-in section of a processing apparatus; Held by a transport means movably provided in the apparatus,
A step of transporting the object to be processed to a processing unit for performing liquid processing, and immersing the object to be processed in one or a plurality of processing containers provided in the processing unit and storing a cleaning processing liquid, and cleaning the object to be processed. And a step of holding the processed object by a transport unit and transporting the processed object to an unloading unit. Based on the, having a step of periodically replacing the cleaning treatment liquid in the processing container, and, when the object to be processed is not put into the processing apparatus, or
The processing container in which the object to be processed executes replacement of the cleaning processing liquid
When passing, or when the object is cleaned
Before passing through the processing vessel where the liquid exchange is performed,
When the processing body does not use the processing container, the above processing volume for performing the liquid processing without replacing the cleaning processing liquid even at the replacement time.
Make sure that the cleaning solution in the vessel is drained, or
After draining the cleaning solution in the processing vessel,
A cleaning solution for a processing container was supplied to wash the inside of the processing container.
In the processing vessel, or at the time of replacement of the cleaning solution, and the object to be processed is charged into the processing apparatus or immediately before the processing object is charged. The cleaning treatment liquid of the above (1) is replaced (claim 1).

[0008] In the present invention, when no running exchanged even replacement time of the cleaning liquid, the cleaning liquid while circulating the supply of the processing vessel, it is better to perform the replenishment of the cleaning liquid preferably ( Claim 2 ).

Further, the cleaning system of the present invention includes a carry-in section for carrying the object to be processed, and one or a plurality of units for immersing the object to be processed in a stored cleaning liquid and performing a cleaning process on the object. A processing unit in which a processing container is disposed, an unloading unit that unloads the object to be processed, and an interface that is located between the loading unit or the unloading unit and the processing unit and that transfers the object to be processed. And a control unit that controls the cleaning processing liquid in the processing container to be periodically replaced based on a preset program according to the processing time, the number of times of processing, and the like. When the object is not loaded into the processing apparatus, or when the object performs the replacement of the cleaning solution,
Process container, or
Before the body passes through the processing vessel that performs the change of the cleaning solution
When the object to be processed does not use the processing container , the liquid processing is performed without replacing the cleaning processing liquid even at the replacement time.
The cleaning processing liquid in the processing container is drained.
Or, the cleaning treatment liquid in the treatment container for performing the liquid treatment
After draining, supply the cleaning solution for the processing container to
Keep the chamber clean or
Leave the state, a replacement time of the cleaning liquid, immediately before the workpiece is either put into the processing device, or is turned on, the control so as to replace the cleaning liquid in the processing vessel It is formed so as to be possible (claim 3 ).

Further, the cleaning system of the present invention is
The loading section for loading the processing object and the stored cleaning solution
The object to be treated is immersed, and the object to be treated is subjected to a cleaning treatment.
Is a processing unit in which a plurality of processing vessels are disposed,
The unloading unit for unloading the body, the unloading unit or unloading
Delivery of the object to be processed, located between the unit and the processing unit
And an interface unit for performing
The processing unit performs one cleaning process and a rinsing process.
Circulating the cleaning treatment liquid in the treatment container and the treatment container;
Cleaning that shares a part of this circulation line with the circulation line to be supplied
A processing liquid supply pipe and a drain pipe connected to the processing vessel
Mainly configured flow path and the above flow path provided via a three-way valve
To temporarily store the cleaning solution during the rinsing process.
Tank with a drain valve for ink and a pure water supply source
The drain pipe is connected to the drain pipe through a drain valve and a three-way valve.
It is connected to the tank and the drainage side, and responds to the processing time,
Preset cleaning program at the time of replacement
Cleaning solution in the processing container and tank based on the
Is drained, or after draining,
Supply the cleaning solution for the vessel to keep the inside of the processing vessel clean.
Or leave it as it is,
Open / close control of three-way valve, drain valve and tank drain valve
A control means is provided (claim 4) .

According to the cleaning method and the cleaning system of the present invention, the time lag from the replacement of the cleaning solution to the next use thereof is minimized, and the newly cleaned cleaning solution is not left for a long time. Therefore, it is possible to prevent the unused cleaning treatment liquid from deteriorating due to mixing of particles and the like, and it is possible to minimize the amount of the cleaning treatment liquid that evaporates during the time of being left. Therefore, it is possible to reduce the use amount of the cleaning treatment liquid and to prevent a decrease in the cleaning efficiency due to the deterioration of the cleaning treatment liquid.

[0012]

Embodiments of the present invention will be described below in detail with reference to the drawings. In this embodiment, a case where the present invention is applied to a semiconductor wafer cleaning processing system will be described.

FIG. 1 is a schematic plan view showing an example of a cleaning system according to the present invention.

The cleaning processing system includes a loading / unloading section 2 for loading and unloading a container, for example, a carrier 1 for horizontally storing a semiconductor wafer W (hereinafter, referred to as a wafer) as an object to be processed, A processing unit 3 for performing a liquid processing such as a rinsing liquid, and an interface unit 4 positioned between the loading / unloading unit 2 and the processing unit 3 for transferring the wafer W, adjusting the position, changing the attitude, and the like. Have been.

The loading / unloading section 2 includes a loading section 5 and a loading section 6 which are provided adjacent to one end of the cleaning system. The loading unit 5 includes a receiving unit 5a that receives the carrier 1 from an upper transport mechanism (not shown), and a delivery unit 5b that places the carrier 1 that is horizontally transported from the receiving unit 5a. 5b, a carrier lifter 8 for transporting the carrier 1 between an upper position and a carry-in port (not shown) of the interface unit 4 is provided. A carrier lifter 8 that transports the carrier 1 between a carry-out port (not shown) of the interface unit 4 and an upper portion of the carry-out unit 6 is provided in the carry-out unit 6. 6 and transfer the empty carrier 1 to a carrier standby unit (not shown) provided above the interface unit 4 and receive the empty carrier 1 from the carrier standby unit. It is configured to be able to.

The interface section 4 includes a partition wall 4c.
First chamber 4 adjacent to the loading / unloading section 2 partitioned by
a, and a second chamber 4 b adjacent to the processing unit 3. Then, a plurality of wafers W from the carrier 1 of the loading unit 5 (specifically, the transfer unit 5b) are placed in the first chamber 4a.
Arm 10 capable of taking out and transporting wafers, capable of horizontal (X, Y directions), vertical (Z directions) and rotation (θ direction), notch aligner 11 for detecting notches provided on wafer W, and wafer A first attitude changing device 12 is provided which has an interval adjusting mechanism (not shown) for adjusting the interval between the plurality of wafers W taken out by the take-out arm 10 and converts a horizontal wafer W to a vertical state. Has been established.

In the second chamber 4b, a plurality of processed wafers W are transferred from the processing section 3 in a vertical state. Second attitude converting device 13 for converting from the horizontal to the horizontal state, and the second attitude converting device 13
Empty carrier 1 that has received a plurality of wafers W converted to a horizontal state by the
A wafer accommodating arm 15 that can be accommodated in the horizontal direction (X and Y directions), the vertical direction (Z direction) and the rotatable (θ direction) is provided. Note that the wafer receiving unit 14 is provided with a carrier lifter 8 that transports a carrier between the wafer receiving unit 14 and a carrier standby unit (not shown). In the carrier standby unit, the empty carrier 1 after the wafer W is transferred by the wafer transfer unit 5b or the carrier 1 containing the wafer W in the carrier 1 by the wafer receiving unit 14 is placed at a predetermined standby position or the wafer receiving unit. 14
A carrier transfer robot (not shown) is provided for moving the carrier 1 containing the wafer W transferred from the first unit to the carrier standby unit above the unloading unit 6.

On the other hand, the processing section 3 includes a first processing unit 17a for removing particles and organic contaminants adhering to the wafer W and a first rinsing processing unit 17b for rinsing with pure water, A second processing unit 18a for removing metal contamination and a second rinsing unit 18b for rinsing with pure water, and a third processing unit 19a for removing an oxide film adhering to the wafer W and a rinsing process with pure water. Third rinsing unit 19b
In addition, the chuck cleaning units 20 are linearly arranged. A drying unit (not shown) may be provided above the third rinsing unit 19b. In addition, each of these units 17a to 19a, 17b to 19b
From the position opposite to the interface unit 20
A transfer means, such as a wafer transfer chuck 23, which can rotate in the X and Y directions (horizontal direction), the Z direction (vertical direction), and rotate (θ), is provided in a transfer path 22 provided so as to extend in FIG.

The first to third processing units 17a to 17a-1
9a is a chemical solution such as APM, as shown in FIG.
A processing vessel for storing a cleaning treatment liquid L such as a liquid (a mixture of ammonia, hydrogen peroxide and water in an appropriate ratio) and immersing the wafer W in the cleaning treatment liquid L to clean the surface thereof. A cleaning tank 30 and a cleaning liquid supply nozzle 34 and a chemical liquid supply source 36 arranged in the cleaning tank 30 for connecting the cleaning tank 30 to the chemical liquid supply source 36 are connected to an on-off valve 36.
and a cleaning processing liquid supply pipe 37 connected through the line a.

In this case, the cleaning tank 30 is composed of an inner tank 31 for storing the cleaning liquid L, and an outer tank 32 covering the outer edge of the opening of the inner tank 31. Further, a discharge port provided at the bottom of the outer tank 32 and a cleaning treatment liquid supply nozzle 34 provided on the bottom side in the inner tank 31 are connected by a circulation pipe 38. 38, a three-way valve 38 is arranged in order from the discharge port side to the cleaning solution supply nozzle 34.
a, a circulation pump 38b, a temperature adjustment mechanism 38c, a filter 38d, and a valve 38e. With this configuration, it is possible to circulate and supply a diluent of a chemical solution (for example, an APM solution) stored in the cleaning tank 30 to remove particles, organic contaminants, and the like attached to the surface of the wafer W. .

A check valve 39 is provided on the side of the cleaning liquid supply pipe 37 connected to the circulation line 38.
Further, a drain pipe 31a provided with a drain valve 31b is connected to a discharge port provided at the bottom of the inner tank 31. Further, a holding member 33 for holding the wafer W during the cleaning process is provided in the inner tank 31. The holding member 33 is formed so as to be able to move up and down, and is configured to transfer the wafer W to and from the wafer transfer chuck 23.

Next, the operation of the cleaning unit will be described. First, a predetermined amount of the cleaning processing liquid L supplied from the chemical liquid supply source 36 as the cleaning processing liquid L diluted to a predetermined concentration is ejected from the cleaning processing liquid supply nozzle 34 and supplied into the inner tank 31. Next, a plurality of, for example, 50 wafers W transferred from the interface unit 4 by the wafer transfer chuck 23 are transferred to the holding member 33 and held and immersed in the inner tank 31 filled with the cleaning treatment liquid L. And washed. During this time, the cleaning treatment liquid L is supplied as needed, and the cleaning treatment liquid L overflowing from the inner tank 31 flows into the outer tank 32 along with particles and contaminants floating on the surface of the cleaning treatment liquid L. The used cleaning treatment liquid L that has flowed into the outer tank 32 is drained as it is by switching the three-way valve 38a, or is reused by the circulation system.

In the case of reuse, the circulation pump 38b flows through the circulation line 38, the temperature is adjusted to a predetermined temperature through the temperature adjustment mechanism 38c, and the particles and the like are removed by passing through the filter 38d. During the circulating supply of the cleaning liquid L, the cleaning liquid L reduced by evaporation or the like is replenished. The regenerated cleaning solution L is ejected again from the cleaning solution supply nozzle 34 and is supplied into the inner tank 31. At this time, the regenerated cleaning processing liquid L does not flow backward to the chemical liquid supply source 36 by the check valve 39 provided in the cleaning processing liquid supply pipe 37. Thus, the cleaning process is completed. The case where the cleaning processing liquid L supplied to the cleaning tank 30 is the APM liquid has been described. However, the APM liquid is mainly used for removing the first particles for removing particles and organic contaminants attached to the wafer W. Processing unit 17a, and the second processing unit 18a
In the case of (1), for example, an HPM solution (HCl / H2O2 / H2O mixed solution) is used to remove metal contamination attached to the wafer W.
Is used. In the case of the third processing unit 19a, DHF for removing an oxide film attached to the wafer W is used.
Liquid (hydrofluoric acid diluted solution) or the like is used.

In this manner, the washing process is sequentially repeated,
The cleaning liquid L is exchanged based on a program predetermined according to the processing time, the number of times of processing, and the like. Further, a series of operations including the exchange of the cleaning processing liquid of the processing apparatus are performed by the host computer 25 (HC) from the central processing unit 24.
(CPU), each unit, that is, the loading unit 5 of the processing device
(Refer to FIG. 3) to the loading means, the wafer transfer chuck 23, and a drive unit (not shown) provided in each of the processing units 17a to 19a (not shown).

When the cleaning liquid L is to be replaced, the drain valve 31b is first opened and the cleaning liquid L in the inner tank 31 is opened.
And the three-way valve 38a is switched to switch the outer tank 32
After draining the cleaning solution L inside, the drain pipe 31b is closed and the three-way valve 38a is switched. Next, the on-off valve 36a is opened, the cleaning treatment liquid L diluted to a predetermined concentration in advance flows out from the chemical supply source 36, and the outflowing cleaning treatment liquid L enters the inner tank 31 from the cleaning treatment liquid supply nozzle 34. Injection (supply)
You can do it.

Next, an operation procedure of the entire cleaning processing system to which the above-described cleaning processing apparatus is applied will be described with reference to a flowchart shown in FIG. After the wafer W (lot) is loaded into the loading unit 5, the horizontal attitude of the wafer W is converted by the first attitude converter 12 into a vertical state. Thereafter, the wafer W is transferred to the processing unit 3 by a transfer unit, for example, the wafer transfer chuck 23, and the wafers W are sequentially immersed in the first to third processing units 17a to 19a to perform the above-described chemical processing. Each time the chemical treatment in each of the treatment units 17a to 19a is completed, the treatment unit 17a to 19a is charged into one of the first to third rinse treatment units 17b to 19b and rinsed with pure water. Further, after a drying process is performed in a drying process unit (not shown) provided at, for example, an upper portion of the third rinsing process unit 19b, the wafer is transferred to the interface unit 4 by the wafer transfer chuck 23, and the second posture changing device is used. This converts the wafer W from a vertical state to a horizontal state. Finally, the wafer W is unloaded from the unloading section 6, and a series of steps is completed.

In the above-mentioned chemical solution / cleaning process, the cleaning solution L is exchanged based on a certain processing time, the number of times of processing, etc. in order to maintain the quality of the cleaning process. The procedure for determining whether to perform the exchange
This is performed based on a preset program. This procedure will be described with reference to the flowchart of FIG. When it is time to replace the cleaning liquid L, first, it is determined whether or not a wafer W (lot) to be processed next has been loaded into the processing apparatus (including the state immediately before loading). (Step A). If it is determined that the wafer W has been loaded into the processing apparatus, it is determined whether the wafer W has passed the cleaning tank 30 at the time of replacement (step B). Here, after it is determined that the wafer W is in the state before passing through the cleaning tank 30, the cleaning tank 30 in which the wafer W is to be replaced is replaced.
Is determined (step C). If it is determined in step C that the cleaning tank 30 is to be used, the cleaning processing liquid L in the cleaning tank 30 is replaced (step D).

On the other hand, when the wafer W has not been loaded into the processing apparatus, when the wafer W has just passed through the cleaning tank 30, or when the wafer W is
When is not used, the exchange of the cleaning treatment liquid L is not executed (step E). In the case where the cleaning processing liquid is not replaced, the cleaning tank 30 for performing the cleaning processing is drained, or the cleaning tank 30 for performing the cleaning processing is drained, and then the cleaning liquid for the processing container, for example, pure water is used. Alternatively, it is preferable to supply the cleaning treatment liquid L and keep the cleaning tank 30 in a cleaned state. In FIG. 5, pure water is supplied after draining.
Here is an example. Thus, after draining, the washing for the processing container is performed.
The reason for supplying the purified liquid (pure water or the cleaning processing liquid L) is that it is possible to immediately cope with the introduction of the wafer W to be processed next into the processing apparatus, and the cleaning processing can be performed efficiently. Because. When the replacement of the cleaning treatment liquid L is not performed, the state may be left as it is without draining.

By providing such conditions when replacing the cleaning liquid L, it is possible to prevent the freshly replaced cleaning liquid L from being left for a long time. The deterioration of the cleaning treatment liquid L can be prevented, and the unused cleaning treatment liquid L can be prevented from evaporating. Therefore, the amount of the cleaning treatment liquid L used can be reduced and the cleaning efficiency can be prevented from lowering.

In the above embodiment, the case where the cleaning processing and the rinsing processing are performed in different processing units has been described. However, the present invention can be applied to a so-called one-bath type cleaning processing apparatus in which the cleaning processing and the rinsing processing are performed in one processing unit.
An embodiment in which the present invention is applied to a one-bath type cleaning apparatus will be described below with reference to a schematic sectional view shown in FIG.
In this case, a major difference from the above embodiment is that a tank 50 and a pure water supply source 35 for temporarily storing the cleaning treatment liquid L are provided in the flow channel 60. The flow path 60
Is a circulation pipe 38A (partially shared with the cleaning processing liquid supply pipe 37A) used during the chemical processing, and a cleaning tank 30A.
And tank 50 to connect the chemical treatment to the rinsing treatment,
Alternatively, the drain pipes 31a and 40 and the cleaning processing liquid supply pipe 37A used at the time of switching from the rinsing processing to the chemical processing.
It is mainly composed of

A drain pipe 31a connected to the inner tank 31 and a drain pipe 40 connected to the lower part of the outer tank 32 are provided.
Are the drain valves 31b and 40a and the three-way valve 31 respectively.
They are connected to the tank 50 and the drainage side via c and 40b. Therefore, the cleaning liquid L in the cleaning tank 30 can be returned to the tank 50 or drained by appropriately switching the three-way valves 31c and 40b. The tank 50 is connected to the cleaning liquid supply pipe 37A via a supply pipe 50c and a three-way valve 50d. Thereby, the cleaning treatment liquid L returned and stored in the tank 50 can be resupplied into the cleaning tank 30.
The cleaning liquid supply pipe 37A is provided with a pump 61, a temperature control mechanism 62, a filter 63, and a check valve 39A in this order from the three-way valve 50d toward the cleaning liquid supply nozzle 34. On the other hand, the tank 50 is provided with a second chemical solution supply pipe 36e.
Is also connected to the chemical supply source 36 by the tank 5
When the amount of the cleaning treatment liquid L in 0 has decreased, the on-off valve 36f provided in the second chemical supply pipe 36e is opened to supply a predetermined amount from the chemical supply source 36 as appropriate. I can keep it. A drain pipe 50a provided with a tank drain valve 50b is connected to one side of the lower side of the tank 50.

The circulation line 38A is connected at one end to the lower side of the outer tank 32 and at a position different from the drain tube 40, and is provided with a cleaning solution via an on-off valve 64 and a three-way valve 35b. The path from the three-way valve 35b connected to the supply pipe 37A to the supply to the cleaning tank 30 again shares the cleaning treatment liquid supply pipe 37A. The cleaning treatment liquid supply pipe 37A is connected to a pure water supply source 35 via a pure water supply pipe 35a and a three-way valve 35b, and is supplied with a chemical liquid via a first chemical liquid supply pipe 36c and a three-way valve 36d. A source 36 is connected. Other structures are the same as those in FIG.
The same portions are denoted by the same reference numerals and description thereof will be omitted.

Next, an operation mode when applied to the one-bath type cleaning apparatus will be described. When performing the cleaning process, after closing the drain valves 31b and 40a, the valve 64 is opened, and the three-way valves 36d and 50d are switched to the flow direction of the cleaning solution supply pipe 37A. in this case,
The cleaning treatment liquid L flowing from the outer tank 32 to the circulation line 38A
Is flowed by a pump 61, temperature is controlled to a predetermined temperature by a temperature control mechanism 62, particles and the like are removed by a filter 63, and the cleaning solution supply nozzle 34
From the inner tank 31.

When shifting from the cleaning process to the rinsing process, the drain valves 31b and 40a are opened, and the three-way valves 31c and 40b are switched so as to flow into the tank 50. As a result, the cleaning liquid L in the inner tank 31 and the outer tank 32 is temporarily stored in the tank 50, and when the inner tank 31 is in the drained state, the drain valve 31b is closed and the three-way valve 40b is drained. If the three-way valve 35b is switched so that pure water can be supplied from the pure water supply source 35, the inner tank 31 is continuously supplied with pure water, and a rinsing process is performed. The pure water flowing from the inner tank 31 to the outer tank 32 is drained from the drain pipe 40 through the three-way valve 40b.

Thereafter, when the next wafer W to be processed is loaded and the cleaning process is performed, that is, when the rinsing process is shifted to the cleaning process, the drain valve 31b is opened, and
The three-way valve 31c is switched so that liquid can be drained. Further, the three-way valve 35b is switched to release the supply state from the pure water supply source 35. Thereby, the cleaning treatment liquid L in the tank 50 flows through the supply pipe 50c by the pump 61,
The temperature is adjusted by the temperature adjusting mechanism 62, particles and the like are removed by the filter 63, and the particles are again supplied from the cleaning liquid supply nozzle 34 into the inner tank 31. The supplied cleaning treatment liquid L overflows, flows into the outer tank 32, and again passes through the above-described circulation pipeline 38A. The circulation line 38
When the cleaning treatment liquid L flowing through A reaches the three-way valve 50d for the first time, the three-way valve 50d is switched to flow along the circulation pipeline.

Next, the case where the cleaning solution L is replaced will be described. In this case, the drain valves 31b, 40a, 5
0b is opened, and the three-way valves 31c and 40b are switched to the drainage direction. As a result, the cleaning treatment liquid L in the inner tank 31, the outer tank 32 and the tank 50 is drained. When necessary, the drain valves 31b, 40b, and 50b are closed, and the three-way valve 36d is switched to switch from the chemical supply source 36. The cleaning treatment liquid L can be supplied.

The other parts of the operation are the same as those of the embodiment shown in FIG.

In the above embodiment, the cleaning process of the semiconductor wafer has been described. However, it is needless to say that the present invention can be applied to, for example, an LCD substrate and the like, and can be used for other cleaning processes.

[0039]

As described above, according to the cleaning method and the cleaning system of the present invention, the time lag from the replacement of the cleaning solution to the next use is minimized, and the cleaning process just after the replacement is performed. Since the liquid does not need to be left for a long time, it is possible to prevent the unused cleaning processing liquid from deteriorating due to mixing of particles and the like, and it is possible to reduce the amount of the cleaning processing liquid that evaporates during the standing time as much as possible. . Therefore, it is possible to reduce the use amount of the cleaning treatment liquid and to prevent a decrease in the cleaning efficiency due to the deterioration of the cleaning treatment liquid.

[Brief description of the drawings]

FIG. 1 is a schematic plan view showing an example of a cleaning processing system according to the present invention.

FIG. 2 is a schematic cross-sectional view illustrating an example of a cleaning processing apparatus and a flow path of a cleaning processing liquid according to the present invention.

FIG. 3 is a schematic plan view showing a connection state between the cleaning system and a control system.

FIG. 4 is a flowchart showing each step of a cleaning processing method according to the present invention.

FIG. 5 is a flowchart showing a procedure for determining whether or not to execute a cleaning solution exchange according to the present invention.

FIG. 6 is a schematic sectional view showing another example of the cleaning apparatus and the flow path of the cleaning liquid according to the present invention.

[Explanation of symbols]

W Semiconductor wafer (object to be processed) L Cleaning treatment liquid 3 Processing unit 4 Interface unit 5 Loading unit 6 Unloading unit 17a First processing unit 18a Second processing unit 19a Third processing unit 23 Wafer transfer chuck (transfer unit) 24 CPU 25 Host computer 30 Cleaning tank (processing vessel) 31 Inner tank 31a Drain pipe 31b Drain valve 31c Three-way valve 32 Outer tank 34 Cleaning treatment liquid supply nozzle 35 Pure water supply source 35b Three-way valve 36 Chemical supply source 37, 37A Cleaning treatment Liquid supply pipe 38, 38A Circulation line 40 Drain pipe 40a Drain valve 40b Three-way valve 50 Tank 50a Drain pipe 50b Drain valve 50c Supply pipe 50d Three-way valve 60 Flow path

────────────────────────────────────────────────── ─── Continuation of the front page (56) References JP-A-8-102457 (JP, A) JP-A-6-252124 (JP, A) JP-A-10-262613 (JP, A) JP-A-10- 275796 (JP, A) (58) Fields surveyed (Int. Cl. ⁷ , DB name) H01L 21/304

Claims (4)

(57) [Claims] 1. A step of putting a target object into a carry-in part in a processing apparatus, and holding the target object by a transport means movably provided in the processing apparatus to perform liquid processing. A step of transporting the object to be processed, and a step of immersing the object to be processed in one or a plurality of processing containers provided in the processing unit and storing a cleaning liquid, and cleaning the object to be processed. Holding the processed object by a transporting means, and transporting the processed object to an unloading unit.In accordance with a processing time, the number of times of processing, and the like, based on a preset program, A step of periodically exchanging the cleaning solution in the processing container, and when the object is not loaded into the processing apparatus, or when the object is subjected to the cleaning process. When passing through a processing vessel that performs liquid exchange , or The object to be processed changes the cleaning solution
Before passing through the processing vessel to be processed,
When the equipment is not used , the cleaning process in the processing container is performed without replacing the cleaning solution even when it is time to replace it.
Either leave the liquid drained, or
After draining the cleaning solution in the processing container,
Supplying the liquid to keep the inside of the processing vessel washed,
Alternatively, it is time to replace the cleaning processing liquid, and the object to be processed is charged into the processing apparatus, or immediately before the processing object is charged, the cleaning processing liquid in the processing container is removed. A cleaning method characterized by being replaced. 2. The method according to claim 1, wherein when the replacement is not performed even when the cleaning processing liquid is replaced, the cleaning processing liquid in the processing container is circulated and supplied, and the cleaning liquid is replenished. Cleaning treatment method. 3. A loading section for loading a workpiece, and one or more processing vessels for immersing the workpiece in a stored cleaning solution and cleaning the workpiece are provided therein. A processing apparatus comprising: a processing unit; an unloading unit that unloads the object to be processed; and an interface unit that is located between the loading unit or the unloading unit and the processing unit and that transfers the object to be processed. A control means for controlling the cleaning processing solution in the processing container to be periodically replaced based on a preset program according to the processing time, the number of times of processing, and the like. when processed is not turned in the processing apparatus, or when the object to be processed is passing through the processing chamber to perform the exchange of the cleaning liquid, or the object to be punished
The body passes through the processing vessel that performs the change of the cleaning solution
Before, when the object does not use the processing container,
Even replacement time without replacing the cleaning liquid, the liquid processing
The cleaning treatment liquid in the above-mentioned processing container is drained.
Or, the cleaning treatment liquid in the treatment container for performing the liquid treatment
After draining, supply the cleaning solution for the processing container to
Keep the chamber clean or
Leave the state, a replacement time of the cleaning liquid, immediately before the workpiece is either put into the processing device, or is turned on, the control so as to replace the cleaning liquid in the processing vessel A cleaning processing system characterized by being formed as possible. 4. A loading section for loading a workpiece, and the workpiece is immersed in a stored cleaning treatment liquid.
One or a plurality of processing vessels for cleaning the processing object are disposed therein.
A processing unit to be installed, an unloading unit for unloading the object to be processed, and a position between the loading unit or the unloading unit and the processing unit.
Interface section for placing and receiving the object to be processed
Wherein the processing unit comprises: a processing container for performing the cleaning process and the rinsing process; and a circulating conduit for circulating the cleaning processing solution into the processing container.
And a cleaning solution supply pipe that shares a part of this circulation pipe
And a drain pipe connected to the processing container.
Flow path, and a three-way valve provided in the flow path to wash during the rinsing process.
Has a drain valve for tank that temporarily stores the cleaning solution
A drain and a pure water supply source, and the drain pipe is connected to the tank via a drain valve and a three-way valve.
Is connected to the drain and the drainage side, and the replacement time of the cleaning treatment liquid according to the treatment time, the number of treatments, etc.
Based on a preset program,
Drain the cleaning solution in the container and tank
Or, after draining, supply the cleaning liquid for the processing container.
Make sure that the inside of the processing vessel is
The three-way valve, drain valve and tap
A cleaning system comprising: a control unit that controls opening and closing of a drain valve for ink .