JP3146538B2 - Non-contact height measuring device - Google Patents
Non-contact height measuring deviceInfo
- Publication number
- JP3146538B2 JP3146538B2 JP19930391A JP19930391A JP3146538B2 JP 3146538 B2 JP3146538 B2 JP 3146538B2 JP 19930391 A JP19930391 A JP 19930391A JP 19930391 A JP19930391 A JP 19930391A JP 3146538 B2 JP3146538 B2 JP 3146538B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- reflected light
- photoelectric conversion
- optical path
- amount
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
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- Length Measuring Devices By Optical Means (AREA)
- Measurement Of Optical Distance (AREA)
Description
【０００１】[0001]
【産業上の利用分野】本発明は、測定対象物に微小ビー
ム光を照射し、その反射光を用いて測定対象物の高さを
測定することを特徴とする非接触高さ計測装置に関する
ものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a non-contact height measuring apparatus which irradiates a measuring object with a minute beam of light and measures the height of the measuring object using the reflected light. It is.
【０００２】[0002]
【従来の技術】近年、高さ計測には微小ビーム光を用い
た非接触方式がよく用いられている。以下に従来の技術
について説明する。図５は従来の非接触高さ計測装置の
原理を示すものである。図５において、１は微小ビーム
光を発生するための光源である。２は測定対象物３の載
置された基板１１上に微小ビーム光をスポット照射する
ための光学系である。４は測定対象物３からの垂直方向
への反射光を偏向するハーフミラーである。５は偏向さ
れた前記反射光を集光するためのレンズ系である。８は
レンズ系５を通過後の反射光の光量を検出する光電変換
素子である。７は光電変換素子８に照射される反射光を
制限するしぼりである。１０はレンズ移動アクチュエー
タで、レンズ系５を光軸方向に移動させて、光電変換素
子８に照射される光量を変化させるものである。2. Description of the Related Art In recent years, a non-contact method using minute beam light has been often used for height measurement. The conventional technique will be described below. FIG. 5 shows the principle of a conventional non-contact height measuring device. In FIG. 5 , reference numeral 1 denotes a light source for generating a minute light beam. Reference numeral 2 denotes an optical system for irradiating the substrate 11 on which the measurement object 3 is mounted with spot light of a minute beam. Reference numeral 4 denotes a half mirror that deflects reflected light from the measurement target 3 in the vertical direction. Reference numeral 5 denotes a lens system for collecting the deflected reflected light. Reference numeral 8 denotes a photoelectric conversion element that detects the amount of reflected light after passing through the lens system 5. Reference numeral 7 denotes an aperture for limiting reflected light emitted to the photoelectric conversion element 8. Reference numeral 10 denotes a lens movement actuator that moves the lens system 5 in the optical axis direction to change the amount of light irradiated on the photoelectric conversion element 8.
【０００３】以上のように構成された非接触高さ計測装
置について、以下にその動作を説明する。まず、測定対
象物３に光源１及び光学系２から微小ビーム光をスポッ
ト照射し、そのスポット照射位置からの垂直方向への反
射光をハーフミラー４によりレンズ系５の方向に偏向す
る。そして、レンズ系５により集光された反射光をしぼ
り７で制限して、その光量を光電変換素子８で測定す
る。この際、反射光の焦点位置の光量は最大となること
を利用し、光電変換素子８の出力が最大となるようにレ
ンズ系５をレンズ移動アクチュエータ１０により光軸方
向に移動し、その時のレンズ系５の位置を知ることで測
定対象物３の高さが計測できる。[0003] The operation of the non-contact height measuring device constructed as described above will be described below. First, the measuring object 3 is spot-irradiated with a minute beam light from the light source 1 and the optical system 2, and reflected light in the vertical direction from the spot irradiation position is deflected by the half mirror 4 toward the lens system 5. Then, the reflected light condensed by the lens system 5 is limited by the restrictor 7, and the amount of the light is measured by the photoelectric conversion element 8. At this time, the lens system 5 is moved in the optical axis direction by the lens moving actuator 10 so that the output of the photoelectric conversion element 8 is maximized by utilizing the fact that the amount of light at the focal position of the reflected light is maximized. Knowing the position of the system 5 allows the height of the measuring object 3 to be measured.
【０００４】[0004]
【発明が解決しようとする課題】しかしながら上記従来
の構成では、光電変換素子の出力が最大となるように、
レンズ系５をレンズ移動アクチュエータ１０により移動
させなければならないために、測定に時間を要してしま
う。さらに、光電変換素子８を１つしか用いないため
に、測定対象物の表面状態のむらによる反射光の光量分
布のばらつきにより光量の最大値が正しく計測できず、
測定誤差が生じるという問題点を有していた。However, in the above-described conventional configuration, the output of the photoelectric conversion element is maximized.
Since the lens system 5 has to be moved by the lens moving actuator 10, the measurement takes time. Further, since only one photoelectric conversion element 8 is used, the maximum value of the light amount cannot be measured correctly due to a variation in the light amount distribution of the reflected light due to uneven surface conditions of the measurement object.
There is a problem that a measurement error occurs.
【０００５】本発明は上記従来の問題点を解決するもの
で、測定対象物の高さを高精度，高速に測定する計測装
置を提供することを目的とする。An object of the present invention is to solve the above-mentioned conventional problems, and an object of the present invention is to provide a measuring device for measuring the height of an object to be measured with high accuracy and at high speed.
【０００６】[0006]
【課題を解決するための手段】上記課題を解決するため
に本発明の非接触高さ計測装置は、微小ビーム光を発生
する光源と、前記微小ビーム光を測定対象物上に集光し
照射する光学系と、前記測定対象物上の前記微小ビーム
光の照射位置からの反射光を集光するレンズ系と、前記
レンズ系により集光された前記反射光を２つの光路に分
光する分光手段と、前記分光手段により分光された一方
の反射光の収束する光を順次異なる方向に偏向するよう
光路長の異なる位置に配置され、前記分光後の反射光を
偏向すると同時にその光量を制限する同じ大きさのしぼ
りを備えた複数のしぼり手段と、前記各しぼり手段のし
ぼりを通過した光をそれぞれ受光し、その受光量に応じ
た電気的出力に変換する第一の光電変換手段と、前記分
光手段により分光された他方の反射光の拡大する光を順
次異なる方向に偏向するよう光路長の異なる位置に配置
され、前記分光後の反射光を偏向すると同時にその反射
光の光量を制限する同じ大きさのしぼりを備えた複数の
偏向手段と、前記偏向手段により偏向された光をそれぞ
れ受光し、受光量に応じた電気的出力に変換する第二の
光電変換手段とを有し、前記第一と第二の光電変換手段
の電気的出力の比較において前記測定対象物の高さを測
定するものである。Non-contact height measuring apparatus of the present invention to solve the above problems SUMMARY OF THE INVENTION comprises a light source for generating a fine beam, and focusing the minute light beam onto a measurement object irradiated An optical system to perform, and the microbeam on the object to be measured
A lens system for condensing reflected light from a light irradiation position,
The reflected light collected by the lens system is split into two optical paths.
A spectroscopic unit that emits light, and one of the spectroscopic components
To converge the reflected light of the
It is arranged at a position having a different optical path length, and reflects the reflected light after the spectral separation.
A grain of the same size that deflects and limits the amount of light at the same time
A plurality of squeezing means provided with a squeezing means,
Receives the light that has passed through the streamer, depending on the amount of light received
First photoelectric conversion means for converting the output into electrical output,
The reflected light that is split by the light
Next position at different optical path length to deflect in different directions
And deflects the reflected light after the spectral
Multiple apertures with the same size to limit the amount of light
Deflecting means, and light deflected by the deflecting means.
The second is to receive the light and convert it to an electrical output according to the amount of received light.
A photoelectric conversion means for measuring the height of the object to be measured by comparing the electrical outputs of the first and second photoelectric conversion means.
【０００７】[0007]
【作用】上記構成によれば、得られた各光電変換手段の
出力の累積値を利用して光路長を求めることで焦点距離
がわかる。そのため、レンズ系を移動させることなく高
速に測定対象物の高さを計測できる。さらに、複数の光
電変換手段から光量と光路長の関係を近似するため、測
定対象物の表面状態のむらによる反射光の光量分布のば
らつきのために一部の光電変換素子の出力に誤差が生じ
ても、影響を受けることが少なくなり、高精度に高さが
計測できる。According to the above arrangement, each of the obtained photoelectric conversion means can be used .
The focal length can be determined by obtaining the optical path length using the accumulated value of the output . Therefore, the height of the measurement object can be measured at high speed without moving the lens system. Further, to approximate the relationship between the light amount and the optical path length from the plurality of photoelectric conversion means, an error occurs in the output of some photoelectric conversion elements due to the variation in the light amount distribution of the reflected light due to uneven surface conditions of the measurement object. Is less affected, and the height can be measured with high accuracy.
【０００８】[0008]
【実施例】以下本発明の第１の実施例について、図面を
参照しながら説明する。図１は第１の実施例における非
接触高さ計測装置の概略図である。図１において１は微
小ビーム光を発生するための光源、２は前記微小ビーム
光を測定対象物３にスポット照射するための光学系、４
は測定対象物３のスポット照射位置からの垂直方向への
反射光を偏向するためのハーフミラー、５はハーフミラ
ー４により偏向された反射光を集光するためのレンズ
系、６はレンズ系５を通過後の反射光を第一および第二
の光路の２方向へ分光するためのビームスプリッタであ
る。９は反射光を偏向しかつ同一の絞り量に制限するた
めの絞り付き反射鏡であり、例えば図３に示すような、
それぞれしぼり部分の大きさの等しい穴あきミラーが用
いられる。８は各絞り付き反射鏡９で反射後または各絞
り付き反射鏡９のしぼりを通過後の反射光の光量を検出
するための光電変換素子である。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A first embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is a schematic diagram of a non-contact height measuring device according to the first embodiment. In FIG. 1 , reference numeral 1 denotes a light source for generating a minute light beam, 2 denotes an optical system for spot-irradiating the minute light beam onto a measurement target 3, 4.
Is a half mirror for deflecting the reflected light from the spot irradiation position of the measuring object 3 in the vertical direction from the spot irradiation position, 5 is a lens system for condensing the reflected light deflected by the half mirror 4, 6 is a lens system 5 Is a beam splitter for splitting the reflected light after passing through the first and second optical paths in two directions. Reference numeral 9 denotes a reflecting mirror with a diaphragm for deflecting the reflected light and limiting the amount of the diaphragm to the same diaphragm amount. For example, as shown in FIG.
A perforated mirror having the same size of the squeezed portion is used. Reference numeral 8 denotes a photoelectric conversion element for detecting the amount of reflected light after being reflected by each of the reflecting mirrors 9 with a stop or after passing through the apertures of the reflecting mirrors 9 with a stop.
【０００９】図中、第一の光路の焦点付近の反射光が収
束するＡ部では、絞り付き反射鏡９のしぼりを通過後の
光量を、第二の光路の焦点付近の反射光が拡大するＢ部
では、絞り付き反射鏡９による反射光の光量を測定でき
るように、絞り付き反射鏡９と光電変換素子８が配置さ
れている。この第一の光路のＡ部および第二の光路のＢ
部での絞り付き反射鏡９および光電変換素子８の配置に
ついて図２を用いてさらに詳しく説明する。まず、図２
（ａ）において、第一の光路のＡ部は焦点付近の反射光
が収束する光路であり、この光路上に絞り付き反射鏡９
A1を配置する。そして、絞り付き反射鏡９A1のしぼりを
通過した反射光を受光できるように光電変換素子８A1を
配置する。続いて、絞り付き反射鏡９A1により反射され
た反射光の光路上に絞り付き反射鏡９A2を配置し、絞り
付き反射鏡９A2のしぼりを通過した反射光を受光できる
ように光電変換素子８A2を配置する。同様にこの絞りつ
き反射鏡と光電変換素子の組合わせの配置をｎ回繰り返
し、ｎ番目の絞り付き反射鏡９Anを必ず焦点より後ろに
配置する。In the figure, in the portion A where the reflected light near the focal point of the first optical path converges, the amount of light after passing through the aperture of the reflecting mirror 9 with a diaphragm is enlarged by the reflected light near the focal point of the second optical path. In section B, the reflecting mirror 9 with a diaphragm and the photoelectric conversion element 8 are arranged so that the amount of light reflected by the reflecting mirror 9 with a diaphragm can be measured. Part A of the first optical path and B of the second optical path
The arrangement of the reflecting mirror 9 with a diaphragm and the photoelectric conversion element 8 in the section will be described in more detail with reference to FIG . First, FIG.
In (a) , the portion A of the first optical path is an optical path in which the reflected light near the focal point converges.
Place A1. Then, placing the photoelectric conversion elements 8A 1 to allow receiving the reflected light passing through the diaphragm aperture with reflector 9A 1. Subsequently, with throttle reflector 9A 1 aperture with reflector 9A 2 on the optical path of the reflected light reflected place by, with throttle reflector photoelectric conversion element as 9A 2 aperture can receive the reflected light passing through the placing 8A 2. Likewise the arrangement of the combination of the diaphragm with the reflector and the photoelectric conversion elements repeated n times, placed in the n-th behind the always focus the Reflective mirror 9A n aperture.
【００１０】また、図２（ｂ）において、第二の光路の
Ｂ部は焦点付近の反射光が拡大する光路であり、この光
路上では焦点位置よりも前に必ずなるように、絞り付き
反射鏡９B1を配置する。そして、絞り付き反射鏡９B1に
より反射された光を受光できるように光電変換素子８B1
を配置する。続いて、絞り付き反射鏡９B1のしぼりを通
過した反射光の光路上にしぼり付き反射鏡９B2を配置
し、絞り付き反射鏡９B2により反射された反射光を受光
できるように光電変換素子８B2を配置する。同様にこの
絞り付き反射鏡と光電変換素子の組合せの配置をｎ回繰
り返す。そして、絞り付き反射鏡９Bnのしぼりを通過し
た反射光を最後に受光する光電変換素子８Bn+1を配置す
る。In FIG. 2B, part B of the second optical path is an optical path in which the reflected light near the focal point expands. On this optical path, the reflected light with the aperture is always located before the focal position. placing a mirror 9B 1. The photoelectric conversion element 8B 1 is configured to receive the light reflected by the reflecting mirror 9B 1 with the stop.
Place. Subsequently, with throttle reflector 9B 1 of the aperture with reflector 9B 2 on the optical path of the reflected light which has passed through the diaphragm disposed, with throttle reflector 9B photoelectric conversion element so that it can receive the reflected light reflected by 2 placing 8B 2. Similarly, the arrangement of the combination of the reflecting mirror with the diaphragm and the photoelectric conversion element is repeated n times. Then, placing the photoelectric conversion element 8B n + 1 for receiving the reflected light passing through the diaphragm aperture with reflector 9B n last.
【００１１】以上のように構成された高さ計測装置につ
いて、光電変換素子８の出力値の処理方法について説明
をする。反射光の収束する第一の光路のＡ部では、絞り
付き反射鏡９のしぼりを通過後の光量を測定するため、
絞り付き反射鏡に照射される光像が反射鏡のしぼりより
小さくなり反射鏡面での反射がなくなると、それ以降に
位置する光電変換素子群の出力は０となる。この位置を
第一の光路のＡ部でｉ番目とする。同様に、第二の光路
のＢ部においても、絞り付き反射鏡９で偏向されず、光
電変換素子８の出力が０となるときの位置をｊ番目とす
る。第二の光路の反射光の拡大するＢ部においてｊ番目
より前の光電変換素子の出力値は無視して０とし、ｊ番
目以後の光電変換素子の出力値に対して補正を加える。
つまり、第一の光路のＡ部での光電変換素子の出力値の
合計Σ８A n を８Atotalとし、第二の光路のＢ部での光電
変換素子の出力値の合計Σ８Ｂ n を８Ｂtotalとし、第二
の光路のＢ部でのｋ番目（ｊ≦ｋ≦ｎ＋１）の光電変換
素子の出力値８Bkに次式の補正を加え８Bk’とし、補正
後のＢ部での出力値の合計Σ８Ｂ n` がＡ部での出力の合
計８Atotal（＝Σ８A n ）と等しくなるようにする。 A method of processing the output value of the photoelectric conversion element 8 in the height measuring device configured as described above will be described. In the portion A of the first optical path where the reflected light converges, the amount of light after passing through the aperture of the reflecting mirror 9 with a diaphragm is measured.
When the light image irradiated on the reflecting mirror with the stop is smaller than the aperture of the reflecting mirror and the reflection on the reflecting mirror surface is eliminated, the output of the photoelectric conversion element group located thereafter becomes zero. This position is defined as the i-th position in the portion A of the first optical path. Similarly, also in the portion B of the second optical path, the position when the output of the photoelectric conversion element 8 becomes 0 without being deflected by the reflecting mirror 9 with the stop is the j-th position. In the portion B where the reflected light of the second optical path expands, the output values of the photoelectric conversion elements before the j-th are ignored and set to 0, and the output values of the photoelectric conversion elements after the j-th are corrected.
That is, the output value of the photoelectric conversion element in the portion A of the first optical path is
The total Shiguma8A n and 8Atotal, photoelectric at B of the second optical path
The total Shiguma8B n output values of the conversion element and 8Btotal, second k-th in the B portion of the optical path (j ≦ k ≦ n + 1 ) correcting the added 8B k of the following equation to output values 8B k photoelectric conversion element ' And amend
The sum of the output values in the subsequent B section, Σ8Bn`, is the sum of the outputs in the A section.
Total 8Atotal (= Σ8A n) becomes equal to a.
【００１２】８Bｋ’＝８Bｋ×（８Atotal/８Ｂtotal）図４ は光電変換素子の出力値と位置の関係を示したグラ
フである。この図について説明をする。横軸には、第一
の光路のＡ部に位置する光電変換素子８Alから８Ai-1に
対応する測定対象物３からの光路長（ｌAlからｌAi-1）
と、第二の光路Ｂ部に位置する光電変換素子８Bjから８
Bn+1に対応する光路長（ｌBjからｌBn+1）とをとってい
る。縦軸には、横軸の第一の光路の光路長に対応する部
分では、光電変換素子の出力８Anのｋ番目（１≦ｋ＜ｉ
−１）までの累積値Σ８Aｋをとっている。そして、横
軸の第二の光路長に対応する部分では、第一の光路Ａ部
における光電変換素子７の出力の合計値８Atotalから、
光電変換素子８Bk’のｋ番目（ｊ≦ｋ≦ｎ＋１）までの
累積値Σ８Bk’を引いた値（８Atotal−Σ８Bk’）をと
っている。 8Bk ′ = 8Bk × (8Atotal / 8Btotal ) FIG. 4 is a graph showing the relationship between the output value of the photoelectric conversion element and the position. This figure will be described. The horizontal axis, the optical path length from the object to be measured 3 corresponding photoelectric conversion element 8A l located A portion of the first optical path 8A i-1 (lA i- 1 from lA l)
And the photoelectric conversion elements 8Bj to 8 located in the second optical path B portion.
Corresponding optical path length B n + 1 is taken and (lB n + 1 from LBJ). The vertical axis, in a portion corresponding to the first optical path length of the optical path of the horizontal axis, k th output 8A n of the photoelectric conversion element (1 ≦ k <i
The accumulated value Σ8 Ak up to -1) is taken. Then, in the portion corresponding to the second optical path length on the horizontal axis, the total value 8Atotal of the outputs of the photoelectric conversion elements 7 in the first optical path A portion is calculated as
The value obtained by subtracting the accumulated value Σ8Bk ′ of the photoelectric conversion element 8Bk ′ up to the k-th (j ≦ k ≦ n + 1) is (8Atotal−Σ8Bk ′).
【００１３】これらの各測定点について、例えば最小自
乗法などで近似して、光路長と光量の関係を近似曲線で
表している。この近似曲線から、縦軸の光電変換素子出
力の累積値（光量）の最大値８maxとなる光路長ｌを求
める。この光路長が反射光の焦点距離となり、あらかじ
め設定しておいた光路長と測定対象物の高さとの関係か
ら測定対象物の高さを知ることができる。Each of these measurement points is approximated by, for example, the least square method, and the relationship between the optical path length and the light amount is represented by an approximate curve. From this approximate curve, the optical path length l at which the maximum value 8max of the cumulative value (light amount) of the photoelectric conversion element outputs on the vertical axis is obtained. This optical path length becomes the focal length of the reflected light, and the height of the measurement object can be known from the relationship between the optical path length and the height of the measurement object set in advance.
【００１４】以上のように本実施例によれば、反射光の
光路上に複数の絞り付き反射鏡と光電変換素子を配置し
て光量を測定し、各測定点間を補間して光量が最大とな
る光路長を求めるため、レンズ系をアクチュエータ等で
移動させて焦点を検出する必要がなく、高速で高さを測
定できる。また、光電変換素子を複数個用いて、光量と
光路長の関係を近似しているため、測定対象物の表面状
態のむらによる反射光の光量分布のばらつきの影響が少
なくなり測定精度が向上する。As described above, according to this embodiment, a plurality of reflecting mirrors with a stop and a photoelectric conversion element are arranged on the optical path of the reflected light to measure the light amount, and the maximum light amount is obtained by interpolating between the measurement points. Since it is not necessary to detect the focal point by moving the lens system with an actuator or the like, the height can be measured at high speed. In addition, since the relationship between the light amount and the optical path length is approximated by using a plurality of photoelectric conversion elements, the influence of the variation in the light amount distribution of the reflected light due to the unevenness of the surface state of the measurement object is reduced, and the measurement accuracy is improved.
【００１５】なお、本実施例ではビームスプリッタ６の
前にレンズ系５を配置しているが、ビームスプリッタ６
の後にレンズ系５を配置しても差し支えないし、測定対
象物３とハーフミラー４の間にレンズ系５を配置しても
差し支えない。また、ハーフミラー４の代わりに穴あき
ミラーを用いても差し支えないことは言うまでもない。In this embodiment, the lens system 5 is arranged before the beam splitter 6, but the beam splitter 6
The lens system 5 may be arranged after the above, or the lens system 5 may be arranged between the measurement object 3 and the half mirror 4. Needless to say, a perforated mirror may be used instead of the half mirror 4.
【００１６】[0016]
【発明の効果】以上のように本発明によれば、測定対象
物からの反射光の光路長が互いに異なる位置に複数の光
電変換素子を配置し、光電変換素子の出力から反射光の
光量と光路長との関係を近似して反射光の焦点位置を調
べることで、測定対象物の高さを高速に測定することが
できる優れた非接触高さ計測装置を実現することができ
る。さらに、測定対象物の表面状態のむらによる反射光
の光量分布のばらつきのために一部の光電変換素子の出
力に誤差が生じても、影響を受けることが少なくなり、
高精度に計測することができる。As described above, according to the present invention, a plurality of photoelectric conversion elements are arranged at positions where the optical path lengths of reflected light from an object to be measured are different from each other, and the amount of reflected light and the amount of reflected light are determined based on the output of the photoelectric conversion elements. By examining the focal position of the reflected light by approximating the relationship with the optical path length, it is possible to realize an excellent non-contact height measuring device capable of measuring the height of the measuring object at high speed. Furthermore, even if an error occurs in the output of some photoelectric conversion elements due to variations in the distribution of the amount of reflected light due to unevenness in the surface state of the measurement target, the influence is reduced,
It can measure with high accuracy.
【図１】本発明の第１の実施例における非接触高さ計測
装置の構成図FIG. 1 is a configuration diagram of a non-contact height measuring device according to a first embodiment of the present invention.
【図２】（ａ）第一の光路のＡ部における絞り付き反射
鏡と光電変換素子の配置図 （ｂ）第二の光路のＢ部における絞り付き反射鏡と光電
変換素子の配置図 FIG. 2 (a) Reflection with a stop in section A of the first optical path
Arrangement diagram of mirror and photoelectric conversion element (b) Reflector with diaphragm and photoelectric converter in portion B of second optical path
Conversion element layout
【図３】同本実施例における絞り付き反射鏡の斜視図 FIG. 3 is a perspective view of a reflecting mirror with a stop in the embodiment.
【図４】同実施例における光電変換素子出力と光路長と
の関係図 FIG. 4 shows the output of the photoelectric conversion element and the optical path length in the embodiment .
Relationship diagram
【図５】従来の非接触高さ計測装置の構成図 FIG. 5 is a configuration diagram of a conventional non-contact height measuring device.
１ 光源 ２ 光学系 ３ 測定対象物 ４ ハーフミラー ５ レンズ系 ６ ビームスプリッタ ７ 絞り ８ 光電変換素子 ９ 絞り付き反射鏡 １０ レンズ移動アクチュエーター DESCRIPTION OF SYMBOLS 1 Light source 2 Optical system 3 Object to be measured 4 Half mirror 5 Lens system 6 Beam splitter 7 Aperture 8 Photoelectric conversion element 9 Reflector with a diaphragm 10 Lens movement actuator
───────────────────────────────────────────────────── フロントページの続き (72)発明者 木村 知博 香川県高松市寿町２丁目２番10号 松下 寿電子工業株式会社内 (72)発明者 奥田 英二 香川県高松市寿町２丁目２番10号 松下 寿電子工業株式会社内 (56)参考文献 特開 昭49−134354（ＪＰ，Ａ) (58)調査した分野(Int.Cl.7，ＤＢ名) G01B 11/00 - 11/30 102 G01C 3/00 - 3/32 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Tomohiro Kimura 2-2-1-10 Kotobukicho, Takamatsu-shi, Kagawa Inside Matsushita Kotobuki Electronic Industries Co., Ltd. (72) Eiji Okuda 2-2-2 Kotobukicho, Takamatsu-shi, Kagawa No. 10 Matsushita Hisashi Electronics Co., Ltd. (56) References JP-A-49-134354 (JP, A) (58) Fields investigated (Int. Cl. 7 , DB name) G01B 11/00-11/30 102 G01C 3/00-3/32
Claims (2)
系と、 前記測定対象物上の前記微小ビーム光の照射位置からの
反射光を集光するレンズ系と、 前記レンズ系により集光された前記反射光を２つの光路
に分光する分光手段と、 前記分光手段により分光された一方の反射光の収束する
光を順次異なる方向に偏向するよう光路長の異なる位置
に配置され、前記分光後の反射光を偏向すると同時にそ
の光量を制限する同じ大きさのしぼりを備えた複数のし
ぼり手段と、 前記各しぼり手段のしぼりを通過した光をそれぞれ受光
し、その受光量に応じた電気的出力に変換する第一の光
電変換手段と、 前記分光手段により分光された他方の反射光の拡大する
光を順次異なる方向に偏向するよう光路長の異なる位置
に配置され、前記分光後の反射光を偏向すると同時にそ
の反射光の光量を制限する同じ大きさのしぼりを備えた
複数の偏向手段と、 前記偏向手段により偏向された光をそれぞれ受光し、受
光量に応じた電気的出力に変換する第二の光電変換手段
とを有し、 前記第一と第二の光電変換手段の電気的出力の比較にお
いて前記測定対象物の高さを測定することを特徴とする
非接触高さ計測装置。A light source for generating a minute beam light; an optical system for condensing and irradiating the minute beam light on a measuring object; and a reflected light from an irradiation position of the minute beam light on the measuring object. A lens system for condensing the reflected light, a spectroscopic unit for dispersing the reflected light condensed by the lens system into two optical paths, and sequentially converging one of the reflected lights separated by the spectroscopic unit in different directions. Arranged at different positions of the optical path length to deflect, a plurality of squeezing means having the same size of squeezing means for deflecting the reflected light after the spectroscopy and simultaneously limiting the amount of light, and passed the squeezing means of the respective squeezing means. First photoelectric conversion means for receiving light respectively and converting the light into an electrical output corresponding to the amount of light received; and an optical path for sequentially deflecting the enlarged light of the other reflected light split by the splitting means in different directions. Long A plurality of deflecting units arranged at different positions and having the same size as the deflecting unit that deflects the reflected light after the spectroscopy and simultaneously limits the amount of the reflected light, respectively receives the light deflected by the deflecting unit. And a second photoelectric conversion unit that converts the electric output into an electric output according to the amount of received light, and measures the height of the object to be measured in comparing the electric outputs of the first and second photoelectric conversion units. Non-contact height measuring device characterized by the above-mentioned.
射位置からの反射光を分光手段により分光した後に、分
光後の反射光をレンズ系により集光するようにしたこと
を特徴とする請求項２に記載の非接触高さ計測装置。2. The method according to claim 1, wherein the reflected light from the irradiation position of the minute beam light on the object to be measured is spectrally separated by spectral means, and then the reflected light after spectral separation is condensed by a lens system. The non-contact height measuring device according to claim 2.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19930391A JP3146538B2 (en) | 1991-08-08 | 1991-08-08 | Non-contact height measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19930391A JP3146538B2 (en) | 1991-08-08 | 1991-08-08 | Non-contact height measuring device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0540035A JPH0540035A (en) | 1993-02-19 |
| JP3146538B2 true JP3146538B2 (en) | 2001-03-19 |
Family
ID=16405561
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19930391A Expired - Fee Related JP3146538B2 (en) | 1991-08-08 | 1991-08-08 | Non-contact height measuring device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3146538B2 (en) |
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