JP3133735B2 - Rotary coating device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for applying a coating solution such as a photoresist solution to a surface of a substrate such as a glass substrate for a liquid crystal display panel, a semiconductor wafer, and a mask substrate for a semiconductor manufacturing apparatus by utilizing centrifugal force. Rotary coating apparatus having a rotating table for rotating the substrate while horizontally supporting the substrate for coating in a thin film form, and a coating liquid supply means for supplying a coating liquid to the upper surface of the substrate supported on the rotating table. About.

[0002]

[0003]

2. Description of the Related Art In a rotary coating apparatus of this type, a rotary table for horizontally supporting and rotating a substrate, a lid for closing the rotary table, a case having an upper opening surrounding the rotary table, and an upper surface of the case A lid for closing the opening; the lid for closing the case is fixedly supported so as not to rotate; and the lid for closing the turntable is rotatably supported by bearings.

[0004]

In the case of the above-mentioned prior art, in order to prevent the coating liquid recovered from the coating processing space by the turntable and collected in the case from being mist-like and scattered outside. The lid that closes the top opening of the case is configured to maintain airtightness inside the case. However, in such a configuration, the mist-like application liquid is confined in the case, and when the cover of the case or the turntable is opened in order to take in and out of the substrate, the mist-like coating liquid is used. May cause a problem that the coating liquid of the above adheres to the substrate. In the above prior art, even if the inside of the case is evacuated from the exhaust port, the mist-like application liquid cannot be effectively discharged from the case because the case is hermetically closed by the lid.

[0005] The present invention has been made in view of such circumstances, and can effectively exhaust the inside of the case, and can effectively prevent the mist-like coating solution from adhering to the substrate. An object of the present invention is to provide a rotary coating apparatus capable of performing coating processing without contamination efficiently.

[0006]

SUMMARY OF THE INVENTION The structure and effect of the present invention
With reference to the reference numerals in the drawings based on the embodiments described in detail below.
Will be explained. [Airflow passage structure] In this configuration, the airflow passage structure was attached to the upper part of the waste liquid collecting case 5.
Close the opening for loading and unloading the substrate at the top of the cylindrical cover 15
The fixed support member 16 serving as a binding member is
16a, the lower support plate 16b, and the vertical member 16
d and a horizontal member 16e. Upper support plate 1
6a is the shape shown in the plan view of FIG.
16b has the shape shown in the plan view of FIG.
The vertical member 16d is shown in cross section in FIG.
It has the shape of Then, the upper support plate 16
The upper space and the lower space of a are closed by the vertical member 16d.
Except where indicated, as shown in FIG.
It communicates through the side of the rate 16a. That is,
A fixed support inside the cylindrical cover 15 and the waste liquid collecting case 5
A space below the holding member 16 where the turntable 2 is provided.
And the space above the fixed support member 16, that is, the waste liquid collecting case.
A fixed support member 16 is provided between the space 5 and the space outside the space 5.
Thus, an airflow passage is formed as shown by arrows in FIGS.
You. [Effect of Air Flow Path Structure] With this configuration, the fixing support member 16
With the cylindrical cover 15 and the waste liquid collecting case 5 closed.
However, the air flow shown by the arrows in FIGS. 1 and 5 can be formed.
When the coating liquid in the cylindrical cover 15 and the waste liquid collecting case 5
The coating liquid mist in the shape is smoothly discharged from the exhaust port 14.
Wear. Therefore, the inside of the cylindrical cover 15 and the waste liquid collecting case 5
Exhaust can be performed effectively, and the atomized coating liquid
Coating treatment that can effectively prevent adhesion and is free of contamination
Can be performed efficiently. Moreover, the exhaust port 14 and the turntable 2
A member 5a is provided between the rotating base 2 and the entire periphery of the turntable 2.
The exhaust air can be suctioned uniformly over the entire area.
The substantial exhaust port viewed from the turntable 2 is below the member 5a.
The gap 5b between the end and the waste liquid collecting case 5
The exhaust port 14 and the gap 5b are provided sufficiently below the turntable 2.
This enables the inside of the cylindrical cover 15 and the waste liquid collection case 5 to be effective.
Can be exhausted. Further, the waste liquid collecting case 5 is
A member 5c is provided between the upper side of the peripheral plate and the ring plate 10.
It has narrowed, flow from the rotary table 2 in the waste collection case within 5
Corner where the mist of the applied coating solution is placed on the upper surface of the turntable 2
It is difficult to adhere to the upper surface of the mold substrate 1,
To increase the flow velocity of the airflow around
This ensures smooth re-adhesion to the square substrate 1
You. Further, the air flow passage in the fixed support member 16 rotates
An upper support plate above the vicinity of the axis P of the rotation center of the table 2
The center of rotation of the turntable 2 so as to pass the side of the rate 16a
Since it is provided in the vicinity, from the rotation center side of the turntable 2
Entering the space inside the cylindrical cover 15 and in the direction of the peripheral side of the turntable 2
Air flowing downward from the peripheral end of the turntable 2
To form a flow, thereby reducing the entire space in the cylindrical cover 15.
Exhaust can be performed more smoothly and efficiently, especially than the turntable 2.
The upper space can be smoothly exhausted, and the upper support plate 4 and the upper
When the rotating plate 3 is lifted,
It is particularly effective in preventing the adhesion of a strike.

[Non-Contact Structure] As described in the embodiment, an electric motor
Activating the motor 7 to turn the turntable 2, upper support plate 4, and upper turn plate
3 and the rectangular substrate 1 are horizontally rotated integrally. This and
As is clear from the drawings of FIGS.
2, upper support plate 4, upper rotating plate 3, mounting member 30, annular
The plate 31 is in a non-contact state with the fixed support member 16.
The turntable 2, the upper support plate 4, and the upper turn plate 3 are fixed.
It can rotate freely regardless of the fixed support member 16. [Effect of Non-Contact Structure] The upper support plate 4 and the upper rotating plate 3 which are larger than the rectangular substrate 1
As compared to a case where the bearings are rotatably supported using bearings
In addition, the number of sliding parts is reduced, so the life and
It is advantageous in the amount of
This eliminates the need for lining, which is advantageous in cost. Ma
Also, when the bearing is supported rotatably by bearings,
Bearings for supporting the upper support plate 4 and the upper rotary plate 3
Exactly coincides with the rotation axis P of the turntable 2
Without it, smooth rotation could not be obtained.
Does not require such strictness, and the turntable 2 etc.
Spin coating by rotation can be realized at low cost.

[Relative Lifting Structure] The lower support plate 16 b of the fixed support member 16 is attached
Upper support plate 4 joined together by member 30
And at the height between the annular plate 31 and the mounting portion
It is in a state of not contacting the material 30. And
Cylindrical cover 1 mounted on top of waste liquid recovery case 5
5 Fixed support member 1 for closing the upper substrate opening
6 and the upper support plate 4 move in the vertical direction without contact
Combined where possible. This allows the fixed support
The upper support plate 4 and the upper rotating plate 3 are suspended by the material 16 and
When removing the fixed support member 16
The lower support plate 16b of the fixed support member 16 is
Until the lower surface of the annular plate 31 of the holding plate 4 is lifted,
The part support plate 4 and the upper rotating plate 3 are connected to the turntable 2
It is. And the lower support plate 16b supports the upper part.
Abutting against the lower surface of the annular plate 31 of the plate 4
Then, the upper support plate 4 and the upper rotating plate 3 are taken from the turntable 2.
Removed. Conversely, the cylindrical cover 15 is fixed by the fixed support member 16.
Is closed, and the upper support plate 4 and the upper rotating plate 3 are connected to the turntable 2.
When lowering them to perform
And the fixed support member 16 in a state where the upper rotating plate 3 is suspended
By descending, first, the upper supporting plate 4 and the upper rotating plate 3
Is coupled to the turntable 2 by its own weight. And then
The fixed support member 16 continues to descend, and finally the lower support
Before the rate 16b hits the upper support plate 4, it is shown in FIG.
And the fixed support member 16 is placed on the cylindrical cover 15.
The opening is closed on the surface, and the fixed support member 16 stops.
You. At this time, the upper support plate 4, the mounting member 30, and the ring
Plate 31 is not in contact with the lower support plate 16b.
It becomes rotatable in the contact state. [Effect of Relative Lifting Structure] The fixed support member 16, the upper support plate 4, and the upper rotary plate 3
Can be relatively moved up and down, so that
In the above embodiment, the upper support plate 4 and the upper rotating plate 3) are
Also reaches the lower position (that is, the state where it is connected to the turntable 2).
(The fixed support member 16 in the above embodiment)
Can continue to descend, the upper support plate 4 and the upper
The rolling plate 3 is fixed to the turntable 2, and the fixed support member 16 is
The bars 15 are securely connected to each other.
As is well known in the art, the upper support plate 4 and the upper rotating plate are fixed.
If the vertical position with the fixed support member 16 is fixed
For example, the upper support plate 4 and the upper rotating plate and the fixed support member
16 distance, turntable 2, waste liquid recovery case 5, cylindrical cover
Extremely high dimensional accuracy and assembly accuracy of members such as 15
And the cost is very high,
In addition, dimensions may vary due to various factors such as temperature change and aging.
In the event of any deviation, turntable 2 and waste liquid recovery
The closed state of either of the case 5 and the cylindrical cover 15 is not correct.
It will be perfect, and it will cause
Loss of airtightness, vibration and particle generation
Problems arise. In this configuration, the upper support plate 4 and the upper rotation
The distance between the plate and the fixed support member 16, the turntable 2, and the waste liquid collecting case
The dimensional accuracy of the cover 5, the cylindrical cover 15, etc.
At least, the turntable 2 and the cylindrical cover 15 of the waste liquid collecting case 5
Is a simple structure that can reliably block both
Cost is low, and various requirements such as temperature change and aging change
The turntable 2 and waste liquid recovery even if some dimensional changes occur due to
No adverse effect on the closed state of the case 5 with the cylindrical cover 15
Does not occur. This means that, as described above,
In the state where 4 is connected to the turntable 2, the upper support plate 4
The rolling plate 3, the mounting member 30, and the annular plate 31 are fixed support portions.
Combined with the non-contact with the material 16, the
And reliable operation at low cost.

[Rotating Direction Positioning Structure] The rectangular substrate 1 is placed on a turntable 2 which is a substrate supporting member.
When performing the above, the upper rotating plate
Remove 3 upward. It is clear from the drawings such as FIGS.
The upper support plate 4 to which the upper rotary plate 3 is connected
Are connected so as to extend upward from the upper support plate 4.
Annular play extending horizontally through the mounting member 30
Connected to the port 31. The annular plate 31 has a cylindrical body 3
2 are provided. On the other hand, by going up and down,
The fixed support member 16, which is an advancing / retreating member that advances and retreats,
The lower support plate is positioned below the annular plate 31.
A rate 16b is provided, and the lower support plate 16b is
An engagement protrusion 29 is provided on the upper surface of the inner peripheral surface side portion 16c.
ing. The engagement protrusion 29 is configured to be able to engage with the cylindrical body 32.
You. These mounting member 30, annular plate 31, cylindrical body 3
2, lower side support plate 16b, inner peripheral surface side 16c,
An engagement portion is formed by the engagement protrusion 29, and the engagement protrusion is
The positioning mechanism is formed by the protrusion 29 by the uneven coupling.
You. When removing the upper rotating plate 3 upward, the fixed support member 1
6 rises and the lower support plate 16b
The annular plate 31 is supported from below by the peripheral surface side portion 16c.
Be held. Also, at this time, the
The lower support plate 1 of the fixed support member 16 is
The engagement protrusion 29 provided on the inner peripheral surface side portion 16c of the inner ring 6b is fitted.
By inserting the two, the two are combined and the annular plate 31 is lowered.
Supported by people. Thereby, the upper rotating plate 3 and the upper
The part support plate 4 does not rotate with respect to the fixed support member 16.
To a predetermined position in the circumferential direction to prevent relative rotation.
It is suspended and supported, detaches from the turntable 2 and rises. Times
When connecting the upper rotating plate 3 and the upper support plate 4 to the turntable 2
The fixed support member 16 descends, and the upper rotating plate is
3. The upper support plate 4 is placed and connected by its own weight. And
When the fixed support member 16 is further lowered, the lower support
The support of the annular plate 31 by the plate 16b is released.
And the engagement projection 29 is disengaged from the cylindrical body 32 and
Is released from the lower side of the annular plate 31
Is released. Thus, the upper rotating plate 3, the upper support
The holding plate 4 is rotatable integrally with the turntable 2. [Effects of Rotational Direction Positioning Structure] Coating for forming a coating processing space as in the known art
Rotationally supports processing space forming members using bearings
Just put the square substrate 1 in and out of the turntable 2
To raise the coating processing space forming member,
When the connection with the
Rotate as desired, then rotate the coating processing space forming member
When trying to connect to the platform 2, it is connected to a certain position
Cannot be connected, and cannot be securely connected.
There is it. However, in this configuration, the upper rotating plate 3 and the upper support
The coating processing space forming member including the holding plate 4 is raised and
Positioning in the circumferential direction when the connection with the turntable 2 is released
And is supported so that it cannot rotate.
Can maintain a constant positional relationship with the
Can be combined and surely combined.
Accordingly, in the present configuration, the ring plate 10 of the turntable 2 is
Detachable attachment between the upper support plate 4 and the upper support plate 4 always at a fixed position
It can be done reliably in a relationship. [Rotating platform cleaning structure] In each embodiment, the substrate is rotated while being horizontally supported.
Coating on top of turntable and substrate supported on this turntable
Rotary coating apparatus having a coating liquid supply means for supplying a liquid
In the rotation, the cleaning liquid is sprayed toward the upper surface of the turntable.
The system was provided with a stage cleaning means. [Effects of the rotating table cleaning structure] After performing predetermined spin coating on the substrate, there is no substrate
And then spray the cleaning liquid onto the top of the turntable to
Wash and remove the coating liquid that has scattered and adhered to the upper surface of the turntable.
A predetermined rotation with respect to the substrate.
Wash and remove coating liquid adhering to the upper surface of the turntable due to coating
From the surface of the turntable.
Particles and re-scattered mist
Substrate contamination and avoid degradation of substrate processing quality
it can.

[0010]

Next, embodiments of the present invention will be described in detail with reference to the drawings.

FIG. 1 shows a first embodiment of a rotary coating apparatus according to the present invention.
FIG. 1 is a longitudinal sectional front view showing a schematic configuration of the entire embodiment, in which a turntable 2 on which a rectangular substrate 1 is mounted is provided so as to be horizontally rotatable around a vertical axis P, and above the turntable 2, An upper rotating plate 3 is provided in parallel with the rotating table 2, and the upper rotating plate 3 is integrally rotatably attached to the rotating table 2 via an upper supporting plate 4, and a lower portion and a peripheral portion of these rotating members are rotated. A waste liquid recovery case 5 is provided so as to surround it from the outside, and an electric motor 7 as a drive source is connected to the turntable 2 via an output shaft 6 as a vertical rotation shaft.

The turntable 2 is configured as a disk having an outer shape sufficiently larger than the outer shape of the rectangular substrate 1, and the rectangular substrate 1 is horizontally mounted on a large number of substrate support pins 8. To be mounted and supported. Although not shown, a pair of positioning pins are provided on each of the four corners of the rectangular substrate 1 on the turntable 2, and the rectangular substrate 1 is horizontally rotated integrally with the turntable 2 by these positioning pins. It is supposed to be.

Further, on the outer peripheral upper surface of the turntable 2,
Spacer ring 9 and ring plate 10 having the same outer diameter as
Are connected at multiple locations to concentric circles,
The upper support plate 4 is provided on the ring plate 10 with the knob bolt 1.
The substrate 1 is detachably attached via the base plate 1, and the substrate 1 can be taken in and out from the central opening of the ring plate 10 by removing the upper support plate 4.

The upper rotating plate 3 is formed as a disk having a larger diameter than the outer shape of the substrate 1, and a collar 1 is provided on the lower surface of the upper supporting plate 4.
2 are connected by bolts. The bottom of the waste liquid recovery case 5 is narrowed down, and a waste liquid discharge port 13 is formed at a lower end thereof, and an exhaust port 14 for discharging a solvent gas or a coating liquid mist evaporated from the coating liquid is formed at a plurality of locations in the circumferential direction. ing.

A cylindrical cover 15 is mounted on the upper part of the waste liquid collecting case 5, and a fixed support member 16 is detachably mounted on the cylindrical cover 15.

As shown in a partially cutaway enlarged front view of the main part of FIG. 2, a plan view of the main part of FIGS. 3 and 4, and a side view of the main part of FIG. A first air cylinder 20 as a drive opening / closing mechanism is attached to an upper support plate 16a of the fixed support member 16 at a position vertically above the opening 19, and a cylinder rod of the first air cylinder 20 is formed. A block 21 is attached to the tip of 20a, and a bottomed cylindrical lid 17 is suspended and held on the block 21 so as to be able to move up and down and relatively rotate.

The first magnet 2 is provided on the lower surface of the block 21.
On the other hand, a second magnet 23 having the same polarity as the first magnet 22 is provided on the bottom surface of the lid 17, and the block 21 is disengaged from the lid 17 while the lid 17 is displaced to the closed position. When in the contact state, the lid 17 can be maintained in the closed position by the repulsive force.

Therefore, the shortening of the first air cylinder 20 causes the lid 17 to be displaced upward to the open position above the opening 19, while the extension of the first air cylinder 20 causes
The lid 17 is displaced to a closed position in which the lid 17 is lowered to fit into the opening 19, and only the lid 17 can rotate integrally with the upper rotating plate 3 while closing the opening 19.

A second air cylinder 24 rotatable within a range of 90 ° around a vertical axis is provided on a lateral side of the first air cylinder 20 of the upper support plate 16a. A spline shaft 25 is connected to a cylinder rod 24a of the air cylinder 24. A spline cylinder 26 is attached to the spline shaft 25 so that it can only move up and down, and a rotating cylinder 27 is attached to the spline cylinder 26 so that it can rotate only. Spline cylinder 26
The washing nozzle 18 is integrally attached to the
The rotary cylinder 27 is connected to a cylinder rod 28a of a third air cylinder 28 provided on the upper side support plate 16a on the lateral side and below the second air cylinder 24. Although not shown, the cleaning nozzle 18 is connected to a pipe connected to the cleaning liquid pumping mechanism. With the above-described configuration, a turntable cleaning unit that jets the cleaning liquid toward the upper surface of the turntable 2 is configured.

With the above configuration, in the non-cleaning state in which the lid 17 is in the closed position, the cleaning nozzle 18 is positioned at the non-cleaning position which is displaced from above the opening 19.
Is in the open position, the second air cylinder 2
After rotating by 4 to position the cleaning nozzle 18 above the opening 19, the third air cylinder 28 is extended to lower the cleaning nozzle 18, and from the outlet 18 a toward the upper surface of the turntable 2. The cleaning liquid can be displaced to a cleaning position where the cleaning liquid is ejected. A structure including second and third air cylinders 24 and 28 for drivingly displacing the cleaning nozzle 18 between a cleaning position and a non-cleaning position is referred to as a driving mechanism.

Lower supporting plate 1 of fixed supporting member 16
6b is formed in an annular shape, and at each of four predetermined circumferential positions on the upper surface close to the inner peripheral surface side, a mountain-shaped engaging projection 29 is provided, while being located above the lower support plate 18b. As shown in FIG.
The annular plate 31 is attached via
At each of four predetermined positions in the circumferential direction of the annular plate 31, there are provided cylindrical bodies 32 into which the engaging projections 29 are fitted. When the upper rotary plate 3 is attached or detached, the engaging projections 29. Are fixed to the fixed support member 16.
It is configured to be able to hang.

With the above structure, first, at the time of the coating treatment, the fixed support member 16 is removed from the cylindrical cover 15 and the upper support plate 4 is removed from the turntable 2, and the upper support plate 4 is suspended by the fixed support member 16. Is removed upward, and the rectangular substrate 1 is mounted on the substrate support pins 8... Of the turntable 2 in a predetermined posture.

Next, a coating liquid supply nozzle (not shown) serving as a coating liquid supply means is moved above the center of the rectangular substrate 1, and
A predetermined amount of the coating liquid is supplied dropwise. Then, the upper support plate 4 is carried in by being hung by the fixed support member 16 and
On the ring plate 10 and the fixed support member 16
Are respectively mounted on the cylindrical cover 15, and as shown in the front view of the main part in FIG. 6, the first air cylinder 20 is extended to drive and displace the lid 17, and the opening 19 of the upper rotary plate a is closed. At the same time, the cleaning nozzle 18 is displaced to the non-cleaning position.

Thereafter, the electric motor 7 is started to rotate the turntable 2, the upper support plate 4, the upper turn plate 3 and the rectangular substrate 1 horizontally horizontally. Due to this rotation, the coating liquid on the square substrate 1 diffuses and flows outward due to centrifugal force, and the square substrate 1
Thinly applied on top. In this case, the air layer of the flat coating processing space S formed between the turntable 2 and the upper rotary plate 3 also rotates integrally, and the diffusion flow of the coating liquid does not occur on the square substrate 1. Is performed.

The surplus coating liquid that has flowed over the rectangular substrate 1 and has reached the outer periphery flows out from the peripheral edge of the rectangular substrate 1 and scatters from the entire outer periphery of the coating processing space S. The scattered application liquid flows into the waste liquid recovery case 5 through gaps formed above and below the spacer ring 9 and is collected.

After the spin coating process has been performed a predetermined number of times, the fixed support member 16 is removed from the cylindrical cover 15 and the upper support plate 4 is removed from the turntable 2.
6, the upper rotating plate 3 is removed upward, and the rectangular substrate 1 is removed.
After taking out, the upper support plate 4 is attached to the ring plate 10.
And the fixed support member 16 is mounted on the cylindrical cover 15, respectively.
And the cover 17 is driven and displaced to the open position.

Thereafter, the second air cylinder 24 is actuated to rotationally displace the cleaning nozzle 18 to a position above the opening 19, and from that state the third air cylinder 28 is extended to lower the cleaning nozzle 18, Through opening 19, as shown in FIG. 5, it is displaced to a washing position below upper rotating plate 3. In this state, while the electric motor 7 is started and the turntable 2, the upper support plate 4, and the upper turntable 3 are horizontally rotated integrally, a cleaning liquid is spouted out from the cleaning nozzle 18 to the upper surface of the turntable 2 to supply centrifugal force. The mist of the coating liquid adhering to the upper surface of the turntable 2 is removed by washing.

FIG. 7 is an overall schematic front view showing a second embodiment of the rotary coating apparatus according to the present invention. The difference from the first embodiment is as follows.

The lower end of the rotary shaft 2a of the turntable 2 and the upper end of the drive shaft 33a of the electric motor 33 are linked and connected via a belt-type transmission mechanism 34.
A through-hole 35 is formed through the axis of the rotary shaft, a cleaning liquid pipe 37 having a cleaning nozzle 36 attached to the upper end thereof is inserted into the through-hole 35, and the cleaning nozzle 36 is positioned above the turntable 2. The turntable cleaning means is provided in a fixed state, and ejects a cleaning liquid toward the upper surface of the turntable 2. Other configurations are the same as those of the first embodiment, and the description thereof will be omitted by retaining the same reference numerals.

FIG. 8 is an overall schematic front view showing a third embodiment of the rotary coating apparatus according to the present invention. The difference from the first embodiment is as follows.

At a predetermined position on the fixed frame 15 a around the turntable 2, the cleaning nozzle 3 is
The turntable cleaning means 9 is attached so that the cleaning liquid is jetted toward the upper surface of the turntable 2 with the upper turntable 3 removed. Other configurations are the same as those of the first embodiment, and the description thereof will be omitted by retaining the same reference numerals.

The present invention can be applied not only to the rectangular substrate 1 but also to a rotary coating device for a circular substrate.

[0033]

[0034]

[0035]

[0036]

[0037]

[0038]

[0039]

[0040]

[0041]

[0042]

[0043]

[0044]

[0045]

[0046]

[0047]

[0048]

[0049]

[0050]

As is apparent from the above description, according to the rotary coating apparatus of the present invention, the inside of the case can be effectively exhausted, and the mist-like coating liquid adheres to the substrate. This can be effectively prevented, and coating treatment without contamination can be efficiently performed.

[Brief description of the drawings]

FIG. 1 is a vertical sectional front view showing a schematic configuration of a whole of a first embodiment of a rotary coating apparatus according to the present invention.

FIG. 2 is an enlarged front view of a main part.

FIG. 3 is a plan view of a main part.

FIG. 4 is a plan view of a main part.

FIG. 5 is a side view of a main part.

FIG. 6 is a front view of a main part showing a spin coating state.

FIG. 7 is an overall schematic front view showing a second embodiment of the rotary coating apparatus according to the present invention.

FIG. 8 is an overall schematic front view showing a third embodiment of the rotary coating apparatus according to the present invention.

[Tax of sign]

 DESCRIPTION OF SYMBOLS 1 ... Square substrate 2 ... Rotating table 3 ... Upper rotating plate 4 ... Upper supporting plate 5 ... Waste liquid recovery case 15 ... Cylindrical cover 16 ... Fixed supporting member

──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int.Cl. ⁷ , DB name) H01L 21/027 B05C 11/08 G03F 7/16 H01L 21/304

Claims (5)

(57) [Claims] 1. A rotary coating apparatus for coating a coating liquid on the surface of a substrate by rotating the substrate, a substrate support member rotatably supporting the substrate, and a coating processing space coupled to the substrate support member. A coating processing space forming member that forms an opening, and an exhaust port that has an opening at the top and that exhausts the inside is formed, and a case that surrounds the periphery of the substrate supporting member; And a closing member that closes the opening of the case when the case is mounted, wherein the closing member is formed with an air flow passage that communicates between the inside and the outside of the case in a state where the opening of the case is closed by the closing member. A rotary coating device. 2. The rotary coating device according to claim 1, wherein the air flow passage formed in the closing member flows from a rotation center side of the substrate support member to a peripheral side above the substrate support member. A rotary coating device, which is provided near the center of the closing member so as to form an air flow. 3. The rotary coating device according to claim 1, wherein the exhaust port formed in the case is formed by the substrate support member so as to form a downward airflow at a peripheral end of the substrate support member. A rotary coating device, wherein the rotary coating device is also provided at a lower position. 4. The rotary coating apparatus according to claim 1, wherein the coating processing space forming member is rotatable together with the substrate supporting member when the coating processing space forming member is coupled to the substrate supporting member. A rotary coating device, wherein the rotary coating device is connected to a member. 5. The rotary coating apparatus according to claim 3, wherein
hand, The case is located at a position higher than the exhaust port.
The distance between the case and the peripheral side of the substrate support member is reduced.
Rotary coating characterized by comprising members for
apparatus.