JP3131058B2 - Alumina sintered body - Google Patents
Alumina sintered bodyInfo
- Publication number
- JP3131058B2 JP3131058B2 JP04345782A JP34578292A JP3131058B2 JP 3131058 B2 JP3131058 B2 JP 3131058B2 JP 04345782 A JP04345782 A JP 04345782A JP 34578292 A JP34578292 A JP 34578292A JP 3131058 B2 JP3131058 B2 JP 3131058B2
- Authority
- JP
- Japan
- Prior art keywords
- sintered body
- alumina
- present
- weight
- dielectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Compositions Of Oxide Ceramics (AREA)
- Inorganic Insulating Materials (AREA)
Description
【0001】[0001]
【産業上の利用分野】本発明は、例えば、マイクロ波用
誘電体磁器として使用されるアルミナ質焼結体に関する
ものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an alumina sintered body used as a dielectric ceramic for microwaves, for example.
【0002】[0002]
【従来技術】近年、例えば、自動車電話,コードレステ
レホン,パーソナル無線機,衛星放送受信機の実用化に
伴い、マイクロ波領域での回路素子として誘電体磁器が
広く使用されている。2. Description of the Related Art In recent years, for example, with the practical use of automobile telephones, cordless telephones, personal radios, and satellite broadcast receivers, dielectric ceramics have been widely used as circuit elements in the microwave region.
【0003】このようなマイクロ波用誘電体磁器はおも
に共振器に用いられるが、そこに要求される特性とし
て、小型化の要求に対して比誘電率が大きいこと、高周
波での誘電損失(tanδ)が小さいこと、言い換えれ
ばQ値が大きいことが主として挙げられる。しかし、よ
り高周波数域(SHF帯、周波数3GHz以上)で使用
する場合、用いられる電波の波長が短波長(ミリ波)で
あるため、加工精度等の点からむしろ誘電率10〜20
程度の低い誘電率の材料が必要となることが知られてい
る。[0003] Such a dielectric ceramic for microwaves is mainly used for a resonator, and its required characteristics are that its relative permittivity is large for the demand for miniaturization and its dielectric loss (tan δ) at high frequencies. ) Is small, in other words, the Q value is large. However, when used in a higher frequency range (SHF band, frequency 3 GHz or more), since the wavelength of the radio wave used is a short wavelength (millimeter wave), the dielectric constant is rather 10 to 20 in terms of processing accuracy and the like.
It is known that a material with a low dielectric constant is required.
【0004】そこで、近年においては、このような低誘
電率の誘電体磁器のうち、高周波電子回路の導波体とし
て高周波数で作動するアルミナ磁器が注目されている。[0004] In recent years, among such low dielectric constant dielectric porcelains, alumina porcelain which operates at a high frequency as a waveguide of a high frequency electronic circuit has attracted attention.
【0005】[0005]
【発明が解決しようとする問題点】しかしながら、従来
のアルミナ磁器では、アルミナの含有率が99.9%以
上の焼結体であり、誘電率(ε)が約10の優れた特性
を有するが、このようなアルミナ含有率99.9%以上
のアルミナ磁器は、1800℃以上で焼成する必要があ
り、量産性に乏しいという問題があった。However, the conventional alumina porcelain is a sintered body having an alumina content of 99.9% or more and has an excellent characteristic of a dielectric constant (ε) of about 10. However, such alumina porcelain having an alumina content of 99.9% or more needs to be fired at 1800 ° C. or more, and has a problem of poor mass productivity.
【0006】このような量産性という観点から考える
と、アルミナ質焼結体はアルミナ成分が多いほど焼成温
度も高くなり、その製造が困難になる。そこで、従来か
ら焼成温度を下げるためにアルミナに種々の添加物を添
加することが行われているが、焼成温度を満足できる程
度に低下させるためには添加量が多くなり、誘電損失
(tanδ)が増加するという問題があった。From the viewpoint of mass productivity, the sintering temperature of the alumina-based sintered body increases as the amount of the alumina component increases, and it becomes difficult to manufacture the sintered body. Therefore, conventionally, various additives have been added to alumina in order to lower the firing temperature. However, in order to lower the firing temperature to a satisfactory level, the amount of addition is increased and the dielectric loss (tan δ) is increased. There was a problem that increases.
【0007】[0007]
【問題点を解決するための手段】本発明者等は、上記の
問題点について検討を重ねた結果、Al2O3にSm2O3
を0.5〜40重量%添加することにより、高周波数域
において誘電損失(tanδ)を1×10-4以下にする
ことができるとともに、焼成温度を1500〜1600
℃とすることができ、容易に製造することができること
を知見し、本発明に至った。The present inventors have [Problems To achieve the] a result of extensive investigations on the above problems, Sm 2 O 3 to Al 2 O 3
Is added in an amount of 0.5 to 40% by weight, the dielectric loss (tan δ) can be reduced to 1 × 10 −4 or less in a high frequency range, and the firing temperature is set to 1500 to 1600.
° C, and it was found that it can be easily produced, leading to the present invention.
【0008】即ち、本発明のアルミナ質焼結体は、Al
2O3を60〜99.5重量%と、Sm2O3を0.5〜4
0重量%含有するアルミナ質焼結体であり、かつAl2
O3結晶相が存在し、Al2O3結晶相粒界中にSmAl
O3が存在することを特徴とする。That is, the alumina-based sintered body of the present invention is made of Al
And the 2 O 3 60 to 99.5 wt%, the Sm 2 O 3 0.5 to 4
Alumina sintered body containing 0% by weight and Al 2
O 3 crystal phase exists, and SmAl is present in the Al 2 O 3 crystal phase grain boundary.
O 3 is present.
【0009】ここで、Sm2O3を0.5重量%以上含有
させたのは、Sm2O3を添加することにより、不可避不
純物、特にMgO等の周期律2a族元素のアルミナへの
固溶を抑制し、格子欠陥の生成を防止し、誘電損失を低
下させるためであり、また、1500〜1600℃にお
いて焼成可能にするためである。また、Sm2O3が0.
5重量%よりも少ないと誘電損失が増加するからであ
る。特に、Al2O360〜99重量%、Sm2O31〜4
0重量%の割合からなることが好ましい。この範囲であ
ると誘電率を20以下に抑制することができるからであ
る。また、粒界相中にSmAlO3を存在させたのは、
焼結体全体の誘電損失を低くするためである。The reason why Sm 2 O 3 is contained in an amount of 0.5% by weight or more is that the addition of Sm 2 O 3 causes solidification of unavoidable impurities, in particular, elements of Group 2a of the periodic rule such as MgO to alumina. This is for suppressing melting, preventing generation of lattice defects, reducing dielectric loss, and enabling firing at 1500 to 1600 ° C. In addition, Sm 2 O 3 is 0.1.
If the amount is less than 5% by weight, the dielectric loss increases. In particular, Al 2 O 3 60-99% by weight, Sm 2 O 3 1-4
It preferably comprises 0% by weight. This is because the dielectric constant within this range can be suppressed to 20 or less. In addition, SmAlO 3 was present in the grain boundary phase.
This is to reduce the dielectric loss of the entire sintered body.
【0010】本発明のアルミナ質焼結体には不可避不純
物が存在しているが、この不可避不純物としては、Si
O2 ,MgO,FeO3 ,Na2 Oがあり、存在量とし
ては、SiO2 が0.04重量%以下、MgOが0.4
重量%以下、Fe2 O3 が0.03重量%以下、Na2
Oが0.08重量%以下存在する場合がある。The alumina-based sintered body of the present invention contains unavoidable impurities.
There are O 2 , MgO, FeO 3 , and Na 2 O. As for the abundance, 0.02% by weight or less of SiO 2 and 0.4% of MgO are present.
Wt% or less, Fe 2 O 3 is 0.03 wt% or less, Na 2
O may be present in an amount of 0.08% by weight or less.
【0011】本発明のアルミナ質焼結体は、純度99.
8%以上,平均結晶粒径2μm以下のAl2 O3 粉末
と、純度99.8%以上,平均結晶粒径0.5〜5μm
のSm2 O3 粉末を0.5重量%以上添加し、これに、
例えば、イソプロピルアルコール等の有機溶媒を加え、
ボールミル等で混合粉砕する。得られたスラリーを所定
温度で加熱し乾燥した後、パラフィンワックス等のバイ
ンダーを添加し、加熱混合し混合粉粉末を得る。The alumina sintered body of the present invention has a purity of 99.
Al 2 O 3 powder having an average crystal grain size of 8% or more and an average crystal grain size of 2 μm or less;
0.5% by weight or more of Sm 2 O 3 powder of
For example, an organic solvent such as isopropyl alcohol is added,
Mix and crush with a ball mill or the like. After heating and drying the obtained slurry at a predetermined temperature, a binder such as paraffin wax is added and mixed by heating to obtain a mixed powder.
【0012】得られた粉末を公知の成形方法、例えば、
プレス成形により成形し、これを、例えば、大気中にお
いて1500〜1600℃の範囲内の焼成温度で0.5
〜5時間焼成し、アルミナ質焼結体を得る。得られたア
ルミナ質焼結体には、Al2O3結晶相或いはAl2O3結
晶相とSm2O3結晶相が存在し、その粒界相中にSmA
lO3結晶相が存在する。The obtained powder is formed by a known molding method, for example,
It is formed by press molding, for example, at a firing temperature in the range of 1500 to 1600 ° C.
Baking for up to 5 hours to obtain an alumina sintered body. The obtained alumina-based sintered body has an Al 2 O 3 crystal phase or an Al 2 O 3 crystal phase and an Sm 2 O 3 crystal phase, and SmA is included in the grain boundary phase.
The 10 3 crystal phase is present.
【0013】[0013]
【作用】本発明によれば、Al2O3にSm2O3を0.5
〜40重量%含有させることにより、不可避不純物、特
にMgO等の周期律2a族元素のアルミナへの固溶を抑
制し、格子欠陥の生成を防止し、誘電損失を低下させる
ことが可能となるとともに、1500〜1600℃の範
囲内で焼成可能となる。According to the present invention, the Al 2 O 3 and Sm 2 O 3 0.5
By containing -40% by weight, it is possible to suppress solid solution of unavoidable impurities, in particular, elements of Group 2a of periodic rule such as MgO into alumina, prevent generation of lattice defects, and reduce dielectric loss. , 1500-1600 ° C.
【0014】また、粒界相中にSmAlO3 を存在させ
ることにより、焼結体の誘電損失を低下させることが可
能となる。The presence of SmAlO 3 in the grain boundary phase makes it possible to reduce the dielectric loss of the sintered body.
【0015】[0015]
【実施例】以下、本発明を次の例で説明する。純度9
9.8%,平均結晶粒径0.5μmのAl2 O3 粉末
と、純度99.9%,平均結晶粒径1μmのSm2 O3
粉末を表1に示す割合で添加し、これに、イソプロピル
アルコールからなる有機溶媒と、アルミナボール100
gとともに、ポリエチレン製ポットに入れ、48時間混
合粉砕した。得られたスラリーを80℃で加熱し乾燥し
た後、80メッシュの篩いを通し、パラフィンワックス
からなるバインダーを添加し、加熱混合した後、40メ
ッシュの篩いを通して原料粉末を得た。The present invention will be described below with reference to the following examples. Purity 9
9.8%, Al 2 O 3 powder having an average crystal grain size of 0.5 μm, and Sm 2 O 3 powder having a purity of 99.9%, and an average crystal grain size of 1 μm.
Powder was added at the ratio shown in Table 1, and an organic solvent composed of isopropyl alcohol and alumina balls 100 were added thereto.
g and put in a polyethylene pot and mixed and pulverized for 48 hours. The resulting slurry was heated and dried at 80 ° C., passed through an 80-mesh sieve, a binder made of paraffin wax was added, mixed by heating, and then passed through a 40-mesh sieve to obtain a raw material powder.
【0016】得られた粉末を圧力1000kg/cm2
で成形し、直径60mm厚さ2mmに成形し、これを表
1に示すような温度で焼成した。このようにして得られ
た焼結体をアセトンにて10分間超音波洗浄した後、自
然乾燥し試料とした。The obtained powder is subjected to a pressure of 1000 kg / cm 2.
, And molded to a diameter of 60 mm and a thickness of 2 mm, and fired at a temperature as shown in Table 1. The sintered body thus obtained was subjected to ultrasonic cleaning with acetone for 10 minutes and then naturally dried to obtain a sample.
【0017】得られた試料を、空洞共振器法により、ネ
ットワークアナライザー(HP−8757C)、シンセ
サイズドスイーパー(HP−8757C)で測定周波数
8〜9GHzにおいて誘電率および誘電損失(tan
δ)を測定した。この結果を表1に示す。The obtained sample was subjected to a dielectric constant and a dielectric loss (tan) at a measurement frequency of 8 to 9 GHz using a network analyzer (HP-8775C) and a synthesized sweeper (HP-8747C) by a cavity resonator method.
δ) was measured. Table 1 shows the results.
【0018】[0018]
【表1】 [Table 1]
【0019】表1において、Sm2O3が0.5重量%よ
り小さい場合には誘電損失が非常に高くなることが判
る。これに対して、Sm2O3を0.5〜40重量%添加
した本発明のアルミナ質焼結体の場合には、焼成温度が
1550〜1600℃であり、誘電率が10〜22で、
GHz帯における誘電損失も1×10-4以下と低いこと
が判る。In Table 1, it is found that when Sm 2 O 3 is less than 0.5% by weight, the dielectric loss becomes very high. On the other hand, in the case of the alumina-based sintered body of the present invention to which 0.5 to 40% by weight of Sm 2 O 3 is added, the firing temperature is 1550 to 1600 ° C., the dielectric constant is 10 to 22,
It can be seen that the dielectric loss in the GHz band is as low as 1 × 10 −4 or less.
【0020】尚、本発明のアルミナ質焼結体の結晶相を
X線回折より確認し、熱リン酸でケミカルエッチングし
た焼結体を波長分散型マイクロアナライザーを用いて局
所分析を行ったところ、Al2 O3 結晶相が存在し、粒
界相中にSmAlO3 結晶相が存在することを確認し
た。The crystal phase of the alumina-based sintered body of the present invention was confirmed by X-ray diffraction, and the sintered body chemically etched with hot phosphoric acid was subjected to local analysis using a wavelength-dispersive microanalyzer. al 2 O 3 crystal phase is present, it was confirmed that SmAlO 3 crystal phase is present in the grain boundary phase.
【0021】[0021]
【発明の効果】以上記述したように、本発明のアルミナ
質焼結体では、Al2O3を60〜99.5重量%と、S
m2O3を0.5〜40重量%含有するため、不可避不純
物、特にMgO等の周期律2a族元素のアルミナへの固
溶を抑制し、格子欠陥の生成を防止し、誘電損失を低下
させることができるとともに、1500〜1600℃の
範囲内で焼成することができる。これにより、高周波数
域SHF帯(周波数3GHz以上)で使用する場合に最
適な誘電体磁器を提供することができるとともに、量産
性に適した誘電体磁器を提供することができる。As described above, in the alumina-based sintered body of the present invention, the content of Al 2 O 3 is 60 to 99.5% by weight,
Since m 2 O 3 is contained in an amount of 0.5 to 40% by weight, unavoidable impurities, particularly elements of the periodic group 2a such as MgO, are suppressed from being dissolved in alumina, lattice defects are prevented from being generated, and dielectric loss is reduced. It can be fired in the range of 1500 to 1600 ° C. This makes it possible to provide an optimal dielectric porcelain for use in the high frequency SHF band (frequency of 3 GHz or more) and to provide a dielectric porcelain suitable for mass production.
【0022】また、粒界相中にSmAlO3 を存在させ
ることにより、焼結体の誘電損失を低下させることがで
きる。The presence of SmAlO 3 in the grain boundary phase can reduce the dielectric loss of the sintered body.
Claims (1)
2O3を0.5〜40重量%との割合で含有し、かつAl
2O3結晶相が存在するとともに、該結晶相粒界にSmA
lO3が存在することを特徴とするアルミナ質焼結体。(1) 60 to 99.5% by weight of Al 2 O 3 ,
Containing 2 O 3 in a ratio of 0.5 to 40% by weight;
While a 2 O 3 crystal phase exists, SmA
An alumina-based sintered body characterized in that IO 3 is present.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP04345782A JP3131058B2 (en) | 1992-12-25 | 1992-12-25 | Alumina sintered body |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP04345782A JP3131058B2 (en) | 1992-12-25 | 1992-12-25 | Alumina sintered body |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH06191929A JPH06191929A (en) | 1994-07-12 |
JP3131058B2 true JP3131058B2 (en) | 2001-01-31 |
Family
ID=18378942
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP04345782A Expired - Fee Related JP3131058B2 (en) | 1992-12-25 | 1992-12-25 | Alumina sintered body |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP3131058B2 (en) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3686721D1 (en) * | 1986-10-08 | 1992-10-15 | Ibm | METHOD FOR PRODUCING A CONTACT OPENING WITH A DESIRED SLOPE IN A COMPOSED LAYER MASKED WITH PHOTORESIST. |
JP3339989B2 (en) * | 1995-05-31 | 2002-10-28 | 京セラ株式会社 | Low dielectric loss material |
WO2012119686A2 (en) * | 2011-03-08 | 2012-09-13 | Merck Patent Gmbh | Aluminium oxide pastes and method for the use thereof |
WO2015056702A1 (en) * | 2013-10-15 | 2015-04-23 | 住友大阪セメント株式会社 | Corrosion-resistant member, and electrostatic chuck device |
-
1992
- 1992-12-25 JP JP04345782A patent/JP3131058B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JPH06191929A (en) | 1994-07-12 |
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