JP3130709B2 - Open / close valve - Google Patents
Open / close valveInfo
- Publication number
- JP3130709B2 JP3130709B2 JP05221582A JP22158293A JP3130709B2 JP 3130709 B2 JP3130709 B2 JP 3130709B2 JP 05221582 A JP05221582 A JP 05221582A JP 22158293 A JP22158293 A JP 22158293A JP 3130709 B2 JP3130709 B2 JP 3130709B2
- Authority
- JP
- Japan
- Prior art keywords
- housing
- valve
- opening
- heater
- open
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Details Of Valves (AREA)
Description
【０００１】[0001]
【産業上の利用分野】本発明は、半導体製造装置におけ
るガス供給用配管などに用いられる開閉バルブに関す
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an on-off valve used for a gas supply pipe in a semiconductor manufacturing apparatus.
【０００２】[0002]
【従来の技術】従来、拡散装置あるいはエピタキシアル
成長装置などの半導体製造装置には、種々のガスを供給
するガス供給装置が備えられている。そして、このガス
供給装置にはガスボンベからガスを供給する配管や種々
のバルブなどが複数備えられていた。このバルブの中で
開閉を目的とした二方弁が多く、その構造は単純なもの
であった。2. Description of the Related Art Conventionally, a semiconductor manufacturing apparatus such as a diffusion apparatus or an epitaxial growth apparatus is provided with a gas supply apparatus for supplying various gases. This gas supply device was provided with a plurality of pipes for supplying gas from a gas cylinder, various valves, and the like. Of these valves, there were many two-way valves for opening and closing, and the structure was simple.
【０００３】この開閉バルブは図面には示さないが、ハ
ウジングの中に弁座があり、その弁座の開口をプランジ
ャーのディスクで塞ぐが開くかで弁の開閉を行なってい
た。また、配管への取付けはバルブの開口の外周囲にあ
るフランジと配管のフランジとをハッキングを介して合
せボルトとナットで締付け固定していた。[0003] Although not shown in the drawings, this on-off valve has a valve seat in a housing, and the opening and closing of the valve seat is closed or opened by a plunger disk, and the valve is opened or closed. Further, when mounting to a pipe, the flange around the outside of the opening of the valve and the flange of the pipe were fastened and fixed with a bolt and a nut via a hack.
【０００４】[0004]
【発明が解決しようとする課題】しかしながら、上述し
たバルブの内壁の表面温度はバルブ内を流れる気体に比
べ低くく、バルブ内壁に接触している気体が液化凝固
し、バルブの開のときにバルブ内壁に残された不要な液
が再度気化し配管を通り処理室に浸入し、処理すべき半
導体基板を汚染させ品質に重大な欠陥をもたらすという
問題があった。However, the surface temperature of the inner wall of the above-mentioned valve is lower than that of the gas flowing in the valve, and the gas in contact with the inner wall of the valve is liquefied and solidified, and the valve is opened when the valve is opened. Unnecessary liquid remaining on the inner wall evaporates again and passes through the piping to enter the processing chamber, contaminating the semiconductor substrate to be processed and causing a serious defect in quality.
【０００５】従って、本発明の目的は、バルブを開くと
きにハウジング内に残留するガスを放出しない開閉バル
ブを提供することである。Accordingly, it is an object of the present invention to provide an on-off valve which does not release gas remaining in the housing when the valve is opened.
【０００６】[0006]
【課題を解決するための手段】本発明の特徴は、一端に
開口をもつとともにこの開口の内側周囲に面をもつハウ
ジングと、このハウジング内の一方向に移動し該開口を
開閉する円板状部材をもつプランジャーとを備える開閉
バルブにおいて、前記ハウジングを二つ割りにし、二つ
に分離した内側ハウジングと外側ハウジングの間にヒー
タを挿入する開閉バルブである。SUMMARY OF THE INVENTION A feature of the present invention is that a housing has an opening at one end and a surface around the inside of the opening, and a disc-shaped member which moves in one direction in the housing to open and close the opening. An opening / closing valve including a plunger having a member, wherein the housing is divided into two parts, and a heater is inserted between an inner housing and an outer housing which are separated into two parts.
【０００７】[0007]
【実施例】次に本発明について図面を参照して説明す
る。DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, the present invention will be described with reference to the drawings.
【０００８】図１は本発明の一実施例を示す開閉バルブ
の断面図である。この開閉バルブは、図１に示すよう
に、一端に開口を有しその端部の内面に弁座６ｂをもつ
とともに他端にフランジをもつ内側ハウジング２とこの
内側ハウジングを包みフランジ部で固定ボルト５で固定
する外側ハウジング１とにハウジング本体を分割し、こ
の内側ハウジング２と外側ハウジング１との間にヒータ
３を挿入してある。また、ヒータ３に電流を供給する導
線はヒータ線導入口４からハウジング外に引出されてい
る。FIG. 1 is a sectional view of an on-off valve according to an embodiment of the present invention. As shown in FIG. 1, this open / close valve has an inner housing 2 having an opening at one end, a valve seat 6b on the inner surface of the end, and a flange at the other end, and a fixing bolt which wraps the inner housing and surrounds the inner housing. The housing body is divided into an outer housing 1 to be fixed at 5, and a heater 3 is inserted between the inner housing 2 and the outer housing 1. In addition, a conductor for supplying a current to the heater 3 is drawn out of the housing from the heater wire inlet 4.
【０００９】また、望ましくは、弁座６ｂの近くのフラ
ンジ部に熱電対を埋設し、バルブ本体の温度を検出し、
ヒータ電源にフィードバックしバルブ本体の温度を一定
にすることである。上述したようにハウジング本体を二
つ割りにしたことは、ヒータ３の交換あるいはバルブ自
体のメンテナンスを容易にするという利点がある。さら
に、この二つ割りにすることによってバルブ自体の製作
も容易になり、コスト低減に繋がる利点もある。Preferably, a thermocouple is buried in the flange near the valve seat 6b to detect the temperature of the valve body.
That is, the temperature of the valve body is made constant by feeding back to the heater power supply. Dividing the housing body into two parts as described above has an advantage that replacement of the heater 3 or maintenance of the valve itself is facilitated. Further, by dividing into two, the manufacture of the valve itself is facilitated, and there is an advantage that the cost is reduced.
【００１０】[0010]
【発明の効果】以上説明した様に本発明は、バルブ本体
にヒータを内蔵しハウジング内壁の温度を上げることに
よって、高温のガスが露結することがないので、ハウジ
ング内に残留するガスを放出することがないという効果
を有する。As described above, according to the present invention, the heater remaining in the valve body and the temperature of the inner wall of the housing are raised, so that the high-temperature gas does not condense, so that the gas remaining in the housing is released. There is an effect that it does not do.
【図１】本発明の一実施例を示す開閉バルブの断面図で
ある。FIG. 1 is a sectional view of an on-off valve according to an embodiment of the present invention.
１ 外側ハウジング ２ 内側ハウジング ３ ヒータ ４ ヒータ線導入口 ５ 固定ボルト ６ ディスク ６ａ パッキング ６ｂ 弁座 ６ｃ プランジャ DESCRIPTION OF SYMBOLS 1 Outer housing 2 Inner housing 3 Heater 4 Heater wire inlet 5 Fixing bolt 6 Disk 6a Packing 6b Valve seat 6c Plunger
Claims (1)
側周囲に面をもつハウジングと、このハウジング内の一
方向に移動し該開口を開閉する円板状部材をもつプラン
ジャーとを備える開閉バルブにおいて、前記ハウジング
を二つ割りにし、二つに分離した内側ハウジングと外側
ハウジングの間にヒータを挿入することを特徴とする開
閉バルブ。An opening / closing valve comprising: a housing having an opening at one end and a surface around the inside of the opening; and a plunger having a disk-shaped member that moves in one direction in the housing and opens and closes the opening. 3. The on-off valve according to claim 1, wherein the housing is divided into two parts, and a heater is inserted between the inner housing and the outer housing which are separated into two parts.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP05221582A JP3130709B2 (en) | 1993-09-07 | 1993-09-07 | Open / close valve |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP05221582A JP3130709B2 (en) | 1993-09-07 | 1993-09-07 | Open / close valve |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0771648A JPH0771648A (en) | 1995-03-17 |
| JP3130709B2 true JP3130709B2 (en) | 2001-01-31 |
Family
ID=16769006
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP05221582A Expired - Fee Related JP3130709B2 (en) | 1993-09-07 | 1993-09-07 | Open / close valve |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3130709B2 (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3785516B2 (en) * | 1997-03-07 | 2006-06-14 | 株式会社フジキン | Fluid control device |
| JP4596409B2 (en) | 2003-04-21 | 2010-12-08 | 株式会社東京技術研究所 | Heater unit for valve mounting |
| JP4654569B2 (en) * | 2003-06-23 | 2011-03-23 | トヨタ自動車株式会社 | Fuel cell system and control method thereof |
| JP5739402B2 (en) * | 2012-12-12 | 2015-06-24 | リンナイ株式会社 | Thermal valve |
-
1993
- 1993-09-07 JP JP05221582A patent/JP3130709B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0771648A (en) | 1995-03-17 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20001024 |
|
| LAPS | Cancellation because of no payment of annual fees |