JP3126417B2 - Pretreatment method of plating solution in additive method - Google Patents
Pretreatment method of plating solution in additive methodInfo
- Publication number
- JP3126417B2 JP3126417B2 JP03159132A JP15913291A JP3126417B2 JP 3126417 B2 JP3126417 B2 JP 3126417B2 JP 03159132 A JP03159132 A JP 03159132A JP 15913291 A JP15913291 A JP 15913291A JP 3126417 B2 JP3126417 B2 JP 3126417B2
- Authority
- JP
- Japan
- Prior art keywords
- plating
- solution
- pretreatment
- electroless
- plating solution
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Chemically Coating (AREA)
- Printing Elements For Providing Electric Connections Between Printed Circuits (AREA)
- Manufacturing Of Printed Wiring (AREA)
Description
【0001】[0001]
【産業上の利用分野】本発明は、アディティブ法による
プリント配線板の製造において、無電解メッキを施す前
に行うアディティブ法におけるメッキ液の前処理方法に
関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for pretreating a plating solution in an additive method, which is performed before electroless plating in the production of a printed wiring board by the additive method.
【0002】[0002]
【従来の技術】従来、アディティブ法における無電解メ
ッキの前処理方法としては、次のような工程に従って行
われている。即ち、まず酸性の触媒を有する活性化液に
プリント基板を浸漬する工程と、次に水洗を行って前記
触媒を回収する水洗工程と、続いて再度の水洗工程と、
最後に新しい水で水洗を行う新水水洗工程とからなって
いる。2. Description of the Related Art Conventionally, as a pretreatment method for electroless plating in the additive method, the following steps are performed. That is, first, a step of immersing the printed circuit board in an activating liquid having an acidic catalyst, and then a water washing step of performing the water washing to recover the catalyst, and then a water washing step again,
Finally, it is a new water washing process of washing with fresh water.
【0003】このような前処理工程を経た後、無電解メ
ッキが行われる。即ち、無電解メッキはメッキ液中に前
記前処理工程を経たプリント基板を浸漬することによっ
て行われる。[0003] After passing through such a pretreatment step, electroless plating is performed. That is, electroless plating is performed by immersing the printed circuit board that has undergone the pretreatment step in a plating solution.
【0004】[0004]
【発明が解決しようとする課題】ところが、前記従来の
前処理方法では、酸性触媒を有する活性化液が前処理を
施した後のプリント基板のスルーホール等に残る場合が
ある。その場合、このプリント基板を無電解メッキ液中
に浸漬すると、無電解メッキ液のpHが低下する。ま
た、無電解メッキ液がアルカリ性であるため、前記酸性
の活性化液との間で酸とアルカリによる塩が生成するお
それがある。そのため、プリント基板に対するメッキ被
膜の密着性が低下するという問題点があった。However, in the above-mentioned conventional pretreatment method, an activating liquid having an acidic catalyst may remain in a through hole of a printed circuit board after the pretreatment. In this case, when the printed circuit board is immersed in the electroless plating solution, the pH of the electroless plating solution decreases. In addition, since the electroless plating solution is alkaline, there is a possibility that an acid and an alkali salt are generated between the electroless plating solution and the acidic activating solution. Therefore, there is a problem that the adhesion of the plating film to the printed circuit board is reduced.
【0005】また、前記酸性の活性化液によって、プリ
ント基板に施されているメッキレジストの未硬化部分が
無電解メッキ液中に溶け出すため、無電解メッキ液の寿
命が短くなったり、無電解メッキにより得られるメッキ
被膜の延び率が低下したりするという問題点があった。[0005] Further, since the uncured portion of the plating resist applied to the printed board is dissolved into the electroless plating solution by the acidic activating solution, the life of the electroless plating solution is shortened, and the electroless plating solution is shortened. There has been a problem that the elongation rate of a plating film obtained by plating is reduced.
【0006】本発明は上記問題点を解消するためになさ
れたものであって、その目的はメッキ液のpHの低下や
塩の生成を防止してメッキ被膜の密着性を向上させるこ
とができるとともに、メッキ液の寿命を長くすることが
でき、しかもメッキ被膜の物性向上を図ることができる
アディティブ法におけるメッキ液の前処理方法を提供す
ることにある。SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and an object of the present invention is to prevent a decrease in pH of a plating solution and formation of a salt, thereby improving adhesion of a plating film. Another object of the present invention is to provide a plating solution pretreatment method in an additive method that can extend the life of a plating solution and improve the physical properties of a plating film.
【0007】[0007]
【課題を解決するための手段】上記目的を達成するため
に、本発明ではアディティブ法に従ってプリント基板に
メッキレジストを形成後、無電解メッキを施す前処理と
して、酸性の触媒活性化液で処理する工程と、その後前
記活性化液を洗浄する水洗工程とからなるアディティブ
法におけるメッキ液の前処理方法において、前記水洗工
程の後、メッキ液より高温で強アルカリの水溶液で処理
する工程を設けたことを特徴とするアディティブ法にお
けるメッキ液の前処理方法をその要旨としている。In order to achieve the above object, in the present invention, a plating resist is formed on a printed circuit board according to an additive method and then treated with an acidic catalyst activating solution as a pretreatment for performing electroless plating. In a pretreatment method of a plating solution in an additive method, comprising a step of washing the activating solution and a washing step of washing the activating solution thereafter, after the washing step, the plating solution is treated with an aqueous solution of a strong alkali at a higher temperature than the plating solution
Pretreatment method of plating solution in the additive method, characterized in that a step of a is set to its gist.
【0008】[0008]
【作用】無電解メッキの前処理において、水洗工程の
後、強アルカリ水溶液を施す工程を設けたので、水洗工
程の後にプリント基板に残留する酸性の活性化液が、水
酸化ナトリウム水溶液等の強アルカリ水溶液によって中
和される。従って、メッキ液のpHが低下したり、酸と
アルカリによる塩が生成したすることがなく、メッキ被
膜の密着性が良好となる。In the pretreatment of the electroless plating, a step of applying a strong alkaline aqueous solution is provided after the water washing step, so that the acidic activating liquid remaining on the printed circuit board after the water washing step may be weakened by strong aqueous sodium hydroxide solution or the like. Neutralized by an alkaline aqueous solution. Therefore, the pH of the plating solution does not decrease, and no salt is generated by the acid and the alkali, and the adhesion of the plating film is improved.
【0009】また、メッキ液より高温で強アルカリの水
溶液で処理するによってメッキレジストを強アルカリ水
溶液中に溶出させるので、無電解メッキ液中へのメッキ
レジストの溶出が抑えられ、その結果無電解メッキ液の
長寿命化を図ることができるとともに、メッキ被膜の延
び率等の物性の向上を図ることができる。In addition, strong alkaline water at a higher temperature than the plating solution is used.
Since the plating resist is eluted into the strong alkaline aqueous solution by treating with the solution, the elution of the plating resist into the electroless plating solution is suppressed, and as a result, the life of the electroless plating solution can be extended, and the plating can be performed. It is possible to improve the physical properties such as the elongation of the coating.
【0010】[0010]
【実施例】以下に本発明を具体化した実施例について、
図1及び図2に従って説明する。本実施例ではフルアデ
ィティブ法に基づいて無電解メッキを施す前に、強アル
カリ水溶液として水酸化ナトリウム水溶液による前処理
を行った後、プリント基板に対して無電解銅メッキを行
った例である。EXAMPLES Hereinafter, examples embodying the present invention will be described.
A description will be given with reference to FIGS. In this embodiment, before performing electroless plating based on the full additive method, a pretreatment with a sodium hydroxide aqueous solution as a strong alkaline aqueous solution is performed, and then electroless copper plating is performed on a printed circuit board.
【0011】図2に示すように、プリント基板1上には
接着剤層2が形成され、その接着剤層2の表面が粗面化
されるとともに、穴あけによりスルーホール3が形成さ
れている。そして、接着剤層2上及びスルーホール3内
には触媒核形成工程により触媒核6が付与されている。
同接着剤層2上には、スルーホール3、配線パターン以
外の部分においてエポキシアクリレート等のメッキレジ
スト4が形成されている。この状態で、無電解銅メッキ
の前処理が行われる。その後、図1に示すように、この
スルーホール3や配線パターンの部分には常法による無
電解銅メッキによって、銅メッキ被膜5が形成される。As shown in FIG. 2, an adhesive layer 2 is formed on a printed board 1, the surface of the adhesive layer 2 is roughened, and a through hole 3 is formed by drilling. A catalyst core 6 is provided on the adhesive layer 2 and in the through hole 3 by a catalyst core forming step.
On the adhesive layer 2, a plating resist 4 such as epoxy acrylate is formed in a portion other than the through hole 3 and the wiring pattern. In this state, pretreatment of electroless copper plating is performed. Thereafter, as shown in FIG. 1, a copper plating film 5 is formed on the through hole 3 and the wiring pattern portion by electroless copper plating in a usual manner.
【0012】まず、前記メッキレジスト4を施したプリ
ント基板1を酸性触媒を有する活性化液(シプレイ株式
会社製の商品名アクセレレーター19)中に浸漬した。
次いで、水洗工程において、前記酸性触媒を回収するた
めの水洗を行った。続いて、再度水洗を行った後、新水
で水洗を行った。First, the printed board 1 on which the plating resist 4 was applied was immersed in an activating solution having an acidic catalyst (accelerator 19, trade name, manufactured by Shipley Co., Ltd.).
Next, in the water washing step, water washing for collecting the acidic catalyst was performed. Subsequently, after washing with water again, washing with fresh water was performed.
【0013】次に、このプリント基板を強アルカリ水溶
液、即ち強アルカリプレデイップ液(水酸化ナトリウム
濃度20g/l 、pH12.6、温度80℃)に5分間
浸漬した。この水酸化ナトリウム濃度は、12〜40g
/l の範囲が好ましく、20〜25g/l の範囲がさら
に好ましい。pHは、12〜13の範囲が好ましく、1
2.4〜12.6の範囲がさらに好ましい。温度は、7
0〜90℃の範囲が好ましく、75〜85℃の範囲がさ
らに好ましい。Next, the printed board was immersed in a strong alkaline aqueous solution, that is, a strong alkaline pre-dip solution (sodium hydroxide concentration 20 g / l, pH 12.6, temperature 80 ° C.) for 5 minutes. This sodium hydroxide concentration is 12-40 g
/ L is preferable, and 20 to 25 g / l is more preferable. The pH is preferably in the range of 12 to 13,
The range of 2.4 to 12.6 is more preferable. The temperature is 7
The range is preferably from 0 to 90C, more preferably from 75 to 85C.
【0014】これらの範囲よりも大きくなると、メッキ
レジスト4の溶出が過剰になり過ぎるとともに、プリン
ト基板1を損傷するおそれがある。一方、これらの範囲
よりも小さくなると、メッキレジスト4の不完全硬化の
部分、即ちラジカルが酸素によって消費され硬化しなか
った部分が溶け出すまでには到らない。If it is larger than these ranges, the elution of the plating resist 4 becomes excessive and the printed circuit board 1 may be damaged. On the other hand, if it is smaller than these ranges, the part of the plating resist 4 that is incompletely cured, that is, the part that has not been cured due to the consumption of radicals by oxygen, will not melt.
【0015】また、この水酸化ナトリウムのプレディッ
プ液の液温、pHはいずれも後述する無電解銅メッキ液
の液温、pHよりも高いことが望ましい。なぜならば、
メッキレジストの不完全硬化部分をプレディップ液中に
溶出させ、無電解メッキ液中には極力溶出させないため
である。It is desirable that the temperature and pH of the sodium hydroxide pre-dip solution are both higher than the temperature and pH of the electroless copper plating solution described later. because,
This is because the incompletely cured portion of the plating resist is eluted in the pre-dip solution and is not eluted in the electroless plating solution as much as possible.
【0016】次に、上記のように前処理されたプリント
基板1に無電解銅メッキを施し、厚さ約30μmの銅メ
ッキ被膜5を形成した。この無電解銅メッキに使用され
るメッキ液は、次のような組成のものである。即ち、硫
酸銅(CuSO4.5H2O) 10±1g/l 、水酸化ナトリウム
(NaOH) 12±1g/l 、ホルムアルデヒド(HCHO 、37
% )4±0.5ml/l 、エチレンジアミン・四酢酸二ナ
トリウム(EDTA.2Na) 45〜50g/l 、ジピリジル2
0〜30mg/l 、ポリエチレングリコール70〜100
mg/l 、物性向上剤としてシアン化ニッケルカリ0.7
〜1g/l である。その他、無電解メッキの条件は、温
度70℃、pH12.0〜12.2である。Next, the printed board 1 pretreated as described above was subjected to electroless copper plating to form a copper plating film 5 having a thickness of about 30 μm. The plating solution used for the electroless copper plating has the following composition. That is, copper sulfate (CuSO 4.5 H 2 O) 10 ± 1 g / l, sodium hydroxide (NaOH) 12 ± 1 g / l, formaldehyde (HCHO, 37
%) 4 ± 0.5 ml / l, disodium ethylenediaminetetraacetate (EDTA.2Na) 45 to 50 g / l, dipyridyl 2
0-30 mg / l, polyethylene glycol 70-100
mg / l, potassium cyanide 0.7 as a physical property improver
11 g / l. Other conditions of the electroless plating are a temperature of 70 ° C. and a pH of 12.0 to 12.2.
【0017】このような条件下で無電解メッキを、硫酸
銅の銅イオンがなくなったときを1ターンとして6ター
ンまで行った。その結果、6ターンまでは銅メッキ被膜
5の密着性が良く、銅メッキ被膜5の延性も良好であっ
た。この試験結果を下記表1に示す。Under these conditions, electroless plating was performed up to six turns, with one turn when the copper ions of the copper sulfate disappeared. As a result, the adhesion of the copper plating film 5 was good and the ductility of the copper plating film 5 was good up to 6 turns. The test results are shown in Table 1 below.
【0018】なお、表1中、銅メッキ被膜5の密着性
は、プリント基板1のスルーホール3内の密着性であ
り、プリント基板1をオイルに浸漬し、260℃、10
秒と20℃、10秒を30サイクル繰り返した後、スル
ーホール3の断面観察により、銅メッキ被膜5の剥がれ
の有無を調べた。そして、全く剥がれがないときを◎、
剥がれの割合が10%以下のときを○、剥がれの割合が
10%を越えるときを×で表した。また、銅メッキ被膜
5の延性は、銅メッキ被膜5を短冊状にした試験片を作
製し、その一端を引張試験機で引っ張り、試験片の延び
た割合で表した。In Table 1, the adhesion of the copper plating film 5 is the adhesion in the through hole 3 of the printed board 1, and the printed board 1 is immersed in oil at 260.degree.
After repeating 30 seconds at 20 ° C. for 10 seconds, the presence or absence of peeling of the copper plating film 5 was examined by observing the cross section of the through hole 3. And when there is no peeling at all ◎,
When the rate of peeling was 10% or less, it was represented by ○, and when the rate of peeling exceeded 10%, it was represented by x. Further, the ductility of the copper plating film 5 was represented by a test piece in which the copper plating film 5 was formed into a strip shape, one end of which was pulled by a tensile tester, and was expressed by the extension ratio of the test piece.
【0019】また、冷熱衝撃試験は、スルーホール連結
状態(200 穴)で260℃のオイル中に10秒間、次い
で20℃のオイル中に20秒間浸漬し、これを1サイク
ルとして冷熱を繰り返して銅メッキ被膜の状態をみた。
なお、この冷熱サイクルを5回繰り返してその平均をと
った。In the thermal shock test, in a through-hole connection state (200 holes), immersion was performed in oil at 260 ° C. for 10 seconds, and then in oil at 20 ° C. for 20 seconds. The state of the plating film was observed.
In addition, this cooling / heating cycle was repeated five times, and the average was taken.
【0020】[0020]
【表1】 [Table 1]
【0021】前記のように、この実施例では、無電解メ
ッキの前処理として水酸化ナトリウムのプレディップ液
による浸漬処理を行ったので、メッキ液の長寿命化が図
られ、6ターンまでスルーホール3内の銅メッキ被膜5
の密着性に優れ、銅メッキ被膜5の延性が十分に保持さ
れる。As described above, in this embodiment, since the immersion treatment with the pre-dip solution of sodium hydroxide was performed as a pretreatment for the electroless plating, the life of the plating solution was extended, and the through-hole was increased up to 6 turns. Copper plating film 5 in 3
And the ductility of the copper plating film 5 is sufficiently maintained.
【0022】一般に、フルアディティブ法によるプリン
ト配線板の製法においては、メッキ液が高温、高アルカ
リとなるため、メッキレジスト4等の有機物が溶出しや
すい。通常、メッキを繰り返すと有機物が蓄積し、銅メ
ッキ被膜5が硬く、脆くなってその延び率が小さくな
る。In general, in the method of manufacturing a printed wiring board by the full additive method, since the plating solution becomes high temperature and highly alkaline, organic substances such as the plating resist 4 are easily eluted. Normally, when plating is repeated, organic matter accumulates, and the copper plating film 5 becomes hard and brittle, and its elongation decreases.
【0023】しかし、前記強アルカリプレデイップ液に
より、無電解銅メッキ液への酸性の活性化液の混入を十
分に抑えることができるので、メッキ液の寿命を6ター
ンまで延ばすことができる。その結果、メッキ液の調製
費用や不要なメッキ液を処分する費用を節約することが
できる。However, the use of the strong alkaline pre-dip solution can sufficiently prevent the acidic activating solution from being mixed into the electroless copper plating solution, so that the life of the plating solution can be extended to six turns. As a result, the cost for preparing the plating solution and the cost for disposing of the unnecessary plating solution can be saved.
【0024】次に、前記実施例と比較するために、次の
ような試験を行った。即ち、前記実施例において、無電
解銅メッキの前処理で強アルカリプレデイップ液への浸
漬工程を省略した。そして、前記実施例と同様に無電解
メッキを行ない、前記実施例と同様に銅メッキ被膜の密
着性及び延性を評価した。その結果を下記表2に示す。Next, the following test was conducted for comparison with the above embodiment. That is, in the above embodiment, the step of immersion in a strong alkaline pre-dip solution was omitted in the pretreatment of electroless copper plating. Then, electroless plating was performed in the same manner as in the above example, and the adhesion and ductility of the copper plating film were evaluated in the same manner as in the above example. The results are shown in Table 2 below.
【0025】[0025]
【表2】 [Table 2]
【0026】上記表2に示すように、メッキのターン数
が5ターン以上になると、銅メッキ被膜5の密着性が低
下し、ターン数が4ターン以上になると、銅メッキ被膜
5の延性が4%以下となり、銅メッキ被膜5が脆くなっ
てその延性が低くなることがわかる。従って、メッキの
ターン数が前記実施例で6ターンまで使用できたのに比
べ、3ターンまでしか使用できないことになる。As shown in Table 2, when the number of plating turns is 5 or more, the adhesion of the copper plating film 5 is reduced, and when the number of turns is 4 or more, the ductility of the copper plating film 5 is 4 or more. % Or less, which indicates that the copper plating film 5 is brittle and its ductility is low. Therefore, only three turns can be used as compared with the case where the number of plating turns is six in the above embodiment.
【0027】上記のように、本実施例では、水洗工程の
後に強アルカリプレデイップ液への浸漬工程を設けたの
で、酸性触媒を有する活性化液の無電解銅メッキ液への
混入がなくなり、無電解メッキ液が安定なものとなる。
しかも、酸性の活性化液とアルカリ性のメッキ液との中
和による塩の生成がなくなる。従って、無電解銅メッキ
が円滑かつ確実に行われ、銅メッキ被膜5の密着性が向
上する。As described above, in the present embodiment, since the immersion step in the strong alkaline pre-dip solution is provided after the water washing step, the activating solution having an acidic catalyst is not mixed into the electroless copper plating solution. The electroless plating solution becomes stable.
In addition, salt formation due to neutralization of the acidic activating solution and the alkaline plating solution is eliminated. Therefore, the electroless copper plating is performed smoothly and reliably, and the adhesion of the copper plating film 5 is improved.
【0028】さらに、メッキレジスト4表面の光硬化不
十分の層、即ち酸素阻害を受けている部分がプレディッ
プ液に溶け出すため、メッキ液中へのメッキレジスト4
の混入が非常に少なくなる。よって、メッキ液の長寿命
化を図ることができるとともに、銅メッキ被膜5中に有
機物の混入がなくなって、銅メッキ被膜5の延性が高く
なる。Further, the layer of the photo-resist insufficiently on the surface of the plating resist 4, that is, the portion which has been inhibited by oxygen, dissolves in the pre-dip solution, so that the plating resist 4
Is extremely reduced. Therefore, the life of the plating solution can be prolonged, and no organic matter is mixed into the copper plating film 5, and the ductility of the copper plating film 5 increases.
【0029】本発明は上記実施例に限定されるものでは
なく、次のような態様に具体化してもよい。(1)強ア
ルカリ水溶液としては、水酸化カリウム水溶液等であっ
てもよい。その場合、水酸化カリウム水溶液の濃度、p
H、温度等は前記水酸化ナトリウム水溶液に準じて設定
することができる。(2)前記実施例では、フルアディ
ティブ法に従って無電解メッキを施す前に、前処理を行
ったが、無電解メッキと電気メッキとを併用するセミア
ディティブ法における無電解メッキを施す前に、前処理
を行ってもよい。(3)無電解メッキとしては、ハンダ
メッキ、金メッキ等であってもよい。The present invention is not limited to the above embodiment, but may be embodied in the following embodiments. (1) The strong alkaline aqueous solution may be a potassium hydroxide aqueous solution or the like. In that case, the concentration of the aqueous potassium hydroxide solution, p
H, temperature and the like can be set according to the above-mentioned aqueous sodium hydroxide solution. (2) In the above embodiment, the pretreatment was performed before the electroless plating was performed in accordance with the full additive method. Processing may be performed. (3) The electroless plating may be solder plating, gold plating, or the like.
【0030】[0030]
【発明の効果】以上詳述したように本発明によれば、メ
ッキ液のpHの低下や塩の生成を防止してメッキ被膜の
密着性を向上させることができるとともに、メッキ液の
寿命を長くすることができ、さらにメッキ被膜の物性向
上を図ることができるという優れた効果を奏する。As described in detail above, according to the present invention, it is possible to improve the adhesion of the plating film by preventing a decrease in the pH of the plating solution and the generation of salts, and to prolong the life of the plating solution. And the physical properties of the plating film can be improved.
【図1】本発明の実施例を表す図であって、無電解メッ
キによる銅メッキ被膜が形成されたプリント基板を示す
断面図である。FIG. 1 is a diagram illustrating an embodiment of the present invention, and is a cross-sectional view illustrating a printed board on which a copper plating film is formed by electroless plating.
【図2】無電解メッキを施す前の状態を示すプリント基
板の断面図である。FIG. 2 is a cross-sectional view of a printed circuit board showing a state before electroless plating is performed.
1…プリント基板、3…スルーホール、4…メッキレジ
スト、5…メッキ被膜としての銅メッキ被膜。Reference numeral 1 denotes a printed board, 3 denotes a through hole, 4 denotes a plating resist, 5 denotes a copper plating film as a plating film.
Claims (1)
(1)にメッキレジスト(4)を形成後、無電解メッキ
を施す前処理として、酸性の触媒活性化液で処理する工
程と、その後前記活性化液を洗浄する水洗工程とからな
るアディティブ法におけるメッキ液の前処理方法におい
て、 前記水洗工程の後、メッキ液より高温で強アルカリの水
溶液で処理する工程を設けたことを特徴とするアディテ
ィブ法におけるメッキ液の前処理方法。1. A step of forming a plating resist (4) on a printed circuit board (1) according to an additive method and then treating with an acidic catalyst activating solution as a pretreatment for performing electroless plating, and thereafter, activating the activating solution. A pretreatment method of the plating solution in the additive method, comprising a washing step of washing; and after the washing step , a strong alkali water at a temperature higher than the plating solution.
A pretreatment method for a plating solution in an additive method, comprising a step of treating with a solution .
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP03159132A JP3126417B2 (en) | 1991-06-28 | 1991-06-28 | Pretreatment method of plating solution in additive method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP03159132A JP3126417B2 (en) | 1991-06-28 | 1991-06-28 | Pretreatment method of plating solution in additive method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0513928A JPH0513928A (en) | 1993-01-22 |
JP3126417B2 true JP3126417B2 (en) | 2001-01-22 |
Family
ID=15686951
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP03159132A Expired - Lifetime JP3126417B2 (en) | 1991-06-28 | 1991-06-28 | Pretreatment method of plating solution in additive method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP3126417B2 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4521947B2 (en) * | 2000-08-07 | 2010-08-11 | イビデン株式会社 | Pretreatment solution for electroless plating, treatment solution for electroless plating, and method for producing multilayer printed wiring board |
-
1991
- 1991-06-28 JP JP03159132A patent/JP3126417B2/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH0513928A (en) | 1993-01-22 |
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