JP3093192B2 - Work processing apparatus and computer-readable recording medium - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a workpiece processing apparatus and a computer-readable recording medium, and more particularly to an apparatus having a component for measuring a workpiece shape and an execution device having a function for measuring a workpiece shape. The present invention relates to a recording medium storing a program.

[0002]

2. Description of the Related Art At present, N is used for machining various workpieces.
C processing equipment is used in various manufacturing fields, but nowadays it is required to increase the frequency of developing new products and shorten the development period. Is needed. At the moment,
3D CAD (Computer Aided Design Software) for designing 3D shapes of workpieces, 3D CA
M (computer-aided design software) and the like have been actively used, and these software are used to shorten the design period and increase the efficiency of the design work.

However, to derive machining data based on the shape data determined by the above design,
It is necessary to consider the machining characteristics of the machining apparatus, such as the machine structure and machining tools, and the current situation is that products are produced while manually setting the machining apparatus using the know-how of the machining site.

[0004]

By the way, it is very difficult to perform a high-precision shape processing in accordance with the above-mentioned shape data even with a recent accurate and complicated NC processing apparatus. For example, as described above, even if machining is performed based on the same shape data depending on the machining structure of the machining device or machining characteristics of the machining tool, the detailed shape is slightly different, and it is not possible to realize highly accurate machining according to the shape data. difficult. In addition, regarding the mechanical structure of the processing device, for example, the processing shape greatly changes due to slight axis deviation of the drive shaft.
Lack of structural accuracy may affect machining accuracy,
It is very difficult to mechanically correct the effects such as structural misalignment.

[0005] In the above-described processing of a workpiece, it is necessary to accurately grasp the shape of the workpiece. For this reason, various three-dimensional shape measuring devices have recently been provided. In this three-dimensional shape measuring apparatus, a function of quickly and highly versatilely measuring high-accuracy shape is required, but high-accuracy shape measurement increases measurement information and increases measurement time. In addition, there is a problem that it is extremely difficult to provide these functions in parallel because the user dislikes a complicated mechanism capable of measuring various complicated shapes.

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and has as its object to provide a processing technique capable of complementing a processing error caused by a mechanical structure of a processing apparatus or a processing characteristic of a processing tool. In addition, in measuring the shape of the work, it is to provide a high-precision, yet quick and versatile shape measurement technology, and furthermore, with these technologies, various works can be accurately measured, and It is to build a system that can be manufactured quickly.

[0007]

Means taken by the work processing apparatus of the present invention to solve the above-mentioned problems include a work shape
Machining data based on the shape data indicating the reference shape corresponding to
Processing data generation means for generating data
Processing means based on the processing data
Processing control means for controlling and measuring the shape of the workpiece after processing
Measuring means, and applying the shape measuring means to a workpiece.
Relative driving means for relatively operating, and the shape data
Measurement operation control for controlling the relative driving means based on
A workpiece processing apparatus having
And the workpiece measurement type measured by the shape measuring means.
Deriving shape error data between the shape and the shape error data
Correction processing data by the processing data generating means on the basis of
Processing means based on the corrected processing data.
The workpiece is modified by the
The means includes a processing head, and an X axis, a Y axis,
Head drive device configured to be movable in each of the Z-axis direction
Structure, a work table, and turning the work table in the H-axis and V-axis directions.
A five-axis configuration having a table drive mechanism for moving the table.
Multiple detected objects separated in the axial direction of the H axis in the drive mechanism
Part and the detected part can be detected and mounted on the processing head.
And a detection device to be used with
While rotating the work table around the H axis,
A plurality of the target devices by the detection device mounted on the processing head.
Repeat the position measurement of the detecting part,
Is calculated, and the axis deviation is internally processed based on the calculated value.
Processing by the processing means and the shape
That it is configured to perform measurements by measuring means
Features.

In the present invention, the measuring operation control means
Means that the surface of the workpiece to be measured is
The relative driving means so as to be maintained within the angle range of
Preferably, it is configured to control.

In the present invention, a work that does not require correction processing
When there is a part, repair based on the shape error data
Equipped with a means for limiting correction processing to limit the range of normal processing
Is preferred.

Next, the computer readable of the present invention
For a simple recording medium, the operation procedure of the work processing device is compiled.
The executable program to make it executable by the
It is what was paid.

The work shape measuring device includes a measuring means for measuring the work shape, a relative driving means for operating the measuring means relatively to the work, and a measuring means for measuring the work shape by the measuring means. Measuring operation control means for controlling the relative driving means, wherein the measuring operation control means,
The relative driving means is controlled based on shape data representing a reference shape corresponding to the workpiece shape, and the measuring means is relatively operated . According to this means, by operating the measuring means based on the shape data, it is possible to reduce the unnecessary operation of the measuring means and the operation leading to the deterioration of accuracy, thereby shortening the measuring time and improving the measuring accuracy. Can be planned. The shape data includes data representing a design shape or a target shape of the work, data representing a schematic shape of the work, and the like. The shape data PP and general-purpose shape data PD in the embodiments described later correspond to these. When CAD data or the like exists in advance, the data itself or data obtained by converting the data can be used as shape data. However, data indicating the result of measuring the work shape by simpler means as described later is used. May be.

In the above-described work shape measuring apparatus , the relative driving means includes a measuring-side driving means for operating the measuring means and a work posture changing means for changing a work posture, which are controlled by the measuring operation control means. The measurement operation control means controls the work surface to be measured based on the shape data so that the work surface is maintained within a predetermined positional relationship and / or a posture range with respect to the measurement means to change the work posture. Is preferred. By changing the posture of the work while operating the measuring means based on the shape data, it is possible to more easily control the surface of the work so as to maintain a predetermined positional relationship and / or posture relationship with the measuring means.

In this case , it is preferable that the range of the positional relationship and / or the attitude relationship controlled and held by the measurement operation control means is an angle range of the work surface with respect to the measurement direction of the measurement means. By maintaining the angle of the work surface with respect to the measurement direction of the measurement means within a predetermined range, the measurement accuracy of the measurement means can be improved and the responsiveness of the measurement means to the work shape can be enhanced. For example, as a measuring means, a method using a laser probe for measuring the distance to the work surface by capturing the reflected light of the laser light from the work surface, a method for measuring the height of the work surface with the contact probe, and imaging the work surface Although there is a method of measuring the surface shape with reference to interference fringes and projection fringes, etc., in any method, the measurement direction is preferably a direction close to a direction orthogonal to the work surface, and a method orthogonal to the work surface Is most desirable.

In this case , it is preferable that the apparatus is configured to derive shape error data between the shape data and the measured shape of the workpiece measured by the measuring means. By deriving the shape error data between the shape data and the measured shape of the work, the shape error of the work can be grasped and used as a standard for correction processing.

In this case , it is preferable that the apparatus further comprises a rough shape obtaining means for obtaining the shape data as indicating a rough work shape obtained by obtaining a work image. When a workpiece having an unknown shape is measured as a workpiece shape measuring device, some means for acquiring shape data used at the time of measurement is required. Is obtained. Since the shape data is obtained based on the work image, the time for acquiring the shape data can be reduced. As a method of obtaining shape data based on a work image, a method of synthesizing a result of measuring a work from a plurality of directions and distances with reference to directions and distances, forming interference fringes on a work surface, a stripe pattern, For example, there is a method of projecting a lattice pattern or the like and calculating the shape of the work surface based on these patterns.

[0016] The workpiece processing apparatus includes a processing data generating means for generating processing data based on shape data indicating a reference shape corresponding to the workpiece shape, a processing means for processing the workpiece, and a processing means for processing the workpiece based on the processing data. Control means for controlling the workpiece, measuring means for measuring the shape of the processed workpiece, relative driving means for operating the measuring means relative to the workpiece, and the relative driving based on the shape data. Measuring operation control means for controlling the means . According to this means, the workpiece can be processed based on the shape data, and the shape of the processed workpiece can be quickly and accurately measured using the shape data.

In this case , the measuring operation control means controls the relative driving means so that the surface of the work to be measured is kept within a predetermined positional relationship and / or a posture range with respect to the measuring means. It is preferable to change the relative position and / or posture of the measuring means.

In this case , shape error data between the shape data and the workpiece measured shape measured by the measuring means is derived, and the working data generating means re-executes the working data based on the shape error data. Is preferably generated.

In this case , there is provided correction processing limiting means for generating partial processing data in which a work portion requiring correction processing is limited based on the shape error data, and the processing control means controls the processing control means based on the partial processing data. It is desirable to be configured to control the processing means. With this configuration, the correction processing based on the shape error data can be performed only on a necessary portion, so that the correction processing can be quickly performed.

The computer-readable recording medium includes:
An execution program for enabling a computer to execute the operation procedure of the measurement operation control means or the entire apparatus described in any of the above is stored . The measurement operation control means can be realized by an execution program for enabling the main part of the operation as the workpiece shape measuring device to be executable. It is possible to realize a work procedure as a measuring apparatus or a work processing apparatus by sequentially and automatically executing an operation program. Note that the measurement operation control means includes a measurement control data generation program 12, a measurement data processing program 13, and an NC control program 112 in an embodiment described later.
It is equivalent to a function realizing means realized by the above, and may be configured integrally, or may be configured by being divided into a plurality of unit program units.

[0021]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, an embodiment of a work processing apparatus and a computer-readable recording medium according to the present invention will be described with reference to the accompanying drawings. FIG. 1 is a schematic flowchart showing a procedure of a work processing using the first embodiment according to the present invention. 3D CAD / CAM1
1 is output as, for example, three-dimensional point cloud data.
Processing such as generation of a shape surface is performed by computer processing based on P, and general-purpose shape data PD is formed as general-purpose shape surface data or the like. Next, measurement control data QD, which is a basis for deriving drive control data of a measurement probe, drive control data of a work table, and the like, used for shape measurement based on the general-purpose shape data PD is generated.

On the other hand, the shape data PP is output to the NC control unit 110 of the NC processing device 100, and is converted into NC processing control data ND in the same manner as in a normal processing method.
Here, when performing the NC processing, a processing tool is mounted on the processing head of the NC processing mechanism 120 to perform processing by the NC processing mechanism 120, and then, if necessary, a measurement probe is mounted on the processing head to perform processing of the workpiece. Perform shape measurement. Also,
It is also possible to measure directly without performing any processing. In the shape measurement, the measurement control data QD generated based on the shape data PP and the general-purpose shape data PD is used.

As the NC processing mechanism 120, various mechanisms can be used. One example is an NC processing mechanism having a processing head 121 and a work table 122 as shown in FIG. In this case, the processing head 121 is configured to be linearly movable in each of three X-axis, Y-axis, and Z-axis directions by a head driving mechanism 123 serving as a measurement-side driving unit. A certain table drive mechanism 124 is configured to be rotatable around the H axis and the V axis, respectively, and constitutes a five-axis operation mechanism as a whole. The processing head 121 can be mounted with one of a plurality of processing tools 125 or a measurement probe 126 shown in the drawing. Head drive mechanism 123 and table drive mechanism 124
Are both controlled by the NC control unit 110.

The work shape is measured, for example, by first performing non-contact measurement using a non-contact probe such as a laser probe for irradiating laser light and detecting the reflected light to detect the work surface position. In addition, contact measurement is performed on a portion that cannot be measured by non-contact measurement using a contact probe such as a touch probe. At this time, if a shape corresponding to the shape data PP or the general-purpose shape data PD already exists in the workpiece 20, the processing head 121 and the work table 122 are relatively moved based on the shape data PP or the general-purpose shape data PD. By driving, the measurement can be optimized. For example, in any of the measurement methods, the measurement probe 121 linearly acts on the work 20 fixed on the work table 122, so that the measurement probe 121 and the surface of the work 20 on which the measurement probe 121 acts are measured. By maintaining the posture relationship within a predetermined angle range, preferably at a fixed angle, it is possible to perform the measurement reliably and to perform the measurement with high accuracy. That is, in order to detect the reflected light from the work surface, the laser probe needs to have the surface orientation of the work surface coincident with or close to the laser irradiation direction. In order to maintain accuracy, it is necessary that the surface orientation of the work surface coincides with the contact direction or is oriented in the vicinity thereof. Further, in any of the measurement probes 126, for example, the scanning trajectory of the probe is set along the shape data PP or the general-purpose shape data PD, or based on these data, between the processing head 121 and the work table 122. By determining and operating based on the relative operation, it is possible to reduce the time required for the measurement and improve the measurement accuracy. By operating the scanning trajectory of the probe along the shape data PP or the general-purpose shape data PD, a difference between the shape data and the measurement result can be directly obtained by the measurement data itself, as described later. There is also an advantage that comparison processing between the shape data and the measurement result becomes unnecessary.

The measurement data DT indicating the workpiece shape is derived as point cloud data, scanning line data, surface data, etc. by the measurement performed by the above method, and the measurement data DT is the above-mentioned shape data PP or general-purpose shape data. Compared with the PD, shape error data AM indicating the difference between the two shapes is output. Note that the measurement data detected by the measurement probe 126 as described above is the shape data PP.
Alternatively, if the data is the shape error data AM itself representing the difference between the general-purpose shape data PD and the workpiece shape, such processing is unnecessary, or noise reduction such as smoothing processing or data format conversion is performed. Such simple processing of data alone is sufficient. In addition, when the shape data represents the target shape, in this processing, if the measured shape of the workpiece is in an unrecoverable state such as excessively shaving the shape data, an alarm is sounded,
Means for notifying the operator are provided, and subsequent operations are stopped.

The shape error data AM derived as described above is converted into the above-mentioned processing data ND in the NC processing apparatus 100, and the processing is performed again. However, after this processing, the measurement may be performed again as described above to derive the shape error data again, or only the measurement may be performed and then the measurement data of the final shape may be derived. Further, the operation may be terminated as it is after the processing.

FIG. 8 schematically shows an example of a hardware configuration of the present embodiment. In this configuration example, the data processing device 10 such as a personal computer has a three-dimensional CAD / CAM 1
1. A measurement control data generation program 12 and a measurement data processing program 13 are installed. The three-dimensional CAD / CAM 11 generates three-dimensional shape data PP and general-purpose shape data PD based on a designer's intention. Even if the three-dimensional CAD / CAM 11 is not installed in the computer 10, the shape data PP and the general-purpose shape data PD may be imported from outside.

The measurement control data generation program 12
The control data for measurement QD is derived from the shape data PP and the general-purpose shape data PD. The shape data PP may be any of point cloud data, scan line data, surface data, various types of CAD data, and the like. The general-purpose shape data PD is a booklet having information formed based on the shape data PP. It is shape data of a predetermined format common to other data processing in the embodiment. When the shape data PP is supplied, it is once converted into general-purpose shape data PD by internal processing, and measurement control data QD is generated from the general-purpose shape data PD. The measurement control data QD is data for operating an NC control program 112, which will be described later, executed by the NC control unit 110 of the NC processing apparatus 100, and is an operation in a relative operation between the measurement probe 126 and the work 20. It becomes basic data for deriving speed, motion trajectory, etc.

The measurement data processing program 13 derives measurement data DT and / or shape error data AM of the workpiece shape from the workpiece shape measured by the NC processing apparatus 100. The work shape measurement data DT may be in any format, such as point cloud data, scan line data, and surface data, as long as it represents the work shape. Further, the shape error data AM may be directly obtained without deriving the measurement data DT. In the process of deriving the measurement data DT from the measured workpiece shape, the measurement data processing program 13 may use data processing such as data conversion similar to that of the measurement control data generation program 12, in this case. The data processing part may be partially integrated or integrated as a program, for example, by sharing the function realization part with the measurement control data generation program 12.

The NC machining apparatus 100 includes a machining control data generation program 111 for forming machining control data ND from the shape data PP and general-purpose shape data PD, a machining control data ND and the measurement control data QD. And an NC control program 112 for controlling the NC machining mechanism 120 by using the NC control unit 110 for controlling the entire NC machining apparatus 100, and the NC machining which constitutes the actual driving operation unit as described above. And a mechanism 120. The measurement control data generation program 1
2. The measurement data processing program 13 and the processing control data generation program 111
It may be configured to be executed in any of the C control units 110. Note that the NC control program 11
2 may be divided into a machining control program for performing machining control and a measurement control program for performing measurement control.

In the above embodiment, initially, the predetermined processing data ND is obtained from the initial shape of the workpiece and the shape data PP.
(0) is formed, and the primary processing of the workpiece is performed based on the processing data ND0. Next, the above-mentioned shape measurement is performed, and the processing data ND
(1) is formed, and the second processing is performed. Thereafter, when the shape measurement is performed again, the shape correction data AM (1) is derived again. Such a repetitive operation may be sequentially performed by a conventional procedure such as rough processing, medium finishing, and final finishing.

In the above embodiment, when measuring the shape of a workpiece whose shape is unknown (meaning that there is no target shape data), first, as shown in FIG. The work 21 is mounted on the processing head 121 to photograph a surface portion of the work 21. The imaging device 127 includes C
A photographing camera 128 such as a CD camera;
Is equipped. At this time, from the auxiliary light source 128,
A large number of parallel bright lines or dark lines, or stripe patterns composed of bright lines or lattice patterns composed of dark lines are projected on the surface of the work 21. The photographing camera 128 takes in the projected stripe pattern or lattice pattern and calculates the three-dimensional shape of the work surface.
The imaging device 127 photographs the surface of the work at a plurality of locations, and combines the three-dimensional shapes calculated from these images to synthesize three-dimensional shape data. In this case, the imaging device 127 and the work table 122 are appropriately moved so that the imaging range of the imaging camera 128 set to a predetermined area covers the entire surface of the work 21. The NC control unit 110 detects the positions and postures of the processing head 121 and the work table 122 and uses them to determine the position and posture of the three-dimensional shape from the image. However, the work 2 is
A detection sensor for detecting a distance or a direction from the device 1 may be provided.

The shape data of the work 21 detected as described above is used in the same manner as the above-described shape data PP and general-purpose shape data PD, and is measured and processed as described above. In addition, as a method of obtaining shape data from image data by an imaging device, the direction and distance of the camera are recorded as shooting condition data from a plurality of directions and distances without using a stripe pattern or a lattice pattern as described above. A method of synthesizing a plurality of photographed image data with the photographing condition data may be used.

Next, a method for compensating for an error in the mechanical operation of the NC drive mechanism 120 used in the above embodiment will be described with reference to FIG. In this method, a detection device 130 including an optical sensor or the like is mounted on the processing head 121 and a plurality of detected portions 131 and 132 separated in the H-axis direction are formed on the surface of the table drive mechanism 124. Then, the detection unit 13 is detected by the detection device 130.
The positions of 1,132 are measured. At this time, the position measurement of the detected parts 131 and 132 by the detection device 130 is repeatedly performed while rotating the table driving mechanism 124 about the H axis or performing an intermittent operation such as stopping during measurement after the rotation. Then, the result is compared with the set values (rotation radius, rotation angle) recorded in the NC control unit 110, and the axis deviation of the H axis is calculated. The calculated value of the axis deviation compensates for the amount of axis deviation in the internal processing of the NC control unit 110, so that accurate processing is performed during processing and accurate measurement data is obtained during measurement. It should be noted that the detected portion may be measured at three points to form a plane including the three points, and how the plane data changes due to the rotation of the axis may be measured to derive the axis deviation correction value. In order that the detected portion can always be accurately observed from above, for example, a liquid is placed in a transparent container, and the marking material is configured to be detected by the detection device as a structure in which the marking material is floating on the liquid. Is preferred.

Although the above method shows a method for detecting the H axis misalignment, the V axis misalignment can be similarly detected. Also, when measuring any of the H-axis and V-axis misalignments, the measured values also include the X-axis, Y-axis, and Z-axis drive axes of the processing head 121. If the operation deviation is measured, it is not necessary to separately measure the operation deviation of the processing head 121.

FIG. 7 is an explanatory diagram relating to processing of measurement data at the time of measurement in the above embodiment. When measuring the shape of the work 20, the work surface 20a is scanned by the measurement probe 126 and the image pickup device 127 to measure the surface shape, but the deep hole 2 drilled from the work surface 20a is measured.
In some cases, a part that cannot be detected accurately, such as a depressed part such as 0b, may occur. In such a case, the shape data 20c corresponding to the work surface in the detectable range
On the other hand, the work shape is converted into data by assuming that the shape of the depressed portion such as the deep hole 20b has a plane continuous with the work surface 20a or a hole bottom surface 20d slightly drawn from the work surface 20a.

Next, a modification of the above embodiment will be described with reference to FIG. In this modification, the basic process is the same as that of the above embodiment, but after deriving the shape error data AM, a portion where the shape error data AM is smaller than a predetermined threshold is removed from the correction processing range. By limiting the correction processing range, the partial error data B
Form M. The processing control data generation program 111 in the NC processing apparatus 100 derives processing data ND for performing correction processing on a work in a limited correction processing range based on the partial error data BM,
The processing mechanism 120 corrects the work in a limited correction processing range based on the control of the NC control unit 110.

With this configuration, there is an area where the shape error is extremely small on the surface of the work, and in this area, an error that does not cause a problem in required accuracy or correction in processing accuracy becomes meaningless. In such a case, it is possible to avoid an increase in the processing time caused by performing the correction processing on the entire surface of the work surface unnecessarily.
Also, as shown by the dotted line in the drawing, by giving range data CM indicating the limited correction processing range to the control data generation program for measurement 12 described above, subsequent shape measurement is limited to within the correction processing range, and measurement is performed. Time and data processing time can be reduced.

The above-described measurement control data generation program 12 and measurement data processing program 13 are respectively mounted on a removable or fixed recording medium in the form of a magnetic tape, a magnetic disk, an optical disk, a magneto-optical disk, or the like. Is stored. Further, the measurement control data generation program 12 and the measurement data processing program 13 may be integrated, and the three-dimensional CAD / CA
It may be integrated with M11.

[0040]

As described above, according to the present invention, by operating the measuring means based on the shape data,
Unnecessary in the measurement means, and it is possible to reduce the operation leading to accuracy deterioration, it is possible to improve the shortening measurement accuracy of the measurement time.

[Brief description of the drawings]

FIG. 1 is a schematic flowchart showing an embodiment of a work shape measuring device, a work processing device, and a recording medium according to the present invention.

FIG. 2 is a schematic flowchart showing a modification of the embodiment.

FIG. 3 is a schematic configuration diagram illustrating a schematic configuration of an NC processing apparatus.

FIG. 4 is a schematic diagram showing a situation at the time of measuring a workpiece shape.

FIG. 5 is a schematic diagram showing a situation when measuring a workpiece shape using an imaging device.

FIG. 6 is a schematic explanatory view showing a method of detecting an axis shift of the NC drive mechanism.

FIG. 7 is a conceptual diagram showing a configuration example of measurement data when measuring a workpiece shape.

FIG. 8 is a schematic configuration diagram showing a hardware configuration of the embodiment.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 Personal computer 11 3D CAD / CAM 12 Measurement control data generation program 13 Measurement data processing program 20, 21 Work 20a Work surface 100 NC processing device 110 NC control unit 111 Processing control data generation program 112 NC control program

──────────────────────────────────────────────────続 き Continued on the front page (58) Fields surveyed (Int. Cl. ⁷ , DB name) G01B 5/00-5/30 B23Q 15/00-15/28 B23Q 17/00-23/00 G01B 21 / 00-21/32

Claims (4)

(57) [Claims] 1. A processing data generating means for generating processing data based on shape data indicating a reference shape corresponding to a workpiece shape, a processing means for processing a workpiece, and controlling the processing means based on the processing data. Processing control means, shape measuring means for measuring the shape of the work after processing, relative driving means for operating the shape measuring means relative to the work, and the relative driving means based on the shape data In the workpiece processing apparatus having a measuring operation control means for controlling the shape data, the shape error data between the workpiece measurement shape measured by the shape measuring means is derived, and based on the shape error data, The modified data is generated by the modified data generating means, and the workpiece is modified and modified by the modifying means based on the modified modified data. Serial processing means includes a treatment head, X-axis the processing head,
A 5-axis configuration including a head drive mechanism configured to be movable in the Y-axis and Z-axis directions, a work table, and a table drive mechanism for rotating the work table in the H-axis and V-axis directions, A plurality of detected parts separated in the direction of the axis of the H axis in the table drive mechanism, and a detection device capable of detecting the detected part and used by being mounted on the processing head are provided. While rotating the table around the H axis, the position of the plurality of detected parts is repeatedly measured by the detection device attached to the processing head, and the H axis misalignment is calculated. A workpiece processing apparatus configured to compensate for the axis deviation by an internal process and perform processing by the processing unit and measurement by the shape measuring unit. 2. The measuring operation control means according to claim 1, wherein said measuring operation control means controls said relative driving means such that a workpiece surface to be measured is kept within a predetermined angle range with respect to said measuring means. A work processing apparatus characterized by being configured. 3. The apparatus according to claim 1, further comprising a correction processing limiting unit configured to limit a correction processing range based on the shape error data when a work part that does not require the correction processing exists. A work processing apparatus characterized by the following. 4. A computer-readable recording medium storing an execution program for enabling a computer to execute the operation procedure of the work processing apparatus according to claim 1.