JP3085904B2 - Pulse generator - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a pulse generator, and more particularly to a pulse generator, in which an electrode is installed in a gas such as exhaust gas discharged from a power plant, a pulse power is applied to the electrode to generate a plasma, and an electric operation is performed. When processing harmful substances
It is useful to use .

[0002]

2. Description of the Related Art FIG. 6 is an explanatory view conceptually showing a distributed constant pulse generator according to the prior art using a coaxial cable. In the figure, 1 _-1, 1 _-2 coaxial cable
One is folded back to the same length L to create an equivalent distributed constant circuit.
The formed distributed constant line, 3 is a high voltage side wiring, 4 is a low voltage side wiring, V ₀ is a DC charger, S ₁ is a short circuit switch, V _1-1 ,
V _1-2 is a distributed constant line 1 _-1 generated in the direction of the arrow 1 _-2
Voltage, Z is the load, V _P is the voltage applied to the load Z.

[0003] distributed constant line 1 _-1, 1 _-2, the characteristic impedance Z _1a, a coaxial cable having a length L in Z _1b, the core wire 1 _-1a, 1 _-2a and the core 1 _-1a, 1 _-2a Conductors (such as shield coating) surrounding the antenna via an insulating material 1 _-1b , 1
_Made-2b, the turning point is not covered core 1 _-1a, only 1 _-2a at. The core wires _1-1a and _1-2a are connected in series with each other, and are connected at one end (input side end) via the high voltage side wiring 3.
Is connected to the DC charger V ₀ . Outer conductor _1-1b , 1
_-2b are shorted connected by short-circuit line 5 _-1 to each other in short-circuit switch S ₁ side (input side end), to the low pressure side wiring 4 input end of the outer conductor 1 _-1b is the ground wire input end of the outer conductor _1-2b is connected is connected to the high voltage side line 3 via the short-circuit switch S _1.

At this time, impedance matching between the DC charger V _{0 as} a power source and the load Z is established. That is,
Z = _Z1a + _Z1b .

Further, the distributed constant line 1 _-1, 1 _-2 characteristic impedance same, i.e. exactly the same distributed constant line 1 _-1
When using the 1 _-2 propagation velocity v of the voltage is the same.
Distributed constant line 1 _-1, 1 _-2 core 1 _-1a, 1 _-2a and the outer conductor 1 _-1b, an insulator dielectric constant of between _1-2b epsilon, when the magnetic permeability and mu, voltage propagate The speed v is given by the following equation (1).

(Equation 1)

[0006] In such a pulse generator, as the initial state left open the short-circuit switch S _1, keep charging the voltage V ₀ from the DC charger V ₀ to the high-voltage side wiring 3 shown by a thick line. In this case, the output voltage V of the distributed constant line _1-1 is
_1-1 V _0, the output voltage V _1-2 of the distributed constant line 1 _-2 -V
_0, the voltage V _P applied load Z is 0. The distribution of the voltage waves charged in the distributed constant lines 1 _-1 and 1 _-2 is represented by the sum of the traveling wave and the backward wave as at t = 0 in FIGS. 7A and 7B.

After completion of the power reception, the short-circuit switch S is set at time t = 0.
7 (a) and 7 (b) show the state of the voltage wave after ₁ is input. t = 0 is the voltage wave state just before insertion of the short-circuit switch S _1. In t = L / 2v, distributed constant line 1 _-2 but the polarity reversal of the voltage wave generated by the short-circuit switch S ₁ side, distributed constant line 1 _-1 is the open end short-circuit switch S ₁ side, the load Z side both since no variation of the voltage wave (precisely, the load side in the distributed constant line 1 _-1, but 1 _-2 and energy exchanged between the load Z is occurring, consider an open end so offset each other May be).

[0008] In t = L / v, the voltage between the load Z terminal of the distributed constant line 1 _-2 shorted state, the applied voltage V _P to the load Z is V _0. Therefore distributed line 1
Voltage variation of _-1 is generated, without reflection because they take the impedance matching, the distributed constant line 1 _-1, the voltage wave of the distributed constant line 1 _-2 begins to propagate to the load Z. The voltage generated from t = L / v to t = 3 L / v is applied to the load and absorbed as shown in FIG. As a result, FIG.
As shown in the figure, a voltage having a peak voltage V ₀ and a pulse width of 2 L / v is supplied to the load Z.

[0009] Thereafter, again becomes the initial state when opening the shunt switch S _1, the above is repeated.

When the peak voltage is to be increased by using the apparatus shown in FIG. 6, the apparatus shown in FIG.

In FIG. 8, V ₀ is a DC charger, S ₁ , S ₂ ,.
, S _N are short-circuit switches, 1 _−1, 1-2 _, 2 _−1, 2 _−2,.
N _{-1 and} N _-2 are distributed parameter lines, L is length, Z is load, V
_P is the output voltage applied to the load Z, 3 is the high voltage side wiring,
4 is a low voltage side wiring, 5 _-1 , 5 _-2 ,..., 5- _N is a short-circuit line. At this time, the distributed constant lines 1 ₋₁ , 1 ₋₂ , 2 ₋₁ , 2 ₋₂
, ... N _-1, the outer conductor adjacent in upper and lower at the output side end portion of the _{N -2 (1 -2b, 2 -1b} ), (2 -2b, ..., N -1b) to each other sequentially connecting line 9 _{- 1} , 9 _-2 , ..., _{9- (N-1)} . On the other hand, on the short-circuit switches S ₁ , S ₂ ,..., _SN side (input side end), the external conductors ( _1-2b , _2-1b ),
( _2-2b ,..., N- _1b ) are not connected to each other. FIG. 9 is an equivalent circuit of FIG. In the figure, the same parts as those in FIG. 8 are denoted by the same reference numerals, and duplicate description will be omitted.

[0012] Here, the same characteristic impedance until all N-th stage above the first stage below, the same length of the distributed constant line _{1 -1, 1 -2, 2 -1} , 2 -2, ..., N Consider the case where _-1 and N _-2 are used. It is also assumed that impedance matching between the load Z and the power supply is established. That is, Z = Z _1a + Z _1b +
Z _2a + Z _2b +... + Z _Na + Z _Nb .

In the initial state, the short-circuit switches S ₁ , S ₂ ,
..., S _N is previously turned off, the voltage V ₀ from the DC charger V ₀
Is charged in the high-voltage side wiring 3 shown by a thick line.

After charging is completed, at time t = 0, the short-circuit switch S
_1, S _2, ..., at the same time turning on the S _N. Each shunt switch S _1, S _2, ..., the voltage V _P applied to the load Z at this time the S _N is completely consistent with poured is as shown in FIG. 10.
Therefore, a pulse having a peak voltage NV ₀ and a pulse width of 2 L / v is supplied to the load Z.

FIG. 11 is an explanatory view conceptually showing another distributed constant type pulse generator according to the prior art using a parallel plate. 6, the same parts as those in FIG. 6 are denoted by the same reference numerals.

[0016] As shown in FIG. 11, equivalent distributed constant times
Distributed line 11 _-1 , 11 _-2 which is a pair of flat plates forming a path
_Has flat plates 11 _-1a , 11 _-2a , and 11 _-3 having a length L and a width W.
_-1a, it is obtained by inserting a plate 11 _-3 between 11 _-2a.
At this time, the flat plate-11 _-2a has its input side end portion Yes connected to the side opposite to the DC charger V ₀ which shunt switch S _1, which connects the low-pressure side wiring 4 which is the ground wire to the input end 11
_Grounded as in _-1a . The flat plate _11-3 has its input side end connected to the high voltage side wiring 3. Flat plate (11 _-1a , 1
1 _-3 ) and (11 _-3 , 11 _-2a ) are insulated by a dielectric insulator having a dielectric constant ε, a magnetic permeability μ and a thickness D inserted therebetween, and have the same function as a capacitor.

[0017] Thus, the flat plate 11 _-1a, 11 together constitute a distributed constant line 11 _-1 characteristic impedance Z _{11a -3,} flat 11 _-1b, 11 _-3 characteristic impedance Z
_11b constituting the distributed constant line 11 _-2.

In this case, the capacitance C is C = 2εLW /
D. Accordingly, the flat plate 1 _-1a, 11 _-2a, 11 _-3
Can be increased by changing the size (length L × width W), thickness D, and dielectric constant ε.

Here, impedance matching between the DC charger V _{0 as} a power supply and the load Z is established. That is, Z
= Z _11a + Z _11b . In addition, the distributed constant line 11 _-1 ,
The characteristic impedance of 11 _-2 is the same, that is, when the same distributed constant lines 11 _-1 and 11 _-2 are used, the voltage propagation speed v is also the same.

Thus, the same operation as that of the pulse generator constituted by the coaxial cable shown in FIG. 6 is also performed in the pulse generator constituted by the parallel plate (FIG. 7A, FIG.
(See (b)) to supply a pulse voltage as shown in FIG.

[0021] When increasing the peak voltage using the circuit shown in FIG. 11, good if constituting an apparatus as shown in FIG. 12 are overlapped in independent form the device shown in FIG.
No. This is a device corresponding to the device shown in FIG. Therefore, in FIG. 12, the same portions as those in FIG. 8 are denoted by the same reference numerals, and duplicate description will be omitted.

The pulse generator shown in FIG. 12 is obtained by stacking N units of the pulse generator shown in FIG. 11 as a unit. That is, N-stage distributed constant lines 11 ₋₁ , 11 ₋₂ , 12 ₋₁ , 12 _−2,.
N _-1, that have a NN _-2.

In such a pulse generator as well as the pulse generator shown in FIG.
Shunt switch S _1, S _2, ..., is Rukoto generates a pulse voltage shown in FIG. 10 by injecting S _N simultaneously
I can .

[0024]

When generating a pulse at INVENTION Problems to be Solved] as shown in FIGS. 8 and 12 configuration, short-circuit switches S _1, S _2, ..., while it is necessary to introduce the S _N simultaneously, this If the timing does not match , the output voltage V _P
Causes a phenomenon that the temperature decreases . This is because the pulse width is very short and nanosecond order, each of the short-circuit switches S _1, S _2, ..., the delay of the trigger voltage application due to the difference in wiring impedance regarding S _N or discharge delay effects, such as, increases, This is because it is difficult to adjust the timing.

If there is a delay in the application of the trigger voltage, as shown in FIG. 13, for example, the combined pulse of the output voltages of the three circuits A, B, C becomes as shown in FIG.
₀ pulse cannot be obtained.

In view of the above prior art, an object of the present invention is to provide a pulse generator capable of supplying the outputs of a plurality of pulse generators connected in parallel as the most ideal pulse waveform to a load.

[0027]

The structure of the present invention that achieves the above object has the following features.

1) Equivalent by folding one to the same length
Has multiple stages of coaxial cables forming a distributed constant circuit,
The core wire, which is the inner conductor of each coaxial cable, is connected to one DC power supply.
While connection to a high pressure side, respectively, adjacent the coaxial cable
Of the DC power supply side of the outer conductor of the
And to the DC power supply via this ground wire.
Connected to the ground, and a DC power supply and any one coaxial cable.
Provided one switching means between the bull of the outer conductor, it is
The other side of the outer conductor of the coaxial cable from the DC power supply
Are connected to each other in sequence,
It is located at one end of the coaxial cable
Coaxial cable and the coaxial cable located at the other end
And each of the outer conductors on the opposite side of the DC power supply
The opposite electrodes are connected between the ends, and the switch means
The pulse voltage generated by each coaxial cable with
It is configured to be applied so as to overlap between the electrodes .

2) The outer conductor has a U-shaped cross section.
Two U-shaped flat plates, and between each side of each U-shaped flat plate
And the ends opposite to the DC power supply are connected to each other.
Equivalent distribution determination with two flat plates that are continuous internal conductors
A plate unit formed with several circuits have a plurality of stages, each flat Yoo
The flat plate, which is the inner conductor in the knit, is
Connect to the high-pressure side respectively, while the adjacent flat plate unit
Of the U-shaped flat plate on the side of the DC power supply
And a DC power supply via this ground wire.
To the ground side of the DC power supply.
One between one of the U-shaped flat plate in a flat plate unit stage
Pieces of switch means, and one U-shaped flat plate and
On the other side of the U-shaped plate opposite to the DC power supply
Are connected to each other in sequence,
It is located at one end of the flat plate units
At one U-shaped flat plate and the other end of the flat plate unit
DC power from the other U-shaped flat plate
Connect the opposing electrodes between each end opposite the source and
Generated in each flat plate unit when the switch means is turned on.
Pulse voltage is superimposed and applied between the electrodes.
That you have configured .

3) One flat plate serving as an internal conductor and
Two flat plates serving as external conductors arranged in parallel above and below the flat plate
And a parallel plate unit forming an equivalent distributed constant circuit
And the inner conductor in each parallel plate unit
Connect a flat plate to the high voltage side of one DC power supply
On the other hand, it becomes an external conductor among adjacent parallel plate units
The ends on the DC power supply side of the two flat plates are connected to each other with a ground wire.
And grounding of the DC power supply through this grounding wire.
Side, and with the DC power supply, one of the parallel
One flat plate forming the outer conductor in the flat plate unit
One switching means is provided, further shape the outer conductor during
The DC power supply on one plate and the other
Each end on the opposite side should be
And the parallel plate unit of multiple stages
One external conductor of the parallel plate unit located at one end
Flat plate as body and parallel flat plate unit located at the other end
Opposite to DC power supply in the other outer conductor of the flat plate
Connect the electrodes facing each other between the two ends of the
Generated by each parallel plate unit when the
It is configured so that the loose voltage is superimposed and applied between the above electrodes
That you did .

[0031]

Embodiments of the present invention will be described below in detail with reference to the drawings.

FIG. 1 is an explanatory view conceptually showing a first embodiment of the present invention, and FIG. 2 is a circuit diagram showing an equivalent circuit thereof. This embodiment is an improvement of the pulse generator shown in FIG. In other words, the coaxial cable is folded back to
This constitutes a distributed constant circuit. Note that the same portions as those in FIG. 8 are denoted by the same reference numerals, and redundant description will be omitted.

As shown in FIG. 1, the short-circuit switch S ₁ is connected to the DC charger V ₀ and the outer conductor 1 of the first _- stage distributed constant line 1-2.
Only one is provided between the input side end of _-2b and the outer conductor of each stage ( _1-2b , _2-2a ), ( _2-2b , ..., N- _2a )
The input side respectively between the ends grounding wire _{6-1, 6-2,} ..., 6
Connected _by-(N-1) . As a result, the outer conductors _1-1b , 1
_-2b , _2-1b , _2-2b ,..., N- _1b , N- _2b are at the ground potential.

[0034] Here, the same characteristic impedance until all N-th stage above the first stage below, the same length of the distributed constant line _{1 -1, 1 -2, 2 -1} , 2 -2, ..., N _-1 and N _-2 are used.
In addition, impedance matching between the load Z and the power supply is achieved.

[0035] In such a pulse generator, the initial state left open the short-circuit switch S _1, the DC charger V ₀
The voltage V ₀ which the high-voltage side wiring 3 shown by a thick line in FIG. 1 keep the charge. After charging is completed, when the short-circuit switch S ₁ is turned on at t = 0, each set of distributed constant lines (1 ₋₁ ,
(1 _-2 ), (2 _-1 , 2 _-2 ),... (N _-1 , N _-2 ) generate a voltage having a pulse width of ₂ L / v and a peak voltage V ₀ (the principle is described above). It N times the voltage V _P to the load Z as shown in FIG. 3 is applied overlap. Therefore, a pulse having a peak voltage NV ₀ and a pulse width of 2 L / v is supplied to the load Z. Then, again it becomes the initial state if off a short circuit switch S _1, is repeated the foregoing.

FIGS. 4 and 5 are explanatory views conceptually showing a second embodiment of the present invention. This embodiment is an improvement of the pulse generator shown in FIG. Therefore, the same parts as those in FIG. 12 are denoted by the same reference numerals, and duplicate description will be omitted.

FIG. 4A is an explanatory diagram extracting and showing a pulse generator which is the first stage of the present embodiment. As shown in the figure, this pulse generator has an external U-shaped cross section.
A U-shaped flat plate serving as a conductor, and a U-shaped flat plate
The equivalent distributed constant circuit with the flat plate serving as the internal conductor
Distributed constant lines 21 ₋₁ , 21 that are a plurality of formed flat plate pairs
_-2 . The distributed constant lines 21 _-1 and 21 _-2 have cross-sectional shapes
Is a flat plate 21 which is an external conductor bent so as to form a U-shape.
_-1b, the flat plate 21 and _{21-2b -1b,} 21 flat 21 _-1a an inner conductor that is inserted _between-2b, 21 and _-2a has respectively, although not shown dielectric constant epsilon, A dielectric insulator having a magnetic permeability μ and a thickness D is interposed.

DC charging in flat plates _21-1a and _21-2a
The ends on the side opposite to the charger V ₀ are connected to each other by a connection line 7, and the end of the flat plate _{21-1 b on} the DC charger V ₀ side is connected to the high-voltage side wiring 3. Further, the flat plates _21-1b , 21
Ends of the DC charger V ₀ side _-2b is connected with the ground line 8
It is grounded Te.

In this embodiment, the distributed constant line 21 _-1 ,
The unit constituted by 21 _-2 those stacked in multiple stages. Therefore, it can be represented by a block as shown in FIG. This block is connected to distributed parameter lines I, I
The following description will be made with I,.

I represents the first stage, II represents the second stage, and N represents the N-th distributed constant line. Also, terminals a, b, c,
d and S correspond to the terminals a, b, c, d and S in FIG. Accordingly, the first-stage distributed constant line I
In this case, the terminal a is connected to the high voltage side wiring 3, and the terminal b
The low-voltage side wiring 4, terminals c, d are mutually terminal S is coupled respectively to the high-voltage side wiring 3 through the short-circuiting switch S _1.

Further, the input side end of this time the terminal a flat plate 21 _-2a, terminal b to the input side end portion of the flat plate 21 _-1b, terminal c to the output side end portion of the flat plate _21-2b, terminal d is a flat plate 21
_The terminal S is connected to the short-circuit line 8 at the output side end of _-1b . Accordingly, the flat plate 21 _-1a in charged state opening the short-circuit switch S _1, 21 _-2a are high voltage potential, the flat plate 2
1 _-1b and 21 _-2b are at the ground potential.

FIG. 5 shows a pulse generator according to the present embodiment in which the blocks shown in FIG. In the figure, the same parts as those in FIG. 1 are denoted by the same reference numerals, and duplicate description will be omitted.

As shown in FIG. 5, each distributed constant line I, I
The high voltage side wiring 3 is connected to the terminals a of I,..., N, and the respective terminals b are connected to each other by the low voltage side wiring 4 which is a ground line. Between 1
Number of short-circuit switch S ₁ is is connected.

The terminals c and d which are adjacent in the upper and lower stages are sequentially connected by connection lines 9 _-1 , 9 _-2 ,..., _{9- (N-1)} . The load Z is connected between the terminal c and the terminal d of the lowermost distributed constant line I.
The terminal S is open.

Here, the distributed constant lines I to N from the lower first stage to the upper N stage all have the same characteristic impedance and the same length. Also, the impedance matching between the load Z and the DC charger serving as the power supply is ensured.

In such a pulse generator, in the initial state, the short-circuit switch S ₁ is opened and the DC charger V ₀
A higher voltage V ₀ is charged to the flat plates 21 _-1a and 21 _-2a on the higher voltage side.

[0047] After charging is completed, turning on the short-circuit switch S ₁ at t = 0. As a result, each set of distributed constant lines I to
Output voltage V _P applied to the load Z is superimposed voltage generated by N is as shown in FIG. Therefore, similarly to the above embodiment, the peak voltage NV ₀ and the pulse width 2 L / v
Are supplied to the load Z. Then, again it becomes the initial state if off a short circuit switch S _1, is repeated the foregoing.

The high voltage side flat plates 21 _-1a and 21 _-2a
Etc., of the low-voltage side flat plate 21 _-1b, a large area, such as _21-2b
By increasing the distance between the flat plates, or by using a dielectric having a high dielectric constant as an insulator between the flat plates, it is possible to increase the overall capacity by increasing the capacity of each unit.

Further, in the above embodiment, the units of the distributed constant lines I to N are constituted by the distributed constant lines 21 _-1 and 21 _-2 shown in FIG. 4A, but the present invention is not limited to this. . Even with the distributed constant lines 11 _-1 and 11 _-2 shown in FIG. 11, exactly the same operation and effect can be obtained. At this time,
Terminal a in FIG. 4, in <br/> intended to be connected to the flat plate 11 _-3 11, and so the terminal b is flat 11 _-1a, 11
The ends of the DC charger V ₀ side _-2a, the terminal c flat 11
The end opposite to the DC charger V ₀ which _-2a, terminal d is flat
11 and DC charger V ₀ which _-1a shall the opposite end is connected respectively.

[0050]

According to the present invention, as described above in detail with the embodiments, it is possible to operate with one short-circuit switch. The problem that the output voltage does not match and the output voltage drops can be eliminated, and a desired ideal large voltage pulse can be obtained.

[Brief description of the drawings]

FIG. 1 is an explanatory view conceptually showing a first embodiment of the present invention.

FIG. 2 is a circuit diagram showing an equivalent circuit of FIG. 1;

FIG. 3 is a waveform chart showing an output voltage waveform of the pulse generator of FIGS. 1 and 5;

FIG. 4 is an explanatory diagram conceptually showing one unit according to a second embodiment of the present invention and a block diagram thereof.

FIG. 5 is an explanatory view conceptually showing the whole second embodiment of the present invention.

FIG. 6 is an explanatory view conceptually showing a distributed constant pulse generator according to the prior art using a coaxial cable.

FIG. 7 is an explanatory view showing the principle of pulse generation by the device shown in FIG. 6;

FIG. 8 is an explanatory view conceptually showing a pulse generator in which the device shown in FIG.

FIG. 9 is a circuit diagram showing an equivalent circuit of FIG. 8;

FIG. 10 is a waveform chart showing an ideal output voltage waveform of the device shown in FIGS. 8 and 12;

FIG. 11 is an explanatory view conceptually showing a pulse generator of a distributed constant type according to another conventional technique using a parallel plate.

FIG. 12 is an explanatory view conceptually showing a pulse generator in which the device shown in FIG.

FIG. 13 is a waveform chart showing an actual output voltage waveform of the device shown in FIGS. 8 and 12;

[Explanation of symbols]

1 _{-1,1 -2,2 -1} , 2 _-2 , N _-1 , N _-2 , 21 _-1 , 21 _-2
, I, II, N Distributed constant lines _1-1a , _1-2a , _2-1a , _2-2a , N- _1a , N- _2a cores _1-1b , _1-2b , _2-1b , _2-2b , N _-1b , N- _2b outer conductor 3 High voltage side wiring 4 Low voltage side wiring 6 _-1 , 6 _-2 , 6- _(N-1) grounding line 21 _-1a , 21 _-1b , 21 _-2a , 21 _-2b Flat plate V ₀ DC charger S ₁ Short circuit switch

────────────────────────────────────────────────── ─── Continuation of the front page (56) References JP-A-2-21713 (JP, A) (58) Fields investigated (Int. Cl. ⁷ , DB name) H02M 9/04

Claims (3)

(57) [Claims] 1. An equivalent part by folding one piece to the same length.
A DC power supply that has multiple stages of coaxial cables that form a cloth constant circuit and that uses a single core wire as the inner conductor of each coaxial cable.
Of the DC power supply side of the outer conductor of the adjacent coaxial cable.
Connect the ends to each other with a ground wire and
Connected to the ground side of the DC power supply , and the DC power supply and the outer conductor of any one coaxial cable
Between the DC power supply and the outer conductor of the coaxial cable.
When the ends on the side are connected to each other in sequence,
Both are coaxial cables located at one end of a multi-stage coaxial cable.
Between the cable and the coaxial cable located at the other end.
Between each end of each outer conductor opposite the DC power supply
To the opposite electrode, and turn on the switch means.
In both cases, the pulse voltage generated by each coaxial cable is
A pulse generator characterized in that it is configured to be applied so as to be superimposed therebetween. 2. An outer conductor having a U-shaped cross section.
Are placed between both sides of each U-shaped plate and each U-shaped plate.
And the other end opposite to the DC power supply
Equivalent distributed constant times with two flat
It has a plurality of flat plate units forming a path, and the flat plate, which is the internal conductor in each flat plate unit,
While connected to the high pressure side of the flow source, a direct current in the U-shaped flat plate of the flat plate units adjoining conductive
Connect the power source ends to each other with
Connect to the ground side of the DC power supply via a ground wire, and
Power supply and one U in one of the flat plate units.
One switch means is provided between the U-shaped flat plate and the other U-shaped flat plate.
The end of the DC power supply and the other side of their respective, one adjacent the
A flat plate that is sequentially connected to each other and located at one end of a plurality of flat plate units
One U-shaped flat plate of the unit and the flat plate located at the other end
DC unit and the other U-shaped flat plate
Connect electrodes facing each other between the opposite ends, and
Generated by each flat plate unit when the
So that the source voltage is superimposed and applied between the electrodes.
A pulse generator. 3. A single flat plate serving as an internal conductor, and the flat plate
With two flat plates that are the outer conductors arranged in parallel above and below
Multiple parallel plate units forming an equivalent distributed constant circuit
One flat plate that has several stages and is an internal conductor in each parallel plate unit
Connected to the high-voltage side of the DC power supply, while two of the adjacent parallel plate units serving as external conductors
The ends on the DC power supply side of the flat plate are connected to each other with a ground wire
And connect to the ground side of the DC power supply via this ground wire.
The above-mentioned DC power supply and any one-stage parallel plate unit
Between one flat plate forming the outer conductor
Switch means is provided, and one plate and the other plate forming the external conductor
Each end opposite to the DC power supply
Are connected to each other sequentially, and are located at one end of a plurality of parallel plate units.
The flat plate, one of the outer conductors of the parallel plate unit, and the other
The other outer conductor of the parallel plate unit located at the end
Between the opposite ends of the flat plate and the DC power supply.
Connect the electrodes facing each other and turn on the switch
The pulse voltage generated by each parallel plate unit is
A pulse generator configured to be applied so as to be superimposed on the pulse.