JP3079394B2 - Method and apparatus for manufacturing liquid crystal display element - Google Patents
Method and apparatus for manufacturing liquid crystal display elementInfo
- Publication number
- JP3079394B2 JP3079394B2 JP04148047A JP14804792A JP3079394B2 JP 3079394 B2 JP3079394 B2 JP 3079394B2 JP 04148047 A JP04148047 A JP 04148047A JP 14804792 A JP14804792 A JP 14804792A JP 3079394 B2 JP3079394 B2 JP 3079394B2
- Authority
- JP
- Japan
- Prior art keywords
- liquid crystal
- crystal display
- manufacturing
- liquid
- spraying
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000004973 liquid crystal related substance Substances 0.000 title claims description 42
- 238000000034 method Methods 0.000 title claims description 26
- 238000004519 manufacturing process Methods 0.000 title claims description 25
- 239000011324 bead Substances 0.000 claims description 64
- 239000000853 adhesive Substances 0.000 claims description 62
- 230000001070 adhesive effect Effects 0.000 claims description 62
- 239000006185 dispersion Substances 0.000 claims description 53
- 239000000758 substrate Substances 0.000 claims description 52
- 239000007788 liquid Substances 0.000 claims description 47
- 238000005507 spraying Methods 0.000 claims description 33
- 239000007921 spray Substances 0.000 claims description 30
- 239000010419 fine particle Substances 0.000 claims description 24
- 238000003756 stirring Methods 0.000 claims description 17
- 125000006850 spacer group Chemical group 0.000 claims description 14
- 239000012530 fluid Substances 0.000 claims description 12
- 230000001133 acceleration Effects 0.000 description 14
- 239000005262 ferroelectric liquid crystals (FLCs) Substances 0.000 description 11
- 239000002245 particle Substances 0.000 description 10
- 230000007423 decrease Effects 0.000 description 9
- 230000002776 aggregation Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 239000003566 sealing material Substances 0.000 description 4
- 239000004809 Teflon Substances 0.000 description 3
- 229920006362 Teflon® Polymers 0.000 description 3
- 238000004220 aggregation Methods 0.000 description 3
- 230000002950 deficient Effects 0.000 description 3
- 239000002612 dispersion medium Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000004990 Smectic liquid crystal Substances 0.000 description 2
- 238000005054 agglomeration Methods 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 230000010355 oscillation Effects 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- 230000002265 prevention Effects 0.000 description 2
- 238000007639 printing Methods 0.000 description 2
- 238000007650 screen-printing Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- AJDIZQLSFPQPEY-UHFFFAOYSA-N 1,1,2-Trichlorotrifluoroethane Chemical compound FC(F)(Cl)C(F)(Cl)Cl AJDIZQLSFPQPEY-UHFFFAOYSA-N 0.000 description 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- CZPWVGJYEJSRLH-UHFFFAOYSA-N Pyrimidine Chemical compound C1=CN=CN=C1 CZPWVGJYEJSRLH-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 230000004931 aggregating effect Effects 0.000 description 1
- 238000013019 agitation Methods 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- KYKAJFCTULSVSH-UHFFFAOYSA-N chloro(fluoro)methane Chemical compound F[C]Cl KYKAJFCTULSVSH-UHFFFAOYSA-N 0.000 description 1
- 230000003098 cholesteric effect Effects 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 229920006332 epoxy adhesive Polymers 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 239000003365 glass fiber Substances 0.000 description 1
- 238000010348 incorporation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 239000012798 spherical particle Substances 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000004506 ultrasonic cleaning Methods 0.000 description 1
Landscapes
- Liquid Crystal (AREA)
Description
【0001】[0001]
【産業上の利用分野】液晶表示素子、特に強誘電性液晶
表示素子の製造方法及び製造装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and an apparatus for manufacturing a liquid crystal display device, in particular, a ferroelectric liquid crystal display device.
【0002】[0002]
【従来の技術】一般に液晶表示素子の基板間隔(以下セ
ル厚という)を保持する為には、スピンコート法,スプ
レー散布法等を用い、ガラスファイバー,アルミナビー
ズ,プラスチックビーズ,シリカビーズ等のスペーサー
を基板上に存在せしめている。2. Description of the Related Art In general, in order to maintain the distance between substrates (hereinafter referred to as cell thickness) of a liquid crystal display element, a spacer such as glass fiber, alumina beads, plastic beads, silica beads, etc. is used by using a spin coating method, a spraying method or the like. Is present on the substrate.
【0003】一方、近年液晶表示素子の大面積化に対す
る要求は高く、セル厚の均一性が重要視される中で、均
一なセル厚を実現させる為、スペーサーと同様の方法を
用いて、例えばエポキシ樹脂からなる球状粒子接着剤の
様な接着剤ビーズを基板上に存在せしめている。On the other hand, in recent years, there has been a high demand for an increase in the area of a liquid crystal display element, and the importance of uniformity of the cell thickness has been emphasized. In order to achieve a uniform cell thickness, for example, a method similar to that of a spacer is used. An adhesive bead such as a spherical particle adhesive made of an epoxy resin is present on the substrate.
【0004】上記方法の中で、量産性及び大型の基板に
対する難易度の面からスプレー散布法が、幅広く行なわ
れてきた。このスプレー散布法とは、スペーサーもしく
は接着剤ビーズの微粒子をアルコール,フロン等の揮発
性分散媒に、ある割合で混合した揮発性分散液を固定し
たスプレーを用いて、基板上に噴霧し、その後、揮発性
分散媒が蒸発する事により、スペーサー,接着剤ビーズ
のみを基板上に存在せしめる方法である。Among the above methods, the spraying method has been widely used in terms of mass productivity and difficulty for large substrates. This spraying method is to spray a fine particle of spacers or adhesive beads in a volatile dispersion medium such as alcohol or chlorofluorocarbon on a substrate using a spray in which a volatile dispersion is fixed at a certain ratio, and then sprayed onto the substrate. In this method, only the spacer and the adhesive bead are present on the substrate by evaporating the volatile dispersion medium.
【0005】また上記微粒子の散布工程は液の取り込み
がサクション方式である二流体スプレーノズルにマスフ
ローコントローラーを介してN2 ガスを定量供給し、
定位置に設置した容器から微粒子を分散した揮発性分散
液を吸い上げ、噴霧・分散配設する方法が多くとられて
いる。In the fine particle spraying step, a fixed amount of N2 gas is supplied via a mass flow controller to a two-fluid spray nozzle in which the liquid is taken in by a suction method.
Many methods have been adopted in which a volatile dispersion liquid in which fine particles are dispersed is sucked up from a container installed at a fixed position, and sprayed and dispersed.
【0006】また上記スプレー散布法では分散液中の粒
子濃度を均一に保つため撹拌が必要となり、この撹拌に
はスターラー撹拌、若しくは超音波洗浄槽を用いた超音
波撹拌を散布装置に装備させていた。In the above-mentioned spraying method, stirring is required to keep the particle concentration in the dispersion uniform, and the stirring device is equipped with a stirrer stirring or an ultrasonic stirring using an ultrasonic cleaning tank in the spraying apparatus. Was.
【0007】[0007]
【発明が解決しようとする課題】しかしながら、上記従
来のスプレー散布法では、スプレーのノズルが固定され
ているために、散布領域が、スプレーノズル先端から噴
霧されたスペーサーもしくは接着剤ビーズにより形成さ
れる円錐内に限定されることから、大型の基板に散布す
る場合、スプレーノズルの位置を基板から遠ざける必要
があった。このような方法による欠点として、ノズルと
基板との距離が大きいため、粒子の付着効率が著しく劣
り、スペーサーもしくは接着剤ビーズを大量に消費し、
散布に要する時間も長くならざるを得ないということが
あった。さらに、強誘電性液晶表示素子に用いるスペー
サーは、1〜2μm程度の微粒子であるため、基板から
スプレーノズルが離れると、落下に要する時間が無視で
きなくなり、生産性を落とす大きな要因となっていた。
さらに上記散布装置は、先に述べたように、噴霧される
領域が円形となるため、噴霧すべき基板の大きさに対
し、より広い領域に噴霧する必要があり、スペース的に
小型化が難しいという欠点があった。However, in the above conventional spraying method, since the spray nozzle is fixed, the spray area is formed by spacers or adhesive beads sprayed from the tip of the spray nozzle. When spraying on a large substrate, it is necessary to keep the position of the spray nozzle away from the substrate because it is limited within the cone. As a disadvantage of such a method, the distance between the nozzle and the substrate is large, the adhesion efficiency of the particles is remarkably inferior, a large amount of spacers or adhesive beads are consumed,
The time required for spraying had to be long. Furthermore, since the spacer used in the ferroelectric liquid crystal display element is a fine particle of about 1 to 2 μm, if the spray nozzle is separated from the substrate, the time required for dropping cannot be ignored, which has been a major factor in reducing productivity. .
Furthermore, as described above, the spraying device has a circular area to be sprayed, and therefore, it is necessary to spray a wider area with respect to the size of the substrate to be sprayed, and it is difficult to reduce the size in terms of space. There was a disadvantage.
【0008】また、液晶表示素子の剛性向上を目的に、
接着剤ビーズを使用する強誘電性液晶表示素子の場合、
液晶物質以外の上記接着剤ビーズ等の微粒子の混入によ
る液晶表示素子の表示品位の低下防止の為、上記微粒子
の配設密度に規格値を設け、ある許容幅をもって管理し
なければならない。In order to improve the rigidity of the liquid crystal display element,
For ferroelectric liquid crystal display devices using adhesive beads,
In order to prevent the display quality of the liquid crystal display element from deteriorating due to the incorporation of fine particles such as the above-mentioned adhesive beads other than the liquid crystal substance, it is necessary to set a standard value for the arrangement density of the fine particles and manage them with a certain allowable width.
【0009】しかしながら、先述の液の取り込みがサク
ション方式である二流体スプレーノズルを用いた散布工
程では、分散液の噴霧・消費に伴い、容器内の液面の高
さの低下、スプレーノズルが噴霧する微粒子を分散させ
た分散液の量の減少、ひいては基板上に分散配設する微
粒子の密度の低下を招き、上記微粒子の配設密度の規格
値を下回るという欠点があった。However, in the above-described spraying process using a two-fluid spray nozzle in which the liquid is taken in by the suction method, the height of the liquid level in the container is reduced due to the spraying and consumption of the dispersion, and the spray nozzle is sprayed. However, there is a disadvantage in that the amount of the dispersion liquid in which the fine particles are dispersed is reduced, and the density of the fine particles dispersed and disposed on the substrate is reduced, and the density of the fine particles is lower than the standard value.
【0010】またスプレー散布法において、分散液の撹
拌にスターラー撹拌、若しくは超音波撹拌を用いた場合
には次のような欠点があった。 (1)スターラー撹拌を用いる場合 テフロン被覆の撹拌子と接着剤ビーズ、接着剤ビーズと
容器内壁面との摩擦により、接着剤ビーズは凝集し、大
きな固まりとなってしまう。このため、基板上に接着剤
ビーズを配設し、2枚の基板を貼合わせる際、凝集接着
剤ビーズによる基板間隔不良を起こす。 (2)超音波撹拌を行う場合 超音波による高周波振動(20〜50KHz)で、接着
剤ビーズ同志、及び接着剤と容器内壁面の衝突、摩擦が
生じ、接着剤ビーズが凝集する。この場合上記(1)ほ
ど凝集粒子は大きくならないが、もともと液自体の流動
が大きくならない撹拌方法であるため、接着剤ビーズが
静電気で容器内壁面に引き寄せられ、その結果分散液中
に実際に存在する粒子の濃度は低下し、基板面内、及び
基板ごとでの接着剤ビーズ配設密度に大きな差が出てし
まい、安定性のないものとなってしまう。[0010] Further, in the case of using the stirrer stirring or the ultrasonic stirring for stirring the dispersion liquid in the spraying method, there are the following disadvantages. (1) When Stirrer Stirring is Used The friction between the stirrer coated with Teflon and the adhesive beads, and the friction between the adhesive beads and the inner wall surface of the container cause the adhesive beads to aggregate and form a large mass. For this reason, when the adhesive beads are disposed on the substrate and the two substrates are bonded to each other, the gap between the substrates is caused by the cohesive adhesive beads. (2) In the case of performing ultrasonic stirring The high frequency vibration (20 to 50 KHz) of the ultrasonic waves causes the adhesive beads to collide with each other, the adhesive and the inner wall surface of the container, and the friction occurs, and the adhesive beads are aggregated. In this case, the agglomerated particles do not become as large as in the above (1), but since the flow of the liquid itself is not originally large, the adhesive beads are attracted to the inner wall surface of the container by static electricity, and as a result, the adhesive beads actually exist in the dispersion. The concentration of the particles is reduced, and a large difference occurs in the adhesive bead arrangement density within the substrate surface and between the substrates, resulting in instability.
【0011】さらに長時間超音波をかけ続ける事によ
り、揮発性分散液の温度が上昇し、その蒸発量が増加す
るため、分散液中の接着剤ビーズ濃度が次第に大きくな
り、基板上に配設される接着剤ビーズの密度も大きくな
ってしまう。[0011] By continuing to apply ultrasonic waves for a long period of time, the temperature of the volatile dispersion increases, and the amount of evaporation increases, so that the concentration of the adhesive beads in the dispersion gradually increases, and the dispersion is disposed on the substrate. The density of the adhesive beads to be used also increases.
【0012】本発明の目的は上記従来例の問題点に鑑
み、表示品位,耐衝撃性等に優れた液晶表示素子の製造
方法及び製造装置を提供することにある。An object of the present invention is to provide a method and an apparatus for manufacturing a liquid crystal display element having excellent display quality and impact resistance in view of the above-mentioned problems of the prior art.
【0013】[0013]
【課題を解決するための手段及び作用】上記目的は以下
に述べる本発明の構成により達成される。The above object is achieved by the present invention described below.
【0014】即ち本発明の第1は、対向する2枚の基板
間に液晶を挟持してなる液晶表示素子の製造方法におい
て、該基板の間隔を保持するスペーサー及びまたは該基
板を点接着する接着剤ビーズを液の取り込みがサクショ
ン方式である二流体スプレーノズルで散布して該基板上
に配設する微粒子散布工程の際に、例えば図2に示され
るように、該スペーサー及びまたは該接着剤ビーズを分
散させた揮発性分散液60の液面の高さと、スプレー散
布用ノズル61の先端の高さの相対値(図中ΔH)が一
定あるいは略一定になるように制御することを特徴とす
る液晶表示素子の製造方法であり、さらには上記の微粒
子散布工程を行う装置において、例えば揮発性分散液6
0の液面を検知する光電センサー、及び揮発性分散液6
0を蓄えた容器62を上下方向に移動させる昇降機の駆
動部64,制御部69からなる揮発性分散液60の液面
の高さを制御する手段を有することを特徴とする液晶表
示素子の製造装置である。 That is, a first aspect of the present invention is a method for manufacturing a liquid crystal display element in which a liquid crystal is sandwiched between two opposing substrates, wherein a spacer for maintaining a distance between the substrates and / or an adhesive for spot bonding the substrates are provided. In the fine particle spraying step of spraying the agent beads with a two-fluid spray nozzle in which the liquid is taken up by a suction method and disposing them on the substrate, for example, as shown in FIG. 2 , the spacer and / or the adhesive beads Is controlled so that the relative value (ΔH in the figure) of the height of the liquid level of the volatile dispersion liquid 60 in which is dispersed and the height of the tip of the spraying nozzle 61 is constant or substantially constant. In a method for manufacturing a liquid crystal display element, further, in a device for performing the above-described fine particle scattering step, for example, the volatile dispersion 6
Photoelectric sensor for detecting liquid level 0, and volatile dispersion 6
A liquid crystal display element having a means for controlling the level of the volatile dispersion 60, comprising a drive unit 64 and a control unit 69 of an elevator for moving the container 62 storing 0 in the vertical direction. Device.
【0015】上記本発明の第1によれば、揮発性分散液
の消費に伴う微粒子の配設密度の低下を防止し、特に微
粒子が接着剤ビーズの場合、接着剤ビーズの配設密度の
低下に伴う、耐衝撃性の低下がない液晶表示素子の製造
が可能である。According to the first aspect of the present invention, a decrease in the arrangement density of the fine particles due to the consumption of the volatile dispersion is prevented, and particularly when the fine particles are adhesive beads, the decrease in the arrangement density of the adhesive beads is prevented. As a result, it is possible to manufacture a liquid crystal display element without a drop in impact resistance.
【0016】以下、図面を用いて本発明第1を具体的に
説明する。Hereinafter, the first embodiment of the present invention will be specifically described with reference to the drawings.
【0017】図2は、本発明第1の液晶表示素子の製造
装置の一例を模式的に示した図である。[0017] FIG. 2 is a diagram schematically showing an example of a manufacturing apparatus of the present invention the first liquid crystal display device.
【0018】図中、61は液の取り込みがサクション方
式である二流体スプレーノズル、66は微粒子(例えば
スペーサー材又は接着剤ビーズ)、62は微粒子66を
分散した揮発性分散液60(例えばIPA)を蓄える容
器、63は容器62内の液面を検出する手段であるとこ
ろの、高さが固定された光電センサー、64は容器62
内の液面を一定に保つ手段であるところの昇降機の駆動
部、65は微粒子66を分散配設する基板、67は二流
体スプレーノズル61にN2ガスを送る配管、68は二
流体スプレーノズル61に揮発性分散液60を送る配
管、69は昇降機の制御部、70は二流体スプレーノズ
ル61にN2ガスを定量供給するマスフローコントロー
ラーである。In the figure, reference numeral 61 denotes a two-fluid spray nozzle in which the liquid is taken in by a suction method, 66 denotes fine particles (for example, a spacer material or an adhesive bead), and 62 denotes a volatile dispersion liquid 60 in which the fine particles 66 are dispersed (for example, IPA). 63 is a means for detecting the liquid level in the container 62, a photoelectric sensor having a fixed height, and 64 is a container
A driving unit of an elevator, which is a means for keeping the liquid level in the inside constant; 65, a substrate on which fine particles 66 are dispersed and arranged; 67, a pipe for sending N 2 gas to a two-fluid spray nozzle 61; A pipe for sending the volatile dispersion 60 to 61, a control unit of an elevator, 69 is a mass flow controller for supplying a fixed amount of N 2 gas to the two-fluid spray nozzle 61.
【0019】上記装置において、二流体スプレーノズル
61はN2ガスの供給により生じた負圧で容器62内の
揮発性分散液60を取り込み、基板65に向って噴霧す
る。液の噴霧に伴って、容器62内の液面はしだいに低
下するが、常に光電センサー63により容器62内の液
面を検出し、昇降機で容器62内の液面の高さを補正制
御することにより、二流体スプレーノズル61の先端の
高さ(H2)と前記分散液の液面の高さ(H1)との差Δ
H=H2−H1が±1/2dの精度で一定となる(通常は
H2>H1であり、またdは一対の光電センサー間隔であ
る)。したがって容器62内の液面が低下しても、二流
体スプレーノズル61が吸い上げる揮発性分散液60の
量が減少せず、基板65上の微粒子66の配設密度は低
下しない。In the above apparatus, the two-fluid spray nozzle 61 takes in the volatile dispersion 60 in the container 62 at a negative pressure generated by the supply of the N 2 gas and sprays it toward the substrate 65. With the spraying of the liquid, the liquid level in the container 62 gradually decreases. However, the liquid level in the container 62 is always detected by the photoelectric sensor 63, and the height of the liquid level in the container 62 is corrected and controlled by the elevator. Thus, the difference Δ between the height (H 2 ) of the tip of the two-fluid spray nozzle 61 and the height (H 1 ) of the liquid surface of the dispersion liquid is obtained.
H = H 2 −H 1 is constant with an accuracy of ± 1 / d (usually, H 2 > H 1 , and d is the distance between a pair of photoelectric sensors). Therefore, even if the liquid level in the container 62 decreases, the amount of the volatile dispersion liquid 60 sucked up by the two-fluid spray nozzle 61 does not decrease, and the arrangement density of the fine particles 66 on the substrate 65 does not decrease.
【0020】上記本発明第1は上記構成に限定されるも
のではなく、例えば揮発性分散液60の液面を検出する
手段としては、上記の光電センサーの他にフロートセン
サー、超音波センサー等が適用でき、また、容器62を
上下させる手段としては、ボールねじやナット等が考え
られる。 The first aspect of the present invention is not limited to the above configuration. For example, as a means for detecting the liquid level of the volatile dispersion liquid 60, a float sensor, an ultrasonic sensor, or the like may be used in addition to the photoelectric sensor. A ball screw, a nut, or the like can be used as a means for moving the container 62 up and down.
【0021】さらに、図2に示した装置では、揮発性分
散液60を蓄えた容器62を上下移動させることによっ
て、揮発性分散液60の液面と、スプレーノズル61の
先端の高さを相対的に一定に保っているが、消費された
揮発性分散液60に相当する量を、他の供給系から容器
62内に供給することにより、同様の作用を行うもので
あっても良い。Further, in the apparatus shown in FIG. 2 , by moving the container 62 storing the volatile dispersion 60 up and down, the liquid level of the volatile dispersion 60 and the height of the tip of the spray nozzle 61 are relatively adjusted. However, the same operation may be performed by supplying an amount corresponding to the consumed volatile dispersion 60 into the container 62 from another supply system.
【0022】次に本発明の第2について述べる。Next, the second embodiment of the present invention will be described.
【0023】本発明の第2は、対向する2枚の基板間に
液晶を挟持してなる液晶表示素子の製造方法において、
該基板を点接着する接着剤ビーズをスプレー散布法によ
り該基板上に配設する際に、少なくとも該接着剤ビーズ
を分散させた揮発性分散液を、低周波振動にて撹拌する
ことを特徴とする液晶表示素子の製造方法であり、さら
には、上記製造方法に用いられ、上記揮発性分散液を低
周波振動にて撹拌する手段を有することを特徴とする液
晶表示素子の製造装置である。上記本発明第2によれ
ば、スプレー散布装置に、例えば10〜50Hzの低周
波振動撹拌システムを装着させ、接着剤ビーズ分散液を
撹拌することにより、接着剤ビーズを凝集させる事無
く、かつ分散液中の粒子濃度を均一に保つことが可能と
なる。According to a second aspect of the present invention, there is provided a method for manufacturing a liquid crystal display device comprising a liquid crystal sandwiched between two opposing substrates.
When disposing the adhesive beads for point-adhering the substrate on the substrate by a spraying method, at least a volatile dispersion liquid in which the adhesive beads are dispersed is stirred by low-frequency vibration. The present invention further provides an apparatus for manufacturing a liquid crystal display element, which comprises means for stirring the volatile dispersion by low-frequency vibration. According to the second aspect of the present invention, a low frequency vibration stirring system of, for example, 10 to 50 Hz is mounted on the spraying device, and the adhesive bead dispersion liquid is stirred without aggregating the adhesive beads. It is possible to keep the particle concentration in the liquid uniform.
【0024】また、液内部に撹拌翼、撹拌子等を入れる
必要もなく、分散液の無塵性にも優れている。Further, there is no need to insert a stirring blade, a stirrer or the like into the liquid, and the dispersion is excellent in dust-freeness.
【0025】以下、図面を用いて本発明第2を具体的に
説明する。Hereinafter, the second embodiment of the present invention will be specifically described with reference to the drawings.
【0026】図10は、本発明第2の特徴を最もよく表
す低周波振動撹拌システムの図面であり、同図において
101は揮発性分散媒に接着剤ビーズを分散させた揮発
性分散液、102は分散液101を噴霧するスプレーノ
ズルに接続されたテフロンチューブ、104は容器10
3に振動を与える振動発生機(IMV株式会社製)、1
05はその発振増幅器である。さらに容器103上部に
は、振動の加速度を検知する加速度ピックアップ106
が設置してあり、振動を制御する自動振動制御器107
に接続されている。FIG . 10 is a drawing of a low frequency vibration stirring system that best illustrates the second feature of the present invention . In FIG . 10 , reference numeral 101 denotes a volatile dispersion obtained by dispersing adhesive beads in a volatile dispersion medium; Is a Teflon tube connected to a spray nozzle for spraying the dispersion liquid 101;
Vibration generator (manufactured by IMV Co., Ltd.) that gives vibration to 3, 1
05 is the oscillation amplifier. Further, an acceleration pickup 106 for detecting acceleration of vibration is provided above the container 103.
Is installed, and an automatic vibration controller 107 for controlling vibration
It is connected to the.
【0027】自動振動制御器107は振動の振動数、変
位量、加速度を制御でき、例えば振動数を低周波(10
〜50Hz)とし、加速度を接着剤ビーズ分散液101
の粒子濃度を均一に保つに足る値(0.2〜1.5G)
とする。それ以上の加速度値にすると、分散液101の
はね上がりを生じ、その液滴が容器内壁面上部、容器蓋
等に付着し、乾燥した際、接着剤ビーズの凝集の原因と
なるため好ましくない。The automatic vibration controller 107 can control the vibration frequency, displacement, and acceleration.
5050 Hz) and the acceleration was set to the adhesive bead dispersion liquid 101.
(0.2-1.5G) enough to keep the particle concentration uniform
And If the acceleration value is set to a value higher than that, the dispersion liquid 101 splashes, and the droplets adhere to the upper part of the inner wall surface of the container, the lid of the container, etc., and when dried, it is not preferable because it causes the aggregation of adhesive beads.
【0028】噴霧を継続していくと、分散液量が減少
し、重量が軽くなるため、振動の加速度は大きくなる
が、ここでは容器103上部に設置された加速度ピック
アップ106により加速度を検知し、自動振動制御器1
07にフィードバックしているため、液重量にかかわら
ず、加速度は常時一定に保たれる。When the spraying is continued, the amount of the dispersion liquid is reduced and the weight is reduced, so that the acceleration of the vibration is increased. In this case, the acceleration is detected by the acceleration pickup 106 installed on the upper portion of the container 103, and the acceleration is detected. Automatic vibration controller 1
Since the feedback is performed at 07, the acceleration is always kept constant regardless of the liquid weight.
【0029】このようにして、接着剤ビーズ分散液は一
定の低周波数、加速度の振動で加振、撹拌される。In this way, the adhesive bead dispersion liquid is vibrated and agitated with a constant low frequency and acceleration vibration.
【0030】本発明第2は上記構成に限定されるもので
はなく、例えば、消費された揮発性分散液101に相当
する量を、他の供給系から容器103に供給することに
より、容器103内の揮発性分散液101の量を一定に
保ち、振動の加速度を一定に保つものであっても良い。 The second aspect of the present invention is not limited to the above configuration. For example, by supplying an amount corresponding to the consumed volatile dispersion liquid 101 to the container 103 from another supply system, The amount of the volatile dispersion liquid 101 may be kept constant, and the acceleration of vibration may be kept constant.
【0031】前記本発明の液晶表示素子の製造方法にお
いて、前記基板間に挟持される液晶として強誘電性液晶
を好ましく用いることができる。In the production method of the liquid crystal display device of the present invention, a ferroelectric liquid crystal as a liquid crystal sandwiched between the substrate
Can be preferably used .
【0032】本発明において用いられる強誘電性液晶と
してはカイラルスメクチック相状態のものを用いること
ができ、具体的には、カイラルスメクチックC相(Sm
C*)、H相(SmH*)、I相(SmI*)、K相(S
mK*)やG相(SmG*)の液晶を用いることが出来
る。特に好ましい強誘電性液晶としては、これにより高
温側でコレステリック相を示すものを用いることがで
き、例えばピリミジン系混合液晶を用いることが出来
る。As the ferroelectric liquid crystal used in the present invention , a liquid crystal having a chiral smectic phase can be used. Specifically, a chiral smectic C phase (Sm
C * ), H phase (SmH * ), I phase (SmI * ), K phase (Sm
mK * ) or G-phase (SmG * ) liquid crystal can be used. As a particularly preferred ferroelectric liquid crystal, a liquid crystal exhibiting a cholesteric phase on the high temperature side can be used. For example, a pyrimidine-based mixed liquid crystal can be used.
【0033】図1は、本発明の製造方法により作製され
た、強誘電性液晶表示素子の一例として、その断面図を
示したものである。31,31’は、ガラス板,プラス
チック板などからなる一対の基板、32は例えば帯状パ
ターンなどの所定パターンで形成された透明電極群(例
えば、マトリックス電極構造のうちの走査電圧印加用電
極群)、32’は32と交差させた方向の透明電極群
(例えば、マトリックス電極構造のうちの信号電圧印加
用電極群)、33,33’は、スパッタリング法等によ
り形成された絶縁膜、34,34’は、例えば印刷法で
形成された配向膜、35は一対の基板31,31’をシ
ーリングする為のシール材、36はセル厚を保持する為
のスペーサー、37は一対の基板31,31’を点接着
する為の接着剤ビーズ、38は一対の基板31,31’
間に挟持された強誘電性液晶である。また30はこれら
のセル構造体を示している。FIG . 1 is a sectional view showing an example of a ferroelectric liquid crystal display device manufactured by the manufacturing method of the present invention . Reference numerals 31 and 31 'denote a pair of substrates made of a glass plate, a plastic plate, or the like, and 32 denotes a transparent electrode group formed in a predetermined pattern such as a strip pattern (for example, a scanning voltage application electrode group in a matrix electrode structure). , 32 ′ are transparent electrode groups in the direction crossing 32 (for example, a signal voltage application electrode group in a matrix electrode structure), 33, 33 ′ are insulating films formed by sputtering or the like, and 34, 34. 'Is an alignment film formed by, for example, a printing method, 35 is a sealing material for sealing the pair of substrates 31, 31', 36 is a spacer for maintaining the cell thickness, and 37 is a pair of substrates 31, 31 '. Is an adhesive bead for point bonding, and 38 is a pair of substrates 31, 31 '.
It is a ferroelectric liquid crystal sandwiched between. Numeral 30 indicates these cell structures.
【0034】[0034]
【実施例】次に実施例を用いて本発明を説明する。Next, the present invention will be described with reference to examples.
【0035】実施例1 本実施例は本発明第1に関連し、図1に示したような液
晶表示素子の製造過程における微粒子散布工程を図2に
示したような装置を用いて行なったものである。 Embodiment 1 This embodiment relates to the first embodiment of the present invention, in which a fine particle scattering step in the process of manufacturing a liquid crystal display element as shown in FIG. 1 is performed using an apparatus as shown in FIG. It is.
【0036】まず、厚さ1.1mmの2枚のガラス基板
31,31’上にITOのストライプ状電極32,3
2’を形成し、その上にスパッタリング法にてTa2O5
膜33,33’を1000Åの厚さで形成した後、LQ
1802(日立化成社製,ポリイミド系配向膜34,3
4’)をフレキソ印刷法によって塗布し、270℃の温
度で1時間焼成し、300Åの厚さに形成した後、ラビ
ング処理を行なった。以上のようにして得られた第1の
基板31にスクリーン印刷法にてシール材35(三井東
圧化学社製,商品名ストラクトボンドXN−21−F)
を印刷し、この基板に対して図2に示したような装置を
用いて微粒子散布工程を行なった。 First, ITO stripe electrodes 32, 3 were formed on two glass substrates 31, 31 'each having a thickness of 1.1 mm.
2 ′ is formed thereon, and Ta 2 O 5 is formed thereon by sputtering.
After forming the films 33 and 33 'to a thickness of 1000 °, the LQ
1802 (Polyimide alignment film 34, 3 manufactured by Hitachi Chemical Co., Ltd.)
4 ′) was applied by a flexographic printing method, baked at a temperature of 270 ° C. for 1 hour, formed into a thickness of 300 °, and then subjected to a rubbing treatment. The sealing material 35 (manufactured by Mitsui Toatsu Chemicals Co., Ltd., trade name: Struct Bond XN-21-F) is formed on the first substrate 31 obtained as described above by screen printing.
Is printed, and an apparatus as shown in FIG.
To perform a fine particle scattering step.
【0037】具体的には接着剤ビーズの配設密度の許容
値を耐衝撃性の付与と表示品位の低下防止の観点から8
0±5個/mm2と定めた。そして、従来はスプレーノ
ズル61の先端の高さと揮発性分散液60の液面の高さ
の相対値ΔHの変動幅を制御せずに散布していたため、
初期にΔH=5mmと設定し、接着剤ビーズを20回散
布すると図3,4,5に示すように散布回数が増すに伴
ってΔHの増加、1回当たりの分散液の消費量の減少、
接着剤ビーズの配設密度の減少が起きていた。ここで接
着剤ビーズ配設密度とパネルの耐衝撃性値は図6に示さ
れるような関係があるが、前記の接着剤ビーズを散布し
た20のパネルの耐衝撃性値を調べてみると、19回目
と20回目に散布したパネルは耐衝撃性規格値を下回り
不良品であった。一方、図2に示す系でΔHを5±4m
mに制御し、接着剤ビーズを20回散布したところ、図
7,8,9のごとく散布回数の増加に伴う前記の現象が
起きず、全20パネル中、耐衝撃性規格値を下回る不良
品は1つも発生しなかった。Specifically, the allowable value of the disposition density of the adhesive beads is set at 8 from the viewpoint of imparting impact resistance and preventing deterioration of display quality.
It was determined as 0 ± 5 / mm 2 . Conventionally, the spraying was performed without controlling the fluctuation width of the relative value ΔH between the height of the tip of the spray nozzle 61 and the liquid level of the volatile dispersion liquid 60,
When ΔH = 5 mm is initially set and the adhesive bead is sprayed 20 times, as shown in FIGS. 3 , 4 , and 5 , as the number of sprays increases, ΔH increases, the consumption of the dispersion per one time decreases,
There was a reduction in the density of the adhesive beads. Here, the density of the adhesive beads and the impact resistance value of the panel have a relationship as shown in FIG. 6 , but when examining the impact resistance value of the 20 panels on which the adhesive beads were sprayed, The panels sprayed at the 19th and 20th times were below the impact resistance standard value and were defective. On the other hand, in the system shown in FIG.
m and the adhesive beads were sprayed 20 times .
As described in 7 , 8 , and 9 , the above-mentioned phenomenon accompanying the increase in the number of times of spraying did not occur, and none of the 20 panels had a defective product having a value lower than the standard value of impact resistance.
【0038】実施例2 本実施例は本発明第2に関連し、微粒子散布工程時に図
10に示した装置を用いて揮発性分散液を低周波振動に
て撹拌しながら基板上に散布して液晶表示素子を作製し
たものである。 Example 2 This example relates to the second aspect of the present invention, and shows a diagram at the time of the fine particle scattering step .
The liquid crystal display element was produced by using the apparatus shown in FIG. 10 and spraying the volatile dispersion on a substrate while stirring with low frequency vibration.
【0039】図10の散布装置を用い、0.3gのエポ
キシ系接着剤ビーズ(東レ株式会社製、商品名“トレパ
ール”、直径5.5μm)を500ccのフロン113
に分散させた分散液101を、スクリーン印刷法によっ
てシール材が形成された第1の基板に散布した。さらに
すでに直径2μmのSiO2粒子を配設してある第2の
基板と前記第1の基板を貼合わせ圧着した。以上のセル
を46組作成し、接着剤ビーズのセルごとの平均配設密
度の変化を5組ごとに測定した結果を図11に示す。な
おこの46組のセルの中に接着剤ビーズの凝集によって
起きる基板間隔不良は見られなかった。 10 g of epoxy adhesive beads (trade name: “Trepearl”, manufactured by Toray Industries, Ltd., 5.5 μm in diameter: 5.5 μm) were dispersed in 500 cc of Freon 113 using the spraying apparatus shown in FIG .
Was dispersed on the first substrate on which the sealing material was formed by a screen printing method. Further, the second substrate, on which SiO 2 particles having a diameter of 2 μm had already been disposed, and the first substrate were bonded and pressed. FIG. 11 shows the results obtained by preparing 46 sets of the above cells and measuring the change in the average arrangement density of the adhesive beads for each cell for every 5 sets. In addition, in the 46 sets of cells, there was no substrate spacing defect caused by the aggregation of the adhesive beads.
【0040】また比較例として、分散液101を超音波
撹拌によって撹拌し、上記実施例と同様の条件で作成し
た40組のセルの接着剤ビーズの密度変化を5組ごとに
測定した結果を図12に示す。図中×印は接着剤ビーズ
の凝集によって起きる基板間隔不良の生じたセルであ
り、×印の数は不良箇所の数を表す。As a comparative example, the dispersion 101 was stirred by ultrasonic stirring, and the density change of the adhesive beads in 40 sets of cells prepared under the same conditions as in the above example was measured for every 5 sets . FIG . In the figure, the crosses indicate cells in which the substrate spacing failure occurred due to the aggregation of the adhesive beads, and the number of the crosses indicates the number of defective portions.
【0041】本発明第2の図10に示した装置によって
接着剤ビーズ分散液は、その液量にかかわらず一定の低
周波数、加速度で加振され、粒子の凝集を起こす事無
く、均一な粒子濃度を保つ事ができるため、配設密度変
化の小さい液晶表示素子を作製することができた。The adhesive bead dispersion by the apparatus shown in the present invention the second 10, the liquid volume constant in the low frequency regardless, is vibrated at an acceleration, without causing agglomeration of particles, uniform grain Since the concentration can be maintained, a liquid crystal display device having a small change in the arrangement density can be manufactured.
【0042】[0042]
【発明の効果】以上説明したように、本発明では以下の
効果を有する。 (1)本発明第1の液晶表示素子の製造方法並びに製造
装置によれば、二流体スプレーノズルの先端の高さと揮
発性分散液の液面の高さとの差ΔHを常に一定あるいは
略一定に制御することにより、二流体スプレーノズルが
吸い上げ、1回当たりの散布に噴霧する揮発性分散液の
量が常に一定あるいは略一定になり、微粒子の配設密度
が散布回数の増加に伴って低下することがなく、特に強
誘電性液晶表示素子の場合、接着剤ビーズの配設密度の
低下による液晶表示素子の耐衝撃性の低下を防止でき
る。 (2)本発明第2の液晶表示素子の製造方法並びに製造
装置によれば、接着剤ビーズをスプレー散布法により基
板上に配設する際、揮発性分散液を低周波振動にて加
振、撹拌することにより、 (イ)接着剤ビーズの凝集防止 (ロ)接着剤ビーズの容器内壁面への付着に伴う液内粒
子濃度の変化防止 (ハ)分散液中の接着剤ビーズ粒子濃度を均一に保持が
可能であり、接着剤ビーズの密度変化が小さい素子を製
造できる。As described above, the present invention has the following effects. ( 1 ) According to the first method and apparatus for manufacturing a liquid crystal display element of the present invention, the difference ΔH between the height of the tip of the two-fluid spray nozzle and the level of the volatile dispersion is always or substantially constant. By controlling, the two-fluid spray nozzle sucks up and the amount of the volatile dispersion to be sprayed per spray is always or almost constant, and the disposition density of the fine particles decreases as the number of sprays increases. In particular, in the case of a ferroelectric liquid crystal display device, it is possible to prevent a decrease in the impact resistance of the liquid crystal display device due to a reduction in the arrangement density of the adhesive beads. ( 2 ) According to the second method and apparatus for manufacturing a liquid crystal display device of the present invention, when disposing the adhesive beads on the substrate by the spraying method, the volatile dispersion is vibrated by low-frequency vibration. By agitation, (a) prevention of agglomeration of the adhesive beads (b) prevention of change in the particle concentration in the liquid due to adhesion of the adhesive beads to the inner wall surface of the container (c) uniformity of the concentration of the adhesive bead particles in the dispersion liquid And an element having a small change in the density of the adhesive beads can be manufactured.
【図1】本発明により作製された強誘電性液晶表示素子
の一例を示した断面図である。FIG. 1 is a sectional view showing an example of a ferroelectric liquid crystal display device manufactured according to the present invention .
【図2】本発明第1の液晶表示素子の製造装置の一例を
模式的に示した図である。An example of FIG. 2 manufacturing apparatus of the present invention the first liquid crystal display element is a diagram schematically showing.
【図3】従来例における散布回数とΔHとの関係を表す
グラフである。FIG. 3 is a graph showing the relationship between the number of sprayings and ΔH in a conventional example.
【図4】従来例における散布回数と1回当たりの散布に
消費する分散液の量との関係を表すグラフである。FIG. 4 is a graph showing the relationship between the number of applications and the amount of dispersion consumed per application in a conventional example.
【図5】従来例における散布回数と接着剤ビーズ配設密
度との関係を表すグラフである。FIG. 5 is a graph showing the relationship between the number of sprays and the density of adhesive beads provided in a conventional example.
【図6】接着剤ビーズ配設密度とパネルの耐衝撃性値の
関係を表すグラフである。FIG. 6 is a graph showing a relationship between an adhesive bead disposition density and an impact resistance value of a panel.
【図7】本発明第1における散布回数とΔHとの関係を
表すグラフである。FIG. 7 is a graph showing the relationship between the number of sprayings and ΔH in the first embodiment of the present invention.
【図8】本発明第1における散布回数と1回当たりの散
布に消費する分散液の量との関係を表すグラフである。FIG. 8 is a graph showing the relationship between the number of applications and the amount of dispersion liquid consumed per application in the first embodiment of the present invention.
【図9】本発明第1における散布回数と接着剤ビーズ配
設密度との関係を表すグラフである。FIG. 9 is a graph showing the relationship between the number of times of spraying and the density of adhesive beads provided in the first embodiment of the present invention.
【図10】本発明第2の液晶表示素子の製造装置の一例
を模式的に示した図である。FIG. 10 is a diagram schematically showing an example of the second apparatus for manufacturing a liquid crystal display element of the present invention.
【図11】本発明第2により実施例2で作製した46組
のセルの接着剤ビーズの平均配設密度を表すグラフであ
る。FIG. 11 is a graph showing an average arrangement density of adhesive beads of 46 sets of cells manufactured in Example 2 according to the second embodiment of the present invention.
【図12】従来の方法により作製した40組のセルの接
着剤ビーズの平均配設密度を表すグラフである。FIG. 12 is a graph showing an average arrangement density of adhesive beads of 40 sets of cells manufactured by a conventional method.
30 セル構造体 31,31’ 基板 32,32’ 透明電極群 33,33’ 絶縁膜 34,34’ 配向膜 35 シール材 36 スペーサー 37 接着剤ビーズ 38 強誘電性液晶 60 揮発性分散液 61 スプレーノズル 62 容器 63 光電センサー 64 昇降機の駆動部 65 基板 66 微粒子 67,68 配管 69 昇降機の制御部 70 マスフローコントローラー 101 揮発性分散液 102 テフロンチューブ 103 容器 104 振動発生機 105 発振増幅器 106 加速度ピックアップ 107 自動振動制御器 Reference Signs List 30 Cell structure 31, 31 'Substrate 32, 32' Transparent electrode group 33, 33 'Insulating film 34, 34' Alignment film 35 Sealing material 36 Spacer 37 Adhesive bead 38 Ferroelectric liquid crystal 60 Volatile dispersion 61 Spray nozzle 62 Container 63 Photoelectric Sensor 64 Elevator Drive 65 Substrate 66 Fine Particle 67, 68 Pipe 69 Elevator Control 70 Mass Flow Controller 101 Volatile Dispersion 102 Teflon Tube 103 Container 104 Vibration Generator 105 Oscillation Amplifier 106 Acceleration Pickup 107 Automatic Vibration Control vessel
───────────────────────────────────────────────────── フロントページの続き (72)発明者 高橋 公夫 東京都大田区下丸子3丁目30番2号 キ ヤノン株式会社内 (56)参考文献 特開 昭64−76031(JP,A) 特開 昭59−143125(JP,A) 特開 平2−280124(JP,A) 特開 平4−313728(JP,A) (58)調査した分野(Int.Cl.7,DB名) G02F 1/1339 G02F 1/13 101 ────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Kimio Takahashi 3-30-2 Shimomaruko, Ota-ku, Tokyo Inside Canon Inc. (56) References JP-A-64-76031 (JP, A) JP-A-59 -143125 (JP, A) JP-A-2-280124 (JP, A) JP-A-4-313728 (JP, A) (58) Fields investigated (Int. Cl. 7 , DB name) G02F 1/1339 G02F 1/13 101
Claims (4)
なる液晶表示素子の製造方法において、該基板の間隔を
保持するスペーサー及びまたは該基板を点接着する接着
剤ビーズを液の取り込みがサクション方式である二流体
スプレーノズルで散布して該基板上に配設する微粒子散
布工程の際に、該スペーサー及びまたは該接着剤ビーズ
を分散させた揮発性分散液の液面の高さと、スプレー散
布用ノズル先端の高さが相対的に一定あるいは略一定に
なるように制御することを特徴とする液晶表示素子の製
造方法。In a method for manufacturing a liquid crystal display element comprising a liquid crystal sandwiched between two opposing substrates, a liquid crystal is taken in by a spacer for maintaining a distance between the substrates and / or an adhesive bead for point bonding the substrates. During the fine particle spraying step of spraying with a two-fluid spray nozzle that is a suction system and disposing on the substrate, the height of the volatile dispersion liquid in which the spacers and / or the adhesive beads are dispersed, A method for manufacturing a liquid crystal display element, wherein a height of a tip of a nozzle for spraying is controlled to be relatively constant or substantially constant.
法の前記微粒子散布工程を行う装置において、前記揮発
性分散液の液面の高さを制御する手段を有することを特
徴とする液晶表示素子の製造装置。2. A liquid crystal display device manufacturing method according to claim 1 , wherein said fine particle scattering step includes a means for controlling a liquid level of said volatile dispersion liquid. Display device manufacturing equipment.
なる液晶表示素子の製造方法において、該基板を点接着
する接着剤ビーズをスプレー散布法により該基板上に配
設する際に、少なくとも該接着剤ビーズを分散させた揮
発性分散液を、低周波振動にて撹拌することを特徴とす
る液晶表示素子の製造方法。3. A method of manufacturing a liquid crystal display device comprising a liquid crystal sandwiched between two opposing substrates, wherein an adhesive bead for point-adhering the substrates is provided on the substrates by a spraying method. And a method of manufacturing a liquid crystal display device, comprising stirring a volatile dispersion in which at least the adhesive beads are dispersed by low-frequency vibration.
法に用いられる液晶表示素子の製造装置であって、前記
揮発性分散液を低周波振動にて撹拌する手段を有するこ
とを特徴とする液晶表示素子の製造装置。4. An apparatus for manufacturing a liquid crystal display element used in the method for manufacturing a liquid crystal display element according to claim 3 , further comprising means for stirring the volatile dispersion by low frequency vibration. For manufacturing liquid crystal display elements.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP04148047A JP3079394B2 (en) | 1992-05-15 | 1992-05-15 | Method and apparatus for manufacturing liquid crystal display element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP04148047A JP3079394B2 (en) | 1992-05-15 | 1992-05-15 | Method and apparatus for manufacturing liquid crystal display element |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH05323250A JPH05323250A (en) | 1993-12-07 |
JP3079394B2 true JP3079394B2 (en) | 2000-08-21 |
Family
ID=15443959
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP04148047A Expired - Fee Related JP3079394B2 (en) | 1992-05-15 | 1992-05-15 | Method and apparatus for manufacturing liquid crystal display element |
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JP (1) | JP3079394B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108061670A (en) * | 2016-11-09 | 2018-05-22 | 郑州富铭环保科技有限公司 | One kind takes liquid detection device |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000206538A (en) * | 1998-11-09 | 2000-07-28 | Matsushita Electric Ind Co Ltd | Method and apparatus for manufacturing liquid crystal display element and liquid crystal display element |
KR100849099B1 (en) * | 2002-04-23 | 2008-07-30 | 엘지디스플레이 주식회사 | Spacer Diffuser |
US7141447B2 (en) * | 2004-10-07 | 2006-11-28 | Mks Instruments, Inc. | Method of forming a seal between a housing and a diaphragm of a capacitance sensor |
JP2008203619A (en) * | 2007-02-21 | 2008-09-04 | Citizen Holdings Co Ltd | Method for manufacturing liquid crystal display panel |
-
1992
- 1992-05-15 JP JP04148047A patent/JP3079394B2/en not_active Expired - Fee Related
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108061670A (en) * | 2016-11-09 | 2018-05-22 | 郑州富铭环保科技有限公司 | One kind takes liquid detection device |
Also Published As
Publication number | Publication date |
---|---|
JPH05323250A (en) | 1993-12-07 |
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